TWI799386B - Fbar devices including highly crystalline metal nitride films and method of making the same - Google Patents
Fbar devices including highly crystalline metal nitride films and method of making the same Download PDFInfo
- Publication number
- TWI799386B TWI799386B TW106127809A TW106127809A TWI799386B TW I799386 B TWI799386 B TW I799386B TW 106127809 A TW106127809 A TW 106127809A TW 106127809 A TW106127809 A TW 106127809A TW I799386 B TWI799386 B TW I799386B
- Authority
- TW
- Taiwan
- Prior art keywords
- making
- same
- devices including
- metal nitride
- highly crystalline
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002184 metal Substances 0.000 title 1
- 150000004767 nitrides Chemical class 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/175—Acoustic mirrors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/021—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the air-gap type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/025—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks comprising an acoustic mirror
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
??PCT/US16/54872 | 2016-09-30 | ||
PCT/US2016/054872 WO2018063358A1 (en) | 2016-09-30 | 2016-09-30 | Fbar devices including highly crystalline metal nitride films |
WOPCT/US16/54872 | 2016-09-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201834278A TW201834278A (en) | 2018-09-16 |
TWI799386B true TWI799386B (en) | 2023-04-21 |
Family
ID=61763451
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106127809A TWI799386B (en) | 2016-09-30 | 2017-08-16 | Fbar devices including highly crystalline metal nitride films and method of making the same |
Country Status (2)
Country | Link |
---|---|
TW (1) | TWI799386B (en) |
WO (1) | WO2018063358A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102172638B1 (en) * | 2018-12-14 | 2020-11-03 | 삼성전기주식회사 | Acoustic resonator and method of manufacturing thereof |
US11431318B2 (en) | 2018-12-14 | 2022-08-30 | Samsung Electro-Mechanics Co., Ltd. | Acoustic resonator and method of manufacturing thereof |
KR20220014194A (en) * | 2020-07-28 | 2022-02-04 | 삼성전기주식회사 | Bulk-acoustic wave resonator and method for fabricating the same |
US20240032429A1 (en) * | 2020-10-14 | 2024-01-25 | Agency For Science, Technology And Research | Piezoelectric device and method of forming the same |
CN112803910A (en) * | 2020-12-29 | 2021-05-14 | 杭州电子科技大学 | Preparation method of single crystal film bulk acoustic resonator |
WO2023003840A1 (en) * | 2021-07-19 | 2023-01-26 | Massachusetts Institute Of Technology | Single crystalline film bulk acoustic resonator and related systems and methods |
FR3130102B1 (en) * | 2021-12-06 | 2024-01-12 | Commissariat Energie Atomique | Volume acoustic wave device and method for producing such a device |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030199105A1 (en) * | 2002-04-22 | 2003-10-23 | Kub Francis J. | Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting |
US20050035828A1 (en) * | 2003-04-07 | 2005-02-17 | Kyoung Je Hong | Film bulk acoustic resonator (FBAR) device and method for producing the same |
TWI283739B (en) * | 2004-12-28 | 2007-07-11 | Delta Electronics Inc | FBAR-based sensing apparatus |
TWI318469B (en) * | 2006-12-28 | 2009-12-11 | Univ Chung Yuan Christian | |
US20160028367A1 (en) * | 2014-07-25 | 2016-01-28 | Akoustis, Inc. | Single crystal acoustic resonator and bulk acoustic wave filter |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005236337A (en) * | 2001-05-11 | 2005-09-02 | Ube Ind Ltd | Thin-film acoustic resonator and method of producing the same |
CN101228691B (en) * | 2005-08-30 | 2011-01-05 | 松下电器产业株式会社 | Method of manufacturing piezoelectric resonator |
-
2016
- 2016-09-30 WO PCT/US2016/054872 patent/WO2018063358A1/en active Application Filing
-
2017
- 2017-08-16 TW TW106127809A patent/TWI799386B/en active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030199105A1 (en) * | 2002-04-22 | 2003-10-23 | Kub Francis J. | Method for making piezoelectric resonator and surface acoustic wave device using hydrogen implant layer splitting |
US20050035828A1 (en) * | 2003-04-07 | 2005-02-17 | Kyoung Je Hong | Film bulk acoustic resonator (FBAR) device and method for producing the same |
TWI283739B (en) * | 2004-12-28 | 2007-07-11 | Delta Electronics Inc | FBAR-based sensing apparatus |
TWI318469B (en) * | 2006-12-28 | 2009-12-11 | Univ Chung Yuan Christian | |
US20160028367A1 (en) * | 2014-07-25 | 2016-01-28 | Akoustis, Inc. | Single crystal acoustic resonator and bulk acoustic wave filter |
Also Published As
Publication number | Publication date |
---|---|
WO2018063358A1 (en) | 2018-04-05 |
TW201834278A (en) | 2018-09-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP3732137A4 (en) | Microbial-based composition and method of use | |
TWI800626B (en) | Three-dimensional device and method of forming the same | |
TWI799386B (en) | Fbar devices including highly crystalline metal nitride films and method of making the same | |
EP3579989A4 (en) | Tapered metal cup and method of forming the same | |
EP3599962A4 (en) | Cleaner and method of controlling the same | |
EP3717484A4 (en) | Method for the manufacture of lumateperone and its salts | |
EP3479413A4 (en) | Ferroelectric devices and methods of forming ferroelectric devices | |
EP3692582A4 (en) | Perovskite devices and methods of making the same | |
EP3526818A4 (en) | Oriented perovskite crystals and methods of making the same | |
EP3495354A4 (en) | Ido1 inhibitor and preparation method and application thereof | |
EP3573349A4 (en) | Transducer and method for manufacturing same | |
EP3605627A4 (en) | Piezoelectric device and method for manufacturing piezoelectric device | |
EP3516127A4 (en) | Structure and method of making the same | |
EP3668115A4 (en) | Transducer and method for manufacturing same | |
EP3508594A4 (en) | Tial alloy and method for producing same | |
EP3530650A4 (en) | Crystalline form of (r)-4-hydroxy-2-oxo-1-pyrrolidineacetamide, preparation method therefor and use thereof | |
EP3672883A4 (en) | Box and method of constructing the same | |
EP3520648A4 (en) | Thin film and thin film formation method | |
EP3881132A4 (en) | Method for manufacturing of patterned srb4bo7 and pbb4o7 crystals | |
EP3416536A4 (en) | Winguide and method of using same | |
EP3699968A4 (en) | Piezoelectric element for speaker and manufacturing method therefor | |
EP3664604A4 (en) | Herbicidal composition and method | |
EP3576171A4 (en) | Piezoelectric film and method for producing same | |
EP3545571A4 (en) | Stretchable electrode and method of forming the same | |
EP3588538A4 (en) | Method of forming nitride films |