TWI838020B - Coating equipment - Google Patents

Abstract

The present invention is to suppress the central part of the paddle from sagging in a cup-type coating device. The present invention comprises: a coating tank 410 for containing a coating liquid; an anode disposed in the coating tank 410; a substrate holder configured to hold a substrate Wf with the coated surface Wf-a facing downward; a paddle 460 disposed between the anode and the substrate Wf; a base end 460A of the paddle 460 is supported, and the paddle 460 is moved back and forth along the coated surface Wf-a of the substrate Wf. a driving mechanism 462 constructed in a manner; a first magnet 464 provided on the paddle 460; and a second magnet 468 provided in a manner opposite to the first magnet 464; the first magnet 464 and the second magnet 468 are constructed in a manner such that a central portion 460C between a base end portion 460A and a front end portion 460B of the paddle 460 is close to a coated surface Wf-a of a substrate Wf, thereby bringing magnetic force to each other.

Description

Coating equipment

The present invention relates to a coating device.

Electrolytic plating apparatuses are known for forming a conductive film on a surface to be plated of a substrate (e.g., a semiconductor wafer). For example, Patent Document 1 discloses an immersion-type electrolytic plating apparatus in which a substrate is immersed in a plating solution in a vertical state to perform a plating process. In addition, a cup-type electrolytic plating apparatus is also known as an example of a plating apparatus in which a substrate is immersed in a plating solution in a horizontal state.

The immersion electrolytic coating device disclosed in Patent Document 1 is a device that arranges a paddle near the coating surface of the substrate, and stirs the coating liquid near the coating surface by moving the paddle back and forth along the coating surface of the substrate. Since the upper end of the paddle is supported, the lower end of the paddle vibrates when the coating liquid is stirred, so magnets are provided at the lower end of the paddle and the coating tank, respectively, and the magnetic force of the magnets is used to suppress the vibration of the lower end of the paddle.

[Prior technical literature] [Patent literature] [Patent literature 1] Patent publication No. 6329681

(Invent the problem you want to solve)

When the technology disclosed in Patent Document 1 is applied to a cup-type coating device, a new problem of sagging of the central portion of the blade will occur.

That is, in a cup-type coating device, the base end of the paddle is actually supported, and magnets are provided at the front end of the paddle and the coating groove. When the front end of the paddle is supported by such magnetic force (to suppress vibration), the center of the paddle may sag due to gravity. When the paddle is bent and the center sags, the paddle may interfere with the resistor arranged under the paddle and generate particles, so it is not suitable.

Therefore, one of the purposes of this application is to suppress the sagging of the center portion of the blade in a cup-type coating device. (Means for solving the problem)

One embodiment discloses a coating device, comprising: a coating tank for containing a coating liquid; an anode disposed in the coating tank; a substrate holder configured to hold the substrate with the surface to be coated facing downward; a paddle disposed between the anode and the substrate; and a paddle driving mechanism for supporting the base end of the paddle so that the front end of the paddle is moved upward. The paddle is constructed in such a way that it moves back and forth along the coated surface of the substrate; the first magnet is arranged on the paddle; and the second magnet is arranged opposite to the first magnet; the first magnet and the second magnet are constructed in such a way that the central part between the base end and the front end of the paddle approaches the coated surface of the substrate and exerts magnetic force on each other.

The following is a description of the implementation of the present invention with reference to the drawings. In the drawings described below, the same or equivalent components are marked with the same symbols, and repeated descriptions are omitted. ＜Overall structure of the coating device＞

FIG. 1 is a perspective view showing the overall structure of the coating device of this embodiment. FIG. 2 is a top view showing the overall structure of the coating device of this embodiment. As shown in FIGS. 1 and 2 , the coating device 1000 includes: a loading port 100, a transfer robot 110, an aligner 120, a pre-wetting module 200, a pre-preg module 300, a coating module 400, a cleaning module 500, a spin-rinse dryer 600, a transfer device 700, and a control module 800.

The loading port 100 is a module for carrying in substrates stored in a cassette such as a FOUP (not shown) in the coating apparatus 1000, or carrying out substrates from the coating apparatus 1000 to a cassette. In this embodiment, four loading ports 100 are arranged in a horizontal direction, but the number and arrangement of the loading ports 100 are not limited. The transport robot 110 is a robot for transporting substrates, and is configured in a manner of transferring substrates between the loading port 100, the aligner 120, the pre-wetting module 200, and the spin rinse dryer 600. When the transport robot 110 and the transport device 700 transfer substrates between the transport robot 110 and the transport device 700, the transfer of substrates can be performed via a temporary stage (not shown).

The aligner 120 is a module used to align the orientation plane or groove of the substrate in a specified direction. In this embodiment, two aligners 120 are arranged in a horizontal direction, but the number and arrangement of the aligners 120 are not limited. The prewet module 200 wets the coated surface of the substrate before the plating process with a processing liquid such as pure water or degassed water, thereby replacing the air inside the pattern formed on the surface of the substrate with the processing liquid. The prewet module 200 is constructed in a manner that the processing liquid inside the pattern is replaced with the plating liquid during plating, so as to implement a prewet treatment that easily supplies the plating liquid inside the pattern. In this embodiment, two prewet modules 200 are arranged in a vertical direction, but the number and arrangement of the prewet modules 200 are not limited.

The pre-preg module 300 is constructed by etching away a high-resistance oxide film existing on the surface of the seed layer formed on the plated surface of the substrate before the plating treatment with a treatment solution such as sulfuric acid or hydrochloric acid, and performing a pre-preg treatment to clean or activate the surface of the plated substrate. In this embodiment, two pre-preg modules 300 are arranged in the vertical direction, but the number and arrangement of the pre-preg modules 300 are not limited. The plating module 400 performs a plating treatment on the substrate. In this embodiment, there are two groups of 12 plating modules 400 arranged in 3 rows in the vertical direction and 4 rows in the horizontal direction, and a total of 24 plating modules 400 are provided, but the number and arrangement of the plating modules 400 are not limited.

The cleaning module 500 is configured to perform a cleaning process on the substrate in order to remove the coating liquid and the like remaining on the substrate after the coating process. In this embodiment, two cleaning modules 500 are arranged in the vertical direction, but the number and arrangement of the cleaning modules 500 are not limited. The spin-rinse dryer 600 is a module used to spin the substrate after the cleaning process at high speed to dry it. In this embodiment, two spin-rinse dryers are arranged in the vertical direction, but the number and arrangement of the spin-rinse dryers are not limited. The transport device 700 is a device used to transport substrates between multiple modules in the coating device 1000. The control module 800 is configured to control multiple modules of the coating device 1000. For example, it can be composed of a general computer or a special-purpose computer equipped with an input and output interface between the operator.

An example of a continuous coating process of the coating device 1000 is described. First, the substrate stored in the cassette is moved into the loading port 100. Then, the transport robot 110 takes out the substrate from the cassette of the loading port 100 and transports the substrate to the aligner 120. The aligner 120 aligns the position of the orientation plane or groove of the substrate in a specified direction. The transport robot 110 delivers the substrate aligned by the aligner 120 to the pre-wetting module 200.

The prewetting module 200 performs a prewetting process on the substrate. The transport device 700 transports the substrate that has been prewetted to the prepreg module 300. The prepreg module 300 performs a prepreg process on the substrate. The transport device 700 transports the substrate that has been prewetted to the coating module 400. The coating module 400 performs a coating process on the substrate.

The transport device 700 transports the substrate subjected to the coating process to the cleaning module 500. The cleaning module 500 performs a cleaning process on the substrate. The transport device 700 transports the substrate subjected to the cleaning process to the spin-rinsing dryer 600. The spin-rinsing dryer 600 performs a drying process on the substrate. The transport robot 110 receives the substrate from the spin-rinsing dryer 600 and transports the substrate subjected to the drying process to the cassette of the loading port 100. Finally, the cassette containing the substrate is unloaded from the loading port 100. <Structure of the coating module>

Next, the structure of the coating module 400 will be described. Since the 24 coating modules 400 in this embodiment have the same structure, only one coating module 400 will be described. FIG3 is a longitudinal cross-sectional view schematically showing the structure of a coating module of one embodiment.

As shown in FIG3 , the coating module 400 has a coating tank 410 for containing a coating liquid. The coating module 400 has a diaphragm 420 that separates the interior of the coating tank 410 in the vertical direction. The interior of the coating tank 410 is separated into a cathode region 422 and an anode region 424 by the diaphragm 420 .

The cathode region 422 and the anode region 424 are filled with plating liquids, respectively. The plating module 400 has a nozzle 426 opened toward the cathode region 422, and a supply source 428 for supplying the plating liquid in the cathode region 422 through the nozzle 426. The plating module 400 also has a mechanism for supplying the plating liquid in the anode region 424, but the mechanism is omitted from the figure. An anode 430 is provided on the bottom surface of the plating groove 410 of the anode region 424. A resistor 450 is arranged in the cathode region 422 opposite to the diaphragm 420. The resistor 450 is a component for uniformly performing a plating process on the plating surface Wf-a of the substrate Wf, and is formed by a plate-like component having many holes.

In addition, the coating module 400 has a substrate holder 440 for holding the substrate Wf in a state where the coated surface Wf-a faces downward. The substrate holder 440 has a feeding contact for feeding power from a power source not shown to the substrate Wf. The substrate holder 440 has: a sealing ring holder 442 for supporting the outer edge of the coated surface Wf-a of the substrate Wf; and a frame 446 for holding the sealing ring holder 442 to the substrate holder body not shown. In addition, the substrate holder 440 has: a back panel 444 for pressing the back side of the coated surface Wf-a of the substrate Wf; and a shaft 448 mounted on the back side of the substrate pressing surface of the back panel 444.

The coating module 400 is provided with a lifting mechanism 443 for lifting and lowering a substrate holder 440, and a rotating mechanism 447 for rotating the substrate holder 440 in a manner that the substrate Wf rotates around a virtual axis of a shaft 448 (a virtual rotation axis extending vertically in the center of the coating surface Wf-a). The lifting mechanism 443 and the rotating mechanism 447 can be realized by a known mechanism such as a motor. The coating module 400 is configured in a manner that the substrate Wf is immersed in the coating liquid of the cathode region 422 using the lifting mechanism 443, and a voltage is applied between the anode 430 and the substrate Wf, thereby performing a coating process on the coating surface Wf-a of the substrate Wf.

In addition, the coating module 400 has a paddle 460 disposed between the anode 430 and the substrate Wf, specifically, between the resistor 450 and the substrate Wf. The paddle 460 is disposed opposite to the coating surface Wf-a of the substrate Wf. The coating module 400 has a base end 460A that actually supports the paddle 460 and a driving mechanism 462 for moving the paddle 460 back and forth along the coating surface Wf-a of the substrate Wf. The driving mechanism 462 can be realized by a known mechanism such as a motor, for example.

FIG. 4A and FIG. 4B are top views schematically showing the structure of the paddle. As shown in FIG. 4A, the paddle 460 can be formed by a plate member having a plurality of rod-shaped members 460a arranged in a grid shape to form a plurality of holes 460b. The paddle 460 has a base end 460A; a front end 460B on the opposite side of the base end 460A; and a center portion 460C between the base end 460A and the front end 460B. In addition, as shown in FIG. 4B, the paddle 460 can also be formed by a plate member having a plurality of honeycomb-shaped holes 460c. The paddle 460 is moved back and forth by a driving mechanism 462 to stir the plating liquid near the coating surface Wf-a of the substrate Wf, thereby promoting the plating process. 4A and 4B are top views showing that the paddle blade 460 is in a rectangular shape, but the present invention is not limited thereto, and the paddle blade 460 may have any shape.

FIG5 is a longitudinal cross-sectional view schematically showing a portion of the structure of a coating module of an embodiment by enlarging the portion of the dotted line α in FIG3 . As shown in FIG5 , the coating module 400 has: a first magnet 464 provided on the blade 460; and a second magnet 468 provided in a manner opposite to the first magnet 464.

More specifically, the first magnet 464 includes a front end magnet portion 464B disposed at the front end portion 460B of the paddle 460. The front end magnet portion 464B has a front end inner magnet portion 464B-1 and a front end outer magnet portion 464B-2 disposed along the extension direction of the paddle 460. The front end inner magnet portion 464B-1 is disposed at a position corresponding to the inner side of the front end of the paddle 460, and has an N pole at the bottom and an S pole at the top. The front end outer magnet portion 464B-2 is disposed at a position corresponding to the front end of the paddle 460, and has an N pole at the bottom and an S pole at the top.

In addition, the second magnet 468 is disposed in the coating groove 410 in a manner opposite to the lower surface of the first magnet 464. The second magnet 468 includes a first inner magnet portion 468B-1 configured to enhance the magnetic force of the front inner magnet portion 464B-1. Specifically, the first inner magnet portion 468B-1 is configured with the same pole (N pole) as the lower portion (N pole) of the front inner magnet portion 464B-1 at the upper portion, and the S pole is configured at the lower portion. The first inner magnet portion 468B-1 is fixed to the plating groove 410, and the first inner magnet portion 468B-1 and the front inner magnet portion 464B-1 repel each other, thereby generating a magnetic force that increases the front inner magnet portion 464B-1.

The second magnet 468 includes a first outer magnet portion 468B-2 configured to reduce the magnetic force of the front outer magnet portion 464B-2. Specifically, the first outer magnet portion 468B-2 is configured with a pole (S pole) opposite to the lower portion (N pole) of the front outer magnet portion 464B-2 at the upper portion, and the N pole is configured at the lower portion. The first outer magnet portion 468B-2 is fixed to the plating groove 410, and the first outer magnet portion 468B-2 and the front outer magnet portion 464B-2 attract each other to generate a magnetic force that reduces the first outer magnet portion 468B-2.

As a result, as shown in FIG. 5 , since a magnetic force is generated to lower the front end of the paddle 460 and a magnetic force is generated to increase the inner side of the front end, a force is generated to lift the central portion 460C of the paddle 460. As a result, the central portion 460C of the paddle 460 can be suppressed from sagging to the side of the resistor 450. That is, since the thickness of the paddle 460 is small relative to the length from the base end 460A to the front end 460B, the paddle 460 is easily bent by gravity. In particular, when a resin with low rigidity is used as the material of the paddle 460, even if the base end 460A of the paddle 460 is actually supported and the front end 460B is supported to sag by the magnetic force, the central portion 460C may still sag to the side of the resistor 450. In contrast, the first magnet 464 and the second magnet 468 of the present embodiment are configured so that the central portion 460C of the paddle 460 is close to the coated surface Wf-a of the substrate Wf and exerts magnetic force on each other. This prevents the central portion 460C of the paddle 460 from sagging to the side of the resistor 450, and as a result, prevents the paddle 460 from interfering with the resistor 450 and generating particles.

The force that lifts the central portion 460C of the paddle 460 is determined by the magnetic force acting between the first magnet 464 and the second magnet 468. By adjusting the magnetic force acting on both, as shown in FIG5 , the paddle 460 can be maintained substantially horizontally. In addition, by further increasing the magnetic force acting on both, as shown by the dotted line β in FIG5 , the paddle 460 can be maintained in an arched shape in a manner that the central portion 460C of the paddle 460 protrudes from the coating surface Wf-a side of the substrate Wf. Thus, since the paddle 460 is close to the coating surface Wf-a of the substrate Wf, the stirring effect of the coating liquid near the coating surface Wf-a can be enhanced. In particular, when the present embodiment adopts the substrate holder 440 having the sealing ring holder 442 supporting the outer edge of the plated surface Wf-a, when the entire paddle 460 is brought close to the plated surface Wf-a, there is a problem of interference between the paddle 460 and the sealing ring holder 442. In this regard, the present embodiment forms the paddle 460 into an arched shape, thereby avoiding interference with the sealing ring holder 442 and bringing the paddle 460 close to the plated surface Wf-a.

Next, a variation of the coating module 400 will be described. FIG6 is a longitudinal cross-sectional view schematically showing a portion of the structure of a coating module of an embodiment by enlarging the structure. The coating module 400 shown in FIG6 has the same structure as the coating module 400 shown in FIG5, but the difference is that a magnet is further provided on the base end 460A side of the blade 460. The description of the same structure as FIG5 is omitted.

As shown in FIG6 , the first magnet 464 further includes a base end magnet portion 464A provided at the base end portion 460A of the blade 460. The base end magnet portion 464A includes a base end inner side magnet portion 464A-1 and a base end outer side magnet portion 464A-2 arranged along the extending direction of the blade 460. The base end inner side magnet portion 464A-1 is provided at a position corresponding to the innermost base end of the blade 460, and has an N pole at the bottom and an S pole at the top. The base end outer side magnet portion 464A-2 is provided at a position corresponding to the basemost end of the blade 460, and has an N pole at the bottom and an S pole at the top.

In addition, the second magnet 468 includes a second inner magnet portion 468A-1 configured to enhance the magnetic force of the base inner magnet portion 464A-1. Specifically, the second inner magnet portion 468A-1 is configured with the same pole (N pole) as the lower portion (N pole) of the base inner magnet portion 464A-1 at the upper portion, and the S pole is configured at the lower portion. The second inner magnet portion 468A-1 is fixed to the plating groove 410, and the second inner magnet portion 468A-1 and the base inner magnet portion 464A-1 repel each other, thereby generating a magnetic force that enhances the second inner magnet portion 468A-1.

The second magnet 468 includes a second outer magnet portion 468A-2 configured to reduce the magnetic force of the base outer magnet portion 464A-2. Specifically, the second outer magnet portion 468A-2 is configured with a pole (S pole) opposite to the lower portion (N pole) of the base outer magnet portion 464A-2 at the upper portion, and the N pole is configured at the lower portion. The second outer magnet portion 468A-2 is fixed to the plating groove 410, and the second outer magnet portion 468A-2 and the base outer magnet portion 464A-2 attract each other, thereby generating a magnetic force that reduces the second outer magnet portion 468A-2.

Since the magnetic force that lowers the most proximal end of the paddle 460 and increases the magnetic force on the inner side of the most proximal end is generated not only on the front end 460B side of the paddle 460 but also on the base end 460A side, the magnetic force acts to bring the central portion 460C of the paddle 460 closer to the plated surface Wf-a of the substrate Wf. As a result, the central portion 460C of the paddle 460 can be more strongly suppressed from sagging toward the resistor 450 side.

Next, a variation of the coating module 400 will be described. FIG7 is a longitudinal cross-sectional view schematically showing a portion of the structure of a coating module of an embodiment in an enlarged manner. In the embodiments shown in FIG5 and FIG6 , the second magnet 468 is disposed in the coating groove 410 in a manner opposite to the lower surface of the first magnet 464. However, in addition to this, the second magnet 468 may be disposed in the coating groove 410 in a manner opposite to the upper surface of the first magnet 464. This point will be described below.

As shown in Fig. 7, the front inner magnet portion 464B-1 of this embodiment has an S pole at the bottom and an N pole at the top, while the front outer magnet portion 464B-2 has an N pole at the bottom and an S pole at the top.

In addition, the second magnet 468 is disposed in the plating groove 410 so as to sandwich the front end magnet portion 464B in the vertical direction, in other words, so as to face the upper and lower surfaces of the front end magnet portion 464B. Specifically, the first inner magnet portion 468B-1 facing the lower surface of the front end inner magnet portion 464B-1 has the same pole (S pole) as the lower portion (S pole) of the front end inner magnet portion 464B-1 at the upper portion, and has the N pole at the lower portion. The first inner magnet portion 468B-1' opposite to the upper surface of the front inner magnet portion 464B-1 is disposed at the lower portion with the opposite pole (S pole) to the upper portion (N pole) of the front inner magnet portion 464B-1, and the N pole is disposed at the upper portion. In this way, the magnetic force of the front inner magnet portion 464B-1 is enhanced.

In addition, the first outer magnet portion 468B-2 opposite to the bottom of the front outer magnet portion 464B-2 is disposed at the upper portion with the opposite pole (S pole) to the bottom portion (N pole) of the front outer magnet portion 464B-2, and the N pole is disposed at the lower portion. The first outer magnet portion 468B-2 opposite to the top portion of the front outer magnet portion 464B-2 is disposed at the lower portion with the same pole (S pole) as the top portion (S pole) of the front outer magnet portion 464B-2, and the N pole is disposed at the upper portion. In this way, the magnetic force of the front outer magnet portion 464B-2 is reduced.

In addition, the base end inner magnetic part 464A-1 of this embodiment has an S pole at the bottom and an N pole at the top, and the base end outer magnetic part 464A-2 has an N pole at the bottom and an S pole at the top.

The second magnet 468 is disposed in the plating groove 410 so as to sandwich the base end magnet portion 464A in the vertical direction, in other words, so as to face the upper and lower surfaces of the base end magnet portion 464A. Specifically, the second inner magnet portion 468A-1 facing the lower surface of the base end inner magnet portion 464A-1 has the same pole (S pole) as the lower portion (S pole) of the base end inner magnet portion 464A-1 at the upper portion, and has the N pole at the lower portion. The second inner magnet portion 468A-1 facing the upper surface of the base inner magnet portion 464A-1 has the opposite pole (S pole) to the upper portion (N pole) of the base inner magnet portion 464A-1 at the lower portion and the N pole at the upper portion, thereby enhancing the magnetic force of the base inner magnet portion 464A-1.

In addition, the first outer magnet portion 468A-2 opposite to the bottom of the base outer magnet portion 464A-2 is disposed at the upper portion with the opposite pole (S pole) to the lower portion (N pole) of the base outer magnet portion 464A-2, and the N pole is disposed at the lower portion. The second outer magnet portion 468A-2 opposite to the top of the base outer magnet portion 464A-2 is disposed at the lower portion with the same pole (S pole) as the upper portion (S pole) of the base outer magnet portion 464A-2, and the N pole is disposed at the upper portion. In this way, the magnetic force of the base outer magnet portion 464A-2 is reduced.

As described above, in this embodiment, the second magnet 468 is disposed not only at the bottom of the tip magnet portion 464B and the base magnet portion 464A, but also at the top. Therefore, since the magnetic force is strengthened by bringing the center portion 460C of the paddle 460 close to the plated surface Wf-a of the substrate Wf, the center portion 460C of the paddle 460 can be more strongly suppressed from sagging to the resistor 450 side.

Furthermore, the second magnet 468 of this embodiment includes a front end opposing magnet portion 468C disposed in the coating groove 410 opposite to the front end magnet portion 464B (front end outer magnet portion 464B-2) in the extension direction of the blade 460. The front end opposing magnet portion 468C is configured in a manner to bring a repulsive magnetic force to the front end magnet portion 464B. Specifically, the front end opposing magnet portion 468C is configured with an N pole at the bottom and an S pole at the top. The front end outer magnet portion 464B-2 is also configured with an N pole at the bottom and an S pole at the top. Therefore, since a repulsive magnetic force is generated between the front end opposing magnet portion 468C and the front end outer magnet portion 464B-2, a force that forms the blade 460 into an arc shape can be promoted. In addition, the front end opposing magnet portion 468C is not limited to this embodiment, and can also be applied to the embodiments shown in Figures 5, 6, or 8.

Next, a modification of the coating module 400 will be described. Fig. 8 is a longitudinal cross-sectional view schematically showing a part of the structure of a coating module according to an embodiment by enlarging the part.

In this embodiment, the first magnet 464 has: a front end magnet portion 464B provided at the front end portion 460B of the blade 460; a base end magnet portion 464A provided at the base end portion 460A of the blade 460; and a central magnet portion 464C provided at the central portion 460C of the blade 460. Specifically, the front end magnet portion 464B is provided with an N pole at the bottom and an S pole at the top. The base end magnet portion 464A is provided with an N pole at the bottom and an S pole at the top. The central magnet portion 464C is provided with an N pole at the bottom and an S pole at the top.

The second magnet 468 has a first slot-coated magnet portion 468D disposed in the coating groove 410 in such a manner as to reduce the magnetic force of the front end magnet portion 464B. The first slot-coated magnet portion 468D is disposed in the coating groove 410 in such a manner as to face the upper surface of the front end magnet portion 464B. The first slot-coated magnet portion 468D has the same pole (S pole) as the upper portion (S pole) of the front end magnet portion 464B disposed in the lower portion, and has the N pole disposed in the upper portion. The first slot-coated magnet portion 468D is fixed to the coating groove 410, and the magnetic force reducing the front end magnet portion 464B is generated by the mutual repulsion between the first slot-coated magnet portion 468D and the front end magnet portion 464B.

The second magnet 468 has a second plated slot magnet portion 468E disposed in the plated slot 410 in such a manner as to reduce the magnetic force of the base end magnet portion 464A. The second plated slot magnet portion 468E is disposed in the plated slot 410 in such a manner as to face the upper surface of the base end magnet portion 464A. The second plated slot magnet portion 468E has the same pole (S pole) as the upper portion (S pole) of the base end magnet portion 464A disposed in the lower portion, and has the N pole disposed in the upper portion. The second plated slot magnet portion 468E is fixed to the plated slot 410, and the second plated slot magnet portion 468E and the base end magnet portion 464A repel each other, thereby generating a magnetic force that reduces the base end magnet portion 464A.

The second magnet 468 has a resistor magnet portion 468F disposed on the resistor 450 in such a manner as to increase the magnetic force of the central magnet portion 464C. The resistor magnet portion 468F is disposed on the resistor 450 in such a manner as to face the lower surface of the central magnet portion 464C. The resistor magnet portion 468F is disposed at the lower portion with the same pole (N pole) as the lower portion (N pole) of the central magnet portion 464C, and the S pole is disposed at the upper portion. The resistor magnet portion 468F is fixed to the resistor 450, and the resistor magnet portion 468F and the central magnet portion 464C repel each other, thereby generating a magnetic force that increases the central magnet portion 464C. In this way, by lowering the front end portion 460B and the base end portion 460A of the paddle 460 and raising the center portion 460C, it is possible to suppress the center portion 460C of the paddle 460 from sagging toward the resistor 450 side.

In addition, as shown in FIG8 , the coating device 1000 of this embodiment has a detector 480 disposed opposite to the front end 460B of the blade 460 in the extending direction of the blade 460. The detector 480 is a distance detector configured to measure the distance to the front end 460B of the blade 460. The detector 480 may be a known detector such as an optical detector, a radio detector, or an ultrasonic detector.

The coating device 1000 can issue an alarm when the distance between the front end 460B of the blade 460 measured by the detector 480 is greater than a preset critical value. That is, by providing the first magnet 464 and the second magnet 468, a magnetic force is generated to suppress the central portion 460C of the blade 460 from drooping to the side of the resistor 450. When the magnetic force increases, as shown by the dotted line β, the blade 460 becomes an arch in a manner protruding from the upper side. Furthermore, as the magnetic force increases, the front end 460B of the blade 460 moves in a direction away from the detector 480. In other words, the distance between the detector 480 and the front end 460B of the paddle 460 increases as the central portion 460C of the paddle 460 forms an arch shape by protruding from the side of the coated surface Wf-a of the substrate Wf. When the paddle 460 becomes an arch shape beyond the preset range, the paddle 460 may contact the coated surface Wf-a of the substrate Wf. Therefore, if the coating device 1000 makes the distance between the detector 480 and the front end 460B of the paddle 460 larger than the preset critical value, an alarm can be issued to urge the operator to stop the device and perform maintenance. In addition, the detector 480 is not limited to this embodiment, and can also be applied to the embodiments shown in Figures 5 to 7.

Next, a modification of the coating module 400 will be described. Fig. 9 is a longitudinal cross-sectional view schematically showing a part of the structure of a coating module according to an embodiment by enlarging the part.

In this embodiment, the first magnet 464 includes a front end magnet portion 464B provided at the front end portion 460B of the blade 460. Specifically, the front end magnet portion 464B has an N pole at the bottom and an S pole at the top.

The second magnet 468 includes a third clad slot magnet portion 468G disposed in the clad slot 410 opposite to the front end magnet portion 464B in the extension direction of the blade 460. The third clad slot magnet portion 468G is configured in a manner to bring about a magnetic force that attracts the front end magnet portion 464B. Specifically, the third clad slot magnet portion 468G is configured with an S pole at the bottom and an N pole at the top. Therefore, a magnetic force that attracts each other is generated between the third clad slot magnet portion 468G and the front end magnet portion 464B. Since the third clad slot magnet portion 468G is fixed to the clad slot 410, the front end magnet portion 464B is attracted in a direction approaching the third clad slot magnet portion 468G. As a result, since the deflection of the paddle 460 due to gravity is eliminated, the central portion 460C of the paddle 460 can be suppressed from sagging.

Several embodiments of the present invention are described above, but the embodiments of the present invention are for easy understanding of the present invention and are not intended to limit the present invention. The present invention can be modified and improved without departing from its purpose, and the present invention naturally includes its equivalents. In addition, within the scope of solving at least part of the above-mentioned problems or achieving at least part of the effects, the various components described in the patent application and the specification can be arbitrarily combined or omitted.

One embodiment of the present application discloses a coating device, comprising: a coating tank for containing a coating liquid; an anode disposed in the coating tank; a substrate holder configured to hold the substrate with the surface to be coated facing downward; a paddle disposed between the anode and the substrate; and a paddle driving mechanism for supporting the base end of the paddle. , so that the paddle moves back and forth along the coated surface of the substrate; the first magnet is provided on the paddle; and the second magnet is provided opposite to the first magnet; the first magnet and the second magnet are so constructed that the central portion between the base end and the front end of the paddle approaches the coated surface of the substrate and exerts magnetic force on each other.

Furthermore, an embodiment of the present application discloses a coating device, wherein the aforementioned first magnet includes a front end magnet portion, which is disposed at the aforementioned front end portion of the aforementioned blade, and has a front end inner magnet portion and a front end outer magnet portion arranged along the extension direction of the aforementioned blade, and the aforementioned second magnet includes: a first inner magnet portion, which is disposed in the aforementioned coating groove in a manner to increase the magnetic force of the aforementioned front end inner magnet portion; and a first outer magnet portion, which is disposed in the aforementioned coating groove in a manner to reduce the magnetic force of the aforementioned front end outer magnet portion.

Furthermore, an embodiment of the present application discloses a coating device, wherein the aforementioned first magnet further includes a base end magnet portion, which is disposed at the aforementioned base end portion of the aforementioned blade and has a base end inner magnet portion and a base end outer magnet portion arranged along the extension direction of the aforementioned blade, and the aforementioned second magnet further includes: a second inner magnet portion, which is disposed in the aforementioned coating groove in a manner to increase the magnetic force of the aforementioned base end inner magnet portion; and a second outer magnet portion, which is disposed in the aforementioned coating groove in a manner to reduce the magnetic force of the aforementioned base end outer magnet portion.

Furthermore, an embodiment of the present application discloses a coating device, which further includes a resistor, which is arranged between the anode and the blade, the first magnet having: a front end magnet portion, which is arranged at the front end portion of the blade; a base end magnet portion, which is arranged at the front base portion of the blade; and a central magnet portion, which is arranged at the front central portion of the blade; the second magnet having: a first coating slot magnet portion, which is arranged in the coating slot in a manner to reduce the magnetic force of the front end magnet portion; a second coating slot magnet portion, which is arranged in the coating slot in a manner to reduce the magnetic force of the base end magnet portion; and a resistor magnet portion, which is arranged in the resistor in a manner to increase the magnetic force of the central magnet portion.

Furthermore, an embodiment of the present application discloses a coating device, wherein the second magnet includes a front end relative magnet portion, which is arranged in the coating groove opposite to the front end magnet portion in the extension direction of the blade and is constructed in a manner to bring about a magnetic force that repels the front end magnet portion.

Furthermore, an embodiment of the present application discloses a coating device, which further includes a detector, which is arranged opposite to the aforementioned front end portion of the aforementioned paddle in the extension direction of the aforementioned paddle and is constructed in a manner to measure the distance between the aforementioned paddle and the aforementioned front end portion of the aforementioned paddle.

Furthermore, one embodiment of the present application discloses a coating device, wherein the first magnet includes a front end magnet portion, which is disposed at the front end portion of the blade, and the second magnet includes a third coating slot magnet portion, which is disposed in the coating slot opposite to the front end magnet portion in the extension direction of the blade and is constructed in a manner to bring about a magnetic force that attracts the front end magnet portion.

100: Loading port 110: Transfer robot 120: Alignment device 200: Pre-wetting module 300: Pre-preg module 400: Plating module 410: Plating tank 420: Diaphragm 422: Cathode area 424: Anode area 426: Nozzle 428: Supply source 430: Anode 440: Substrate holder 442: Sealing ring holder 443: Lifting mechanism 444: Back panel 446: Frame 447: Rotation mechanism 448: Shaft 450: Resistor 460: Paddle 460a: Rod-shaped member 460b, 460c: Hole 460A: Base end 460B: Front end 460C: Central part 462: Driving mechanism 464: First magnet 464A: Base end magnet 464A-1: Base end inner magnet 464A-2: Base end outer magnet 464B: Front end magnet 464B-1: Front end inner magnet 464B-2: Front end outer magnet 464C: Central magnet 468: Second magnet 468A-1: Second inner magnet 468A-2: Second outer magnet 468B: First magnet 468B-1: First inner magnet 468B-2: First outer magnet 468C: Front end opposite magnet 468D: First plated groove magnet 468E: Second plated groove magnet 468F: Resistor magnet 468G: Third plated groove magnet 480: Detector 500: Cleaning module 600: Spin wash dryer 700: Transport device 800: Control module 1000: Plated device Wf: Substrate Wf-a: Plated surface

FIG. 1 is a perspective view showing the overall structure of the coating device of the present embodiment. FIG. 2 is a top view showing the overall structure of the coating device of the present embodiment. FIG. 3 is a longitudinal sectional view schematically showing the structure of a coating module of the present embodiment. FIG. 4A is a top view schematically showing the structure of a propeller blade. FIG. 4B is a top view schematically showing the structure of a propeller blade. FIG. 5 is a longitudinal sectional view schematically showing a part of the structure of a coating module of the present embodiment by enlarging it. FIG. 6 is a longitudinal sectional view schematically showing a part of the structure of a coating module of the present embodiment by enlarging it. FIG. 7 is a longitudinal sectional view schematically showing a part of the structure of a coating module of the present embodiment by enlarging it. FIG8 is a longitudinal cross-sectional view schematically showing a part of the structure of a coating module in an enlarged form. FIG9 is a longitudinal cross-sectional view schematically showing a part of the structure of a coating module in an enlarged form.

410: Plated groove

442: Sealing ring holder

444: Back panel

450: Resistor

460: Oar blade

460A: Base end

460B: front end

460C: Central area

462: Driving mechanism

464: The first magnet

464B: Front magnet part

464B-1: Front inner magnet part

464B-2: Front outer magnet part

468: Second magnet

468B: First magnet part

468B-1: First inner magnet part

468B-2: First outer magnet part

Wf: Substrate

Wf-a: coated

Claims (7)

A cup-type coating device includes: a coating tank for containing coating liquid; an anode disposed in the coating tank; a substrate holder configured to hold the substrate with the coated surface facing downward; a paddle disposed between the anode and the substrate; a paddle driving mechanism configured to support the base end of the paddle so that the paddle moves back and forth along the coated surface of the substrate; a first magnet disposed on the paddle; and a second magnet disposed opposite to the first magnet; the first magnet and the second magnet are configured so that the center portion between the base end and the front end of the paddle approaches the coated surface of the substrate and exerts magnetic force on each other. The cup-type coating device of claim 1, wherein the first magnet includes a front end magnet portion, which is disposed at the front end portion of the blade, and has a front end inner magnet portion and a front end outer magnet portion arranged along the extension direction of the blade, and the second magnet includes: a first inner magnet portion, which is disposed in the coating groove in a manner to increase the magnetic force of the front end inner magnet portion; and a first outer magnet portion, which is disposed in the coating groove in a manner to reduce the magnetic force of the front end outer magnet portion. The cup-type coating device of claim 2, wherein the first magnet further comprises a base end magnet portion, which is disposed at the aforementioned base end portion of the blade, and has a base end inner magnet portion and a base end outer magnet portion arranged along the extension direction of the blade, and the second magnet further comprises: a second inner magnet portion, which is disposed in the coating groove in a manner to increase the magnetic force of the base end inner magnet portion; and a second outer magnet portion, which is disposed in the coating groove in a manner to reduce the magnetic force of the base end outer magnet portion. The cup-type coating device of claim 1 further comprises a resistor, which is arranged between the anode and the blade, wherein the first magnet comprises: a front end magnet portion, which is arranged at the front end portion of the blade; a base end magnet portion, which is arranged at the front base portion of the blade; and a central magnet portion, which is arranged at the front central portion of the blade; the second magnet comprises: a first coating slot magnet portion, which is arranged at the coating slot in a manner to reduce the magnetic force of the front end magnet portion; a second coating slot magnet portion, which is arranged at the coating slot in a manner to reduce the magnetic force of the base end magnet portion; and a resistor magnet portion, which is arranged at the resistor in a manner to increase the magnetic force of the central magnet portion. A cup-type coating device as in any one of claims 2 to 4, wherein the second magnet includes a front end opposing magnet portion, which is disposed in the coating groove opposite to the front end magnet portion in the extension direction of the blade, and is constructed in a manner to bring about a magnetic force that repels the front end magnet portion. A cup-type coating device as in any one of claims 2 to 4, further comprising a detector, which is arranged opposite to the aforementioned front end of the aforementioned blade in the extension direction of the aforementioned blade, and is constructed in a manner to measure the distance between the aforementioned front end of the aforementioned blade. The cup-type coating device of claim 1, wherein the first magnet includes a front end magnet portion, which is disposed at the front end portion of the blade, and the second magnet includes a third coating slot magnet portion, which is disposed in the coating slot opposite to the front end magnet portion in the extension direction of the blade, and is constructed in a manner to bring about a magnetic force that attracts the front end magnet portion.