DK4060404T3 - Lyskildeenhed med flere bølgelængder baseret på fotonisk krystalfiber med hul kerne - Google Patents
Lyskildeenhed med flere bølgelængder baseret på fotonisk krystalfiber med hul kerneInfo
- Publication number
- DK4060404T3 DK4060404T3 DK22155985.9T DK22155985T DK4060404T3 DK 4060404 T3 DK4060404 T3 DK 4060404T3 DK 22155985 T DK22155985 T DK 22155985T DK 4060404 T3 DK4060404 T3 DK 4060404T3
- Authority
- DK
- Denmark
- Prior art keywords
- hollow
- light source
- source device
- device based
- photonic crystal
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3532—Arrangements of plural nonlinear devices for generating multi-colour light beams, e.g. arrangements of SHG, SFG, OPO devices for generating RGB light beams
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/3536—Four-wave interaction
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/365—Non-linear optics in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
- G02F1/392—Parametric amplification
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/39—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves
- G02F1/395—Non-linear optics for parametric generation or amplification of light, infrared or ultraviolet waves in optical waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3528—Non-linear optics for producing a supercontinuum
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/32—Photonic crystals
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP21162934.0A EP4060403A1 (en) | 2021-03-16 | 2021-03-16 | Hollow-core photonic crystal fiber based multiple wavelength light source device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK4060404T3 true DK4060404T3 (da) | 2026-01-12 |
Family
ID=74947008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK22155985.9T DK4060404T3 (da) | 2021-03-16 | 2022-02-09 | Lyskildeenhed med flere bølgelængder baseret på fotonisk krystalfiber med hul kerne |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20240142853A1 (enExample) |
| EP (2) | EP4060403A1 (enExample) |
| JP (1) | JP2024510161A (enExample) |
| KR (1) | KR20230154204A (enExample) |
| CN (1) | CN117063117A (enExample) |
| DK (1) | DK4060404T3 (enExample) |
| IL (1) | IL305662A (enExample) |
| TW (1) | TWI850632B (enExample) |
| WO (1) | WO2022194456A1 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12493225B2 (en) * | 2023-08-27 | 2025-12-09 | Ledlas Corp. | Single-material-double-process parametric laser-wavelength converter |
| EP4664194A3 (en) * | 2025-09-29 | 2026-04-22 | ASML Netherlands B.V. | A radiation source and method for generating output radiation |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE60319462T2 (de) | 2002-06-11 | 2009-03-12 | Asml Netherlands B.V. | Lithographischer Apparat und Verfahren zur Herstellung eines Artikels |
| KR100434690B1 (ko) | 2002-07-19 | 2004-06-04 | 소광섭 | 생명체에 대한 자기장의 영향을 측정하는 장치 및 방법 |
| SG135052A1 (en) | 2002-11-12 | 2007-09-28 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
| JP3910180B2 (ja) | 2003-01-14 | 2007-04-25 | エーエスエムエル ネザーランズ ビー．ブイ． | リソグラフィ装置のレベルセンサ |
| US7265364B2 (en) | 2004-06-10 | 2007-09-04 | Asml Netherlands B.V. | Level sensor for lithographic apparatus |
| US7791727B2 (en) | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
| NL1036245A1 (nl) | 2007-12-17 | 2009-06-18 | Asml Netherlands Bv | Diffraction based overlay metrology tool and method of diffraction based overlay metrology. |
| NL1036734A1 (nl) | 2008-04-09 | 2009-10-12 | Asml Netherlands Bv | A method of assessing a model, an inspection apparatus and a lithographic apparatus. |
| NL1036857A1 (nl) | 2008-04-21 | 2009-10-22 | Asml Netherlands Bv | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method. |
| KR101295203B1 (ko) | 2008-10-06 | 2013-08-09 | 에이에스엠엘 네델란즈 비.브이. | 2차원 타겟을 이용한 리소그래피 포커스 및 조사량 측정 |
| EP2228685B1 (en) | 2009-03-13 | 2018-06-27 | ASML Netherlands B.V. | Level sensor arrangement for lithographic apparatus and device manufacturing method |
| WO2011012624A1 (en) | 2009-07-31 | 2011-02-03 | Asml Netherlands B.V. | Metrology method and apparatus, lithographic system, and lithographic processing cell |
| NL2007176A (en) | 2010-08-18 | 2012-02-21 | Asml Netherlands Bv | Substrate for use in metrology, metrology method and device manufacturing method. |
| WO2014019846A2 (en) | 2012-07-30 | 2014-02-06 | Asml Netherlands B.V. | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method |
| US9160137B1 (en) | 2014-05-09 | 2015-10-13 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e. V. | Method and device for creating supercontinuum light pulses |
| IL290735B2 (en) | 2014-11-26 | 2023-03-01 | Asml Netherlands Bv | Metrological method, computer product and system |
| WO2016102127A1 (en) | 2014-12-22 | 2016-06-30 | Asml Netherlands B.V. | Level sensor, lithographic apparatus and device manufacturing method |
| IL256196B (en) | 2015-06-17 | 2022-07-01 | Asml Netherlands Bv | Recipe selection based on inter-recipe consistency |
| EP3136143B1 (en) | 2015-08-26 | 2020-04-01 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Hollow-core fibre and method of manufacturing thereof |
| WO2017186491A1 (en) * | 2016-04-28 | 2017-11-02 | Asml Netherlands B.V. | Hhg source, inspection apparatus and method for performing a measurement |
| EP4130866A1 (en) | 2017-01-09 | 2023-02-08 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Broadband light source device and method of creating broadband light pulses |
-
2021
- 2021-03-16 EP EP21162934.0A patent/EP4060403A1/en not_active Withdrawn
-
2022
- 2022-02-09 IL IL305662A patent/IL305662A/en unknown
- 2022-02-09 EP EP22155985.9A patent/EP4060404B1/en active Active
- 2022-02-09 WO PCT/EP2022/053157 patent/WO2022194456A1/en not_active Ceased
- 2022-02-09 US US18/280,529 patent/US20240142853A1/en active Pending
- 2022-02-09 DK DK22155985.9T patent/DK4060404T3/da active
- 2022-02-09 JP JP2023554333A patent/JP2024510161A/ja active Pending
- 2022-02-09 KR KR1020237031871A patent/KR20230154204A/ko active Pending
- 2022-02-09 CN CN202280020595.XA patent/CN117063117A/zh active Pending
- 2022-03-04 TW TW111107908A patent/TWI850632B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| CN117063117A (zh) | 2023-11-14 |
| EP4060403A1 (en) | 2022-09-21 |
| JP2024510161A (ja) | 2024-03-06 |
| TWI850632B (zh) | 2024-08-01 |
| EP4060404A1 (en) | 2022-09-21 |
| US20240142853A1 (en) | 2024-05-02 |
| EP4060404B1 (en) | 2025-12-10 |
| WO2022194456A1 (en) | 2022-09-22 |
| KR20230154204A (ko) | 2023-11-07 |
| TW202240315A (zh) | 2022-10-16 |
| IL305662A (en) | 2023-11-01 |
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