TWI846004B - Substrate processing apparatus - Google Patents

Substrate processing apparatus Download PDF

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Publication number
TWI846004B
TWI846004B TW111129809A TW111129809A TWI846004B TW I846004 B TWI846004 B TW I846004B TW 111129809 A TW111129809 A TW 111129809A TW 111129809 A TW111129809 A TW 111129809A TW I846004 B TWI846004 B TW I846004B
Authority
TW
Taiwan
Prior art keywords
processing apparatus
substrate processing
substrate
processing
Prior art date
Application number
TW111129809A
Other languages
Chinese (zh)
Other versions
TW202313207A (en
Inventor
古川正晃
後藤茂宏
Original Assignee
日商斯庫林集團股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2021154405A external-priority patent/JP2023045818A/en
Application filed by 日商斯庫林集團股份有限公司 filed Critical 日商斯庫林集團股份有限公司
Publication of TW202313207A publication Critical patent/TW202313207A/en
Application granted granted Critical
Publication of TWI846004B publication Critical patent/TWI846004B/en

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TW111129809A 2021-09-22 2022-08-09 Substrate processing apparatus TWI846004B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-154405 2021-09-22
JP2021154405A JP2023045818A (en) 2021-09-22 2021-09-22 Substrate processing apparatus

Publications (2)

Publication Number Publication Date
TW202313207A TW202313207A (en) 2023-04-01
TWI846004B true TWI846004B (en) 2024-06-21

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020059280A1 (en) 2018-09-20 2020-03-26 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing device and substrate processing method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020059280A1 (en) 2018-09-20 2020-03-26 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing device and substrate processing method

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