TWI802286B - Laminating device calibration method and laminating equipment - Google Patents

Abstract

The present invention provides a bonding device calibration method and bonding equipment, comprising: providing a bonding device, provided with a bonding head; providing a calibration device, provided with a distance sensor; making the distance sensor Different positions of the head are measured to obtain a plurality of measurement values, and the horizontal angle of the abutting head is adjusted according to the measurement values; thereby, the lamination device can be horizontally calibrated.

Description

Laminating device calibration method and laminating equipment

The invention relates to a bonding device calibration method and bonding equipment, in particular to a bonding device calibration method and bonding equipment for calibrating a bonding device for bonding a heat dissipation rubber pad to an object to be pasted.

Patent No. I716906 "Laminating Method and Equipment for Heat Dissipating Rubber Pads" has disclosed a laminating equipment, which is provided with a sticking head on a laminating device, and the sticking head is driven to roll indirectly with its rod-shaped wheel body. Through the way that an envelope of a heat dissipation rubber pad adhered to the lower surface contacts the heat dissipation rubber pad, and the other side shifting roller is displaced from the heat dissipation rubber pad relative to an object to be pasted, so that the heat dissipation rubber pad is attached to the pasted object things.

In the pasting device of the prior art, in the process of pasting the heat-dissipating rubber pad roller on the pasted object through the pasting head, because the pasted object is usually placed horizontally on the carrier tray, the pasting device's The sticking head also needs to be set horizontally so that the sticking device can apply force evenly on the object to be stuck when the sticking operation is in progress. Therefore, how to correct the level of the sticking device is an issue to be solved.

Therefore, the object of the present invention is to provide a bonding device calibration method that can perform horizontal calibration on the bonding device.

Another object of the present invention is to provide a bonding equipment for performing the calibration method of the bonding device.

Another object of the present invention is to provide a laminating equipment capable of leveling the laminating device.

According to the bonding device calibration method of the object of the present invention, comprising: providing a bonding device, is provided with a sticking head; Provides a calibration device, is provided with a distance sensor; The position is measured to obtain a plurality of measured values, and the horizontal angle of the abutting head is adjusted according to the measured values.

According to another object of the present invention, the bonding equipment is used to implement the calibration method of the bonding device.

According to the bonding equipment of another object of the present invention, it is provided with: a bonding device, which is provided with a sticking head; a calibration device, which is provided with a distance sensor; the distance sensor can be used for different positions of the sticking head Take measurements.

The bonding device calibration method and bonding equipment of the embodiment of the present invention can correct the level of the bonding head of the bonding device, which is beneficial to the subsequent bonding operation.

A: machine

B: delivery flow path

B1: The first rail frame

B11: Fixture

B111: Adsorption seat

B12: side frame

B13: belt

B14: track

B2: second rail frame

C: Conversion flow path

C1: movable rail frame

C11: side frame

C12: belt

C13: track

C2: Driver

D: transfer device

D1: Gantry rail frame

D11: column

D12: Beam

D13: Driver

D2: suspension beam

D21: Driver

D3: Operating seat

E: Fitting device

E1: Fixed plate

E2: rail seat

E3: Fitting mechanism

E31: stick to the head

E32: Adjustment seat

E321: Pivot Department

E322: concave groove

E323: First through hole

E324: Second through hole

E325: Adjustment hole

E33: Mounting seat

E331: The first fixing hole

E332: Second fixing hole

E34: shaft

E341: Third through hole

E35: link

E36: Adjustment parts

E4: Upward Inspection Organization

E41: Upper image finder

E5: drive mechanism

E51: Driver

E52: pin wheel

E6: material pulley

E61: Driver

E7: The first reel

E71: Driver

E8: Second reel

E81: Driver

F: Calibration device

F1: ranging mechanism

F11: distance sensor

F2: Down view organization

F21: Lower image finder

F22: Ring Light

F23: Alignment platform

F231: Translucent film

F232: Alignment mark

L: Straight line

T: tray

T1: hollow interval

W: Sticker

W1: Substrate

W2: grain

S: cooling pad

K: Tape

K1: first envelope

K2: second envelope

K21: pinhole

K3: material roll

K31: shaft hole

K32: Sleeve

Fig. 1 is a three-dimensional schematic view of laminating equipment in an embodiment of the present invention.

Fig. 2 is a three-dimensional schematic diagram of the object to be stuck in the embodiment of the present invention.

Fig. 3 is a schematic diagram of a thermal pad covered with an object in the embodiment of the present invention.

Fig. 4 is a three-dimensional schematic view of the material tape in the embodiment of the present invention.

Fig. 5 is a schematic front view of the bonding device in the embodiment of the present invention.

Fig. 6 is a three-dimensional exploded schematic diagram of the adjustment seat, the installation seat, and the shaft rod in the embodiment of the present invention.

Fig. 7 is a schematic diagram of the positional relationship between the adjustment seat, the mounting seat, the shaft and the abutment head in the embodiment of the present invention.

Fig. 8 is a three-dimensional schematic view of the calibration device in the embodiment of the present invention.

FIG. 9 is a schematic diagram of a distance sensor measuring one end of an abutment head in an embodiment of the present invention.

Fig. 10 is a schematic diagram of the measurement of the distance sensor to the other end of the abutment head in the embodiment of the present invention.

Please refer to Fig. 1, the laminating device calibration method of the embodiment of the present invention can be explained by taking the laminating equipment as shown in the figure as an example. Consists of a rail frame B1 and a second rail frame B2; the first rail frame B1 is provided with a jig B11, and the jig B11 is provided with a plurality of adsorption seats B111 arranged in a matrix in the shape of rectangular protrusions, each adsorption Seats B111 each provide negative pressure suction; the first rail frame B1 is provided with a track B14 formed by two side frames B12 spaced apart and two belts B13 respectively placed on the opposite inner sides of the two side frames B12 , the belt B13 can be driven so that a rectangular tray T is transported in the X-axis direction in the track B14 or positioned above the jig B11; the tray T is provided with a plurality of hollowed-out intervals T1 arranged in a matrix, An object W can be positioned above each of the hollowed-out sections T1, and the jig B11 can be moved up and down so that the adsorption seat B111 can absorb the attached object W through the hollowed-out section T1 for upward or downward operation. The second rail frame B2 is symmetrical to the first rail frame B1 and has the same structure, which will not be repeated here; a conversion flow path C is located at one end of the delivery flow path B, and the conversion flow path C is set There is a movable rail frame C1 and a driving part C2, and the movable rail frame C1 can be driven by the driving part C2 for Y-axis displacement and selectively connected in series with the first rail frame B1 or the second rail frame B2; the movable rail The frame C1 is provided with a track C13 formed by two spaced side frames C11 and two belts C12 respectively abutting on the opposite inner sides of the two side frames C11. The belts C12 can be driven to make the tray T The track C13 is used for X-axis displacement transfer; a transfer device D is provided with two gantry rail frames D1 respectively arranged on both sides of the conveying flow path B at intervals, each gantry rail frame D1 includes a Two uprights D11 in the Z-axis on both sides of the flow path C, and a crossbeam D12 horizontally placed on the top of the upright D11 in the X-axis. A driving part D13; the two beams D12 of the two gantry rail frames D1 are jointly straddled on a suspension beam D2 in the Y-axis, and the two ends of the suspension beam D2 are driven by the drive The moving part D13 can be driven by the X-axis displacement. The suspension beam D2 is provided with a driving part D21 in the Y-axis such as the line code. An operating seat D3 is arranged on the suspension beam D2 and can be moved by the driving part D21. Driven for Y-axis displacement; a laminating device E, located above the conveying flow path B, and located on the operating seat D3 of the transfer device D, which can be driven for X, Y-axis displacement; a correction device F, located in the conveying flow path B, and located between the first rail B1 and the second rail B2, the laminating device E can be driven to move above the correction device F and pass through the correction device F Preset corrections.

Please refer to Fig. 2, 3, the embodiment of the present invention uses the object shown in the figure to have adhered a crystal grain W2 on a substrate W1 as the object W; A thermal pad S is pasted on the top of the die W2.

Please refer to Fig. 4, the heat dissipation rubber pad S is covered by the strip-shaped first coating K1 and the second coating K2 to form a strip K, and a plurality of the heat dissipation rubber pads S are sequentially and continuously spaced Arranged, the upper and lower sides of each heat dissipation pad S are viscous and adhere to the inner layer of the first envelope K1 and the second envelope K2 respectively, wherein each of the two sides of the second envelope K2 has a A plurality of pinholes K21 are arranged continuously at equal intervals, and there is a distance between the two rows of pinholes K21, the distance is greater than the length of the heat dissipation pad S and the heat dissipation pad S is glued therein, and the material tape K can be rolled A ring-shaped material roll K3 is formed on the outer diameter of a sleeve K32 provided with a shaft hole K31.

Please refer to Figures 1 and 5, a rail seat E2 in the Z-axis is provided between a fixed plate E1 of the bonding device E and the operating seat D3 of the transfer device D, so that the bonding device E can be relatively The operating seat D3 is displaced in the Z axial direction; the fitting device E is provided with: a fitting mechanism E3, which is provided with a sticking head E31, which can stick the heat dissipation rubber pad S on the material belt K as shown in Figure 4. Above the object W in Figure 3; An upper inspection mechanism E4 is arranged on one side of the bonding mechanism E3. The upper inspection mechanism E4 is provided with an upper image picker E41 that takes images from top to bottom in the Z-axis direction, and can inspect the upper surface of the tray T. The azimuth of the object W to be pasted is convenient for the follow-up alignment; a driving mechanism E5 is located on the other side of the pasting mechanism E3 relative to the upper inspection mechanism E4; E1 rear side figure not shown belt drives a pin wheel E52 to the second coating K2 of this material band K as shown in Fig. 4 is carried out tractive driving; A material pulley E6 is located at the top of this laminating mechanism E3, and is subjected to A driving member E61 on the rear side of the fixed plate E1 is driven to rotate, and the material pulley E6 can be nested in the material roll K as shown in Figure 4; a first roll E7 is located on the bonding mechanism E3 opposite to the The other side of the upper inspection mechanism E4 is located above the drive mechanism E5, which can be driven by a drive member E71 on the rear side of the fixed plate E1 to rotate to roll up the first coating of the material tape K as shown in Figure 4 K1; a second reel E8, located on the other side of the bonding mechanism E3 relative to the upper inspection mechanism E4, and between the top of the driving mechanism E5 and the bottom of the first reel E7, which can be fixed by the A driving member E81 on the rear side of the plate E1 is driven to rotate to take up the second wrapping film K2 of the strip K as shown in FIG. 4 .

Please refer to Fig. 6, the sticking head E31 is composed of a rod-shaped wheel with the central axis in the X axial direction and is arranged on an adjustment seat E32. An installation seat E33 is arranged above the adjustment seat E32, and the adjustment seat E32 A shaft E34 is sandwiched between the mounting seat E33, the adjusting seat E32 can swing relative to the mounting seat E33 with the shaft E34 as a fulcrum, and the central axis of the abutting head E31 is aligned with the central axis of the shaft E34. Vertical; the adjustment seat E32 is provided with two pivoting parts E321 protruding downward from both ends for the two ends of the abutment head E31 to pivot; the upper end of the adjustment seat E32 is provided with a groove E322 for the shaft The central axis of E34 is arranged in the Y-axis direction, and is provided with two first through holes E323 passing through the groove E322 in the Z-axis direction; the other end of the adjustment seat E32 is provided with two second through-holes E323 in the Z-axis direction Hole E324 and two adjustment holes E325 with threads in the Z axis; One end of the mounting seat E33 is provided with two first fixing holes E331 threaded in the Z direction corresponding to the first through hole E323, and the other end of the mounting seat E33 is provided with a Z corresponding to the second through hole E324. There are two second fixing holes E332 threaded in the axial direction; the shaft E34 is provided with two third through holes E341 corresponding to the Z-axis of the first through hole E323.

Please refer to Figures 6 and 7, the adjustment base E32 and the installation base E33 are connected by four connecting parts E35 such as screws, and the connecting parts E35 pass through the first part of the adjusting base E32 from bottom to top. A through hole E323 and the second through hole E324, so that the upper end of the link E35 is fixed in the first fixing hole E331 and the second fixing hole E332 of the mounting seat E33, and the adjustment seat E32 can be provided The force approaching the mounting seat E33; wherein, because the shaft E34 is sandwiched between the adjusting seat E32 and the mounting seat E33, the connecting member E35 passes through the first passage of the adjusting seat E32 When opening the hole E323, the connecting piece E35 passes through the third through hole E341 of the shaft E34 at the same time; It is screwed in the adjustment hole E325 of the adjustment seat E32, and the other end of the adjustment member E36 extends upwards to abut against the bottom surface of the installation seat E33, so that the adjustment seat E32 can move away from the installation seat E33. The adjustment seat E32 uses the shaft E34 at one end as a fulcrum for swinging, and changes the distance between the other end of the adjustment seat E32 and the installation seat E33 by adjusting the displacement of the adjustment member E36 relative to the adjustment seat E32. The spacing between them is such that the adjustment seat E32 can swing relative to the installation seat E33 to adjust the horizontal angle of the abutting head E31.

Please refer to Fig. 8, the calibration device F is provided with a distance-measuring mechanism F1 and an inspection mechanism F2; In the embodiment of the present invention, the distance sensor F11 is a contact displacement gauge, but it is not limited thereto, and a non-contact displacement gauge can also measure the abutting head E31; The lower viewing mechanism F2 is provided with a lower image picker F21 that takes images from bottom to top on the Z axis, and can check the orientation of the heat dissipation rubber pad S on the material tape K as shown in Figure 4 for subsequent alignment; A ring-shaped light source F22 and an alignment platform F23 are arranged above the lower image taker F21, and a circular light-transmitting sheet F231 is provided on the alignment platform F23, and a cross-shaped alignment mark F232 is provided on it; The alignment platform F23 can selectively move in or out above the ring light source F22, so that the center of the alignment mark F232 corresponds to the center of the ring light source F22.

In the implementation of the bonding device calibration method of the embodiment of the present invention, the bonding device needs to move the bonding device E to the calibration point before executing the process of bonding the heat dissipation pad S to the object W. A preset calibration operation is performed above the device F, wherein the preset calibration operation includes level calibration or position calibration of the bonding head E31 before the material strip K is placed on the bonding device E.

The correction of the levelness of the affixing head E31 is to make the transfer device D drive the laminating device E to displace above the correction device F, and make different positions of the affixing head E31 touch the upper end of the distance sensor F11, so that The distance sensor F11 measures the different positions of the sticking head E31 to obtain a plurality of measured values, and adjusts the adjusting seat E32 to swing with the shaft E34 as a fulcrum according to the measured values to adjust the sticking The horizontal angle of the abutting head E31; wherein, referring to Fig. 9 and 10, the different positions are distributed in a plurality of positions on a straight line L parallel to the central axis of the rod-shaped wheel body of the affixing head E31, the straight line L is located at the bottom edge of the rod-shaped wheel body; the different positions are preferably the bottom edge of the abutment head E31 near one end of the shaft E34 and the bottom edge of the abutment head E31 away from the other end of the shaft E34; The measured value includes a first measured value measured at the bottom edge of the end of the sticking head E31 close to the shaft E34 and a bottom edge of the other end of the sticking head E31 away from the shaft E34. A second measured value measured; adjusting the horizontal angle of the sticking head E31 according to the measured value is to adjust the second measured value to be the same as the first measured value; as the first measured value The measured value is +5 mm, and the second measured value is +6 mm, which means that there is a height difference of +1 mm between the two ends of the affixing head E31, and the user can adjust the displacement of the adjusting part E36, Keep the adjustment seat E32 away from The other end of the shaft E34 swings upwards to adjust the bottom edges of the two ends of the abutting head E31 to be on the same horizontal line.

The position correction system of the sticking head E31 is to make the alignment platform F23 move into the top of the ring light source F22, and make the bonding device E move to the center of the upper image picker E41 corresponding to the alignment mark F232, so that the upper pick-up The imager E41 and the lower imager F21 inspect the center of the alignment mark F232 at the same time to obtain the relative positional relationship between the upper imager E41 and the lower imager F21; then, make the bonding device E Displace to the center of the sticking head E31 corresponding to the center of the alignment mark F232, to obtain the relative positional relationship between the lower image picker F21 and the sticking head E31, thereby calculating the upper image picker E41, the lower The relative positional relationship between the image pickup device F21 and the affixing head E31.

The bonding device calibration method and bonding equipment of the embodiment of the present invention can correct the level of the bonding head E31 of the bonding device E, which is beneficial to the subsequent bonding operation.

But the above-mentioned ones are only preferred embodiments of the present invention, and the scope of implementation of the present invention cannot be limited with this, that is, all simple equivalent changes and modifications made according to the patent scope of the present invention and the contents of the description of the invention, All still belong to the scope covered by the patent of the present invention.

E31: stick to the head

E32: Adjustment seat

E34: shaft

E36: Adjustment parts

L: Straight line

Claims (10)

A method for calibrating a bonding device, comprising: providing a bonding device, provided with a bonding head; providing a calibration device, provided with a distance sensor; the bonding device can be driven to move above the calibration device; making the distance The sensor measures different positions of the affixing head to obtain a plurality of measured values, and adjusts the horizontal angle of the affixed head according to the measured values. The method for calibrating the laminating device as described in Claim 1, wherein the abutting head is formed by a rod-shaped wheel body; the different positions are distributed on a straight line parallel to the central axis of the rod-shaped wheel body. The method for calibrating the laminating device according to claim 2, wherein the straight line is located at the bottom edge of the rod-shaped wheel body. The method for calibrating the laminating device as described in Claim 1, wherein, the affixing head is set on an adjustment seat, and a shaft is interposed between the adjustment seat and a mounting seat, and the adjustment seat can be used as a fulcrum of the shaft Swing to adjust the horizontal angle of the sticking head; the central axis of the sticking head is perpendicular to the central axis of the shaft. The method for calibrating the bonding device as described in claim 4, wherein one end of the adjustment seat is provided for the shaft rod, the other end of the adjustment seat is provided for an adjustment member, and one end of the adjustment member is screwed on the adjustment seat, and One end extends upwards and leans against the bottom surface of the mounting base, and the adjusting member can adjust the distance between the other end of the adjusting base and the mounting base so that the adjusting base can swing relative to the mounting base. The method for calibrating the laminating device according to claim 4, wherein the measured value includes a first measured value measured at the end of the abutting head close to the shaft and a first measured value measured at the end of the abutting head far away from the shaft A second measurement value measured at the other end of the rod; adjusting the horizontal angle of the abutting head according to the measurement value is to adjust the second measurement value to be the same as the first measurement value. The method for calibrating a laminating device as described in Claim 1, wherein different positions of the affixing head are pressed against the distance sensor to obtain the measurement value. A laminating equipment, used to execute the calibrating method of laminating device as described in any one of Claims 1 to 7. A laminating equipment is provided with: a laminating device with a sticking head; a calibration device with a distance sensor; and a transfer device that can drive the laminating device to be displaced above the calibrating device; the distance The sensor can measure different positions of the abutment head. The laminating equipment according to claim 9, wherein the laminating device, the calibrating device and the transferring device are arranged on a machine platform.

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