TWM273816U - Cooling device for target of particle beam irradiation - Google Patents

Cooling device for target of particle beam irradiation Download PDF

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Publication number
TWM273816U
TWM273816U TW94202662U TW94202662U TWM273816U TW M273816 U TWM273816 U TW M273816U TW 94202662 U TW94202662 U TW 94202662U TW 94202662 U TW94202662 U TW 94202662U TW M273816 U TWM273816 U TW M273816U
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Taiwan
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air
cooling
particle beam
water
cooling mechanism
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TW94202662U
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Chinese (zh)
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Guo-Chi Lan
Wu-Jr Lin
Tian-Shi Ren
Tian-Chang Jang
Di-An Hu
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Atomic Energy Council
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Priority to TW94202662U priority Critical patent/TWM273816U/en
Publication of TWM273816U publication Critical patent/TWM273816U/en

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Description

M273816 八、新型說明: 【新型所屬之技術領域】 本創作是有關於一種粒子束照射乾之冷卻裝置,主要用 於粒子照射時增加液態靶良好的散熱效率。其技術在於μ’ 良好的散熱結構及材料選取,當使用在粒子照射時,可將大 量照射產生的熱量有效移除,以提升照射容量進而提高產率 及使用壽命。 【先前技術】 —, 由於氟-18是正電子核醫藥物中最重要的放射性核種之 因此以氟-18為標幟的核醫藥物已被廣泛的應用在正電 子電腦斷層造影(PET)中。經正電子電腦斷層造影後,能明 確的偵測多種癌症’適㈣職學的研究,同時也可以運用 於腦部疾病’心臟疾病之偵測。全身FDG_pET能偵測出有里 =葡萄代=率之處,故對於惡性腔痘的分期具很高的臨床 由於F-FDG具有高靈敏性,因此可用以偵測小病灶 與达端轉移與正確評估腫瘤的局部侵犯。 驳―對於F-18去氧葡萄糖在國内的使用,國内已有多家大型 速器設施以生產氟·18去氧葡萄糖注射劑核 去氧葡萄糖過程中,首先係利用迴旋 貝子射束照射氧_18水,經由核反應產生氟-18放射性 M273816 同位素,氟_18放射性同位素再傳送至合成盒經由分離純化 過程以製造出氟-18去氧葡萄糖核醫藥物。 在氟-18同位素生產過程中,氧水的照射液體靶是一 個衫響產率極大的關鍵裝置。我們已發展完成一套液體靶照 射裝置,並已申請國内專利(專利名稱··可同時分別產生多種 放射性同位素之照射裝置)。為進一步提升產能與效率,並致 力於生產设施與程序的精進。針對現有液體靶照射裝置進行 改善’其中氧_18水照㈣站的材質與結構和產能有很大的 關係,若針對液體靶照射靶體之冷卻裝置加以改良,則可有 效提升靶腔内的散熱效果,進而使該氧-18水照射靶站可承 受更大的粒子電流,而能在單位時間内因而可產生更多的氟 -18放射性同位素,達到產能的有效提升。 【新型内容】 本創作t主要目的係在於使照射液體乾裝置藉由設計 好的散熱結構及材料選取,而達到良好之散熱效果。在粒又 照射時,可適_熱量有效移除,可提升照射容量以提^M273816 8. Description of the new type: [Technical field to which the new type belongs] This creation is about a cooling device for particle beam irradiation, which is mainly used to increase the good heat dissipation efficiency of a liquid target during particle irradiation. Its technology lies in μ ’s good heat dissipation structure and material selection. When used in particle irradiation, the heat generated by a large amount of irradiation can be effectively removed to increase the irradiation capacity and thereby increase the yield and service life. [Previous technology]-Since fluorine-18 is the most important radioactive nucleus in positron nuclear medicine, the nuclear medicine marked with fluorine-18 has been widely used in positron computed tomography (PET). After positron computed tomography, it can clearly detect a variety of cancers' vocational studies, and it can also be used to detect brain diseases and heart diseases. Whole-body FDG_pET can detect the presence of li = grape generation = rate, so it is highly clinical for staging of malignant acne. Because F-FDG is highly sensitive, it can be used to detect small lesions and distal metastasis and correct Assess local tumor invasion. Refutation-For the use of F-18 deoxyglucose in China, there are already many large-scale accelerator facilities in China to produce fluorine · 18 deoxyglucose injection and nuclear deoxyglucose. First, the mantle beam is used to irradiate oxygen. _18 water produces fluorine-18 radioactive M273816 isotope through nuclear reaction, and the fluorine-18 radioisotope is transferred to a synthesis box through a separation and purification process to produce a fluorine-18 deoxyglucose nuclear medicine. In the production of fluorine-18 isotopes, the irradiation of liquid targets with oxygen water is a key device with a high yield. We have developed a set of liquid target irradiation devices, and have applied for domestic patents (patent names ·· irradiation devices that can simultaneously generate multiple radioisotopes). In order to further increase production capacity and efficiency, we are committed to improving production facilities and procedures. Improving the existing liquid target irradiation device 'Among them, the material and structure of the oxygen _18 water Zhaoying station has a great relationship. If the cooling device for the liquid target irradiation target is improved, it can effectively improve the target cavity. The heat radiation effect further enables the oxygen-18 water to irradiate the target station to withstand a larger particle current, and thus can generate more fluorine-18 radioisotopes per unit time, thereby effectively increasing the production capacity. [New content] The main purpose of this creation is to make the irradiation liquid dry device achieve a good heat dissipation effect through the designed heat dissipation structure and material selection. When the granules are irradiated again, the heat can be effectively removed, and the irradiation capacity can be increased to increase ^

為達上述之目的’本創作係—種具粒子束照射乾之 置,其係利用一伸縮管、一設置於 7邠 %之氣冷機構 M273816 所組成。該伸縮管係具有一真空腔;該氣冷機構係具有一與 上述真空腔對應之氣冷腔,並於該氣冷機構之周緣設置有與 氣冷腔連通之進氣口及出氣口,可供所需之冷卻氣體通過; 而該水冷機構係由一設置於上述氣冷機構一端之連接座、及 一設置於連接座一端之散熱部所構成,且該連接座係具有一 與上述氣冷腔對應之穿孔,並於連接座之周緣設置有與穿孔 連通之進/出料管,而該散熱部之一端係具有一可設置於穿 _ 孔中之散熱區,並於該散熱部之一端具有一水冷腔,另於該 散熱部之周緣設置有與水冷腔連通之進水管及出水管,可供 所需之冷卻水通過。如是,可使冷卻裝置藉由該氣冷機構及 水冷機構而達到良好之散熱效果。 【實施方式】 請參閱『第1、2、3圖所示』,分別係本創作之立體 p 外觀示意圖、本創作之立體分解示意圖、本創作之剖面狀態 示意圖。如圖所示:本創作係一種粒子束照射靶之冷卻裝 置,其係由一伸縮管1、一氣冷機構2及一水冷機構3所組 成,可使冷卻裝置藉由該氣冷機構2及水冷機構3而達到良 好之散熱效果。 上述所提之伸縮管1係具有一真空腔1 1,且該伸縮管 1之一端面係具有一凹陷部1 2 ;該氣冷機構2係設置於上 M273816 述伸縮管}之一端,且該氣冷機構2之一端面係具有與該凹 陷部1 2對應之凸出部2 1,藉以使該氣冷機構2係設置於 伸縮管1之-端,並於該伸縮管i之凹陷部12與氣冷機構 2之凸出部2 1係可設置有-真空隔膜2 2,而該凹陷部工 2與凸出部2 1之周緣係分別環設有一墊圈1 3、2 3,使 該真空隔膜2 2設置於該墊圈χ 3、2 3之間,其中,該真 空隔膜2 2係可為尚強度合金所製成如:鈦金屬或其他合金 #所製成,另該氣冷機構2係具有一與上述真空腔11'對二之 氣冷腔2 4,並於該氣冷機構2之周緣設置有與氣冷腔2 4 連通之出氣口 2 5及進氣口 2 6,可供所需之冷㈣體通 .過’該冷卻氣體係可為散熱較佳之氧氣及其他惰性氣體,而 該進氣口 2 6與氣冷腔2 4之連接處係具有一歧管2 7 ;該 水冷機構3係由一設置於上述氣冷機構2_ 1、及-設置於連㈣3 1-端之散熱部3 2所構成,該水 鲁冷機構3之連接座31與氣冷機構2之連接處係可設置有 一真空隔膜3 3’且該連接座3 1與氣冷機構2之連接處係 分別環設有-塾圈3 4、3 4a,使該真空隔膜3 3設置於 該墊圈3 4之間’其中,該真空隔膜3 3係可為高強度合金 所製成如:鈦金屬或其他合金所製成,且該連接座3丄係具 有與上述氣冷腔2 4對應之穿孔3 5,並於連接座3 1之 周緣設置有與穿孔3 5連通之進/出料管3 5丄,而該散熱 部之一端係具有一可設置於穿孔3 5中之散熱區3 6,該散 M273816 熱區3 6係由多數個散熱鰭針(片)3 6 1所組成,並於該 散熱部3 2之一端具有一水冷腔3 7,另於該散熱部3 2之 周緣設置有與水冷腔3 7連通之進水管3 8及出水管3 9,可供所需之冷卻水通過。如是,藉由上述之結構構成一 全新之粒子束照射乾之冷卻裝置。 凊參閱『第4圖所示』,係本創作使用狀態之剖面示意 籲圖如圖所示:當使用時係將該伸縮管1與粒子源產生器接 a (圖中未示),並由該水冷機構3之連接座3 1周緣所設置 之進/出料官3 5 1注入氧-18水,使該氧-18水透過穿孔3 5而、、’呈過政熱區3 6,且使該粒子源產生器之質子束由伸縮 官1之真空腔1 1射入,經由氣冷機構2之氣冷腔2 4及穿 :3 5而照射至進/出料管3 5 i所注人之氧_18水(散熱 品3 6之位置處),照射完後,氧·18轉變為氟^同位素後 # =由進/出料管351送出。而由於f子束照射時會產生相 當高^溫度,因此,當質子束照射時,於氣冷腔2 4所連通 之進孔口2 6及出氣口 2 5注人可供冷卻之氣體,使該冷卻 氣,降低真空隔膜22、33之溫度;此外,由水冷機構3 :散熱部3 2 -端所設之散熱韓針(片)3 6丄之散熱區3 2進行氧W水之散熱,同時於水冷機構3之散熱部3 2周 、、之進水管3 8注入冷卻水,使該冷卻水通過水冷腔3 7後 由出水管3 9排出,帶走散熱部3 2上散熱料(片)36 M273816 1之熱量。 综上所述,本創作粒子束照射靶之冷卻裝置可使冷卻裝 置藉由该供所需冷卻氣體通過之氣冷機構、及供所需冷卻水 通過之水冷機構及散熱區而達到良好之散熱效果,進而使本 創作之産生能更進步、更實用、更符合使用者之所需,確已 符合新型專利申請之要件,爰依法提出專利申請尚請貴 審查委員撥冗細審’並盼早日准予專利以勵發明,實感德便。 =以上所述者,僅為本創作之實施範例而已, : = ==:『,凡依本創作申請心_ 創作專利涵蓋之範_等效變化與修飾,皆應仍屬本 M273816 【圖式簡單說明】 第1圖,係本創作之立體外觀示意圖。 第2圖,係本創作之立體分解示意圖。 第3圖,係本創作之剖面狀態示意圖。 第4圖,係本創作使用狀態之剖面示意圖。 【主要元件符號說明】 伸縮管1 真空腔1 1 凹陷部1 2 墊圈1 3、2 3 氣冷機構2 凸出部2 1 真空隔膜2 2 氣冷腔2 4 出氣口 2 5 進氣口 2 6 歧管2 7 12 M273816 水冷機構3 連接座3 1 散熱部3 2 真空隔膜3 3 墊圈3 4、3 4 a 穿孔3 5 φ 進/出料管3 5 1 散熱區3 6 散熱鰭針(片)3 6 水冷腔3 7 進水管3 8 出水管3 9In order to achieve the above-mentioned purpose, this creative system is a kind of particle beam irradiation device, which is composed of a telescopic tube and an air-cooling mechanism M273816 set at 7%. The telescopic tube system has a vacuum cavity; the air-cooling mechanism has an air-cooling cavity corresponding to the above-mentioned vacuum cavity, and an air inlet and an air outlet communicating with the air-cooling cavity are provided on the periphery of the air-cooling mechanism. For the required cooling gas to pass through; and the water cooling mechanism is composed of a connection seat provided at one end of the air cooling mechanism and a heat dissipation part provided at one end of the connection seat, and the connection seat has A perforation corresponding to the cavity, and an inlet / outlet pipe communicating with the perforation is provided on the periphery of the connection seat, and one end of the heat radiation part has a heat radiation area that can be disposed in the through hole, and is at one end of the heat radiation part. A water-cooling cavity is provided, and a water inlet pipe and a water outlet pipe connected with the water-cooling cavity are provided on the periphery of the heat-dissipating part, and the required cooling water can pass through. If so, the cooling device can achieve a good heat dissipation effect through the air cooling mechanism and the water cooling mechanism. [Embodiment] Please refer to "shown in Figures 1, 2, and 3", which are the three-dimensional appearance diagram of this creation, the three-dimensional decomposition diagram of this creation, and the sectional state diagram of this creation. As shown in the figure: this creation is a cooling device for particle beam irradiation target, which is composed of a telescopic tube 1, an air cooling mechanism 2 and a water cooling mechanism 3, which can make the cooling device through the air cooling mechanism 2 and water cooling The mechanism 3 achieves a good heat dissipation effect. The telescopic tube 1 mentioned above has a vacuum cavity 11 and one end surface of the telescopic tube 1 has a recessed portion 12; the air-cooling mechanism 2 is disposed at one end of the telescopic tube described in M273816, and the One end face of the air-cooling mechanism 2 is provided with a protruding portion 21 corresponding to the recessed portion 12, so that the air-cooling mechanism 2 is disposed at the-end of the telescopic tube 1 and is provided at the concave portion 12 of the telescopic tube i. A vacuum diaphragm 2 2 may be provided with the protruding portion 2 1 of the air-cooling mechanism 2, and the peripheral edges of the recessed portion 2 and the protruding portion 21 are respectively provided with a gasket 1 3, 2 3 to make the vacuum The diaphragm 22 is disposed between the gaskets χ 3, 2 and 3, wherein the vacuum diaphragm 22 can be made of a high-strength alloy such as titanium or other alloy #, and the air-cooling mechanism 2 can be made of It has an air-cooling cavity 24 which is opposite to the above-mentioned vacuum cavity 11 ′, and an air outlet 25 and an air inlet 26 communicating with the air-cooling cavity 2 4 are provided on the periphery of the air-cooling mechanism 2 and can be used for The required cold carcass passes. The cooling gas system can be oxygen and other inert gases with better heat dissipation, and the connection between the air inlet 26 and the air-cooled cavity 24 is different. 2 7; The water cooling mechanism 3 is composed of a heat dissipation section 32 arranged on the 1-end of the flail 3 and the air cooling mechanism 2_1, and the connection seat 31 of the water cooling mechanism 3 and the air cooling mechanism A vacuum diaphragm 3 3 'can be provided at the connection point of 2 and the connection points of the connection seat 3 1 and the air-cooling mechanism 2 are respectively provided with-塾 circles 3 4, 3 4a, so that the vacuum diaphragm 3 3 is provided at the Between the gaskets 3 4 ', wherein the vacuum diaphragm 3 3 may be made of a high-strength alloy such as titanium metal or other alloys, and the connecting seat 3 ′ has a shape corresponding to the above-mentioned air-cooled cavity 24. The perforation 3 5 is provided with an inlet / outlet pipe 3 5 连通 communicating with the perforation 3 5 on the periphery of the connection base 31, and one end of the heat radiation part has a heat radiation area 3 6 that can be disposed in the perforation 3 5. The hot-spot M273816 hot zone 3 6 is composed of a plurality of heat-dissipating fin pins (pieces) 3 6 1, and has a water-cooling cavity 3 7 at one end of the heat-dissipating portion 32, and is arranged at the periphery of the heat-dissipating portion 32. There are an inlet pipe 38 and an outlet pipe 39 which communicate with the water-cooling chamber 37, so that the required cooling water can pass through. If so, a brand-new particle beam irradiation dry cooling device is constructed by the above structure.凊 Refer to "shown in Figure 4", the cross-sectional schematic diagram of the use state of this creative is shown in the figure: when used, the telescopic tube 1 is connected to the particle source generator a (not shown in the figure), and The inlet / outlet officer 3 5 1 provided on the periphery of the connection seat 3 1 of the water cooling mechanism 3 is injected with oxygen-18 water, and the oxygen-18 water passes through the perforations 3 5, and 'shows that it is over the hot area 3 6, and The proton beam of the particle source generator is injected from the vacuum chamber 1 1 of the telescopic officer 1 and irradiated to the inlet / outlet pipe 3 5 i through the air-cooling chamber 2 4 of the air-cooling mechanism 2 and through: 3 5 Human oxygen_18 water (at the position of heat sink 36), after the irradiation, oxygen · 18 is converted into fluorine ^ isotope # = sent by the inlet / outlet pipe 351. Since the f-beam beam is irradiated at a relatively high temperature, when the proton beam is irradiated, the inlet 26 and the outlet 2 5 connected to the air-cooling chamber 24 are injected with a gas that can be cooled, so that This cooling gas lowers the temperature of the vacuum diaphragms 22 and 33. In addition, the water-cooling mechanism 3: the heat-dissipating part 3 2-the heat-dissipating Korean needle (piece) 3 6 丄 heat-dissipating area 3 2 performs the heat dissipation of oxygen and water. At the same time, cooling water is injected into the heat radiating portion 3 of the water cooling mechanism 3 for 2 weeks, and the water inlet pipe 38, and the cooling water passes through the water cooling cavity 37, and then is discharged by the water outlet pipe 39, taking away the heat radiating material (sheet) on the heat radiating portion 32. ) 36 M273816 1 heat. In summary, the cooling device for the particle beam irradiation target of the present invention enables the cooling device to achieve good heat dissipation through the air cooling mechanism through which the required cooling gas passes, and the water cooling mechanism and the heat dissipation zone through which the required cooling water passes. Effect, so that the creation of this creation can be more progressive, more practical, and more in line with the needs of users, and indeed meets the requirements for new patent applications. The invention is inspired by patents, which is a real virtue. = The above is only an example of the implementation of this creation.: = ==: 『, Any application according to this creative application_ The scope covered by the creation patent_ Equivalent changes and modifications shall still belong to this M273816 [Schematic Brief description] Figure 1 is a three-dimensional appearance diagram of this creation. Figure 2 is a three-dimensional exploded view of this creation. Figure 3 is a schematic view of the cross-sectional state of this creation. Figure 4 is a schematic cross-sectional view of the state of use of this creation. [Description of main component symbols] Telescopic tube 1 Vacuum chamber 1 1 Depression 1 2 Gasket 1 3, 2 3 Air cooling mechanism 2 Protrusion 2 1 Vacuum diaphragm 2 2 Air cooling chamber 2 4 Air outlet 2 5 Air inlet 2 6 Manifold 2 7 12 M273816 Water cooling mechanism 3 Connection base 3 1 Radiating part 3 2 Vacuum diaphragm 3 3 Gasket 3 4, 3 4 a Perforation 3 5 φ Inlet / outlet tube 3 5 1 Radiating area 3 6 Radiating fin needle (piece) 3 6 Water-cooled cavity 3 7 Water inlet pipe 3 8 Water outlet pipe 3 9

Claims (1)

M273816 九、申請專利範圍: 1.-種粒子束照㈣之冷卻裝置其係包括有: 7伸縮管’該伸縮管係具有一真空腔;一氣冷機構,該 =冷機構係、设置於上述伸縮管之—端,且該氣冷機構係 具有-與上述真空腔對應之氣冷腔,並於該&冷機構之 周緣叹置有與氣冷腔連通之進氣σ及出氣口,可供所需 之冷部氣體通過;-水冷機構,該水冷機構係由一設置 # 於上述氣冷機構-端之連接座、及—設置於連接座一端 之散熱部所構成,且該連接座係具有—與上述氣冷腔對 應之穿孔,並於連接座之周緣設置有與穿孔連通之進/ 出料管’而該散熱部之一端係具有一可設置於穿孔中之 散熱區’並於該散熱部之—端具有—水冷腔,另於該散 熱部之周緣設置有與水冷腔連通之進水管及出水管可 供所需之冷卻水通過。 ❿ •如申請專利範圍第!項所述之粒子束照射乾之冷卻 置,其中,該伸縮管之一端面係具有一凹陷部,且該 冷機構之-端面係具有與該凹陷部對應之凸出部,^ 使該氣冷機構係設置於伸縮管之一端,並於該伸縮二 凹陷部與氣冷機構之凸出部係可設置有一真空隔膜。g 3 •如申請專利範圍第2項所述 之粒子束照射靶 之冷卻裝 14 M273816 置 ’其中,該真空隔㈣可為高強度合金所製成 4:申二專=圍第2項所述之粒子束照射乾 置-中,该真空隔膜係可為鈦金屬或其他合金所製成裝 5:申::利範圍第2項所述之粒子束照射乾 置’ '中,該凹陷部與凸出部之周緣係分別 —: 圈,使該真空隔膜設置於該墊圈之間。 墊 6.如申,專利範圍第}項所述之粒子束照射乾之 置〜、中,該進氣口與氣冷腔之連接處係具有一歧管。、 7·如申請專利範圍第丄項所述之粒子束照射靶 二該冷卻氣體係可為散熱較佳之氣氣及其他情 8. 如申請專利範圍第i項所述之粒子束照射乾之冷卻裝 置^其中,該水冷機構之連接座與氣冷機構之連接: 邛設置有一真空隔膜。 处’、 9. 如申請專利範圍第8項所述之粒子束照射靶之冷卻裝 置,其中,該真空隔膜係可為高強度合金所製成。、 15 M273816 10.ΓΠ利範圍第8項所述之粒子束照射乾之冷卻農 成/、,5亥真空隔膜係可為欽金屬或其他合金所製 11.如_請專㈣項所述之粒子束照料之 其中’該連接座與氣冷機構之連接處係分別〜 有一墊圈,使該真空隔膜設置於該墊圈之間。长°又 21申請專利範圍第i項所述之粒子束照料之冷 罝,其中,該散熱區係由多數個散熱鰭針 、 成。 5)所組M273816 IX. The scope of patent application: 1.- A kind of cooling device for particle beam illumination, which includes: 7 telescopic tube 'The telescopic tube system has a vacuum cavity; an air-cooled mechanism, which is a cooling mechanism, is arranged on the telescopic The end of the tube, and the air-cooling mechanism has an air-cooling cavity corresponding to the above-mentioned vacuum cavity, and an air inlet σ and an air outlet communicating with the air-cooling cavity are set at the periphery of the & cooling mechanism. The required cold part gas passes;-a water cooling mechanism, which is composed of a connection seat provided at the-end of the above-mentioned air cooling mechanism, and-a heat radiation part provided at one end of the connection seat, and the connection seat has -A perforation corresponding to the above air-cooled cavity, and an inlet / outlet pipe communicating with the perforation is provided at the peripheral edge of the connection seat, and one end of the heat radiation part has a heat radiation area that can be disposed in the perforation and is radiated in the The end of the part has a water-cooled cavity, and a water inlet pipe and a water outlet pipe connected with the water-cooled cavity are provided at the periphery of the heat-dissipating part for the required cooling water to pass through. ❿ • If the scope of patent application is the first! The particle beam according to the above item is irradiated with a dry cooling device, wherein one end surface of the telescopic tube has a depression, and the -end surface of the cooling mechanism has a projection corresponding to the depression, so that the air is cooled The mechanism is disposed at one end of the telescopic tube, and a vacuum diaphragm may be provided between the two recessed portions of the telescopic tube and the protruding portion of the air cooling mechanism. g 3 • Cooling device for particle beam irradiation target as described in item 2 of the scope of patent application 14 M273816, where the vacuum barrier can be made of high-strength alloy 4: Shen Erzhuan = described in item 2 The particle beam is irradiated and dried, and the vacuum diaphragm can be made of titanium metal or other alloys. The peripheries of the protrusions are respectively: a circle, so that the vacuum diaphragm is disposed between the gaskets. Pad 6. As described in the patent application, the particle beam irradiation device described in item} of the patent application has a manifold at the connection between the air inlet and the air-cooled cavity. 7. The particle beam irradiation target described in item 丄 of the scope of the patent application 2. The cooling gas system can be a gas with better heat dissipation and other conditions 8. The particle beam irradiation dry cooling as described in item i of the scope of patent application Device ^ Among them, the connection seat of the water cooling mechanism and the air cooling mechanism are connected: (1) a vacuum diaphragm is provided. 9. The cooling device of the particle beam irradiation target according to item 8 of the scope of the patent application, wherein the vacuum diaphragm may be made of a high-strength alloy. , 15 M273816 10. The particle beam described in item 8 of the scope of interest is irradiated with a dry cooling farm /, and the 5 Hai vacuum diaphragm can be made of Chin metal or other alloys. Among the particle beam care, 'the connection place of the connection seat and the air-cooling mechanism is respectively provided with a gasket, so that the vacuum diaphragm is arranged between the gaskets. The length of the cooling beam of particle beam care described in item i of the 21st patent application range, wherein the heat radiation area is formed by a plurality of heat radiation fin pins. 5) The group 1616
TW94202662U 2005-02-18 2005-02-18 Cooling device for target of particle beam irradiation TWM273816U (en)

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