TWI794603B - 微流體裝置及其製造方法 - Google Patents

微流體裝置及其製造方法 Download PDF

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Publication number
TWI794603B
TWI794603B TW109114161A TW109114161A TWI794603B TW I794603 B TWI794603 B TW I794603B TW 109114161 A TW109114161 A TW 109114161A TW 109114161 A TW109114161 A TW 109114161A TW I794603 B TWI794603 B TW I794603B
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TW
Taiwan
Prior art keywords
substrate
electrodes
layer
gap
hydrophobic material
Prior art date
Application number
TW109114161A
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English (en)
Chinese (zh)
Other versions
TW202103785A (zh
Inventor
理查Ｊ 小波里尼
大衛 辛湯摩斯基
提摩西Ｊ 歐馬利
Original Assignee
英商核酸有限公司
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Publication of TW202103785A publication Critical patent/TW202103785A/zh
Application granted granted Critical
Publication of TWI794603B publication Critical patent/TWI794603B/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • B01L3/502792—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics for moving individual droplets on a plate, e.g. by locally altering surface tension
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/02—Adapting objects or devices to another
    • B01L2200/021—Adjust spacings in an array of wells, pipettes or holders, format transfer between arrays of different size or geometry
    • B01L2200/022—Variable spacings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0645—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/16—Surface properties and coatings
    • B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
    • B01L2400/0427—Electrowetting

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
TW109114161A 2019-04-30 2020-04-28 微流體裝置及其製造方法 TWI794603B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201962840443P 2019-04-30 2019-04-30
US62/840,443 2019-04-30

Publications (2)

Publication Number Publication Date
TW202103785A TW202103785A (zh) 2021-02-01
TWI794603B true TWI794603B (zh) 2023-03-01

Family

ID=73017701

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109114161A TWI794603B (zh) 2019-04-30 2020-04-28 微流體裝置及其製造方法

Country Status (4)

Country Link
US (1) US20200347840A1 (de)
EP (1) EP3962651A4 (de)
TW (1) TWI794603B (de)
WO (1) WO2020223077A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11554375B2 (en) * 2019-06-07 2023-01-17 Nuclera Nucleics Ltd. Microfluidic devices containing reversibly pinned droplet samples and methods
WO2021102134A1 (en) 2019-11-20 2021-05-27 E Ink Corporation Spatially variable hydrophobic layers for digital microfluidics
CN114945426A (zh) 2020-01-17 2022-08-26 核酸有限公司 用于数字微流体的空间可变介电层
WO2021154627A1 (en) 2020-01-27 2021-08-05 E Ink Corporation Method for degassing liquid droplets by electrowetting actuation at higher temperatures
US11410620B2 (en) 2020-02-18 2022-08-09 Nuclera Nucleics Ltd. Adaptive gate driving for high frequency AC driving of EWoD arrays
WO2021168162A1 (en) 2020-02-19 2021-08-26 Nuclera Nucleics Ltd. Latched transistor driving for high frequency ac driving of ewod arrays
WO2021222061A1 (en) 2020-04-27 2021-11-04 Nuclera Nucleics Ltd. Segmented top plate for variable driving and short protection for digital microfluidics
CN114534805A (zh) * 2022-02-09 2022-05-27 上海天马微电子有限公司 微流控装置及其驱动方法、制作方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150377831A1 (en) * 2014-06-27 2015-12-31 The Governing Council Of The University Of Toronto Digital microfluidic devices and methods employing integrated nanostructured electrodeposited electrodes
CN107107055A (zh) * 2015-03-27 2017-08-29 国际商业机器公司 具有用于横向流动混合的纵向和横向液体阻挡物的微流体装置
TWI597178B (zh) * 2013-04-26 2017-09-01 Jx Nippon Oil & Energy Corp A substrate having a concavo-convex structure of a hydrophobic sol-gel material is used

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101490562B (zh) * 2006-07-10 2012-12-19 株式会社日立高新技术 液体输送设备
US8187864B2 (en) * 2008-10-01 2012-05-29 The Governing Council Of The University Of Toronto Exchangeable sheets pre-loaded with reagent depots for digital microfluidics
US20140216559A1 (en) * 2013-02-07 2014-08-07 Advanced Liquid Logic, Inc. Droplet actuator with local variation in gap height to assist in droplet splitting and merging operations
TWI714656B (zh) * 2015-10-27 2021-01-01 美商柏克萊燈光有限公司 具最佳化電濕潤表面之微流體裝置以及相關系統和方法
WO2018005843A1 (en) * 2016-06-29 2018-01-04 Digital Biosystems High resolution temperature profile creation in a digital microfluidic device
WO2019079267A1 (en) * 2017-10-18 2019-04-25 E Ink Corporation DIGITAL MICROFLUIDIC DEVICES COMPRISING DOUBLE THIN FILM TRANSISTOR DUAL SUBSTRATES AND CAPACITIVE DETECTION

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI597178B (zh) * 2013-04-26 2017-09-01 Jx Nippon Oil & Energy Corp A substrate having a concavo-convex structure of a hydrophobic sol-gel material is used
US20150377831A1 (en) * 2014-06-27 2015-12-31 The Governing Council Of The University Of Toronto Digital microfluidic devices and methods employing integrated nanostructured electrodeposited electrodes
CN107107055A (zh) * 2015-03-27 2017-08-29 国际商业机器公司 具有用于横向流动混合的纵向和横向液体阻挡物的微流体装置

Also Published As

Publication number Publication date
US20200347840A1 (en) 2020-11-05
EP3962651A1 (de) 2022-03-09
WO2020223077A1 (en) 2020-11-05
EP3962651A4 (de) 2022-11-23
TW202103785A (zh) 2021-02-01

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