TWI845933B - Loading port and substrate handling system having a loading port - Google Patents
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- 239000000758 substrate Substances 0.000 title claims description 46
- 230000007246 mechanism Effects 0.000 claims abstract description 118
- 230000032258 transport Effects 0.000 claims description 28
- 238000003780 insertion Methods 0.000 claims description 6
- 230000037431 insertion Effects 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 5
- 239000007924 injection Substances 0.000 description 25
- 238000002347 injection Methods 0.000 description 25
- 238000012546 transfer Methods 0.000 description 24
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 22
- 239000007789 gas Substances 0.000 description 19
- 238000012545 processing Methods 0.000 description 15
- 229910052757 nitrogen Inorganic materials 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 8
- 230000009471 action Effects 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 6
- 238000011010 flushing procedure Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 101000827703 Homo sapiens Polyphosphoinositide phosphatase Proteins 0.000 description 2
- 102100023591 Polyphosphoinositide phosphatase Human genes 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 1
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 1
- 101100233916 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) KAR5 gene Proteins 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
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Abstract
在具備旋轉機構之裝載埠中,即使在將容器之收授位置配合不具備旋轉機構之裝載埠之情況下,亦回避容器之旋轉時容器衝突至門部等。 In a loading port with a rotating mechanism, even if the container receiving and delivering position is matched with a loading port without a rotating mechanism, the container can be prevented from colliding with the door when rotating.
裝載埠(4)具備:具有開口部(30)之基座(20);被設置在基座(20),開關開口部(30)之門部(21);在與基座(20)正交之前後方向,從基座(20)朝前方突出設置,支撐載置托盤(23)的框架(22);使載置托盤(23)在垂直軸周圍旋轉之旋轉機構(24);及在FOUP(300)藉由OHT(400)被載置於載置托盤(23)之後,旋轉機構(24)使載置托盤(23)旋轉之前或正在旋轉當中,使門部(21)及載置托盤(23)中之至少一方遠離另一方之移動機構。因FOUP(300)和門部(21)等相對性遠離,故可以回避FOUP(300)旋轉時衝突至門部(21)等。 The loading port (4) comprises: a base (20) having an opening (30); a door (21) disposed on the base (20) and opening and closing the opening (30); a frame (22) protruding forward from the base (20) in a front-rear direction perpendicular to the base (20) and supporting a loading tray (23); a rotating mechanism (24) for rotating the loading tray (23) around a vertical axis; and a moving mechanism for moving at least one of the door (21) and the loading tray (23) away from the other before or during the rotation of the loading tray (23) by the rotating mechanism (24) after the FOUP (300) is loaded on the loading tray (23) by the OHT (400). Since the FOUP (300) and the door (21) are relatively far apart, it is possible to avoid collision with the door (21) when the FOUP (300) rotates.
Description
本發明關於使收容基板之容器旋轉之旋轉機構的裝載埠,及具備該裝載埠之基板搬運系統。 The present invention relates to a loading port of a rotating mechanism for rotating a container containing substrates, and a substrate transport system having the loading port.
自以往所知的有在收容半導體晶圓等之基板之FOUP(Front-Opening Unified Pod)等之容器,和設置搬運基板之搬運手段的搬運室之間進行基板之取出放入之時,裝載容器之裝載埠這樣的裝置。另外,裝載埠連同上述搬運手段及搬運室,構成EFEM(Equipment Front End Module)等之基板搬運系統。 Previously known is a device that loads the container between a container such as a FOUP (Front-Opening Unified Pod) that holds substrates such as semiconductor wafers and a transfer chamber that is equipped with a transfer means for transferring the substrates, and a loading port for loading the container when taking out and putting in the substrates. In addition, the loading port, together with the above-mentioned transfer means and transfer chamber, constitutes a substrate transfer system such as an EFEM (Equipment Front End Module).
通常,雖然上述容器係在被設置在容器之側面的蓋,和為了關閉該蓋被設置在裝載埠之門正對之狀態下,被載置在裝載埠,但是有在如此之方向不載置容器之情況。例如,在工場內保管容器之儲存器不具備使容器旋轉之旋轉機構之情況等下,在容器成為與平常相反方向之狀態下,有可能被載置在裝載埠。在如此之情況下,必須以容器之蓋與門正對之方式使容器旋轉,因此在專利文獻1~3揭示具備旋轉手段之裝載埠。 Usually, the above-mentioned container is loaded on the loading port in a state where the lid provided on the side of the container and the door provided on the loading port for closing the lid face each other, but there are cases where the container is not loaded in such a direction. For example, in a case where the storage device for storing the container in the factory does not have a rotating mechanism for rotating the container, the container may be loaded on the loading port in a state opposite to the usual direction. In such a case, the container must be rotated in a manner that the lid and the door of the container face each other, so patent documents 1 to 3 disclose loading ports with rotating means.
記載於專利文獻1之裝載埠具備載置容器之 載置部,和使載置部移動之移動機構,和使移動機構旋轉之旋轉機構。載置部能夠在具備叉架部之移載機(即是,在地板行走之移載機)之間進行容器之收授的收授位置,和容器之蓋連同門被開關之門開關位置之間移動。藉由旋轉機構連同載置部使容器旋轉,容器之蓋和門正對。另外,使容器旋轉之旋轉位置在收授位置和門開關位置之間。 The loading port described in Patent Document 1 has a loading portion for loading containers, a moving mechanism for moving the loading portion, and a rotating mechanism for rotating the moving mechanism. The loading portion can move between a receiving position where the container is received and delivered between a transfer machine having a fork frame (i.e., a transfer machine that walks on the floor) and a door opening position where the lid of the container and the door are opened and closed. The container is rotated by the rotating mechanism together with the loading portion so that the lid of the container and the door face each other. In addition, the rotating position for rotating the container is between the receiving position and the door opening position.
在專利文獻2、3中雖然也與專利文獻1相同揭示具有使容器旋轉之旋轉機構的裝載埠,但是在專利文獻2、3所記載之裝載埠中,使容器旋轉之旋轉位置被設成與在搬運容器至裝載埠之裝置等之間收授容器的收授位置相同。
Although
另外,作為在半導體工場等之工場內輸送容器之輸送手段,所知的有沿著事先設置之軌道而行走之OHT(Overhead Hoist Transfer)等之無人搬運車。在配置如此之輸送手段之工場內,混合具備旋轉機構之裝載埠,和不具有旋轉機構之裝載埠(以下,通常稱為裝載埠)之情況下,為了提升搬運效率,有希望沿著輸送手段配置雙方之裝載埠中的容器之收授位置之需求。另外,輸送手段之行走軌道和上述搬運室中配置裝載埠之壁面之距離藉由規格被設定,在例如OHT之情況,藉由SEMI規格,不因基板之大小而有所不同,被設定成在俯視下243mm前後。 In addition, as a means of transporting containers in factories such as semiconductor factories, there are known unmanned transport vehicles such as OHT (Overhead Hoist Transfer) that travel along a pre-set track. In a factory equipped with such a transport means, when there are mixed loading ports with a rotating mechanism and loading ports without a rotating mechanism (hereinafter, generally referred to as loading ports), in order to improve the transportation efficiency, there is a demand for the receiving and delivering positions of containers in both loading ports along the transport means. In addition, the distance between the running track of the transport means and the wall surface where the loading port is arranged in the above-mentioned transport chamber is set by the specifications. In the case of OHT, for example, it is set to about 243mm in a top view according to the SEMI specifications, regardless of the size of the substrate.
[專利文獻1]日本特開2013-219159號公報 [Patent Document 1] Japanese Patent Publication No. 2013-219159
[專利文獻2]日本專利第4168724號公報 [Patent Document 2] Japanese Patent No. 4168724
[專利文獻3]日本專利第4816637號公報 [Patent Document 3] Japanese Patent No. 4816637
如專利文獻1~3所記載之裝載埠般,不以OHT等之無人搬運車所進行之容器之收授為前提,可以將收授位置設成離門開關位置非常遠之位置的情況下,可以將容器之旋轉位置設定在與收授位置相同或較收授位置靠門開關位置側。但是,依據上述規格,當在接近門開關位置之位置設定收授位置時,該些裝載埠中尺寸上,於旋轉時會容器會衝突至門或其周邊之壁面。因此,有無法沿著相同之輸送手段之軌道配置具備該些旋轉機構之裝載埠中之收授位置,和不具備旋轉機構之裝載埠中之收授位置,容器之輸送效率下降這樣的問題。 As in the loading ports described in patent documents 1 to 3, the receiving and delivering of containers by unmanned transport vehicles such as OHT is not a prerequisite. In the case where the receiving and delivering position can be set to a position very far from the door switch position, the rotating position of the container can be set to the same as the receiving and delivering position or closer to the door switch position than the receiving and delivering position. However, according to the above specifications, when the receiving and delivering position is set at a position close to the door switch position, the size of the loading ports will cause the container to collide with the door or the wall around it when rotating. Therefore, there is a problem that the receiving and delivering position in the loading ports with these rotating mechanisms and the receiving and delivering position in the loading ports without rotating mechanisms cannot be arranged along the same track of the conveying means, and the conveying efficiency of the container is reduced.
本發明之目的係在具備旋轉機構之裝載埠中,即使在沿著與不具備旋轉機構之裝載埠中之收授位置相同之輸送手段之軌道而配置容器從輸送手段被收授至載置部之收授位置之情況下,亦迴避容器之旋轉時容器朝門等之衝突。 The purpose of the present invention is to avoid collision of the container with the door etc. when the container is rotated, even if the container is arranged along the track of the conveying means which is the same as the receiving position in the loading port without a rotating mechanism and is received and delivered from the conveying means to the receiving position of the loading portion.
第1發明之裝載埠具備收容基板之容器被載置的載置部,當上述載置部位於沿著事先被設置之軌道而行走且在與輸送上述容器之輸送手段之間能收授上述容器之收授位置之時,在與上述輸送手段之間收授上述容器,該裝載埠之特徵在於具備:基座,其係被豎立設置,具有開口部;門部,其係被設置在上述基座,開關上述開口部;框架,其係在與上述基座正交之前後方向中,從上述基座朝前方突出設置,支撐上述載置部;旋轉機構,其係使上述載置部在垂直軸周圍旋轉;及移動機構,其係上述容器藉由上述輸送手段被載置在上述載置部之後,上述旋轉機構使上述載置部旋轉之前或正在旋轉當中,使上述門部及上述載置部之中之至少任一方從另一方遠離。 The loading port of the first invention has a loading portion on which a container for accommodating a substrate is loaded, and when the loading portion moves along a previously set track and can receive and deliver the container between the conveying means for conveying the container, the loading port receives and delivers the container between the conveying means, and the loading port is characterized in that it has: a base, which is vertically arranged and has an opening; a door, which is arranged on the base and opens and closes the opening; A frame, which is protruded forward from the base in a front-rear direction orthogonal to the base, and supports the placement portion; a rotating mechanism, which rotates the placement portion around a vertical axis; and a moving mechanism, which moves at least one of the door portion and the placement portion away from the other before or during the rotation of the placement portion after the container is placed on the placement portion by the conveying means.
在具備旋轉機構之裝載埠中,於容器藉由輸送手段被載置於載置部之後,在旋轉機構使載置部旋轉之前或正在旋轉當中,門部和載置部之前後方向之距離相對性地遠離。因此,在具備旋轉機構之裝載埠中,即使在沿著與不具備旋轉機構之裝載埠中之收授位置相同之輸送手段之軌道而配置容器從輸送手段被收授至載置部之收授位置之情況下,亦可以迴避容器之旋轉時容器衝突至門部或基座等之情形。 In a loading port with a rotating mechanism, after a container is placed on the loading portion by a conveying means, before or during the rotating mechanism rotates the loading portion, the distance between the door and the loading portion in the front-rear direction is relatively far. Therefore, in a loading port with a rotating mechanism, even if a container is placed along the same conveying means track as the receiving position in a loading port without a rotating mechanism, the container can be prevented from colliding with the door or the base when the container rotates.
第2發明之裝載部在上述第1發明中,上述移動機構係使上述載置部在與上述輸送手段之間從上述容器被收授於上述載置部之收授位置朝前後方向移動者,在 上述容器藉由上述輸送手段被載置於位於上述收授位置之上述載置部之後,且上述旋轉機構使上述載置部旋轉之前或正在旋轉當中,使上述載置部移動至較上述收授位置更於上述前方。 The loading section of the second invention is the one in the first invention, wherein the moving mechanism moves the loading section forward and backward between the conveying means and the conveying means from the receiving position where the container is received and delivered on the loading section, and after the container is loaded on the loading section at the receiving position by the conveying means, and before or during the rotation of the loading section by the rotating mechanism, the loading section is moved to a position further in front of the receiving position.
容器被載置於載置部之後,因在旋轉手段使載置部旋轉之前,或邊旋轉,載置部藉由移動機構移動至較收授位置更前方,故可以回避容器之旋轉時容器衝突至門部或基座之情形。另外,因比起使門部後退之情形,裝載埠側之空氣難以通過開口部而進入後方之空間,故少擔心後方之空間的污染。 After the container is placed on the loading part, the loading part is moved to the front of the receiving position by the moving mechanism before or while the rotating means rotates the loading part, so the container can be prevented from colliding with the door or base when rotating. In addition, compared with the case where the door is moved backward, the air on the loading port side is less likely to pass through the opening and enter the space behind, so there is less worry about the contamination of the space behind.
第3發明之裝載埠在上述第2發明中,上述旋轉機構係上述移動機構使上述載置部移動至較上述收授位置更於上述前方之旋轉位置為止之後,使上述載置部旋轉。 The loading port of the third invention is in the second invention, wherein the rotating mechanism is the moving mechanism that moves the loading portion to a rotating position that is further forward than the receiving position, and then rotates the loading portion.
載置部藉由移動機構移動至較收授位置前方之旋轉位置之後,因藉由旋轉機構旋轉,故可以回避容器之旋轉時,容器衝突至門部或基座。 After the loading part is moved to the rotation position ahead of the receiving position by the moving mechanism, the rotating mechanism rotates to avoid the container colliding with the door or base when the container rotates.
第4發明之裝載埠在上述第3發明中,藉由上述移動機構使上述載置部突出於較上述框架更於上述前方,使上述載置部移動至上述旋轉位置。 The loading port of the fourth invention is in the third invention, wherein the loading portion is caused to protrude further in front of the frame by the moving mechanism, so that the loading portion is moved to the rotation position.
若藉由本發明時,因僅載置部突出至旋轉位置,故無須使框架突出至旋轉位置,框架之前後方向之大小成為小型,可以縮小裝載埠之設置面積。 If the present invention is used, since only the loading part protrudes to the rotation position, there is no need to make the frame protrude to the rotation position, and the size of the frame in the front and back direction becomes small, and the installation area of the loading port can be reduced.
第5發明之裝載埠在上述第4發明中,具備 檢測位於上述框架之上述前方之障礙物的檢測手段,和上述檢測手段檢測上述障礙物之時限制上述載置部朝上述旋轉位置移動的控制手段。 The loading port of the fifth invention in the fourth invention is provided with a detection means for detecting an obstacle located in front of the frame, and a control means for limiting the movement of the loading portion toward the rotational position when the detection means detects the obstacle.
若藉由本發明時,因可以防止當人等通行接近時,載置部及容器較飛出至較框架前方,故可以確保安全性。 By using the present invention, safety can be ensured because the loading part and the container can be prevented from flying out to the front of the frame when people pass by.
第6發明之裝載埠在上述第2至第5中之任一發明中,上述移動機構具有從下方支撐上述旋轉機構,並且能夠在前後方向移動之可動部,上述載置部藉由上述旋轉機構從下方支撐,在與被形成在載置於上述載置部之上述容器之下面的噴嘴插入口連接的連接位置,和從上述容器插入口朝下方間隔開之間隔位置之間,能夠升降之氣體的注入或排出用之噴嘴,被支撐於上述可動部。 The loading port of the sixth invention is any one of the inventions 2 to 5, wherein the moving mechanism has a movable part that supports the rotating mechanism from below and can move in the front-rear direction, and the placing part is supported from below by the rotating mechanism, and a nozzle for injecting or discharging gas that can be raised and lowered is supported on the movable part between a connection position connected to a nozzle insertion port formed below the container placed on the placing part and a spacing position spaced downward from the container insertion port.
若藉由本發明時,因旋轉機構藉由移動機構之可動部被支撐,載置部被支撐於旋轉機構,故僅載置部藉由旋轉機構旋轉,被設置在移動機構之可動部之上面的氣體注入或排出用之噴嘴不旋轉。因此,不會有藉由被連接於噴嘴之氣體之注入或排出用之配管而妨礙旋轉機構之動作的情形,可以使載置部旋轉。 When the present invention is used, since the rotating mechanism is supported by the movable part of the moving mechanism and the mounting part is supported by the rotating mechanism, only the mounting part rotates by the rotating mechanism, and the nozzle for gas injection or discharge disposed on the movable part of the moving mechanism does not rotate. Therefore, there is no situation where the operation of the rotating mechanism is hindered by the pipe for gas injection or discharge connected to the nozzle, and the mounting part can be rotated.
第7發明之裝載埠在上述第6發明中,上述移動機構使上述載置部朝被設置在上述容器之側面之蓋連同上述門部被開關之門開關位置移動之前,或正在移動當中,上述噴嘴移動至上述連接位置,開始經上述噴嘴朝上述容器注入或排出氣體。 The loading port of the seventh invention is in the sixth invention, before the moving mechanism moves the loading part toward the door opening position where the cover provided on the side of the container and the door part are opened and closed, or during the movement, the nozzle moves to the connection position and starts to inject or discharge gas into or out of the container through the nozzle.
因氣體之注入或排出用之噴嘴被設置在可動部之上面,故即使載置部藉由移動機構移動之期間,噴嘴和載置部之前後方向的相對位置亦不變化。因此,在載置部移動至門開關位置之前或正在移動進行中,可以開始朝容器注入或排出氣體。因此,可以較載置部之移動完成後開始注入氣體等,更早完成氣體之注入等,可以縮短門部開關為止的時間。 Since the nozzle for injecting or discharging gas is arranged on the movable part, the relative position of the nozzle and the carrier part in the front-back direction does not change even when the carrier part moves by the moving mechanism. Therefore, before the carrier part moves to the door opening position or while it is moving, the gas can be injected or discharged into the container. Therefore, the gas injection can be completed earlier than starting the gas injection after the movement of the carrier part is completed, and the time from the door opening to the closing of the door can be shortened.
第8發明之基板搬運系統具備:第1裝載埠,其係上述第1至第7中之任一發明的裝載埠,和第2裝載埠,其具備上述載置部,並且不具備上述旋轉機構,和搬運室,其具有將上述基板取出放入至上述容器之搬運手段,上述第1裝載埠之上述載置部之上述收授位置,和上述第2裝載埠之上述載置部之上述收授位置沿著上述輸送手段之上述軌道被配置。 The substrate transport system of the eighth invention comprises: a first loading port, which is the loading port of any one of the first to seventh inventions, and a second loading port, which has the loading portion and does not have the rotating mechanism, and a transport chamber, which has a transport means for taking out and putting the substrate into the container, and the receiving and giving position of the loading portion of the first loading port and the receiving and giving position of the loading portion of the second loading port are arranged along the track of the transport means.
針對具備旋轉機構之第1裝載埠及不具有旋轉機構之第2裝載埠,各個的裝載埠之載置部取得的收授位置沿著相同之輸送手段的行走軌道而被配置。因此,針對各個的裝載埠,可以使用相同之輸送手段而進行容器之收授。 For the first loading port with a rotating mechanism and the second loading port without a rotating mechanism, the receiving and delivering positions of the loading parts of each loading port are arranged along the running track of the same conveying means. Therefore, for each loading port, the same conveying means can be used to deliver and receive containers.
3、3b:EFEM 3.3b:EFEM
4、4a、5:裝載埠 4, 4a, 5: Loading port
6、6b:搬運室 6, 6b: Transportation room
7:搬送機器人 7: Transport robot
10、11、29:控制裝置 10, 11, 29: Control device
20、20a:基座 20, 20a: base
21、21a:門部 21, 21a: Door
22:框架 22: Framework
23:載置托盤 23: Loading tray
24:旋轉機構 24: Rotating mechanism
25:載置托盤移動機構 25: Loading tray moving mechanism
26:感測器 26: Sensor
29:控制裝置 29: Control device
30、30a:開口部 30, 30a: Opening
31、31a:門 31, 31a: Door
39、40:噴嘴通過孔 39, 40: Nozzle through hole
47:可動部 47: Movable part
55:注入噴嘴 55: Injection nozzle
56:排出噴嘴 56: Exhaust nozzle
60:門部前後移動機構 60: Door forward and backward movement mechanism
300:FOUP 300:FOUP
400:OHT 400:OHT
401:軌道 401:Track
圖1(a)為包含與本實施型態有關之裝載埠之半導體裝置及其周邊之概略性的俯視圖,(b)為相同的俯視 圖。 FIG. 1(a) is a schematic top view of a semiconductor device including a loading port related to the present embodiment and its surroundings, and FIG. 1(b) is a similar top view.
圖2為裝載埠之斜視圖。 Figure 2 is an oblique view of the loading port.
圖3為裝載埠之右側面圖。 Figure 3 is the right side view of the loading port.
圖4為表示載置托盤之位置的右側面圖,(a)為中間之位置,(b)為前方之位置,(c)為表示後方之位置。 Figure 4 is a right side view showing the position of the tray, (a) is the middle position, (b) is the front position, and (c) is the rear position.
圖5為表示噴嘴之升降的右側面圖,(a)表示噴嘴位於間隔位置之狀態,(b)表示噴嘴位於連接位置之狀態。 Figure 5 is a right side view showing the lifting and lowering of the nozzle, (a) shows the nozzle in the spaced position, and (b) shows the nozzle in the connected position.
圖6為圖1(a)之放大圖。 Figure 6 is an enlarged view of Figure 1(a).
圖7為裝載埠之動作的流程圖。 Figure 7 is a flow chart of the loading port's actions.
圖8為表示裝載埠之動作的俯視圖。 Figure 8 is a top view showing the operation of the loading port.
圖9為表示裝載埠之動作的右側面圖。 Figure 9 is a right side view showing the action of the loading port.
圖10為與變形例有關之裝載埠的斜視圖。 Figure 10 is an oblique view of the loading port related to the variant.
圖11為裝載埠之右側面圖。 Figure 11 is a right side view of the loading port.
圖12為表示裝載埠之動作的俯視圖。 Figure 12 is a top view showing the operation of the loading port.
圖13為與另外之變形例有關的EFEM之俯視圖。 Figure 13 is a top view of the EFEM related to another variation.
接著,針對本發明之實施型態,一面參照圖1~圖8,一面進行說明。另外,如圖1所示般,將複數裝載埠4、5排列之方向視為左右方向。再者,將與左右方向正交,裝載埠4、5朝向搬運室6之方向視為前後方向。在前後方向,將裝載埠4、5側視為前方,將搬運室
6側視為後方。
Next, the implementation of the present invention will be described with reference to Figures 1 to 8. In addition, as shown in Figure 1, the direction in which the plurality of
圖1為被設置在半導體工場之半導體製造裝置1及其周邊之概略圖。如圖1(a)所示般,半導體製造裝置1具備對晶圓等之基板進行處理之基板處理裝置2,和在與基板處理裝置2之間收授基板之EFEM3(本發明之基板搬運系統)。半導體製造裝置1進行以下之一連串動作。首先,EFEM3係從後述之OHT400(本發明之輸送手段)等接取收容基板之FOUP300(本發明之容器)。接著,EFEM3從FOUP300取出基板,而將基板交給基板處理裝置2。基板處理裝置2進行從EFEM3接取到之基板的處理,將基板返回至EFEM3。EFEM3係將基板返回至FOUP300。之後,FOUP300藉由OHT400等被搬運。
FIG. 1 is a schematic diagram of a semiconductor manufacturing apparatus 1 and its periphery installed in a semiconductor factory. As shown in FIG. 1(a), the semiconductor manufacturing apparatus 1 includes a substrate processing apparatus 2 for processing substrates such as wafers, and an EFEM3 (substrate transport system of the present invention) for receiving and transferring substrates to and from the substrate processing apparatus 2. The semiconductor manufacturing apparatus 1 performs one of the following series of actions. First, the EFEM3 receives a FOUP 300 (container of the present invention) for accommodating substrates from an OHT 400 (transportation means of the present invention) described later. Next, the EFEM3 takes out the substrate from the
基板處理裝置2具備無圖示之基板處理機構,和控制裝置10。控制裝置10控制基板處理機構,進行基板之處理或EFEM3之間的基板的收授外,在作為上位電腦之主機200等之間進行通訊。
The substrate processing device 2 has a substrate processing mechanism (not shown) and a
EFEM3具備一台之裝載埠4(本發明之裝載埠及第1裝載埠),和2台裝載埠5(本發明之第2裝載埠),和搬運室6,和搬運機器人7(本發明之搬運手段),和控制裝置11。另外,裝載埠4和裝載埠5之大的差異點,係有無後述旋轉機構24。即是,裝載埠4具備旋轉機構24,裝載埠5不具備旋轉機構24。
EFEM3 has one loading port 4 (the loading port and the first loading port of the present invention), two loading ports 5 (the second loading port of the present invention), a
裝載埠4、5係以各個的後端部沿著後述搬運室6之前側之隔壁8之方式,被排列設置在左右方向。在裝載埠4、5載置FOUP300。另外,FOUP300係藉由OHT400在工場內被輸送。如圖1(a)、(b)所示般,OHT400沿著事先被設置在工場內之頂棚之軌道401(本發明之軌道)而行走,從上方存取至裝載埠4、5之無人搬運車。OHT400根據來自主機200之指令,將FOUP300收授至裝載埠4或裝載埠5。
The
搬運室6構成藉由隔壁8與外部空間隔離之搬運空間9。另外,軌道401,與搬運室6之前方之隔壁8之前後方向的距離L,藉由例如SEMI規格被設定的243mm前後。
The
搬運機器人7被設置在搬運室6內,且在被載置於裝載埠4、5之FOUP300和基板處理裝置2之間進行基板之收授。控制裝置11除了進行搬運機器人7之控制外,在基板處理裝置2之控制裝置10、後述裝載埠4之控制裝置29及主機200等之間,進行通訊。
The
接著,針對裝載埠4之構成予以說明。另外,將圖2所示之方向視為前後左右上下方向。
Next, the structure of the
如圖2、圖3及圖5所示般,裝載埠4具備基座20、門部21、框架22、載置托盤23(本發明之載置部)、旋轉機構24、載置托盤移動機構25、氮氣沖洗單
元27和控制裝置29(本發明之控制手段)等。
As shown in Figures 2, 3 and 5, the
基座20在俯視下為略矩形狀之平板狀的部分。基座20被豎立配置成構成搬運室6之隔壁8之一部分。再者,在基座20之上側部分,形成在俯視下呈略矩形狀之開口部30。開口部30具有被設置在FOUP300之側面的蓋301可以前後通過的大小。
The
門部21具有門31和門臂32。門31係略矩形狀之平板狀的構件,具有可以從後方塞住開口部30的大小。門31具有吸附FOUP300之蓋301之吸附部33,和開關蓋301之鎖部的卡鎖楔34。門臂32被安裝在門31之後部,係從下方支撐門31的構件。再者,門臂32被連接於門移動部35。門移動部35被設置在基座20之後方,使門31及門臂32在前後方向及上下方向移動。
The
框架22係從基座20朝前方突出設置之部分。框架22在俯視下為略矩形狀,具有大於FOUP300之面積。另外,在框架22之前面,設置感測器26(本發明之檢測手段)。感測器26係例如具有發光部和受光部之光學感測器。發光部在朝框架22之前方發出光,且在框架22之前方具有障礙物之情況下,受光部檢測藉由障礙物反射之光,將檢測訊號發送至控制裝置29。
The
載置托盤23係俯視下呈略矩形狀之構件,具有可以穩定地載置FOUP300之面積。載置托盤23如後述般,經旋轉機構24及載置托盤移動機構25從下方被支撐於框架22。
The
在載置托盤23之上面,設置三個定位銷36、37、38。定位銷36、37、38係於後述正規之方向載置FOUP300之情況下,配置成與被設置在FOUP300之底面之圖示的3個孔卡合。另外,圖2及圖3中之載置托盤23之方向,係FOUP300之蓋301和門31正對之狀態下的方向。即是,當定位銷36和定位銷37之前後方向之位置略相等,定位銷38位於較定位銷36、37前方之時,FOUP300之蓋301和門31正對。將載置托盤23之上述方向稱為正規之方向。
Three positioning pins 36, 37, and 38 are provided on the
再者,在載置托盤23形成有從載置托盤23之上面貫通整個下面之兩個噴嘴通過孔39、40。該些噴嘴通過孔39、40被配置成載置托盤23位於正規之方向時,可以分別通過後述注入噴嘴55及排出噴嘴56。
Furthermore, two
如圖3所示般,旋轉機構24具有馬達41和傳動軸42。馬達41使用例如旋轉式之氣動馬達等。馬達41被支撐於後述載置托盤移動機構25之可動部47。傳動軸42係以沿著垂直方向之方式被安裝於馬達41之上部及載置托盤23之下部,從下方支撐載置托盤23,同時將馬達41之旋轉動力傳至載置托盤23。藉由具有上述構成之旋轉機構24之馬達41使傳動軸42旋轉,載置托盤23在垂直軸周圍旋轉。
As shown in FIG3 , the rotating
如圖2~圖4所示般,載置托盤移動機構25具有氣缸45、傳動部46、可動部47、滑軌48和軌道塊49。氣缸45使用例如構成氣缸45之桿件50能夠取得3
種類之位置的3位置氣缸。氣缸45係以桿件50在前後方向移動之方式,被設置在框架22內。傳動部46被安裝於桿件50之端部及可動部47之下部,且被配置成將氣缸45之動力傳達至可動部47。可動部47被連接於傳動部46之上部,且被設置成在前後方向移動。再者,可動部47從下方支撐旋轉機構24之馬達41。滑軌48沿著前後方向被安裝於可動部47之下部。軌道塊49被固定於框架22之上面,且以能夠前後移動之方式從下方支撐滑軌48。
As shown in FIGS. 2 to 4 , the
具有上述構成之載置托盤移動機構25之氣缸45藉由使桿件50在前後方向移動,載置托盤23如圖4所示般,在前後方向能在三個位置之間移動。在裝載埠4如圖1所示般被配置之狀態下,如圖4(a)所示般,當載置托盤23在前後方向位於中間之位置之時,載置托盤23位於軌道401之正下方。即是,載置托盤23可以藉由OHT400收受FOUP300。將載置托盤23之上述位置稱為收授位置。
The
再者,如圖4(b)所示般,當載置托盤23位於較收授位置前方之時,如後述般,載置托盤23藉由旋轉機構24被迫旋轉。將該前方之位置稱為旋轉位置。而且,如圖4(c)所示般,當載置托盤23位於較收授位置後方之時,載置托盤23上之FOUP300之蓋301接近於門部21,蓋301連同門部21被開關。將該後方之位置稱為門開關位置。
Furthermore, as shown in FIG. 4(b), when the
再者,裝載埠4係如圖5所示般,具備對FOUP300內進行氮氣之注入及排出之氮氣沖洗單元27。氮氣沖洗單元27具有供給氮氣之氣體供給手段51和排出事先充滿於FOUP300內之氣體的排氣手段52,和配管53、54,和注入噴嘴55及排出噴嘴56(本發明之噴嘴)和馬達57、58。
Furthermore, the
注入噴嘴55被設置成從載置托盤移動機構25之可動部47之上面朝上突出,且被配置成當載置托盤23位於正規之方向時,可以通過噴嘴通過孔39。注入噴嘴55被連接於配管53,再者,能夠藉由馬達57升降。配管53與氣體供給手段51連接。同樣,排出噴嘴56被配置成當載置托盤23位於正規之方向時,可以通過噴嘴通過孔40,且被連接於配管54,再者,能夠藉由馬達58升降。配管54與排氣手段52連接。
The
如圖5(a)所示般,當注入噴嘴55及排出噴嘴56最下降之時,位於與注入噴嘴55及排出噴嘴56之上端較載置托盤23下方間隔開的位置(間隔位置)。再者,如圖5(b)所述般,當注入噴嘴55及排出噴嘴56最上升時,注入噴嘴55及排出噴嘴56之上端部位於分別連接於FOUP300之底面之噴嘴插入口302、303之位置(連接位置)。
As shown in FIG5(a), when the
控制裝置29具備CPU(Central Processing Unit)、ROM(Read Only Memory)、RAM(Random Access Memory)等。控制裝置29除了依照被儲存於
ROM之程式,藉由CPU,控制裝載埠4之各機構之外,在EFEM3之控制裝置11或主機200等之間進行通訊。
The
接著,針對裝裝載埠5予以說明。裝載埠5之構成雖然與裝載埠4之構成大概相同,但是如上述般,在不具備旋轉機構24這樣的點,與裝載埠4之構成不同。即是,在裝載埠5中,FOUP300在蓋301與門31正對之狀態下被載置於載置托盤23。另外,裝載埠5之載置托盤23被直接性地支撐於載置托盤移動機構25。再者,裝載埠5之載置托盤23在旋轉位置不移動,在收授位置和門開關位置之間被迫移動。在裝載埠4和裝載埠5中,載置托盤23之收授位置及門開關位置之前後方向之位置相同。
Next, the
接著,如圖6所示般,針對被設置在EFEM3之裝載埠4之動作步驟,使用圖6~圖9予以說明。
Next, as shown in Figure 6, the action steps set in the
圖7為裝載埠4之動作的流程圖。首先,在載置托盤23上無載置FOUP300之狀態下,裝載埠4之控制裝置29與主機200通訊,取得藉由OHT400被輸送之FOUP300之資訊(S101)。另外,該FOUP300之資訊,包含與被載置於載置托盤23之時之FOUP300之方向有關的資訊。在FOUP300之蓋301以與裝載埠4之門31正對之方向被載置之情況下,作為正規之方向的主旨之資訊,從主機200被送出,在蓋301以與正規之方向相反之方向
被載置之情況下,作為反方向之主旨的資訊,從主機200被送出。
FIG7 is a flow chart of the operation of the
接著,控制裝置29係根據從主機200接收之資訊,判定FOUP300被載置於載置托盤23之方向係正規之方向或相反方向(S102)。首先,針對FOUP300以相反方向被載置於載置托盤23之情況予以說明。
Next, the
控制裝置29係在載置托盤23被配置在正規之方向之情況下,驅動旋轉機構24之馬達41,使載置托盤23旋轉以載置相反方向之FOUP300。在載置托盤23一開始被配置在相反方向之情況下,控制裝置29不使載置托盤23旋轉。再者,控制裝置29係在載置托盤23位於收授位置以外之位置之情況下,使載置托盤移動機構25之氣缸45動作,而使載置托盤23移動至收授位置。在載置托盤23一開始位於收授位置之情況下,控制裝置29不使載置托盤23旋轉。即是,控制裝置29係在載置托盤23位於如圖8(a)所示之位置及方向之狀態下待機(S103)。
When the
此時,如圖6所示般,裝載埠4之載置托盤23在俯視下沿著軌道401被配置,FOUP300可以藉由OHT400被載置。另外,同樣,裝載埠5中之載置托盤之收授位置在俯視下也沿著軌道401而被配置。
At this time, as shown in FIG6 , the
接著,如圖8(b)及圖9(a)所示般,FOUP300藉由OHT400被載置於載置托盤23(S104)。之後,如圖8(c)所示般,控制裝置29使載置托盤移動
機構25之氣缸45動作,使載置托盤23移動至較收授位置前方之旋轉位置,使載置托盤23遠離門31(S105)。如圖8(c)及圖9(b)所示般,在載置托盤23位於旋轉位置之狀態下,載置托盤23突出至較框架22前方。
Next, as shown in FIG8(b) and FIG9(a), FOUP300 is placed on the
另外,雖然無圖示,但是在框架22之前方具有障礙物之情況,感測器26事先檢測障礙物而將檢測訊號發送至控制裝置29。接收檢測訊號之控制裝置29係以例如不對氣缸45發出控制訊號等,限制載置托盤23朝旋轉位置移動。因此,可以防止當人等通行接近時,載置托盤23及FOUP300飛出至較框架22前方,故可以確保安全性。
In addition, although not shown, if there is an obstacle in front of the
接著,如圖8(d)、(e)及圖9(c)所示般,控制裝置29驅動旋轉機構24之馬達41,使載置托盤旋轉180°(S106)。在此,當在載置托盤23位於收授位置之狀態下,FOUP300旋轉時,雖然FOUP300衝突至裝載埠4之門31或基座20,但是因載置托盤23位於較收授位置前方之旋轉位置之時,FOUP300旋轉,故FOUP300不衝突至門31或基座20而旋轉。即是,在裝載埠4中,即使沿著與裝載埠5中之載置托盤23之收授位置相同之OHT400之軌道401而配置載置托盤23之收授位置之情況下,亦可以回避FOUP300於旋轉時衝突至門31或基座20之情形。另外,在本實施型態中,比起在後述之變形例中所示般使門部21a後退之情況下,裝載埠4側之空間通過開口部30而難以進入至搬運空間9,故少
擔心搬運空間9之污染。
Next, as shown in Fig. 8(d), (e) and Fig. 9(c), the
另外,因旋轉機構24藉由載置托盤移動機構25之可動部47被支撐,載置托盤23藉由旋轉機構24被支撐,故藉由旋轉機構24旋轉僅有載置托盤23及FOUP300。即是,被設置在可動部47之上面的上述注入噴嘴55及排出噴嘴56不旋轉。因此,載置托盤23不藉由配管53、54而妨礙旋轉機構24之動作,可以旋轉。
In addition, since the
接著,控制裝置29驅動氮氣沖洗單元27之馬達57、58,而使注入噴嘴55及排出噴嘴56上升至連接位置而使連接於FOUP300之底部之噴嘴插入口302、303。而且,控制裝置29係控制氣體供給手段51及排氣手段52,而通過注入噴嘴55及排出噴嘴56而開始朝FOUP300注入氮氣及排出氣體(S107)。另外,如圖9(a)、(b)所示般,在載置托盤23被配置在相反相向之狀態下,因注入噴嘴55及排出噴嘴56之前後方向之位置和噴嘴通過孔39、40之前後方向之位置不一致,故無法使注入噴嘴55及排出噴嘴56連接於FOUP300。如圖9(c)所示般,藉由載置托盤23被配置在正規之方向,首先朝注入噴嘴55及排出噴嘴56之FOUP300連接。
Next, the
接著,如圖8(f)所示般,控制裝置29使氣缸45動作,使載置托盤23移動至後方之門開關位置(S108)。而且,控制位置29係停止氣體供給手段51及排氣手段52之動作,驅動馬達57、58而使注入噴嘴55及排出噴嘴56下降至間隔位置(S109)。另外,因氣體
之注入及排出較載置托盤23移動至門開關位置更早開始,故可以較載置托盤23之移動完成後開始氮氣之注入等更早完成氮氣之注入等,可以縮短至後述門開關動作為止之時間。
Next, as shown in FIG8(f), the
接著,裝載埠4進行門開關動作(S110)。即是,控制裝置29係藉由門31之卡鎖楔34開鎖FOUP300之蓋301,使蓋301吸附於門31之吸附部33而予以保持。而且,控制裝置29使門移動部35動作,使門31及蓋301移動至後方,使門31及蓋301下降。之後,EFEM3之控制裝置11使搬運機器人7動作,而從FOUP300內取出基板而收授至基板處理裝置2,從基板處理裝置2接取處理完成之基板而返回至FOUP300內。於所需之所有基板處理完成之後,控制裝置29使門移動部35動作並使門31及蓋301上升、前進,使蓋301返回至FOUP300,藉由卡鎖楔34對蓋301上鎖,解除蓋301朝吸附部33之吸附。
Next, the
之後,控制裝置29係將基板處理結束之主旨的資訊傳送至主機200。再者,控制裝置29係依照來自主機200之指令,進行FOUP300之移動及旋轉之控制。即是,FOUP300以照原樣之正規之方向藉由OHT400被輸送之情況下,控制裝置29控制載置托盤移動機構25而使載置托盤23以照樣之方向移動至收授位置。再者,FOUP300以相反方向藉由OHT400被輸送之情況下,控制裝置29藉由載置托盤移動機構25暫時使載置托盤23移
動至旋轉位置。而且,控制裝置29係藉由旋轉機構24使載置托盤23反轉之後,控制載置托盤移動機構25,使載置托盤23移動至收授位置。最後,FOUP300藉由從主機200接受指示的OHT400被輸送(S111)。
After that, the
返回步驟S102,針對FOUP300以正規之方向被載置之情形予以說明。控制裝置29係在載置托盤23被配置成相反方向之情況下,藉由旋轉機構24,使載置托盤23朝正規之方向(參照圖2)旋轉。再者,控制裝置29係在載置托盤23被配置在收授位置以外之情況下,藉由載置托盤移動機構25使載置托盤23移動至收授位置。即是,控制裝置29係在載置托盤23位於正規之方且收授位置之狀態下待機(S121)。FOUP300藉由OHT400係以正規之方向被載置於載置托盤23(S122)。在此情況下,控制裝置29不進行載置托盤23朝旋轉位置移動及載置托盤23之旋轉,開始進行步驟S107之氣體的注入及氣體的排出。之後,控制裝置29進行與FOUP300被載置於相反方向之情況相同的動作。
Returning to step S102, the case where FOUP300 is loaded in the regular direction is explained. When the
如上述般,裝載埠4即使於載置托盤23在俯視下沿著軌道401接取收授位置之情況下,亦可以回避FOUP300之旋轉時,FOUP300衝突於門31或基座20。因此,在EFEM3,裝載埠4之載置托盤23之收授位置,和不具有旋轉機構24之裝載埠5之載置托盤23之收授位置沿著相同之軌道401被配置。因此,針對各個的裝載埠4、5,可以使用相同之OHT400而進行FOUP300之收
授。
As described above, even when the
再者,在裝載埠4之載置托盤23位於旋轉位置之狀態下,載置托盤23突出至較框架22前方。即是,框架22不需要前後方向突出至旋轉位置,框架22之前後方向之大小成為小型化。因此,可以將裝載埠4之設置面積縮小成與裝載埠5相同程度。
Furthermore, when the
接著,針對對上述實施型態附加變更之變形例予以說明。但是,針對具有與上述實施型態相同之構成,賦予相同符號適當省略其說明。 Next, the modified examples of the above-mentioned implementation are described. However, for the same structure as the above-mentioned implementation, the same symbols are assigned and the description thereof is omitted as appropriate.
(1)如圖10~圖12所示般,即使裝載埠4a具備使門部21a遠離載置托盤23之門部前後移動機構60亦可。以下,具體性地予以說明。
(1) As shown in Figures 10 to 12, even if the
如圖10及圖11所示般,門部21a進一步具有上側旋動板61、下側旋動板62。基座20a之開口部30a較門部21a之門31a在上下方向更寬廣,開口部30a之上側部分藉由上側旋動板61,下側部分藉由下側旋動板62分別被堵塞。上側旋動板61、下側旋動板62係以左右方為軸分別被支撐成能夠旋動。上側旋動板61係上側部分被支撐於基座20a,下側旋動板62係下側部分被支撐於基座20a。
As shown in Figures 10 and 11, the
門部前後移動機構60具有使門部21a之門臂32a在前後方向及上下方向移動之門移動部35a,和被連接於上側旋動板61之馬達63,被連接於下側旋動板62之馬達64。馬達63、64係在堵塞開口部30a之封閉位置
(圖10(a)),和開啟開口部30a之開啟位置(圖10(b))之間分別使上側旋動板61、下側旋動板62旋動。如圖10(b)所示般,上側旋動板61、下側旋動板62藉由朝後方旋動而移動至開啟位置。
The door forward and
圖12係FOUP300被載置於相反方向之情況之裝載埠4a之動作的俯視圖。首先,至控制裝置29使載置托盤23成為相反方向,並且在收授位置待機(圖12(a)),FOUP300以相反方向被載置於載置托盤23(圖12(b))為止,與上述實施型態相同。
FIG12 is a top view of the
接著,控制裝置29如圖12(c)所示般,控制門部前後移動機構60使門31a後退,並且使上側旋動板61、下側旋動板62朝後方旋動。即是,在該變形例中,藉由使上側旋動板61、下側旋動板62朝後方旋動,使門部21a從載置托盤23相對性地遠離。接著,控制裝置29係如圖12(d)、(e)所示般,控制旋轉機構24,使載置托盤23旋轉。在該變形例中,載置托盤23不從收授位置移動,如圖12(d)所示般,可以FOUP300之旋轉時,FOUP300衝突至門31a或基座20a。另外,即使控制裝置29控制載置托盤移動機構25a而使載置托盤23移動至旋轉位置,並且控制門部前後移動機構60而進行使門31a後退等亦可。
Next, the
載置托盤23之旋轉完成後,控制裝置29如圖12(f)所示般,控制門部前後移動機構60,使門31a前進,並使上側旋動板61、下側旋動板62移動至封閉位
置。再者,控制裝置29控制載置托盤移動機構25a而使載置托盤23移動至門開關位置。之後的裝載埠4a之動作與上述實施型態相同。
After the rotation of the
(2)旋轉機構24使載置托盤23旋轉之角度不限定於180°,即使為例如旋轉90°之構亦可。在圖13所示之EFEM3b中,兩台之裝載埠5沿著搬運室6b之前方之壁面而被配置,對此,裝載埠4係沿著搬運室6b之左方的壁面而被設置。如此之情況下,藉由裝載埠4在使裝載托盤23從正規之方向旋轉90°之狀態下待機,能夠在與OHT400之間進行FOUP300之收授。而且,在FOUP300藉由OHT400被載置於載置托盤23之後,控制裝置29藉由載置托盤移動機構25使載置托盤23移動至旋轉位置,藉由旋轉機構24使載置托盤23旋轉90°。
(2) The angle at which the
(3)裝載埠4之其他構成也可以是變更。例如,裝載埠4具備氮氣沖洗單元27,即使無氣體之注入及排出之動作步驟亦可。再者,即使將框架22之前後方向之大小,增大成即使載置托盤23位於旋轉位置之時,亦不會從框架22突出至前方之程度亦可。並且,載置FOUP300之載置部並不限定於載置托盤23。例如,即使如上述專利文獻2(日本專利文獻4168724號公報)所記載般在俯視呈三角形狀者亦可,若為載置FOUP300者亦可。
(3) Other structures of the
旋轉機構24之構成並限定於本實施型態,若為使載置托盤23在垂直軸周圍旋轉即可。再者,載置托
盤移動機構25之構成並不限定於本實施型態者,若為使載置托盤23在三個位置之間於前後方向移動者即可。感測器26即使為例如超音波檢測器等亦可。
The structure of the
(4)於載置托盤移動機構25使載置托盤23移動至旋轉位置之前,即使旋轉機構24使載置托盤23旋轉亦可。即是,即是在FOUP300不衝突至門31或基座20之時序,於旋轉機構24正在使載置托盤23旋轉當中,載置托盤移動機構25使載置托盤23移動至前方亦可。
(4) Before the
(5)裝載埠4之控制裝置29不一定要組裝於裝載埠4內,即使裝載埠4之控制兼用基板處理裝置2之控制裝置10或EFEM3之控制裝置11亦可。
(5) The
(6)其他之構成也可以適當變更。例如,在EFEM3中,裝載埠4、5之台數並不限定於3台。再者,即使將裝載埠5所有置換成裝載埠4亦可。被注入於FOUP300之氣體即使為氮以外之惰性氣體亦可。收容基板之容器並不限定於FOUP300,例如即使為用以在工場間輸送基板之FOSB(Front Opening Shipping Box)等亦可。具備裝載埠4、5和搬運室6之搬運系統並不限定於EFEM3,例如即使為在複數容器間進行基板之取出放入的分類器等亦可。搬運基板之搬運手段並不限定於搬運機器人7。輸送容器之輸送手段並不限定於OHT400,若為沿著事先被設置之軌道而輸送容器即可。上述軌道和搬運室6之前方之隔壁8的前後方向之距離L並不限定於243mm前後。
(6) Other configurations may also be appropriately changed. For example, in EFEM3, the number of
4:裝載埠 4: Loading port
20:基座 20: Base
22:框架 22: Framework
23:載置托盤 23: Loading tray
24:旋轉機構 24: Rotating mechanism
25:載置托盤移動機構 25: Loading tray moving mechanism
31:門 31: Door
47:可動部 47: Movable part
300:FOUP 300:FOUP
301:蓋 301: Cover
Claims (6)
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JP2016136175A JP6882656B2 (en) | 2016-07-08 | 2016-07-08 | Board transfer system with load port and load port |
JP2016-136175 | 2016-07-08 |
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TW202234565A TW202234565A (en) | 2022-09-01 |
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Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5944475A (en) | 1996-10-11 | 1999-08-31 | Asyst Technologies, Inc. | Rotated, orthogonal load compatible front-opening interface |
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5944475A (en) | 1996-10-11 | 1999-08-31 | Asyst Technologies, Inc. | Rotated, orthogonal load compatible front-opening interface |
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