TWI764108B - Waveguide of microwave heating device and microwave heating device - Google Patents

Abstract

The invention relates to a microwave heating device, which comprises a waveguide, two microwave emission modules and a transport module; the waveguide forms a traveling wave path and has at least one pair of transport openings and at least one pair of waveguide plates; The pair of openings has two conveying openings, which are respectively formed on the opposite two side walls of the waveguide along a conveying direction; the pair of waveguides is located in the waveguide and has two waveguides extending along the traveling wave path, and the two waveguides extend along the traveling wave path. are respectively arranged on the top wall and the bottom wall of the waveguide; two microwave emitting modules are respectively arranged on opposite ends of the waveguide; the conveying module runs through the pair of conveying openings along the conveying direction; For the wave plate pair, the present invention can further improve the uniformity of the heating of the high microwave absorbing material in the waveguide, and can heat the object to be heated with a high unit price.

Description

Waveguide of microwave heating device and microwave heating device

The present invention relates to a device for heating by microwaves, in particular to a waveguide and a microwave heating device of a microwave heating device capable of uniformly heating both high microwave absorbing materials and low microwave absorbing materials.

The microwave heating devices in the prior art can be mainly classified into the following three types:

First, the closed resonant cavity, the principle of which is to move or rotate the object to be heated in the closed resonant cavity to reduce the heating non-uniformity caused by the microwave hot and cold spots in the resonant cavity to the object to be heated.

Second, the open resonant cavity, the principle of which is similar to the closed resonant cavity, is to pass the heated material through the standing wave hot spot in the cavity in a continuous flow mode to ionize the object to be heated. It is mainly used in the generation of light sources (such as sulfur lamp) or disposal.

Third, the traveling wave heater, the principle of which is to allow the material to be heated to be heated by traveling waves along the microwave transmission path to avoid the heating unevenness caused by the hot spot and cold spot effects of the standing wave.

Among them, the closed resonant cavity and the open resonant cavity use standing waves to heat the object to be heated. However, the standing wave will form obvious hot spots and cold spots in the space, which cannot uniformly heat the object to be heated. Therefore, in practice, only It can be used in low unit price markets, such as wood dehydration or tobacco drying.

Although the traveling wave heater does not form obvious hot and cold spots, when the object to be heated is a low microwave absorbing material, the traveling wave heater can uniformly heat the object to be heated; however, when the object to be heated is heated When the material is a high microwave absorbing material, the microwave energy will be quickly absorbed by the object to be heated that is closer to the heating source, so that the object to be heated that is far away from the heating source cannot be fully heated, resulting in the object to be heated cannot be heated evenly.

Therefore, the microwave heating device in the prior art needs to be improved.

In view of the aforementioned shortcomings and deficiencies of the prior art, the present invention provides a waveguide for a microwave heating device capable of uniformly heating high microwave absorbing materials and a microwave heating device with the waveguide.

In order to achieve the above-mentioned purpose of the invention, the technical means adopted in the present invention is to design a microwave heating device, which includes: a waveguide, which forms a traveling wave path, and has: at least one heating section, and the at least one heating section has: a front opening wall; a rear opening wall, which is spaced from the front opening wall along a conveying direction; a top wall, which connects the front opening wall and the rear opening wall; a bottom wall, which connects the front opening wall and the rear opening wall The rear opening wall is disposed opposite to the top wall; at least one pair of conveying openings has two conveying openings, and the two conveying openings are respectively formed on the front opening wall and the rear opening wall of the at least one heating section; at least one guide A wave plate pair, which is arranged in the at least one heating section, and the position of the at least one wave guide plate on the traveling wave path corresponds to the position of the at least one delivery opening on the traveling wave path; the at least one wave guide plate pair includes: two wave guide plates, which are respectively connected to the top wall and the bottom wall of the at least one heating section, and extend along the traveling wave path; the two wave guide plates are made of dielectric materials; Two microwave emitting modules are respectively disposed at opposite ends of the waveguide along the traveling wave path; and a transport module penetrates the at least one pair of transport openings of the waveguide along the transport direction.

The advantages of the present invention are as follows:

First, the object to be heated is transported by the conveying module through the wave guide and heated by the microwave emitted by the microwave emission module in the wave guide. module to further improve the uniformity of the heating of the high microwave absorbing material in the waveguide.

Second, by further arranging a pair of waveguide plates made of dielectric material in the waveguide, the present invention can process materials with strong microwave absorption properties and objects to be heated with metal objects, thereby improving the performance of the present invention. The range of materials to be heated, and thus capable of processing high unit price heating objects that cannot be processed by conventional microwave heating devices, such as wet circuit boards, various electronic products containing metal components, semiconductor wafers containing metal, solar wafers containing metal wires, and Wet clothing for metal fittings, thereby increasing the production value of the present invention.

In order to achieve the above purpose of the invention, the present invention further provides a waveguide of a microwave heating device, which comprises: at least one heating section, the at least one heating section has: a front opening wall; a rear opening wall, which is connected with the front opening Walls are arranged at intervals along the conveying direction; a top wall, which connects the front opening wall and the rear opening wall; a bottom wall, which connects the front opening wall and the rear opening wall, and is arranged relative to the top wall; at least one conveying A pair of openings, which has two elongated conveying openings extending along a traveling wave path, the two conveying openings are respectively formed on the front opening wall and the rear opening wall of the at least one heating section; at least one wave guide pair, which is provided with In the waveguide, the position of the at least one waveguide in the longitudinal direction of the waveguide corresponds to the position of the at least one delivery opening in the longitudinal direction of the waveguide; the at least one pair of waveguides includes: Two wave guide plates are respectively connected to the top wall and the bottom wall of the at least one heating section and extend along the traveling wave path; the two wave guide plates are made of dielectric materials.

Further, in the microwave heating device, each of the delivery openings of the waveguide has a top peripheral edge and a bottom peripheral edge, and the distance between the top peripheral edge and the bottom peripheral edge is defined as the opening of the delivery opening width; the opening widths at opposite ends of each of the conveying openings along the traveling wave path are reduced.

Further, in the microwave heating device described above, each of the delivery openings of the waveguide has a center line, and the top side periphery and the bottom side periphery of each of the delivery openings are respectively formed on two sides of the center line. The top side perimeter of each of the delivery openings has: a top body segment extending along the traveling wave path; two first upper straight segments located on opposite sides of the top body segment along the traveling wave path respectively; The bottom peripheral edge of each of the conveying openings has: a bottom main body section, which extends along the traveling wave path; two first lower straight sections, which are respectively located on opposite sides of the bottom main body section along the traveling wave path; wherein, The first upper straight line segment and the first lower straight line segment at either end of each of the opposite ends of the traveling wave path respectively extend toward the center line, and the first upper straight line segment and the first lower straight line segment connected to the ends.

Further, in the microwave heating device, a second upper straight line segment is further formed on the top side periphery of each of the conveying openings at opposite ends of the conveying opening, and the second upper straight line segments are located in the corresponding Between the first upper straight section and the top main body section; the bottom side periphery of each conveying opening is further formed with a second lower straight section at opposite ends of the conveying opening, and the second lower straight section is located in the corresponding Between the first lower straight segment and the bottom body segment; wherein, the included angle between the first upper straight segment and the midline is greater than the included angle between the extension line of the second upper straight segment and the midline, and the first lower straight segment The included angle with the center line is greater than the included angle between the extension line of the second lower straight segment and the center line.

Further, in the microwave heating device described above, each of the delivery openings of the waveguide has a center line, and the top side periphery and the bottom side periphery of each of the delivery openings are respectively formed on the center line. two sides; the top side perimeter of each of the delivery openings has: a top body segment along the traveling wave path extending; two first upper arc line segments, which are respectively located on opposite sides of the top body segment along the traveling wave path; the bottom side periphery of each of the conveying openings has: a bottom body segment extending along the traveling wave path ; Two first lower arc segments, which are respectively located on opposite sides of the bottom body segment along the traveling wave path; wherein, the first upper arc segment at either end of each of the delivery openings along the opposite ends of the traveling wave path and the The first lower arc line segments respectively extend toward the center line, and the first upper arc line segments are connected with the ends of the first lower arc line segments.

Further, in the microwave heating device described above, each of the delivery openings of the waveguide has a center line, and the top side periphery and the bottom side periphery of each of the delivery openings are respectively formed on the center line. two sides; the top side periphery of each of the conveying openings has: a top main body section extending along the traveling wave path; two upper stepped sections, which are respectively located on opposite sides of the top main body section along the traveling wave path; each of the The bottom peripheral edge of the conveying opening has: a bottom main body section, which is arranged relative to the top main body section; two lower stepped sections, which are respectively located on opposite sides of the bottom main body section along the traveling wave path; wherein, each of the conveying openings The upper stepped section and the lower stepped section along either end of opposite ends of the traveling wave path extend toward the center line respectively, and the upper stepped section and the end of the lower stepped section are connected.

Further, in the microwave heating device, the thicknesses of the plates at opposite ends of each of the wave guide plates of the at least one wave guide plate pair are reduced.

Further, in the microwave heating device, one side of each wave guide plate connected to the wave guide tube has an abutting plane, and the abutting plane extends along the traveling wave path; the other side of the wave guide plate It has: a main body surface, which extends along the traveling wave path, and the length of the main body surface on the traveling wave path is less than the length of the abutting plane on the traveling wave path; two first inclined surfaces, which are respectively located along the main body surface. On opposite sides of the traveling wave path, the two first inclined surfaces extend from the opposite sides of the main body surface to the abutting plane respectively, so as to form two opposite end edges of the wave guide along the traveling wave path.

Further, in the microwave heating device, each of the wave guide plates further has two second inclined surfaces, and each of the second inclined surfaces is located between one of the first inclined surfaces and the main body surface; Among them, the inclination degree of the second inclined surface of each wave guide plate relative to the abutting plane is smaller than the inclination degree of the first inclined surface relative to the abutting plane.

Further, in the microwave heating device, one side of each wave guide plate connected to the wave guide tube has an abutting plane, and the abutting plane extends along the traveling wave path; the other side of the wave guide plate It has: a main body surface, which extends along the traveling wave path, and the length of the main body surface along the traveling wave path is less than the length of the abutting plane along the traveling wave path; two arc surfaces, which are respectively located on the main body surface along the traveling wave path On opposite sides of the traveling wave path, the two arc surfaces respectively extend from the opposite sides of the main body surface to the abutting plane to form opposite end edges of the wave guide plate along the traveling wave path.

Further, in the microwave heating device, one side of each wave guide plate connected to the wave guide tube has an abutting plane, and the abutting plane extends along the traveling wave path; the other side of the wave guide plate It has: a main body surface, which extends along the traveling wave path, and the length of the main body surface on the traveling wave path is less than the length of the abutting plane on the traveling wave path; two stepped surfaces, which are respectively located on the main body surface along the traveling wave path On opposite sides of the traveling wave path, the two stepped surfaces respectively extend from the opposite sides of the main body surface to the abutting plane to form opposite end edges of the wave guide plate along the traveling wave path.

Further, in the microwave heating device, the microwave heating device further has an air extraction module, which communicates with the inner space of the waveguide; the outer side of the air extraction module is covered with a heating layer.

Further, in the microwave heating device, the air extraction module has a water collecting tank.

Further, in the microwave heating device, the microwave heating device further has at least one microwave isolation module, which has: a base, which is connected to the waveguide and forms a channel, and the channel surrounds the transport module outside the group, and communicated with one of the delivery openings of the waveguide; a plurality of microwave suppressing parts, which pass through the outer side of the base body; each of the microwave suppressing parts is a tube body, and the microwave Two ends of the restraining piece are respectively a closed end and an open end, the open end protrudes out of the base, and the closed end is located in the channel.

Further, in the microwave heating device, the direction of the microwave electric field between the two wave guide plates of the at least one wave guide plate pair is parallel to the conveying direction.

Further, in the waveguide of the microwave heating device, each of the delivery openings of the waveguide has a top side periphery and a bottom side periphery, and the distance between the top side periphery and the bottom side periphery is defined as the The opening width of the conveying opening; the opening widths of the opposite ends of each conveying opening along the traveling wave path are reduced.

Further, in the waveguide of the microwave heating device, each of the delivery openings of the waveguide has a center line, and the top and bottom peripheries of the delivery openings are respectively formed on the Both sides of the center line; the top side periphery of each of the conveying openings has: a top body section, which extends along the traveling wave path; two first upper straight sections, which are respectively located at the top body section along the traveling wave path. Opposite two sides; the bottom peripheral edge of each of the conveying openings has: a bottom main body segment, which extends along the traveling wave path; side; wherein, the first upper straight section and the first lower straight section of each of the conveying openings along either end of the opposite ends of the traveling wave path extend toward the midline, respectively, and the first upper straight section and the first straight section extend toward the centerline. Connect the ends of the next straight line segments.

Further, in the waveguide of the microwave heating device, a second upper straight section is further formed on the top side periphery of each of the conveying openings at opposite ends of the conveying opening, and the second upper straight section located between the corresponding first upper straight segment and the top main body segment; the bottom side periphery of each conveying opening is further formed with a second lower straight segment at opposite ends of the conveying opening, and the second lower straight segment is The segment is located between the corresponding first lower straight segment and the bottom body segment; wherein, the included angle between the first upper straight segment and the midline is greater than the included angle between the extension line of the second upper straight segment and the midline, and the third The included angle between the lower straight line segment and the center line is greater than the included angle between the extension line of the second lower straight line segment and the center line.

Further, in the waveguide of the microwave heating device, each of the delivery openings of the waveguide has a center line, and the top peripheral edge and the bottom peripheral edge of each delivery opening are respectively formed in Both sides of the center line; the top side periphery of each delivery opening has: a top body segment extending along the traveling wave path; two first upper arc segments, which are respectively located on the top body segment along the traveling wave path opposite sides of each of the conveying openings; the bottom peripheral edge of each of the conveying openings has: a bottom main body segment, which extends along the traveling wave path; two first lower arc segments, which are respectively located on the opposite sides of the bottom main body segment along the traveling wave path two sides; wherein, the first upper arc line segment and the first lower arc line segment at either end of the opposite ends of the traveling wave path of each of the conveying openings extend to the center line respectively, and the first upper arc line segment and the The ends of the first lower arc segment are connected.

Further, in the waveguide of the microwave heating device, each of the delivery openings of the waveguide has a center line, and the top peripheral edge and the bottom peripheral edge of each delivery opening are respectively formed in The two sides of the center line; the top peripheral edge of each delivery opening has: a top body section extending along the traveling wave path; two upper stepped sections, which are respectively located on opposite two sides of the top body section along the traveling wave path The bottom side periphery of each of the conveying openings has: a bottom main body section, which is arranged relative to the top main body section; two lower stepped sections, which are respectively located on opposite sides of the bottom main body section along the traveling wave path; wherein, The upper stepped section and the lower stepped section at either end of the two opposite ends of each of the conveying openings extend toward the center line respectively, and the upper stepped section and the end of the lower stepped section are connected.

Further, in the waveguide of the microwave heating device, the thicknesses of the plates at opposite ends of each of the waveguide plates of the at least one waveguide plate pair are reduced.

Further, in the waveguide of the microwave heating device, the side of each waveguide connected to the waveguide has an abutting plane, and the abutting plane extends along the traveling wave path; the waveguide The other side has: a main body surface, which extends along the traveling wave path, and the length of the main body surface on the traveling wave path is less than the length of the abutting plane on the traveling wave path; two first inclined surfaces, which are respectively located in the subject The surfaces are along opposite sides of the traveling wave path, and the two first inclined surfaces extend from opposite sides of the main body surface to the abutting plane respectively to form one end edge of the wave guide plate along the traveling wave path.

Further, in the waveguide of the microwave heating device, each of the waveguide plates further has two second inclined surfaces, and each of the second inclined surfaces is located between one of the first inclined surfaces and the main body surface; wherein, The inclination degree of the second inclined surface of each wave guide plate relative to the abutting plane is smaller than the inclination degree of the first inclined surface relative to the abutting plane.

Further, in the waveguide of the microwave heating device, the side of each waveguide connected to the waveguide has an abutting plane, and the abutting plane extends along the traveling wave path; the waveguide The other side has: a main body surface, which extends along the traveling wave path, and the length of the main body surface along the traveling wave path is less than the length of the abutting plane along the traveling wave path; two arc surfaces, which are respectively located in the The main body surface is along opposite sides of the traveling wave path, and the two arc surfaces respectively extend from the opposite sides of the main body surface to the abutting plane to form opposite end edges of the wave guide plate along the traveling wave path.

Further, in the waveguide of the microwave heating device, the side of each waveguide connected to the waveguide has an abutting plane, and the abutting plane extends along the traveling wave path; the waveguide The other side has: a main body surface, which extends along the traveling wave path, and the length of the main body surface on the traveling wave path is less than the length of the abutting plane on the traveling wave path; two stepped surfaces, which are respectively located in the traveling wave path The main body surface is along opposite sides of the traveling wave path, and the two stepped surfaces respectively extend from the opposite sides of the main body surface to the abutting plane to form opposite end edges of the wave guide plate along the traveling wave path.

Further, in the waveguide of the microwave heating device, the direction of the microwave electric field between the two waveguides of the at least one pair of waveguides is parallel to the conveying direction.

10: still-pipe

11: Heating section

111: Front opening wall

112: Rear opening wall

113: Top Wall

114: Bottom wall

12: Connecting segment

13: Delivery opening pair

131: Delivery opening

1311: Midline

1312: Top Side Perimeter

1313: Bottom side perimeter

61: Top body segment

62: Bottom body segment

63: The first upper straight line

64: The first straight line segment

14: Waveguide pair

141: Waveguide

71: Snap to plane

72: main face

73: First Bevel

20: Microwave transmitter module

21: Microwave source

22: Circulator

23: Directional Coupler

24: Water Loader

30: Conveying module

40: Air extraction module

41: Tube Assembly

42: Heating layer

43: Collecting tank

50: Isolation Module

51: seat body

511: Channel

52: Microwave Suppressor

521: closed end

522: Open End

53: Isolation flange 53

D: conveying direction

131C: Delivery opening

1311A: Center Line

61A: Top body section

62A: Bottom body section

63A: The first upper straight line

64A: First lower straight segment

65A: Second upper straight segment

66A: Second lower straight segment

141A: Waveguide

71A: Snap to plane

72A: main face

73A: First bevel

74A: Second bevel

131B: Delivery opening

63B: The first upper arc segment

64B: The first lower arc segment

141B: Waveguide

71B: Snap to plane

72B: Body face

73B: Arc

63C: Upstairs

64C: Downstairs

141C: Waveguide

71C: Snap to plane

72C: Body face

73C: Step face

10D: still-pipe

131D: Delivery opening

14D: Waveguide Pair

141D: Waveguide

73D: First Bevel

74: Second bevel

15D: Block

16D: Microwave transmitter module installation end

17D: Guide ring wall

171D: Masking Surface

θ ₁ : included angle

θ ₂ : included angle

θ ₃ : included angle

θ ₄ : included angle

FIG. 1 is a perspective external view of the first embodiment of the microwave heating device of the present invention.

FIG. 2 is an exploded view of part of the components of the first embodiment of the microwave heating device of the present invention.

3 is an exploded view of another part of the components of the first embodiment of the microwave heating device of the present invention.

FIG. 4 is a schematic cross-sectional view of some elements of the first embodiment of the microwave heating device of the present invention.

5 is a schematic cross-sectional view of the first embodiment of the microwave heating device of the present invention at one of the heating sections.

6 is a schematic front view of one of the heating sections of the first embodiment of the microwave heating device of the present invention.

7 is a schematic front view of one of the heating sections of the second embodiment of the microwave heating device of the present invention.

FIG. 8 is a partial enlarged view of FIG. 7 .

9 is a schematic front view of one of the heating sections of the third embodiment of the microwave heating device of the present invention.

10 is a schematic front view of one of the heating sections of the fourth embodiment of the microwave heating device of the present invention.

11 is a schematic cross-sectional view of one of the microwave suppressing elements of the first embodiment of the microwave heating device of the present invention.

Fig. 12 is a perspective external view of the waveguide of the fifth embodiment of the microwave heating device of the present invention.

FIG. 13 is an exploded view of the components of the waveguide of the fifth embodiment of the microwave heating device of the present invention.

FIG. 14 is a schematic cross-sectional view of the waveguide of the fifth embodiment of the microwave heating device of the present invention.

FIG. 15 is a diagram of the microwave electric field pattern at the waveguide of FIG. 5 .

16 is a graph showing the relationship between the reflection coefficient and the frequency of the mode conversion impedance matching of the waveguide in the waveguide plate pair section of the present invention.

17 is a graph showing the relationship between the penetration coefficient and the frequency of the mode conversion impedance matching of the waveguide in the waveguide plate pair section of the present invention.

The technical means adopted by the present invention to achieve the predetermined creation purpose are further described below with reference to the drawings and preferred embodiments of the present invention.

Please refer to FIGS. 1 to 4 , the microwave heating device of the present invention includes a waveguide 10 , two microwave emission modules 20 and a conveying module 30 ; and in this embodiment, it further includes an air extraction module 40 and a microwave isolation module 50 .

The aforementioned waveguide 10 is formed by connecting a plurality of heating sections 11 and a plurality of communicating sections 12 in this embodiment, the heating sections 11 are parallel and arranged in sequence along a conveying direction D, and the communicating sections 12 are connected between the heating sections 11; In the embodiment, the heating section 11 is a straight pipe, and the communication section 12 is a curved pipe. The heating section 11 and the communication section 12 make the waveguide 10 form a substantially S-shaped tube body, and the waveguide 10 forms an S-shaped body. However, the waveguide 10 only needs to be a pipe body with openings at both ends communicating with each other. For example, the waveguide 10 may also only have a straight tubular heating section 11 .

由表1之計算結果可得知在同一使用效率下，採用二微波發射源20可以大幅改善加熱的均勻度。 The aforementioned two microwave emitting modules 20 are respectively disposed at opposite ends of the waveguide 10 along the traveling wave path. The waveguide 10 enables the microwaves emitted by each microwave emitting module 20 to be transmitted from one end of the waveguide 10 along the traveling wave path respectively. to the other end of the waveguide 10, whereby the object to be heated (not shown in the figure) in the waveguide 10 is different from one of the microwave emission modules 20, so that each object to be heated is affected by the microwave emission mode The heating power of the group 20 is different, and the difference can also be complementary to another microwave emitting module 20, so that the total heating power borne by each object to be heated is more uniform. Specifically, if the percentage of microwave energy absorbed by the material to be heated is defined as the use efficiency (%), the maximum value ( P _max ) minus the minimum value ( P _min ) of the microwave energy absorbed by the object to be heated along the traveling wave path is divided by The average ( P _average ) is defined as the uniformity, that is, the uniformity (%) is:

From the calculation results in Table 1, it can be known that under the same use efficiency, the use of two microwave emission sources 20 can greatly improve the uniformity of heating.

In this embodiment, the microwave transmitting module 20 transmits microwaves with a frequency of 2450 MHz toward the waveguide 10, and the cross-sectional shape of the waveguide 10 is adapted to the microwave of the frequency. ) defined by the WR340 rectangular cross-section, this cross-section can make the microwave work in the TE ₁₀ mode to reduce the complexity, but the microwave frequency emitted by the microwave transmitting module 20 is not limited to 2450 MHz.

In addition, each microwave transmitting module 20 in this embodiment includes a microwave source 21 , a circulator 22 , a directional coupler 23 and a water load 24 . The microwave source 21 and the directional coupler 23 are respectively located at two ends of the microwave transmitting module 20, the circulator 22 is connected to the microwave source 21 and the directional coupler 23, the water loader 24 is connected to one side of the circulator 22, and the directional coupler 23 is connected to the conductor. One end of the wave tube 10 . The circulator 22 uses the gyromagnetic phenomenon to control the microwave to transmit in a specific direction, thereby protecting the microwave source 21 . The directional coupler 23 can measure the microwave power transmitted from the microwave transmitting module 20 to the waveguide 10 and the microwave power transmitted from the waveguide 10 to the microwave transmitting module 20 .

Please refer to FIG. 3 , FIG. 5 and FIG. 6 , each heating section 11 of the waveguide 10 is formed with a pair of conveying openings 13 , and each pair of conveying openings 13 has two conveying openings 131 extending along the traveling wave path. The openings 131 are respectively formed on opposite two side walls of the corresponding heating section 11 along a conveying direction D; specifically, each heating section 11 of the waveguide 10 has a front opening wall 111 , a rear opening wall 112 , and a top wall 113 and a bottom wall 114, the front opening wall 111 and the rear opening wall 112 are arranged at intervals along the conveying direction D; the top wall 113 and the bottom wall 114 are connected to the front opening wall 111 wall and the rear opening wall 112, and the top wall 113 and the bottom The walls 114 are disposed opposite to each other, and the two conveying openings 131 of the conveying opening pair 13 of each heating segment 11 are respectively formed on the front opening wall 111 and the rear opening wall 112 of the heating segment 11 .

The aforementioned conveying module 30 penetrates each conveying opening pair 13 of the waveguide 10 along the conveying direction D. As shown in FIG. The conveying module 30 is preferably a conveying belt, and makes the object to be heated pass through each heating section 11 of the waveguide 10 from the pair of conveying openings 13 in sequence along the conveying direction D, and the object to be heated passes through the heating section 11. During the process, the microwave energy emitted by the microwave emitting module 20 is absorbed and heated.

In this embodiment, each of the delivery openings 131 of the waveguide 10 has a center line 1311 , a top side periphery 1312 and a bottom side periphery 1313 , and the top side periphery 1312 and the bottom side periphery 1313 are respectively formed on the center line 1311 . On both sides, the distance between the top peripheral edge 1312 and the bottom peripheral edge 1313 is defined as the opening width of the delivery opening 131 ; the opening widths at the opposite ends of each delivery opening 131 along the traveling wave path are respectively reduced, thereby improving the microwave transmission in the waveguide 10 Due to the impedance matching effect on the transmission path, the object to be heated in the waveguide 10 is heated more uniformly.

The specific shapes of the opposite ends of each conveying opening 131 are as follows: the top side periphery 1312 of each conveying opening 131 has a top main body section 61 and two upper constriction sections, the top main body section 61 extends along the traveling wave path, and the two upper constriction sections are respectively The segments 61 are attached to the top body segment on opposite sides of the traveling wave path. The bottom peripheral edge 1313 of each delivery opening 131 has a bottom main body section 62 and two lower constriction sections, the bottom main body section 62 extends along the traveling wave path, and the two lower constriction sections are respectively located at two opposite sides of the bottom main body section 62 along the traveling wave path. side. The upper constriction section and the lower constriction section at either end of each of the opposite ends of each conveying opening 131 along the traveling wave path extend toward the corresponding center line 1311 respectively, and the ends of the upper constriction section and the lower constriction section are connected, so that the The upper neck section and the lower neck section form the ends of the delivery opening 131 . In order to further adjust the impedance matching, the shape of the upper neck section and the lower neck section can be one of the following four types:

1. Linear gradient: each constriction section (ie, the upper constriction section and the lower constriction section) is a straight line, that is, each upper constriction section is a first upper straight section 63, and each lower constriction section is a first Next line segment 64.

2. Multi-break point structure: each constriction section (ie, the upper constriction section and the lower constriction section) has two or more connected straight line segments, such as the second embodiment of this creation (as shown in Figures 7 and 8 ) ), that is, each upper neck section has a first upper straight section 63A and a second upper straight section 65A, and the second upper straight section 65A is located between the corresponding first upper straight section 63A and the top body section 61A, and The included angle 01 between the first upper straight segment 63A and the center line 1311A is greater than the included angle 02 between the extension line of the second upper straight segment 65A and the center line 1311A; each lower constricted segment has a first lower straight segment 64A and a The second lower straight section 66A, the second lower straight section 66A is located between the corresponding first lower straight section 64A and the bottom main body section 62A, and the angle between the first lower straight section 64A and the center line 1311A is greater than the second lower straight line The angle between the extension line of segment 66A and centerline 1311A. Wherein, the first upper straight section 63A is connected to the end of the second upper straight section 65A extending toward the center line 1311A. In this embodiment, the length of each straight line segment and the included angle with the center line 1311A can be designed according to the theory of the Chebyshev Multi-section Matching Transformer, so as to achieve the purpose of reducing the size of the system and use the frequency band Get the best matching effect within the range.

3. Gradient curvature: each constricted section (ie, the upper constricted section and the lower constricted section) is an arc. For example, in the third embodiment of this creation (as shown in Figure 9), each upper constricted section is a first The upper arc segment 63B, and the first upper arc segment 63B preferably protrudes toward the outside of the conveying opening 131B; each lower constriction segment is a first lower arc segment 64B, and the first lower arc segment 64B preferably faces the conveying opening The outside of 131B protrudes.

4. Step structure: each constriction section (ie, the upper constriction section and the lower constriction section) is a stepped section. For example, in the fourth embodiment of this creation (as shown in Figure 10), each upper constriction section is a step. In the upper stepped section 63C, each lower constricted section is a lower stepped section 64C, and the distance between the upper stepped section 63C and the lower stepped section 64C decreases in the direction away from the center of the conveying opening 131C. In this embodiment, each step section forms a plurality of right angles, but each step section may also only form a right angle. The size of each step can be determined according to the theory of Chebyshev impedance matching converter Design, in order to achieve the purpose of reducing the size of the system to get the best matching effect in the frequency range of use.

In the foregoing embodiments, the shapes and positions of the upper constriction section and the lower constriction section of each conveying opening 131 are symmetrical with each other, but not limited thereto.

Please refer to FIG. 3 , FIG. 5 and FIG. 6 , in the first embodiment of the present invention, the waveguide 10 further includes a plurality of waveguide plate pairs 14 , which are respectively disposed in each heating section 11 , that is, In other words, each pair of transmission openings 13 is provided with a pair of wave guide plates 14 correspondingly. The position of each wave guide plate pair 14 on the traveling wave path corresponds to the position of the conveying opening pair 13 in the same heating section 11 on the traveling wave path, respectively. Each wave guide plate pair 14 includes two wave guide plates 141 . The two wave guide plates 141 are respectively connected to the top wall 113 and the bottom wall 114 of the heating section 11 and extend along the traveling wave path. The material of the wave guide plate 141 is a dielectric material, preferably alumina ceramics, but not limited thereto, the material of the wave guide plate 141 can also be made of aluminum nitride ceramics with better thermal conductivity than alumina ceramics or Boron nitride ceramics. The wave guide plate pair 14 can modulate the traveling wave mode of the microwave in the wave guide tube 10, so that it is transformed from the original fundamental mode TE ₁₀ to a specific higher-order mode, which has the following effects:

1. When the microwave absorption characteristic of the object to be heated is strong, the pair of wave guide plates 14 can still make the object to be heated evenly heated.

2. Once a metal object appears in the traditional waveguide, the microwave in the waveguide will be completely reflected back to the incident end by the metal object (ie impedance failure), resulting in the traditional waveguide completely unable to heat the object containing metal to be heated. to heat. However, even if the object to be heated in the waveguide 10 of this embodiment is mixed with a metal object, the microwaves can still bypass the metal object as usual and uniformly heat the object to be heated.

By arranging the pair of wave guide plates 14, the present invention can process materials with strong microwave absorption properties and objects to be heated with metal objects, thereby improving the range of materials that can be heated by the present invention, and thus can handle conventional microwave heating High unit price heating objects that cannot be handled by the device, such as wet circuit boards, various electronic products containing metal components, semiconductor wafers containing metal, solar wafers containing metal wires, and wet clothes with metal fittings, thereby increasing the value of the present invention .

In this embodiment, the positions of the pair of wave guide plates 14 and the pair of conveying openings 13 correspond to the positions of each wave guide plate 141 in each heating section 11 and the shape center of each conveying opening 131 are located on the same plane. However, it is not limited to this, as long as the position of the wave guide plate 141 is approximately the same as the position of the delivery opening 131, so that the wave guide plate 141 can adjust the impedance matching of the wave guide 10 and allow the wave guide 141 to pass through the wave guide. 10 of the object to be heated can be heated evenly.

Specifically, in the traveling wave heating method, the magnitude of the microwave energy in the heating material along the traveling direction is P _propagation ( z ) = P ₀ e ^{- αz} , along the traveling direction of the microwave, the magnitude of the energy absorbed by the material per unit distance is P _absorption ( z )= αP ₀ e ^{- αz} , where P ₀ is the initial incident energy, α is the attenuation coefficient, the value of α is not only determined by the dielectric constant and dielectric loss of the material, but also by the frequency of the traveling wave and the determined by the mode used.

Please refer to FIG. 5 , FIG. 15 and FIG. 16 , by adding a pair of waveguide plates 14 made of dielectric materials to the waveguide 10 , the pair of waveguide plates 14 will change the traveling wave mode from the original fundamental mode TE ₁₀ transforms into a parallel electric field mode of a higher-order mode in the TE mode; in this parallel electric field mode, the direction of the microwave electric field is parallel to the transport direction D. Specifically, the traveling wave mode between the two wave guide plates 141 of the wave guide plate pair 14 will be completely converted from the fundamental mode TE ₁₀ to the TE mode as shown in FIG. The relationship diagram of coefficient) and frequency is shown in Fig. 16, wherein the unit of the abscissa in Fig. 16 is gigahertz (Ghz), and the unit of the ordinate is dB. In addition, please refer to FIG. 17 , the relationship between the penetration S21 parameter (ie penetration coefficient) and frequency corresponding to the impedance matching from the fundamental mode TE ₁₀ to the TE mode of FIG. 15 is 0dB in the whole frequency band.

The advantage of converting the traveling wave mode from the original fundamental mode TE ₁₀ to the parallel electric field mode is that the attenuation coefficient α can be modulated, so that even if the microwave absorption characteristics of the object to be heated are strong, the pair of waveguide plates 14 can still make the object to be heated uniform. It is heated to improve the problem that the existing microwave heating device can only heat the front edges of the two ends of the object to be heated; in addition, the parallel electric field mode can make the microwave bypass the metal object, so that even if the object to be heated is mixed with metal objects, the microwave can still be heated. Evenly heat the object to be heated as usual, bypassing the metal object.

In addition, in this embodiment, the thicknesses of the plates at opposite ends of each wave guide plate 141 are reduced toward the center away from the wave guide plate 141 to further improve impedance matching. The body thickness reduction method also has four changes as the aforementioned two opposite ends of the delivery opening 131:

1. Linear gradient: the specific shapes of the opposite ends of each wave guide plate 141 are as follows (as shown in FIG. 6 ): the side of the wave guide plate 141 connected to the wave guide tube 10 has an abutting plane 71, and the abutting plane 71 runs along the line The wave path extends; the other side of the wave guide plate 141 has a main body surface 72 and two first inclined surfaces 73, the main body surface 72 extends along the traveling wave path, and the length of the main body surface 72 along the traveling wave path is smaller than the length of the abutting plane 71 along the line The length of the wave path; the two first inclined surfaces 73 respectively extend from opposite sides of the main body surface 72 to the abutting plane 71 to form two opposite end edges of the wave guide 141 along the traveling wave path. In this embodiment, when viewed from the conveying direction D, the shape of the wave guide plate 141 is an isosceles trapezoid.

2. Multi-break point structure: Please refer to FIG. 7 and FIG. 8 together. In the second embodiment of the present invention, the waveguide plate 141A with the multi-break point structure at both ends and the waveguide plate 141 with linear gradients at both ends are separated. The structure is basically the same, the difference is that the waveguide plate 141A further has two second inclined surfaces 74A, each of which is located between one of the first inclined surfaces 73A and the main body surface 72A; the second inclined surfaces 74A of each waveguide plate 141A are relatively close to each other The inclination of the plane 71A is smaller than the inclination of the first inclined plane 73A relative to the abutting plane 71A, that is to say, the angle θ3 between the normal _of the second inclined plane 74A and the normal of the abutting plane 71A is smaller than that of the first inclined plane 73A. The angle θ ₄ between the normal and the normal of the abutment plane 71A. In addition, in other preferred embodiments, a plurality of inclined surfaces with different inclinations may also be connected between the first inclined surface 73A and the main body surface 72A, so that the edge of the waveguide plate 141A of this example is formed with multiple inflection points. In addition, the size of each slope can be designed according to the theory of Chebyshev impedance matching converter to achieve the best matching effect.

3. Curvature gradient: Please refer to FIG. 9. In the third embodiment of the present invention, the structure of the wave guide plate 141B with gradient gradient at both ends and the wave guide plate 141 with linear gradient at both ends are roughly the same, and the difference lies in the two arcs The surfaces 73B are respectively located on opposite sides of the main body surface 72B along the traveling wave path, and the two arc surfaces 73B are The opposite sides of the main body surface 72B extend to the abutment plane 71B to form opposite end edges of the wave guide plate 141B along the traveling wave path. The arc surface 73B preferably protrudes toward the outer side of the wave guide plate 141B.

4. Step structure: Please refer to FIG. 10 together. In the fourth embodiment of the present invention, the structure of the wave guide plate 141C with gradual curvature at both ends and the wave guide plate 141 with linear gradient at both ends are roughly the same, and the difference lies in two. The stepped surfaces 73C are respectively located on opposite sides of the main body surface 72C along the traveling wave path, and the two stepped surfaces 73C respectively extend from opposite sides of the main body surface 72C to the abutting plane 71C to form opposite ends of the waveguide plate 141C along the traveling wave path. edge. Each of the stepped surfaces 73C in this embodiment is formed with a plurality of right-angled portions, but each of the stepped surfaces 73C may be formed with only a right-angled portion. The size of each step surface 73C can be designed according to the theory of the Chebyshev impedance matching converter to achieve the best matching effect.

Please refer to FIG. 1 , FIG. 2 and FIG. 5 , the aforementioned air extraction module 40 communicates with the inner space of the waveguide 10 to remove the water vapor released by the humid object to be heated after being heated; the air extraction module 40 It includes a tube assembly 41, a heating layer 42 and a water collecting tank 43; the tube assembly 41 is arranged above the waveguide 10 and communicates with the inner space of the waveguide 10; the heating layer 42 is coated on the outside of the tube assembly 41 to To prevent water vapor from condensing and flowing back into the waveguide 10;

Please refer to FIG. 1 , FIG. 5 and FIG. 11 , the aforementioned microwave isolation module 50 has two bases 51 , a plurality of microwave suppressing elements 52 and a plurality of isolation flanges 53 ; the two bases 51 are respectively connected to the edges of the waveguide 10 . The heating sections 11 on opposite sides in the conveying direction D; the base body 51 forms a channel 511 which surrounds the outside of the conveying module 30 and communicates with a conveying opening 131 of the connected heating section 11 facing outward. The microwave suppressing members 52 pass through the top surface of the base body 51 , each microwave suppressing member 52 is a tube body, and two ends of the microwave suppressing member 52 are respectively a closed end 521 and an open end 522 , and the open end 522 protrudes from the seat. The top surface of the body 51, the closed end 521 is located in the channel 511. The microwave suppressor 52 can restrict microwaves from passing through the passage 511 , and thereby prevent the microwaves of the waveguide 10 from leaking from the delivery opening 131 to the outside. The microwave suppressing member 52 is not limited to pass through the top surface of the base body 51 , and can also pass through any outer side surface of the base body 51 . The plurality of isolation flanges 53 are respectively connected to the two adjacent heating sections 11 In between, the two opposite openings of the isolation flange 53 are respectively connected to the conveying openings 131 of the two heating segments 11 facing each other, so as to avoid microwave leakage.

Finally, please refer to FIG. 12 to FIG. 14 , in the fifth embodiment of the present invention, the waveguide 10D is a straight pipe body formed by the combination of two pieces 15D, and its two ends are respectively a microwave emitting module The installation end 16D of the 20, the waveguide 10D is provided with a pair of wave guides 14D with a multi-fold point structure, and each wave guide 141D of the pair of wave guides 14D has a first inclined surface 73D and a second inclined surface 74D. The outer periphery of each delivery opening 131D further protrudes outward to form a guide ring wall 17D, the guide ring wall 17D surrounds the delivery opening 131D, and forms a shielding surface 171D, the shielding surface 171D shields the opposite ends of the delivery opening 131D to reduce the Microwave leakage.

Please refer to FIG. 1 and FIG. 5 , when the present invention is in use, the object to be heated is placed at one end of the conveying module 30 , and the conveying module 30 drives the object to be heated to move along the conveying direction D, so that the object to be heated is conveyed by The opening 131 penetrates into the waveguide 10 and is heated by absorbing microwave energy in the waveguide 10 . When the present invention is used for heating and dehydrating the wet object to be heated, the air extraction module 40 extracts the water vapor released by the object to be heated and stores it in the water collecting tank 43 .

To sum up, in the present invention, a microwave emitting module 20 is arranged at the opposite ends of the waveguide 10 to improve the uniformity of the heating of the high microwave absorbing material in the waveguide 10, and can be used for high-unit price microwaves. The object to be heated is subjected to heat treatment.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Those of ordinary knowledge, without departing from the scope of the technical solution of the present invention, can make some changes or modifications to equivalent embodiments with equivalent changes by using the technical content disclosed above. The technical essence of the invention Any simple modifications, equivalent changes and modifications made to the above embodiments still fall within the scope of the technical solutions of the present invention.

10: still-pipe

20: Microwave transmitter module

21: Microwave source

30: Conveying module

40: Air extraction module

42: Heating layer

43: Collecting tank

50: Isolation Module

51: seat body

52: Microwave Suppressor

53: Isolation flange

Claims (27)

A microwave heating device, comprising: a waveguide forming a traveling wave path and having: at least one heating section, the at least one heating section has: a front opening wall; a rear opening wall, which is along the edge of the front opening wall A conveying direction is spaced apart; a top wall is connected to the front opening wall and the rear opening wall; a bottom wall is connected to the front opening wall and the rear opening wall, and is arranged opposite to the top wall; at least one conveying opening pair , which has two conveying openings, the two conveying openings are respectively formed in the front opening wall and the rear opening wall of the at least one heating section; at least one pair of wave guide plates is arranged in the at least one heating section, and the at least one The position of the wave guide plate on the traveling wave path corresponds to the position of the at least one delivery opening on the traveling wave path; the at least one wave guide plate pair includes: two wave guide plates, which are respectively connected to the top wall of the at least one heating section and the bottom wall, and extend along the traveling wave path; the two wave guide plates are made of dielectric materials; two microwave emission modules are respectively arranged at opposite ends of the wave guide tube along the traveling wave path; one The conveying module passes through the at least one pair of conveying openings of the waveguide along the conveying direction. The microwave heating device of claim 1, wherein each of the delivery openings of the waveguide has a top peripheral edge and a bottom peripheral edge, and the distance between the top peripheral edge and the bottom peripheral edge is defined as the opening of the delivery opening width; the opening widths at opposite ends of each of the conveying openings along the traveling wave path are reduced. The microwave heating device as claimed in claim 2, wherein: Each of the delivery openings of the waveguide has a center line, and the top side peripheral edge and the bottom side peripheral edge of each of the delivery openings are respectively formed on both sides of the center line; the top side peripheral edge of each of the delivery openings has: A top main body section, which extends along the traveling wave path; two first upper straight sections, which are located on opposite sides of the top main body section along the traveling wave path, respectively; a main body segment, which extends along the traveling wave path; two first lower straight segments, which are respectively located on opposite sides of the bottom main body segment along the traveling wave path; wherein, each of the conveying openings is located at opposite ends along the traveling wave path. The first upper straight line segment and the first lower straight line segment at either end extend toward the center line respectively, and the first upper straight line segment and the end of the first lower straight line segment are connected. The microwave heating device according to claim 3, wherein: the top side periphery of each conveying opening is further formed with a second upper straight line segment at opposite ends of the conveying opening, and the second upper straight line segment is located in the corresponding Between the first upper straight section and the top main body section; the bottom side periphery of each conveying opening is further formed with a second lower straight section at opposite ends of the conveying opening, and the second lower straight section is located in the corresponding Between the first lower straight segment and the bottom body segment; wherein, the included angle between the first upper straight segment and the midline is greater than the included angle between the extension line of the second upper straight segment and the midline, and the first lower straight segment The included angle with the center line is greater than the included angle between the extension line of the second lower straight segment and the center line. The microwave heating device as claimed in claim 2, wherein: Each of the delivery openings of the waveguide has a center line, respectively, and the top side periphery and the bottom side periphery of each of the delivery openings are respectively formed on both sides of the center line; the top side periphery of each of the delivery openings has : a top main body segment, which extends along the traveling wave path; two first upper arc segments, which are respectively located on opposite sides of the top main body segment along the traveling wave path; the bottom side periphery of each of the conveying openings has: a The bottom main body segment extends along the traveling wave path; two first lower arc segments are respectively located on opposite sides of the bottom main body segment along the traveling wave path; wherein each of the conveying openings is along the opposite two sides of the traveling wave path. The first upper arc line segment and the first lower arc line segment at either end of the end extend toward the center line respectively, and the first upper arc line segment and the end of the first lower arc line segment are connected. The microwave heating device as claimed in claim 2, wherein: each of the delivery openings of the waveguide has a center line, and the top side periphery and the bottom side periphery of each of the delivery openings are respectively formed on the center line. two sides; the top side periphery of each of the conveying openings has: a top main body section extending along the traveling wave path; two upper stepped sections, which are respectively located on opposite sides of the top main body section along the traveling wave path; each of the The bottom peripheral edge of the conveying opening has: a bottom main body section, which is arranged relative to the top main body section; two lower stepped sections, which are respectively located on opposite sides of the bottom main body section along the traveling wave path; wherein, each of the conveying openings The upper stepped section and the lower stepped section along either end of opposite ends of the traveling wave path extend toward the center line respectively, and the upper stepped section and the end of the lower stepped section are connected. The microwave heating device of claim 1, wherein the thicknesses of the plates at opposite ends of each of the wave guide plates of the at least one wave guide plate pair are reduced. The microwave heating device according to claim 7, wherein one side of each wave guide plate connected to the wave guide tube has an abutting plane, and the abutting plane extends along the traveling wave path; the other side of the wave guide plate It has: a main body surface, which extends along the traveling wave path, and the length of the main body surface on the traveling wave path is less than the length of the abutting plane on the traveling wave path; two first inclined surfaces, which are respectively located along the main body surface. On opposite sides of the traveling wave path, the two first inclined surfaces extend from the opposite sides of the main body surface to the abutting plane respectively, so as to form two opposite end edges of the wave guide along the traveling wave path. The microwave heating device according to claim 8, wherein each of the wave guide plates further has two second inclined surfaces, and each of the second inclined surfaces is located between one of the first inclined surfaces and the main body surface; wherein, each of the guided waves The inclination degree of the second inclined surface of the plate relative to the abutting plane is smaller than the inclination degree of the first inclined surface relative to the abutting plane. The microwave heating device according to claim 7, wherein one side of each wave guide plate connected to the wave guide tube has an abutting plane, and the abutting plane extends along the traveling wave path; the other side of the wave guide plate It has: a main body surface, which extends along the traveling wave path, and the length of the main body surface along the traveling wave path is less than the length of the abutting plane along the traveling wave path; two arc surfaces, which are respectively located on the main body surface along the traveling wave path On opposite sides of the traveling wave path, the two arc surfaces respectively extend from the opposite sides of the main body surface to the abutting plane to form opposite end edges of the wave guide plate along the traveling wave path. The microwave heating device according to claim 7, wherein one side of each wave guide plate connected to the wave guide tube has an abutting plane, and the abutting plane extends along the traveling wave path; the other side of the wave guide plate It has: a main body surface, which extends along the traveling wave path, and the length of the main body surface on the traveling wave path is less than the length of the abutting plane on the traveling wave path; two stepped surfaces, which are respectively located on the main body surface along the traveling wave path On opposite sides of the traveling wave path, the two stepped surfaces respectively extend from the opposite sides of the main body surface to the abutting plane to form opposite end edges of the wave guide plate along the traveling wave path. The microwave heating device according to any one of claims 1 to 11, wherein the microwave heating device further has an air extraction module, which communicates with the inner space of the waveguide; the outer side of the air extraction module is covered with a heating layer. The microwave heating device as claimed in claim 12, wherein the air extraction module has a water collecting tank. The microwave heating device according to any one of claims 1 to 11, wherein the microwave heating device further has at least one microwave isolation module, which has: a base, which is connected to the waveguide and forms a channel, the A channel surrounds the conveying module and communicates with one of the conveying openings of the waveguide; a plurality of microwave suppressing parts are arranged on the outer side of the base body; each of the microwave suppressing parts is a tube body, and the Two ends of the microwave suppressor are respectively a closed end and an open end, the open end protrudes out of the base, and the closed end is located in the channel. The microwave heating device according to any one of claims 1 to 11, wherein the direction of the microwave electric field between the two wave guide plates of the at least one wave guide plate pair is parallel to the conveying direction. A waveguide of a microwave heating device, which has: at least one heating section, the at least one heating section has: a front opening wall; a rear opening wall, which is spaced from the front opening wall along the conveying direction; a top wall, which connects the front opening wall and the rear opening wall; a bottom wall, which connects the front opening wall and the rear opening wall The rear opening wall is disposed opposite to the top wall; at least one pair of conveying openings has two elongated conveying openings extending along a traveling wave path, and the two conveying openings are respectively formed on the front opening wall of the at least one heating section and the rear opening wall; at least one pair of wave guide plates is arranged in the wave guide tube, and the position of the at least one wave guide plate with respect to the length direction of the wave guide tube corresponds to the at least one delivery opening in the wave guide tube. the position in the longitudinal direction; the at least one wave guide plate pair includes: two wave guide plates, which are respectively connected to the top wall and the bottom wall of the at least one heating section and extend along the traveling wave path; the two wave guide plates All are made of dielectric materials. The waveguide of a microwave heating device as claimed in claim 16, wherein each of the delivery openings of the waveguide has a top peripheral edge and a bottom peripheral edge, and the distance between the top peripheral edge and the bottom peripheral edge is defined as the The opening width of the conveying opening; the opening widths of the opposite ends of each conveying opening along the traveling wave path are reduced. The waveguide of a microwave heating device as claimed in claim 17, wherein: each of the delivery openings of the waveguide has a center line, and the top side periphery and the bottom side periphery of each of the delivery openings are respectively formed in the Both sides of the center line; the top side periphery of each of the conveying openings has: a top body section, which extends along the traveling wave path; two first upper straight sections, which are respectively located at the top body section along the traveling wave path. Opposite two sides; the bottom side periphery of each of the conveying openings has: a bottom body segment extending along the traveling wave path; Two first lower straight segments, which are respectively located on opposite sides of the bottom body segment along the traveling wave path; wherein, the first upper straight segment at either end of each of the conveying openings along the opposite ends of the traveling wave path and the The first lower straight segments extend toward the midline respectively, and the first upper straight segments are connected with the ends of the first lower straight segments. The waveguide of a microwave heating device as claimed in claim 18, wherein: the top side periphery of each of the delivery openings is further formed with a second upper straight section at opposite ends of the delivery opening, and the second upper straight section located between the corresponding first upper straight segment and the top main body segment; the bottom side periphery of each conveying opening is further formed with a second lower straight segment at opposite ends of the conveying opening, and the second lower straight segment is The segment is located between the corresponding first lower straight segment and the bottom body segment; wherein, the included angle between the first upper straight segment and the midline is greater than the included angle between the extension line of the second upper straight segment and the midline, and the third The included angle between the lower straight line segment and the center line is greater than the included angle between the extension line of the second lower straight line segment and the center line. The waveguide of a microwave heating device as claimed in claim 17, wherein: each of the delivery openings of the waveguide has a center line, and the top and bottom peripheries of the delivery openings are respectively formed in Both sides of the center line; the top side periphery of each delivery opening has: a top body segment extending along the traveling wave path; two first upper arc segments, which are respectively located on the top body segment along the traveling wave path The opposite sides of each of the conveying openings have: a bottom body section extending along the traveling wave path; Two first lower arc segments, which are respectively located on opposite sides of the bottom body segment along the traveling wave path; wherein, the first upper arc segment at either end of each of the delivery openings along the traveling wave path and the first upper arc segment The first lower arc line segments extend toward the center line respectively, and the first upper arc line segment is connected with the end of the first lower arc line segment. The waveguide of a microwave heating device as claimed in claim 17, wherein: each of the delivery openings of the waveguide has a center line, and the top and bottom peripheries of the delivery openings are respectively formed in The two sides of the center line; the top peripheral edge of each delivery opening has: a top body section extending along the traveling wave path; two upper stepped sections, which are respectively located on opposite two sides of the top body section along the traveling wave path The bottom side periphery of each of the conveying openings has: a bottom main body section, which is arranged relative to the top main body section; two lower stepped sections, which are respectively located on opposite sides of the bottom main body section along the traveling wave path; wherein, The upper stepped section and the lower stepped section at either end of the two opposite ends of each of the conveying openings extend toward the center line respectively, and the upper stepped section and the end of the lower stepped section are connected. The waveguide of the microwave heating device as claimed in claim 16, wherein the thickness of the plate body at the opposite ends of each of the at least one waveguide plate pair is reduced. The waveguide of a microwave heating device as claimed in claim 22, wherein each side of the waveguide connected to the waveguide has an abutting plane, and the abutting plane extends along the traveling wave path; the waveguide; The other side has: a main body surface, which extends along the traveling wave path, and the length of the main body surface on the traveling wave path is less than the length of the abutting plane on the traveling wave path; Two first inclined surfaces are located on opposite sides of the main body surface along the traveling wave path, respectively, and the two first inclined surfaces extend from opposite sides of the main body surface to the abutting plane respectively, so as to form the wave guide plate along the traveling wave path. One of the edges of the traveling wave path. The waveguide of a microwave heating device as claimed in claim 23, wherein each of the waveguide plates further has two second inclined surfaces, and each of the second inclined surfaces is located between one of the first inclined surfaces and the main body surface; wherein, The inclination degree of the second inclined surface of each wave guide plate relative to the abutting plane is smaller than the inclination degree of the first inclined surface relative to the abutting plane. The waveguide of a microwave heating device as claimed in claim 22, wherein each side of the waveguide connected to the waveguide has an abutting plane, and the abutting plane extends along the traveling wave path; the waveguide; The other side has: a main body surface, which extends along the traveling wave path, and the length of the main body surface along the traveling wave path is less than the length of the abutting plane along the traveling wave path; two arc surfaces, which are respectively located in the The main body surface is along opposite sides of the traveling wave path, and the two arc surfaces respectively extend from the opposite sides of the main body surface to the abutting plane to form opposite end edges of the wave guide plate along the traveling wave path. The waveguide of a microwave heating device as claimed in claim 22, wherein each side of the waveguide connected to the waveguide has an abutting plane, and the abutting plane extends along the traveling wave path; the waveguide; The other side has: a main body surface, which extends along the traveling wave path, and the length of the main body surface on the traveling wave path is less than the length of the abutting plane on the traveling wave path; two stepped surfaces, which are respectively located in the traveling wave path The main body surface is along opposite sides of the traveling wave path, and the two stepped surfaces respectively extend from the opposite sides of the main body surface to the abutting plane to form opposite end edges of the wave guide plate along the traveling wave path. The waveguide of a microwave heating device according to any one of claims 17 to 26, wherein the direction of the microwave electric field between the two waveguides of the at least one pair of waveguides is parallel to the conveying direction.

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