TWM244573U - Wafer box carrier - Google Patents

Abstract

A carrier for wafer boxes is provided. The carrier includes a carrier main body, a cover device and a shock absorbing device. The carrier main body carries at least one wafer box, and the shock absorbing device is disposed on the carrier main body and includes an oblique shock absorber so as to protect the carrier from a shock.

Description

M244573 V. Creation Description (1) The technical field to which the new type belongs ^ This creation is a carrier for a wafer cassette, which includes a carrier body, a cover, and a shock-resistant Pei Zhi. By using the wafer box carrier provided by this creation, the wafer box can be transported more safely and conveniently. 0 The previous technology is generally used. The 2-leaf pre-process is used to open the fied pod. , FOUP) flaws, and transportable F0SB), which must be used in contact with the outside of the test room, which usually need to be placed in a shock-absorbing design, but shock-absorbing casters still have shock points. Please refer to the first picture for a shock when the shock absorber 11 and a roll 14 are made in a single vertical (not shown). Inevitably, there will be a VD shock absorber 11 design and generally a gray-black The less open wafer box can be roughly divided into the semiconductor front-end unified wafer box (Front Opening Uni- 'wafers at this time are less susceptible to damage and are produced outside the semiconductor packaging and testing plant at the rear stage). During the process, the process of dicing wafers and packaging and testing of wafer cassettes (Front Opening Shipping β〇χ, and transportation wafer cassettes (fosb) are carried on outdoor trolleys, while general trolleys are on wheels) Although its effect is not good, even if the existing moving direction on the market is limited to a single #vertical direction, it can be seen that a suspension caster (Caster) 10, A is the axis of the taxi wheel 12, and the roller 12 13 in a narrow and long ^ = shift to achieve a load-bearing effect 'However, when the cart makes horizontal vibration in the water 1 this single = moving time meter is really not ideal. When the truck is used in the straight direction to the rear process Clear metal vacuum bag seals wafer box To use in the West?,

$ 4 pages 5. Creation instructions (2) When the buffer material is loaded into the paper f, it is not easy to clarify to the total head θ j. When the wafers transported are broken, they will not be rolled because of the transport workers 1 = Ended in the previous paragraph Fragmentation before shipment, or fragmentation, is really intolerable: if method (for example, · lost) is caused, and there is no way to clarify the M = process can clearly see the condition of the wafer used in the cart Some problems with good product f. In the rear plant, when the aforementioned shock-absorbing two-to-two and three-to-three vehicles were used to transport the trolley, the push should be improved. If the situation is not good, these problems do exist. Therefore, in order to improve the loadability and transparency of the wafer box, in order to overcome the situation of stable binding that is limited to a single time, the author caused the experimental belt to take into account at the same time. To the vertical and horizontal = the solid container can be new content guanidine. The main purpose of this creation is to use a cover to install a wafer box between the cover and the carrier body. π and j Μ each set another purpose of this creation is to use one of the shock absorbing devices obliquely to avoid one of the vehicle's vertical and one horizontal shock absorbing effect. For this purpose, another purpose of this creation is to use the complexity of the cover and _ only 'to cover the first and first U-boxes and the second cover plate in the carrier, as a kind of wafer box. The tool includes a carrier body, which is directly used for at least one wafer box and a cover, and is mounted on the carrier body i

Page 5 M244573 V. Creation Instructions (3), and the cover of the wafer box has a better device with a shock device for covering the light yellow transparent one (FOSB), and the The board is turned on. An accommodating space is formed between the vehicle body and the vehicle body for accommodating and a shock absorbing device, and the vehicle body is mounted on the vehicle body. The oblique shock absorber achieves a shock absorbing effect of the vehicle. = The cover of the carrier is provided with a first and a second cover, one of the first and a second wafer cassette in the tool, and the cover is a cover. The wafer box is a wafer box for transportation (the first cover plate has a clamping portion to clamp the second cover as a first first and when connecting to a first branch building should be It should be convenient to accommodate the comparative vehicle, the first and the second, the second best, the second best, the first cover, the second cover, and the second best. And the first cover axis of the carrier is at the position where the first pan axis of the carrier is opened, the handle of the carrier is far from the board of the carrier. The carrier of the carrier slides into the carrier's round box and the carrier is placed. The first and second cover systems can be installed to rotate the first and second cover systems to one or two cover systems, respectively, and the second and first cover positions can be used to open the first and second cover positions. The first cover plate mounting device can be hidden by the system. The system can be inserted into the vehicle body. The second cover plate is provided with a connecting plate, which is a horizontal position. There is a first one and the second cover. There is a support air pressure rod to have a receiving bottom. To have a movable partition and a push rod to push it through an antistatic treatment. M244573 V. Creative Instructions (4) Preferably, the suspension device of the vehicle has a roller, the inclined The shock absorber is fixed between a first positioning shaft and the roller, and the oblique avoider uses the first positioning shaft as a first axis of rotation. Of course, the shock absorbing device of the plant can have A fixed base and two rotating plates are fixed between the fixed base and the roller: the fixed base is provided with a second positioning shaft, and the rotating plate The second positioning axis is a second rotation axis, and the roller is equipped with _ 鲇 to engage the rotating plate. ^% Axis ® ", the two rotating plates of the vehicle's suspension device can be installed There is a stiffening link to strengthen the joint stiffness of the two rotating plates, and a fixed axis plate is installed on the fixed base to fix the first positioning axis. Preferably, the roller of the carrier has an extended axis. In order to fix the directional shock absorber, preferably, the carrier is a trolley and the carrier body It has a positioning mechanism to fix the carrier on a transport vehicle. Of course, the carrier's carrier system can be provided with a first and a second anti-collision edge to prevent one side of the carrier body. According to another implementable point of view, 'this creation is a carrier of a wafer cassette, which includes a carrier body for carrying at least one wafer cassette'. A cover is installed on An accommodating space is formed on the carrier body between the cover and the carrier body to accommodate the wafer cassette and a shock absorbing device. One of the vehicle ’s shock-absorbing effects Of course, the vehicle ’s shock-absorbing device can have an oblique shock absorber,

M244573 V. Creation Instructions (5) to obtain the shock-absorbing effect. If viewed from another perspective, this creation is a carrier of a wafer box, which includes a carrier body for carrying at least one wafer box and a shock absorbing device mounted on the carrier body. And an oblique shock absorber installed on the shock-absorbing device to obtain a shock-absorbing effect of the vehicle. Preferably, the carrier further includes a cover member, which is mounted on the carrier body, and an accommodating space is formed between the cover member and the carrier body to house the wafer cassette. # This creation is explained by the above concept, that is, the carrier of the wafer box used can be observed, and indeed a cover can be installed on the carrier body, which can be used between the cover and the carrier body. An accommodating space is formed therebetween for accommodating the wafer cassette 'and has the characteristics of using an oblique shock absorber to obtain a vertical and a horizontal shock absorption of one of the carriers. For ease of explanation, the present invention is better understood through the following preferred embodiments and illustrations. Symbols of the main parts: shock absorber shaft center vertical direction vehicle body cover shock absorber 10: shock-absorbing caster u 1 2: roller

14. Slotted groove VD 2 0: Carrier 21 22: (first) wafer cassette 23 24: accommodating space 25 2 6: oblique shock absorber 31: second cover 33: clamping portion 30: first A cover plate 32: the second wafer cassette

Page 8 M244573 34: First open position 3 6: Support air pressure rod 3 8: Movable partition 4 0: First 'first cover shaft 4 2': Connection plate 44: Second open handle 4 6 Edge strip 51: First positioning shaft 5 3 · Rotating plate 5 5: Roller shaft 5 7: Positioning shaft plate T1: First rotation direction 6 〇: Refer to the second figure for the positioning mechanism implementation, a carrier body 21 It is mounted on the vehicle body 21 to form an accommodating space 2 4. It is mounted on the vehicle body 21 to obtain one of the vehicles 20. Please refer to the third figure. A cover plate 3 0, 3 1, Used for 22, 32, and the cover 23 is a fragment and a convenient point of intersection 35 37 39 41 43 45 50 52 54 56 58 Hold a light yellow amount, and the second open position accommodates the bottom slot push rod. The second cover shaft. The first open handle. The first bumper. The roller fixed base. The second positioning shaft. A carrier 20 of a wafer cassette includes at least one wafer cassette 22, a cover 23, and a round box 22 between the lid 23 and the carrier body 21, And a shock absorbing device 25. The device 25 has an oblique shock absorber 2β, and the cover member 23 has a first and a second wafer box-colored transparent cover in the first and first 20, which can be clearly seen. Seeing that it can save the consumption of metal vacuum M244573 V. Creative Instructions (7) and cardboard boxes. Wafer: ’and the first cover 3. There is a clamp. The box (to be installed with the-first-and first and second cover plates 30, 31 is accessible to the second cover 30, 31 to first first "and one of the plate shaft 40, 41 'to Rotating the-cover m can be equipped with ⑽, 35. Second, the-opening # ππ Ρ & paddle to connect to the second cover shaft 41, the first position 35 is a horizontal position 31 series It has a first and a younger brother and a younger one 30, the first and second cover plates 30,31- / opening handle 43,44, to facilitate the opening of the figure) a building _6 (detailed The third bottom groove 37 is used to accommodate the sliding of the second cover 载. It contains four movable partition plates 38 for the convenience of # ^ '、 之 置入 # and Tai ^ 乂 Wan will be located on the lower level The second wafer box 32 ΐίίΪ The tool body 21 is provided with a push rod 39 to push the carrier body, and the first and second sheets are ^^. The cage cage 5ISI well-plates 30, 31 are all passed an antistatic Read more about the fifth picture in the processing mouth, the shock absorber 2 of the vehicle 20, and the oblique shock absorber 26 are fixedly mounted on the first __ 定 # -μ & 50 / Γ position axis Η and the roller 50, and U second axis is 51 first center of rotation axis. Eight-fixed base 52 and two rotating plates 53, the two rotating plates 53 are fixedly fixed between the fixed base 52 and the roller 5Q. The fixed base η is provided with a second positioning shaft 54. The rotating plate 53 That is, the second positioning shaft 54 is the second and third rotation axis center, and the roller 50 is provided with a roller shaft 55, which is connected to the shock absorbing device 25 of the rotating plate carrier 20. The rotating plate 53 is provided with a stiffening M244573. Creation instructions (8) The connecting rod 5 6 is used to strengthen the two rotating plates 52. A positioning shaft plate 57 is provided, an extended shaft center 5 8 is used, and the inclined carrier 20 is used as a hand truck. The tool 20 can be equipped with a first and a carrier body 21 to impact on one side of a transport vehicle 21. A second rotation direction Tl, T2. For example, according to another implementable box carrier 20 It includes a carrier round box 22, a cover 23, which is installed between the carrier and the carrier body 21, and a shock absorbing device 25, which is installed in a shock absorbing effect. Of course, at this time, it has a The oblique shock absorber 25 is provided to obtain 20 from another angle. The shock absorber 25 includes a carrier body 21 ′ and a shock absorbing device 25. The carrier 26 is mounted on the shock absorbing device 25. Of course, the carrier 20 at this time can be further equipped with the main body 21, and the cover 23 and the space 24 to accommodate the wafer box 22. The linkage of the sheet 53 Stiffness, and the fixed base fixes the first positioning shaft 51. The roller 50 has a shock absorber 26. Referring to the sixth figure, the tool body 21 has two positioning mechanisms 60 (not shown in the figure). The second bumper side strip 4 5, 4 6 of the carrier body to prevent and the fixed base 52 has a first and perspective, this creation is a wafer body 21 for carrying at least one crystal on the carrier On the tool body 21, a space 24 is placed on the cover member 23 to accommodate the wafer cassette 22, and the shock absorbing device 25 of the carrier 20 obtained on the carrier body 21 can cause the shock absorbing effect. See, this creation is a kind of wafer box load, which is used to carry at least one wafer box 22 on the body 21 'and an oblique shock absorption' to obtain a shock absorption effect of the carrier 20 to include a cover 23. It is installed between the vehicle body 21 to form a space. By using the vehicle body, the above-mentioned creation can be installed on the vehicle body with a new square cover. , You can use the cover ^

Page 11 M244573 V. Creation instructions (9) An accommodating space is formed between the wafer cassettes, and one of the shock absorbers used is an oblique shock absorber, which is sufficient to obtain a vertical orientation of one of the carriers. And a horizontal shock absorption effect, which is very suitable for industrial production. Therefore, those who are familiar with this technology can be modified by various techniques, but they are not inferior to those who want to protect the scope of patent application.

The M244573 diagram on page 12 briefly explains the first diagram: a side view of one of the prior art shock-absorbing casters; the second diagram is a three-dimensional intention of the preferred embodiment of the carrier of the wafer box created by this, The third figure: the three-dimensional schematic diagram of the movable partition of the carrier of the wafer box of the second figure; the fourth figure: the three-dimensional diagram of the carrier of the wafer box of the second figure after the closure is completed schematic diagram·,

Fig. 5 is a schematic view of the explosion of the shock absorbing device in Fig. 2; and Fig. 6 is a perspective view of the positioning mechanism of the carrier of the wafer cassette in Fig. 2.

Page 13

Claims (1)

M244573 6. Scope of patent application1. A carrier for a wafer box, including: a carrier body for carrying at least one wafer box; a cover member mounted on the carrier body, and An accommodating space is formed between the cover member and the carrier body to accommodate the wafer cassette; and a shock absorbing device is installed on the carrier body, and the shock absorbing device has an oblique shock absorption. Device, resulting in one of the vehicle's shock-absorbing effects. 2 · The carrier as described in item 1 of the scope of patent application, wherein the cover has a first and a second cover plate for covering one of the first and second wafer cassettes in the carrier The cover is a light yellow transparent cover. 3. The carrier as described in item 2 of the scope of patent application, wherein the wafer box is a wafer box for transportation (FOSB), and the first cover plate has a `` clamp & part '' to clamp the first Open the second cover. 4. The carrier according to item 2 of the scope of patent application, wherein the first and second cover plates are respectively equipped with a first and a second cover shaft to rotate the first and the second cover. Plate to a first and a second open position. 5. The vehicle according to item 4 of the scope of patent application, wherein the second cover plate is provided with a connecting plate to connect the second cover shaft, and the second open position is a horizontal position. 6 · The vehicle according to item 2 of the scope of patent application, wherein the first and the second cover plates each have a first and a second opening handle to facilitate opening the first and the second cover plates. . 7. The load according to item 2 of the scope of patent application ^ 'wherein the first cover plate is provided with a support air pressure rod to support the first cover plate. 8 · The vehicle as described in item 2 of the scope of patent application, wherein the vehicle has the system 14 tribute No. M244573 VI. Scope of patent application There is a receiving bottom groove to accommodate the sliding in and hiding of the second cover. 9. The carrier according to item 2 of the scope of patent application, wherein the system of the carrier has a movable partition to facilitate the placement of the second wafer box into the carrier body. 0. 0. The vehicle according to item 2, wherein the system of the vehicle has a push rod to push the vehicle body, and the first and the second cover plates are all subjected to an antistatic treatment. 1 1. The vehicle according to item 1 of the scope of patent application, wherein the shock absorbing device has a roller, the oblique shock absorber is fixed between a first positioning shaft and the roller, and the oblique To the shock absorber, use the first positioning axis as a first rotation axis. 12. The carrier according to item 11 of the scope of patent application, wherein the shock absorbing device has a fixed base and two rotating plates, The two rotating plates are fixed between the fixed base and the roller. The fixed base is provided with a second positioning shaft, and the rotating plate uses the second positioning shaft as a second rotation axis. The roller is equipped with a roller shaft to connect the rotating plate. 13. The vehicle according to item 12 of the scope of the patent application, wherein the two rotating plates of the shock absorbing device are provided with a stiffening link to strengthen the linkage stiffness of the two rotating plates, and the fixing The base is provided with a positioning shaft plate for fixing the first positioning shaft. 14. The vehicle according to item 11 of the scope of patent application, wherein the roller has an extended axis to fix the oblique shock absorber. 1 5 · The carrier as described in item 1 of the scope of patent application, which is a trolley, and the carrier body has a positioning mechanism to fix the carrier to a transport vehicle Page 15 M244573 6. Scope of patent application On board. 1 6. The vehicle according to item 1 of the scope of patent application, wherein the vehicle is equipped with a first and a second anti-collision edge strip to prevent a side impact of the vehicle body. 17. A carrier for a wafer box, comprising: a carrier body for carrying at least one wafer box; a cover member mounted on the carrier body, and between the cover member and the Forming an accommodation space between the carrier bodies to accommodate the wafer cassette; and A shock absorbing device is installed on the vehicle body to obtain a shock absorbing effect of the vehicle. 18. The vehicle according to item 17 of the scope of patent application, wherein the shock absorbing device has an oblique shock absorber so as to obtain the shock absorbing effect. 19. A carrier for a wafer box, comprising: a carrier body for carrying at least one wafer box; a shock absorbing device mounted on the carrier body; and an oblique shock absorber It is installed on the shock-absorbing device, and one of the shock-absorbing effects of the vehicle is obtained. 20. The vehicle according to item 19 of the scope of patent application, further comprising a cover member, which is installed on the vehicle body, and an accommodation space is formed between the cover member and the vehicle body, To accommodate the wafer cassette. Page 16