TWI824565B - Optical detection system and integrated optical detection device - Google Patents

Abstract

An integrated optical detection device of an optical detection system, including a first objective lens that is closest to the light-emitting element under test and converts its light into parallel light, and a lens that is located on the downstream side of the first objective lens and divides the light into first and second detection lights. The light guide unit, a light collecting module located on the first downstream side of the light guide unit to detect the brightness and spectrum of the first detection light, and a third module located on the second downstream side of the light guide unit to focus the second detection light. Two objective lenses, an image capture unit located on the downstream side of the second objective lens to detect the near-field optical characteristics of the second detection light, and an image capture unit located on the second downstream side of the light guide unit and located on the upstream side of the second objective lens to attenuate the second detection light. Light dimming unit. The invention has high detection efficiency and can avoid problems such as complex design, insufficient light collection, and the need to refocus when replacing the component under test.

Description

Optical detection system and integrated optical detection device

The present invention relates to detection systems for detecting electronic components, and in particular to an optical detection system for detecting light-emitting components and its integrated optical detection device.

With the development of laser technology, laser diodes can be used in reading and writing data, communicating, emitting light, measuring distances or sensing various objects, etc., and have a wide range of uses. Generally speaking, laser diode systems are manufactured using semiconductor processes. Basically, laser diodes can be divided into two types: edge emitting and surface emitting. Recently, surface emitting lasers Polar bodies, such as vertical-cavity surface-emitting laser (VCSEL) wafers, will become low-cost and widely used optoelectronic components in the future because their structure and characteristics meet market demand. The market is expected to .

In order to ensure the quality of the laser diode when it is shipped, it is necessary to light up the laser diode during testing and check whether the various photoelectric parameters of the laser diode are normal. Among them, when performing luminous efficiency testing, the probe of a probe card is usually used to touch the conductive contact of a component under test to cause the component under test to emit light, and at the same time, a light receiving device (such as an integrating sphere) is used to receive the light. Measure the light emitted by the component and then measure its luminous efficiency.

Taiwan Patent No. I748667 discloses an optical detection system (10) (the numbers in brackets here and below are quoted from the aforementioned patent), including a brightness detection module (11), an integrated detection module (12), and A far-field detection module (13). The brightness detection module (11) is used to perform LIV (light-current-voltage) detection on the component under test to measure the curves of brightness/light power versus current and voltage. The integrated detection module (12) is It is used to detect the near-field optical characteristics and beam quality factor (beam quality factor; also known as M-Square (M ² )) of the component under test. The far-field detection module (13) is used to detect the component under test. Far-field optical property detection. Among them, the optical detection device (50) of the integrated detection module (12) includes a second objective lens (57) and a light reduction unit (56) arranged sequentially from the position closest to the component (142) under test. ), a light guide unit (54), a first objective lens (53) and an image capture unit (51). The light emitted by the component under test (142) passes through the second objective lens (57) and then passes through the light reduction unit ( 56) The attenuation is then guided by the light guide unit (54) to the first objective lens (53) for focusing, so that the image capture unit (51) captures the image of the component under test (142).

In the optical detection system (10) of the above-mentioned patent document, the optical detection system is divided into three detection stations (11, 12, 13), which are used to illuminate the component under test (such as a VCSEL chip) in turn at different positions. Efficiency testing and other different optical characteristics testing. Although the detection purpose can be achieved in this way, the components under test need to be accurately aligned when moving between detection stations and after moving to each station. These processes take a considerable amount of time (hereinafter collectively referred to as station changing time).

In order to reduce the station changing time and thereby improve the detection efficiency, the inventor of the present invention thought of reducing the number of detection stations of the optical detection system (for example, from three stations to two stations). Based on the conditions required for detection, there needs to be a certain distance between the far-field detection module (13) and the component under test (142) (for example, a distance of 6 cm between the two), and the brightness detection module (11) and The closer the near-field detection module (integrated detection module (12)) is to the component under test, the better (for example, the distance between the two needs to be less than 1 cm). Therefore, if you want to combine the far-field detection module with the brightness detection The modules are integrated together, or the far-field detection module and the near-field detection module are integrated into one Starting and meeting its different detection conditions, its design complexity is very high. Therefore, the inventor of the present invention attempts to integrate the brightness detection module and the near-field detection module into the same detection station.

However, both the brightness detection module and the near-field detection module were originally arranged vertically. The near-field detection module was equipped with a configuration for changing the near-field optical characteristics detection (especially the beam quality factor (M ² ) detection). The focal length telescopic device (the first and second displacement units 20 and 30), therefore, the maximum longitudinal length of the near-field detection module is longer than that of the brightness detection module. If the near-field detection module is set horizontally and integrated on one side of the brightness detection module, the lateral length of the entire detection system will be greatly increased, resulting in larger equipment. Therefore, in order to avoid the above problems, the inventor of the present invention came up with the idea of maintaining the near-field detection module in a vertical position and integrating the brightness detection module on one side of the near-field detection module.

The optical detection device integrated in the above manner, as shown in Figure 1, also includes an objective lens 12, a light reduction unit 13, and a light guide unit arranged sequentially from the position closest to the component 11 under test. 14. Another objective lens 15, and an image capture unit 16, and further includes a light collecting device 17 provided on one side of the light guide unit 14 to receive the light of the component under test 11 exported by the light guide unit 14 to perform Brightness detection. In terms of the optical path, the light reduction unit 13 of the above-mentioned integrated optical detection device is arranged upstream of the light collecting device 17, and the purpose of the light reduction unit 13 is to avoid the amount of light received by the image capture unit 16. It is too strong to capture a clear image. Therefore, such a configuration will have a great impact on the amount of incident light of the light collecting device 17, especially since the light from the component under test 11 has already passed through the first objective lens 12. After being slightly attenuated and further attenuated by the light reduction unit 13 , the amount of incident light entering the light collecting device 17 will be insufficient for detection by the light collecting device 17 .

Therefore, the inventor of the present invention, taking into account the purpose of simplifying the installation structure, tried to install the light reduction unit 13 at the position closest to the image capture unit 16, that is, as shown in FIG. 2, from the closest position to the receiver. The position of the measuring element 11 is an objective lens 12, a light guide unit 14, another objective lens 15, and A light reduction unit 13 and an image capture unit 16, and a light collecting device 17 is provided on one side of the light guide unit 14. To be specific, when the light reduction unit 13 is installed at the position closest to the image capture unit 16, there is only the image capture unit 16 on the downstream side of the light reduction unit 13; conversely, if the light reduction unit 13 is placed upstream, By moving sideways, the light reduction unit 13 will affect the working distance (focusing distance) of the optical element located on its downstream side. Therefore, if the light reduction unit 13 is arranged upstream, the working distance (focus distance) of more components needs to be adjusted, which makes the design more cumbersome. On the contrary, the light reduction unit 13 shown in Figure 2 is closest to the image capture. The configuration of unit 16 has the advantage of simple design. However, the objective lens 12 close to the component under test 11 will adjust the light 18 of the component under test 11 received on its upstream side into parallel light 182, and the objective lens 15 close to the image capture unit 16 will adjust the light 18 received by the component under test 11 into parallel light 182, and the objective lens 15 close to the image capture unit 16 will enter the image capture unit when the light 18 enters the image capture unit. Focusing is performed before 16, that is, the original parallel light 182 is focused into non-parallel light 184 when emitted from the downstream side of the objective lens 15. Therefore, although arranging the light reduction unit 13 at the position closest to the image capture unit 16 has the advantage of simple installation design, this configuration places the light reduction unit 13 on the path of the non-parallel light 184. In this way, After the component under test 11 is replaced, as the light-emitting angle of the component under test 11 is different, it will take time to readjust the focus, which hinders the improvement of detection efficiency.

In view of the above shortcomings, the main purpose of the present invention is to provide an optical detection system and its integrated optical detection device. Even if the integrated optical detection device integrates brightness detection and near-field optical detection, it can also avoid complex design and light collection. Inadequacy, as well as problems such as the need to refocus when replacing the component under test, can produce high detection efficiency.

In view of the above shortcomings, another object of the present invention is to provide an optical detection system and its integrated optical detection device. Even if the integrated optical detection device integrates brightness detection and near-field optical detection, it can also avoid the need for large-scale equipment. problem.

In order to achieve the above main purpose, the integrated optical detection device of the optical detection system provided by the present invention is used to detect light emitted by a light-emitting element, and the light enters along an optical path. The integrated optical detection device. The integrated optical detection device includes a first objective lens, a light guide unit (such as a beam splitter), a light collection module (such as an integrating sphere), a second objective lens, an image capture unit, and a light reduction unit ( For example, ND filter (neutral density filter)). The first objective lens is located at the position closest to the light-emitting element of the integrated optical detection device for receiving the light and converting the light into parallel light. The light guide unit is located on a downstream side of the first objective lens on the optical path, and is used to divide the light into a first detection light and a second detection light, so that the optical path is divided into a first sub-path and a second subpath. The light collection module is located on the first downstream side of one of the light guide units on the first sub-path of the optical path. The first detection light enters the light collection module from the light guide unit along the first sub-path for the light collection module. The group detects at least one of the brightness and spectrum of the first detection light. The second objective lens is located on a second downstream side of the light guide unit on the second sub-path of the optical path, and is used to focus the second detection light. The image capturing unit is located on a downstream side of the second objective lens on the second sub-path of the optical path, and is used to detect the near-field optical characteristics of the second detection light after it is focused through the second objective lens. The light reduction unit is located on the second downstream side of the light guide unit on the second sub-path of the optical path. The second detection light enters the light reduction unit from the light guide unit along the second sub-path for the light reduction unit to attenuate the second Light is detected, and the light reduction unit is located on the upstream side of one of the second objective lenses.

Or, defined by the structural positional relationship, the integrated optical detection device of the optical detection system provided by the present invention is used to detect light emitted by a light-emitting element. The integrated optical detection device includes a first objective lens, a A light guide unit, a light collection module, a second objective lens, an image capture unit, and a light reduction unit. The first objective lens is disposed on a first side of the light guide unit to receive the light and convert the light into parallel light and then enter the light guide unit, so that the light guide unit divides the light into a first detection light and a second detection light. The light collecting module is disposed on a second side of the light guide unit and is used to receive the first detection light and detect at least one of the brightness and spectrum of the first detection light. The second objective lens is disposed on a third side of the light guide unit for receiving the second detection light and focusing the second detection light. image The capture unit is disposed on the third side of the light guide unit and is located on the side of the second objective lens opposite to the light guide unit (that is, the image capture unit and the light guide unit are disposed on two opposite sides of the second objective lens respectively) , used to receive the second detection light and detect the near-field optical characteristics after the second detection light is focused through the second objective lens. The light reduction unit is disposed on the third side of the light guide unit (that is, the light reduction unit, the light collection module and the first objective lens are respectively disposed on different sides of the light guide unit) for attenuating the second detection light.

The integrated optical detection device of the present invention integrates a light collection module (for brightness detection) and an image capture unit (for near-field optical detection) with similar optical detection conditions. The far-field detection module and the brightness detection module are integrated together, or the far-field detection module and the near-field detection module with different detection conditions are integrated together. The integrated optical detection device of the present invention can reduce the design cost after integration. complexity. And in the integrated optical detection device of the present invention, the light collection module is configured in the first sub-path of the optical path, and the light reduction unit is configured in the second sub-path of the optical path. In this case, the light reduction unit is in The optical path is not located upstream of the light-collecting module, so it can be avoided that the light from the component under test passes through the light-reducing unit before entering the light-collecting module, resulting in insufficient light input to the light-collecting module. And in the integrated optical detection device of the present invention, the light reduction unit is located on the upstream side of the second objective lens on the optical path. That is to say, the light reduction unit is located on the parallel light that has not been focused by the second objective lens into non-parallel light. On the optical path, with this, after the component under test is replaced, even if the light-emitting angle of the component under test is different, there is no need to waste time to re-adjust the focus. Therefore, the problem of needing to refocus when replacing the component under test can be avoided, and thus it can be more Improve detection efficiency.

In this way, the integrated optical detection device of the present invention integrates brightness detection and near-field optical detection in a low-complexity manner, so that the optical characteristic detection that originally needs to be divided into two detection stations can be performed at the same detection station. To improve detection efficiency. Among them, the light reduction unit is not disposed upstream of the light collection module on the optical path, so the light entering the light collection module will not pass through the light reduction unit first. In this way, the first detection light received by the light-collecting module is not attenuated by the light-reduction unit, thereby avoiding the problem of insufficient light collection. Moreover, the light-reduction unit is disposed upstream of the second objective lens, so the light-reduction unit receives The second detection light is parallel light that is not focused by the second objective lens. That is, the light reduction unit is disposed on the path of the parallel section of the second detection light. Therefore, it can avoid the problem of refocusing when replacing the component under test, and thus can Further improve detection efficiency.

In order to achieve the other purpose mentioned above, in the integrated optical detection device of the optical detection system provided by the present invention, light is emitted from the self-luminous element along an optical axis, and the first objective lens, light guide unit, light reduction unit, The second objective lens and the image capturing unit are arranged along the optical axis. In other words, the first objective lens, the light guide unit, the light reduction unit, the second objective lens and the image capture unit are longitudinally arranged parallel to the direction in which the light-emitting element emits light, and the light-collecting module is arranged perpendicular to the direction in which the light-emitting element emits light. The light guide unit is arranged transversely on one side of the light guide unit. In this way, the relevant components of near-field optical detection that require a large working length are arranged vertically, and the light collection module related to brightness detection is integrated in a transverse arrangement on one side of the vertically arranged components. Therefore, the integration of the present invention The type optical detection device can avoid the lateral length of the entire optical detection system being too long, which will cause the equipment to become larger.

In addition, the present invention further provides an optical detection system, which includes a carrying device for carrying a light-emitting element, a power supply device for electrically contacting the light-emitting element to cause the light-emitting element to emit light, and a power supply device as described above. An integrated optical detection device that detects at least one of the brightness and spectrum of the light emitted by the light-emitting element and the near-field optical characteristics, and a far-field detection device used to detect the far-field optical characteristics of the light-emitting element.

Preferably, in the aforementioned optical detection system and its integrated optical detection device, the light collection module is arranged on one of the reflection light paths of the light guide unit, and the light reduction unit is arranged on one of the transmission light paths of the light guide unit. The light is emitted from the luminous element along an optical axis, and the transmitted light path is parallel to the optical axis. axis, in this case, the light-collecting module and the light-reducing unit are respectively arranged on different optical sub-paths, which can avoid the problem that the light-reducing unit affects the light-collecting module and causes insufficient light input, and at the same time, the light-collecting module can be The integrated optical detection device is configured horizontally, and the light reduction unit equipped with the image capture unit (for near-field optical detection) is configured vertically with other components in the integrated optical detection device, which helps to avoid equipment enlargement. The effect.

Preferably, in the aforementioned optical detection system and its integrated optical detection device, the light reduction unit is an absorption type light reduction unit for allowing the second detection light to pass through the light reduction unit. Compared with the reflective light reduction unit, the absorptive light reduction unit does not need to consider the placement angle in order to avoid affecting the light collection module. Therefore, it is easier to configure in the structure of the present invention, avoids complicated design, and helps In order to achieve the aforementioned vertical configuration method and avoid equipment enlargement.

Preferably, in the aforementioned optical detection system and its integrated optical detection device, the light reduction unit includes a plurality of light reduction components with different light reduction magnifications, and these light reduction components are stacked on top of each other, which facilitates the configuration of the light reduction components. It provides the required light reduction effect and allows users to easily install and replace light reduction components, thus improving detection efficiency.

Preferably, in the aforementioned optical detection system and its integrated optical detection device, the light reduction unit includes a body and at least one light reduction component. The light reduction component includes a light reduction component. The body has an opening. The light reduction component is Removably inserted into the opening of the body. In other words, the light-reduction component is removable, allowing users to easily install and replace the light-reduction component, thus improving detection efficiency.

Preferably, in the aforementioned optical detection system and its integrated optical detection device, the light reduction component of the light reduction unit has at least one magnetic component, and the magnetic component of the light reduction component is arranged outside and around the light reduction component. The light-reducing component of the light-reducing unit is magnetically fixed to each other, so that the light-reducing component can be easily Aligning each other and connecting stably also allows users to easily install and replace light reduction components, thereby improving detection efficiency.

The detailed structure, characteristics, assembly or usage of the optical detection system and its integrated optical detection device provided by the present invention will be described in the subsequent detailed description of the implementation. However, those with ordinary knowledge in the field of the present invention should understand that these detailed descriptions and specific examples for implementing the present invention are only used to illustrate the present invention and are not intended to limit the scope of the patent application of the present invention.

11: Component under test

12:Objective lens

13: Light reduction unit

14:Light guide unit

15:Objective lens

16:Image capture unit

17: Light collecting device

18:Light

182: Parallel light

184:Non-parallel light

20: Optical detection system

22: Carrying device

222: Bearing surface

24:Power supply device

26: Integrated optical detection device

28:Far field detection device

29: Scanning device

30:Light-emitting components

32:Light

322: Parallel light

324: First detection light

326: Second detection light

328:Non-parallel light

34: Optical axis

36: Optical path

361: First sub-path

362: Second sub-path

41:First objective lens

411: upstream side

412: Downstream side

43:Light guide unit

431: First side (upstream side)

432: Second side (first downstream side)

433: Third side (second downstream side)

434: Light guide element (beam splitter)

435: Reflected light path

436: Transmitted light path

45: Light reduction unit

451:Ontology

452A, 452B: light reduction component

453:Swap tray

454: Light reduction parts

455:Magnetic parts

456:Perforation

457: Groove

458:Open your mouth

459:Magnetic parts

47:Second objective lens

471: upstream side

472: Downstream side

473:Pedestal

474: Outer sleeve

475:Inner sleeve

49:Image capture unit

51: Light collecting module

512: Light receiving parts

514,515: Light sensing components

53:Linear displacement unit

532:Slide

534: Motor

536:Sliding seat

54: Fixed seat

55:Mounting seat

552:Base

554:Extension

57:Connection board

60: Material to be tested

Figure 1 is a schematic diagram of a technical means provided by the inventor of the present invention to solve the problems of the prior art.

FIG. 2 is a schematic diagram of another technical means provided by the inventor of the present invention to solve the problems of the prior art and the technical means of FIG. 1 .

Figure 3 is a schematic diagram of an optical detection system provided by a preferred embodiment of the present invention.

Figure 4 is a schematic diagram of an integrated optical detection device of the optical detection system.

Figure 5 is a perspective assembly view of the integrated optical detection device.

Figure 6 is an exploded perspective view of the integrated optical detection device.

Figure 7 is a partial perspective exploded view of the integrated optical detection device.

Figure 8 is an exploded perspective view of a light reduction unit of the integrated optical detection device.

Figure 9 is similar to Figure 3, but further shows a scanning device.

The applicant would like to first explain that in the embodiments and drawings to be introduced below, the same reference numbers represent the same or similar elements or structural features thereof. It should be noted that the components and structures in the drawings are for convenience of illustration and are not drawn based on actual proportions and quantities, and if possible in implementation, features of different embodiments can be applied interchangeably. Secondly, when it is said that one element is arranged on another element, it means that the aforementioned element is directly arranged on the other element, or the aforementioned element is indirectly arranged on the other element, that is, there is another element between the two elements. Set with one or more other elements. When it is stated that one component is "directly" mounted on another component, it means that no other components are placed between the two components.

Please refer to FIG. 3 first. An optical detection system 20 provided by a preferred embodiment of the present invention includes a carrying device 22, a power supply device 24, an integrated optical detection device 26, and a far-field detection device 28. The carrying device 22 may be (but is not limited to) a chuck that can move along the XYZ three axes and rotate around the Z axis. It is used to carry a light-emitting element 30 (such as a VCSEL chip) and drive the light-emitting element 30 along the A moving axis (Y-axis) sequentially moves horizontally or laterally to the bottom of the integrated optical detection device 26 and the far-field detection device 28 (the arrangement sequence is not limited to that shown in FIG. 3 ) for detection. The power supply device 24 may be (but is not limited to) a test signal (power) supply interface such as a probe card including a touch probe, and is used to electrically contact the light-emitting element 30 to cause the light-emitting element 30 to emit a light 32 ( The dotted line in Figure 4 indicates the light divergence angle range of the light 32), so that the integrated optical detection device 26 and the far-field detection device 28 perform different optical characteristics detection on the light 32 when the light-emitting element 30 is located below it, as detailed below. . The light 32 referred to in this embodiment is invisible light, and its wavelength is, for example, 800nm~940nm.

Please refer to FIGS. 4 to 6 . FIG. 4 schematically shows the configuration of the main components of the integrated optical detection device 26 and the corresponding relationship between the light-emitting element 30 and its light 32 and the integrated optical detection device 26 . FIG. 5 and FIG. Series 6 specifically shows the appearance structure of the integrated optical detection device 26 .

As shown in FIG. 4 , the light 32 is emitted from the light-emitting element 30 along an optical axis 34 . The optical axis 34 of the light-emitting element 30 can usually be at least substantially perpendicular to one of the supporting devices 22 for carrying the light-emitting element 30 . The surface 222 (shown in FIG. 3 ) and/or an extended plane of the supporting substrate (not shown) of the light-emitting element 30 . In this embodiment, the optical axis 34 of the light-emitting element 30 extends along the Z-axis, that is, perpendicular to the light-emitting element. The moving axis (Y-axis) of the component 30 and/or the carrying device 22.

As shown in FIGS. 4 to 6 , the integrated optical detection device 26 of this embodiment mainly includes a first objective lens 41 sequentially arranged along the optical axis 34 (this arrangement is also called a longitudinal arrangement in the present invention). , a light guide unit 43, a light reduction unit 45, a second objective lens 47 and an image capture unit 49, and one arranged in a direction perpendicular to the optical axis 34 (this arrangement is also called a transverse arrangement in the present invention) ) on the light-collecting module 51 on one side of the light guide unit 43, so that the light 32 enters each component of the integrated optical detection device 26 along an optical path 36 (as shown in FIG. 4). This part will be described in detail below. It should be noted here that the line segments drawn with the center line in FIG. 4 all belong to the optical path 36 , and the portion extending along the Z-axis is collinear with the optical axis 34 .

In terms of structural positional relationship, the light guide unit 43 has a first side 431 facing the light-emitting element 30, a second side 432 perpendicular to the first side 431, and a side facing in the opposite direction and parallel to the first side 431. On the third side 433 of the first side 431. The first objective lens 41 is disposed on the first side 431 of the light guide unit 43 . The first objective lens 41 is disposed between the light guide unit 43 and the light emitting element 30 . The light collecting module 51 is disposed on the second side 432 of the light guide unit 43 . The light reduction unit 45, the second objective lens 47 and the image capture unit 49 are arranged on the third side 433 of the light guide unit 43 in order away from the light guide unit 43. That is, the light reduction unit 45 is located on the light guide unit 43. 43 and the second objective lens 47 , the second objective lens 47 is located between the light reduction unit 45 and the image capture unit 49 .

It can be known from the foregoing structure that the first objective lens 41 is located at the position closest to the light-emitting element 30 of the integrated optical detection device 26. One or more optical lenses (not shown in the figure) are provided in the first objective lens 41 for The light 32 is received and converted into parallel light 322 before being incident on the light guide unit 43 . In other words, the first objective lens 41 can define an upstream side 411 and a downstream side 412 on the optical path 36. The upstream side 411 directly receives the non-parallel light ray 32 emitted by the light-emitting element 30, and the downstream side 412 emits parallel light 322. And for the first side 431 of the light guide unit 43 to receive.

The light guide unit 43 is located on the downstream side 412 of the first objective lens 41 on the optical path 36, and is used to receive the parallel light 322 emitted by the first objective lens 41. The light guide unit 43 is provided with a light guide element 434 inside, for transmitting the parallel light. 322 is divided into a first detection light 324 and a second detection light 326, so that the optical path 36 is divided into a first sub-path 361 and a second sub-path 362. In other words, the light guide unit 43 can define an upstream side (that is, the first side 431 ), a first downstream side (that is, the second side 432 ), and a second downstream side (that is, the third side) on the optical path 36 . side 433), the first downstream side 432 is located in the first sub-path 361, and the second downstream side 433 is located in the second sub-path 362.

In this embodiment, the light guide element 434 inside the light guide unit 43 is a beam splitter (BS for short), which can define a reflection light path 435 and a transmission light path 436 for incident on the beam splitter 434 Part of the parallel light 322 is reflected along the reflection light path 435 (ie, the first detection light 324), and at the same time, another part is transmitted along the transmission light path 436 (ie, the second detection light 326). As shown in FIG. 4 , the reflected light path 435 is collinear with the first sub-path 361 , and the reflected light path 435 is perpendicular to the optical axis 34 . The transmitted light path 436 is collinear with the second sub-path 362 , and the transmitted light path 436 is parallel to the optical axis 34 . Optical axis 34. In FIG. 4, the transmitted light path 436 and the second sub-path 362 overlap with the optical axis 34.

The light collection module 51 is located on the first downstream side (ie, the second side 432) of the light guide unit 43 on the first sub-path 361 of the optical path 36. That is, the light collection module 51 of this embodiment is disposed on Light guide sheet On the reflected light path 435 of the unit 43, the first detection light 324 reflected by the light guide unit 43 enters the light collecting module 51 along the first sub-path 361. In this embodiment, the light-collecting module 51 includes a light-collecting component 512 (such as an integrating sphere), and two light-sensing components 514 and 515 disposed on the light-collecting component 512 . The light sensing element 514 can be a photodiode for converting the first detection light 324 into an electrical signal to perform brightness detection, such as LIV detection. The light sensing element 515 can be a collimator, which is used to connect a spectrometer to detect the spectrum of the first detection light 324 .

The light reduction unit 45 is located on the second downstream side (that is, the third side 433) of the light guide unit 43 on the second sub-path 362 of the optical path 36. That is, the light reduction unit 45 of this embodiment is disposed on the light guide unit 43. On the transmission light path 436 of the unit 43, the second detection light 326 transmitted from the light guide unit 43 enters the light reduction unit 45 along the second sub-path 362. The light reduction unit 45 is used to selectively provide a light reduction effect to attenuate the light. The second detection light 326 will be described in detail below. In this embodiment, the light reduction unit 45 is directly adjacent to the third side 433 of the light guide unit 43 . The light reduction unit 45 is disposed not on the upstream side of the light collection module 51 . The light reduction unit 45 (disposed in the second sub-path 362) and the light-collecting module 51 (disposed in the first sub-path 361) are disposed on different optical sub-paths.

The second objective lens 47 is located on the second downstream side (ie, the third side 433) of the light guide unit 43 on the second sub-path 362 of the optical path 36, and is used to receive the second detection light 326 that passes through the light reduction unit 45 and Focusing the second detection light 326 will be described in detail below. In other words, the second objective lens 47 can define an upstream side 471 and a downstream side 472 on the second sub-path 362 of the optical path 36, the light reduction unit 45 is located on the upstream side 471 of the second objective lens 47, and the second detection light 326 is on The upstream side 471 of the second objective lens 47 still maintains parallel light. The second objective lens 47 focuses the second detection light 326 and converts it into non-parallel light 328. Therefore, the second detection light 326 is non-parallel light on the downstream side 472 of the second objective lens 47. Parallel light328. That is, the light reduction unit 45 is located on the optical path of the parallel light 322 .

The image capture unit 49 is located on the downstream side 472 of the second objective lens 47 on the second sub-path 362 of the optical path 36. The image capture unit 49 may use a charge-coupled device (CCD for short) or a charge-coupled device (CCD for short) as the photosensitive element. A complementary metal-oxide-semiconductor (CMOS) camera is used to detect the near-field optical characteristics of the second detection light 326 after it is focused through the second objective lens 47 . More specifically, the image capture unit 49 sequentially captures the light 32 emitted by the light-emitting element 30 disposed below the first objective lens 41 through the second objective lens 47, the light reduction unit 45, the light guide unit 43 and the first objective lens 41. The image at that time is used to detect its near-field optical characteristics.

As shown in FIGS. 5 and 6 , the integrated optical detection device 26 of this embodiment further includes a linear displacement unit 53 , a fixed base 54 , a mounting base 55 , and a connecting plate 57 .

The linear displacement unit 53 can use a conventional electric slide table combination, which mainly includes a slide table 532, a motor 534 (such as a stepper motor) provided at one end of the slide table 532, and a motor 534 that can be driven by the motor 534 to move along an adjustment axis ( Z axis) is movably provided on the sliding seat 536 on the front side of the sliding table 532. The image capturing unit 49 is fixed in the fixed base 54 , and the fixed base 54 is fixed in the sliding base 536 of the linear displacement unit 53 . The mounting base 55 includes a base 552 and an extension 554 extending from the base 552. The base 552 and the connecting plate 57 of the mounting base 55 are fixed on the back of the sliding table 532 of the linear displacement unit 53, and the second objective lens 47 is fixed. on the extension portion 554 of the mounting base 55 .

In detail, the second objective lens 47 includes a base 473 fixed on the extension part 554 of the mounting base 55, an outer sleeve 474 fixed on the top of the base 473, and an outer sleeve 474. The inner sleeve 475 can move relative to the outer sleeve 474 , and the upper end of the inner sleeve 475 is fixed to the lower end of the image capture unit 49 . The base 473 is provided with one or more optical lenses (not shown in the figure). The outer sleeve 474 and the inner sleeve 475 are interconnected with the base 473. The image capture unit 49 passes through the inner sleeve 475 and the outer sleeve. The barrel 474 is opposite to the optical lens in the base 473 .

As shown in Figures 7 and 8, the light reduction unit 45 of this embodiment includes a body 451 and two light reduction components 452A and 452B. Each light reduction component 452A and 452B includes a swap tray 453, a light reduction component 454 and Plural magnetic elements 455. Each exchange tray 453 has a through hole 456 with a baffle at the bottom. The light reduction component 454 is disposed in the through hole 456 to abut against the baffle. The light reduction magnification of the light reduction component 454 of the light reduction components 452A and 452B Can be the same or different. The light reduction element 454 in this embodiment is an ND filter (neutral density filter), which is used to allow the second detection light 326 to pass through and attenuate the second detection light 326 at the same time. That is, the light reduction unit 45 in this embodiment is not reflective. It is an absorption type light reduction unit, and there is no need to consider the placement angle in order to avoid affecting the light collection module 51. Two grooves 457 are provided on the bottom surface of the exchange plate 453 of the light reduction component 452A. Two grooves 457 are provided on the top and bottom surfaces of the exchange disk 453 of the light reduction component 452B (only the groove 457 on the top surface is shown in the figure). The magnetic components 455 of each light-reduction component 452A, 452B are respectively disposed in the grooves 457, so that the light-reduction components 452A, 452B have a magnetic attraction function. The magnetic component 455 is disposed outside and around the light reducing component 454 .

As shown in FIG. 7 , the body 451 is disposed between the second objective lens 47 and the light guide unit 43 . The top surface of the body 451 is close to the second objective lens 47 , and the bottom surface of the body 451 is close to the light guide unit 43 . The body 451 of the light reduction unit 45 has an opening 458, and the light reduction components 452A and 452B are detachably inserted into the opening 458 of the body 451, so that the light reduction components 452A and 452B are stacked on each other. As shown in FIG. 8 , the body 451 of the light reduction unit 45 is provided with two grooves 457 inside, and two magnetic components 459 respectively located in the grooves 457 , so that the body 451 also has a magnetic attraction function. In this way, the magnetic component 455 at the bottom of the light-reduction component 452B can be attracted to each other by the magnetic component 459 of the body 451, and the magnetic component 455 at the top of the light-reducing component 452B can be attracted to each other by the magnetic component 455 at the bottom of the light-reducing component 452A, which is convenient. Align and stably install the light reduction components 452A and 452B in the body 451 .

Thereby, the light reduction unit 45 of this embodiment allows the user to replace the light reduction components 452A and 452B (the light reduction components 452A and 452B can respectively be equipped with one or more light reduction components 454 with different or the same light reduction magnification). ) to produce the required light reduction effect to prevent the image capture unit 49 from being unable to capture a clear image due to overexposure when capturing the image. Alternatively, the light reduction unit 45 of this embodiment may temporarily not be equipped with the light reduction components 452A and 452B, so that no light reduction occurs when the image capture unit 49 focuses the light emitting element 30 on the Z axis and confirms its X and Y axis positions. light effects. The light reduction unit 45 of this embodiment adopts a stacked arrangement of multiple light reduction components 452A and 452B, which is conducive to configuring the required light reduction effect and allows the user to easily install and replace the light reduction components 452A and 452B. thereby improving detection efficiency. Moreover, the removable light-reducing components 452A and 452B used in the light-reducing unit 45 of this embodiment and their magnetic suction functions allow users to easily install and replace the light-reducing components 452A and 452B, thereby improving detection efficiency.

Please refer to Figures 5 and 6. The connecting plate 57 of the integrated optical detection device 26 of this embodiment will actually be fixed to the sliding seat (not shown in the figure) of another linear displacement unit. The other linear displacement unit It can drive the overall structure shown in Figure 5 to move along the Z-axis, so that the image capture unit 49 is focused on the light-emitting element 30 each time the light-emitting element 30 is detected. This part is coarse focusing, and further fine focusing is performed by linear The displacement unit 53 drives the image capturing unit 49 and the inner sleeve 475 of the second objective lens 47 to move along the Z axis relative to the outer sleeve 474 of the second objective lens 47 , the light reduction unit 45 , the light guide unit 43 and the first objective lens 41 , to fine-tune the focus.

The aforementioned focusing process can directly use the light 32 of the light-emitting element 30 as the light source for focusing, or the integrated optical detection device 26 can be additionally provided with other light sources (not shown in the figure). After the focusing is completed, the image capture unit 49 captures the image when the light-emitting element 30 emits light, so as to perform near-field optical inspection of the light-emitting element 30 . In addition, when the light-emitting element 30 emits light and performs detection, the linear displacement unit 53 can also drive the image capture unit 49 to move in a small range along the Z-axis to scan and continuously capture images of the light-emitting element 30, thereby performing the operation of the light-emitting element 30. M ² optical detection (that is, beam quality factor detection), for example, the sliding base 536 of the linear displacement unit 53 can start from the middle position of the sliding table 532 to drive the image capturing unit 49 to move downward for scanning first, and then upward. Mobile scanning.

Please refer to FIG. 3 . After the light-emitting element 30 is detected by the integrated optical detection device 26 , the light-emitting element 30 moves along the Y-axis below the far-field detection device 28 to detect the far-field optical characteristics. It is worth mentioning that when the light-emitting element 30 is a non-Gaussian light source, there is a need to detect far-field optical characteristics. In other words, the integrated optical detection device 26 of the present invention is not limited to detecting non-Gaussian light sources, and is not limited to Together with the far-field detection device 28, the optical detection system is formed.

It can be known from the foregoing that the integrated optical detection device 26 of the present invention integrates the brightness and spectrum detection performed by the light collection module 51 and the near-field optical detection performed by the image capture unit 49, and can ( But not limited to) ^M2 optical detection is also integrated, so that after the light-emitting element 30 moves along the Y-axis to below the integrated optical detection device 26, it does not need to move along the Y-axis to perform brightness and/or spectrum detection one after another. , near-field optical detection and/or ^M2 optical detection (the order is not limited), thus saving space and reducing the distance and time for the light-emitting element 30 to move, thereby improving detection efficiency. Moreover, compared with integrating far-field optical detection and brightness detection with different optical detection conditions, or integrating far-field optical detection and near-field optical detection with different detection conditions, the present invention integrates far-field optical detection with similar optical detection conditions. The integration of brightness detection and near-field optical detection can reduce the design complexity of the integrated optical detection device 26 . In addition, in the integrated optical detection device 26 of the present invention, the light collection module 51 is arranged in the first sub-path 361 of the optical path 36, and the light reduction unit 45 is arranged in the second sub-path 362 of the optical path 36. In other words, the light detected by the light-collecting module 51 of the light-emitting element 30 (ie, the first detection light 324) does not pass through the light reduction unit 45 before entering the light-collecting module 51, so the light received by the light-collecting member 512 can be avoided. The problem of insufficiency. Furthermore, in the integrated optical detection device 26 of the present invention, the light reduction unit 45 is located on the upstream side 471 of the second objective lens 47 on the optical path 36 , that is, the light reduction unit 45 is located on the optical path of the parallel light 322 In this way, after the light-emitting element 30 under test is replaced, even if the light-emitting element 30 has a different light-emitting angle, there is no need to waste time to re-adjust the focus. Therefore, the problem of re-focusing when replacing the element under test can be avoided, which can further improve the performance. Detection efficiency.

On the other hand, in the integrated optical detection device 26 of this embodiment, the first objective lens 41 , the light guide unit 43 , the light reduction unit 45 , the second objective lens 47 and the image capture unit 49 are along the optical axis of the light-emitting element 30 34 is configured vertically, and only the light collecting module 51 is configured horizontally. In other words, in this embodiment, the near-field optical detection-related components that require a larger working length are arranged vertically, and the light-collecting module 51 that takes up less space is arranged horizontally for integration. Therefore, the integrated optical detection device of this embodiment 26 can avoid the lateral length of the entire optical detection system 20 being too long and causing the equipment to become larger. In this regard, the light guide unit 43 used in this embodiment allows the light collection module 51 to be disposed on the reflective light path 435 of the light guide unit 43, and the light reduction unit 45, the second objective lens 47 and the image capture unit 49 are Being disposed on the transmission light path 436 of the light guide unit 43 also helps to achieve the aforementioned longitudinal and transverse arrangement and avoids the enlargement of the equipment. In addition, the light reduction unit 45 used in this embodiment is an absorptive light reduction unit, which is easier to configure in the structure of the present invention than a reflective light reduction unit, thereby avoiding design complexity and helping to achieve the aforementioned longitudinal arrangement. This prevents the equipment from becoming larger.

Furthermore, please refer to FIG. 9 . The light-emitting element 30 under test (such as a VCSEL chip) may belong to a material to be tested 60 (such as a wafer with multiple VCSEL chips). The number of light-emitting elements 30 in the material to be tested 60 varies. is limited, which means that the material 60 to be tested may be provided with multiple light-emitting elements 30 (to simplify the diagram, FIG. 9 only shows one light-emitting element 30). In this case, the optical detection system 20 of the present invention may further include a scanning The device 29 is used to scan the position coordinates of each light-emitting element 30 on the material 60 to be tested. Alternatively, the scanning device 29 can also be replaced by a visual alignment device for manual eye alignment. It is conceivable that there are In the case of the scanning device 29 or the visual alignment device, the lateral space of the optical detection system 20 is more limited, and the aforementioned configuration of this embodiment can avoid the problem of insufficient lateral space.

Finally, it must be stated again that the constituent elements disclosed in the foregoing embodiments of the present invention are only examples and are not used to limit the scope of this case. Substitutions or changes of other equivalent elements should also be within the scope of the patent application of this case. covered.

However, the two light sensing elements 514 and 515 on the light collecting element 512 of the light collecting module 51 are not limited to exist at the same time. For example, the light collecting member 512 may be provided with only one of the light sensing member 514 or the light sensing member 515 . In other words, the light collecting module 51 may detect one of the brightness and spectrum of the first detection light 324 .

26: Integrated optical detection device

30:Light-emitting components

32:Light

322: Parallel light

324: First detection light

326: Second detection light

328:Non-parallel light

34: Optical axis

36: Optical path

361: First sub-path

362: Second sub-path

41:First objective lens

411: upstream side

412: Downstream side

43:Light guide unit

431: First side (upstream side)

432: Second side (first downstream side)

433: Third side (second downstream side)

434: Light guide element (beam splitter)

435: Reflected light path

436: Transmitted light path

45: Light reduction unit

47:Second objective lens

471: upstream side

472: Downstream side

49:Image capture unit

51: Light collecting module

512: Light receiving parts

514,515: Light sensing components

Claims (10)

An integrated optical detection device of an optical detection system is used to detect light emitted by a light-emitting element, and the light enters the integrated optical detection device along an optical path; the integrated optical detection device includes: a first An objective lens is located at the position closest to the light-emitting element of the integrated optical detection device, for receiving the light and converting the light into parallel light; a light guide unit is located at one of the first objective lenses on the optical path The downstream side is used to divide the light into a first detection light and a second detection light, so that the optical path is divided into a first sub-path and a second sub-path; a light collection module is attached to the optical path The first sub-path is located on a first downstream side of the light guide unit, and the first detection light enters the light-collecting module from the light-guide unit along the first sub-path for the light-collecting module to detect the At least one of the brightness and spectrum of the first detection light; a second objective lens located on a second downstream side of the light guide unit on the second sub-path of the optical path for detecting the second detection light Focus; an image capture unit is located on the downstream side of the second objective lens on the second sub-path of the optical path, and is used to detect the near-field optical characteristics of the second detection light after it is focused through the second objective lens. ; and a light reduction unit located on the second downstream side of the light guide unit on the second sub-path of the optical path, and the second detection light enters the light reduction unit from the light guide unit along the second sub-path. A light unit is used for the light reduction unit to attenuate the second detection light; wherein the light reduction unit is located on an upstream side of the second objective lens. The integrated optical detection device of the optical detection system as claimed in claim 1, wherein the light collection module is arranged on a reflected light path of the light guide unit, and the light reduction unit is arranged on a reflected light path of the light guide unit. On a transmission light path of the element, the light is emitted from the light-emitting element along an optical axis, and the transmission light path is parallel to the optical axis. The integrated optical detection device of the optical detection system as claimed in claim 1, wherein the light is emitted from the light-emitting element along an optical axis, the first objective lens, the light guide unit, the light reduction unit, the The second objective lens and the image capturing unit are arranged along the optical axis. An integrated optical detection device of an optical detection system is used to detect light emitted by a light-emitting element; the integrated optical detection device includes: a light guide unit; a first objective lens, which is disposed on the light guide unit a first side, used to receive the light and convert the light into parallel light and then enter the light guide unit, so that the light guide unit divides the light into a first detection light and a second detection light; a receiving light An optical module is disposed on a second side of the light guide unit for receiving the first detection light and detecting at least one of the brightness and spectrum of the first detection light; a second objective lens is disposed on A third side of the light guide unit is used to receive the second detection light and focus the second detection light; an image capture unit is provided on the third side of the light guide unit and is located on the third side. One side of the two objective lenses relative to the light guide unit is used to receive the second detection light and detect the near-field optical characteristics of the second detection light after being focused through the second objective lens; and a light reduction unit is provided at The third side of the light guide unit is located between the light guide unit and the second objective lens, and is used to attenuate the second detection light. The integrated optical detection device of the optical detection system as claimed in claim 4, wherein the light is emitted from the light-emitting element along an optical axis, the first objective lens, the light guide unit, the light reduction unit, the The second objective lens and the image capturing unit are arranged along the optical axis. The integrated optical detection device of the optical detection system as claimed in claim 4, wherein the light reduction unit is an absorption type light reduction unit for allowing the second detection light to pass through the light reduction unit. The integrated optical detection device of the optical detection system as claimed in claim 4, wherein the light reduction unit includes a plurality of light reduction components with different light reduction magnifications, and the light reduction components are stacked on top of each other. The integrated optical detection device of the optical detection system as claimed in claim 4, wherein the light reduction unit includes a body and at least one light reduction component, the light reduction component includes a light reduction component, the body has an opening, and the light reduction component includes an opening. The optical component is removably inserted into the opening of the body. The integrated optical detection device of the optical detection system as claimed in claim 8, wherein the light reduction component of the light reduction unit has at least one magnetic component, and the magnetic component of the light reduction component is arranged outside and around the light reduction component, It is used to magnetically attract and fix each other with another light reducing component of the light reducing unit. An optical detection system, including: a carrying device used to carry a light-emitting element; a power supply device used to electrically contact the light-emitting element to cause the light-emitting element to emit a light; as in claims 1 to 9 The integrated optical detection device described in any claim is used to detect at least one of the brightness and spectrum of the light emitted by the light-emitting element and the near-field optical characteristics; and a far-field detection device is used to detect the Far-field optical properties of light-emitting components.

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