M256683 捌、新型說明： 、【新型所屬之技領域】 射頻（Radio Frequency ; RF)電源經常應用於半導體產業、液 f光，產解前端處理（p純eatment)製程之表面清潔，尤^是 ^ 屬類（如塑膠）待清潔物之電漿表面清洗褒置（ 啤 、: csp或塑膝類表面鍍膜製料處_面清 而在構裝用基板或待鍍物表_著污雜，此污染物將導致後續封裝& 或鑛膜過程中，金線、環氧樹脂或乾材附著不良，嚴重影響產品良^ :基板严待鍍表面的污染物清除乾淨，因：bRF射頻電源 對於相關產品良率的提升，佔有相當的重要性。 /Λ 播^女真,fSP!fring)薄膜技術是屬於物理氣她積PVD的-種戸二有/⑴I程精密、品質穩定；⑵鍍膜的密著性佳、附著力強、 =易脫洛，（3)鍍膜不產生化學反應、無化學產物污染，屬於符合 ^程；⑷可連續式生產、可鍍？重金屬，生^速度快； ϋ成本^與重^，生產彈性高，符合#_f者選_趨勢等優點， &生其财之設備與製紐術可歧剌於半導體、 電極\專t域。然而，針^在待鍍物（Substrate)表面賤鍍非金屬類 必項浐 ^寺’磁控贿（SPUtteringmagnetr〇n)陰極（catho 產生高頻錢鑛離子來絲非金屬類羊巴材，因此 RF射頻電源亦廣泛應用在真空濺鍍設備上。 射頻電源顧於電漿清洗裝置錢鍍設備磁控職陰極上，豆 J 須處於真空環境T，細_理是在電極板（或陰極板）力^ ^ 射頻電源產生器（gene瓜tor)，如圖一所示，此電極板盥金屬製真 極產生電位差及電容式放電，電子在負極獲彳ΐ能ϋ t、# 子而將之離子化（如々+ “Ar++2e_)，被離子化的電子又 不亲反口ί下轟多中性氣體分子，使再產生離子化氣體分子，如此連鎖快 ί而濺Si成電漿清洗區域，或離子化氣體分子進-步轟擊負極靶 性（EMC)是指「―種器件、設備或系統的性能，它可以使 i強列工作，並且同時不會對此環境中任何其他電子設備產 生強…、電兹干擾（IEEEC6312_1987)」，然而，所有電器和電子設備工作時 M256683 '都έ有間料連續性龍、電流或電場變化 ，^ 導致在不同頻率内或一個頻帶間產生 旦，品^逮率相當快，這將 能量發射到厢的環境中，並產生 相，的電路則會將這種 因其頻率高達13.5_，電場H變針對RF射頻電源’ (麵）現象更是不能忽略因此，生«波干擾 言。 广連、，負式（In-Line)製程設備而 針對RP射頻電源，一般而言，其 糸統PLC控制程式基於最佳直空作 乍在ΙΟ— Torr左右， 數警告值（al_limits，本創’會設綠空計讀 產品品質穩定性。但倘若腔體f空度因兄，以維護最佳 式製程設備而言，更需要清除夺二二頁《，機，，針對連續 "c-：^r" 針對其膽干擾值會造成系統當機干置，尤其是 的成本，即可有效地防制腕電磁奸擾，、 電〒原理及極低 備鶴率。十擾而導致靖數㈣及跳機，可大幅提升製程效率及設 【先前技術】 一般而言’EMI有兩條途徑離開或進入一個 射是藉由外板的縫、槽、開孔或其他I漏出去..專導。 错由輕合到電源、信號和控制線上離開外板，在ίί 傳導則 進而產生干擾。目前廣泛應用於防制ΕΜΙ電&之G〗由輻射， ，和縫隙屏蔽結合的方式來實現，在真ί腔用外板 效率可用下式進行初步評估：反卞擾的屏威（如圖一）’其金屬屏蔽 SE (dB) =A+R+B，單位是分貝 ίΐί 耗(dB) ’R:反射損耗(dB) ’B:校正因子㈣，-_置的 若會以產至最初的十分之一 右要進一步要求將電磁場強度降至為最初的十萬分= M256683 (SE=100dB) ^ 〇 這是因為金屬外板屏蔽罩與真空腔體之間，理論上應該是完全密閉無 2縫的，屏蔽必須連續（即形成一個法拉第籠），以防電磁波乘虛而入，但 實際上要做到完全隔離是不可能的，但因散熱孔'開關、訊號線、通風口、 監測窗口、防氣洩漏塑膠襯墊環等元件，導致多少都有電磁波洩漏，所以 一些較為講究的屏蔽器材，會在金屬屏蔽罩内面再艘上一層銅，藉由銅的 高反射損失(reflection loss)吸收電磁波，使之不到處亂竄，就跟在房間裡貼 吸音棉是一樣的意思。 ^而，只有如鐵、銅之類高導磁率的金屬材料，才能在極低頻率下達 到較南，蔽效率，這些金屬材料的導磁率會隨著頻率增加而降低，因此針 對咼頻的發射源而言，其金屬屏蔽效應將大打折扣，EMI電磁波干擾無 法單罪金屬外板屏蔽效應來有效防制。為進一步解決PP射頻電源EMI電 磁波干擾問題，將金屬外板屏蔽罩透過傳導線接地（通常可將真空腔體視 為ground接地端），透過傳導方式將電磁波迅速帶離金屬外板屏蔽罩，將 EMI干擾產生電路隔離及增強敏感電路的抗干擾能力，降低電磁波藉由搞 合到電源、信號和控制線而在開放空間中自由輻射，進而達到EMI抑性、 隔離性和低敏感性等目標。 傳統上，-般採用圓形單蕊金屬導線材（cylindrical cable conduc if導ϊί線（如圖三）’然而這對傳輸直流或低頻交流信號的家 =產。口疋適用的，但對於尚頻RF信號而言，卻是不良導體。這關鍵在於導 體的集膚效應（skineffect)」現象’集膚效應是隱藏於電力傳導的隱 題’造成集膚效應的物理原因是祕效應，當導體之·隨鮮而改^ 該電流所造成的磁場大小也隨著改變，磁場變化又產生一 3 emf又產生電流’料體⑽電流需再做重新分“軸 emf錢產生電流方向相反，接近導體表面則方向 ^ 麟著鮮增加’電流密度愈趨向導體表面，在頻率高至1MHz以^效 電流則全聚集在接近導縣©非常薄之表層上，為頻轴高表揚 向來回變化愈快’因此導線金屬表面的電子還來不及移動^内 集膚效應導致圓形單蕊金屬導線的電以以於= 外層流通:非平均分佈於整個導線_面射，造成 導效果不佳，EMI電磁波干擾造成系統當機仍時常發生。 、、泉專 為了避免高頻訊號集膚效應的影響，有廠商^數 =多蕊誠酬_ (如_，但使= 式雖然照顧了高頻，但卻犧牲了中、低頻，這是因為細線的截面 方 M256683 中低頻段的彳5號「流通效率」較高頻差所致。新一代的設令 金屬導線材，負責不同頻段信號的傳輸二此即可 Ϊ免ffif到全面性的要求。但此類金屬導線材費用十分昂 二電產品，如高級音響等，如此不僅兼顧高頻訊號， 擁有豆纖滿的中、低頻聲音。但對於製程設備而言，其目的 ϊίΞί 射頻電源EMI電磁波干擾問題，不適合使用此_成本的 歸作/请七述的缺失，提出一個低成本、高成效之处射頻電源防制 用总单置’本創作除了運用傳統金屬外板屏蔽罩外，再利 工然，板辅助，經由現場實體驗證，可達到系統設備 二#二二吊§機停機情況發生的積極目的。藉由經搜尋及查閱國 准”ΐ]案中，亦未見有與本創作中請專利範圍之内容實 貝相同或類似者，顯見本發明極具新穎性、創新性與實用性。 【新型内容】 本創作之主要目的在於剔共一種簡易Μ射頻電源防制ΕΜΙ電磁波干擾 if i、主要藉由—金屬外板祕罩、—導電襯墊及—金屬傳導薄板等元件 過扁平可,曲金屬傳導薄板元件設計，將殘留在金屬外板屏蔽 自金屬外板屏蔽罩迅速傳導至真空腔體接地端，解決傳統圓 =微金屬導線所面臨高頻訊號「集膚效應」所造成傳導不佳問題，有效 防制EMI電磁波干擾情況。 望之? §的係針對金屬傳導薄板可以利用薄銅板、！S板或鐵板 古"，作’並•曲剪裁成適合現場配置的形狀而成，與傳統採 Ρλ/Γτ 夕為細心金屬導線當傳導線材比較，本創作屬於一成本低、抗 EMI干擾效果更佳的簡易裝置。 伹_^Ϊ之再一目的係針對不同处設備之電極板外型設計、配置、電源 二Γ頁ίί電流量之調整，因其所產生的ΕΜΙ電磁波波長及強度亦會隨 今ΐ料ίί,]作提出一簡易試驗方式，可依不同的金屬導電材料所製作的 篆’微量逐步調整其寬度，根據干擾數據輕易地設計出金屬傳 導溥板最佳寬度及其配置方式。 M256683 【實施方式】 為使補作所賴的技術及輕胁明瞭，配合具體實補圖示說 口下’但並非限制本創作之範<#，熟悉此技藝之人士可由本說明書所 =容，輕純瞭解本創作之優點與功效，本㈣亦可藉由其他不同料 ，貫施例加以施行或剌’本綱書中的各項細節可基於不同觀點與^ 用，在不悖離本創作之精神下，進行各種修飾與變更。 “ 置係ϊϊ請參關五所示’本創作之μ射戦源_ EMI電磁波干擾裝 -真空腔體⑴，内呈正方中空以供放置電極板〇1)及待清潔 待鍍物）（12)等元件，龐大真空腔體必須透過接地線接地作的 =端，錢射性纽好料化效果，讀生錢（pi_^ ，，潔或麟（sputtering)薄賴程，_必須達真空作#環境，腔體 =並設置真料探管⑼，俾利隨時檢測真錄況，並將讀數 ^ 真工作業需求條件。為使真空腔體曰後可以打開維修，真空腔 連·的，可分為上賴及下雜兩大部分，為使兩者之間氣 防if氣，兩者間以防㈣漏塑膠襯塾環（16)密合，但^腔 體非連#，EMI電磁波可經由此處洩漏出去。 另源喊產生11⑵，其1透由域線接至雜板（11)， Γ蔽觸⑴蝴外板 成⑴’係由如鐵、鋼之類高導磁率的金屬材料所製 =置於電極板（U)上方’與真空腔體⑴ ==卜界__徑，嘛㈣㈣上—層銅嘯= ΓΤ,η1Γ} } . . ^出ί。 屏蔽罩#完全封閉的，EMI電磁波可經由這些孔洞泡 一導電襯塾（4) ’因金屬外板屏蔽罩⑴ :者家，並提供連續低阻抗接點，作用在於減少接縫或Li 、曰孔或縫隙，減少RF輕射從縫隙线漏出去的強度。 10 M256683 -扁：可，屬傳導薄板(5)，連結金屬外板 ϋ = *其主要目的在於_傳導方式將電磁波帶離金^卜板屏S 、’導入空腔體（1)之接地端（ground)，因本身成扁平狀及隹虜呌 =導致電流幾乎都在金屬傳導薄板表面流通，平均分佈^效 ΐϊϊ果極Λ，除了可以避免傳統圓形單蕊金屬傳導線⑷因高頻婦「隹 南成本多蕊細心、金屬料線⑺，大祕低設触打避免使用 1數會干_料部真料（14)讀值，故藉由真空計（⑷ ’切— 5/°上下限時，基於最佳真空作業品質要求，系统PLC =式^自動判別跳機，每次系統異常跳機後，現場人 科技以連^驗設備現場人員所統計數據综整如下表所示：及風 RF防制EMI 干擾方式 無防制措施 (圖一所示） 金屬遮蔽 (圖二所示） 真空計讀數 ---------- l〇_2Torr~~ _ ±30% 1 〇2 Torr ±20%_ 母星期平均異常 85 跳機二逆 80 金屬遮蔽+ 單蕊傳導線 (圖三所示) T〇'2Torr ±15% 金屬遮蔽+ 本創作方式 多蕊傳導線 (圖五所示） 1 〇"2 Torr ±10% -------- ±2% 40 趨近於0 最高 ~itt ϋ·4$!'/τ-ίΑ η ’、禾取好，母星期造成系統異常當機的平均$ - Si-r 聊―接地較2大，可透過接地線接地做為系統的 體（非接地端），則其防制ΕΜΙ電磁波谓效果，將大打折扣如- M256683 針對不同設備之電極板（11)外型設計、配置、電源供應器（2)頻率 或電流量之調整，其所產生的EMI電磁波波長及強度亦會隨之變動，若是 針對，統單蕊（6)或多蕊（7)金屬導線而言，必須重新計算線徑大小而 ’隻更δ又计金屬導線材，其過程十分費時費力，然而本創作對此情況皆可輕 易地處理，由實驗結果發現，當金屬傳導薄板（5)的寬度大過某一程度後， 其電流傳導功能及集膚效應已達到飽和狀態，當再增加薄板（5)寬|對提 ^電流傳導功能及防制ΕΜΙ電磁波干擾效果影響有限，因此本創作$需繁 複理論分析及數學計算，只需依據不同的RF設備配置與操作條件，重複幾 次實驗及測試數據，即可輕易地求出金屬傳導薄板（5)最佳寬度及配置方 式。由友威科技現場實體圖（圖六）發現，該系統金屬傳導薄板（5)的最 佳寬度，約為真空腔體（1)的1/3左右即可達到最佳效果，並不需要更寬 的金屬傳導薄板⑸’但倘若其寬度再減少，則會影響其防制電磁波 千播#旲。 ^小"金屬¥電材料（如銅、鋁、鐵等）皆可用來製作本創作金屬傳導 薄板⑸，並不侷限某一特別金屬類，然而因其電阻、導電性及導磁性不 = 導效果皆不同，因此其抗_電磁波干擾金屬傳導薄板之最 ，但如同前述，只要依實際操作狀態，重複幾次試驗，逐步 2==气導，⑸的寬度’就可輕易地找出其最佳傳導效果之 、—/專板（5)寬度，顯見本創作的簡易性、適用性及方便性。 ’摘作實關雜達顺翻的抑制_功效，又其所揭 不僅未曾見諸於同類產品中，亦未曾公開於中請前，誠已 ΐ王之規定與要求，爰依法提出新型專利之中請，懇請惠予審 查’⑽利’職感德便。 12 M256683 【圖式簡單說明】 圖一係顯示RF射頻電源電磁波 圖二係顯示習知防制奸射 $狀況示思圖 圖三係顯示習知防制=電礤波干擾示意圖（一） 圖四係顯示習知防制奸射頫=電磉波干擾示意圖（二） 圖五係顯示本創作之電磁波干擾示意圖（三） 圖六係顯示顯示本創作之友威科裝置示意圖 符號說明： (1)真空腔體 待清潔物或待鍍物 (H)真空計 防氣洩漏塑膠襯墊環 (21)絕緣體（如陶瓷） (4)導電襯墊 (6)圓形單蕊金屬傳導線 (11)電極板或或陰極板 (13)真空計探管 (15) PLC控制系統 (2) RF射頻電源訊號產生器 (3) 金屬外板屏蔽罩 (5)扁平可彎曲金屬傳導薄板 (7)圓形多蕊金屬傳導線 13M256683 新型 Description of new models: [Technical fields of new models] Radio frequency (RF) power supplies are often used in the semiconductor industry, liquid f light, and surface cleaning of p-pure treatment processes, especially ^ Plasma surface cleaning equipment of the category (such as plastic) to be cleaned (beer,: csp or plastic knee-type surface coating materials _ surface clear and on the substrate for construction or the surface of the object to be plated _ contamination, this Contaminants will lead to poor adhesion of gold wires, epoxy resins or dry materials during subsequent packaging & or mineral film processes, which will seriously affect product quality The improvement of product yield is of great importance. / Λ 播 ^ 女 女, fSP! Fring) Thin film technology belongs to the physical gas product PVD-a kind of two kinds / precision and stable quality; the adhesion of the coating Good performance, strong adhesion, = easy to take off, (3) the coating film does not produce chemical reaction, no chemical product pollution, which is in line with the process; ⑷ can be continuous production, can be plated? Heavy metal, fast production speed; ϋ cost ^ and heavy ^, high production flexibility, in line with the advantages of #_f 者 选 _ trends, & the equipment and system to make money can be diverted to the semiconductor, electrode \ special field . However, it is necessary to plate non-metallic materials on the surface of the substrate (Substrate). The temple's magnetron bridging (SPUtteringmagnetron) cathode (catho generates high-frequency money mineral ions to wire non-metallic sheep bark materials, so RF The RF power supply is also widely used in vacuum sputtering equipment. The RF power supply takes care of the plasma cleaning equipment and the magnetic control cathode of the plating equipment. The bean J must be in a vacuum environment T. The reason is that the force is on the electrode plate (or cathode plate). ^ ^ RF power generator (gene tortor), as shown in Figure 1, this electrode plate is made of metal true electrode potential difference and capacitive discharge, electrons get energy at the negative electrode, and ionize it. (Such as 々 + "Ar ++ 2e_), the ionized electrons do not bombard many neutral gas molecules, so that ionized gas molecules are generated again, so the chain is fast and splashes Si into a plasma cleaning area , Or the further bombardment of negative target (EMC) by ionized gas molecules refers to "the performance of a device, equipment or system that can make i work in a strong manner and at the same time it will not produce any other electronic equipment in this environment Strong ..., electrical interference (IEEEC6312_1987) ", However, when all electrical and electronic equipment are working, M256683 'continuously changes the current, current, or electric field, resulting in deniers at different frequencies or between a frequency band, and the catch rate is quite fast, which emits energy to In the environment of the cabin, and the phase is generated, the circuit will change the frequency of the electric field H to the RF power source because of its frequency as high as 13.5_. The phenomenon can not be ignored. Therefore, «wave interference.» For negative (In-Line) process equipment and for RP radio frequency power supply, in general, the system's PLC control program is based on the best direct air work at around 10- Torr, and the warning value (al_limits, this will be set Green air counts the stability of product quality. However, if the cavity f space is due to brothers, in order to maintain the best process equipment, it is necessary to clear the second and second pages. ", Machine, for continuous " c-: ^ r & quot Aiming at its bile interference value, it will cause the system to crash, especially the cost, which can effectively prevent the electromagnetic harassment of the wrist, the electric shock principle, and the extremely low standby crane rate. Ten disturbances will cause the number of jumps and jumps. Machine can greatly improve process efficiency and design Technology] Generally speaking, 'EMI has two ways to leave or enter a shot is to leak out through the seams, slots, openings or other I of the outer panel. Specially directed. Wrong to leave on the power, signal and control lines The outer plate conducts in the light and then causes interference. At present, it is widely used in the prevention of EMI electricity &G; it is achieved by combining radiation, and gap shielding. The efficiency of the outer plate in the real cavity can be preliminary using the following formula Evaluation: anti-interference screen (see Figure 1) 'its metal shield SE (dB) = A + R + B, the unit is decibel ίΐί loss (dB)' R: reflection loss (dB) 'B: correction factor ㈣ If -_ is set to 1 / 10th of the original production, it is necessary to further reduce the electromagnetic field strength to the original 100,000 points = M256683 (SE = 100dB) ^ 〇 This is because the metal outer shield and the vacuum Between the cavities, in theory, it should be completely sealed without two slits, and the shielding must be continuous (that is, a Faraday cage) to prevent electromagnetic waves from entering the virtual space, but in fact it is impossible to achieve complete isolation, but due to heat dissipation Hole 'switch, signal cable, vent, monitoring window, gas leak prevention Plastic gasket rings and other components cause electromagnetic wave leakage to some extent, so some more sophisticated shielding equipment will be coated with a layer of copper on the inner surface of the metal shield. The copper's high reflection loss absorbs electromagnetic waves and makes it When you scramble everywhere, it is the same as sticking sound-absorbing cotton in the room. ^ Only, only high-permeability metal materials such as iron and copper can achieve souther and lower shielding efficiency at extremely low frequencies. The permeability of these metal materials will decrease as the frequency increases. As far as the source is concerned, its metal shielding effect will be greatly reduced, and EMI electromagnetic wave interference cannot effectively prevent the metal outer plate shielding effect. In order to further solve the EMI electromagnetic wave interference problem of the PP radio frequency power supply, the metal outer plate shielding cover is grounded through a conductive wire (the vacuum cavity can usually be regarded as the ground ground terminal), and the electromagnetic wave is quickly taken away from the metal outer plate shielding cover through conduction, and the EMI interference generates circuit isolation and enhances the anti-interference ability of sensitive circuits, reduces electromagnetic waves to freely radiate in open spaces by coupling to power, signal and control lines, thereby achieving the goals of EMI suppression, isolation and low sensitivity. Traditionally, a circular single core metal wire (cylindrical cable conduc if wire) (as shown in Figure 3) is used. However, this is suitable for homes that transmit DC or low-frequency AC signals. RF signals are bad conductors. The key lies in the skin effect of conductors. The phenomenon "skin effect is a hidden problem hidden in power conduction." The physical cause of the skin effect is the secret effect. · Change with freshness ^ The magnitude of the magnetic field caused by the current also changes. The magnetic field changes to generate another 3 emf and then generates a current. The material ⑽ current needs to be re-divided. The axis emf generates the current in the opposite direction, which is close to the surface of the conductor. The direction ^ Lin Zhuan increased. 'The current density tends to the surface of the body. At frequencies up to 1MHz, the effective current is all gathered on the very thin surface layer near Daoxian ©. The faster the frequency axis praises, the faster the change back and forth'. The electrons on the metal surface of the wire are too late to move ^ The inner skin effect causes the electricity of the round single core metal wire to be = outer circulation: non-uniformly distributed throughout the wire _ surface shot, resulting in poor conduction , EMI electromagnetic wave interference caused system crashes still occur frequently. In order to avoid the skin effect of high-frequency signals, there are manufacturers ^ number = multi-core sincerity _ (such as _, but makes the = type take care of high frequency , But sacrificed the middle and low frequencies. This is because the cross section of the thin wire is M256683, the high-frequency difference of No. 5 "circulation efficiency" in the low and medium frequency bands. The new generation of metal wire is responsible for the transmission of signals in different frequency bands. Second, you can avoid the requirement of ffif to comprehensiveness. However, the cost of such metal wires is very high. Electric products, such as high-end audio, etc., not only take into account high-frequency signals, but also have mid- and low-frequency sound full of beans. But for In terms of process equipment, its purpose is to solve the problem of radio frequency power EMI electromagnetic interference. It is not suitable to use this. _ Cost summary / please describe the lack of seven, and propose a low cost, high efficiency. In addition to using the traditional metal outer plate shielding cover, it is also beneficial to work, and the board assisted, through the physical verification on site, can achieve the positive purpose of the system equipment II # 二 二 suspend § machine shutdown situation. In the case of "Finding and Examining National Standards", there is no case that is the same as or similar to the actual content of the patent scope in this creation. It is obvious that the present invention is extremely novel, innovative and practical. [New Content] This The main purpose of the creation is to eliminate a kind of simple M radio frequency power supply to prevent EMI electromagnetic interference if i, mainly by-metal outer plate cover,-conductive pads and-metal conductive sheet and other components are too flat, curved metal conductive sheet components Designed to quickly transfer the shield remaining on the metal outer plate from the metal outer plate shield to the vacuum chamber ground terminal, which solves the problem of poor conduction caused by the "skin effect" of high frequency signals faced by traditional round = micro metal wires, effectively preventing EMI electromagnetic wave interference situation. Hope? § The system is for metal conductive thin plates, you can use thin copper plates ,! S-plate or iron plate is made of parallel and curved shapes suitable for field configuration. Compared with the traditional Pλ / Γτ, which is a careful metal wire as the conductive wire, this creation is a low-cost, anti-EMI interference. A simpler device with better results. Another purpose of 伹 _ ^ Ϊ is to adjust the current design of the electrode plate appearance design, configuration, and power supply of different equipment. The wavelength and intensity of the EMI electromagnetic waves generated by it will also change with the current data. A simple test method is proposed, which can gradually adjust its width according to the amount of cymbals made from different metal conductive materials, and easily design the optimal width and configuration of the metal conductive cymbals according to the interference data. M256683 [Embodiment] In order to make the technology and lightness of the supplementary work clear, say “but not limit the scope of this creation” with the actual supplementary illustrations. Those who are familiar with this art can be described in this manual. Qingchun understands the advantages and effects of this creation. This book can also be implemented with other different materials and examples. 'The details in this book can be based on different perspectives and uses, without departing from this work. In the spirit of making various modifications and changes. "Please refer to Section 5 to show the source of the μ emission source of this creation _ EMI electromagnetic interference device-vacuum cavity, which is square and hollow for the electrode plate 〇1) and the object to be cleaned) (12 ) And other components, the large vacuum cavity must be grounded through the ground wire. The end of the money is good, read the money (pi_ ^, clean or sputtering thin Lai Cheng, _ must be vacuum for # Environment, cavity = and set up the real material detection tube 俾, at any time to detect the true recording condition, and take the reading ^ real working conditions. In order to make the vacuum cavity can be opened for maintenance later, the vacuum cavity can be connected. It is divided into upper part and lower part. In order to prevent the gas between the two, the plastic lining ring (16) is tightly sealed between the two, but the cavity is not connected #, EMI electromagnetic waves can be It leaks out here. Another source called 11⑵, which is connected to the hybrid board (11) through the domain line. Γ shields the outer shell of the butterfly. It is made of metal materials such as iron and steel with high magnetic permeability. Manufactured = placed above the electrode plate (U) 'and the vacuum cavity ⑴ == 卜 界 ___, so ㈣㈣—layer copper Xiao = ΓΤ, η1Γ}}.. ^ 出 ί. Shield #Completely closed, EMI electromagnetic waves can be bubbled through these holes with a conductive liner (4) 'Because of the metal outer shield, it provides continuous low-impedance contacts, which is used to reduce joints or Li, holes, or The gap reduces the intensity of the RF light leaking from the gap line. 10 M256683 -Flat: Yes, it is a conductive thin plate (5), connected to the metal outer plate ϋ = * Its main purpose is to _ conduct the electromagnetic wave away from the gold plate. "The ground terminal (ground) of the cavity (1) is introduced, because of its flat shape and its shape, the current almost circulates on the surface of the metal conductive sheet, which is evenly distributed ^ effect pole Λ, in addition to avoiding traditional Round single core metal conductive line ⑷ Because of high frequency, "Nannan cost multi-core careful, metal material line, big secret low setting touch to avoid using 1 number will be dry _ material department real material (14) reading, so borrow When the vacuum gauge (⑷ 'cut — 5 / ° upper and lower limits, based on the best vacuum operation quality requirements, the system PLC = type ^ automatically determines the jump, each time the system abnormally jumps, the on-site technology to test equipment on-site personnel The statistics are summarized in the following table: Hefeng RF There are no preventive measures to prevent EMI interference (shown in Figure 1) Metal shielding (shown in Figure 2) Vacuum gauge reading ---------- l〇_2Torr ~~ _ ± 30% 1 〇2 Torr ± 20% _ The average week of the mother is abnormal. 85 Jumps the second inversion 80. Metal shield + single core wire (shown in Figure 3) T〇'2Torr ± 15% metal shield + Multi core core wire in this creative method (shown in Figure 5) 1 〇 " 2 Torr ± 10% -------- ± 2% 40 Approaching 0 Highest ~ itt 4 · 4 $! '/ Τ-ίΑ η', take it well, the mother week causes a system abnormality The average cost of crashes is $-Si-r. The grounding is larger than 2. Grounding can be used as the system body (non-grounding end) through the ground wire. The effect of preventing EMI electromagnetic waves is greatly reduced, such as-M256683 for different devices. The electrode plate (11) appearance design, configuration, power supply (2) frequency or current adjustment, the EMI electromagnetic wave wavelength and intensity generated by it will also change accordingly. If it is targeted, unified single core (6) or For multi-core (7) metal wires, the diameter of the wire must be recalculated, and 'only more δ and metal wires are counted. The process is very time-consuming and labor-intensive. All conditions can be easily handled. From the experimental results, it is found that when the width of the metal conductive sheet (5) is larger than a certain degree, its current conduction function and skin effect have reached a saturated state. When the width of the thin sheet (5) is increased again | It has a limited impact on improving the current conduction function and preventing EMI electromagnetic interference. Therefore, this creation requires complicated theoretical analysis and mathematical calculations. You only need to repeat the experiments and test data several times according to different RF equipment configurations and operating conditions. Easily find the optimal width and configuration of the metal conductive sheet (5). It was found from the physical map of the site of Youwei Technology (Figure 6) that the optimal width of the metal conductive sheet (5) in this system is about 1/3 of the vacuum cavity (1) to achieve the best effect. A wide metal conductive sheet ⑸ ', but if its width is reduced, it will affect its electromagnetic wave control # 旲. ^ Small " Metal ¥ Electrical materials (such as copper, aluminum, iron, etc.) can be used to make this creative metal conductive sheet. It is not limited to a particular metal, but because of its resistance, conductivity and magnetic permeability = conductive The effects are different, so its anti-electromagnetic interference metal conductive sheet is the best, but as mentioned above, as long as the test is repeated several times according to the actual operating state, step by step 2 == air conduction, the width of ⑸ can easily find its most For the best conduction effect, the width of the special plate (5) shows the simplicity, applicability and convenience of this creation. 'Exemplification is the key to the inhibition of Zadang Shunfan_ efficacy, and its revelation has not only been seen in similar products, nor has it been disclosed to the Chinese government before. It has already met the rules and requirements of the king and proposed new patents in accordance with the law. Thank you for your review of the job ethics of ⑽ 利. 12 M256683 [Schematic description] Figure 1 shows the RF radio frequency power source electromagnetic wave. Figure 2 shows the conventional anti-radiation control status diagram. Figure 3 shows the conventional control = electric wave interference diagram (1). Figure 4 Figure 5 shows the schematic diagram of the conventional anti-emission shooting = electric wave interference (2) Figure 5 shows the schematic diagram of the electromagnetic wave interference of the creation (3) Figure 6 shows the schematic diagram of the Waco installation of the friend of the creation: (1) Vacuum chamber to be cleaned or to be plated (H) Vacuum gauge Anti-gas leakage Plastic gasket ring (21) Insulator (such as ceramic) (4) Conductive gasket (6) Round single core metal conductive wire (11) electrode Plate or or cathode plate (13) vacuum detection tube (15) PLC control system (2) RF power signal generator (3) metal outer plate shield (5) flat flexible metal conductive sheet (7) round and more Core metal conductive line 13