TWI837548B - Component inspection jig - Google Patents

Component inspection jig Download PDF

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Publication number
TWI837548B
TWI837548B TW110142849A TW110142849A TWI837548B TW I837548 B TWI837548 B TW I837548B TW 110142849 A TW110142849 A TW 110142849A TW 110142849 A TW110142849 A TW 110142849A TW I837548 B TWI837548 B TW I837548B
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Taiwan
Prior art keywords
transmission member
cantilever
hole
conductive member
transmission
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TW110142849A
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Chinese (zh)
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TW202321699A (en
Inventor
陳文鍾
黃偉瑄
黃軍衛
鄒明穎
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致茂電子股份有限公司
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Application filed by 致茂電子股份有限公司 filed Critical 致茂電子股份有限公司
Priority to TW110142849A priority Critical patent/TWI837548B/en
Priority to CN202210137262.7A priority patent/CN116136553A/en
Publication of TW202321699A publication Critical patent/TW202321699A/en
Application granted granted Critical
Publication of TWI837548B publication Critical patent/TWI837548B/en

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Abstract

The invention discloses a component inspection jig, which comprises a carrier, a signal feed-in portion, and a metal conductive member. The carrier is defined with a supporting surface. The signal feed-in portion is fixed on the carrier and comprises a first transmission member and a second transmission member. The metal conductive member is disposed on the supporting surface and comprises a first conductive member and a second conductive member that are electrically insulated. The first conductive member is electrically connected to the first transmission member, and the second conductive member is electrically connected to the second transmission member. The support surface is defined with a sensing area, and the metal conductive member inside the periphery of the sensing area and the metal conductive member outside the periphery of the sensing area are not coplanar.

Description

元件檢測治具Component testing fixture

本發明係關於一種元件檢測治具,特別是關於一種可以降低量測誤差的元件檢測治具。The present invention relates to a component detection fixture, and in particular to a component detection fixture capable of reducing measurement errors.

隨著科技的進步,不僅是智慧型手機與電腦,日常接觸到的工具、車輛或各種偵測器等設備都陸續開始支援連網的功能。雖然人們的生活更加便利了,但也意味著設備中的元件也具有更高的規格要求。舉例來說,由於5G連網越來越普及,設備中的被動元件也需要支援更高的頻段,而為了檢測最新的被動元件,各種被動元件的檢測設備也需要能夠操作在更高的頻段。以傳統的阻抗分析儀來說,在量測待測的被動元件之前需要進行校正,例如使用開路(open)標準件進行校正。但是,傳統的阻抗分析儀的電路架構都忽略了檢測治具的誤差,例如檢測治具帶有極小的寄生電容,導致操作在高頻頻段時,使用開路標準件量測到的阻抗會遠小於無限大。此外,傳統的檢測治具也可能頻繁插拔之下改變了信號傳輸的電子路徑長度,讓阻抗分析儀在高頻頻段時產生校正失準的問題。With the advancement of technology, not only smartphones and computers, but also tools, vehicles, or various detectors that we come into contact with in daily life have gradually begun to support networking functions. Although people's lives have become more convenient, it also means that the components in the equipment also have higher specifications. For example, as 5G networking becomes more and more popular, the passive components in the equipment also need to support higher frequency bands, and in order to detect the latest passive components, various passive component detection equipment also needs to be able to operate at higher frequency bands. For traditional impedance analyzers, calibration is required before measuring the passive component to be tested, such as using open circuit standards for calibration. However, the circuit architecture of traditional impedance analyzers ignores the errors of the test fixtures. For example, the test fixtures have extremely small parasitic capacitance, which causes the impedance measured by the open-circuit standard to be much smaller than infinity when operating in the high-frequency band. In addition, the traditional test fixtures may also change the length of the electronic path of signal transmission due to frequent plugging and unplugging, causing the impedance analyzer to have calibration inaccuracies in the high-frequency band.

據此,業界需要一種新的檢測治具,能夠減少阻抗分析儀在高頻頻段時的校正誤差,以利正確地進行校正並且量測待測元件。Therefore, the industry needs a new test fixture that can reduce the calibration error of the impedance analyzer in the high-frequency band, so as to correctly calibrate and measure the device under test.

本發明提供一種元件檢測治具,結構上改良了信號饋入的路徑與設置待測元件的位置,可以減少寄生電容並且避免引起電子路徑的長度誤差。The present invention provides a component testing fixture, which improves the path of signal feeding and the location of the component to be tested in structure, can reduce parasitic capacitance and avoid causing length error of the electronic path.

本發明提出一種元件檢測治具,包含承載板、信號饋入部、第一導電件以及第二導電件。承載板包含支撐面、第一貫孔與第二貫孔。信號饋入部包含第一傳輸件與第二傳輸件。第一導電件包含第一本體部與第一懸臂,設置於支撐面且電性連接第一傳輸件,第一懸臂與支撐面夾有第一角度,且第一懸臂的第一端距離第一本體部達第一高度。第二導電件包含第二本體部與第二懸臂,第二本體部設置於支撐面且電性連接第二傳輸件,第二懸臂與支撐面夾有第一角度,且第二懸臂的第二端距離第二本體部達第一高度。其中第一貫孔與第二貫孔分別容置第一傳輸件與第二傳輸件。The present invention proposes a component detection fixture, comprising a supporting plate, a signal feeding part, a first conductive part and a second conductive part. The supporting plate comprises a supporting surface, a first through hole and a second through hole. The signal feeding part comprises a first transmission part and a second transmission part. The first conductive part comprises a first main body and a first cantilever, which is arranged on the supporting surface and electrically connected to the first transmission part, the first cantilever and the supporting surface are at a first angle, and the first end of the first cantilever is at a first height away from the first main body. The second conductive part comprises a second main body and a second cantilever, the second main body is arranged on the supporting surface and electrically connected to the second transmission part, the second cantilever and the supporting surface are at a first angle, and the second end of the second cantilever is at a first height away from the second main body. The first through hole and the second through hole respectively accommodate the first transmission component and the second transmission component.

於一些實施例中,第一傳輸件可以穿設於第一貫孔且露出於支撐面,第二傳輸件可以穿設於第二貫孔且露出於支撐面,第一本體部接觸第一傳輸件,第二本體部接觸第二傳輸件。當第一端與第二端分別抵靠待測元件的第一電極與第二電極時,第一端距離第一本體部達第二高度,第二端距離第二本體部達第二高度,且第二高度可以小於第一高度。此外,承載板更可以具有多個第二貫孔,信號饋入部更可以具有多個第二傳輸件,每一個第二傳輸件穿設於所述多個第二貫孔其中之一,且每一個第二貫孔與第一貫孔之間的距離可以相同。另外,元件檢測治具更可以包含升降單元與信號適配器,信號饋入部電性連接信號適配器,承載板與信號適配器固定於升降單元,升降單元於垂直方向上可以同時移動承載板與信號適配器。In some embodiments, the first transmission member may be inserted into the first through hole and exposed on the supporting surface, the second transmission member may be inserted into the second through hole and exposed on the supporting surface, the first body portion contacts the first transmission member, and the second body portion contacts the second transmission member. When the first end and the second end respectively abut against the first electrode and the second electrode of the device under test, the first end is at a second height from the first body portion, the second end is at a second height from the second body portion, and the second height may be less than the first height. In addition, the supporting plate may further have a plurality of second through holes, and the signal feed portion may further have a plurality of second transmission members, each of which is inserted into one of the plurality of second through holes, and the distance between each second through hole and the first through hole may be the same. In addition, the component inspection fixture may further include a lifting unit and a signal adapter, the signal feed part is electrically connected to the signal adapter, the carrier plate and the signal adapter are fixed to the lifting unit, and the lifting unit can move the carrier plate and the signal adapter simultaneously in a vertical direction.

本發明還提出一種元件檢測治具,包含承載板、信號饋入部以及金屬導電件。承載板定義有支撐面。信號饋入部固定於承載板,包含第一傳輸件與第二傳輸件。金屬導電件設置於支撐面,包含電性絕緣的第一導電件與第二導電件,第一導電件電性連接第一傳輸件,第二導電件電性連接第二傳輸件。其中支撐面定義有感測區域,於感測區域周緣內的金屬導電件與感測區域周緣外的金屬導電件不共平面。The present invention also proposes a component detection fixture, including a carrier plate, a signal feed part and a metal conductive part. The carrier plate defines a support surface. The signal feed part is fixed to the carrier plate, and includes a first transmission part and a second transmission part. The metal conductive part is arranged on the support surface, and includes an electrically insulated first conductive part and a second conductive part, the first conductive part is electrically connected to the first transmission part, and the second conductive part is electrically connected to the second transmission part. The support surface defines a sensing area, and the metal conductive part within the periphery of the sensing area is not coplanar with the metal conductive part outside the periphery of the sensing area.

於一些實施例中,於垂直方向上,信號饋入部與感測區域可以不重疊。此外,元件檢測治具更可以包含上蓋,上蓋遮蔽感測區域周緣外的金屬導電件。In some embodiments, the signal feed portion and the sensing area may not overlap in the vertical direction. In addition, the component detection fixture may further include a cover, which shields the metal conductive parts outside the periphery of the sensing area.

綜上所述,本發明的元件檢測治具包含固定於承載板上的信號饋入部,並且信號饋入部可以電性連接金屬導電件。此外,本發明的元件檢測治具接觸待測元件的金屬導電件具有彈性,可以讓待測元件壓緊於金屬導電件上,從而固定了信號傳輸的電子路徑長度,也減少了寄生電容的效應。In summary, the component detection fixture of the present invention includes a signal feed portion fixed on a carrier plate, and the signal feed portion can be electrically connected to a metal conductive part. In addition, the metal conductive part of the component detection fixture of the present invention that contacts the component to be tested is elastic, which allows the component to be tested to be pressed against the metal conductive part, thereby fixing the length of the electronic path of signal transmission and reducing the effect of parasitic capacitance.

下文將進一步揭露本發明之特徵、目的及功能。然而,以下所述者,僅為本發明之實施例,當不能以之限制本發明之範圍,即但凡依本發明申請專利範圍所作之均等變化及修飾,仍將不失為本發明之要意所在,亦不脫離本發明之精神和範圍,故應將視為本發明的進一步實施態樣。The following will further disclose the features, purpose and function of the present invention. However, what is described below is only an embodiment of the present invention and should not be used to limit the scope of the present invention. That is, any equivalent changes and modifications made within the scope of the patent application of the present invention will still be the gist of the present invention and will not deviate from the spirit and scope of the present invention, so they should be regarded as further embodiments of the present invention.

請參閱圖1與圖2,圖1係繪示依據本發明一實施例之元件檢測治具的立體示意圖,圖2係繪示依據本發明一實施例之部分元件檢測治具的立體示意圖。如圖所示,元件檢測治具1包含承載板10、信號饋入部12以及金屬導電件14,其中圖2是基於圖1的元件檢測治具1移除了上蓋100之後的立體圖。於元件的位置關係上,承載板10可以定義有支撐面10a,支撐面10a面向圖面的上方。信號饋入部12穿設於承載板10,有一部分的信號饋入部12在承載板10下方,而有一部分的信號饋入部12會露出於支撐面10a,但是露出於支撐面10a的信號饋入部12應當不會穿過上蓋100。此外,金屬導電件14設置於承載板10的支撐面10a上,且金屬導電件14大致上位在承載板10和上蓋100之間。實務上,元件檢測治具1可以與阻抗分析儀(圖未示)一同使用,用以量測待測元件DUT,特別是用以量測待測元件DUT於高頻信號下的各種電性參數。於一個例子中,當待測元件DUT是一種被動元件時,元件檢測治具1可以承載待測元件DUT,再由阻抗分析儀量測待測元件DUT的阻抗大小、阻抗角度、等效串聯電阻(ESR)、品質因素Q等電性參數。Please refer to FIG. 1 and FIG. 2. FIG. 1 is a three-dimensional schematic diagram of a component detection fixture according to an embodiment of the present invention, and FIG. 2 is a three-dimensional schematic diagram of a portion of a component detection fixture according to an embodiment of the present invention. As shown in the figure, the component detection fixture 1 includes a carrier plate 10, a signal feed portion 12, and a metal conductive member 14, wherein FIG. 2 is a three-dimensional diagram of the component detection fixture 1 after removing the upper cover 100 based on FIG. 1. In terms of the position of the component, the carrier plate 10 can be defined with a supporting surface 10a, and the supporting surface 10a faces the upper side of the figure. The signal feeding portion 12 is disposed through the carrier plate 10, a portion of the signal feeding portion 12 is below the carrier plate 10, and a portion of the signal feeding portion 12 is exposed on the supporting surface 10a, but the signal feeding portion 12 exposed on the supporting surface 10a should not pass through the upper cover 100. In addition, the metal conductive member 14 is disposed on the supporting surface 10a of the carrier plate 10, and the metal conductive member 14 is substantially located between the carrier plate 10 and the upper cover 100. In practice, the component testing fixture 1 can be used together with an impedance analyzer (not shown) to measure the device under test DUT, especially to measure various electrical parameters of the device under test DUT under high-frequency signals. In one example, when the DUT is a passive component, the component testing fixture 1 can carry the DUT, and then the impedance analyzer can measure the electrical parameters of the DUT, such as impedance size, impedance angle, equivalent series resistance (ESR), and quality factor Q.

於圖1中,上蓋100具有開口100a,待測元件DUT可以經由開口100a由圖面上而下的方向接觸金屬導電件14。實務上,待測元件DUT面向元件檢測治具1的側面可以露出兩個以上的電極,本實施例並不限制待測元件DUT的電極形式,例如可以是接墊或引腳。於所屬技術領域具有通常知識者應可以理解,當待測元件DUT經由開口100a向下接觸金屬導電件14時,金屬導電件14與待測元件DUT可以電性連接,前述的阻抗分析儀便可以進行量測。於一個例子中,開口100a的尺寸可以近似於待測元件DUT的尺寸,只有在待測元件DUT對準穿過開口100a時,才能夠正確接觸金屬導電件14的對應位置,以避免待測元件DUT發生擺放錯誤的情況。以下會再詳述待測元件DUT和金屬導電件14的電性連接方式。另外,上蓋100也具有保護金屬導電件14的功能,例如待測元件DUT向元件檢測治具1移動時,上蓋100可以抵擋住承載待測元件DUT的板體或膜層,只讓已知厚度的待測元件DUT穿過開口100a,避免承載待測元件DUT的板體或膜層過度擠壓金屬導電件14。以下分別說明承載板10、信號饋入部12與金屬導電件14的組合關係。In FIG. 1 , the upper cover 100 has an opening 100a, and the device under test DUT can contact the metal conductive part 14 from the bottom of the figure through the opening 100a. In practice, the side of the device under test DUT facing the device detection fixture 1 can expose more than two electrodes. The present embodiment does not limit the form of the electrodes of the device under test DUT, which can be pads or pins, for example. A person with ordinary knowledge in the relevant technical field should understand that when the device under test DUT contacts the metal conductive part 14 downward through the opening 100a, the metal conductive part 14 and the device under test DUT can be electrically connected, and the aforementioned impedance analyzer can perform measurements. In one example, the size of the opening 100a can be similar to the size of the device under test DUT. Only when the device under test DUT is aligned and passes through the opening 100a can it correctly contact the corresponding position of the metal conductive component 14 to avoid the device under test DUT from being placed incorrectly. The electrical connection method between the device under test DUT and the metal conductive component 14 will be described in detail below. In addition, the upper cover 100 also has the function of protecting the metal conductive component 14. For example, when the device under test DUT moves toward the device detection fixture 1, the upper cover 100 can resist the board or film layer carrying the device under test DUT, and only allow the device under test DUT with a known thickness to pass through the opening 100a, thereby avoiding the board or film layer carrying the device under test DUT from excessively squeezing the metal conductive component 14. The combination relationship between the carrier plate 10, the signal feeding portion 12 and the metal conductive member 14 is described below.

請一併參閱圖2、圖3與圖4,圖3係繪示依據本發明一實施例之承載板的立體示意圖,圖4係繪示依據本發明一實施例之信號饋入部的立體示意圖。如圖所示,承載板10的支撐面10a上可以看出有許多貫孔,一部分的貫孔可以用於散熱或者固定其他周邊元件,本實施例不加贅述。此外,承載板10還包含貫孔102(第一貫孔)、多個貫孔104(第二貫孔)以及槽體106,其中貫孔102、多個貫孔104用於容置信號饋入部12。例如,貫孔102可以容置信號饋入部12的第一傳輸件120,貫孔104可以容置與第二傳輸件122。實務上,由於第一傳輸件120與第二傳輸件122傳輸不同極性的信號,故承載板10應當是以絕緣材料製成以避免信號的干擾。另外,信號饋入部12的連接頭124可以用於連接信號適配器(adapter),以轉接量測信號到後端的設備(例如阻抗分析儀)。於元件的位置關係上,連接頭124會在承載板10之下,從而第一傳輸件120與第二傳輸件122的端頭和連接頭124可以看成分別位於承載板10的相對兩側。Please refer to FIG. 2, FIG. 3 and FIG. 4 together. FIG. 3 is a three-dimensional schematic diagram of a carrier plate according to an embodiment of the present invention, and FIG. 4 is a three-dimensional schematic diagram of a signal feed portion according to an embodiment of the present invention. As shown in the figure, it can be seen that there are many through holes on the supporting surface 10a of the carrier plate 10. Some of the through holes can be used for heat dissipation or fixing other peripheral components, which will not be elaborated in this embodiment. In addition, the carrier plate 10 also includes a through hole 102 (first through hole), a plurality of through holes 104 (second through holes) and a slot 106, wherein the through hole 102 and the plurality of through holes 104 are used to accommodate the signal feed portion 12. For example, the through hole 102 can accommodate the first transmission element 120 of the signal feeding part 12, and the through hole 104 can accommodate the second transmission element 122. In practice, since the first transmission element 120 and the second transmission element 122 transmit signals of different polarities, the carrier plate 10 should be made of insulating material to avoid signal interference. In addition, the connector 124 of the signal feeding part 12 can be used to connect a signal adapter to transfer the measurement signal to the back-end equipment (such as an impedance analyzer). In terms of the position of the components, the connector 124 will be under the carrier plate 10, so that the ends of the first transmission element 120 and the second transmission element 122 and the connector 124 can be seen as being located on opposite sides of the carrier plate 10 respectively.

由圖可知,第一傳輸件120與第二傳輸件122會貫穿承載板10並露出於支撐面10a,目的在於接觸並電性連接支撐面10a上的金屬導電件14。本實施例不限制槽體106是否貫穿承載板10,槽體106的功能會於後實施例說明。於一個例子中,本案的貫孔102可以排列在多個貫孔104的中心,即每一個貫孔104與貫孔102之間的距離相同。換句話說,第一傳輸件120可以位於多個第二傳輸件122的中心,其中一個優點是當第一傳輸件120用於傳輸感測信號而多個第二傳輸件122用於接地時,多個第二傳輸件122可以屏蔽雜訊以減少對第一傳輸件120傳輸的感測信號的干擾。As can be seen from the figure, the first transmission member 120 and the second transmission member 122 will penetrate the carrier plate 10 and be exposed on the support surface 10a, in order to contact and electrically connect the metal conductive member 14 on the support surface 10a. This embodiment does not limit whether the slot 106 penetrates the carrier plate 10, and the function of the slot 106 will be described in the following embodiments. In an example, the through hole 102 of the present case can be arranged at the center of multiple through holes 104, that is, the distance between each through hole 104 and the through hole 102 is the same. In other words, the first transmission element 120 can be located at the center of the plurality of second transmission elements 122. One advantage is that when the first transmission element 120 is used to transmit a sensing signal and the plurality of second transmission elements 122 are used for grounding, the plurality of second transmission elements 122 can shield noise to reduce interference with the sensing signal transmitted by the first transmission element 120.

值得一提的是,雖然本實施例繪示了一個第一傳輸件120與四個第二傳輸件122,且第二傳輸件122的形狀(長方柱狀)略有別於第一傳輸件120的形狀(圓柱狀),但本實施例不限制第一傳輸件120與第二傳輸件122的數量、形狀與排列方式。於所屬技術領域具有通常知識者應可以理解,第一傳輸件120與第二傳輸件122的功能在於傳輸不同極性的信號,第一傳輸件120與第二傳輸件122的數量多寡均不產生影響。例如,第二傳輸件122的數量可以大於四個,或者僅有一個第二傳輸件122與一個對應的貫孔104,都應當可以實現傳輸不同極性的信號的基本功能。另一方面,信號饋入部12不一定會鎖固於承載板10,本實施例也可能藉由元件之間的卡合或緊配來避免信號饋入部12鬆脫於承載板10,例如可以藉由第二傳輸件122的形狀(長方柱狀)和貫孔104的形狀(圓孔)實現緊配關係。當然,本實施例也可以藉由外部的輔助元件來組裝信號饋入部12和承載板10,從而第二傳輸件122僅是穿過貫孔104而互不接觸。元件檢測治具1的其他輔助元件將於後說明。It is worth mentioning that, although the present embodiment shows one first transmission element 120 and four second transmission elements 122, and the shape of the second transmission element 122 (rectangular column) is slightly different from the shape of the first transmission element 120 (cylindrical), the present embodiment does not limit the number, shape and arrangement of the first transmission element 120 and the second transmission element 122. A person with ordinary knowledge in the relevant technical field should understand that the function of the first transmission element 120 and the second transmission element 122 is to transmit signals of different polarities, and the number of the first transmission element 120 and the second transmission element 122 has no effect. For example, the number of the second transmission elements 122 can be greater than four, or there is only one second transmission element 122 and one corresponding through hole 104, which should be able to achieve the basic function of transmitting signals of different polarities. On the other hand, the signal feed part 12 is not necessarily locked to the carrier plate 10. The present embodiment may also prevent the signal feed part 12 from being loosened from the carrier plate 10 by means of engagement or tight fit between components. For example, a tight fit relationship may be achieved by means of the shape of the second transmission component 122 (rectangular column) and the shape of the through hole 104 (round hole). Of course, the present embodiment may also assemble the signal feed part 12 and the carrier plate 10 by means of external auxiliary components, so that the second transmission component 122 only passes through the through hole 104 without contacting each other. Other auxiliary components of the component detection fixture 1 will be described later.

請一併參閱圖2至圖6,圖5係繪示依據本發明一實施例之金屬導電件的立體示意圖,圖6係繪示依據本發明一實施例之金屬導電件的側視圖。如圖所示,金屬導電件14可以區分為兩個互相絕緣的部分,如第一導電件140和第二導電件142。前述待測元件DUT的不同電極可以分別接觸第一導電件140和第二導電件142,從而待測元件DUT可以藉由第一導電件140和第二導電件142接收阻抗分析儀的饋入訊號。第一導電件140可以包含第一本體部1400與第一懸臂1402,第二導電件142可以包含第二本體部1420與第二懸臂1422。於一個例子中,第一本體部1400的面積小於第二本體部1420的面積,並且第二本體部1420會包圍第一本體部1400,但本實施例不以此為限。此外,第二本體部1420可以電性連接第二傳輸件122而作為系統的接地端,而第一本體部1400可以做為感測端以接收來自第一傳輸件120的感測訊號。本實施例不限制第一導電件140和第二導電件142的厚度,然而第一導電件140和第二導電件142各自的厚度可以是相同的。例如,第一本體部1400與第一懸臂1402可以是由同一個金屬板材沖壓成型,第二本體部1420與第二懸臂1422可以是由同一個金屬板材沖壓成型。又或者,第一導電件140和第二導電件142可以是由同一個金屬板材沖壓成型,從而第一導電件140和第二導電件142的厚度相同。Please refer to Figures 2 to 6 together. Figure 5 is a three-dimensional schematic diagram of a metal conductive member according to an embodiment of the present invention, and Figure 6 is a side view of a metal conductive member according to an embodiment of the present invention. As shown in the figure, the metal conductive member 14 can be divided into two mutually insulated parts, such as a first conductive member 140 and a second conductive member 142. Different electrodes of the aforementioned device under test DUT can contact the first conductive member 140 and the second conductive member 142 respectively, so that the device under test DUT can receive the feed signal of the impedance analyzer through the first conductive member 140 and the second conductive member 142. The first conductive member 140 can include a first body 1400 and a first cantilever 1402, and the second conductive member 142 can include a second body 1420 and a second cantilever 1422. In one example, the area of the first body portion 1400 is smaller than the area of the second body portion 1420, and the second body portion 1420 surrounds the first body portion 1400, but the present embodiment is not limited thereto. In addition, the second body portion 1420 can be electrically connected to the second transmission element 122 and serve as the ground terminal of the system, and the first body portion 1400 can serve as a sensing terminal to receive the sensing signal from the first transmission element 120. The present embodiment does not limit the thickness of the first conductive element 140 and the second conductive element 142, but the thickness of the first conductive element 140 and the second conductive element 142 can be the same. For example, the first body portion 1400 and the first cantilever 1402 can be stamped from the same metal plate, and the second body portion 1420 and the second cantilever 1422 can be stamped from the same metal plate. Alternatively, the first conductive member 140 and the second conductive member 142 may be stamped from the same metal plate, so that the first conductive member 140 and the second conductive member 142 have the same thickness.

由圖可知,第一本體部1400與第二本體部1420係固定於承載板10的支撐面10a上,而第一懸臂1402和第二懸臂1422向上彎折而略微離開支撐面10a。在此,本實施例稱第一懸臂1402和第二懸臂1422係在支撐面10a的感測區域A中。本實施例不限制感測區域A的範圍,但應至少包含於垂直方向第一懸臂1402和第二懸臂1422投影在支撐面10a的面積。於一個例子中,第一懸臂1402和第二懸臂1422可以有相同的長度,並且可以分別從第一本體部1400與第二本體部1420向上抬起相同的角度θ(第一角度)。本實施例定義第一懸臂1402的端頭位置和第二懸臂1422的端頭位置分別是第一端1402a和第二端1422a。也就是說,第一端1402a和第二端1422a應當最遠離第一本體部1400與第二本體部1420,或者說第一端1402a和第二端1422a最遠離支撐面10a。於位置關係上,當上蓋100覆蓋住金屬導電件14時,第一端1402a和第二端1422a應當露出於上蓋100的開口100a。也就是說,從俯視的角度來看,至少第一端1402a和第二端1422a不會被上蓋100遮蔽。As can be seen from the figure, the first body portion 1400 and the second body portion 1420 are fixed on the supporting surface 10a of the supporting plate 10, and the first cantilever 1402 and the second cantilever 1422 are bent upward and slightly away from the supporting surface 10a. Here, this embodiment refers to the first cantilever 1402 and the second cantilever 1422 as being in the sensing area A of the supporting surface 10a. This embodiment does not limit the scope of the sensing area A, but it should at least include the area of the first cantilever 1402 and the second cantilever 1422 projected on the supporting surface 10a in the vertical direction. In one example, the first cantilever 1402 and the second cantilever 1422 can have the same length, and can be lifted up from the first body portion 1400 and the second body portion 1420 respectively by the same angle θ (first angle). In this embodiment, the end position of the first cantilever 1402 and the end position of the second cantilever 1422 are defined as the first end 1402a and the second end 1422a, respectively. In other words, the first end 1402a and the second end 1422a should be farthest from the first body portion 1400 and the second body portion 1420, or the first end 1402a and the second end 1422a should be farthest from the supporting surface 10a. In terms of position, when the upper cover 100 covers the metal conductive member 14, the first end 1402a and the second end 1422a should be exposed from the opening 100a of the upper cover 100. In other words, from a top view, at least the first end 1402a and the second end 1422a will not be shielded by the upper cover 100.

此外,在第一懸臂1402和第二懸臂1422有相同的長度,並且向上抬起相同的角度θ的情況下,本實施例的第一端1402a和第二端1422a可以定義有相同的高度H。詳細來說,本實施例可以先定義第一本體部1400與第二本體部1420在相同的平面,或稱第一本體部1400與第二本體部1420形成共平面。接著,以第一本體部1400與第二本體部1420所在的平面為基準,定義第一端1402a和第二端1422a位於第一高度。此時,第一高度係指在預設狀態下,第一端1402a和第一本體部1400的垂直距離,以及第二端1422a與第二本體部1420的垂直距離。於一個例子中,前述的預設狀態係指待測元件DUT尚未接觸到第一導電件140和第二導電件142時的狀態,也就是第一懸臂1402和第二懸臂1422尚未受到待測元件DUT擠壓時的狀態。值得一提的是,本實施例不限制第一懸臂1402和第二懸臂1422有相同的長度,並且第一懸臂1402和第二懸臂1422也可以有不同向上抬起的角度。於所屬技術領域具有通常知識者可以理解,縱使第一懸臂1402和第二懸臂1422有不同的長度,一定可以選擇出第一懸臂1402和第二懸臂1422各自應向上抬起的角度,使得第一端1402a和第二端1422a有相同的高度H。換句話說,只要第一端1402a和第二端1422a有相同的高度H,且第一懸臂1402和第二懸臂1422具有彈性,即應屬於本實施例示範的範疇。In addition, when the first cantilever 1402 and the second cantilever 1422 have the same length and are raised at the same angle θ, the first end 1402a and the second end 1422a of the present embodiment can be defined to have the same height H. In detail, the present embodiment can first define that the first body 1400 and the second body 1420 are in the same plane, or the first body 1400 and the second body 1420 form a coplanar surface. Then, based on the plane where the first body 1400 and the second body 1420 are located, the first end 1402a and the second end 1422a are defined to be at a first height. At this time, the first height refers to the vertical distance between the first end 1402a and the first body 1400, and the vertical distance between the second end 1422a and the second body 1420 in a preset state. In one example, the aforementioned default state refers to a state when the device under test DUT has not yet contacted the first conductive member 140 and the second conductive member 142, that is, a state when the first cantilever 1402 and the second cantilever 1422 have not yet been squeezed by the device under test DUT. It is worth mentioning that the present embodiment does not limit the first cantilever 1402 and the second cantilever 1422 to have the same length, and the first cantilever 1402 and the second cantilever 1422 may also have different upward lifting angles. It can be understood by a person having ordinary knowledge in the relevant technical field that even if the first cantilever 1402 and the second cantilever 1422 have different lengths, the angles at which the first cantilever 1402 and the second cantilever 1422 should be lifted upward can be selected so that the first end 1402a and the second end 1422a have the same height H. In other words, as long as the first end 1402a and the second end 1422a have the same height H, and the first cantilever 1402 and the second cantilever 1422 are elastic, they should fall within the scope of the present embodiment.

由於第一懸臂1402和第二懸臂1422具有彈性,於所屬技術領域具有通常知識者可知當第一懸臂1402和第二懸臂1422受到待測元件DUT擠壓後,角度θ與高度H均會開始改變,例如角度θ與高度H會小於預設狀態下的數值。也就是說,待測元件DUT接觸到第一端1402a和第二端1422a,不僅意味著待測元件DUT的電極分別電性連接到第一端1402a和第二端1422a,也將第一端1402a和第二端1422a壓向第一本體部1400與第二本體部1420所在的平面。如前所述,由於本實施例的上蓋100可以抵擋住承載待測元件DUT的板體或膜層,只讓已知厚度的待測元件DUT穿過開口100a,故此時第一端1402a和第二端1422a的高度H應當是固定的(第二高度),且第二高度會小於第一高度。當然,此時第一端1402a和第二端1422a的角度θ也應當是固定的(第二角度),且第二角度同樣會小於第一角度。本實施例不限制角度θ與高度H於預設狀態下的數值,然而雖然第一端1402a和第二端1422a會露出於開口100a,但為了較好地保護第一端1402a和第二端1422a,第一端1402a和第二端1422a不會凸出於上蓋100的頂面,即第一高度不超過上蓋100的厚度。Since the first cantilever 1402 and the second cantilever 1422 are elastic, a person skilled in the art will know that when the first cantilever 1402 and the second cantilever 1422 are squeezed by the device under test DUT, the angle θ and the height H will begin to change, for example, the angle θ and the height H will be less than the values in the preset state. In other words, the device under test DUT contacts the first end 1402a and the second end 1422a, which not only means that the electrodes of the device under test DUT are electrically connected to the first end 1402a and the second end 1422a, but also presses the first end 1402a and the second end 1422a toward the plane where the first body portion 1400 and the second body portion 1420 are located. As mentioned above, since the upper cover 100 of this embodiment can resist the board or film layer carrying the device under test DUT, and only allow the device under test DUT with a known thickness to pass through the opening 100a, the height H of the first end 1402a and the second end 1422a should be fixed (second height), and the second height will be smaller than the first height. Of course, the angle θ between the first end 1402a and the second end 1422a should also be fixed (second angle), and the second angle will also be smaller than the first angle. This embodiment does not limit the values of the angle θ and the height H in the default state. However, although the first end 1402a and the second end 1422a will be exposed in the opening 100a, in order to better protect the first end 1402a and the second end 1422a, the first end 1402a and the second end 1422a will not protrude from the top surface of the upper cover 100, that is, the first height does not exceed the thickness of the upper cover 100.

值得一提的是,在承載板10的支撐面10a具有槽體106的例子中,槽體106應當是在感測區域A內,即應於位於垂直方向第一懸臂1402和第二懸臂1422投影之下。此時,若是待測元件DUT大於第一高度,則本實施例的第一懸臂1402和第二懸臂1422有可能受到待測元件DUT的擠壓而低於第一本體部1400與第二本體部1420所在的平面。由上述可知,本實施例不限制第一懸臂1402和第二懸臂1422的彎折角度,只要第一懸臂1402和第二懸臂1422在預設狀態(不受外力的情況)下能恢復到預設的角度θ與高度H,則皆應屬本實施例的範疇。於一個例子中,槽體106還可以填有彈性體,例如膠體或者其他有助於讓第一懸臂1402和第二懸臂1422恢復到預設的角度θ與高度H的材料。當然,承載板10可以不具備槽體106,而是僅在本實施例繪示的槽體106位置上設置彈性體,只要待測元件DUT不大於第一高度也應當具有相類似的功能。It is worth mentioning that in the example where the supporting surface 10a of the carrier plate 10 has a groove 106, the groove 106 should be within the sensing area A, that is, it should be located below the projection of the first cantilever 1402 and the second cantilever 1422 in the vertical direction. At this time, if the device under test DUT is greater than the first height, the first cantilever 1402 and the second cantilever 1422 of this embodiment may be squeezed by the device under test DUT and be lower than the plane where the first body part 1400 and the second body part 1420 are located. From the above, it can be seen that this embodiment does not limit the bending angle of the first cantilever 1402 and the second cantilever 1422. As long as the first cantilever 1402 and the second cantilever 1422 can be restored to the preset angle θ and height H in the preset state (without external force), they should all fall within the scope of this embodiment. In one example, the slot 106 may be filled with an elastic body, such as a colloid or other materials that help the first cantilever 1402 and the second cantilever 1422 return to the preset angle θ and height H. Of course, the carrier plate 10 may not have the slot 106, but only have an elastic body disposed at the position of the slot 106 shown in the present embodiment, and should also have similar functions as long as the device under test DUT is not greater than the first height.

由圖5可知,第一本體部1400可以具有貫孔1404,第二本體部1420可以具有多個貫孔1424。於位置關係上,貫孔1404和多個貫孔1424可以分別對應到貫孔102和多個貫孔104。從而,第一傳輸件120不僅只是穿過貫孔102,更可以同時露出於貫孔1404,使得第一傳輸件120接觸並電性連接第一本體部1400。相類似地,每一個第二傳輸件122不僅只是穿過對應的貫孔104,更可以同時露出於對應的貫孔1424,使得多個第二傳輸件122可以同時接觸並電性連接第二本體部1420。其中一個優點是,由於多個第二傳輸件122用於接地,表示環繞第一本體部1400的第二本體部1420可以很穩定地在接地電位,於所屬技術領域具有通常知識者應可以理解多點接地可以減少寄生電容的產生,有助於量測的穩定性。組合後的承載板10、信號饋入部12以及金屬導電件14便如圖2所繪示,在此不再贅述。As can be seen from FIG. 5 , the first body 1400 may have a through hole 1404, and the second body 1420 may have a plurality of through holes 1424. In terms of position, the through hole 1404 and the plurality of through holes 1424 may correspond to the through hole 102 and the plurality of through holes 104, respectively. Thus, the first transmission element 120 not only passes through the through hole 102, but may also be exposed from the through hole 1404, so that the first transmission element 120 contacts and is electrically connected to the first body 1400. Similarly, each second transmission element 122 not only passes through the corresponding through hole 104, but may also be exposed from the corresponding through hole 1424, so that the plurality of second transmission elements 122 may contact and be electrically connected to the second body 1420 at the same time. One advantage is that, since the plurality of second transmission elements 122 are used for grounding, the second body portion 1420 surrounding the first body portion 1400 can be stably at the ground potential. A person skilled in the art should understand that multi-point grounding can reduce the generation of parasitic capacitance and help the stability of measurement. The combined carrier board 10, signal feeder portion 12 and metal conductive element 14 are shown in FIG2 , and will not be described in detail here.

請一併參閱圖1和圖7,圖7係繪示依據本發明另一實施例之元件檢測治具的立體示意圖。如圖所示,承載板10還可以經由其他的連接件16和盒體18鎖固在一起,盒體18用以容置前述的信號適配器,而信號適配器可以再連接後端的阻抗分析儀。實務上,盒體18內的信號適配器可以固定信號饋入部12的連接頭124,由於信號適配器與信號饋入部12的相對位置是固定的,並且待測元件DUT在第一懸臂1402和第二懸臂1422的放置位置也是固定的。從而,本實施例提供的元件檢測治具1可以讓待測元件DUT到信號適配器的電子路徑長度固定,可以減少校正與量測不同待測元件DUT時發生電子路徑長度的誤差。Please refer to FIG. 1 and FIG. 7 together. FIG. 7 is a three-dimensional schematic diagram of a component detection fixture according to another embodiment of the present invention. As shown in the figure, the carrier plate 10 can also be locked together with the box body 18 via other connectors 16. The box body 18 is used to accommodate the aforementioned signal adapter, and the signal adapter can be connected to the impedance analyzer at the rear end. In practice, the signal adapter in the box body 18 can fix the connector 124 of the signal feed part 12. Since the relative position of the signal adapter and the signal feed part 12 is fixed, and the placement position of the device under test DUT on the first cantilever 1402 and the second cantilever 1422 is also fixed. Therefore, the component testing fixture 1 provided in this embodiment can fix the length of the electronic path from the device under test DUT to the signal adapter, and can reduce the error of the electronic path length when calibrating and measuring different devices under test DUT.

本實施例雖然示範了元件檢測治具1不動,而將待測元件DUT穿過開口100a以接觸第一懸臂1402和第二懸臂1422的量測方式,但不以此為限。以實際的操作來說,待測元件DUT也有可能是不移動的,而改由元件檢測治具1移動向待測元件DUT,同樣可以讓將待測元件DUT穿過開口100a以接觸第一懸臂1402和第二懸臂1422。如同前述的例子,因為信號適配器與信號饋入部12的相對位置是固定的,並且待測元件DUT在第一懸臂1402和第二懸臂1422的放置位置也是固定的,從而同樣可以固定待測元件DUT到信號適配器的電子路徑長度,減少校正與量測不同待測元件DUT時發生電子路徑長度的誤差。Although the present embodiment demonstrates a measurement method in which the device testing fixture 1 is stationary and the device under test DUT passes through the opening 100a to contact the first cantilever 1402 and the second cantilever 1422, the present embodiment is not limited thereto. In actual operation, the device under test DUT may also be stationary, and the device testing fixture 1 may move toward the device under test DUT, and the device under test DUT may also pass through the opening 100a to contact the first cantilever 1402 and the second cantilever 1422. As in the aforementioned example, since the relative positions of the signal adapter and the signal feed portion 12 are fixed, and the placement positions of the DUT on the first cantilever 1402 and the second cantilever 1422 are also fixed, the length of the electronic path from the DUT to the signal adapter can also be fixed, thereby reducing the error in the length of the electronic path when calibrating and measuring different DUTs.

請一併參閱圖2與圖8,圖8係繪示依據本發明一實施例之金屬導電件中電子路徑的示意圖。如圖所示,由於前述的第一傳輸件120係電性連接貫孔1404,再由貫孔1404的位置經過第一本體部1400和第一懸臂1402,接著在第一端1402a的位置電性連接待測元件DUT的一個電極。據此,第一傳輸件120到待測元件DUT的一個電子路徑長度可以表示為距離D1。為了符合高頻測試的需求,距離D1的範圍在可以是8.5mm到9mm之間,例如可以是8.75mm,所屬技術領域具有通常知識者可以依據操作頻段決定。另外,從多個第二傳輸件122中選擇電子路徑長度最短者來說,被選擇的第二傳輸件122係電性連接貫孔1424,再由貫孔1424的位置經過第二本體部1420到達第二懸臂1422的一端,接著經過第二懸臂1422另一端(第二端1422a)的位置電性連接待測元件DUT的另一個電極。據此,電子路徑長度最短的第二傳輸件122到待測元件DUT的電子路徑長度可以表示為距離D2、距離D3和距離D4的總和。其中,距離D2的範圍在可以是12mm到14mm之間,例如可以是13mm。距離D3的範圍在可以是0.5mm到1.5mm之間,例如可以是1mm。距離D4的範圍在可以是2.5mm到3.5mm之間,例如可以是3mm。同樣地,所屬技術領域具有通常知識者可以依據操作頻段決定距離D2、距離D3和距離D4的數值,本實施例不加以限制。Please refer to FIG. 2 and FIG. 8 together. FIG. 8 is a schematic diagram of an electronic path in a metal conductive component according to an embodiment of the present invention. As shown in the figure, since the aforementioned first transmission component 120 is electrically connected to the through hole 1404, it passes through the first main body 1400 and the first cantilever 1402 from the position of the through hole 1404, and then electrically connects to an electrode of the device under test DUT at the position of the first end 1402a. Accordingly, the length of an electronic path from the first transmission component 120 to the device under test DUT can be expressed as a distance D1. In order to meet the requirements of high-frequency testing, the range of the distance D1 can be between 8.5 mm and 9 mm, for example, it can be 8.75 mm. Those with ordinary knowledge in the relevant technical field can determine it according to the operating frequency band. In addition, when selecting the second transmission element 122 with the shortest electronic path length from multiple second transmission elements 122, the selected second transmission element 122 is electrically connected to the through hole 1424, and then reaches one end of the second cantilever 1422 through the second body 1420 from the position of the through hole 1424, and then electrically connects to another electrode of the device under test DUT through the position of the other end (second end 1422a) of the second cantilever 1422. Accordingly, the electronic path length from the second transmission element 122 with the shortest electronic path length to the device under test DUT can be expressed as the sum of the distance D2, the distance D3, and the distance D4. Among them, the range of distance D2 can be between 12 mm and 14 mm, for example, it can be 13 mm. The range of distance D3 can be between 0.5 mm and 1.5 mm, for example, it can be 1 mm. The range of distance D4 can be between 2.5 mm and 3.5 mm, for example, can be 3 mm. Similarly, a person skilled in the art can determine the values of distance D2, distance D3 and distance D4 according to the operating frequency band, and this embodiment does not limit this.

綜上所述,本發明的元件檢測治具包含固定於承載板上的信號饋入部,並且信號饋入部可以電性連接金屬導電件,金屬導電件可以穩固地接觸待測元件。藉此,本發明的元件檢測治具可以準確對準待測元件,並且儘可能地減少了更換待測元件時產生的移動,使得電子路徑長度更為固定。並且,本發明的元件檢測治具於信號饋入部的設計也可以減少寄生電容,並且避免引起電子路徑的長度誤差。In summary, the component detection fixture of the present invention includes a signal feed portion fixed on a carrier plate, and the signal feed portion can be electrically connected to a metal conductive part, and the metal conductive part can stably contact the component to be tested. Thereby, the component detection fixture of the present invention can accurately align the component to be tested, and minimize the movement generated when replacing the component to be tested, so that the length of the electronic path is more fixed. In addition, the design of the signal feed portion of the component detection fixture of the present invention can also reduce parasitic capacitance and avoid causing errors in the length of the electronic path.

1:元件檢測治具 10:承載板 10a:支撐面 100:上蓋 100a:開口 102:貫孔(第一貫孔) 104:貫孔(第二貫孔) 106:槽體 12:信號饋入部 120:第一傳輸件 122:第二傳輸件 124:連接頭 14:金屬導電件 140:第一導電件 1400:第一本體部 1402:第一懸臂 1402a:第一端 1404:貫孔 142:第二導電件 1420:第二本體部 1422:第二懸臂 1422a:第二端 1424:貫孔 16:連接件 18:盒體 A:感測區域 D1~D4:距離 DUT:待測元件 H:高度 θ:角度 1: Component testing fixture 10: Carrier plate 10a: Support surface 100: Upper cover 100a: Opening 102: Through hole (first through hole) 104: Through hole (second through hole) 106: Slot 12: Signal feeder 120: First transmission element 122: Second transmission element 124: Connector 14: Metal conductor 140: First conductor 1400: First body 1402: First cantilever 1402a: First end 1404: Through hole 142: Second conductor 1420: Second body 1422: Second cantilever 1422a: Second end 1424: Through hole 16: Connector 18: Box A: Sensing area D1~D4: Distance DUT: Component under test H: Height θ: Angle

圖1係繪示依據本發明一實施例之元件檢測治具的立體示意圖。FIG. 1 is a three-dimensional schematic diagram of a component testing fixture according to an embodiment of the present invention.

圖2係繪示依據本發明一實施例之部分元件檢測治具的立體示意圖。FIG. 2 is a three-dimensional schematic diagram showing a portion of a component testing fixture according to an embodiment of the present invention.

圖3係繪示依據本發明一實施例之承載板的立體示意圖。FIG. 3 is a three-dimensional schematic diagram of a carrier plate according to an embodiment of the present invention.

圖4係繪示依據本發明一實施例之信號饋入部的立體示意圖。FIG. 4 is a three-dimensional schematic diagram of a signal feeding unit according to an embodiment of the present invention.

圖5係繪示依據本發明一實施例之金屬導電件的立體示意圖。FIG. 5 is a three-dimensional schematic diagram of a metal conductive component according to an embodiment of the present invention.

圖6係繪示依據本發明一實施例之金屬導電件的側視圖。FIG. 6 is a side view showing a metal conductive member according to an embodiment of the present invention.

圖7係繪示依據本發明另一實施例之元件檢測治具的立體示意圖。FIG. 7 is a three-dimensional schematic diagram of a device testing fixture according to another embodiment of the present invention.

圖8係繪示依據本發明一實施例之金屬導電件中電子路徑的示意圖。FIG. 8 is a schematic diagram showing an electronic path in a metal conductive element according to an embodiment of the present invention.

without

1:元件檢測治具 1: Component testing fixture

10:承載板 10: Carrier plate

10a:支撐面 10a: Support surface

12:信號饋入部 12: Signal Feedback Unit

120:第一傳輸件 120: First transmission component

122:第二傳輸件 122: Second transmission component

14:金屬導電件 14:Metallic conductive parts

140:第一導電件 140: First conductive member

142:第二導電件 142: Second conductive member

A:感測區域 A: Sensing area

DUT:待測元件 DUT: Component under test

Claims (7)

一種元件檢測治具,包含:一承載板,包含一支撐面、一第一貫孔與一第二貫孔;一信號饋入部,包含一第一傳輸件與一第二傳輸件;一第一導電件,包含一第一本體部與一第一懸臂,設置於該支撐面且電性連接該第一傳輸件,該第一懸臂與該支撐面夾有一第一角度,且該第一懸臂的一第一端距離該第一本體部達一第一高度;以及一第二導電件,包含一第二本體部與一第二懸臂,該第二本體部設置於該支撐面且電性連接該第二傳輸件,該第二懸臂與該支撐面夾有該第一角度,且該第二懸臂的一第二端距離該第二本體部達該第一高度;其中該第一貫孔與該第二貫孔分別容置該第一傳輸件與該第二傳輸件;其中該第一傳輸件穿設於該第一貫孔且露出於該支撐面,該第二傳輸件穿設於該第二貫孔且露出於該支撐面,該第一本體部接觸該第一傳輸件,該第二本體部接觸該第二傳輸件。 A component detection fixture comprises: a support plate, comprising a support surface, a first through hole and a second through hole; a signal feeding portion, comprising a first transmission member and a second transmission member; a first conductive member, comprising a first body and a first cantilever, disposed on the support surface and electrically connected to the first transmission member, the first cantilever and the support surface having a first angle, and a first end of the first cantilever being at a first height from the first body; and a second conductive member, comprising a second body and a second cantilever, the second body The first transmission member is disposed on the supporting surface and electrically connected to the second transmission member, the second cantilever and the supporting surface have the first angle, and a second end of the second cantilever is at the first height away from the second body; wherein the first through hole and the second through hole respectively accommodate the first transmission member and the second transmission member; wherein the first transmission member is penetrated through the first through hole and exposed to the supporting surface, the second transmission member is penetrated through the second through hole and exposed to the supporting surface, the first body contacts the first transmission member, and the second body contacts the second transmission member. 如請求項1所述之元件檢測治具,其中當該第一端與該第二端分別抵靠一待測元件的一第一電極與一第二電極時,該第一端距離該第一本體部達一第二高度,該第二端距離該第二本體部達該第二高度,且該第二高度小於該第一高度。 The component inspection fixture as described in claim 1, wherein when the first end and the second end respectively abut against a first electrode and a second electrode of a component to be tested, the first end is at a second height from the first body portion, the second end is at the second height from the second body portion, and the second height is less than the first height. 如請求項1所述之元件檢測治具,其中該承載板更具有多個第二貫孔,該信號饋入部更具有多個第二傳輸件,每一該第二傳輸件穿設於該些第二貫孔其中之一,且每一該第二貫孔與該第一貫孔之間的距離相同。 As described in claim 1, the component inspection fixture, wherein the carrier plate has a plurality of second through holes, the signal feed portion has a plurality of second transmission components, each of the second transmission components is inserted into one of the second through holes, and the distance between each of the second through holes and the first through hole is the same. 如請求項1所述之元件檢測治具,更包含一盒體,該盒體連接該承載板,且該盒體用以容置一信號適配器,該信號饋入部電性連接該信號適配器。 The component inspection fixture as described in claim 1 further includes a box body, the box body is connected to the carrier plate, and the box body is used to accommodate a signal adapter, and the signal feed part is electrically connected to the signal adapter. 一種元件檢測治具,包含:一承載板,定義有一支撐面,具有一第一貫孔與一第二貫孔;一信號饋入部,固定於該承載板,包含一第一傳輸件與一第二傳輸件;以及一金屬導電件,設置於該支撐面,包含電性絕緣的一第一導電件與一第二導電件,該第一導電件電性連接該第一傳輸件,該第二導電件電性連接該第二傳輸件;其中該支撐面定義有一感測區域,於該感測區域周緣內的該金屬導電件與該感測區域周緣外的該金屬導電件不共平面;其中該第一傳輸件穿設於該第一貫孔且露出於該支撐面,該第二傳輸件穿設於該第二貫孔且露出於該支撐面,該第一本體部接觸該第一傳輸件,該第二本體部接觸該第二傳輸件。 A component detection fixture includes: a carrier plate, which defines a support surface, having a first through hole and a second through hole; a signal feed portion, which is fixed to the carrier plate, and includes a first transmission member and a second transmission member; and a metal conductive member, which is disposed on the support surface, and includes a first conductive member and a second conductive member which are electrically insulated, wherein the first conductive member is electrically connected to the first transmission member, and the second conductive member is electrically connected to the The second transmission member; wherein the support surface defines a sensing area, and the metal conductive member within the periphery of the sensing area is not coplanar with the metal conductive member outside the periphery of the sensing area; wherein the first transmission member is disposed through the first through hole and exposed to the support surface, the second transmission member is disposed through the second through hole and exposed to the support surface, the first body portion contacts the first transmission member, and the second body portion contacts the second transmission member. 如請求項5所述之元件檢測治具,其中於一垂直方向上,該信號饋入部與該感測區域不重疊。 A component inspection fixture as described in claim 5, wherein the signal feed portion and the sensing area do not overlap in a vertical direction. 如請求項5所述之元件檢測治具,更包含一上蓋,該上蓋遮蔽該感測區域周緣外的該金屬導電件。 The component detection fixture as described in claim 5 further includes a top cover, which shields the metal conductive part outside the periphery of the sensing area.
TW110142849A 2021-11-18 2021-11-18 Component inspection jig TWI837548B (en)

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Citations (1)

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Publication number Priority date Publication date Assignee Title
US20160047843A1 (en) 2014-08-13 2016-02-18 Mpi Corporation Probe card and test equipment with the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160047843A1 (en) 2014-08-13 2016-02-18 Mpi Corporation Probe card and test equipment with the same

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