TWI778353B - Handheld atmospheric pressure plasma device - Google Patents

Abstract

A portable atmospheric pressure plasma device comprising a housing and a planar electrode component is provided. The housing has an inner space and a plasma outlet connected to the inner space. The planar electrode component is disposed in the inner space for receiving a high voltage power to generate planar plasma at the plasma outlet. The planar electrode component comprises a first insulation substrate, a first spiral electrode pattern, a second spiral electrode pattern, and a second insulation substrate. The first spiral electrode pattern and the second spiral electrode pattern are formed on the first insulation substrate. The first spiral electrode pattern and the second spiral electrode pattern have opposite rotation directions and are engaged with each other. A gap is kept between the first spiral electrode pattern and the second spiral electrode pattern. The second insulation substrate covers the first spiral electrode pattern and the second spiral electrode pattern.

Description

Handheld Atmospheric Plasma Device

The present invention relates to an atmospheric plasma device, in particular to a hand-held atmospheric plasma device for relieving skin lesions.

In recent years, atmospheric plasma has been gradually applied to the activation and treatment of human skin, such as facelift, scar removal, etc., as a non-invasive treatment solution.

However, the traditional atmospheric plasma device is too bulky to operate. In addition, these atmospheric plasma devices are prone to the problems of excessive local plasma density and uneven plasma density, which affect the convenience of use and easily cause damage to human skin.

In view of this, the present invention provides a hand-held atmospheric plasma device, which can improve the problem of uneven density of atmospheric plasma, and can effectively prevent the plasma from causing damage to human skin.

The hand-held atmospheric plasma device provided by the present invention includes a casing and a planar electrode element. The housing has a cavity and a plasma outlet. The cavity is located inside the housing and communicates with the outside world. The plasma outlet communicates with the cavity. The planar electrode element is arranged in the cavity for receiving a high voltage to generate planar plasma at the plasma outlet. The planar electrode element includes a first insulating substrate, a first spiral electrode pattern, a second spiral electrode pattern and a second insulating substrate. The first spiral electrode pattern and the second spiral electrode pattern are formed on the first insulating substrate. The first spiral electrode pattern and the second spiral electrode pattern have opposite directions and are intertwined with each other, and there is a gap between the first spiral electrode pattern and the second spiral electrode pattern. The second insulating substrate covers the first spiral electrode pattern and the second spiral electrode pattern.

To sum up, compared with the conventional technology, the handheld atmospheric plasma device of the present invention has a special planar electrode element, which can effectively generate planar plasma in a small-sized cavity, which is convenient for handheld use. Secondly, the handheld atmospheric plasma device of the present invention can generate uniform planar plasma. This uniform planar plasma can be applied directly to the patient's skin to soothe skin lesions without the need for additional protective caps to adjust the plasma intensity.

The specific embodiments adopted by the present invention will be further described by the following embodiments and drawings.

The specific embodiments of the present invention will be described in more detail below with reference to the schematic diagrams. The advantages and features of the present invention will become more apparent from the following description and the scope of the claims. It should be noted that the drawings are all in a very simplified form and use inaccurate scales, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the present invention.

The first figure is a schematic diagram of an embodiment of the hand-held atmospheric plasma device of the present invention. The second picture is an exploded view of the handheld atmospheric plasma device of the first picture. As shown in the figure, the handheld atmospheric plasma device 10 includes a housing 12 and a planar electrode element 14 .

The housing 12 includes a body portion 120 and a cover portion 130 . The body portion 120 has a cavity 122 and a plasma outlet 124 . The cavity 122 is located inside the body portion 120 as a space for generating atmospheric plasma. The plasma outlet 124 is connected to the cavity 122 as an outlet for the outward ejection of atmospheric plasma. The cover portion 130 is closed to the plasma outlet 124 and has an opening 132 corresponding to the plasma outlet 124 of the body portion 120 to adjust the distribution state of the plasma ejected. In one embodiment, as shown in the figures, the body portion 120 has a grip portion 1222 and a spray head portion 1224 in terms of appearance. The grip portion 1222 is substantially cylindrical. The spray head 1224 is located at the front end of the holding portion 1222 (ie, the lower end in the figure), and the width of the spray head 1224 is larger than that of the holding portion 1222 . The cavity 122 and the plasma outlet 124 are located in the shower head 1224 .

The planar electrode element 14 is disposed in the cavity 122 for receiving a high voltage to generate planar plasma, which is ejected from the plasma outlet 124 . The structural details of the planar electrode element 14 will be described in more detail in the subsequent paragraphs corresponding to the third and fourth figures.

In this embodiment, as shown in the figure, the handheld atmospheric plasma device 10 further has a high-voltage electrical connection structure 162 and a low-voltage electrical connection structure 164 . One end of the high-voltage electrical connection structure 162 is electrically connected to the planar electrode element 14 , and the other end is electrically connected to an external high-voltage power supply 20 . In one embodiment, the high-voltage power supply 20 may be an AC power supply to provide high-voltage AC power. For example, the high-voltage AC power may be an AC voltage above 7kv. The high voltage pulse can be a square wave pulse or a sine wave pulse, and its voltage and frequency range can be adjusted according to requirements.

One end of the low-voltage electrical connection structure 164 is electrically connected to the planar electrode element 14 , and the other end is grounded. In one embodiment, the high-voltage electrical connection structure 162 may include a power wire 1622 (ie, a live wire) and an elastic contact member 1624 . The power line 1622 is connected to the external high-voltage power source 20 for power supply, and the elastic contact member 1624 is used for abutting against the planar electrode element 14 . Similarly, in one embodiment, the low-voltage electrical connection structure 164 may include a power line 1642 (ie, a ground line) and an elastic contact member 1644 . The power line 1642 is grounded, and the elastic contact piece 1644 is used for abutting against the planar electrode element 14 .

As shown in the figure, in coordination with the aforementioned high-voltage electrical connection structure 162 and low-voltage electrical connection structure 164 , two channels 1226 are formed inside the main body portion 120 . 124) extends to cavity 122 to accommodate power cords 1622, 1642. The elastic contact pieces 1624 and 1644 are disposed in the cavity 122 . In this way, the power lines 1622 and 1642 can be extended outward from the rear end of the body portion 120 .

In the aforementioned embodiments, the planar electrode element 14 is powered by the external high-voltage power supply 20 through the high-voltage electrical connection structure 162 and the low-voltage electrical connection structure 164 . However, it is not limited to this. For low-power applications, in one embodiment, the handheld atmospheric plasma device 10 can also have a built-in power source, such as a battery, and the built-in power source can directly supply the planar electrode element 14 to generate planar plasma.

Secondly, in this embodiment, the cavity 122 of the body portion 120 is communicated to the outside through the plasma outlet 124 . However, it is not limited to this. In one embodiment, the body portion 120 may additionally be provided with an air hole (not shown) that communicates with the cavity 122 so that the cavity 122 communicates with the outside world. Also, in one embodiment, the air hole can be used as a gas inlet. Through the gas inlet, the user can introduce the reaction gas into the cavity 122 to improve the plasma generation efficiency or increase the concentration of specific free radicals generated to enhance the sterilization effect. In one embodiment, the reactive gas is nitrogen (N ₂ ), argon (Ar), or helium (He) gas that helps to generate plasma. In one embodiment, in order to prevent the plasma from being ejected from the air hole, the air hole may be disposed on one end of the casing 12 away from the plasma outlet 124 .

The third figure is a schematic diagram of an embodiment of the planar electrode element of the handheld atmospheric plasma device of the present invention. As shown in the figure, the planar electrode element 30 includes a first insulating substrate 32 , a first spiral electrode pattern 34 , a second spiral electrode pattern 36 and a second insulating substrate 38 .

The first insulating substrate 32 has a square shape. The first spiral electrode pattern 34 and the second spiral electrode pattern 36 are formed on the first insulating substrate 32 . The first spiral electrode pattern 34 has a first power connection area 341 , and the second spiral electrode pattern 36 has a second power connection area 361 . The first spiral electrode pattern 34 and the second spiral electrode pattern 36 are intertwined with each other, and there is a gap G between the first spiral electrode pattern 34 and the second spiral electrode pattern 36, and they are not in contact. It should be noted that the spiral directions of the first spiral electrode pattern 34 and the second spiral electrode pattern 36 in this embodiment are opposite. Compared with the same-direction spiral design, the reverse spiral design helps to improve the uniformity of the electric field distribution at the center point (corresponding to the end positions of the first spiral electrode pattern 34 and the second spiral electrode pattern 36 at the center).

The second insulating substrate 38 has a square shape. The second insulating substrate 38 covers the spiral portions of the first spiral electrode pattern 34 and the second spiral electrode pattern 36 for protection, and the first power connection area 341 and the second power connection area 361 are exposed to receive high voltage electricity . In one embodiment, the width W2 of the second insulating substrate 38 is smaller than the width W1 of the first insulating substrate 32 , and the first power connection area 341 and the second power connection area 361 are located on both sides of the first insulating substrate 32 . The portion covered by the second insulating substrate 38 . However, it is not limited to this. By adjusting the size of the second insulating substrate 38 , the first power connecting region 341 and the second power connecting region 361 can also be disposed on two adjacent sides of the first insulating substrate 32 or on the same side.

In this embodiment, the thickness of the first insulating substrate 32 is smaller than the thickness of the second insulating substrate 38 . Using the thickness difference between the first insulating substrate 32 and the second insulating substrate 38, a large area of plasma can be generated outside the first insulating substrate 32 (that is, below the first insulating substrate 32 in the figure), while avoiding the second insulating substrate 32. Atmospheric plasma is generated outside the substrate 38 (that is, above the second insulating substrate 38 in the figure) to ensure the plasma strength provided by the plasma outlet 124 to the outside. In one embodiment, the first insulating substrate 32 is a quartz glass substrate, the second insulating substrate 38 is also a quartz glass substrate, the thickness of the first insulating substrate 32 is 0.5 mm, and the thickness of the second insulating substrate 38 is 0.7 mm.

The high-voltage power system from the high-voltage power supply 20 is applied to the first spiral electrode pattern 34 and the second spiral electrode pattern 36 through the first power supply connection region 341 and the second power supply connection region 361 to generate an electric field outside the first insulating substrate 32, and further Atmospheric plasma is generated. The distribution of the first spiral electrode pattern 34 and the second spiral electrode pattern 36 determines the plane plasma generation range of the plane electrode element 30 . In this embodiment, the first spiral electrode pattern 34 and the second spiral electrode pattern 36 define a circular plasma generation area, and the circular area roughly corresponds to the first spiral electrode pattern 34 and the second spiral electrode pattern 36 of the helical winding area.

In addition, in order to ensure the uniformity of plasma distribution within the plasma generation range, in one embodiment, the gap G between the first spiral electrode pattern 34 and the second spiral electrode pattern 36 is controlled to be 0.8-1.2 mm. In one embodiment, the width ratio of the line width L1 of the first spiral electrode pattern 34 to the line width L2 of the second spiral electrode pattern 36 is between 0.8 and 1.5. In one embodiment, the line width L1 of the first spiral electrode pattern 34 is 0.53 to 1.875 times the gap G.

Next, in one embodiment, the first spiral electrode pattern 34 and the second spiral electrode pattern 36 are metal conductive patterns, which are formed on the first insulating substrate 32 by sputtering. However, it is not limited to this. In one embodiment, indium tin oxide (ITO), indium zinc oxide (IZO) or indium gallium zinc oxide (IGZO) can also be used to manufacture the first spiral electrode pattern 34 and the second spiral electrode pattern 36 .

In this embodiment, the first insulating substrate 32 is a quartz glass substrate, and the second insulating substrate 38 is also a quartz glass substrate to provide better mechanical strength. However, the present invention is not limited to this. In one embodiment, the first insulating substrate 32 and the second insulating substrate 38 can also be made of other dielectric materials, such as polyimide films. In addition, the first insulating substrate 32 and the second insulating substrate 38 can also be made of non-transparent materials.

In this embodiment, the same material is used to manufacture the first insulating substrate 32 and the second insulating substrate 38 . However, the present invention is not limited to this. In one embodiment, the first insulating substrate 32 and the second insulating substrate 38 can also use different dielectric materials, and the difference in the dielectric constant of the dielectric materials used by the two can be used to determine the location where the atmospheric plasma is generated (Atmospheric plasma will be generated on the side with the lower dielectric constant).

In one embodiment, in order to fix the second insulating substrate 38 on the first insulating substrate 32, the planar electrode element 30 further includes an adhesive layer 39 sandwiched between the first insulating substrate 32 and the second insulating substrate 38, And surround the periphery of the spiral portion of the first spiral electrode pattern 34 and the second spiral electrode pattern 36 .

Figure 4 is a schematic diagram of another embodiment of the planar electrode element of the handheld atmospheric plasma device of the present invention. Compared with the embodiment in the third figure, the first insulating substrate 32 and the second insulating substrate 38 are in a square shape, and the first insulating substrate 42 of the planar electrode element 40 in this embodiment is in a circular shape to match the cavity 122 shape. The second insulating substrate 48 has a circular shape to match the plasma generating range of the planar electrode element 40 and the shape of the plasma outlet 124 . In addition, the diameter D1 of the first insulating substrate 42 is larger than the diameter D2 of the second insulating substrate 48 , so that the first power connection area 341 and the second power connection area 361 are exposed to receive high voltage electricity.

Figures 5 and 6 show the detection position and analysis results of the optical emission spectroscopy (Optical Emission Spectroscopy; OES) of the handheld atmospheric plasma device in the first figure. The fifth figure shows the analysis position of the light emission spectrum, and the sixth figure shows the corresponding intensity distribution. As shown in Fig. 5, the optical emission spectrum analysis measures the plasma intensity along the radial direction of the plasma outlet 124, and the positions of the detection points P1, P2, P3, P4, P5, and P6 are determined from the left reference point The starting points are 6mm, 12mm, 15mm, 18mm, 24mm and 30mm respectively. The detection point P3 located at 15 mm corresponds to the center position of the plasma outlet 124 . As shown in Figure 6, the intensity values of the detection points P1 to P6 are between 8000a.u to 10100a.u, which shows that the planar electrode element 14 of the present invention can indeed generate uniform planar plasma.

To sum up, compared with the conventional technology, the handheld atmospheric plasma device 10 of the present invention has a special planar electrode element, which can effectively generate planar plasma in a small-sized cavity, which is convenient for handheld use. Secondly, the handheld atmospheric plasma device 10 of the present invention can generate uniform planar plasma. This uniform planar plasma can be applied directly to the patient's skin to soothe skin lesions without the need for additional protective caps to adjust the plasma intensity.

The above are only preferred embodiments of the present invention, and do not limit the present invention in any way. Any person skilled in the art, within the scope of not departing from the technical means of the present invention, makes any form of equivalent replacement or modification to the technical means and technical content disclosed in the present invention, all of which do not depart from the technical means of the present invention. content still falls within the protection scope of the present invention.

10: Handheld Atmospheric Plasma Device 12: Shell 14: Planar Electrode Elements 120: Body part 130: Cover part 122: cavity 124: Plasma outlet 132: Opening 1222: Grip 1224: sprinkler head 162: High-voltage electrical connection structure 164: Low-voltage electrical connection structure 20: High voltage power supply 1622, 1642: Power cord 1624, 1644: Elastomeric Contacts 1226: channel 30,40: Planar Electrode Elements 32,42: First insulating substrate 34: The first spiral electrode pattern 36: Second spiral electrode pattern 38,48: Second insulating substrate W1,W2: width 341: The first power connection area 361: Second power connection area G: Gap L1, L2: Line width 39: Adhesive layer D1, D2: Diameter P1,P2,P3,P4,P5,P6: Detection point

The first figure is a schematic diagram of an embodiment of the handheld atmospheric plasma device of the present invention; The second picture is an exploded view of the handheld atmospheric plasma device of the first picture; Figure 3 is a schematic diagram of an embodiment of the planar electrode element of the handheld atmospheric plasma device of the present invention; The fourth figure is a schematic diagram of another embodiment of the planar electrode element of the handheld atmospheric plasma device of the present invention; and Figures 5 and 6 show the detection position and analysis results of the optical emission spectroscopy (Optical Emission Spectroscopy; OES) of the handheld atmospheric plasma device in the first figure.

10: Handheld Atmospheric Plasma Device

14: Planar Electrode Elements

120: Body part

130: Cover part

122: cavity

124: Plasma outlet

132: Opening

1222: Grip

1224: sprinkler head

162: High-voltage electrical connection structure

164: Low-voltage electrical connection structure

20: High voltage power supply

1622, 1642: Power cord

1624, 1644: Elastomeric Contacts

1226: channel

Claims (12)

A hand-held atmospheric plasma device, comprising: a shell with a cavity and a plasma outlet, the cavity is located inside the shell and communicated with the outside, the plasma outlet is communicated with the cavity; and a planar electrode The element is arranged in the cavity for receiving a high voltage to generate plane plasma at the plasma outlet. The plane electrode element comprises: a first insulating substrate; a first spiral electrode pattern and a second spiral an electrode pattern formed on the first insulating substrate, the first spiral electrode pattern and the second spiral electrode pattern have opposite directions and are intertwined with each other, and there is a gap between the first spiral electrode pattern and the second spiral electrode pattern, And the first spiral electrode pattern includes a first power connection area, the second spiral electrode pattern includes a second power connection area, and the first power connection area and the second power connection area are located between the first insulating substrate. opposite sides; and a second insulating substrate covering the first spiral electrode pattern and the second spiral electrode pattern, the first power connection area and the second power connection area are exposed outside the second insulating substrate to receiving the high voltage; wherein, the thickness of the first insulating substrate is smaller than the thickness of the second insulating substrate. The handheld atmospheric plasma device of claim 1, further comprising a cover body, the cover system being detachably disposed on the plasma outlet. The handheld atmospheric plasma device of claim 1, wherein the first insulating substrate and the second insulating substrate are circular. The handheld atmospheric plasma device of claim 1, wherein the first insulating substrate and the second insulating substrate are in a square shape. The handheld atmospheric plasma device of claim 1, wherein the housing further comprises a gas inlet, and the gas inlet is communicated with the cavity for introducing a reaction gas. The handheld atmospheric plasma device of claim 5, wherein the gas inlet is located on an end of the housing away from the plasma outlet. The handheld atmospheric plasma device of claim 1, wherein the first insulating substrate is a quartz glass substrate or a polyimide film. The handheld atmospheric plasma device of claim 1, wherein the second insulating substrate is a quartz glass substrate or a polyimide film. The handheld atmospheric plasma device of claim 1, wherein the first spiral electrode pattern and the second spiral electrode pattern are made of indium tin oxide (ITO), indium zinc oxide (IZO) or indium gallium zinc oxide (IGZO) constitute. The handheld atmospheric plasma device of claim 1, wherein the gap is between 0.8-1.2 mm. The handheld atmospheric plasma device of claim 1, wherein a ratio of line widths of the first spiral electrode pattern to the line width of the second spiral electrode pattern is between 0.8 and 1.5. The handheld atmospheric plasma device of claim 1, wherein the line width of the first spiral electrode pattern is 0.53 to 1.875 times the gap.

Images