TWI771572B - Fluid pressure cylinder with detection mechanism - Google Patents

Fluid pressure cylinder with detection mechanism Download PDF

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Publication number
TWI771572B
TWI771572B TW108108237A TW108108237A TWI771572B TW I771572 B TWI771572 B TW I771572B TW 108108237 A TW108108237 A TW 108108237A TW 108108237 A TW108108237 A TW 108108237A TW I771572 B TWI771572 B TW I771572B
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piston
position detection
threaded shaft
cylinder
fluid pressure
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TW108108237A
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Chinese (zh)
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TW201940800A (en
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中山徹
増井一
石澤尚大
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日商Smc股份有限公司
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B15/00Fluid-actuated devices for displacing a member from one position to another; Gearing associated therewith
    • F15B15/20Other details, e.g. assembly with regulating devices
    • F15B15/28Means for indicating the position, e.g. end of stroke

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Actuator (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pens And Brushes (AREA)

Abstract

A fluid pressure cylinder with detection mechanism, having a piston (40) slidably arranged inside a cylinder hole (14) of a cylinder body (12). A screw hole (46) formed at the center of the piston is screw-engaged with a threaded shaft (60) for position detection. The piston is supported by the cylinder body so as to be limited in rotation about the shaft center, whereas the threaded shaft for position detection is supported by an end cover (20) provided at an end of the cylinder body so as to be rotatable around the shaft center and limited in displacement along the shaft center. A sensor (84) is arranged to face an end of the threaded shaft for position detection extending outward from the end cover.

Description

附檢測機構的流體壓力缸 Fluid pressure cylinder with detection mechanism

本發明係關於一種具備檢測活塞之位置的檢測機構的流體壓力缸。 The present invention relates to a fluid pressure cylinder provided with a detection mechanism for detecting the position of a piston.

以往,為了檢測在缸孔內移動之活塞的位置,已知在活塞裝設磁鐵,且在流體壓力缸之側面配設檢測該磁鐵之磁通的磁性感測器。該磁性感測器係利用伴隨活塞之移動而對於設置磁性感測器之位置的磁通變化,檢測出活塞位於預定之位置。 Conventionally, in order to detect the position of the piston moving in the cylinder hole, it is known to install a magnet on the piston, and to install a magnetic sensor for detecting the magnetic flux of the magnet on the side surface of the fluid pressure cylinder. The magnetic sensor detects that the piston is at a predetermined position by utilizing the change in the magnetic flux at the position where the magnetic sensor is installed along with the movement of the piston.

上述流體壓力缸中,必須調整磁性感測器之安裝位置,以使磁性感測器能在活塞位於預定之位置時有所反應。因此,在流體壓力缸之側面設置沿軸向延伸之安裝溝,且可在該安裝溝之長邊方向的任意位置安裝磁性感測器(參照例如日本特開2009-30674號公報)。 In the above-mentioned fluid pressure cylinder, the installation position of the magnetic sensor must be adjusted so that the magnetic sensor can respond when the piston is at a predetermined position. Therefore, a mounting groove extending in the axial direction is provided on the side surface of the fluid pressure cylinder, and the magnetic sensor can be mounted at any position in the longitudinal direction of the mounting groove (see, for example, Japanese Patent Application Laid-Open No. 2009-30674).

然而,檢測裝設在活塞之磁鐵的磁通時,必然地會有必須在活塞通過之空間的附近配設磁性感測器的限制。並且,調整磁性感測器之安裝位置的作業並不容易。再者,為了檢測活塞之複數個位置,必須設置對應個數的磁性感測器。 However, when detecting the magnetic flux of the magnet installed in the piston, there is a limitation that a magnetic sensor must be installed in the vicinity of the space through which the piston passes. In addition, it is not easy to adjust the installation position of the magnetic sensor. Furthermore, in order to detect a plurality of positions of the piston, a corresponding number of magnetic sensors must be provided.

本揭示係為了解決上述課題而研創者,其目的在於提供一種附檢測機構的流體壓力缸,可在從活塞分離之處配設感測器,且無須調整感測器之安裝位置,並且,可精細地檢測出活塞之位置。 The present disclosure has been developed to solve the above-mentioned problems, and its object is to provide a fluid pressure cylinder with a detection mechanism, which can be equipped with a sensor at the part separated from the piston, and the installation position of the sensor does not need to be adjusted, and can The position of the piston is precisely detected.

本發明之附檢測機構的流體壓力缸係將活塞配設成在缸體之缸孔內滑動自如者,設於活塞之中央的螺紋孔係螺合有位置檢測用螺紋軸,活塞係由缸體支撐成繞著軸心周圍之旋轉受到限制,位置檢測用螺紋軸係可繞著軸心旋轉,且由設在缸體之端部的端罩支撐成軸心方向之位移受到限制,並且,與從端罩朝外側延伸之位置檢測用螺紋軸的端部相向地配設有感測器。 In the fluid pressure cylinder with detection mechanism of the present invention, the piston is arranged so that the piston can slide freely in the cylinder hole of the cylinder body. Supported so that the rotation around the axis is restricted, the position detection threaded shaft system can rotate around the axis, and is supported by the end cover provided at the end of the cylinder so that the displacement in the direction of the axis is restricted, and, with Sensors are disposed on the ends of the threaded shaft for position detection that extends outward from the end cover so as to face each other.

依據上述附檢測機構的流體壓力缸,由於將活塞之直線運動變換為位置檢測用螺紋軸之旋轉運動,且在位置檢測用螺紋軸之端部側配置有感測器,故可將檢測活塞之位置的感測器配置在從活塞分離之部位。而且,無須特別地調整感測器之安裝位置,且可精細地檢測活塞之位置。 According to the above-mentioned fluid pressure cylinder with detection mechanism, since the linear motion of the piston is converted into the rotational motion of the threaded shaft for position detection, and the sensor is disposed on the end side of the threaded shaft for position detection, it is possible to detect the movement of the piston. The position sensor is arranged at a part separated from the piston. Moreover, there is no need to adjust the installation position of the sensor specially, and the position of the piston can be detected finely.

上述附檢測機構的流體壓力缸中,較佳為與活塞連結之活塞桿係具有中空構造,位置檢測用螺紋軸係進入活塞桿之內部。藉此,可減小位置檢測用螺紋軸之配置所需之空間。 In the above-mentioned fluid pressure cylinder with detection mechanism, preferably, the piston rod connected with the piston has a hollow structure, and the threaded shaft for position detection enters the interior of the piston rod. Thereby, the space required for arrangement|positioning of the screw shaft for position detection can be reduced.

並且,較佳為活塞及缸孔之剖面形狀為多角形而藉以限制活塞之旋轉。藉此,可確實地限制活塞之旋轉。 In addition, it is preferable that the cross-sectional shape of the piston and the cylinder hole is polygonal to restrict the rotation of the piston. Thereby, the rotation of the piston can be surely restricted.

並且,較佳為位置檢測用螺紋軸係藉由設在端罩之軸承而支撐成可旋轉,且將軸承夾持在形成於位置檢測用螺紋軸之段差部及裝設於位置檢測用螺紋軸之螺帽之間,藉以限制位置檢測用螺紋軸之軸心方向的位移。藉此,可簡化用以限制位置檢測用螺紋軸之軸心方向位移之構成。 Moreover, it is preferable that the threaded shaft system for position detection is rotatably supported by a bearing provided in the end cover, and the bearing is clamped at the step portion formed on the threaded shaft for position detection and mounted on the threaded shaft for position detection. Between the nuts, the displacement in the axial direction of the threaded shaft for position detection is limited. Thereby, the structure for restricting the axial displacement of the screw shaft for position detection can be simplified.

再者,較佳為位置檢測用螺紋軸之端部安裝有磁鐵,且與磁鐵相向地設有磁性感測器,此時,較佳為設有覆蓋磁性感測器與磁鐵之罩構件。藉此,可在不受到外部之磁場之影響的情形下,精確度佳地檢測活塞之位置。 Furthermore, a magnet is preferably installed at the end of the threaded shaft for position detection, and a magnetic sensor is provided opposite to the magnet. In this case, a cover member covering the magnetic sensor and the magnet is preferably provided. Thereby, the position of the piston can be accurately detected without being affected by an external magnetic field.

並且,較佳為在螺紋孔與位置檢測用螺紋軸之間中介有滾珠。藉此,精細地檢測活塞之位置將變得容易。 Moreover, it is preferable that a ball is interposed between the threaded hole and the threaded shaft for position detection. Thereby, it becomes easy to detect the position of the piston finely.

再者,感測器亦可為光學式感測器。 Furthermore, the sensor can also be an optical sensor.

本發明之附檢測機構的流體壓力缸可將用以檢測活塞之位置的感測器配置在從活塞分離之部位。而且,無須特別地調整感測器之安裝位置,且可精細地檢測活塞之位置。 In the fluid pressure cylinder with the detection mechanism of the present invention, a sensor for detecting the position of the piston can be arranged at a part separated from the piston. Moreover, there is no need to adjust the installation position of the sensor specially, and the position of the piston can be detected finely.

依據參照附圖進行之後述之較佳實施形態例的說明,應可更加明瞭上述之目的、特徵及優點。 The above-mentioned objects, features, and advantages will become more apparent from the description of the preferred embodiments described later with reference to the accompanying drawings.

10‧‧‧流體壓力缸 10‧‧‧Fluid pressure cylinder

12‧‧‧缸體 12‧‧‧Cylinder block

14‧‧‧缸孔 14‧‧‧Cylinder bore

16‧‧‧第一孔口 16‧‧‧First port

18‧‧‧第二孔口 18‧‧‧Second port

20‧‧‧端罩 20‧‧‧End shield

22‧‧‧凸緣部 22‧‧‧Flange

24‧‧‧貫通孔 24‧‧‧Through hole

24a‧‧‧第一徑部 24a‧‧‧First Diameter

24b‧‧‧第二徑部 24b‧‧‧Second diameter

24c‧‧‧第三徑部 24c‧‧‧The third diameter

24d‧‧‧第四徑部 24d‧‧‧4th diameter

26‧‧‧棒罩 26‧‧‧Rod Cover

28‧‧‧卡止環 28‧‧‧Lock ring

30‧‧‧貫通孔 30‧‧‧Through hole

32‧‧‧棒襯墊 32‧‧‧Rod liners

34‧‧‧第一密封環 34‧‧‧First sealing ring

36‧‧‧凹部 36‧‧‧Recess

38‧‧‧第一阻尼器 38‧‧‧First damper

40‧‧‧活塞 40‧‧‧Piston

42‧‧‧本體部 42‧‧‧Main body

44‧‧‧連結部 44‧‧‧Connections

46‧‧‧螺紋孔 46‧‧‧Threaded hole

48‧‧‧活塞封件 48‧‧‧Piston seals

50‧‧‧凹部 50‧‧‧Recess

52‧‧‧第二阻尼器 52‧‧‧Second damper

54‧‧‧活塞桿 54‧‧‧Piston rod

56‧‧‧插座 56‧‧‧Socket

58‧‧‧第二密封環 58‧‧‧Second sealing ring

60‧‧‧位置檢測用螺紋軸 60‧‧‧Threaded shaft for position detection

62‧‧‧螺紋部 62‧‧‧Threaded part

64‧‧‧支撐部 64‧‧‧Support

64a‧‧‧大徑部 64a‧‧‧Large diameter

64b‧‧‧中徑部 64b‧‧‧Middle diameter part

64c‧‧‧小徑部 64c‧‧‧Small diameter

66‧‧‧第三密封環 66‧‧‧Third sealing ring

68‧‧‧軸承 68‧‧‧Bearing

70‧‧‧軸承按壓件 70‧‧‧Bearing Press

72‧‧‧鎖固螺帽 72‧‧‧Locking Nuts

74‧‧‧磁鐵 74‧‧‧Magnet

76‧‧‧磁鐵固持具 76‧‧‧Magnet holder

78‧‧‧基板 78‧‧‧Substrate

80‧‧‧基部構件 80‧‧‧Base member

82‧‧‧筒狀突出部 82‧‧‧cylindrical protrusion

84‧‧‧磁性感測器 84‧‧‧Magnetic sensor

86‧‧‧罩構件 86‧‧‧Cover components

88‧‧‧第一壓力室 88‧‧‧First pressure chamber

90‧‧‧第二壓力室 90‧‧‧Second pressure chamber

第1圖係本發明實施形態之附檢測機構的流體壓力缸的平面圖。 Fig. 1 is a plan view of a fluid pressure cylinder with a detection mechanism according to an embodiment of the present invention.

第2圖係第1圖之流體壓力缸的正面圖。 FIG. 2 is a front view of the fluid pressure cylinder of FIG. 1. FIG.

第3圖係沿著第1圖之流體壓力缸之III-III線的剖視圖。 FIG. 3 is a cross-sectional view taken along line III-III of the fluid pressure cylinder of FIG. 1 .

第4圖係沿著第2圖之流體壓力缸IV-IV線的剖視圖。 Fig. 4 is a cross-sectional view taken along the line IV-IV of the fluid pressure cylinder of Fig. 2 .

第5圖係第1圖之流體壓力缸的側面圖。 FIG. 5 is a side view of the fluid pressure cylinder of FIG. 1. FIG.

第6圖係第1圖之流體壓力缸處於其他動作狀態時之對應於第3圖的剖視圖。 Fig. 6 is a cross-sectional view corresponding to Fig. 3 when the fluid pressure cylinder of Fig. 1 is in another operating state.

以下,針對本發明之附檢測機構的流體壓力缸列舉較佳實施形態,並參照圖式進行說明。 Hereinafter, the preferred embodiments of the fluid pressure cylinder with the detection mechanism of the present invention will be listed and described with reference to the drawings.

流體壓力缸10係包含缸體12、端罩20、棒罩26、活塞40、活塞桿54、位置檢測用螺紋軸60、磁鐵74及磁性感測器84。流體壓力缸10係安裝在例如未圖示之工件的夾持裝置。 The fluid pressure cylinder 10 includes a cylinder block 12 , an end cover 20 , a rod cover 26 , a piston 40 , a piston rod 54 , a position detection threaded shaft 60 , a magnet 74 , and a magnetic sensor 84 . The fluid pressure cylinder 10 is attached to, for example, a workpiece clamping device not shown.

如第4圖所示,缸體12係與其軸線垂直之剖面的外形為矩形,具有四個側面。缸體12中,朝其軸線方向貫穿設有缸孔14。缸孔14之活塞40滑動區域的剖面形狀係正八角形。如第1圖所示,在缸體12之一個側面,設有與缸孔14相連通之空氣供排用的第一孔口16及第二孔口18。 As shown in FIG. 4, the cylinder block 12 has a rectangular shape in cross section perpendicular to its axis, and has four sides. In the cylinder block 12, a cylinder hole 14 is penetrated in the axial direction thereof. The cross-sectional shape of the sliding area of the piston 40 of the cylinder bore 14 is a regular octagon. As shown in FIG. 1 , one side surface of the cylinder block 12 is provided with a first orifice 16 and a second orifice 18 for air supply and exhaust which communicate with the cylinder hole 14 .

端罩20係由鋁合金形成為筒狀。端罩20係具有朝徑向外側延伸之凸緣部22,將凸緣部22嵌合於缸孔14之一端側之後,將缸體12之一部分對於凸緣部22鉚接,藉此將端罩20固定在缸體12。端罩20之中央係設有用以插通位置檢測用螺紋軸60之貫通孔24。貫通孔24係從與 活塞40相向之側的端部起朝向與磁性感測器84相向之側的端部,階段性地放大直徑,依序將該等稱為第一徑部24a、第二徑部24b、第三徑部24c、第四徑部24d。 The end cap 20 is formed into a cylindrical shape from an aluminum alloy. The end cover 20 has a flange portion 22 extending radially outward. After the flange portion 22 is fitted to one end side of the cylinder hole 14, a part of the cylinder block 12 is riveted to the flange portion 22, whereby the end cover is attached. 20 is fixed to the cylinder block 12 . The center of the end cover 20 is provided with a through hole 24 through which a position detection threaded shaft 60 is inserted. The diameter of the through hole 24 is gradually enlarged from the end on the side facing the piston 40 to the end on the side facing the magnetic sensor 84 , and these are referred to as the first diameter portion 24 a and the second diameter portion in this order. Diameter portion 24b, third diameter portion 24c, and fourth diameter portion 24d.

棒罩26係從缸孔14之另一端側嵌合在缸孔14,且藉由卡止環28而固定在缸體12。棒罩26之中央係設有用以供活塞桿54插通之貫通孔30。棒罩26之內周係透過凹槽裝設有棒襯墊32。棒襯墊32係滑接於活塞桿54之外周面,且將活塞桿54與棒罩26之間密封。棒罩26之外周係透過凹槽裝設有第一密封環34。第一密封環34係抵接於缸孔14之壁面,且將缸體12與棒罩26之間密封。 The rod cover 26 is fitted into the cylinder hole 14 from the other end side of the cylinder hole 14 , and is fixed to the cylinder block 12 by a locking ring 28 . The center of the rod cover 26 is provided with a through hole 30 through which the piston rod 54 is inserted. The inner circumference of the rod cover 26 is provided with rod spacers 32 through the grooves. The rod packing 32 is slidably connected to the outer peripheral surface of the piston rod 54 and seals the space between the piston rod 54 and the rod cover 26 . The outer periphery of the rod cover 26 is provided with a first sealing ring 34 through the groove. The first sealing ring 34 is in contact with the wall surface of the cylinder hole 14 and seals the space between the cylinder block 12 and the rod cover 26 .

棒罩26之與活塞40相向之面係設有環狀之凹部36,且在凹部36安裝有環狀之第一阻尼器38。第一阻尼器38係在活塞40朝棒罩26側移動時之終端位置抵接於棒罩26,具有緩和活塞40之衝撃的功能。 The surface of the rod cover 26 facing the piston 40 is provided with an annular concave portion 36 , and an annular first damper 38 is installed in the concave portion 36 . The first damper 38 abuts against the rod cover 26 at the end position when the piston 40 moves toward the rod cover 26 side, and has a function of reducing the shock of the piston 40 .

活塞40係具備:本體部42;以及從本體部42朝棒罩26側突出設置之圓筒狀的連結部44。用以螺合位置檢測用螺紋軸60之螺紋孔46係沿軸線方向貫通地設置在活塞40之中央。 The piston 40 includes: a main body part 42; and a cylindrical connecting part 44 provided to protrude from the main body part 42 toward the rod cover 26 side. The screw hole 46 for the screw shaft 60 for screwing position detection is provided in the center of the piston 40 so as to penetrate in the axial direction.

如第4圖所示,活塞40之本體部42係具有與缸孔14之剖面整合之正八角形的剖面,且與缸孔14嵌合。藉此,活塞40可在繞著軸心旋轉受到限制的狀態下,沿軸心方向移動於缸孔14內。本實施形態中,將缸孔14之剖面形狀及與該缸孔14嵌合之活塞40的剖面形狀作成為正八角形,但亦可為彼此相整合之多角形。 As shown in FIG. 4 , the body portion 42 of the piston 40 has a regular octagonal cross-section integrated with the cross-section of the cylinder hole 14 , and is fitted into the cylinder hole 14 . Thereby, the piston 40 can move in the cylinder hole 14 in the axial center direction in a state where the rotation around the axial center is restricted. In the present embodiment, the cross-sectional shape of the cylinder hole 14 and the cross-sectional shape of the piston 40 fitted into the cylinder hole 14 are regular octagons, but they may be polygonal shapes which are integrated with each other.

活塞40之本體部42的外周係透過凹槽安裝有活塞封件48。活塞封件48係滑接於缸孔14之壁面,且將缸體12內之空間區分為端罩20側之第一壓力室88與棒罩26側之第二壓力室90。 The outer periphery of the body portion 42 of the piston 40 is fitted with a piston seal 48 through the groove. The piston seal 48 is slidably connected to the wall surface of the cylinder bore 14 and divides the space inside the cylinder 12 into a first pressure chamber 88 on the end cover 20 side and a second pressure chamber 90 on the rod cover 26 side.

活塞40之本體部42之與端罩20相向之面係設有環狀之凹部50,且在凹部50安裝有環狀之第二阻尼器52。第二阻尼器52係在活塞40朝端罩20側移動時之終端位置抵接於端罩20,且具有緩和活塞40之衝撃的功能。 The surface of the body portion 42 of the piston 40 facing the end cover 20 is provided with an annular recess 50 , and an annular second damper 52 is installed in the recess 50 . The second damper 52 is in contact with the end cover 20 at the end position when the piston 40 moves toward the end cover 20 , and has a function of reducing the shock of the piston 40 .

活塞桿54係構成為薄壁之圓筒狀,其一端覆罩於活塞40之連結部44,同時固定成為與本體部42之間無間隙之狀態。活塞桿54之另一端係通過棒罩26之貫通孔30朝外部延伸,且在其端部藉由螺紋結合而固定有插座56。插座56之一部分係包含該螺紋結合部分而嵌入於活塞桿54,且透過凹槽在其外周裝設有第二密封環58。第二密封環58係抵接於活塞桿54之內周面,且將活塞桿54與插座56之間密封。 The piston rod 54 is formed into a thin cylindrical shape, and one end of the piston rod 54 covers the connecting portion 44 of the piston 40 and is fixed in a state without a gap with the main body portion 42 . The other end of the piston rod 54 extends to the outside through the through hole 30 of the rod cover 26 , and a socket 56 is fixed at the end of the piston rod 54 by screwing. A part of the socket 56 is embedded in the piston rod 54 including the threaded portion, and a second sealing ring 58 is installed on the outer periphery of the socket 56 through the groove. The second sealing ring 58 is in contact with the inner peripheral surface of the piston rod 54 and seals the space between the piston rod 54 and the socket 56 .

位置檢測用螺紋軸60係具有:螺合於活塞40之螺紋孔46的螺紋部62;及支撐在端罩20之支撐部64。螺紋部62之一部分係進入活塞桿54之內部。如後所述,位置檢測用螺紋軸60之軸心方向之位移係受到限制。 The threaded shaft 60 for position detection includes a threaded portion 62 screwed into the threaded hole 46 of the piston 40 , and a support portion 64 supported by the end cap 20 . A portion of the threaded portion 62 enters the interior of the piston rod 54 . As will be described later, the displacement in the axial direction of the position detection screw shaft 60 is restricted.

形成於活塞40之螺紋孔46的母螺紋及形成在位置檢測用螺紋軸60之螺紋部62的公螺紋係設計成可將活塞40之直線運動(軸心方向之位移)變換為位置檢測用螺紋軸60之旋轉運動。亦即,將該等運動變換用之母螺紋與公螺紋之導程角設定成大於摩擦角,以使作用於活塞40之推力負載不會產生自鎖。 The female thread formed in the threaded hole 46 of the piston 40 and the male thread formed in the threaded portion 62 of the threaded shaft 60 for position detection are designed to convert the linear motion (displacement in the axial direction) of the piston 40 into the thread for position detection. Rotational movement of the shaft 60 . That is, the lead angle between the female thread and the male thread for these motion transformations is set to be larger than the friction angle, so that the thrust load acting on the piston 40 does not cause self-locking.

位置檢測用螺紋軸60之支撐部64係由:與螺紋部62相連之大徑部64a、與大徑部64a相連之中徑部64b、及與中徑部64b相連且構成位置檢測用螺紋軸60之端部的小徑部64c所構成。端罩20之貫通孔24的第一徑部24a係透過凹槽而裝設有第三密封環66。第三密封環66係抵接於支撐部64之大徑部64a,且將端罩20與位置檢測用螺紋軸60之間密封。 The support portion 64 of the threaded shaft 60 for position detection is composed of a large-diameter portion 64a connected to the threaded portion 62, a middle-diameter portion 64b connected to the large-diameter portion 64a, and a position-detecting threaded shaft connected to the middle-diameter portion 64b. The small diameter portion 64c at the end of the 60 is constituted. The first diameter portion 24a of the through hole 24 of the end cap 20 is provided with a third sealing ring 66 through the groove. The third seal ring 66 is in contact with the large-diameter portion 64 a of the support portion 64 , and seals the space between the end cap 20 and the position detection threaded shaft 60 .

第一壓力室88係與活塞桿54之內部空間相連通,藉由第二密封環58及第三密封環66而對於外部保持氣密狀態。第二壓力室90係藉由棒襯墊32及第一密封環34而對於外部保持氣密狀態。 The first pressure chamber 88 communicates with the inner space of the piston rod 54 , and is kept airtight to the outside by the second seal ring 58 and the third seal ring 66 . The second pressure chamber 90 is kept airtight to the outside by the rod packing 32 and the first seal ring 34 .

將位置檢測用螺紋軸60支撐為旋轉自如的軸承68係配設在端罩20之貫通孔24內。軸承68係在嵌合於貫通孔24之第二徑部24b之後,藉由利用壓入而固定在第三徑部24c之軸承按壓件70而軸向定位。 A bearing 68 that rotatably supports the threaded shaft 60 for position detection is disposed in the through hole 24 of the end cover 20 . After the bearing 68 is fitted into the second diameter portion 24b of the through hole 24, it is axially positioned by the bearing presser 70 fixed to the third diameter portion 24c by press fitting.

位置檢測用螺紋軸60之中徑部64b係設有公螺紋,且該公螺紋螺合有鎖固螺帽72。軸承68之軸向一端係抵接於鎖固螺帽72,軸承68之軸向另一端係抵接於位置檢測用螺紋軸60之大徑部64a與中徑部64b之間的段差面(段差部)。藉此,限制位置檢測用螺紋軸60之軸心方向的位移。 The inner diameter portion 64b of the threaded shaft 60 for position detection is provided with a male thread, and the male thread is screwed with a locking nut 72 . One axial end of the bearing 68 is in contact with the locking nut 72, and the other axial end of the bearing 68 is in contact with the step surface (step difference) between the large diameter portion 64a and the middle diameter portion 64b of the threaded shaft 60 for position detection. department). Thereby, the displacement in the axial center direction of the screw shaft 60 for position detection is restricted.

位置檢測用螺紋軸60之小徑部64c係安裝有用以支撐磁鐵74之磁鐵固持具76。磁鐵固持具76係由杜拉鋁等鋁合金所構成。磁鐵74係由釹構成為圓板狀,以包含其軸心之平面來區分為二部分時之一部分及另一部分係分別著磁為N極及S極。 A magnet holder 76 for supporting the magnet 74 is attached to the small diameter portion 64c of the threaded shaft 60 for position detection. The magnet holder 76 is made of an aluminum alloy such as duralumin. The magnet 74 is made of neodymium and has a disk shape, and when it is divided into two parts by a plane including the axis, one part and the other part are magnetically N pole and S pole, respectively.

端罩20係藉由壓入等手段而安裝有支撐基板78之基部構件80。基部構件80係由PBT等樹脂材料構成為圓筒狀,具有嵌合於端罩20之貫通孔24之第四徑部24d的筒狀突出部82。基板78係固定在與端罩20為相反側之基部構件80的端面。 The end cap 20 is attached to the base member 80 supporting the substrate 78 by means of press fitting or the like. The base member 80 is formed of a resin material such as PBT and has a cylindrical shape, and has a cylindrical protruding portion 82 that fits into the fourth diameter portion 24 d of the through hole 24 of the end cap 20 . The base plate 78 is fixed to the end face of the base member 80 on the opposite side to the end cap 20 .

基板78係安裝有檢測磁鐵74之磁通的磁性感測器84。磁鐵74及磁性感測器84係在位置檢測用螺紋軸60之中心軸線上彼此相向而配置在基部構件80之內側。磁性感測器84係構成為:包含至少一對未圖示之霍爾元件,藉由檢測與位置檢測用螺紋軸60一同旋轉之磁鐵74的磁通,而可檢測位置檢測用螺紋軸60之旋轉位置。藉由相向配置於圓板狀之磁鐵的一對霍爾元件來檢測磁鐵之旋轉位置係習知技術,因此省略詳細之說明。 The substrate 78 is mounted with a magnetic sensor 84 that detects the magnetic flux of the magnet 74 . The magnet 74 and the magnetic sensor 84 are arranged inside the base member 80 so as to face each other on the central axis of the position detection screw shaft 60 . The magnetic sensor 84 is configured to include at least one pair of Hall elements (not shown), and detect the magnetic flux of the magnet 74 that rotates with the position detection threaded shaft 60 to detect the position detection threaded shaft 60 . Rotation position. The detection of the rotational position of the magnet by a pair of Hall elements disposed opposite to the disk-shaped magnet is a conventional technique, so detailed descriptions are omitted.

基部構件80係安裝有覆蓋基板78之罩構件86。罩構件86係由屬於強磁性體之冷軋鋼卷(Steel plate coldrolled coil;SPCC)等鋼鐵材所構成,具有遮蔽磁鐵74之磁性的功能。藉此,防止來自外部磁場所致之磁性感測器84之誤動作。 The base member 80 is attached with a cover member 86 covering the base plate 78 . The cover member 86 is made of a steel material such as a ferromagnetic cold-rolled coil (SPCC), and has a function of shielding the magnetism of the magnet 74 . Thereby, malfunction of the magnetic sensor 84 caused by the external magnetic field is prevented.

本實施形態之附檢測機構的流體壓力缸10基本上係如以上方式構成者,以下針對其作用加以說明。此外,如第3圖所示,將活塞40之第二阻尼器52抵接於端罩20,活塞40位於端罩20側之行程末端之狀態設為初期位置。 The fluid pressure cylinder 10 with the detection mechanism of the present embodiment is basically constructed as described above, and its function will be described below. Further, as shown in FIG. 3 , the state where the second damper 52 of the piston 40 is in contact with the end cover 20 and the piston 40 is located at the stroke end of the end cover 20 side is set as the initial position.

在上述初期位置時,未圖示之切換閥動作,從第一孔口16朝向第一壓力室88供給空氣,且第二壓力室90內之空氣從第二孔口18排出。藉此,活塞40係承受朝向棒罩26之方向的推力。由於活塞40之繞著 軸心之旋轉受到限制,因而一面使位置檢測用螺紋軸60旋轉一面朝向棒罩26前進,與活塞40成為一體之活塞桿54亦前進而從棒罩26伸出。 In the above initial position, the switching valve (not shown) operates to supply air from the first orifice 16 to the first pressure chamber 88 , and the air in the second pressure chamber 90 is discharged from the second orifice 18 . Thereby, the piston 40 receives the thrust in the direction of the rod cover 26 . Since the rotation of the piston 40 about the axis is restricted, the screw shaft 60 for position detection advances toward the rod cover 26 while rotating, and the piston rod 54 integrated with the piston 40 also advances and protrudes from the rod cover 26.

位置檢測用螺紋軸60之軸心方向的位移受到限制,而伴隨著活塞40之前進而朝預定方向旋轉。固定在位置檢測用螺紋軸60之端部側的磁鐵74係與位置檢測用螺紋軸60一同當場旋轉,使得磁通在與磁鐵74相向之一對霍爾元件存在的位置有所變化。依據該磁通之變化,檢測位置檢測用螺紋軸60之旋轉位置。亦即,即時地檢測出活塞40之前進位置。此外,伴隨著活塞40之前進,進入活塞桿54之內部的位置檢測用螺紋軸60之長度會減少。 Displacement in the axial center direction of the position detection screw shaft 60 is restricted, and the piston 40 is further rotated in a predetermined direction as the piston 40 moves forward. The magnet 74 fixed to the end side of the position detection screw shaft 60 rotates on the spot together with the position detection screw shaft 60 so that the position where the magnetic flux exists on the Hall element is changed at one of the opposing positions of the magnet 74 . The rotational position of the screw shaft 60 for position detection is detected based on the change of this magnetic flux. That is, the advance position of the piston 40 is detected immediately. In addition, as the piston 40 advances, the length of the position detection threaded shaft 60 that enters the inside of the piston rod 54 decreases.

終至活塞40抵接於設在棒罩26之第一阻尼器38而到達行程末端(參照第6圖)。當然可藉由磁性感測器84來檢測出活塞40到達棒罩26側之行程末端。 Finally, the piston 40 comes into contact with the first damper 38 provided in the rod cover 26 and reaches the stroke end (see FIG. 6 ). Of course, the magnetic sensor 84 can detect the stroke end of the piston 40 reaching the rod cover 26 side.

藉由活塞桿54之伸出進行工件之夾持等工作之後,使未圖示之切換閥動作,從第二孔口18朝向第二壓力室90供給空氣,且第一壓力室88內之空氣從第一孔口16排出。藉此,活塞40係承受朝向端罩20之方向的推力。由於活塞40之繞著軸心的旋轉受到限制,因而會一面使位置檢測用螺紋軸60朝與上述相反之方向旋轉一面朝離開棒罩26之方向後退,與活塞40成為一體之活塞桿54係進入缸體12內。 After the work such as clamping the workpiece is performed by the extension of the piston rod 54, the switching valve (not shown) is actuated to supply air from the second port 18 to the second pressure chamber 90, and the air in the first pressure chamber 88 Discharge from the first orifice 16 . Thereby, the piston 40 receives the thrust in the direction toward the end shield 20 . Since the rotation of the piston 40 around the axis is restricted, the piston rod 54 integrated with the piston 40 is retracted in the direction away from the rod cover 26 while rotating the position detection screw shaft 60 in the opposite direction to the above. into the cylinder 12.

隨著活塞40之後退,位置檢測用螺紋軸60係朝與活塞40之前進時相反之方向旋轉,固定在位置檢測用螺紋軸60之端部側的磁鐵74亦與位置檢測用螺紋軸60朝相同之方向旋轉。並且,磁通係在與磁鐵74相向之一對霍爾元件存在的位置有所變化,據此檢測位置檢測用螺紋軸 60之旋轉位置。亦即,即時地檢測出活塞40之後退位置。此外,隨著活塞40之後退,進入活塞桿54之內部的位置檢測用螺紋軸60之長度會增大。 As the piston 40 retreats, the position detection screw shaft 60 rotates in the opposite direction to the forward movement of the piston 40 , and the magnet 74 fixed to the end of the position detection screw shaft 60 also faces the position detection screw shaft 60 . rotate in the same direction. Then, the magnetic flux system changes in the position where the pair of Hall elements is present opposite to the magnet 74, and the rotational position of the screw shaft 60 for position detection is detected accordingly. That is, the retracted position of the piston 40 is detected immediately. In addition, as the piston 40 retreats, the length of the position detection threaded shaft 60 that enters the inside of the piston rod 54 increases.

終至設在活塞40之第二阻尼器52抵接於端罩20而到達行程末端,回到初期位置。當然亦可藉由磁性感測器84來檢測出活塞40到達端罩20之行程末端。 Finally, the second damper 52 provided on the piston 40 abuts against the end cap 20 and reaches the end of the stroke, returning to the initial position. Of course, the magnetic sensor 84 can also be used to detect that the piston 40 reaches the end of the stroke of the end cap 20 .

依據本實施形態,將活塞40之直線運動變換為位置檢測用螺紋軸60的旋轉運動,且在位置檢測用螺紋軸60之端部側配置磁性感測器84,因此可將用來檢測活塞40之位置的磁性感測器84配置在從活塞40分離之部位。並且,可精細地檢測出活塞40之位置。再者,由於位置檢測用螺紋軸60係配置成可進入活塞桿54之內部,因此可使整體之構成小型化。 According to the present embodiment, the linear motion of the piston 40 is converted into the rotational motion of the position detection screw shaft 60, and the magnetic sensor 84 is disposed on the end of the position detection screw shaft 60, so that the piston 40 can be detected by the magnetic sensor 84. The magnetic sensor 84 of this position is arranged at a part separated from the piston 40 . Furthermore, the position of the piston 40 can be detected finely. Furthermore, since the screw shaft 60 for position detection is arrange|positioned so that it can enter into the inside of the piston rod 54, the whole structure can be reduced in size.

本實施形態中,在形成於活塞40之螺紋孔46的母螺紋與形成於位置檢測用螺紋軸60之螺紋部62的公螺紋之間並未中介有滾珠,但亦可使用中介有滾珠之滾珠螺紋軸。使用滾珠螺紋軸時,由於不容易產生自鎖,因此可縮小螺紋之導程角。藉此,可增大相對於活塞40的移動量之位置檢測用螺紋軸60的旋轉量之比率,而可容易精細地檢測活塞40之位置。 In this embodiment, balls are not interposed between the female thread formed in the threaded hole 46 of the piston 40 and the male thread formed in the threaded portion 62 of the threaded shaft 60 for position detection, but a ball interposed therebetween may be used. Threaded shaft. When using a ball screw shaft, the lead angle of the thread can be reduced because it is not easy to cause self-locking. Thereby, the ratio of the rotation amount of the threaded shaft 60 for position detection with respect to the movement amount of the piston 40 can be increased, and the position of the piston 40 can be easily and precisely detected.

本實施形態中,就檢測位置檢測用螺紋軸60之旋轉位置的手段而言,係使用磁鐵74及磁性感測器84,但亦可使用光學式感測器來取代。例如可構成為:在位置檢測用螺紋軸60之端部設置具有開縫之遮光板,且設置投光部及受光部而將遮光板夾持在其間。 In this embodiment, the magnet 74 and the magnetic sensor 84 are used as means for detecting the rotational position of the position detection screw shaft 60, but an optical sensor may be used instead. For example, a light-shielding plate having a slit may be provided at the end of the position detection screw shaft 60, and a light-emitting portion and a light-receiving portion may be provided to sandwich the light-shielding plate therebetween.

本發明之附檢測機構的流體壓力缸不限於上述實施形態,當然可在不脫離本發明之主旨的範圍內,採用各種之形態。 The fluid pressure cylinder with the detection mechanism of the present invention is not limited to the above-described embodiment, and of course various forms can be adopted within the scope of not departing from the gist of the present invention.

10‧‧‧流體壓力缸 10‧‧‧Fluid pressure cylinder

12‧‧‧缸體 12‧‧‧Cylinder block

14‧‧‧缸孔 14‧‧‧Cylinder bore

16‧‧‧第一孔口 16‧‧‧First port

18‧‧‧第二孔口 18‧‧‧Second port

20‧‧‧端罩 20‧‧‧End shield

22‧‧‧凸緣部 22‧‧‧Flange

24‧‧‧貫通孔 24‧‧‧Through hole

24a‧‧‧第一徑部 24a‧‧‧First Diameter

24b‧‧‧第二徑部 24b‧‧‧Second diameter

24c‧‧‧第三徑部 24c‧‧‧The third diameter

24d‧‧‧第四徑部 24d‧‧‧4th diameter

26‧‧‧棒罩 26‧‧‧Rod Cover

28‧‧‧卡止環 28‧‧‧Lock ring

30‧‧‧貫通孔 30‧‧‧Through hole

32‧‧‧棒襯墊 32‧‧‧Rod liners

34‧‧‧第一密封環 34‧‧‧First sealing ring

36‧‧‧凹部 36‧‧‧Recess

38‧‧‧第一阻尼器 38‧‧‧First damper

40‧‧‧活塞 40‧‧‧Piston

42‧‧‧本體部 42‧‧‧Main body

44‧‧‧連結部 44‧‧‧Connections

46‧‧‧螺紋孔 46‧‧‧Threaded hole

48‧‧‧活塞封件 48‧‧‧Piston seals

50‧‧‧凹部 50‧‧‧Recess

52‧‧‧第二阻尼器 52‧‧‧Second damper

54‧‧‧活塞桿 54‧‧‧Piston rod

56‧‧‧插座 56‧‧‧Socket

58‧‧‧第二密封環 58‧‧‧Second sealing ring

60‧‧‧位置檢測用螺紋軸 60‧‧‧Threaded shaft for position detection

62‧‧‧螺紋部 62‧‧‧Threaded part

64‧‧‧支撐部 64‧‧‧Support

64a‧‧‧大徑部 64a‧‧‧Large diameter

64b‧‧‧中徑部 64b‧‧‧Middle diameter part

64c‧‧‧小徑部 64c‧‧‧Small diameter

66‧‧‧第三密封環 66‧‧‧Third sealing ring

68‧‧‧軸承 68‧‧‧Bearing

70‧‧‧軸承按壓件 70‧‧‧Bearing Press

72‧‧‧鎖固螺帽 72‧‧‧Locking Nuts

74‧‧‧磁鐵 74‧‧‧Magnet

76‧‧‧磁鐵固持具 76‧‧‧Magnet holder

78‧‧‧基板 78‧‧‧Substrate

80‧‧‧基部構件 80‧‧‧Base member

82‧‧‧筒狀突出部 82‧‧‧cylindrical protrusion

84‧‧‧磁性感測器 84‧‧‧Magnetic sensor

86‧‧‧罩構件 86‧‧‧Cover components

88‧‧‧第一壓力室 88‧‧‧First pressure chamber

90‧‧‧第二壓力室 90‧‧‧Second pressure chamber

Claims (6)

一種附檢測機構的流體壓力缸,係將活塞配設成在缸體之缸孔內滑動自如者,設於前述活塞之中央的螺紋孔係螺合有位置檢測用螺紋軸,前述活塞係由前述缸體支撐成繞著軸心周圍之旋轉受到限制,前述位置檢測用螺紋軸係可繞著軸心旋轉,且由設在前述缸體之端部的端罩支撐成軸心方向之位移受到限制,並且,與從前述端罩朝外側延伸之前述位置檢測用螺紋軸的端部相向地配設有感測器,前述位置檢測用螺紋軸係具有:螺合於前述活塞之前述螺紋孔的螺紋部;及支撐在前述端罩之支撐部,前述位置檢測用螺紋軸之前述支撐部係由:與前述螺紋部相連之大徑部、與前述大徑部相連之中徑部、及與前述中徑部相連且構成前述位置檢測用螺紋軸之端部的小徑部所構成,前述位置檢測用螺紋軸係藉由設在前述端罩之軸承而支撐成可旋轉,且將前述軸承夾持在形成在前述大徑部與前述中徑部之間之段差部及裝設於前述中徑部之螺帽之間,藉以限制前述位置檢測用螺紋軸之軸心方向的位移,且前述活塞及前述缸孔之剖面形狀為多角形,藉此限制前述活塞之旋轉。 A fluid pressure cylinder with a detection mechanism is provided with a piston configured to slide freely in a cylinder hole of a cylinder body, a threaded hole provided in the center of the piston is screwed with a threaded shaft for position detection, and the piston is made of the The cylinder is supported so that its rotation around the axis is restricted, the position detection threaded shaft can rotate around the axis, and is supported by an end cover provided at the end of the cylinder so that the displacement in the direction of the axis is restricted. , and a sensor is arranged opposite to the end of the threaded shaft for position detection that extends outward from the end cover, and the threaded shaft system for position detection has a thread that is screwed into the threaded hole of the piston. part; and a support part supported on the end cap, the support part of the threaded shaft for position detection is composed of a large diameter part connected to the threaded part, a middle diameter part connected to the large diameter part, and a middle diameter part connected to the middle diameter part. The diameter portion is connected to a small diameter portion constituting the end portion of the position detection threaded shaft, and the position detection threaded shaft is rotatably supported by a bearing provided in the end cover, and the bearing is clamped in the A step portion is formed between the large-diameter portion and the middle-diameter portion and a nut installed on the middle-diameter portion, so as to limit the displacement in the axial direction of the threaded shaft for position detection, and the piston and the The cross-sectional shape of the cylinder hole is polygonal, thereby restricting the rotation of the aforementioned piston. 如申請專利範圍第1項所述之附檢測機構的流體壓力缸,其中,與前述活塞連結之活塞桿係具有中空構造,前述位置檢測用螺紋軸係進入前述活塞桿之內部。 The fluid pressure cylinder with detection mechanism according to claim 1, wherein the piston rod connected to the piston has a hollow structure, and the position detection threaded shaft enters the interior of the piston rod. 如申請專利範圍第1項所述之附檢測機構的流體壓力缸,其中,前述位置檢測用螺紋軸之端部安裝有磁鐵,且與前述磁鐵相向地設有磁性感測器。 The fluid pressure cylinder with detection mechanism according to claim 1, wherein a magnet is attached to the end of the threaded shaft for position detection, and a magnetic sensor is provided facing the magnet. 如申請專利範圍第3項所述之附檢測機構的流體壓力缸,係設有覆蓋前述磁性感測器與前述磁鐵之罩構件。 The fluid pressure cylinder with detection mechanism as described in claim 3 of the claimed scope is provided with a cover member covering the magnetic sensor and the magnet. 如申請專利範圍第1項所述之附檢測機構的流體壓力缸,其中,在前述螺紋孔與前述位置檢測用螺紋軸之間中介有滾珠。 The fluid pressure cylinder with a detection mechanism according to claim 1, wherein a ball is interposed between the threaded hole and the threaded shaft for position detection. 如申請專利範圍第1項所述之附檢測機構的流體壓力缸,其中,前述感測器係光學式感測器。 The fluid pressure cylinder with detection mechanism according to claim 1, wherein the sensor is an optical sensor.
TW108108237A 2018-03-12 2019-03-12 Fluid pressure cylinder with detection mechanism TWI771572B (en)

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