TWI795071B - Bellows pump - Google Patents

Abstract

The invention relates to a bellows pump. A bellows pump according to an embodiment of the present invention may include: a main body having a pump chamber for sucking and supplying liquid medicine formed therein; the liquid medicine in the pump chamber; the moving shaft runs through the center of the main body and is movably arranged, and the edges on both sides are connected to the compression plates respectively arranged on the bellows; the cover is respectively combined on both sides of the main body, And block the open part of the pump chamber to close; the piston housing, the front end is combined with the compression plate, and the rear end is movably combined with the inner side of the cover; and the piston is movably combined with the When air is injected into the piston housing, the piston housing is pushed to contract the bellows.

Description

bellows pump

The present invention relates to bellows pumps.

Generally, bellows pumps are used in semiconductor manufacturing equipment, for example, in the circulation of chemical solutions used in various processes such as IC and liquid crystal surface cleaning in semiconductor manufacturing equipment.

Such a bellows pump may include: a main body constituting a shape; a pair of bellows provided on said main body to pressurize and discharge a liquid medicine; and a moving shaft to achieve expansion/extension if said bellows are alternately moved by supplying compressed air. Shrinkage; compression plates are respectively disposed on the pair of bellows.

At this time, a pair of pump chambers in which the bellows are provided is formed inside the main body, and caps are respectively fastened on both sides of the main body to close the pump chambers. Then, a piston housing is provided inside the main body for contracting/expanding the bellows while moving if compressed air is injected. The piston casing includes a casing and a head, and the combination of the casing and the head is combined through a fastening pin penetrating one side.

However, the fastening pins that pass through the housing and the head are in the combined state due to There is a problem that the bellows pump is loosened due to the vibration generated in the drive of the bellows pump and falls off to the rear. Because the fastening pin is not restricted to move backward, but only connects the housing and the head by pressing the fastening pin, if the fastening pin falls off backward, it cannot be firmly combined with the piston housing.

In addition, conventionally, no separate discharge port is formed in the space formed by the main body and the piston housing, so there is a problem that an internal pressure load is generated when the piston housing moves.

The present invention provides a bellows pump having a structure in which a housing and a head constituting a piston housing disposed inside the bellows pump can be firmly combined.

In addition, the present invention provides a bellows pump for preventing an internal pressure load applied to a piston case from being generated inside the bellows pump.

A bellows pump according to an embodiment of the present invention may include: a main body having a pump chamber for sucking and supplying liquid medicine formed therein; the liquid medicine in the pump chamber; the moving shaft runs through the center of the main body and is movably arranged, and the edges on both sides are connected to the compression plates respectively arranged on the bellows; the cover is respectively combined on both sides of the main body, And block the open part of the pump chamber to close; the piston housing, the front end is combined with the compression plate, and the rear end is movably combined with the inner side of the cover; and the piston is movably combined with the described The piston housing, if injected with air, pushes the piston housing, causing the bellows to contract.

The piston housing may include: a head portion coupled to the compression plate; a fastening pin passing through the head portion to be coupled to the compression plate; and a housing portion where the fastening pin is coupled to the head portion. The fastening needle is combined with the head while supporting the rear end of the fastening needle in the state.

A press-fit rib may be formed on the housing portion along a circumferential direction, and the press-fit rib is press-fitted and fastened to a press-fit groove formed on the inner surface of the head.

A ventilation hole may be formed through the head portion and the housing portion to communicate with the outside where the piston is located.

A discharge slot may be formed on the outside of the head to discharge the air flowing in through the ventilation hole.

A sealing portion for sealing with the main body is provided at a rear end portion of the bellows pump. The sealing part may include: sealing protrusions press-fitted to couple both sides of the main body and the cover, and arranged as a pair at intervals; and O-rings inserted between the spaced sealing protrusions.

According to an embodiment of the present invention, the housing portion and the head constituting the piston housing provided inside the bellows pump can be firmly coupled, so that the coupling can be prevented from loosening during operation of the bellows pump.

In addition, no internal pressure load applied to the piston housing is generated inside the bellows pump, so the bellows pump can operate stably.

10: Subject

11: Move axis

12: Lock slot

14: Upper board

16: Lower board

18: Main body thread joint

20: pump room

22: Supply room

28: Check valve

30: Bellows

32: Compression board

40: Piston housing

41: Move hole

42: Shell part

44: Snap-in protrusion

46:Press-in ribs

50: head

51: screw

52: ventilation hole

54: discharge slot

56: fastening needle

58: Piston

59: Anti-off protrusion

60: cover

62: thread joint

70: Control subject

74: lock department

80: Liquid medicine inflow part

82: Chemical liquid discharge department

[ Fig. 1 ] is a front sectional view of a bellows pump according to an embodiment of the present invention.

[ Fig. 2 ] is a side sectional view of a bellows pump according to an embodiment of the present invention.

[ Fig. 3 ] is a cross-sectional view of a joint structure of an enlarged piston case.

[ Fig. 4 ] is a sectional view of a piston case.

[ Fig. 5] Fig. 1 is a cross-sectional view showing a seal structure of a bellows pump enlarged.

Various changes can be made to the present invention, and various embodiments can be provided, and specific embodiments are illustrated in the drawings and described in detail. However, this is not intended to limit the present invention to specific embodiments, but should be understood to include all changes, equivalents, and replacements within the scope of the idea and technology of the present invention. In the description of the present invention, if it is judged that the specific description of related known technologies may make the gist of the present invention unclear, the detailed description will be omitted.

The terms first, second, etc. may be used to describe various components, but the configuration is not limited to the terms. The terms are used only for the purpose of distinguishing one element from another element.

The terms used in the present application are used only to describe specific examples, and are not intended to limit the present invention. Expressions in the singular include expressions in the plural unless otherwise stated in the article. In the present application, terms such as "comprising" or "having" should be understood as specifying the features, numbers, steps, actions, members, components, etc. described in the specification. The existence of a part or a combination of these does not preclude the existence or additional possibility of one or more other features or digits, steps, actions, components, parts or a combination of these in advance.

In addition, in the entire specification, when "connected" is described, it does not only mean that two or more members are directly connected, but also means that two or more members are indirectly connected through other members, electrical connections other than physical connections, Or use different names according to position or function but form a whole.

Hereinafter, an embodiment of the bellows pump according to the present invention will be described in detail with reference to the drawings. When the description is made with reference to the drawings, the same reference numerals are assigned to the same or corresponding members, and overlapping descriptions are omitted.

Fig. 1 is a main sectional view of a bellows pump according to an embodiment of the present invention; Fig. 2 is a side sectional view of a bellows pump according to an embodiment of the present invention; Fig. 3 is a sectional view of a joint structure of an enlarged piston housing; Fig. 4 is a cross-sectional view of the piston housing; FIG. 5 is a cross-sectional view of the sealing structure of the bellows pump enlarged as part of the dotted line in FIG. 1 .

As shown in the figure, the bellows pump according to an embodiment of the present invention may include: a main body 10, inside which is formed a pump chamber 20 for sucking and supplying liquid medicine; , and compress and supply the liquid medicine flowing into the pump chamber 20; the moving shaft 11 runs through the center of the main body 10 and is movably arranged, and the edges on both sides are connected to the compression plates 32 respectively arranged in the bellows 30; The cover 60 is respectively combined with the two sides of the main body 10 to block the open part of the pump chamber 20 to close the pump chamber 20; the front end of the piston housing 40 is combined with the compression plate 32, and the rear is The end is removably coupled to the The inner side of the cover 60 and the piston 58 are movably combined with the piston housing 40 , and when air is injected, the piston housing 40 is pushed to shrink the bellows 30 .

The main body 10 forms the overall appearance of the bellows pump, roughly forming a rectangular hexahedron shape, and one side can form a curved surface. A pair of pump chambers 20 and a pair of supply chambers 22 are formed inside the main body 10 and arranged orthogonally so as to minimize the moving distance of the medical solution. For example, the pump chamber 20 pumps and supplies the liquid medicine inside, and is arranged on the left and right inside the main body 10 as shown in FIG.

A pair of bellows 30 is provided in each pump chamber 20 so as to contract or expand. A compression plate 32 is arranged at the front end of each bellows 30 to pressurize and send out the medical solution flowing into the pump chamber 20 . Then, the rear end of the bellows 30 is fixed to the cover 60 .

Referring to FIG. 2 , a locking groove 12 is formed on one side of the main body 10 . The locking groove 12 is a part that is slidingly coupled with the locking portion 74 of the control body 70 , and is formed by extending upward from the lower end of one side of the main body 10 to a predetermined height.

Referring to FIGS. 1 and 2 , an upper plate 14 and a lower plate 16 are joined to the upper surface and the lower surface of the main body 10 , respectively. In this embodiment, the lower plate 16 is connected to the lower surface of the main body 10 in a state where the control main body 70 is connected to one side surface of the main body 10, and further covers the lower surface of the control main body 70 in addition to the lower surface of the main body 10, so that it can be firmly The binding of the control body 70 is maintained.

On the other hand, caps 60 are respectively bonded to both sides of the main body 10, and the caps 60 block the open portion of the pump chamber 20 to be closed. A face of the cover 60 facing each other with the main body 10 is recessed to form a predetermined space, and the cover 60 is formed substantially in a cylindrical shape. In this embodiment, the front ends of the cover 60 combined with the two sides of the main body 10 The portion has a threaded joint 62 for threaded engagement. The threaded joint portion 62 is threadedly coupled with the main body threaded joint portion 18 disposed on both outer peripheral surfaces of the main body 10 .

On the other hand, a moving shaft 11 is provided inside the main body 10, and the moving shaft 11 penetrates the center. The moving shaft 11 moves back and forth in the left and right direction of the main body 10 , and the ends on both sides extend to the pump chamber 20 to be connected with each bellows 30 .

The check valve 28 is arranged in the supply chamber 22 and is located at the upper and lower parts of the supply chamber 22 to act alternately, and at the same time prevent or open the movement of the liquid medicine, so that the liquid medicine is alternately supplied to the pump chamber 20 and can be discharged by the bellows 30. Inhaled medicine.

The main body 10 has a drug solution inflow portion 80 on the lower side of one side surface through which the drug solution flows into the supply chamber 22 , and has a drug solution discharge portion 82 connected to the pump chamber 20 on the upper side.

Referring to FIG. 3 , since the front end of the piston housing 40 is coupled to the compression plate 32 , when compressed air is injected through the piston 58 , it moves together with the compression plate 32 and the moving shaft 11 . Then, the rear end portion of the piston housing 40 is movably coupled to the inner side of the cover 60 . More specifically, the rear end portion of the piston housing 40 is coupled to the inside of the cover 60 in a movably inserted state, and thus relatively movable with respect to the cover 60 .

The piston housing 40 may include: a head 50 coupled to the compression plate; a fastening pin 56 passing through the head 50 and coupled to the compression plate 32; and a housing portion 42 coupled to the compression plate 32 at the fastening pin 56 The head 50 is coupled to the head 50 while supporting the rear end of the fastening needle 56 in the state of the head 50 .

A movement hole 41 is formed through the center of the case portion 42 , and a piston 58 is movably coupled to the movement hole 41 . The rear end of the housing part 42 protrudes inwardly to form an engaging projection 44 to hold the anti-off projection 59 of the piston 58, thereby preventing the piston 58 from Disengagement occurs during movement.

In addition, the front end of the case portion 42 is formed along the circumferential direction with a press-fit rib 46 which is press-fitted and fastened to a press-fit groove 55 formed on the inner surface of the head portion 50 . Since the press-fit rib 46 is thus formed, the press-fit groove 55 is also formed in a ring shape along the circumferential direction.

As described above, when the press-fit rib 46 of the case part 42 is pressed into and fastened to the press-fit groove 55, the case part 42 is coupled to the head 50 while supporting the rear end of the fastening pin 56, so that it can be firmly held. The integrated structure of the piston housing 40 fundamentally prevents the fastening pin 56 from falling off backward due to vibration. That is, there is no structure supporting the rear end of the fastening needle 56 in the past, so there is a problem that the fastening needle 56 falls off due to the vibration generated during the operation of the bellows pump. In this state, the combination of the piston housing 40 can be firmly maintained. In addition, when the head portion 50 is combined with the case portion 42, the press-fit ribs 46 are pressed in and fastened, so the assembly method is simple and the combined state is firm.

At the front end of the head 50 there is a screw 51 screwed to the compression plate 32 . Then, a vent hole 52 communicating with the outside where the piston 58 is located is formed through the case portion 42 and the head portion 50 . As shown in FIG. 4 , a plurality of ventilation holes 52 may be formed along a circumferential direction at a predetermined central angle. The space where the piston 58 is located is the space between the piston housing 40 inserted in the cover 60 and the cover 60, and an internal pressure load can be formed during the operation of the bellows pump. Therefore, in the present embodiment, in order to solve this problem, the vent hole 52 is formed in the case part 42 and the head part 50 to discharge air, so that the bellows pump can operate stably.

In addition, a discharge groove 54 may be formed at the head 50 to open toward the case to discharge To release the air flowing in through the vent hole 52, the discharge groove 54 may be formed in communication with the front end of the vent hole 52 extending in the front-rear direction, and formed by recessing the outer surface of the head 50 in the circumferential direction to a predetermined depth.

As for the fastening pins 56 , fastening of one fastening pin 56 is shown in FIG. 3 , but not limited thereto, but a plurality of fastening pins 56 may be fastened in the circumferential direction.

As described above, the piston 58 is movably coupled along the movement hole 41 of the piston case 40 . When compressed air is injected, the piston 58 moves the piston case 40, and the auxiliary bellows 30 contracts/expands alternately.

Referring to FIG. 5 , a sealing portion for sealing with the main body 10 is provided at the rear end portion of the bellows 30 . The sealing part includes a sealing protrusion 34 and an O-ring 36 . The sealing protrusion 34 protrudes from the rear end of the bellows 30 to be pressed into and combined with the main body 10 and the cover 60 on both sides thereof. The sealing protrusions 34 are arranged in a pair and can be spaced up and down, and an O-ring 36 is inserted between the spaced sealing protrusions 34 to improve the sealing performance. In this drawing, the O-ring 36 is shown to be disposed only on the left side, but it is not limited thereto, and may be disposed so as to contact both sides respectively.

In this embodiment, the press-fit joint structure of the seal protrusion 34 and the seal structure of the O-ring 36 are applied, thereby preventing leakage at the rear end side of the bellows 30 .

As above, the features of the present invention have been described with reference to specific embodiments, and those with ordinary knowledge in this technical field can understand that the present invention can be modified within the scope of the idea and field of the present invention described in the scope of claims. Various modifications and changes are made.

10: Subject 11: Move axis 14: Upper board 16: Lower board 18: Main body thread joint 20: pump room 30: Bellows 32: Compression board 42: Shell part 58: Piston 60: cover 62: thread joint

Claims (4)

A bellows pump comprising: a main body having a pump chamber for sucking and supplying a medical liquid formed therein; a bellows contracted or expanded to be provided in the pump chamber, and compressing and supplying the medical liquid flowing into the pump chamber a moving shaft that penetrates the center of the main body and is movably arranged, and the edges on both sides are connected to the compression plates respectively arranged on the bellows; the cover is respectively combined on both sides of the main body and blocks the pump The open part of the chamber is closed; the piston housing, the front end is combined with the compression plate, and the rear end is movably combined with the inner side of the cover; and the piston is movably combined with the piston housing, if injected Air pushes the piston housing to shrink the bellows, the piston housing includes: a head, coupled to the compression plate; a fastening pin, passing through the head, to be coupled to the compression plate and a housing part that is coupled to the head while supporting the rear end of the fastening pin in a state where the fastening pin is coupled to the head, wherein pressure is formed on the housing part along the circumferential direction. The press-in rib is pressed into and fastened to the press-in groove formed on the inner surface of the head. The bellows pump according to claim 1 is characterized in that a ventilation hole is formed through the head and the casing to communicate with the piston. The external connectivity where it is located. The bellows pump according to claim 2, wherein a discharge groove is formed on the head to open outward to discharge the air flowing in through the ventilation hole. The bellows pump according to claim 1 is characterized in that, there is a sealing part for sealing with the main body at the rear end of the bellows pump; the sealing part includes: a sealing protrusion, which is press-fitted The main body and the cover on both sides are spaced apart to form a pair; and an O-ring is inserted between the spaced sealing protrusions.

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