TWI852520B - Chip package and manufacturing method thereof - Google Patents
Chip package and manufacturing method thereof Download PDFInfo
- Publication number
- TWI852520B TWI852520B TW112116140A TW112116140A TWI852520B TW I852520 B TWI852520 B TW I852520B TW 112116140 A TW112116140 A TW 112116140A TW 112116140 A TW112116140 A TW 112116140A TW I852520 B TWI852520 B TW I852520B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- transmitting sheet
- chip
- layer
- redistribution
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 239000000463 material Substances 0.000 claims abstract description 17
- 230000004888 barrier function Effects 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000009413 insulation Methods 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Abstract
Description
本揭露是有關一種晶片封裝體及一種晶片封裝體的製造方法。The present disclosure relates to a chip package and a method for manufacturing the chip package.
一般而言,用於影像感測的晶片封裝體可包括晶片及在晶片上的透光片。透光片可覆蓋晶片之影像感測區,以保護影像感測區避免受到汙染或外力破壞。由於晶片的厚度會影響晶片封裝體的強度,因此當晶片的厚度較薄時,晶片上方的透光片所提供的支撐力可能會有所不足。此外,當晶片的厚度較厚時,雖然晶片本身的強度足夠,但較厚的晶片將不利矽通孔(TSV,Through silicon via)的形成。Generally speaking, a chip package for image sensing may include a chip and a light-transmitting sheet on the chip. The light-transmitting sheet may cover the image sensing area of the chip to protect the image sensing area from contamination or external damage. Since the thickness of the chip affects the strength of the chip package, when the chip is thin, the support provided by the light-transmitting sheet above the chip may be insufficient. In addition, when the chip is thicker, although the strength of the chip itself is sufficient, the thicker chip will be unfavorable for the formation of through silicon vias (TSV).
本揭露之一技術態樣為一種晶片封裝體。One technical aspect of the present disclosure is a chip package.
根據本揭露之一些實施方式,一種晶片封裝體包括晶片、支撐件、第一透光片、第二透光片、第一重佈線層與第二重佈線層。晶片的頂面具有導電墊與感測區。支撐件位於晶片的頂面上且圍繞感測區。第一透光片位於支撐件上且覆蓋感測區。第二透光片位於晶片的底面,且第二透光片與第一透光片具有相同材料。第一重佈線層電性連接導電墊且延伸至晶片的底面。第二重佈線層電性連接在晶片的底面上的第一重佈線層,且第二重佈線層延伸至第二透光片的底面。According to some embodiments of the present disclosure, a chip package includes a chip, a support, a first light-transmitting sheet, a second light-transmitting sheet, a first redistribution layer, and a second redistribution layer. The top surface of the chip has a conductive pad and a sensing area. The support is located on the top surface of the chip and surrounds the sensing area. The first light-transmitting sheet is located on the support and covers the sensing area. The second light-transmitting sheet is located on the bottom surface of the chip, and the second light-transmitting sheet and the first light-transmitting sheet have the same material. The first redistribution layer is electrically connected to the conductive pad and extends to the bottom surface of the chip. The second redistribution layer is electrically connected to the first redistribution layer on the bottom surface of the chip, and the second redistribution layer extends to the bottom surface of the second light-transmitting sheet.
在一些實施方式中,上述晶片封裝體更包括接合層。接合層位於晶片與第二透光片之間。In some embodiments, the chip package further includes a bonding layer located between the chip and the second light-transmitting sheet.
在一些實施方式中,上述接合層的一部份位於晶片中。In some embodiments, a portion of the bonding layer is located in the chip.
在一些實施方式中,上述晶片封裝體更包括絕緣層。絕緣層位於接合層與晶片之間,且位於晶片與第一重佈線層之間。In some embodiments, the chip package further includes an insulating layer located between the bonding layer and the chip, and between the chip and the first redistribution layer.
在一些實施方式中,上述晶片封裝體更包括緩衝層。緩衝層位於絕緣層與接合層之間。In some implementations, the chip package further includes a buffer layer located between the insulating layer and the bonding layer.
在一些實施方式中,上述第二重佈線層穿過在晶片的底面上的第一重佈線層。In some implementations, the second redistribution layer passes through the first redistribution layer on the bottom surface of the chip.
在一些實施方式中,上述晶片封裝體更包括阻隔層。阻隔層覆蓋第二透光片的底面與第二重佈線層。In some implementations, the chip package further includes a barrier layer that covers the bottom surface of the second light-transmitting sheet and the second redistribution layer.
在一些實施方式中,上述阻隔層的一部份位於第二透光片中。In some implementations, a portion of the barrier layer is located in the second light-transmitting sheet.
在一些實施方式中,上述晶片封裝體更包括導電結構。導電結構電性連接在第二透光片的底面上的第二重佈線層,且凸出於阻隔層。In some embodiments, the chip package further includes a conductive structure which is electrically connected to the second redistribution layer on the bottom surface of the second light-transmitting sheet and protrudes from the barrier layer.
本揭露之一技術態樣為一種晶片封裝體。One technical aspect of the present disclosure is a chip package.
根據本揭露之一些實施方式,一種晶片封裝體包括晶片、支撐件、第一透光片、第二透光片與重佈線層。晶片的頂面具有導電墊與感測區,其中導電墊凸出晶片的側壁。支撐件位於晶片的頂面上且圍繞感測區。第一透光片位於支撐件上且覆蓋感測區。第二透光片位於晶片的底面,且第二透光片與第一透光片具有相同材料。重佈線層從支撐件的底面延伸至第二透光片的底面,且電性連接凸出晶片的側壁的導電墊。According to some embodiments of the present disclosure, a chip package includes a chip, a support, a first light-transmitting sheet, a second light-transmitting sheet, and a redistribution layer. The top surface of the chip has a conductive pad and a sensing area, wherein the conductive pad protrudes from the side wall of the chip. The support is located on the top surface of the chip and surrounds the sensing area. The first light-transmitting sheet is located on the support and covers the sensing area. The second light-transmitting sheet is located on the bottom surface of the chip, and the second light-transmitting sheet and the first light-transmitting sheet have the same material. The redistribution layer extends from the bottom surface of the support to the bottom surface of the second light-transmitting sheet, and is electrically connected to the conductive pad protruding from the side wall of the chip.
在一些實施方式中,上述晶片的側壁與晶片的底面夾鈍角。In some implementations, the sidewall of the chip and the bottom surface of the chip are blunt.
在一些實施方式中,上述晶片封裝體更包括接合層。接合層覆蓋晶片的底面與側壁,且延伸至導電墊的底面,其中接合層的側面與重佈線層接觸。In some embodiments, the chip package further includes a bonding layer, which covers the bottom surface and side walls of the chip and extends to the bottom surface of the conductive pad, wherein the side surface of the bonding layer contacts the redistribution layer.
在一些實施方式中,上述第二透光片具有側壁,第二透光片的側壁與底面夾鈍角,且第二透光片的側壁與重佈線層接觸。In some implementations, the second light-transmitting sheet has a side wall, the side wall of the second light-transmitting sheet and the bottom surface form a blunt angle, and the side wall of the second light-transmitting sheet contacts the redistribution wiring layer.
在一些實施方式中,上述重佈線層的頂部高於晶片的頂面。In some implementations, the top of the redistribution layer is higher than the top surface of the chip.
在一些實施方式中,上述晶片封裝體更包括第一阻隔層、第二阻隔層與導電結構。第一阻隔層位於第二透光片的底面,其中重佈線層的一部分覆蓋第一阻隔層。第二阻隔層覆蓋第二透光片的底面與重佈線層。導電結構電性連接重佈線層,且凸出於第二阻隔層。In some embodiments, the chip package further includes a first barrier layer, a second barrier layer and a conductive structure. The first barrier layer is located on the bottom surface of the second light-transmitting sheet, wherein a portion of the redistribution wiring layer covers the first barrier layer. The second barrier layer covers the bottom surface of the second light-transmitting sheet and the redistribution wiring layer. The conductive structure is electrically connected to the redistribution wiring layer and protrudes from the second barrier layer.
本揭露之一技術態樣為一種晶片封裝體的製造方法。A technical aspect of the present disclosure is a method for manufacturing a chip package.
根據本揭露之一些實施方式,一種晶片封裝體的製造方法包括將第一透光片接合於晶圓的頂面,使支撐件位於第一透光片與晶圓之間,其中晶圓的頂面具有導電墊與感測區,第一透光片覆蓋感測區;蝕刻晶圓的底面以形成露出導電墊的穿孔;形成第一重佈線層電性連接露出的導電墊且延伸至晶圓的底面;接合第二透光片於晶圓的底面,其中第二透光片與第一透光片具有相同材料;在第二透光片中形成露出第一重佈線層的開口;以及形成第二重佈線層電性連接從開口露出的第一重佈線層,其中第二重佈線層延伸至第二透光片的底面。According to some embodiments of the present disclosure, a method for manufacturing a chip package includes bonding a first light-transmitting sheet to the top surface of a wafer so that a support is located between the first light-transmitting sheet and the wafer, wherein the top surface of the wafer has a conductive pad and a sensing area, and the first light-transmitting sheet covers the sensing area; etching the bottom surface of the wafer to form a through hole exposing the conductive pad; forming a first redistribution layer electrically connected to the exposed conductive pad and extending to the bottom surface of the wafer; bonding a second light-transmitting sheet to the bottom surface of the wafer, wherein the second light-transmitting sheet and the first light-transmitting sheet have the same material; forming an opening in the second light-transmitting sheet to expose the first redistribution layer; and forming a second redistribution layer electrically connected to the first redistribution layer exposed from the opening, wherein the second redistribution layer extends to the bottom surface of the second light-transmitting sheet.
在一些實施方式中,上述晶片封裝體的製造方法更包括形成絕緣層於晶圓的底面與穿孔的壁面上。In some implementations, the manufacturing method of the chip package further includes forming an insulating layer on the bottom surface of the wafer and the wall surface of the through hole.
在一些實施方式中,上述晶片封裝體的製造方法更包括形成緩衝層於在晶圓的底面上的絕緣層上。In some embodiments, the manufacturing method of the chip package further includes forming a buffer layer on the insulating layer on the bottom surface of the wafer.
在一些實施方式中,上述在第二透光片中形成露出第一重佈線層的開口使得開口穿過在晶片的底面上的第一重佈線層且延伸至緩衝層中。In some embodiments, the opening formed in the second light-transmitting sheet to expose the first redistribution layer passes through the first redistribution layer on the bottom surface of the chip and extends into the buffer layer.
在一些實施方式中,上述晶片封裝體的製造方法更包括形成接合層覆蓋晶圓的底面且填滿穿孔。In some embodiments, the manufacturing method of the chip package further includes forming a bonding layer to cover the bottom surface of the wafer and fill the through hole.
在本揭露上述實施方式中,由於晶片封裝體具有分別在晶片的頂面與底面上的第一透光片與第二透光片,因此可強化晶片封裝體,提升強度。當晶片的厚度為客製化或較薄時,可選用或研磨出適當厚度的第二透光片來提供晶片支撐力。如此一來,晶片的厚度選擇將具彈性,可使用較薄的晶片製作晶片封裝體,較易於形成矽通孔。此外,第一透光片、晶片與第二透光片為三明治結構,且第一透光片與第二透光片具有相同材料,可平衡因熱膨脹係數 (CTE,Coefficient of thermal expansion)差異所產生的應力。In the above-mentioned embodiment of the present disclosure, since the chip package has the first light-transmitting sheet and the second light-transmitting sheet respectively on the top and bottom surfaces of the chip, the chip package can be strengthened and the strength can be improved. When the thickness of the chip is customized or thin, a second light-transmitting sheet of appropriate thickness can be selected or ground to provide chip support. In this way, the thickness selection of the chip will be flexible, and a thinner chip can be used to make the chip package, which makes it easier to form silicon through-holes. In addition, the first light-transmitting sheet, the chip and the second light-transmitting sheet are a sandwich structure, and the first light-transmitting sheet and the second light-transmitting sheet have the same material, which can balance the stress caused by the difference in the coefficient of thermal expansion (CTE).
以下揭示之實施方式內容提供了用於實施所提供的標的之不同特徵的許多不同實施方式,或實例。下文描述了元件和佈置之特定實例以簡化本案。當然,該等實例僅為實例且並不意欲作為限制。此外,本案可在各個實例中重複元件符號及/或字母。此重複係用於簡便和清晰的目的,且其本身不指定所論述的各個實施方式及/或配置之間的關係。The embodiments disclosed below provide many different embodiments, or examples, for implementing the different features of the subject matter provided. Specific examples of components and arrangements are described below to simplify the present invention. Of course, these examples are only examples and are not intended to be limiting. In addition, the present invention may repeat component symbols and/or letters in each example. This repetition is for the purpose of simplicity and clarity, and does not itself specify the relationship between the various embodiments and/or configurations discussed.
諸如「在……下方」、「在……之下」、「下部」、「在……之上」、「上部」等等空間相對術語可在本文中為了便於描述之目的而使用,以描述如附圖中所示之一個元件或特徵與另一元件或特徵之關係。空間相對術語意欲涵蓋除了附圖中所示的定向之外的在使用或操作中的裝置的不同定向。裝置可經其他方式定向(旋轉90度或以其他定向)並且本文所使用的空間相對描述詞可同樣相應地解釋。Spatially relative terms such as "below," "beneath," "lower," "above," "upper," and the like may be used herein for descriptive purposes to describe the relationship of one element or feature to another element or feature as illustrated in the accompanying figures. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the accompanying figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
第1圖繪示根據本揭露一實施方式之晶片封裝體100的剖面圖。如圖所示,晶片封裝體100包括晶片110、支撐件120、第一透光片130、第二透光片140、第一重佈線層150a與第二重佈線層150b。其中,晶片110的頂面111具有導電墊112與感測區114。支撐件120位於晶片110的頂面111上且圍繞感測區114。第一透光片130位於支撐件120上且覆蓋感測區114。第二透光片140位於晶片110的底面113,且第二透光片140與第一透光片130具有相同材料。第一重佈線層150a電性連接導電墊112且延伸至晶片110的底面113。第二重佈線層150b電性連接在晶片110的底面113上的第一重佈線層150a,且第二重佈線層150b延伸至第二透光片140的底面141。FIG. 1 shows a cross-sectional view of a chip package 100 according to an embodiment of the present disclosure. As shown in the figure, the chip package 100 includes a chip 110, a
在本實施方式中,晶片110可為影像感測晶片,其材質包括矽,感測區114用以感測影像,但並不用以限制本揭露。支撐件120的材料可為環氧樹脂(Epoxy),但並不以此為限。此外,第一透光片130與第二透光片140的材料可為玻璃。第一透光片130可供光線通過以讓感測區114接收到影像。第二透光片140可供光線通過以用於對位(Alignment),以利形成位置對應第一重佈線層150a的開口143,進而在後續製程中可形成電性連接第一重佈線層150a的第二重佈線層150b。In the present embodiment, the chip 110 may be an image sensing chip, and its material includes silicon. The
具體而言,由於晶片封裝體100具有分別在晶片110的頂面111與底面113上的第一透光片130與第二透光片140,因此可強化晶片封裝體100,提升強度。當晶片110的厚度為客製化或較薄時,可選用或研磨出適當厚度的第二透光片140來提供晶片110支撐力。如此一來,晶片110的厚度選擇將具彈性,可使用較薄的晶片110製作晶片封裝體100,較易於形成矽通孔(如穿孔115)。此外,第一透光片130、晶片110與第二透光片140為三明治結構,且第一透光片130與第二透光片140具有相同材料,可平衡因熱膨脹係數 (CTE,Coefficient of thermal expansion)差異所產生的應力。Specifically, since the chip package 100 has the first light-transmitting
在本實施方式中,晶片封裝體100更包括接合層160。接合層160位於晶片110與第二透光片140之間。接合層160的一部份位於晶片110中。如第1圖所示,接合層160填滿晶片110的穿孔115。晶片封裝體100還可包括絕緣層170。絕緣層170位於晶片110的底面113與穿孔115的壁面上,也就是說,絕緣層170位於接合層160與晶片110之間,且位於晶片110與第一重佈線層150a之間。In the present embodiment, the chip package 100 further includes a
此外,晶片封裝體100還可包括阻隔層180與導電結構190。阻隔層180覆蓋第二透光片140的底面141與第二重佈線層150b。導電結構190電性連接在第二透光片140的底面141上的第二重佈線層150b,且凸出於阻隔層180。導電結構190可電性連接外部裝置(例如電路板),並藉由導電墊112、第一重佈線層150a與第二重佈線層150b傳遞電訊號。In addition, the chip package 100 may further include a
應瞭解到,已敘述過的元件連接關係、材料與功效將不再重複贅述,合先敘明。在以下敘述中,將說明晶片封裝體的製造方法。晶片封裝體的製造方法採晶圓級(Wafer level)封裝,可提高良率與生產效率。It should be understood that the connection relationship, materials and functions of the components that have been described will not be repeated, and it is better to explain them first. In the following description, the manufacturing method of the chip package will be explained. The manufacturing method of the chip package adopts wafer level packaging, which can improve the yield and production efficiency.
第2圖至第6圖繪示第1圖之晶片封裝體100的製造方法在不同階段的剖面圖。參閱第2圖,將第一透光片130接合於晶圓110a的頂面111,使支撐件120位於第一透光片130與晶圓110a之間。晶圓110a為尚未經切割為第1圖之晶片110的半導體結構。支撐件120覆蓋導電墊112。在此步驟前,支撐件120可形成於第一透光片130的底面或晶圓110a的頂面111,並不用以限制本揭露。在一些實施方式中,可研磨晶圓110a的底面113以減少晶圓110a的厚度。Figures 2 to 6 show cross-sectional views of the manufacturing method of the chip package 100 of Figure 1 at different stages. Referring to Figure 2, the first light-transmitting
參閱第3圖,接著,可蝕刻晶圓110a的底面113以形成露出導電墊112的穿孔115。穿孔115形成後,可形成絕緣層170於晶圓110a的底面113與穿孔115的壁面上。3 , the
參閱第4圖,絕緣層170形成後,可形成第一重佈線層150a電性連接露出的導電墊112且延伸至晶圓110a的底面113。絕緣層170位於第一重佈線層150a與晶圓110a之間。接著,可藉由接合層160將第二透光片140接合於晶圓110a的底面113,其中第二透光片140與第一透光片130具有相同材料(例如玻璃)。在接合第二透光片140前,可形成接合層160覆蓋晶圓110a的底面113且填滿穿孔115。Referring to FIG. 4 , after the insulating
參閱第5圖,在接合第二透光片140於晶圓110a的底面113後,可在第二透光片140中形成露出第一重佈線層150a的開口143。開口143可由雷射鑽孔形成,且開口143穿過第二透光片140而延伸至接合層160中。接著,可形成第二重佈線層150b電性連接從開口143露出的第一重佈線層150a,且第二重佈線層150b延伸至第二透光片140的底面141。Referring to FIG. 5 , after bonding the second light-transmitting
同時參閱第6圖與第1圖,第二重佈線層150b形成後,可形成阻隔層180覆蓋第二透光片140的底面141與第二重佈線層150b,並圖案化阻隔層180使其形成開口181。接著,可於阻隔層180的開口181中形成導電結構190,使導電結構190電性連接在第二透光片140的底面141上的第二重佈線層150b,且導電結構190凸出於阻隔層180。在後續製程中,可研磨第一透光片130的頂面131,以減薄第一透光片130的厚度。接著,可執行切割(Dicing)製程,便可得到第1圖的晶片封裝體100。Referring to FIG. 6 and FIG. 1 simultaneously, after the second
第7圖繪示根據本揭露另一實施方式之晶片封裝體100a的剖面圖。晶片封裝體100a包括晶片110、支撐件120、第一透光片130、第二透光片140、第一重佈線層150c與第二重佈線層150d。本實施方式與第1圖之實施方式不同的地方在於晶片封裝體100a更包括位於晶片110下方的緩衝層210。此外,緩衝層210位於絕緣層170與接合層160之間。在本實施方式中,第二重佈線層150d穿過在晶片110的底面113上的第一重佈線層150c。晶片封裝體100a的阻隔層180的一部份位於第二透光片140與接合層160中,且延伸至第一重佈線層150c與緩衝層210中。FIG. 7 shows a cross-sectional view of a chip package 100a according to another embodiment of the present disclosure. The chip package 100a includes a chip 110, a
第8圖至第12圖繪示第7圖之晶片封裝體100a的製造方法在不同階段的剖面圖。同時參閱第8圖與第9圖,將第一透光片130接合於晶圓110a的頂面111,使支撐件120位於第一透光片130與晶圓110a之間。在一些實施方式中,可研磨晶圓110a的底面113以減少晶圓110a的厚度。接著,可蝕刻晶圓110a的底面113以形成露出導電墊112的穿孔115。穿孔115形成後,可形成絕緣層170於晶圓110a的底面113與穿孔115的壁面上。接著,可形成緩衝層210於在晶圓110a的底面113上的絕緣層170上。Figures 8 to 12 show cross-sectional views of the manufacturing method of the chip package 100a of Figure 7 at different stages. Referring to Figures 8 and 9 at the same time, the first light-transmitting
參閱第10圖,緩衝層210形成後,可形成第一重佈線層150c電性連接露出的導電墊112且延伸至晶圓110a的底面113。緩衝層210位於第一重佈線層150c與晶圓110a之間。接著,可藉由接合層160將第二透光片140接合於晶圓110a的底面113,其中第二透光片140與第一透光片130具有相同材料(例如玻璃)。在接合第二透光片140前,可形成接合層160覆蓋晶圓110a的底面113且填滿穿孔115。Referring to FIG. 10 , after the
參閱第11圖,在接合第二透光片140於晶圓110a的底面113後,可在第二透光片140中形成穿過第一重佈線層150c的開口143a,使第一重佈線層150c的內側壁從開口143a露出。開口143a可為刀具所形成的缺口(Notch),且開口143a延伸至緩衝層210中。接著,可形成第二重佈線層150d電性連接從開口143a露出的第一重佈線層150c,且第二重佈線層150d延伸至第二透光片140的底面141。Referring to FIG. 11 , after bonding the second light-transmitting
同時參閱第11圖與第7圖,第二重佈線層150d形成後,可形成阻隔層180覆蓋第二透光片140的底面141與第二重佈線層150d,並圖案化阻隔層180使其形成開口181。接著,可於阻隔層180的開口181中形成導電結構190,使導電結構190電性連接在第二透光片140的底面141上的第二重佈線層150d,且導電結構190凸出於阻隔層180。在後續製程中,可研磨第一透光片130的頂面131,以減薄第一透光片130的厚度。接著,可執行切割(Dicing)製程,便可得到第7圖的晶片封裝體100a。Referring to FIG. 11 and FIG. 7 at the same time, after the second redistribution wiring layer 150d is formed, a
第13圖繪示根據本揭露又一實施方式之晶片封裝體100b的剖面圖。如圖所示,晶片封裝體100b包括晶片110、支撐件120、第一透光片130、第二透光片140與重佈線層150e。晶片110的頂面111具有導電墊112與感測區114,其中導電墊112凸出晶片110的側壁117。支撐件120位於晶片110的頂面111上且圍繞感測區114。第一透光片130位於支撐件120上且覆蓋感測區114。第二透光片140位於晶片110的底面113,且第二透光片140與第一透光片130具有相同材料,例如玻璃。重佈線層150e從支撐件120的底面延伸至第二透光片140的底面141,且電性連接凸出晶片110的側壁117的導電墊112。FIG. 13 shows a cross-sectional view of a chip package 100b according to another embodiment of the present disclosure. As shown in the figure, the chip package 100b includes a chip 110, a
在本實施方式中,晶片110的側壁117與晶片110的底面113夾鈍角θ1。晶片封裝體100b還包括接合層160。接合層160覆蓋晶片110的底面113與側壁117,且延伸至導電墊112的底面。接合層160位於晶片110的底面113與第二透光片140之間,且位於晶片110的側壁117與重佈線層150e之間。接合層160的側面與重佈線層150e接觸。此外,第二透光片140的側壁142與底面141夾鈍角θ2,且第二透光片140的側壁142與重佈線層150e接觸。重佈線層150e的頂部高於晶片110的頂面111。In the present embodiment, the side wall 117 of the chip 110 and the
晶片封裝體100b更包括第一阻隔層180a、第二阻隔層180b與導電結構190。第一阻隔層180a位於第二透光片140的底面141,其中重佈線層150e的一部分覆蓋第一阻隔層180a。也就是說,第一阻隔層180a位於第二透光片140的底面141與重佈線層150e之間。第二阻隔層180b覆蓋第二透光片140的底面141與重佈線層150e。導電結構190電性連接重佈線層150e,且凸出於第二阻隔層180b。第二阻隔層180b可避免第二透光片140在製程中因熱應力破裂,例如形成重佈線層150e與導電結構190時。The chip package 100b further includes a first barrier layer 180a, a second barrier layer 180b and a conductive structure 190. The first barrier layer 180a is located on the
前述概述了幾個實施方式的特徵,使得本領域技術人員可以更好地理解本揭露的態樣。本領域技術人員應當理解,他們可以容易地將本揭露用作設計或修改其他過程和結構的基礎,以實現與本文介紹的實施方式相同的目的和/或實現相同的優點。本領域技術人員還應該認識到,這樣的等效構造不脫離本揭露的精神和範圍,並且在不脫離本揭露的精神和範圍的情況下,它們可以在這裡進行各種改變,替換和變更。The foregoing summarizes the features of several embodiments so that those skilled in the art can better understand the aspects of the present disclosure. Those skilled in the art should understand that they can easily use the present disclosure as a basis for designing or modifying other processes and structures to achieve the same purpose and/or achieve the same advantages as the embodiments described herein. Those skilled in the art should also recognize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they can make various changes, substitutions and modifications here without departing from the spirit and scope of the present disclosure.
100,100a,100b:晶片封裝體
110a:晶圓
110:晶片
111:頂面
112:導電墊
113:底面
114:感測區
115:穿孔
117:側壁
120:支撐件
130:第一透光片
131:頂面
140:第二透光片
141:底面
142:側壁
143,143a:開口
150a,150c:第一重佈線層
150b,150d:第二重佈線層
150e:重佈線層
160:接合層
170:絕緣層
180:阻隔層
180a:第一阻隔層
180b:第二阻隔層
181:開口
190:導電結構
210:緩衝層
θ1,θ2:鈍角
100,100a,100b:
當與隨附圖示一起閱讀時,可由後文實施方式最佳地理解本揭露內容的態樣。注意到根據此行業中之標準實務,各種特徵並未按比例繪製。實際上,為論述的清楚性,可任意增加或減少各種特徵的尺寸。 第1圖繪示根據本揭露一實施方式之晶片封裝體的剖面圖。 第2圖至第6圖繪示第1圖之晶片封裝體的製造方法在不同階段的剖面圖。 第7圖繪示根據本揭露另一實施方式之晶片封裝體的剖面圖。 第8圖至第12圖繪示第7圖之晶片封裝體的製造方法在不同階段的剖面圖。 第13圖繪示根據本揭露又一實施方式之晶片封裝體的剖面圖。 The disclosure is best understood from the following embodiments when read in conjunction with the accompanying illustrations. Note that various features are not drawn to scale in accordance with standard practice in the industry. In fact, the dimensions of various features may be arbitrarily increased or decreased for clarity of discussion. FIG. 1 illustrates a cross-sectional view of a chip package according to an embodiment of the disclosure. FIGS. 2 to 6 illustrate cross-sectional views of a method for manufacturing the chip package of FIG. 1 at different stages. FIG. 7 illustrates a cross-sectional view of a chip package according to another embodiment of the disclosure. FIGS. 8 to 12 illustrate cross-sectional views of a method for manufacturing the chip package of FIG. 7 at different stages. FIG. 13 illustrates a cross-sectional view of a chip package according to yet another embodiment of the disclosure.
國內寄存資訊(請依寄存機構、日期、號碼順序註記) 無 國外寄存資訊(請依寄存國家、機構、日期、號碼順序註記) 無 Domestic storage information (please note in the order of storage institution, date, and number) None Foreign storage information (please note in the order of storage country, institution, date, and number) None
100:晶片封裝體 100: Chip package
110:晶片 110: Chip
111:頂面 111: Top
112:導電墊 112: Conductive pad
113:底面 113: Bottom
114:感測區 114: Sensing area
115:穿孔 115:Piercing
120:支撐件 120: Support parts
130:第一透光片 130: First light-transmitting sheet
131:頂面 131: Top
140:第二透光片 140: Second light-transmitting sheet
141:底面 141: Bottom
143:開口 143: Open mouth
150a:第一重佈線層 150a: First redistribution layer
150b:第二重佈線層 150b: Second redistribution layer
160:接合層 160:Joint layer
170:絕緣層 170: Insulation layer
180:阻隔層 180: Barrier layer
190:導電結構 190: Conductive structure
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US202263344945P | 2022-05-23 | 2022-05-23 | |
US63/344,945 | 2022-05-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202347657A TW202347657A (en) | 2023-12-01 |
TWI852520B true TWI852520B (en) | 2024-08-11 |
Family
ID=
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201616642A (en) | 2014-10-22 | 2016-05-01 | 精材科技股份有限公司 | Semiconductor package and manufacturing method thereof |
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201616642A (en) | 2014-10-22 | 2016-05-01 | 精材科技股份有限公司 | Semiconductor package and manufacturing method thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10699915B2 (en) | Semiconductor device and method for manufacturing the same | |
US8216934B2 (en) | Semiconductor device suitable for a stacked structure | |
US7598607B2 (en) | Semiconductor packages with enhanced joint reliability and methods of fabricating the same | |
TWI505428B (en) | Chip package and method for forming the same | |
TWI496270B (en) | Semiconductor package and method of manufacture | |
TWI639217B (en) | Semiconductor device structure and method for forming the same | |
EP2978020A1 (en) | Package substrate | |
US10032647B2 (en) | Low CTE component with wire bond interconnects | |
JP2008244437A (en) | Image sensor package having die receiving opening and method thereof | |
JP2009164607A (en) | Bonding pad structure, manufacturing method thereof, and semiconductor package including bonding pad structure | |
TWI585870B (en) | Chip package and manufacturing method thereof | |
TWI852520B (en) | Chip package and manufacturing method thereof | |
CN113451281A (en) | Semiconductor package | |
TW202347657A (en) | Chip package and manufacturing method thereof | |
TWI747218B (en) | Chip-scale sensor package structure | |
CN116093071A (en) | Semiconductor packaging structure and forming method thereof | |
CN113903711A (en) | Wafer level chip scale package with sensor | |
KR20220025551A (en) | Semiconductor package | |
CN110993631A (en) | Packaging method based on back-illuminated image sensor chip | |
TW202121613A (en) | Chip package structure and manufacturing method thereof | |
US11710757B2 (en) | Semiconductor package and method of fabricating the same | |
CN116165753B (en) | Optical chip, chip packaging structure and packaging performance detection method | |
TWI735034B (en) | Interconnect substrate with stiffener and warp balancer and semiconductor assembly using the same | |
US20240321755A1 (en) | Semiconductor package including glass core substrate and method of manufacturing the same | |
TW202416465A (en) | Chip package and manufacturing method thereof |