TWI838673B - Method of manufacturing meta lenses, meta lens structure and multi-lens optical module having meta lens structure - Google Patents

Abstract

A method of manufacturing meta lenses includes: depositing an optical material over a substrate; spin coating a nano-imprint resist over the optical material; contacting a mold with the nano-imprint resist, in which the mold has a plurality of circular cylindrical recesses and a protruding portion, and the circular cylindrical recesses are spaced apart from each other; after the mold is in contact with the nano-imprint resist, curing the nano-imprint resist to form a nano-imprint resist pattern, in which the nano-imprint resist pattern has a plurality of circular cylindrical thick portions and a thin portion, and the circular cylindrical thick portions respectively correspond to the circular cylindrical recesses of the mold, and the thin portion corresponds to the protruding portion of the mold; removing the thin portion and remaining the circular cylindrical thick portions; and patterning the optical material according to the remaining circular cylindrical thick portions to form a plurality of circular cylindrical meta lenses. A meta lens structure and a multi-lens optical module having the meta lens structure are also provided.

Description

Method for manufacturing super-slim lens, super-slim lens structure and multi-lens optical module having super-slim lens structure

This case involves a method for manufacturing a super-slim lens, a super-slim lens structure manufactured by the method, and a multi-lens optical module composed of the super-slim lens structure.

With the trend of thinning and miniaturization of optical lenses, optical lenses have been widely used in various life applications. However, the traditional thinning and miniaturization technology mentioned above has also faced the bottleneck and limitation of technology development, and this shortcoming makes it impossible for various lenses to be further applied in application fields that require extreme miniaturization. For example, let's take the commercialized Google Glass as an example. Although this well-known product has been on the market for a long time, it is limited by the large size of the optical lens installed in it. Therefore, Google Glass has not been accepted by most consumers so far.

In order to solve this technical problem, a meta-lens structure was proposed; that is, a meta-lens is a tiny optical element that can manipulate electromagnetic waves (light). It is similar to a traditional focusing lens, but the meta-lens is thinner than paper. Because the meta-lens is very small and has the potential to completely change a variety of optical applications, many researchers are developing methods for mass production of meta-lenses.

However, in terms of mass production, electron beam lithography is currently commonly used to manufacture superlenses. The disadvantage is that the process cost is extremely high (for example, the high cost of mask development and manufacturing), which is not conducive to mass production. Moreover, such high manufacturing costs will still greatly limit the technical application scope of superlenses.

Therefore, the emergence of the super-smooth lens structure is an effective solution to the bottleneck faced by various types of optical lenses in the field of miniaturization applications. However, how to obtain a super-smooth lens structure with low manufacturing cost and high yield advantage so that it can be more widely developed and applied is the main technical focus of this case.

The main purpose of this case is to provide a method for manufacturing super-slim lenses, which has a low process cost and a high yield, and can be effectively applied to mass production of super-slim lenses.

Another purpose of this case is to provide a super-slim lens structure formed by a method for manufacturing a super-slim lens.

Another purpose of this case is to provide a multi-lens optical module based on a super-slim lens structure.

The present invention provides a method for manufacturing a super-slim lens, comprising: depositing an optical material on a substrate; spin-coating a nano-imprint resist on the optical material; contacting a stamp with the nano-imprint resist, wherein the stamp has a plurality of cylindrical concave portions and a convex portion, and the cylindrical concave portions are spaced apart from each other; after contacting the stamp with the nano-imprint resist, curing the nano-imprint resist to form a nano-imprint resist pattern, wherein the nano-imprint resist pattern has a plurality of cylindrical thick portions and a thin portion, the cylindrical thick portions respectively corresponding to the cylindrical concave portions of the stamp, and the thin portion corresponding to the convex portion of the stamp; removing the thin portion and leaving the cylindrical thick portions; and patterning the optical material according to the remaining cylindrical thick portions to form a plurality of cylindrical super-slim lenses.

In some embodiments of the present invention, the method further includes: after forming the cylindrical superlenses, removing the cylindrical thick portions.

In some embodiments of the present invention, the step of contacting the stamp with the nano-imprint resist includes filling the cylindrical recesses of the stamp with the nano-imprint resist, and the step of filling the cylindrical recesses of the stamp with the nano-imprint resist includes moving the stamp downward, heating the nano-imprint resist, or a combination thereof.

In some embodiments of the present invention, the step of curing the nanoimprint resist includes a step of ultraviolet light irradiation.

In some embodiments of the present case, the step of curing the nanoimprint resist includes a cooling step, and the nanoimprint resist is a thermoplastic material.

In some embodiments of the present invention, the stamp has an anti-adhesive layer located above the cylindrical concave and convex portions of the stamp, and in the step of contacting the stamp with the nano-imprint resist, the anti-adhesive layer contacts the nano-imprint resist.

In some embodiments of the present invention, the method further includes: forming a chromium-containing layer on the optical material after depositing the optical material on the substrate and before spin-coating the nanoimprint resist on the optical material.

In some embodiments of the present invention, the optical material includes amorphous silicon, titanium dioxide or a combination thereof.

In some embodiments of the present invention, the method further includes: after depositing the optical material on the substrate and before spin-coating the nano-imprint resist on the optical material, forming a back protection layer under the substrate, the substrate being between the optical material and the back protection layer.

In some embodiments of the present invention, the mold is made from a master mold.

In some embodiments of the present case, the mold is a disposable polymer mold.

The present invention also provides a super-slim lens structure, comprising: a substrate; and a plurality of cylindrical super-slim lenses spaced apart from each other and located on the upper surface of the substrate; wherein the angle between the side wall of one of the cylindrical super-slim lenses and the bottom surface of the one of the cylindrical super-slim lenses is 85 degrees to 88 degrees or 92 degrees to 95 degrees.

In some embodiments of the present invention, the ratio of the height of one of the cylindrical superlenses to the maximum diameter of one of the cylindrical superlenses is between 1.25 and 3.5.

In some embodiments of the present invention, the height of one of the cylindrical superlenses is between 250 nm and 350 nm, and the maximum diameter of one of the cylindrical superlenses is between 100 nm and 200 nm.

In some embodiments of the present invention, the minimum distance between two adjacent cylindrical superlenses is between 75 nanometers and 125 nanometers.

In some embodiments of the present invention, the substrate is any one of a glass substrate, a quartz substrate or a sapphire substrate.

The present invention also provides a multi-lens optical module with a super-slim lens structure, including: a plurality of cylindrical super-slim lenses formed on the upper surface of a substrate and arranged at intervals; an optical filter element, whose upper surface contacts the lower surface of the substrate; and an optical sensing element adjacent to the lower surface of the optical filter element; an optical sensing element adjacent to the lower surface of the optical filter element; wherein some of the cylindrical super-slim lenses are located in a normal working area, and the remaining cylindrical super-slim lenses are located in a backup working area.

In some embodiments of the present case, the partially cylindrical super-lenses located in the normal working area, in combination with the optical filter element and the optical sensing element, can provide at least one red lens optical module, one blue lens optical module and two green lens optical modules.

In some embodiments of the present invention, the remaining cylindrical super-smooth lenses located in the backup working area, in combination with the optical filter element and the optical sensing element, can provide at least one replacement backup lens optical module for the red lens optical module, the blue lens optical module, and the green lens optical modules when any one of the modules is in a fault state.

In some embodiments of the present invention, the remaining cylindrical super-slim lenses located in the backup working area, in combination with the optical filter element and the optical sensing element, can provide at least one lens optical module with additional functions; wherein the additional functions include at least an artificial intelligence (AI) function, an augmented reality (AR) function, a virtual reality (VR) and/or a mixed reality (MR) function.

110: Substrate

115: Back protective layer

120:Optical materials

122, 1221: Cylindrical ultra-slim lens

122s: Side wall of cylindrical superfine lens

122b: Bottom of cylindrical super lens 130: Nano-imprinting resist

132:Nano-imprint resist pattern

132t: cylindrical thick part

132w: thin part

140: Impression

140c: convex part

140r: cylindrical recess

141: Anti-stick layer

a: Angle between the side wall and bottom surface of the cylindrical ultra-fine lens

D1, D2: minimum spacing

H1, H2: height

W1, W2: Maximum diameter

20, 30: Multi-lens optical module

21, 31: Optical filter element

22, 32: Optical sensing element

R: Red lens optical module

B: Blue lens optical module

G: Green lens optical module

BK: Replacement backup lens optical module BK

Figures 1A, 1B, 1C, 1D, 1E and 1F are three-dimensional schematic diagrams of the various steps of a method for manufacturing a super-lens using a nano-imprinting process according to some embodiments of the present invention.

Figures 2A, 2B, 2C and 2D are cross-sectional schematic diagrams of various steps of a nanoimprint lithography process according to some embodiments of the present invention.

Figures 3A, 3B, 3C and 3D are cross-sectional schematic diagrams of various steps of a nanoimprint lithography process according to some embodiments of the present invention.

Figure 4 is a partial cross-sectional schematic diagram of a super-lens structure according to some embodiments of the present invention.

Figure 5 is a partial cross-sectional schematic diagram of a super-lens structure according to some embodiments of the present invention.

FIG6 is a conceptual diagram showing a super-lens structure formed by a set of cylindrical super-lenses from the super-lens structure shown in FIG1F above.

Figure 7 is a cross-sectional schematic diagram of a multi-lens optical module in this case.

Figure 8 is a cross-sectional schematic diagram of another multi-lens optical module in this case.

In order to make the description of the disclosed content more detailed and complete, the following provides an illustrative description of the implementation and specific embodiments of the disclosed content; however, this is not the only form of implementing or using the specific embodiments of the disclosed content. The embodiments disclosed below can be combined or replaced with each other under beneficial circumstances, and other embodiments can be added to one embodiment without further recording or description.

The spatially relative terms in this article, such as "lower" and "upper", are used to facilitate the description of the relative relationship between one element or feature and another element or feature in the diagram. The true meaning of these spatially relative terms includes other orientations. For example, when the diagram is flipped 180 degrees up and down, the relationship between one element and another element may change from "lower" to "upper". The spatially relative descriptions used in this article should also be interpreted in the same way.

Please refer to Figures 1A, 1B, 1C, 1D, 1E and 1F, which are three-dimensional schematic diagrams of various steps of a method for manufacturing a super lens using a nanoimprint process according to some embodiments of the present invention. As shown in Figure 1A, an optical material 120 is configured (for example, deposited) above a substrate 110. In some embodiments, the optical material 120 includes amorphous silicon, titanium dioxide or a combination thereof, and its reflective index is greater than 3.4 and its absorption is less than ^10-3 . In some embodiments, the substrate 110 is a glass substrate, a quartz substrate or a sapphire substrate. In some embodiments, the optical material 120 is deposited on the substrate 110 using an inductively coupled plasma chemical vapor deposition (ICP-CVD) process.

As shown in FIG. 1A and FIG. 1B , a nanoimprint resist 130 is disposed (e.g., spin-coated) on top of the optical material 120. In some embodiments, the nanoimprint resist 130 is coated on top of the optical material 120 using a spin coating process. In some embodiments, after depositing the optical material 120 on the substrate 110 and before spin-coating the nanoimprint resist 130 on the optical material 120, a back protection layer 115 is formed below the substrate 110, and the substrate 110 is between the optical material 120 and the back protection layer 115.

In some embodiments, after depositing the optical material 120 on the substrate and before spin-coating the nanoimprint resist 130 on the optical material, a chromium-containing layer (not shown) is formed on the optical material 120. The chromium-containing layer can be used to protect the cylindrical superlens (e.g., the cylindrical superlens 122 in FIG. 1E ) formed subsequently.

As shown in FIG. 1B and FIG. 1C , a stamp 140 belonging to a mold is used to contact the nanoimprint resist 130, wherein the stamp 140 has a plurality of cylindrical recesses and a convex portion, and the cylindrical recesses are spaced apart from each other (not shown). In some embodiments, the stamp 140 is made of a mother mold (not shown). For example, the mother mold is made of silicon, so it is also called a silicon mold. In some embodiments, the stamp 140 is a disposable polymer mold. In some embodiments, a polymer material (not shown) is deposited on the mother mold, and then cooled and demolded to obtain the stamp 140.

As shown in FIG. 1C and FIG. 1D , a series of nano-imprint lithography process steps are performed on the nano-imprint resist 130 to form a plurality of cylindrical thick portions 132t, which serve as masks for subsequent patterning (e.g., etching) of the optical material 120. Various embodiments of the nano-imprint lithography process steps will be described in detail below.

Figures 2A, 2B, 2C and 2D are cross-sectional schematic diagrams of various steps of a nanoimprint lithography process according to some embodiments of the present invention. Figure 2A is a partial cross-sectional schematic diagram of Figure 1C. Figure 2D is a partial cross-sectional schematic diagram of Figure 1D.

1C and 2A , the stamp 140 has a plurality of cylindrical recesses 140r and a convex portion 140c, and the cylindrical recesses 140r are spaced apart from each other. In some embodiments, the step of contacting the stamp 140 with the nanoimprint resist 130 includes filling the cylindrical recesses 140r of the stamp 140 with the nanoimprint resist 130, and the step of filling the cylindrical recesses 140r of the stamp 140 with the nanoimprint resist 130 includes moving the stamp 140 downward, heating the nanoimprint resist 130, or a combination thereof. In some embodiments, as shown in FIG. 2A , the nanoimprint resist 130 is heated to become fluid, and the stamp 140 is moved downward to allow the fluid nanoimprint resist 130 to fill the cylindrical recesses 140r of the stamp 140. In some embodiments, the stamp 140 has an anti-adhesive layer 141 located above the cylindrical recesses 140r and the protrusions 140c of the stamp 140, so that in the step of contacting the stamp 140 with the nanoimprint resist 130, the anti-adhesive layer 141 directly contacts the nanoimprint resist 130.

As shown in FIG. 2A and FIG. 2B , the stamp 140 is brought into contact with the nano-imprint resist 130, and after the nano-imprint resist 130 fills the cylindrical recesses 140r of the stamp 140, the nano-imprint resist 130 is cured to form a nano-imprint resist pattern 132. As shown in FIG. 2B , the nano-imprint resist pattern 132 has a plurality of cylindrical thick portions 132t and a thin portion 132w, wherein the cylindrical thick portions 132t correspond to the cylindrical recesses 140r of the stamp 140, and the thin portion 132w corresponds to the convex portion 140c of the stamp 140. In some embodiments, the step of curing the nanoimprint resist 130 includes a cooling step, and the nanoimprint resist 130 is a thermoplastic material.

As shown in FIG. 2B and FIG. 2C , the stamp 140 is moved upward to be separated from the nano-imprint resist pattern 132. In some embodiments, since the stamp 140 has an anti-adhesive layer 141, the stamp 140 can be easily separated from the nano-imprint resist pattern 132 during the upward movement of the stamp 140, so that the structure of the nano-imprint resist pattern 132 will not be destroyed.

As shown in FIG. 2C and FIG. 2D , the thin portion 132w of the nanoimprint resist pattern 132 is removed, and the cylindrical thick portions 132t are left, and the cylindrical thick portions 132t serve as masks for the subsequent patterning of the optical material 120. In some embodiments, a plasma cleaning process is used to remove the thin portion 132w of the nanoimprint resist pattern 132.

Figures 3A, 3B, 3C and 3D are cross-sectional schematic diagrams of various steps of a nanoimprint lithography process according to some embodiments of the present invention. Figure 3A is a partial cross-sectional schematic diagram of Figure 1C. Figure 3D is a partial cross-sectional schematic diagram of Figure 1D.

Referring to FIG. 1C and FIG. 3A , the stamp 140 has a plurality of cylindrical recesses 140r and a convex portion 140c, and the cylindrical recesses 140r are spaced apart from each other. In some embodiments, as shown in FIG. 3A , the stamp 140 is moved downward to allow the liquid nanoimprint resist 130 to fill the cylindrical recesses 140r of the stamp 140. In some embodiments, the stamp 140 has an anti-adhesive layer 141 located above the cylindrical recesses 140r and the convex portion 140c of the stamp 140, so that in the step of contacting the stamp 140 with the nanoimprint resist 130, the anti-adhesive layer 141 contacts the nanoimprint resist 130.

As shown in FIG. 3A and FIG. 3B , the stamp 140 is brought into contact with the nano-imprint resist 130, and after the nano-imprint resist 130 fills the cylindrical recesses 140r of the stamp 140, the nano-imprint resist 130 is cured to form a nano-imprint resist pattern 132. As shown in FIG. 3B , the nano-imprint resist pattern 132 has a plurality of cylindrical thick portions 132t and a thin portion 132w, wherein the cylindrical thick portions 132t correspond to the cylindrical recesses 140r of the stamp 140, and the thin portion 132w corresponds to the convex portion 140c of the stamp 140. In some embodiments, the step of curing the nano-imprint resist includes a step of ultraviolet light irradiation, the nano-imprint resist (or photoresist) 130 is an ultraviolet light curing resin material, and the stamp 140 is a transparent stamp.

As shown in FIG. 3B and FIG. 3C , the stamp 140 is moved upward to be separated from the nano-imprint resist pattern 132. In some embodiments, since the stamp 140 has an anti-adhesive layer 141, the stamp 140 can be easily separated from the nano-imprint resist pattern 132 during the upward movement of the stamp 140, so that the structure of the nano-imprint resist pattern 132 will not be destroyed.

As shown in FIG. 3C and FIG. 3D , the thin portion 132w of the nanoimprint resist pattern 132 is removed, and the cylindrical thick portions 132t are left, and the cylindrical thick portions 132t serve as masks for the subsequent patterning of the optical material 120. In some embodiments, a plasma cleaning process is used to remove the thin portion 132w of the nanoimprint resist pattern 132.

As shown in FIG. 1D and FIG. 1E , the optical material 120 is patterned according to the remaining cylindrical thick portions 132t to form a plurality of cylindrical superlenses 122. In some embodiments, the optical material 120 is patterned using an etching process, and the etching process is, for example, an inductively coupled plasma reactive ion etching (ICP-RIE) process.

As shown in FIG. 1E and FIG. 1F, after the cylindrical super-smooth lenses 122 are formed, the cylindrical thick portions 132t are removed to expose the top surfaces of the cylindrical super-smooth lenses 122. In some embodiments, after the cylindrical thick portions 132t are removed, the back protection layer 115 is removed. In some embodiments, after the back protection layer 115 is removed, a tape (not shown) is attached under the substrate 110, and then cut, and finally the tape is removed. After cutting, the cylindrical super-smooth lenses 122 can be tested for function and optical inspection for defects.

It is worth noting that the method of manufacturing multiple cylindrical super lenses 122 in this case is easy to implement and has a high process yield. If multiple long strip gratings are manufactured, it is actually difficult to manufacture consistent and uniform long strip gratings.

The present invention further provides a super-flexible lens structure, including a substrate 110, and a plurality of cylindrical super-flexible lenses 122 spaced apart from each other and located on the upper surface of the substrate 110, as shown in FIG1F. FIG4 is a partial cross-sectional schematic diagram of a super-flexible lens structure according to some embodiments of the present invention. As shown in FIG4, the angle a between the side wall 122s of one of the cylindrical super-flexible lenses 122 and the bottom surface 122b of the one of the cylindrical super-flexible lenses 122 is 85 degrees to 88 degrees, for example, 86 degrees, 87 degrees, or any value between any two values. In some embodiments, the angle a is greater than or equal to 85 degrees and less than 88 degrees.

In some embodiments, the ratio of the height H1 to the maximum diameter W1 of the cylindrical superlens 122 is between 1.25 and 3.5, such as 1.5, 2.0, 2.5, 3.0, or any value between any two values.

In some embodiments, the height H1 of the cylindrical superlens 122 is between 250 nm and 350 nm, such as 260 nm, 270 nm, 280 nm, 290 nm, 300 nm, 310 nm, 320 nm, 330 nm, 340 nm, or any value between any two values.

In some embodiments, the maximum diameter W1 of the cylindrical superlens 122 is between 100 nm and 200 nm, such as 110 nm, 120 nm, 130 nm, 140 nm, 150 nm, 160 nm, 170 nm, 180 nm, 190 nm, or any value between any two values.

In some embodiments, the minimum distance D1 between two adjacent cylindrical superlenses 122 is between 75 nm and 125 nm, such as 80 nm, 85 nm, 90 nm, 95 nm, 100 nm, 105 nm, 110 nm, 115 nm, 120 nm, or any value between any two values.

FIG5 is a partial cross-sectional schematic diagram of a super-smooth lens structure according to some embodiments of the present invention. As shown in FIG5, the angle a between the side wall 122s of one of the cylindrical super-smooth lenses 122 and the bottom surface 122b of the one of the cylindrical super-smooth lenses 122 is 92 degrees to 95 degrees, for example, 93 degrees, 94 degrees, or any value between any two values. In some embodiments, the angle a is greater than 92 degrees and less than or equal to 95 degrees.

In some embodiments, the ratio of the height H2 of the cylindrical super-lens 122 to the maximum diameter W2 is between 1.25 and 3.5, such as 1.5, 2.0, 2.5, 3.0, or any value between any two values.

In some embodiments, the height H2 of the cylindrical superlens 122 is between 250 nm and 350 nm, such as 260 nm, 270 nm, 280 nm, 290 nm, 300 nm, 310 nm, 320 nm, 330 nm, 340 nm, or any value between any two values.

In some embodiments, the maximum diameter W2 of the cylindrical superlens 122 is between 100 nm and 200 nm, such as 110 nm, 120 nm, 130 nm, 140 nm, 150 nm, 160 nm, 170 nm, 180 nm, 190 nm, or any value between any two values.

In some embodiments, the minimum distance D2 between two adjacent cylindrical superlenses 122 is between 75 nm and 125 nm, such as 80 nm, 85 nm, 90 nm, 95 nm, 100 nm, 105 nm, 110 nm, 115 nm, 120 nm, or any value between any two values.

Next, the specific implementation method of using the aforementioned super-lens structure as the basis to form a multi-lens optical module is further described. First, please refer to FIG. 6, which is the super-lens structure shown in FIG. 1F, including a substrate 110 and a plurality of cylindrical super-lenses 122 spaced from each other and located on the upper surface of the substrate 110. In this case, the number of super-lenses 122 in the super-lens structure shown in FIG. 1F can be determined according to different application requirements such as the size required for the subsequent multi-lens optical module, so as to form a smaller super-lens structure.

Below, the subsequent application description will be carried out using the super-lens structure formed by a group of 8 cylindrical super-lenses 122 marked 1221 in Figure 6 as an example, and this case is not limited to this.

In other words, please refer to Figure 7 again, which is a cross-sectional schematic diagram of a multi-lens optical module 20; it includes the aforementioned set of 8 cylindrical super-smooth lenses 1221 and a substrate 110 located below the cylindrical super-smooth lenses 1221, an optical filter element 21, whose upper surface contacts the lower surface of the substrate 110; and an optical sensing element 22, adjacent to the lower surface of the optical filter element 21.

Among them, since the spacing distance between the cylindrical super-flexible lenses 1221 is very small (nanometer level), the area of the optical filter element 21 and the optical sensing element 22 corresponding to these cylindrical super-flexible lenses 1221 can maintain a normal size (or even be reduced), which is enough to cover these multiple cylindrical super-flexible lenses 1221; on the other hand, with the low-resolution low-cost optical sensing element 22, it can also be easily combined into a high-resolution sensing image data.

For example, the optical sensing element 22 can use a low-cost implementation element with a pixel resolution of 1 megabyte (1MB). Through the aforementioned set of 8 cylindrical super-slim lenses 1221, 8 sensing image data with a pixel resolution of 1MB can be obtained. After that, by merging them through software, high-quality sensing image data with a pixel resolution of 8 megabytes (8MB) can be easily obtained.

If the implementation concept of the multi-lens in this case is to be implemented by conventional optical lenses of considerable size, the size of the optical filter element and the sensing element must be greatly enlarged accordingly to cover multiple lenses. In addition, the large size of such conventional multi-lens optical modules is not conducive to integration into various products. Therefore, it can be seen that the aforementioned multi-lens optical module 20 assembled by using the super lens structure manufactured by the method of this case can easily realize the technical application that is not easy to achieve with conventional technology.

Furthermore, another novel technical application of the present invention is that part of the cylindrical super-smooth lenses 1221 can be positioned in a normal working area, and the rest of the cylindrical super-smooth lenses 1221 can be positioned in a backup working area. In this way, when any super-smooth lens in the normal working area (including the optical filter element and the optical sensor element located below it) is in a fault state, any super-smooth lens in the backup working area (including the optical filter element and the optical sensor element located below it) can be used as a replacement backup lens optical module.

For example, please refer to FIG. 8 , which is a cross-sectional schematic diagram of a multi-lens optical module 30 , which includes the aforementioned set of 8 cylindrical super-smooth lenses 1221 and a substrate 110 located below the cylindrical super-smooth lenses 1221 , an optical filter element 31 , whose upper surface contacts the lower surface of the substrate 110 ; and an optical sensing element 32 , which is adjacent to the lower surface of the optical filter element 31 .

The difference between the technical application shown in FIG. 7 is that in FIG. 8, the partial cylindrical super-smooth lenses located in the normal working area, in combination with the optical filter element 31 and the optical sensor element 32, can provide at least one red lens optical module R, one blue lens optical module B and two green lens optical modules G; on the other hand, the remaining cylindrical super-smooth lenses located in the backup working area, in combination with the optical filter element 31 and the optical sensor element 32, can provide at least one red lens optical module R, one blue lens optical module B and two green lens optical modules G. Any one of the lens optical modules G can be replaced with a backup lens optical module BK when it is in a fault state; based on this, compared with the limitation of the large size of conventional optical lenses, which leads to the major defect that there is no product with a multi-lens optical module configured as a backup or replacement on the market, the multi-lens optical module 30 disclosed in this case can easily realize the technical concept of automatic replacement of optical modules, increase the flexibility of technical application, and improve the reliability of various products combined with the multi-lens optical module 30.

Of course, another technical application example of FIG. 8 is that the replacement backup lens optical modules BK located in the backup working area can be used as a lens optical module that can provide at least one additional function, wherein the aforementioned additional function at least includes an artificial intelligence (AI) function, an augmented reality (AR) function, a virtual reality (VR) and/or a mixed reality (MR) function. In this way, the technical application scope of the multi-lens optical module 30 with a super-slim lens structure disclosed in this case can be further expanded.

The above implementation examples are only for illustrative purposes to illustrate the principle and efficacy of this case, as well as to explain the technical features of this case, and are not used to limit the scope of protection of this case. Any person familiar with this technology can easily complete changes or equal arrangements without violating the technical principles and spirit of this case, which are all within the scope advocated by this case.

110: Substrate

122: Cylindrical ultra-slim lens

Claims (19)

A method for manufacturing a super lens includes: depositing an optical material on a substrate; spin coating a nano-imprint resist on the optical material; contacting a stamp with the nano-imprint resist, wherein the stamp has a plurality of cylindrical concave portions and a convex portion, and the cylindrical concave portions are spaced apart from each other; after contacting the stamp with the nano-imprint resist, curing the nano-imprint resist to form a nano-imprint resist pattern, wherein the nano-imprint resist pattern has a plurality of cylindrical thick portions and a thin portion, and the cylindrical thick portions correspond to the cylindrical portions of the stamp respectively. The cylindrical concave portion, the thin portion corresponds to the convex portion of the stamp; wherein the stamp has an anti-adhesive layer located above the cylindrical concave portions and the convex portion of the stamp, and when the stamp is brought into contact with the nano-imprint resist, the anti-adhesive layer directly contacts the nano-imprint resist; removing the thin portion and leaving the cylindrical thick portions; and patterning the optical material according to the remaining cylindrical thick portions to form a plurality of cylindrical super-slim lenses; wherein a minimum spacing between two adjacent cylindrical super-slim lenses is between 75 nanometers and 125 nanometers. The method for manufacturing a super-slim lens as described in claim 1 further includes: after forming the cylindrical super-slim lenses, removing the cylindrical thick portions. The method for manufacturing a super lens as described in claim 1, wherein the step of making the stamp contact the nano-imprint resist includes filling the cylindrical recesses of the stamp with the nano-imprint resist, and the step of filling the cylindrical recesses of the stamp with the nano-imprint resist includes moving the stamp downward, heating the nano-imprint resist, or a combination thereof. A method for manufacturing a super lens as described in claim 1, wherein the step of curing the nanoimprint resist includes performing an ultraviolet light irradiation step. A method for manufacturing a super-slim lens as described in claim 1, wherein the step of curing the nano-imprint resist includes a cooling step, and the nano-imprint resist is a thermoplastic material. The method for manufacturing a super lens as described in claim 1 further includes: forming a chromium-containing layer on the optical material after depositing the optical material on the substrate and before spin-coating the nano-imprint resist on the optical material. A method for manufacturing a super lens as described in claim 1, wherein the optical material includes amorphous silicon, titanium oxide or a combination thereof. The method for manufacturing a super lens as described in claim 1 further includes: after depositing the optical material on the substrate and before spin-coating the nano-imprint resist on the optical material, forming a back protection layer under the substrate, the substrate being between the optical material and the back protection layer. A method for manufacturing a super-slim lens as described in claim 1, wherein the stamp is made from a master mold. A method for manufacturing a super-slim lens as described in claim 1, wherein the stamp is a disposable polymer mold. A super-flexible lens structure, comprising: a substrate; and a plurality of cylindrical super-flexible lenses spaced apart from each other, located on the upper surface of the substrate; wherein an angle between a side wall of one of the cylindrical super-flexible lenses and a bottom surface of the one of the cylindrical super-flexible lenses is 85 degrees to 88 degrees or 92 degrees to 95 degrees; wherein the cylindrical super-flexible lenses are formed in the manner described in claim 1. The super-flexible lens structure as described in claim 11, wherein the ratio of a height of one of the cylindrical super-flexible lenses to a maximum diameter of one of the cylindrical super-flexible lenses is between 1.25 and 3.5. The superlens structure as described in claim 11, wherein a height of one of the cylindrical superlenses is between 250 nanometers and 350 nanometers, and a maximum diameter of one of the cylindrical superlenses is between 100 nanometers and 200 nanometers. The superlens structure as described in claim 11, wherein a minimum distance between two adjacent cylindrical superlenses is between 75 nanometers and 125 nanometers. The super lens structure as described in claim 11, wherein the substrate is any one of a glass substrate, a quartz substrate or a sapphire substrate. A multi-lens optical module with a super-slim lens structure includes: a plurality of cylindrical super-slim lenses formed on the upper surface of a substrate and arranged at intervals; an optical filter element, whose upper surface contacts the lower surface of the substrate; and an optical sensing element adjacent to the lower surface of the optical filter element; wherein some of the cylindrical super-slim lenses are located in a normal working area, and the remaining cylindrical super-slim lenses are located in a backup working area; wherein the cylindrical super-slim lenses are formed in the manner described in claim 1. The multi-lens optical module as described in claim 16, wherein the partially cylindrical super-slim lenses located in the normal working area, in combination with the optical filter element and the optical sensing element, can provide at least one red lens optical module, one blue lens optical module and two green lens optical modules. The multi-lens optical module as described in claim 17, wherein the remaining cylindrical super-smooth lenses located in the backup working area, in combination with the optical filter element and the optical sensing element, can provide at least one replacement backup lens optical module for the red lens optical module, the blue lens optical module and the green lens optical modules when any one of them is in a fault state. The multi-lens optical module as described in claim 16, wherein the remaining cylindrical super-slim lenses located in the backup working area, in combination with the optical filter element and the optical sensing element, can provide at least one lens optical module with additional functions; wherein the additional functions at least include an artificial intelligence (AI) function, an augmented reality (AR) function, a virtual reality (VR) and/or a mixed reality (MR) function.

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