TWI838751B - Electronic device - Google Patents

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TWI838751B
TWI838751B TW111119085A TW111119085A TWI838751B TW I838751 B TWI838751 B TW I838751B TW 111119085 A TW111119085 A TW 111119085A TW 111119085 A TW111119085 A TW 111119085A TW I838751 B TWI838751 B TW I838751B
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Taiwan
Prior art keywords
substrate
insulating layer
electronic device
layer
disposed
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TW111119085A
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Chinese (zh)
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TW202310694A (en
Inventor
宋立偉
高毓謙
周協利
楊舒涵
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群創光電股份有限公司
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Publication of TW202310694A publication Critical patent/TW202310694A/en
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Publication of TWI838751B publication Critical patent/TWI838751B/en

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Abstract

The present disclosure provide a circuit structure in an electronic device, the circuit structure includes a substrate and a blocking wall. A plurality of wires are disposed on the substrate. The blocking wall is disposed on the substrate and includes a plurality of partitions. In a top view, at least a portion of one of the wires is located between two adjacent ones of the partitions.

Description

電子裝置Electronic devices

本揭露係有關於一種電子裝置,且特別是有關於電子裝置中的一種電路結構。 The present disclosure relates to an electronic device, and in particular to a circuit structure in the electronic device.

在將電路板結合(bonding)到基板的製程中,塗佈在基板及電路板的接觸面的異方性導電膜會容易受到結合刀頭的壓迫而溢出,如此一來,可能會導致導線間的短路。因此,需要一種電路結構來改善現有技術的缺點。 In the process of bonding the circuit board to the substrate, the anisotropic conductive film coated on the contact surface of the substrate and the circuit board is easily pressed by the bonding blade and overflows, which may cause a short circuit between the wires. Therefore, a circuit structure is needed to improve the shortcomings of the existing technology.

本揭露之一些實施例提供一種電子裝置中的電路結構,包括一基板以及一擋牆。複數條導線設置於基板上。擋牆設置於基板上,並包括複數個間隔部。在一俯視圖中,該些導線的其中一者至少有一部分位於該些間隔部之中的相鄰兩者之間。 Some embodiments of the present disclosure provide a circuit structure in an electronic device, including a substrate and a baffle. A plurality of wires are disposed on the substrate. The baffle is disposed on the substrate and includes a plurality of spacers. In a top view, at least a portion of one of the wires is located between two adjacent ones of the spacers.

10:基板 10: Substrate

11:導線 11: Wire

20:電路板 20: Circuit board

21:電路板接墊 21: Circuit board pad

30:擋牆 30:Block

30a:絕緣層 30a: Insulating layer

30a’:絕緣層 30a’: Insulating layer

30b:有機層 30b: Organic layer

30c:金屬層 30c: Metal layer

30d:金屬層 30d: Metal layer

30e:絕緣層 30e: Insulating layer

31:間隔部 31: Partition

32:連接部 32: Connection part

40:接合元件 40:Joint element

40A:導電粒子 40A: Conductive particles

50:驅動元件 50: Driving element

60:堆疊結構 60: Stacked structure

100:電路結構 100: Circuit structure

111:基板接墊 111: Substrate pad

311:容納空間 311: Accommodation space

CP:接觸面 CP: contact surface

D:汲極 D: Drain

D1:基板邊緣延伸方向 D1: Extension direction of substrate edge

D2:法線方向,基板法線方向 D2: Normal direction, substrate normal direction

D3:延伸方向 D3: Extension direction

E1:電極 E1: Electrode

E2:電極 E2: Electrode

G:閘極 G: Gate

GD:間隔距離 GD: Spacing distance

GI:閘極絕緣層 GI: Gate insulation layer

h:擋牆厚度 h: retaining wall thickness

INS1:第一絕緣層 INS1: First insulation layer

INS2:第二絕緣層 INS2: Second insulation layer

INS3:絕緣層 INS3: Insulation layer

INS4:絕緣層 INS4: Insulation layer

INS5:絕緣層 INS5: Insulation layer

INS6:絕緣層 INS6: Insulation layer

INS7:絕緣層 INS7: Insulation layer

OG:有機層 OG: Organic layer

S:源極 S: Source

SM1:半導體層 SM1: semiconductor layer

SM2:突起 SM2: protrusion

本案揭露之各面向可由以下之詳細說明並配合所附圖 式來完整了解。應注意的是,依據在業界的標準做法,各種特徵並未按照比例繪製且僅用以說明例示。事實上,可能任意地放大或縮小元件的尺寸,以清楚地表現出本揭露的特徵。 The various aspects of the present disclosure can be fully understood from the following detailed description in conjunction with the attached drawings. It should be noted that, in accordance with standard practice in the industry, various features are not drawn to scale and are only used for illustration purposes. In fact, the size of the components may be arbitrarily enlarged or reduced to clearly show the features of the present disclosure.

第1圖表示根據本揭露一些實施例之電子裝置的電路結構之示意圖。 Figure 1 is a schematic diagram of the circuit structure of an electronic device according to some embodiments of the present disclosure.

第2圖表示根據本揭露一些實施例之電子裝置的電路結構之示意圖。 Figure 2 is a schematic diagram showing the circuit structure of an electronic device according to some embodiments of the present disclosure.

第3A圖表示本揭露的電子裝置內部堆疊結構的剖面結構示意圖。 Figure 3A shows a schematic diagram of the cross-sectional structure of the internal stacking structure of the electronic device disclosed herein.

第3B圖表示根據本揭露一些實施例之沿著第1圖中A-A’線之電路結構之剖視圖。 FIG. 3B shows a cross-sectional view of the circuit structure along the A-A’ line in FIG. 1 according to some embodiments of the present disclosure.

第4圖表示根據本揭露另一些實施例之沿著第1圖中A-A’線之電路結構之剖視圖。 FIG. 4 shows a cross-sectional view of the circuit structure along the A-A’ line in FIG. 1 according to other embodiments of the present disclosure.

第5圖表示根據本揭露另一些實施例之沿著第1圖中A-A’線之電路結構之剖視圖。 FIG. 5 shows a cross-sectional view of the circuit structure along the A-A’ line in FIG. 1 according to other embodiments of the present disclosure.

第6圖表示根據本揭露另一些實施例之沿著第1圖中A-A’線之電路結構之剖視圖。 FIG. 6 shows a cross-sectional view of the circuit structure along the A-A’ line in FIG. 1 according to other embodiments of the present disclosure.

透過參考以下的詳細描述並同時結合附圖可以理解本揭露,須注意的是,為了使讀者能容易瞭解及圖式的簡潔,本揭露中的多張圖式只繪出顯示裝置的一部份,且圖式中的特定元件並非 依照實際比例繪圖。此外,圖中各元件的數量及尺寸僅作為示意,並非用來限制本揭露的範圍。此外,不同實施例中可能使用類似及/或對應的標號,僅為簡單清楚地敘述一些實施例,不代表所討論之不同實施例及/或結構之間具有任何關連性。 The present disclosure can be understood by referring to the following detailed description and the accompanying drawings. It should be noted that in order to make it easier for readers to understand and the drawings are concise, the multiple drawings in the present disclosure only depict a portion of the display device, and the specific components in the drawings are not drawn according to the actual scale. In addition, the number and size of each component in the figure are only for illustration and are not used to limit the scope of the present disclosure. In addition, similar and/or corresponding reference numerals may be used in different embodiments, which is only for the purpose of simply and clearly describing some embodiments, and does not represent any relationship between the different embodiments and/or structures discussed.

本揭露通篇說明書與後附的權利要求中會使用某些詞彙來指稱特定元件。本領域技術人員應理解,電子設備製造商可能會以不同的名稱來指稱相同的元件。本文並不意在區分那些功能相同但名稱不同的元件。在下文說明書與權利要求書中,「包括」、「含有」、「具有」等詞為開放式詞語,因此其應被解釋為「含有但不限定為…」之意。因此,當本揭露的描述中使用術語「包括」、「含有」及/或「具有」時,其指定了相應的特徵、區域、步驟、操作及/或構件的存在,但不排除一個或多個相應的特徵、區域、步驟、操作及/或構件的存在。 Certain terms are used throughout this disclosure and in the claims that follow to refer to specific components. It should be understood by those skilled in the art that electronic equipment manufacturers may refer to the same component by different names. This document does not intend to distinguish between components that have the same function but different names. In the following description and claims, the words "include", "contain", "have" and the like are open-ended terms and should therefore be interpreted as "including but not limited to..." Therefore, when the terms "include", "contain" and/or "have" are used in the description of this disclosure, they specify the existence of corresponding features, regions, steps, operations and/or components, but do not exclude the existence of one or more corresponding features, regions, steps, operations and/or components.

此外,實施例中可能使用相對性的用語,例如「下方」或「底部」及「上方」或「頂部」,以描述圖式的一個元件對於另一元件的相對關係。能理解的是,如果將圖式的裝置翻轉使其上下顛倒,則所敘述在「下方」側的元件將會成為在「上方」側的元件。 In addition, relative terms such as "below" or "bottom" and "above" or "top" may be used in the embodiments to describe the relative relationship of one element of the diagram to another element. It is understood that if the device of the diagram is turned upside down, the element described on the "below" side will become the element on the "above" side.

當相應的構件(例如元件或膜層或區域)被稱為「在另一個構件上」或「連接到另一個構件」時,它可以直接在另一個構件上或直接連接到另一個構件,或者兩者之間可存在有其他構件。另一方面,當構件被稱為「直接在另一個構件上」或「直接連接另一個構件」時,則兩者之間不存在任何構件。另外,當一構件被稱 為「在另一個構件上」時,兩者在俯視方向上有上下關係,而此構件可在另一個構件的上方或下方,而此上下關係取決於裝置的取向(orientation)。 When a corresponding component (such as an element or a film layer or a region) is referred to as being "on another component" or "connected to another component", it may be directly on another component or directly connected to another component, or other components may exist between the two. On the other hand, when a component is referred to as being "directly on another component" or "directly connected to another component", there is no component between the two. In addition, when a component is referred to as being "on another component", the two have a vertical relationship in the top view direction, and this component may be above or below the other component, and this vertical relationship depends on the orientation of the device.

術語「大約」、「等於」、「相等」或「相同」、「實質上」或「大致上」一般解釋為在所給定的值的20%以內,或所給定的值的10%、5%、3%、2%、1%或0.5%以內的範圍。 The terms "approximately", "equal to", "equal" or "same", "substantially" or "substantially" are generally interpreted as within 20% of a given value, or within a range of 10%, 5%, 3%, 2%, 1% or 0.5% of a given value.

能理解的是,雖然在此可使用用語「第一」、「第二」等來敘述各種元件、層及/或部份,這些元件、層及/或部份不應被這些用語限定,且這些用語僅是用來區別不同的元件、層及/或部份。因此,以下討論的一第一元件、層及/或部份可在不偏離本揭露一些實施例之教示的情況下被稱為一第二元件、層及/或部份。另外,為了簡潔起見,在說明書中亦可不使用「第一」、「第二」等用語來區別不同元件。在不違背後附申請專利範圍所界定的範圍的情況下,申請專利範圍所記載的第一元件及/或第二元件可解讀為說明書中符合敘述的任何元件。 It is understood that although the terms "first", "second", etc. may be used herein to describe various elements, layers and/or parts, these elements, layers and/or parts should not be limited by these terms, and these terms are only used to distinguish different elements, layers and/or parts. Therefore, a first element, layer and/or part discussed below may be referred to as a second element, layer and/or part without departing from the teachings of some embodiments disclosed herein. In addition, for the sake of brevity, the terms "first", "second", etc. may not be used in the specification to distinguish different elements. Without violating the scope defined by the attached patent scope, the first element and/or second element recorded in the patent scope may be interpreted as any element that meets the description in the specification.

在本揭露中,厚度、長度與寬度的量測方式可採用光學顯微鏡量測而得,厚度則可以由電子顯微鏡中的剖面影像量測而得,但不以此為限。 In the present disclosure, the thickness, length and width can be measured by an optical microscope, and the thickness can be measured by a cross-sectional image in an electron microscope, but it is not limited thereto.

須說明的是,下文中不同實施例所提供的技術方案可相互替換、組合或混合使用,以在未違反本揭露精神的情況下構成另一實施例。 It should be noted that the technical solutions provided in the following different embodiments can be replaced, combined or mixed with each other to form another embodiment without violating the spirit of this disclosure.

除非另外定義,在此使用的全部用語(包括技術及科學 用語)具有與此篇揭露所屬之一般技藝者所通常理解的相同涵義。能理解的是這些用語,例如在通常使用的字典中定義的用語,應被解讀成具有一與相關技術及本揭露的背景或上下文一致的意思,而不應以一理想化或過度正式的方式解讀,除非在此特別定義。 Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by a person of ordinary skill in the art to which this disclosure belongs. It is understood that these terms, such as those defined in commonly used dictionaries, should be interpreted to have a meaning consistent with the background or context of the relevant technology and this disclosure, and should not be interpreted in an idealized or overly formal manner unless specifically defined herein.

本揭露的電子裝置可包括顯示裝置、天線裝置、感測裝置,但不以此為限。顯示裝置可如觸控顯示裝置(touch display)、曲面顯示裝置(curved display)、非矩形顯示裝置(free shape display)或可撓式顯示裝置(flexible display),但不以此為限。天線裝置可例如是液晶天線,但不以此為限。前述裝置可通過拼接而形成例如包括拼接顯示裝置或拼接天線裝置,但不以此為限。需注意的是,電子裝置可為前述之任意排列組合,但不以此為限。此外,電子裝置的外型可為矩形、圓形、多邊形、具有彎曲邊緣的形狀或其他適合的形狀。電子裝置可具有驅動系統、控制系統、光源系統、層架系統…等週邊系統以支援電子裝置。下文將以顯示裝置說明本揭露內容,但本揭露的電子裝置類型並不以此為限。 The electronic device disclosed herein may include a display device, an antenna device, and a sensing device, but is not limited thereto. The display device may be, for example, a touch display device, a curved display device, a free shape display, or a flexible display device, but is not limited thereto. The antenna device may be, for example, a liquid crystal antenna, but is not limited thereto. The aforementioned devices may be formed by splicing, for example, including a spliced display device or a spliced antenna device, but is not limited thereto. It should be noted that the electronic device may be any arrangement or combination of the aforementioned, but is not limited thereto. In addition, the appearance of the electronic device may be rectangular, circular, polygonal, a shape with curved edges, or other suitable shapes. The electronic device may have peripheral systems such as a drive system, a control system, a light source system, a shelf system, etc. to support the electronic device. The following will use a display device to illustrate the contents of this disclosure, but the types of electronic devices disclosed in this disclosure are not limited to this.

第1圖表示根據本揭露一些實施例之電子裝置的電路結構100的示意圖。電路結構100可以包括一基板10、一電路板20、一擋牆30、一接合元件40以及一驅動元件50。基板10與電路板20可以藉由接合元件40彼此電性連接。擋牆30可以設置在基板10上,並鄰近接合元件40。 FIG. 1 is a schematic diagram of a circuit structure 100 of an electronic device according to some embodiments of the present disclosure. The circuit structure 100 may include a substrate 10, a circuit board 20, a baffle 30, a bonding element 40, and a driving element 50. The substrate 10 and the circuit board 20 may be electrically connected to each other via the bonding element 40. The baffle 30 may be disposed on the substrate 10 and adjacent to the bonding element 40.

基板10上可以設置複數條導線11。導線11可以從例如驅動元件50所在位置朝向電路板20延伸,且每一條導線11可以包括 一基板接墊111。 A plurality of wires 11 may be disposed on the substrate 10. The wires 11 may extend from, for example, the location of the driving element 50 toward the circuit board 20, and each wire 11 may include a substrate pad 111.

電路板20可以包括複數個電路板接墊21。在一些實施例中,其中至少一個基板接墊111係沿著基板10的法線方向D2而與對應的電路板接墊21重疊。 The circuit board 20 may include a plurality of circuit board pads 21. In some embodiments, at least one substrate pad 111 overlaps with a corresponding circuit board pad 21 along the normal direction D2 of the substrate 10.

在基板接墊111及對應的電路板接墊21之間可以設置有接合元件40,使得基板接墊111與對應的電路板接墊21可以藉由接合元件40彼此電性連接。在一些實施例中,接合元件40可以具有導電性質而使基板接墊111與對應的電路板接墊21電性連接。例如,接合元件40可以是具有導電粒子40A的異方性導電膜(Anisotropic Conductive Film,ACF),但本揭露不限於此。 A bonding element 40 may be disposed between the substrate pad 111 and the corresponding circuit board pad 21, so that the substrate pad 111 and the corresponding circuit board pad 21 may be electrically connected to each other through the bonding element 40. In some embodiments, the bonding element 40 may have a conductive property to electrically connect the substrate pad 111 and the corresponding circuit board pad 21. For example, the bonding element 40 may be an anisotropic conductive film (ACF) having conductive particles 40A, but the present disclosure is not limited thereto.

在一些實施例中,擋牆30可以設置在導線11附近,但是擋牆30可不與導線11直接接觸。在一些實施例中,接合元件40的塗佈範圍可能大於基板接墊111與電路板接墊21的一接觸面CP,亦即,接合元件40可能溢出到基板接墊111之外或電路板接墊21之外,使得接合元件40接觸擋牆30。 In some embodiments, the baffle 30 may be disposed near the wire 11, but the baffle 30 may not directly contact the wire 11. In some embodiments, the coating range of the bonding element 40 may be larger than a contact surface CP between the substrate pad 111 and the circuit board pad 21, that is, the bonding element 40 may overflow outside the substrate pad 111 or outside the circuit board pad 21, so that the bonding element 40 contacts the baffle 30.

在一些實施例中,擋牆30具有絕緣材料,且擋牆30可以包括複數個間隔部31。如第1圖所示,在一些實施例中,從俯視圖來看,一條導線11至少有一部分位於兩相鄰間隔部31之間。相鄰的兩個間隔部31可以形成一容納空間311。沿著基板法線方向D2觀察時,一個容納空間311可以對應一導線11以及至少一導電粒子40A。更具體的說,導線11的兩側可以分別對應有間隔部31,將鄰近不同導線11的導電粒子40A彼此分隔,減少不同導線11因為導電 粒子40A彼此接觸而短路(short)的情況。 In some embodiments, the retaining wall 30 has an insulating material, and the retaining wall 30 may include a plurality of spacers 31. As shown in FIG. 1, in some embodiments, from a top view, at least a portion of a conductor 11 is located between two adjacent spacers 31. Two adjacent spacers 31 may form a receiving space 311. When observed along the substrate normal direction D2, a receiving space 311 may correspond to a conductor 11 and at least one conductive particle 40A. More specifically, the two sides of the conductor 11 may correspond to the spacers 31 respectively, separating the conductive particles 40A adjacent to different conductors 11 from each other, thereby reducing the short circuit (short) of different conductors 11 due to contact between the conductive particles 40A.

請繼續參閱第1圖,當沿著基板邊緣延伸方向D1觀察時,擋牆30與電路板接墊21彼此不重疊。在一些實施例中,在電路板接墊21的延伸方向D3上,間隔部31與電路板接墊21可間隔一間隔距離GD,更具體的說,電路板接墊21的一末端與相鄰間隔部31的一末端相接近,而間隔距離GD是兩末端在電路板接墊21的延伸方向D3上所量到的最小距離。在一些實施例中,間隔距離GD於0.05毫米(mm)至1毫米之間(0.05毫米≦間隔距離≦1毫米)。如此一來,可以減少後續製程損害擋牆30的情況。 Please continue to refer to FIG. 1. When observed along the extension direction D1 of the substrate edge, the baffle 30 and the circuit board pad 21 do not overlap each other. In some embodiments, in the extension direction D3 of the circuit board pad 21, the spacer 31 and the circuit board pad 21 may be separated by a spacing distance GD. More specifically, one end of the circuit board pad 21 is close to one end of the adjacent spacer 31, and the spacing distance GD is the minimum distance between the two ends measured in the extension direction D3 of the circuit board pad 21. In some embodiments, the spacing distance GD is between 0.05 mm and 1 mm (0.05 mm≦ spacing distance≦1 mm). In this way, the risk of subsequent processes damaging the barrier 30 can be reduced.

綜上所述,藉由在導線11之間設置間隔部31可以減少溢出接觸面CP的導電粒子40A造成導線11之間短路的情況,進而使得電路結構100更加的穩定、或可提升電路結構100的信賴度(reliability)。 In summary, by providing the spacer 31 between the wires 11, the short circuit between the wires 11 caused by the conductive particles 40A overflowing the contact surface CP can be reduced, thereby making the circuit structure 100 more stable or improving the reliability of the circuit structure 100.

第2圖表示根據本揭露一些實施例之電子裝置的電路結構100的示意圖。在第2圖所示的實施例中,擋牆30可以更包括一連接部32,連接部32可沿著基板邊緣延伸方向D1延伸。 FIG. 2 is a schematic diagram of a circuit structure 100 of an electronic device according to some embodiments of the present disclosure. In the embodiment shown in FIG. 2, the retaining wall 30 may further include a connecting portion 32, and the connecting portion 32 may extend along the substrate edge extension direction D1.

如第2圖所示,連接部32連接至少兩個間隔部31,使得從基板法線方向D2觀察時,連接部32及其對應的兩個間隔部31可以呈現為倒U字型。在本實施例中,容納空間311可以是由連接部32及其對應的兩個相鄰間隔部31所構成,亦即容納空間311可以是半封閉空間,且呈現為倒U字型。 As shown in FIG. 2, the connecting portion 32 connects at least two spacers 31, so that when viewed from the substrate normal direction D2, the connecting portion 32 and its corresponding two spacers 31 can present an inverted U shape. In this embodiment, the accommodating space 311 can be composed of the connecting portion 32 and its corresponding two adjacent spacers 31, that is, the accommodating space 311 can be a semi-enclosed space and present an inverted U shape.

連接部32可以阻擋導電粒子40A,以減少導電粒子 40A溢流出擋牆30而彼此接觸的情況,進而減少導線之間短路的可能性。此外,連接部32還可以保護導線11,減少導線11受到損害的機率。 The connecting portion 32 can block the conductive particles 40A to reduce the conductive particles 40A from overflowing the retaining wall 30 and contacting each other, thereby reducing the possibility of short circuits between wires. In addition, the connecting portion 32 can also protect the wire 11 and reduce the probability of the wire 11 being damaged.

電子裝置內部可包含由導線、電晶體等電子元件及膜層所構成之堆疊結構60。第3A圖為本揭露的電子裝置內部的堆疊結構60的剖面結構示意圖。如第3A圖所示,堆疊結構60可包含一電晶體設置於基板10之上,電晶體至少可包含閘極G、汲極D、源極S、半導體層SM1與閘極絕緣層GI。閘極絕緣層GI可介於閘極G與半導體層SM1之間,而汲極D與源極S分別位於半導體層SM1的兩側且電連接半導體層SM1,且汲極D與源極S之間具有一間隔。除此之外,電子裝置尚可包含第一絕緣層INS1覆蓋源極S與汲極D,有機層OG位於第一絕緣層INS1上方,因其厚度較厚,可以使因設置電晶體而起伏的表面平坦化,第二絕緣層INS2可設置於有機層OG上方,以及一電極E1通過位於第二絕緣層INS2、有機層OG、第一絕緣層INS1的通孔而與汲極D電性連接。需說明的是,上述的結構僅為一示例,本揭露中電晶體的結構與層別並不以上述內容為限,例如第3A圖所示,汲極D與源極S在與半導體層SM1之間可分別包含一突起SM2,該突起SM2可由蝕刻半導體層SM1或在半導體層SM1上另外沉積所形成。電子裝置也可包含另一電極E2,且電極E1與電極E2之間可例如用第二絕緣層INS2相間隔。 The inside of the electronic device may include a stacked structure 60 composed of electronic elements such as wires, transistors, and film layers. FIG. 3A is a schematic diagram of the cross-sectional structure of the stacked structure 60 inside the electronic device disclosed herein. As shown in FIG. 3A, the stacked structure 60 may include a transistor disposed on a substrate 10, and the transistor may at least include a gate G, a drain D, a source S, a semiconductor layer SM1, and a gate insulating layer GI. The gate insulating layer GI may be between the gate G and the semiconductor layer SM1, and the drain D and the source S are respectively located on both sides of the semiconductor layer SM1 and electrically connected to the semiconductor layer SM1, and there is a gap between the drain D and the source S. In addition, the electronic device may also include a first insulating layer INS1 covering the source S and the drain D, the organic layer OG is located above the first insulating layer INS1, and because of its thickness, the surface that is undulating due to the setting of the transistor can be flattened, the second insulating layer INS2 can be set above the organic layer OG, and an electrode E1 is electrically connected to the drain D through a through hole located in the second insulating layer INS2, the organic layer OG, and the first insulating layer INS1. It should be noted that the above structure is only an example, and the structure and layers of the transistor in the present disclosure are not limited to the above content. For example, as shown in FIG. 3A, the drain D and the source S may each include a protrusion SM2 between the semiconductor layer SM1, and the protrusion SM2 may be formed by etching the semiconductor layer SM1 or depositing on the semiconductor layer SM1. The electronic device may also include another electrode E2, and the electrode E1 and the electrode E2 may be separated by a second insulating layer INS2, for example.

第3B圖表示根據本揭露一些實施例之沿著第1圖中A-A’線之電路結構100的剖視圖,在本揭露中堆疊結構60可位於電 子裝置的工作區內,而電路結構100可位於電子裝置的周邊區內。在本揭露中,電路結構100可至少部分地與第3A圖所示的堆疊結構60由相同製程所形成,也就是說,在電路結構100中,至少一部份的層別與第3A圖所示的堆疊結構60中的部分層別相同。例如第3B圖所示的電路結構100中,在基板10上方的導線11可與第3A圖中的閘極G同層,接著在導線11上方形成與第3A圖中的閘極絕緣層GI同層的絕緣層INS3、與第3A圖中的第一絕緣層INS1同層的絕緣層INS4、與第3A圖中的有機層OG同層的擋牆第一部份30b、與第3A圖中的第二絕緣層INS2同層的絕緣層30a。其中可以將擋牆的第一部份30b圖案化之後再將絕緣層30a形成於第一部份30b之上,而形成擋牆30以及容納空間311。須說明的是,在形成絕緣層30a後可選擇性地再進行一次圖案化以增加擋牆30的厚度。如第3B圖所示,一部分的絕緣層30a被圖案化,另一部分的絕緣層30a未被圖案化而位於兩個擋牆第一部份30b之間。 FIG. 3B is a cross-sectional view of the circuit structure 100 along the line A-A' in FIG. 1 according to some embodiments of the present disclosure. In the present disclosure, the stacking structure 60 may be located in the working area of the electronic device, and the circuit structure 100 may be located in the peripheral area of the electronic device. In the present disclosure, the circuit structure 100 may be at least partially formed by the same process as the stacking structure 60 shown in FIG. 3A, that is, in the circuit structure 100, at least a portion of the layers are the same as a portion of the layers in the stacking structure 60 shown in FIG. 3A. For example, in the circuit structure 100 shown in FIG. 3B , the wire 11 above the substrate 10 may be on the same layer as the gate G in FIG. 3A , and then an insulating layer INS3 on the same layer as the gate insulating layer GI in FIG. 3A , an insulating layer INS4 on the same layer as the first insulating layer INS1 in FIG. 3A , a first portion 30b of the barrier on the same layer as the organic layer OG in FIG. 3A , and an insulating layer 30a on the same layer as the second insulating layer INS2 in FIG. 3A are formed above the wire 11 . The first part 30b of the baffle can be patterned and then the insulating layer 30a can be formed on the first part 30b to form the baffle 30 and the accommodating space 311. It should be noted that after the insulating layer 30a is formed, it can be selectively patterned again to increase the thickness of the baffle 30. As shown in Figure 3B, a part of the insulating layer 30a is patterned, and the other part of the insulating layer 30a is not patterned and is located between the two first parts 30b of the baffle.

在一些實施例中,擋牆30的擋牆厚度h可以介於1微米(μm)至5微米之間(1微米≦擋牆厚度≦5微米)。應注意的是,擋牆厚度h可以是自絕緣層INS4頂表面到擋牆30頂表面於基板法線方向D2上所量測到的最大距離。 In some embodiments, the barrier thickness h of the barrier 30 may be between 1 μm and 5 μm (1 μm ≦ barrier thickness ≦ 5 μm). It should be noted that the barrier thickness h may be the maximum distance measured from the top surface of the insulating layer INS4 to the top surface of the barrier 30 in the substrate normal direction D2.

第4圖表示根據本揭露又另一些實施例之沿著第1圖中A-A’線之電路結構100的剖視圖。與第3B圖相似在於,如第4圖所示,電路結構100可以包含設置在基板10上方,與第3A圖中的閘極G同層的導線11、與第3A圖中的閘極絕緣層GI同層的絕緣層 INS5、與第3A圖中的第一絕緣層INS1同層的絕緣層INS6。而於第3B圖不同之處在於,在絕緣層INS6上方可形成金屬層30c,然後再形成一絕緣層30a覆蓋金屬層30c。須說明的是,在本實施例中,可以將金屬層30c圖案化之後,再將絕緣層30a形成於金屬層30c之上以形成擋牆30以及容納空間311。絕緣層30a與第3A圖中的第二絕緣層INS2可同時形成或是在不同製程中形成,用於減少金屬層30c與第1圖中導電粒子40A電性連接的可能性。另外,在形成絕緣層30a後可選擇性地再進行一次圖案化以增加擋牆30的厚度,如第4圖所示。在本實施例中,擋牆30的擋牆厚度h可以介於0.2微米至3微米之間(0.2微米≦擋牆厚度≦3微米)的範圍,但不限於此。擋牆厚度h的量測方式與前述實施例相同,因此不再贅述。 FIG. 4 shows a cross-sectional view of the circuit structure 100 along the line A-A' in FIG. 1 according to some other embodiments of the present disclosure. Similar to FIG. 3B, as shown in FIG. 4, the circuit structure 100 may include a conductive line 11 disposed on the substrate 10 and on the same layer as the gate G in FIG. 3A, an insulating layer INS5 on the same layer as the gate insulating layer GI in FIG. 3A, and an insulating layer INS6 on the same layer as the first insulating layer INS1 in FIG. 3A. Different from FIG. 3B, a metal layer 30c may be formed on the insulating layer INS6, and then an insulating layer 30a is formed to cover the metal layer 30c. It should be noted that in this embodiment, after the metal layer 30c is patterned, the insulating layer 30a is formed on the metal layer 30c to form the baffle 30 and the accommodating space 311. The insulating layer 30a and the second insulating layer INS2 in FIG. 3A can be formed simultaneously or in different processes to reduce the possibility of electrical connection between the metal layer 30c and the conductive particles 40A in FIG. 1. In addition, after the insulating layer 30a is formed, it can be selectively patterned again to increase the thickness of the baffle 30, as shown in FIG. 4. In this embodiment, the barrier thickness h of the barrier 30 may be in the range of 0.2 microns to 3 microns (0.2 microns ≦ barrier thickness ≦ 3 microns), but is not limited thereto. The measurement method of the barrier thickness h is the same as that of the aforementioned embodiment, so it will not be repeated.

第5圖表示根據本揭露另一些實施例之沿著第1圖中A-A’線之電路結構100的剖視圖。與第4圖相比,第5圖的不同之處是在第4圖所示的電路結構100中又加上金屬層30d,並形成絕緣層30a’覆蓋金屬層30d。須說明的是,在本實施例中,可以將金屬層30d圖案化之後再形成一絕緣層30a’覆蓋金屬層30d,而形成擋牆30以及容納空間311。在本實施例中,擋牆30的擋牆厚度h可以介於0.1微米至2微米之間(0.1微米≦擋牆厚度≦2微米),但不限於此。例如,若將本實施例中連續鋪設的絕緣層30a’進行圖案化後,可以將兩相鄰金屬層30d之間的一部分絕緣層30a’去除而增加擋牆30的厚度。 FIG. 5 shows a cross-sectional view of the circuit structure 100 along the line A-A' in FIG. 1 according to other embodiments of the present disclosure. Compared with FIG. 4, FIG. 5 is different in that a metal layer 30d is added to the circuit structure 100 shown in FIG. 4, and an insulating layer 30a' is formed to cover the metal layer 30d. It should be noted that in this embodiment, the metal layer 30d can be patterned and then an insulating layer 30a' can be formed to cover the metal layer 30d, so as to form the baffle 30 and the accommodating space 311. In this embodiment, the baffle thickness h of the baffle 30 can be between 0.1 micrometers and 2 micrometers (0.1 micrometers ≦ baffle thickness ≦ 2 micrometers), but is not limited thereto. For example, if the continuously laid insulating layer 30a' in this embodiment is patterned, a portion of the insulating layer 30a' between two adjacent metal layers 30d can be removed to increase the thickness of the retaining wall 30.

另外,電路結構100中可以在與擋牆30對應的位置設 置其他金屬層的用途在於進一步增加擋牆30的高度。該金屬層可與導線11同層,但本揭露並不限於此。 In addition, the circuit structure 100 may be provided with another metal layer at a position corresponding to the baffle 30 for the purpose of further increasing the height of the baffle 30. The metal layer may be provided at the same layer as the wire 11, but the present disclosure is not limited thereto.

第6圖表示根據本揭露一些實施例之沿著第1圖中A-A’線之電路結構100的剖視圖。如第6圖所示,電路結構100在基板10上方可包含與第3A圖中的閘極G同層的導線11、與第3A圖中的閘極絕緣層GI同層的絕緣層INS7、與第3A圖中的第一絕緣層INS1同層的絕緣層30e以及與第3A圖中的第二絕緣層INS2同層的絕緣層30a。須說明的是,在本實施例中,可以將絕緣層30a與絕緣層30e圖案化後而形成擋牆30以及容納空間311。如第6圖所示,絕緣層30a可與絕緣層30e重疊但未覆蓋絕緣層30e側面,但在一些實施例中,絕緣層30a也可覆蓋絕緣層30e側面。在本實施例中,擋牆30的擋牆厚度h可以介於0.5微米至2微米之間(0.5微米≦擋牆厚度≦2微米),但不限於此。 FIG6 is a cross-sectional view of the circuit structure 100 along the line A-A' in FIG1 according to some embodiments of the present disclosure. As shown in FIG6, the circuit structure 100 may include a conductive line 11 on the same layer as the gate G in FIG3A, an insulating layer INS7 on the same layer as the gate insulating layer GI in FIG3A, an insulating layer 30e on the same layer as the first insulating layer INS1 in FIG3A, and an insulating layer 30a on the same layer as the second insulating layer INS2 in FIG3A above the substrate 10. It should be noted that in this embodiment, the insulating layer 30a and the insulating layer 30e can be patterned to form the baffle 30 and the accommodating space 311. As shown in FIG. 6, the insulating layer 30a can overlap with the insulating layer 30e but does not cover the side surface of the insulating layer 30e, but in some embodiments, the insulating layer 30a can also cover the side surface of the insulating layer 30e. In this embodiment, the baffle thickness h of the baffle 30 can be between 0.5 microns and 2 microns (0.5 microns ≦ baffle thickness ≦ 2 microns), but is not limited thereto.

應注意的是,第3B圖到第6圖所示的電路結構100可以是基於不同實施例,且本揭露之電路結構100並不以第3B圖到第6圖為限。而且,使用者可以依據其所使用的製程來決定使用何種電路結構100。如此一來,可以將擋牆30的製程與堆疊結構60的製程相結合,可以減少製造程序,並降低時間成本。 It should be noted that the circuit structure 100 shown in FIG. 3B to FIG. 6 may be based on different embodiments, and the circuit structure 100 disclosed herein is not limited to FIG. 3B to FIG. 6. Moreover, the user may decide which circuit structure 100 to use according to the process used. In this way, the process of the retaining wall 30 may be combined with the process of the stacking structure 60, which may reduce the manufacturing process and time cost.

綜上所述,本揭露實施例可以減少電路結構100內部短路的情況,並且可以依據其所選擇的製程來佈置擋牆30的結構,使得本揭露實施例的電路結構100具有製造便利或降低成本的優勢。 In summary, the disclosed embodiment can reduce the situation of internal short circuit of the circuit structure 100, and the structure of the retaining wall 30 can be arranged according to the selected process, so that the circuit structure 100 of the disclosed embodiment has the advantages of convenient manufacturing or cost reduction.

雖然本揭露的實施例及其優點已揭露如上,但應該瞭 解的是,任何所屬技術領域中具有通常知識者,在不脫離本揭露之精神和範圍內,當可作結合、更動、替代與潤飾。此外,本揭露之保護範圍並未侷限於說明書內所述特定實施例中的製程、機器、製造、物質組成、裝置、方法及步驟,任何所屬技術領域中具有通常知識者可從本揭露揭示內容中理解現行或未來所發展出的製程、機器、製造、物質組成、裝置、方法及步驟,只要可以在此處所述實施例中實施大抵相同功能或獲得大抵相同結果皆可根據本揭露使用。因此,本揭露之保護範圍包括上述製程、機器、製造、物質組成、裝置、方法及步驟,且各實施例間特徵只要不違背發明精神或相互衝突,均可任意混合搭配使用。另外,每一申請專利範圍構成個別的實施例,且本揭露之保護範圍也包括各個申請專利範圍及實施例的組合。 Although the embodiments and advantages of the present disclosure have been disclosed above, it should be understood that any person with ordinary knowledge in the relevant technical field can make combinations, changes, substitutions and modifications without departing from the spirit and scope of the present disclosure. In addition, the scope of protection of the present disclosure is not limited to the processes, machines, manufacturing, material compositions, devices, methods and steps in the specific embodiments described in the specification. Any person with ordinary knowledge in the relevant technical field can understand the current or future developed processes, machines, manufacturing, material compositions, devices, methods and steps from the content of the present disclosure, as long as they can implement substantially the same functions or obtain substantially the same results in the embodiments described here, they can be used according to the present disclosure. Therefore, the protection scope of this disclosure includes the above-mentioned processes, machines, manufacturing, material compositions, devices, methods and steps, and the features of each embodiment can be mixed and matched as long as they do not violate the spirit of the invention or conflict with each other. In addition, each patent application constitutes a separate embodiment, and the protection scope of this disclosure also includes the combination of each patent application and embodiment.

10:基板 10: Substrate

11:導線 11: Wire

20:電路板 20: Circuit board

21:電路板接墊 21: Circuit board pad

30:擋牆 30:Block

31:間隔部 31: Partition

40:接合元件 40:Joint element

40A:導電粒子 40A: Conductive particles

50:驅動元件 50: Driving element

100:電路結構 100: Circuit structure

111:基板接墊 111: Substrate pad

311:容納空間 311: Accommodation space

CP:接觸面 CP: contact surface

D1:基板邊緣延伸方向 D1: Extension direction of substrate edge

D2:法線方向,基板法線方向 D2: Normal direction, substrate normal direction

D3:延伸方向 D3: Extension direction

GD:間隔距離 GD: Spacing distance

Claims (11)

一種電子裝置,包括:一電路結構,包括:一基板;複數條導線,設置於該基板上;一擋牆,設置於該基板上,且包括複數個間隔部;一接合元件;以及一電路板,包括複數個電路板接墊,其中,在一俯視圖中,該些導線至少有一部分位於該些間隔部之中的相鄰兩者之間,其中,該些導線之其中一者包括一基板接墊,且該接合元件電性連接該基板接墊及該些電路板接墊的其中一者。 An electronic device includes: a circuit structure including: a substrate; a plurality of wires disposed on the substrate; a baffle disposed on the substrate and including a plurality of spacers; a bonding element; and a circuit board including a plurality of circuit board pads, wherein, in a top view, at least a portion of the wires is located between two adjacent ones of the spacers, wherein one of the wires includes a substrate pad, and the bonding element electrically connects the substrate pad and one of the circuit board pads. 如請求項1之電子裝置,其中,在該電路板接墊的一延伸方向上,該些間隔部與該些電路板接墊之間具有一間隔距離。 As in claim 1, the electronic device, wherein in an extension direction of the circuit board pad, there is a spacing distance between the spacing portions and the circuit board pads. 如請求項2之電子裝置,其中,該間隔距離介於0.05毫米至1毫米之間。 As in claim 2, the electronic device, wherein the spacing distance is between 0.05 mm and 1 mm. 如請求項1之電子裝置,其中,該接合元件包含導電粒子。 An electronic device as claimed in claim 1, wherein the bonding element comprises conductive particles. 如請求項1之電子裝置,其中,該擋牆更包括一連接部,且該連接部連接該些間隔部。 As in claim 1, the electronic device, wherein the baffle further includes a connecting portion, and the connecting portion connects the partitions. 如請求項1之電子裝置,其中,該擋牆包含一有機層與一絕緣層,且該絕緣層設置於該有機層上。 As in claim 1, the electronic device, wherein the barrier comprises an organic layer and an insulating layer, and the insulating layer is disposed on the organic layer. 如請求項6之電子裝置,其中,該擋牆之一擋牆厚 度介於1微米至5微米之間。 An electronic device as claimed in claim 6, wherein a thickness of one of the baffles is between 1 micron and 5 microns. 如請求項1之電子裝置,其中,該擋牆包含一絕緣層與一金屬層,且該絕緣層設置於該金屬層上。 As in claim 1, the electronic device, wherein the barrier comprises an insulating layer and a metal layer, and the insulating layer is disposed on the metal layer. 如請求項8之電子裝置,其特徵在於該擋牆之一擋牆厚度介於0.1微米至2微米之間。 The electronic device of claim 8 is characterized in that a thickness of one of the baffles is between 0.1 micrometers and 2 micrometers. 一種電子裝置,包括:一電路結構,包括:一基板;複數條導線,設置於該基板上;以及一擋牆,設置於該基板上,且包括複數個間隔部;其中,在一俯視圖中,該些導線至少有一部分位於該些間隔部之中的相鄰兩者之間,其中,該擋牆包含一有機層與一絕緣層,且該絕緣層設置於該有機層上。 An electronic device includes: a circuit structure including: a substrate; a plurality of wires disposed on the substrate; and a baffle disposed on the substrate and including a plurality of spacers; wherein, in a top view, at least a portion of the wires is located between two adjacent ones of the spacers, wherein the baffle includes an organic layer and an insulating layer, and the insulating layer is disposed on the organic layer. 一種電子裝置,包括:一電路結構,包括:一基板;複數條導線,設置於該基板上;以及一擋牆,設置於該基板上,且包括複數個間隔部;其中,在一俯視圖中,該些導線至少有一部分位於該些間隔部之中的相鄰兩者之間,其中,該擋牆包含一絕緣層與一金屬層,且該絕緣層設置於該金屬層上。 An electronic device includes: a circuit structure including: a substrate; a plurality of wires disposed on the substrate; and a baffle disposed on the substrate and including a plurality of spacers; wherein, in a top view, at least a portion of the wires is located between two adjacent ones of the spacers, wherein the baffle includes an insulating layer and a metal layer, and the insulating layer is disposed on the metal layer.
TW111119085A 2021-08-17 2022-05-23 Electronic device TWI838751B (en)

Applications Claiming Priority (2)

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CN202110951579.X 2021-08-17
CN202110951579.XA CN115706074A (en) 2021-08-17 2021-08-17 Electronic device

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TW202310694A TW202310694A (en) 2023-03-01
TWI838751B true TWI838751B (en) 2024-04-11

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200008304A1 (en) 2016-12-01 2020-01-02 Dexerials Corporation Connection structure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20200008304A1 (en) 2016-12-01 2020-01-02 Dexerials Corporation Connection structure

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