TWI806313B - Batch heat treatment furnace and heat treatment furnace system - Google Patents

Abstract

The present invention relates to a batch type heat treatment furnace and a heat treatment furnace system, which enable simple installation of a treatment table. The processing table on which the object to be processed is placed can be attached and detached to the lift bed of the main body of the heat treatment furnace. When the processing table is stopped from the state of rotating at the speed V1 in the forward direction, first, when the detection signal is output from the position sensor (YES in S12), in the state of outputting the detection signal, the The processing table further rotates in the forward rotation direction, and when the output detection signal stops (YES in S14 ), the rotation of the processing table is stopped ( S16 ). Next, the processing table is rotated at the speed V2 in the reverse direction (S18), and when a detection signal is output from the position sensor (YES in S20), the rotation of the processing table in the reverse direction is stopped (S22) .

Description

Batch heat treatment furnace and heat treatment furnace system

The technology disclosed in this specification relates to a batch type heat treatment furnace for heat treatment of an object to be processed (for example, laminated ceramic parts such as ceramic capacitors, ceramic piezoelectric elements, and ceramic resistors, etc.).

When simultaneously heat-treating a plurality of objects to be processed arranged in a furnace, in order to stabilize the characteristics of the plurality of objects after heat treatment, it is necessary to provide the same heat history to each of the plurality of objects to be processed. Therefore, in the batch heat treatment furnace of Patent Document 1, the hearth on which the object to be processed is placed includes a main hearth and an auxiliary hearth. The main hearth has a circular shape when viewed from above, and is capable of rotating about an axis passing through its center. The sub-hearth is arranged in the opening formed in the main hearth. The auxiliary hearth has a circular shape when viewed from above, and can rotate around an axis passing through its center. The object to be processed is placed on the upper surface of the auxiliary hearth. When heat-treating the object to be processed, the sub-hearth itself rotates (so-called autorotation), and the main hearth rotates so that the sub-hearth also rotates around an axis passing through the center of the main hearth (so-called revolution) . Thereby, a plurality of objects to be processed placed on the upper surface of the sub-hearth are heated uniformly, and the same heat history is given to each object to be processed. [Prior Art Literature] [Patent Document]

Patent Document 1: Japanese Unexamined Patent Publication No. 2005-77001

[Problem to be solved by the invention]

However, in order to heat treat the object to be processed by the batch heat treatment furnace, it is necessary to set the object to be processed in the heat treatment furnace, heat treat the object to be processed installed in the furnace, and take out the object to be processed after the heat treatment to the side of the heat treatment furnace. external. In order to increase the efficiency of the installation of the processed objects into the furnace and the removal of them to the outside of the furnace, the following proposal was considered: making the processing table detachable from the floor of the furnace body and placing it on the detachable processing table Put the object to be processed. However, when the processing table is configured to be detachable from the floor of the furnace body, a drive device for rotationally driving the processing table is provided on the floor of the furnace body. Therefore, in order to install the processing table on the floor of the furnace body, it is necessary to align the processing table with respect to the driving part of the driving device in the rotational direction and connect them, thereby producing work for installing the processing table on the floor of the furnace body. become complicated issues.

This specification discloses a technology that enables easy installation of the processing table in a batch-type heat treatment furnace in which the processing table is detachable from the floor of the furnace body. [the means used to solve the problem]

The first batch-type heat treatment furnace disclosed in this specification includes: a furnace body, including a top wall, a side wall and a lift bed; a processing table configured to be able to rotate relative to the lift bed, and capable of placing objects to be processed; a drive device, It is installed on the lifting bed, and the processing table is connected in a detachable manner, and the processing table is rotationally driven; the position sensor is used to detect the position of the processing table relative to the rotation direction of the lifting bed; and the control device is based on The detection result of the position sensor controls the driving device. The processing table includes: a first rotating table configured to have a circular shape when viewed from above, capable of rotating around a first axis passing through its center and extending in an up-down direction; and at least one second rotating table configured to be arranged on the first axis when viewed from above. The inner side of a rotary table is capable of rotating around a second axis passing through its center and extending in an up-down direction. The position of the center of the second turntable is at a position different from the position of the center of the first turntable in plan view. The lift cot is movable between a first position with the lower ends of the side walls open and a second position with the lower ends of the side walls closed. When the lift bed is at the first position, the processing table can be disassembled relative to the driving device. When the lift bed is located at the second position when the processing table is connected to the driving device, the upper surface of the first rotary table and the upper surface of the second rotary table are exposed in the furnace body. The driving device includes: a first driving part arranged on the first axis to rotationally drive the first rotary table; and a second driving part arranged on the second axis to rotationally drive the second rotary table. The position sensor outputs a detection signal when the first rotating platform is within a preset angle range relative to the lift bed. The control device is configured to stop the rotation of the first turntable in a state where the first turntable is rotating at a first speed in a first rotation direction, and (1) when the position sensor outputs the detection signal, in the state of outputting the detection signal, the first rotary table is further rotated along the first rotation direction, and when the output detection signal stops, the first rotary table is stopped; (2) in the (1) Afterwards, rotating the first rotary table in a direction opposite to the first rotation direction, that is, a second rotation direction, at a speed lower than the first speed, that is, a second speed; (3) when In the state of (2), when the detection signal is output from the position sensor, the first turntable is stopped.

In the first batch heat treatment furnace described above, for example, when heat-treating the object to be processed, the first rotary table can be rotated at a first speed corresponding to the heat treatment to be performed on the object to be processed. On the other hand, when the heat treatment of the object to be processed is completed and the first rotary table is stopped, the first rotary table is rotated in the second direction at the second speed in accordance with the above-mentioned procedures (1) to (3). Status stopped. The second speed may be set as a constant speed that is lower than the first speed and has no relation to the heat treatment performed on the object to be processed. Therefore, the first turntable stops when its position in the rotation direction reaches a predetermined position (angle), and the drive units (first drive unit and second drive unit) of the drive device connected to the first turntable also operate at Stop at an angle corresponding to the specified angle. Therefore, when installing the first turntable, the processing table can be connected to the drive unit of the drive device by adjusting the processing table to a predetermined angle in advance. Thereby, the installation work of a processing table to a drive device can be performed easily.

The second batch heat treatment furnace disclosed in this specification includes: a furnace body, including a top wall, a side wall, and a lift bed; a processing table configured to be able to rotate relative to the lift bed, and capable of placing objects to be processed; a drive device, It is installed on the lifting bed, and the processing table is connected in a detachable manner, and the processing table is rotationally driven; the position sensor is used to detect the position of the processing table relative to the rotation direction of the lifting bed; and the control device is based on The detection result of the position sensor controls the driving device. The processing table includes: a first rotating table configured to have a circular shape when viewed from above, capable of rotating around a first axis passing through its center and extending in an up-down direction; and at least one second rotating table configured to be arranged on the first axis when viewed from above. The inner side of a rotary table is capable of rotating around a second axis passing through its center and extending in an up-down direction. The position of the center of the second turntable is at a position different from the position of the center of the first turntable in plan view. The lift cot is movable between a first position with the lower ends of the side walls open and a second position with the lower ends of the side walls closed. When the lift bed is at the first position, the processing table can be disassembled relative to the driving device. When the lift bed is located at the second position when the processing table is connected to the driving device, the upper surface of the first rotary table and the upper surface of the second rotary table are exposed in the furnace body. The driving device includes: a first driving part arranged on the first axis to rotationally drive the first rotary table; and a second driving part arranged on the second axis to rotationally drive the second rotary table. The position sensor outputs a detection signal when the first rotating platform is within a preset angle range relative to the lift bed. The control device is configured to stop the rotation of the first turntable in a state where the first turntable is rotating at a first speed in a first rotation direction, (1) when a detection signal is output from a position sensor, The first rotary table stops within the set angle range; (2) After (1), make the first rotary table rotate in the direction opposite to the first rotation direction, that is, the second rotation direction; (3) when In the state of (2), when the detection signal output from the position sensor stops, the first rotary table is stopped; (4) After the above (3), the first rotary table is moved in the first rotation direction Rotate at a second speed that is lower than the first speed; (5) Stop the first rotary table when a detection signal is output from the position sensor in the state of (4).

In the above-mentioned second batch heat treatment furnace, when heat-treating the object to be processed, the first rotary table can be rotated at the first speed corresponding to the heat treatment to be performed on the object to be processed. On the other hand, when the heat treatment of the object to be processed is completed and the first rotary table is stopped, the first rotary table is rotated in the first direction at the second speed in accordance with the above-mentioned procedures (1) to (5). Status stopped. The second speed may be set as a constant speed that is lower than the first speed and has no relation to the heat treatment performed on the object to be processed. Therefore, in the second batch type heat treatment furnace, when the first turntable is attached, the driving unit of the driving device also has an angle corresponding to a predetermined angle. Therefore, the work of attaching the processing table to the drive device can be facilitated.

It should be noted that in the above-mentioned first batch heat treatment furnace or the second batch heat treatment furnace, the treatment table may include a plurality of second rotary tables. When viewed from above, the plurality of second turntables can be arranged at different positions of the first turntable without interfering with each other.

In addition, the heat treatment furnace system disclosed in this specification includes: a plurality of batch type heat treatment furnace main bodies; and at least one processing station, which can be attached and disassembled respectively with respect to the plurality of batch type heat treatment furnace main bodies. The processing stage may be a processing stage installed in the first batch type heat treatment furnace or the second batch type heat treatment furnace. In addition, the plurality of batch heat treatment furnace bodies may respectively include: a furnace body assembled in the first batch heat treatment furnace or the second batch heat treatment furnace, a driving device, a position sensor and a control device. In the heat treatment furnace system described above, the treatment table can be shared for a plurality of batch type heat treatment furnace main bodies.

In addition, the heat treatment furnace system may further include: a transport trolley for transporting the treatment stages to the plurality of batch heat treatment furnace bodies respectively. Since the processing tables can be shared, the transport carts for transporting the processing tables can also be shared.

(Example 1) Hereinafter, the heat treatment furnace system 100 which concerns on this Example is demonstrated. First, the schematic configuration of the heat treatment furnace system 100 will be described. As shown in FIG. 1 , a loading area A, an unloading area B, and a heat treatment area C are provided in the area where the heat treatment furnace system 100 is installed. The heat treatment furnace system 100 includes: a plurality of processing stations 30 ; a plurality of heat treatment furnace bodies 10 disposed in a heat treatment area C;

The processing table 30 includes an upper surface on which the object W to be processed is placed. In the loading area A, the object W to be processed before heat treatment is placed on the upper surface of the processing table 30 . The processing table 30 on which the object to be processed W is placed is conveyed to the heat treatment area C by the conveyance trolley 70 . In the heat treatment area C, a transport path connecting the loading area A and the unloading area B is provided, and a plurality of heat treatment furnace main bodies 10 are installed along this transport path. The heat treatment furnace main body 10 is a batch type heat treatment furnace for heat treating the object W to be processed. In this embodiment, the processing table 30 can be installed on each of the plurality of heat treatment furnace main bodies 10 . Therefore, among the heat treatment furnace main bodies 10 to be mounted on the treatment table 30 , an appropriate heat treatment furnace main body 10 is selected according to the operating conditions of the heat treatment furnace system 100 . The processing stage 30 transported to the heat treatment area C is transported to the selected heat treatment furnace main body 10 and installed in the selected heat treatment furnace main body 10 . When the processing table 30 is installed, the heat treatment furnace main body 10 heat-treats the object W placed on the processing table 30 . When the heat treatment of the object W is completed, next, the processing table 30 is taken out from the heat treatment furnace main body 10 . The processing table 30 taken out is conveyed to the unloading area B by the conveyance trolley 70, and each processing table 30 is unloaded to the unloading area B. FIG.

It can be clearly seen from the above description that the heat treatment furnace system 100 of this embodiment includes: a plurality of heat treatment furnace bodies 10; Therefore, during operation of the heat treatment furnace main body 10 (for example, during heat treatment of the object W to be processed), the object W to be heat-treated next can be placed on another processing station 30 for standby. In addition, after the heat treatment of the object W to be processed, the processing table 30 on which the object W after the heat treatment is placed can be detached from the heat treatment furnace main body 10 . Therefore, a new processing table 30 (that is, a processing table 30 on which the object to be processed W before heat treatment is placed) can be installed on the heat treatment furnace main body 10 after the processing table 30 is removed, and the next object to be processed W can be heat treated. Therefore, according to the heat treatment furnace system of this embodiment, a plurality of heat treatment furnace main bodies 10 can be operated efficiently, and the heat treatment of the object W to be processed can be performed efficiently. It should be noted that the processing table 30 detached from the heat treatment furnace main body 10 can be placed in the unloading area B to cool the processed object W after heat treatment.

On the other hand, if the processing table 30 is shared by a plurality of heat treatment furnace main bodies 10 , the work of attaching the processing table 30 to the heat treatment furnace main body 10 is required. As will be described later, the processing table 30 of this embodiment includes a main hearth 34 and an auxiliary hearth 36. In order to install the processing table 30 on the heat treatment furnace body 10, it is necessary to accurately process the heat treatment furnace body 10 in the direction of rotation. Station 30 performs positioning. Therefore, in the heat treatment furnace main body 10 of this embodiment, when the rotation of the processing table 30 is stopped, the processing table 30 is stopped at a preset position (position in the rotation direction). Thereby, the work of attaching the processing table 30 to the heat treatment furnace main body 10 can be easily performed. Hereinafter, the processing table 30, the conveyance cart 70, and the heat treatment furnace main body 10 are demonstrated in detail.

First, the processing table 30 will be described. As shown in FIGS. 6 to 9 , the processing table 30 includes: a main hearth 34 ; and four auxiliary hearths 36 provided on the main hearth 34 . The main hearth 34 has a small-diameter portion 33 located at an upper end, and a large-diameter portion 32 located below the small-diameter portion 33 . The small-diameter portion 33 and the large-diameter portion 32 have a disk-shaped outer shape, and are integrated so that their central axes are on the same straight line. At the center of the lower surface of the large-diameter portion 32, a concave portion 34a capable of engaging with the drive mechanism 20 of the heat treatment furnace main body 10 described later is formed. In addition, a stopper 38 is attached to the lower surface of the large-diameter portion 32 (see FIG. 6 and FIG. 7 ). The stopper 38 is configured such that its upper end is fixed near the outer peripheral edge of the large-diameter portion 32 , and its lower end extends downward from the lower surface of the large-diameter portion 32 . The position in the circumferential direction of the large-diameter portion 32 to which the stopper 38 is fixed serves as a reference position for controlling the rotation stop position of the processing table 30 . When the processing table 30 is installed in the heat treatment furnace main body 10, the central axis of the main hearth 34 (the small-diameter part 33 and the large-diameter part 32) (that is, passes through the center of the small-diameter part 33 and the large-diameter part 32 and runs along the upper and lower The line extending in the direction) is consistent with the axis of the main body 10 of the heat treatment furnace.

The sub-hearth 36 has a disc shape and is provided rotatably with respect to the main hearth 34 . Specifically, a through hole penetrating from the upper end surface (small diameter portion 33 ) to the lower end surface (large diameter portion 32 ) is formed in the main hearth 34 , and the sub hearth 36 is rotatably arranged in the through hole. . That is, each of the sub-hearths 36 is rotatable about its axis (ie, a line passing through the center of the sub-hearth 36 and extending in the vertical direction). In this embodiment, the four auxiliary hearths 36 are arranged at equal intervals in the circumferential direction (that is, the four auxiliary hearths 36 are arranged at intervals of 90° in the circumferential direction.). Each of the four sub-hearths 36 has an engagement surface 36a at its lower end that can engage with a drive mechanism 20 described later (see FIG. 8 and FIG. 9 ). The axes of the four sub-hearths 36 are respectively parallel to the axis of the main hearth 34 and are arranged equidistantly with respect to the axis of the main hearth 34 . The upper surface of the main hearth 34 is flush with the upper surface of the auxiliary hearth 36 , and the object W to be processed can be placed on the upper surface of the auxiliary hearth 36 .

The main hearth 34 and the sub hearth 36 are capable of changing and stopping the rotation direction and the rotation speed respectively. Since the object to be processed W is placed on the upper surface of the sub hearth 36 , the object to be processed W undergoes so-called revolution when the main hearth 34 rotates, and the object W undergoes so-called autorotation when the sub hearth 36 rotates. The rotation direction of each hearth 34, 36 can be set arbitrarily. For example, as shown in FIG. 5 , both the main hearth 34 and the auxiliary hearth 36 may rotate counterclockwise, and the main hearth 34 and the auxiliary hearth 36 may both rotate clockwise. Alternatively, the main hearth 34 may rotate clockwise and the sub hearth 36 may rotate counterclockwise, or the main hearth 34 may rotate counterclockwise and the sub hearth 36 may rotate clockwise. By properly controlling the rotation speed and rotation direction of the main hearth 34 and the sub-hearth 36 , the object W to be processed placed on the sub-hearth 36 can be uniformly heated.

It is clear from the above description that when the main hearth 34 rotates, the auxiliary hearth 36 also rotates (revolves) around the axis of the main hearth 34 correspondingly. Therefore, when the position at which the main hearth 34 stops rotating changes, the position at which the sub hearth 36 stops also changes. As described above, the recessed portion 34a is formed on the lower surface of the main hearth 34, and the engaging surface 36a is formed on the lower surface of the auxiliary hearth 36. connect. Therefore, if the position at which the main hearth 34 stops rotating is set to the same position, the position at which the auxiliary hearth 36 stops is always a constant position, so that the process table 30 can be connected to the drive mechanism 20 of the heat treatment furnace main body 10. Alignment made easy.

In addition, the said processing table 30 is conveyed by the conveyance cart 70 operated by an operator. As shown in FIG. 2 , the transport cart 70 includes an arm 72 that holds the processing table 30 . The arm 72 can be raised and lowered, and the processing table 30 held by the arm 72 is raised and lowered by raising and lowering the arm 72 . By raising and lowering the processing table 30 , the processing table 30 can be attached to and detached from the drive mechanism 20 of the heat treatment furnace main body 10 (details will be described later).

Next, the heat treatment furnace main body 10 will be described. As shown in FIGS. 2 to 5 , the heat treatment furnace main body 10 includes: a stand 16 ; and a furnace body 11 supported on the stand 16 . The stand 16 is installed at a predetermined position in the heat treatment area C. As shown in FIG. The furnace body 11 is supported by the stand 16 , thereby forming a space under the furnace body 11 for performing detachment work of the processing table 30 .

The furnace body 11 is made of a refractory material and includes a cylindrical side wall 14 and a disk-shaped top wall 12 . The side wall 14 is configured such that its lower end is fixed to the stand 16 and its upper end extends to the top wall 12 . The top wall 12 abuts against the upper end of the side wall 14 and closes the opening at the upper end of the side wall 14 . An unillustrated exhaust port is formed at the center of the ceiling wall 12 .

The furnace body 11 further includes a lift bed 18 . The lift bed 18 is formed in a rectangular box shape in plan view, and a drive device ( 20 , 22 ) for rotationally driving the processing table 30 is accommodated therein. The driving device ( 20 , 22 ) includes a driving source 22 and a driving mechanism 20 . The drive source 22 is a general-purpose motor (ie, a motor without a servo function) for rotationally driving the processing table 30 . The driving force generated by the driving source 22 is transmitted to the processing table 30 (specifically, the main hearth 34 and the sub-hearth 36 respectively) via the driving mechanism 20 .

As shown in FIGS. 8 and 9 , the drive mechanism 20 includes a first connecting portion 46 connected to the recess 34 a of the main hearth 34 , and a second connecting portion 44 connected to the lower surface of the sub hearth 36 . The rotational driving force of the drive source 22 is transmitted to the first connection portion 46 via a transmission member (chain or the like) not shown. A disc-shaped support plate 48 is fixed to the lower end of the first connection portion 46 . The support plate 48 contacts the lower surface of the main hearth 34 to support the main hearth 34 . The second drive shaft 42 is fixed to the lower surface of the second connection portion 44 . The second drive shaft 42 passes through a not-shown through hole of the support plate 48 , and the rotational driving force of the drive source 22 is transmitted to the lower end thereof via a not-shown transmission member (chain or the like). The rotational driving force of the driving source 22 is transmitted to the first connection part 46 and the second connection part 44 respectively, thereby causing the main hearth 34 to rotate (autorotate), and the sub-hearth 36 to rotate and revolve accordingly.

The recessed portion 34a of the processing table 30 (main hearth 34) is connected to the first connecting portion 46, and the engaging surface 36a of the processing table 30 (sub-hearth 36) is connected to the second connecting portion 44, whereby the processing table 30 is attached to the drive mechanism 20. Thereby, the processing table 30 is placed on the upper surface of the support plate 48 of the driving mechanism 20 , and the processing table 30 is supported by the driving mechanism 20 . If the processing table 30 is attached to the drive mechanism 20, the processing table 30 is supported above the lift bed 18 as shown in FIGS. 2 to 4 . Here, the position of the lift bed 18 near the lower end of the furnace body 11 (an example of the second position described in the scope of the patent application) and the position near the floor (patent application) can be adjusted by the lifting device 24 provided on the platform 16 . range described in the first position for an example) between lifts. When the lift bed 18 is positioned near the floor, the lower end of the side wall 14 is opened, and the processing table 30 can be detached from the drive mechanism 20 (the state shown in FIG. 3 ).

In addition, if the lifting bed 18 is positioned near the lower end of the furnace body 11 in the state where the drive mechanism 20 is equipped with the processing table 30, the processing table 30 will close the lower end opening of the side wall 14 (the state shown in FIG. ). When the processing table 30 closes the lower end opening of the side wall 14 , the processing table 30 and the furnace body 11 form a furnace space 26 for heat-treating the object W to be processed. As shown in FIGS. 4 and 5, in the furnace space 26, the upper surface of the main hearth 34 and the upper surface of the auxiliary hearth 36 are exposed, and the processed object W placed on the upper surface of the auxiliary hearth 36 It is accommodated in the space 26 in the furnace. It should be noted that a heater 50 (shown in FIG. 10 ) and a gas supply device 52 (shown in FIG. 10 ), not shown, are disposed in the furnace space 26 . The object W to be processed is heated by the heater 50 , and the atmosphere of the furnace space 26 is controlled by the gas supply device 52 .

It should be noted that, as shown in FIGS. 6 and 7 , the lift bed 18 is provided with a position sensor 40 for detecting the stopper 38 attached to the processing table 30 . The detection signal output from the position sensor 40 is ON when it faces the stopper 38 , and turns OFF when it is not facing the stopper 38 . As shown in FIG. 7, the stopper 38 is a plate with a certain width. Therefore, when the main hearth 34 is in a preset angle range, the detection signal output from the position sensor 40 is ON.

As shown in FIG. 10 , the heat treatment furnace main body 10 further includes a control unit 54 . The control unit 54 is constituted by, for example, a computer including a CPU, ROM, and RAM. The control unit 54 is connected to the production management device 60 and the position sensor 40 , and receives an instruction from the production management device 60 and a detection signal from the position sensor 40 . The control unit 54 controls the operation of each part of the heat treatment furnace main body 10 based on the input instructions and detection signals. That is, the control unit 54 controls the elevating device 24 to elevate the elevating bed 18, controls the drive devices (20, 22) to control the rotation of the processing table 30, and controls the heater 50 and the gas supply device 52 to control the furnace. The internal temperature and furnace environment are controlled. In this embodiment, the operation (stop processing) of the control unit 54 when the rotation of the processing table 30 is stopped is characteristic, and other than that, it is the same as the conventional art. Therefore, only the stop processing when the rotation of the processing table 30 is stopped will be described in detail.

FIG. 11 shows an example of the stop processing performed by the control unit 54 when the rotation of the processing table 30 is stopped. As shown in FIG. 11, the control unit 54 first monitors whether a stop signal from the production management device 60 is received (S10). That is, the production management device 60 of this embodiment controls the heat treatment of the workpiece W in each heat treatment furnace main body 10, and when the desired heat treatment is completed in each heat treatment furnace main body 10, the heat treatment furnace main body 10 is output to the heat treatment furnace main body 10. Stop signal for stopping heat treatment. The control unit 54 first monitors whether a stop signal from the production management device 60 is received in S10. When the stop signal is not received (NO in S10 ), the control unit 54 continues to drive the drive devices ( 20 , 22 ) to rotate the processing table 30 at the speed V1 in the normal direction. Note that the speed V1 is the rotational speed of the processing table 30 when the object W is heat-treated, and is set to a speed corresponding to the heat treatment of the object W to be processed. Therefore, the speed V1 is appropriately set according to the type of heat treatment performed on the object W to be processed, and the like.

When the stop signal is received (YES in S10 ), next, the control unit 54 monitors whether the detection signal output from the position sensor 40 is ON ( S12 ). As described above, in the present embodiment, when the stop signal is received, the processing table 30 rotates in the normal rotation direction at the speed V1 set for heat processing. Therefore, even if the rotation of the processing table 30 is stopped immediately after receiving the stop signal, since the speed V1 is appropriately set according to the type of heat treatment, etc., the position (angular position) at which the processing table 30 stops varies. In this embodiment, the rotation of the processing table 30 is not immediately stopped only by receiving the stop signal. First, the processing table 30 is continuously rotated to monitor whether the signal from the position sensor 40 is ON.

When the detection signal output from the position sensor 40 is ON (YES in S12 ), next, the control unit 54 monitors whether the detection signal output from the position sensor 40 is OFF ( S14 ). That is, the processing table 30 is continuously rotated in the normal rotation direction until the stopper 38 fixed to the lower surface of the processing table 30 is at a position where it does not face the position sensor 40 .

When the detection signal output from the position sensor 40 is OFF (YES in S14), the control unit 54 stops driving the driving device (20, 22) to stop the rotation of the processing table 30 in the forward direction (S16 ). Next, the control unit 54 drives the driving device ( 20 , 22 ) in the opposite direction to the previous one, and rotates the processing table 30 at the speed V2 in the reverse direction ( S18 ). Here, the speed V2 is a constant value regardless of the heat treatment, and is set to a value smaller than the speed V1 in order to improve the stopping accuracy of the processing table 30 .

Next, the control part 54 monitors whether the detection signal output from the position sensor 40 is ON (S20). When the detection signal output from the position sensor 40 is OFF (NO in S20 ), the control unit 54 continues to drive the driving device ( 20 , 22 ) to rotate the processing table 30 at the speed V2 in the reverse direction. On the other hand, when the detection signal output from the position sensor 40 is ON (YES in S20), the control unit 54 stops the driving of the driving device (20, 22), thereby causing the reverse direction of the processing table 30 The rotation of the stop (S22).

FIG. 12 is a timing chart showing the state of the stop signal, the state of the drive devices ( 20 , 22 ), and the state of the detection signal from the position sensor 40 when the control unit 54 executes the above-mentioned stop process. As shown in FIG. 12 , the driving device ( 20 , 22 ) rotates the processing table 30 at a speed V1 in the normal rotation direction. In this state, even if a stop signal is output from the production management device 60, the drive devices (20, 22) rotate the processing table 30 at the speed V1 in the normal rotation direction. Then, when the detection signal from the position sensor 40 turns ON and then turns OFF again, the drive devices ( 20 , 22 ) stop the rotation of the processing table 30 in the normal rotation direction. Next, the driving device (20, 22) rotates the processing table 30 in the reverse direction at a speed of V2 (<V1), and when the detection signal from the position sensor 40 turns ON, the processing table 30 reverses. The rotation in the turn direction stops. Since the processing table 30 is stopped from rotating at a constant and low rotation speed V2 regardless of the heat treatment, the processing table 30 can stop at a preset position (angular position) with high precision. It should be noted that the use of a servo motor for the drive source 22 can also improve the stop position accuracy of the processing table 30. However, by performing the stop process of this embodiment, even if a general-purpose motor without a servo function is used for the drive source 22, The stop position accuracy of the processing table 30 can be improved.

The heat treatment furnace system 100 of this embodiment includes: a plurality of heat treatment furnace bodies 10 ; and a plurality of processing stations 30 shared by the plurality of heat treatment furnace bodies 10 . Therefore, the plurality of heat treatment furnace main bodies 10 can be operated efficiently, and the heat treatment of the object W to be processed can be performed efficiently. In addition, although the work of attaching the processing table 30 to the heat treatment furnace main body 10 is required, the position at which the processing table 30 stops rotating is controlled to a preset position as described above. In particular, the rotation speed of the processing table 30 when the processing table 30 stops rotating is not the rotation speed V1 during heat treatment, but a rotation speed V2 that is lower than the rotation speed V1 and is constant. Thereby, the processing table 30 can stop at the set position with good precision. Therefore, the work of attaching the processing table 30 to the heat treatment furnace main body 10 can be facilitated. For example, it is only necessary to hold the processing table 30 in a preset positional relationship with respect to the transport cart 70, and it is possible to place the transport cart 70 with respect to the drive mechanism 20 only by positioning the transport cart 70 in a predetermined positional relationship with respect to the heat treatment furnace main body 10. The processing table 30 is positioned in a positional relationship where it can be connected. As a result, the work of attaching the processing table 30 to the heat treatment furnace main body 10 can be facilitated.

It should be noted that, in the above-mentioned embodiment, the operator operates the transport cart 70, and the operator connects the processing table 30 to the drive mechanism 20 of the heat treatment furnace main body 10. However, the technology disclosed in this specification is not limited to such a method. plan. For example, the transport trolley can be automated so that the transport trolley autonomously connects the processing station 30 to the drive mechanism 20 . In particular, if the technique disclosed in this specification is used, when the rotation of the processing table 30 stops, the processing table 30 stops at a predetermined position (angular position). Therefore, only by holding the processing table 30 in a preset positional relationship with respect to the transport cart 70 and positioning the transport cart 70 in a predetermined positional relationship with respect to the heat treatment furnace main body 10, it is possible to place the processing table 30 with respect to the drive mechanism 20. The processing station 30 is positioned in place. Thereby, it is possible to automate the transport trolley and to save manpower in the heat treatment furnace system.

(Example 2) Next, a heat treatment furnace system according to Example 2 will be described. The heat treatment furnace system of Example 2 differs from Example 1 only in the stop process performed by the control unit when the rotation of the processing table is stopped, and has the same configuration as the heat treatment furnace system 100 of Example 1 in other respects. Hereinafter, only the stop processing performed by the control unit in the second embodiment will be described. It should be noted that the same reference numerals will be used for the same configuration as that of the first embodiment.

FIG. 13 shows the procedure of the stop processing performed by the control unit 54 when the rotation of the processing table 30 is stopped. As shown in FIG. 13, the control unit 54 first monitors whether a stop signal is received from the production management device 60 (S24). When the stop signal is not received (NO in S24 ), the control unit 54 continues to drive the drive devices ( 20 , 22 ), so that the processing table 30 rotates at the speed V1 in the forward direction. On the other hand, when the stop signal is received (YES in S24), the control unit 54 monitors whether the detection signal output from the position sensor 40 is ON (S26). Then, when the detection signal output from the position sensor 40 is ON (YES in S26), the control unit 54 immediately stops the driving devices (20, 22) to stop the rotation of the processing table 30 (S28). Therefore, when the rotation of the processing table 30 is stopped in S28, the detection signal output from the position sensor 40 is still ON.

Next, the control unit 54 drives the driving device (20, 22) in the reverse direction, so that the processing table 30 rotates at the speed V1 in the reverse direction (S30). Then, the control part 54 monitors whether the detection signal output from the position sensor 40 is OFF (S32). That is, at the time of S30, the detection signal output from the position sensor 40 is ON. Therefore, in S32, it is monitored whether the detection signal output from the position sensor 40 changes from ON to OFF.

When the detection signal output from the position sensor 40 is OFF (YES in S32), the control unit 54 immediately stops the driving in the reverse direction of the driving device (20, 22), so that the rotation of the processing table 30 in the reverse direction stop (S34). Next, the control unit 54 drives the driving device ( 20 , 22 ) in the normal direction, so that the processing table 30 rotates at the speed V2 in the normal direction ( S36 ). The speed V2 is a constant value regardless of the type of heat treatment, etc., and is set to a value lower than the speed V1.

Next, the control part 54 monitors whether the detection signal output from the position sensor 40 is ON (S38). Then, when the detection signal output from the position sensor 40 is ON (YES in S38), the control unit 54 stops the driving of the driving device (20, 22) in the forward direction, so that the forward rotation direction of the processing table 30 The rotation is stopped (S40).

FIG. 14 is a timing chart showing the state of the stop signal, the state of the drive devices ( 20 , 22 ), and the state of the detection signal from the position sensor 40 when the control unit 54 executes the above-mentioned stop processing. As shown in FIG. 14 , the driving device ( 20 , 22 ) rotates the processing table 30 at a speed V1 in the normal rotation direction. In this state, even if a stop signal is output from the production management device 60 , the drive devices ( 20 , 22 ) rotate the processing table 30 at the speed V1 in the normal rotation direction. Then, when the detection signal from the position sensor 40 is turned ON, the rotation of the processing table 30 in the normal rotation direction is stopped. At this time, the detection signal from the position sensor 40 is still ON. Next, the driving device (20, 22) rotates the processing table 30 in the reverse direction at a speed V1, and when the detection signal from the position sensor 40 is turned OFF, the processing table 30 rotates in the reverse direction. stop. Next, the processing table 30 rotates in the normal rotation direction at a speed V2 lower than the speed V1, and when the detection signal from the position sensor 40 is turned ON, the processing table 30 stops the rotation in the normal rotation direction.

Also in the heat treatment furnace system of Example 2, the rotation of the processing table 30 is stopped from the state where the processing table 30 is rotating at a constant speed V2 regardless of the type of heat treatment or the like. In addition, the rotational speed V2 of the processing table 30 is set to a value smaller than the rotational speed V1 during heat treatment. Therefore, the processing table 30 can be stopped at a preset position (angular position) with good precision. Thereby, the work of attaching the processing table 30 to the heat treatment furnace main body 10 can be facilitated.

Specific examples of the technology disclosed in this specification have been described in detail above, but these are merely examples and do not limit the scope of claims. The technologies described in the claims include various modifications and changes to the specific examples illustrated above. In addition, the technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing.

100: Heat treatment furnace system

A: Loading area

B: unloading area

W: processed object

10: Heat treatment furnace

11: furnace body

12: top wall

14: side wall

16: Stand

18:Lifting bed

20: Driving mechanism

22: Drive source

24: Lifting device

26: Space in the furnace

28: opening

30: Processing table

32: Large diameter part

33: Small diameter department

34: Main hearth

34a: concave part

36: auxiliary hearth

36a: snap surface

38: stop file

40: Position sensor

42: Second drive shaft

44: Second link

46: The first link

48: support plate

50: heater

52: Gas supply device

54: Control Department

60: Production management device

70: Conveyor trolley

72: arm

C: heat treatment area

FIG. 1 is a schematic diagram showing a schematic configuration of a heat treatment furnace system according to Example 1. FIG. Fig. 2 is a schematic diagram showing a batch-type heat treatment furnace body according to Example 1, a processing table installed detachably from the heat treatment furnace body, and a transport cart for transporting the processing table. Fig. 3 is a cross-sectional view showing a state in which a processing table is installed in the heat treatment furnace main body (a state in which the lifting bed is lowered). Fig. 4 is a cross-sectional view showing a state in which a processing table is installed in the heat treatment furnace main body (a state in which the lift bed is raised). Fig. 5 is a cross-sectional view of a heat treatment furnace main body provided with a processing table (V-V cross-sectional view in Fig. 4 ). Fig. 6 is a side view showing a state in which a processing table is installed on the lift bed (illustration of the driving device ( 20 , 22 ) is omitted). Fig. 7 is a plan view showing a state where a processing table is installed on the lift bed (a view of the processing table and the lift bed viewed from above in Fig. 6 ). Fig. 8 is a schematic diagram showing a schematic configuration of a connecting portion connecting the processing table and the driving mechanism (a diagram showing a state where the processing table and the driving mechanism are not connected). Fig. 9 is a schematic diagram showing a schematic configuration of a connecting portion connecting the processing table and the driving mechanism (a diagram showing a state in which the processing table and the driving mechanism are connected). Fig. 10 is a block diagram showing the configuration of the control system of the heat treatment furnace body according to the first embodiment. Fig. 11 is a flowchart showing the procedure of stop processing performed by the control unit when the rotation of the processing table is stopped in the heat treatment furnace main body according to the first embodiment. FIG. 12 is a timing chart for explaining the relationship between the drive state of the drive device and the signal output from the position sensor when a stop signal is received from the production control device in the heat treatment furnace body according to the first embodiment. Fig. 13 is a flowchart showing the procedure of stop processing performed by the control unit when the rotation of the processing table is stopped in the heat treatment furnace main body according to the second embodiment. FIG. 14 is a timing chart for explaining the relationship between the drive state of the drive device and the signal output from the position sensor when a stop signal is received from the production control device in the main body of the heat treatment furnace according to the second embodiment.

Claims (5)

A batch heat treatment furnace, including: Furnace body, including top wall, side wall and lift bed; The processing table is configured to be able to rotate relative to the lift bed, and to be able to place the objects to be processed; The driving device is arranged on the lifting bed, and is connected to the processing table in a detachable manner, and rotates and drives the processing table; a position sensor for detecting the position of the processing table relative to the rotation direction of the lift bed; and a control device for controlling the driving device based on a detection result of the position sensor, The processing station includes: The first rotating table is configured to have a circular shape in plan view, and can rotate around a first axis passing through its center and extending in an up-down direction; and at least one second turntable configured to be arranged inside the first turntable in a plan view, and to be able to rotate around a second axis passing through its center and extending in an up-down direction, When viewed from above, the position of the center of the second turntable is different from the position of the center of the first turntable, the lift bed is movable between a first position in which the lower ends of the side walls are open and a second position in which the lower ends of the side walls are closed, When the lift bed is at the first position, the processing table can be disassembled relative to the driving device, When the lift bed is located at the second position in the state that the processing table is connected to the driving device, the upper surface of the first rotary table and the upper surface of the second rotary table are in the furnace body exposed, The drive unit includes: a first drive part, configured on the first axis, to drive the first rotary table to rotate; and a second driving part is arranged on the second axis and drives the second rotary table to rotate, The position sensor outputs a detection signal when the first rotary table is within a preset angle range relative to the lift bed, The control device is composed of: When the rotation of the first turntable is stopped from a state where the first turntable is rotating in a first rotation direction at a first speed, (1) When the detection signal is output from the position sensor, the first turntable further rotates in the first rotation direction in the state where the detection signal is output, and when the output detection signal stops , causing the first rotary table to stop; (2) After the above (1), the first rotating table is rotated in a direction opposite to the first rotating direction, that is, in a second rotating direction at a speed lower than the first speed, that is, a second speed. rotate; (3) Stop the first rotary table when the detection signal is output from the position sensor in the state of (2). A batch heat treatment furnace, including: Furnace body, including top wall, side wall and lift bed; The processing table is configured to be able to rotate relative to the lift bed, and to be able to place the objects to be processed; The driving device is arranged on the lifting bed, and is connected to the processing table in a detachable manner, and rotates and drives the processing table; a position sensor for detecting the position of the processing table relative to the rotation direction of the lift bed; and a control device for controlling the driving device based on a detection result of the position sensor, The processing station includes: The first rotating table is configured to have a circular shape in plan view, and can rotate around a first axis passing through its center and extending in an up-down direction; and at least one second turntable configured to be arranged inside the first turntable in a plan view, and to be able to rotate around a second axis passing through its center and extending in an up-down direction, When viewed from above, the position of the center of the second turntable is different from the position of the center of the first turntable, the lift bed is movable between a first position in which the lower ends of the side walls are open and a second position in which the lower ends of the side walls are closed, When the lift bed is at the first position, the processing table can be disassembled relative to the driving device, When the lift bed is located at the second position in the state that the processing table is connected to the driving device, the upper surface of the first rotary table and the upper surface of the second rotary table are in the furnace body exposed, The drive unit includes: a first drive part, configured on the first axis, to drive the first rotary table to rotate; and a second driving part is arranged on the second axis and drives the second rotary table to rotate, The position sensor outputs a detection signal when the first rotary table is within a preset angle range relative to the lift bed, The control device is composed of: When the rotation of the first turntable is stopped from a state where the first turntable is rotating in a first rotation direction at a first speed, (1) Stopping the first turntable within the set angle range when the detection signal is output from the position sensor; (2) After (1), rotating the first rotating table in a direction opposite to the first rotating direction, that is, rotating in a second rotating direction; (3) Stopping the first rotary table when the detection signal output from the position sensor stops in the state of (2); (4) After (3), rotating the first rotary table along the first rotation direction at a speed lower than the first speed, that is, a second speed; (5) Stop the first rotary table when the detection signal is output from the position sensor in the state of (4). The batch heat treatment furnace as described in Claim 1 or 2, wherein, The processing table includes a plurality of the second rotary table, When viewed from above, the plurality of second turntables are arranged at different positions of the first turntable without interfering with each other. A heat treatment furnace system, including: a plurality of batch heat treatment furnace bodies; and At least one processing station as described in Claim 1 or 2 can be disassembled and assembled respectively with respect to the main bodies of a plurality of said batch heat treatment furnaces, The main bodies of the multiple batch heat treatment furnaces respectively include the furnace body, the driving device, the position sensor and the control device as described in Claim 1 or 2. The heat treatment furnace system as claimed in item 4, wherein, It further includes: a conveyance trolley for conveying the processing stations to the plurality of batch heat treatment furnace bodies respectively.

Images