TWI833506B - Non-contact testing apparatus with dual-circulation - Google Patents

Abstract

The present invention provides a non-contact testing apparatus with dual-circulation, which includes a testing device, a temperature adjustment device connected to the testing device, and a gas supplying device. The testing device includes two testing chambers and a testing carrier located thereon. The temperature adjustment device includes a temperature controlling mechanism, a pipe unit, and a fan mechanism that is assembled to the pipe unit. The temperature controlling mechanism includes two chambers, a heating member, and a cooling member, the latter two of which are respectively arranged in the two chambers. The pipe unit connects the two chambers and the two testing chambers so as to form a dual-circulation space. The fan mechanism is configured to form a circulation airflow in the dual-circulation space, and the airflow has a predetermined temperature through the heating member or the cooling member. The gas supplying device is spatially communicated with the dual-circulation space, and the gas supplying device is configured to input a predetermined gas into the dual-circulation space and enables the dual-circulation space to achieve a predetermined pressure.

Description

Dual cycle non-contact testing equipment

The present invention relates to a kind of testing equipment, in particular to a kind of double cycle non-contact testing equipment.

When the existing testing equipment tests an electronic component to be tested, a temperature control element needs to be pressed against the electronic component to be tested so that the electronic component to be tested reaches the temperature required for testing. However, the contact testing methods of existing test equipment have gradually failed to meet the ever-changing changes and needs of the electronics industry.

Therefore, the inventor believed that the above-mentioned defects could be improved, so he devoted himself to research and applied scientific principles, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned defects.

An embodiment of the present invention provides a dual-cycle non-contact testing equipment, which can effectively improve the defects that may occur in existing testing equipment.

An embodiment of the present invention discloses a dual-cycle non-contact testing equipment, which includes: a machine body; a testing device installed on the machine body, and the testing device includes: a first testing cavity and A second test chamber, both of which are installed on the machine body; wherein, the second test chamber and the first test chamber can move relative to each other along a first direction to jointly It is enclosed to form a test space; and a test carrier is provided in the second test cavity, and the test carrier is used for setting an electronic component to be tested; a temperature adjustment device is installed on the first The outside of at least one of the test chamber and the second test chamber is used to communicate with the test space; wherein the temperature adjustment device includes: a temperature control mechanism including a cooling chamber, a A heating chamber, a cooler disposed in the cooling chamber, and a heater disposed in the heating chamber; wherein, the cooler and the warmer can selectively operate; a tube A pipeline unit connects the cooling chamber, the heating chamber, and the test space so that they are connected with each other to form a pair of circulation spaces; a fan mechanism is installed on the pipeline unit; wherein, The fan mechanism can operate to form a circulating airflow flowing in the double circulation space, and the circulating airflow can pass through one of the cooler and the heater to have a preset temperature; and both A switch valve, one of which is located between the fan mechanism and the cooling chamber, and one of which is located between the fan mechanism and the warming chamber; wherein, two of the switch valves are located between the fan mechanism and the heating chamber; The switch valve can selectively close one of the cooling chambers or the heating chambers so that the fan mechanism disconnects the cooling chamber or the heating chamber; and an air supply device is connected to the double circulation space; wherein, the air supply device The gas device is used to introduce a predetermined gas into the dual circulation space and enable the dual circulation space to reach a preset air pressure, so that the electronic component under test provided on the test carrier can be tested in the A non-contact test operation is performed under the environment of preset air pressure and preset temperature.

To sum up, the dual-cycle non-contact testing equipment disclosed in the embodiment of the present invention uses a structure between multiple devices (such as the testing device, the temperature adjustment device, and the air supply device). Coordinated so that at least one of the electronic components to be tested can adjust test parameters (such as temperature) through a non-contact method (such as: the double circulation space has the preset air pressure and the preset temperature) .

In order to further understand the characteristics and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, these descriptions and drawings are only used to illustrate the present invention, rather than to There is no limitation on the scope of protection of the present invention.

100:Double cycle non-contact testing equipment

1:Machine body

11: Orbital mechanism

12:Lifting mechanism

2:Test device

21: The first test chamber

211:First Accommodation Department

2111:Through hole

212:First Close Unit

213:The first reinforced rib

214: First open compartment

22: Second test chamber

221:Second Accommodation Department

222:Second Close Section

2221: Long through hole

2222: Annular groove

223: Second reinforced rib

224: Second open compartment

23:Test carrier

24:Current balancing parts

25: Air sealing gasket

26: Close mechanism

261:drive

2611:Tooth profile part

262:Lock parts

2621: Linked end

2622:Locked end

263: Transmission parts

3: Air extraction device

4: Temperature adjustment device

41:Temperature control mechanism

411: Cooling chamber

412: Heating chamber

413: Cooler

414:heater

42:Pipeline unit

421: bifurcation tube

4211:Mounting hole

4212:Airflow hole

422:Connecting pipe

4221: External hole

423:Shunt tube

4231: Diversion hole

43:Fan mechanism

431:frame

4311: Disassembly and assembly holes

432: Motor

4321:Output shaft

433: Barrier layer

434:Shaft

435:Fan blade

436:Thermal insulation coupling

437: Shell

44:Heating lamps

45:On/off valve

5:Air supply device

S: test space

C: Double circulation space

F: circulating air flow

D1: first direction

D2: second direction

L: Default axis

200: Electronic components to be tested

Figure 1 is a schematic three-dimensional view of an external circulation non-contact testing device according to an embodiment of the present invention.

FIG. 2 is a schematic three-dimensional view of the subsequent actions of FIG. 1 .

FIG. 3 is a schematic cross-sectional plan view of FIG. 2 .

FIG. 4 is a schematic three-dimensional cross-sectional view of the subsequent actions of FIG. 2 .

FIG. 5 is a schematic three-dimensional cross-sectional view of the subsequent actions of FIG. 4 .

FIG. 6 is a schematic three-dimensional cross-sectional view of the subsequent actions of FIG. 5 to put the external circulation non-contact testing equipment into non-contact testing operation.

Figure 7 is a perspective view of Figure 6 from another perspective.

8 is a schematic plan view (1) of the external circulation non-contact testing equipment in non-contact testing operation according to the embodiment of the present invention.

9 is a schematic plan view (2) of the external circulation non-contact testing equipment in non-contact testing operation according to the embodiment of the present invention.

Figure 10 is a schematic plan view (3) of the external circulation non-contact testing equipment in non-contact testing operation according to the embodiment of the present invention.

11 is a schematic plan view (4) of the external circulation non-contact testing equipment in non-contact testing operation according to the embodiment of the present invention.

The following is a specific example to illustrate the implementation of the "dual cycle non-contact testing equipment" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The invention may be implemented through other different specific embodiments Various modifications and changes can be made to various details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depictions based on actual dimensions, as is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of the present invention.

It should be understood that although terms such as “first”, “second” and “third” may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another component or one signal from another signal. In addition, the term "or" used in this article shall include any one or combination of more of the associated listed items depending on the actual situation.

Please refer to FIGS. 1 to 11 , which are embodiments of the present invention. As shown in FIGS. 1 to 7 , this embodiment discloses a dual-cycle non-contact testing equipment 100 for performing a non-contact testing operation on at least one electronic component 200 to be tested. That is to say, the dual-cycle non-contact testing equipment 100 adjusts the test parameters (such as temperature) of the electronic component to be tested 200 in a non-contact manner. Accordingly, any testing equipment that uses a contact method to adjust the temperature of the electronic component under test is different from the dual-cycle non-contact testing equipment 100 referred to in this embodiment.

In this embodiment, the double-cycle non-contact testing equipment 100 includes a machine body 1, a testing device 2 installed on the machine body 1, and an air extraction device 3 that assists the operation of the testing device 2. A temperature adjustment device 4 is installed on the testing device 2, and an air supply device 5 is installed on the temperature adjustment device 4, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the dual-cycle non-contact testing equipment 100 may also omit the air extraction device 3 .

In this embodiment, the test device 2 includes a first test chamber 21, a second test chamber 22 corresponding to the first test chamber 21, and a second test chamber 22 provided in the second test chamber 22. A test carrier 23 and two flow equalizers 24 installed inside the first test chamber 21 are located in the An airtight gasket 25 and a sealing mechanism 26 are provided between the first test chamber 21 and the second test chamber 22, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the dual-circulation non-contact testing equipment 100 can selectively use two of the flow equalizers 24 and the air-tight gasket 25 according to design requirements. , and at least one of the close-fitting mechanisms 26, or be replaced by other components.

As shown in Figures 1 to 4, the first test chamber 21 and the second test chamber 22 are both installed on the machine body 1, so that the second test chamber 22 can be connected with the The first test chambers 21 move relative to each other along a first direction D1 (such as the plumb bob direction) to jointly close a test space S. It should be noted that the specific structures of the first test chamber 21 and the second test chamber 22 can be adjusted and changed according to design requirements, so the following only describes one of the feasible aspects.

The first test cavity 21 includes a first accommodating part 211, a first sealing part 212 connected to the periphery of the first accommodating part 211, and a first sealing part 212 formed on the outer surface of the first accommodating part 211. A plurality of first reinforcing ribs 213 are formed on the outer surface of the first sealing portion 212 . In this embodiment, the first accommodating part 211 is generally in the shape of a rectangular groove and two through holes 2111 connected to the test space S are respectively formed on both sides of the first accommodating part 211 (eg, Figure 8), and two The positions of the flow equalizing members 24 correspond to the two through holes 2111 respectively. The first sealing portion 212 is connected to the notch of the first accommodating portion 211 and is in a rectangular ring shape.

Furthermore, the first accommodating part 211 , the first sealing part 212 , and the plurality of first reinforcing ribs 213 jointly form a plurality of first open compartments 214 . Wherein, four of the plurality of first open compartments 214 are respectively located at multiple corners of the first test chamber 21 , and the first test chamber 21 has four first open compartments 214 . The type compartment 214 is installed and fixed on the machine body 1 (that is, the first test chamber 21 will not move relative to the machine body 1 in this embodiment), and the two through holes 2111 (eg, Figure 8) are respectively connected to the other two of the plurality of first open compartments 214.

The second test cavity 22 includes a second accommodating part 221, a second sealing part 222 connected to the periphery of the second accommodating part 221, and a second accommodating part 221 formed on the outer surface of the second accommodating part 221. A plurality of second reinforcing ribs 223 are formed on the outer surface of the second sealing portion 222 . In this embodiment, the second accommodating part 221 is generally rectangular, and the test carrier 23 is provided in the second accommodating part 221 for at least one of the electronic components to be tested 200 to be placed. and perform electrical testing; the second sealing portion 222 is in a rectangular ring shape and is formed with a plurality of elongated through holes 2221, and the second sealing portion 222 is formed between the test carrier 23 and An annular groove 2222 is formed between the elongated through holes 2221 so that the airtight gasket 25 is embedded in the annular groove 2222.

Furthermore, the second sealing part 222 faces the first sealing part 212 along the first direction D1, and the airtight gasket 25 is located between the first sealing part 212 and the second sealing part 212. between the close-fitting portions 222, and the positions of the plurality of second reinforcing ribs 223 generally correspond to the plurality of first reinforcing ribs 213 along the first direction D1. Wherein, the second accommodating part 221, the second sealing part 222, and the plurality of second reinforcing ribs 223 jointly form a plurality of second open compartments 224, and the plurality of second open compartments 224 are formed. The open compartments 224 respectively correspond to a plurality of the first open compartments 214 along the first direction D1, and each of the elongated through holes 2221 is connected to one of the second open compartments. 224.

According to the above, the first test cavity 21 and the second test cavity 22 can move relatively, so that the first accommodating part 211 and the second accommodating part 221 jointly surround and form the The test space S is provided, and the first sealing part 212 and the second sealing part 222 are clamped by the airtight gasket 25 to achieve a pre-cooperation operation.

Furthermore, in this embodiment, the action between the first test chamber 21 and the second test chamber 22 is realized through the machine body 1. The following describes the operation of the machine body 1. One of the possible forms is, but the present invention is not limited to this.

As shown in Figures 1 to 4, the machine body 1 includes a track mechanism 11 (such as a line (e.g., a sliding rail) and a lifting mechanism 12 (such as a pneumatic cylinder or a hydraulic cylinder) whose position corresponds to the track mechanism 11. Wherein, the second test chamber 22 is installed on the track mechanism 11 so that the second test chamber 22 can pass through the track mechanism 11 along a second direction D2 perpendicular to the first direction D1. Move between a material placement position (e.g. Figure 1) and an operating position (e.g. Figure 2 and Figure 3).

For example, as shown in FIG. 1 , when the second test chamber 22 is located at the material placement position, the second test chamber 22 is disposed in a staggered position relative to the first test chamber 21 . The test carrier 23 installed in the second test cavity 22 can be used for setting at least one of the electronic components 200 to be tested.

As shown in FIGS. 2 and 3 , when the second test chamber 22 is in the working position, the second sealing part 222 faces the first sealing part 212 along the first direction D1 , the position of the lifting mechanism 12 corresponds to the second test cavity 22 in the working position, and the lifting mechanism 12 can drive the second testing cavity 22 in the working position along the The first direction D1 moves to realize the pre-cooperation operation (eg, Figure 4).

As shown in FIGS. 1 to 7 , the close mechanism 26 includes a driver 261 , a plurality of locking parts 262 , and a transmission part 263 that transmits the power of the driver 261 to the plurality of locking parts 262 . Among them, the driver 261 is installed on the machine body 1 and adjacent to the first test chamber 21, and the driver 261 is illustrated as a drive motor in this embodiment, which includes a power output as a power output. A toothed part 2611 is used.

Furthermore, each of the locking parts 262 has a linking end part 2621 and a locking end part 2622 respectively located at opposite ends, and a plurality of the locking parts 262 are rotatably disposed in the first test chamber. The first sealing portion 212 of the body 21 . In this embodiment, each locking member 262 is disposed in one of the first open compartments 214 and is installed upright on the first sealing portion 212 (that is, a plurality of the linking end portions). 2621 are parallel to each other), and the linking end 2621 and the locking end 2622 of each locking member 262 are respectively located opposite to the first sealing portion 212 both sides.

In more detail, the interlocking end portion 2621 of each locking member 262 is a gear, and the toothed portion 2611 and the plurality of interlocking end portions 2621 are arranged higher than the first test chamber. A plane of the body 21 (that is, the side of the first test chamber 21 away from the second test chamber 22). In addition, the transmission member 263 connects the driver 261 and the linkage end portions 2621 of the plurality of locking members 262; that is to say, the transmission member 263 is engaged with the tooth profile in this embodiment. A transmission chain consisting of a portion 2611 and a plurality of linking end portions 2621, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the cooperation between the transmission member 263 and the plurality of linkage end portions 2621 can also be achieved by using a belt and a plurality of friction wheels; or, The driver 261 can be implemented by using a pneumatic cylinder or a hydraulic cylinder in combination with other structures.

Furthermore, the positions and shapes of the plurality of locking end portions 2622 respectively correspond to the positions and shapes of the plurality of elongated through holes 2221 . Accordingly, after the pre-locking operation, as shown in FIGS. 6 and 7 , the driver 261 can drive a plurality of the locking members 262 to rotate synchronously through the transmission member 263 to achieve a locking operation. Therefore, the locking end portion 2622 of each locking member 262 and the first sealing portion 212 are clamped on opposite sides of the second sealing portion 222 respectively. That is to say, each of the locking end portions 2622 passes through the corresponding elongated through hole 2221 during the pre-locking operation, and is rotated and misaligned with the corresponding elongated through hole 2221 during the locking operation. Shaped through hole 2221.

It should be additionally noted that after the sealing mechanism 26 performs the locking operation, the test space S of the test device 2 needs to be able to maintain a high-pressure environment for a long time, so for the sealing mechanism 26 The locking operation requires extremely high tightness (for example, the driver 261 must use a huge output power to achieve the locking operation), which makes the locking operation difficult to implement.

Accordingly, after the preparatory work, as shown in Figures 5 to 7, the double cycle non-contact testing equipment 100 in this embodiment further uses the air extraction device 3 (such as a pump) To perform a vacuuming operation on the test space S, so that the test space S presents a negative pressure state, so that the first sealing portion 212 and the second sealing portion 222 are more closely contacted. (or clamp the air-tight gasket 25 more tightly) to facilitate the closing mechanism 26 to then perform the locking operation (for example: the driver 261 can achieve the locking operation with a smaller output power). Locking operation), so that the test space S can be maintained in a high-pressure environment for a long time through the sealing mechanism 26.

In more detail, the air extraction device 3 is connected to at least one of the first accommodation part 211 and the second accommodation part 221 (for example: the air extraction device 3 in this embodiment is By being connected to the temperature adjustment device 4 and communicating with the first accommodating part 211), the vacuuming operation can be performed by communicating with the test space S.

The temperature adjustment device 4 is installed on the outside of at least one of the first test chamber 21 and the second test chamber 22 to communicate with the test space S. In this embodiment, the temperature adjustment device 4 is installed outside the first test chamber 21 and connected to the test space S through the two through holes 2111, but the invention is not limited thereto. Here it is.

Specifically, as shown in FIGS. 8 to 11 , the temperature adjustment device 4 includes a temperature control mechanism 41 , a pipeline unit 42 connecting the temperature control mechanism 41 and the first test chamber 21 , and an installation unit 42 . A fan mechanism 43 in the pipeline unit 42, two switch valves 45, and a heating lamp 44 located in the test space S. Among them, the temperature adjustment device 4 is only shown as being connected to the first test chamber 21 in the drawings of this embodiment, but the temperature adjustment device 4 can also be further fixed to the first test chamber 21 according to design requirements. Describe the machine body 1.

The temperature control mechanism 41 includes a cooling chamber 411, a heating chamber 412, a cooling device 413 (such as an evaporator) arranged in the cooling chamber 411, and a temperature increasing chamber 412. A heater 414 (such as an electric heater). Among them, the temperature lowering device 413 and the heating device 414 can selectively operate according to actual needs in this embodiment.

The pipeline unit 42 connects the cooling chamber 411, the heating chamber 412, and The test spaces S are connected with each other to form a pair of circulation spaces C. In this embodiment, the pipeline unit 42 is illustrated as including a bifurcated pipe 421, a shunt pipe 423, and two connecting pipes 422, but the specific configuration of the pipeline unit 42 can be determined according to design requirements. Adjustments and changes may be made, and the invention is not limited here.

In more detail, the bifurcated pipe 421 has a mounting hole 4211 and three airflow holes 4212 that are connected to each other. The fan mechanism 43 is installed in the mounting hole 4211, and the bifurcated pipe 421 has two of them. The airflow holes 4212 are respectively connected to one end of the cooling chamber 411 and one end of the warming chamber 412 .

The shunt tube 423 has three shunt holes 4231 that communicate with each other, and two of the shunt holes 4231 of the shunt tube 423 are connected to the other end of the cooling chamber 411 and the heating chamber 412 respectively. another side. One end of the two connecting tubes 422 is connected to the two through holes 2111 of the first test chamber 21 respectively, and the other end of the two connecting tubes 422 is connected to the bifurcated tube 421 respectively. The other airflow hole 4212 and the other branch hole 4231 of the branch pipe 423 enable the cooling chamber 411 and the heating chamber 412 to pass through the branch pipe 421 and the other branch pipe 423 . The shunt pipe 423 and the two connecting pipes 422 are connected to the test space S.

Furthermore, at least one of the two connecting pipes 422 is formed with at least one external connection hole 4221, and the number of the at least one external connection hole 4221 is multiple in this embodiment, so that the air extraction device 3 and the air supply device 5 are each connected to at least one of the external holes 4221 and connected to the double circulation space C, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the air extraction device 3 and/or the air supply device 5 may also pass through the first test chamber 21 or the air supply device 5 according to design requirements. The second test cavity 22 is connected to the double circulation space C through a separate hole.

The fan mechanism 43 can operate to form a circulating airflow F flowing in the double circulation space C and passing through the temperature control mechanism 41, and the circulating airflow F can pass through the cooler. One of 413 and the temperature riser 414 has a preset temperature. Among them, the heating lamp 44 located in the test space S can be used with the temperature riser 414 to heat the circulating air flow F, thereby effectively improving the heating efficiency.

Furthermore, the fan mechanism 43 is preferably able to avoid affecting the temperature and pressure of the circulating air flow F in the double circulation space C. Therefore, the fan mechanism 43 can be configured in one of the following ways: However, the present invention is not limited thereto.

In this embodiment, the fan mechanism 43 includes a frame 431, a motor 432 installed in the frame 431, a barrier layer 433 installed in the frame 431, and is rotatably installed in the frame 431. A rotating shaft 434 of the barrier layer 433, a fan blade 435 fixed on the rotating shaft 434, an insulating coupling 436 located in the frame 431, and a housing 437, but the invention is not limited thereto. . For example, in other embodiments not shown in the present invention, the housing 437 can also be omitted or replaced with other components according to design requirements.

In more detail, the frame 431 is generally in the shape of a square tube and one end thereof is installed on the pipeline unit 42 (such as the installation hole 4211 of the bifurcated pipe 421), and the motor 432 is installed on the The other end of the frame 431 and an output shaft 4321 of the motor 432 are located inside the frame 431 , while the body of the motor 432 is located outside the frame 431 . Furthermore, the barrier layer 433 is adjacent to the junction of the frame 431 and the bifurcated pipe 421 to isolate the temperature and air pressure between the space in the frame 431 and the double circulation space C.

One end of the rotating shaft 434 is located within the frame 431, and the other end of the rotating shaft 434 is located within the double circulation space C, and the fan blade 435 is fixed to the other end of the rotating shaft 434. . The output shaft 4321 and the rotating shaft 434 are both arranged along a preset axis L, and the heat-insulating coupling 436 connects the output shaft 4321 and the one end of the rotating shaft 434 . Accordingly, the output shaft 4321 and the rotating shaft 434 can not only rotate synchronously through the heat insulating coupling 436, but the output shaft 4321 and the rotating shaft 434 can also rotate through the heat insulating coupling 436. And effective Reduce the transfer of heat energy to each other.

It should be noted that the frame 431 is preferably formed with a disassembly and assembly hole 4311 corresponding to the position of the heat-insulating coupling 436, so that the heat-insulating coupling 436 can pass through the disassembly and assembly hole 4311. The mounting holes 4311 are used for installation or disassembly in the frame 431 . Furthermore, the housing 437 is installed on the bifurcated tube 421 and covers and seals the frame 431 and the motor 432 (such as the body), so that the motor 432 and the motor 432 are connected to each other. The insulated coupling 436 can be isolated from the external environment by the housing 437 .

In addition, the corresponding relationship between the bifurcated tube 421 and the fan blades 435 and the rotating shaft 434 can be adjusted and changed according to design requirements. One of the possible aspects is listed below for description. The center of one of the airflow holes 4212 of the bifurcated tube 421 is located on the preset axis L and its position corresponds to the fan blade 435, and the center of the other airflow hole 4212 is located perpendicular to the preset axis L. It is assumed that the axis L is in a radial direction and its position corresponds to the rotation axis 434 . Furthermore, the radius of the fan blade 435 is preferably no less than the maximum inner diameter of the corresponding airflow hole 4212 .

As mentioned above, the motor 432 can drive the fan blade 435 to rotate with the output shaft 4321 and through the heat insulation coupling 436 and the rotating shaft 434 to form the double circulation space C. The circulating air flow F flows through the cooler 413 or the warmer 414 . Accordingly, in this embodiment, the temperature adjustment device 4 passes through the heat-insulating coupling 436 and the barrier layer 433 so that the temperature of the airflow formed by it is not affected by the motor 432 and thus can be accurately The ground is controlled.

It should be noted that the fan blade 435 refers to a structure that can form airflow through rotation. Therefore, the specific structure of the fan blade 435 can be adjusted and changed according to design requirements and is not limited to the structure presented in the drawings. . For example, in other embodiments not shown in the present invention, the fan blades 435 may be of a turbine structure that is conducive to supercharging.

Furthermore, in this embodiment, the temperature regulating device 4 controls the flow direction of the circulating air flow F through two switch valves 45 . Specifically, one of the switching valves 45 is located between the fan mechanism 43 and the cooling chamber 411 , and one of the switch valves 45 is located between the fan mechanism 43 and the heating chamber 412 . Accordingly, the two switch valves 45 can be selectively closed, so that the fan mechanism 43 disconnects the cooling chamber 411 or the heating chamber 412 .

That is to say, when the cooler 413 is in operation, the fan mechanism 43 and the cooling chamber 411 are connected to each other through the corresponding opening of the switch valve 45, and the fan mechanism 43 and the cooling chamber 411 are connected to each other. The temperature-raising chambers 412 are disconnected by correspondingly closing the switch valve 45 . Alternatively, when the temperature riser 414 is in operation, the fan mechanism 43 and the heating chamber 412 are connected to each other through the corresponding opening of the switch valve 45, and the fan mechanism 43 and the cooling chamber are connected to each other. The chambers 411 are disconnected by correspondingly closing the switch valve 45 .

It should be additionally noted that after the locking operation is performed, the double circulation space C is generally in a vacuum state, so the double circulation non-contact testing equipment 100 can use the gas supply device 5 to introduce a predetermined gas. to the dual circulation space C, and enable the dual circulation space C to reach a preset air pressure, so that at least one of the electronic components to be tested 200 disposed on the test carrier 23 can operate at the preset air pressure. The non-contact testing operation is performed in an environment with the preset temperature.

As mentioned above, in this embodiment, the dual-cycle non-contact testing equipment 100 uses a structural combination of multiple devices, so that at least one of the electronic components to be tested 200 can be tested through a non-contact method (such as: The double circulation space C has the preset air pressure and the preset temperature) to adjust test parameters (such as temperature).

In addition, the predetermined gas output by the gas supply device 5 can be changed according to demand; for example, the predetermined gas can be dry gas or a gas with a molecular weight greater than air (such as carbon dioxide gas). The circulating air flow F with a preset temperature is further formed, thereby facilitating the double circulation space C to quickly reach the preset air pressure. Furthermore, each of the flow equalizers 24 is formed with a plurality of holes so that the circulating airflow F can be more evenly distributed in the test space. S, thereby helping at least one of the electronic components under test 200 to reach the temperature required for testing.

[Technical effects of the embodiments of the present invention]

To sum up, the dual-cycle non-contact testing equipment disclosed in the embodiment of the present invention uses structural coordination between multiple devices so that at least one of the electronic components to be tested can be tested in a non-contact manner (such as: The double circulation space has the preset air pressure and the preset temperature) to adjust test parameters (such as temperature).

Furthermore, the dual-cycle non-contact testing equipment disclosed in the embodiment of the present invention further uses the air extraction device to perform vacuuming operation on the test space, so that the test space presents a negative pressure state and makes the test space The first sealing part and the second sealing part abut more closely (or clamp the airtight gasket more closely) to facilitate the sealing mechanism to then implement the locking cooperation. (for example, the driver can perform the locking operation with a smaller output power), so that the test space can be maintained in a high-pressure environment for a long time through the sealing mechanism.

In addition, the temperature regulating device disclosed in the embodiment of the present invention uses the thermal insulation coupling and the barrier layer so that the temperature of the air flow formed can not be affected by the motor and can be accurately controlled. .

The contents disclosed above are only preferred and feasible embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention. within.

100:Double cycle non-contact testing equipment

1:Machine body

11: Orbital mechanism

12:Lifting mechanism

4: Temperature adjustment device

41:Temperature control mechanism

411: Cooling chamber

412: Heating chamber

413: Cooler

414:heater

42:Pipeline unit

421: bifurcation tube

4212:Airflow hole

423:Shunt tube

4231: Diversion hole

43:Fan mechanism

435:Fan blade

45:On/off valve

C: Double circulation space

D2: second direction

Claims (10)

A dual-cycle non-contact testing equipment, which includes: One machine body; A testing device installed on the machine body, and the testing device includes: A first test chamber and a second test chamber, both of which are installed on the machine body; wherein, the second test chamber and the first test chamber can move relative to each other along a first direction. , forming a test space with common closure; and A test carrier is provided in the second test cavity, and the test carrier is used for placing an electronic component under test; A temperature adjustment device installed on the outside of at least one of the first test chamber and the second test chamber to communicate with the test space; wherein the temperature adjustment device includes: A temperature control mechanism includes a cooling chamber, a warming chamber, a cooler disposed in the cooling chamber, and a temperature riser disposed in the warming chamber; wherein the cooler and the The heater can selectively choose one operation; A pipeline unit connects the cooling chamber, the heating chamber, and the testing space so that they are connected with each other and together form a pair of circulation spaces; A fan mechanism is installed on the pipeline unit; wherein the fan mechanism can operate to form a circulating air flow flowing in the double circulation space, and the circulating air flow can pass through the cooler and the One of the temperature risers has a preset temperature; and Two switching valves, one of which is located between the fan mechanism and the cooling chamber, and one of which is located between the fan mechanism and the warming chamber; wherein, two The switch valve can be selectively closed so that the fan mechanism disconnects the cooling chamber or the heating chamber; and A gas supply device is connected to the dual circulation space; wherein the gas supply device is used to introduce a predetermined gas into the dual circulation space and enable the dual circulation space to reach a preset air pressure, so that The electronic component to be tested disposed on the test carrier can perform a non-contact test operation in the environment of the preset air pressure and the preset temperature. The dual-circulation non-contact testing equipment as claimed in claim 1, wherein the first testing cavity is formed with two through holes, and the pipeline unit includes: A bifurcated pipe has a mounting hole and three airflow holes that are connected to each other; the fan mechanism is installed in the mounting hole, and the bifurcated pipe is connected to the cooling chamber with two of the airflow holes. One end of the chamber and one end of the heating chamber; A shunt tube has three mutually connected shunt holes, and the shunt tube is connected to the other end of the cooling chamber and the other end of the heating chamber with two of the shunt holes respectively; and Two connecting pipes, one end of which is connected to the two through-holes respectively, and the other end of the two connecting pipes is connected to the other of the air flow holes of the branch pipe and one of the branch pipes. Another said diverter hole. The dual-circulation non-contact testing equipment according to claim 2, wherein at least one of the two connecting pipes is formed with at least one external connection hole, and the air supply device is connected to at least one of the external connection holes. Connected to the double circulation space. The dual-cycle non-contact testing equipment according to claim 2, wherein the testing device includes two current equalizing parts, and the two current equalizing parts are installed inside the first test chamber and their The positions respectively correspond to the two through holes. The dual-circulation non-contact testing equipment according to claim 2, wherein the temperature adjustment device includes a heating lamp located in the test space and used to heat the circulating airflow in conjunction with the temperature riser. The dual-cycle non-contact testing equipment of claim 1, wherein when the cooler is in operation, the fan mechanism and the cooling chamber are connected to each other through the corresponding opening of the switch valve. , and the fan mechanism and the heating chamber are disconnected through the corresponding closing of the switch valve; wherein, when the heater is in operation, the fan mechanism and the heating chamber are disconnected. They are connected to each other by corresponding opening of the switch valve, and disconnected from the fan mechanism and the cooling chamber by corresponding closing of the switch valve. The dual-cycle non-contact testing equipment according to claim 1, wherein the first test chamber includes a first accommodating part and a first sealing part connected to the periphery of the first accommodating part; The second test cavity includes a second accommodating part and a second sealing part connected to the periphery of the second accommodating part, and the second sealing part faces the first direction along the first direction. The first sealing part; the test device includes an airtight gasket between the first sealing part and the second sealing part; wherein the first test chamber and the second test chamber The cavity can move relatively, so that the first accommodating part and the second accommodating part jointly surround and form the test space, and the first sealing part and the second sealing part are clamped in The airtight gasket is used to achieve a pre-coupling operation. The double-cycle non-contact testing equipment as claimed in claim 7, wherein the testing device further includes a sealing mechanism, which includes: A driver installed on the machine body; A plurality of locking parts are rotatably disposed on the first sealing part of the first test chamber, and each locking part has a linking end and a locking end respectively located at opposite ends. Department; and A transmission member connecting the driver and the linkage ends of the plurality of locking members; Wherein, after the pre-locking operation, the driver can drive a plurality of the locking members to rotate synchronously through the transmission member to achieve a locking operation, so that the locking member of each locking member The closing end portion and the first sealing portion are respectively clamped on opposite sides of the second sealing portion. The dual-cycle non-contact testing equipment according to claim 8, wherein the dual-cycle non-contact testing equipment further includes an air extraction device connected between the first accommodation part and the second accommodation part. At least one of the parts; wherein, after the pre-locking operation, the exhaust device can perform a vacuum operation on the test space to facilitate the subsequent implementation of the locking operation. The double-circulation non-contact testing equipment as described in claim 1, wherein the fan mechanism includes: A frame, one end of which is installed on the pipeline unit; A motor is installed at the other end of the frame, and an output shaft of the motor is located within the frame; A barrier layer is installed in the frame to isolate the temperature and air pressure between the space in the frame and the double circulation space; A rotating shaft rotatably penetrates the barrier layer; wherein, one end of the rotating shaft is located within the frame, and the other end of the rotating shaft is located within the double circulation space; a fan blade fixed to the other end of the rotating shaft; and An insulated coupling connecting the output shaft and the one end of the rotating shaft; Wherein, the motor can drive the fan blade to rotate with the output shaft and through the thermal insulation coupling and the rotating shaft to form the circulation flowing through the cooler or the heater. Airflow.