TWI792154B - Vacuum pumping system and risk management device thereof - Google Patents

Abstract

A vacuum pumping system and a risk management device thereof are provided. The risk management device is applied to a vacuum pumping system, which controls a process chamber, an isolation valve, and a vacuum pump connecting to the process chamber through the isolation valve. The risk management device includes an anomaly detection module and an emergency response module. The anomaly detection module is used to detect at least one operating state signal of the vacuum pump, and the emergency response module is electrically connected to the abnormal detection module, the isolation valve, and a main controller of the vacuum pumping system, and is used to determine whether the at least one operating state signal exceeds a preset value. When it is determined that the at least one operating state signal exceeds the preset value, the emergency response module closes the isolation valve and sends an alarm message to the main controller. The vacuum pumping system includes the risk management device.

Description

Vacuum system and its risk management device

The invention relates to a vacuum pumping system, in particular to a vacuum pumping system and a risk management device thereof.

The semiconductor manufacturing process (for example: exposure machine, dry etching, chemical vapor deposition CVD, physical vapor deposition PVD, etc.) needs to be carried out in a process chamber in a high vacuum state. Therefore, turbomolecular vacuum systems are usually equipped in semiconductor manufacturing processes to create a vacuum environment.

In the overall equipment and system of the semiconductor manufacturing process, each sub-equipment (for example: turbomolecular pump, vacuum isolation valve, primary vacuum pump, etc.) will be equipped with a dedicated sub-equipment controller, and these sub-equipment controllers will report back to the sub-equipment The operating status of the equipment is sent to a main controller, and then the operator sends instructions to the sub-equipment controller through the main controller to control the sub-equipment. Among these sub-equipment, because the turbomolecular pump needs to run at a high speed, it is a high risk. Once the rotor of the turbomolecular pump is worn out and the fins are damaged and fragmented, they are likely to be ejected into the expensive process chamber, resulting in serious cost losses. However, when an abnormality occurs in the turbomolecular pump, it is notified to the main controller through the sub-equipment controller, and then the operator orders to shut down the system through the main controller, the delay in message transmission is often too late to protect the process chamber.

Therefore, how to detect the operating status of the turbomolecular pump in real time through design improvement, and take immediate contingency measures to reduce the risk of serious loss of process cost has become one of the important issues that this business wants to solve.

The technical problem to be solved by the present invention is to provide a vacuum pumping system and its risk management device for the deficiencies of the prior art, which can directly detect the operation status of the vacuum pump, and when the vacuum pump is judged to be abnormal, shut down the process chamber and the vacuum pump urgently Isolation valves between the valves, thereby reducing the risk of equipment damage.

In order to solve the above technical problems, one of the technical solutions adopted by the present invention is to provide a vacuum pumping system. The vacuum system controls an isolation valve, a process chamber, and a vacuum pump communicated with the process chamber through the isolation valve, and is used to vacuum the process chamber to a target vacuum degree. The vacuum system includes a main controller and a risk management device. The main controller is used to control the process chamber, the main control includes an isolation valve controller and a vacuum pump controller; the isolation valve controller is used to control the isolation valve, and the vacuum pump The controller detects an internal operation state of the vacuum pump and generates a corresponding control signal to control the vacuum pump. The risk management device detects and closes the isolation valve immediately according to an operating state of the vacuum pump, so as to protect the process chamber.

In order to solve the above technical problems, another technical solution adopted by the present invention is to provide a risk management device, which is used in a vacuum system. The vacuum system controls an isolation valve, a process chamber and a vacuum pump communicated with the process chamber through the isolation valve. The risk management device includes an abnormality detection module and an emergency response module. The abnormality detection module is used to detect at least one operation status signal of the vacuum pump, and the emergency response module is electrically connected to the abnormality detection module, the isolation valve and the vacuum pumping system. A main controller is used for judging whether the at least one running status signal exceeds a preset value. When judging that the at least one operating status signal exceeds the preset value, the emergency response module closes the isolation valve and sends an alarm message to the main controller.

In an embodiment of the present invention, the at least one operating state signal is a temperature signal, a vibration signal or a rotational speed signal.

In an embodiment of the present invention, the abnormality detection module includes a detection unit, which is disposed on the vacuum pump, to detect the operation state of the vacuum pump, and obtain the at least one operation state signal.

In an embodiment of the present invention, the abnormality detection module is electrically connected to the vacuum pump controller of the vacuum pumping system to receive the control signal from the vacuum pump controller and transmit the control signal converted into one of the operation status signals; and, the abnormality detection module further includes a detection unit arranged on the vacuum pump to detect the operation status of the vacuum pump to obtain another operation status signal. status signal.

In an embodiment of the present invention, when the abnormality detection module converts one of the operation status signals obtained by converting the control signal of the vacuum pump controller and the other obtained by the detection unit When each of the operating status signals exceeds the preset value, the emergency response module closes the isolation valve and sends the alarm message to the main controller.

In an embodiment of the present invention, when the abnormality detection module converts one of the operation status signals obtained by converting the control signal of the vacuum pump controller and the other obtained by the detection unit When each of the operating status signals exceeds the preset value, the emergency response module closes the isolation valve and sends the alarm message to the main controller.

One of the beneficial effects of the present invention is that the vacuum pumping system and its risk management device provided by the present invention can immediately shut down the Isolation valve to protect the process chamber" and "when the emergency response module judges that the operating status signal exceeds the preset value, the emergency response module will close the isolation valve and send the alarm message to the main controller" technology program to effectively reduce the risk of equipment damage.

In order to further understand the features and technical content of the present invention, please refer to the following detailed description and drawings related to the present invention. However, the provided drawings are only for reference and description, and are not intended to limit the present invention.

In the semiconductor process, the semiconductor process machine (process chamber) is usually connected with a vacuum pump, and the vacuum pump is used to generate a low-pressure vacuum working environment. In practical applications, the vacuum pump will run at a high speed. Once the vanes of the rotor of the vacuum pump are damaged and fragmented, high-speed debris will be ejected into the semiconductor process machine, which will affect the process and cause serious damage to expensive equipment. damage, resulting in cost losses. Therefore, the present invention provides a vacuum pumping system and its risk management device. The risk management device can assist the vacuum pumping system to actively detect and judge whether the vacuum pump is abnormal, and when the vacuum pump is abnormal, skip the step of notifying the main system and directly Close the isolation valve to protect expensive process equipment and products and reduce losses.

The following is an illustration of the implementation of the "vacuum pumping system and its risk management device" disclosed in the present invention through specific specific examples. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not drawn according to the actual size, which is stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the protection scope of the present invention. In addition, the term "or" used herein may include any one or a combination of more of the associated listed items depending on the actual situation.

[first embodiment]

Referring to FIG. 1 , the first embodiment of the present invention provides a risk management device 10 for a vacuum system S. Referring to FIG. The vacuum system S controls an isolation valve V, a process chamber M, and a vacuum pump P communicated with the process chamber M through the isolation valve V. The risk management device 10 mainly includes an abnormality detection module 11 and an emergency response module 12 . The abnormality detection module 11 is used for detecting at least one operation status signal of the vacuum pump P. The emergency response module 12 is electrically connected to the abnormality detection module 11 , the isolation valve V and a main controller 100 of the vacuum system S to determine whether at least one operation status signal exceeds a preset value. In use, when the emergency response module 12 determines that the at least one operating status signal exceeds a preset value, the emergency response module 12 closes the isolation valve V and sends an alarm message to the main controller 100 .

For example, the at least one operating state signal of the vacuum pump P may be a temperature signal, a vibration signal or a rotation speed signal of the vacuum pump P. However, the present invention is not limited to the examples cited above.

Referring to FIG. 2 to FIG. 4 , the anomaly detection module 11 of the risk management device 10 of the present invention can have the following three forms. First, referring to FIG. 2 , the first aspect of the abnormality detection module 11 may further include a detection unit 111 disposed on the vacuum pump P for detecting the operation state of the vacuum pump P and obtaining an operation state signal. In detail, the detection unit 111 may be a temperature sensor, a vibration sensor, an accelerometer, and the like. The operation status signal detected by the detection unit 111 can be transmitted to the emergency response module 12 through a wireless or wired communication connection. Next, the emergency response module 12 judges whether the received operating status signal is greater than a preset value, and the preset value may be a base value plus a margin value. It should be noted that each operation status signal has a corresponding default value. For example, when the operation status signal is to detect the temperature of the vacuum pump P, it has a corresponding default value of the vacuum pump P temperature. If the running status signal (for example: temperature signal) is greater than 30% of the preset value, it means that the vacuum pump P may be overheated, and it is judged that the vacuum pump P is abnormal. Therefore, the emergency response module 12 closes the isolation valve V urgently to separate the vacuum pump P from the process chamber M to prevent the process chamber M from being damaged. In addition, the emergency response module 12 will send an alarm message to the main controller 100 of the vacuum system S. Finally, the vacuum system S can further control the vacuum pump P and the process chamber M to be closed. The advantage of this aspect is that the vacuum pump P can be detected by direct additional installation, so as to obtain the operation status of the vacuum pump P, without complicated installation of software systems. However, the above-mentioned example is only one possible embodiment and is not intended to limit the present invention.

Referring to FIG. 3, the second aspect of the abnormality detection module 11 is a vacuum pump controller 102 electrically connected to the vacuum pumping system S, receives a control signal from the vacuum pump controller 102, and converts the control signal into a vacuum pump P operating status signal. For example, the vacuum pump controller 102 is a current sensor that can detect the current signal (analog signal or digital signal) of the vacuum pump P, and the abnormality detection module 11 receives the signal from the vacuum pump controller 102 through a wireless or wired communication connection. After the current signal, it is converted into a running status signal (analog signal or digital signal), and sent to the emergency response module 12 for analysis and judgment. In this aspect, the judgment method of the emergency response module 12 is the same as that described above, and will not be repeated here. The advantage of this aspect is that it can be connected to the signal of the existing vacuum pump controller 102 , and there is no need to install an additional detection unit to detect the vacuum pump P, so as to obtain the operation status of the vacuum pump P. However, the above-mentioned example is only one possible embodiment and is not intended to limit the present invention.

Referring to FIG. 4, the third aspect of the abnormality detection module 11 is a vacuum pump controller 102 electrically connected to the vacuum pumping system S, receives a control signal from the vacuum pump controller 102, and converts the control signal into a vacuum pump P One of the operating state signals (hereinafter referred to as "internal signal"), and further includes a detection unit 111 arranged on the vacuum pump P, used to detect the operating state of the vacuum pump P, and obtain another The above-mentioned operating status signal (hereinafter referred to as "external signal").

In this aspect, the emergency response module 12 can be further set to a strict mode or a non-strict mode. In the strict mode, the emergency response module 12 will receive the internal signal and the external signal through the wireless or wired communication connection, and judge whether both are greater than a preset value. When the internal signal and the external signal are both greater than the preset value, The emergency response module 12 closes the isolation valve V urgently to isolate the vacuum pump P from the process chamber M to prevent the process chamber M from being damaged. In addition, the emergency response module 12 will send an alarm message to the main controller 100 of the vacuum system S. Finally, the vacuum system S can further control the vacuum pump P and the process chamber M to be closed. In addition, in the strict mode, when only one of the internal signal and the external signal is greater than the preset value, the emergency response module 12 can further send a notification message to the main controller 100 of the vacuum system S, and the operator can further eliminate Whether the detection unit 111 or the vacuum pump controller 102 fails. The advantage of the rigorous mode is that it can double confirm that the operation state of the vacuum pump P is abnormal and then close the isolation valve V to avoid delaying the process. However, the above-mentioned example is only one possible embodiment and is not intended to limit the present invention.

In the non-rigorous mode, the emergency response module 12 will receive and judge the internal signal and the external signal through the wireless or wired communication connection. When one or both of the internal signal and the external signal are greater than the preset value, the emergency response module will 12 is to close the isolation valve V urgently, so as to separate the vacuum pump P and the process chamber M from each other, and prevent the process chamber M from being damaged. In addition, the emergency response module 12 will send an alarm message to the main controller 100 of the vacuum system S. Finally, the vacuum system S can further control the vacuum pump P and the process chamber M to be closed. The advantage of the non-rigorous mode is that it can ensure the safety of the process equipment. However, the above-mentioned example is only one possible embodiment and is not intended to limit the present invention.

[Second embodiment]

Referring to Fig. 5, the second embodiment of the present invention provides a vacuum pumping system S, which controls an isolation valve V, a process chamber M, and a vacuum pump P communicated with the process chamber M through the isolation valve V, so as to The process chamber M is evacuated to a target vacuum degree.

The vacuum system S mainly includes a main controller 100 and a risk management device 10 . The main controller 100 is used to control the process chamber M, the main controller 100 includes an isolation valve controller 101 for controlling the isolation valve V, and a vacuum pump controller 102, which detects an internal operating state of the vacuum pump P to generate A corresponding control signal is used to control the vacuum pump P. The risk management device 10 can detect and close the isolation valve V immediately according to an operating state of the vacuum pump P, so as to protect the process chamber M.

In this embodiment, the vacuum system S is a turbomolecular pump vacuum system, which can be applied to semiconductor manufacturing process. For example, the process chamber M is a semiconductor industry process machine (for example: thin film sputtering equipment or etching equipment), the isolation valve V is a pendulum valve, and the vacuum pump P is a turbomolecular pump to provide the process machine A vacuum environment. The process chamber M, the isolation valve V and the vacuum pump P are all equipped with a dedicated controller. However, the present invention is not limited to the examples cited above. In some other embodiments, the main controller of the vacuum pumping system may further include a primary vacuum pump controller for controlling a primary vacuum pump communicated with the vacuum pump. The primary vacuum pump is used to assist the vacuum pump in venting.

Referring to FIG. 5 and shown in FIG. 4 , in this embodiment, the risk management device 10 of the vacuum system S is the risk management device 10 of the first embodiment, and the risk management device 10 has the abnormality detection module of the third aspect. Group 11. It should be noted that the emergency response module 12 directly controls the isolation valve controller 101 to close the isolation valve V. Thereby, when the risk management device 10 is capable of abnormality in the vacuum pump P, contingency measures can be taken in the shortest time. However, the above-mentioned example is only one possible embodiment and is not intended to limit the present invention.

[Advantageous Effects of Embodiment]

One of the beneficial effects of the present invention is that the vacuum pumping system and its risk management device provided by the present invention can immediately shut down the Isolation valve to protect the process chamber" and "when the emergency response module judges that the operating status signal exceeds the preset value, the emergency response module will close the isolation valve and send the alarm message to the main controller" technology The solution is to take immediate contingency measures when the vacuum pump is abnormal, so as to effectively reduce the risk of equipment damage.

The content disclosed above is only a preferred feasible embodiment of the present invention, and does not therefore limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.

V: isolation valve M: process chamber P: vacuum pump S: vacuum system 10: Risk management device 11: Abnormal detection module 111: Detection unit 12:Emergency Response Module 100: main controller 101: Isolation valve controller 102: Vacuum pump controller

FIG. 1 is a functional block diagram of a risk management device according to a first embodiment of the present invention.

FIG. 2 is a functional block diagram of the risk management device with the anomaly detection module of the first aspect of the present invention.

FIG. 3 is a functional block diagram of a risk management device having an anomaly detection module according to a second aspect of the present invention.

FIG. 4 is a functional block diagram of a risk management device having an anomaly detection module according to a third aspect of the present invention.

FIG. 5 is a functional block diagram of a vacuum pumping system according to a second embodiment of the present invention.

V: isolation valve

M: process chamber

P: vacuum pump

S: vacuum system

10: Risk management device

11: Abnormal detection module

12:Emergency Response Module

100: main controller

Claims (15)

A risk management device used in a vacuum system, which controls an isolation valve, a process chamber, and a vacuum pump communicated with the process chamber through the isolation valve, the risk management device includes: An abnormality detection module for detecting at least one operation status signal of the vacuum pump; An emergency response module, which is electrically connected to the abnormality detection module, the isolation valve and a main controller of the vacuum system, and is used to determine whether the at least one operating status signal exceeds a preset value ; Wherein, when the emergency response module determines that the at least one operating status signal exceeds the preset value, the emergency response module closes the isolation valve and sends an alarm message to the main controller. The risk management device according to claim 1, wherein the at least one operating status signal is a temperature signal, a vibration signal or a rotational speed signal. The risk management device according to claim 2, wherein the abnormality detection module includes a detection unit, which is arranged on the vacuum pump to detect the operation status of the vacuum pump, and obtain the at least one Running status signal. The risk management device according to claim 2, wherein the abnormality detection module is electrically connected to a vacuum pump controller of the vacuum pumping system, so as to receive a control signal from the vacuum pump controller and send the The control signal is converted into the at least one running state signal. The risk management device according to claim 2, wherein the abnormality detection module is electrically connected to a vacuum pump controller of the vacuum pumping system, so as to receive a control signal from the vacuum pump controller and send the The control signal is converted into one of the operation state signals; and, the abnormality detection module further includes a detection unit arranged on the vacuum pump to detect the operation state of the vacuum pump and obtain another The above operating status signal. The risk management device according to claim 5, wherein, when the abnormality detection module converts the control signal of the vacuum pump controller to obtain one of the operation status signals and the detection unit When the obtained other operating state signals exceed the preset values, the emergency response module closes the isolation valve and sends the alarm message to the main controller. The risk management device according to claim 5, wherein when the abnormality detection module converts the control signal of the vacuum pump controller into one of the operation status signals or the detection unit When any one of the obtained other operating status signals exceeds the preset value, the emergency response module closes the isolation valve and sends the alarm message to the main controller. A vacuum pumping system, which controls an isolation valve, a process chamber, and a vacuum pump communicated with the process chamber through the isolation valve, to evacuate the process chamber to a target vacuum degree, the The vacuum system includes: A main controller, used to control the process chamber, the main controller includes: an isolation valve controller for controlling the isolation valve; and a vacuum pump controller, which detects an internal operating state of the vacuum pump to generate a corresponding control signal, and controls the vacuum pump; and A risk management device detects and closes the isolation valve in real time according to an operating state of the vacuum pump, so as to protect the process chamber. The vacuum pumping system according to claim 8, wherein the risk management device further includes: An abnormality detection module for detecting the at least one operation status signal of the vacuum pump; An emergency response module, which is electrically connected to the abnormality detection module, the isolation valve and the main controller, to determine whether the at least one operating status signal exceeds a preset value; Wherein, when the emergency response module determines that the at least one operating status signal exceeds the preset value, the emergency response module closes the isolation valve and sends an alarm message to the main controller. The vacuum pumping system according to claim 9, wherein the at least one operating status signal is a temperature signal, a vibration signal or a rotational speed signal. The vacuum pumping system according to claim 10, wherein the abnormality detection module includes a detection unit, which is arranged on the vacuum pump to detect the operation status of the vacuum pump, and obtain the at least one Running status signal. The vacuum pumping system according to claim 10, wherein the abnormality detection module is electrically connected to the vacuum pump controller of the vacuum pumping system to receive the control signal from the vacuum pump controller, and The control signal is converted into the at least one running status signal. The vacuum pumping system according to claim 10, wherein the abnormality detection module is electrically connected to the vacuum pump controller of the vacuum pumping system to receive the control signal from the vacuum pump controller, and The control signal is converted into one of the operation state signals; and, the abnormality detection module further includes a detection unit arranged on the vacuum pump to detect the operation state of the vacuum pump to obtain another a said running status signal. The vacuum pumping system according to claim 13, wherein, when the abnormality detection module converts the control signal of the vacuum pump controller to obtain one of the operation status signals and the detection unit When the obtained other operating state signals exceed the preset values, the emergency response module closes the isolation valve and sends the alarm message to the main controller. The vacuum pumping system according to claim 13, wherein, when the abnormality detection module converts the control signal of the vacuum pump controller to obtain one of the operation status signals and the detection unit When the obtained other operating state signals exceed the preset values, the emergency response module closes the isolation valve and sends the alarm message to the main controller.

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