TWI843378B - Pick-and-place tool, testing system with the same and testing method - Google Patents

Abstract

The present disclosure relates to a pick-and-place tool, a testing system with the same and a testing method. The pick-and-place tool includes a first suction nozzle and a second suction nozzle. The first suction nozzle is configured to pick up a workpiece loaded on a first loading apparatus. The second suction nozzle is configured to pick up the workpiece from the first loading apparatus when the workpiece cannot be picked up by the first suction nozzle.

Description

Pick-and-place tool, test system having the same, and test method

The present invention relates to a pick-and-place tool, a testing system and a testing method having the same, and in particular, can eliminate workpieces that cannot be normally picked up or placed.

The manufacture of a product or the assembly of some device often involves the handling of workpieces (e.g., components to be assembled). Specifically, these workpieces need to be transported between different locations (such as assembly stations, inspection stations, packaging stations, or shipping units) as they go through the manufacturing process. In modern automated or semi-automated manufacturing, this workpiece handling is often accomplished by robotic arms. Large numbers of components can be handled in parallel. For example, electronic components are often transported in molded matrix carriers (e.g., JEDEC trays). The electronic components are positioned in recesses or cells of the tray. Placing components into recesses or extracting components from recesses to transfer them to a different location (i.e., for inspection or assembly) is often accomplished by pick-and-place robotic arms. A pick-and-place robot arm usually includes one or more so-called pick-and-place tools, which can extract an electronic component from a recess in a tray and also place an electronic component into a recess in a tray. The pick-and-place tool often uses a vacuum nozzle to extract and place the electronic component.

However, when the vacuum nozzle of the pick-and-place tool is used to pick up the electronic components from the tray and correctly place the picked up electronic components on the transport carrier, the control stability or positioning accuracy of the mechanism (such as a robot arm) is often poor, or the electronic components are already skewed when they are delivered, which causes the vacuum nozzle of the pick-and-place tool to be unable to normally pick up the electronic components from the tray or to be unable to correctly place the electronic components on the transport carrier. This will cause the system equipment to stop operating, thereby causing a loss of productivity.

In some embodiments, the present disclosure provides a pick-and-place device, which includes: a first suction nozzle and a second suction nozzle. The first suction nozzle is configured to suck a workpiece located on a first carrier, and the second suction nozzle is configured to suck the workpiece from the first carrier when the workpiece cannot be sucked from the first carrier by the first suction nozzle.

In some embodiments, the present disclosure provides a pick-and-place device, which includes: a first suction nozzle and a second suction nozzle. The first suction nozzle is configured to place a workpiece on a second carrier, and the second suction nozzle is configured to pick up the workpiece from the second carrier when the workpiece cannot be correctly placed on the second carrier by the first suction nozzle.

In some embodiments, the present disclosure provides a testing system, which includes a first carrier, a second carrier, a recovery device, and a pick-and-place tool. The second carrier is separated from the first carrier, and the recovery device is separated from the first carrier and the second carrier, and is configured to store a workpiece. The pick-and-place tool is configured to suck the workpiece from the first carrier and place it on the second carrier, and to suck the workpiece from the first carrier and place it on the recovery device.

In some embodiments, the present disclosure provides a testing method, which includes: a first step, including using a pick-and-place tool to pick up a workpiece at a first position and place it on a testing device; and a second step, including using the pick-and-place tool to pick up the workpiece that cannot be picked up from the first position and place it to a second position.

The above has been a fairly broad overview of the technical features of the present disclosure, so that the detailed description of the present disclosure below can be better understood. Other technical features that constitute the subject matter of the patent application scope of the present disclosure will be described below. Those with ordinary knowledge in the technical field to which the present disclosure belongs should understand that the concepts and specific embodiments disclosed below can be easily used to modify or design other structures or processes to achieve the same purpose as the present disclosure. Those with ordinary knowledge in the technical field to which the present disclosure belongs should also understand that such equivalent constructions cannot deviate from the spirit and scope of the present disclosure as defined by the attached patent application scope.

1: Vacuum pick-and-place tool

1': Vacuum pick and place tool

1": Vacuum pick and place tool

2: Material feeding device

3: Transport vehicle

4: Test equipment

5: Temporary storage device

6: Material discharging and carrying device

9: Workpiece

10: Subject

11: Vacuum nozzle

11-1: Vacuum nozzle

11-2: Vacuum nozzle

13: Vacuum/air supply line

15: Recycling nozzle

15-1: Recycling nozzle

15-2: Recycling nozzle

17: Vacuum/air supply line

21: Feeding machine arm

41: Testing the machine arm

61: Discharging robot arm

90: Vehicles

91: Surface

92: Groove

100:Test system

110: Tube body

111: Internal pipeline

113: Nozzle piece

150: Tube body

151: Internal pipeline

153: Suction hood

153-1: Suction hood

153-2: Suction hood

157: Detection device

1530:Ventilation hole

1530-1: Ventilation hole

1530-2: Ventilation hole

1531:Hood

1531-1: Shield

1531-2: Shield

The following embodiments, together with the accompanying drawings, will provide a better understanding of the present disclosure. It should be noted that, in accordance with standard industry practice, the various features are not drawn to scale. In fact, for the sake of clarity, the sizes of the various features may be arbitrarily enlarged or reduced.

FIG. 1A is a schematic diagram of a vacuum pick-and-place tool according to an embodiment of the present disclosure.

FIG. 1B is a schematic bottom view of a vacuum pick-and-place tool according to an embodiment of the present disclosure.

FIG2A is a schematic cross-sectional view of a vacuum nozzle of a vacuum pick-and-place tool according to an embodiment of the present disclosure.

FIG2B is a cross-sectional schematic diagram of a vacuum nozzle sucking a workpiece according to an embodiment of the present disclosure.

FIG3A is a schematic cross-sectional view of a recovery nozzle of a vacuum pick-and-place tool according to an embodiment of the present disclosure.

FIG. 3B is a schematic diagram of a bottom view of the recovery nozzle of the vacuum pick-and-place tool according to an embodiment of the present disclosure.

FIG. 3C is a schematic diagram of a top view of a recovery nozzle of a vacuum pick-and-place tool according to an embodiment of the present disclosure.

FIG3D is a cross-sectional schematic diagram of a recovery nozzle sucking a workpiece according to an embodiment of the present disclosure.

FIG3E is a schematic diagram of a recovery nozzle sucking a workpiece according to an embodiment of the present disclosure from a bottom view.

FIG. 3F is a schematic diagram of a recovery nozzle sucking a workpiece according to an embodiment of the present disclosure from a bottom view.

FIG4 is a schematic diagram of a test system according to an embodiment of the present disclosure.

FIG5A is a flow chart showing the execution steps of the test system according to an embodiment of the present disclosure.

FIG5B is a flowchart showing the execution steps of the test system according to the embodiment of the present disclosure.

In order to understand the purpose, features and effects of the present invention, the following specific embodiments are used in conjunction with the illustrations to explain the present disclosure in detail.

FIG. 1A is a schematic diagram of a vacuum pick-and-place tool 1 according to an embodiment of the present disclosure. As shown in FIG. 1A , the vacuum pick-and-place tool 1 has a main body 10 and a plurality of vacuum nozzles 11. In some embodiments of the present disclosure, the main body 10 of the vacuum pick-and-place tool 1 is assembled with a robot arm or other transmission mechanism so that the vacuum pick-and-place tool 1 can move in the X, Y and Z axis directions. The plurality of vacuum nozzles 11 are connected to a vacuum supply device (not shown) through a vacuum/degassing supply pipeline (not shown), so that the vacuum supply device can apply vacuum to the vacuum nozzle 11 so that the vacuum nozzle 11 can absorb and extract the workpiece. In some embodiments of the present disclosure, the plurality of vacuum nozzles 11 can be connected to a single vacuum supply device. In some embodiments of the present disclosure, each of the plurality of vacuum nozzles 11 is independently connected to a respective vacuum supply device. In other words, the vacuum nozzle 11 is a pick-up component of the vacuum pick-and-place tool 1, which can be configured to pick up workpieces.

In some embodiments of the present disclosure, the vacuum access tool 1 can use multiple vacuum nozzles 11 to simultaneously pick up or place a workpiece. In some embodiments of the present disclosure, the vacuum access tool 1 can use a single vacuum nozzle 11 to pick up or place a workpiece.

Referring to FIG. 1A , the vacuum pick-and-place tool 1 has a recovery nozzle 15. The recovery nozzle 15 is connected to the vacuum supply device through a vacuum/deflation supply line, so that the vacuum supply device can establish a negative pressure on the recovery nozzle 15 to apply a vacuum, so that the recovery nozzle 15 can adsorb and extract the workpiece. In other words, the recovery nozzle 15 is another pick-up part of the vacuum pick-and-place tool 1, which can be configured to pick up the workpiece.

In some embodiments of the present disclosure, the structure of the recovery nozzle 15 is different from that of the vacuum nozzle 11. In some embodiments of the present disclosure, the recovery nozzle 15 and the vacuum nozzle 11 are not connected to each other. In some embodiments of the present disclosure, the vacuum supply device connected to the recovery nozzle 15 is different from the vacuum supply device connected to the vacuum nozzle 11.

In some embodiments of the present disclosure, the vacuum access tool 1 can be driven by a transmission mechanism such as a robot arm to move in the X and Y directions, and the vacuum nozzle 11 and the recovery nozzle 15 can be moved in the Z direction respectively.

FIG. 1B is a schematic bottom view of a vacuum pick-and-place tool 1 according to an embodiment of the present disclosure. Referring to FIG. 1B , the vacuum nozzle 11 of the vacuum pick-and-place tool 1 has a plurality of vacuum nozzles 11-1 arranged in a row along a line L1 and a plurality of vacuum nozzles 11-2 arranged in a row along a line L2. The line L1 and the line L2 are substantially parallel to each other, the plurality of vacuum nozzles 11-1 are spaced apart and aligned with each other, and the plurality of vacuum nozzles 11-2 are spaced apart and aligned with each other. In some embodiments of the present disclosure, the vacuum pick-and-place tool 1 has four vacuum nozzles 11-1 and four vacuum nozzles 11-2, and the vacuum nozzles 11-1 are aligned with each other in a direction perpendicular to the line L1 or the line L2. In some embodiments of the present disclosure, a distance between the vacuum nozzle 11-1 or the vacuum nozzle 11-2 closest to a side 101 of the main body 10 of the vacuum pick-and-place tool 1 and the side 101 of the main body 10 is smaller than a distance between the vacuum nozzle 11-1 or the vacuum nozzle 11-2 closest to a side 102 of the main body 10 of the vacuum pick-and-place tool 1 and the side 102 of the main body 10, wherein the side 101 and the side 102 of the main body 10 are opposite to each other.

Referring again to FIG. 1B , the recovery nozzle 15 of the vacuum pick-and-place tool 1 is generally disposed near the side 102 of the main body 10; in some embodiments of the present disclosure, the recovery nozzle 15 is generally disposed between the side 102 of the main body 10 and the vacuum nozzle 11-1 or the vacuum nozzle 11-2 of the side 102 of the main body 10 closest to the vacuum pick-and-place tool 1. In some embodiments of the present disclosure, when viewed in a direction perpendicular to the line L1 or the line L2, the recovery nozzle 15 at least partially overlaps with the vacuum nozzle 11-1 or the vacuum nozzle 11-2. In some embodiments of the present disclosure, when viewed in a direction perpendicular to the line L1 or the line L2, the centroid C1 of the recovery nozzle 15 does not overlap with the vacuum nozzle 11-1 or the vacuum nozzle 11-2. In some embodiments of the present disclosure, a distance between the recovery nozzle 15 and the line L1 is smaller than a distance between the recovery nozzle 15 and the line L2. In some embodiments of the present disclosure, a distance D1 between the centroid C1 of the recovery nozzle 15 and the line L1 is smaller than a distance D2 between the centroid C2 of the recovery nozzle 15 and the line L2.

FIG2A is a cross-sectional schematic diagram of a vacuum nozzle 11 of a vacuum pick-and-place tool 1 according to an embodiment of the present disclosure. As shown in FIG2A , the vacuum nozzle 11 has a tube body 110, an internal pipeline 111 located in the tube body 110, and a nozzle piece 113 in fluid communication with the internal pipeline 111; wherein the internal pipeline 111 is coupled to a vacuum supply device via a vacuum/deflation supply line 13. In some embodiments of the present disclosure, the nozzle piece 113 has a nozzle valve.

FIG. 2B shows an embodiment of a vacuum nozzle 11 sucking a workpiece 9 from a surface 91 of a carrier 90. In some embodiments of the present disclosure, the workpiece 9 includes a die, an electronic component, or a chip. In some embodiments of the present disclosure, the carrier 90 includes a carrier or a tray. Referring to FIG. 2B , the nozzle piece 113 of the vacuum nozzle 11 is in physical contact with the upper surface of the workpiece 9. When the contact occurs, the vacuum supply device applies vacuum to the internal pipeline 111 of the vacuum nozzle 11, thereby fixing the workpiece 9 to the nozzle piece 113 of the vacuum nozzle 11. The vacuum supply device applies vacuum to the internal pipeline 111 of the vacuum nozzle 11 through the vacuum/degassing supply line 13 to form a vacuum path, and the strength of the vacuum causes the workpiece 9 in physical contact with the nozzle piece 113 of the vacuum nozzle 11 to be sucked by the nozzle piece 113.

The theoretical calculation method of the suction force of the vacuum suction nozzle 11 is to multiply the negative pressure by the area of the suction nozzle part 113 (and its valve). In the operation of the embodiment disclosed in the present invention, after the suction nozzle piece 113 of the vacuum suction nozzle 11 pre-contacts the workpiece 9 for initial positioning, the vacuum supply device is turned on to generate negative pressure for the vacuum suction nozzle 11, so that the workpiece 9 will be directly adsorbed at the original contact position after the negative pressure is generated, so that the coordinate position of the workpiece 9 after adsorption will not deviate from the coordinates of the position where it was originally placed, and ensure that the placement coordinates after the move are correct; in addition, after the workpiece 9 is adsorbed by the vacuum suction nozzle 11, the workpiece 9 can close the suction nozzle piece 113 to completely block the internal pipeline 111 from the outside, so that the adsorption can be completed with a small flow of negative pressure, and the gas flow used for a single vacuum suction nozzle 11 can also be saved. Negative pressure can be generated for multiple vacuum suction nozzles 11 at the same time within a limited flow, which can reduce operation and equipment costs and improve productivity. Therefore, the suction nozzle 113 of the vacuum suction nozzle 11 must be smaller than the workpiece 9 to be sucked, and the suction nozzle 113 of the vacuum suction nozzle 11 must be accurate when contacting the workpiece 9 and must not exceed the surface range of the workpiece 9, that is, the effective suction range of the vacuum suction nozzle 11 is smaller than the projection area of the workpiece 9, so as to prevent the vacuum suction nozzle 11 from sucking other adjacent workpieces 9; in addition, the workpiece 9 must be located in a predetermined waiting position before being sucked by the vacuum suction nozzle 11 and must not be offset, otherwise the suction nozzle 113 of the vacuum suction nozzle 11 cannot actually make physical contact with the upper surface of the workpiece 9.

When the workpiece 9 is to be released, the vacuum supply device can be turned off to release the vacuum (negative pressure) state of the vacuum nozzle 11, so that the workpiece 9 can be separated from the vacuum nozzle 11 without further moving the workpiece 9 by other means.

FIG3A is a schematic cross-sectional view of the recovery nozzle 15 of the vacuum pick-and-place tool according to an embodiment of the present disclosure. As shown in FIG3A , the recovery nozzle 15 has a tube body 150, an internal pipeline 151 located in the tube body 150, and a suction hood 153 in fluid communication with the internal pipeline 151; wherein the internal pipeline 151 is coupled to the vacuum supply device via the vacuum/deflation supply pipeline 17. In addition, the suction hood 153 has a plurality of vents 1530 located on its inner upper surface, and is in fluid communication with the vacuum/deflation supply pipeline 17. In some embodiments of the present disclosure, the cover body 1531 of the suction hood 153 has an elastically compressible material, such as airtight sponge, foam, rubber, etc. In some embodiments of the present disclosure, a detection device 157 is signal-connected to the recovery nozzle 15. In some embodiments of the present disclosure, the detection device 157 includes a pressure detection device.

FIG. 3B is a schematic diagram of a recycling nozzle 15-1 in an embodiment of the present disclosure, wherein the recycling nozzle 15-1 has a structure that is the same as or similar to the recycling nozzle 15 shown in FIG. 3A; in other words, the recycling nozzle 15-1 shown in FIG. 3B is an embodiment of the recycling nozzle 15 shown in FIG. 3A. As shown in FIG. 3B, from a bottom view, the cover 1531-1 of the suction cover 153-1 of the recycling nozzle 15-1 is roughly rectangular, and the cover 1531-1 has a wall thickness. In addition, the suction cover 153-1 of the recycling nozzle 15-1 has a plurality of vents 1530-1, and the vents 1530-1 can be fluidly connected to the internal pipeline 151 shown in FIG. 3A. In some embodiments of the present disclosure, the suction cover 153-1 of the recycling nozzle 15-1 has 13 vents 1530-1.

Referring to FIG. 3B again, the area of the inner wall of the cover 1531-1 of the suction cover 153-1 of the recovery suction nozzle 15-1 is the effective suction range of the recovery suction nozzle 15-1. In the embodiment disclosed in FIG. 3B, the effective suction range of the recovery suction nozzle 15-1 is larger than the projection area of the workpiece 9. Furthermore, the effective suction range of the recovery suction nozzle 15-1 is larger than the effective suction range of the vacuum suction nozzle 11.

FIG. 3C is a schematic diagram of a recycling nozzle 15-2 in an embodiment of the present disclosure, wherein the recycling nozzle 15-2 has a structure that is the same as or similar to the recycling nozzle 15 shown in FIG. 3A; in other words, the recycling nozzle 15-2 shown in FIG. 3C is an embodiment of the recycling nozzle 15 shown in FIG. 3A. As shown in FIG. 3C, from a bottom view, the cover 1531-2 of the suction cover 153-2 of the recycling nozzle 15-2 is roughly circular, and the cover 1531-2 has a wall thickness. In addition, the suction cover 153-2 of the recycling nozzle 15-2 has a plurality of vents 1530-2, and the vents 1530-2 can be fluidly connected to the internal pipeline 151 shown in FIG. 3A. In some embodiments of the present disclosure, the suction cover 153-2 of the recycling nozzle 15-2 has 13 vents 1530-2.

Referring to FIG. 3C again, the area of the inner wall of the cover 1531-2 of the suction cover 153-2 of the recovery suction nozzle 15-2 is the effective suction range of the recovery suction nozzle 15-2. In the embodiment disclosed in FIG. 3C, the effective suction range of the recovery suction nozzle 15-2 is larger than the projection area of the workpiece 9. Furthermore, the effective suction range of the recovery suction nozzle 15-2 is larger than the effective suction range of the vacuum suction nozzle 11.

FIG3D shows an embodiment of the recovery nozzle 15 sucking the workpiece 9 from the surface 91 of a carrier 90. In some embodiments of the present disclosure, the workpiece 9 includes a die, an electronic component or a chip. Referring to FIG3D, the cover 153 of the recovery nozzle 15 covers the workpiece 9 and has no physical contact with the workpiece 9. Subsequently, the vacuum supply device applies negative pressure to the internal pipeline 151 of the recovery nozzle 15, and the vacuum supply device applies vacuum to the internal pipeline 151 of the recovery nozzle 15 through the vacuum/degassing supply line 17 to form a vacuum path, so that the recovery nozzle 15 can suck the workpiece 9.

As shown in FIG. 3D , the inner diameter of the cover 153 of the recovery nozzle 15 is larger than the length and/or width of the workpiece 9, that is, the effective suction range of the recovery nozzle 15 is larger than the area of the workpiece 9; thus, the workpiece 9 does not need to be precisely positioned at a predetermined suction position, and the recovery nozzle 15 can still suck the workpiece 9; in other words, even if the workpiece 9 is offset relative to the predetermined suction position, the suction cover 153 of the recovery nozzle 15 can still cover the workpiece 9 and effectively suck it.

Furthermore, since the suction cover 153 of the recovery nozzle 15 covers the workpiece 9, the recovery nozzle 15 does not have physical contact with the workpiece 9. Therefore, after the vacuum supply device applies negative pressure to the recovery nozzle 15 to absorb the workpiece 9, the coordinate position of the workpiece 9 after being absorbed by the recovery nozzle 15 may be different from its original coordinate position on the carrier 90; therefore, after the workpiece 9 is absorbed and placed by the recovery nozzle 15, when the vacuum is released, its position after being placed cannot be accurately controlled.

Furthermore, when the suction hood 153 of the recovery nozzle 15 covers the workpiece 9 and presses against the surface 91 of the carrier 9, since the carrier 90 may have a groove 92, a gap exists between the suction hood 153 and the groove 92 of the carrier 90, so that the interior of the suction hood 153 can be connected to an external fluid such as air located outside the recovery nozzle 15. In this way, when the vacuum supply device applies negative pressure to the recovery nozzle 15, the air flow can only flow from the outside of the suction hood 153 through the gap into the inside of the suction hood 153 to form a negative pressure, so that the workpiece 9 can be sucked by the recovery nozzle 15. As described above, the cover body 1531 of the suction cover 153 has a material that can be elastically compressed, and in some embodiments of the present disclosure, the surface 91 of the carrier 90 has a groove 92, so when the suction cover 153 wants to suck the workpiece 9 on the carrier 90 and presses down to the surface of the carrier 90, air will flow from the outside of the suction cover 153 through the gap between the groove 92 of the carrier 90 and the suction cover 153 into the inside of the suction cover 153 to form a negative pressure, so that the recovery nozzle 15 can suck the workpiece 9 on the carrier 90. Based on the above, it can be understood that in the process of the recovery nozzle 15 sucking the workpiece 9, the internal pipeline 151 of the recovery nozzle 15 is connected to the external fluid of the recovery nozzle 15 (the suction cover 153).

Furthermore, after the recovery nozzle 15 absorbs the workpiece 9, the workpiece 9 will be sucked and pressed against the inner upper surface of the suction cover 153; and when the workpiece 9 is sucked on the inner upper surface of the suction cover 153, the workpiece 9 may cover part of the vent 1530 of the recovery nozzle 15 and expose part of the vent 1530 (see Figures 3E and 3F); thus, it can be understood that even if the workpiece 9 has been sucked on the inner upper surface of the suction cover 153, the internal pipeline 151 of the recovery nozzle 15 will still be connected to the external fluid of the recovery nozzle 15 (the suction cover 153) through the vent 1530 not blocked by the workpiece 9.

As described above, during the process of the recovery nozzle 15 sucking the workpiece 9 and after the workpiece 9 is sucked, the internal pipe 151 of the recovery nozzle 15 will be connected to the external fluid of the recovery nozzle 15 (the suction cover 153), so that the vacuum supply device needs to apply a large flow of vacuum pressure to the recovery nozzle 15 to complete the adsorption of the workpiece 9. In some embodiments of the present disclosure, the vacuum pressure flow provided by the recovery nozzle 15 is greater than the vacuum pressure flow provided by the vacuum nozzle 11. In other words, the suction force provided by the recovery nozzle 15 is greater than the suction force provided by the vacuum nozzle 11, or the negative pressure that the recovery nozzle 15 can establish is greater than the negative pressure that the vacuum nozzle 11 can establish, or the negative pressure established by the recovery nozzle 15 is greater than the negative pressure established by the vacuum nozzle 11.

In addition, after the recovery nozzle 15 absorbs the workpiece 9, the workpiece 9 will be adsorbed on the upper surface of the interior of the suction cover 153 and cover part or all of the vent 1530. After the vent 1530 is covered, the internal pressure of the internal pipeline 151 of the recovery nozzle 15 will change. In this way, when the detection device 157 connected to the recovery nozzle 15 detects that the internal pressure of the internal pipeline 151 of the recovery nozzle 15 has changed, it can be confirmed that the recovery nozzle 15 has absorbed the workpiece 9.

FIG. 3E shows an embodiment of the recovery nozzle 15-1 sucking the workpiece 9 of one embodiment of the present disclosure. Referring to FIG. 3E, the cover 1531-1 of the suction cover 153-1 of the recovery nozzle 15-1 is roughly rectangular and has a plurality of vents 1530-1. In some embodiments of the present disclosure, the number and arrangement of the vents 1530-1 of the suction cover 153-1 of the recovery nozzle 15-1 are configured so that when more than half of the vents 1530-1 are covered by the workpiece 9 sucked by the recovery nozzle 15-1, the detection device 157 shown in FIG. 3D can detect the internal pressure change of the internal pipeline of the recovery nozzle 15-1 (such as the internal pipeline 151 of FIG. 3D), thereby confirming that the recovery nozzle 15-1 has completely sucked the workpiece 9.

FIG. 3F shows an embodiment of the recovery nozzle 15-2 sucking the workpiece 9 of one embodiment of the present disclosure. Referring to FIG. 3F, the cover 1531-2 of the suction cover 153-2 of the recovery nozzle 15-2 is roughly circular and has a plurality of vents 1530-2. In some embodiments of the present disclosure, the number and arrangement of the vents 1530-2 of the suction cover 153-2 of the recovery nozzle 15-2 are configured so that when more than half of the vents 1530-2 are covered by the workpiece 9 sucked by the recovery nozzle 15-2, the detection device 157 shown in FIG. 3D can detect the internal pressure change of the internal pipeline (such as the internal pipeline 151 in FIG. 3D) of the recovery nozzle 15-2, thereby confirming that the recovery nozzle 15-2 has completely sucked the workpiece 9.

FIG4 is a schematic diagram of a test system 100 according to an embodiment of the present disclosure. The test system 100 includes a vacuum pick-and-place tool 1, 1', 1", a feed carrier 2, a feed machine arm 21, a transport carrier 3, a test device 4, a test machine arm 41, a temporary storage device 5, a discharge carrier 6 and a discharge machine arm 61. In some embodiments of the present disclosure, the feed carrier 2, the transport carrier 3, the test device 4, the temporary storage device 5 and the discharge carrier 6 are separated from each other. In some embodiments of the present disclosure, the feed carrier 2 is separated from the transport carrier 3, and the temporary storage device 5 is separated from the feed carrier 2 and the transport carrier 3.

In some embodiments of the present disclosure, the feed carrier 2 includes a feed carrier tray, and multiple workpieces 9 can be stored in the feed carrier 2 (and the feed carrier tray) in a matrix arrangement. The vacuum pick-and-place tool 1 is configured with the feed robot arm 21, and the feed robot arm 21 is configured to control the vacuum pick-and-place tool 1, such as controlling the vacuum pick-and-place tool 1 to pick up the workpiece 9 from the feed carrier 2, controlling the vacuum pick-and-place tool 1 to move between the feed carrier 2, the transport carrier 3 and the temporary storage device 5, and controlling the vacuum pick-and-place tool 1 to place the workpiece 9 it picks up on the transport carrier 3 or the temporary storage device 5, etc.

Referring to FIG. 2B and FIG. 4 , the feeder robot arm 21 is configured to control the vacuum pick-and-place tool 1 so that the vacuum nozzle 11 of the vacuum pick-and-place tool 1 picks up the workpiece 9 from the feeder carrier 2, then places the workpiece 9 picked up by the vacuum nozzle 11 of the vacuum pick-and-place tool 1 on the transport carrier 3, and then correctly places the workpiece 9 picked up by the vacuum nozzle 11 of the vacuum pick-and-place tool 1 on the transport carrier 3. The vacuum nozzle 11 of the vacuum pick-and-place tool 1 keeps in contact with the workpiece 9 after picking up the workpiece 9 and before placing the workpiece 9 on the transport carrier 3. As described above, the nozzle piece 113 of the vacuum nozzle 11 of the vacuum pick-and-place tool 1 is smaller than the area of the workpiece 9, so the vacuum nozzle 11 of the vacuum pick-and-place tool 1 needs to be accurately and stably controlled to suck the workpiece 9 from the feed carrier 2. If the control accuracy or stability is not good, the vacuum nozzle 11 of the vacuum pick-and-place tool 1 cannot successfully suck the workpiece 9 from the feed carrier 2. Furthermore, the vacuum nozzle 11 of the vacuum pick-and-place tool 1 must also stably and accurately place the sucked workpiece 9 correctly on the transport carrier 3. If the control accuracy or stability is not good, the vacuum nozzle 11 of the vacuum pick-and-place tool 1 cannot place the workpiece 9 correctly on the transport carrier 3. In some embodiments of the present disclosure, the transport carrier 3 has a photo sensor configured to detect whether the workpiece 9 is correctly placed on the transport carrier 3. For example, when the light sensing light is blocked by the workpiece 9, it means that the workpiece 9 is not in the correct position.

Referring to FIG. 1A and FIG. 4 , when the vacuum suction nozzle 11 of the vacuum pick-and-place tool 1 sucks the workpiece 9 from the feed carrier 2 and places it on the transport carrier 3 (see path W1), if there is a workpiece 9 that cannot be sucked by the vacuum suction nozzle 11 of the vacuum pick-and-place tool 1, that is, the suction fails, the vacuum suction nozzle 11 of the vacuum pick-and-place tool 1 will continue to suck the remaining workpieces 9 from the feed carrier 2 and place them on the transport carrier 3 until all the workpieces 9 that can be correctly sucked in the feed carrier 2 are sucked and placed on the transport carrier 3, the vacuum suction nozzle 11 of the vacuum pick-and-place tool 1 will be retracted and the recovery suction nozzle 15 will be activated, and the recovery suction nozzle 15 can suck the workpiece 9 that cannot be successfully sucked by the vacuum suction nozzle 11 of the vacuum pick-and-place tool 1 from the feed carrier 2 and place it in the temporary storage device 5 (see path W2). Thus, once the vacuum suction nozzle 11 of the vacuum pick-and-place tool 1 fails to successfully suck the workpiece 9 from the feed carrier 2 (sucking failure), there is no need to shut down the test system 100 to remove the failed workpieces 9. In some embodiments of the present disclosure, the temporary storage device 5 is a recovery device. The recovery suction nozzle 15 of the vacuum pick-and-place tool 1 keeps in contact with the workpiece 9 after sucking the workpiece 9 and before placing the workpiece 9 in the temporary storage device 5.

When the vacuum nozzle 11 of the vacuum pick-and-place tool 1 places the sucked workpiece 9 on the transport carrier 3, if the vacuum nozzle 11 of the vacuum pick-and-place tool 1 cannot correctly and accurately place the workpiece 9 on the transport carrier 3, the vacuum nozzle 11 of the vacuum pick-and-place tool 1 will be retracted and the recovery nozzle 15 will be activated, and the recovery nozzle 15 can suck the workpiece 9 that is not placed on the transport carrier 3 and place it in the temporary storage device 5 (see path W3). In this way, once the vacuum nozzle 11 of the vacuum pick-and-place tool 1 cannot place the workpiece 9 on the transport carrier 3, there is no need to shut down the test system 100 to exclude those workpieces 9 that are not placed correctly. After the recovery nozzle 15 of the vacuum pick-and-place tool 1 sucks the workpiece 9 and before the workpiece 9 is placed in the temporary storage device 5, it keeps in contact with the workpiece 9.

This can improve productivity, and use the recovery nozzle 15 to remove the workpiece 9 that cannot be sucked by the vacuum nozzle 11 or cannot be placed by the vacuum nozzle 11. Compared with manual removal, it can save personnel time in finding abnormalities and manually removing them.

According to the above, when the vacuum suction nozzle 11 applies negative pressure to the workpiece 9 loaded on the feed carrier 2, it will not contact the feed carrier 2; when the recovery suction nozzle 15 applies negative pressure to the workpiece 9 loaded on the feed carrier 2, it will contact the feed carrier 2. In addition, when the vacuum suction nozzle 11 places the workpiece 9 on the transport carrier 3, it will not contact the transport carrier 3, and when the recovery suction nozzle 15 sucks the workpiece 9 from the transport carrier 3, it will contact the transport carrier 3.

After the workpiece 9 is placed on the transport carrier 3, the transport carrier 3 can be moved to make it close to the testing device 4; as shown in FIG4 , the transport carrier 3 can be moved along the P1 direction so that the workpiece 9 loaded thereon moves from the position close to the feed carrier 2 to the position close to the testing device 4. When the workpiece 9 is moved close to the testing device 4, the testing machine arm 41 will drive the vacuum pick-and-place tool 1' to suck the workpiece 9 from the transport carrier 3 and place the workpiece 9 in the testing device 4 for testing (see path W4). In some embodiments of the present disclosure, the vacuum pick-and-place tool 1' is the same as or similar to the vacuum pick-and-place tool 1, and therefore, the vacuum pick-and-place tool 1' has a vacuum nozzle that is the same as or similar to the vacuum nozzle 11 and a recovery nozzle that is the same as or similar to the recovery nozzle 15. Therefore, the vacuum nozzle of the vacuum pick-and-place tool 1' will pick up the workpiece 9 from the transport carrier 3 and place it in the test device 4. In some embodiments of the present disclosure, the recovery nozzle of the vacuum pick-and-place tool 1' can also pick up the workpiece 9 that is not placed on the transport carrier 3 and place it in the temporary storage device 5 (see path W3). After the vacuum pick-and-place tool 1' picks up the workpiece 9 and before the workpiece 9 is placed in the test device 4 or in the temporary storage device 5, it keeps in contact with the workpiece 9.

After the workpiece 9 is tested in the test device 4, the vacuum nozzle of the vacuum pick-and-place tool 1' will suck the workpiece 9 from the test device 4 and place the workpiece 9 on the transport carrier 3 (see path W5); as mentioned above, the workpiece 9 needs to be correctly placed on the transport carrier 3. If the control accuracy or stability of the test robot 41 is not good, the vacuum nozzle of the vacuum pick-and-place tool 1' will not be able to place the workpiece 9 on the transport carrier 3. If the vacuum nozzle of the vacuum pick-and-place tool 1' cannot correctly and accurately place the workpiece 9 on the transport carrier 3, the vacuum nozzle of the vacuum pick-and-place tool 1' will be retracted and the recovery nozzle will be activated, and the recovery nozzle can suck the workpiece 9 that is not placed on the transport carrier 3 and place it in the temporary storage device 5 (see path W6). In this way, once the vacuum nozzle of the vacuum pick-and-place tool 1' fails to place the workpiece 9 on the transport carrier 3, there is no need to shut down the testing system 100 to remove the workpieces 9 that have not been placed properly.

In some embodiments of the present disclosure, if a workpiece 9 fails to be picked up or placed when the vacuum pick-and-place tool 1' is used to place the workpiece 9 from the transport carrier 3 to the test device 4, the recovery nozzle of the vacuum pick-and-place tool 1' can be used to remove the workpiece 9 that failed to be picked up or placed.

After the tested workpiece 9 is placed on the transport carrier 3, the transport carrier 3 can be moved to be close to the discharge carrier 6. In some embodiments of the present disclosure, the discharge carrier 6 includes a discharge carrier tray; as shown in FIG. 4 , the transport carrier 3 can be moved along the P2 direction so that the workpiece 9 loaded thereon moves from a position close to the testing device 4 to a position close to the discharge carrier 6. When the workpiece 9 is moved to a position close to the discharge carrier 6, the discharge machine arm 61 will drive the vacuum pick-and-place tool 1" to suck the workpiece 9 from the transport carrier 3 and place the workpiece 9 on the discharge carrier 6 (see path W7). In some embodiments of the present disclosure, the vacuum pick-and-place tool 1" is the same as or similar to the vacuum pick-and-place tool 1, so the vacuum pick-and-place tool 1" has a vacuum nozzle that is the same as or similar to the vacuum nozzle 11 and a recovery nozzle that is the same as or similar to the recovery nozzle 15. Therefore, the vacuum nozzle of the vacuum pick-and-place tool 1" will suck the workpiece 9 from the transport carrier 3 and place it on the discharge carrier 6.

In some embodiments of the present disclosure, if a workpiece 9 fails to be sucked or placed when the vacuum pick-and-place tool 1" is used to place the workpiece 9 from the transport carrier 3 to the discharge carrier 6, the recovery nozzle of the vacuum pick-and-place tool 1" can be used to remove the workpiece 9 that failed to be sucked or placed.

FIG. 5A is a flow chart showing the execution steps of the test system 100 according to the embodiment of the present disclosure, including the processing flow when the absorption of goods fails, especially the operation of the path W1 and the path W2 in FIG. 4.

Referring to FIG. 1A, FIG. 4, and FIG. 5A, in step 701, the test system 100 starts to start the test procedure of the workpiece 9. The vacuum nozzle 11 of the vacuum pick-and-place tool 1 starts to suck the workpiece 9 arranged on the feed carrier 2 to place the workpiece 9 loaded on the feed carrier 2 on the transport carrier 3.

In step 702, the vacuum nozzle 11 of the vacuum pick-and-place tool 1 cannot successfully pick up the workpiece 9 from the feed carrier 2 due to poor control stability or positioning accuracy.

In step 703, the vacuum nozzle 11 of the vacuum pick-and-place tool 1 will automatically retry to pick up the workpiece 9 that failed to be picked up successfully.

In step 704, it is determined whether the vacuum suction nozzle 11 can successfully absorb the workpiece 9. If the vacuum suction nozzle 11 can successfully absorb the workpiece 9, it will enter step 709 and the test system 100 will continue the test procedure. If the vacuum suction nozzle 11 still cannot absorb the workpiece 9 after retrying, it will enter step 705, and the vacuum suction nozzle 11 of the vacuum pick-and-place tool 1 will continue to absorb the remaining workpieces 9 still arranged in the feed carrier 2 and place them on the transport carrier 3 until there are no workpieces 9 in the feed carrier 2 that can be absorbed by the vacuum suction nozzle.

Step 704 can reduce the number of pauses of the vacuum suction nozzle 11 to shorten the pause time, thereby improving productivity. Moreover, since the workpieces 9 on the feeding carrier 2 are arranged more densely, the recovery suction nozzle 15 will not suck up the remaining normal workpieces 9 adjacent to the workpiece 9 that cannot be sucked when it is in operation.

Then, in step 706, the recovery nozzle 15 of the vacuum pick-and-place tool 1 will start to pick up the workpiece 9 in the feed carrier 2 that cannot be picked up by the vacuum nozzle 11 of the vacuum pick-and-place tool 1.

In step 707, it is determined whether the recovery nozzle 15 can successfully absorb the workpiece 9. If the recovery nozzle 15 can successfully absorb the workpiece 9 that cannot be absorbed by the vacuum nozzle 11 of the vacuum pick-and-place tool 1 in the feed carrier 2, the process proceeds to step 708, where the recovery nozzle 15 absorbs and places the workpiece 9 in the temporary storage device 5 (see path W2 in FIG. 4 ). On the contrary, if the recovery nozzle 15 cannot successfully absorb the workpiece 9 that cannot be absorbed by the vacuum nozzle 11 of the vacuum pick-and-place tool 1 in the feed carrier 2, the process proceeds to step 710, where the test system 100 issues a warning and stops operating, and then manually removes the workpiece 9. As described above, the detection device 157 shown in FIG. 3D can be used to detect the pressure change of the internal pipeline 151 (see FIG. 3D) inside the recovery nozzle 15 to determine whether the recovery nozzle 15 successfully absorbs the workpiece 9.

When the workpiece 9 that cannot be sucked by the vacuum nozzle 11 of the vacuum pick-and-place tool 1 is sucked by the recovery nozzle 15 and placed in the temporary storage device 5, it will enter step 709 and the test system 100 will continue the test procedure.

Based on the above, it can be understood that if the vacuum nozzle 11 of the vacuum pick-and-place tool 1 fails to successfully pick up the workpiece 9 in the feed carrier 2, the recovery nozzle 15 of the vacuum pick-and-place tool 1 can be used to remove it without shutting down the test system 100 to remove it.

FIG. 5B is a flow chart showing the execution steps of the test system 100 according to the embodiment of the present disclosure, which includes the processing flow for improper delivery, especially the operation of path W1 and path W3 in FIG. 4 .

In step 801, the testing system 100 performs a testing procedure on the workpiece 9. The vacuum nozzle 11 of the vacuum pick-and-place tool 1 places the workpiece 9 sucked from the feed carrier 2 on the transport carrier 3.

In step 802, the vacuum nozzle 11 of the vacuum pick-and-place tool 1 is unable to place the workpiece 9 on the transport carrier 3 due to poor control stability or positioning accuracy.

In step 803, when the transport carrier 3 finds that the workpiece 9 placed thereon is not aligned, the vibrator is activated to try to align the workpiece 9. As described above, the transport carrier 3 may have a photo sensor to determine whether the workpiece 9 placed thereon is aligned.

In step 804, it is determined whether the workpiece 9 has been aligned by the vibrator. If the workpiece 9 can be aligned after the vibrator is activated, the process proceeds to step 809, and the test system 100 continues the test procedure. If the workpiece 9 still cannot be aligned after the vibrator is activated, the process proceeds to step 805.

In step 805, the recovery nozzle 15 of the vacuum pick-and-place tool 1 will start to pick up the workpiece 9 that has not been placed properly on the transport carrier 3.

In step 806, it is determined whether the recovery nozzle 15 can successfully absorb the workpiece 9. If the recovery nozzle 15 can successfully absorb the workpiece 9 that cannot be placed on the transport carrier 3, it will enter step 807, and the recovery nozzle 15 will absorb the workpiece 9 and place it in the temporary storage device 5 (see path W3 in Figure 4). On the contrary, if the recovery nozzle 15 fails to successfully absorb the workpiece 9 that cannot be placed on the transport carrier 3, it will enter step 810, and the test system 100 will issue a warning and stop operating, and then manually remove the workpieces 9. As described above, the detection device 157 shown in Figure 3D can be used to detect the pressure change of the internal pipeline 151 (see Figure 3D) inside the recovery nozzle 15 to determine whether the recovery nozzle 15 successfully absorbs the workpiece 9.

In step 808, the transport carrier 3 can further confirm whether there are still any workpieces 9 that have not been properly placed; as described above, the transport carrier 3 can use a photo sensor to determine whether the workpiece 9 placed on it is properly placed. If there are no workpieces 9 that have not been properly placed on the transport carrier 3, it will enter step 809, and the test system 100 will continue the test procedure. If there are still workpieces 9 that have not been properly placed on the transport carrier 3, it will enter step 810, and the test system 100 will issue a warning and stop operating, and then remove these workpieces 9 manually.

Based on the above, it can be understood that if the vacuum nozzle 11 of the vacuum pick-and-place tool 1 fails to place the workpiece 9 on the transport carrier 3, the recovery nozzle 15 of the vacuum pick-and-place tool 1 can be used to remove it without shutting down the test system 100 to remove it.

The specific structural and functional details disclosed herein are representative only and are for the purpose of describing exemplary embodiments of the present invention. However, the present invention may be embodied in many alternative forms and should not be construed as being limited to only the embodiments described herein.

The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this article, unless otherwise specified, the meaning of "plurality" is two or more. In addition, the term "including" and any variations thereof are intended to cover non-exclusive inclusions.

In addition, for ease of description, spatially relative terms (such as "below", "beneath", "down", "above", "upper", "above" and the like) may be used herein to describe the relationship of one element or component to another element or components, as shown in the figures. In addition to the orientation depicted in the figures, spatially relative terms are also intended to cover different orientations of the device during use or operation. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein may also be interpreted accordingly.

As used herein, the terms "substantially," "substantially," "essentially," and "about" are used to describe and explain small variations. When used in conjunction with an event or condition, the terms may relate to instances in which the event or condition occurred exactly as well as instances in which the event or condition occurred very approximately. For example, when used in conjunction with a numerical value, the terms may relate to a range of variation of less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, two values may be considered "substantially" the same or equal if the difference between them is less than or equal to ±10% of a mean of the values (e.g., less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%). For example, "substantially" parallelism may involve an angular variation of less than or equal to ±10° relative to 0°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°. For example, "substantially" perpendicular may involve an angular variation of less than or equal to ±10° relative to 90°, such as less than or equal to ±5°, less than or equal to ±4°, less than or equal to ±3°, less than or equal to ±2°, less than or equal to ±1°, less than or equal to ±0.5°, less than or equal to ±0.1°, or less than or equal to ±0.05°.

The features of several embodiments have been summarized above so that those skilled in the art can better understand the state of the present disclosure. Those skilled in the art should understand that they can easily use the present disclosure as a basis for designing or modifying other procedures and structures to implement the same purpose and/or achieve the same advantages of the embodiments introduced in this article. Those skilled in the art should also realize that such equivalent structures should not deviate from the spirit and scope of the present disclosure, and that they can make various changes, substitutions and modifications to this article.

1: Pick-and-place tools

10: Subject

11: Vacuum nozzle

15: Recycling nozzle

Claims (18)

A pick-and-place tool includes: a first suction nozzle configured to pick up a workpiece on a first carrier; and a second suction nozzle, wherein the second suction nozzle is configured to pick up the workpiece from the first carrier when the workpiece cannot be picked up from the first carrier by the first suction nozzle; wherein an effective suction range of the first suction nozzle is smaller than a projected area of the workpiece, and an effective suction range of the second suction nozzle is larger than the effective suction range of the first suction nozzle. A pick-and-place tool includes: a first suction nozzle configured to place a workpiece on a second carrier; and a second suction nozzle, wherein the second suction nozzle is configured to pick up the workpiece from the second carrier when the workpiece cannot be correctly placed on the second carrier by the first suction nozzle; wherein an effective suction range of the first suction nozzle is smaller than a projected area of the workpiece, and an effective suction range of the second suction nozzle is larger than the effective suction range of the first suction nozzle. A pick-and-place tool as claimed in claim 1 or 2, wherein the second nozzle can establish a negative pressure greater than the negative pressure that the first nozzle can establish. A pick-and-place tool as claimed in claim 1 or 2, wherein an effective suction range of the second suction nozzle is larger than a projected area of the workpiece. A pick-and-place tool, comprising: a first suction nozzle configured to pick up a workpiece on a first carrier; and a second suction nozzle, wherein the second suction nozzle is configured to pick up the workpiece from the first carrier when the workpiece cannot be picked up from the first carrier by the first suction nozzle; wherein the second suction nozzle is configured to connect a vacuum path in the second suction nozzle to an external fluid around the second suction nozzle during the process of picking up the workpiece. A pick-and-place tool includes: a first suction nozzle configured to place a workpiece on a second carrier; and a second suction nozzle, wherein the second suction nozzle is configured to pick up the workpiece from the second carrier when the workpiece cannot be correctly placed on the second carrier by the first suction nozzle; wherein the second suction nozzle is configured to connect a vacuum path in the second suction nozzle to an external fluid around the second suction nozzle during the process of picking up the workpiece. A testing system includes: a first carrier; a second carrier, which is separated from the first carrier; a recovery device, which is separated from the first carrier and the second carrier, the recovery device is configured to store a workpiece; and a pick-and-place tool, which is configured to suck the workpiece from the first carrier and place it on the second carrier, and suck the workpiece from the first carrier and place it on the second carrier. The recovery device; wherein the pick-and-place tool includes a first suction nozzle configured to pick up the workpiece from the first carrier, and a second suction nozzle configured to pick up the workpiece when the first suction nozzle cannot pick up the workpiece from the first carrier; wherein the first suction nozzle is further configured not to contact the first carrier when a negative pressure is established, and the second suction nozzle is further configured to contact the first carrier when a negative pressure is established. As in the test system of claim 7, the first carrier is formed with a groove with an opening facing upward, so that the interior of the second nozzle can be connected to an external fluid located around the second nozzle through the groove. A testing system includes: a first carrier; a second carrier, which is separated from the first carrier; a recovery device, which is separated from the first carrier and the second carrier, and the recovery device is configured to store a workpiece; and a pick-and-place tool, which is configured to suck the workpiece from the first carrier and place it on the second carrier, and suck the workpiece from the first carrier and place it on the recovery device; wherein the pick-and-place tool includes a third suction nozzle configured to place the workpiece sucked from the first carrier on the second carrier, and a fourth suction nozzle configured to suck the workpiece from the second carrier and place it on the recovery device. A test system as claimed in claim 9, wherein the fourth nozzle is configured to pick up the workpiece that cannot be correctly placed on the second carrier by the third nozzle. A test system as claimed in claim 9, wherein the third nozzle is configured not to contact the second carrier when placing the workpiece, and the fourth nozzle is configured to contact the second carrier when sucking the workpiece. A testing method, comprising: a first step, including using a pick-and-place tool to pick up a workpiece at a first position and place it on a testing device; and a second step, including using the pick-and-place tool to pick up the workpiece that cannot be picked up from the first position and place it on a second position. The test method of claim 12, wherein the second step is performed after the first step is completed. The test method of claim 13, wherein the first position is loaded with a plurality of the workpieces, further comprising repeating the first step until there are no workpieces on the first position that can be picked up by the pick-and-place tool, and then executing the second step. The test method of claim 12, wherein in the first step, the pick-and-place tool is contacted with the workpiece to generate negative pressure to pick up the workpiece, and wherein in the second step, the pick-and-place tool is not contacted with the workpiece to generate negative pressure to pick up the workpiece. As in the test method of claim 15, wherein in the second step, the pick-and-place tool maintains contact with the workpiece after picking up the workpiece and before placing the workpiece. The test method of claim 12, wherein the first step further includes using a first pick-up member of the pick-and-place tool to place the workpiece picked up from the first position to the test device, and wherein the second step further includes using a second pick-up member of the pick-and-place tool to pick up the workpiece that cannot be correctly placed by the first pick-up member from the test device and place it to the second position. The test method of claim 17 further includes sensing the placement status of the workpiece after executing the first step to determine whether to perform the second step.

Images