TWI796428B - torque sensor - Google Patents

torque sensor Download PDF

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Publication number
TWI796428B
TWI796428B TW108103554A TW108103554A TWI796428B TW I796428 B TWI796428 B TW I796428B TW 108103554 A TW108103554 A TW 108103554A TW 108103554 A TW108103554 A TW 108103554A TW I796428 B TWI796428 B TW I796428B
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region
strain
area
hole
torque sensor
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TW108103554A
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TW201939005A (en
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池田隆男
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日商日本電產科寶電子股份有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
    • G01L3/02—Rotary-transmission dynamometers
    • G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
    • G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating

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  • General Physics & Mathematics (AREA)
  • Manipulator (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Power Steering Mechanism (AREA)

Abstract

轉矩感測器具備：第1區域部，形成為環狀；第2區域部，在第1區域部的內側，與第1區域部位於同心圓上，形成為環狀；複數個第1樑部，連接第1區域部的內側與第2區域部的外側；第2樑部，連接第1區域部的內側與第2區域部的外側，且為如下形狀：與第1區域部或第2區域部的連接部分之寬度比第1區域部與第2區域部之間的中央部分之寬度更窄，且在中央部分設置有孔；及應變體，以橫跨第2樑部的孔之方式設置於第2樑部，用於檢測第1區域部與第2區域部的相對位移。The torque sensor includes: a first region formed in an annular shape; a second region formed inside the first region on a concentric circle with the first region and formed in an annular shape; a plurality of first beams part, connecting the inside of the first region and the outside of the second region; the second beam part, connecting the inside of the first region and the outside of the second region, and has the following shape: with the first region or the second The width of the connection part of the region part is narrower than the width of the center part between the first region part and the second region part, and a hole is provided in the center part; and the strain body straddles the hole of the second beam part It is installed on the second beam part and is used to detect the relative displacement between the first area part and the second area part.

Description

轉矩感測器torque sensor

發明領域 本發明是有關於一種檢測轉矩的轉矩感測器。field of invention The invention relates to a torque sensor for detecting torque.

發明背景 一般，已知有一種藉由構件的彈性變形來檢測轉矩的感測器。(參照專利文獻1)。Background of the invention In general, there is known a sensor that detects torque by elastic deformation of a member. (Refer to Patent Document 1).

然而，若是藉由構件的彈性變形來檢測轉矩的感測器，要提高感測器的感度，就有必要將彈性變形的構件作成容易變形，但若將構件作成容易變形的話，在施加了過大的負載的情況下，感測器的耐久性便容易變低。 先前技術文獻However, in the case of a sensor that detects torque by means of elastic deformation of the member, it is necessary to make the elastically deformable member easily deformable in order to increase the sensitivity of the sensor. In the case of an excessive load, the durability of the sensor tends to decrease. prior art literature

專利文獻 專利文獻1：日本專利特開2007-40774號公報patent documents Patent Document 1: Japanese Patent Laid-Open No. 2007-40774

發明概要 本發明的實施形態之目的在於提供一種提高對於進行測量的方向之轉矩的感測器之感度，且提升了對於其他方向之轉矩的耐久性的轉矩感測器。Summary of the invention An object of an embodiment of the present invention is to provide a torque sensor that improves the sensitivity of the sensor for torque in a direction to be measured and improves durability for torque in other directions.

根據本發明的觀點之轉矩感測器具備：第1區域部，形成為環狀；第2區域部，在前述第1區域部的內側，與前述第1區域部位於同心圓上，形成為環狀；複數個第1樑部，連接前述第1區域部的內側與前述第2區域部的外側；第2樑部，連接前述第1區域部的內側與前述第2區域部的外側，且為如下形狀：與前述第1區域部或前述第2區域部的連接部分之寬度比前述第1區域部與前述第2區域部之間的中央部分之寬度更窄，且在前述中央部分設置有孔；及應變體，以橫跨前述第2樑部的前述孔之方式設置於前述第2樑部，用於檢測前述第1區域部與前述第2區域部的相對位移。The torque sensor according to the viewpoint of the present invention is provided with: a first region formed in an annular shape; a second region located inside the first region on a concentric circle with the first region and formed as Ring shape; a plurality of first beams connecting the inside of the first region and the outside of the second region; second beams connecting the inside of the first region and the outside of the second region, and It has a shape in which the width of the connecting portion with the first region or the second region is narrower than the width of the center portion between the first region and the second region, and the center portion is provided with a hole; and a strain body, provided in the second beam portion so as to straddle the hole in the second beam portion, for detecting the relative displacement between the first region and the second region.

用以實施發明之形態 (第1實施形態) 圖1是顯示本發明的第1實施形態之轉矩感測器10的構成的構成圖。form for carrying out the invention (first embodiment) FIG. 1 is a configuration diagram showing the configuration of a torque sensor 10 according to a first embodiment of the present invention.

轉矩感測器10是用於檢測以Z軸(相對於圖式為垂直方向)作為旋轉軸的Z軸力矩Mz之轉矩的感測器。例如，轉矩感測器10安裝於機器人等。The torque sensor 10 is a sensor for detecting the torque of the Z-axis moment Mz with the Z-axis (vertical direction with respect to the drawing) as the rotation axis. For example, the torque sensor 10 is attached to a robot or the like.

轉矩感測器10具備：第1區域部1、第2區域部2、複數個樑部3、複數個應變檢測用樑部4、及複數個應變體5。The torque sensor 10 includes a first region 1 , a second region 2 , a plurality of beams 3 , a plurality of strain detection beams 4 , and a plurality of strain bodies 5 .

第1區域部1、第2區域部2、複數個樑部3、及複數個應變檢測用樑部4是藉由金屬等的材質而形成為一體。第1區域部1形成為環狀。第2區域部2形成為比第1區域部1直徑更小的環狀。第2區域部2是在第1區域部1的環狀之內側(中心側)，位於同心圓上。複數個樑部3及複數個應變檢測用樑部4是設置成：從第2區域部2放射狀地延伸，且連接第1區域部1的內側與第2區域部2的外側。樑部3具有連接第1區域部1與第2區域部2的功能。應變檢測用樑部4除了與樑部3相同功能外，還設置有用於測量應變的應變體5。樑部3可以是設置好幾個。應變檢測用樑部4至少設置相當於應變體5的數量。The first region 1 , the second region 2 , the plurality of beams 3 , and the plurality of strain detection beams 4 are integrally formed of a material such as metal. The first region portion 1 is formed in a ring shape. The second region portion 2 is formed in an annular shape having a smaller diameter than the first region portion 1 . The second area portion 2 is located on the concentric circle inside (central side) of the ring shape of the first area portion 1 . The plurality of beams 3 and the plurality of strain detection beams 4 are provided so as to extend radially from the second region 2 and connect the inside of the first region 1 and the outside of the second region 2 . The beam portion 3 has a function of connecting the first region portion 1 and the second region portion 2 . The beam portion 4 for strain detection is provided with a strain body 5 for measuring strain, in addition to the same function as the beam portion 3 . Several beam parts 3 may be provided. The beam portion 4 for strain detection is provided at least as many as the strain bodies 5 .

第1區域部1是安裝於承受轉矩的負載之部分。例如，第1區域部1是安裝於機器人的手或手臂等的可動部。第2區域部2是安裝於產生轉矩的動力源之部分。例如，第2區域部2是安裝於馬達或減速機等。The first area portion 1 is a portion attached to a load receiving torque. For example, the first region portion 1 is a movable portion attached to a hand, an arm, or the like of a robot. The second area portion 2 is a portion attached to a power source that generates torque. For example, the second region portion 2 is attached to a motor, a speed reducer, or the like.

應變體5是以會被施加第1區域部1與第2區域部2的相對位移所造成的力之方式，設置於應變檢測用樑部4。應變體5例如是長方形狀。再者，應變體5可以是設置好幾個。The strain body 5 is provided on the strain detection beam portion 4 so as to be applied with a force due to the relative displacement between the first region portion 1 and the second region portion 2 . The strain body 5 has, for example, a rectangular shape. Furthermore, several strain bodies 5 can be provided.

應變體5具備發揮檢測應變的感測器之功能的應變計。應變計例如是細長的形狀，且是設置成應變體5的長邊方向會與應變計的長邊方向一致。應變計是構成為一旦變形的話便會產生電位移。再者，只要應變計是會電性地產生能夠檢測的位移者，便可以是任何物體。例如，應變計可以因應於變形量來使電阻改變，亦可以因應於變形量來使電壓產生。轉矩感測器10是藉由從應變體5(應變計)檢測該等電位移，來測量轉矩。The strain body 5 has a strain gauge functioning as a sensor for detecting strain. The strain gauge has, for example, an elongated shape, and is installed so that the longitudinal direction of the strain body 5 coincides with the longitudinal direction of the strain gauge. A strain gauge is configured to generate an electric displacement when deformed. Furthermore, the strain gauge may be any object as long as it electrically generates a detectable displacement. For example, the strain gauge can change the resistance according to the amount of deformation, and can also generate voltage according to the amount of deformation. The torque sensor 10 measures torque by detecting the isoelectric displacement from the strain body 5 (strain gauge).

例如，應變體5是如下使用。將一對應變體5設置於如下位置：一旦對轉矩感測器10施加轉矩的話，就會被施加相互成為對稱之應力的位置(成為左右對稱或上下對稱等的位置)。對於不進行測量的方向之力，是將一對應變體5各自的應變計的輸出相互抵消，藉此來作成不進行檢測。藉此，轉矩感測器10便作成只檢測進行測量的方向(Z軸力矩Mz)之轉矩。For example, the strain body 5 is used as follows. The pair of strain bodies 5 are provided at positions where, when a torque is applied to the torque sensor 10 , mutually symmetrical stresses are applied (positions such as left-right symmetry or vertical symmetry). As for the force in the direction not to be measured, the outputs of the strain gauges of the pair of strain bodies 5 are mutually canceled so as not to be detected. Thereby, the torque sensor 10 is configured to detect only the torque in the direction to be measured (Z-axis torque Mz).

圖2是將本實施形態之轉矩感測器10的應變檢測用樑部4附近擴大的擴大圖。Fig. 2 is an enlarged view of the vicinity of the strain detecting beam portion 4 of the torque sensor 10 according to the present embodiment.

應變體5是以應變檢測用樑部4連接第1區域部1與第2區域部2的方向(以下稱「連接方向」。)與應變體5的長邊方向(或應變計的長邊方向)成為平行的方向，來配置於應變檢測用樑部4的中央。為了容易檢測Z軸力矩Mz的力，應變檢測用樑部4是如以下所構成。The strain body 5 is the direction in which the strain detection beam 4 connects the first region 1 and the second region 2 (hereinafter referred to as "connection direction") and the longitudinal direction of the strain body 5 (or the longitudinal direction of the strain gauge). ) are arranged parallel to each other in the center of the beam portion 4 for strain detection. In order to easily detect the force of the Z-axis moment Mz, the beam portion 4 for strain detection is configured as follows.

應變檢測用樑部4是與第1區域部1及第2區域部2的連接部分之寬度比第1區域部1與第2區域部2之間的中央部分之寬度更窄的形狀。具體而言，應變檢測用樑部4的兩側R形成為：如從第1區域部1或第2區域部2的連接部分(兩端)朝向中央部分膨脹般的曲線。The beam portion 4 for strain detection has a shape in which the width of the connection portion with the first region portion 1 and the second region portion 2 is narrower than the width of the central portion between the first region portion 1 and the second region portion 2 . Specifically, both sides R of the strain detecting beam portion 4 are formed in a curve that expands from the connecting portion (both ends) of the first region portion 1 or the second region portion 2 toward the central portion.

在應變檢測用樑部4的中央部分設置有孔H1。孔H1位於所配置的應變體5之長邊方向的中央部分。應變體5是以兩端來固定於應變檢測用樑部4。應變體5的兩端以外之中央部分未固定於任何地方，成為浮在空中的形式。亦即，應變體5是以橫跨孔H1之方式設置於應變檢測用樑部4。A hole H1 is provided in the central portion of the beam portion 4 for strain detection. The hole H1 is located at the central portion in the longitudinal direction of the arranged strain body 5 . The strain body 5 is fixed to the strain detection beam portion 4 at both ends. The central portion of the strain body 5 other than both ends is not fixed anywhere, and is floating in the air. That is, the strain body 5 is provided in the beam part 4 for strain detection so that it may straddle the hole H1.

將應變檢測用樑部4的兩端之寬度縮得比中央更窄，藉此作成：即便施加Z軸力矩Mz以外的力，彎折也會集中在應變檢測用樑部4的兩端之寬度狹小的部分(圖2的以虛線圍繞的部分)。藉此，便會減輕Z軸力矩Mz以外的力施加於應變體5的力。又，在應變檢測用樑部4的中央設置孔H1，並將應變體5以兩端來固定，藉此作成應變體5容易藉由Z軸力矩Mz的力而變形。應變體5是藉由焊接等而固定於應變檢測用樑部4。The width of both ends of the strain detection beam 4 is made narrower than the center, so that even if a force other than the Z-axis moment Mz is applied, the bending will be concentrated on the width of both ends of the strain detection beam 4 Narrow part (the part surrounded by the dotted line in Fig. 2). Thereby, the force applied to the strain body 5 by the force other than the Z-axis moment Mz is reduced. Furthermore, by providing a hole H1 in the center of the strain detection beam portion 4 and fixing the strain body 5 at both ends, the strain body 5 is easily deformed by the force of the Z-axis moment Mz. The strain body 5 is fixed to the strain detection beam portion 4 by welding or the like.

在將應變體5固定於應變檢測用樑部4的情況下，不是以端部，而是以比端部稍微內側的位置處W來固定，藉此便能夠避免轉矩所造成的應力集中於應變體5的端部。但，以端部來固定的話，轉矩所造成的應力容易施加於應變體5。因此，為了提高作為感測器的感度，以端部來固定亦可。When the strain body 5 is fixed to the beam portion 4 for strain detection, it is fixed not at the end but at a position W slightly inside the end, thereby avoiding the stress concentration caused by the torque on the The end of the strain body 5. However, if the ends are fixed, stress due to torque is likely to be applied to the strain body 5 . Therefore, in order to improve the sensitivity as a sensor, it may be fixed at the end.

依據本實施形態，關於應變檢測用樑部4，是將與第1區域部1及第2區域部2的連接部分之寬度作成比第1區域部1與第2區域部2之間的中央部分之寬度更窄，且在位於所設置的應變體5之中央部分的位置處設置孔H1，並將應變體5的兩端部分固定於應變檢測用樑部4。藉此，便能夠提高對於Z軸力矩Mz的轉矩之感測器的感度，並提升對於Z軸力矩Mz以外的方向之轉矩的耐久性。 (第2實施形態)According to the present embodiment, regarding the beam portion 4 for strain detection, the width of the connection portion with the first region portion 1 and the second region portion 2 is set to be wider than the central portion between the first region portion 1 and the second region portion 2 . The width is narrower, and a hole H1 is provided at the central portion of the strain body 5 provided, and both end portions of the strain body 5 are fixed to the beam portion 4 for strain detection. Thereby, the sensitivity of the sensor to the torque of the Z-axis moment Mz can be improved, and the durability to torques in directions other than the Z-axis moment Mz can be improved. (Second Embodiment)

圖3是將本發明的第2實施形態之轉矩感測器10A的應變檢測用樑部4A附近擴大的擴大圖。Fig. 3 is an enlarged view of the vicinity of the strain detecting beam portion 4A of the torque sensor 10A according to the second embodiment of the present invention.

轉矩感測器10A是在圖2所示的第1實施形態之轉矩感測器10中，將應變檢測用樑部4取代成應變檢測用樑部4A者。其他點則與第1實施形態是同樣的。The torque sensor 10A is a torque sensor 10 according to the first embodiment shown in FIG. 2 in which the strain detecting beam portion 4 is replaced with the strain detecting beam portion 4A. Other points are the same as those of the first embodiment.

應變檢測用樑部4A是在第1實施形態之應變檢測用樑部4中，將輔助樑部BM與第1實施形態之應變檢測用樑部4的寬度方向(與連接方向垂直的方向)平行地，設置於孔H1的中央部分者。2個孔H11、H12相當於藉由輔助樑部BM來將第1實施形態之孔H1分隔後的孔。只要輔助樑部BM是設置成會將2個孔H11、H12分隔成第1區域部1側與第2區域部2側的話，也可以未必要與連接方向垂直。其他點則與第1實施形態之應變檢測用樑部4是同樣的。In the strain detection beam portion 4A of the first embodiment, the auxiliary beam portion BM is parallel to the width direction (the direction perpendicular to the connection direction) of the strain detection beam portion 4 of the first embodiment. Ground, set in the central part of the hole H1. Two holes H11, H12 correspond to the hole which partitioned the hole H1 of 1st Embodiment by the auxiliary beam part BM. The auxiliary beam portion BM does not have to be perpendicular to the connecting direction as long as it is provided so as to partition the two holes H11 and H12 into the first region 1 side and the second region 2 side. Other points are the same as those of the strain detecting beam portion 4 of the first embodiment.

應變體5位於輔助樑部BM的中央部分之上。應變體5雖然並未被固定於輔助樑部BM上，但也可以加以固定。The strain body 5 is located above the central portion of the auxiliary beam portion BM. Although the strain body 5 is not fixed to the auxiliary beam portion BM, it may be fixed.

應變檢測用樑部4A是藉由作成設置有輔助樑部BM的形狀，而如圖3以虛線所示，成為包含H型形狀部分的形狀。此H型形狀部分雖然對於Z軸力矩Mz的方向之力容易變形，但對於Y軸力矩My的方向之力則不易變形。The beam portion 4A for strain detection has a shape including an H-shaped portion as shown by a dotted line in FIG. 3 by forming the shape in which the auxiliary beam portion BM is provided. Although the H-shaped portion is easily deformed by the force in the direction of the Z-axis moment Mz, it is not easily deformed by the force in the direction of the Y-axis moment My.

依據本實施形態，除了第1實施形態所造成的作用效果，還能夠得到以下的作用效果。According to this embodiment, in addition to the effects of the first embodiment, the following effects can be obtained.

應變檢測用樑部4A是藉由設置輔助樑部BM，而能夠作成如下形狀：雖然對於Z軸力矩Mz的方向之力容易變形，但對於包含Y軸力矩My的Z軸力矩Mz以外的方向之力則不易變形。藉此，便能夠作成不降低對於Z軸力矩Mz的方向之轉矩的感測器之感度，並提升對於Z軸力矩Mz以外的方向之外力的耐久性。 (第3實施形態)The beam portion 4A for strain detection can be formed into a shape that is easily deformed by a force in the direction of the Z-axis moment Mz by providing the auxiliary beam portion BM, but is deformed by a force in a direction other than the Z-axis moment Mz including the Y-axis moment My. The force is not easy to deform. This makes it possible to create a sensor that does not lower its sensitivity to torque in the direction of the Z-axis moment Mz, and to improve durability against forces in directions other than the Z-axis moment Mz. (third embodiment)

圖4是將本發明的第3實施形態之轉矩感測器10B的應變檢測用樑部4B附近擴大的擴大圖。Fig. 4 is an enlarged view of the vicinity of the strain detecting beam portion 4B of the torque sensor 10B according to the third embodiment of the present invention.

轉矩感測器10B是在圖2所示的第1實施形態之轉矩感測器10中，將應變檢測用樑部4取代成應變檢測用樑部4B者。其他點則與第1實施形態是同樣的。The torque sensor 10B is a torque sensor 10 according to the first embodiment shown in FIG. 2 in which the strain detecting beam portion 4 is replaced with the strain detecting beam portion 4B. Other points are the same as those of the first embodiment.

應變檢測用樑部4B是在第1實施形態之應變檢測用樑部4中，在與第1區域部1的連接部分及與第2區域部2的連接部分各自的附近，在從孔H1往連接方向的延長線上，設置了減量部L1者。其他點則與第1實施形態之應變檢測用樑部4是同樣的。The strain detection beam portion 4B is in the vicinity of the connection portion with the first region portion 1 and the connection portion with the second region portion 2 in the strain detection beam portion 4 of the first embodiment, from the hole H1 to the On the extension line of the connection direction, the one with the reduction part L1 is installed. Other points are the same as those of the strain detecting beam portion 4 of the first embodiment.

與應變檢測用樑部4B的減量部L1以外之部分相比，減量部L1是輕量化地被形成。為了與其他部分相比厚度變薄，減量部L1可以形成為凹陷，亦可形成為有開孔。再者，減量部L1亦可僅設置於與第1區域部1的連接部分及與第2區域部2的連接部分其中任一方。再者，即便在設置於雙方的情況下，各自的形狀亦可不同。The weight reduction portion L1 is formed to be light in weight compared with the portion other than the weight reduction portion L1 of the strain detection beam portion 4B. In order to reduce the thickness compared with other parts, the reduced weight part L1 may be formed as a depression, or may be formed as having a hole. In addition, the weight reduction part L1 may be provided only in any one of the connection part with the 1st region part 1, and the connection part with the 2nd region part 2. In addition, even if it is installed in both sides, each shape may differ.

減量部L1尤其在有力施加於Z軸方向上時，會使此力所造成的彎折集中於此部分，而減輕施加於應變檢測用樑部4B的設置有應變體5之中央部分的力。In particular, when a force is applied to the Z-axis direction, the reduction portion L1 concentrates the bending caused by the force on this portion, thereby reducing the force applied to the central portion of the strain detection beam portion 4B where the strain body 5 is provided.

依據本實施形態，除了第1實施形態所造成的作用效果，還能夠得到以下的作用效果。According to this embodiment, in addition to the effects of the first embodiment, the following effects can be obtained.

藉由在應變檢測用樑部4B設置減量部L1，便能夠對於Z軸方向的力，來減輕施加於設置有應變體5之中央部分的力。藉此，應變體5便能夠減輕對於Z軸方向的力之應變，並能夠提升對於Z軸力矩Mz的方向之轉矩的感測器之感度。 (第4實施形態)By providing the reduction portion L1 in the strain detection beam portion 4B, it is possible to reduce the force applied to the central portion where the strain body 5 is provided with respect to the force in the Z-axis direction. Thereby, the strain body 5 can reduce the strain for the force in the Z-axis direction, and can increase the sensitivity of the sensor for the torque in the direction of the Z-axis moment Mz. (fourth embodiment)

圖5是將本發明的第4實施形態之轉矩感測器10C的應變檢測用樑部4C附近擴大的擴大圖。Fig. 5 is an enlarged view of the vicinity of the strain detecting beam portion 4C of the torque sensor 10C according to the fourth embodiment of the present invention.

轉矩感測器10C是在圖2所示的第1實施形態之轉矩感測器10中，將應變檢測用樑部4取代成應變檢測用樑部4C者。其他點則與第1實施形態是同樣的。In the torque sensor 10C, in the torque sensor 10 of the first embodiment shown in FIG. 2 , the strain detecting beam portion 4 is replaced with the strain detecting beam portion 4C. Other points are the same as those of the first embodiment.

應變檢測用樑部4C是在第1實施形態之應變檢測用樑部4中，設置了第2實施形態之輔助樑部BM及第3實施形態之減量部L1者。The beam portion 4C for strain detection is provided with the auxiliary beam portion BM of the second embodiment and the weight reduction portion L1 of the third embodiment in the beam portion 4 for strain detection of the first embodiment.

依據本實施形態，除了第1實施形態所造成的作用效果，還能夠得到第2實施形態及第3實施形態各自的作用效果。According to this embodiment, in addition to the effects of the first embodiment, the respective effects of the second and third embodiments can be obtained.

再者，本發明並非受限於上述的實施形態，亦可將構成要素進行刪除、附加或變更等。又，對於複數個實施形態亦可將構成要素進行組合或交換等，藉此作成新的實施形態。即便這種實施形態與上述的實施形態是直接相異者，但與本發明為同樣的宗旨者皆視為作為本發明的實施形態已說明者，而省略其說明。In addition, the present invention is not limited to the above-mentioned embodiments, and constituent elements may be deleted, added, changed, or the like. Moreover, it is also possible to create a new embodiment by combining or exchanging constituent elements with respect to a plurality of embodiments. Even if such an embodiment is directly different from the above-mentioned embodiments, those having the same gist as the present invention are deemed to have been described as embodiments of the present invention, and description thereof will be omitted.

1‧‧‧第1區域部 2‧‧‧第2區域部 3‧‧‧樑部 4、4A、4B、4C‧‧‧應變檢測用樑部 5‧‧‧應變體 10、10A、10B、10C‧‧‧轉矩感測器 BM‧‧‧輔助樑部 H1、H11、H12‧‧‧孔 L1‧‧‧減量部 R‧‧‧兩側 W‧‧‧位置處 X、Y、Z‧‧‧方向1‧‧‧1st Regional Department 2‧‧‧Second Regional Department 3‧‧‧Liang Department 4. 4A, 4B, 4C‧‧‧Beam part for strain detection 5‧‧‧Strain body 10, 10A, 10B, 10C‧‧‧torque sensor BM‧‧‧Auxiliary Beam H1, H11, H12‧‧‧hole L1‧‧‧Reduction Department R‧‧‧both sides W‧‧‧position X, Y, Z‧‧‧direction

圖1是顯示本發明的第1實施形態之轉矩感測器的構成的構成圖。Fig. 1 is a configuration diagram showing the configuration of a torque sensor according to a first embodiment of the present invention.

圖2是將第1實施形態之轉矩感測器的應變檢測用樑部附近擴大的擴大圖。Fig. 2 is an enlarged view of the vicinity of a strain detecting beam portion of the torque sensor according to the first embodiment.

圖3是將本發明的第2實施形態之轉矩感測器的應變檢測用樑部附近擴大的擴大圖。Fig. 3 is an enlarged view of the vicinity of the strain detecting beam portion of the torque sensor according to the second embodiment of the present invention.

圖4是將本發明的第3實施形態之轉矩感測器的應變檢測用樑部附近擴大的擴大圖。Fig. 4 is an enlarged view of the vicinity of the strain detecting beam portion of the torque sensor according to the third embodiment of the present invention.

圖5是將本發明的第4實施形態之轉矩感測器的應變檢測用樑部附近擴大的擴大圖。Fig. 5 is an enlarged view of the vicinity of the strain detecting beam portion of the torque sensor according to the fourth embodiment of the present invention.

1‧‧‧第1區域部 1‧‧‧1st Regional Department

2‧‧‧第2區域部 2‧‧‧Second Regional Department

3‧‧‧樑部 3‧‧‧Liang Department

4‧‧‧應變檢測用樑部 4‧‧‧Beam part for strain detection

5‧‧‧應變體 5‧‧‧Strain body

10‧‧‧轉矩感測器 10‧‧‧Torque sensor

X、Y、Z‧‧‧方向 X, Y, Z‧‧‧direction

Claims (4)

一種轉矩感測器，其特徵在於：具備：第1區域部，形成為環狀；第2區域部，在前述第1區域部的內側，與前述第1區域部位於同心圓上，形成為環狀；複數個第1樑部，連接前述第1區域部的內側與前述第2區域部的外側；第2樑部，連接前述第1區域部的內側與前述第2區域部的外側，且為如下形狀：與前述第1區域部或前述第2區域部的連接部分之寬度比前述第1區域部與前述第2區域部之間的中央部分之寬度更窄，且在前述中央部分設置有孔，並包含輔助樑部，前述輔助樑部是設置成會將前述孔分隔成前述第1區域部側與前述第2區域部側；及應變體，以橫跨前述第2樑部的前述孔之方式設置於前述第2樑部，用於檢測前述第1區域部與前述第2區域部的相對位移。 A torque sensor, characterized by: comprising: a first region formed in an annular shape; a second region located inside the first region on a concentric circle with the first region and formed as Ring shape; a plurality of first beams connecting the inside of the first region and the outside of the second region; second beams connecting the inside of the first region and the outside of the second region, and It has a shape in which the width of the connecting portion with the first region or the second region is narrower than the width of the center portion between the first region and the second region, and the center portion is provided with The hole includes an auxiliary beam part, and the auxiliary beam part is arranged so as to divide the hole into the side of the first region part and the side of the second region part; and a strain body to straddle the hole of the second beam part The method is provided on the aforementioned second beam portion for detecting the relative displacement between the aforementioned first area portion and the aforementioned second area portion. 一種轉矩感測器，其特徵在於具備：第1區域部，形成為環狀；第2區域部，在前述第1區域部的內側，與前述第1區域部位於同心圓上，形成為環狀；複數個第1樑部，連接前述第1區域部的內側與前述第2區域部的外側；第2樑部，連接前述第1區域部的內側與前述第2區域部的外側，且為如下形狀：與前述第1區域部或前述第2區域部的連接部分之寬度比前述第1區域部與前述第2區域部之間的中央部分之寬度更窄，且在前述中央部分設置有孔，且在從前述孔往連接第1區域部與第2區域部的連接方向的延長線上，在與前述第1區域部或前述第2區域部的至少 1個的連接部分的附近被減量過；及應變體，以橫跨前述第2樑部的前述孔之方式設置於前述第2樑部，用於檢測前述第1區域部與前述第2區域部的相對位移。 A torque sensor, characterized by comprising: a first area part formed in an annular shape; a second area part located inside the first area part on a concentric circle with the first area part and formed in an annular shape shape; a plurality of first beams, connecting the inside of the first region and the outside of the second region; the second beams, connecting the inside of the first region and the outside of the second region, and are A shape in which the width of the connecting portion with the first region or the second region is narrower than the width of the center portion between the first region and the second region, and a hole is provided in the center , and on the extension line from the aforementioned hole to the connecting direction connecting the first area portion and the second area portion, at least between the first area portion and the second area portion The vicinity of one connecting portion is reduced; and the strain body is provided on the second beam portion in a manner straddling the hole of the second beam portion, and is used for detecting the first region portion and the second region portion relative displacement. 如請求項1或2之轉矩感測器，其中前述應變體是固定於比前述第2樑部之兩端更內側處。 The torque sensor according to claim 1 or 2, wherein the aforementioned strain body is fixed on the inner side than both ends of the aforementioned second beam portion. 一種轉矩感測器，其特徵在於具備：第1區域部，形成為環狀；第2區域部，在前述第1區域部的內側，與前述第1區域部位於同心圓上，形成為環狀；複數個第1樑部，連接前述第1區域部的內側與前述第2區域部的外側；第2樑部，連接前述第1區域部的內側與前述第2區域部的外側，且為如下形狀：與前述第1區域部或前述第2區域部的連接部分之寬度比前述第1區域部與前述第2區域部之間的中央部分之寬度更窄，且在前述中央部分設置有孔；及應變體，以橫跨前述第2樑部的前述孔之方式固定於比前述第2樑部之兩端更內側處，用於檢測前述第1區域部與前述第2區域部的相對位移。 A torque sensor, characterized by comprising: a first area part formed in an annular shape; a second area part located inside the first area part on a concentric circle with the first area part and formed in an annular shape shape; a plurality of first beams, connecting the inside of the first region and the outside of the second region; the second beams, connecting the inside of the first region and the outside of the second region, and are A shape in which the width of the connecting portion with the first region or the second region is narrower than the width of the center portion between the first region and the second region, and a hole is provided in the center and a strain body, which is fixed on the inner side of the two ends of the second beam part across the aforementioned hole of the second beam part, and is used to detect the relative displacement between the first region part and the second region part .
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