TWI801224B - 顯微觀察方法及顯微觀察裝置 - Google Patents

顯微觀察方法及顯微觀察裝置 Download PDF

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Publication number
TWI801224B
TWI801224B TW111116052A TW111116052A TWI801224B TW I801224 B TWI801224 B TW I801224B TW 111116052 A TW111116052 A TW 111116052A TW 111116052 A TW111116052 A TW 111116052A TW I801224 B TWI801224 B TW I801224B
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Taiwan
Prior art keywords
microscopic observation
observation device
observation method
microscopic
observation
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TW111116052A
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English (en)
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TW202343072A (zh
Inventor
張勝立
張啟伸
徐智誠
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財團法人工業技術研究院
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Publication of TW202343072A publication Critical patent/TW202343072A/zh

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TW111116052A 2022-04-27 2022-04-27 顯微觀察方法及顯微觀察裝置 TWI801224B (zh)

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102037348A (zh) * 2008-05-22 2011-04-27 独立行政法人产业技术综合研究所 检查缺陷的方法及缺陷检查装置
CN102540445A (zh) * 2010-12-06 2012-07-04 索尼公司 显微镜、区域判定方法和程序
CN104568886A (zh) * 2015-01-08 2015-04-29 中国科学院遗传与发育生物学研究所 一种基于全内反射的暗场照明方法
US9075235B2 (en) * 2012-10-01 2015-07-07 The Royal Institution For The Advancement Of Learning / Mcgill University Method and system for optical microscopy
US10267745B2 (en) * 2009-11-18 2019-04-23 Hitachi High-Technologies Corporation Defect detection method and defect detection device and defect observation device provided with same
CN110987817A (zh) * 2019-12-24 2020-04-10 华中科技大学 基于大数值孔径物镜整合暗场观察的椭偏仪及测量方法
TW202037901A (zh) * 2019-02-07 2020-10-16 美商奈米創尼克影像公司 螢光顯微鏡檢查系統、裝置及方法
CN111929886A (zh) * 2020-03-27 2020-11-13 肯维捷斯（武汉）科技有限公司 一种显微成像的暗场照明器
JP6793656B2 (ja) * 2015-03-13 2020-12-02 ジェネア アイピー ホールディングス ピーティーワイ リミテッド 顕微鏡検査のための方法および装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102037348A (zh) * 2008-05-22 2011-04-27 独立行政法人产业技术综合研究所 检查缺陷的方法及缺陷检查装置
US10267745B2 (en) * 2009-11-18 2019-04-23 Hitachi High-Technologies Corporation Defect detection method and defect detection device and defect observation device provided with same
CN102540445A (zh) * 2010-12-06 2012-07-04 索尼公司 显微镜、区域判定方法和程序
US9075235B2 (en) * 2012-10-01 2015-07-07 The Royal Institution For The Advancement Of Learning / Mcgill University Method and system for optical microscopy
CN104568886A (zh) * 2015-01-08 2015-04-29 中国科学院遗传与发育生物学研究所 一种基于全内反射的暗场照明方法
JP6793656B2 (ja) * 2015-03-13 2020-12-02 ジェネア アイピー ホールディングス ピーティーワイ リミテッド 顕微鏡検査のための方法および装置
TW202037901A (zh) * 2019-02-07 2020-10-16 美商奈米創尼克影像公司 螢光顯微鏡檢查系統、裝置及方法
CN110987817A (zh) * 2019-12-24 2020-04-10 华中科技大学 基于大数值孔径物镜整合暗场观察的椭偏仪及测量方法
CN111929886A (zh) * 2020-03-27 2020-11-13 肯维捷斯（武汉）科技有限公司 一种显微成像的暗场照明器

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