TWI845933B - Loading port and substrate handling system having a loading port - Google Patents

Abstract

In a loading port with a rotating mechanism, even if the container receiving and delivering position is matched with a loading port without a rotating mechanism, the container can be prevented from colliding with the door when rotating.

The loading port (4) comprises: a base (20) having an opening (30); a door (21) disposed on the base (20) and opening and closing the opening (30); a frame (22) protruding forward from the base (20) in a front-rear direction perpendicular to the base (20) and supporting a loading tray (23); a rotating mechanism (24) for rotating the loading tray (23) around a vertical axis; and a moving mechanism for moving at least one of the door (21) and the loading tray (23) away from the other before or during the rotation of the loading tray (23) by the rotating mechanism (24) after the FOUP (300) is loaded on the loading tray (23) by the OHT (400). Since the FOUP (300) and the door (21) are relatively far apart, it is possible to avoid collision with the door (21) when the FOUP (300) rotates.

Description

Loading port and substrate handling system with loading port

The present invention relates to a loading port of a rotating mechanism for rotating a container containing substrates, and a substrate transport system having the loading port.

Previously known is a device that loads the container between a container such as a FOUP (Front-Opening Unified Pod) that holds substrates such as semiconductor wafers and a transfer chamber that is equipped with a transfer means for transferring the substrates, and a loading port for loading the container when taking out and putting in the substrates. In addition, the loading port, together with the above-mentioned transfer means and transfer chamber, constitutes a substrate transfer system such as an EFEM (Equipment Front End Module).

Usually, the above-mentioned container is loaded on the loading port in a state where the lid provided on the side of the container and the door provided on the loading port for closing the lid face each other, but there are cases where the container is not loaded in such a direction. For example, in a case where the storage device for storing the container in the factory does not have a rotating mechanism for rotating the container, the container may be loaded on the loading port in a state opposite to the usual direction. In such a case, the container must be rotated in a manner that the lid and the door of the container face each other, so patent documents 1 to 3 disclose loading ports with rotating means.

The loading port described in Patent Document 1 has a loading portion for loading containers, a moving mechanism for moving the loading portion, and a rotating mechanism for rotating the moving mechanism. The loading portion can move between a receiving position where the container is received and delivered between a transfer machine having a fork frame (i.e., a transfer machine that walks on the floor) and a door opening position where the lid of the container and the door are opened and closed. The container is rotated by the rotating mechanism together with the loading portion so that the lid of the container and the door face each other. In addition, the rotating position for rotating the container is between the receiving position and the door opening position.

Although Patent Documents 2 and 3 disclose loading ports having a rotating mechanism for rotating containers similarly to Patent Document 1, the rotating position for rotating the container in the loading ports described in Patent Documents 2 and 3 is set to be the same as the receiving position for receiving and delivering the container between the device for transporting the container to the loading port, etc.

In addition, as a means of transporting containers in factories such as semiconductor factories, there are known unmanned transport vehicles such as OHT (Overhead Hoist Transfer) that travel along a pre-set track. In a factory equipped with such a transport means, when there are mixed loading ports with a rotating mechanism and loading ports without a rotating mechanism (hereinafter, generally referred to as loading ports), in order to improve the transportation efficiency, there is a demand for the receiving and delivering positions of containers in both loading ports along the transport means. In addition, the distance between the running track of the transport means and the wall surface where the loading port is arranged in the above-mentioned transport chamber is set by the specifications. In the case of OHT, for example, it is set to about 243mm in a top view according to the SEMI specifications, regardless of the size of the substrate.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Publication No. 2013-219159

[Patent Document 2] Japanese Patent No. 4168724

[Patent Document 3] Japanese Patent No. 4816637

As in the loading ports described in patent documents 1 to 3, the receiving and delivering of containers by unmanned transport vehicles such as OHT is not a prerequisite. In the case where the receiving and delivering position can be set to a position very far from the door switch position, the rotating position of the container can be set to the same as the receiving and delivering position or closer to the door switch position than the receiving and delivering position. However, according to the above specifications, when the receiving and delivering position is set at a position close to the door switch position, the size of the loading ports will cause the container to collide with the door or the wall around it when rotating. Therefore, there is a problem that the receiving and delivering position in the loading ports with these rotating mechanisms and the receiving and delivering position in the loading ports without rotating mechanisms cannot be arranged along the same track of the conveying means, and the conveying efficiency of the container is reduced.

The purpose of the present invention is to avoid collision of the container with the door etc. when the container is rotated, even if the container is arranged along the track of the conveying means which is the same as the receiving position in the loading port without a rotating mechanism and is received and delivered from the conveying means to the receiving position of the loading portion.

The loading port of the first invention has a loading portion on which a container for accommodating a substrate is loaded, and when the loading portion moves along a previously set track and can receive and deliver the container between the conveying means for conveying the container, the loading port receives and delivers the container between the conveying means, and the loading port is characterized in that it has: a base, which is vertically arranged and has an opening; a door, which is arranged on the base and opens and closes the opening; A frame, which is protruded forward from the base in a front-rear direction orthogonal to the base, and supports the placement portion; a rotating mechanism, which rotates the placement portion around a vertical axis; and a moving mechanism, which moves at least one of the door portion and the placement portion away from the other before or during the rotation of the placement portion after the container is placed on the placement portion by the conveying means.

In a loading port with a rotating mechanism, after a container is placed on the loading portion by a conveying means, before or during the rotating mechanism rotates the loading portion, the distance between the door and the loading portion in the front-rear direction is relatively far. Therefore, in a loading port with a rotating mechanism, even if a container is placed along the same conveying means track as the receiving position in a loading port without a rotating mechanism, the container can be prevented from colliding with the door or the base when the container rotates.

The loading section of the second invention is the one in the first invention, wherein the moving mechanism moves the loading section forward and backward between the conveying means and the conveying means from the receiving position where the container is received and delivered on the loading section, and after the container is loaded on the loading section at the receiving position by the conveying means, and before or during the rotation of the loading section by the rotating mechanism, the loading section is moved to a position further in front of the receiving position.

After the container is placed on the loading part, the loading part is moved to the front of the receiving position by the moving mechanism before or while the rotating means rotates the loading part, so the container can be prevented from colliding with the door or base when rotating. In addition, compared with the case where the door is moved backward, the air on the loading port side is less likely to pass through the opening and enter the space behind, so there is less worry about the contamination of the space behind.

The loading port of the third invention is in the second invention, wherein the rotating mechanism is the moving mechanism that moves the loading portion to a rotating position that is further forward than the receiving position, and then rotates the loading portion.

After the loading part is moved to the rotation position ahead of the receiving position by the moving mechanism, the rotating mechanism rotates to avoid the container colliding with the door or base when the container rotates.

The loading port of the fourth invention is in the third invention, wherein the loading portion is caused to protrude further in front of the frame by the moving mechanism, so that the loading portion is moved to the rotation position.

If the present invention is used, since only the loading part protrudes to the rotation position, there is no need to make the frame protrude to the rotation position, and the size of the frame in the front and back direction becomes small, and the installation area of the loading port can be reduced.

The loading port of the fifth invention in the fourth invention is provided with a detection means for detecting an obstacle located in front of the frame, and a control means for limiting the movement of the loading portion toward the rotational position when the detection means detects the obstacle.

By using the present invention, safety can be ensured because the loading part and the container can be prevented from flying out to the front of the frame when people pass by.

The loading port of the sixth invention is any one of the inventions 2 to 5, wherein the moving mechanism has a movable part that supports the rotating mechanism from below and can move in the front-rear direction, and the placing part is supported from below by the rotating mechanism, and a nozzle for injecting or discharging gas that can be raised and lowered is supported on the movable part between a connection position connected to a nozzle insertion port formed below the container placed on the placing part and a spacing position spaced downward from the container insertion port.

When the present invention is used, since the rotating mechanism is supported by the movable part of the moving mechanism and the mounting part is supported by the rotating mechanism, only the mounting part rotates by the rotating mechanism, and the nozzle for gas injection or discharge disposed on the movable part of the moving mechanism does not rotate. Therefore, there is no situation where the operation of the rotating mechanism is hindered by the pipe for gas injection or discharge connected to the nozzle, and the mounting part can be rotated.

The loading port of the seventh invention is in the sixth invention, before the moving mechanism moves the loading part toward the door opening position where the cover provided on the side of the container and the door part are opened and closed, or during the movement, the nozzle moves to the connection position and starts to inject or discharge gas into or out of the container through the nozzle.

Since the nozzle for injecting or discharging gas is arranged on the movable part, the relative position of the nozzle and the carrier part in the front-back direction does not change even when the carrier part moves by the moving mechanism. Therefore, before the carrier part moves to the door opening position or while it is moving, the gas can be injected or discharged into the container. Therefore, the gas injection can be completed earlier than starting the gas injection after the movement of the carrier part is completed, and the time from the door opening to the closing of the door can be shortened.

The substrate transport system of the eighth invention comprises: a first loading port, which is the loading port of any one of the first to seventh inventions, and a second loading port, which has the loading portion and does not have the rotating mechanism, and a transport chamber, which has a transport means for taking out and putting the substrate into the container, and the receiving and giving position of the loading portion of the first loading port and the receiving and giving position of the loading portion of the second loading port are arranged along the track of the transport means.

For the first loading port with a rotating mechanism and the second loading port without a rotating mechanism, the receiving and delivering positions of the loading parts of each loading port are arranged along the running track of the same conveying means. Therefore, for each loading port, the same conveying means can be used to deliver and receive containers.

3.3b:EFEM

4, 4a, 5: Loading port

6, 6b: Transportation room

7: Transport robot

10, 11, 29: Control device

20, 20a: base

21, 21a: Door

22: Framework

23: Loading tray

24: Rotating mechanism

25: Loading tray moving mechanism

26: Sensor

29: Control device

30, 30a: Opening

31, 31a: Door

39, 40: Nozzle through hole

47: Movable part

55: Injection nozzle

56: Exhaust nozzle

60: Door forward and backward movement mechanism

300:FOUP

400:OHT

401:Track

FIG. 1(a) is a schematic top view of a semiconductor device including a loading port related to the present embodiment and its surroundings, and FIG. 1(b) is a similar top view.

Figure 2 is an oblique view of the loading port.

Figure 3 is the right side view of the loading port.

Figure 4 is a right side view showing the position of the tray, (a) is the middle position, (b) is the front position, and (c) is the rear position.

Figure 5 is a right side view showing the lifting and lowering of the nozzle, (a) shows the nozzle in the spaced position, and (b) shows the nozzle in the connected position.

Figure 6 is an enlarged view of Figure 1(a).

Figure 7 is a flow chart of the loading port's actions.

Figure 8 is a top view showing the operation of the loading port.

Figure 9 is a right side view showing the action of the loading port.

Figure 10 is an oblique view of the loading port related to the variant.

Figure 11 is a right side view of the loading port.

Figure 12 is a top view showing the operation of the loading port.

Figure 13 is a top view of the EFEM related to another variation.

Next, the implementation of the present invention will be described with reference to Figures 1 to 8. In addition, as shown in Figure 1, the direction in which the plurality of loading ports 4 and 5 are arranged is regarded as the left-right direction. Furthermore, the direction in which the loading ports 4 and 5 face the transfer chamber 6, which is orthogonal to the left-right direction, is regarded as the front-rear direction. In the front-rear direction, the side of the loading ports 4 and 5 is regarded as the front, and the side of the transfer chamber 6 is regarded as the rear.

(Including the schematic structure of the semiconductor device and peripherals of the loading port)

FIG. 1 is a schematic diagram of a semiconductor manufacturing apparatus 1 and its periphery installed in a semiconductor factory. As shown in FIG. 1(a), the semiconductor manufacturing apparatus 1 includes a substrate processing apparatus 2 for processing substrates such as wafers, and an EFEM3 (substrate transport system of the present invention) for receiving and transferring substrates to and from the substrate processing apparatus 2. The semiconductor manufacturing apparatus 1 performs one of the following series of actions. First, the EFEM3 receives a FOUP 300 (container of the present invention) for accommodating substrates from an OHT 400 (transportation means of the present invention) described later. Next, the EFEM3 takes out the substrate from the FOUP 300 and hands the substrate over to the substrate processing apparatus 2. The substrate processing apparatus 2 processes the substrate received from the EFEM 3 and returns the substrate to the EFEM 3. The EFEM 3 returns the substrate to the FOUP 300. Afterwards, FOUP300 is transported by OHT400, etc.

The substrate processing device 2 has a substrate processing mechanism (not shown) and a control device 10. The control device 10 controls the substrate processing mechanism to process substrates or send and receive substrates between EFEM 3, and communicates with the host computer 200 as a host computer.

EFEM3 has one loading port 4 (the loading port and the first loading port of the present invention), two loading ports 5 (the second loading port of the present invention), a transfer chamber 6, a transfer robot 7 (the transfer means of the present invention), and a control device 11. In addition, the biggest difference between loading port 4 and loading port 5 is whether there is a rotating mechanism 24 described later. That is, loading port 4 has a rotating mechanism 24, while loading port 5 does not have a rotating mechanism 24.

The loading ports 4 and 5 are arranged in the left-right direction with the rear end of each along the partition wall 8 on the front side of the transfer chamber 6 described later. FOUP300 is loaded on the loading ports 4 and 5. In addition, FOUP300 is transported in the factory by OHT400. As shown in Figures 1(a) and (b), OHT400 walks along the track 401 (track of the present invention) of the ceiling pre-installed in the factory, and accesses the unmanned transport vehicle of the loading ports 4 and 5 from above. OHT400 receives and delivers FOUP300 to loading port 4 or loading port 5 according to the instruction from the main machine 200.

The transfer chamber 6 is constituted by a transfer space 9 separated from the external space by a partition wall 8. In addition, the distance L between the rail 401 and the partition wall 8 in front of the transfer chamber 6 in the front and rear direction is set to 243 mm according to, for example, the SEMI standard.

The transport robot 7 is installed in the transport chamber 6 and performs the transfer of substrates between the FOUP 300 loaded on the loading ports 4 and 5 and the substrate processing device 2. In addition to controlling the transport robot 7, the control device 11 communicates with the control device 10 of the substrate processing device 2, the control device 29 of the loading port 4 described later, and the host computer 200.

(Composition of loading port)

Next, the structure of the loading port 4 is explained. In addition, the directions shown in Figure 2 are regarded as the front, back, left, right, up and down directions.

As shown in Figures 2, 3 and 5, the loading port 4 has a base 20, a door 21, a frame 22, a loading tray 23 (the loading part of the present invention), a rotating mechanism 24, a loading tray moving mechanism 25, a nitrogen flushing unit 27 and a control device 29 (the control means of the present invention), etc.

The base 20 is a flat plate portion that is roughly rectangular in plan view. The base 20 is vertically arranged to constitute a part of the partition wall 8 of the transfer chamber 6. Furthermore, an opening portion 30 that is roughly rectangular in plan view is formed on the upper side portion of the base 20. The opening portion 30 has a size that allows the cover 301 provided on the side of the FOUP 300 to pass through it.

The door portion 21 has a door 31 and a door arm 32. The door 31 is a flat plate-shaped component that is slightly rectangular and has a size that can plug the opening portion 30 from the back. The door 31 has an adsorption portion 33 that adsorbs the cover 301 of the FOUP 300, and a locking wedge 34 that opens and closes the cover 301. The door arm 32 is installed at the rear of the door 31 and is a component that supports the door 31 from below. Furthermore, the door arm 32 is connected to the door moving portion 35. The door moving portion 35 is set at the rear of the base 20 to move the door 31 and the door arm 32 in the front-back direction and the up-down direction.

The frame 22 is a portion protruding forward from the base 20. The frame 22 is roughly rectangular in a plan view and has an area larger than the FOUP 300. In addition, a sensor 26 (detection means of the present invention) is provided in front of the frame 22. The sensor 26 is, for example, an optical sensor having a light-emitting portion and a light-receiving portion. The light-emitting portion emits light in front of the frame 22, and when there is an obstacle in front of the frame 22, the light-receiving portion detects the light reflected by the obstacle and sends a detection signal to the control device 29.

The loading tray 23 is a component that is roughly rectangular in plan view and has an area that can stably load the FOUP 300. As described later, the loading tray 23 is supported from below by the frame 22 via the rotating mechanism 24 and the loading tray moving mechanism 25.

Three positioning pins 36, 37, and 38 are provided on the loading tray 23. The positioning pins 36, 37, and 38 are configured to engage with the three holes shown in the figure provided on the bottom surface of the FOUP 300 when the FOUP 300 is loaded in the regular direction described later. In addition, the direction of the loading tray 23 in Figures 2 and 3 is the direction when the cover 301 and the door 31 of the FOUP 300 are facing each other. That is, when the positions of the positioning pins 36 and 37 in the front and rear directions are approximately equal, and the positioning pin 38 is located in front of the positioning pins 36 and 37, the cover 301 and the door 31 of the FOUP 300 are facing each other. The above direction of the loading tray 23 is called the regular direction.

Furthermore, two nozzle holes 39 and 40 are formed on the loading tray 23, which extend from the top of the loading tray 23 to the entire bottom. These nozzle holes 39 and 40 are arranged so that when the loading tray 23 is in a regular direction, the injection nozzle 55 and the discharge nozzle 56 described later can be respectively passed through.

As shown in FIG3 , the rotating mechanism 24 has a motor 41 and a transmission shaft 42. The motor 41 uses, for example, a rotary pneumatic motor. The motor 41 is supported by a movable portion 47 of the loading tray moving mechanism 25 described later. The transmission shaft 42 is mounted on the upper portion of the motor 41 and the lower portion of the loading tray 23 in a vertical direction, supporting the loading tray 23 from below and transmitting the rotational force of the motor 41 to the loading tray 23. The transmission shaft 42 is rotated by the motor 41 of the rotating mechanism 24 having the above structure, and the loading tray 23 rotates around the vertical axis.

As shown in FIGS. 2 to 4 , the tray moving mechanism 25 includes a cylinder 45, a transmission part 46, a movable part 47, a slide rail 48, and a track block 49. The cylinder 45 is a three-position cylinder that can take three positions using, for example, a rod 50 constituting the cylinder 45. The cylinder 45 is disposed in the frame 22 in such a manner that the rod 50 moves in the front-rear direction. The transmission part 46 is mounted on the end of the rod 50 and the lower part of the movable part 47, and is configured to transmit the power of the cylinder 45 to the movable part 47. The movable part 47 is connected to the upper part of the transmission part 46 and is configured to move in the front-rear direction. Furthermore, the movable part 47 supports the motor 41 of the rotating mechanism 24 from below. The slide rail 48 is installed at the lower part of the movable part 47 along the front-rear direction. The track block 49 is fixed on the upper part of the frame 22 and supports the slide rail 48 from below in a manner that allows it to move forward and backward.

The cylinder 45 of the tray moving mechanism 25 having the above structure moves the rod 50 in the front-back direction, and the tray 23 can move between three positions in the front-back direction as shown in FIG4. When the loading port 4 is configured as shown in FIG1, as shown in FIG4(a), when the tray 23 is in the middle position in the front-back direction, the tray 23 is located directly below the track 401. That is, the tray 23 can receive the FOUP 300 through the OHT 400. The above position of the tray 23 is called the receiving position.

Furthermore, as shown in FIG. 4(b), when the loading tray 23 is located in front of the receiving position, the loading tray 23 is forced to rotate by the rotating mechanism 24 as described later. The front position is called the rotating position. Moreover, as shown in FIG. 4(c), when the loading tray 23 is located in the rear of the receiving position, the cover 301 of the FOUP 300 on the loading tray 23 is close to the door 21, and the cover 301 is opened and closed together with the door 21. The rear position is called the door opening and closing position.

Furthermore, the loading port 4 is equipped with a nitrogen flushing unit 27 for injecting and discharging nitrogen into the FOUP 300 as shown in FIG5. The nitrogen flushing unit 27 has a gas supply means 51 for supplying nitrogen and an exhaust means 52 for discharging the gas previously filled in the FOUP 300, and pipes 53 and 54, and an injection nozzle 55 and an exhaust nozzle 56 (the nozzle of the present invention) and motors 57 and 58.

The injection nozzle 55 is arranged to protrude upward from the upper surface of the movable part 47 of the loading tray moving mechanism 25, and is configured to be able to pass through the nozzle through hole 39 when the loading tray 23 is in the regular direction. The injection nozzle 55 is connected to the piping 53, and can be raised and lowered by the motor 57. The piping 53 is connected to the gas supply means 51. Similarly, the exhaust nozzle 56 is configured to pass through the nozzle through hole 40 when the loading tray 23 is in the regular direction, and is connected to the piping 54, and can be raised and lowered by the motor 58. The piping 54 is connected to the exhaust means 52.

As shown in FIG5(a), when the injection nozzle 55 and the discharge nozzle 56 are at their lowest position, they are located at a position (separated position) where the upper ends of the injection nozzle 55 and the discharge nozzle 56 are spaced below the loading tray 23. Furthermore, as shown in FIG5(b), when the injection nozzle 55 and the discharge nozzle 56 are at their highest position, the upper ends of the injection nozzle 55 and the discharge nozzle 56 are located at positions (connected positions) where they are connected to the nozzle insertion ports 302 and 303 on the bottom surface of the FOUP 300, respectively.

The control device 29 has a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), etc. In addition to controlling the various mechanisms of the loading port 4 through the CPU according to the program stored in the ROM, the control device 29 communicates with the control device 11 of the EFEM3 or the host 200, etc.

Next, the loading port 5 is explained. Although the structure of the loading port 5 is roughly the same as that of the loading port 4, as mentioned above, it is different from the loading port 4 in that it does not have a rotating mechanism 24. That is, in the loading port 5, the FOUP 300 is placed on the loading tray 23 with the cover 301 and the door 31 facing each other. In addition, the loading tray 23 of the loading port 5 is directly supported by the loading tray moving mechanism 25. Furthermore, the loading tray 23 of the loading port 5 does not move in the rotating position, but is forced to move between the receiving position and the door switch position. In the loading port 4 and the loading port 5, the position of the loading tray 23 in the receiving position and the front-back direction of the door switch position is the same.

(Loading port operation steps)

Next, as shown in Figure 6, the action steps set in the loading port 4 of EFEM3 are explained using Figures 6 to 9.

FIG7 is a flow chart of the operation of the loading port 4. First, when there is no FOUP 300 on the loading tray 23, the control device 29 of the loading port 4 communicates with the host 200 to obtain information about the FOUP 300 transported by the OHT 400 (S101). In addition, the information about the FOUP 300 includes information about the direction of the FOUP 300 when it is loaded on the loading tray 23. When the cover 301 of the FOUP 300 is loaded in a direction facing the door 31 of the loading port 4, information about the regular direction is sent out from the host 200. When the cover 301 is loaded in a direction opposite to the regular direction, information about the reverse direction is sent out from the host 200.

Next, the control device 29 determines whether the direction in which the FOUP 300 is placed on the loading tray 23 is the normal direction or the reverse direction based on the information received from the host 200 (S102). First, the situation in which the FOUP 300 is placed on the loading tray 23 in the reverse direction is explained.

When the loading tray 23 is arranged in the normal direction, the control device 29 drives the motor 41 of the rotating mechanism 24 to rotate the loading tray 23 to load the FOUP 300 in the opposite direction. When the loading tray 23 is initially arranged in the opposite direction, the control device 29 does not rotate the loading tray 23. Furthermore, when the loading tray 23 is located at a position other than the receiving and giving position, the control device 29 operates the cylinder 45 of the loading tray moving mechanism 25 to move the loading tray 23 to the receiving and giving position. When the loading tray 23 is initially located at the receiving and giving position, the control device 29 does not rotate the loading tray 23. That is, the control device 29 is on standby (S103) when the loading tray 23 is located at the position and direction shown in FIG. 8(a).

At this time, as shown in FIG6 , the loading tray 23 of loading port 4 is arranged along the track 401 in a top view, and FOUP 300 can be loaded by OHT 400. In addition, similarly, the receiving and receiving position of the loading tray in loading port 5 is also arranged along the track 401 in a top view.

Next, as shown in FIG8(b) and FIG9(a), FOUP300 is placed on the loading tray 23 by OHT400 (S104). Afterwards, as shown in FIG8(c), the control device 29 actuates the cylinder 45 of the loading tray moving mechanism 25 to move the loading tray 23 to a rotation position ahead of the receiving position, so that the loading tray 23 is away from the door 31 (S105). As shown in FIG8(c) and FIG9(b), when the loading tray 23 is in the rotation position, the loading tray 23 protrudes ahead of the frame 22.

In addition, although not shown, if there is an obstacle in front of the frame 22, the sensor 26 detects the obstacle in advance and sends a detection signal to the control device 29. The control device 29 that receives the detection signal restricts the loading tray 23 from moving toward the rotation position by, for example, not sending a control signal to the cylinder 45. Therefore, when people pass by, the loading tray 23 and FOUP300 can be prevented from flying to the front of the frame 22, so safety can be ensured.

Next, as shown in Fig. 8(d), (e) and Fig. 9(c), the control device 29 drives the motor 41 of the rotating mechanism 24 to rotate the loading tray 180° (S106). Here, when the loading tray 23 is located at the receiving position, although the FOUP 300 collides with the door 31 or the base 20 of the loading port 4, the FOUP 300 rotates when the loading tray 23 is located at the rotating position ahead of the receiving position, so the FOUP 300 rotates without colliding with the door 31 or the base 20. That is, in the loading port 4, even if the receiving and receiving position of the loading tray 23 is arranged along the track 401 of the OHT 400 which is the same as the receiving and receiving position of the loading tray 23 in the loading port 5, it is possible to avoid the situation where the FOUP 300 collides with the door 31 or the base 20 when rotating. In addition, in this embodiment, compared with the case where the door 21a is retreated as shown in the modified example described later, the space on the side of the loading port 4 is difficult to enter the transfer space 9 through the opening 30, so there is less concern about the contamination of the transfer space 9.

In addition, since the rotating mechanism 24 is supported by the movable part 47 of the loading tray moving mechanism 25, and the loading tray 23 is supported by the rotating mechanism 24, only the loading tray 23 and FOUP 300 are rotated by the rotating mechanism 24. That is, the above-mentioned injection nozzle 55 and discharge nozzle 56 arranged on the movable part 47 do not rotate. Therefore, the loading tray 23 can rotate without hindering the movement of the rotating mechanism 24 by the pipes 53 and 54.

Next, the control device 29 drives the motors 57 and 58 of the nitrogen flushing unit 27, so that the injection nozzle 55 and the exhaust nozzle 56 rise to the connection position and connect to the nozzle insertion ports 302 and 303 at the bottom of the FOUP 300. In addition, the control device 29 controls the gas supply means 51 and the exhaust means 52, and starts to inject nitrogen into the FOUP 300 and exhaust gas through the injection nozzle 55 and the exhaust nozzle 56 (S107). In addition, as shown in Figures 9(a) and (b), when the loading tray 23 is arranged in an opposite direction, the injection nozzle 55 and the discharge nozzle 56 are not connected to the FOUP 300 because the front and rear positions of the injection nozzle 55 and the discharge nozzle 56 are inconsistent with the front and rear positions of the nozzle through holes 39 and 40. As shown in Figure 9(c), by placing the loading tray 23 in the regular direction, the injection nozzle 55 and the discharge nozzle 56 are first connected to the FOUP 300.

Next, as shown in FIG8(f), the control device 29 activates the cylinder 45 to move the loading tray 23 to the rear door switch position (S108). Furthermore, the control position 29 stops the operation of the gas supply means 51 and the exhaust means 52, and drives the motors 57 and 58 to lower the injection nozzle 55 and the exhaust nozzle 56 to the interval position (S109). In addition, since the injection and exhaust of the gas start earlier than the loading tray 23 moves to the door switch position, the nitrogen injection can be completed earlier than the nitrogen injection after the loading tray 23 moves, and the time to the door switch operation described later can be shortened.

Next, the loading port 4 performs a door opening and closing operation (S110). That is, the control device 29 unlocks the cover 301 of the FOUP 300 by means of the locking wedge 34 of the door 31, and the cover 301 is adsorbed to the adsorption portion 33 of the door 31 to be held. Furthermore, the control device 29 operates the door moving portion 35, moves the door 31 and the cover 301 to the rear, and lowers the door 31 and the cover 301. After that, the control device 11 of the EFEM 3 operates the transport robot 7, and takes out the substrate from the FOUP 300 and delivers it to the substrate processing device 2, and takes the processed substrate from the substrate processing device 2 and returns it to the FOUP 300. After all required substrates are processed, the control device 29 activates the door moving part 35 and causes the door 31 and the cover 301 to rise and move forward, so that the cover 301 returns to the FOUP 300, and the cover 301 is locked by the locking wedge 34, and the cover 301 is released from the adsorption of the adsorption part 33.

After that, the control device 29 transmits information to the host 200 indicating that the substrate processing is completed. Furthermore, the control device 29 controls the movement and rotation of the FOUP 300 according to the command from the host 200. That is, when the FOUP 300 is transported by the OHT 400 in the same normal direction, the control device 29 controls the loading tray moving mechanism 25 to move the loading tray 23 to the receiving position in the same direction. Furthermore, when the FOUP 300 is transported by the OHT 400 in the opposite direction, the control device 29 temporarily moves the loading tray 23 to the rotation position through the loading tray moving mechanism 25. Furthermore, the control device 29 controls the loading tray 23 to reverse by the rotating mechanism 24, and then controls the loading tray moving mechanism 25 to move the loading tray 23 to the receiving and receiving position. Finally, the FOUP 300 is transported by the OHT 400 receiving instructions from the host 200 (S111).

Returning to step S102, the case where FOUP300 is loaded in the regular direction is explained. When the loading tray 23 is arranged in the opposite direction, the control device 29 rotates the loading tray 23 in the regular direction (refer to Figure 2) by the rotating mechanism 24. Furthermore, when the loading tray 23 is arranged outside the receiving and giving position, the control device 29 moves the loading tray 23 to the receiving and giving position by the loading tray moving mechanism 25. That is, the control device 29 waits when the loading tray 23 is located in the regular direction and the receiving and giving position (S121). FOUP300 is loaded on the loading tray 23 in the regular direction by OHT400 (S122). In this case, the control device 29 does not move the loading tray 23 to the rotation position or rotate the loading tray 23, and starts the gas injection and gas exhaust of step S107. After that, the control device 29 performs the same action as when the FOUP 300 is loaded in the opposite direction.

As described above, even when the loading tray 23 of the loading port 4 is placed at the receiving position along the track 401 in a top view, the FOUP 300 can be prevented from colliding with the door 31 or the base 20 when the FOUP 300 is rotated. Therefore, in the EFEM 3, the receiving position of the loading tray 23 of the loading port 4 and the receiving position of the loading tray 23 of the loading port 5 without the rotating mechanism 24 are arranged along the same track 401. Therefore, the same OHT 400 can be used for receiving and delivering the FOUP 300 for each loading port 4 and 5.

Furthermore, when the loading tray 23 of the loading port 4 is in the rotation position, the loading tray 23 protrudes to the front of the frame 22. That is, the frame 22 does not need to protrude to the rotation position in the front-back direction, and the size of the frame 22 in the front-back direction becomes miniaturized. Therefore, the setting area of the loading port 4 can be reduced to the same extent as the loading port 5.

Next, the modified examples of the above-mentioned implementation are described. However, for the same structure as the above-mentioned implementation, the same symbols are assigned and the description thereof is omitted as appropriate.

(1) As shown in Figures 10 to 12, even if the loading port 4a is equipped with a door forward and backward movement mechanism 60 that moves the door 21a away from the loading tray 23, it is also possible. The following is a specific explanation.

As shown in Figures 10 and 11, the door portion 21a further has an upper rotating plate 61 and a lower rotating plate 62. The opening portion 30a of the base 20a is wider than the door 31a of the door portion 21a in the vertical direction, and the upper part of the opening portion 30a is blocked by the upper rotating plate 61, and the lower part is blocked by the lower rotating plate 62. The upper rotating plate 61 and the lower rotating plate 62 are supported to rotate with the left and right axes. The upper rotating plate 61 is supported on the base 20a at the upper part, and the lower rotating plate 62 is supported on the base 20a at the lower part.

The door forward and backward movement mechanism 60 has a door moving part 35a that moves the door arm 32a of the door part 21a in the forward and backward direction and the vertical direction, and a motor 63 connected to the upper rotating plate 61 and a motor 64 connected to the lower rotating plate 62. The motors 63 and 64 respectively rotate the upper rotating plate 61 and the lower rotating plate 62 between the closed position (Figure 10(a)) of blocking the opening part 30a and the open position (Figure 10(b)) of opening the opening part 30a. As shown in Figure 10(b), the upper rotating plate 61 and the lower rotating plate 62 move to the open position by rotating backward.

FIG12 is a top view of the loading port 4a when the FOUP 300 is placed in the opposite direction. First, the control device 29 makes the loading tray 23 turn in the opposite direction and wait at the receiving position (FIG12(a)), and the FOUP 300 is placed in the opposite direction on the loading tray 23 (FIG12(b)), which is the same as the above-mentioned implementation mode.

Next, the control device 29 controls the door forward and backward movement mechanism 60 to move the door 31a backward, and rotates the upper rotating plate 61 and the lower rotating plate 62 backward, as shown in FIG12(c). That is, in this modification, by rotating the upper rotating plate 61 and the lower rotating plate 62 backward, the door 21a is relatively far away from the loading tray 23. Next, the control device 29 controls the rotating mechanism 24 to rotate the loading tray 23, as shown in FIG12(d) and (e). In this modification, the loading tray 23 does not move from the receiving and delivering position, and as shown in FIG12(d), when the FOUP 300 rotates, the FOUP 300 may collide with the door 31a or the base 20a. In addition, even if the control device 29 controls the loading tray moving mechanism 25a to move the loading tray 23 to the rotation position, and controls the door forward and backward moving mechanism 60 to move the door 31a backward, etc., it is also possible.

After the rotation of the loading tray 23 is completed, the control device 29 controls the door forward and backward movement mechanism 60 as shown in Figure 12 (f), so that the door 31a moves forward and the upper rotating plate 61 and the lower rotating plate 62 move to the closed position. Furthermore, the control device 29 controls the loading tray moving mechanism 25a to move the loading tray 23 to the door switch position. The subsequent action of the loading port 4a is the same as the above-mentioned implementation type.

(2) The angle at which the rotating mechanism 24 rotates the loading tray 23 is not limited to 180°, and a mechanism for rotating 90° is also possible. In the EFEM 3b shown in FIG. 13 , the two loading ports 5 are arranged along the front wall of the transfer chamber 6b, whereas the loading port 4 is arranged along the left wall of the transfer chamber 6b. In this case, the loading port 4 can wait in a state where the loading tray 23 is rotated 90° from the normal direction, and the FOUP 300 can be received and delivered to the OHT 400. Furthermore, after the FOUP 300 is placed on the loading tray 23 by the OHT 400, the control device 29 moves the loading tray 23 to the rotation position by the loading tray moving mechanism 25, and rotates the loading tray 23 90° by the rotating mechanism 24.

(3) Other structures of the loading port 4 can also be changed. For example, the loading port 4 is equipped with a nitrogen flushing unit 27, and it is also possible to have no gas injection and exhaust steps. Furthermore, even if the size of the frame 22 in the front and rear direction is increased to a degree that the loading tray 23 does not protrude from the frame 22 to the front even when it is in the rotation position. In addition, the loading part for loading FOUP300 is not limited to the loading tray 23. For example, it is also possible to have a triangular shape in a top view as described in the above-mentioned patent document 2 (Japanese Patent Document No. 4168724), and it is also possible to have a FOUP300.

The structure of the rotating mechanism 24 is limited to the present embodiment, and any structure is sufficient as long as the loading tray 23 is rotated around the vertical axis. Furthermore, the structure of the loading tray moving mechanism 25 is not limited to the present embodiment, and any structure is sufficient as long as the loading tray 23 is moved in the front-rear direction between three positions. The sensor 26 may be, for example, an ultrasonic detector.

(4) Before the tray moving mechanism 25 moves the tray 23 to the rotation position, the rotating mechanism 24 may rotate the tray 23. That is, even when the FOUP 300 does not conflict with the door 31 or the base 20, the tray moving mechanism 25 may move the tray 23 to the front while the rotating mechanism 24 is rotating the tray 23.

(5) The control device 29 of the loading port 4 does not have to be assembled in the loading port 4. The control device 10 of the substrate processing device 2 or the control device 11 of the EFEM 3 can also be used for the control of the loading port 4.

(6) Other configurations may also be appropriately changed. For example, in EFEM3, the number of loading ports 4 and 5 is not limited to 3. Furthermore, all loading ports 5 may be replaced with loading ports 4. The gas injected into FOUP300 may be an inert gas other than nitrogen. The container for accommodating substrates is not limited to FOUP300. For example, a FOSB (Front Opening Shipping Box) for transporting substrates between factories may be used. The transport system having loading ports 4, 5 and a transport chamber 6 is not limited to EFEM3. For example, a sorter for taking substrates out and putting them in between multiple containers may be used. The transport means for transporting substrates is not limited to the transport robot 7. The transport means for transporting containers is not limited to OHT400. It is sufficient if the containers are transported along a pre-set track. The distance L between the rail and the partition wall 8 in front of the transfer chamber 6 in the front-to-back direction is not limited to 243 mm.

4: Loading port

20: Base

22: Framework

23: Loading tray

24: Rotating mechanism

25: Loading tray moving mechanism

31: Door

47: Movable part

300:FOUP

301: Cover

Claims (6)

A loading port, which has a loading tray on which a container for accommodating a substrate is loaded, receives and delivers the container between the loading tray and the output means when the loading tray is located at a receiving position capable of receiving and delivering the container between the loading tray and the transport means that travels along a pre-set track and transports the container, and the loading port is characterized in that it has: a base that is vertically arranged and has an opening; a door that is arranged on the base and opens and closes the opening; and a frame that extends from the base in a front-rear direction orthogonal to the base. The base is protruding forward to support the loading tray; the rotating mechanism rotates the loading tray around the vertical axis; and the door forward and backward movement mechanism moves the door backward. After the container is loaded on the loading tray by the conveying means, before the rotating mechanism rotates the loading tray or during the rotation, the door moves backward. Moreover, before opening the lid of the container, the loading tray is rotated to move the door backward. The loading port of claim 1 further comprises a loading tray moving mechanism, which is capable of moving the loading tray forward and backward, the rotating mechanism moves the loading tray to a rotating position by the loading tray moving mechanism, and the door forward and backward moving mechanism moves the door backward and rotates the loading tray. The loading port of claim 1 or 2, wherein the door portion has an upper rotating plate that blocks the upper part of the opening portion; a lower rotating plate that blocks the lower part of the opening portion; and a door that is located between the upper rotating plate and the lower rotating plate to block the opening portion from the rear, and the door can be moved backwards, and the door portion forward and backward movement mechanism moves the door backwards and rotates the upper rotating plate and the lower rotating plate backwards after the container is placed on the loading tray by the conveying means and before or during the rotation of the loading tray by the rotating mechanism. As in the loading port of claim 2, the loading tray moving mechanism has a movable part that supports the rotating mechanism from below and can move in the front-rear direction, the loading tray is supported from below by the rotating mechanism, and a nozzle for injecting or discharging gas that can be raised and lowered is supported on the movable part between a nozzle connection position connected to a nozzle insertion port formed below the container loaded on the loading tray and a nozzle spacing position spaced downward from the nozzle insertion port. As in the loading port of claim 4, before the loading tray moving mechanism moves the loading tray toward the door switch position where the lid and the door part disposed on the side of the container are opened and closed together, or during the movement, the nozzle moves to the connection position and starts to inject or discharge gas into or from the container through the nozzle. A substrate transport system, characterized by having: a first loading port, which is a loading port as described in any one of claim 1 to 5; a second loading port, which has the above-mentioned loading tray and does not have the above-mentioned rotating mechanism; and a transport chamber, which has a transport means for taking out the above-mentioned substrate and putting it into the above-mentioned container, the above-mentioned receiving and giving position of the above-mentioned loading tray of the above-mentioned first loading port and the above-mentioned receiving and giving position of the above-mentioned loading tray of the above-mentioned second loading port are arranged along the above-mentioned track of the above-mentioned conveying means.

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