TWI766276B - Combination of furnace surface block and furnace surface base of double vacuum module for crystal welding machine - Google Patents

Abstract

This creation is a combination of a furnace block and a furnace base of a dual vacuum module for a crystal welding machine, including: a furnace block with a receiving surface for receiving a substrate on the crystal welding machine, and The hearth block includes: a plurality of first perforation groups whose openings are located in a middle area of the receiving surface of the hearth block; and two second perforation groups whose openings are located in two peripheral areas of the receiving surface of the hearth block. The first perforated groups and the two second perforated groups are not connected and connected; and a plurality of first longitudinal channels are used to communicate with the first perforated groups respectively; and the two second longitudinal channels are used to communicate with each other. The two second perforation groups of the two, the first longitudinal channels and the two second longitudinal channels are not connected and conducted; the two lateral channels are connected and conducted with the two second longitudinal channels, and the There is a height difference between the two lateral passages and the two second longitudinal passages; wherein both ends of the first longitudinal passage, the second longitudinal passage, and the transverse passage are closed ends; and a furnace surface base for receiving and fix the hearth block.

Description

Combination of cooktop block and cooktop base for dual vacuum modules of crystal welding machine

This creation is about a fixed substrate device using vacuum adsorption; more specifically, it refers to a combination of a furnace block and a furnace surface base for a double vacuum module of a soldering machine.

In the semiconductor package structure, a substrate unit (Substrate) is usually at the bottom. In the manufacturing process, after stacking chips, wire bonding and gluing, etc. on a substrate panel, the substrate is cut to form a plurality of semiconductor package structures. Therefore, the first priority of the process is to fix the substrate flatly and stably on a machine. In addition, it is often necessary to use a conveying device to move the substrate during the manufacturing process, so the substrate also needs to be flatly and stably fixed on the conveying device. Traditionally, methods and devices utilizing vacuum adsorption are the most common ways to fix substrates.

Fixing methods such as baffles, which are usually used to attach and fix semiconductor substrates or printed circuit boards (PCBs), include screws, magnets, vacuum adsorption and magnets.

The method of fixing with screws is the most commonly used method for fixing a block to which a substrate for semiconductor manufacturing or a printed circuit board (PCB) is attached. 2 or more positions are connected and fixed to prevent the vacuum block body Movement occurs.

The method of using a magnet refers to a method of attaching a semiconductor substrate or a printed circuit board (PCB) to a fixed support by attaching a magnet to the lower side of the block. At this time, the adhesion force of the magnet can be adjusted by adjusting the magnetic strength of the magnet.

When using the vacuum adsorption method, a vacuum plate is equipped on the upper side of the support body of the vacuum block, and a vacuum is formed between the plate surface of the vacuum plate and the lower side of the vacuum block, so as to achieve the adhesion effect. Moreover, in recent years, the design of dynamic random access memory tends to be thinner, which is prone to warping. Therefore, in the vacuum adsorption method, a large adsorption capacity is required to facilitate adsorption.

Therefore, to sum up, according to different printed circuit boards (PCBs), ie different printed circuit board (PCB) sizes and internal wafer layouts, it is also necessary to replace and use different said vacuum blocks in order to be able to produce smoothly, and With the dynamic random access memory design, it tends to be thinner, which is prone to warpage. Therefore, in the vacuum adsorption method, it is necessary to design a larger adsorption capacity on the cooktop block.

The main purpose of this creation is to provide a combination of a furnace top block and a furnace top base for a dual vacuum module of a soldering machine. When the dynamic random access memory is designed to be thin, it is easy to produce warpage. Therefore, In the vacuum adsorption method, a larger adsorption capacity can be designed on the furnace block, and when applied to the soldering machine, it can reduce the number of adsorption times required for each workpiece, thereby increasing the production capacity and saving working time, thus improving the soldering machine. work efficiency.

In order to achieve the purpose of the above disclosure, this creation system provides a combination of a stove top block and a stove top base for a dual vacuum module of a crystal welding machine, including: a stove top block with a receiving surface for receiving the welding crystal. A base plate on the machine, and the cooktop block includes: a plurality of first perforated groups, the openings of which are located in a middle area of the receiving surface of the cooktop block; and two second perforated groups, the openings of which are located between the cooktop blocks. The two peripheral areas of the receiving surface, the first perforation groups and the two second perforation groups are not connected Conduction; and a plurality of first longitudinal channels for communicating with the first perforation groups respectively; two second longitudinal channels for respectively communicating with the two second perforation groups, the first longitudinal channels and The two second longitudinal channels are not connected and conducted; the two lateral channels are connected and conducted with the two second longitudinal channels, and there is a height difference between the two lateral channels and the two second longitudinal channels ; wherein both ends of the first longitudinal channel, the second longitudinal channel and the transverse channel are closed ends; The pipes are used to conduct the first longitudinal passages and the two second longitudinal passages respectively, and are respectively connected to the first vacuum module and the second vacuum module of the soldering machine, so as to independently generate a vacuum to adsorb the substrate. One area and two second areas.

The combination of the furnace surface block and the furnace surface base for the dual vacuum module of the crystal welding machine of the present invention, wherein the first perforation group and the second perforation group are arrayed in a matrix.

The combination of the furnace surface block and the furnace surface base for the dual vacuum module of the soldering machine of this invention, wherein the first area of the substrate is opposite to the middle area of the furnace surface block, so that the first area of the substrate is opposite to the middle area of the furnace surface block. The area is adsorbed on the middle area of the cooktop block, and the two second areas of the base plate are opposite to the two peripheral areas of the cooktop block, so that the two second areas of the substrate are adsorbed on the two second areas of the cooktop block. a peripheral area.

The combination of the furnace top block and the furnace top base for the dual vacuum module of the soldering machine of the present invention, wherein the second perforation group has at least one row of perforations connected to the second longitudinal channel, and the perforations are in the shape of round holes or square hole.

The combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal welding machine of the present invention, wherein the second perforation group has two rows of perforations to connect the second longitudinal channel, and the two rows of perforations are aligned with each other or with each other staggered.

This creation provides a combination of a furnace surface block and a furnace surface base for a dual vacuum module of a crystal welding machine, including: a furnace surface block, which has a receiving surface for receiving a substrate on the crystal welding machine, And the cooktop block includes: a plurality of first perforation groups, the openings of which are located at the support of the cooktop block. a middle area of the junction surface; two second perforation groups, the openings of which are located in the two first peripheral areas of the receiving surface of the furnace block, and the first perforation groups and the two second perforation groups are not connected and conducted; Two third perforation groups, the openings of which are located in the two second peripheral regions of the middle region of the receiving surface of the furnace block, wherein the two first peripheral regions and the two second peripheral regions surround the middle region; and a plurality of A first longitudinal channel is used to connect the first perforation groups respectively; two second longitudinal channels are used to respectively communicate with the two second perforation groups, the first longitudinal channels and the two second perforation groups. The two longitudinal channels are not connected and conducted; the two lateral channels are used to communicate with the two third perforation groups respectively, wherein the two lateral channels and the two second longitudinal channels are connected and conducted, and the two The transverse channel and the two second longitudinal channels are located at the same level; both ends of the first longitudinal channel, the second longitudinal channel and the transverse channel are closed ends; and a furnace surface base is used to receive and fix the furnace The noodle block has a first pipeline and a second pipeline respectively for conducting the first longitudinal passages and the two second longitudinal passages respectively, and respectively connecting the first vacuum module and the second vacuum unit of the soldering machine. The vacuum module is used to independently generate vacuum to adsorb the first area and the two second areas of the substrate.

The combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal welding machine of the present invention, wherein the first perforation group, the second perforation group and the third perforation group are arrayed in a matrix.

The combination of the furnace surface block and the furnace surface base for the dual vacuum module of the soldering machine of this invention, wherein the first area of the substrate is opposite to the middle area of the furnace surface block, so that the first area of the substrate is opposite to the middle area of the furnace surface block. The area is adsorbed on the middle area of the furnace block, and the two second areas of the substrate are opposite to the two first and second peripheral areas of the furnace block, so that the two second areas of the substrate are attracted to the The two first and second peripheral regions of the cooktop block.

The combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal welding machine of the present invention, wherein the second perforation group has at least one row of perforations connected to the second longitudinal channel.

The creation of the furnace surface block and the furnace surface base for the dual vacuum module of the soldering machine combination, wherein the second perforation group has two rows of perforations connecting the second longitudinal channel.

The dual-vacuum modules used in this creation for the soldering machine to adsorb the furnace block and the furnace surface base, when the DRAM design is thin, it is easy to produce warpage, so in the vacuum adsorption method, it can be The furnace block is designed with a large adsorption capacity, and when it is used in a crystal welding machine, it can reduce the number of adsorption times required for each workpiece, thereby increasing the production capacity, saving working time, and thus improving the working efficiency of the crystal welding machine.

In order to have a more detailed understanding of the purpose, function, features and structure of this creation, preferred embodiments are given and described in conjunction with the drawings as follows.

10: Stovetop Blocks

20: Cooktop Blocks

30: Cooktop base

32: First Pipeline

34: Second Pipe

100: The first piercing group

200: Second Piercing Group

300: Third Piercing Group

110: The first longitudinal passage

210: Second longitudinal passage

310: Lateral channel

410: Lateral channel

120: Substrate

150: The first area

180: Middle area

182: Groove

250: Second area

260: Peripheral area

262: Groove

270: First Peripheral Area

280: Second Peripheral Area

Figure 1: A schematic diagram of a furnace block for a dual vacuum module of a crystal welding machine in one of the creative embodiments;

Figure 1a: a schematic diagram of a furnace block of another dual vacuum module used for a crystal welding machine in this creative embodiment;

Fig. 1b: a schematic diagram of a furnace block of another dual vacuum module used in a crystal welding machine in this creative embodiment;

Figure 2: Schematic diagram of the furnace block for the dual vacuum module of the crystal welding machine in the second embodiment of this creation;

Figure 3: A schematic diagram of a furnace surface base for a dual vacuum module of a crystal welding machine in one of the creative embodiments;

Figure 4: A schematic diagram of the combination of the furnace block and the furnace surface base for the dual vacuum module of the crystal welding machine in one of the creative embodiments.

Fig. 1 is a schematic diagram of a furnace surface block of a dual vacuum module used for a crystal welding machine according to one creative embodiment, Fig. 2 is a schematic diagram of a furnace surface block of a dual vacuum module used for a crystal welding machine according to the second creative embodiment, FIG. 3 is a schematic diagram of a furnace surface base of a dual vacuum module for a crystal welding machine according to one creative embodiment, and FIG. 4 is a furnace surface block and a furnace for a dual vacuum module for a crystal welding machine according to one creative embodiment. Schematic diagram of the combination of the surface base. Please refer to FIG. 1 , FIG. 3 and FIG. 4 , a combination of a furnace surface block 10 and a furnace surface base 30 for a dual vacuum module of a crystal welding machine, comprising: a furnace surface block 10 having a furnace surface block 10 . The receiving surface is used to receive a substrate 120 on the soldering machine (not shown in the figure), and the furnace block 10 includes: a plurality of first perforation groups 100 whose openings are located at one of the receiving surfaces of the furnace block 10 The middle area 180; and the two second perforation groups 200, the openings of which are located in the two peripheral areas 260 of the receiving surface of the furnace block 10, the first perforation groups 100 and the two second perforation groups 200 are not connected and conducted and a plurality of first longitudinal passages 110 for communicating with the first perforation groups 100 respectively; two second longitudinal passages 210 for communicating with the two second perforation groups 200, the first The longitudinal channel 110 and the two second longitudinal channels 210 are not connected and conducted; the two lateral channels 310 are connected and conducted with the two second longitudinal channels 210, and the two lateral channels 310 are connected with the two second longitudinal channels 310. There is a height difference between the longitudinal channels 210; wherein both ends of the first longitudinal channel 110, the second longitudinal channel 210 and the transverse channel 310 are closed ends; and a furnace surface base 30 is used for receiving and fixing (for example: The cooktop block 10 can be fixed by screws, and has a first pipe 32 and a second pipe 34 respectively for conducting the first longitudinal passages 110 and the two second longitudinal passages 210 respectively, and connecting the welding The first vacuum module and the second vacuum module of the crystal machine independently generate vacuum to adsorb the first region 150 and the two second regions 250 of the substrate 120 .

Please refer to FIG. 1 , the first through hole group 100 and the second through hole group 200 are arrayed in a matrix.

Please refer to FIG. 1 and FIG. 4 , the first region 150 of the substrate 120 is opposite to the middle region 180 of the furnace block 10 , so that the first region 150 of the substrate 120 is adsorbed to the middle region of the furnace block 10 180, the two second regions 250 of the substrate 120 are relative to the two peripheral regions 260 of the furnace block 10, so that the two second regions 250 of the substrate 120 are adsorbed to the two outer regions of the furnace block 10 Area 260.

Please refer to FIG. 1 , the second perforation group 200 has at least one row of perforations connected to the second longitudinal channel 210 . For example, the second perforation group 200 has two rows of perforations connected to the second longitudinal channel 210 , and the two rows of perforations are aligned with each other, so as to increase the suction force area of the cooktop block to the two second regions of the substrate. The perforations can be round holes or square holes.

Please refer to FIG. 1a, the second perforation group 200 has two rows of perforations connected to the second longitudinal channel 210, and the two rows of perforations are staggered to increase the uniform adsorption force of the cooktop block to the two second regions of the substrate sex. The perforations can be round holes or square holes.

Furthermore, please refer to FIG. 1b, the middle region 180 and the two peripheral regions 260 of the cooktop block 10 may be provided with a plurality of annular grooves 182, 262, and the positions of the plurality of annular grooves 182, 262 are respectively The positions of the first perforation group 100 and the second perforation group 200 overlap, so as to increase the area and uniformity of the adsorption force of the furnace block to the substrate. The depths of the plurality of annular grooves 182 and 262 may be between 0.1 and 2 mm.

Please refer to Figure 2, Figure 3 and Figure 4, a combination of a furnace surface block 20 and a furnace surface base 30 for a dual vacuum module of a crystal welding machine, comprising: a furnace surface block 20 with a receiving surface , which is used to receive a substrate 120 on the soldering machine (not shown), and the furnace block 20 includes: a plurality of first perforation groups 100 whose openings are located in a middle area of the receiving surface of the furnace block 20 180; two second perforation groups 200, the openings of which are located in the two first peripheral regions 270 of the bearing surface of the furnace block 20, the first perforation groups 100 and the two second perforation groups 200 are not connected and conducted; Two third perforation groups 300, the openings of which are located in the two second peripheral regions 280 of the middle region 180 of the receiving surface of the cooktop block 20, wherein the two first peripheral regions 270 and the two second peripheral regions 280 surround the middle area 180; and a plurality of first longitudinal passages 110 for communicating with the first perforation groups 100 respectively; two second longitudinal passages 210 for communicating with the two second perforation groups 200, respectively, The first longitudinal channels 110 and the two second longitudinal channels 210 are not connected and conducted; the two transverse channels 410 are used to communicate with the two third perforation groups 300 respectively, wherein the two transverse channels 410 The two second longitudinal channels 210 are connected and conducted, and the two transverse channels 410 and the two second longitudinal channels 210 are located at the same level; wherein the first longitudinal channel 110, the second longitudinal channel 210 and the transverse channel Both ends of 410 are closed ends; and a cooktop base 30 is used to receive and fix (for example: can be fixed with screws) the cooktop block 20, and has a first pipe 32 and a second pipe 34 respectively for use Conduct the first longitudinal channels 110, the two A second longitudinal channel 210 is connected to the first vacuum module and the second vacuum module of the soldering machine respectively, so as to independently generate vacuum to adsorb the first region 150 and the two second regions 250 of the substrate 120 .

Please refer to FIG. 2 , the first through hole group 100 , the second through hole group 200 and the third through hole group 300 are arrayed in a matrix.

Please refer to FIG. 2, the first area 150 of the substrate 120 is opposite to the middle area 180 of the furnace block 20, so that the first area 150 of the substrate 120 is adsorbed to the middle area 180 of the furnace block. The two second regions 250 of the base plate 120 are opposite to the two first and second peripheral regions 270 , 280 of the cooktop block 20 , so that the two second regions 250 of the base plate 120 are adsorbed on the cooktop block 20 . Two first and second peripheral regions 270, 280.

Please refer to FIG. 2 , the second perforation group 200 has a row of perforations connected to the second longitudinal channel 210 .

Please refer to FIG. 2 , the second perforation group 200 has two rows of perforations connected to the second longitudinal channel 210 .

To sum up, the dual vacuum modules used in this creation for the soldering machine to adsorb the furnace block and the furnace surface base, when the dynamic random access memory is designed to be thin, it is easy to produce warpage, so the vacuum adsorption method is used. When it is used, a larger adsorption capacity can be designed on the furnace block, and when applied to a crystal welding machine, it can reduce the number of adsorption times required for each workpiece, thereby increasing the production capacity, saving working time, and thus improving the working efficiency of the crystal welding machine.

Therefore, this creation has excellent progress and practicability among similar products. At the same time, after checking the domestic and foreign technical documents and documents, it is true that no identical or similar structure or technology exists before the application in this case. Therefore, This case should have met the patent requirements of "patentability", "suitability for industrial utilization" and "progressiveness", and the application should be filed in accordance with the law.

However, the above are only the preferred embodiments of this creation, and any equivalent structural changes made by applying the description of this creation and the scope of the patent application should be included in this document. Creation within the scope of the patent application.

10: Stovetop Blocks

100: The first piercing group

200: Second Piercing Group

110: The first longitudinal passage

210: Second longitudinal passage

310: Lateral channel

180: Middle area

260: Peripheral area

Claims (10)

A combination of a furnace surface block and a furnace surface base for a double vacuum module of a crystal welding machine, comprising: A cooktop block has a receiving surface for receiving a substrate on the soldering machine, and the cooktop block includes: a plurality of first perforation groups, the openings of which are located in a middle area of the receiving surface of the cooktop block; and two second perforation groups, the openings of which are located in two peripheral regions of the receiving surface of the cooktop block, the first perforation groups and the two second perforation groups are not connected and conducted; and a plurality of first longitudinal passages for communicating with the first perforation groups respectively; two second longitudinal passages for communicating with the two second perforation groups respectively, the first longitudinal passages and the two second longitudinal passages are not connected and conducted; two transverse channels, which are connected and conducted with the two second longitudinal channels, and there is a height difference between the two transverse channels and the two second longitudinal channels; Wherein both ends of the first longitudinal channel, the second longitudinal channel and the transverse channel are closed ends; and A cooktop base is used to receive and fix the cooktop block, and has a first pipe and A second pipe is used to conduct the first longitudinal passages and the two second longitudinal passages respectively, and is respectively connected to the first vacuum module and the second vacuum module of the soldering machine, so as to independently generate vacuum and adsorb the A first area and two second areas of the substrate. The combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal welding machine according to the first item of the patent application scope, wherein the first perforation group and the second perforation group are arrayed in a matrix; And, a plurality of annular grooves are arranged in the middle region and two peripheral regions of the furnace block, and the positions of the plurality of annular grooves overlap with the positions of the first perforation group and the second perforation group respectively. The furnace block and the furnace surface for the dual vacuum module of the soldering machine as described in the first item of the patent application scope The combination of the base, wherein the first area of the base plate is relative to the middle area of the furnace block, so that the first area of the base plate is adsorbed to the middle area of the furnace block, and the two second areas of the base plate are The two second regions of the base plate are adsorbed on the two peripheral regions of the furnace top block relative to the two peripheral regions of the furnace top block. The combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal welding machine as described in the first item of the patent application scope, wherein the second perforated group has at least one row of perforated holes connected to the second longitudinal channel, The perforations are round holes or square holes. The combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal welding machine as described in the first item of the patent application scope, wherein the second perforation group has two rows of perforations connected to the second longitudinal channel, the The two rows of perforations are aligned with each other or staggered with each other. A combination of a furnace surface block and a furnace surface base for a double vacuum module of a crystal welding machine, comprising: A cooktop block has a receiving surface for receiving a substrate on the soldering machine, and the cooktop block includes: A plurality of first perforation groups, the openings of which are located in a middle area of the receiving surface of the cooktop block; two second perforation groups, the openings of which are located in the two first peripheral regions of the receiving surface of the cooktop block, the first perforation groups and the two second perforation groups are not connected and conducted; two third perforation groups, the openings of which are located in two second peripheral regions of the middle region of the receiving surface of the furnace block, wherein the two first peripheral regions and the two second peripheral regions surround the middle region; and a plurality of first longitudinal passages for communicating with the first perforation groups respectively; two second longitudinal channels for communicating with the two second perforation groups respectively, the first longitudinal channels and the two second longitudinal channels are not connected and conducted; Two transverse channels are used to communicate with the two third perforation groups respectively, wherein the two transverse channels and the two second longitudinal channels are connected and conducted, and the two transverse channels and the two second Longitudinal passages are at the same level; Wherein, both ends of the first longitudinal channel, the second longitudinal channel and the transverse channel are closed ends; and A cooktop base is used to receive and fix the cooktop block, and has a first pipe and a second pipe respectively for conducting the first longitudinal passages, the two second longitudinal passages, and connecting the The first vacuum module and the second vacuum module of the soldering machine independently generate vacuum to adsorb the first area and the two second areas of the substrate. The combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal welding machine as described in item 6 of the patent application scope, wherein the first perforation group, the second perforation group and the third perforation group The arrays of systems are arranged in a matrix. The combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal soldering machine as described in item 6 of the patent application scope, wherein the first area of the base plate is opposite to the middle area of the furnace top block, So that the first area of the substrate is adsorbed to the middle area of the furnace block, the two second areas of the substrate are opposite to the two first and second peripheral areas of the furnace block, so that the two A second area is adsorbed on the two first and second peripheral areas of the cooktop block. The combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal welding machine as described in claim 6, wherein the second perforated group has at least one row of perforated holes connected to the second longitudinal channel. According to the combination of the furnace top block and the furnace top base for the dual vacuum module of the crystal welding machine as described in claim 6, the second perforation group has two rows of perforations to connect the second longitudinal channel.

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