TWI850632B - 光源裝置、產生包含離散波長帶之輻射的方法及度量衡裝置 - Google Patents

光源裝置、產生包含離散波長帶之輻射的方法及度量衡裝置 Download PDF

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Publication number
TWI850632B
TWI850632B TW111107908A TW111107908A TWI850632B TW I850632 B TWI850632 B TW I850632B TW 111107908 A TW111107908 A TW 111107908A TW 111107908 A TW111107908 A TW 111107908A TW I850632 B TWI850632 B TW I850632B
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TW
Taiwan
Prior art keywords
radiation
light source
wavelength
source device
frequency component
Prior art date
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TW111107908A
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English (en)
Chinese (zh)
Other versions
TW202240315A (zh
Inventor
永鋒 倪
威廉 里察 邦德
Original Assignee
荷蘭商Ａｓｍｌ荷蘭公司
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Publication of TW202240315A publication Critical patent/TW202240315A/zh
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Publication of TWI850632B publication Critical patent/TWI850632B/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3532—Arrangements of plural nonlinear devices for generating multi-colour light beams, e.g. arrangements of SHG, SFG, OPO devices for generating RGB light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G02F1/3536—Four-wave interaction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/365—Non-linear optics in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
    • G02F1/392—Parametric amplification
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
    • G02F1/395—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves in optical waveguides
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3528—Non-linear optics for producing a supercontinuum
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/32—Photonic crystals

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)
TW111107908A 2021-03-16 2022-03-04 光源裝置、產生包含離散波長帶之輻射的方法及度量衡裝置 TWI850632B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP21162934.0 2021-03-16
EP21162934.0A EP4060403A1 (en) 2021-03-16 2021-03-16 Hollow-core photonic crystal fiber based multiple wavelength light source device

Publications (2)

Publication Number Publication Date
TW202240315A TW202240315A (zh) 2022-10-16
TWI850632B true TWI850632B (zh) 2024-08-01

Family

ID=74947008

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111107908A TWI850632B (zh) 2021-03-16 2022-03-04 光源裝置、產生包含離散波長帶之輻射的方法及度量衡裝置

Country Status (9)

Country Link
US (1) US20240142853A1 (enExample)
EP (2) EP4060403A1 (enExample)
JP (1) JP2024510161A (enExample)
KR (1) KR20230154204A (enExample)
CN (1) CN117063117A (enExample)
DK (1) DK4060404T3 (enExample)
IL (1) IL305662A (enExample)
TW (1) TWI850632B (enExample)
WO (1) WO2022194456A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12493225B2 (en) * 2023-08-27 2025-12-09 Ledlas Corp. Single-material-double-process parametric laser-wavelength converter
EP4664194A3 (en) * 2025-09-29 2026-04-22 ASML Netherlands B.V. A radiation source and method for generating output radiation

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109313390A (zh) * 2016-04-28 2019-02-05 Asml荷兰有限公司 Hhg源、检查设备和用于执行测量的方法

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DE60319462T2 (de) 2002-06-11 2009-03-12 Asml Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung eines Artikels
KR100434690B1 (ko) 2002-07-19 2004-06-04 소광섭 생명체에 대한 자기장의 영향을 측정하는 장치 및 방법
SG135052A1 (en) 2002-11-12 2007-09-28 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
JP3910180B2 (ja) 2003-01-14 2007-04-25 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置のレベルセンサ
US7265364B2 (en) 2004-06-10 2007-09-04 Asml Netherlands B.V. Level sensor for lithographic apparatus
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
NL1036245A1 (nl) 2007-12-17 2009-06-18 Asml Netherlands Bv Diffraction based overlay metrology tool and method of diffraction based overlay metrology.
NL1036734A1 (nl) 2008-04-09 2009-10-12 Asml Netherlands Bv A method of assessing a model, an inspection apparatus and a lithographic apparatus.
NL1036857A1 (nl) 2008-04-21 2009-10-22 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
KR101295203B1 (ko) 2008-10-06 2013-08-09 에이에스엠엘 네델란즈 비.브이. 2차원 타겟을 이용한 리소그래피 포커스 및 조사량 측정
EP2228685B1 (en) 2009-03-13 2018-06-27 ASML Netherlands B.V. Level sensor arrangement for lithographic apparatus and device manufacturing method
WO2011012624A1 (en) 2009-07-31 2011-02-03 Asml Netherlands B.V. Metrology method and apparatus, lithographic system, and lithographic processing cell
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US9160137B1 (en) 2014-05-09 2015-10-13 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e. V. Method and device for creating supercontinuum light pulses
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CN109313390A (zh) * 2016-04-28 2019-02-05 Asml荷兰有限公司 Hhg源、检查设备和用于执行测量的方法

Non-Patent Citations (4)

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Title
期刊 Cholan et al., "Self-seeded four-wave mixing cascades with low power consumption", Journal of Optics, Volume 16, Number 10, Institute of Physics Publishing, Bristol GB, 27 August 2014, pages 105203-1 to 105203-6
期刊 Ciriolo et al., "Generation of ultrashort pulses by four wave mixing in a gas-filled hollow core fiber", Journal of Optics, Volume 20, Number 12, Institute of Physics Publishing, Bristol GB, 14 November 2018, pages 125503-1 to 125503-9
期刊 Ciriolo et al., "Generation of ultrashort pulses by four wave mixing in a gas-filled hollow core fiber", Journal of Optics, Volume 20, Number 12, Institute of Physics Publishing, Bristol GB, 14 November 2018, pages 125503-1 to 125503-9;期刊 Li et al., "Cascaded four-wave mixing seeded by two continuous wave signals", Applied Optics, Volume 53, Number 8, Optical Society of America, Washington, DC, US, 10 March 2014, pages 1583 to 1590;期刊 Cholan et al., "Self-seeded four-wave mixing cascades with low power consumption", Journal of Optics, Volume 16, Number 10, Institute of Physics Publishing, Bristol GB, 27 August 2014, pages 105203-1 to 105203-6 *
期刊 Li et al., "Cascaded four-wave mixing seeded by two continuous wave signals", Applied Optics, Volume 53, Number 8, Optical Society of America, Washington, DC, US, 10 March 2014, pages 1583 to 1590

Also Published As

Publication number Publication date
CN117063117A (zh) 2023-11-14
DK4060404T3 (da) 2026-01-12
EP4060403A1 (en) 2022-09-21
JP2024510161A (ja) 2024-03-06
EP4060404A1 (en) 2022-09-21
US20240142853A1 (en) 2024-05-02
EP4060404B1 (en) 2025-12-10
WO2022194456A1 (en) 2022-09-22
KR20230154204A (ko) 2023-11-07
TW202240315A (zh) 2022-10-16
IL305662A (en) 2023-11-01

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