TWI806319B - A Method for Quickly Evaluating Microwave Dielectric Loss - Google Patents
A Method for Quickly Evaluating Microwave Dielectric Loss Download PDFInfo
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Abstract
本發明係藉由低介電絕緣保護陶瓷載板材料的導熱性質,進行快速評估介電損失的方法,藉以開發新低介電絕緣特性的材料。低介電絕緣材料可改善高功率元件電路訊號干擾的問題,同時具有隔離強化保護之作用,並期以微波陶瓷載板材料的開發,因應現今對5G的需求。 The invention uses low dielectric insulation to protect the heat conduction properties of the ceramic carrier material, and conducts a method for quickly evaluating dielectric loss, so as to develop new materials with low dielectric insulation properties. Low-dielectric insulating materials can improve the problem of high-power component circuit signal interference, and at the same time have the effect of isolation strengthening protection, and the development of microwave ceramic substrate materials is expected to meet the current demand for 5G.
Description
本發明係提供一種評估微波介電損失的方法,特別是一種以熱擴散的量測,取得微波陶瓷介電損失特性的快速評估方法,可以在短時間判斷同一材料系統彼此之間的微波相對特性,對於驗證材料之微波介電損失特性有顯著的幫助。 The present invention provides a method for evaluating microwave dielectric loss, especially a rapid evaluation method for obtaining microwave ceramic dielectric loss characteristics by measuring thermal diffusion, which can judge the relative characteristics of microwave between the same material system in a short time , which is of great help to verify the microwave dielectric loss characteristics of materials.
當前隨著3G、4G、5G通訊系統的快速推陳出新,在材料設計上對新微波材料的需求持續增加,但是目前學理上雖仍缺乏完整微波材料的設計基礎,包含結晶陶瓷或是玻璃材質的材料選用,但累積至今也是已有相當多的研究文獻資料基礎,而最大問題在於實際上微波性質量測系統的發展卻遠遠跟不上。 At present, with the rapid innovation of 3G, 4G, and 5G communication systems, the demand for new microwave materials in material design continues to increase. However, there is still a lack of a complete design basis for microwave materials, including crystalline ceramics or glass materials. However, there are quite a lot of research literature and materials accumulated so far. The biggest problem is that the development of the microwave property measurement system is far behind.
微波在通訊上之應用扮演著相當吃重的角色,目前微波積體電路的新的發展趨勢為製造出一高速且小體積之Multi-chip module,此一Multi-chip module需要尋找出一低介電損耗(Dielectric loss,tanδ)及低介電常數(Dielectric constant)之介電物質(Dielectrics)作為基底(Substrate)。低介電損耗之基底材料亦為新一代之微波天線及通訊濾波器所必須。上列之 新的發展及一般微波元件之設計均須採用到不同的介電材料以作為微波電路薄膜之基底或介質共振器之基本材料。而材料之選擇則是以其介電性質為依據。因此介電材料在微波頻率之介電性質為設計微波元件時選擇何種介電材料所必須考慮的關鍵因素。而微波介電性質之測量技術在材料之選擇及新材料之發展上便顯現出其重要性。因此微波介電性質之測量技術之研究實為必要。 The application of microwave in communication plays a very important role. At present, the new development trend of microwave integrated circuits is to manufacture a high-speed and small-sized Multi-chip module. This Multi-chip module needs to find a low dielectric Loss (Dielectric loss, tanδ) and low dielectric constant (Dielectric constant) dielectric material (Dielectrics) as the substrate (Substrate). Substrate materials with low dielectric loss are also necessary for the new generation of microwave antennas and communication filters. the above New developments and the design of general microwave components require the use of different dielectric materials as the substrate of microwave circuit films or the basic materials of dielectric resonators. The choice of material is based on its dielectric properties. Therefore, the dielectric properties of dielectric materials at microwave frequencies are the key factors that must be considered in the selection of dielectric materials when designing microwave components. The measurement technology of microwave dielectric properties shows its importance in the selection of materials and the development of new materials. Therefore, research on the measurement technology of microwave dielectric properties is necessary.
Parallel Plate Resonance Technique已可同時量測介電常數及介電損耗,且具有頻率掃瞄之功能(對同一樣本可量測約3GHz之頻率範圍)為其優點,但受限於輻射損耗對量測誤差之影響,其對介電損耗之最低量測值無法低於1×10-5。至於TE Cavity PerturbationTechnique,其最大優點為在現存所有技術中,所需之樣品大小遠較其他方法要小的多,一根截面積約為1mm2之圓形或矩形之柱狀樣本即可。對某些製作較大尺寸樣品有困難之材料之量測具有相當大之吸引力,特別是以fiber狀長成之單晶更顯示其優越性。此外,測量操作方式簡單且利用量測結果計算介電性質之過程非常簡易亦為其相當令人樂於採用之原因,但其對介電損耗之最低量測值仍無法低於1×10-5。 The Parallel Plate Resonance Technique can measure the dielectric constant and dielectric loss at the same time, and has the function of frequency scanning (the frequency range of about 3GHz can be measured for the same sample) as its advantage, but it is limited by the radiation loss to the measurement Influenced by errors, the minimum measured value of dielectric loss cannot be lower than 1×10-5. As for TE Cavity PerturbationTechnique, its biggest advantage is that in all existing techniques, the required sample size is much smaller than other methods, a circular or rectangular columnar sample with a cross-sectional area of about 1mm2 is enough. It is very attractive for the measurement of some materials that are difficult to make large-scale samples, especially the single crystal grown in fiber shape shows its superiority. In addition, the measurement operation method is simple and the process of using the measurement results to calculate the dielectric properties is very simple, which is also the reason why it is quite popular, but the minimum measurement value of the dielectric loss cannot be lower than 1×10-5 .
在高頻高速電路中,材料的電器特性與信號的傳播速度、衰減以及元件的尺寸間密不可分,故需要一套可以快速量測微波特性之方法,同時可以降低人工、設備及樣品建置 成本。此外,目前通訊頻率等相關設備仍有極多微波材料需要評估,在這龐大的工作量中,對於微波性質的量測有著相當程度的需求,但是由於在眾多微波量測系統中,對於試樣要求均相當嚴苛,同時量測系統亦非常昂貴,所以極需要一種快速篩選微波材料的方法。 In high-frequency and high-speed circuits, the electrical properties of materials are inseparable from the signal propagation speed, attenuation, and component size. Therefore, a method that can quickly measure microwave properties is needed, and at the same time, it can reduce labor, equipment and sample construction. cost. In addition, there are still a lot of microwave materials to be evaluated for communication frequency and other related equipment. In this huge workload, there is a considerable demand for the measurement of microwave properties. However, in many microwave measurement systems, the sample The requirements are quite stringent, and the measurement system is also very expensive, so a method for quickly screening microwave materials is extremely needed.
為了解決上述問題,本發明藉由一組低介電絕緣保護陶瓷載板材料,評估微波性質與導熱性質之間的關聯,藉以開發一種微波陶瓷介電損失特性的快速評估方法,此方法可以節省以往量測微波介電損失特性所要付出的時間及成本。低介電絕緣材料可改善高功率元件電路訊號干擾的問題,同時具有隔離強化保護之作用,並期以微波陶瓷載板材料的開發,因應現今對5G的需求。以下為本案之簡要說明。 In order to solve the above problems, the present invention uses a group of low-dielectric insulation protection ceramic carrier materials to evaluate the relationship between microwave properties and thermal conductivity, so as to develop a rapid evaluation method for microwave ceramic dielectric loss characteristics, which can save In the past, it took time and cost to measure microwave dielectric loss characteristics. Low-dielectric insulating materials can improve the problem of high-power component circuit signal interference, and at the same time have the effect of isolation strengthening protection, and the development of microwave ceramic substrate materials is expected to meet the current demand for 5G. The following is a brief description of the case.
本發明係提供一種評估微波介電損失的方法,在材料的性質測試方面,微波特性除了受微結構(尤其是孔隙率)的影響外,還受結晶中的點缺陷(point defect)的影響,而在陶瓷的熱擴散也受結晶中的點缺陷的影響,故以熱擴散的量測,取得微波陶瓷介電損失特性的快速評估方法,可在微波陶瓷材料的選擇及評估上,建立一條捷徑。 The present invention provides a method for evaluating microwave dielectric loss. In terms of material testing, microwave properties are also affected by point defects in crystallization, in addition to being affected by microstructure (especially porosity). The thermal diffusion of ceramics is also affected by point defects in the crystallization. Therefore, the rapid evaluation method of the dielectric loss characteristics of microwave ceramics can be obtained by measuring thermal diffusion, which can establish a shortcut in the selection and evaluation of microwave ceramic materials. .
熱擴散量測方式通常採用有熱流技法(Heat Flow Method;HFM);熱線法(Hot Wire Method;HWM);熱平板法(Hot Plate Method;HPM);熱通量計法(Heat Flux Method;HFM); 瞬變平面熱源法(Transient Plane Source;TPS);雷射閃光法(Laser Flash Method;LFM)。以上的方式也可以快速檢測出陶瓷材料之熱導值。 The thermal diffusion measurement method usually adopts heat flow method (Heat Flow Method; HFM); hot wire method (Hot Wire Method; HWM); hot plate method (Hot Plate Method; HPM); heat flux meter method (Heat Flux Method; HFM ); Transient Plane Source (TPS); Laser Flash Method (LFM). The above methods can also quickly detect the thermal conductivity of ceramic materials.
根據本發明的構想,提供一種快速評估微波介電損失的方法,步驟包括:(A)量測同一材料系統之一熱擴散特性及一微波特性,並重覆量測三次以上,得數據點達三個以上;(B)將該數據以線性回歸方式得到一數學關係式為y=ax+b,其中a與b為常數,x為該熱擴散特性之數據,y為該微波特性之數據;(C)先量測一未知介電損失樣品之熱擴散特性之數據;(D)再將該未知介電損失樣品之熱擴散特性之數據代入該步驟B之數學關係式中,即可快速獲得該未知介電損失樣品之微波特性之數據。 According to the idea of the present invention, a method for quickly evaluating microwave dielectric loss is provided, the steps include: (A) measuring one thermal diffusion characteristic and one microwave characteristic of the same material system, and repeating the measurement for more than three times to obtain three data points Above; (B) this data obtains a mathematical relational expression with linear regression mode and is y=ax+b, wherein a and b are constants, x is the data of this thermal diffusion characteristic, and y is the data of this microwave characteristic; (C ) First measure the data of the thermal diffusion characteristics of an unknown dielectric loss sample; (D) Substituting the data of the thermal diffusion characteristics of the unknown dielectric loss sample into the mathematical relationship in step B, the unknown can be quickly obtained Data of microwave characteristics of dielectric loss samples.
上述步驟快速評估微波介電損失的方法,其中,該數學關係式係由該熱擴散特性與該微波特性所建立,並且包含三個數據點以上,以獲得該數學關係式。 The method for rapidly evaluating microwave dielectric loss in the above steps, wherein the mathematical relational expression is established by the thermal diffusion characteristic and the microwave characteristic, and includes more than three data points to obtain the mathematical relational expression.
上述步驟快速評估微波介電損失的方法,其中,該微波特性為介電損失(Dilectric Loss;Df)。 The above steps are a method for quickly evaluating microwave dielectric loss, wherein the microwave characteristic is dielectric loss (Df).
上述步驟快速評估微波介電損失的方法,其中,該材料系統可以為Ba-Nb-W-O系統、Ba-Cu-Sr-Si-O系統;BaO-MO-SiO2(M=Mg,Zn,Co,Ni,Mn,Cu)系統。 The method for quickly evaluating microwave dielectric loss in the above steps, wherein the material system can be Ba-Nb-W-O system, Ba-Cu-Sr-Si-O system; BaO-MO-SiO2 (M=Mg, Zn, Co, Ni, Mn, Cu) system.
本發明乃利用陶瓷材料的熱擴散特性與微波介電損失特性具有相同機制的部份,進行快速且方便的量測微 波特性方式。利用陶瓷材料的熱擴散與介電損失具有線性相依的數學關係,採用熱擴散的量測取代介電損失微波性質的量測,可以快速篩選微波材料的方法。 The present invention utilizes the thermal diffusion characteristic of the ceramic material and the microwave dielectric loss characteristic having the same mechanism to carry out rapid and convenient measurement of micro wave characteristic mode. Taking advantage of the linearly dependent mathematical relationship between thermal diffusion and dielectric loss of ceramic materials, the measurement of thermal diffusion is used to replace the measurement of microwave properties of dielectric loss, which can quickly screen microwave materials.
以上之概述與接下來的詳細說明及附圖,皆是為了能進一步說明本發明達到預定目的所採取的方式、手段及功效。而有關本發明的其他目的及優點,將在後續的說明及圖式中加以闡述。 The above overview, the following detailed description and the accompanying drawings are all for further explaining the ways, means and effects of the present invention to achieve the intended purpose. Other purposes and advantages of the present invention will be described in the subsequent description and drawings.
S101-S104:步驟 S101-S104: Steps
1:介電損失 1: Dielectric loss
2:熱擴散值 2: Thermal diffusion value
3:數學關係式 3: Mathematical relation
第一圖係為本發明之一種評估微波介電損失的方法流程圖;第二圖係為本發明實施例之數學關係圖;第三圖係為本發明實施例之介電損失與熱擴散值之實驗數據。 The first figure is a flow chart of a method for evaluating microwave dielectric loss of the present invention; the second figure is a mathematical relationship diagram of an embodiment of the present invention; the third figure is a dielectric loss and thermal diffusion value of an embodiment of the present invention The experimental data.
以下係藉由特定的具體實例說明本發明之實施方式,熟悉此技藝之人士可由本說明書所揭示之內容輕易地了解本發明之優點及功效。然本案之實施並非可由下列實施案例而被限制其實施型態。 The implementation of the present invention is described below through specific examples, and those skilled in the art can easily understand the advantages and effects of the present invention from the content disclosed in this specification. However, the implementation of this case cannot be limited by the following implementation cases.
請參閱第一圖,其係為本發明之一種評估微波介電損失的方法流程圖,及第二圖係為本發明實施例之數學關係圖,第三圖係為本發明實施例之介電損失與熱擴散值之實
驗數據,步驟包括:步驟S101為提供一種評估微波介電損失的方法,首先利用傳統之熱擴散及介電損失量測方式,量測出同一材料系統但不同比例組成之陶瓷材料之一熱擴散特性及一微波特性,所量測之實驗數據為熱擴散值2及介電損失1,並重覆量測三次以上,得數據點達三個以上,請參閱第三圖;步驟S102由熱擴散值2及介電損失1之實驗數據建立一數學關係圖,所建立之數學關係圖最少為3個量測點,並且以線性回歸方式得到一數學關係式3為y=-0.0027x+0.0038,請參閱第二圖;步驟S103量測一未知介電損失樣品之熱擴散特性之數據;步驟S104藉由此數學關係式3,將同一材料系統之熱擴散特性(x)代入數學關係式3,即可獲得可信賴之介電損失數值(y)。
Please refer to the first figure, which is a flow chart of a method for evaluating microwave dielectric loss of the present invention, and the second figure is a mathematical relationship diagram of an embodiment of the present invention, and the third figure is a dielectric diagram of an embodiment of the present invention The reality of loss and heat dissipation value
The steps include: Step S101 To provide a method for evaluating microwave dielectric loss, first use the traditional thermal diffusion and dielectric loss measurement methods to measure the thermal diffusion of ceramic materials with the same material system but different proportions characteristics and a microwave characteristic, the experimental data measured are
本實施例中之材料可以為Ba-Nb-W-O系統、Ba-Cu-Sr-Si-O系統;BaO-MO-SiO2(M=Mg,Zn,Co,Ni,Mn,Cu)系統;微波特性為介電損失(Dilectric Loss;Df)。 The material in this embodiment can be Ba-Nb-W-O system, Ba-Cu-Sr-Si-O system; BaO-MO-SiO2 (M=Mg, Zn, Co, Ni, Mn, Cu) system; microwave characteristics is the dielectric loss (Dielectric Loss; Df).
本方法可以避免同一材料系統之微波介電損失特性需要多次量測,僅需量測至少三點微波介電損失特性及熱擴散特性,即可利用數學關係式及熱擴散性量測數據進行不同成份比例材料介電損失之初步評估微波特性,大幅降低量測成本。 This method can avoid the need for multiple measurements of the microwave dielectric loss characteristics of the same material system. It only needs to measure at least three microwave dielectric loss characteristics and thermal diffusion characteristics, and can use the mathematical relationship and thermal diffusivity measurement data. Preliminary evaluation of the microwave characteristics of the dielectric loss of materials with different composition ratios, greatly reducing the cost of measurement.
上述之實施例僅為例示性說明本發明之特點及功效,非用以限制本發明之實質技術內容的範圍。任何熟悉此 技藝之人士均可在不違背發明之精神及範疇下,對上述實施例進行修飾與變化。因此,本發明之權利保護範圍,應如後述之申請專利範圍所列。 The above-mentioned embodiments are only illustrative to illustrate the characteristics and functions of the present invention, and are not intended to limit the scope of the essential technical content of the present invention. anyone familiar with this Those skilled in the art can modify and change the above-mentioned embodiments without departing from the spirit and scope of the invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of the patent application described later.
1:介電損失 1: Dielectric loss
2:熱擴散值 2: Thermal diffusion value
3:數學關係式 3: Mathematical relation
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW407213B (en) * | 1998-11-06 | 2000-10-01 | Emtac Technology Corp | The measuring apparatus of the microwave dielectric resonator and the method thereof |
TW201619618A (en) * | 2014-11-26 | 2016-06-01 | 國立清華大學 | System and method for measuring permittivity |
US20190148810A1 (en) * | 2016-07-19 | 2019-05-16 | University Of Electronic Science And Technology Of China | Coaxial Resonant Cavity and System and Method for Measuring Dielectric Constant of Material |
US20200124551A1 (en) * | 2015-04-26 | 2020-04-23 | Vayyar Imaging Ltd | System devise and methods for measuring substances' dielectric properties using microwave sensors |
CN111189855A (en) * | 2020-03-02 | 2020-05-22 | 张洮 | Near-field microwave measuring system based on impedance measurement |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW407213B (en) * | 1998-11-06 | 2000-10-01 | Emtac Technology Corp | The measuring apparatus of the microwave dielectric resonator and the method thereof |
TW201619618A (en) * | 2014-11-26 | 2016-06-01 | 國立清華大學 | System and method for measuring permittivity |
US20200124551A1 (en) * | 2015-04-26 | 2020-04-23 | Vayyar Imaging Ltd | System devise and methods for measuring substances' dielectric properties using microwave sensors |
US20190148810A1 (en) * | 2016-07-19 | 2019-05-16 | University Of Electronic Science And Technology Of China | Coaxial Resonant Cavity and System and Method for Measuring Dielectric Constant of Material |
CN111189855A (en) * | 2020-03-02 | 2020-05-22 | 张洮 | Near-field microwave measuring system based on impedance measurement |
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