TWI795144B - Light emitting diode display device - Google Patents

Light emitting diode display device Download PDF

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TWI795144B
TWI795144B TW110148849A TW110148849A TWI795144B TW I795144 B TWI795144 B TW I795144B TW 110148849 A TW110148849 A TW 110148849A TW 110148849 A TW110148849 A TW 110148849A TW I795144 B TWI795144 B TW I795144B
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layer
emitting diode
pad
dielectric layer
display device
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TW110148849A
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TW202326247A (en
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胡又元
吳冠賢
王世杰
黃國有
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友達光電股份有限公司
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Priority to CN202210498889.5A priority patent/CN114864773A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • H01L33/22Roughened surfaces, e.g. at the interface between epitaxial layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission
    • H01L27/153Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components with at least one potential-jump barrier or surface barrier specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • H01L33/46Reflective coating, e.g. dielectric Bragg reflector

Abstract

A light-emitting diode display device includes a circuit substrate, a dielectric layer, a light-emitting diode and a reflective layer. The circuit substrate has a first pad. The dielectric layer is located on the circuit substrate. The dielectric layer has a first through hole overlapping the first pad. The first surface of the dielectric layer has microstructures. The microstructures include raised microstructures or recessed microstructures. The light emitting diode is overlapping with the first through hole and is electrically connected to the first pad. The reflective layer is located on the first surface of the dielectric layer and overlapping with the microstructures.

Description

發光二極體顯示裝置light emitting diode display device

本發明是有關於一種發光二極體顯示裝置,且特別是有關於一種介電層具有微結構的發光二極體顯示裝置。The present invention relates to a light-emitting diode display device, and in particular to a light-emitting diode display device with a dielectric layer having a microstructure.

發光二極體是一種電致發光的半導體元件,具有效率高、壽命長、不易破損、反應速度快、可靠性高等優點,因此,發光二極體顯示裝置被視為一種極具競爭力的顯示裝置。一般而言,發光二極體顯示裝置中除了發光二極體以外,還會包括許多不同折射率的材料。當發光二極體所發出之光線從高折射率的介質往低折射率的介質傳遞,且光線的入射角大於臨界角(critical angle)時,光線會出現全反射的問題,並導致發光二極體顯示裝置的亮度不足,因此,目前亟需一種可以解決前述問題的方法。Light-emitting diode is a kind of electroluminescent semiconductor element, which has the advantages of high efficiency, long life, unbreakable, fast response, high reliability, etc. Therefore, light-emitting diode display device is regarded as a very competitive display device. Generally speaking, besides the light-emitting diodes, the light-emitting diode display device also includes many materials with different refractive indices. When the light emitted by the light-emitting diode is transmitted from a high-refractive-index medium to a low-refractive-index medium, and the incident angle of the light is greater than the critical angle (critical angle), the light will have a problem of total reflection, and cause the light-emitting diode The brightness of volumetric display devices is insufficient, and therefore, a method that can solve the aforementioned problems is urgently needed at present.

本發明提供一種發光二極體顯示裝置,能改善因為全反射的而導致亮度下降的問題。The invention provides a light-emitting diode display device, which can improve the problem of brightness reduction caused by total reflection.

本發明提供一種發光二極體顯示裝置的製造方法,能改善發光二極體顯示裝置因為全內反射的而導致亮度下降的問題。The invention provides a method for manufacturing a light-emitting diode display device, which can improve the problem that the brightness of the light-emitting diode display device decreases due to total internal reflection.

本發明的至少一實施例提供一種發光二極體顯示裝置。發光二極體顯示裝置包括電路基板、介電層、發光二極體以及反射層。電路基板具有第一接墊。介電層位於電路基板之上。介電層具有重疊於第一接墊的第一通孔。介電層的第一面具有多個微結構。微結構包括多個凸起微結構或多個凹陷微結構。發光二極體重疊於第一通孔,且電性連接第一接墊。反射層位於介電層的第一面之上,且重疊於微結構。At least one embodiment of the invention provides a light emitting diode display device. The light emitting diode display device includes a circuit substrate, a dielectric layer, a light emitting diode and a reflective layer. The circuit substrate has a first pad. The dielectric layer is on the circuit substrate. The dielectric layer has a first through hole overlapping with the first pad. The first surface of the dielectric layer has multiple microstructures. The microstructures include a plurality of raised microstructures or a plurality of recessed microstructures. The light emitting diode overlaps the first through hole and is electrically connected to the first pad. The reflective layer is located on the first surface of the dielectric layer and overlaps the microstructure.

本發明的至少一實施例提供一種發光二極體顯示裝置的製造方法,包括形成介電層於電路基板之上,其中電路基板具有第一接墊,且介電層具有重疊於第一接墊的第一通孔,其中介電層的第一面具有多個微結構,且微結構包括多個凸起微結構或多個凹陷微結構;將發光二極體電性連接至第一接墊,其中發光二極體重疊於第一通孔;以及形成反射層於介電層的第一面之上,且反射層重疊於微結構。At least one embodiment of the present invention provides a method for manufacturing a light-emitting diode display device, including forming a dielectric layer on a circuit substrate, wherein the circuit substrate has a first pad, and the dielectric layer has a layer overlapping the first pad. The first via hole, wherein the first surface of the dielectric layer has a plurality of microstructures, and the microstructures include a plurality of convex microstructures or a plurality of concave microstructures; electrically connect the light emitting diode to the first pad , wherein the light emitting diode is overlapped on the first through hole; and a reflective layer is formed on the first surface of the dielectric layer, and the reflective layer is overlapped on the microstructure.

圖1是依照本發明的一實施例的一種發光二極體顯示裝置的剖面示意圖。FIG. 1 is a schematic cross-sectional view of a light emitting diode display device according to an embodiment of the present invention.

請參考圖1,發光二極體顯示裝置10包括電路基板CB、介電層200、發光二極體410以及反射層312。在本實施例中,發光二極體顯示裝置10更包括第一緩衝層300、電極314、接合墊316、第二緩衝層320、第一連接結構402、第二連接結構404以及固晶膠500。Please refer to FIG. 1 , the light emitting diode display device 10 includes a circuit substrate CB, a dielectric layer 200 , a light emitting diode 410 and a reflective layer 312 . In this embodiment, the LED display device 10 further includes a first buffer layer 300 , electrodes 314 , bonding pads 316 , a second buffer layer 320 , a first connection structure 402 , a second connection structure 404 and a die-bonding glue 500 .

電路基板CB包括基板100、第一接墊112、第二接墊114、第三接墊116、第一絕緣層120、延伸結構132、第一訊號線134、第二訊號線136以及第二絕緣層140。電路基板CB具有顯示區DA以及周邊區PA。周邊區PA位於顯示區DA的至少一側。The circuit board CB includes a substrate 100, a first pad 112, a second pad 114, a third pad 116, a first insulating layer 120, an extension structure 132, a first signal line 134, a second signal line 136 and a second insulating layer. Layer 140. The circuit board CB has a display area DA and a peripheral area PA. The peripheral area PA is located on at least one side of the display area DA.

基板100之材質可為玻璃、石英、有機聚合物或不透光/反射材料(例如:導電材料、金屬、晶圓、陶瓷或其他可適用的材料)或其他可適用的材料。若使用導電材料或金屬時,則在基板100上覆蓋一層絕緣層(未繪示),以避免短路問題。The material of the substrate 100 can be glass, quartz, organic polymer or opaque/reflective material (eg conductive material, metal, wafer, ceramic or other applicable materials) or other applicable materials. If conductive materials or metals are used, an insulating layer (not shown) is covered on the substrate 100 to avoid short circuit problems.

第一接墊112、第二接墊114以及第三接墊116位於基板100上。在本實施例中,第一接墊112、第二接墊114以及第三接墊116屬於相同的導電膜層,例如第一金屬層。換句話說,第一接墊112、第二接墊114以及第三接墊116是藉由同一道圖案化製程所定義。在其他實施例中,第一接墊112、第二接墊114以及第三接墊116可以分別屬於不同的導電膜層。在本實施例中,第一接墊112以及第二接墊114位於電路基板CB的顯示區DA之中,而第三接墊116則位於電路基板CB的周邊區PA之中。The first pad 112 , the second pad 114 and the third pad 116 are located on the substrate 100 . In this embodiment, the first pad 112 , the second pad 114 and the third pad 116 belong to the same conductive film layer, such as the first metal layer. In other words, the first pad 112 , the second pad 114 and the third pad 116 are defined by the same patterning process. In other embodiments, the first pad 112 , the second pad 114 and the third pad 116 may respectively belong to different conductive film layers. In this embodiment, the first pad 112 and the second pad 114 are located in the display area DA of the circuit substrate CB, and the third pad 116 is located in the peripheral area PA of the circuit substrate CB.

第一絕緣層120位於電路基板CB的顯示區DA以及周邊區PA之中。第一絕緣層120具有分別重疊於第一接墊112、第二接墊114以及第三接墊116的多個通孔。The first insulating layer 120 is located in the display area DA and the peripheral area PA of the circuit substrate CB. The first insulating layer 120 has a plurality of through holes overlapping the first pad 112 , the second pad 114 and the third pad 116 respectively.

延伸結構132、第一訊號線134以及第二訊號線136位於第一絕緣層120之上。延伸結構132電性連接至第一接墊112。第一訊號線134電性連接至第二接墊114。第二訊號線136電性連接至第三接墊116。在本實施例中,延伸結構132、第一訊號線134以及第二訊號線136屬於相同的導電膜層,例如第二金屬層。換句話說,延伸結構132、第一訊號線134以及第二訊號線136是藉由同一道圖案化製程所定義。在其他實施例中,延伸結構132、第一訊號線134以及第二訊號線136可以分別屬於不同的導電膜層。在本實施例中,延伸結構132以及第一訊號線134位於電路基板CB的顯示區DA之中,而第二訊號線136則位於電路基板CB的周邊區PA之中。在一些實施例中,第二訊號線136自周邊區PA延伸至顯示區DA中,並電性連接至第一訊號線134及/或延伸結構132。舉例來說,第二訊號線136電性連接至顯示區DA中的一個或多個主動元件(未繪出),且前述一個或多個主動元件電性連接第二訊號線136至第一訊號線134及/或延伸結構132。The extension structure 132 , the first signal line 134 and the second signal line 136 are located on the first insulating layer 120 . The extension structure 132 is electrically connected to the first pad 112 . The first signal line 134 is electrically connected to the second pad 114 . The second signal line 136 is electrically connected to the third pad 116 . In this embodiment, the extension structure 132 , the first signal line 134 and the second signal line 136 belong to the same conductive film layer, such as the second metal layer. In other words, the extension structure 132 , the first signal line 134 and the second signal line 136 are defined by the same patterning process. In other embodiments, the extension structure 132 , the first signal line 134 and the second signal line 136 may respectively belong to different conductive film layers. In this embodiment, the extension structure 132 and the first signal line 134 are located in the display area DA of the circuit substrate CB, and the second signal lines 136 are located in the peripheral area PA of the circuit substrate CB. In some embodiments, the second signal line 136 extends from the peripheral area PA to the display area DA, and is electrically connected to the first signal line 134 and/or the extension structure 132 . For example, the second signal line 136 is electrically connected to one or more active devices (not shown) in the display area DA, and the aforementioned one or more active devices are electrically connected to the second signal line 136 to the first signal Line 134 and/or extension structure 132 .

在本實施例中,延伸結構132、第一訊號線134以及第二訊號線136位於第一絕緣層120上方,而第一接墊112、第二接墊114以及第三接墊116位於第一絕緣層120與基板100之間,但本發明不以此為限。第一金屬層與第二金屬層的位置可以互相對換。換句話說,在其他實施例中,延伸結構132、第一訊號線134以及第二訊號線136位於第一絕緣層120與基板100之間,而第一接墊112、第二接墊114以及第三接墊116位於第一絕緣層120上方。In this embodiment, the extension structure 132 , the first signal line 134 and the second signal line 136 are located above the first insulating layer 120 , and the first pad 112 , the second pad 114 and the third pad 116 are located on the first pad. between the insulating layer 120 and the substrate 100 , but the present invention is not limited thereto. The positions of the first metal layer and the second metal layer can be reversed. In other words, in other embodiments, the extension structure 132 , the first signal line 134 and the second signal line 136 are located between the first insulating layer 120 and the substrate 100 , while the first pad 112 , the second pad 114 and The third pad 116 is located above the first insulating layer 120 .

第二絕緣層140位於延伸結構132、第一訊號線134以及第二訊號線136之上。第二絕緣層140具有分別重疊於延伸結構132、第一訊號線134以及第二訊號線136的多個通孔。在本實施例中,第二絕緣層140的通孔還分別重疊於第一接墊112、第二接墊114以及第三接墊116。The second insulating layer 140 is located on the extension structure 132 , the first signal line 134 and the second signal line 136 . The second insulating layer 140 has a plurality of through holes overlapping the extension structure 132 , the first signal line 134 and the second signal line 136 respectively. In this embodiment, the through holes of the second insulating layer 140 overlap the first pad 112 , the second pad 114 and the third pad 116 respectively.

介電層200位於電路基板CB之上。在一些實施例中,介電層200位於電路基板CB的顯示區DA之上,且不延伸至電路基板CB的周邊區PA。介電層200具有重疊於第一接墊112的第一通孔210。在本實施例中,第一通孔210同時重疊於第一接墊112與第二接墊114。介電層200具有重疊於延伸結構132的第二通孔220。在一些實施例中,第二通孔220的寬度W2為8微米至10微米。在一些實施例中,寬度W1與寬度W2分別指的是為第一通孔210與第二通孔220的最大寬度,且寬度W1大於寬度W2。The dielectric layer 200 is located on the circuit substrate CB. In some embodiments, the dielectric layer 200 is located on the display area DA of the circuit substrate CB and does not extend to the peripheral area PA of the circuit substrate CB. The dielectric layer 200 has a first via hole 210 overlapping the first pad 112 . In this embodiment, the first through hole 210 overlaps the first pad 112 and the second pad 114 at the same time. The dielectric layer 200 has a second via hole 220 overlapping the extension structure 132 . In some embodiments, the width W2 of the second through hole 220 is 8 microns to 10 microns. In some embodiments, the width W1 and the width W2 respectively refer to the maximum widths of the first through hole 210 and the second through hole 220 , and the width W1 is greater than the width W2 .

介電層200的第一面S1具有多個微結構202。在本實施例中,微結構202包括多個凸起微結構。在本實施例中,微結構202為介電層200本身的表面結構。因此,製造介電層200所需的製程可以被簡化。在一些實施例中,介電層200為有機材料層,且適用於超高開口率(Ultra high aperture,UHA)顯示面板技術。The first surface S1 of the dielectric layer 200 has a plurality of microstructures 202 . In this embodiment, the microstructure 202 includes a plurality of protruding microstructures. In this embodiment, the microstructure 202 is the surface structure of the dielectric layer 200 itself. Therefore, the process required for manufacturing the dielectric layer 200 can be simplified. In some embodiments, the dielectric layer 200 is an organic material layer, and is suitable for ultra high aperture (UHA) display panel technology.

在本實施例中,部分介電層200重疊於導電層(例如延伸結構132以及第一訊號線134),而另一部分介電層200未重疊於導電層。在一些實施例中,重疊於導電層的部分介電層200的頂面高於未重疊於導電層的另一部分介電層200的頂面,但本發明不以此為限。在其他實施例中,重疊於導電層的部分介電層200的頂面與未重疊於導電層的另一部分介電層200的頂面位於相同的水平高度。In this embodiment, part of the dielectric layer 200 overlaps the conductive layer (eg, the extension structure 132 and the first signal line 134 ), while another part of the dielectric layer 200 does not overlap the conductive layer. In some embodiments, the top surface of a portion of the dielectric layer 200 overlapping the conductive layer is higher than the top surface of another portion of the dielectric layer 200 not overlapping the conductive layer, but the invention is not limited thereto. In other embodiments, the top surface of a portion of the dielectric layer 200 overlapping the conductive layer is at the same level as the top surface of another portion of the dielectric layer 200 not overlapping the conductive layer.

發光二極體410重疊於介電層200的第一通孔210,且電性連接第一接墊112與第二接墊114。在本實施例中,發光二極體410可以包括任意形式的發光二極體。在本實施例中,發光二極體410的兩個電極(未繪出)分別電性連接至第一通孔210中的第一連接結構402與第二連接結構404,且透過第一連接結構402與第二連接結構404而分別電性連接第一接墊112與第二接墊114。第一連接結構402與第二連接結構404可以為單層或多層結構。在一些實施例中,第一連接結構402與第二連接結構404為銲料。在一些實施例中,第一連接結構402與第二連接結構404的厚度H1大於介電層200的厚度H2。The light emitting diode 410 overlaps the first through hole 210 of the dielectric layer 200 and is electrically connected to the first pad 112 and the second pad 114 . In this embodiment, the light emitting diode 410 may include any form of light emitting diode. In this embodiment, two electrodes (not shown) of the light emitting diode 410 are electrically connected to the first connection structure 402 and the second connection structure 404 in the first through hole 210 respectively, and pass through the first connection structure 402 and the second connection structure 404 are electrically connected to the first pad 112 and the second pad 114 respectively. The first connection structure 402 and the second connection structure 404 can be single-layer or multi-layer structures. In some embodiments, the first connection structure 402 and the second connection structure 404 are solder. In some embodiments, the thickness H1 of the first connection structure 402 and the second connection structure 404 is greater than the thickness H2 of the dielectric layer 200 .

第一緩衝層300位於介電層200的第一面S1之上。在本實施例中,第一緩衝層300直接形成於介電層200上,且第一緩衝層300覆蓋微結構202。在本實施例中,第一緩衝層300共形於微結構202,因此在介電層200的第一面S1之上的第一緩衝層300具有對應於微結構202的形狀。在本實施例中,第一緩衝層300還襯於第一通孔210的側壁與第二通孔220的側壁。The first buffer layer 300 is located on the first surface S1 of the dielectric layer 200 . In this embodiment, the first buffer layer 300 is directly formed on the dielectric layer 200 , and the first buffer layer 300 covers the microstructure 202 . In this embodiment, the first buffer layer 300 conforms to the microstructure 202 , so the first buffer layer 300 on the first surface S1 of the dielectric layer 200 has a shape corresponding to the microstructure 202 . In this embodiment, the first buffer layer 300 also lines the sidewalls of the first through hole 210 and the sidewall of the second through hole 220 .

在本實施例中,反射層312與電極314皆設置於顯示區DA之上,且反射層312與電極314皆具有對應微結構202的形狀。在一些實施例中,反射層312為浮置電極,但本發明不以此為限。In this embodiment, both the reflective layer 312 and the electrode 314 are disposed on the display area DA, and both the reflective layer 312 and the electrode 314 have shapes corresponding to the microstructure 202 . In some embodiments, the reflective layer 312 is a floating electrode, but the invention is not limited thereto.

反射層312位於介電層200的第一面S1之上,且重疊於微結構202。在本實施例中,反射層312直接形成於第一緩衝層300上,且共形於第一緩衝層300的表面,因此,反射層312具有對應於微結構202的形狀。The reflective layer 312 is located on the first surface S1 of the dielectric layer 200 and overlaps the microstructure 202 . In this embodiment, the reflective layer 312 is directly formed on the first buffer layer 300 and is conformal to the surface of the first buffer layer 300 , therefore, the reflective layer 312 has a shape corresponding to the microstructure 202 .

電極314位於介電層200的第一面S1之上,且重疊於微結構202。在本實施例中,電極314直接形成於第一緩衝層300上,且共形於第一緩衝層300的表面,因此,電極314具有對應於微結構202的形狀。電極314分離於反射層312。The electrode 314 is located on the first surface S1 of the dielectric layer 200 and overlaps the microstructure 202 . In this embodiment, the electrode 314 is directly formed on the first buffer layer 300 and is conformal to the surface of the first buffer layer 300 . Therefore, the electrode 314 has a shape corresponding to the microstructure 202 . The electrode 314 is separated from the reflective layer 312 .

電極314自微結構202之上延伸進第二通孔220中。電極314電性連接至電路基板CB的延伸結構140。在一些實施例中,電極314可作為發光二極體410的測試用電極。舉例來說,藉由探針接觸電極314,藉此測試發光二極體410是否可以正常運作。在本實施例中,藉由電極314的設置,前述探針只需要接觸位於介電層200的第一面S1之上的電極314即可電性連接至發光二極體410,而不用將探針伸入第二通孔220中,因此第二通孔220的寬度W2可以被設置的較小。The electrode 314 extends from above the microstructure 202 into the second through hole 220 . The electrode 314 is electrically connected to the extension structure 140 of the circuit substrate CB. In some embodiments, the electrode 314 can be used as an electrode for testing the LED 410 . For example, by touching the electrode 314 with a probe, it is tested whether the light emitting diode 410 can work normally. In this embodiment, with the arrangement of the electrodes 314, the aforementioned probes only need to contact the electrodes 314 on the first surface S1 of the dielectric layer 200 to be electrically connected to the light-emitting diodes 410, without using the probes. The needle protrudes into the second through hole 220, so the width W2 of the second through hole 220 can be set smaller.

第二緩衝層320直接形成於反射層312上。反射層312位於第一緩衝層300與第二緩衝層320之間。在本實施例中,第二緩衝層320具有重疊於電極314的通孔,因此探針可以透過前述通孔而接觸電極314。在一些實施例中,第二緩衝層320填入反射層312與電極314之間的間隙,藉此減少反射層312與電極314短路的機會,但本發明不以此為限。在其他實施例中,第二緩衝層320未填入反射層312與電極314之間的間隙。The second buffer layer 320 is directly formed on the reflective layer 312 . The reflective layer 312 is located between the first buffer layer 300 and the second buffer layer 320 . In this embodiment, the second buffer layer 320 has a through hole overlapping the electrode 314 , so the probe can contact the electrode 314 through the aforementioned through hole. In some embodiments, the second buffer layer 320 fills the gap between the reflective layer 312 and the electrode 314 , thereby reducing the chance of the short circuit between the reflective layer 312 and the electrode 314 , but the invention is not limited thereto. In other embodiments, the second buffer layer 320 does not fill the gap between the reflective layer 312 and the electrode 314 .

固晶膠500覆蓋發光二極體410。在一些實施例中,固晶膠500流入第一通孔210中,並包覆發光二極體410下方的第一連接結構402與第二連接結構404。在一些實施例中,固晶膠500覆蓋電極314,並選擇性的填入第二通孔220中。在一些實施例中,固晶膠500為透明封裝材料,例如環氧樹脂或其他合適的材料。固晶膠500的折射率大於1。在一些實施例中,固晶膠500的折射率為1.2至1.7,例如1.5。The die-bonding adhesive 500 covers the LED 410 . In some embodiments, the die-bonding glue 500 flows into the first through hole 210 and covers the first connection structure 402 and the second connection structure 404 under the light emitting diode 410 . In some embodiments, the die-bonding glue 500 covers the electrodes 314 and is selectively filled into the second through holes 220 . In some embodiments, the die-bonding adhesive 500 is a transparent packaging material, such as epoxy resin or other suitable materials. The refractive index of the die-bonding adhesive 500 is greater than 1. In some embodiments, the refractive index of the die-bonding adhesive 500 is 1.2 to 1.7, such as 1.5.

在本實施例中,當發光二極體410所發出之光線L在抵達固晶膠500與空氣之間的界面時的入射角θ1大於臨界角,光線L將會出現全反射。光線L被固晶膠500與空氣之間的界面反射後,會被微結構202上方之反射層312或電極314所反射,並再次抵達固晶膠500與空氣之間的界面。當光線L再次抵達固晶膠500與空氣之間的界面時的入射角θ2小於臨界角,光線L將可以離開固晶膠500。基於前述,藉由反射層312及/或電極314的設置,可以改善因為全反射的而導致亮度下降的問題。In this embodiment, when the incident angle θ1 of the light L emitted by the light emitting diode 410 reaches the interface between the die-bonding adhesive 500 and air is greater than the critical angle, the light L will be totally reflected. After the light L is reflected by the interface between the die-bonding glue 500 and the air, it will be reflected by the reflective layer 312 or the electrode 314 above the microstructure 202 and reach the interface between the die-bonding glue 500 and the air again. When the light L reaches the interface between the die-bonding adhesive 500 and the air again, the incident angle θ2 is smaller than the critical angle, and the light L can leave the die-bonding adhesive 500 . Based on the foregoing, by disposing the reflective layer 312 and/or the electrode 314 , the problem of brightness decrease due to total reflection can be improved.

在一些實施例中,在顯示區DA之上更包含黑矩陣(未繪出)。黑矩陣適用於避免不同之畫素或子畫素互相干擾。In some embodiments, a black matrix (not shown) is further included on the display area DA. The black matrix is suitable for preventing different pixels or sub-pixels from interfering with each other.

接合墊316位於周邊區PA之上。接合墊316電性連接至第三接墊116與第二訊號線136。在一些實施例中,接合墊316、電極314與反射層312屬於相同膜層。換句話說,接合墊316、電極314與反射層312是藉由同一道圖案化製程所定義。在本實施例中,接合墊316、電極314與反射層312包括相同的材料。舉例來說,接合墊316、電極314與反射層312包括鋁、銀、或上述金屬或其他反射材料。Bonding pads 316 are located on the peripheral area PA. The bonding pad 316 is electrically connected to the third pad 116 and the second signal line 136 . In some embodiments, the bonding pad 316 , the electrode 314 and the reflective layer 312 belong to the same film layer. In other words, the bonding pad 316, the electrode 314 and the reflective layer 312 are defined by the same patterning process. In this embodiment, the bonding pad 316 , the electrode 314 and the reflective layer 312 include the same material. For example, the bonding pad 316 , the electrode 314 and the reflective layer 312 include aluminum, silver, or the aforementioned metals or other reflective materials.

圖2A至圖2F是圖1的發光二極體顯示裝置的製造方法的剖面示意圖。2A to 2F are schematic cross-sectional views of the manufacturing method of the light emitting diode display device of FIG. 1 .

請參考圖2A,提供電路基板CB。電路基板CB包括基板100、第一接墊112、第二接墊114、第三接墊116、第一絕緣層120、延伸結構132、第一訊號線134、第二訊號線136以及第二絕緣層140,其中第一絕緣層120與第二絕緣層140具有重疊於第一接墊112的通孔122、重疊於第二接墊114的通孔124以及重疊於第三接墊116的通孔126。第二絕緣層140具有重疊於延伸結構132的通孔128。Referring to FIG. 2A , a circuit substrate CB is provided. The circuit board CB includes a substrate 100, a first pad 112, a second pad 114, a third pad 116, a first insulating layer 120, an extension structure 132, a first signal line 134, a second signal line 136 and a second insulating layer. layer 140, wherein the first insulating layer 120 and the second insulating layer 140 have a via hole 122 overlapping the first pad 112, a via hole 124 overlapping the second pad 114, and a via hole overlapping the third pad 116 126. The second insulating layer 140 has a through hole 128 overlapping the extension structure 132 .

請參考圖2B至圖2E,形成介電層200於電路基板CB之上。Referring to FIG. 2B to FIG. 2E , a dielectric layer 200 is formed on the circuit substrate CB.

首先請參考圖2B,塗佈第一光阻層PR1於電路基板CB之上。第一光阻層PR1位於顯示區DA之上,且選擇性地位於周邊區PA之上。第一光阻層PR1選擇性地填入第二絕緣層140的通孔122、通孔124、通孔126以及通孔128中。First, referring to FIG. 2B , the first photoresist layer PR1 is coated on the circuit substrate CB. The first photoresist layer PR1 is located on the display area DA, and selectively located on the peripheral area PA. The first photoresist layer PR1 selectively fills the via holes 122 , 124 , 126 and 128 of the second insulating layer 140 .

請參考圖2C,對第一光阻層PR1執行第一微影製程,以形成有機材料層200a。有機材料層200a位於顯示區DA之上,且不延伸至周邊區PA。有機材料層200a具有第一通孔210與第二通孔220。第一通孔210重疊於第一接墊112與第二接墊114。第二通孔220重疊於延伸結構132。Referring to FIG. 2C , a first lithography process is performed on the first photoresist layer PR1 to form an organic material layer 200 a. The organic material layer 200a is located on the display area DA and does not extend to the peripheral area PA. The organic material layer 200 a has a first through hole 210 and a second through hole 220 . The first through hole 210 overlaps the first pad 112 and the second pad 114 . The second through hole 220 overlaps the extension structure 132 .

請參考圖2D,塗佈第二光阻層PR2於有機材料層200a之上。在一些實施例中,第一光阻層PR1與第二光阻層PR2包括相同的光阻材料。舉例來說,第一光阻層PR1與第二光阻層PR2皆為正光阻材料或第一光阻層PR1與第二光阻層PR2皆為負光阻材料。Referring to FIG. 2D, the second photoresist layer PR2 is coated on the organic material layer 200a. In some embodiments, the first photoresist layer PR1 and the second photoresist layer PR2 include the same photoresist material. For example, both the first photoresist layer PR1 and the second photoresist layer PR2 are positive photoresist materials or both the first photoresist layer PR1 and the second photoresist layer PR2 are negative photoresist materials.

請參考圖2E,對第二光阻層PR2執行第二微影製程,以形成凸起微結構202。介電層200包括有機材料層以及位於有機材料層表面的凸起微結構202。在一些實施例中,由於有機材料層與凸起微結構202包括相同材料,因此有機材料層與凸起微結構202之間的界線較不明顯。Referring to FIG. 2E , a second photolithography process is performed on the second photoresist layer PR2 to form a raised microstructure 202 . The dielectric layer 200 includes an organic material layer and a raised microstructure 202 on the surface of the organic material layer. In some embodiments, since the organic material layer and the raised microstructure 202 comprise the same material, the boundary between the organic material layer and the raised microstructure 202 is less obvious.

接著請參考圖2F,形成第一緩衝層300於介電層200上。在一些實施例中,第一緩衝層300選擇性地填入第一通孔210與第二通孔220中,並接觸第二絕緣層140。Next, referring to FIG. 2F , a first buffer layer 300 is formed on the dielectric layer 200 . In some embodiments, the first buffer layer 300 selectively fills the first via hole 210 and the second via hole 220 and contacts the second insulating layer 140 .

形成反射層312、電極314以及接合墊316。反射層312以及電極314形成於介電層200的第一面S1之上,而接合墊316形成於周邊區PA之上。在本實施例中,反射層312以及電極314直接形成於第一緩衝層300上,而接合墊316直接形成於第二絕緣層140上。反射層312以及電極314重疊於微結構202。A reflective layer 312 , electrodes 314 and bonding pads 316 are formed. The reflective layer 312 and the electrode 314 are formed on the first surface S1 of the dielectric layer 200 , and the bonding pad 316 is formed on the peripheral area PA. In this embodiment, the reflective layer 312 and the electrode 314 are directly formed on the first buffer layer 300 , and the bonding pad 316 is directly formed on the second insulating layer 140 . The reflective layer 312 and the electrode 314 overlap the microstructure 202 .

最後,請參考圖1,將發光二極體410電性連接至第一接墊112與第二接墊114。在一些實施例中,用探針接觸電極314以檢測發光二極體410是否可以正常運作。在檢測完發光二極體410之後,於發光二極體410上形成固晶膠500。Finally, referring to FIG. 1 , the light emitting diode 410 is electrically connected to the first pad 112 and the second pad 114 . In some embodiments, a probe is used to touch the electrode 314 to detect whether the LED 410 can function normally. After the light-emitting diode 410 is inspected, a die-bonding glue 500 is formed on the light-emitting diode 410 .

圖3是依照本發明的一實施例的一種發光二極體顯示裝置的剖面示意圖。在此必須說明的是,圖3的實施例沿用圖1的實施例的元件標號與部分內容,其中採用相同或近似的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,在此不贅述。FIG. 3 is a schematic cross-sectional view of a light emitting diode display device according to an embodiment of the present invention. It must be noted here that the embodiment in FIG. 3 uses the component numbers and parts of the content in the embodiment in FIG. 1 , wherein the same or similar numbers are used to denote the same or similar components, and the description of the same technical content is omitted. For the description of the omitted part, reference may be made to the foregoing embodiments, and details are not repeated here.

圖3的發光二極體顯示裝置20與圖1的發光二極體顯示裝置10的主要差異在於:發光二極體顯示裝置20的平坦層200的表面S1的微結構602為凹陷微結構。The main difference between the light emitting diode display device 20 in FIG. 3 and the light emitting diode display device 10 in FIG. 1 is that the microstructure 602 of the surface S1 of the flat layer 200 of the light emitting diode display device 20 is a concave microstructure.

請參考圖3,發光二極體顯示裝置20包括電路基板CB、介電層200、發光二極體410以及反射層312。在本實施例中,發光二極體顯示裝置20更包括電極314、接合墊316、第二緩衝層320、第一連接結構402、第二連接結構404以及固晶膠500。Please refer to FIG. 3 , the light emitting diode display device 20 includes a circuit substrate CB, a dielectric layer 200 , a light emitting diode 410 and a reflective layer 312 . In this embodiment, the light emitting diode display device 20 further includes electrodes 314 , bonding pads 316 , a second buffer layer 320 , a first connection structure 402 , a second connection structure 404 and a die-bonding adhesive 500 .

電路基板CB包括基板100、第一接墊112、第二接墊114、第三接墊116、第一絕緣層120、延伸結構132、第一訊號線134、第二訊號線136、第三訊號線138以及第二絕緣層140。電路基板CB具有顯示區DA以及周邊區PA。周邊區PA位於顯示區DA的至少一側。The circuit board CB includes a substrate 100, a first pad 112, a second pad 114, a third pad 116, a first insulating layer 120, an extension structure 132, a first signal line 134, a second signal line 136, a third signal line wire 138 and a second insulating layer 140 . The circuit board CB has a display area DA and a peripheral area PA. The peripheral area PA is located on at least one side of the display area DA.

第一接墊112、第二接墊114以及第三接墊116位於基板100上。在本實施例中,第一接墊112以及第二接墊114位於電路基板CB的顯示區DA之中,而第三接墊116則位於電路基板CB的周邊區PA之中。The first pad 112 , the second pad 114 and the third pad 116 are located on the substrate 100 . In this embodiment, the first pad 112 and the second pad 114 are located in the display area DA of the circuit substrate CB, and the third pad 116 is located in the peripheral area PA of the circuit substrate CB.

第一絕緣層120位於電路基板CB的顯示區DA以及周邊區PA之中。第一絕緣層120具有分別重疊於第一接墊112、第二接墊114以及第三接墊116的多個通孔。在本實施例中,第一接墊112、第二接墊114以及第三接墊116屬於相同的導電膜層,例如第一金屬層。The first insulating layer 120 is located in the display area DA and the peripheral area PA of the circuit substrate CB. The first insulating layer 120 has a plurality of through holes overlapping the first pad 112 , the second pad 114 and the third pad 116 respectively. In this embodiment, the first pad 112 , the second pad 114 and the third pad 116 belong to the same conductive film layer, such as the first metal layer.

延伸結構132、第一訊號線134、第二訊號線136以及第三訊號線138位於第一絕緣層120之上。延伸結構132電性連接至第一接墊112。第一訊號線134電性連接至第二接墊114。第二訊號線136電性連接至第三接墊116。在本實施例中,延伸結構132、第一訊號線134、第二訊號線136以及第三訊號線138屬於相同的導電膜層,例如第二金屬層。在本實施例中,延伸結構132、第一訊號線134以及第三訊號線138位於電路基板CB的顯示區DA之中,而第二訊號線136則位於電路基板CB的周邊區PA之中。在一些實施例中,第二訊號線136自周邊區PA延伸至顯示區DA中,並電性連接至第一訊號線134、第三訊號線138及/或延伸結構132。第三訊號線138可以為發光二極體顯示裝置20的任何一種導線,例如電源線、時脈訊號線、接地線或其他導線。The extension structure 132 , the first signal line 134 , the second signal line 136 and the third signal line 138 are located on the first insulating layer 120 . The extension structure 132 is electrically connected to the first pad 112 . The first signal line 134 is electrically connected to the second pad 114 . The second signal line 136 is electrically connected to the third pad 116 . In this embodiment, the extension structure 132 , the first signal line 134 , the second signal line 136 and the third signal line 138 belong to the same conductive film layer, such as the second metal layer. In this embodiment, the extension structure 132 , the first signal line 134 and the third signal line 138 are located in the display area DA of the circuit substrate CB, and the second signal line 136 is located in the peripheral area PA of the circuit substrate CB. In some embodiments, the second signal line 136 extends from the peripheral area PA to the display area DA, and is electrically connected to the first signal line 134 , the third signal line 138 and/or the extension structure 132 . The third signal wire 138 can be any wire of the LED display device 20, such as a power wire, a clock signal wire, a ground wire or other wires.

在本實施例中,延伸結構132、第一訊號線134、第二訊號線136以及第三訊號線138位於第一絕緣層120上方,而第一接墊112、第二接墊114以及第三接墊116位於第一絕緣層120與基板100之間,但本發明不以此為限。第一金屬層與第二金屬層的位置可以互相對換。In this embodiment, the extension structure 132 , the first signal line 134 , the second signal line 136 and the third signal line 138 are located above the first insulating layer 120 , while the first pad 112 , the second pad 114 and the third The pad 116 is located between the first insulating layer 120 and the substrate 100 , but the invention is not limited thereto. The positions of the first metal layer and the second metal layer can be reversed.

第二絕緣層140位於延伸結構132、第一訊號線134、第二訊號線136以及第三訊號線138之上。第二絕緣層140具有分別重疊於延伸結構132、第一訊號線134以及第二訊號線136的多個通孔。在本實施例中,第二絕緣層140的通孔還分別重疊於第一接墊112、第二接墊114以及第三接墊116。The second insulating layer 140 is located on the extension structure 132 , the first signal line 134 , the second signal line 136 and the third signal line 138 . The second insulating layer 140 has a plurality of through holes overlapping the extension structure 132 , the first signal line 134 and the second signal line 136 respectively. In this embodiment, the through holes of the second insulating layer 140 also overlap the first pad 112 , the second pad 114 and the third pad 116 respectively.

介電層600位於電路基板CB之上。在一些實施例中,介電層600位於電路基板CB的顯示區DA之上,且不延伸至電路基板CB的周邊區PA。在本實施例中,第一通孔610同時重疊於第一接墊112與第二接墊114。介電層620具有重疊於延伸結構132的第二通孔620。在一些實施例中,第二通孔620的寬度W2為8微米至10微米。在一些實施例中,第一通孔610的寬度W1大於第二通孔620的寬度W2。The dielectric layer 600 is on the circuit substrate CB. In some embodiments, the dielectric layer 600 is located on the display area DA of the circuit substrate CB and does not extend to the peripheral area PA of the circuit substrate CB. In this embodiment, the first through hole 610 overlaps the first pad 112 and the second pad 114 at the same time. The dielectric layer 620 has a second via hole 620 overlapping the extension structure 132 . In some embodiments, the width W2 of the second through hole 620 is 8 microns to 10 microns. In some embodiments, the width W1 of the first through hole 610 is greater than the width W2 of the second through hole 620 .

介電層600的第一面S1具有多個微結構602。在本實施例中,微結構602包括多個凹陷微結構。在本實施例中,微結構602為介電層600本身的表面結構。因此,製造介電層600所需的製程可以被簡化。在一些實施例中,介電層600為有機材料層,且適用於超高開口率(Ultra high aperture,UHA)顯示面板技術。The first surface S1 of the dielectric layer 600 has a plurality of microstructures 602 . In this embodiment, the microstructure 602 includes a plurality of concave microstructures. In this embodiment, the microstructure 602 is the surface structure of the dielectric layer 600 itself. Therefore, the process required for manufacturing the dielectric layer 600 can be simplified. In some embodiments, the dielectric layer 600 is an organic material layer, and is suitable for ultra high aperture (UHA) display panel technology.

發光二極體410重疊於介電層600的第一通孔610,且電性連接第一接墊112與第二接墊114。在本實施例中,發光二極體410可以包括任意形式的發光二極體。在本實施例中,發光二極體410的兩個電極(未繪出)分別電性連接至第一通孔610中的第一連接結構402與第二連接結構404,且透過第一連接結構402與第二連接結構404而分別電性連接第一接墊112與第二接墊114。第一連接結構402與第二連接結構404可以為單層或多層結構。在一些實施例中,第一連接結構402與第二連接結構404為銲料。在一些實施例中,第一連接結構402與第二連接結構404的厚度H1大於介電層600的厚度H2。The light emitting diode 410 overlaps the first through hole 610 of the dielectric layer 600 and is electrically connected to the first pad 112 and the second pad 114 . In this embodiment, the light emitting diode 410 may include any form of light emitting diode. In this embodiment, two electrodes (not shown) of the light emitting diode 410 are electrically connected to the first connection structure 402 and the second connection structure 404 in the first through hole 610 respectively, and pass through the first connection structure 402 and the second connection structure 404 are electrically connected to the first pad 112 and the second pad 114 respectively. The first connection structure 402 and the second connection structure 404 can be single-layer or multi-layer structures. In some embodiments, the first connection structure 402 and the second connection structure 404 are solder. In some embodiments, the thickness H1 of the first connection structure 402 and the second connection structure 404 is greater than the thickness H2 of the dielectric layer 600 .

在本實施例中,反射層312與電極314皆設置於顯示區DA之上,且反射層312與電極314皆具有對應微結構202的形狀。在一些實施例中,反射層312為浮置電極,但本發明不以此為限。In this embodiment, both the reflective layer 312 and the electrode 314 are disposed on the display area DA, and both the reflective layer 312 and the electrode 314 have shapes corresponding to the microstructure 202 . In some embodiments, the reflective layer 312 is a floating electrode, but the invention is not limited thereto.

反射層312位於介電層200的第一面S1之上,且重疊於微結構202。在本實施例中,反射層312直接形成於介電層600上,且共形於介電層600的表面,因此,反射層312具有對應於微結構202的形狀。The reflective layer 312 is located on the first surface S1 of the dielectric layer 200 and overlaps the microstructure 202 . In this embodiment, the reflective layer 312 is directly formed on the dielectric layer 600 and conforms to the surface of the dielectric layer 600 , so the reflective layer 312 has a shape corresponding to the microstructure 202 .

電極314位於介電層600的第一面S1之上,且重疊於微結構202。在本實施例中,電極314直接形成於介電層600上,且共形於介電層600的表面,因此,電極314具有對應於微結構602的形狀。電極314分離於反射層312。The electrode 314 is located on the first surface S1 of the dielectric layer 600 and overlaps the microstructure 202 . In this embodiment, the electrode 314 is directly formed on the dielectric layer 600 and is conformal to the surface of the dielectric layer 600 . Therefore, the electrode 314 has a shape corresponding to the microstructure 602 . The electrode 314 is separated from the reflective layer 312 .

電極314自微結構602之上延伸進第二通孔220中。電極314電性連接至電路基板CB的延伸結構140。在一些實施例中,電極314可作為發光二極體410的測試用電極。舉例來說,藉由探針接觸電極314,藉此測試發光二極體410是否可以正常運作。在本實施例中,藉由電極314的設置,前述探針只需要接觸位於介電層600的第一面S1之上的電極314即可電性連接至發光二極體410,而不用將探針伸入第二通孔620中,因此第二通孔620的寬度W2可以被設置的較小。The electrode 314 extends from above the microstructure 602 into the second through hole 220 . The electrode 314 is electrically connected to the extension structure 140 of the circuit substrate CB. In some embodiments, the electrode 314 can be used as an electrode for testing the LED 410 . For example, by touching the electrode 314 with a probe, it is tested whether the light emitting diode 410 can work normally. In this embodiment, with the arrangement of the electrodes 314, the aforementioned probes only need to contact the electrodes 314 on the first surface S1 of the dielectric layer 600 to be electrically connected to the light emitting diodes 410, without using the probes. The needle protrudes into the second through hole 620, so the width W2 of the second through hole 620 can be set smaller.

第二緩衝層320直接形成於反射層312上。反射層312位於介電層600與第二緩衝層320之間。在本實施例中,第二緩衝層320具有重疊於電極314的通孔,因此探針可以透過前述通孔而接處電極314。在一些實施例中,第二緩衝層320未填入反射層312與電極314之間的間隙。The second buffer layer 320 is directly formed on the reflective layer 312 . The reflective layer 312 is located between the dielectric layer 600 and the second buffer layer 320 . In this embodiment, the second buffer layer 320 has a through hole overlapping the electrode 314 , so the probe can pass through the through hole to connect to the electrode 314 . In some embodiments, the second buffer layer 320 does not fill the gap between the reflective layer 312 and the electrode 314 .

固晶膠500覆蓋發光二極體410。在一些實施例中,固晶膠500流入第一通孔610中,並包覆發光二極體410下方的第一連接結構402與第二連接結構404。在一些實施例中,固晶膠500覆蓋電極314,並選擇性的填入第二通孔620中。The die-bonding adhesive 500 covers the LED 410 . In some embodiments, the die-bonding glue 500 flows into the first through hole 610 and covers the first connection structure 402 and the second connection structure 404 under the light emitting diode 410 . In some embodiments, the die-bonding adhesive 500 covers the electrodes 314 and is selectively filled into the second through holes 620 .

在本實施例中,當發光二極體410所發出之光線L在抵達固晶膠500與空氣之間的界面時的入射角θ1大於臨界角,光線L將會出現全反射。光線L被固晶膠500與空氣之間的界面反射後,會被微結構602上方之反射層312或電極314所反射,並再次抵達固晶膠500與空氣之間的界面。當光線L再次抵達固晶膠500與空氣之間的界面時的入射角θ2小於臨界角,光線L將可以離開固晶膠500。基於前述,藉由反射層312及/或電極314的設置,可以改善因為全反射的而導致亮度下降的問題。In this embodiment, when the incident angle θ1 of the light L emitted by the light emitting diode 410 reaches the interface between the die-bonding adhesive 500 and air is greater than the critical angle, the light L will be totally reflected. After the light L is reflected by the interface between the die-bonding glue 500 and the air, it will be reflected by the reflective layer 312 or the electrode 314 above the microstructure 602 and reach the interface between the die-bonding glue 500 and the air again. When the light L reaches the interface between the die-bonding adhesive 500 and the air again, the incident angle θ2 is smaller than the critical angle, and the light L can leave the die-bonding adhesive 500 . Based on the foregoing, by disposing the reflective layer 312 and/or the electrode 314 , the problem of brightness decrease due to total reflection can be improved.

接合墊316位於周邊區PA之上。接合墊316電性連接至第三接墊116與第二訊號線136。在一些實施例中,接合墊316、電極314與反射層312屬於相同膜層。Bonding pads 316 are located on the peripheral area PA. The bonding pad 316 is electrically connected to the third pad 116 and the second signal line 136 . In some embodiments, the bonding pad 316 , the electrode 314 and the reflective layer 312 belong to the same film layer.

圖4A至圖4E是圖3的發光二極體顯示裝置的製造方法的剖面示意圖。4A to 4E are schematic cross-sectional views of the manufacturing method of the light emitting diode display device of FIG. 3 .

請參考圖4A至圖4D,形成介電層600於電路基板CB之上。Referring to FIG. 4A to FIG. 4D , a dielectric layer 600 is formed on the circuit substrate CB.

首先請參考圖4A,塗佈第一光阻層PR1於電路基板CB之上。第一光阻層PR1位於顯示區DA之上,且選擇性地位於周邊區PA之上。第一光阻層PR1選擇性地填入第二絕緣層140的通孔122、通孔124、通孔126以及通孔128中。First, referring to FIG. 4A , the first photoresist layer PR1 is coated on the circuit substrate CB. The first photoresist layer PR1 is located on the display area DA, and selectively located on the peripheral area PA. The first photoresist layer PR1 selectively fills the via holes 122 , 124 , 126 and 128 of the second insulating layer 140 .

請參考圖4B,對第一光阻層PR1執行第一微影製程,以形成有機材料層600a。有機材料層600a位於顯示區DA之上,且不延伸至周邊區PA。有機材料層600a具有第一通孔610與第二通孔620。第一通孔610重疊於第一接墊112與第二接墊114。第二通孔620重疊於延伸結構132。Referring to FIG. 4B , a first lithography process is performed on the first photoresist layer PR1 to form an organic material layer 600 a. The organic material layer 600a is located on the display area DA and does not extend to the peripheral area PA. The organic material layer 600 a has a first through hole 610 and a second through hole 620 . The first through hole 610 overlaps the first pad 112 and the second pad 114 . The second through hole 620 overlaps the extension structure 132 .

塗佈第二光阻層PR2於有機材料層600a之上。在一些實施例中,第一光阻層PR1與第二光阻層PR2包括不同的光阻材料。舉例來說,第一光阻層PR1與第二光阻層PR2中的一者為正光阻材料,且另一者為負光阻材料。Coating the second photoresist layer PR2 on the organic material layer 600a. In some embodiments, the first photoresist layer PR1 and the second photoresist layer PR2 include different photoresist materials. For example, one of the first photoresist layer PR1 and the second photoresist layer PR2 is a positive photoresist material, and the other is a negative photoresist material.

請參考圖4C,對第二光阻層PR2執行第二微影製程,以形成罩幕圖案MS。在一些實施例中,罩幕圖案MS的間距P1為4微米以上,且罩幕圖案MS的厚度H3為2.1微米至2.4微米。Referring to FIG. 4C , a second lithography process is performed on the second photoresist layer PR2 to form a mask pattern MS. In some embodiments, the pitch P1 of the mask pattern MS is greater than 4 micrometers, and the thickness H3 of the mask pattern MS is 2.1 micrometers to 2.4 micrometers.

請參考圖4D,以罩幕圖案MS為遮罩蝕刻有機材料層600a,以形成具有凹陷微結構602的介電層600。在一些實施例中,蝕刻有機材料層600a的方式例如包括乾式蝕刻。Referring to FIG. 4D , the organic material layer 600 a is etched using the mask pattern MS as a mask to form a dielectric layer 600 having a recessed microstructure 602 . In some embodiments, the method of etching the organic material layer 600 a includes dry etching, for example.

當介電層包括凸起微結構時,凸起微結構的頂面容易在熱處理製程後變得平滑。若凸起微結構不夠凸出,可能會降低凸起微結構上之反射層或電極改變光線方向的能力。在本實施例中,介電層600的凹陷微結構602不會出現前述凸起微結構所遇到的問題,因此可以提升發光二極體顯示裝置的亮度。When the dielectric layer includes raised microstructures, the top surfaces of the raised microstructures tend to be smoothed after the heat treatment process. If the raised microstructure is not raised enough, it may reduce the ability of the reflective layer or electrode on the raised microstructure to redirect light. In this embodiment, the concave microstructure 602 of the dielectric layer 600 does not have the problems encountered by the aforementioned convex microstructure, so the brightness of the light-emitting diode display device can be improved.

請參考圖4E,形成反射層312、電極314以及接合墊316。反射層312以及電極314形成於介電層600的第一面S1之上,而接合墊316形成於周邊區PA之上。在本實施例中,反射層312以及電極314直接形成於介電層600上,而接合墊316直接形成於第二絕緣層140上。反射層312以及電極314重疊於微結構602。Referring to FIG. 4E , a reflective layer 312 , electrodes 314 and bonding pads 316 are formed. The reflective layer 312 and the electrode 314 are formed on the first surface S1 of the dielectric layer 600 , and the bonding pad 316 is formed on the peripheral area PA. In this embodiment, the reflective layer 312 and the electrode 314 are directly formed on the dielectric layer 600 , and the bonding pad 316 is directly formed on the second insulating layer 140 . The reflective layer 312 and the electrode 314 overlap the microstructure 602 .

最後,請參考圖3,將發光二極體410電性連接至第一接墊112與第二接墊114。在一些實施例中,用探針接觸電極314以檢測發光二極體410是否可以正常運作。在檢測完發光二極體410之後,於發光二極體410上形成固晶膠500。Finally, referring to FIG. 3 , the light emitting diode 410 is electrically connected to the first pad 112 and the second pad 114 . In some embodiments, a probe is used to touch the electrode 314 to detect whether the LED 410 can function normally. After the light-emitting diode 410 is inspected, a die-bonding glue 500 is formed on the light-emitting diode 410 .

圖5是依照本發明的一實施例的一種發光二極體顯示裝置的上視示意圖。在此必須說明的是,圖5的實施例沿用圖1的實施例的元件標號與部分內容,其中採用相同或近似的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,在此不贅述。FIG. 5 is a schematic top view of a light emitting diode display device according to an embodiment of the present invention. It must be noted here that the embodiment in FIG. 5 follows the component numbers and part of the content of the embodiment in FIG. 1 , wherein the same or similar numbers are used to denote the same or similar components, and the description of the same technical content is omitted. For the description of the omitted part, reference may be made to the foregoing embodiments, and details are not repeated here.

請參考圖5,介電層的第一面具有排成陣列的多個微結構202。在本實施例中,微結構202為凸起微結構,但本發明不以此為限。在其他實施例中,微結構202為凹陷微結構。Please refer to FIG. 5 , the first surface of the dielectric layer has a plurality of microstructures 202 arranged in an array. In this embodiment, the microstructure 202 is a protruding microstructure, but the invention is not limited thereto. In other embodiments, the microstructures 202 are recessed microstructures.

發光二極體410重疊於介電層的第一通孔210,並電性連接至第一通孔210下方的第一接墊(圖5省略繪示)與第二接墊(圖5省略繪示)。The light emitting diode 410 overlaps the first through hole 210 of the dielectric layer, and is electrically connected to the first pad (not shown in FIG. 5 ) and the second pad (not shown in FIG. 5 ) under the first through hole 210 . Show).

反射層312與電極314位於介電層的第一面之上,且重疊於微結構202。反射層312與電極314互相分離。電極314透過介電層的第二通孔220而電性連接至延伸結構(圖5省略繪示)。The reflective layer 312 and the electrode 314 are located on the first surface of the dielectric layer and overlap the microstructure 202 . The reflective layer 312 and the electrode 314 are separated from each other. The electrode 314 is electrically connected to the extension structure (not shown in FIG. 5 ) through the second via hole 220 of the dielectric layer.

在本實施例中,微結構202位於發光二極體410的周圍,且環繞發光二極體410。In this embodiment, the microstructure 202 is located around the light emitting diode 410 and surrounds the light emitting diode 410 .

10, 20:發光二極體顯示裝置 100:基板 112:第一接墊 114:第二接墊 116:第三接墊 120:第一絕緣層 122, 124, 126, 128:通孔 132:延伸結構 134:第一訊號線 136:第二訊號線 138:第三訊號線 140:第二絕緣層 200, 600:介電層 200a, 600a:有機材料層 202:微結構/凸起微結構 210, 610:第一通孔 220, 620:第二通孔 300:第一緩衝層 312:反射層 314:電極 316:接合墊 320:第二緩衝層 402:第一連接結構 404:第二連接結構 410:發光二極體 500:固晶膠 602:微結構/凹陷微結構 CB:電路基板 DA:顯示區 H1, H2, H3:厚度 L:光線 MS:罩幕圖案 P1:間距 PA:周邊區 PR1:第一光阻層 PR2:第二光阻層 S1:第一面 W1, W2:寬度 θ1, θ2:入射角 10, 20: Light-emitting diode display device 100: Substrate 112: First pad 114: Second pad 116: The third pad 120: the first insulating layer 122, 124, 126, 128: through holes 132: Extended structure 134: The first signal line 136: Second signal line 138: The third signal line 140: second insulating layer 200, 600: dielectric layer 200a, 600a: organic material layer 202: Microstructure / Raised Microstructure 210, 610: the first through hole 220, 620: the second through hole 300: the first buffer layer 312: reflective layer 314: electrode 316: Bonding Pad 320: the second buffer layer 402: The first connection structure 404: The second connection structure 410: light emitting diode 500: solid crystal glue 602: Microstructure / Depressed Microstructure CB: circuit board DA: display area H1, H2, H3: Thickness L: light MS: Mask pattern P1: Pitch PA: Peripheral Area PR1: The first photoresist layer PR2: The second photoresist layer S1: the first side W1, W2: width θ1, θ2: angle of incidence

圖1是依照本發明的一實施例的一種發光二極體顯示裝置的剖面示意圖。 圖2A至圖2F是圖1的發光二極體顯示裝置的製造方法的剖面示意圖。 圖3是依照本發明的一實施例的一種發光二極體顯示裝置的剖面示意圖。 圖4A至圖4E是圖3的發光二極體顯示裝置的製造方法的剖面示意圖。 圖5是依照本發明的一實施例的一種發光二極體顯示裝置的上視示意圖。 FIG. 1 is a schematic cross-sectional view of a light emitting diode display device according to an embodiment of the present invention. 2A to 2F are schematic cross-sectional views of the manufacturing method of the light emitting diode display device of FIG. 1 . FIG. 3 is a schematic cross-sectional view of a light emitting diode display device according to an embodiment of the present invention. 4A to 4E are schematic cross-sectional views of the manufacturing method of the light emitting diode display device of FIG. 3 . FIG. 5 is a schematic top view of a light emitting diode display device according to an embodiment of the present invention.

10:發光二極體顯示裝置 10: Light-emitting diode display device

100:基板 100: Substrate

112:第一接墊 112: First pad

114:第二接墊 114: Second pad

116:第三接墊 116: The third pad

120:第一絕緣層 120: the first insulating layer

132:延伸結構 132: Extended structure

134:第一訊號線 134: The first signal line

136:第二訊號線 136: Second signal line

140:第二絕緣層 140: second insulating layer

200:介電層 200: dielectric layer

202:微結構/凸起微結構 202: Microstructure / Raised Microstructure

210:第一通孔 210: the first through hole

220:第二通孔 220: Second through hole

300:第一緩衝層 300: the first buffer layer

312:反射層 312: reflective layer

314:電極 314: electrode

316:接合墊 316: Bonding Pad

320:第二緩衝層 320: the second buffer layer

402:第一連接結構 402: The first connection structure

404:第二連接結構 404: The second connection structure

410:發光二極體 410: light emitting diode

500:固晶膠 500: solid crystal glue

CB:電路基板 CB: circuit board

DA:顯示區 DA: display area

H1,H2:厚度 H1, H2: Thickness

L:光線 L: light

PA:周邊區 PA: Peripheral Area

S1:第一面 S1: the first side

W1,W2:寬度 W1, W2: width

θ1,θ2:入射角 θ1, θ2: incident angle

Claims (11)

一種發光二極體顯示裝置,包括:一電路基板,具有一第一接墊以及一延伸結構;一介電層,位於該電路基板之上,且該介電層具有重疊於該第一接墊的一第一通孔,且該介電層具有一第二通孔,其中該介電層的一第一面具有多個微結構,且該些微結構包括多個凸起微結構或多個凹陷微結構;一發光二極體,重疊於該第一通孔,且電性連接該第一接墊;以及一反射層,位於該介電層的該第一面之上,且重疊於該些微結構;以及一電極,自該些微結構之上延伸進該第二通孔中,並電性連接至該電路基板的該延伸結構。 A light-emitting diode display device, comprising: a circuit substrate with a first pad and an extension structure; a dielectric layer located on the circuit substrate, and the dielectric layer has a structure overlapping the first pad a first via hole, and the dielectric layer has a second via hole, wherein a first surface of the dielectric layer has a plurality of microstructures, and the microstructures include a plurality of protruding microstructures or a plurality of depressions Microstructure; a light-emitting diode overlapping the first through hole and electrically connected to the first pad; and a reflective layer located on the first surface of the dielectric layer and overlapping the microstructure structure; and an electrode extending from above the microstructure into the second through hole and electrically connected to the extending structure of the circuit substrate. 如請求項1所述的發光二極體顯示裝置,其中該延伸結構電性連接該第一接墊。 The light emitting diode display device as claimed in claim 1, wherein the extension structure is electrically connected to the first pad. 如請求項1所述的發光二極體顯示裝置,其中該電路基板具有一顯示區以及一周邊區,該介電層位於該顯示區之中,且不延伸至該周邊區,且該第一接墊與該延伸結構位於該顯示區之中。 The light emitting diode display device as claimed in item 1, wherein the circuit substrate has a display area and a peripheral area, the dielectric layer is located in the display area and does not extend to the peripheral area, and the first contact The pad and the extension structure are located in the display area. 如請求項3所述的發光二極體顯示裝置,更包括:一接合墊,位於該周邊區之上,其中該接合墊與該反射層包括相同的材料。 The light emitting diode display device as claimed in claim 3, further comprising: a bonding pad located on the peripheral region, wherein the bonding pad and the reflective layer are made of the same material. 如請求項1所述的發光二極體顯示裝置,更包括:一第一緩衝層,直接形成於該介電層上,且該反射層直接形成於該第一緩衝層上;以及一第二緩衝層,直接形成於該反射層上,且該反射層位於該第一緩衝層與該第二緩衝層之間。 The light emitting diode display device according to claim 1, further comprising: a first buffer layer formed directly on the dielectric layer, and the reflective layer directly formed on the first buffer layer; and a second The buffer layer is directly formed on the reflective layer, and the reflective layer is located between the first buffer layer and the second buffer layer. 如請求項1所述的發光二極體顯示裝置,更包括:一第一連接結構,電性連接該發光二極體至該第一接墊,其中該第一連接結構的厚度大於該介電層的厚度。 The light-emitting diode display device as claimed in claim 1, further comprising: a first connection structure electrically connecting the light-emitting diode to the first pad, wherein the thickness of the first connection structure is greater than that of the dielectric layer thickness. 一種發光二極體顯示裝置的製造方法,包括:形成一介電層於一電路基板之上,其中該電路基板具有一第一接墊,且該介電層具有重疊於該第一接墊的一第一通孔,其中該介電層的一第一面具有多個微結構,且該些微結構包括多個凸起微結構或多個凹陷微結構;將一發光二極體電性連接至該第一接墊,其中該發光二極體重疊於該第一通孔;以及形成一反射層於該介電層的該第一面之上,且該反射層重疊於該些微結構。 A method for manufacturing a light-emitting diode display device, comprising: forming a dielectric layer on a circuit substrate, wherein the circuit substrate has a first pad, and the dielectric layer has a A first through hole, wherein a first surface of the dielectric layer has a plurality of microstructures, and the microstructures include a plurality of raised microstructures or a plurality of recessed microstructures; electrically connecting a light emitting diode to the The first pad, wherein the light-emitting diode overlaps the first through hole; and a reflection layer is formed on the first surface of the dielectric layer, and the reflection layer overlaps the microstructure. 如請求項7所述的發光二極體顯示裝置的製造方法,其中形成該介電層於該電路基板之上的方法包括:塗佈一第一光阻層於該電路基板之上;對該第一光阻層執行一第一微影製程,以形成一有機材料層,其中該有機材料層具有該第一通孔; 塗佈一第二光阻層於該有機材料層之上;對該第二光阻層執行一第二微影製程,以形成該些凸起微結構,其中該介電層包括該有機材料層以及該些凸起微結構。 The method for manufacturing a light-emitting diode display device as claimed in item 7, wherein the method for forming the dielectric layer on the circuit substrate includes: coating a first photoresist layer on the circuit substrate; performing a first lithography process on the first photoresist layer to form an organic material layer, wherein the organic material layer has the first through hole; coating a second photoresist layer on the organic material layer; performing a second photolithography process on the second photoresist layer to form the raised microstructures, wherein the dielectric layer includes the organic material layer and the raised microstructures. 如請求項8所述的發光二極體顯示裝置的製造方法,其中該第一光阻層與該第二光阻層包括相同的光阻材料。 The method of manufacturing a light emitting diode display device as claimed in claim 8, wherein the first photoresist layer and the second photoresist layer comprise the same photoresist material. 如請求項7所述的發光二極體顯示裝置的製造方法,其中形成該介電層於該電路基板之上的方法包括:塗佈一第一光阻層於該電路基板之上;對該第一光阻層執行一第一微影製程,以形成一有機材料層,其中該有機材料層具有該第一通孔;塗佈一第二光阻層於該有機材料層之上;對該第二光阻層執行一第二微影製程,以形成一罩幕圖案;以及以該罩幕圖案為遮罩蝕刻該有機材料層,以形成具有該些凹陷微結構的該介電層。 The method for manufacturing a light-emitting diode display device as claimed in item 7, wherein the method for forming the dielectric layer on the circuit substrate includes: coating a first photoresist layer on the circuit substrate; performing a first lithography process on the first photoresist layer to form an organic material layer, wherein the organic material layer has the first through hole; coating a second photoresist layer on the organic material layer; performing a second photolithography process on the second photoresist layer to form a mask pattern; and etching the organic material layer using the mask pattern as a mask to form the dielectric layer with the recessed microstructures. 如請求項10所述的發光二極體顯示裝置的製造方法,其中該第一光阻層與該第二光阻層包括不同的光阻材料。 The method of manufacturing a light emitting diode display device as claimed in claim 10, wherein the first photoresist layer and the second photoresist layer comprise different photoresist materials.
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Citations (1)

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TW201506867A (en) * 2013-08-09 2015-02-16 Sony Corp Display device and electronic apparatus

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TW201506867A (en) * 2013-08-09 2015-02-16 Sony Corp Display device and electronic apparatus

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