TWI844755B - Glass film manufacturing method, glass roll manufacturing method, and glass film manufacturing device - Google Patents

Glass film manufacturing method, glass roll manufacturing method, and glass film manufacturing device Download PDF

Info

Publication number
TWI844755B
TWI844755B TW109145196A TW109145196A TWI844755B TW I844755 B TWI844755 B TW I844755B TW 109145196 A TW109145196 A TW 109145196A TW 109145196 A TW109145196 A TW 109145196A TW I844755 B TWI844755 B TW I844755B
Authority
TW
Taiwan
Prior art keywords
glass film
glass
width direction
belt
conveyor
Prior art date
Application number
TW109145196A
Other languages
Chinese (zh)
Other versions
TW202138320A (en
Inventor
村田憲一
Original Assignee
日商日本電氣硝子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2019232570A external-priority patent/JP7365002B2/en
Application filed by 日商日本電氣硝子股份有限公司 filed Critical 日商日本電氣硝子股份有限公司
Publication of TW202138320A publication Critical patent/TW202138320A/en
Application granted granted Critical
Publication of TWI844755B publication Critical patent/TWI844755B/en

Links

Abstract

本發明在將帶狀的一次玻璃膜G1一面利用搬運裝置8於規定的方向搬運一面進行切斷,藉此獲得一片或多片二次玻璃膜G2a、G2b時,一次玻璃膜G1的切斷,藉由使用雷射切斷裝置9在規定的切斷區21對一次玻璃膜G1照射雷射而進行。搬運裝置8包括上游側輸送機19及下游側輸送機20,下游側輸送機20包括多個下游側帶式輸送機27,所述下游側帶式輸送機27可藉由帶28將二次玻璃膜G2a、二次玻璃膜G2b予以接觸支持。各下游側帶式輸送機27的帶28的位置構成為可於一次玻璃膜G1的寬度方向上予以調整。 In the present invention, when a strip-shaped primary glass film G1 is transported in a specified direction by a transport device 8 and cut at the same time, thereby obtaining one or more secondary glass films G2a and G2b, the cutting of the primary glass film G1 is performed by irradiating the primary glass film G1 with a laser in a specified cutting area 21 using a laser cutting device 9. The transport device 8 includes an upstream conveyor 19 and a downstream conveyor 20, and the downstream conveyor 20 includes a plurality of downstream belt conveyors 27, and the downstream belt conveyors 27 can contact and support the secondary glass films G2a and G2b by means of belts 28. The position of the belt 28 of each downstream belt conveyor 27 is configured to be adjustable in the width direction of the primary glass film G1.

Description

玻璃膜的製造方法、玻璃卷的製造方法、及玻 璃膜的製造裝置 Glass film manufacturing method, glass roll manufacturing method, and glass film manufacturing device

本發明是有關於一種玻璃膜的製造方法及玻璃膜的製造裝置,特別是有關於一種用於將帶狀的玻璃膜利用雷射進行切斷並切成規定的寬度方向尺寸的技術。 The present invention relates to a method and device for manufacturing a glass film, and in particular to a technology for cutting a ribbon-shaped glass film into a predetermined width dimension by laser.

如眾所周知,實際情況是,液晶顯示器、有機電致發光(electroluminescent,EL)顯示器等平板顯示器(Flat Panel Display,FPD)中使用的板玻璃、有機EL照明中使用的板玻璃、觸控面板的構成元件即強化玻璃等的製造中使用的板玻璃、以及太陽能電池的面板等中使用的板玻璃的薄壁化正在推進。 As is well known, the actual situation is that the plate glass used in flat panel displays (FPD) such as liquid crystal displays and organic electroluminescent (EL) displays, the plate glass used in organic EL lighting, the plate glass used in the manufacture of tempered glass, which is a component of touch panels, and the plate glass used in solar cell panels are being thinned.

例如在專利文獻1中,已揭示一種厚度方向尺寸為數百μm以下的板玻璃(玻璃膜)。此種板玻璃如亦在所述專利文獻中所述,通常是藉由利用所謂溢流下拉法(overflow down draw method)的成形裝置而連續性地成形。 For example, Patent Document 1 discloses a plate glass (glass film) having a thickness dimension of several hundred μm or less. As also described in the patent document, this plate glass is usually continuously formed by a forming device using the so-called overflow down draw method.

此種情況下,藉由溢流下拉法而連續性地成形的長條的玻璃膜,在將其搬運方向自鉛垂方向轉換成水平方向之後,藉由搬運裝置的橫向搬運部(水平搬運部)而繼續向下游側搬運。在 所述搬運途中,將玻璃膜的寬度方向兩端部(厚壁部)切斷去除。然後,玻璃膜藉由捲繞輥捲繞成卷狀而成為玻璃卷。 In this case, the long glass film continuously formed by the overflow down-draw method is transported downstream by the lateral transport section (horizontal transport section) of the transport device after its transport direction is changed from the vertical direction. During the transport, the two ends (thick wall parts) of the glass film in the width direction are cut off and removed. Then, the glass film is rolled into a roll by a winding roller to form a glass roll.

作為對玻璃膜進行切斷的技術,於專利文獻1中,揭示有利用雷射的切斷方法。所述切斷方法是被稱為所謂雷射切割的方法,在對玻璃膜一面於其長度方向進行搬運,一面藉由金剛石切削器(diamond cutter)等的裂紋形成機構於玻璃膜上形成初始裂紋之後,對所述部分照射雷射而進行加熱,然後,利用冷卻機構使經加熱的部分冷卻。藉此,在玻璃膜中產生熱應力,初始裂紋藉由所述熱應力而進展,藉此所述玻璃膜被切斷。 As a technology for cutting a glass film, a cutting method using laser is disclosed in Patent Document 1. The cutting method is a so-called laser cutting method, in which the glass film is transported in its length direction, and an initial crack is formed on the glass film by a crack forming mechanism such as a diamond cutter, and then the portion is irradiated with laser to heat it, and then the heated portion is cooled by a cooling mechanism. Thus, thermal stress is generated in the glass film, and the initial crack develops due to the thermal stress, thereby cutting the glass film.

又,此種藉由雷射而執行的切斷方法,不僅在切斷位於帶狀的玻璃膜的寬度方向兩端的厚壁部的情況下使用,而且有時亦會對經去除所述厚壁部後的玻璃膜進行。此種情況下,例如如專利文獻2中所記載般,將藉由第一次雷射切斷而經去除厚壁部的玻璃膜捲繞成卷狀,並將捲繞成卷狀的狀態的玻璃膜(玻璃卷)搬運至後續步驟之後,將玻璃膜自所述玻璃卷抽出並再次實施雷射切斷,藉此將玻璃膜重新切斷成規定的寬度方向尺寸。於第二次雷射切斷中,由於在成形時所產生的厚壁部(耳部)已經被去除,因此與第一次雷射切斷相比能夠精度良好地將玻璃膜切斷成規定的寬度方向尺寸。 In addition, this cutting method performed by laser is not only used when cutting the thick wall portions at both ends of the width direction of the strip-shaped glass film, but is also sometimes performed on the glass film after the thick wall portions have been removed. In this case, for example, as described in Patent Document 2, the glass film after the thick wall portions have been removed by the first laser cutting is wound into a roll, and the rolled glass film (glass roll) is transported to a subsequent step, and then the glass film is unwound from the glass roll and laser cutting is performed again, thereby re-cutting the glass film into a predetermined width direction dimension. In the second laser cutting, since the thick wall part (ear part) generated during the forming process has been removed, the glass film can be cut into the specified width direction dimension with better accuracy than the first laser cutting.

在如上述般對玻璃膜進行切斷的情況下,藉由雷射照射而執行的玻璃膜的切斷,一面藉由帶式輸送機等搬運裝置將帶狀的玻璃膜於沿著其長邊方向的方向搬運,一面藉由設置於規定的 位置的雷射照射裝置將雷射照向鉛垂下方而進行。此處,在將帶式輸送機用作搬運裝置的情況下,提議藉由一條帶對玻璃膜的下表面遍及其整個寬度方向予以接觸支持的形態(參照專利文獻1),或出於避開雷射的照射位置的目的,而藉由在玻璃膜的寬度方向上空開規定的間隔而配設的多條帶來對玻璃膜的下表面予以接觸支持的形態(參照專利文獻2)等。 When the glass film is cut as described above, the cutting of the glass film is performed by laser irradiation, while the belt-shaped glass film is transported in the direction along its long side by a conveying device such as a belt conveyor, and the laser irradiation device set at a specified position irradiates the laser toward the vertical downward. Here, when the belt conveyor is used as a conveying device, a form is proposed in which a belt is used to contact and support the lower surface of the glass film throughout its entire width direction (refer to patent document 1), or a form in which a plurality of belts are arranged at specified intervals in the width direction of the glass film to contact and support the lower surface of the glass film for the purpose of avoiding the irradiation position of the laser (refer to patent document 2), etc.

[現有技術文獻] [Prior art literature] [專利文獻] [Patent Literature]

專利文獻1:日本專利特開2012-240883號公報 Patent document 1: Japanese Patent Publication No. 2012-240883

專利文獻2:國際公開2019/049646號公報 Patent document 2: International Publication No. 2019/049646

然而,作為對經去除厚壁部後的玻璃膜實施再次切斷的形態,不僅考慮如上述般自一片玻璃膜以規定的寬度方向尺寸切成(重新切斷為)一片玻璃膜的形態,而且亦考慮自一片玻璃膜分別以規定的寬度方向尺寸切成兩片以上的玻璃膜的形態。此種情況下,例如藉由根據玻璃膜的切斷位置來調整雷射切斷裝置(雷射照射裝置)的寬度方向位置,而可藉由一條製造線來應對玻璃膜的切成片數的變更。然而,關於帶式輸送機,由於為大型,因此無法如雷射照射裝置般容易地變更寬度方向的位置。因此,在如上述般將多個帶式輸送機於玻璃膜的寬度方向上排列而配設的情 況下,因切成片數或切成後的玻璃膜的寬度方向尺寸,而切斷後的玻璃膜在偏向寬度方向一側的位置與帶接觸,而產生招致切斷後的玻璃膜斜行的事態的擔憂。如此一來,會對玻璃膜的切斷位置帶來影響,因此難以獲得穩定的切斷品質的玻璃膜。 However, as a form of re-cutting the glass film after the thick wall portion is removed, not only a form of cutting (re-cutting) a glass film with a predetermined width dimension from a single glass film as described above, but also a form of cutting a glass film into two or more glass films with predetermined width dimensions from a single glass film. In this case, for example, by adjusting the width direction position of the laser cutting device (laser irradiation device) according to the cutting position of the glass film, the number of slices of the glass film can be changed by one manufacturing line. However, since the belt conveyor is large, the width direction position cannot be easily changed as with the laser irradiation device. Therefore, when multiple belt conveyors are arranged in the width direction of the glass film as described above, the cut glass film may come into contact with the belt at a position biased to one side in the width direction due to the number of slices or the width direction dimension of the cut glass film, causing the cut glass film to move obliquely. This affects the cutting position of the glass film, making it difficult to obtain a glass film with stable cutting quality.

鑒於以上情形,本發明應解決的技術課題在於:避免伴隨切斷條件的變更而出現的玻璃膜的搬運不良,而穩定地獲得良好的品質的玻璃膜。 In view of the above situation, the technical problem to be solved by the present invention is to avoid the poor transportation of the glass film caused by the change of cutting conditions and to stably obtain a glass film of good quality.

所述課題的解決藉由本發明的玻璃膜的製造方法而達成。即,所述製造方法為玻璃膜的製造方法,將帶狀的一次玻璃膜一面利用搬運裝置於規定的方向搬運一面進行切斷,藉此獲得一片或多片二次玻璃膜,所述玻璃膜的製造方法的特徵在於:一次玻璃膜的切斷,藉由使用雷射切斷裝置在規定的切斷區對一次玻璃膜照射雷射而進行,且搬運裝置包括:上游側輸送機,相對而言位於一次玻璃膜的搬運方向上游側;以及下游側輸送機,相對而言位於一次玻璃膜的搬運方向下游側,可搬運二次玻璃膜,下游側輸送機包括可藉由帶將二次玻璃膜予以接觸支持的多個下游側帶式輸送機,且各下游側帶式輸送機的帶的位置構成為可於一次玻璃膜的寬度方向上予以調整。再者,此處所言的一次玻璃膜不僅包含成形為膜狀之後且接受第一次切斷加工之前的玻璃膜,而且包含已接受第一次切斷加工之後且接受第二次切斷加工之前的玻璃膜。又,此處所言的二次玻璃膜,不僅包含此後接受進一步的 加工的玻璃膜,而且包含本發明的切斷加工為最終加工的玻璃膜(即,實質上為最終製品的玻璃膜)。又,此處所言的一次玻璃膜的寬度方向,是指與所述膜的長度方向及厚度方向均正交的方向。 The above-mentioned problem is solved by the method for manufacturing the glass film of the present invention. That is, the manufacturing method is a method for manufacturing a glass film, in which a strip-shaped primary glass film is transported in a specified direction by a transport device and cut at the same time, thereby obtaining one or more secondary glass films. The manufacturing method of the glass film is characterized in that the cutting of the primary glass film is performed by irradiating the primary glass film with a laser in a specified cutting area using a laser cutting device, and the transport device includes: an upstream conveyor, which is relatively located on the upstream side of the transport direction of the primary glass film; and a downstream conveyor, which is relatively located on the downstream side of the transport direction of the primary glass film and can transport the secondary glass film, and the downstream conveyor includes a plurality of downstream belt conveyors that can contact and support the secondary glass film with the belt, and the position of the belt of each downstream belt conveyor is configured to be adjustable in the width direction of the primary glass film. Furthermore, the primary glass film mentioned here includes not only the glass film after being formed into a film shape and before undergoing the first cutting process, but also the glass film after undergoing the first cutting process and before undergoing the second cutting process. Furthermore, the secondary glass film mentioned here includes not only the glass film that undergoes further processing thereafter, but also the glass film that is the final processing of the cutting process of the present invention (i.e., the glass film that is essentially the final product). Furthermore, the width direction of the primary glass film mentioned here refers to the direction orthogonal to both the length direction and the thickness direction of the film.

如此般,於本發明的玻璃膜的製造方法中,將搬運裝置設為包括上游側輸送機及下游側輸送機,所述上游側輸送機相對而言位於一次玻璃膜的搬運方向上游側,所述下游側輸送機位於搬運方向下游側,可搬運二次玻璃膜,且將下游側輸送機設為包括可藉由帶將二次玻璃膜予以接觸支持的多個下游側帶式輸送機,並將各下游側帶式輸送機的帶的位置設為可於一次玻璃膜的寬度方向上予以調整。藉此,無需改變用於搬運一次玻璃膜的上游側輸送機的結構,而可自由地設定二次玻璃膜在寬度方向上與帶的接觸支持位置,因此可根據藉由雷射切斷應取得的二次玻璃膜的寬度方向位置或寬度方向尺寸,將各下游側帶式輸送機配設於適當的寬度方向位置。因此,藉由最低限度的必要的設備變更,而可避免二次玻璃膜於偏向寬度方向一側的位置與帶接觸的事態,從而可防止由所述接觸位置的偏向引起的二次玻璃膜的斜行等二次玻璃膜的搬運不良。又,若可不斜行地搬運二次玻璃膜,則可盡可能地避免在寬度方向上相鄰的其中一個二次玻璃膜的切斷面(側端面)干擾另一個二次玻璃膜的切斷面(側端面)的事態,因此能夠獲得良好的切斷品質的玻璃膜。 As such, in the glass film manufacturing method of the present invention, the transport device is configured to include an upstream conveyor and a downstream conveyor, wherein the upstream conveyor is relatively located on the upstream side of the transport direction of the primary glass film, and the downstream conveyor is located on the downstream side of the transport direction and can transport the secondary glass film, and the downstream conveyor is configured to include a plurality of downstream belt conveyors that can contact and support the secondary glass film through belts, and the position of the belt of each downstream belt conveyor is configured to be adjustable in the width direction of the primary glass film. Thus, the contact support position of the secondary glass film with the belt in the width direction can be freely set without changing the structure of the upstream conveyor for conveying the primary glass film, so that each downstream belt conveyor can be arranged at an appropriate width direction position according to the width direction position or width direction size of the secondary glass film to be obtained by laser cutting. Therefore, by minimally changing the necessary equipment, it is possible to avoid the secondary glass film contacting the belt at a position deviated to one side in the width direction, thereby preventing the secondary glass film from being skewed due to the deviated contact position and other secondary glass film conveying defects. Furthermore, if the secondary glass film can be transported without tilting, it is possible to avoid as much as possible the situation where the cut surface (side end surface) of one secondary glass film adjacent in the width direction interferes with the cut surface (side end surface) of another secondary glass film, thereby obtaining a glass film with good cut quality.

又,於本發明的玻璃膜的製造方法中,雷射切斷裝置可 具有多個雷射照射部,各雷射照射部的位置構成為可於一次玻璃膜的寬度方向上予以調整。 Furthermore, in the glass film manufacturing method of the present invention, the laser cutting device may have a plurality of laser irradiation parts, and the position of each laser irradiation part is configured to be adjustable in the width direction of the primary glass film.

藉由如此般構成,由於可在寬度方向上自由地設定雷射對一次玻璃膜的照射位置,因此即便在例如藉由調整在寬度方向上鄰接的一對雷射照射部的寬度方向距離,而將所要求的二次玻璃膜的寬度方向尺寸予以變更的情況下,仍可精度良好地管理所述變更後的寬度方向尺寸。 With such a configuration, the laser irradiation position of the primary glass film can be freely set in the width direction. Therefore, even if the required width dimension of the secondary glass film is changed by, for example, adjusting the width distance of a pair of adjacent laser irradiation parts in the width direction, the changed width dimension can still be managed with good accuracy.

另外,於本發明的玻璃膜的製造方法中,在藉由一次玻璃膜的切斷,而取得分別具有規定的寬度方向尺寸的多片二次玻璃膜的情況下,可根據各二次玻璃膜的寬度方向位置及寬度方向尺寸,來調整帶的位置。 In addition, in the glass film manufacturing method of the present invention, when a plurality of secondary glass films each having a predetermined width dimension are obtained by cutting the primary glass film, the position of the tape can be adjusted according to the width direction position and width direction dimension of each secondary glass film.

如此般,在切成分別具有規定的寬度方向尺寸的多片二次玻璃膜的情況下,較佳的是根據各二次玻璃膜的寬度方向位置及寬度方向尺寸,來調整下游側帶式輸送機的帶的寬度方向位置。如此般,藉由設定帶的寬度方向位置,而可將帶配置於與所切成的二次玻璃膜各自的位置、大小相適合的位置,因此能夠避免所切成的全部二次玻璃膜的斜行,而於正確的方向穩定地進行搬運。 In this way, when cutting multiple secondary glass films each having a predetermined widthwise dimension, it is preferable to adjust the widthwise position of the belt of the downstream belt conveyor according to the widthwise position and widthwise dimension of each secondary glass film. In this way, by setting the widthwise position of the belt, the belt can be arranged at a position suitable for the position and size of each cut secondary glass film, thereby avoiding the slanting of all cut secondary glass films and stably transporting them in the correct direction.

或者,在如上述般構成為可調整雷射照射部的位置的情況下,於本發明的玻璃膜的製造方法中,在藉由一次玻璃膜的切斷,而取得分別具有規定的寬度方向尺寸的多片二次玻璃膜的情況下,可根據各二次玻璃膜的寬度方向位置及寬度方向尺寸,對 帶的位置及雷射照射部的位置分別進行調整。 Alternatively, in the case where the position of the laser irradiation portion is configured to be adjustable as described above, in the glass film manufacturing method of the present invention, when a plurality of secondary glass films each having a predetermined width direction dimension are obtained by cutting the primary glass film, the position of the belt and the position of the laser irradiation portion can be adjusted according to the width direction position and width direction dimension of each secondary glass film.

又,在將雷射照射部的位置設為可調整的情況下,較佳的是根據各二次玻璃膜的寬度方向位置及寬度方向尺寸,分別調整下游側帶式輸送機的帶的位置及雷射照射部的位置。如此般,藉由設定帶以及雷射照射部的寬度方向位置,而可將帶配置於與所切成的二次玻璃膜各自的位置、大小相適合的位置,且可將雷射照射部配置於適宜於雷射切斷的位置。因此能夠將各個二次玻璃膜切斷成準確的寬度方向尺寸,且能夠將該些全部二次玻璃膜於準確的方向穩定地進行搬運。 Furthermore, when the position of the laser irradiation unit is set to be adjustable, it is preferable to adjust the position of the belt of the downstream belt conveyor and the position of the laser irradiation unit respectively according to the width direction position and width direction size of each secondary glass film. In this way, by setting the width direction position of the belt and the laser irradiation unit, the belt can be arranged at a position suitable for the position and size of each cut secondary glass film, and the laser irradiation unit can be arranged at a position suitable for laser cutting. Therefore, each secondary glass film can be cut into an accurate width direction size, and all the secondary glass films can be stably transported in an accurate direction.

又,在如上述般獲得多片二次玻璃膜的情況下,於本發明的玻璃膜的製造方法中,可根據各二次玻璃膜的寬度方向中央位置,來調整帶的位置。或者,亦可根據各二次玻璃膜的寬度方向兩端位置,來調整帶的位置。 Furthermore, when multiple secondary glass films are obtained as described above, in the glass film manufacturing method of the present invention, the position of the belt can be adjusted according to the center position of each secondary glass film in the width direction. Alternatively, the position of the belt can also be adjusted according to the positions of both ends of each secondary glass film in the width direction.

如上述般,根據本發明的玻璃膜的製造方法,可根據所切成的二次玻璃膜所要求的搬運形態,來適當設定帶的位置。例如,在以抑制二次玻璃膜的搬運時的抖動等變動為主要目的時,藉由根據二次玻璃膜的寬度方向兩端位置來調整帶的位置,而可將二次玻璃膜在其寬度方向兩側穩定地予以接觸支持。因此能夠抑制上文所述的變動而穩定地搬運二次玻璃膜。或者,如後文所述般,在以避免在寬度方向上鄰接的任意一對二次玻璃膜的切斷面彼此的接觸為主要目的時,藉由根據二次玻璃膜的寬度方向中央位置來調整帶,而可將二次玻璃膜於其寬度方向中央側予以接 觸支持。此種情況下,二次玻璃膜彎曲變形成使寬度方向兩端側與寬度方向中央側相比更下垂的形狀(朝上方凸出的形狀),藉此能夠避免剛切斷後的二次玻璃膜的切斷面彼此接觸地向下游側搬運各二次玻璃膜。 As described above, according to the glass film manufacturing method of the present invention, the position of the belt can be appropriately set according to the required transportation form of the cut secondary glass film. For example, when the main purpose is to suppress the vibration and other changes during the transportation of the secondary glass film, the position of the belt is adjusted according to the positions of the two ends in the width direction of the secondary glass film, and the secondary glass film can be stably supported in contact with both sides in the width direction. Therefore, the secondary glass film can be stably transported while suppressing the above-mentioned changes. Or, as described later, when the main purpose is to avoid contact between the cut surfaces of any pair of secondary glass films adjacent in the width direction, the belt is adjusted according to the center position in the width direction of the secondary glass film, and the secondary glass film can be supported in contact with the center side in the width direction. In this case, the secondary glass film is bent and deformed into a shape that makes the two end sides in the width direction droop more than the center side in the width direction (a shape that bulges upward), thereby preventing the cut surfaces of the secondary glass films just cut from contacting each other and transporting each secondary glass film to the downstream side.

又,於本發明的玻璃膜的製造方法中,多個下游側帶式輸送機的至少一部分,可構成為能夠將二次玻璃膜向帶吸附。 Furthermore, in the glass film manufacturing method of the present invention, at least a portion of the multiple downstream belt conveyors can be configured to be able to adsorb the secondary glass film to the belt.

藉由如此般構成為能夠將二次玻璃膜向帶吸附,而可將二次玻璃膜對帶的接觸支持形態始終保持為一定的狀態。因此,能夠更加穩定地搬運二次玻璃膜。然而,如後文所述般,在考慮避免剛切斷後的二次玻璃膜的切斷面彼此的接觸的情況下,例如將於後述,亦能夠採用下述結構,即:將支持相互接近的其中一個二次玻璃膜的寬度方向一側的帶、與支持另一個二次玻璃膜的寬度方向另一側的帶中的任一者設為吸附,將另一者設為不吸附。 By configuring the secondary glass film to be adsorbed to the belt in this way, the contact support form of the secondary glass film to the belt can be always maintained in a certain state. Therefore, the secondary glass film can be transported more stably. However, as described later, in consideration of avoiding contact between the cut surfaces of the secondary glass film just cut, for example, as described later, the following structure can also be adopted, that is, one of the belt supporting one side of the width direction of one of the adjacent secondary glass films and the belt supporting the other side of the width direction of the other secondary glass film is set to be adsorbed, and the other is set to be non-adsorbed.

又,於本發明的玻璃膜的製造方法中,可行的是,上游側輸送機包括可藉由帶將一次玻璃膜予以接觸支持的多個上游側帶式輸送機,且多個上游側帶式輸送機中位於一次玻璃膜的寬度方向中央的上游側帶式輸送機,構成為可將一次玻璃膜向帶吸附。 Furthermore, in the glass film manufacturing method of the present invention, it is feasible that the upstream conveyor includes a plurality of upstream belt conveyors that can support the primary glass film by contacting with the belt, and the upstream belt conveyor located at the center of the width direction of the primary glass film among the plurality of upstream belt conveyors is configured to adsorb the primary glass film to the belt.

雷射切斷前的玻璃膜(一次玻璃膜)尚容許成形後的尺寸的偏差等,且尺寸巨大,因此在產生翹起等變形的狀態下被搬運的情況並不少見。因此,若欲藉由多條帶吸附上述形態的一次玻璃膜並進行搬運,則存在下述問題,即:因長度方向尺寸的左右差(長度方向尺寸在寬度方向一端側與另一端側的差),而容易 產生褶皺。根據上述內容,自抑制產生褶皺的觀點而言,如上文所述般,較佳的是多個上游側帶式輸送機中的位於一次玻璃膜的寬度方向中央的上游側帶式輸送機,構成為能夠將一次玻璃膜向帶吸附。藉由在僅吸附寬度方向中央的狀態下對一次玻璃膜進行搬運,而可抑制褶皺產生地將一次玻璃膜供給至藉由雷射而進行的切斷區。 The glass film (primary glass film) before laser cutting still allows for deviations in the size after forming, and the size is huge, so it is not uncommon for it to be transported in a deformed state such as warping. Therefore, if the primary glass film in the above-mentioned form is to be transported by absorbing it with multiple belts, there is a problem that wrinkles are easily generated due to the left-right difference in the length direction (the difference in the length direction between one end and the other end in the width direction). Based on the above content, from the perspective of suppressing the generation of wrinkles, as described above, it is preferable that the upstream side belt conveyor located at the center of the width direction of the primary glass film among the multiple upstream side belt conveyors is configured to be able to absorb the primary glass film to the belt. By transporting the primary glass film while adsorbing only the center in the width direction, the primary glass film can be supplied to the cutting area by laser while suppressing the generation of wrinkles.

又,在藉由一次玻璃膜的切斷而獲得多片二次玻璃膜的情況下,於本發明的玻璃膜的製造方法中,可於較下游側輸送機更靠一次玻璃膜的搬運方向下游側設置間隙形成部,所述間隙形成部用於在寬度方向相鄰的任意一組二次玻璃膜之間形成寬度方向間隙。 Furthermore, when multiple secondary glass films are obtained by cutting the primary glass film, in the glass film manufacturing method of the present invention, a gap forming part can be provided on the downstream side of the downstream conveyor in the conveying direction of the primary glass film, and the gap forming part is used to form a gap in the width direction between any set of secondary glass films adjacent in the width direction.

藉由如此般於較下游側輸送機更靠一次玻璃膜的搬運方向下游側設置間隙形成部,而可在不使下游側輸送機的結構複雜化的情況下,於二次玻璃膜之間形成規定的寬度方向間隙。此處,二次玻璃膜呈自其基端(位於切斷區)向下游側連續的形態,因此即便在較下游側輸送機更靠下游側設置間隙形成部的情況下,仍能夠比較容易地在剛切斷後的二次玻璃膜之間形成規定的寬度方向間隙。 By providing the gap forming part on the downstream side of the primary glass film in the conveying direction of the downstream conveyor, a predetermined width direction gap can be formed between the secondary glass films without complicating the structure of the downstream conveyor. Here, the secondary glass film is continuous from its base end (located in the cutting area) to the downstream side, so even if the gap forming part is provided on the downstream side of the downstream conveyor, a predetermined width direction gap can be formed between the secondary glass films just after cutting relatively easily.

又,於如上述般設置間隙形成部的情況下,於本發明的玻璃膜的製造方法中,間隙形成部可具有與二次玻璃膜相同數目的寬度方向中央成為最大徑的桶狀的支持輥,以便各二次玻璃膜向朝上方凸出的方向彎曲變形。 Furthermore, when the gap forming part is provided as described above, in the glass film manufacturing method of the present invention, the gap forming part may have the same number of barrel-shaped support rollers as the secondary glass films, with the center of the width direction being the largest diameter, so that each secondary glass film is bent and deformed in a convex direction upward.

如此般,間隙形成部設為具有寬度方向中央成為最大徑的桶狀的支持輥的結構,藉此例如在較支持輥更靠下游側伴隨二次玻璃膜的捲繞而二次玻璃膜中的通過間隙形成部的支持輥的部分向朝上方凸出的方向彎曲變形。因此,能夠以簡單的結構避免二次玻璃膜彼此的接觸,從而安全地搬運各二次玻璃膜。 In this way, the gap forming part is provided with a barrel-shaped support roller structure with the largest diameter at the center in the width direction, so that, for example, the portion of the secondary glass film passing through the support roller of the gap forming part is bent and deformed in a convex direction upward as the secondary glass film is wound on the downstream side of the support roller. Therefore, it is possible to avoid contact between the secondary glass films with a simple structure, thereby safely transporting each secondary glass film.

又,根據以上所說明的玻璃膜的製造方法,防止因玻璃膜的支持搬運位置伴隨切成片數的變更而偏向寬度方向一側所致的玻璃膜的搬運不良,而可穩定地獲得良好的品質的玻璃膜。因此,例如將利用上述方法獲得的二次玻璃膜,利用位於較下游側輸送機更靠搬運方向下游側的捲繞裝置捲繞成卷狀而獲得玻璃卷,藉此可無關於二次玻璃膜的切成數或其寬度方向尺寸,防止捲繞時的偏移,從而可穩定地獲得良好的品質的玻璃卷。 Furthermore, according to the above-described method for manufacturing glass film, poor conveyance of the glass film due to the support conveyance position of the glass film being biased to one side in the width direction as the number of slices is changed can be prevented, and a glass film of good quality can be stably obtained. Therefore, for example, the secondary glass film obtained by the above method is rolled into a roll by a winding device located on the downstream side of the conveyor in the conveyance direction to obtain a glass roll, thereby preventing the deviation during winding regardless of the number of slices of the secondary glass film or its width direction dimension, thereby stably obtaining a glass roll of good quality.

又,所述課題的解決亦可藉由本發明的玻璃膜的製造裝置而達成。即,所述製造裝置為玻璃膜的製造裝置,用於將帶狀的一次玻璃膜一面於規定的方向搬運一面進行切斷,藉此獲得一片或多片二次玻璃膜,所述玻璃膜的製造裝置的特徵在於包括:搬運裝置,可將一次玻璃膜於規定的方向進行搬運;以及雷射切斷裝置,可對由搬運裝置搬運的一次玻璃膜照射雷射,而於規定的切斷區進行切斷,搬運裝置包括:上游側輸送機,相對而言位於一次玻璃膜的搬運方向上游側;以及下游側輸送機,相對而言位於一次玻璃膜的搬運方向下游側,可搬運二次玻璃膜,下游側輸送機包括可藉由帶將二次玻璃膜予以接觸支持的多個下游側帶 式輸送機,且各下游側帶式輸送機的帶的位置,構成為可於一次玻璃膜的寬度方向上予以調整。 Furthermore, the above-mentioned problem can also be solved by the glass film manufacturing device of the present invention. That is, the manufacturing device is a glass film manufacturing device, which is used to transport a strip of primary glass film in a specified direction while cutting it, thereby obtaining one or more secondary glass films. The glass film manufacturing device is characterized by comprising: a transport device that can transport the primary glass film in a specified direction; and a laser cutting device that can irradiate the primary glass film transported by the transport device with a laser and cut it in a specified cutting area. The transport device includes: an upstream conveyor, which is relatively located on the upstream side of the transport direction of the primary glass film; and a downstream conveyor, which is relatively located on the downstream side of the transport direction of the primary glass film and can transport the secondary glass film. The downstream conveyor includes a plurality of downstream belt conveyors that can contact and support the secondary glass film through the belt, and the position of the belt of each downstream belt conveyor is configured to be adjustable in the width direction of the primary glass film.

如此般,於本發明的玻璃膜的製造裝置中,亦將搬運裝置設為包括上游側輸送機以及下游側輸送機,所述上游側輸送機相對而言位於一次玻璃膜的搬運方向上游側,所述下游側輸送機位於搬運方向下游側,可搬運二次玻璃膜,且使下游側輸送機包括可藉由帶將二次玻璃膜予以接觸支持的多個下游側帶式輸送機,並將各下游側帶式輸送機的帶的位置,設為可於一次玻璃膜的寬度方向上予以調整。藉此,無需改變用於搬運一次玻璃膜的上游側輸送機的結構,而可自由地設定二次玻璃膜在寬度方向上與帶的接觸支持位置,因此可根據藉由雷射切斷應取得的二次玻璃膜的寬度方向位置或寬度方向尺寸,將各下游側帶式輸送機配設於適當的寬度方向位置。因此,藉由最低限度的必要的設備變更,而可避免二次玻璃膜於偏向寬度方向一側的位置與帶接觸的事態,從而可防止由所述接觸位置的偏向引起的二次玻璃膜的斜行等二次玻璃膜的搬運不良。又,若可不斜行地搬運二次玻璃膜,則可盡可能地避免在寬度方向上相鄰的其中一個二次玻璃膜的切斷面干擾另一個二次玻璃膜的切斷面的事態,因此能夠獲得良好的切斷品質的玻璃膜。 In this way, in the glass film manufacturing device of the present invention, the transport device is also configured to include an upstream conveyor and a downstream conveyor. The upstream conveyor is relatively located on the upstream side of the transport direction of the primary glass film, and the downstream conveyor is located on the downstream side of the transport direction, which can transport the secondary glass film, and the downstream conveyor includes a plurality of downstream belt conveyors that can contact and support the secondary glass film through the belt, and the position of the belt of each downstream belt conveyor is set to be adjustable in the width direction of the primary glass film. Thus, the contact support position of the secondary glass film with the belt in the width direction can be freely set without changing the structure of the upstream conveyor for conveying the primary glass film, so that each downstream belt conveyor can be arranged at an appropriate width direction position according to the width direction position or width direction size of the secondary glass film to be obtained by laser cutting. Therefore, by minimally changing the necessary equipment, it is possible to avoid the secondary glass film contacting the belt at a position deviated to one side in the width direction, thereby preventing the secondary glass film from being skewed due to the deviated contact position and other secondary glass film conveying defects. Furthermore, if the secondary glass film can be transported without tilting, it is possible to avoid as much as possible the situation where the cut surface of one secondary glass film adjacent to the other in the width direction interferes with the cut surface of another secondary glass film, thereby obtaining a glass film with good cut quality.

如以上所述般,根據本發明,可避免伴隨切斷條件的變更的玻璃膜的搬運不良,從而穩定地獲得良好的品質的玻璃膜。 As described above, according to the present invention, poor transportation of the glass film due to changes in cutting conditions can be avoided, thereby stably obtaining a glass film of good quality.

1:製造裝置 1: Manufacturing equipment

2:成形部 2: Forming section

3:方向轉換部 3: Direction conversion unit

4:第一搬運部 4: First Transportation Department

5:第一切斷部 5: First cutting section

6:第一捲繞部 6: First winding part

7:抽出部 7: Extraction section

8:第二搬運部(搬運裝置) 8: Second transport unit (transport device)

9:第二切斷部 9: Second cutting section

10:第二捲繞部 10: Second winding section

11:成形體 11: Molded body

11a:溢流槽 11a: Overflow tank

12:邊緣輥 12: Edge Roller

13:退火爐 13: Annealing furnace

14:退火爐輥 14: Annealing furnace roller

15:支持輥 15: Support roller

16:導輥 16: Guide roller

17a:雷射照射裝置 17a: Laser irradiation device

17b:冷卻裝置 17b: Cooling device

18:捲芯 18: Roll core

19:上游側輸送機(輸送機) 19: Upstream conveyor (conveyor)

20:下游側輸送機(輸送機) 20: Downstream conveyor (conveyor)

21:切斷區 21: Cut-off area

22:上游側帶式輸送機(帶式輸送機) 22: Upstream belt conveyor (belt conveyor)

23:帶(第一帶) 23: Belt (first belt)

23a、28a:表面(支持搬運面) 23a, 28a: Surface (supporting transportation surface)

23b、28b:孔 23b, 28b: hole

24、29:皮帶輪 24, 29: Pulley

24a、29a:驅動皮帶輪 24a, 29a: drive pulley

25、30:支持體 25, 30: Support body

26、31:驅動源 26, 31: Driving source

27:下游側帶式輸送機(帶式輸送機) 27: Downstream belt conveyor (belt conveyor)

28:帶(第二帶) 28: Belt (Second Belt)

32:軌道部 32:Track Department

33:滑動部 33: Sliding part

34:軸 34: Axis

35:退避空間 35: Retreat space

36:雷射照射裝置 36: Laser irradiation device

36a:雷射照射部 36a: Laser irradiation unit

37:冷卻裝置 37: Cooling device

38:第一壓盤 38: First pressure plate

39:第一支持面 39: First support surface

40:第一抽吸部(抽吸部) 40: First suction unit (suction unit)

41、50:片材構件 41, 50: Sheet components

42:第一吸氣口 42: First air intake

42a、42a:兩端開口部 42a, 42a: Openings at both ends

42b:貫通孔 42b: Through hole

43、53:連通空間 43, 53: Connecting Space

44、54:排氣部 44, 54: Exhaust section

45、55:連接管 45, 55: Connecting tube

46、56:支持構件 46, 56: Support components

47:第二壓盤 47: Second pressure plate

48:第二支持面 48: Second support surface

49:第二抽吸部(抽吸部) 49: Second suction unit (suction unit)

51:第二吸氣口(吸氣口) 51: Second air intake (air intake)

52:第三吸氣口(吸氣口) 52: The third air inlet (air inlet)

57:狹縫部 57: Narrow seam

58:間隙形成部 58: Gap forming part

59a、59b、59c:支持輥 59a, 59b, 59c: Support rollers

60a、60b:噴嘴 60a, 60b: Nozzle

61a、61b:捲芯 61a, 61b: Rolling core

A-A、B-B、C-C、D-D、E-E:切斷線 A-A, B-B, C-C, D-D, E-E: Cutting line

G:母材玻璃膜 G: Base material glass film

G1:第一玻璃膜(玻璃膜)、一次玻璃膜 G1: First glass film (glass film), primary glass film

G2a、G2b、G2c:第二玻璃膜(玻璃膜)、二次玻璃膜 G2a, G2b, G2c: Second glass film (glass film), secondary glass film

GM:熔融玻璃 GM: Molten glass

GRL1:第一玻璃卷 GRL1: The first glass roll

GRL2a、GRL2b、GRL2c:第二玻璃卷 GRL2a, GRL2b, GRL2c: Second glass roll

L:雷射光 L:Laser light

O:雷射光的照射位置 O: Laser light irradiation position

PL:路線 PL:Route

R:冷媒 R: Refrigerant

X:搬運方向 X: Transportation direction

圖1是表示本發明的第一實施形態的玻璃膜的製造裝置的整體結構的側視圖。 FIG1 is a side view showing the overall structure of a glass film manufacturing device according to the first embodiment of the present invention.

圖2是圖1所示的搬運裝置的平面圖。 Figure 2 is a plan view of the transport device shown in Figure 1.

圖3是沿著圖2中的A-A切斷線的搬運裝置的剖視圖。 Figure 3 is a cross-sectional view of the transport device along the A-A cutting line in Figure 2.

圖4是圖2所示的第一壓盤的平面圖。 FIG4 is a plan view of the first pressure plate shown in FIG2.

圖5是沿著圖4中的B-B切斷線的第一壓盤的剖視圖。 FIG5 is a cross-sectional view of the first pressure plate along the B-B cutting line in FIG4.

圖6是沿著圖5中的C-C切斷線的第一壓盤的剖視圖。 FIG6 is a cross-sectional view of the first pressure plate along the C-C cutting line in FIG5.

圖7是圖2所示的第二壓盤的平面圖。 FIG7 is a plan view of the second pressure plate shown in FIG2.

圖8是沿著圖7中的D-D切斷線的第二壓盤的剖視圖。 FIG8 is a cross-sectional view of the second pressure plate along the D-D cutting line in FIG7.

圖9是沿著圖8中的E-E切斷線的第二壓盤的剖視圖。 FIG9 is a cross-sectional view of the second pressure plate along the E-E cutting line in FIG8.

圖10是用於說明由圖2所示的支持輥發揮的作用的概念圖。 FIG. 10 is a conceptual diagram for explaining the role played by the support roller shown in FIG. 2.

圖11是本發明的第二實施形態的搬運裝置的平面圖。 Figure 11 is a plan view of the transport device of the second embodiment of the present invention.

圖12是本發明的第三實施形態的搬運裝置的平面圖。 Figure 12 is a plan view of the transport device of the third embodiment of the present invention.

以下,基於圖1~圖10對本發明的玻璃膜的製造方法的第一實施形態進行說明。再者,以下,以將玻璃膜捲繞成卷狀而最終獲得玻璃卷的情況為例進行說明。 The following describes the first embodiment of the method for manufacturing the glass film of the present invention based on Figures 1 to 10. Furthermore, the following describes the case where the glass film is rolled into a roll to obtain a glass roll as an example.

如圖1所示,本發明的第一實施形態的玻璃膜(玻璃卷) 的製造裝置1包括:成形部2,使帶狀的母材玻璃膜G成形;方向轉換部3,將母材玻璃膜G的行進方向自縱向下方轉換成橫向;第一搬運部4,於方向轉換後對母材玻璃膜G進行橫向搬運;第一切斷部5,對母材玻璃膜G中的寬度方向兩端部進行切斷;以及第一捲繞部6,將經去除寬度方向兩端部的玻璃膜(以下,稱為第一玻璃膜)G1捲繞成卷狀而獲得第一玻璃卷GRL1。再者,於本實施形態中,縱向是鉛垂方向,橫向是水平方向。 As shown in FIG1 , the manufacturing device 1 of the glass film (glass roll) of the first embodiment of the present invention includes: a forming section 2 for forming a strip-shaped mother glass film G; a direction conversion section 3 for converting the traveling direction of the mother glass film G from the longitudinal downward direction to the transverse direction; a first conveying section 4 for conveying the mother glass film G transversely after the direction conversion; a first cutting section 5 for cutting the two ends of the mother glass film G in the width direction; and a first winding section 6 for winding the glass film G1 with the two ends in the width direction removed (hereinafter referred to as the first glass film) into a roll to obtain the first glass roll GRL1. In addition, in this embodiment, the longitudinal direction is the vertical direction and the transverse direction is the horizontal direction.

又,玻璃卷的製造裝置1更包括:抽出部7,自第一玻璃卷GRL1抽出第一玻璃膜G1;第二搬運部8,將自抽出部7抽出的第一玻璃膜G1進行橫向搬運;第二切斷部9,切斷第一玻璃膜G1的一部分;以及第二捲繞部10,將由第二切斷部9切斷而成的玻璃膜(以下,稱為第二玻璃膜)G2捲繞成卷狀而獲得第二玻璃卷GRL2a、第二玻璃卷GRL2b。 In addition, the glass roll manufacturing device 1 further includes: a drawing unit 7 for drawing out the first glass film G1 from the first glass roll GRL1; a second conveying unit 8 for conveying the first glass film G1 drawn out from the drawing unit 7 in a horizontal direction; a second cutting unit 9 for cutting a part of the first glass film G1; and a second winding unit 10 for winding the glass film (hereinafter referred to as the second glass film) G2 cut by the second cutting unit 9 into a roll to obtain the second glass roll GRL2a and the second glass roll GRL2b.

再者,本實施形態中的第一玻璃膜G1相當於本發明的一次玻璃膜,第二玻璃膜相當於本發明的二次玻璃膜。因此,第一玻璃卷GRL1相當於將本發明的一次玻璃膜捲繞成卷狀而成的玻璃卷,第二玻璃卷GRL2相當於將本發明的二次玻璃膜捲繞成卷狀而成的玻璃卷。 Furthermore, the first glass film G1 in this embodiment is equivalent to the primary glass film of the present invention, and the second glass film is equivalent to the secondary glass film of the present invention. Therefore, the first glass roll GRL1 is equivalent to the glass roll formed by winding the primary glass film of the present invention into a roll, and the second glass roll GRL2 is equivalent to the glass roll formed by winding the secondary glass film of the present invention into a roll.

又,本實施形態中的第二捲繞部10相當於本發明的捲繞裝置,第二切斷部9相當於本發明的雷射切斷裝置,第二搬運部8相當於本發明的搬運裝置。 In addition, the second winding section 10 in this embodiment is equivalent to the winding device of the present invention, the second cutting section 9 is equivalent to the laser cutting device of the present invention, and the second conveying section 8 is equivalent to the conveying device of the present invention.

成形部2包括:剖視時為大致楔形的成形體11,於上端 部形成有溢流槽11a;邊緣輥(edge roller)12,配置於成形體11的正下方,自表背兩側夾持自成形體11溢出的熔融玻璃GM;以及退火爐(annealer)13,配備在邊緣輥12的正下方。 The forming section 2 includes: a forming body 11 which is roughly wedge-shaped in cross-section and has an overflow groove 11a formed at the upper end; an edge roller 12 which is arranged directly below the forming body 11 and clamps the molten glass GM overflowing from the forming body 11 from both the front and back sides; and an annealer 13 which is arranged directly below the edge roller 12.

成形部2使自成形體11的溢流槽11a溢出的熔融玻璃GM沿兩側面分別流下,並於其下端部匯流而成形為膜狀。邊緣輥12對所述熔融玻璃GM的寬度方向收縮進行限制而調整母材玻璃膜G的寬度方向尺寸。退火爐13是用於對母材玻璃膜G實施除應變處理的構件。退火爐13具有配設成上下方向多層的退火爐輥14。 The forming part 2 makes the molten glass GM overflowing from the overflow groove 11a of the forming body 11 flow down along both side surfaces and converge at the lower end thereof to form a film. The edge roller 12 restricts the widthwise contraction of the molten glass GM and adjusts the widthwise dimension of the base glass film G. The annealing furnace 13 is a component for performing strain removal treatment on the base glass film G. The annealing furnace 13 has annealing furnace rollers 14 arranged in multiple layers in the vertical direction.

於退火爐13的下方,配設有自表背兩側夾持母材玻璃膜G的支持輥15。對支持輥15與邊緣輥12之間,或對支持輥15與任一處的退火爐輥14之間,賦予用於促使母材玻璃膜G變成薄壁的張力。 Support rollers 15 are provided below the annealing furnace 13 to hold the base glass film G from both the front and back sides. Tension is applied between the support roller 15 and the edge roller 12, or between the support roller 15 and any annealing furnace roller 14 to cause the base glass film G to become thin-walled.

方向轉換部3設置於支持輥15的下方位置。於方向轉換部3上,呈彎曲狀排列有對母材玻璃膜G進行導引的多個導輥16。該些導輥16對在鉛垂方向搬運的母材玻璃膜G進行橫向導引。 The direction conversion section 3 is disposed below the support roller 15. On the direction conversion section 3, a plurality of guide rollers 16 for guiding the base glass film G are arranged in a curved shape. These guide rollers 16 guide the base glass film G transported in the lead vertical direction in a transverse direction.

第一搬運部4配置於方向轉換部3的行進方向前方(下游側)。第一搬運部4藉由驅動具有支持搬運面的驅動部,而將通過方向轉換部3的母材玻璃膜G沿其長度方向朝下游側搬運。再者,第一搬運部4可採用任意的結構,例如可包括一個或多個帶式輸送機。此種情況下,具有支持搬運面的驅動部為帶,藉由對所述帶進行驅動,而可將母材玻璃膜G以上文所述的形態進行搬運。當然,第一搬運部4並不限定於上述例示的結構,亦可使用 輥式輸送機(roller conveyor)及其他各種搬運裝置。 The first conveying section 4 is arranged in front of the direction of travel of the direction-changing section 3 (downstream side). The first conveying section 4 conveys the base glass film G passing through the direction-changing section 3 toward the downstream side along its length direction by driving the driving section having a supporting conveying surface. Furthermore, the first conveying section 4 can adopt any structure, for example, it can include one or more belt conveyors. In this case, the driving section having a supporting conveying surface is a belt, and by driving the belt, the base glass film G can be conveyed in the form described above. Of course, the first conveying section 4 is not limited to the structure exemplified above, and a roller conveyor and other various conveying devices can also be used.

第一切斷部5配置於第一搬運部4的上方。於本實施形態中,第一切斷部5構成為可藉由雷射切割對母材玻璃膜G進行切斷。具體而言,第一切斷部5包括:一對雷射照射裝置17a、及配置於所述雷射照射裝置17a的下游側的一對冷卻裝置17b。第一切斷部5自各雷射照射裝置17a對所搬運的母材玻璃膜G的規定部位照射雷射光L而進行加熱後,自冷卻裝置17b放出冷媒R而將所述加熱部位進行冷卻。 The first cutting section 5 is arranged above the first conveying section 4. In the present embodiment, the first cutting section 5 is configured to cut the base glass film G by laser cutting. Specifically, the first cutting section 5 includes: a pair of laser irradiation devices 17a, and a pair of cooling devices 17b arranged on the downstream side of the laser irradiation device 17a. The first cutting section 5 irradiates the laser light L from each laser irradiation device 17a to heat the specified part of the conveyed base glass film G, and then releases the refrigerant R from the cooling device 17b to cool the heated part.

第一捲繞部6設置於第一搬運部4及第一切斷部5的下游側。第一捲繞部6藉由使捲芯18旋轉而將第一玻璃膜G1捲繞成卷狀。以此種方式獲得的第一玻璃卷GRL1被搬運至抽出部7的位置。抽出部7自藉由第一捲繞部6而獲得的第一玻璃卷GRL1抽出第一玻璃膜G1,並供給至第二搬運部8上。 The first winding section 6 is provided on the downstream side of the first conveying section 4 and the first cutting section 5. The first winding section 6 winds the first glass film G1 into a roll shape by rotating the winding core 18. The first glass roll GRL1 obtained in this way is conveyed to the position of the extraction section 7. The extraction section 7 extracts the first glass film G1 from the first glass roll GRL1 obtained by the first winding section 6 and supplies it to the second conveying section 8.

第二搬運部8將在抽出部7中自第一玻璃卷GRL1抽出的第一玻璃膜G1沿橫向(以下,稱為搬運方向X)搬運。此處,如圖2及圖3所示,第二搬運部8包括兩個輸送機19、20。此種情況下,第二搬運部8的支持搬運面,藉由利用第二切斷部9的第一玻璃膜G1的切斷區21(圖2中的以一點鏈線包圍的區域)予以分割。藉此,第二搬運部8形成被分割成上游側輸送機19與下游側輸送機20的結構,所述上游側輸送機19位於較切斷區21更靠第一玻璃膜G1的搬運方向上游側、所述下游側輸送機20位於較切斷區21更靠搬運方向下游側。 The second conveying section 8 conveys the first glass film G1 drawn out from the first glass roll GRL1 in the drawing section 7 in the transverse direction (hereinafter referred to as the conveying direction X). Here, as shown in FIG. 2 and FIG. 3 , the second conveying section 8 includes two conveyors 19 and 20. In this case, the supporting conveying surface of the second conveying section 8 is divided by the cutting area 21 (the area surrounded by a one-point chain in FIG. 2 ) of the first glass film G1 by the second cutting section 9. Thereby, the second conveying section 8 forms a structure divided into an upstream conveyor 19 and a downstream conveyor 20, wherein the upstream conveyor 19 is located more upstream of the cutting area 21 in the conveying direction of the first glass film G1, and the downstream conveyor 20 is located more downstream of the cutting area 21 in the conveying direction.

其中,上游側輸送機19包括多個上游側帶式輸送機22。所述多個上游側帶式輸送機22均構成為可利用帶(以下,稱為第一帶23)於相同的方向對第一玻璃膜G1予以接觸支持並向下游側搬運。此處,各第一帶23例如為環形帶狀的帶,各第一帶23設定在相同高度方向位置,以使第一玻璃膜G1於在其長度方向上所接觸的整個區域保持為大致水平姿勢。藉此,在成為第一玻璃膜G1的支持搬運面的各第一帶23的表面23a,構成有沿著水平方向的第一玻璃膜G1的路線PL(參照後述的圖5等)。 Among them, the upstream conveyor 19 includes a plurality of upstream belt conveyors 22. The plurality of upstream belt conveyors 22 are configured to support and transport the first glass film G1 in the same direction using a belt (hereinafter referred to as the first belt 23). Here, each first belt 23 is, for example, an annular belt, and each first belt 23 is set at the same height position so that the entire area contacted by the first glass film G1 in its length direction is maintained in a substantially horizontal posture. Thereby, on the surface 23a of each first belt 23, which becomes the support and transport surface of the first glass film G1, a route PL of the first glass film G1 along the horizontal direction is formed (refer to FIG. 5, etc. described later).

此處,如圖3所示,各上游側帶式輸送機22包括:上文所述的環形帶狀的第一帶23、用於對第一帶23賦予張力且將第一帶23配設於規定的位置的多個皮帶輪(pulley)24、以及支持所述多個皮帶輪24的支持體25。支持體25固定於地面。又,於多個皮帶輪24中的規定的皮帶輪24(驅動皮帶輪24a),連結有馬達等驅動源26(參照圖2),藉由由所述驅動源26對驅動皮帶輪24a賦予驅動力,而可將各上游側帶式輸送機22的第一帶23於規定的方向進行驅動。 Here, as shown in FIG3, each upstream side belt conveyor 22 includes: the first endless belt 23 described above, a plurality of pulleys 24 for applying tension to the first belt 23 and arranging the first belt 23 at a predetermined position, and a support 25 for supporting the plurality of pulleys 24. The support 25 is fixed to the ground. In addition, a drive source 26 such as a motor is connected to a predetermined pulley 24 (driving pulley 24a) among the plurality of pulleys 24 (refer to FIG2), and the first belt 23 of each upstream side belt conveyor 22 can be driven in a predetermined direction by applying a driving force to the driving pulley 24a by the driving source 26.

又,上述結構的多個上游側帶式輸送機22分別設置於規定的寬度方向位置。此處,設想在上游側輸送機19上搬運寬度方向尺寸互不相同的多種第一玻璃膜G1,而以於所設想的各第一玻璃膜G1的寬度方向兩端側予以接觸支持的方式,設定各第一帶23的寬度方向位置。又,於本實施形態中,構成為無關於寬度方向尺寸的大小,以可將全部的第一玻璃膜G1於其寬度方向中央位 置予以接觸支持的方式配設上游側帶式輸送機22(參照圖2),且所述上游側帶式輸送機22可將第一玻璃膜G1吸附於成為其支持搬運面的第一帶23的表面23a。於本實施形態中,於第一帶23的表面23a形成有多個孔23b,藉由通過所述孔23b進行吸氣,而可將第一玻璃膜G1吸附於表面23a。 Furthermore, the plurality of upstream side belt conveyors 22 of the above-mentioned structure are respectively arranged at predetermined widthwise positions. Here, it is assumed that a plurality of first glass films G1 having different widthwise dimensions are transported on the upstream side conveyor 19, and the widthwise positions of the first belts 23 are set in such a manner that the first glass films G1 are contact-supported at both ends in the widthwise direction. Furthermore, in the present embodiment, the upstream side belt conveyors 22 are arranged in such a manner that all the first glass films G1 are contact-supported at the central positions in the widthwise direction regardless of the widthwise dimensions (see FIG. 2 ), and the upstream side belt conveyors 22 can adsorb the first glass films G1 to the surface 23a of the first belt 23 serving as its support and transport surface. In this embodiment, a plurality of holes 23b are formed on the surface 23a of the first tape 23, and the first glass film G1 can be adsorbed on the surface 23a by suction through the holes 23b.

下游側輸送機20包括多個下游側帶式輸送機27。所述多個下游側帶式輸送機27均構成為可利用帶(以下,稱為第二帶28)於相同的方向對切斷後的第一玻璃膜G1、即第二玻璃膜G2a、第二玻璃膜G2b予以接觸支持並向下游側搬運。此處,各第二帶28例如為環形帶狀的帶,各第二帶28設定在相同高度方向位置,以使第二玻璃膜G2a、第二玻璃膜G2b於在其長度方向上所接觸的整個區域保持為大致水平姿勢。藉此,在成為第一玻璃膜G1的支持搬運面的各第一帶23的表面23a、與成為第二玻璃膜G2a、第二玻璃膜G2b的支持搬運面的各第二帶28的表面28a,構成有沿著水平方向的第一玻璃膜G1的切斷前後的路線PL、即第二搬運部8的路線PL。 The downstream conveyor 20 includes a plurality of downstream belt conveyors 27. The plurality of downstream belt conveyors 27 are configured to contact and support the cut first glass film G1, that is, the second glass film G2a and the second glass film G2b in the same direction using belts (hereinafter referred to as second belts 28) and to transport them downstream. Here, each second belt 28 is, for example, an endless belt, and each second belt 28 is set at the same height position so that the entire area of the second glass film G2a and the second glass film G2b in contact with each other in the length direction thereof is kept in a substantially horizontal position. Thus, the surface 23a of each first belt 23 serving as the support and conveying surface of the first glass film G1 and the surface 28a of each second belt 28 serving as the support and conveying surface of the second glass film G2a and the second glass film G2b form a route PL before and after the cutting of the first glass film G1 along the horizontal direction, that is, a route PL of the second conveying unit 8.

此處,如圖3所示,各下游側帶式輸送機27包括:上文所述的環形帶狀的第二帶28、用於對第二帶28賦予張力且將第二帶28配設於規定的位置的多個皮帶輪(pulley)29、以及支持所述多個皮帶輪29的支持體30。又,於多個皮帶輪29中的規定的皮帶輪29(驅動皮帶輪29a),連結有馬達等驅動源31(參照圖2),藉由由驅動源31對驅動皮帶輪29a賦予驅動力,而可將各下游側 帶式輸送機27的第二帶28於規定的方向進行驅動。所述驅動源31不同於上游側帶式輸送機22的驅動源26而獨立地設置。因此,可不聯動地各別地控制各驅動源26、31、以及上游側帶式輸送機22及下游側帶式輸送機27的驅動。 Here, as shown in FIG3, each downstream side belt conveyor 27 includes: the above-mentioned endless belt-shaped second belt 28, a plurality of pulleys 29 for applying tension to the second belt 28 and arranging the second belt 28 at a predetermined position, and a support 30 for supporting the plurality of pulleys 29. In addition, a driving source 31 such as a motor is connected to a predetermined pulley 29 (driving pulley 29a) among the plurality of pulleys 29 (refer to FIG2), and the second belt 28 of each downstream side belt conveyor 27 can be driven in a predetermined direction by applying a driving force to the driving pulley 29a by the driving source 31. The driving source 31 is independently provided from the driving source 26 of the upstream side belt conveyor 22. Therefore, the driving of each drive source 26, 31, as well as the upstream side belt conveyor 22 and the downstream side belt conveyor 27 can be controlled individually without linkage.

又,構成為多個下游側帶式輸送機27可分別設置於規定的寬度方向位置,且各第二帶28的位置可於第一玻璃膜G1的寬度方向上予以調整。具體而言,於各下游側帶式輸送機27的下方,配設有在第一玻璃膜G1的寬度方向上延伸的軌道部32。而且,於構成各下游側帶式輸送機27的支持體30的下部,安裝有可於軌道部32之間相對移動的滑動部33。藉此,藉由各支持體30的滑動部33相對於軌道部32於寬度方向上滑動,而由各支持體30支持的多個皮帶輪29及由該些皮帶輪29支持的第二帶28可一體地於寬度方向上滑動。再者,各下游側帶式輸送機27的驅動皮帶輪29a相對於共用的軸34於寬度方向上可滑動地被支持。因此,可自由地變更相對於軸34的寬度方向上的位置,且可在任意的寬度方向位置接受來自驅動源31的驅動力而進行驅動。 Furthermore, the plurality of downstream side belt conveyors 27 are configured to be respectively arranged at predetermined widthwise positions, and the positions of the second belts 28 can be adjusted in the widthwise direction of the first glass film G1. Specifically, a rail section 32 extending in the widthwise direction of the first glass film G1 is provided below each downstream side belt conveyor 27. Moreover, a sliding section 33 that can move relatively between the rail sections 32 is installed at the lower portion of the support body 30 constituting each downstream side belt conveyor 27. Thus, the plurality of pulleys 29 supported by each support body 30 and the second belts 28 supported by the pulleys 29 can slide in the widthwise direction as a whole. Furthermore, the driving pulley 29a of each downstream side belt conveyor 27 is supported slidably in the width direction relative to the common shaft 34. Therefore, the position in the width direction relative to the shaft 34 can be freely changed, and the driving force from the driving source 31 can be received at any width direction position to drive.

於本實施形態中,如圖2所示,以一對第二帶28位於切斷後的第一玻璃膜G1即各第二玻璃膜G2a、第二玻璃膜G2b的寬度方向兩端附近的方式,調整各第二帶28(各下游側帶式輸送機27)的寬度方向位置。再者,在如本實施形態般將第一玻璃膜G1的寬度方向兩端部切掉,且自所述一片第一玻璃膜G1切成兩片第二玻璃膜G2a、第二玻璃膜G2b的情況下,無需下游側帶式輸送 機27的其中一個,因此例如可使位於寬度方向最外側的下游側帶式輸送機27移動至退避空間35。藉此,確實地避免不需要的下游側帶式輸送機27對第二玻璃膜G2a、第二玻璃膜G2b進行干擾的事態,且藉由各兩個下游側帶式輸送機27將兩片第二玻璃膜G2a、G2b進行支持搬運,同時藉由各一個下游側帶式輸送機27,將切掉的第一玻璃膜G1的寬度方向端部分別進行支持搬運。再者,於本實施形態中,如圖2所示,全部下游側帶式輸送機27的第二帶28構成為可將第二玻璃膜G2a、第二玻璃膜G2b吸附於成為其支持搬運面的表面28a。於本實施形態中,於第二帶28的表面28a形成有多個孔28b,藉由通過所述孔28b進行吸氣,而可將第二玻璃膜G2a、第二玻璃膜G2b吸附於表面28a。 In this embodiment, as shown in FIG2 , the width direction position of each second belt 28 (each downstream side belt conveyor 27) is adjusted so that a pair of second belts 28 are located near both ends in the width direction of each second glass film G2a and G2b after the first glass film G1 is cut. Furthermore, when both ends in the width direction of the first glass film G1 are cut off and two second glass films G2a and G2b are cut from the first glass film G1 as in this embodiment, one of the downstream side belt conveyors 27 is not required, so for example, the downstream side belt conveyor 27 located at the outermost side in the width direction can be moved to the retreat space 35. In this way, it is possible to reliably avoid the situation where the unnecessary downstream side belt conveyors 27 interfere with the second glass films G2a and G2b, and the two sheets of the second glass films G2a and G2b are supported and transported by each of the two downstream side belt conveyors 27, and at the same time, the width direction ends of the cut first glass film G1 are supported and transported by each of the downstream side belt conveyors 27. Furthermore, in this embodiment, as shown in FIG. 2 , the second belts 28 of all the downstream side belt conveyors 27 are configured to absorb the second glass films G2a and G2b onto the surface 28a that serves as the support and transport surface. In this embodiment, a plurality of holes 28b are formed on the surface 28a of the second belt 28, and the second glass film G2a and the second glass film G2b can be adsorbed on the surface 28a by suction through the holes 28b.

第二切斷部9配置於第二搬運部8中的位於上游側輸送機19與下游側輸送機20之間的區域的上方(參照圖1及圖3)。於本實施形態中,第二切斷部9構成為可藉由雷射切割對第一玻璃膜G1進行切斷,包括多個雷射照射裝置36、及配置於各雷射照射裝置36的下游側的冷卻裝置37。此種情況下,冷卻裝置37配置為與雷射照射裝置36相同數目。於本實施形態中,利用第二切斷部9的第一玻璃膜G1的切斷區21設置於寬度方向上的三處(參照圖2),因此雷射照射裝置36與冷卻裝置37亦各配設有三個。上述結構的第二切斷部9構成為可自各雷射照射裝置36對所搬運的第一玻璃膜G1的規定部位照射雷射光L而進行加熱後,自冷卻裝置37放出冷媒R而將所述加熱部位進行冷卻。詳情將於後 述。 The second cutting section 9 is arranged above the area between the upstream conveyor 19 and the downstream conveyor 20 in the second transport section 8 (see FIGS. 1 and 3 ). In the present embodiment, the second cutting section 9 is configured to cut the first glass film G1 by laser cutting, and includes a plurality of laser irradiation devices 36 and cooling devices 37 arranged on the downstream side of each laser irradiation device 36. In this case, the cooling devices 37 are arranged in the same number as the laser irradiation devices 36. In the present embodiment, the cutting area 21 of the first glass film G1 using the second cutting section 9 is set at three locations in the width direction (see FIG. 2 ), so three laser irradiation devices 36 and three cooling devices 37 are also arranged. The second cutting section 9 of the above structure is configured to heat the first glass film G1 being transported by irradiating a predetermined portion of the film with laser light L from each laser irradiation device 36, and then cool the heated portion by releasing a refrigerant R from the cooling device 37. Details will be described later.

又,於本實施形態中,如圖2所示,於上述的第一玻璃膜G1的在寬度方向上遠離切斷區21的位置,配設有可將由第二搬運部8搬運的第一玻璃膜G1予以接觸支持的第一壓盤38。準確而言,於與切斷後的第一玻璃膜G1(第二玻璃膜G2a、第二玻璃膜G2b)的寬度方向中央側相對應的位置,配設有第一壓盤38。於本實施形態中,由於兩片第二玻璃膜G2a、G2b是自一片第一玻璃膜G1切成,因此於相對於切斷區21位於寬度方向、且與各第二玻璃膜G2a、第二玻璃膜G2b的寬度方向中央相對應的位置,分別配設有第一壓盤38。所述第一壓盤38的圖示省略,設置於地面並固定,始終處於靜止的狀態。 Furthermore, in the present embodiment, as shown in FIG. 2 , a first pressing plate 38 is disposed at a position of the first glass film G1 that is far from the cutting region 21 in the width direction and that can contact and support the first glass film G1 transported by the second transport unit 8. Specifically, the first pressing plate 38 is disposed at a position corresponding to the center side in the width direction of the first glass film G1 (the second glass film G2a, the second glass film G2b) after the cutting. In the present embodiment, since the two second glass films G2a and G2b are cut from one first glass film G1, the first pressing plate 38 is disposed at a position that is located in the width direction relative to the cutting region 21 and corresponds to the center in the width direction of each of the second glass films G2a and the second glass film G2b. The first pressure plate 38 is omitted in the figure, and is set on the ground and fixed, always in a static state.

此處,如圖4所示,第一壓盤38包括:第一支持面39,可對第一玻璃膜G1予以接觸支持;以及第一抽吸部40,可將第一玻璃膜G1向第一支持面39抽吸。 Here, as shown in FIG. 4 , the first pressure plate 38 includes: a first support surface 39 that can provide contact support to the first glass film G1; and a first suction portion 40 that can suck the first glass film G1 toward the first support surface 39.

第一壓盤38例如由金屬形成為大致長方體狀。於本實施形態中,如圖5所示,第一支持面39由設置於第一壓盤38的上側的片材構件41的表面構成。所述片材構件41例如由樹脂等與第一玻璃膜G1接觸時的阻力小的材料形成,或者由對於第一玻璃膜G1的滑動性良好的材料形成。再者,於本實施形態中,由片材構件41的表面構成第一支持面39,當然,亦可由第一壓盤38的上表面構成第一支持面39。 The first pressure plate 38 is formed of metal in a substantially rectangular parallelepiped shape, for example. In this embodiment, as shown in FIG. 5 , the first support surface 39 is formed by the surface of a sheet member 41 disposed on the upper side of the first pressure plate 38. The sheet member 41 is formed of a material having low resistance when in contact with the first glass film G1, such as resin, or a material having good sliding properties with respect to the first glass film G1. Furthermore, in this embodiment, the first support surface 39 is formed by the surface of the sheet member 41, but of course, the first support surface 39 may also be formed by the upper surface of the first pressure plate 38.

又,第一支持面39的高度方向位置可為與第一玻璃膜 G1的路線PL相同的位置,亦可例如如圖5及圖6所示,設定為較路線PL稍許(例如3mm以內的範圍)高。藉此,可使第一玻璃膜G1與第一支持面39更確實地密接。 Furthermore, the height direction position of the first support surface 39 may be the same as the path PL of the first glass film G1, or may be set slightly higher (e.g. within 3 mm) than the path PL as shown in Figs. 5 and 6. In this way, the first glass film G1 and the first support surface 39 can be more securely in close contact.

於本實施形態中,第一抽吸部40包括:於第一支持面39開口的第一吸氣口42、與第一吸氣口42連通的連通空間43、進行連通空間43內部的排氣的泵等的排氣部44、以及連接連通空間43與排氣部44的連接管45(均參照圖3)。於本實施形態中,第一吸氣口42形成槽狀。又,所述形成槽狀的第一吸氣口42以沿第一玻璃膜G1的長度方向、即沿搬運方向延伸的方式形成於第一支持面39(參照圖4)。第一吸氣口42以貫通片材構件41且於第一壓盤38的上表面開口的方式形成。又,於本實施形態中,第一吸氣口42的長度方向兩端相對於第一壓盤38的側面開口。因此,第一吸氣口42的兩端開口部42a、兩端開口部42a,處於相對於外部空間(外部空氣)始終開放的狀態。 In the present embodiment, the first suction portion 40 includes: a first air intake port 42 opening on the first support surface 39, a connecting space 43 connected to the first air intake port 42, an exhaust portion 44 such as a pump for exhausting the inside of the connecting space 43, and a connecting pipe 45 connecting the connecting space 43 and the exhaust portion 44 (all refer to FIG. 3). In the present embodiment, the first air intake port 42 is formed in a groove shape. Furthermore, the first air intake port 42 formed in a groove shape is formed on the first support surface 39 in a manner extending along the length direction of the first glass film G1, that is, along the conveying direction (refer to FIG. 4). The first air intake port 42 is formed in a manner penetrating the sheet member 41 and opening on the upper surface of the first pressure plate 38. Furthermore, in the present embodiment, both ends of the first air intake port 42 in the length direction are opened on the side surfaces of the first pressure plate 38 relative to the first pressure plate 38. Therefore, the openings 42a at both ends of the first air inlet 42 are always open to the outside space (outside air).

於第一吸氣口42的底面形成有多個貫通孔42b,與形成於支持第一壓盤38的支持構件46的連通空間43相連。此種情況下,貫通孔42b形成於第一壓盤38,連通空間43形成於支持構件46。連接管45安裝於支持構件46。排氣部44例如為共用,可對於一個排氣部44由與第一壓盤38相同數目的連接管45予以連接。或者,亦可為連通空間43為共用而由一個支持構件46支持有多個第一壓盤38。此種情況下,一根連接管45安裝於一個支持構件46。根據形成以上結構的第一抽吸部40,藉由排氣部44的 驅動,自在第一支持面39開口的第一吸氣口42及位於所述長度方向兩端的兩端開口部42a、兩端開口部42a進行吸氣。因此,當在第一壓盤38的第一支持面39上搬運第一玻璃膜G1的情況下,藉由上述吸氣動作,而可將第一玻璃膜G1的下表面抽吸至第一支持面39。 A plurality of through holes 42b are formed on the bottom surface of the first air intake port 42, and are connected to a connecting space 43 formed on a supporting member 46 that supports the first pressure plate 38. In this case, the through hole 42b is formed in the first pressure plate 38, and the connecting space 43 is formed in the supporting member 46. A connecting pipe 45 is mounted on the supporting member 46. For example, the exhaust portion 44 is shared, and one exhaust portion 44 can be connected by the same number of connecting pipes 45 as the first pressure plate 38. Alternatively, the connecting space 43 may be shared and a plurality of first pressure plates 38 may be supported by one supporting member 46. In this case, one connecting pipe 45 is mounted on one supporting member 46. According to the first suction part 40 having the above structure, the exhaust part 44 is driven to suck air from the first suction port 42 opened on the first support surface 39 and the two end openings 42a and the two end openings 42a located at the two ends in the longitudinal direction. Therefore, when the first glass film G1 is transported on the first support surface 39 of the first platen 38, the lower surface of the first glass film G1 can be sucked to the first support surface 39 by the above suction action.

又,於本實施形態中,如圖2所示,於上述的第一玻璃膜G1的切斷區21,配設有可對第一玻璃膜G1予以接觸支持的第二壓盤47。於本實施形態中,由於採用將第一玻璃膜G1於寬度方向的三處進行切斷的形態,因此對三處切斷區21分別配設有三個第二壓盤47。該些第二壓盤47的圖示省略,設置於地面並固定,始終處於靜止的狀態。 Furthermore, in this embodiment, as shown in FIG. 2 , a second pressure plate 47 is provided in the cutting area 21 of the first glass film G1 to provide contact support to the first glass film G1. In this embodiment, since the first glass film G1 is cut at three locations in the width direction, three second pressure plates 47 are provided for the three cutting areas 21 respectively. The illustration of these second pressure plates 47 is omitted, and they are set on the ground and fixed, and are always in a static state.

此處,如圖7所示,第二壓盤47包括:第二支持面48,可對第一玻璃膜G1予以接觸支持;以及第二抽吸部49,可將第一玻璃膜G1向第二支持面48抽吸。 Here, as shown in FIG. 7 , the second pressure plate 47 includes: a second support surface 48 that can provide contact support to the first glass film G1; and a second suction portion 49 that can suck the first glass film G1 toward the second support surface 48.

第二壓盤47例如由金屬形成為大致長方體狀。於本實施形態中,如圖8所示,第二支持面48由設置於第二壓盤47的上側的片材構件50的表面構成。所述片材構件50例如由樹脂等與第一玻璃膜G1接觸時的阻力小的材料形成,或者由對於第一玻璃膜G1的滑動性良好的材料形成。再者,於本實施形態中,由片材構件50的表面構成第二支持面48,當然,亦可由第二壓盤47的上表面構成第二支持面48。 The second platen 47 is formed of metal in a substantially rectangular shape, for example. In this embodiment, as shown in FIG8 , the second support surface 48 is formed by the surface of a sheet member 50 disposed on the upper side of the second platen 47. The sheet member 50 is formed of a material such as resin that has little resistance when in contact with the first glass film G1, or is formed of a material that has good sliding properties with respect to the first glass film G1. Furthermore, in this embodiment, the second support surface 48 is formed by the surface of the sheet member 50, but of course, the second support surface 48 may also be formed by the upper surface of the second platen 47.

又,第二支持面48的高度方向位置可為與第一玻璃膜 G1的路線PL相同的位置,亦可例如圖8及圖9所示,設定為較路線PL稍許(例如3mm以內的範圍)高。藉此,可使第一玻璃膜G1與第二支持面48更確實地密接。 Furthermore, the height direction position of the second support surface 48 can be the same as the position of the route PL of the first glass film G1, or can be set slightly higher than the route PL (for example, within a range of 3 mm) as shown in Figures 8 and 9. In this way, the first glass film G1 can be more securely in close contact with the second support surface 48.

於本實施形態中,如圖8及圖9所示,第二抽吸部49包括:於第二支持面48開口的第二吸氣口51、位於第二吸氣口51的寬度方向兩側的一對第三吸氣口52、52、與第二吸氣口51及第三吸氣口52、第三吸氣口52連通的連通空間53、進行連通空間53內部的排氣的泵等的排氣部54、以及連接連通空間53與排氣部54的連接管55。 In this embodiment, as shown in FIG8 and FIG9, the second suction part 49 includes: a second air inlet 51 opened on the second support surface 48, a pair of third air inlets 52, 52 located on both sides of the width direction of the second air inlet 51, a connecting space 53 connected to the second air inlet 51 and the third air inlet 52, 52, an exhaust part 54 such as a pump for exhausting the inside of the connecting space 53, and a connecting pipe 55 connecting the connecting space 53 and the exhaust part 54.

於本實施形態中,第二吸氣口51及第三吸氣口52均以呈沿著第一玻璃膜G1的搬運方向X延伸的長孔形狀的方式形成於第二支持面48。此處,第二吸氣口51的寬度方向尺寸或長度方向尺寸,可兼顧第三吸氣口52的寬度方向尺寸或長度方向尺寸而設定成適當的大小。換言之,可根據所需的對第一玻璃膜G1的抽吸力(變形力),適當地設定上述的尺寸、特別是第二吸氣口51的各種尺寸與第三吸氣口52的各種尺寸的大小關係。 In this embodiment, the second air inlet 51 and the third air inlet 52 are formed on the second support surface 48 in the form of a long hole extending along the conveying direction X of the first glass film G1. Here, the width dimension or length dimension of the second air inlet 51 can be set to an appropriate size taking into account the width dimension or length dimension of the third air inlet 52. In other words, the above-mentioned dimensions, especially the size relationship between the various dimensions of the second air inlet 51 and the various dimensions of the third air inlet 52, can be appropriately set according to the required suction force (deformation force) on the first glass film G1.

上述結構的第二吸氣口51及一對第三吸氣口52、52形成於片材構件50與第二壓盤47。所述第二吸氣口51及第三吸氣口52、第三吸氣口52以將片材構件50與第二壓盤47分別於上下方向貫通的方式形成,並與形成於自下方支持第二壓盤47的支持構件56的連通空間53相連。此種情況下,連通空間53形成於支持構件56,連接管55安裝於支持構件56的下側。排氣部54例如 為共用,可對於一個排氣部54由與第二壓盤47相同數目的連接管55予以連接。或者,亦可為連通空間53為共用,而由一個支持構件56支持有多個第二壓盤47。此種情況下,一根連接管55安裝於一個支持構件56。又,於本實施形態中,於支持構件56與第二壓盤47之間,形成有狹縫部57,所述狹縫部57於支持構件56的寬度方向開口,而可抽吸外部的空氣。 The second air intake port 51 and a pair of third air intake ports 52, 52 of the above structure are formed in the sheet member 50 and the second pressure plate 47. The second air intake port 51 and the third air intake port 52, 52 are formed in a manner that the sheet member 50 and the second pressure plate 47 are connected in the vertical direction, respectively, and are connected to the communication space 53 formed in the support member 56 that supports the second pressure plate 47 from below. In this case, the communication space 53 is formed in the support member 56, and the connecting pipe 55 is installed on the lower side of the support member 56. The exhaust part 54 is shared, for example, and one exhaust part 54 can be connected by the same number of connecting pipes 55 as the second pressure plate 47. Alternatively, the communication space 53 can be shared, and a plurality of second pressure plates 47 can be supported by one support member 56. In this case, a connecting pipe 55 is installed on a supporting member 56. In addition, in this embodiment, a slit portion 57 is formed between the supporting member 56 and the second pressure plate 47. The slit portion 57 is open in the width direction of the supporting member 56 to suck in external air.

根據形成以上結構的第二抽吸部49,藉由排氣部54的驅動,自在第二支持面48開口的第二吸氣口51與第三吸氣口52、第三吸氣口52及狹縫部57進行吸氣。因此,當在第二壓盤47的第二支持面48上搬運第一玻璃膜G1的情況下,藉由上述吸氣動作,而可將第一玻璃膜G1的下表面抽吸至第二支持面48。 According to the second suction part 49 formed with the above structure, the exhaust part 54 drives the second suction port 51 and the third suction port 52, the third suction port 52 and the slit part 57 opened on the second support surface 48 to suck air. Therefore, when the first glass film G1 is transported on the second support surface 48 of the second platen 47, the lower surface of the first glass film G1 can be sucked to the second support surface 48 by the above suction action.

又,如本實施形態所述般,當在第一抽吸部40與第二抽吸部49分別設置獨立的排氣部44、排氣部54的情況下,可各別地控制抽吸力。例如,可以第一抽吸部40對第一玻璃膜G1的抽吸力小於第二抽吸部49對第一玻璃膜G1的抽吸力的方式,各別地調整由各抽吸部40、抽吸部49產生的抽吸力,換言之,各別地調整由各排氣部44、排氣部54產生的排氣量。當然,亦可由第一抽吸部40與第二抽吸部49共用排氣部(省略圖示),而將結構簡化。 Furthermore, as described in the present embodiment, when independent exhaust parts 44 and exhaust parts 54 are provided in the first suction part 40 and the second suction part 49, respectively, the suction forces can be controlled separately. For example, the suction forces generated by the suction parts 40 and 49 can be adjusted separately in such a way that the suction force of the first suction part 40 on the first glass film G1 is smaller than the suction force of the second suction part 49 on the first glass film G1. In other words, the exhaust volume generated by the exhaust parts 44 and 54 can be adjusted separately. Of course, the exhaust part (omitted from the figure) can also be shared by the first suction part 40 and the second suction part 49 to simplify the structure.

雷射照射裝置36藉由對沿搬運方向X移動的第一玻璃膜G1的規定部位照射雷射光L,而對所述部位進行局部加熱。如圖9所示,雷射照射裝置36具有多個雷射照射部36a。各雷射照射 部36a配置於第二壓盤47的第二吸氣口51的上方。藉此,雷射照射部36a對通過在第二支持面48開口的第二吸氣口51的第一玻璃膜G1的多個部位照射雷射光L。源自各雷射照射部36a的雷射光L的照射位置O是以位於與第一玻璃膜G1的搬運方向X大致平行的直線上的方式設定。 The laser irradiation device 36 locally heats a predetermined portion of the first glass film G1 moving along the conveying direction X by irradiating the portion with laser light L. As shown in FIG. 9 , the laser irradiation device 36 has a plurality of laser irradiation units 36a. Each laser irradiation unit 36a is disposed above the second air intake port 51 of the second platen 47. Thus, the laser irradiation unit 36a irradiates the plurality of portions of the first glass film G1 passing through the second air intake port 51 opened on the second support surface 48 with laser light L. The irradiation position O of the laser light L from each laser irradiation unit 36a is set in a manner to be located on a straight line substantially parallel to the conveying direction X of the first glass film G1.

冷卻裝置37於第一玻璃膜G1的搬運方向X上配置於雷射照射裝置36的下游側。冷卻裝置37對第一玻璃膜G1中的藉由上述的雷射光L的照射而進行局部加熱的部位供給冷媒R而將所述部位予以冷卻。 The cooling device 37 is arranged downstream of the laser irradiation device 36 in the conveying direction X of the first glass film G1. The cooling device 37 supplies the cooling medium R to the portion of the first glass film G1 that is locally heated by the irradiation of the laser light L described above, thereby cooling the portion.

於較第二搬運部8更靠下游側,設置有間隙形成部58,所述間隙形成部58用於在寬度方向上相鄰的一組第二玻璃膜G2a、G2b之間形成寬度方向間隙。所述間隙形成部58於本實施形態中,以各第二玻璃膜G2a、第二玻璃膜G2b向朝上方凸出的方向灣曲變形的方式,具有寬度方向中央成為最大徑的桶狀的支持輥59a、支持輥59b。於本實施形態中切成兩片第二玻璃膜G2a、G2b,因此配設有兩個支持輥59a、59b。又,如圖10所示,於本實施形態中,配設有用於自上方朝藉由支持輥59a、支持輥59b支持的各第二玻璃膜G2a、第二玻璃膜G2b的寬度方向兩端部噴附空氣等氣體的噴嘴60a、噴嘴60b。 A gap forming portion 58 is provided on the downstream side of the second conveying portion 8. The gap forming portion 58 is used to form a gap in the width direction between a pair of second glass films G2a and G2b adjacent in the width direction. In the present embodiment, the gap forming portion 58 has barrel-shaped support rollers 59a and 59b with the largest diameter at the center in the width direction in a manner that each second glass film G2a and G2b is bent and deformed in a direction convex upward. In the present embodiment, the second glass films G2a and G2b are cut into two pieces, so two support rollers 59a and 59b are provided. Furthermore, as shown in FIG. 10 , in this embodiment, nozzles 60a and 60b are provided for spraying gas such as air from above toward both ends in the width direction of each second glass film G2a and G2b supported by support rollers 59a and 59b.

第二捲繞部10配設於較第二搬運部8更靠下游側。具體而言,第二捲繞部10藉由利用捲芯61a、捲芯61b對由第二搬運部8搬運的第二玻璃膜G2a、第二玻璃膜G2b進行捲繞,而獲得 第二玻璃卷GRL2a、第二玻璃卷GRL2b。於本實施形態中,切成兩片第二玻璃膜G2a、G2b,因此藉由將所述兩片第二玻璃膜G2a、G2b分別進行捲繞,而可獲得兩個第二玻璃卷GRL2a、GRL2b。 The second winding section 10 is disposed on the downstream side of the second conveying section 8. Specifically, the second winding section 10 winds the second glass film G2a and the second glass film G2b conveyed by the second conveying section 8 using the winding core 61a and the winding core 61b to obtain the second glass roll GRL2a and the second glass roll GRL2b. In this embodiment, the second glass film G2a and G2b are cut into two pieces, so by winding the two second glass films G2a and G2b respectively, two second glass rolls GRL2a and GRL2b can be obtained.

作為藉由上述結構的製造裝置1而製造的第二玻璃膜G2a、第二玻璃膜G2b(第一玻璃膜G1)的材質,使用矽酸鹽玻璃、二氧化矽玻璃,較佳為使用硼矽酸玻璃、鈉鈣玻璃、鋁矽酸鹽玻璃、化學強化玻璃,最佳為使用無鹼玻璃。此處,所謂無鹼玻璃,是指實質不含鹼成分(鹼金屬氧化物)的玻璃,具體而言,是指鹼成分的重量比為3000ppm以下的玻璃。本發明中的鹼成分的重量比較佳為1000ppm以下,更佳為500ppm以下,最佳為300ppm以下。 As the material of the second glass film G2a and the second glass film G2b (first glass film G1) manufactured by the manufacturing device 1 of the above structure, silicate glass and silica dioxide glass are used, preferably borosilicate glass, sodium calcium glass, aluminum silicate glass, chemically strengthened glass, and alkali-free glass is the best. Here, the so-called alkali-free glass refers to glass that does not substantially contain alkali components (alkali metal oxides), specifically, refers to glass with a weight ratio of alkali components of 3000ppm or less. The weight ratio of alkali components in the present invention is preferably 1000ppm or less, more preferably 500ppm or less, and best 300ppm or less.

又,第二玻璃膜G2a、第二玻璃膜G2b(第一玻璃膜G1)的厚度尺寸設為10μm以上且300μm以下,較佳為30μm以上且200μm以下,最佳為30μm以上且100μm以下。 In addition, the thickness of the second glass film G2a and the second glass film G2b (the first glass film G1) is set to be greater than 10 μm and less than 300 μm, preferably greater than 30 μm and less than 200 μm, and most preferably greater than 30 μm and less than 100 μm.

以下,對使用上述結構的製造裝置1製造第二玻璃膜G2a、第二玻璃膜G2b(本實施形態中為第二玻璃卷GRL2a、第二玻璃卷GRL2b)的方法進行說明。本方法包括:成形步驟S1、兩端部去除步驟S2、第一捲繞步驟S3、抽出步驟S4、切斷步驟S5、以及第二捲繞步驟S6。 Hereinafter, a method for manufacturing the second glass film G2a and the second glass film G2b (the second glass roll GRL2a and the second glass roll GRL2b in this embodiment) using the manufacturing device 1 of the above structure will be described. The method includes: a forming step S1, a two-end removal step S2, a first winding step S3, a drawing step S4, a cutting step S5, and a second winding step S6.

於成形步驟S1中,如圖1所示,使自成形部2中的成形體11的溢流槽11a溢出的熔融玻璃GM分別沿著成形體11的兩側面流下,並於其下端部匯流而成形為膜狀。此時,藉由邊緣輥 12對熔融玻璃GM的寬度方向收縮進行限制而製成規定寬度的母材玻璃膜G。其後,藉由退火爐13對母材玻璃膜G實施除應變處理(緩冷步驟)。藉由支持輥15的張力將母材玻璃膜G形成為規定的厚度。 In the forming step S1, as shown in FIG1, the molten glass GM overflowing from the overflow groove 11a of the forming body 11 in the forming part 2 flows down along the two side surfaces of the forming body 11, and converges at its lower end to form a film. At this time, the shrinkage of the molten glass GM in the width direction is restricted by the edge roller 12 to form a base glass film G of a specified width. Thereafter, the base glass film G is subjected to strain removal treatment (slow cooling step) by the annealing furnace 13. The base glass film G is formed into a specified thickness by the tension of the support roller 15.

於兩端部去除步驟S2中,同樣地如圖1所示,藉由方向轉換部3及第一搬運部4將母材玻璃膜G送往下游側,並且於第一切斷部5中,自雷射照射裝置17a對母材玻璃膜G的一部分照射雷射光L而進行加熱。之後,藉由冷卻裝置17b對已加熱的部位噴附冷媒R。藉此,母材玻璃膜G中產生熱應力。母材玻璃膜G中預先形成有初始裂紋,藉由熱應力使所述裂紋進展。藉此,去除母材玻璃膜G的寬度方向兩端部,而形成第一玻璃膜G1。 In the end removal step S2, as shown in FIG1, the base glass film G is sent to the downstream side by the direction conversion unit 3 and the first conveying unit 4, and in the first cutting unit 5, a portion of the base glass film G is irradiated with laser light L from the laser irradiation device 17a to heat it. After that, the cooling medium R is sprayed on the heated part by the cooling device 17b. Thereby, thermal stress is generated in the base glass film G. An initial crack is formed in the base glass film G in advance, and the crack is advanced by thermal stress. Thereby, the end portions of the base glass film G in the width direction are removed to form the first glass film G1.

於接下來的第一捲繞步驟S3中,同樣地如圖1所示,藉由將第一玻璃膜G1捲繞於捲芯18,而獲得第一玻璃卷GRL1。其後,將第一玻璃卷GRL1移送至抽出部7。於抽出步驟S4中,自移送至抽出部7的第一玻璃卷GRL1抽出第一玻璃膜G1,並藉由第二搬運部8搬運至第二搬運部8上的切斷區21(參照圖2及圖3)。 In the next first winding step S3, as shown in FIG1 , the first glass film G1 is wound around the winding core 18 to obtain the first glass roll GRL1. Thereafter, the first glass roll GRL1 is transferred to the extraction section 7. In the extraction step S4, the first glass film G1 is extracted from the first glass roll GRL1 transferred to the extraction section 7 and transported to the cutting area 21 on the second transport section 8 by the second transport section 8 (refer to FIG2 and FIG3 ).

於切斷步驟S5中,藉由利用雷射照射裝置36對第一玻璃膜G1中的通過第二搬運部8上的切斷區21的部分照射雷射光L,且對所照射的區域噴附冷媒R,而進行沿著第一玻璃膜G1的搬運方向X的方向的切斷。又,此時,第一玻璃膜G1藉由上游側輸送機19於沿著搬運方向X的方向搬運,並通過配設在相對於 切斷區21於寬度方向上遠離的位置的第一壓盤38的第一支持面39上(參照圖2)。此處,藉由使第一抽吸部40的排氣部44工作(藉由使其一直工作),而經由在第一支持面39開口的第一吸氣口42,對第一支持面39上的第一玻璃膜G1作用有朝下的抽吸力,而將第一玻璃膜G1向第一支持面39抽吸。藉此,第一玻璃膜G1在受到朝向第一支持面39的力(約束力)的狀態下一面被接觸支持一面沿著搬運方向X被搬運。又,根據由第一抽吸部40產生的抽吸力的程度,第一玻璃膜G1的被抽吸部分變形(例如如圖5所示,向朝下方凸出的方向灣曲變形)。 In the cutting step S5, the laser irradiation device 36 irradiates the portion of the first glass film G1 passing through the cutting area 21 on the second conveying section 8 with laser light L, and sprays the irradiated area with a coolant R, thereby cutting the first glass film G1 in the direction of the conveying direction X. At this time, the first glass film G1 is conveyed in the direction along the conveying direction X by the upstream conveyor 19, and passes through the first support surface 39 of the first platen 38 disposed at a position far from the cutting area 21 in the width direction (see FIG. 2). Here, by operating the exhaust part 44 of the first suction part 40 (by operating it all the time), a downward suction force is applied to the first glass film G1 on the first support surface 39 through the first suction port 42 opened on the first support surface 39, and the first glass film G1 is sucked toward the first support surface 39. As a result, the first glass film G1 is supported in contact with the first support surface 39 and is transported along the transport direction X. In addition, depending on the degree of the suction force generated by the first suction part 40, the sucked portion of the first glass film G1 is deformed (for example, bent and deformed in a convex direction downward as shown in FIG. 5).

又,於本實施形態中,於切斷區21配設有第二壓盤47,因此如上述般第一玻璃膜G1通過切斷區21上的同時,通過第二壓盤47的第二支持面48上(參照圖2)。此處,藉由使第二抽吸部49的排氣部54工作,而經由在第二支持面48開口的第二吸氣口51及一對第三吸氣口52、52對第二支持面48上的第一玻璃膜G1作用有向下的抽吸力,而將第一玻璃膜G1向第二支持面48抽吸。藉此,第一玻璃膜G1一面接觸支持於第二支持面48一面沿著搬運方向X被搬運。又,根據由第二抽吸部49產生的抽吸力的程度,第一玻璃膜G1的被抽吸部分變形(例如如圖8所示,各吸氣口51、吸氣口52正上方的部分分別向朝下方凸出的方向灣曲變形)。 In addition, in the present embodiment, the second platen 47 is provided in the cutting area 21, so that the first glass film G1 passes through the second supporting surface 48 of the second platen 47 (see FIG. 2 ) while passing through the cutting area 21 as described above. Here, by operating the exhaust portion 54 of the second suction portion 49, a downward suction force is applied to the first glass film G1 on the second supporting surface 48 through the second suction port 51 and the pair of third suction ports 52, 52 opened in the second supporting surface 48, and the first glass film G1 is sucked toward the second supporting surface 48. Thus, the first glass film G1 is transported along the transport direction X while being supported by the second supporting surface 48 in contact with it. Furthermore, depending on the degree of suction force generated by the second suction unit 49, the sucked portion of the first glass film G1 is deformed (for example, as shown in FIG. 8 , the portions directly above the air inlets 51 and 52 are bent and deformed in a convex downward direction).

再者,此時,由第一抽吸部40產生的抽吸力,例如藉由調整排氣部44的輸出或各開口部(第一吸氣口42、兩端開口部 42a、兩端開口部42a)的形狀、尺寸而控制成適當的大小。同樣地,由第二抽吸部49產生的抽吸力,例如藉由調整排氣部54的輸出或各開口部(第二吸氣口51、第三吸氣口52、及狹縫部57)的形狀、尺寸而控制成適當的大小。 Furthermore, at this time, the suction force generated by the first suction part 40 is controlled to an appropriate size, for example, by adjusting the output of the exhaust part 44 or the shape and size of each opening part (the first air inlet 42, the two-end opening part 42a, and the two-end opening part 42a). Similarly, the suction force generated by the second suction part 49 is controlled to an appropriate size, for example, by adjusting the output of the exhaust part 54 or the shape and size of each opening part (the second air inlet 51, the third air inlet 52, and the slit part 57).

於上文所述的抽吸力的調整上,具有下述傾向,即:若增大抽吸力,則上文所述的第一玻璃膜G1的變形量變大,另一方面,第一玻璃膜G1的上下移動的幅度變小。反之,具有下述傾向,即:若減小抽吸力,則上文所述的變形量變小,另一方面,上下移動的幅度變大。因此,較佳的是在可容許的上下移動的幅度的範圍內盡可能地減小變形量。 In the adjustment of the suction force described above, there is a tendency that if the suction force is increased, the deformation of the first glass film G1 described above becomes larger, while the amplitude of the up and down movement of the first glass film G1 becomes smaller. Conversely, there is a tendency that if the suction force is reduced, the deformation described above becomes smaller, while the amplitude of the up and down movement becomes larger. Therefore, it is better to reduce the deformation as much as possible within the range of the allowable amplitude of the up and down movement.

於切斷步驟S5中,如上述般一面將第一玻璃膜G1抽吸至第一壓盤38的第一支持面39、及第二壓盤47的第二支持面48,一面藉由第二搬運部8(上游側輸送機19)將第一玻璃膜G1於規定的搬運方向X進行搬運,且自雷射照射裝置36的雷射照射部36a對第一玻璃膜G1照射多道雷射光L(雷射照射步驟)。雷射光L照射至第一玻璃膜G1中的通過第二壓盤47的第二吸氣口51上的部分。 In the cutting step S5, as described above, the first glass film G1 is sucked to the first support surface 39 of the first platen 38 and the second support surface 48 of the second platen 47, and the first glass film G1 is transported in a predetermined transport direction X by the second transport section 8 (upstream conveyor 19), and the first glass film G1 is irradiated with a plurality of laser beams L from the laser irradiation section 36a of the laser irradiation device 36 (laser irradiation step). The laser beam L is irradiated to the portion of the first glass film G1 that passes through the second suction port 51 of the second platen 47.

藉由如上文所述的雷射光L的照射,於其照射位置O(參照圖7)將第一玻璃膜G1予以加熱。其後,當第一玻璃膜G1中的經加熱的部分到達位於第二吸氣口51的下游側的冷卻裝置37的正下方時,曝露於自冷卻裝置37向下方噴射的冷媒R中而被冷卻。藉由由雷射照射裝置36的局部加熱所致的膨脹與由冷卻裝置 37的冷卻所致的收縮而於第一玻璃膜G1中產生熱應力。於第一玻璃膜G1,藉由未圖示的機構預先形成有初始裂紋,並利用上述的熱應力使初始裂紋進展,藉此將第一玻璃膜G1於其寬度方向規定位置處連續性地進行切斷(切割)。於本實施形態中,藉由在寬度方向的三處進行上述的雷射切斷,而切掉第一玻璃膜G1的寬度方向兩端部,且切成分別具有規定的寬度方向尺寸的兩片第二玻璃膜G2a、G2b(參照圖2)。所述第二玻璃膜G2a、第二玻璃膜G2b藉由位於較切斷區21更靠搬運方向X的下游側的下游側輸送機20,向位於較下游側輸送機20更靠搬運方向X的下游側的第二捲繞部10搬運。 By irradiation with the laser light L as described above, the first glass film G1 is heated at the irradiation position O (see FIG. 7 ). Thereafter, when the heated portion of the first glass film G1 reaches directly below the cooling device 37 located on the downstream side of the second air intake port 51, it is exposed to the coolant R ejected downward from the cooling device 37 and cooled. Thermal stress is generated in the first glass film G1 by expansion due to local heating by the laser irradiation device 36 and contraction due to cooling by the cooling device 37. An initial crack is formed in advance in the first glass film G1 by a mechanism not shown in the figure, and the initial crack is advanced by the above-mentioned thermal stress, thereby continuously cutting (cutting) the first glass film G1 at a predetermined position in its width direction. In this embodiment, the above-mentioned laser cutting is performed at three locations in the width direction to cut off the two ends of the first glass film G1 in the width direction, and cut into two second glass films G2a and G2b having predetermined width dimensions (see FIG. 2 ). The second glass films G2a and G2b are transported to the second winding section 10 located further downstream in the transport direction X than the downstream conveyor 20 by the downstream conveyor 20 located further downstream in the transport direction X than the cutting section 21.

於第二捲繞步驟S6中,藉由分別配設於規定的位置的捲芯61a、捲芯61b將第二玻璃膜G2a、第二玻璃膜G2b予以捲繞。藉由將規定長度的第二玻璃膜G2a、第二玻璃膜G2b予以捲繞,而可獲得第二玻璃卷GRL2a、第二玻璃卷GRL2b。 In the second winding step S6, the second glass film G2a and the second glass film G2b are wound by the winding cores 61a and 61b respectively arranged at predetermined positions. By winding the second glass film G2a and the second glass film G2b of predetermined length, the second glass roll GRL2a and the second glass roll GRL2b can be obtained.

又,於本實施形態中,於下游側輸送機20與第二捲繞部10之間,配設有作為間隙形成部58的支持輥59a、支持輥59b,因此通過各支持輥59a、支持輥59b上的第二玻璃膜G2一面沿著支持輥59a、支持輥59b的外周面形狀變形(此處為向朝上方凸出的方向灣曲變形)一面被朝下游側搬運。藉此,於剛被切斷後的第二玻璃膜G2a、第二玻璃膜G2b之間形成有規定的寬度方向間隙(參照圖10),因此可避免切斷面彼此的干擾而分別被朝第二捲繞部10搬運。 Furthermore, in this embodiment, support rollers 59a and 59b are provided as gap forming parts 58 between the downstream conveyor 20 and the second winding part 10, so that the second glass film G2 passing through each support roller 59a and 59b is transported toward the downstream side while deforming along the outer peripheral surface shape of the support roller 59a and 59b (here, it is bent and deformed in a direction convex upward). Thereby, a predetermined width direction gap is formed between the second glass films G2a and G2b just after being cut (refer to FIG. 10), so that the interference between the cut surfaces can be avoided and they can be transported toward the second winding part 10 respectively.

如以上所說明般,於本實施形態的玻璃膜(第二玻璃膜G2a、第二玻璃膜G2b)的製造方法中,將作為搬運裝置的第二搬運部8設為包括上游側輸送機19以及下游側輸送機20,所述上游側輸送機19相對而言位於第一玻璃膜G1的搬運方向X的上游側,所述下游側輸送機20位於搬運方向X的下游側,可搬運第二玻璃膜G2a、第二玻璃膜G2b,且使下游側輸送機20包括可藉由第二帶28將第二玻璃膜G2a、第二玻璃膜G2b予以接觸支持的多個下游側帶式輸送機27,並將各下游側帶式輸送機27的第二帶28的位置,設為可於第一玻璃膜G1的寬度方向上予以調整。藉此,無需改變用於搬運第一玻璃膜G1的上游側輸送機19的結構,而可自由地設定第二玻璃膜G2a、第二玻璃膜G2b在寬度方向上與第二帶28的接觸支持位置,因此可根據藉由雷射切斷應取得的第二玻璃膜G2a、第二玻璃膜G2b的寬度方向位置或寬度方向尺寸,將各下游側帶式輸送機27配設於適當的寬度方向位置。因此,藉由最低限度的必要的設備變更,而可避免第二玻璃膜G2a、第二玻璃膜G2b於偏向寬度方向一側的位置與第二帶28接觸的事態,從而可防止由所述接觸位置的偏向引起的第二玻璃膜G2a、第二玻璃膜G2b的斜行等第二玻璃膜G2a、第二玻璃膜G2b的搬運不良。又,若可不斜行地搬運第二玻璃膜G2a、第二玻璃膜G2b,則可盡可能地避免在寬度方向上相鄰的其中一個第二玻璃膜G2a的切斷面(側斷面)干擾另一個第二玻璃膜G2b的切斷面(側斷面)的事態,因此能夠獲得良好的切斷品質的第二玻璃膜G2a、 第二玻璃膜G2b。 As described above, in the manufacturing method of the glass film (second glass film G2a, second glass film G2b) of the present embodiment, the second conveying section 8 as a conveying device is configured to include an upstream conveyor 19 and a downstream conveyor 20. The upstream conveyor 19 is relatively located on the upstream side of the conveying direction X of the first glass film G1, and the downstream conveyor 20 is located on the downstream side of the conveying direction X, and can convey the second glass film G2a and the second glass film G2b. The downstream conveyor 20 includes a plurality of downstream belt conveyors 27 that can contact and support the second glass film G2a and the second glass film G2b through the second belt 28, and the position of the second belt 28 of each downstream belt conveyor 27 is configured to be adjustable in the width direction of the first glass film G1. Thus, the contact and support position of the second glass films G2a and G2b with the second belt 28 in the width direction can be freely set without changing the structure of the upstream conveyor 19 for conveying the first glass film G1, so that each downstream belt conveyor 27 can be arranged at an appropriate width direction position according to the width direction position or width direction size of the second glass films G2a and G2b to be obtained by laser cutting. Therefore, by minimally changing the necessary equipment, it is possible to avoid the second glass films G2a and G2b contacting the second belt 28 at a position deviated to one side in the width direction, thereby preventing conveyance failure of the second glass films G2a and G2b such as the slanting of the second glass films G2a and G2b caused by the deviated contact position. Furthermore, if the second glass films G2a and G2b can be transported without being tilted, the situation where the cut surface (side cross section) of one of the second glass films G2a adjacent to each other in the width direction interferes with the cut surface (side cross section) of the other second glass film G2b can be avoided as much as possible, thereby obtaining the second glass films G2a and G2b with good cut quality.

又,於本實施形態中,在藉由第一玻璃膜G1的切斷,來取得分別具有規定的寬度方向尺寸的多片第二玻璃膜G2a、G2b的情況下,設為根據各第二玻璃膜G2a、第二玻璃膜G2b的寬度方向位置及寬度方向尺寸,來調整第二帶28的位置。藉此,可將第二帶28配置於與所切成的第二玻璃膜G2a、第二玻璃膜G2b各自的位置、大小相適合的位置,因此可避免所切成的全部第二玻璃膜G2a、第二玻璃膜G2b的斜行,而於正確的方向穩定地進行搬運。特別是,於本實施形態中,構成為可根據各第二玻璃膜G2a、第二玻璃膜G2b的寬度方向兩端位置來調整第二帶28的位置,因此可將第二玻璃膜G2a、第二玻璃膜G2b在其寬度方向兩側穩定地予以接觸支持。因此,可抑制第二玻璃膜G2a、第二玻璃膜G2b的搬運時的抖動等變動,而可穩定地對第二玻璃膜G2a、第二玻璃膜G2b進行搬運。 Furthermore, in the present embodiment, when a plurality of second glass films G2a and G2b having predetermined widthwise dimensions are obtained by cutting the first glass film G1, the position of the second ribbon 28 is adjusted according to the widthwise position and widthwise dimension of each of the second glass films G2a and G2b. Thus, the second ribbon 28 can be arranged at a position suitable for the position and size of each of the cut second glass films G2a and G2b, thereby preventing all the cut second glass films G2a and G2b from tilting and stably transporting them in the correct direction. In particular, in this embodiment, the position of the second belt 28 can be adjusted according to the positions of both ends of each second glass film G2a and G2b in the width direction, so that the second glass films G2a and G2b can be stably contacted and supported on both sides in the width direction. Therefore, the vibration and other changes during the transportation of the second glass films G2a and G2b can be suppressed, and the second glass films G2a and G2b can be stably transported.

又,於本實施形態中,設為於較下游側輸送機20更靠第一玻璃膜G1的搬運方向下游側設置間隙形成部58(此處為支持輥59a、支持輥59b),所述間隙形成部58用於在寬度方向相鄰的任意一組第二玻璃膜G2a、G2b之間形成寬度方向間隙。藉此,第二玻璃膜G2a、第二玻璃膜G2b中的通過間隙形成部58的支持輥59a、支持輥59b上的部分向朝上方凸出的方向彎曲變形。因此,如上述般藉由下游側帶式輸送機27接觸支持第二玻璃膜G2a、第二玻璃膜G2b的寬度方向兩端的情況下,亦可避免剛切斷後的第 二玻璃膜G2a、第二玻璃膜G2b彼此的接觸,從而安全地搬運各第二玻璃膜G2a、第二玻璃膜G2b。 Furthermore, in this embodiment, a gap forming portion 58 (here, supporting rollers 59a and 59b) is provided on the downstream side of the downstream conveyor 20 in the conveying direction of the first glass film G1, and the gap forming portion 58 is used to form a gap in the width direction between any pair of second glass films G2a and G2b adjacent to each other in the width direction. As a result, the portions of the second glass films G2a and G2b passing through the gap forming portion 58 on the supporting rollers 59a and 59b are bent and deformed in a direction convex upward. Therefore, when the downstream side belt conveyor 27 supports both ends of the second glass film G2a and the second glass film G2b in the width direction as described above, the second glass film G2a and the second glass film G2b that have just been cut can be prevented from contacting each other, thereby safely transporting each second glass film G2a and the second glass film G2b.

以上,對本發明的玻璃膜的製造方法及製造裝置的第一實施形態進行了說明,但所述製造方法及製造裝置當然可在本發明的範圍內採用任意的形態。 The above describes the first embodiment of the glass film manufacturing method and manufacturing device of the present invention, but the manufacturing method and manufacturing device can of course adopt any form within the scope of the present invention.

圖11表示本發明的玻璃膜的製造方法的第二實施形態。即,於所述第一實施形態中,例示了在自一片第一玻璃膜G1切成兩片第二玻璃膜G2a、第二玻璃膜G2b時應用本發明的情況的結構,但於本實施形態中,例示自一片第一玻璃膜G1切成三片第二玻璃膜G2a、G2b、G2c時應用本發明的情況的結構。即,於本實施形態中,於圖11所示的製造裝置1中,根據切成的第二玻璃膜G2a~第二玻璃膜G2c的寬度方向位置及寬度方向尺寸,來調整下游側帶式輸送機27的寬度方向位置。即,如圖11所示,多個下游側帶式輸送機27構成為可沿著軌道部32於寬度方向上滑動,例如根據第二玻璃膜G2a~第二玻璃膜G2c的寬度方向兩端位置,於寬度方向上調整所述多個下游側帶式輸送機27的第二帶28的位置。 FIG11 shows a second embodiment of the glass film manufacturing method of the present invention. That is, in the first embodiment, the structure of the case where the present invention is applied when a first glass film G1 is cut into two second glass films G2a and G2b is illustrated, but in this embodiment, the structure of the case where the present invention is applied when a first glass film G1 is cut into three second glass films G2a, G2b, and G2c is illustrated. That is, in this embodiment, in the manufacturing apparatus 1 shown in FIG11, the width direction position of the downstream side belt conveyor 27 is adjusted according to the width direction position and width direction size of the cut second glass films G2a to G2c. That is, as shown in FIG. 11 , the plurality of downstream side belt conveyors 27 are configured to slide along the rail portion 32 in the width direction, for example, according to the positions of the two ends of the second glass film G2a to the second glass film G2c in the width direction, the positions of the second belts 28 of the plurality of downstream side belt conveyors 27 are adjusted in the width direction.

又,於本實施形態中,根據第二玻璃膜G2a~第二玻璃膜G2c的寬度方向位置及寬度方向尺寸,來調整第一壓盤38及第二壓盤47的數目及寬度方向位置。又,根據第二玻璃膜G2a~第二玻璃膜G2c的寬度方向位置及寬度方向尺寸,來調整雷射照射裝置36及冷卻裝置37的數目及寬度方向位置。即,雖省略圖示, 但於位置調整後的各第二壓盤47上配置有雷射照射裝置36及冷卻裝置37。 Furthermore, in this embodiment, the number and widthwise position of the first platen 38 and the second platen 47 are adjusted according to the widthwise position and widthwise dimension of the second glass film G2a to the second glass film G2c. Furthermore, the number and widthwise position of the laser irradiation device 36 and the cooling device 37 are adjusted according to the widthwise position and widthwise dimension of the second glass film G2a to the second glass film G2c. That is, although not shown in the figure, the laser irradiation device 36 and the cooling device 37 are arranged on each second platen 47 after the position adjustment.

再者,如圖11所示,在下游側輸送機20與第二捲繞部10之間設置間隙形成部58的情況下,根據第二玻璃膜G2a~第二玻璃膜G2c的寬度方向位置及寬度方向尺寸,將適當的寬度方向尺寸的支持輥59a~支持輥59c分別配置於適當的寬度方向位置。 Furthermore, as shown in FIG. 11 , when a gap forming portion 58 is provided between the downstream conveyor 20 and the second winding portion 10, support rollers 59a to 59c with appropriate width direction dimensions are respectively arranged at appropriate width direction positions according to the width direction positions and width direction dimensions of the second glass films G2a to G2c.

如此般,藉由根據第二玻璃膜G2a~第二玻璃膜G2c的寬度方向位置及寬度方向尺寸,於寬度方向上調整下游側帶式輸送機27的位置,而可在寬度方向上均等的位置對第二玻璃膜G2a進行支持搬運。因此,即便在所切成的第二玻璃膜G2a~第二玻璃膜G2c的片數或寬度方向尺寸變更的情況下,仍可避免於偏向寬度方向一側的位置與第二帶28接觸的事態,從而可防止由所述接觸位置的偏移引起的第二玻璃膜G2a~第二玻璃膜G2c的斜行等的第二玻璃膜G2a~第二玻璃膜G2c的搬運不良。 In this way, by adjusting the position of the downstream side belt conveyor 27 in the width direction according to the width direction position and width direction size of the second glass film G2a~second glass film G2c, the second glass film G2a can be supported and transported at a uniform position in the width direction. Therefore, even if the number of cut second glass films G2a~second glass films G2c or the width direction size changes, it is still possible to avoid the situation where the second glass film G2a~second glass film G2c contacts the second belt 28 at a position biased to one side in the width direction, thereby preventing the second glass film G2a~second glass film G2c from being tilted due to the deviation of the contact position and other poor transport of the second glass film G2a~second glass film G2c.

又,於上述實施形態中,例示了以可將自第一玻璃膜切成的各第二玻璃膜G2a、第二玻璃膜G2b於其寬度方向兩端附近予以接觸支持的方式,將多個下游側帶式輸送機27的位置在寬度方向上予以調整的情況(參照圖2及圖11),當然亦可採用此以外的配置形態。圖12示出其一例(本發明的第三實施形態)。如圖12所示,於本實施形態中,多個下游側帶式輸送機27構成為可沿著軌道部32於寬度方向上滑動,根據第二玻璃膜G2a~第二玻璃膜G2c中的至少一部分第二玻璃膜G2a、第二玻璃膜G2c的寬度 方向中央位置,於寬度方向上將所對應的兩對下游側帶式輸送機27的第二帶28的位置予以調整。 In the above-mentioned embodiment, the positions of the plurality of downstream side belt conveyors 27 are adjusted in the width direction so that the second glass films G2a and G2b cut from the first glass film can be supported in contact near both ends in the width direction (see FIG. 2 and FIG. 11 ), but other configurations may be used. FIG. 12 shows an example (the third embodiment of the present invention). As shown in FIG. 12 , in this embodiment, a plurality of downstream side belt conveyors 27 are configured to slide along the rail portion 32 in the width direction, and the positions of the second belts 28 of the corresponding two pairs of downstream side belt conveyors 27 are adjusted in the width direction according to the central position in the width direction of at least a portion of the second glass films G2a and G2c.

藉由如此般於寬度方向上對下游側帶式輸送機27的位置予以調整,而可將所對應的第二玻璃膜G2a、第二玻璃膜G2c在其寬度方向中央位置予以接觸支持。此種情況下,由於第二玻璃膜G2a、第二玻璃膜G2c彎曲變形成使寬度方向兩端側與寬度方向中央相比更下垂的形狀(朝上方凸出的形狀),因此可在避免剛切斷後的第二玻璃膜G2a(G2c)、第二玻璃膜G2b的切斷面彼此的接觸的情況下,朝下游側搬運各第二玻璃膜G2a~第二玻璃膜G2c。 By adjusting the position of the downstream side belt conveyor 27 in the width direction in this way, the corresponding second glass films G2a and G2c can be contacted and supported at the center position in the width direction. In this case, since the second glass films G2a and G2c are bent and deformed into a shape that makes the two ends in the width direction more drooping than the center in the width direction (a shape that bulges upward), each second glass film G2a to G2c can be transported toward the downstream side while avoiding the contact between the cut surfaces of the second glass films G2a (G2c) and G2b just after cutting.

又,於所述實施形態中,例示了於第一玻璃膜G1的切斷區21配置第二壓盤47,且於在寬度方向上遠離切斷區21的位置配置第一壓盤38的情況,當然並不限定於此。若對雷射切斷不會帶來較大影響,則以支持搬運面通過切斷區21的方式配設第三輸送機(省略圖示),而可省略第一壓盤38與第二壓盤47的至少一者。 Furthermore, in the above-mentioned embodiment, the second press plate 47 is arranged in the cutting area 21 of the first glass film G1, and the first press plate 38 is arranged at a position far from the cutting area 21 in the width direction, but it is of course not limited to this. If it does not bring a significant impact on laser cutting, a third conveyor (omitted from the figure) is arranged in a manner to support the conveying surface passing through the cutting area 21, and at least one of the first press plate 38 and the second press plate 47 can be omitted.

又,搬運裝置(第二搬運部)的支持搬運面,未必一定在搬運方向X上與切斷區21對應的位置處被分割。例如亦可在自切斷區朝搬運方向X的下游側錯開的位置,將第二搬運部8的支持搬運面予以分割。 Furthermore, the supporting conveying surface of the conveying device (second conveying section) is not necessarily divided at the position corresponding to the cutting area 21 in the conveying direction X. For example, the supporting conveying surface of the second conveying section 8 may be divided at a position offset from the cutting area toward the downstream side of the conveying direction X.

再者,於以上的說明中,對在切斷區21中作為搬運裝置的第二搬運部8經分割而成的上游側輸送機19與下游側輸送機 20均包括帶式輸送機的情況進行了例示,當然,亦可採用此以外的形態,例如可使上游側輸送機19包括輥式輸送機及其他各種搬運裝置。 Furthermore, in the above description, the upstream conveyor 19 and the downstream conveyor 20 formed by dividing the second conveying section 8 as a conveying device in the cutting area 21 are exemplified as both comprising belt conveyors. Of course, other forms may be adopted, for example, the upstream conveyor 19 may comprise a roller conveyor and other various conveying devices.

又,於以上的說明中,對自一片第一玻璃膜G1切成兩片(或三片)第二玻璃膜G2a、G2b(G2a~G2c)的情況進行了例示,當然,在切成寬度方向尺寸不同的一片第二玻璃膜G2a的情況下亦可應用本發明,且在切成四片以上的第二玻璃膜G2a...的情況下亦可應用本發明。 In the above description, the case where a first glass film G1 is cut into two (or three) second glass films G2a and G2b (G2a to G2c) is exemplified. Of course, the present invention can also be applied to a case where a second glass film G2a having different dimensions in the width direction is cut, and the present invention can also be applied to a case where a second glass film G2a having more than four dimensions is cut.

又,於以上的說明中,對將本發明應用於藉由第一切斷部5切斷母材玻璃膜G的寬度方向兩端部而獲得的第一玻璃膜G1的情況進行了說明,但亦可將本發明應用於母材玻璃膜G的由第一切斷部5執行的切斷。此種情況下,藉由第一搬運部4採用與圖2等所示的第二搬運部8同樣的結構而可實施本發明。 Furthermore, in the above description, the present invention is applied to the first glass film G1 obtained by cutting both ends of the base glass film G in the width direction by the first cutting section 5, but the present invention can also be applied to the cutting of the base glass film G by the first cutting section 5. In this case, the present invention can be implemented by the first conveying section 4 adopting the same structure as the second conveying section 8 shown in FIG. 2, etc.

又,於以上的說明中,對將本發明應用於形成帶狀的第一玻璃膜G1的情況進行了說明,當然亦可將本發明應用於形成除此以外的形態的第一玻璃膜G1。即,雖省略圖示,但可將本發明應用於矩形形狀等單片狀的板玻璃(玻璃膜)。且,未必一定將切斷而獲得的第二玻璃膜G2a…捲繞成卷狀。換言之,亦可將本發明應用於不捲繞成卷狀的第二玻璃膜G2a…的製造步驟中。 Furthermore, in the above description, the present invention is applied to the case where the first glass film G1 is formed in a strip shape, but of course the present invention can also be applied to the first glass film G1 formed in other shapes. That is, although the illustration is omitted, the present invention can be applied to a single sheet of plate glass (glass film) such as a rectangular shape. Moreover, the second glass film G2a... obtained by cutting does not necessarily have to be wound into a roll. In other words, the present invention can also be applied to the manufacturing step of the second glass film G2a... that is not wound into a roll.

8:第二搬運部(搬運裝置) 8: Second transport unit (transport device)

10:第二捲繞部 10: Second winding section

19:上游側輸送機(輸送機) 19: Upstream conveyor (conveyor)

20:下游側輸送機(輸送機) 20: Downstream conveyor (conveyor)

21:切斷區 21: Cut-off area

22:上游側帶式輸送機(帶式輸送機) 22: Upstream belt conveyor (belt conveyor)

23:帶(第一帶) 23: Belt (first belt)

23a、28a:表面(支持搬運面) 23a, 28a: Surface (supporting transportation surface)

23b、28b:孔 23b, 28b: hole

26、31:驅動源 26, 31: Driving source

27:下游側帶式輸送機(帶式輸送機) 27: Downstream belt conveyor (belt conveyor)

28:帶(第二帶) 28: Belt (Second Belt)

32:軌道部 32:Track Department

33:滑動部 33: Sliding part

34:軸 34: Axis

35:退避空間 35: Retreat space

38:第一壓盤 38: First pressure plate

39:第一支持面 39: First support surface

40:第一抽吸部(抽吸部) 40: First suction unit (suction unit)

47:第二壓盤 47: Second pressure plate

48:第二支持面 48: Second support surface

49:第二抽吸部(抽吸部) 49: Second suction unit (suction unit)

58:間隙形成部 58: Gap forming part

59a、59b:支持輥 59a, 59b: Support roller

61a、61b:捲芯 61a, 61b: Rolling core

A-A:切斷線 A-A: Cutting line

G1:第一玻璃膜(玻璃膜)、一次玻璃膜 G1: First glass film (glass film), primary glass film

G2a、G2b:第二玻璃膜(玻璃膜)、二次玻璃膜 G2a, G2b: Second glass film (glass film), secondary glass film

GRL2a、GRL2b:第二玻璃卷 GRL2a, GRL2b: Second glass roll

X:搬運方向 X: Transportation direction

Claims (12)

一種玻璃膜的製造方法,將帶狀的一次玻璃膜一面利用搬運裝置於規定的方向搬運一面進行切斷,藉此獲得一片或多片二次玻璃膜,所述玻璃膜的製造方法的特徵在於:所述一次玻璃膜的切斷,藉由使用雷射切斷裝置在規定的切斷區對所述一次玻璃膜照射雷射而進行,且所述搬運裝置包括:上游側輸送機,相對而言位於所述一次玻璃膜的搬運方向上游側;以及下游側輸送機,相對而言位於所述一次玻璃膜的搬運方向下游側,能夠搬運所述二次玻璃膜,所述下游側輸送機包括能夠藉由帶將所述二次玻璃膜予以接觸支持的多個下游側帶式輸送機,且各所述下游側帶式輸送機的所述帶的位置,構成為能夠於所述一次玻璃膜的寬度方向上予以調整。 A method for manufacturing a glass film, wherein a strip of primary glass film is transported in a specified direction by a transport device and cut at the same time, thereby obtaining one or more secondary glass films. The method for manufacturing a glass film is characterized in that the cutting of the primary glass film is performed by irradiating the primary glass film with a laser in a specified cutting area using a laser cutting device, and the transport device comprises: an upstream conveyor, which is relatively located at the upstream side of the conveyor. The conveyor is located upstream in the conveying direction of the primary glass film; and a downstream conveyor is relatively located downstream in the conveying direction of the primary glass film, capable of conveying the secondary glass film, the downstream conveyor includes a plurality of downstream belt conveyors capable of contacting and supporting the secondary glass film by belts, and the position of the belt of each downstream belt conveyor is configured to be adjustable in the width direction of the primary glass film. 如請求項1所述的玻璃膜的製造方法,其中所述雷射切斷裝置具有多個雷射照射部,各所述雷射照射部的位置構成為能夠於所述一次玻璃膜的寬度方向上予以調整。 A method for manufacturing a glass film as described in claim 1, wherein the laser cutting device has a plurality of laser irradiation sections, and the position of each of the laser irradiation sections is configured to be adjustable in the width direction of the primary glass film. 如請求項1所述的玻璃膜的製造方法,其中藉由所述一次玻璃膜的切斷,而取得分別具有規定的寬度方向尺寸的多片所述二次玻璃膜,根據各所述二次玻璃膜的寬度方向位置及寬度方向尺寸,來調整所述帶的位置。 A method for manufacturing a glass film as described in claim 1, wherein a plurality of secondary glass films each having a predetermined width dimension are obtained by cutting the primary glass film, and the position of the tape is adjusted according to the width direction position and width direction dimension of each secondary glass film. 如請求項2所述的玻璃膜的製造方法,其中藉由所述一次玻璃膜的切斷,而取得分別具有規定的寬度方向尺寸的多片所述二次玻璃膜,根據各所述二次玻璃膜的寬度方向位置及寬度方向尺寸,分別調整所述帶的位置及所述雷射照射部的位置。 A method for manufacturing a glass film as described in claim 2, wherein a plurality of secondary glass films each having a predetermined widthwise dimension are obtained by cutting the primary glass film, and the position of the band and the position of the laser irradiation portion are adjusted according to the widthwise position and widthwise dimension of each secondary glass film. 如請求項3或請求項4所述的玻璃膜的製造方法,其中根據各所述二次玻璃膜的寬度方向中央位置,來調整所述帶的位置。 A method for manufacturing a glass film as described in claim 3 or claim 4, wherein the position of the belt is adjusted according to the center position in the width direction of each secondary glass film. 如請求項3或請求項4所述的玻璃膜的製造方法,其中根據各所述二次玻璃膜的寬度方向兩端位置,來調整所述帶的位置。 A method for manufacturing a glass film as described in claim 3 or claim 4, wherein the position of the belt is adjusted according to the positions of both ends of each secondary glass film in the width direction. 如請求項3或請求項4所述的玻璃膜的製造方法,其中用於在寬度方向上相鄰的任意一組所述二次玻璃膜之間形成寬度方向間隙的間隙形成部,設置於較所述下游側輸送機更靠所述一次玻璃膜的搬運方向下游側。 A method for manufacturing a glass film as described in claim 3 or claim 4, wherein a gap forming portion for forming a gap in the width direction between any set of the secondary glass films adjacent in the width direction is arranged on the downstream side of the conveying direction of the primary glass film more than the downstream conveyor. 如請求項7所述的玻璃膜的製造方法,其中所述間隙形成部以各所述二次玻璃膜向朝上方凸出的方向彎曲變形的方式,具有與所述二次玻璃膜相同數目的寬度方向中央成為最大徑的桶狀的支持輥。 A method for manufacturing a glass film as described in claim 7, wherein the gap forming portion is formed in such a way that each of the secondary glass films is bent and deformed in a direction convex upward, and has a barrel-shaped support roller having the same number of the secondary glass films as the secondary glass films and having the largest diameter in the center in the width direction. 如請求項1至請求項4中任一項所述的玻璃膜的製造方法,其中所述多個下游側帶式輸送機的至少一部分,構成為能夠將所述二次玻璃膜向所述帶吸附。 A method for manufacturing a glass film as described in any one of claims 1 to 4, wherein at least a portion of the plurality of downstream belt conveyors is configured to be able to adsorb the secondary glass film to the belt. 如請求項1至請求項4中任一項所述的玻璃膜的製造方法,其中所述上游側輸送機包括能夠藉由帶將所述一次玻璃膜予以接觸支持的多個上游側帶式輸送機,且所述多個上游側帶式輸送機中的位於所述一次玻璃膜的寬度方向中央的上游側帶式輸送機,構成為能夠將所述一次玻璃膜向所述帶吸附。 A method for manufacturing a glass film as described in any one of claims 1 to 4, wherein the upstream conveyor includes a plurality of upstream belt conveyors capable of contacting and supporting the primary glass film with a belt, and the upstream belt conveyor located at the center of the width direction of the primary glass film among the plurality of upstream belt conveyors is configured to be able to adsorb the primary glass film to the belt. 一種玻璃卷的製造方法,利用位於較所述下游側輸送機更靠所述搬運方向下游側的捲繞裝置,將利用如請求項1至請求項4中任一項所述的玻璃膜的製造方法而獲得的二次玻璃膜捲繞成卷狀,而獲得玻璃卷。 A method for manufacturing a glass roll, using a winding device located on the downstream side of the conveying direction relative to the downstream conveyor, to wind the secondary glass film obtained by the method for manufacturing a glass film as described in any one of claim 1 to claim 4 into a roll, thereby obtaining a glass roll. 一種玻璃膜的製造裝置,用於將帶狀的一次玻璃膜一面於規定的方向搬運一面進行切斷,藉此獲得一片或多片二次玻璃膜,所述玻璃膜的製造裝置的特徵在於包括:搬運裝置,能夠將所述一次玻璃膜於規定的方向進行搬運;以及雷射切斷裝置,能夠對由所述搬運裝置搬運的所述一次玻璃膜照射雷射,而於規定的切斷區進行切斷,所述搬運裝置包括:上游側輸送機,相對而言位於所述一次玻璃膜的搬運方向上游側;以及下游側輸送機,相對而言位於所述一次玻璃膜的搬運方向下游側,能夠搬運所述二次玻璃膜,所述下游側輸送機包括能夠藉由帶將所述二次玻璃膜予以接觸支持的多個下游側帶式輸送機,且 各所述下游側帶式輸送機的所述帶的位置,構成為能夠於所述一次玻璃膜的寬度方向上予以調整。 A glass film manufacturing device is used to transport a strip of primary glass film in a specified direction and cut it at the same time, thereby obtaining one or more secondary glass films. The glass film manufacturing device is characterized by comprising: a transport device capable of transporting the primary glass film in a specified direction; and a laser cutting device capable of irradiating the primary glass film transported by the transport device with a laser to cut it at a specified cutting area. The transport device comprises: an upstream A side conveyor is relatively located on the upstream side of the conveying direction of the primary glass film; and a downstream side conveyor is relatively located on the downstream side of the conveying direction of the primary glass film, capable of conveying the secondary glass film, the downstream side conveyor includes a plurality of downstream side belt conveyors capable of contacting and supporting the secondary glass film by belts, and the position of the belt of each downstream side belt conveyor is configured to be adjustable in the width direction of the primary glass film.
TW109145196A 2019-12-24 2020-12-21 Glass film manufacturing method, glass roll manufacturing method, and glass film manufacturing device TWI844755B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-232570 2019-12-24
JP2019232570A JP7365002B2 (en) 2019-12-24 2019-12-24 Glass film manufacturing method and glass film manufacturing device

Publications (2)

Publication Number Publication Date
TW202138320A TW202138320A (en) 2021-10-16
TWI844755B true TWI844755B (en) 2024-06-11

Family

ID=

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019049646A1 (en) 2017-09-08 2019-03-14 日本電気硝子株式会社 Method for producing glass film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019049646A1 (en) 2017-09-08 2019-03-14 日本電気硝子株式会社 Method for producing glass film

Similar Documents

Publication Publication Date Title
JP6924379B2 (en) Glass film manufacturing method
JP6631838B2 (en) Method and apparatus for manufacturing glass sheet, and apparatus for transporting glass sheet
KR101751368B1 (en) Method for cutting glass film
TWI844755B (en) Glass film manufacturing method, glass roll manufacturing method, and glass film manufacturing device
TWI735753B (en) Manufacturing method of glass film
TWI846994B (en) Glass film manufacturing method, glass roll manufacturing method and glass film manufacturing device
JP7365002B2 (en) Glass film manufacturing method and glass film manufacturing device
JP5953092B2 (en) Strip glass cutting method and cutting apparatus
WO2021131559A1 (en) Glass film production method, glass roll production method, and glass film production device
WO2021140826A1 (en) Glass film production method and glass film production device
WO2021141022A1 (en) Glass film manufacturing method and glass film manufacturing device
WO2022070814A1 (en) Production method for glass roll
WO2022113885A1 (en) Method for manufacturing glass roll
WO2023228788A1 (en) Production method for glass film, and production device for glass film
WO2021149519A1 (en) Method for producing glass film
JP7450851B2 (en) Glass film manufacturing method