TWI819135B - Rotary joint - Google Patents

Abstract

A rotary joint that can be configured compactly in the axial direction, including: a cylindrical housing 2 formed with housing flow paths 11 to 17; a cylindrical housing 2 that is relatively rotatable; The rotating body 3 of the rotating body flow paths 111 to 117 connected with each other, the rotating elements 33, 34, 35, 36 that rotate together with the rotating body 3, and the stationary elements 41, 42, 43 fixed to the housing 2, and form There is a flow path that penetrates the rotating elements 33, 34, 35, 36 in the radial direction and reaches the rotating body flow path 111, 113, 115, 117 from the rotating element side space 120 between the housing 2 and the rotating elements 33, 34, 35, 36 The rotating side communication passages 133, 134, 135, 136 and the stationary elements 41, 42, 43 are penetrated in the radial direction and reach the rotating body flow path from the stationary element side space 121 between the stationary elements 41, 42.43 and the rotating body 3. The stationary side communication paths 141, 142, and 143 of 112, 114, and 116.

Description

Rotary joint

The present invention relates to a rotary joint for supplying fluid from a flow path of a casing to a flow path of a rotating rotating body.

In the conventional technology, a rotary joint is used to supply fluid from a casing channel formed in a cylindrical casing connected to a fluid supply line to a rotating body channel. The body flow path is formed on a shaft that is a rotating body, and the shaft is disposed in the housing so as to be relatively rotatable. Rotary joints are also known that provide a plurality of flow paths in the housing and shaft to increase the versatility and expandability of the supplied fluid. In such a rotary joint, by arranging a plurality of sealing devices in the axial direction of the shaft, it is possible to form a plurality of independent communication passages that are separated by the sealing devices in the axial direction and extend in the radial direction, thereby making different The fluid flows in the annular space formed between the housing and the shaft without mixing.

In such a rotary joint, in order to form a plurality of independent communication channels, an end seal or the like can be used as a sealing device. However, when the fluid contains slurry (solid content), the fluid pressure is high, or a highly corrosive material is used, In the case of special fluids, mechanical seals are used (refer to Patent Document 1).

The rotary joint described in Patent Document 1 is used in a semiconductor manufacturing apparatus for, for example, polishing the surface of a semiconductor wafer. In the space formed between the axes of the rotary table as the rotating body, a plurality of double-sided mechanical seals are arranged in the in-line direction along the axes, so that the space is formed from a plurality of housing flow paths formed in the housing body. The supplied polishing liquid, pressurized air, clean water, pure water, air supply, and polishing residue liquid during vacuum are sealed fluids through a plurality of independent communication paths formed in the radial direction by mechanical seals. , flows in the corresponding rotating body flow path of the shaft without mixing. [Prior technical literature] [Patent Document]

[Patent Document 1] Japanese Patent Application Laid-Open No. 2017-110702 (page 7, figure 1)

[The problem that the invention aims to solve] In Patent Document 1, in the axial direction, between two rotating seal rings that are rotating elements, two stationary seal rings that are stationary elements are arranged back-to-back, and on the back surfaces of the two stationary seal rings A communication path extending along the radial direction is formed therebetween, whereby the flow path of the housing body and the flow path of the rotary body are connected. If such a communication passage is formed only between two stationary seal rings, the adjacent communication passages will be separated in the axial direction by sandwiching the rotating seal ring, so there will be a certain length between them in the axial direction. The problem is that the number of housing flow paths that can be set up is limited.

The present invention focuses on such a problem, and aims to provide a rotary joint that can be configured compactly in the axial direction. [Technical means to solve problems]

In order to solve the aforementioned problems, the rotary joint of the present invention includes a shell and a rotating body. The shell system is cylindrical and is formed with a plurality of shell flow paths. The rotating system is arranged on the shell in a relatively rotating manner. A plurality of rotating body flow paths are formed in the body, and the plurality of rotating body flow paths are connected with a plurality of housing flow paths, wherein, The rotary joint has a rotating element and a stationary element, and the rotary joint forms a rotating side communication channel and a stationary side communication channel, The rotating element rotates together with the rotating body, and the rotating side communication path passes through the rotating element in the radial direction, reaching the rotating body flow path from a rotating element side space between the housing and the rotating element, The stationary element is fixed to the housing, and the stationary side communication path passes through the stationary element in the radial direction, reaching the rotating body flow path from a stationary element side space between the stationary element and the rotating body. Accordingly, the housing flow path formed adjacent to the housing is connected to the corresponding rotating body flow path of the rotating body via one of the rotating side communication channel and the stationary side communication channel. The rotating side communication channel and the stationary side communication channel do not interfere with each other, so the rotating side communication channel and the stationary side communication channel can be arranged close to each other in the axial direction, and the rotary joint can have a compact structure in the axial direction.

The stationary element has a stationary sealing ring, the rotating element has a rotating sealing ring, and the rotating joint is formed with a double-sided mechanical seal. The mechanical seal is composed of one stationary sealing ring and two of the stationary sealing rings in the axial direction. The rotary sealing ring can also be configured in a sliding manner. According to this, the mechanical seal can make the rotating element side space between the rotating element and the housing and the stationary element space between the stationary element and the shaft respectively become sealed spaces, and the rotating side communication passage and the stationary side communication passage can be made A part of them overlaps in the radial direction, so it can be more compact in the axial direction.

The mechanical seal may also have a sealing portion on the inner diameter and the outer diameter respectively, and a quenching flow path is formed between the sealing portions on the inner diameter and the outer diameter. According to this, the sliding surfaces of the stationary seal ring and the rotating seal ring can be protected by the quenching fluid flowing in the quenching flow path formed between the inner diameter and outer diameter sealing portions of the mechanical seal, and further prevent Direct mixing of the sealed fluid flowing in the rotating side communication passage and the stationary side flow passage.

The rotating element may also be formed with a through hole for quenching penetrating in the axial direction. According to this, by using the through hole penetrating in the axial direction, it is possible to form the flow path for quenching in the rotating element while ensuring the formation area of the rotation side communication path penetrating in the radial direction.

The stationary element may also be formed with a through hole for quenching penetrating in the axial direction. Accordingly, by using the through hole penetrating in the axial direction, it is possible to form the flow path for quenching in the stationary element while ensuring the formation area of the stationary side communication path penetrating in the radial direction.

The mechanical seal system can also have two rotating seal rings, inside and outside. Accordingly, the setting of the seal portion of the inner diameter and outer diameter of the mechanical seal can be changed.

The stationary sealing ring arranged at both ends in the axial direction may also have an inlet or an outlet of the quenching flow path. According to this, the inlet or outlet of the quenching flow path is formed in the stationary seal ring arranged at both ends in the axial direction, whereby the quenching flow path can be formed in the component member of the mechanical seal, so the rotating ring having the quenching flow path can be The joint is constructed more compactly in the axial direction.

Embodiments of the rotary joint of the present invention will be described below based on examples. [Example]

The rotary joint of the embodiment will be described with reference to Figures 1 to 5 . Hereinafter, the front side of the drawing in FIG. 1 is defined as the front side (front side) of the rotary joint, and description is made based on the up, down, left and right directions when viewed from the front side.

As shown in Figure 1, the rotary joint 1 of this embodiment is mainly composed of a cylindrical casing 2 and a shaft 3 as a rotating body. The casing 2 is fixed to a device for surface polishing of semiconductor wafers. The device body of a semiconductor manufacturing device (not shown), the shaft 3 is inserted into the housing 2 in a relatively rotatable manner, and an annular shape is formed between the inner peripheral surface of the housing 2 and the outer peripheral surface of the shaft 3 Therefore, four sealing devices 4 are arranged in the vertical axial direction of the space, thereby forming a plurality of independent communication passages separated by the four sealing devices 4 in the axial direction and extending in the radial direction.

As shown in FIG. 1 , the housing 2 is composed of a substantially cylindrical lower end cover 20 having a flange, a stepped substantially cylindrical first cover 21 , a stepped substantially cylindrical lower end cover 20 , and a stepped substantially cylindrical lower end cover 20 . The second housing 22, the third housing 23 and the fourth housing 24 having a substantially cylindrical shape are formed into a substantially cylindrical shape. The first housing 21 is vertically upward from the lower end housing 20. The second housing 22 is connected and fixed with the annular spacer 25 by bolts 50 at the same time, and the second housing 22 is connected and fixed with the annular spacer 26 by bolts 51 from the vertical upper side of the first housing 21. The third housing 23 is connected and fixed with the annular spacer 27 from the vertical top of the second housing 22 by bolts 52. The fourth housing 24 is connected to the annular spacer 27 from the vertical top of the third housing 23. The substantially cylindrical upper end housing 28 having a flange is connected and fixed by bolts 53 . In addition, the first cover 21 , the second cover 22 , the third cover 23 and the fourth cover 24 are formed of resin materials such as PEEK with high chemical resistance. The lower end cover 20 and the upper end cover 28 , the spacer 25, the spacer 26 and the spacer 27 are formed of metal materials such as stainless steel.

Furthermore, on the inner periphery of the casing 2, a stationary seal ring 40 as a stationary element is integrally fixed in a sandwiched state between the lower end cover 20 and the first cover 21, and between the first cover 21 and the first cover 21 A stationary sealing ring 41 as a stationary element is integrally fixed in a sandwiched state between the second housing covers 22 , and a stationary sealing ring 41 is integrally fixed in a sandwiched state between the second housing cover 22 and the third housing cover 23 . The stationary sealing ring 42 of the element is integrally fixed with a stationary sealing ring 43 as a stationary element in a state of being sandwiched between the third housing 23 and the fourth housing 24, and is sandwiched between the fourth housing 24 and the upper end housing. A stationary seal ring 44 serving as a stationary element is integrally fixed in a sandwiched state between the covers 28 .

Furthermore, the casing 2 is formed with a casing flow path that penetrates in the radial direction and has an outer opening connected to a plurality of supply lines of a semiconductor manufacturing apparatus (not shown). Specifically, the lower end shell 20 is formed with a shell flow path 10 connected to the quenching fluid supply line Q _in , and the first shell 21 is formed with a shell flow path connected with the seal fluid supply line A. 11 and a housing flow path 12 connected to the supply line B of the fluid to be sealed. The second housing 22 is formed with a housing flow path 13 connected to the supply line C of the fluid to be sealed and a supply line D to the fluid to be sealed. The connected housing flow path 14 is formed in the third housing 23 with a housing flow path 15 connected to the supply line E of the fluid to be sealed and a housing flow path 16 connected to the supply line F of the fluid to be sealed. The four-shell cover 24 is formed with a casing flow path 17 connected to the supply line G of the fluid to be sealed. The upper end cover 28 is formed with a casing flow path 18 connected with the discharge line Q _{out of} the quenching fluid. In addition, the lower end cover 20 and the upper end cover 28 are respectively formed with drainage channels 19 for discharging the quenching fluid leaking into the lower end cover 20 and the upper end cover 28 .

Furthermore, pairs of inner openings of the housing flow path 11 , the housing flow path 13 , the housing flow path 15 and the housing flow path 17 arranged on the right side of the drawing in FIG. 1 are respectively formed inside the housing 2 . The rotation element side space 120 (hereinafter also referred to as "space 120" only) between the peripheral surface and the outer peripheral surface of the support brackets 33, 34, 35 and 36 as rotation elements that rotate together with the shaft 3 Open, the fluid flowing in the housing flow path 11 , the housing flow path 13 , the housing flow path 15 and the housing flow path 17 passes through the space 120 and surrounds the support brackets 33 , 34 , 35 and 36 of the periphery.

Furthermore, in Figure 1 , the inner openings and stationary seal rings of the housing flow path 10 , the housing flow path 12 , the housing flow path 14 , the housing flow path 16 , and the housing flow path 18 arranged on the left side of the drawing 40. The outer peripheral surfaces of the stationary sealing ring 41, the stationary sealing ring 42, the stationary sealing ring 43 and the stationary sealing ring 44 are connected. Furthermore, on the inner periphery of the housing 2, at axial positions connected to the outer peripheral surfaces of the stationary seal rings 40, 41, 42, 43, and 44, there are formed seals respectively connected to the shell. The peripheral groove 100 connected with the inner openings of the body flow path 10 , the housing flow path 12 , the housing flow path 14 , the housing flow path 16 , and the housing flow path 18 is formed between the housing flow path 10 , the housing flow path 12 , and the housing flow path 18 . The fluid flowing in the housing flow path 14 , the housing flow path 16 and the housing flow path 18 passes through the peripheral groove 100 and surrounds the stationary seal ring 40 , the stationary seal ring 41 , the stationary seal ring 42 , the stationary seal ring 43 and the stationary seal. The outer circumference of the ring 44. Furthermore, the inner openings of the stationary side communication passage 141 , the stationary side communication passage 142 and the stationary side communication passage 143 which will be described later and are formed in the stationary seal ring 41 , the stationary seal ring 42 and the stationary seal ring 43 are respectively formed in the stationary seal rings. 41. The stationary element side space 121 (hereinafter (also referred to as "space 121") is opened, and the fluid flowing from the peripheral groove 100 into the stationary side communication passage 141, the stationary side communication passage 142, and the stationary side communication passage 143 passes through the space 121 and surrounds the stationary seal ring 41 and the stationary seal ring. 42 and the inner circumference of the stationary sealing ring 43.

Here, the stationary seal ring 40 , the stationary seal ring 41 , the stationary seal ring 42 , the stationary seal ring 43 and the stationary seal ring 44 will be described. As shown in FIGS. 1 and 2 , a quenching communication passage 140 serving as an inlet of the quenching flow passage is formed on the stationary seal ring 40 disposed at the lower end in the axial direction, and one end thereof is connected to the shell formed on the lower end cover 20 The internal opening of the body flow path 10 is connected, and the other end is opened vertically upward toward the side of the support frame 33 . Furthermore, as shown in FIG. 1 , a quenching communication passage 144 serving as an outlet of the quenching flow passage is formed in the stationary seal ring 44 disposed at the upper end in the axial direction, and one end thereof is connected to the housing formed in the upper end cover 28 The inner side of the flow path 18 is open and connected, and the other end is open vertically downward toward the side of the support frame 36 .

As shown in FIG. 3 , the stationary seal ring 41 is formed with five through-holes 145 equally arranged in the circumferential direction and penetrating in the axial direction as quenching flow paths. At the same time, the stationary seal ring 41 is formed with a through-hole 145 that does not interfere with the through-holes 145 in the radial direction. The stationary side communication path 141 penetrates the area. Furthermore, as shown in FIGS. 1 and 2 , the outer opening of the stationary side communication passage 141 is connected to the inner opening of the casing 2 formed on the inner periphery of the first cover 21 and connected to the casing flow path 12 . The peripheral groove 100 is connected, and the inner opening of the stationary side communication passage 141 is open to the space 121 formed between the inner peripheral surface of the stationary seal ring 41 and the outer peripheral surface of the spacer 37 embedded in the shaft 3 . In addition, the spacer 37 is formed with a through hole 137 penetrating in the radial direction. The fluid to be sealed flowing in the housing flow path 12 passes through the peripheral groove 100 and surrounds the outer periphery of the stationary seal ring 41, penetrating the stationary seal in the radial direction. The stationary side communication passage 141 of the ring 41 surrounds the outer circumference of the spacer 37 through the space 121, that is, surrounds the inner circumference of the stationary seal ring 41, and can reach the shaft formed on the shaft through the through hole 137 that penetrates the spacer 37 in the radial direction. The rotating body flow path 112 of 3. In addition, since the stationary seal ring 42 and the stationary seal ring 43 have the same structure as the stationary seal ring 41, detailed description thereof will be omitted.

Next, the axis 3 will be described. As shown in Figure 1, the shaft 3 is mainly composed of a shaft body 30, a substantially cylindrical sleeve 31 and a pressing member 32. The shaft body 30 extends in the vertical direction and is formed for installation at the lower end (not shown). The flange-shaped mounting part 30a of the polishing turntable, the sleeve 31 is externally inserted vertically above the mounting part 30a, and the pressing member 32 is inserted into the upper end of the shaft body 30 through the bolt 54 And the link is fixed. Furthermore, the shaft 3 is provided with a ball bearing 60 between the sleeve 31 and the lower end cover 20 of the housing 2, and a ball bearing is provided between the pressing member 32 and the upper end cover 28 of the housing 2. 61, whereby it is supported to be relatively rotatable relative to the housing 2.

Furthermore, the shaft 3 is provided with an end seal 62 between the sleeve 31 and the lower end cover 20 of the housing 2 and vertically above the ball bearing 60, and between the pressing member 32 and the upper end cover 28. And an end seal 63 is provided vertically below the ball bearing 61, whereby an annular sealing space is formed between the inner circumferential surface of the housing 2 and the outer circumferential surface of the shaft 3. This prevents the quenching fluid leaking into the lower end cover 20 and the upper end cover 28 from invading the ball bearings 60 and 61 .

As shown in FIGS. 1 and 4 , the shaft body 30 of the shaft 3 is formed with the housing flow path 10 , the housing flow path 11 , the housing flow path 12 , and the housing flow path formed in the housing 2 respectively. The rotary body flow path 111, the rotary body flow path 112, the rotary body flow path 113, the rotary body flow path corresponding to the housing flow path 14, the housing flow path 15, the housing flow path 16 and the housing flow path 17 114. Rotating body flow path 115, rotating body flow path 116 and rotating body flow path 117. One end of the rotating body flow path 111, the rotating body flow path 112, the rotating body flow path 113, the rotating body flow path 114, the rotating body flow path 115, the rotating body flow path 116 and the rotating body flow path 117 is tied to the outer periphery of the shaft body 30 Different axial positions of the surface open in the outer diameter direction, and the other end extends in the axial direction and opens vertically downward on the lower end surface of the shaft body 30, that is, the mounting portion 30a. In addition, openings on the other end side of the rotating body flow path 111 , the rotating body flow path 112 , the rotating body flow path 113 , the rotating body flow path 114 , the rotating body flow path 115 , the rotating body flow path 116 and the rotating body flow path 117 , are respectively connected to pipelines formed on a polishing turntable (not shown).

Furthermore, on the shaft body 30 and above the sleeve 31, there are substantially cylindrical support frames 33, 34, 35 and 36 as rotating elements as well as substantially cylindrical spacers 37 and 36. The pieces 38 and the spacers 39 are alternately embedded in the axial direction. When the pressing member 32 is connected and fixed to the upper end of the shaft body 30 by the bolt 54, the tightening force of the bolt 54 is used between the sleeve 31 and the pressing member 32. In between, the support frames 33, 34, 35 and 36 as well as the spacers 37, 38 and 39 are clamped and fixed as a whole. Furthermore, stationary sealing rings 41, 42, and 43 fixed to the housing 2 are arranged in gaps in the axial direction of the support frames 33, 34, 35, and 36, and spacers are arranged. 37. The spacer 38 and the spacer 39 are consistent with the axial positions of the stationary sealing ring 41, the stationary sealing ring 42 and the stationary sealing ring 43 respectively. That is, the support brackets 33, 34, 35 and 36 as rotating elements and the stationary seal rings 41, 42 and 43 as stationary elements are arranged in a concave and convex relationship. The space 120 between the inner peripheral surface of the housing 2 and the outer peripheral surfaces of the support brackets 33 , 34 , 35 and 36 , as well as the inner peripheral surface of the stationary seal ring 41 and the outer peripheral surface of the shaft 3 The space 121 between the outer peripheral surfaces of the spacer 37, the spacer 38 and the spacer 39, the space 120 is arranged on the outer diameter side, and the space 121 is arranged on the inner diameter side than the space 120, so that the angle of view in the axial direction arranged alternately in the radial direction. In addition, the shaft body 30 , the support frames 33 , 34 , 35 , 36 , spacers 37 , 38 and 39 are made of resin materials such as PEEK with high chemical resistance. The sleeve 31 The pressing member 32 is made of metal material such as stainless steel.

Furthermore, the support brackets 33 , 34 , 35 and 36 are locked relative to the shaft 3 by inserting a fixing pin 55 extending from the outer circumference of the shaft body 30 into the notch formed on the inner circumference. . In addition, in FIG. 1 , for convenience of explanation, only the locking structure in the support frame 36 is shown.

Here, the structures of the support brackets 33 , 34 , 35 and 36 will be described. In addition, since the support brackets 33 , 34 , 35 and 36 have the same structure, the structure of the support bracket 33 will be described, and the description of the other support brackets 34 , 35 and 36 will be omitted.

As shown in Figure 2, the support frame 33 is formed with annular grooves 33a and 33b that are recessed in the axial direction from both ends in the axial direction. The groove 33a formed on the lower side in the axial direction supports a sealing device. The two inner and outer rotary seal rings 45 and 47 of the sealing device 4 are supported in the groove 33b formed on the upper side in the axial direction. The two inner and outer rotary seal rings 46 and 48 constituting the sealing device 4 are supported. In addition, a pair of inner and outer push pins 65 are respectively inserted into the notches formed on the back side of the rotary seal ring 45 and the rotary seal ring 47. The push pins 65 extend vertically downward from the bottom of the groove 33a. Four parts of the rotary seal ring 46 and the rotary seal ring 48 are equally arranged in the circumferential direction. A pair of inner and outer push pins 66 are respectively inserted into the notches formed on the back side. The push pins 66 are inserted from the groove 33b. The bottom extends vertically upward and is equally arranged in four parts in the circumferential direction, thereby blocking it relative to the axis 3 .

Furthermore, as shown in FIGS. 2 and 5 , the support frame 33 is formed with two inner and outer through holes 170 and 171 respectively. At the same time, the support frame 33 is formed with a rotation side communication passage 133 . The two inner and outer through holes are formed in the support frame 33 . 170 and the through holes 171 are equally arranged in four parts in the circumferential direction and penetrate the groove 33a and the groove 33b in the axial direction. The rotation side communication passage 133 is not aligned with the grooves 33a, the groove 33b and the through holes in the radial direction. 170 and the through hole 171 interfere with each other. In addition, FIG. 5 shows the end surface of the support frame 33 viewed from vertically downward.

Furthermore, the inner opening of the rotation side communication passage 133 is connected to the outer opening of the rotation body flow path 111 , and the outer opening of the rotation side communication passage 133 is connected to the outer peripheral surface of the support frame 33 and the inner periphery of the first cover 21 of the housing 2 The space 120 formed between the surfaces is opened, and the sealed fluid flowing in the housing flow path 11 passes through the space 120 and reaches the rotation side formed on the shaft 3 through the rotation side communication passage 133 that penetrates the support frame 33 in the radial direction. Body flow path 111. In addition, a pair of O-rings 64 are provided in the axial direction between the inner peripheral surface of the support frame 33 and the outer peripheral surface of the shaft body 30 of the shaft 3 to cover the outer opening of the rotating body flow path 111, so that The sealed fluid flowing from the rotation side communication passage 133 of the support frame 33 to the rotation body flow passage 111 is sealed.

Next, the sealing device 4 will be described. In addition, since the four sealing devices 4 provided in the rotary joint 1 have the same structure, the sealing device 4 that seals the space 120 and the space 121 will be described using FIG. 2 , and the description of the other sealing devices 4 will be omitted. , the space 120 is formed between the outer circumferential surface of the support frame 33 and the inner circumferential surface of the first cover 21 of the housing 2 , and the space 121 is formed between the inner circumferential surface of the stationary seal ring 41 and the outer circumferential surface of the shaft 3 between the outer peripheral surfaces of the spacers 37.

As shown in Figure 2, the sealing device 4 is composed of two double-sided mechanical seals, both inner and outer. Specifically, in the grooves 33a and 33b of the support frame 33 of the shaft 3, the rotary sealing rings 45, 46, 47 and 48 are respectively supported by O-rings. , are pushed from the back side to both sides in the axial direction by the coil springs 70 and 71 inserted through the through holes 170 and 171 of the support frame 33, thereby causing the sliding surface 45a of the rotary seal ring 45 The sliding surface 47a of the rotating seal ring 47 is in close contact with the sliding surface 40a of the stationary seal ring 40 and is sandwiched between the quenching communication passage 140 formed on the sliding surface 40a of the stationary seal ring 40, and is formed on the inner diameter side and the outer diameter side. At the same time, the sealing portion S1 and the sealing portion S2 make the sliding surface 46a of the rotating seal ring 46 and the sliding surface 48a of the rotating sealing ring 48 slide in close contact with the sliding surface 41a of the stationary sealing ring 41, and sandwich the sliding surface 41a of the stationary sealing ring 41. The quenched communication passage 140 of the sliding surface 41a forms a sealing portion S3 and a sealing portion S4 on the inner diameter side and the outer diameter side.

Furthermore, the sealing device 4 is composed of a rotary sealing ring 45 and a rotary sealing ring 46 on the inner diameter side that are pushed by the coil spring 70 on both sides in the axial direction, and are pushed by the coil spring 71 on both sides of the axial direction. The inner and outer double-sided mechanical seals composed of the rotary seal ring 47 and the rotary seal ring 48 on the outer diameter side can change the inner diameter and outer diameter by changing the spring constants of the coil springs 70 and 71, for example. The setting of the sealing portion S1, the sealing portion S2, the sealing portion S3 and the sealing portion S4 of the diameter.

In addition, the stationary sealing ring 40, the stationary sealing ring 41, the stationary sealing ring 42, the stationary sealing ring 43, the stationary sealing ring 44, the rotating sealing ring 45, the rotating sealing ring 46, the rotating sealing ring 47 and the rotating sealing ring 48, representatively It is formed of a combination of SiC (hard material) or SiC (hard material) and carbon fiber (soft material). However, it is not limited to this. The sliding material can be used as long as it is used as a sliding material for a mechanical seal. In addition, SiC-based materials include sintered bodies using boron, aluminum, carbon fiber, etc. as sintering aids, and materials composed of two or more phases with different components and compositions. For example, SiC with dispersed graphite particles, Reaction-sintered SiC, SiC-TiC, SiC-TiN, etc. made of SiC and Si can be used as the carbon fiber, including carbon fiber mixed with carbon and graphite, resin molded carbon fiber, sintered carbon fiber, etc. can be used. In addition, in addition to the above-mentioned sliding materials, metal materials, resin materials, surface modification materials (plated materials), composite materials, etc. can also be applied.

Furthermore, quenching flow paths 172 are respectively formed between the sealing portion S1 and the sealing portion S2 and between the sealing portion S3 and the sealing portion S4. Furthermore, a flow path is formed in the support frame 33 by a quenching flow path 173 that forms a radial gap between the rotating seal ring 45 and the rotating seal ring 47 supported by the groove 33 a. The through holes 170 and 171 of the frame 33 and the quenching flow path 173 forming a radial gap between the rotating seal ring 46 and the rotating seal ring 48 supported by the groove 33 b penetrate in the axial direction. Thereby, the quenching fluid flowing in from the quenching fluid supply line Q _in through the housing flow path 10 and through the quenching communication passage 140 of the stationary seal ring 40 passes through the sealing portion S1 and the seal formed in each sealing device 4 respectively. Part S2, the quenching flow path 172 between the sealing parts S3 and S4, and the quenching of the radial gaps formed between the rotary seal ring 45 and the rotary seal ring 47 and the rotary seal ring 46 and the rotary seal ring 48 respectively. flow path 173, through-holes 170 and 171 as quenching flow paths formed in the support frames 33, 34, 35, and 36 and serving as support portions for the coil springs 70 and 71, and The through holes 145 , 146 , and 147 of the stationary seal rings 41 , 42 , and 43 serve as quenching flow paths, and the quenching communication path 144 of the stationary seal ring 44 passes through the housing flow path 18 And the discharge line Q _out is discharged to the quenching fluid (refer to Figure 1).

In this way, the sealing device 4 can form a seal between the outer peripheral surfaces of the support brackets 33 , 34 , 35 and 36 and the inner peripheral surface of the housing 2 by the sealing portion S2 and the sealing portion S4 While the space 120 and the quenching flow path 172 are sealed, the sealing portion S1 and the sealing portion S3 form between the inner peripheral surface of the stationary seal ring 41 and the outer peripheral surface of the spacer 37 fitted on the shaft 3 The space 121, the quenching flow path 172, the space in the lower end cover 20 and the upper end cover 28, and the quenching flow path 172 are sealed.

Accordingly, the rotary joint 1 of this embodiment has the support brackets 33 , 34 , 35 and 36 that rotate together with the shaft 3 , and the rotary joint 1 is formed with: the support brackets 33 , 36 and the support brackets penetrating in the radial direction. The rack 34, the support rack 35 and the support rack 36 are reached from the rotating element side space 120 formed between the outer peripheral surfaces of the support rack 33, the support rack 34, the support rack 35 and the support rack 36 and the inner peripheral surface of the housing 2 respectively. The rotary body flow path 111, the rotary body flow path 113, the rotary body flow path 115, and the rotation side communication path 133, the rotation side communication path 134, the rotation side communication path 135 and the rotation side communication path 117 of the shaft 3 are formed. passage 136, and the rotary joint 1 has a stationary sealing ring 41, a stationary sealing ring 42 and a stationary sealing ring 43 fixed to the housing 2, and the rotary joint 1 is formed with: penetrating the stationary sealing ring 41, the stationary sealing ring 42 and the stationary sealing ring 42 in the radial direction. The stationary seal ring 43 is formed between the inner peripheral surfaces of the stationary seal ring 41 , the stationary seal ring 42 and the stationary seal ring 43 respectively and the outer peripheral surfaces of the spacers 37 , 38 and 39 embedded in the shaft 3 The space 121 and the through holes 137, 138 and 139 of the spacers 37, 38 and 39 reach the rotating body flow path 112, the rotating body flow path 114 and the rotating body flow path 116 formed on the shaft 3 The stationary side communication passage 141, the stationary side communication passage 142 and the stationary side communication passage 143 are, for example, formed by making the housing flow passage 11 and the housing flow passage 12 adjacent to the housing 2 pass through the rotation side communication passage 133 and The stationary side communication passages 141 are respectively connected to the corresponding rotating body flow passages 111 and 112 of the shaft 3. Therefore, the rotating side communication passages 133 and the stationary side communication passages 141 do not interfere with each other, and the rotation can be achieved. The side communication passage 133 and the stationary side communication passage 141 are arranged close to each other in the axial direction, so that the rotary joint can have a compact structure in the axial direction.

Furthermore, the sealing device 4 provided on the rotary joint 1 is composed of an inner and outer double-sided mechanical seal, whereby the sealing portion S1, the sealing portion S2, the sealing portion S3 and the sealing portion are formed on the inner diameter and the outer diameter. Part S4, the space 120 between the outer peripheral surfaces of the support brackets 33, 34, 35 and 36 and the inner peripheral surface of the housing 2, as well as the stationary sealing ring 41, 42 and The space 121 between the inner circumferential surface of the stationary seal ring 43 and the outer circumferential surfaces of the spacers 37, 38 and 39 fitted to the shaft 3 becomes a sealed space, so that the communication passages 133 and 133 can be connected to the rotation side respectively. The space 120 in which the rotation side communication passage 134, the rotation side communication passage 135 and the rotation side communication passage 136 communicates and a part of the space 121 in communication with the stationary side communication passage 141, the stationary side communication passage 142 and the stationary side communication passage 143 respectively are provided in the diameter. The directions overlap and seal, so the rotary joint can be made more compact in the axial direction. Furthermore, a quenching flow path 172 is formed between the sealing portion S1 and the sealing portion S2 and the sealing portion S3 and the sealing portion S4, whereby the quenching fluid flowing in the quenching flow path 172 can pass through the stationary seal ring. 40. The sliding surfaces of the stationary sealing ring 41, the stationary sealing ring 42, the stationary sealing ring 43, the stationary sealing ring 44, the rotating sealing ring 45, the rotating sealing ring 46, the rotating sealing ring 47 and the rotating sealing ring 48 are protected to further enable The sealed fluid flowing in the rotating side communication channel 133 , the rotating side communication channel 134 , the rotating side communication channel 135 , and the rotating side communication channel 136 flows with the stationary side communication channel 141 , the stationary side communication channel 142 , and the stationary side communication channel 143 . Direct mixing of sealed fluids is prevented.

Furthermore, the support frames 33 , 34 , 35 and 36 are formed with through holes 170 and 171 penetrating in the axial direction, so that the support frames 33 , 34 , 35 and 36 can be connected to each other. The frame 36 forms the quenching flow path and ensures the formation area of the rotation side communication path 133 , the rotation side communication path 134 , the rotation side communication path 135 and the rotation side communication path 136 that penetrate in the radial direction.

Furthermore, the stationary sealing ring 41 , the stationary sealing ring 42 and the stationary sealing ring 43 are formed with through-holes 145 , 146 and 147 penetrating in the axial direction, so that the stationary sealing ring 41 , the stationary sealing ring 42 and the stationary sealing ring 43 can be connected to each other. The stationary seal ring 43 forms the quenching flow path and ensures a formation area for the stationary side communication channel 141 , the stationary side communication channel 142 , and the stationary side communication channel 143 that penetrate in the radial direction.

Furthermore, the quenching communication passages 140 and 144 serving as the inlet or outlet of the quenching flow path are formed in the stationary seal rings 40 and 44 arranged at both ends in the axial direction, whereby the sealing device 4 can be configured. The double-sided mechanical seal consists of stationary seal ring 40, stationary seal ring 41, stationary seal ring 42, stationary seal ring 43, stationary seal ring 44, rotating seal ring 45, rotating seal ring 46, and rotating seal ring 47. Since a quenching flow path is formed in the rotary seal ring 48, the rotary joint 1 having a quenching flow path can be configured to be more compact in the axial direction.

Furthermore, in the rotary joint 1, the first cover 21, the second cover 22, the third cover 23, the fourth cover 24 and the shaft of the shaft 3 of the casing 2 that form the flow path of the sealed fluid are The main body 30 , the support frames 33 , 34 , 35 , 36 , spacers 37 , 38 and 39 are made of resin materials such as PEEK with high chemical resistance, thereby sealing The dissolution of metal ions in the fluid does not occur. The lower end cover 20, the upper end cover 28, the spacer 25, the spacer 26, the spacer 27, the sleeve 31 of the shaft 3 and the pressing member of the housing 2 are loaded. 32. It is made of metal materials such as stainless steel, thereby maintaining structural strength.

The embodiments of the present invention have been described above through the drawings. However, the specific configuration is not limited to these embodiments, and changes or additions within the scope that do not deviate from the gist of the present invention are included in the present invention.

For example, in the foregoing embodiments, an example in which the rotary joint 1 is applied to a semiconductor manufacturing apparatus for surface polishing of semiconductor wafers has been described. However, it is not limited thereto. It can also be applied to a rotating machine that supplies fluid to the flow path of the rotating body, such as a centrifugal separator or a rotary filling machine.

Furthermore, in the above-mentioned embodiment, the appearance of the double-sided mechanical seal as the sealing device 4 with the quenching flow path formed inside has been described. However, as long as it is not like a semiconductor manufacturing equipment, Generally used in a vacuum or compressed air environment, a single double-sided mechanical seal can also be used without a quenching flow path.

Furthermore, in the foregoing embodiments, an example in which an inner and outer double-sided mechanical seal is used as the sealing device 4 has been described. However, other seals such as an O-ring or an oil seal may also be used depending on the usage environment. device.

Furthermore, in the foregoing embodiments, it has been described that the housing 2, the stationary seal ring 40, the stationary seal ring 41, the stationary seal ring 42, the stationary seal ring 43 and the stationary seal ring 44 as stationary elements are respectively constituted. , however, these can also be formed in one piece.

Furthermore, in the foregoing embodiments, it has been described that the stationary seal ring is formed with a stationary side communication passage and the rotating seal ring is formed with a rotating side communication passage. However, it is not limited to this, as long as it is not penetrating in the axial direction. The position where the through holes interfere can also form a plurality of stationary side communication paths and rotating side communication paths.

Furthermore, the structures of the stationary element and the rotating element in the axial direction of the rotary joint can also be exchanged. Specifically, the support structure can also be made into a stationary element fixed to the housing, and with two stationary seal rings supported on both sides of the support frame in the axial direction and one rotating seal ring rotating together with the shaft 3, It forms a double-sided mechanical seal.

Furthermore, the through holes 170 and 171 respectively formed in the support frames 33 , 34 , 35 and 36 may not also be used as a support portion for the coil springs 70 and 71 and as a quenching flow path. , it is also possible to make the quenching fluid flow easily by setting the through hole 170 and the through hole 171 as dedicated flow paths for quenching. In addition, in this case, the coil spring can also be supported by a through hole separately formed in the support frame, or the two coil springs can be supported by a pair of bottomed support holes formed on both sides of the support frame in the axial direction.

Furthermore, the inner and outer two through holes 170 , through holes 171 and ejector pins 65 among the support frames 33 , 34 , 35 and 36 are not limited to being evenly arranged in four parts in the circumferential direction. The arrangement, quantity and shape etc. can be composed freely. In addition, it is preferable that the through hole and the push pin are arranged so as not to interfere with the rotation side communication path.

Furthermore, the through holes 145 in the stationary seal ring 41, the stationary seal ring 42, and the stationary seal ring 43 are not limited to being evenly arranged in five parts in the circumferential direction. The arrangement, number, shape, etc. can be freely configured. In addition, the through holes are preferably arranged so as not to interfere with the stationary side communication path.

Furthermore, it is also possible to form a quenching flow path on the shaft 3. For example, the quenching fluid flowing in from the quenching communication passage 140 serving as an inlet of the quenching flow path can be configured to flow into the quenching flow path formed on the shaft. The rotary table for polishing is cooled and the return of the quenching fluid is configured to be discharged from the quenching communication passage 144 which is the outlet of the quenching flow passage. This allows the rotary joint to have a more compact structure in the axial direction.

Furthermore, as long as the support brackets 33 , 34 , 35 and 36 are sufficiently fixed to the shaft body 30 , the spacers 37 , 38 and 39 do not need to be provided.

Furthermore, in the above-mentioned embodiment, it has been described that the member forming the flow path of the sealed fluid in the rotary joint 1 is formed of a resin material such as PEEK with high chemical resistance, but it is not limited to this, and it can also be based on A metal raw material is used for a member that forms a flow path for a fluid to be sealed, depending on the type of fluid to be sealed. Furthermore, the entire rotary joint can also be made of resin material.

Furthermore, the number and arrangement of the housing flow path and the rotating body flow path of the rotary joint can be freely configured according to the number and arrangement of pipelines provided in the applied rotating machine. By changing the number of covers between the bottom cover and the lower end cover, the number of housing flow paths can be easily increased or decreased.

1: Rotary joint 2: Housing 3: Shaft 4: Sealing device 10, 11, 12, 13, 14, 15, 16, 17, 18: Housing flow path 19: Drainage flow path 20: Lower end cover 21: First housing 22: Second housing 23: Third housing 24: Fourth housing 25, 26, 27: Spacer 28: Upper end housing 30: Shaft body 30a: Mounting part 31: Sleeve 32: Pressed member 33: Support frames 33a, 33b: Grooves 34, 35, 36: Support frames 37, 38, 39: Spacers 40, 41: Stationary sealing rings 40a, 41a: Sliding surfaces 42, 43, 44: Stationary sealing rings 45, 46, 47, 48: Rotating sealing ring 45a, 46a, 47a, 48a: Sliding surface 50, 51, 52, 53, 54: Bolt 55: Fixing pin 60, 61: Ball bearing 62, 63: End seal 64 : O-ring 65, 66: Ejection pin 70, 71: Coil spring 100: Circumferential groove 111, 112, 113, 114, 115, 116, 117: Rotating body flow path 120, 121: Space 133, 134, 135, 136 : Rotating side communication passages 137, 138, 139: Through holes 140, 144: Quenching communication passages 141, 142, 143: Stationary side communication passages 145, 146, 147: Through holes 170, 171: Through holes 172, 173: For quenching Flow paths A, B, C, D, E, F, G: Supply line Q _in : Supply line Q _out : Discharge line S1, S2, S3, S4: Sealing section

[Fig. 1] is a cross-sectional view showing the structure of a rotary joint according to an embodiment of the present invention. [Fig. 2] is an enlarged cross-sectional view showing the structure of the rotary joint according to the embodiment. [Fig. 3] is a diagram showing the formation positions of the stationary side communication passage and the through hole in the stationary seal ring of the embodiment. [Fig. 4] is a diagram showing the formation positions of a plurality of rotating body flow paths in the shaft of the embodiment. [Fig. 5] is a diagram showing the formation positions of the rotation side communication passage and the through hole in the support frame of the embodiment.

1: Rotary joint

2: Shell

3:Axis

4:Sealing device

10, 11, 12, 13, 14, 15, 16, 17, 18: Shell flow path

19: Drainage flow path

20: Lower end shell cover

21:First shell cover

22:Second shell cover

23:Third shell cover

24:Fourth shell cover

25, 26, 27: Spacer

28: Upper end shell cover

30:Shaft body

30a: Installation Department

31:Sleeve

32: Pressed components

33, 34, 35, 36: Support frame

37, 38, 39: Spacer

40, 41: Stationary sealing ring

42, 43, 44: Stationary sealing ring

50, 51, 52, 53, 54: Bolts

55: Fixed pin

60, 61: Ball bearing

62, 63: End seal

100:Zhougou

111, 112, 113, 114, 115, 116, 117: rotating body flow path

120, 121: Space

133, 134, 135, 136: Rotating side communication path

137, 138, 139: Through holes

140, 144: Quenching communication path

141, 142, 143: Stationary side communication path

145, 146, 147: Through holes

170, 171: Through hole

A, B, C, D, E, F, G: Supply pipeline

Q _in : supply line

Q _out : discharge line

Claims (8)

A rotary joint includes a shell and a rotating body. The shell system is cylindrical and is formed with a plurality of housing flow paths. The rotating system is arranged in the housing in a relatively rotating manner and is formed with a plurality of rotating bodies. body flow path, a plurality of the rotating body flow paths are connected with a plurality of the housing flow paths, wherein the rotary joint has a rotating element and a stationary element, and the rotary joint forms a rotating side communication channel and a stationary side connection channel. Passage, the rotating element rotates together with the rotating body, the rotating side communication channel penetrates the rotating element in the radial direction, and reaches the rotating body flow path from a rotating element side space between the housing and the rotating element, The stationary element is fixed to the housing, and the stationary side communication path passes through the stationary element in the radial direction, from a stationary element side space between the stationary element and the rotating body to the rotating body flow path, wherein the stationary element The element has a stationary sealing ring, the rotating element has a rotating sealing ring, and the rotating joint is formed with a double-sided mechanical seal. The mechanical seal is composed of one stationary sealing ring and two rotating seals in the axial direction. The ring is arranged in a sliding manner, and the mechanical seal has a sealing portion on the inner diameter and the outer diameter respectively, and a quenching flow path is formed between the sealing portions on the inner diameter and the outer diameter. A rotary joint includes a shell and a rotating body. The shell system is cylindrical and is formed with a plurality of housing flow paths. The rotating system is arranged in the housing in a relatively rotating manner and is formed with a plurality of rotating bodies. body flow path, a plurality of the rotating body flow paths are connected with a plurality of the housing flow paths, wherein the rotary joint has a rotating element and a stationary element, and the rotary joint forms a rotating side communication channel and a stationary side connection channel. Passage, the rotating element rotates together with the rotating body, the rotating side communication channel penetrates the rotating element in the radial direction, and reaches the rotating body flow path from a rotating element side space between the housing and the rotating element, The stationary element is fixed to the housing, and the stationary side communication path passes through the stationary element in the radial direction, from a stationary element side space between the stationary element and the rotating body to the rotating body flow path, wherein the stationary element The element has a stationary sealing ring, the rotating element has a rotating sealing ring, and the rotating joint is formed with a double-sided mechanical seal. The mechanical seal is composed of one stationary sealing ring and two rotating seals in the axial direction. The ring is arranged in a sliding manner, and a through hole for quenching penetrating in the axial direction is formed in the rotating element. A rotary joint includes a shell and a rotating body. The shell system is cylindrical and is formed with a plurality of housing flow paths. The rotating system is arranged in the housing in a relatively rotating manner and is formed with a plurality of rotating bodies. body flow path, a plurality of the rotating body flow paths are connected with a plurality of the housing flow paths, wherein the rotary joint has a rotating element and a stationary element, and the rotary joint forms a rotating side communication channel and a stationary side connection channel. Passage, the rotating element rotates together with the rotating body, the rotating side communication channel penetrates the rotating element in the radial direction, and reaches the rotating body flow path from a rotating element side space between the housing and the rotating element, The stationary element is fixed to the housing, and the stationary side communication path passes through the stationary element in the radial direction, from a stationary element side space between the stationary element and the rotating body to the rotating body flow path, wherein the stationary element The element has a stationary sealing ring, the rotating element has a rotating sealing ring, and the rotating joint is formed with a double-sided mechanical seal. The mechanical seal is composed of one stationary sealing ring and two rotating seals in the axial direction. The rings are arranged in a sliding manner, and the mechanical seal system has two rotating seal rings, inside and outside. The rotary joint according to claim 2 or 3, wherein the mechanical seal has a sealing portion on the inner diameter and the outer diameter respectively, and a quenching flow path is formed between the sealing portions on the inner diameter and the outer diameter. The rotary joint according to claim 1 or 3, wherein a through hole for quenching penetrating in the axial direction is formed in the rotary element. The rotary joint according to any one of claims 1 to 3, wherein a through hole for quenching penetrating in the axial direction is formed in the stationary element. The rotary joint according to claim 1 or 2, wherein the mechanical seal has two rotary seal rings, inside and outside. The rotary joint according to any one of claims 1 to 3, wherein the inlet or outlet of the quenching flow path is formed in the stationary seal ring arranged at both ends in the axial direction.