TWI800130B - 用於處理基板之密封構件及基板處理設備 - Google Patents

用於處理基板之密封構件及基板處理設備 Download PDF

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Publication number
TWI800130B
TWI800130B TW110144904A TW110144904A TWI800130B TW I800130 B TWI800130 B TW I800130B TW 110144904 A TW110144904 A TW 110144904A TW 110144904 A TW110144904 A TW 110144904A TW I800130 B TWI800130 B TW I800130B
Authority
TW
Taiwan
Prior art keywords
substrate
treating
sealing member
treating apparatus
substrate treating
Prior art date
Application number
TW110144904A
Other languages
English (en)
Other versions
TW202224070A (zh
Inventor
吳承勳
李相旼
李鍾斗
諸振模
李暎熏
Original Assignee
南韓商細美事有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 南韓商細美事有限公司 filed Critical 南韓商細美事有限公司
Publication of TW202224070A publication Critical patent/TW202224070A/zh
Application granted granted Critical
Publication of TWI800130B publication Critical patent/TWI800130B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0021—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by liquid gases or supercritical fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D99/00—Subject matter not provided for in other groups of this subclass
    • B29D99/0082—Producing articles in the form of closed loops, e.g. rings
    • B29D99/0085—Producing articles in the form of closed loops, e.g. rings for sealing purposes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW110144904A 2020-12-08 2021-12-01 用於處理基板之密封構件及基板處理設備 TWI800130B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020200169995A KR102662732B1 (ko) 2020-12-08 2020-12-08 실링 부재 및 기판 처리 장치
KR10-2020-0169995 2020-12-08

Publications (2)

Publication Number Publication Date
TW202224070A TW202224070A (zh) 2022-06-16
TWI800130B true TWI800130B (zh) 2023-04-21

Family

ID=81849136

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110144904A TWI800130B (zh) 2020-12-08 2021-12-01 用於處理基板之密封構件及基板處理設備

Country Status (5)

Country Link
US (1) US20220178446A1 (zh)
JP (1) JP7312231B2 (zh)
KR (1) KR102662732B1 (zh)
CN (1) CN114623234A (zh)
TW (1) TWI800130B (zh)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201250911A (en) * 2011-04-20 2012-12-16 Tokyo Electron Ltd Processing device
US20150176897A1 (en) * 2013-12-23 2015-06-25 Yong-Myung Jun Sealing member and substrate processing apparatus including the same
US20190096717A1 (en) * 2017-09-27 2019-03-28 Semes Co., Ltd. Apparatus and method for treating substrate
US20200101501A1 (en) * 2014-11-03 2020-04-02 Semes Co., Ltd. Substrate treating apparatus
US20200126821A1 (en) * 2018-10-19 2020-04-23 Semes Co., Ltd. Supercritical processing apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090066046A (ko) * 2007-12-18 2009-06-23 주성엔지니어링(주) 설치 및 분리가 간편한 진공밀폐수단의 장착구조 및 이를이용한 진공밀폐수단의 설치 방법
JP4582816B2 (ja) * 2008-06-27 2010-11-17 キヤノンアネルバ株式会社 真空加熱装置
KR101306779B1 (ko) * 2011-10-19 2013-09-10 주식회사 테라세미콘 진공 건조 장치
KR102157837B1 (ko) * 2013-12-31 2020-09-18 세메스 주식회사 기판 처리 장치 그리고 기판 처리 방법
DE102014112013A1 (de) * 2014-08-22 2016-02-25 Knorr-Bremse Systeme für Nutzfahrzeuge GmbH Dichtungsring zum axialen Abdichten von zwei axial relativ zueinander beweglich angeordneten Teilen und Dichtungssystem mit dem Dichtungsring
KR200491839Y1 (ko) * 2019-02-19 2020-06-15 주식회사 에스에스케이 서로 다른 조도를 갖는 반도체 설비용 투톤 오링
KR102662724B1 (ko) * 2020-11-02 2024-05-09 세메스 주식회사 기판 처리 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201250911A (en) * 2011-04-20 2012-12-16 Tokyo Electron Ltd Processing device
US20150176897A1 (en) * 2013-12-23 2015-06-25 Yong-Myung Jun Sealing member and substrate processing apparatus including the same
US20200101501A1 (en) * 2014-11-03 2020-04-02 Semes Co., Ltd. Substrate treating apparatus
US20190096717A1 (en) * 2017-09-27 2019-03-28 Semes Co., Ltd. Apparatus and method for treating substrate
US20200126821A1 (en) * 2018-10-19 2020-04-23 Semes Co., Ltd. Supercritical processing apparatus

Also Published As

Publication number Publication date
CN114623234A (zh) 2022-06-14
KR102662732B1 (ko) 2024-05-08
JP7312231B2 (ja) 2023-07-20
KR20220081393A (ko) 2022-06-16
JP2022091133A (ja) 2022-06-20
TW202224070A (zh) 2022-06-16
US20220178446A1 (en) 2022-06-09

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