CN114910222A - Prevent gas leakage cooling box and gas leakage perception system - Google Patents

Abstract

The invention relates to a cooling box for preventing gas leakage and a gas leakage sensing system, which can safely protect and prevent gas with various chemical properties from leaking from a connecting part of a pipeline. The present invention is characterized by comprising: a body case including a first half body and a second half body, an inner chamber being provided at a central portion thereof, a connection flange of the first pipeline and the second pipeline being positioned in the inner chamber, pipeline installation holes being provided at front and rear sides of the inner chamber, the pipelines connected centering around the flanges being positioned in the pipeline installation holes, the first half body and the second half body being combined with each other in a face-to-face manner in a form of the connection flange having the first pipeline and the second pipeline in the middle thereof, thereby being supported at the connection portion of the first pipeline and the second pipeline; and a cooling fan provided to the first half body of the body case for supplying external air to the inner chamber.

Description

Prevent gas leakage cooling box and gas leakage perception system

Technical Field

The present invention relates to a manufacturing equipment of semiconductor or the like, and more particularly, to a gas leakage prevention cooling box and a gas leakage sensing system, which can safely protect against gas having various chemical properties from leaking from a connection portion of a pipe.

Background

In general, a semiconductor manufacturing process includes a pre-process (manufacturing process) for manufacturing a semiconductor Chip (Chip) by depositing a thin film on a Wafer (Wafer) in various chambers (chambers) and repeatedly performing a process of selectively etching the deposited thin film, and a post-process (assembling process) for separating the chips manufactured in the pre-process one by one and then bonding the chips to a lead frame to assemble the chips into a finished product.

In a semiconductor manufacturing process, high-temperature and high-pressure gas is transported through a pipeline, and powder having various chemical properties is also accompanied in the process. Therefore, it is important to control the gas transfer so that no leakage occurs at the connection portion between the pipes.

Thus, an O-ring is installed between the flanges of the pipes on both sides, pressing while preventing leakage. However, the conventional pipe connection member forms a vortex while generating a small gap between both side surfaces of the center ring and the flange of the pipe, and thus a pressure difference is generated through the gap and the gas reaches the O-ring and contacts the O-ring. Therefore, the O-ring is corroded, oxidized, or carbonized by the high-temperature gas having chemical properties, and eventually, a fatal problem of leakage occurs.

Prior art documents

Patent document

(patent document 1) Korean laid-open patent publication No. 2019-0058968 (2019.05.30)

Disclosure of Invention

The present invention has been made to solve all the above-mentioned problems of the related art, and an object of the present invention is to provide a gas leakage prevention cooling box and a gas leakage sensing system, which can safely protect and prevent gas having various chemical properties from leaking from a connection portion of a duct.

In order to achieve the above object, a gas leakage prevention cooling box according to the technical idea of the present invention is a gas leakage prevention cooling box provided at a connection portion of a first duct and a second duct for preventing gas leakage, the first duct and the second duct being connected to each other for use in manufacturing any one of a group of products including semiconductor products or for transferring gas used in manufacturing any one of the group of products including semiconductor products, the gas leakage prevention cooling box comprising: a body case including a first half body and a second half body, an inner chamber being provided at a central portion thereof, a connection flange of the first pipeline and the second pipeline being positioned in the inner chamber, pipeline installation holes being provided at front and rear sides of the inner chamber, the pipelines connected centering around the flanges being positioned in the pipeline installation holes, the first half body and the second half body being combined with each other in a face-to-face manner in a form of the connection flange having the first pipeline and the second pipeline in the middle thereof, thereby being supported at the connection portion of the first pipeline and the second pipeline; and a cooling fan provided to the first half body of the body case for supplying external air to the inner chamber.

The main body case is further provided with a receiving box which is partitioned by a space narrower than the inner chamber and receives the connection flange of the first duct and the second duct, and blocks the leakage of the gas from the connection portion of the first duct and the second duct so that the leakage of the gas into the inner chamber does not occur, the receiving box is divided into two halves along the first half and the second half, so that the halves of the receiving box are coupled to each other with the connection flange of the first duct and the second duct as a center when the first half and the second half are coupled to each other, and the first half and the second half of the main body case are respectively provided with an air flow hole which communicates with the inner chamber, so that the external air is supplied to the inner chamber by the cooling fan and discharged after heat exchange with the receiving box.

Further, the first half body and the second half body of the body housing are hinge-coupled to each other at one end portion thereof, so that the first half body and the second half body can be opened and closed while rotating about the hinge shaft, and the connection portions of the first duct and the second duct can be engaged with each other.

It is further characterized in that the gas leakage prevention cooling box further comprises: a center ring module including a center ring positioned in a groove formed inside peripheral portions of flanges of the first and second pipes and an O-ring installed along an outer circumferential surface of the center ring, pressed between the peripheral portions of the flanges, and preventing gas leakage; and a clamp which clamps the connecting part flanges of the first pipeline and the second pipeline from the outside, wherein an O-shaped ring is arranged between the connecting part flanges of the first pipeline and the second pipeline and extrudes the O-shaped ring.

Further characterized in that the center ring module further comprises: and a pair of sealing rings which are arranged in a protruding mode along the edge corners on two sides of the outer peripheral surface of the central ring and are extruded to the grooves of the flange.

The gas sensing sensor is also arranged on the body shell and senses gas leaked from the connecting part of the first pipeline and the second pipeline.

The gas sensor is characterized in that a port is arranged outside the body shell, the port is in a convex shape and is communicated with the containing box, the gas leaked from the connecting part of the first pipeline and the second pipeline is guided, a transparent cover is combined, the transparent cover cuts off the external leakage of the gas guided through the port, and a gas sensing adhesive tape which is in contact with the gas and changes color is arranged on the inner side surface of the transparent cover to be used as a gas sensing sensor.

The gas sensor is characterized in that the ports are arranged on the outer walls on the opposite sides of the body shell in a protruding mode, and the transparent cover and the gas sensing adhesive tape are arranged on each port.

Further, the gas leakage sensing system according to the present invention is technically characterized by comprising: the aforementioned gas leakage prevention cooling box; the controller identifies and notifies the gas leakage if the gas sensing sensor senses the gas leakage; and an alarm receiving the control signal transmitted from the controller and emitting a gas leakage alarm.

The cooling box for preventing gas leakage and the gas leakage sensing system of the invention use the external air to cool the connection part of the pipeline, thereby minimizing the problem that the O-shaped ring is easy to harden and damage at high temperature, and can safely protect and prevent the gas with various chemical properties from leaking from the connection part of the pipeline.

In addition, the present invention opens the inner chamber of the body case to supply a large amount of cooling external air, and separates and stores the connection part of the duct by the storage box having a size smaller than the inner chamber, so that even if gas leaks from the connection part of the duct, the gas can be cut off to prevent the gas from leaking to the outside, and the gas leaking from the connection part of the duct can be sensed more rapidly.

In addition, the present invention has a structure in which the O-ring and the center ring are provided in the center ring module, thereby doubly safely blocking the leakage of the gas from the connection portion of the pipe, and the leakage of the gas can be triple blocked by the housing case provided in the main body case.

Drawings

Fig. 1 and 2 are perspective views of a gas leakage prevention cooling box according to an embodiment of the present invention.

Fig. 3 is a side view of a gas leakage prevention cooling box according to an embodiment of the present invention.

Fig. 4 is a cross-sectional view a-a according to fig. 3.

Fig. 5 is a perspective view of an open state of a gas leakage prevention cooling box according to an embodiment of the present invention.

Fig. 6 is a perspective view of a state in which the first and second ducts are connected in an open state of the gas leakage prevention cooling box according to the embodiment of the present invention.

Fig. 7 is an assembly view for explaining a center ring module and a jig in a gas leakage prevention cooling box according to an embodiment of the present invention.

Fig. 8 is a longitudinal sectional view for explaining the construction of a center ring module in a gas leakage prevention cooling box according to an embodiment of the present invention.

Fig. 9 is a reference view for explaining a gas leakage prevention cooling box according to a modified embodiment of the present invention.

Description of the reference symbols

110: the body case 120: cooling fan module

130: gas-sensing sensor 140: containing box

150: center ring module 160: clamp apparatus

Detailed Description

A gas leakage prevention cooling box according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings and will herein be described in detail. However, the present invention is not limited to the specific embodiments disclosed, and all modifications, equivalents, and alternatives included in the spirit and technical scope of the present invention are to be understood as being included therein. Like reference numerals are used for like components while describing the respective drawings. The drawings show the structure in a larger size than it actually is for clarity of the invention, and show the structure in a smaller size than it actually is for understanding the schematic configuration.

In addition, the terms first, second, etc. may be used when describing various components, but the components are not limited by the terms. The term is used only for the purpose of distinguishing one constituent element from other constituent elements. For example, a first component may be termed a second component, and, similarly, a second component may be termed a first component, without departing from the scope of the present invention. In addition, unless otherwise defined, all terms including technical or scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms having the same meaning as defined in commonly used dictionaries should be interpreted as having a meaning that is consistent with a meaning possessed by context of the relevant art and should not be interpreted in an ideal or excessive manner if not explicitly defined in this application.

< example >

Fig. 1 and 2 are perspective views of a gas leakage prevention cooling box according to an embodiment of the present invention, fig. 3 is a side view of the gas leakage prevention cooling box according to the embodiment of the present invention, fig. 4 is a sectional view a-a according to fig. 3, fig. 5 is a perspective view of an open state of the gas leakage prevention cooling box according to the embodiment of the present invention, and fig. 6 is a perspective view of a state in which a first pipe and a second pipe connected are installed in the open state of the gas leakage prevention cooling box according to the embodiment of the present invention.

As shown in the drawings, a gas leakage prevention cooling box according to an embodiment of the present invention is provided at a connection portion of a first duct P1 and a second duct P2 in a form of wrapping flanges f1 and f2, for use in manufacturing any one of a group of products including semiconductor products or for transferring gas used in manufacturing any one of the group of products including semiconductor products, and the gas leakage prevention cooling box includes, as main constituent elements: a body case 110 provided at a connection portion of the first duct P1 and the second duct P2 and supported; a cooling fan module 120 for cooling a connection portion of the first duct P1 and the second duct P2; a sensor module 130 for sensing gas leaked from a connection part of the first duct P1 and the second duct P2; a center ring module 150 and a clamp 160 for sealing the connection of the first pipe P1 and the second pipe P2.

The gas leakage prevention cooling box according to the embodiment of the present invention is configured to prevent gas having various chemical properties from leaking from the connection portion between the first duct P1 and the second duct P2 by safely protecting the gas leakage prevention cooling box by the above-described components, and to quickly sense gas leakage even if gas leaks.

The gas leakage prevention cooling box according to the embodiment of the present invention will be described in detail below, focusing on the above-described components.

As shown in the drawings, the body case 110 has a box-shaped outer shape with four corners, an inner chamber 111 is provided at a central portion, the connection flanges f1 and f2 of the first and second pipes P1 and P2 are located in the inner chamber, pipe mounting holes 112 are provided at front and rear sides of the inner chamber 111, and pipes connected with the flanges f1 and f2 as centers are located in the pipe mounting holes 112. Preferably, as shown in the drawings, the pipe installation hole 112 is formed in a semicircular shape divided at the first and second half bodies 110a and 110b, and a connector 113 for forming a divided shape of a hole corresponding to the first and second pipes P1 and P2 is provided.

Here, in the body case 110, the first body half 110a and the second body half 110b, which are hinge-coupled at one end, are formed to face each other, and a pair of snap hinges 115 are provided at the other end, so that the first body half 110a and the second body half 110b can be securely coupled in a closed state. Thus, the first body half 110a and the second body half 110b are not completely separated, and are opened and closed about the hinge shaft 114 and are simultaneously coupled and uncoupled. The gas leakage prevention cooling box of the present invention can be simply provided in a form in which the coupling flanges f1 and f2 of the first and second pipes P1 and P2 are engaged with each other by the above-described configuration. Air flow holes 111a communicating with the inner chamber 111 are formed at the first half body 110a and the second half body 110b of the body case 110, respectively, so that the external air is supplied to the inner chamber 111 by the cooling fan 121 and discharged after heat exchange with the receiving case 140.

Further, a housing box 140 partitioned by a space narrower than the inner chamber 111 and having a housing space 140a housing the connection flanges f1 and f2 of the first pipe P1 and the second pipe P2 is formed in the inner chamber 111 of the body case 110. The storage case 140 prevents the gas leaking from the connection portion between the first duct P1 and the second duct P2 from leaking into the open inner chamber 111 through the air flow hole 111a, and is guided to move through the port 116 to contact the gas sensor. In this manner, by providing the storage case 140 in the inner chamber 111 of the body case 110, the gas leaked from the connection portion of the first duct P1 and the second duct P2 is not diffused in the inner chamber 111 having a relatively wide space, but diffused only in a narrower space, that is, the storage space 140a of the storage case 140. Thus, even if the same amount of gas leaks, the gas sensing sensor can contact a higher concentration of gas and quickly sense the gas. Here, the port 116 is a tubular member, which is provided in a protruding manner on the outer wall of the main body case 110 and communicates with the housing space 140a of the housing case 140. A sensor module 130 including a gas sensing sensor is disposed at port 116.

The accommodation boxes 140 are divided into two body halves 141 along the first and second body halves 110a and 110b such that when the first and second body halves 110a and 110b are coupled face to face, the body halves 141 of the accommodation boxes 140 are also coupled face to face centering on the connection flanges f1, f2 of the first and second pipes P1 and P2. A pipe seating portion 141a for seating a pipe is formed on a line where the half bodies 141 of the pair of housing boxes 140 face each other, so that a circular hole is formed when the half bodies 141 of the pair face each other, and a sealing ring 142 is provided along the facing line so that gas does not leak to the housing boxes 140.

The cooling fan module 120 is disposed on an outer surface of the first body half 110a of the body case 110, and functions to supply external air to the internal cavity 111 through the air flow hole 111a of the body case 110. The cooling fan module 120 is coupled to an outer surface of the first body half 110a, and includes a fan housing 122 and a cooling fan 121, the fan housing 122 having an opening 122a for air to enter and exit, and the cooling fan 121 being disposed inside the fan housing 122. According to the configuration, as shown in fig. 4, while fresh external air is supplied to the inner chamber 111 through the air circulation hole 111a by the rotation of the cooling fan 121, the connection portion of the first duct P1 and the second duct P2 located at the inner chamber 111 is effectively cooled. It is possible to minimize the problem that the O-ring 152 and the sealing ring 153 of the center ring module 150 disposed between the connection flanges f1, f2 of the first and second pipes P1 and P2 are easily hardened or corroded by high temperature.

The sensor module 130 senses gas leaking from the connection portion of the first and second pipes P1 and P2, thereby helping a manager or worker to quickly recognize the gas leakage. For this, as shown in fig. 3, 5 and 6, the sensor module 130 includes a transparent cover 131 and a gas sensing tape 132. The transparent cover 131 of the sensor module 130 is coupled to the port 116 provided in a protruding manner at the outer wall of the body case 110. The gas sensing tape 132 is attached to an inner surface of the transparent cover 131, and has a property of changing color when contacting a leaked gas. The gas sensing tape 132 may be purchased using commercially available products. According to the above-described configuration of the sensor module 130, if gas leaks from the connection portion between the first duct P1 and the second duct P2, the leaked gas is diffused in the storage case 140 that stores the connection portion flanges f1 and f2, and is guided through the port 116 to the inside of the transparent cover 131, and immediately comes into contact with the gas sensing tape 132. In this way, the manager can easily recognize the color change of the gas sensing tape 132 with the naked eye.

In the above-described configuration of the sensor module 130, it is noted that the port 116 is provided in a protruding manner on the outside of the main body case 110 to guide the gas leaked from the inside of the main body case 110, and the transparent cover 131 in a state where the gas sensing tape 132 is adhered is provided on the port 116 protruding to the outside of the main body case 110, so that the gas sensing tape 132 is positioned at a place where it can be observed well from most directions if it does not protrude to the outside of the main body case 110 to the opposite side.

As a more preferable configuration of the sensor module 130, as shown in fig. 9, the port 116 and the sensor module 130 may be configured in a deformed configuration that is provided on both sides of the opposite sides of the main body case 110, so that a manager or a worker can easily visually check the gas leakage regardless of the direction in which the manager or the worker is positioned.

As such, if the gas leakage prevention cooling box of the present invention is provided with the gas sensing sensor, together with the gas leakage prevention cooling box, a gas leakage sensing system can be implemented by additionally adding a controller and an alarm, wherein if the gas sensing sensor senses a gas leakage, the controller recognizes and notifies the gas leakage, and the alarm receives a control signal transmitted from the controller and issues a gas leakage alarm.

The center ring module 150 functions to seal the gap so as to prevent gas from leaking between the flanges f1, f2 joined face to face at the junction of the first pipe P1 and the second pipe P2. To this end, as shown in fig. 8, the center ring module 150 includes a center ring 151, an O-ring 152, and a seal ring 153. The centering ring 151 is a frame member in a ring state located in a groove f3 formed inside the peripheries of the flanges f1, f2 of the first pipe P1 and the second pipe P2. As shown in fig. 8, a seating groove 151b is formed at an outer circumferential surface of the center ring to stably mount the O-ring. The O-ring 152 is fitted along the outer peripheral surface of the center ring 151, and is pressed between the peripheral portions of the flanges f1 and f2, thereby blocking leakage of gas. The pair of seal rings 153 are provided so as to project along both edges of the outer peripheral surface of the center ring 151, and are pressed into the grooves f3 of the flanges f1 and f 2. In the constitution of the center ring module 150, it is noted that, unlike the prior art, a pair of seal rings 153 are additionally provided to doubly shut off gas leakage together with the O-ring 152. Also, there is an advantage in that the O-ring 152 and the sealing ring 153 are continuously cooled by the help of the external air supplied to the inner chamber 111 by the cooling fan 121 while minimizing the hardening and damage problems due to the high temperature, thereby more stably cutting off the gas leakage.

As shown in fig. 4, 6 and 7, the clamp 160 clamps the connection flanges f1 and f2 of the first and second pipes P1 and P2 from the outside, and the O-ring 152 is provided between the connection flanges f1 and f2 of the first and second pipes P1 and P2 and presses the O-ring 152, so that the O-ring 152 can be continuously maintained in a state of being pressed between the flanges f1 and f 2. Here, as shown in the enlarged portion of fig. 4, a support member 161 supporting from the opposite side may be additionally provided at the inner circumferential surface of the jig 160 so that the O-ring 152 is stably positioned at the seating groove 151b of the center ring 150.

While the preferred embodiments of the present invention have been described, the present invention is susceptible to various changes, modifications and equivalents. It goes without saying that the present invention can be modified appropriately and applied identically. Accordingly, the above description should not be taken as limiting the scope of the invention, which is defined by the metes and bounds of the claims that follow.

Claims (9)

1. A gas leakage prevention cooling box provided at a connecting portion of a first duct and a second duct for preventing gas leakage, the first duct and the second duct being used in manufacturing any one of products including semiconductor products or being connected to each other for transferring gas used in manufacturing any one of products including semiconductor products, the gas leakage prevention cooling box comprising:

a body case including a first body half and a second body half, an inner chamber being provided at a central portion thereof, flanges of a connection portion of the first and second pipes being located in the inner chamber, pipe installation holes being provided at front and rear sides of the inner chamber, the pipes connected with the flanges as a center being located in the pipe installation holes, the first and second body halves being combined with each other face to face in a form of the connection portion flanges having the first and second pipes therebetween, thereby being supported at the connection portion of the first and second pipes; and

and a cooling fan provided to the first half body of the body case for supplying external air to the inner chamber.

2. The gas leakage prevention cooling tank of claim 1,

a receiving box which is separated by a space narrower than the inner cavity and receives the connecting flange of the first pipeline and the second pipeline is formed in the inner cavity of the body shell, even if gas leaks from the connecting part of the first pipeline and the second pipeline, the receiving box can be cut off, so that the gas does not leak to the inner cavity, the receiving box is divided into two half bodies along the first half body and the second half body, so that when the first half body and the second half body are combined face to face, the half bodies of the receiving box are also combined face to face by taking the connecting flange of the first pipeline and the second pipeline as a center,

air circulation holes communicated with the inner chamber are respectively formed on the first half body and the second half body of the body shell, so that the external air is supplied to the inner chamber through the cooling fan, exchanges heat with the accommodating box and is discharged.

3. The gas leakage prevention cooling tank of claim 2,

one end parts of the first half body and the second half body of the body case are hinge-coupled to each other, so that the first half body and the second half body rotate about the hinge shaft and open and close while engaging the connection parts of the first duct and the second duct.

4. The gas leakage prevention cooling box according to claim 2, further comprising:

a center ring module including a center ring positioned in a groove formed inside peripheral portions of flanges of the first and second pipes and an O-ring installed along an outer circumferential surface of the center ring, pressed between the peripheral portions of the flanges, and preventing gas leakage; and

and the clamp clamps the connecting part flanges of the first pipeline and the second pipeline from the outer side, and an O-shaped ring is arranged between the connecting part flanges of the first pipeline and the second pipeline and extrudes the O-shaped ring.

5. The gas leakage prevention cooling box of claim 4, wherein the center ring module further comprises:

and a pair of sealing rings which are arranged in a protruding mode along the edge corners on two sides of the outer peripheral surface of the central ring and are extruded to the grooves of the flange.

6. The gas leakage prevention cooling tank of claim 2,

the body shell is also provided with a gas perception sensor which perceives the gas leaked from the connecting part of the first pipeline and the second pipeline.

7. The gas leakage prevention cooling tank of claim 6,

still be provided with the port at the outer wall of body shell, the port sets up to the protrusion form, and the containing box intercommunication, guides the gas that leaks from the connecting portion of first pipeline and second pipeline to combine there is the transparent cover, and the transparent cover cuts off the outside leakage of the gas of guiding through the port, is provided with the gas perception sticky tape that discolours and regard as gas perception sensor with gas contact at the transparent cover medial surface.

8. The gas leakage prevention cooling tank of claim 7,

the ports are arranged on the outer walls on the opposite sides of the body shell in a protruding mode respectively, and the transparent cover and the gas sensing adhesive tape are arranged on the ports.

9. A gas leak sensing system, comprising:

the gas leakage prevention cooling tank of any one of claims 6 to 8;

the controller identifies and notifies the gas leakage if the gas sensing sensor senses the gas leakage; and

an alarm receiving the control signal transmitted from the controller and emitting a gas leakage alarm.

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