TWI801104B - 測量裝置 - Google Patents

測量裝置 Download PDF

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Publication number
TWI801104B
TWI801104B TW111102806A TW111102806A TWI801104B TW I801104 B TWI801104 B TW I801104B TW 111102806 A TW111102806 A TW 111102806A TW 111102806 A TW111102806 A TW 111102806A TW I801104 B TWI801104 B TW I801104B
Authority
TW
Taiwan
Prior art keywords
measuring device
measuring
Prior art date
Application number
TW111102806A
Other languages
English (en)
Other versions
TW202235815A (zh
Inventor
高嶋潤
荒川正行
加藤豊
早川雅之
Original Assignee
日商歐姆龍股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商歐姆龍股份有限公司 filed Critical 日商歐姆龍股份有限公司
Publication of TW202235815A publication Critical patent/TW202235815A/zh
Application granted granted Critical
Publication of TWI801104B publication Critical patent/TWI801104B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
TW111102806A 2021-03-01 2022-01-24 測量裝置 TWI801104B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-031410 2021-03-01
JP2021031410A JP2022132771A (ja) 2021-03-01 2021-03-01 計測装置

Publications (2)

Publication Number Publication Date
TW202235815A TW202235815A (zh) 2022-09-16
TWI801104B true TWI801104B (zh) 2023-05-01

Family

ID=83154953

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111102806A TWI801104B (zh) 2021-03-01 2022-01-24 測量裝置

Country Status (3)

Country Link
JP (1) JP2022132771A (zh)
TW (1) TWI801104B (zh)
WO (1) WO2022185753A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118348022A (zh) * 2023-12-27 2024-07-16 奈米科学仪器装备(杭州)有限公司 一种基于事件相机的芯片缺陷检测系统和方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201011266A (en) * 2008-06-06 2010-03-16 Konica Minolta Sensing Inc Light measuring apparatus, light measuring method and program
TWI333059B (zh) * 2007-04-24 2010-11-11 Univ Minghsin Sci & Tech
CN103983206A (zh) * 2014-05-12 2014-08-13 上海理工大学 基于可编程照明的干涉显微镜系统
TW201514443A (zh) * 2013-06-26 2015-04-16 賽格股份有限公司 使用相位移之干涉量測信號的同調掃描干涉量測方法
CN104755908A (zh) * 2012-07-27 2015-07-01 统雷有限公司 敏捷成像系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007033217A (ja) * 2005-07-26 2007-02-08 Keyence Corp 干渉計測装置及び干渉計測方法
JP2014228486A (ja) * 2013-05-24 2014-12-08 インスペック株式会社 三次元プロファイル取得装置、パターン検査装置及び三次元プロファイル取得方法
US11860034B2 (en) * 2020-05-08 2024-01-02 Raytheon BBN Technologies, Corp. Systems, devices, and methods for hyperspectral imaging

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI333059B (zh) * 2007-04-24 2010-11-11 Univ Minghsin Sci & Tech
TW201011266A (en) * 2008-06-06 2010-03-16 Konica Minolta Sensing Inc Light measuring apparatus, light measuring method and program
CN104755908A (zh) * 2012-07-27 2015-07-01 统雷有限公司 敏捷成像系统
TW201514443A (zh) * 2013-06-26 2015-04-16 賽格股份有限公司 使用相位移之干涉量測信號的同調掃描干涉量測方法
CN103983206A (zh) * 2014-05-12 2014-08-13 上海理工大学 基于可编程照明的干涉显微镜系统

Also Published As

Publication number Publication date
WO2022185753A1 (ja) 2022-09-09
JP2022132771A (ja) 2022-09-13
TW202235815A (zh) 2022-09-16

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