TWM248014U - Elevator system for boat transfer with horizontality automatic control function - Google Patents

Description

新型, new type description: "t" * in the "t" of the "smart" back to the horizontal state of the vertical transfer of the state of the plate since the creation of this system is about the semiconductor device manufacturing machine system, especially about the crystal with the inside of the boat Lifting system for boat transfer with circular motion control function. Prior art 3 New background So much is needed Generally, a variety of processes involve the manufacture of semiconductor devices and auxiliary equipment. The conductor device provides electrical characteristics, in which the wafer surface is exposed to a quartz tube and heated. In the foregoing process, the diffusion process is directed to a half-containing oxide film forming step and an annealing step exposed to a boron or phosphorus-containing solid under high pressure or The gas furnace is one of the equipment used in the diffusion process, and is composed of a heating chamber of a quartz tube. 'As for auxiliary equipment outside the furnace, there is a gas supply unit to supply the refining processing gas to the chamber-like time, the elevator to move the wafers purely from the boat into the furnace and move up and down at the same time, and the wafer transfer device for loading / unloading The wafer boat, the cutting and transferring device is used to transfer the card E with the wafer to the wafer transferring device, and the read control unit is used for mechanically controlling the aforementioned components. As shown in Figure 1, the conventional diffusion processing system includes a quartz tube 19 designed to protect the processing environment. It is used to heat the quartz tube 19 ^ Hot cavity to 18, load / unload wafers 1 () A lifter 17 moving up and down in the furnace at the same time, loading / unloading wafers 10, a wafer transfer device 13 of a boat 14, and private transfer of a card with a wafer® 10 in it £ 11 to a wafer transfer loading card Kuangyin = Farm Home 12 'and the device control unit (not shown in the drawing) are used for mechanical control of το, and the gas supply unit is used to inject the refined gas required for various processes into the heating chamber. The driving lift system for the Zhimengzhou League includes a boat 14 which is vertically moved up and down for transferring the wafers 10 contained therein to the heating chamber 18, and the base 15 is fixed below the boat 14 and supports the boat 14 vertically. The elevator system moving up and down and the horizontal control board 16 which is coupled between the upper plate of the elevator 17 and the base 15 and controls the flat portion of the base 15 manually. As shown in the second figure at the bottom of the horizontal control board 16, the four hexagon head bolts 2G are located at various points in the χ_γ axis direction. The horizontality of the wafer 1 () is rotated by the clockwise or counterclockwise hexagon 〇㈣, so as to adjust the inclination of the base 15 to the horizontal control board, the wing nut 21 is placed on the chest side of the hex head screw inspection for fastening the corresponding bolt 2G to prevent the hex head bolt 20 from loosening. For example, the boat 14 needs to hold the base 15 at a right angle and lift it vertically and tilt it. There are many reasons, such as external overload or pressure. The wafer mounted on the boat = 14 cannot be placed horizontally. Condition, resulting in wafers skewed to 7 circles, poor production, and equipment damage, etc. 'Therefore, operators need to loosen regularly;' wing nut 21 at the bottom of the control board 16 thus rotates the hex head bolt 20, and manual visual adjustment Level the base 15 and tighten the eight wing nuts 21 again. Because the operator needs to directly and repeatedly rely on his view of the six hex head bolts and eight wing nuts, but the known method is insufficient, the force control of the hex head bolts, and the four coupling work is extremely time consuming. [Miscellaneous f ^^] Overview of the new level Ping Zi = ::: To provide a semiconductor device manufacturing process with hydraulics! The shortcomings of related technologies for boat transfer and lifting ，，，，， The purpose of this exemption is to provide _ and "a lift system for transfer, where two = the degree of usability 俾 the semi-conductor Zhao wafer on the boat level in the horizontal state. Another purpose is to provide a lift system with a boat for water transfer to prevent wafer deviations: positive timing and improved wafer quality. U and Japanese yen = display and other advantages and the purpose of this creation As detailed here = :: boat: there is a crystal_on it with a base and a lift + a lift for loading / unloading the boat to the processing chamber Between the boat's base and the lift, the boat's level can be maintained at a distance & 'and a control unit for receiving horizontal status information from the sensing unit and output control signals to the horizontal control unit. Boat level control Xianyuan contains horizontal control oil, which is located on the upper side of the elevator. Horizontal control drive components are located between the base and the horizontal control board, and are elastically moved between τ and horizontal alignment. Therefore, the inclination of the county base, ... Produce "Jie member for supplying a driving force to control the horizontal drive means. Sensitive movements include altimeters or two pairs of photoreceptors and luminous sensing devices. The light sensor and the light-emitting sensor are arranged such that incident light from the light-emitting sensor is horizontally intersected with each other on a horizontal base, and is installed near a boat to be horizontally aligned. At the same time, the semiconductor device manufacturing process in this creation has a horizontal automatic control function and a lift system, which also includes a unit connected to the control unit and displays the boat level information accepted by the sensing unit, and the input unit is connected to the control unit to receive The horizontal alignment work sequence can be converted into a sequence code and sent to the control unit. It should be understood that the foregoing brief description and the detailed description below are for illustration purposes only, and are intended to provide further explanation of the patent application. Brief Description of the Drawings Figure 1 is a schematic representative diagram illustrating the operation of the conventional semiconductor boat lifter system; Figure 2 is a bottom view example illustrating the semiconductor boat lifter system of Figure 1; Fig. 3 is a schematic representative diagram illustrating the operation of the lifter system for semiconductor boat m transfer according to the specific example of this creation; Fig. 4 is a schematic diagram illustrating the semiconductor boat movement with automatic horizontal control function of Fig. 3 Switch to a lift system; and Figure 5 is a bottom view to illustrate the horizontal control unit t in Figure 4. Detailed description of the embodiment of the car father ’s car "The details will be explained with reference to the specific examples of this creation, examples of which It is illustrated in the accompanying drawings. Fig. 3 is a schematic representation of an example of a hoist system for a semiconductor boat transfer according to a specific example of the present creation, and Fig. 4 is a schematic diagram, which illustrates the automatic level of Fig. 3 without examples. Lifting system for semiconductor boat transfer with control function. Referring to Figures 3 and 4, the lifter system for semiconductor boat transfer includes: Boat 34 which is vertically formed and made of quartz, transfers multiple crystals To the processing chamber, it has Wei wafer horizontal wire on it, and it has a disk-shaped and horizontal support boat 34, _37 for up and down movement, the horizontal control plate 36 is fixed horizontally to the elevator 37, and multiple horizontal axis components are miscellaneous. ㈣ The boat and the base 35, and the elastic movement between the bottom of the base 35 and the top of the horizontal control board, so that the distance between the two is adjusted to control the horizontal state of the base 35. The driving force generating part 41 is used to generate the driving force of the horizontal control driving part. And the driving force is transferred to the plurality of horizontal control driving parts 40 by the driving force transfer part, and the control unit 44 is used to receive the wafer level status information level control level control driving part 40, the material element 43 is provided to the inspection seat 35 and the basin The horizontal state of the wafer is transmitted to the control sheet to 4. The horizontal control moving part 40 is an X-axis horizontal control driving part tilted by the top and bottom sides of the base 35, which controls the base%. It consists of one side of the y-axis below and the γ-axis horizontal control driver 40b which tilts up and down of the control base 35. It is possible to make a horizontal control drive component 40 such as a hydraulic cylinder or air pressure. The cylinder may be a tube that can expand or contract in one direction or two directions when receiving hydraulic pressure or pneumatic pressure from the driving force generating material. In the case of using pneumatic or hydraulic pressure as a horizontally controlled driving component, the driving force generating component makes the material provide pneumatic pressure, And fluid transfer tube or gas · to-horizontal control drive / closing core press and rotary tube can be selectively opened according to the opening / closing of the inner path :::: controls the work of shaft components, and comes from the horizontal control-moving level Control & Control is selected by the unit 44 to move the hydraulic force to the steam red of the water-inhibiting moving parts. The preferred configuration of the two horizontal control drive parts 40 is a screw-up mounting hole. I screw connection to The base 35 'has vertical female screws to pass through the material in order to pass through the material. The flat plate 36 and the components == turn up and down' and the force is transferred to a proper speed. Set the rotation force of the turning force and transfer it to the male screw part. The transmission device Γ is used as an example of a horizontal extension device. The transmission wheel is composed of at least one transmission gear combination 'belt and pulley combination. And sprocket wheels Contains multiple transmission teeth. In addition, the driving force generating part that generates the rotational driving force preferably uses a motor. As for the motor 41, a DC motor (DC motor) can be used to generate a rotational driving force after receiving a% power source. The M motor (the AC motor consists of The control unit 44 generates a rotational driving force after receiving the AC power source. There is a motor that generates a rotational driving force after receiving the power, and a suitable combination of gears in the equipment to generate an appropriate number of revolutions and an appropriate rotational force. After the 2 pulse power source, the operation is accurate, but the stepper motor preferably uses the motor 44. As shown in Fig. 5, the motor 41 is constituted by coupling a x-axis motor 41a & Y-axis 41 up to 41b to an X-axis horizontal control drive part 40a & Y-axis horizontal control drive part 40b. In addition, the control unit 40 that controls the DC and AC motors receives the boat level status information from the sensor 43 and compares the received learned data with the input data. The control unit 44 then changes the voltage or current to correct the error between the data and applies the aforementioned power to the DC or AC motor control. In the case of the control unit motor, the control unit 44 receives the boat level information from the sensor 43, and compares the received poor wishes with the poor inputs that have been input to change the power to positive or negative pulses and correct the difference between the two data. Error, and by applying a pulse wave to the component motor control. The shaft 42 connected to the rotation of the motor 41 serves as a driving force transfer member for transferring the rotation driving force to the male screw member of the horizontal control driving member 40. In addition, the two pairs of photoreceptors and light-emitting sensors are mounted horizontally close to the base 35 or the wafer 10, so the light sent to the photoreceptors and the light-emitting sensor is perpendicular to each other to detect the inclination of the base 35 or the wafer 10, in other words The horizontal state error of the base 35 or the wafer 10 is detected by the aforementioned photoreceptor. Or a plurality of pressure sensors are arranged below the base 35 and detect the loading pressure on each side of the loaded wafer 10. Or the level sensor is installed to detect the level error of the base 35 or the wafer 10. The sensor is installed to be fixed vertically to the base 35 and the detection side gravity direction, and is provided around the gravity pendulum provided inside. Touch sensor or pressure sensor. Or the altimeter is set on the base 35. In addition, a display unit is connected to the control unit 44 to display the horizontal status information of the base 35 or wafer 10 received by the sensor 43, and an input form M248014 for the link control financial yuan 44. The receiving level is set as the # instruction , Convert it to an instruction code and transfer to the control unit 44. 10 15 Therefore, the operator checks the level alignment state of the base 35 or the wafer 10 through the display unit. In the case of non-horizontal alignment, the operator's instruction inputs the material control element 44 through the input unit. The unit 44 and the analysis of the XY axis leveling information received by Yu Zhichun and the motor connected to the horizontal control driving component through the axis are controlled to horizontally align the base or wafer. In addition, the level is periodically repeated according to the program inside the control unit 44, and in some cases, it is performed step by step according to the operator's instructions. According to the original boat I transfer elevator system with horizontal automatic control function, the elevator system can align the wafer level on the boat by detecting the boat's inclination and automatically controlling the level of the wafer, thus saving operating time. And efforts to prevent wafer deviations * to produce high-quality wafers. Again, although this creation has been explained in detail, you must understand that you can not deviate from the essence and scope of the original narrative as defined by the full-time professional to make a variety of changes, substitutions and changes.

[Schematic description]

Figure 1 is a schematic representation of the work of the elevator system; no example illustrates the conventional semiconductor boat transfer 20; Figure 2 is a bottom view example illustrating the first lowering system; Figure 3 semiconductor boat solitary transfer 3 The figure is a schematic representative diagram illustrating the operation of the lifter system for semiconductor boat m transfer according to the specific example of this creation; Figure 4 is a schematic illustration illustrating the solitary movement of a semiconductor boat with automatic level control function 12 M248014 in Figure 3 Switch to a lift system; and Figure 5 is a bottom view illustrating the horizontal control unit of Figure 4. [Representative symbol table of main components of the drawing] 10.... Wafer 12.... Cassette transfer device 13.... Wafer transfer device 14... Boat m 15.. Base 16... Control panel 17. Lift 18. Heating chamber 19. Quartz tube 20. Hex head bolt 21. Wing nut 34 ... Boat 35. Base 36. Control level Plate 37 .. Elevator 40 .. Horizontal control drive part 41 .. Driving force generation part 43 .. Sensing unit 44 ... Control unit 40a .... X-axis horizontal control drive part 40b ... Y-axis horizontal control ... Crane parts 41a ... X axis motor 41b ... Y axis motor 42 ... axis 11 ... cassette

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Claims (1)

Scope of patent application: 1. A lifter system for semiconductor boat transfer with horizontal automatic control function, the system includes:-boat, which is formed to support a plurality of semiconductor wafers parallel to each other; A circle that rides horizontally on the lower bottom wire; • -elevator 'is connected to the boat to move the boat up and down by a sensing unit, and the boat is in the position When the wafer position in the boat is read on a plane that is inclined with respect to the horizontal plane, the state is measured by using it;-a horizontal control unit, which is placed between the boat base and the elevator, is used to tilt the Boat base 俾 to adjust the distance between the boat base and the lift; and ^ ㈣ single to receive information from the sensing H device that can indicate the horizontal state of the azimuth of the boat, and according to the information The control number is output to the horizontal control device. For example, the elevator system of the first patent application range, wherein the horizontal control device includes: a horizontal control board, set to the elevator; a plurality of suppression units, The bottom is mixed with the horizontal control board, wherein the horizontal elastic part moves elastically up and down to change the distance between the boat base and each part of the rotary board M248014, and thereby tilt on each part The boat stand; and a driving force generating component, which is operatively connected to the horizontal control driving component, and is used to drive the horizontal driving component. 5 3. The elevator system according to item 2 of the patent application, each of which The horizontal control unit includes: a group of internal threads, which are integrated with one of the base and the horizontal control board; a screw, which can be vertically extended into the group of internal threads; and 10 a transmission element, which It is connected to the screw and the horizontal control driving part, so as to transmit the output force of the horizontal control driving part to the screw, and the output force can form a rotational driving force for rotating the screw. The elevator system, wherein the transmission element comprises at least one gear. 15 5. The elevator system according to item 3 of the patent application, wherein the transmission element comprises to One less belt and one pulley. 6. If the elevator system of the scope of patent application item 3, the transmission element includes at least one chain and a sprocket. 7. If the elevator system of the scope of patent application item 3, the transmission element 20 includes at least one metal wire and a pulley. 8. The lift system of claim 3, wherein the driving force generating component includes a DC electric motor, which receives the DC power from the control unit to generate the DC power. Rotary driving force. 9. The lift system of claim 3, wherein the driving force generating component includes an AC electric motor, which generates the rotary driving force by receiving AC power from the control unit. 10. For example, please refer to the elevator system of item 3 of the patent, wherein the driving force 5 & section includes a ―gear stirrup, and H is received by the power from the control unit to generate the rotary driving force. The patent claims that the driving age generation system of item 3, wherein the driving force generating component includes a stepping motor, which generates the rotary driving force by receiving a power from the control unit. 1012. If the lift system of item 8 or 9 of the scope of patent application, the control unit receives information on the level of the boat from the sensing unit, compares the received T lean material with the information that has been entered, and changes the voltage or current The error between the two data is corrected, and the DC or AC motor is controlled by applying the DC power and the AC power to the DC or AC motor. Η 13. If the elevator system with the scope of patent application _, the control unit 15 帛 receives the boat's horizontal state information from the sensing unit, compares the received data with the input data, and changes the power to _ positive pulse or The negative pulse wave is used to correct the error between the two sides, and the positive or positive pulse wave is applied to the stepping motor to control the stepping motor. 14. The elevator system according to item 3 of the patent application scope, wherein the driving force shifting unit is a shaft for transferring the rotary driving force. & The elevator system according to item 2 of the patent application scope, wherein the horizontal control driving unit includes; an X-axis horizontal control driving component, which is located below the base and along the X-axis to an origin of the X-axis and the γ-axis Side, where the X-axis horizontally controls the 16-moving component to control the base relative to the system, which is located below the base and controls the inclination of the 4-component base relative to the X-axis along the control stage. . • For example, the second driving range of the patent application scope, Hirosaka, and Tong, in which the horizontal control part ZΓΐ Qian Yusi generates 17λ pressure from one's own power, can be contracted or extended in one or two directions. = Please lift the system of item 2 of the patent, which includes: • moving parts $ $ dry control 10 parts of the air pressure center, by receiving from the driving force generated, the barrier can be contracted or extended in the early or two directions. The elevator system of the scope of patent application No. 2 in which the horizontal control pipeline is received from the driving force production department: Department] β gas firm can be contracted or extended in one or two directions. 15 = Elevator system 1 in any of claims 16-18 in the scope of patent application = The driving force generating material is a liquid pump, which provides the air pressure or liquid pressure to the level control drive component. 20. The lifting system according to item 16-18 of the patent application scope, wherein the 20 generating component is a liquid switching pipeline for switching the air pressure or hydraulic pressure to the level control driving component according to the control of the control unit. 21 · If the elevator system of the scope of application for the patent No. 20, wherein the control unit, select 1 * habitat open or _ the liquid conversion pipeline to selectively convert = the driving force generated by the power generation component to the level control drive The elevator system of claiming patent No.1, wherein the sensing unit 17 M248014 includes a level meter placed on the base of the boat. 23. For example, the elevator system of the scope of patent application, wherein the sensing unit includes two pairs of photoreceptors and light-emitting sensors facing each other, thereby emitting light from a light-emitting sensor to a photoreceptor associated with the light-emitting device. The light rays are transmitted vertically relative to the light rays emitted from another luminous sensor to the photoreceptor associated with it. 24. For example, the elevator system of the scope of patent application, wherein the sensing unit includes a plurality of pressure sensors, which are arranged below the base and are used to detect the load of the wafer on the base. 10 25. The elevator system according to item 1 of the scope of patent application, wherein the sensing unit includes a horizontal sensor fixed vertically to the base, and is used for detecting the horizontal error of the base. 18