TWI781446B - Object Thickness Measurement Device - Google Patents

Abstract

The invention relates to a device for measuring the thickness of an object, comprising: a frame; a conveying mechanism arranged on the table top of the machine, the conveying mechanism is provided with a rail seat, and the rail seat is provided with a conveying channel for conveying an object; The first measuring device is set on the frame to detect the object conveyed by the conveying channel; a moving mechanism is set on one of the frame or the conveying mechanism, and can drive the frame or convey The mechanism moves in translation relative to the machine table; thereby, it is suitable for thickness measurement of objects that can be conveyed.

Description

Object Thickness Measuring Device

The present invention relates to a thickness measuring device, in particular to an object thickness measuring device for measuring the thickness of objects that can be transported.

According to, with the rapid development of the technology industry, the transfer of high-tech semiconductor chips is more automated, and the requirements for process accuracy are also higher, especially the bonding, stacking or combination technologies between electronic components are also widely used; and bonding , stacking or combination all need to consider the thickness after bonding or combination. The traditional single component or component thickness detection after bonding, stacking and combination usually places the component or component directly on the stage under the measuring device for measurement. However, in automatic production, components or components are often transported quickly, for example, from a feeding device to a processing host, and the processing host completes the process and then transported to a receiving device, and between the feeding device and the processing host, Or between the processing mainframe and the receiving device, components or components to be inspected are often placed on a tray in a matrix, and the tray is conveyed by a conveyor belt in a track.

When the prior art intends to measure the thickness, it is often necessary to detect the carrier plate from the track for additional detection. During the process, there may be situations where the thickness of each part of the surface is different, and under the inertia of the high-speed conveying speed of the conveyor belt, it is difficult for the objects in transportation to completely stop at the precise measurement position in a very short time, especially when multiple objects are The matrix is placed on the tray, and the conveyor belt needs to be driven to convert the From the detection of the object to the detection position, the displacement caused by the frequent and rapid movement of the conveyor belt is more likely to cause the positioning deviation of the measurement position of each object to be different, so the value detected when measuring the thickness of the object is easy to have Uncertainty.

Therefore, the object of the present invention is to provide an object thickness measuring device that can be used to measure the thickness of the objects that can be transported.

The device for measuring the object thickness of the object of the present invention includes: a frame; a conveying mechanism, which is arranged on the table top of the machine, and the conveying mechanism is provided with a rail seat, and the rail seat is provided with a conveying channel for conveying an object; The first measuring device is set on the frame to detect the object conveyed by the conveying channel; a moving mechanism is set on one of the frame or the conveying mechanism, and can drive the frame or convey The mechanism translates relative to the table top of the machine.

In the object thickness measuring device of the embodiment of the present invention, when the carrier plate stops in the conveying flow channel, the entire seat frame or the conveying mechanism is displaced by the moving mechanism that can move in the X-axis or Y-axis, so that together with The carrier plate and the object on it or the entire first measuring device are accurately moved to the measurement area to measure the thickness of the object, instead of transporting the carrier plate and the object through the conveyor belt to move to the measurement In the interval, the precise positioning of the object will not be affected by the shaking before the conveyor belt stops completely.

A: Mount

A1: Pillar

A2: First beam

A21: The first viewing interval

A22: The first carrier

A221: Fixed part

A3: Measurement interval

A4: Second beam

A41: Second carrier

A42: The second viewing interval

A5: Measurement interval

B: Conveying mechanism

B1: rail seat

B11: First side frame

B111: First upper frame edge

B112: First lower frame edge

B113: First front frame edge

B114: First rear frame edge

B115: The first pressing part

B116: sliding seat

B12: Second side frame

B121: Second upper frame edge

B122: Second lower frame edge

B123: Second front frame edge

B124: Second rear frame edge

B125: Second pressing piece

B13: Conveyor belt

B14: Reference unit

B141: Reference parts

B15: Driver

B151: screw

B152: Pivot

B16: Linkage

B161: gear

B17: Lifting platform

B171: Lifting linkage

B1711:Roller

B172: Nozzle

B173: Through hole

B174:Fixer

B1741: slide rail

B1742: sliding seat

B1743: Driver

B1744: Drive Rod

B1745: slide rail

B175: Action parts

B1751: Guide groove

B1752: driven part

B1753: sliding seat

B18: Stop Mechanism

B181: stop drive

B182: linkage rod

B183: Pivot joint

B184: Oscillating rod

B185: Stopper

B186: Pivot

B187: Buckle and pull

B188: Chutes

B189: Resisting surface

B2: seat

B21: base

B22: slide rail

B23: Rack seat

B3: Delivery channel

C: mobile mechanism

C1: The first axial displacement mechanism

C11: First base

C12: Linear motor

C121: Main slider

C13: slide rail

C14: The first bearing seat

C2: The second axial displacement mechanism

C21:Second base

C22: Linear Motor

C221: Main slider

C23: slide rail

C231: Auxiliary slider

C24: Second bearing seat

D: the first measuring device

E: Second measuring device

F: beam splitter

F1: first side

F2: second side

G: viewfinder

H: beam splitter

H1: Perforated

J: mount

J1: first beam

J2: Second beam

K: Machine table

L1: the first central axis

L2: second central axis

M: conveying mechanism

M1: support

M2: rail seat

M3: Delivery channel

N1: the first image picker

N2: Second image picker

S: second standard height

S1: The second measurement distance value

S2: The third measurement distance value

S3: The fourth measurement distance value

S4: The fifth measured distance value

T: tray

T1: hollow interval

T2: limit pin

W: object

d: first standard height

d1: the first reference distance value

d2: the first measured distance value

FIG. 1 is a schematic diagram of placing wafer objects to be tested on a carrier in an embodiment of the present invention.

FIG. 2 is a schematic diagram of a substrate object to be tested in an embodiment of the present invention.

Fig. 3 is a schematic diagram of the first embodiment of the present invention.

Fig. 4 is a schematic diagram of the conveying mechanism in the first embodiment of the present invention.

Fig. 5 is a perspective view (1) of one side of the lifting platform and related mechanisms in the first embodiment of the present invention.

Fig. 6 is a perspective view (2) of the other side of the lifting platform and related mechanisms in the first embodiment of the present invention.

Fig. 7 is a schematic view of the stop member in the stop mechanism in the first embodiment of the present invention.

Fig. 8 is a schematic diagram of the disengagement of the stop member in the stop mechanism in the first embodiment of the present invention.

Fig. 9 is a three-dimensional exploded schematic diagram of the moving mechanism in the first embodiment of the present invention.

FIG. 10 is a schematic diagram of a calculation method for thickness measurement in the first embodiment of the present invention.

Fig. 11 is a schematic diagram of the second embodiment of the present invention.

FIG. 12 is a schematic diagram of the corresponding relationship between a first measuring device and a second measuring device in the second embodiment of the present invention.

FIG. 13 is a schematic diagram of a calculation method for thickness measurement in the second embodiment of the present invention.

FIG. 14 is a schematic diagram of the corresponding relationship between a first measuring device, a second measuring device, an image pickup device and a beam splitter in the third embodiment of the present invention.

Fig. 15 is a schematic diagram of the fourth embodiment of the present invention.

Fig. 16 is a schematic diagram of the fifth embodiment of the present invention.

The embodiment of the present invention can measure the thickness of the object W as shown in Figures 1 and 2, wherein Figure 1 shows, for example, a chip with a ball grid array substrate embedded in a die package, and Figure 2 shows a thin substrate (Substrate), When the object W is a small-volume wafer as shown in FIG. 1, it can be placed in a matrix arrangement on a plurality of matrix-arranged hollowed-out intervals T1 of a carrier T1 for operation, and the inner diameter of each hollowed-out interval T1 has at least a portion smaller than the The width of the outer diameter of the object W degree, so that the object W can be held on the carrier T by being supported by the outer periphery of the hollowed-out section T1, and the horizontal displacement is limited by a plurality of limit pins T2 near the outer periphery of the hollowed-out section T1.

Please refer to Fig. 3, the first embodiment of the present invention can be described by taking the device as shown in the figure to carry out the small-volume wafer as shown in Fig. 1 as an example. On K, the stand A uses two pillars A1 to support a first beam A2 located above, and a measurement section A3 is formed below the first beam A2 for the thickness measurement of the object W therebetween. The first beam A2 The upper side is provided with a first inspection section A21 which is hollowed out and vertically penetrates to the measurement section A3 on the lower side; a conveying mechanism B is arranged on the table top K of the machine, and the conveying mechanism B is provided with a rail seat B1 and for the rail The seat B1 is provided with a seat B2 on it, and the rail seat B1 is provided with a conveying channel B3 for conveying the object W; a moving mechanism C is provided for the conveying mechanism B and can drive the conveying mechanism B relative to the seat The frame A and the table top K of the machine are translated in the X-axis or the Y-axis; a first measuring device D is set on the first beam A2 of the frame A, such as a conjugate cross-laser ranging Devices, LEDs, etc. can emit non-contact optical range finders such as laser beams, LED beams of visible beams, and are arranged on a first carrier A22 fixed on the first beam A2, and The first inspecting section A21 protruding from above the first crossbeam A2 detects the object W transported by the conveying channel B3 in the measuring section A3 downward.

Please refer to Figures 3 and 4, the rail seat B1 of the conveying mechanism B is in the shape of a rectangular frame, and is provided with a first side frame B11 and a second side frame in the shape of a rectangular frame separated by a distance and parallel to each other. B12; where the first upper frame edge B111 on the frame-shaped upper side of the first side frame B11 is opposite to the second upper frame edge B121 on the frame-shaped upper side of the second side frame B12. A conveyor belt B13 is respectively provided , and drive the output with a driver B131 The conveying belt B13 runs to form a conveying channel B3 located below the first beam A2. The conveying direction of the conveying channel B3 is perpendicular to the first beam A2 on the X and Y coordinate planes and can transport the tray T to the measurement interval A3; the first lower frame edge B112 of the frame-shaped lower side of the first side frame B11 and the second lower frame edge B122 of the frame-shaped lower side of the second side frame B12 are set on the seat On B2: with the forward side towards which the tray T is conveyed and flowed as the front end side, the first front frame side B113 and the second front frame side of the first side frame B11 and the second side frame B12 are erected on the frame-like front side B123 is arranged under the front end of the conveying channel B3, and the first rear frame side B114 and the second rear frame side B124 which are vertically arranged on the rear side are arranged under the rear end of the conveying channel B3; the first side On the side facing inwardly of the frame B11 and the second side frame B12, a first pressing member B115 and a second pressing member B125 are respectively provided on the top corresponding to each of the conveyor belts B13, and the carrier T is placed on the top of the conveyor belt B13. The conveyor belt B13, the first pressing member B115, and the second pressing member B125 are conveyed by the conveying belt B13, wherein, when measuring a sheet-shaped substrate with a large area as shown in FIG. 2 , the The substrate P can be directly placed on the conveying belt B13 without being placed on the tray T to be conveyed; one side of the second side frame B12 outside the conveying channel B3 is provided with a reference unit B14, and the reference unit B14 A reference part B141 such as a block gauge is provided at the same height as the upper surface of the carrier T or the lower bottom surface of the object for the first measuring device D to measure the reference distance. Driven by the moving mechanism C, The reference part B141 is displaced synchronously with the rail seat B1, the delivery channel B3, the carrier T and the object W on the conveying mechanism B; the reference part B141 of the reference unit B14 can also be a detected The object W is, for example, a wafer placed on the tray T, or a inspected thin substrate as shown in FIG. 2 .

Please refer to Figures 4 and 5, the seat B2 of the conveying mechanism B is provided with two slide rails B22 and two rack seats B23 parallel to each other in the Y-axis on a base B21; the first bottom of the rail seat B1 The first lower frame edge between the frame edge B112 and the second lower frame edge B122 Two sliding seats B116 are arranged at intervals on the B112, and the two sliding seats B116 are fixed on the first lower frame edge B112 of the first side frame B11 and are located on the two sliding rails B22 and can be slidably displaced thereon; Between the first lower frame side B112 and the second lower frame side B122 of the first side frame B11 and the second side frame B12, a screw rod B151 driven by a driving member B15 is pierced at the front end near the corner, and the rear A pivot bar B152 that is not driven is provided near the corner of the end, and a link B16 with a gear B161 at both ends is provided between the two sliding seats B116; by fixing the second side frame B12 to the base B21 When not moving, the driver B15 drives the screw B151 so that the first side frame B11 is displaced under the support of the pivot bar B152, and the two sliding seats B116 are linked to slide on the two slide rails B21, and the linkage B16 Each of the gears B161 at both ends meshes in the two rack seats B23 to synchronize the displacement of the front and rear ends of the first side frame B11; the width of the conveying channel B3 is changed by the above adjustment to adapt to different specifications. Transport of objects W or trays T.

The rail seat B1 of the conveying mechanism B forms a lift platform B17 between the first upper frame edge B111 and the second upper frame edge B121 of the conveyer mechanism B and the two conveyor belts B13 on the inner side. Each end is respectively controlled by a lifting link B171 between the first front frame side B113 and the second front frame side B123 and between the first rear frame side B114 and the second rear frame side B124. To lift the tray T; the lifting platform B17 is provided with a plurality of suction nozzles B172 that can absorb the bottom surface of the tray T and a plurality of through holes B173 corresponding to the plurality of hollow intervals T1 of the tray T, which can be used without When measuring the substrate as shown in Figure 2 directly carried by the carrier plate and directly carried by the conveyor belt B13, the lifting platform B17 can use the first pressing member B115 on both sides above the carrier plate T during the lifting process. , The second pressing member B125 flattens the substrate to make it flat.

Please refer to Figures 5 and 6, the upper end of each lifting linkage B171 is linked with the lifting platform B1, and the lower end is fixed on the two ends of a fixed piece B174 fixed on the two sliding seats B116 in the X-axis. On the sliding seat B1742 of the axial slide rail B1741, a roller B1711 protrudes from the lower end of each lifting linkage B171 to the other side opposite to the fixing piece B174, and each of the rollers B1711 is pivotally mounted on and held by the fixing piece B174. An action piece B175 arranged oppositely and parallel to each other is set in a Y-axis hollow guide groove B1751 near both ends. The guide groove B1751 is obliquely arranged in an oblong shape, and its inner diameter is longer than the diameter of the roller B1711. The two guide grooves B1751 on the active part B175 have the same inclination angle, which is upper right and lower left as shown in Fig. 6; The driving part B1743 formed by an electric cylinder of B174 is provided with a driven part B1752 fixed on the active part B175, and the driving part B1743 is linked with the driven part B1752 by one end of a driving rod B1744; In the inner section B176 of the part B174 and the active part B175, the fixing part B174 outside the two ends of the driving part B1743 is respectively provided with a slide rail B1745 in the X-axis direction, corresponding to the function of each slide rail B1745 A sliding seat B1753 is respectively provided on the parts B175, and the sliding seat B1753 can make an X-axis displacement on the slide rail B1745, and when the fixing part B174 does not move, the active part B175 moves X relative to the fixing part B174. Axial displacement; therefore, when the driving part B1743 is driven by the driving rod B1744 to make the driven part B1752 move in unison, the X-axis displacement of the active part B175 on the slide rail B1745 by the slide seat B1753 will use the action The guide grooves B1751 near both ends of the component B175 guide the rollers B1711 to rise or fall obliquely, and accordingly the lifting linkages B171 are moved up and down on the Z-axis slide rail B1741 through the sliding seat B1742 , to lift the lifting platform B1.

Please refer to Fig. 5, the conveying mechanism B is provided with a stop mechanism B18 on the rail base B1, and the stop mechanism B18 is provided with a stop drive member B181 between the first front frame side B113 and the second front frame side B123 , the stop driving member B181 drives a linkage rod B182 to move up and down, and is pivotally arranged on one end of a swing rod B184 of the rail seat B1 with a pivot joint B183 in conjunction with the other end of the swing rod B184. A stopper B185, please refer to Fig. 7 at the same time, the stopper B185 is provided with a pivoting part B186 and a buckle part B187, the buckle part B187 is received by an oblong chute B188 at one end of the swing bar B184 The buckle is pulled and can slide in the chute B188, the buckle part B187 keeps a distance from the pivot part B186, so that the buckle part B187 can slide in the chute B188 due to the swing displacement of the swing lever B184 slide in the center, and perform abutment positioning on the tray T or object W conveyed in the conveying channel B3 with a abutting surface B189 of the stopper B185 as shown in FIG. 7 , or as shown in FIG. 8 The abutting surface B189 is swung below the conveying channel B3 for the tray T or the object W to pass through.

Please refer to Figures 3 and 9, the moving mechanism C is provided with a first axial displacement mechanism C1 and a second axial displacement mechanism C2; wherein, the first axial displacement mechanism C1 is located between the conveying mechanism B and the second Between the axial displacement mechanism C2, it is provided with an iron-core linear motor C12 on a first base C11, and on the iron-core linear motor C12, a main slide seat C121 is used as the two sides of the X-axis displacement path, respectively spaced apart and parallel Each is provided with a slide rail C13, and each slide rail C13 is respectively provided with two auxiliary sliding seats C131, and the main sliding seat C121 and the auxiliary sliding seat C131 are jointly equipped with a first bearing seat C14, and the first bearing The seat C14 is provided for the seat B2 below the conveying mechanism B to be set and linked; the second axial displacement mechanism C2 is arranged below the first axial displacement mechanism C1, and it is provided with an iron core type on a second base C21. Linear motor C22, and on the core type linear motor C22, a main slide seat C221 is used as the Y-axis displacement path on both sides of the Y-axis displacement path. C23, each slide rail C23 is respectively provided with a secondary slide seat C231, the main slide seat C221 and the secondary slide seat C231 are jointly equipped with a second bearing seat C24, the second bearing seat C24 is used for the first shaft The first central axis L1 of the axial displacement path of the iron-core linear motor C22Y of the second axial displacement mechanism C2 and the first central axis L1 of the seat A There is a distance between the second center axis L2 of the first crossbeam A2Y in the axial direction, so that the displacement center axis L1 is biased toward the rear end of the delivery channel B3, and the offset makes the carrier W near the delivery channel B3. When the central position is positioned, the bottom of the first measuring device D can be aligned with the front end of the carrier W, so as to facilitate the initial measurement.

In the first embodiment of the present invention, when the tray T carrying a plurality of objects W is fed by a previous feeding device or processed by a machine of a process, it is transported to enter the conveying channel B3 of the conveying mechanism B , the first axial displacement mechanism C1 and the second axial displacement mechanism C2 of the moving mechanism C respectively move in the X-axis or the Y-axis to link the conveying mechanism B, so that the conveying channel of the conveying mechanism B The rear end of B3 is located at the outlet end of the feeding device or the machine of the previous process. The driving member B131 drives the conveyor belt B13 to run and drives the carrier T for linear displacement transportation, so as to guide the carrier T into the In the conveying channel B3, at the same time, the stop drive member B181 drives the stopper B185 to stop in the conveying channel B3, so that the tray T stops advancing at a transport positioning position; after the tray T is positioned, The driving part B1743 drives the X-axis displacement of the active part B175 and the sliding seat B1753 on the slide rail B1745, and guides the rollers B1711 obliquely with the guide grooves B1751 near both ends of the active part B175. Up or down, and according to this, each lifting linkage B171 is moved up and down on the Z-axis slide rail B1741 by the sliding seat B1742, so as to lift the lifting platform B17 until it touches the carrier T The carrier T is sucked by the suction nozzle B172 of the lift platform B17, and the carrier T is completely stopped at a preset height on the delivery channel B3; when the carrier T is stopped at the delivery channel B3 , through the first axial displacement mechanism C1 and the second axial displacement mechanism C2 of the moving mechanism C to move in the X-axis or Y-axis respectively, the carrier T on the delivery channel B3 is displaced to the A measurement position in the measurement section A3 corresponding to the lower part of the first measuring device D is used to measure the thickness of the object W on the carrier T, instead of conveying the carrier T together with the conveying belt B13 The object W moves into the measurement interval A3, so that the precise positioning of the object W will not be affected by the shaking before the conveyor belt B13 stops completely.

When measuring the thickness, please also refer to FIG. 10 , the first measuring device D first measures the distance of the upper surface of the reference part B141 in the reference unit B14 with a visible beam to obtain a first reference distance for comparison value d1, and then use the first measuring device D to measure the distance of the upper surface of the object W on the tray T to obtain a first measured distance value d2, because the first standard height d of the reference part is Known, and the reference part B141 and the object W are placed at the same height, then the thickness of the object W can be deduced from the difference between the first reference distance d1 and the first measured distance d2: (d1 +d)-d2.

After the measurement is completed, the stop driving part B181 drives the stop part B185 to swing to a position lower than the carrier T for the carrier T to pass through, and the first axial displacement mechanism C1 of the moving mechanism C Move the conveying mechanism B in the X-axis or Y-axis with the second axial displacement mechanism C2, so that the front end of the conveying channel B3 of the conveying mechanism B is located at the entrance of a receiving device or a machine for the next process end, so that the driving member B131 drives the conveyor belt B13 to run and drives the tray T to make a linear displacement to transport the tray T to the material receiving device or the machine of the next process.

When the tray T used is of different specifications, the screw B151 can be driven to rotate through the drive member B15, so that the first side frame B11 can be displaced under the support of the pivot B152, so that the width of the conveying channel B3 can be changed to suit Transport of objects W or trays T of different specifications.

In the first embodiment of the present invention, the object W is transported through the conveying channel B3, and the reference unit B14 is provided with a reference part B141 having a first standard height, and cooperates with a first quantity capable of emitting visible light beams for distance measurement. Measuring device D, so that the first measuring device D measures the distance of the upper surface of the reference part B141 with a visible beam to obtain a first reference distance value d1; and using the first measuring device D to measure the upper surface of the object W Surface distance measurement to obtain a first measured distance value d2; and by comparing and calculating the first standard height d, the first reference distance value d1, and the first measured distance value d2 to obtain the thickness of the object W, so that the The conveyed object W can obtain accurate thickness measurement.

The second embodiment of the present invention can be shown in Figures 11 and 12. Compared with the first embodiment, a second beam A4 is arranged below the first beam A2 at a distance from and parallel to the first beam A2, so that The measuring section A5 is formed between the lower part of the first crossbeam A2 and the upper part of the second crossbeam A4, and makes the first upper frame side B111 and the second upper frame side B121 of the rail seat B1 of the conveying mechanism B and the distance between them The conveying flow channel B3 passes through the measurement interval A5, and the non-contact optical rangefinder that can emit visible beams such as laser beams and LED beams, such as conjugated cross-laser rangefinders, LEDs, etc. A second measuring device E is set on a second carrier A41 of the second beam A4, and the second measuring device E is from the bottom to the second viewing area A42 hollowed out by the second beam A4. It faces the measurement section A5 between the bottom of the first beam A2 and the top of the second beam A4, and is located below the conveying channel B3 and the object W, and detects the lower surface of the object W by projecting a visible light beam ; The first measuring device D is coaxial with the optical path system projected by the visible light beam of the second measuring device E The arrangement is opposite in direction; wherein, the optical path projected by the visible light beam of the second measuring device E passes through the through hole B173 of the lifting platform B17 and the hollowed-out area T1 to the lower surface of the object W; when the object W is placed When on the conveyor belt B13, the optical path of the second measuring device E passes between the two conveyor belts B13 to the lower surface of the object W.

Please refer to FIG. 13 , in the second embodiment of the present invention, when measuring the thickness, the first measuring device D measures the distance of the upper surface of the reference part B141 in the reference unit B14 with a visible light beam, and obtains a first value for comparison. Two reference distance values S1, at the same time the second measuring device E measures the distance of the lower surface of the reference part B141 with a visible light beam to obtain a third reference distance value S2 for comparison; then use the first measuring device D to The upper surface of the object W on the tray T is measured to obtain a fourth measured distance value S3, and at the same time, the second measuring device E is used to measure the distance of the lower surface of the object W to obtain a fifth measured distance Distance value S4; Since the second standard height S of the reference part is known, then by the second reference distance value S1, the third reference distance value S2 and the fourth measurement distance value S3, the fifth measurement distance value S4 The difference can be used to deduce the thickness of the object W as: (S1+S2+S)-(S3+S4).

Please refer to Figures 11 and 14. Compared with the second embodiment, the third embodiment of the present invention has a beam splitter F inclined at forty-five degrees above the conveying flow channel B3 and correspondingly located on the first beam A2. In the measurement interval A5 directly below the first inspection interval A21; an image pickup G such as a complementary metal oxide semiconductor (CMOS) or a charge-coupled device (CCD) is additionally set above the delivery channel B3, and Located below the first beam A2, the beam splitter F and the image finder G are jointly arranged on a fixed portion A221 extending downward on one side of the first carriage A22; the image finder G is horizontally arranged and corresponds to the beam splitter The mirror F is located on one of the first side surfaces F1 and the measurement interval A5 on the side, and its imaging path is turned in the horizontal direction by the beam splitter F and then vertical to the upper surface of the object W; at the same time, the first measuring device D is vertical Set and correspond to one of the second side F2 of the beam splitter F, the visible light beam of the first measuring device D is directed to The bottom just penetrates the beam splitter F and reaches the upper surface of the object W, so that the optical path of the first measuring device D between the beam splitter F and the upper surface of the object W, and the image pickup G in the beam splitter The image capturing path between the mirror F and the upper surface of the object W is coaxial, which means that the optical path is within the image capturing range of the image finder G from the beam splitter F.

In the third embodiment of the present invention, the image picker G can first take an image of a preset position on the upper surface of the object W, and then use the first measuring device D and the second measuring device D according to the position obtained by the image picker G. The measuring device E measures the thickness of the predetermined part of the object W; and in the case of the device such as the first embodiment, only the first measuring device D is provided without the second measuring device E, The image picker G can also be used in the first embodiment in the same way to assist in first obtaining the image capture position of the preset position, and then the thickness measurement is performed by the first measuring device D; in addition, the first measurement The positions of the image pickup device D and the image pickup device G can be interchanged, the optical path between the first measuring device D from the beam splitter F to the upper surface of the object W, and the image pickup device G from the beam splitter F to the In the case that the imaging paths between the upper surfaces of the object W are coaxial, the implementation of the above-mentioned imaging positioning and thickness measurement is similarly performed.

The fourth embodiment of the present invention is shown in FIG. 15. A hollow hole H1 can be formed on the beam splitter H, and the optical path of the first measuring device D can directly pass through the hollow hole H1 to the object W, so that visible light beams can be avoided. Interferenced by the diffusion phenomenon in the beam splitter H, the accuracy of the distance measurement of the visible light beam is increased.

The fifth embodiment of the present invention is shown in Fig. 16. The moving mechanism C can be installed under the seat J on the table top of the machine, so that the first axial displacement mechanism C1 is in the Y direction, and the second axial displacement mechanism C2 is in the Y direction. In the X-axis direction, the first axial displacement mechanism C1 is arranged between the seat frame J and the second axial displacement mechanism C2 to drive the seat frame J to be displaced in the X and Y axial directions in conjunction with the seat The first measuring device D and the second measuring device E on the frame J are displaced, and the conveying mechanism M is fixedly set on the machine platform by straddling the two sides of the frame J with two supports M1 On the platform K, the rail seat M2 on the conveying mechanism M is extended through the measurement interval J3 formed by the seat frame J, the first crossbeam J1, and the second crossbeam J2, and the rail seat M2 is placed on the The conveying channel M3 of the conveying channel M3 provides a conveying flow path only at the positioning, and the carrier plate M4 and the reference member B141 of the reference unit B14 arranged on one side of the rail seat M2 only provide the measurement at the positioning, and at the same time, the first quantity One side of the measuring device D and the second measuring device E are spaced apart from each other and correspondingly above the conveying channel M3, a first image picker N1 such as a CCD lens for viewing from top to bottom is provided, and on the conveying channel M3 The bottom is provided with a second image pickup N2 such as a CCD lens that can be viewed from bottom to top; during measurement, the moving mechanism C drives the mount J to translate relative to the conveying mechanism C, and at the same time drives the first image pickup After N1 and the second image picker N2 obtain the position of the preset measurement point of the object W, the moving mechanism C drives the mount J to link the first measuring device D and the second measuring device E to obtain the object W presets the thickness information of the measuring point.

But what is described above is only an embodiment of the present invention, and should not limit the scope of the present invention. All simple equivalent changes and modifications made according to the patent scope of the present invention and the content of the patent specification are still within the scope of the present invention. Within the scope covered by the patent of the present invention.

A: Mount

A1: Pillar

A2: First beam

A21: The first viewing interval

A22: The first carrier

A3: Measurement interval

B: Conveying mechanism

B1: rail seat

B2: seat

B3: Delivery channel

C: mobile mechanism

D: the first measuring device

K: Machine table

L1: the first central axis

L2: second central axis

T: tray

Claims (12)

A device for measuring the thickness of an object, comprising: a frame; A conveying mechanism is arranged on the table top of the machine, and the conveying mechanism is provided with a rail seat, and a conveying flow channel is provided on the rail seat for conveying an object; a first measuring device, installed on the frame to detect the object conveyed by the conveying channel; A moving mechanism is provided for one of the seat frame or the conveying mechanism, and can drive the seat frame or the conveying mechanism to translate relative to the table top of the machine. The device for measuring the thickness of an object according to claim 1, wherein the seat frame is supported by two pillars on a first crossbeam located above, and a measurement section is formed below the first crossbeam for the thickness measurement of the object therebetween . The object thickness measuring device as described in Claim 1, wherein, the rail seat of the conveying mechanism is in the shape of a rectangular frame, and is provided with a first side frame and a rectangular frame-shaped spaced apart and parallel to each other. The second side frame; wherein, the inner sides of the first upper frame edge on the frame-shaped upper side of the first side frame and the second upper frame edge on the second side frame-shaped upper side of the second side frame are respectively provided with a conveyor belt, and The conveying belt is driven to run by a driving member to form the conveying channel. The object thickness measuring device as described in claim 3, wherein, the conveying mechanism is provided with a seat on which the rail seat is set, and the moving mechanism is used for setting the seat; the seat is provided with a slide rail; When the second side frame is fixed, the first side frame can be displaced to change the width of the conveying channel. The object thickness measuring device as described in Claim 1, wherein, the rail base of the conveying mechanism is provided with a lifting platform, and the lifting platform can be moved up and down and is provided with a suction nozzle. The object thickness measuring device as described in claim item 5, wherein, the front and rear ends of the lifting platform are respectively synchronously linked by a lifting linkage, each of the lifting linkages is provided with a roller, and the rollers are respectively pivoted on a fixed In the guide groove provided by an active part that is arranged in parallel and opposite to each other, a driving part is linked to the displacement of the active part relative to the fixed part, so as to move the lifting linkage parts up and down to lift the lifting platform. The object thickness measuring device as described in Claim 1, wherein, the conveying mechanism is provided with a stop mechanism on the rail seat, and the stop mechanism is provided with a stop driving part, and the stop driving part drives a linkage rod to move up and down. The downward displacement is connected with one end of a swing bar of the rail seat with a pivot joint, and a stopper is connected with the other end of the swing bar. The object thickness measuring device as described in Claim 1, wherein a second beam is arranged below the first beam, the measurement section is formed between the bottom of the first beam and the top of the second beam, and the conveying mechanism The conveying channel of the rail base passes through the measuring section; a second measuring device faces the measuring section from bottom to top, and is located under the conveying channel and the object, and projects a visible light beam on the object Check the surface below. The object thickness measuring device as described in claim 1, wherein an image picker is arranged above the conveying channel, and the image picker first takes an image of a preset position on the upper surface of the object, and then according to the image picker The obtained position is used by the first measuring device to measure the thickness of the preset part of the object. The device for measuring the thickness of an object according to claim 9, wherein the image picker is arranged on the side of the first measuring device in parallel with a space above the conveying flow channel, and a first pick-up for viewing from top to bottom is provided. An imager, and a second imager for viewing from bottom to top is arranged below the conveying channel. The device for measuring the thickness of an object as described in Claim 9, wherein a beam splitter is arranged above the conveying channel; the imaging path of the image picker is turned horizontally by the beam splitter and then vertically to the upper surface of the object; A measuring device uses a laser beam to penetrate the beam splitter and reach the upper surface of the object, so that the optical path of the first measuring device between the beam splitter and the upper surface of the object, and the image picker at the The imaging path between the beam splitter and the upper surface of the object is coaxial. The object thickness measuring device as claimed in claim 11, wherein the beam splitter forms a hole, so that the optical path of the first measuring device directly passes through the hole to the object.

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