TWI833504B - Non-contact testing apparatus with internal circulation - Google Patents

Abstract

The present invention provides a non-contact testing apparatus with an internal circulation, which includes a testing device, a temperature adjustment device connected to the testing device, and a gas supplying device. The testing device includes two testing chambers and a testing carrier located thereon. The temperature adjustment device includes a guiding cover located above the testing carrier, a temperature controlling unit arranged in the guiding cover, and a fan mechanism that is assembled to one of the two testing chambers. The guiding cover defines an internal circulation path that is arranged in an interior of the two testing chambers and that passes through the temperature controlling unit. The fan mechanism is configured to form a circulation airflow traveling along the internal circulation path, and the airflow has a predetermined temperature through the temperature controlling unit. The gas supplying device is spatially communicated with the interior of the two testing chambers, and the gas supplying device is configured to input a predetermined gas into the interior of the two testing chambers and enables the interior of the two testing chambers to achieve a predetermined pressure.

Description

Internal circulation non-contact testing equipment

The present invention relates to a kind of testing equipment, in particular to an internal circulation non-contact testing equipment.

When the existing testing equipment tests an electronic component to be tested, a temperature control element needs to be pressed against the electronic component to be tested so that the electronic component to be tested reaches the temperature required for testing. However, the contact testing methods of existing test equipment have gradually failed to meet the ever-changing changes and needs of the electronics industry.

Therefore, the inventor believed that the above-mentioned defects could be improved, so he devoted himself to research and applied scientific principles, and finally proposed an invention that is reasonably designed and effectively improves the above-mentioned defects.

An embodiment of the present invention provides an internal circulation non-contact testing equipment, which can effectively improve the defects that may occur in existing testing equipment.

An embodiment of the present invention discloses an internal circulation non-contact testing equipment, which includes: a machine body; a testing device installed on the machine body, and the testing device includes: a first testing cavity and A second test chamber, both of which are installed on the machine body; wherein, the second test chamber and the first test chamber can move relative to each other along a first direction to be jointly closed to form a test chamber. space; the top of the first test chamber is formed with an opening connected to the test space; and a test carrier is provided in the second test chamber, and the test carrier is used for a test Test electronic components; a temperature adjustment device, which is installed in the first test cavity, and part of the temperature adjustment device is located in the test space; wherein, the temperature adjustment device includes: a temperature control The mechanism includes: a flow guide cover located in the test space, and the flow guide cover is located above the test carrier; and a temperature control unit configured in the flow guide cover and adjacent to the The opening; and a fan mechanism, installed at the opening of the first test chamber and facing the temperature control unit, and the test space is defined by the air guide and the fan mechanism. The inside and outside of the shroud circulate and follow an internal circulation path through the temperature control unit; wherein the fan mechanism can operate to form a circulating airflow flowing along the internal circulation path, and the circulation The air flow can pass through the temperature control unit to have a preset temperature; and an air supply device is connected to the test space; wherein the air supply device is used to introduce a predetermined gas into the test space and can The test space is brought to a preset air pressure, so that the electronic component to be tested disposed on the test carrier can perform a non-contact test operation in the environment of the preset air pressure and the preset temperature.

To sum up, the internal circulation non-contact testing equipment disclosed in the embodiment of the present invention uses the structural coordination between multiple devices so that at least one of the electronic components to be tested can be tested in a non-contact manner (such as: The test space has the preset air pressure and the preset temperature) to adjust test parameters (such as temperature).

In order to further understand the characteristics and technical content of the present invention, please refer to the following detailed description and drawings of the present invention. However, these descriptions and drawings are only used to illustrate the present invention and do not make any reference to the protection scope of the present invention. limit.

The following is a specific example to illustrate the implementation of the "internal circulation non-contact testing equipment" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depictions based on actual dimensions, as is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of the present invention.

It should be understood that although terms such as “first”, “second” and “third” may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another component or one signal from another signal. In addition, the term "or" used in this article shall include any one or combination of more of the associated listed items depending on the actual situation.

Please refer to FIG. 1 to FIG. 9 , which is an embodiment of the present invention. This embodiment discloses an internal circulation non-contact testing equipment 100 for performing a non-contact testing operation on at least one electronic component 200 to be tested. That is to say, the internal circulation non-contact testing equipment 100 adjusts the test parameters (such as temperature) of the electronic component to be tested 200 in a non-contact manner. Accordingly, any testing equipment that uses a contact method to adjust the temperature of the electronic component under test is different from the internal circulation non-contact testing equipment 100 referred to in this embodiment.

As shown in Figures 1 to 4, the internal circulation non-contact testing equipment 100 in this embodiment includes a machine body 1, a testing device 2 installed on the machine body 1, and an assisting testing device. 2 operates an air extraction device 3, a temperature adjustment device 4 installed on the test device 2, and an air supply device 5 installed on the temperature adjustment device 4, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the internal circulation non-contact testing equipment 100 may also omit the air extraction device 3 .

In this embodiment, the test device 2 includes a first test chamber 21, a second test chamber 22 corresponding to the first test chamber 21, and a second test chamber 22 provided in the second test chamber 22. A test carrier 23, an airtight gasket 24 located between the first test chamber 21 and the second test chamber 22, and a sealing mechanism 25, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the internal circulation non-contact testing equipment 100 can selectively use at least one of the air-tight gasket 24 and the sealing mechanism 25 according to design requirements. one, or replaced by other components.

The first test chamber 21 and the second test chamber 22 are both installed on the machine body 1 so that the second test chamber 22 can be along a first test chamber 21 with the first test chamber 21 . One direction D1 (such as the plumb bob direction) moves relative to each other to form a test space S together to form a closed space. It should be noted that the specific structures of the first test chamber 21 and the second test chamber 22 can be adjusted and changed according to design requirements, so the following only describes one of the possible ways.

The first test cavity 21 includes a first accommodating part 211, a first sealing part 212 connected to the periphery of the first accommodating part 211, and a first sealing part 212 formed on the outer surface of the first accommodating part 211. A plurality of first reinforcing ribs 213 are formed on the outer surface of the first sealing portion 212 . In this embodiment, the first accommodating part 211 is generally in the shape of a rectangular groove and has an opening 2111 connected to the test space S formed on the top thereof, and the first sealing part 212 is connected to the first The notch of the accommodating portion 211 is in the shape of a rectangular ring.

In addition, the first test cavity 21 is formed with at least one external connection hole 2112 connected to the test space S in the first accommodating part 211, and the number of at least one external connection hole 2112 in this embodiment is There are multiple, so that the air extraction device 3 and the air supply device 5 are each connected to at least one of the external connection holes 2112 and connected to the test space S, but the invention is not limited thereto. For example, in other embodiments not shown in the present invention, the air extraction device 3 and/or the air supply device 5 can also pass through the second test chamber 22 according to design requirements (such as: A separate hole is opened in the second accommodation part 221 (described below) and is connected to the test space S.

Furthermore, the first accommodating part 211 , the first sealing part 212 , and the plurality of first reinforcing ribs 213 jointly form a plurality of first open compartments 214 . Wherein, four of the plurality of first open compartments 214 are respectively located at multiple corners of the first test chamber 21 , and the first test chamber 21 has four first open compartments 214 . The compartment 214 is installed and fixed on the machine body 1 (that is, the first test chamber 21 will not move relative to the machine body 1 in this embodiment).

The second test cavity 22 includes a second accommodating part 221, a second sealing part 222 connected to the periphery of the second accommodating part 221, and a second accommodating part 221 formed on the outer surface of the second accommodating part 221. A plurality of second reinforcing ribs 223 are formed on the outer surface of the second sealing portion 222 . In this embodiment, the second accommodating part 221 is generally rectangular, and the test carrier 23 is provided in the second accommodating part 221 for at least one of the electronic components to be tested 200 to be placed. and perform electrical testing; the second sealing portion 222 is in a rectangular ring shape and is formed with a plurality of elongated through holes 2221, and the second sealing portion 222 is formed between the test carrier 23 and An annular groove 2222 is formed between the plurality of elongated through holes 2221 so that the airtight gasket 24 is embedded in the annular groove 2222.

Furthermore, the second sealing part 222 faces the first sealing part 212 along the first direction D1, and the airtight gasket 24 is located between the first sealing part 212 and the second sealing part 212. between the close-fitting portions 222, and the positions of the plurality of second reinforcing ribs 223 generally correspond to the plurality of first reinforcing ribs 213 along the first direction D1. Wherein, the second accommodating part 221, the second sealing part 222, and the plurality of second reinforcing ribs 223 jointly form a plurality of second open compartments 224, and the plurality of second open compartments 224 are formed. The open compartments 224 respectively correspond to a plurality of the first open compartments 214 along the first direction D1, and each of the elongated through holes 2221 is connected to one of the second open compartments. 224.

According to the above, the first test cavity 21 and the second test cavity 22 can move relatively, so that the first accommodating part 211 and the second accommodating part 221 jointly surround and form the The test space S is provided, and the first sealing part 212 and the second sealing part 222 are clamped by the air-tight gasket 24 to achieve a pre-collision operation (eg, FIG. 4 ).

Furthermore, in this embodiment, the action between the first test chamber 21 and the second test chamber 22 is realized through the machine body 1. The following describes the operation of the machine body 1. One of the possible forms is, but the present invention is not limited to this.

As shown in Figures 1 to 3, the machine body 1 includes a track mechanism 11 (such as a linear slide rail) and a lifting mechanism 12 (such as a pneumatic cylinder or a hydraulic cylinder) positioned corresponding to the track mechanism 11. . Wherein, the second test chamber 22 is installed on the track mechanism 11 so that the second test chamber 22 can pass through the track mechanism 11 along a second direction D2 perpendicular to the first direction D1. Move between a material placement position (eg: Figure 1) and an operating position (eg: Figure 2 and Figure 3).

For example, as shown in FIG. 1 , when the second test chamber 22 is located at the material placement position, the second test chamber 22 is disposed in a staggered position relative to the first test chamber 21 . The test carrier 23 installed in the second test cavity 22 can be used for setting at least one of the electronic components 200 to be tested.

As shown in FIGS. 2 and 3 , when the second test chamber 22 is in the working position, the second sealing part 222 faces the first sealing part 212 along the first direction D1 , the position of the lifting mechanism 12 corresponds to the second test cavity 22 in the working position, and the lifting mechanism 12 can drive the second testing cavity 22 in the working position along the The first direction D1 moves to realize the pre-cooperation operation.

As shown in FIGS. 3 to 6 , the close mechanism 25 includes a driver 251 , a plurality of locking parts 252 , and a transmission part 253 that transmits the power of the driver 251 to the plurality of locking parts 252 . Among them, the driver 251 is installed on the machine body 1 and adjacent to the first test chamber 21, and the driver 251 is illustrated as a drive motor in this embodiment, which includes a power output as a power output. A toothed part 2511 is used.

Furthermore, each of the locking parts 252 has a linking end part 2521 and a locking end part 2522 respectively located at opposite ends, and a plurality of the locking parts 252 are rotatably disposed in the first test chamber. The first sealing portion 212 of the body 21 . In this embodiment, each locking member 252 is configured in one of the first open compartments 214 and is installed upright on the first sealing portion 212 (that is, a plurality of the linking end portions). 2521 are parallel to each other), and the linking end 2521 and the locking end 2522 of each locking member 252 are respectively located on opposite sides of the first sealing portion 212 .

In more detail, the interlocking end portion 2521 of each locking member 252 is a gear, and the toothed portion 2511 and the plurality of interlocking end portions 2521 are arranged higher than the first test chamber. A plane of the body 21 (that is, the side of the first test chamber 21 away from the second test chamber 22). In addition, the transmission member 253 connects the linkage end portions 2521 of the driver 251 and the plurality of locking members 252; that is to say, the transmission member 253 is engaged with the tooth profile in this embodiment. 2511 and a plurality of said linking end portions 2521 of a transmission chain, but the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the cooperation between the transmission member 253 and the plurality of linkage end portions 2521 can also be achieved by using a belt and a plurality of friction wheels; or, The driver 251 can be implemented by using a pneumatic cylinder or a hydraulic cylinder in combination with other structures.

Furthermore, the positions and shapes of the plurality of locking end portions 2522 respectively correspond to the positions and shapes of the plurality of elongated through holes 2221 . Accordingly, after the pre-locking operation, the driver 251 can drive a plurality of the locking members 252 to rotate synchronously through the transmission member 253 to achieve a locking operation (such as Figure 5 and Figure 6), Therefore, the locking end portion 2522 of each locking member 252 and the first sealing portion 212 are clamped on opposite sides of the second sealing portion 222 respectively. That is to say, each of the locking end portions 2522 passes through the corresponding elongated through hole 2221 during the pre-locking operation, and is rotated and misaligned with the corresponding elongated through hole 2221 during the locking operation. Shaped through hole 2221.

It should be additionally noted that after the sealing mechanism 25 performs the locking operation, the test space S of the test device 2 needs to be able to maintain a high-pressure environment for a long time, so for the sealing mechanism 25 The locking operation requires extremely high tightness (for example, the driver 251 must use a huge output power to achieve the locking operation), which makes the locking operation difficult to implement.

Accordingly, as shown in FIGS. 2 to 6 , after the preparatory work, the internal circulation non-contact testing equipment 100 further uses the air extraction device 3 (such as a pump) in this embodiment. To perform a vacuuming operation on the test space S, so that the test space S presents a negative pressure state, so that the first sealing portion 212 and the second sealing portion 222 are more closely contacted. (or clamp the air-tight gasket 24 more tightly) to facilitate the closing mechanism 25 to then perform the locking operation (for example: the driver 251 can achieve the locking operation with a smaller output power) Locking operation), so that the test space S can be maintained in a high-pressure environment for a long time through the sealing mechanism 25 .

In more detail, the air extraction device 3 is connected to at least one of the first accommodation part 211 and the second accommodation part 221 (for example: the air extraction device 3 in this embodiment is Communicated with the first accommodating portion 211 ), thereby communicating with the test space S so that the vacuuming operation can be performed.

As shown in FIGS. 6 to 9 , the temperature adjustment device 4 is installed in the first test chamber 21 , and part of the temperature adjustment device 4 is located in the test space S. Specifically, the temperature adjustment device 4 includes a temperature control mechanism 41, a fan mechanism 43 installed in the first test chamber 21 (such as the opening 2111), and a fan mechanism 43 located in the test space S. A heating lamp 42.

The temperature control mechanism 41 includes a flow guide cover 411 and a temperature control unit 412 arranged in the flow guide cover 411 . Wherein, the air guide cover 411 is located in the test space S and above the test carrier 23 .

In more detail, the air guide 411 includes a configuration tube 4111 adjacent to the opening 2111 and a cover 4112 extending from the bottom edge of the configuration tube 4111 toward the second test chamber 22 . Wherein, the volume of the cover 4112 gradually increases from the configuration tube 4111 toward the second test chamber 22; that is to say, the cover 4112 is generally in the shape of a truncated cone and is preferably There is a gap between the first test chamber 21 and the second test chamber 22 .

Furthermore, the temperature control unit 412 is disposed in the air guide 411 (such as the configuration tube 4111) and adjacent to the opening 2111, and the temperature control unit 412 includes a temperature riser 4121 (such as: At least one of an electric heater) and a cooler 4122 (such as an evaporator). That is to say, in this embodiment, the temperature control unit 412 can match the required number of the temperature risers 4121 and the number of the temperature coolers 4122 according to the design requirements.

The fan mechanism 43 is installed in the opening 2111 of the first test chamber 21 and faces the temperature control unit 412 , and the test space S is defined by the air guide 411 and the fan mechanism 43 There is an internal circulation path that circulates inside and outside the air guide cover 411 and passes through the temperature control unit 412 . The fan mechanism 43 can operate to form a circulating airflow F flowing along the inner circulation path, and the circulating airflow F can have a preset temperature through the temperature control unit 412 . Among them, the heating lamp 42 located in the test space S can be used with the temperature control unit 412 (such as the temperature riser 4121) to heat the circulating air flow F, thereby effectively improving the heating efficiency. .

Furthermore, the fan mechanism 43 is preferably able to avoid affecting the temperature and pressure of the circulating airflow F in the test space S, so the fan mechanism 43 is in one of the possible states in the following content. Examples are described below, but the present invention is not limited thereto.

In this embodiment, the fan mechanism 43 includes a frame 431, a motor 432 installed in the frame 431, a barrier layer 433 installed in the frame 431, and is rotatably installed in the frame 431. A rotating shaft 434 of the barrier layer 433, a fan blade 435 fixed on the rotating shaft 434, an insulating coupling 436 located in the frame 431, and a housing 437, but the invention is not limited thereto. . For example, in other embodiments not shown in the present invention, the housing 437 can also be omitted or replaced with other components according to design requirements.

In more detail, the frame 431 is generally in the shape of a square tube and one end thereof is installed in the opening 2111. The motor 432 is installed at the other end of the frame 431, and an output shaft 4321 of the motor 432 is located at Inside the frame 431 , the body of the motor 432 is located outside the frame 431 . Furthermore, the barrier layer 433 is adjacent to the interface between the frame 431 and the opening 2111 to isolate the temperature and air pressure between the space in the frame 431 and the test space S.

One end of the rotating shaft 434 is located in the frame 431 , and the other end of the rotating shaft 434 is located in the air guide 411 (such as the configuration tube 4111 ), and the fan blade 435 is fixed on The other end of the rotating shaft 434 and the fan blade 435 are located in the configuration tube 4111 and adjacent to the temperature control unit 412 . The output shaft 4321 and the rotating shaft 434 are both arranged along a preset axis L, and the heat-insulating coupling 436 connects the output shaft 4321 and the one end of the rotating shaft 434 . Accordingly, the output shaft 4321 and the rotating shaft 434 can not only rotate synchronously through the heat insulating coupling 436, but the output shaft 4321 and the rotating shaft 434 can also rotate through the heat insulating coupling 436. And effectively reduce the mutual transfer of heat energy.

It should be noted that the frame 431 is preferably formed with a disassembly and assembly hole 4311 corresponding to the position of the heat-insulating coupling 436, so that the heat-insulating coupling 436 can pass through the disassembly and assembly hole 4311. The mounting holes 4311 are used for installation or disassembly in the frame 431 . Furthermore, the shell 437 is installed on the top of the first test chamber 21 and covers and seals the frame 431 and the motor 432 (such as the body) inside, so that The motor 432 and the insulated coupling 436 can be isolated from the external environment by the housing 437 .

As mentioned above, the motor 432 can drive the fan blade 435 to rotate with the output shaft 4321 and through the heat insulation coupling 436 and the rotating shaft 434 to form a fan blade 435 in the test space S. The circulating air flow F flows through the temperature control unit 412 . Accordingly, in this embodiment, the temperature adjustment device 4 passes through the heat-insulating coupling 436 and the barrier layer 433 so that the temperature of the airflow formed by it is not affected by the motor 432 and thus can be accurately The ground is controlled.

It should be noted that the fan blade 435 refers to a structure that can form airflow through rotation. Therefore, the specific structure of the fan blade 435 can be adjusted and changed according to design requirements and is not limited to the structure presented in the drawings. . For example, in other embodiments not shown in the present invention, the fan blades 435 may be of a turbine structure that is conducive to supercharging.

In addition, in this embodiment, the fan mechanism 43 can selectively execute a first operation mode (eg, FIG. 7 ) or a second operation mode (eg, FIG. 8 ) according to actual needs. Specifically, as shown in FIG. 7 , when the fan mechanism 43 executes the first operation mode, the fan blades 435 of the fan mechanism 43 rotate to form a flow path along the inner circulation path and from where the fan mechanism 43 moves. The circulating airflow F flowing from the fan blades 435 toward the temperature control unit 412 (or the test carrier 23 ) facilitates the circulating airflow F to relatively quickly interact with at least one of the electronic components to be tested. 200 for heat energy exchange. Alternatively, as shown in FIG. 8 , when the fan mechanism 43 executes the second operation mode, the fan blades 435 rotate to form a path along the internal circulation path from the temperature control unit 412 toward the temperature control unit 412 . The circulating airflow F flowing through the fan blades 435 makes the temperature distribution in the test space S relatively stable.

It should be additionally noted that after the locking operation is performed, the test space S is generally in a vacuum state, so the internal circulation non-contact test equipment 100 can use the gas supply device 5 to pass a predetermined gas into The test space S can make the test space S reach a preset air pressure, so that at least one of the electronic components to be tested 200 disposed on the test carrier 23 can operate at the preset air pressure and the preset air pressure. The non-contact test operation is performed in an environment with a preset temperature.

As mentioned above, in this embodiment, the internal circulation non-contact testing equipment 100 adopts the structural matching between multiple devices, so that at least one of the electronic components to be tested 200 can be tested through a non-contact method (such as: The test space S has the preset air pressure and the preset temperature) to adjust test parameters (such as temperature).

In addition, the predetermined gas output by the gas supply device 5 can be changed according to demand; for example, the predetermined gas can be dry gas or a gas with a molecular weight greater than air (such as carbon dioxide gas). The circulating air flow F with a preset temperature is further formed, thereby facilitating the test space S to quickly reach the preset air pressure.

[Technical effects of the embodiments of the present invention]

To sum up, the internal circulation non-contact testing equipment disclosed in the embodiment of the present invention uses the structural coordination between multiple devices so that at least one of the electronic components to be tested can be tested in a non-contact manner (such as: The test space has the preset air pressure and the preset temperature) to adjust test parameters (such as temperature).

Furthermore, the internal circulation non-contact test equipment disclosed in the embodiment of the present invention further uses the air extraction device to perform vacuuming operation on the test space, so that the test space presents a negative pressure state, so that The first sealing part and the second sealing part abut more closely (or clamp the airtight gasket more closely) to facilitate the sealing mechanism to then implement the locking cooperation. operation (for example, the driver can realize the locking operation with a smaller output power), so that the test space can be maintained in a high-pressure environment for a long time through the sealing mechanism.

In addition, the temperature regulating device disclosed in the embodiment of the present invention uses the thermal insulation coupling and the barrier layer so that the temperature of the air flow formed can not be affected by the motor and can be accurately controlled. .

The contents disclosed above are only preferred and feasible embodiments of the present invention, and do not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the patent scope of the present invention. within.

100: Internal circulation non-contact testing equipment 1:Machine body 11: Orbital mechanism 12:Lifting mechanism 2:Test device 21: The first test cavity 211:First Accommodation Department 2111:Open your mouth 2112: External hole 212:First Close Unit 213:The first reinforced rib 214: First open compartment 22: Second test chamber 221:Second Accommodation Department 222:Second Close Section 2221: Long through hole 2222: Annular groove 223: Second reinforced rib 224: Second open compartment 23:Test carrier 24: Air sealing gasket 25: Close mechanism 251:drive 2511:Tooth profile part 252:Lock parts 2521: Linked end 2522:Locked end 253: Transmission parts 3: Air extraction device 4: Temperature adjustment device 41:Temperature control mechanism 411:Shroud 4111:Configuration management 4112:Cover body 412:Temperature control unit 4121:heater 4122: Cooler 42:Heating lamps 43:Fan mechanism 431:frame 4311: Disassembly and assembly holes 432: Motor 4321:Output shaft 433: Barrier layer 434:Shaft 435:Fan blade 436:Thermal insulation coupling 437: Shell 5:Air supply device S: test space F: circulating air flow D1: first direction D2: second direction L: Default axis 200: Electronic components to be tested

Figure 1 is a three-dimensional schematic diagram of an internal circulation non-contact testing device according to an embodiment of the present invention.

FIG. 2 is a schematic three-dimensional view of the subsequent actions of FIG. 1 .

FIG. 3 is a schematic cross-sectional plan view of FIG. 2 .

FIG. 4 is a schematic three-dimensional cross-sectional view of the subsequent actions of FIG. 2 .

FIG. 5 is a schematic three-dimensional cross-sectional view of the subsequent actions of FIG. 4 .

FIG. 6 is a schematic three-dimensional cross-sectional view of the subsequent actions of FIG. 5 to put the internal circulation non-contact testing equipment into non-contact testing operation.

7 is a schematic plan view of the internal circulation non-contact testing equipment when the fan mechanism is in the first operating mode according to the embodiment of the present invention.

8 is a schematic plan view of the internal circulation non-contact testing device when the fan mechanism is in the second operating mode according to the embodiment of the present invention.

Figure 9 is a schematic three-dimensional cross-sectional view of the fan mechanism according to the embodiment of the present invention.

100: Internal circulation non-contact testing equipment

1:Machine body

11: Orbital mechanism

12:Lifting mechanism

2:Test device

21: The first test chamber

211:First Accommodation Department

2111:Open your mouth

2112: External hole

212:First Close Unit

213: The first reinforced rib

214: First open compartment

22: Second test chamber

221:Second Accommodation Department

222:Second Close Section

2222: Annular groove

223: Second reinforced rib

224: Second open compartment

23:Test carrier

24: Air sealing gasket

25: Close mechanism

252:Lock parts

2521: Linked end

253: Transmission parts

3: Air extraction device

4: Temperature adjustment device

41:Temperature control mechanism

411:Shroud

4111:Configuration management

4112:Cover body

412:Temperature control unit

4121:heater

4122: Cooler

42:Heating lamps

43:Fan mechanism

5:Air supply device

S: test space

F: circulating air flow

D1: first direction

L: Default axis

200: Electronic components to be tested

Claims (10)

An internal circulation non-contact testing equipment, which includes: a machine body; a testing device installed on the machine body, and the testing device includes: a first test chamber and a second test chamber bodies, which are installed on the machine body; wherein, the first test chamber has a first sealing portion, and the second test chamber has a second sealing portion along the first The direction faces the first sealing portion; the second test chamber and the first test chamber can move relative to each other along the first direction, so that the first sealing portion and the third sealing portion The two sealing parts are jointly closed to form a test space; an opening connected to the test space is formed on the top of the first test cavity; and a test carrier is provided in the second test cavity, and the The test carrier is used for setting an electronic component to be tested; a temperature adjustment device is installed in the first test cavity, and part of the temperature adjustment device is located in the test space; wherein, the The temperature adjustment device includes: a temperature control mechanism, including: a flow guide cover located in the test space, and the flow guide cover is located above the test carrier; and a temperature control unit configured in the test space. inside the air guide and adjacent to the opening; and a fan mechanism installed at the opening of the first test chamber and facing the temperature control unit, and the test space passes through the air guide and The fan mechanism is defined to circulate inside and outside the shroud and along an internal circulation path passing through the temperature control unit; wherein, the fan The mechanism can operate to form a circulating air flow flowing along the internal circulation path, and the circulating air flow can have a preset temperature through the temperature control unit; and an air supply device is connected to the test space; Wherein, the gas supply device is used to introduce a predetermined gas into the test space and enable the test space to reach a preset air pressure, so that the electronic component under test provided on the test carrier can A non-contact test operation is performed under the environment of the preset air pressure and the preset temperature. The internal circulation non-contact testing equipment according to claim 1, wherein the temperature control unit includes at least one of a temperature riser and a temperature dropper, which is adjacent to a blade of the fan mechanism. The internal circulation non-contact testing equipment according to claim 1, wherein the air deflector includes: a configuration tube adjacent to the opening, and the temperature control unit and a blade of the fan mechanism are located in the configuration tube; and a cover is formed extending from the bottom edge of the configuration tube towards the second test chamber, and the volume of the cover extends from the configuration tube towards the second test chamber. The direction of the test cavity is increasing. The internal circulation non-contact testing equipment of claim 1, wherein the fan mechanism can selectively execute a first operation mode or a second operation mode; wherein, when the fan mechanism executes the first operation mode In the operating mode, one blade of the fan mechanism rotates to form the circulating air flow along the internal circulation path and flowing from the blade toward the temperature control unit; wherein, when the fan mechanism executes In the second operating mode, the fan blades rotate to form a The circulating air flow flows along the inner circulation path and from the temperature control unit toward the fan blades. The internal circulation non-contact testing equipment according to claim 1, wherein the first test chamber includes a first accommodating part, the periphery of which is connected to the first sealing part; the second test chamber The body includes a second accommodating portion, the periphery of which is connected to the second sealing portion; the testing device includes an airtight gasket located between the first sealing portion and the second sealing portion; wherein , the first test cavity and the second test cavity can move relatively, so that the first accommodating part and the second accommodating part jointly surround and form the test space, and the first The sealing part and the second sealing part are clamped by the air-tight gasket to achieve a pre-collision operation. The internal circulation non-contact testing equipment according to claim 5, wherein the testing device further includes a sealing mechanism, which includes: a driver installed on the machine body; a plurality of locking parts that can rotate is disposed on the first sealing portion of the first test cavity, and each locking member has a linking end and a locking end respectively located at opposite ends; and a transmission member, connected The linkage end portions of the driver and the plurality of locking parts; wherein, after the pre-cooperation operation, the driver can drive the plurality of locking parts to rotate synchronously through the transmission member. A locking operation is performed so that the locking end portion of each locking member and the first sealing portion are respectively clamped on opposite sides of the second sealing portion. The internal circulation non-contact testing equipment as described in claim 6, wherein the internal circulation The cyclic non-contact testing equipment further includes an air extraction device connected to at least one of the first accommodating part and the second accommodating part; wherein, after the pre-operation, the exhaust device The gas device can perform a vacuum operation on the test space to facilitate subsequent implementation of the locking operation. The internal circulation non-contact testing equipment of claim 6, wherein the driver includes a toothed portion, the linking end of each locking member is a gear, and the transmission member is a meshing A transmission chain between the toothed portion and the plurality of interlocking end portions; the toothed portion and the plurality of interlocking end portions are arranged on a plane higher than the first test chamber, and a plurality of The rotation axes of the linkage ends are parallel to each other. The internal circulation non-contact test equipment of claim 1, wherein the fan mechanism includes: a frame with one end installed on the opening; a motor installed on the other end of the frame, and An output shaft of the motor is located in the frame; a barrier layer is installed in the frame to isolate the temperature and air pressure between the space in the frame and the test space; a rotating shaft can Rotated through the barrier layer; wherein, one end of the rotating shaft is located within the frame, and the other end of the rotating shaft is located within the air deflector; a fan blade is fixed to the rotating shaft The other end is adjacent to the temperature control unit; and an insulated coupling connects the output shaft and the one end of the rotating shaft; wherein the motor can use the output shaft and the The fan blades are driven to rotate through the thermal insulation coupling and the rotating shaft to form a flow through the temperature control The circulating air flow of the unit. The internal circulation non-contact test equipment according to claim 9, wherein the fan mechanism includes a shell installed on the top of the first test chamber, which covers and seals the frame and The motor is inside; wherein, the frame is formed with a disassembly and assembly hole whose position corresponds to the heat-insulating coupling, so that the heat-insulating coupling can pass through the disassembly and assembly hole and be attached to the heat-insulating coupling. Install or disassemble inside the frame.

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