TWI794603B - 微流體裝置及其製造方法 - Google Patents
微流體裝置及其製造方法 Download PDFInfo
- Publication number
- TWI794603B TWI794603B TW109114161A TW109114161A TWI794603B TW I794603 B TWI794603 B TW I794603B TW 109114161 A TW109114161 A TW 109114161A TW 109114161 A TW109114161 A TW 109114161A TW I794603 B TWI794603 B TW I794603B
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- electrodes
- layer
- gap
- hydrophobic material
- Prior art date
Links
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
- B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
- B01L3/502792—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics for moving individual droplets on a plate, e.g. by locally altering surface tension
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/02—Adapting objects or devices to another
- B01L2200/021—Adjust spacings in an array of wells, pipettes or holders, format transfer between arrays of different size or geometry
- B01L2200/022—Variable spacings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0645—Electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/16—Surface properties and coatings
- B01L2300/161—Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
- B01L2400/0427—Electrowetting
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Dispersion Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Hematology (AREA)
- Clinical Laboratory Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962840443P | 2019-04-30 | 2019-04-30 | |
US62/840,443 | 2019-04-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202103785A TW202103785A (zh) | 2021-02-01 |
TWI794603B true TWI794603B (zh) | 2023-03-01 |
Family
ID=73017701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW109114161A TWI794603B (zh) | 2019-04-30 | 2020-04-28 | 微流體裝置及其製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US20200347840A1 (de) |
EP (1) | EP3962651A4 (de) |
TW (1) | TWI794603B (de) |
WO (1) | WO2020223077A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11554375B2 (en) * | 2019-06-07 | 2023-01-17 | Nuclera Nucleics Ltd. | Microfluidic devices containing reversibly pinned droplet samples and methods |
WO2021102134A1 (en) | 2019-11-20 | 2021-05-27 | E Ink Corporation | Spatially variable hydrophobic layers for digital microfluidics |
CN114945426A (zh) | 2020-01-17 | 2022-08-26 | 核酸有限公司 | 用于数字微流体的空间可变介电层 |
WO2021154627A1 (en) | 2020-01-27 | 2021-08-05 | E Ink Corporation | Method for degassing liquid droplets by electrowetting actuation at higher temperatures |
US11410620B2 (en) | 2020-02-18 | 2022-08-09 | Nuclera Nucleics Ltd. | Adaptive gate driving for high frequency AC driving of EWoD arrays |
WO2021168162A1 (en) | 2020-02-19 | 2021-08-26 | Nuclera Nucleics Ltd. | Latched transistor driving for high frequency ac driving of ewod arrays |
WO2021222061A1 (en) | 2020-04-27 | 2021-11-04 | Nuclera Nucleics Ltd. | Segmented top plate for variable driving and short protection for digital microfluidics |
CN114534805A (zh) * | 2022-02-09 | 2022-05-27 | 上海天马微电子有限公司 | 微流控装置及其驱动方法、制作方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150377831A1 (en) * | 2014-06-27 | 2015-12-31 | The Governing Council Of The University Of Toronto | Digital microfluidic devices and methods employing integrated nanostructured electrodeposited electrodes |
CN107107055A (zh) * | 2015-03-27 | 2017-08-29 | 国际商业机器公司 | 具有用于横向流动混合的纵向和横向液体阻挡物的微流体装置 |
TWI597178B (zh) * | 2013-04-26 | 2017-09-01 | Jx Nippon Oil & Energy Corp | A substrate having a concavo-convex structure of a hydrophobic sol-gel material is used |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101490562B (zh) * | 2006-07-10 | 2012-12-19 | 株式会社日立高新技术 | 液体输送设备 |
US8187864B2 (en) * | 2008-10-01 | 2012-05-29 | The Governing Council Of The University Of Toronto | Exchangeable sheets pre-loaded with reagent depots for digital microfluidics |
US20140216559A1 (en) * | 2013-02-07 | 2014-08-07 | Advanced Liquid Logic, Inc. | Droplet actuator with local variation in gap height to assist in droplet splitting and merging operations |
TWI714656B (zh) * | 2015-10-27 | 2021-01-01 | 美商柏克萊燈光有限公司 | 具最佳化電濕潤表面之微流體裝置以及相關系統和方法 |
WO2018005843A1 (en) * | 2016-06-29 | 2018-01-04 | Digital Biosystems | High resolution temperature profile creation in a digital microfluidic device |
WO2019079267A1 (en) * | 2017-10-18 | 2019-04-25 | E Ink Corporation | DIGITAL MICROFLUIDIC DEVICES COMPRISING DOUBLE THIN FILM TRANSISTOR DUAL SUBSTRATES AND CAPACITIVE DETECTION |
-
2020
- 2020-04-22 EP EP20799361.9A patent/EP3962651A4/de not_active Withdrawn
- 2020-04-22 US US16/855,381 patent/US20200347840A1/en not_active Abandoned
- 2020-04-22 WO PCT/US2020/029276 patent/WO2020223077A1/en unknown
- 2020-04-28 TW TW109114161A patent/TWI794603B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI597178B (zh) * | 2013-04-26 | 2017-09-01 | Jx Nippon Oil & Energy Corp | A substrate having a concavo-convex structure of a hydrophobic sol-gel material is used |
US20150377831A1 (en) * | 2014-06-27 | 2015-12-31 | The Governing Council Of The University Of Toronto | Digital microfluidic devices and methods employing integrated nanostructured electrodeposited electrodes |
CN107107055A (zh) * | 2015-03-27 | 2017-08-29 | 国际商业机器公司 | 具有用于横向流动混合的纵向和横向液体阻挡物的微流体装置 |
Also Published As
Publication number | Publication date |
---|---|
US20200347840A1 (en) | 2020-11-05 |
EP3962651A1 (de) | 2022-03-09 |
WO2020223077A1 (en) | 2020-11-05 |
EP3962651A4 (de) | 2022-11-23 |
TW202103785A (zh) | 2021-02-01 |
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