TWI798639B - Gas leakage prevention cooling box and gas leakage sensing system for flange joints of pipelines - Google Patents

Abstract

The present invention relates to a gas leakage preventing cooling box and a gas leakage sensing system for the flange connection part of pipelines, which can be safely protected to prevent gases with various chemical properties from leaking from the connection part of the pipeline. The present invention is characterized in that it includes: a body shell, which includes a first half body and a second half body, the central part is provided with an inner chamber, and the flange of the connecting part of the first pipe and the second pipe is located in the inner chamber. The front side and the back side of the chamber are provided with pipe installation holes, and the pipes connected with the flange as the center are located in the pipe installation holes, and the first half body and the second half body are provided with the connecting part of the first pipe and the second pipe in the middle. The flanges are combined face-to-face to support the connecting portion of the first pipe and the second pipe; and a cooling fan is provided on the first half body of the body shell for supplying external air to the inner chamber.

Description

Gas leakage prevention cooling box for the flange connection part of the pipeline and Gas leak detection system

The present invention relates to a manufacturing equipment for semiconductors or similar products, in particular to a gas leakage preventing cooling box and a gas leakage sensing system for the flange joints of pipelines, which can be safely protected to prevent gases with various chemical properties from flowing from the pipeline The connection part is leaking.

Generally, the semiconductor manufacturing process generally includes a pre-process (manufacturing process) and a post-process (assembly process). The process of selectively etching the evaporated film to process specific patterns, that is, the process of manufacturing semiconductor chips (Chip). The process of combining and assembling into a finished product.

In the semiconductor manufacturing process, high-temperature and high-pressure gases are transported through pipelines, and powders with various chemical properties are also accompanied here. Therefore, it is very important to control the transfer of gas so that no leakage occurs at the joint between the pipes.

Therefore, O-rings are installed between the flanges of the pipes on both sides to prevent leakage while squeezing. However, the existing pipe connection parts form a small gap between the two sides of the central ring and the flange of the pipe while forming a vortex, thereby generating a pressure difference through the gap, and the gas Reach the O-ring and make contact with it. Therefore, while the O-ring is corroded, oxidized, and carbonized by the high-temperature gas with chemical properties, it will eventually cause a fatal problem of leakage.

prior art literature

patent documents

(Patent Document 1) Korean Laid-Open Patent Publication No. 2019-0058968 (2019.05.30)

The present invention is proposed to solve all the existing problems as described above, and the purpose of the present invention is to provide a gas leakage prevention cooling box and a gas leakage sensing system for the flange joints of pipelines, which can be safely protected , to prevent gases with various chemical properties from leaking from the connection of the pipeline.

In order to achieve the stated purpose, the cooling box for preventing gas leakage according to the technical idea of the present invention is arranged at the connecting portion of the first pipeline and the second pipeline, which can prevent gas leakage. The first pipeline and the second pipeline are used in the manufacture of semiconductor products When using any one of the product groups in the product group or connecting each other to transfer the gas used in the manufacture of any product in the product group including semiconductor products, the technical composition of the cooling box for preventing gas leakage is characterized in that , including: a body shell, which includes a first half body and a second half body, the central part is provided with an inner chamber, the flange of the connecting part of the first pipe and the second pipe is located in the inner chamber, and the front side of the inner chamber and The rear side is provided with a pipe installation hole, and the pipe connected with the flange as the center is located in the pipe installation hole. A face-to-face connection to support the connecting portion of the first duct and the second duct; and a cooling fan provided on the first half body of the body shell for supplying external air to the inner chamber.

The feature here is that the inner chamber of the main body shell is also formed with a storage box that is separated by a narrower space than the inner chamber and accommodates the connecting portion flange of the first pipe and the second pipe, even if the gas flows from the first pipe Leakage at the joint with the second pipeline can also be blocked so that the gas does not leak to the inner chamber. The storage box is divided into two half bodies along the first half body and the second half body, so that when When the first half body and the second half body are combined face-to-face, the half body of the storage box is also face-to-face combined with the connecting part flange of the first pipe and the second pipe as the center, and the first half body and the second half body of the body shell Air circulation holes communicating with the inner chambers are respectively formed, so that the external air is supplied to the inner chambers by the cooling fan and is discharged after exchanging heat with the storage box.

Another feature is that one end of the first half-body and the second half-body of the body shell are hinged to each other, so that the first half-body and the second half-body rotate around the hinge axis and open and close, and the first pipe and the second half-body can be opened and closed. The connection of the second pipe is engaged.

It is also characterized in that the cooling box for preventing gas leakage also includes: a central ring module, which includes a central ring and an O-ring, the central ring is located in the groove formed inside the flange periphery of the first pipe and the second pipe, and the O-ring The ring is installed along the outer peripheral surface of the center ring, and is squeezed between the peripheral parts of the flanges to prevent gas leakage; and a clamp, which clamps the connecting portion flanges of the first pipe and the second pipe from the outside, and the first pipe and the second pipe An O-ring is arranged in the middle of the flange of the connecting part of the second pipeline and the O-ring is squeezed.

Another feature is that the central ring module further includes: a pair of sealing rings, which are protruding along the edges and corners on both sides of the outer peripheral surface of the central ring, and are pressed into the groove of the flange.

Another feature is that a gas sensing sensor is further provided on the main body shell, and the gas sensing sensor senses the gas leaked from the connecting portion of the first pipe and the second pipe.

Another feature is that a port is also provided on the outside of the body shell, the port is set in a protruding form, communicates with the storage box, and prevents leakage from the connecting part of the first pipe and the second pipe. The gas is guided, and combined with a transparent cover, the transparent cover cuts off the external leakage of the gas guided through the port, and a gas sensing tape that changes color in contact with the gas is provided on the inner side of the transparent cover as a gas sensing sensor.

Another feature is that the ports are protrudingly provided on a plurality of outer walls on opposite sides of the body casing, and the transparent cover and the gas sensing tape are provided on each port.

In addition, the technical composition of the gas leakage sensing system according to the present invention is characterized in that it includes: the aforementioned cooling box for preventing gas leakage; a controller, if the gas sensing sensor senses a gas leakage, the controller identifies the gas leakage and notifies ; and an alarm that receives a control signal transmitted from the controller and issues a gas leak alarm.

The cooling box for preventing gas leakage and the gas leakage sensing system according to the present invention use external air to cool the connecting portion of the pipe, thereby minimizing the problem that the O-ring is easily hardened and damaged at high temperature, and can be safely protected against Gases of various chemical natures leak from the joints of the pipes.

In addition, the present invention opens the internal cavity of the main body casing to supply abundant cooling external air, and at the same time isolates and stores the connecting portion of the pipeline through a storage box smaller in size than the internal cavity, so that even if the gas flows from the pipeline It is also possible to cut off the leakage of the connecting part of the pipeline so that the gas does not leak to the outside, and the gas leaking from the connecting part of the pipeline can be sensed more quickly.

In addition, the present invention is provided with an O-ring and a center ring in the center ring module, so as to double safely cut off the leakage of gas from the connection part of the pipeline. In addition, the storage box arranged inside the main body shell can triple cut off the gas of leaks.

110: body shell

110a: First half body

110b: second half body

111: Internal chamber

111a: Air circulation holes

112:Pipe installation hole

113: connector

114: hinge shaft

115: hook hinge

116: port

120: cooling fan module

121: cooling fan

122: Fan shell

122a: opening

130: Sensor module

131: transparent cover

132:Gas Sensing Tape

140: storage box

140a: Containment Space

141: half body

141a: Pipeline placement department

142: sealing ring

150: Center ring module

151: center ring

151b: placement slot

152: O-ring

153: sealing ring

160: fixture

161: Supporting parts

f1, f2: flange

f3: Groove

P1: first pipeline

P2: Second pipeline

1 and 2 are perspective views of a cooling box for preventing gas leakage according to an embodiment of the present invention.

FIG. 3 is a side view of a cooling box for preventing gas leakage according to an embodiment of the present invention.

Fig. 4 is a sectional view according to A-A of Fig. 3 .

5 is a perspective view of an open state of the gas leakage preventing cooling box according to the embodiment of the present invention.

6 is a perspective view of a state where connected first and second ducts are installed in an open state of the gas leakage prevention cooling box according to an embodiment of the present invention.

FIG. 7 is an assembly diagram illustrating a central ring module and a fixture in a cooling box for preventing gas leakage according to an embodiment of the present invention.

8 is a longitudinal sectional view for explaining the configuration of the center ring module in the gas leakage preventing cooling box according to the embodiment of the present invention.

FIG. 9 is a reference view for explaining a gas leakage preventing cooling box according to a modified embodiment of the present invention.

A cooling box for preventing gas leakage according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. Although the present invention can be modified variously and has various forms, specific embodiments are illustrated in the drawings and will be described in detail herein. However, this is not intended to limit the present invention to a specific disclosed form, and it should be understood that all changes, equivalents, and substitutions included within the spirit and technical scope of the present invention are included. When describing the respective drawings, similar reference numerals are used for similar constituent elements. In the drawings, the dimensions of the structural objects are shown larger than the actual size to ensure the clarity of the present invention, or are shown smaller than the actual size for understanding the schematic configuration.

In addition, terms such as first and second may be used when describing various constituent elements, but the constituent elements are not limited by the terms. The terms are used only for the purpose of distinguishing one constituent element from other constituent elements. For example, a first constituent element may be named a second constituent element without departing from the scope of rights of the present invention, and similarly, a second constituent element may also be named a first constituent element. In addition, all terms including technical terms or scientific terms used herein have the same meanings as commonly understood by a person having ordinary knowledge in the technical field to which the present invention pertains, unless otherwise defined. Terms having the same meaning as those defined in commonly used dictionaries should be interpreted as having meanings consistent with the contextual meanings of related technologies, and should not be ideally or excessively interpreted if they are not clearly defined in this application for formal meaning.

<Example>

1 and 2 are perspective views of a cooling box for preventing gas leakage according to an embodiment of the present invention, FIG. 3 is a side view of a cooling box for preventing gas leakage according to an embodiment of the present invention, and FIG. 4 is a cross section according to A-A of FIG. 3 5 is a perspective view of the open state of the cooling box for preventing gas leakage according to an embodiment of the present invention, and FIG. 6 is a first pipe with a connection installed under the open state of the cooling box for preventing gas leakage according to an embodiment of the present invention and a perspective view of the state of the second pipeline.

As shown in the drawings, the cooling box for preventing gas leakage according to the embodiment of the present invention is used when manufacturing any product in the product group including semiconductor products or for transferring any product in the product group including semiconductor products. The gas used in one product is set in the form of wrapping the flanges f1 and f2 at the connecting part of the first pipeline P1 and the second pipeline P2. The main components of the cooling box for preventing gas leakage include: a main body shell 110, which It is arranged and supported at the connection part of the first pipeline P1 and the second pipeline P2; the cooling fan module 120 is used for cooling the connection part of the first pipeline P1 and the second pipeline P2; the sensor module 130 is used for Sensing the gas leakage from the connection part of the first pipeline P1 and the second pipeline P2; the central ring module 150 and the clamp 160, which are used to seal the connection part of the first pipeline P1 and the second pipeline P2.

The cooling box for preventing gas leakage according to the embodiment of the present invention is configured to be safely protected by the above-mentioned constituent elements, and to prevent gases with various chemical properties from leaking from the connection portion of the first pipe P1 and the second pipe P2, and at the same time, even Gas Leaks Gas leaks can also be sensed quickly.

Next, the gas leakage prevention cooling box according to the embodiment of the present invention will be described in detail centering on the above-mentioned components.

As shown in the figure, the main body casing 110 has a box-shaped profile with four corners, and an inner chamber 111 is provided in the central part, and the flanges f1 and f2 of the connecting parts of the first pipe P1 and the second pipe P2 are located in the inner chamber, and in the inner chamber The front side and the rear side of the chamber 111 are provided with pipe installation holes 112 , and the pipes connected around the flanges f1 and f2 are located in the pipe installation holes 112 . Preferably, as shown in the figure, the pipe installation hole 112 is formed in the form of a semicircle divided by the first half body 110a and the second half body 110b, and is provided with a hole for forming the first pipe P1 and the second pipe P2. The connector 113 of the divided form corresponding to the hole.

Here, as far as the body shell 110 is concerned, the first half body 110a and the second half body 110b, which are hinged at one end, face each other, and a pair of hook hinges 115 are provided at the other end, so that the first half body 110a and the second half body 110b can The second half body 110b is tightly connected in a closed state. As a result, the first half body 110 a and the second half body 110 b are not completely separated, and are coupled and released while opening and closing around the hinge axis 114 . With the above configuration, the gas leakage prevention cooling box of the present invention can be easily installed in a form in which the connecting portion flanges f1 and f2 of the first pipe P1 and the second pipe P2 are engaged. The first half body 110a and the second half body 110b of the body shell 110 are respectively formed with air circulation holes 111a communicating with the inner chamber 111, Therefore, the external air is supplied to the inner chamber 111 by the cooling fan 121 and is discharged after exchanging heat with the storage box 140 .

In addition, the inner chamber 111 of the main body casing 110 is further formed with a housing space 140a separated by a narrower space than the inner chamber 111 and having connection flanges f1 and f2 for accommodating the first pipe P1 and the second pipe P2. The containment box 140. The storage box 140 prevents the gas leaking from the connecting portion of the first pipe P1 and the second pipe P2 from leaking to the open inner chamber 111 through the air circulation hole 111a, guides the passage port 116 to move and contact the gas sensing sensor. In this way, by providing the storage box 140 in the inner chamber 111 of the main body casing 110, the gas leaks from the connection portion of the first pipe P1 and the second pipe P2 without diffusing in the inner chamber 111 having a relatively wide space. , but only in a narrower space, that is, the accommodating space 140a of the accommodating box 140 is diffused. Thus, even if the same amount of gas leaks, the gas sensing sensor can be exposed to a higher concentration of gas and sense it quickly. Here, the port 116 is a tube-shaped component protruding from the outer wall of the main body casing 110 and communicating with the storage space 140 a of the storage box 140 . A sensor module 130 including a gas sensing sensor is provided at the port 116 .

The storage box 140 is divided into two half bodies 141 along the first half body 110a and the second half body 110b, so that when the first half body 110a and the second half body 110b are combined face to face, the half of the storage box 140 The main body 141 is also joined face-to-face around the connecting portion flanges f1 and f2 of the first pipe P1 and the second pipe P2. On the line where the half bodies 141 of a pair of storage boxes 140 face each other, a pipe placement portion 141a for placing the pipe is formed, so that when the pair of half bodies 141 face each other, a circular hole is formed, and along the facing line, there are The sealing ring 142 prevents the gas from leaking into the storage box 140 .

The cooling fan module 120 is disposed on the outer surface of the first half body 110 a of the body shell 110 , and plays a role of supplying outside air to the inner chamber 111 through the air circulation hole 111 a of the body shell 110 . The cooling fan module 120 is combined with the outer surface of the first half body 110a, including The fan casing 122 and the cooling fan 121 are included. The fan casing 122 has an opening 122 a for air to enter and exit. The cooling fan 121 is disposed inside the fan casing 122 . According to the above configuration, as shown in FIG. 4 , fresh external air is supplied to the internal chamber 111 through the air circulation hole 111 a by the rotation of the cooling fan 121 , and at the same time, the first duct P1 and the second duct P1 located in the internal chamber 111 are The junction of the pipe P2 is effectively cooled. Therefore, the problem that the O-ring 152 and the sealing ring 153 of the center ring module 150 disposed between the connecting portion flanges f1, f2 of the first pipe P1 and the second pipe P2 are easily hardened or corroded due to high temperature can be minimized. .

The sensor module 130 senses the gas leaked from the connection part of the first pipeline P1 and the second pipeline P2, so as to help managers or workers to quickly identify the gas leakage. To this end, as shown in FIG. 3 , FIG. 5 and FIG. 6 , the sensor module 130 includes a transparent cover 131 and a gas sensing tape 132 . The transparent cover 131 of the sensor module 130 is combined with the port 116 protruding from the outer wall of the body shell 110 . The gas sensing tape 132 is pasted on the inner surface of the transparent cover 131 and has a property of discoloration when it comes into contact with leaked gas. The gas sensing adhesive tape 132 can be purchased and used as a product sold in the market. According to the structure of the sensor module 130 described above, if the gas leaks from the connecting portion of the first pipe P1 and the second pipe P2, the leaked gas diffuses in the storage box 140 containing the flanges f1 and f2 of the connecting portion. The gas is directed through the port 116 to the inside of the transparent cover 131 where it immediately comes into contact with the gas sensing tape 132 . In this way, the gas sensing tape 132 can be easily recognized by the naked eye while the gas sensing tape 132 is discolored.

In the structure of the above-mentioned sensor module 130, it is worth noting that the port 116 is provided in a protruding form on the outside of the body casing 110, so as to guide the gas leaking from the inside of the body casing 110, and then to the outside of the body casing 110. The protruding port 116 is provided with a transparent cover 131 pasted with the gas sensing tape 132, so that if it protrudes to the outside of the body shell 110 and not completely on the opposite side, the gas sensing tape 132 can be positioned well from most directions. observed locations.

Regarding the configuration of the sensor module 130, as a more preferable form, as shown in FIG. Managers or workers can easily confirm gas leaks with the naked eye regardless of the direction they are in.

In this way, if the cooling box for preventing gas leakage of the present invention is provided with a gas sensing sensor, together with the cooling box for preventing gas leakage, a controller and an alarm can be additionally added to realize a gas leakage sensing system, wherein, if the gas sensing sensor detects gas If there is a gas leak, the controller will identify and notify the gas leak, and the alarm will receive the control signal transmitted from the controller and issue a gas leak alarm.

The central ring module 150 functions to seal the gap so as to prevent gas from leaking between the face-to-face flanges f1 and f2 at the connecting portion of the first pipe P1 and the second pipe P2 . To this end, as shown in FIG. 8 , the central ring module 150 includes a central ring 151 , an O-ring 152 , and a sealing ring 153 . The center ring 151 is a ring-shaped frame member positioned inside a groove f3 formed around the flanges f1 and f2 of the first pipe P1 and the second pipe P2. As shown in FIG. 8, a seating groove 151b is formed on the outer peripheral surface of the center ring for stably installing the O-ring. The O-ring 152 is installed along the outer peripheral surface of the center ring 151, and is pressed between the peripheral parts of the flanges f1 and f2 to block gas leakage. A pair of sealing rings 153 are provided, protruding along the corners on both sides of the outer peripheral surface of the center ring 151, and pressed into the grooves f3 of the flanges f1 and f2. In the composition of the central ring module 150, it is worth noting that, unlike the prior art, a pair of sealing rings 153 are added to double cut off gas leakage together with the O-ring 152 . Also, there is an advantage in that the O-ring 152 and the sealing ring 153 are continuously cooled by the help of the external air supplied to the inner chamber 111 by the cooling fan 121, while minimizing the problem of hardening and damage due to the influence of high temperature, thereby more Steadily shut off gas leaks.

As shown in Fig. 4, Fig. 6 and Fig. 7, the clamp 160 clamps the connection flanges f1 and f2 of the first pipeline P1 and the second pipeline P2 from the outside, and the connection flanges of the first pipeline P1 and the second pipeline P2 An O-ring 152 is arranged between f1 and f2 and squeezes the O-ring 152, so that the O-ring 152 can keep being squeezed between the flanges f1 and f2. Here, as shown in the enlarged part of FIG. 4 , a supporting member 161 for supporting from the opposite side may be additionally provided on the inner peripheral surface of the clamp 160 so that the O-ring 152 is stably located in the receiving groove 151b of the center ring 150 .

The preferred embodiments of the present invention have been described above, but the present invention can employ various changes, changes, and equivalents. It is needless to say that the present invention can appropriately modify the embodiment and apply the same. Accordingly, the above description does not limit the scope of the present invention defined by the limits of the scope of claims below.

110: body shell

110a: First half body

110b: second half body

113: connector

114: hinge shaft

120: cooling fan module

122: Fan shell

122a: opening

P2: Second pipeline

Claims (5)

A cooling box for preventing gas leakage, which is installed at the connecting portion of a first pipe and a second pipe to prevent gas leakage. The first pipe and the second pipe are used when manufacturing any product in a product group including semiconductor products or The cooling box for preventing gas leakage is characterized in that it includes: a main body shell including a first half body and a second Half body, the central part of the body shell is provided with an internal chamber, the connecting flange of the first pipe and the second pipe is located in the internal chamber, and pipe installation holes are provided on the front and rear sides of the internal chamber, with the flange as the The pipes connected at the center are located in the pipe installation holes, and the first half body and the second half body are combined face-to-face in the form of a connecting part flange with the first pipe and the second pipe in the middle, so as to be supported by the first pipe and the second pipe. The connecting part of the pipeline; and the cooling fan, which is arranged on the first half body of the body shell, and is used to supply the external air to the inner chamber; The storage box that opens and accommodates the flange of the connecting part of the first pipe and the second pipe, even if the gas leaks from the connecting part of the first pipe and the second pipe, it can be cut off, so that the gas does not leak into the internal chamber, and the storage box The box is divided into two halves along the first half body and the second half body, so that when the first half body and the second half body are combined face-to-face, the half body of the storage box is also formed by the first pipe and the second half body. The flanges of the connecting parts of the two pipes are combined face-to-face at the center, and the first half body and the second half body of the body shell are respectively formed with air circulation holes communicating with the inner chamber, so that the external air is supplied to the inner chamber through the cooling fan And it is discharged after heat exchange with the storage box; One end of the first half body and the second half body of the body shell is hinged to each other, so that the first half body and the second half body rotate around the hinge axis and open and close at the same time, making the connection between the first pipe and the second pipe The body shell is also provided with a gas sensing sensor, and the gas sensing sensor senses the gas leaked from the connection part of the first pipe and the second pipe; a port is also provided on the outer wall of the body shell, and the port is set in a protruding form , communicate with the storage box, guide the gas leaked from the connection part of the first pipeline and the second pipeline, and combine a transparent cover, the transparent cover cuts off the external leakage of the gas guided through the port, and the inner surface of the transparent cover is provided with A gas sensing tape that changes color in contact with gas is used as a gas sensing sensor. The cooling box for preventing gas leakage according to claim 1 is characterized in that it also includes: a center ring module, which includes a center ring and an O-ring, and the center ring is located around the flanges of the first pipe and the second pipe A groove formed on the inner side, an O-ring installed along the outer peripheral surface of the center ring, is squeezed between the peripheral parts of the flange to prevent gas leakage; and a clamp that clamps the connection of the first pipe and the second pipe from the outside An O-ring is arranged in the middle of the connecting flange of the first pipeline and the second pipeline, and the O-ring is squeezed. The cooling box for preventing gas leakage according to claim 2 is characterized in that the central ring module further includes: a pair of sealing rings, which are arranged in the form of protruding edges and corners on both sides of the outer peripheral surface of the central ring, and are extruded to Flange groove. The cooling box for preventing gas leakage according to Claim 1 is characterized in that the ports are protrudingly provided on multiple outer walls on opposite sides of the body shell, and transparent covers and gas sensing tapes are provided on each port. A gas leakage sensing system, characterized in that it comprises: The cooling box for preventing gas leakage described in claim 1 or 4; the controller, if the gas sensing sensor senses the gas leakage, the controller identifies and reports the gas leakage; and the alarm receives the control signal transmitted from the controller And issued a gas leak alarm.

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