TWI759985B - Electro-chemical system - Google Patents
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本公開係關於一種加工系統及方法,尤其是一種電化學系統。 The present disclosure relates to a processing system and method, especially an electrochemical system.
電化學(electrochemistry)反應的原理係將兩金屬分別接於直流電源的陽極和陰極,並浸潤在電解液中;而接於陽極之金屬將進行氧化反應而失去電子,並解離出正離子中;當正離子移向陰極,陰極將得到電子而進行還原反應而產生形成金屬。例用此原理的加工方法稱為電化學加工(Electrochemical Machining),其通過電化學反應去除工件材料或是在其上鍍覆金屬材料,利用這種電化學作用為基礎對金屬進行加工(包括電解和鍍覆)的方法即電化學加工。 The principle of the electrochemical (electrochemistry) reaction is to connect the two metals to the anode and the cathode of the DC power supply, respectively, and soak them in the electrolyte; and the metal connected to the anode will undergo an oxidation reaction to lose electrons and dissociate into positive ions; When the positive ions move to the cathode, the cathode will receive electrons and undergo a reduction reaction to produce the metal. For example, the processing method using this principle is called electrochemical machining (Electrochemical Machining), which removes workpiece materials or coats metal materials on them through electrochemical reactions, and uses this electrochemical action as a basis to process metals (including electrolysis). and plating) method that is electrochemical machining.
一些電化學加工也被稱為電解加工,其中,治具電連接於電源的陰極;而可導電的工件與陽極電連接。電源之電流從工件經電解液至電極,如此即可對工件進行加工,而移除工件不要之部份。電化學加工過程中,電極沒有和工件接觸,也沒有電火花的產生,故相對安全。電化學加工適合用來加工硬度高的材料或者傳統方法難以加工的材料,例如,對金屬工件進行去毛邊、拋光、及圖紋加工等加工處理。 Some electrochemical machining is also known as electrolytic machining, where the fixture is electrically connected to the cathode of the power source; and the conductive workpiece is electrically connected to the anode. The current of the power source is passed from the workpiece to the electrode through the electrolyte, so that the workpiece can be processed and the unnecessary part of the workpiece can be removed. In the process of electrochemical machining, the electrode is not in contact with the workpiece, and there is no electric spark, so it is relatively safe. Electrochemical machining is suitable for machining materials with high hardness or materials that are difficult to be machined by traditional methods, such as deburring, polishing, and patterning of metal workpieces.
於是,本公開提供一種電化學系統,其包含具有承載面的承載座、第一電極單元及第二電極單元。所述第一電極單元包含多個電極模組,各所述電極模組包含探針座、電極探針、及驅動機構。所述電極探針設於所述探針座,包含至少一個端部。所述驅動機構設於所述承載座的承載面,組配來驅動所述 探針座在一行進方向上往復移動;第二電極單元,包含導電件及墊塊,所述導電件設置為可與承載台承載座在垂直方向上相對移動以接觸工件;所述墊塊設置為與所述導電件同時移動,其內形成有流道結構,所述流道結構具有朝向所述承載面的出液口;其中,所述多個電極模組中相臨兩個的行進方向大致呈正交。 Therefore, the present disclosure provides an electrochemical system, which includes a bearing base having a bearing surface, a first electrode unit, and a second electrode unit. The first electrode unit includes a plurality of electrode modules, and each of the electrode modules includes a probe seat, an electrode probe, and a driving mechanism. The electrode probe is arranged on the probe base and includes at least one end. The driving mechanism is arranged on the bearing surface of the bearing seat, and is assembled to drive the The probe seat reciprocates in a traveling direction; the second electrode unit includes a conductive member and a pad, the conductive member is arranged to be movable relative to the bearing base of the bearing platform in the vertical direction to contact the workpiece; the pad is arranged In order to move at the same time with the conductive member, a flow channel structure is formed therein, and the flow channel structure has a liquid outlet facing the bearing surface; wherein, the travel directions of two adjacent electrode modules in the plurality of electrode modules are roughly orthogonal.
於是,本公開提供一種電化學系統的加工方法,包含:接收工件於承載座的承載面上,所述工件具有溝槽;及操作設於所述承載面上的多個陰電極模組,所述陰電極模組具有設在探針座的電極探針,驅使所述多個陰電極模組中相臨兩個的探針座在大致呈正交的行進方向上靠近所述工件,使得所述電極探針伸入所述工件的溝槽。 Therefore, the present disclosure provides a processing method of an electrochemical system, comprising: receiving a workpiece on a bearing surface of a bearing seat, the workpiece having grooves; and operating a plurality of cathode electrode modules disposed on the bearing surface, so that the The cathode electrode module has electrode probes arranged on the probe seat, and the two adjacent probe seats in the plurality of cathode electrode modules are driven to approach the workpiece in a substantially orthogonal travel direction, so that all the The electrode probe extends into the groove of the workpiece.
100:電化學系統 100: Electrochemical Systems
110、210:治具下模 110, 210: Fixture lower die
120:治具上模 120: Fixture upper die
130:流體供應系統 130: Fluid Supply System
140:電源供應系統 140: Power Supply System
150:升降系統 150: Lifting system
160:探針接觸感測器 160: Probe touch sensor
112、212:第一電極單元 112, 212: the first electrode unit
w:工件 w: workpiece
111、211:承載座 111, 211: Bearing seat
111a、211a:承載面 111a, 211a: bearing surface
111b、211b:下安裝板件 111b, 211b: lower mounting plate
111c、211c:定向結構 111c, 211c: Orientation structure
111d:防呆柱 111d: foolproof column
w10:橫向溝槽 w10: Lateral groove
w20:縱向溝槽 w20: longitudinal groove
111e:流道結構 111e: Runner structure
113:電極模組 113: Electrode module
213a:電極模組 213a: Electrode Module
213b:電極模組 213b: Electrode Module
213c:電極模組 213c: Electrode Module
213d:電極模組 213d: Electrode Module
114、214:探針座 114, 214: Probe holder
414、514:探針座 414, 514: Probe holder
614、714:探針座 614, 714: Probe holder
115、215:電極探針 115, 215: Electrode probe
615、715:電極探針 615, 715: Electrode probe
415a、415b:電極探針 415a, 415b: electrode probes
415c、415d:電極探針 415c, 415d: Electrode probe
415e、415f:電極探針 415e, 415f: Electrode probe
515a、515b:電極探針 515a, 515b: electrode probes
515c、515d:電極探針 515c, 515d: Electrode probe
116、216:驅動機構 116, 216: drive mechanism
116a:底座 116a: Base
116b:導引桿 116b: Guide rod
116c、216c:氣壓缸 116c, 216c: Pneumatic cylinder
116d、216d:驅動件 116d, 216d: drive parts
116e:連接件 116e: Connector
121:上安裝板件 121: Upper mounting plate
122:第二電極單元 122: The second electrode unit
123:導電件 123: Conductive parts
124:墊塊 124: Spacer
124a:流道結構 124a: runner structure
151:機台下板 151: Machine lower board
152:機台上板 152: Machine board
153:升降軸 153: Lifting shaft
x、y、z:方向 x, y, z: direction
S301~S311:程序 S301~S311: Program
為可仔細理解本案以上記載之特徵,參照實施態樣可提供簡述如上之本案的更特定描述,一些實施態樣係說明於隨附圖式中。然而,要注意的是,隨附圖式僅說明本案的典型實施態樣並且因此不被視為限制本案的範圍,因為本案可承認其他等效實施態樣。 For a detailed understanding of the above-described features of the present application, a more specific description of the present application, briefly described above, can be provided with reference to embodiments, some of which are illustrated in the accompanying drawings. It is to be noted, however, that the appended drawings illustrate only typical implementations of this case and are therefore not to be considered limiting of its scope, as this case may admit other equivalent implementations.
圖1示出了根據本公開的一些實施例的電化學系統的側視示意圖;圖2示出了根據本公開的一些實施例的電化學系統的俯視示意圖;圖3示出了根據本公開的一些實施例的電化學系統的加工方法的流程圖圖4示出了根據本公開的一些實施例的探針座的探針分佈圖案的示意圖;圖5示出了根據本公開的一些實施例的探針座的探針分佈圖案的示意圖;圖6示出了根據本公開的一些實施例的探針座的探針分佈圖案的示意圖;及圖7示出了根據本公開的一些實施例的探針座的探針分佈圖案的示意圖。
Figure 1 shows a schematic side view of an electrochemical system according to some embodiments of the present disclosure; Figure 2 shows a schematic top view of an electrochemical system according to some embodiments of the present disclosure; Figure 3 shows a schematic diagram of an electrochemical system according to some embodiments of the
然而,應注意的是,附圖僅示出了本公開的示例性實施例,並且因此不應被認為是對其範圍的限制,因為本公開可以允許其他等效的實施例。 It is to be noted, however, that the appended drawings illustrate only exemplary embodiments of this disclosure and are therefore not to be considered limiting of its scope, for the disclosure may admit to other equally effective embodiments.
應該注意的是,這些附圖意在說明在某些示例實施例中使用的方法,結構和/或材料的一般特性,並補充下面提供的書面描述。然而,這些附圖不是按比例繪製的,並且可能不能精確地反映任何給定實施例的精確的結構或性能特徵,並且不應被解釋為定義或限制示例實施例所涵蓋的值或特性的範圍。例如,為了清楚起見,可以減小或放大層,區域和/或結構元件的相對厚度和位置。在各個附圖中使用相似或相同的附圖標記旨在指示相似或相同的元件或特徵的存在。 It should be noted that these drawings are intended to illustrate the general characteristics of the methods, structures and/or materials used in certain example embodiments and to supplement the written description provided below. These drawings, however, are not to scale and may not precisely reflect the precise structural or performance characteristics of any given embodiment, and should not be construed to define or limit the range of values or characteristics encompassed by example embodiments . For example, the relative thicknesses and positions of layers, regions and/or structural elements may be reduced or exaggerated for clarity. The use of similar or identical reference numbers throughout the various figures is intended to indicate the presence of similar or identical elements or features.
以下描述將參考附圖以更全面地描述本公開內容。附圖中所示為本公開的示例性實施例。然而,本公開可以以許多不同的形式來實施,並且不應所述被解釋為限於在此闡述的示例性實施例。提供這些示例性實施例是為了使本公開透徹和完整,並且將本公開的範圍充分地傳達給本領域技術人員。類似的附圖標記表示相同或類似的元件。 The following description will refer to the accompanying drawings to more fully describe the present disclosure. Exemplary embodiments of the present disclosure are shown in the accompanying drawings. This disclosure may, however, be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. These exemplary embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. Like reference numbers refer to the same or similar elements.
本文使用的術語僅用於描述特定示例性實施例的目的,而不意圖限制本公開。如本文所使用的,除非上下文另外清楚地指出,否則單數形式“一”,“一個”和“所述”旨在也包括複數形式。此外,當在本文中使用時,“包括”和/或“包含”或“包括”和/或“包括”或“具有”和/或“具有”,整數,步驟,操作,元件和/或組件,但不排除存在或添加一個或多個其它特徵,區域,整數,步驟,操作,元件,組件和/或其群組。 The terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to limit the present disclosure. As used herein, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise. Furthermore, when used herein, "include" and/or "include" or "include" and/or "include" or "have" and/or "have", integers, steps, operations, elements and/or components , but does not preclude the presence or addition of one or more other features, regions, integers, steps, operations, elements, components and/or groups thereof.
除非另外定義,否則本文使用的所有術語(包括技術和科學術語)具有與本公開所屬領域的普通技術人員通常理解的相同的含義。此外,除非文中明確定義,諸如在通用字典中定義的那些術語應所述被解釋為具有與其在相 關技術和本公開內容中的含義一致的含義,並且將不被解釋為理想化或過於正式的含義。 Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. Also, unless clearly defined in context, terms such as those defined in general dictionaries shall be construed as having the same The meaning is consistent with the meaning in the related technology and this disclosure, and is not to be interpreted as an idealized or overly formal meaning.
將結合圖1至圖7中的附圖對示例性實施例進行描述。具體實施方式將參考附圖來詳細描述本公開,其中,所描繪的元件不必按比例示出,並且通過若干視圖,相同或相似的附圖標記由相同或相似的附圖標記表示相同或相似的元件。 Exemplary embodiments will be described in conjunction with the drawings in FIGS. 1 to 7 . DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present disclosure will be described in detail with reference to the accompanying drawings, wherein the depicted elements are not necessarily to scale and wherein the same or similar reference numerals are designated by the same or similar reference numerals throughout the several views element.
圖1示出了根據本公開的一些實施例的電化學系統的側視示意圖。為了說明簡單和清楚起見,示例性系統的一些細節/子組件未在本圖中明確標記/示出。 1 shows a schematic side view of an electrochemical system according to some embodiments of the present disclosure. For simplicity and clarity of illustration, some details/subcomponents of the exemplary system are not explicitly labeled/shown in this figure.
電化學系統供人為操作,以對工件進行電化學加工(例如對工件進行表面拋光、去毛邊和導角等處理)。在一些實施例中,電化學系統可以包含治具以及電化學設備;治具一般被用來導引或維持工件及工具之間的相對位置,電化學設備則供人為操作來間接操控治具。操作人員經由操作該電化學設備,可以間接控制治具的作動,以便對工件進行加工。例如,在圖1所示的電化學系統100中,治具包含組配來承載工件w的治具下模110及位其上方的治具上模120;所述電化學設備則包含組配來提供電解液給所述治具的流體供應系統130、組配來提供直流電給治具的電源供應系統140、組配來控制治具上模120相對於治具下模110移動的升降系統150。
Electrochemical systems are used for human operation to electrochemically process workpieces (such as surface polishing, deburring, and chamfering of workpieces). In some embodiments, the electrochemical system may include a jig and an electrochemical device; the jig is generally used to guide or maintain the relative position between the workpiece and the tool, and the electrochemical device is used by humans to indirectly control the jig. By operating the electrochemical device, the operator can indirectly control the action of the fixture in order to process the workpiece. For example, in the
在本實施例中,所述治具下模110具有組配來承載待加工的工件w的承載座111、以及作為電化學加工工藝的陰極的第一電極單元(陰電極單元)112。承載座111具有足夠的硬度來承載工件w及第一電極單元112,且可以採用其他能具有支撐功能的結構設計,而不以圖1所示的結構設計為限。若工件w的方位錯誤,可能會在加工過程中導致治具或工件的損毀。示例性的承載座111被設計為進一步提供固定所述工件w的方位的功能。例如,承載座111具
有組配來安裝於前述電化學設備的下安裝板件111b及位於下安裝板件111b頂側的定向結構111c;所述定向結構111c具有能夠固定所述工件w的方位的結構設計,定向結構111在一些例子中可以被實施為固定設置在下安裝板件111b的座體,並包含多個供所述工件w插設的防呆柱111d。
In this embodiment, the jig
在圖示的實施例中,工件w大致呈長方體並具有多個從表面凹陷的溝槽(例如橫向溝槽w10及與橫向溝槽w10呈流體連通的縱向溝槽w20)。在一些操作情況中,防鎖死煞車系統(Antilock Brake System,ABS)的液壓控制單元(Hydraulic Control Unit,HCU)中的岐流塊(Manifold Block)可以作為待加工的工件w。在一些實施例中,所述治具下模110還進一步包含與流體供應系統130流體連通的縱向(z方向)的流道結構(例如形成在座體111c的流道結構111e);當所述歧流塊(工件w)已被定向地擺設於所述定向結構111c時,流道結構111e與縱向溝槽w20流體連通。在此狀態下,當流體供應系統130提供流體(例如電解液)至所述治具下模110時,流體可以經由流道結構111e進入縱向溝槽w20。
In the illustrated embodiment, the workpiece w is substantially cuboid and has a plurality of grooves recessed from the surface (eg, a transverse groove w10 and a longitudinal groove w20 in fluid communication with the transverse groove w10). In some operating situations, the Manifold Block (Manifold Block) in the Hydraulic Control Unit (HCU) of the Antilock Brake System (ABS) can be used as the workpiece w to be machined. In some embodiments, the jig
所述第一電極單元(陰電極單元)112設置於所述承載座111,組配來電連接所述電源供應系統140的陰極,並能從多個方向(例如x、y方向)提供(陰)電極探針至所述工件w的橫向溝槽w10內。具體來說,所述第一電極單元112包含多個佈設在所述定向結構111c周圍的電極模組113,其分別組配來提供電極探針所述工件w。各電極模組113具體地包含設於所述承載面111a的驅動機構116、受驅動機構116驅動在一行進方向(例如圖示的x方向)上往復移動的探針座114、及安裝於探針座114的電極探針115。圖1的實施例僅示出一個第一電極單元122,且所示的各第一電極單元122僅被示為包括兩個電極模組113;實際上,該第一電極單元122至少還具有一個未在圖1中示出的電極模組,其探針座的移動方向(y方向)大致正交於圖示的探針座114的移動
方向(x方向)。在圖示的實施例中,電極模組113是安裝在承載座111所定義的承載面111a,且所述承載面111a大致呈平坦狀,故所述多個探針座114大致在相同的高度(相對於所述承載面111a)移動。
The first electrode unit (cathode electrode unit) 112 is disposed on the
在一些實施例中,電極模組113的驅動機構116包含固定於所述承載面111a的底座116a、自所述底座116a朝所述定向結構111c延伸的導引桿116b、安裝於所述底座116a上的氣壓缸116c、受氣壓缸116c驅動的驅動件116d、及連接在所述探針座114及驅動件116d之間的連接件116e。在圖示的實施例中,所述連接件116e配置成穿設於所述驅動機構116的導引桿116b;當所述驅動件116d受所述氣壓缸116c驅動,則帶動所述探針座114在其行進方向(例如導引桿116b的延伸方向、圖示的x方向)上於一插入位置及一遠離位置(例如圖1所示的當前位置)之間往復移動。當探針座114處於插入位置時,所述電極探針115伸入所述工件w的橫向(例如圖示的x方向)溝槽w10;當探針座114處於遠離位置時,所述電極探針115移出橫向溝槽w10。在一些實施例中,所述電化學設備還包含氣體供應系統(圖未示出),其組配來提供一定氣壓的氣體給該驅動機構116的氣壓缸116c,以供所述氣壓缸116c作動而驅使探針座114橫向(x方向)移動。在一些實施例中,所述治具下模110還具有多個流體連通於所述氣壓缸116c的氣道結構(圖未示出,例如軟管);所述氣體供應系統包含多個供所述氣道結構組裝的氣壓接頭(圖未示出)。雖然本文是以汽缸式的驅動機構作為例子,所屬技術領域具有通常知識者應可理解,在其他的實施態樣中,驅動機構可以採用其他形式,例如馬達。
In some embodiments, the
所述技術領域具有通常知識者可以理解到,探針座114可以採用任何能連接於所述驅動機構(例如驅動機構116)且供所述電極探針(例如電極探針115)安裝的結構設計,而不以圖1當前所示的結構為限。例如,在一些實施例中,探針座114可以被設計為形成多數個面向工件w的盲孔以供所述電
極探針115插設。
Those with ordinary knowledge in the technical field can understand that the
所述電極探針115設於所述探針座114,包含至少一個指向所述工件w的端部。本實施例中,每一電極模組113在當前視角被示為具有兩個電極探針115,每一電極探針115具有一端部115a。在其他的實施例中,所述多個電極模組可以分別具有相同或不同數量的電極探針。當探針座114處於插入位置時,所述電極探針115的端部115a伸入所述工件w的橫向溝槽w10,但不與所述工件w接觸。可以理解的是,電極探針可以採用其他能使端部115a伸入橫向溝槽w10的結構設計,不以圖示為限;例如,在其他的實施例中,一個電極探針可以採用叉狀結構而具有兩個以上的端部。圖示的實施例中,電極探針115的具有連接於端部115a(電極探針的組配來伸入所述工件w的橫向溝槽w10的部分)的頸部115b,端部115a具有較頸部大的直徑。在一些實施態樣中,所述電極探針115的端部115a的直徑不大於5mm,例如5mm或2.3mm。這樣的直徑允許電極探針115的端部115a伸入工件w的橫向凹槽w10(例如具有6mm的孔徑)。在一些實施態樣中,所述端部115a直徑數值與所述橫向凹槽w10的孔徑數值之間的差異不大於1mm,從而能確保電化學加工的效果。
The
在一些實施例中,所述治具上模120包括上安裝板件121及設置其上的第二電極單元122。所述第二電極單元122可以作為治具的陽極,並包含導電件123及墊塊124。所述導電件123組配來電連接電源供應系統140的陽極,並設置為可與承載座111相對移動以接觸工件w。所述墊塊124設置為與所述導電件123同時移動,墊塊124形成有流道結構124a及朝向所述承載面111a的出液口124b,且所述流道結構124a對齊所述工件的縱向溝槽w20。在一些實施例中,出液口124b的數量為四且形成在墊塊124底面。在其他實施例中,出液口124b的數量為可以是一個以上。在一些實施例中,導電件123及墊塊124固定設置於所述上安裝板件121的底側,且導電件123及墊塊124在縱
向(z方向)上與工件w重疊;當上安裝板件121受升降系統150驅動而在垂直方向(z方向)向下移動,則導電件123及墊塊124同時跟隨安裝板件121向下移動,以使得導電件123與工件w接觸。
In some embodiments, the jig
在一些實施例中,當所述導電件123接觸工件w時,所述墊塊124底面接觸所述工件w的頂面,以使墊塊124的流道結構124a與工件的縱向溝槽w20對接。此時,當流體供應系統130提供電解液給該治具上模120,則電解液經由墊塊124的流道結構124a流出出液口124b,並進入工件的縱向溝槽w20及橫向溝槽w10。此外,在一些實施例中,墊塊124(例如包含優力膠等橡膠之材料)的硬度可以被設計為比導電件123(例如由鋁構成)及工件w(例如由鋁構成)還要低,且墊塊124的底面被設計為相對低於(相對於承載面111a)所述導電件123的底面;當所述導電件123被驅使至接觸工件w時,墊塊124底面與所述導電件123的底面齊平,此時,墊塊124受壓並迫緊所述工件w。在一些操作情況中,墊塊124受壓並迫緊所述工件w可以使得流體供應系統130所提供的電解液將難以從工件w與墊塊124的交界處外溢,也難以從工件w與定向結構111c(例如包含優力膠等相對軟於工件w的材料)的交界處外溢。
In some embodiments, when the
在本實施例中,第二電極單元122被圖示為包含兩導電件123,其彼此相間隔的固設於上安裝板件121,且墊塊124接觸地夾設在所述兩導電件123之間而能受到兩導電件123所提供的側向(例如x方向)支撐力。此外,墊塊124底面的側向(例如x方向)寬度被設計為不大於(例如小於)工件w頂面的側向寬度,以允許位於墊塊124兩相反側的兩導電件123都能接觸工件w(例如接觸於工件w的頂面及/或側面)。在圖示的實施態樣中,墊塊124被設計為與所述第一電極單元113的所述探針座114(被圖示處於遠離位置)在投影方向(z方向)上呈錯位設置。在其他的實施態樣中,當探針座114處於插入位置,墊塊124及探針座114在縱向(z方向)上的平行投影範圍也不重疊。在
其他實施例中,導電件的數量可以是一個或三個以上。
In this embodiment, the
所述流體供應系統130組配來提供電解液(例如硝酸鈉)給該治具上模120,該治具上模120還組配來將所述電解液經由所述第二電極單元122的墊塊124的流道結構124a,自所述出液口124b流出,使得所述電解液流過工件w的縱向溝槽w20及橫向溝槽w10而與電極探針的端部接觸。在一些實施例中,所述治具上模120的上安裝板件121具有與所述流道結構124a流體連通的快拆入水公頭(圖未示出);所述流體供應系統130則具有供對應組接於前述快拆入水公頭的快拆出水母頭。
The
在一些實施例中,所述流體供應系統130還組配來提供電解液給該治具下模110,該治具下模110還組配來將所述電解液經由所述支撐座111c的流道結構111e,向上(z方向)流出。在一些實施例中,所述治具下模110的下安裝板件111具有與前述支撐座111c的流道結構111e呈流體連通的快拆入水公頭(圖未示出);所述流體供應系統130則具有供對應組接於前述下安裝板件111的快拆入水公頭的快拆出水母頭。所述流體供應系統130所提供的電解液可以經由所述流道結構124a的出液口124b向下流出。
In some embodiments, the
在一些實施例中,電源供應系統140包括多個陰極接點(圖未示出)及多個陽極接點(圖未示出);所述第一電極單元112的各電極模組113還具有組配來與電源供應系統140的陰極接點電連接的導電線;第二電極單元120還具有組配來電連接各導電件123與電源供應系統140的陽極接點的導電線。
In some embodiments, the
在一些實施例中,所述升降系統150包含機台下板151、機台上板152、升降軸153。所述機台下板151、機台上板152分別組配來供所述治具下模110的下安裝板件111及治具上模120的上安裝板件121安裝其上。所述升降軸153組配來驅使所述機台上板152(連同安裝其上的治具上模120)相對於機台下板151在高度方向(z方向)上移動。在一些實施態樣中,升降軸
153組配來驅使所述機台上板152向下移動,使得陽極單元122的導電件123接觸工件w。在其他的實施態樣中,升降系統可以組配來驅使所述機台下板151向上移動,使得導電件123接觸工件w。
In some embodiments, the
在一些實施例中,所述電化學設備還包含控制系統(圖未示出),其組配來控制所述流體供應系統130、電源供應系統140、升降系統150、及氣體供應系統(圖未示出)之操作,從而能控制所述治具上模120的升降移動、驅動機構116的作動、電解液的供給、及第一、二電極單元112、122的之間的電壓。在一些實施例中,所述控制系統進一步包括操作面板(圖未示出),供人為輸入指令以進行所述操作。
In some embodiments, the electrochemical device further includes a control system (not shown) configured to control the
在一些實施態樣中,所述電化學系統100的電化學設備還包含探針接觸感測器160,其與所述第一電極單元112的所述電極探針115信號相連,配置來偵測所述電極探針115與工件w接觸與否。在一些實施態樣中,所述探針接觸感測器160包含短路偵測電路,其信號連接於所述第一電極單元112的所述電極探針113及所述第二電極單元122的所述導電件124。在電流供應系統140已提供電壓至第一、第二電極單元112、122的情況下,當電極探針115及導電件123同時接觸工件w時,短路偵測電路將感測信號傳送至控制系統,以使控制系統根據所述感測信號產生視覺或聽覺上可辨識的警示輸出以供操作者知悉。在其他的實施態樣中,探針接觸感測器160可以採用其他接觸感測效果的感測器,例如霍爾效應傳感器。
In some embodiments, the electrochemical device of the
圖2示出了根據本公開的一些實施例的電化學系統的治具下模210的俯視示意圖。為了說明簡單和清楚起見,示例性系統的一些細節/子組件未在本圖中明確標記/示出。
FIG. 2 shows a schematic top view of a
治具下模210包括承載座211及兩個第一(陰)電極單元212,各第一電極單元212包含四個電極模組213a、213b、213c、213d。
The jig
各所述電極模組(例如電極模組213b)包含設於所述承載座211的承載面211a的驅動機構216、受驅動機構216驅動在一行進方向(例如圖示的x方向)上往復移動的探針座214、及安裝於探針座214的電極探針215。在一些實施例中,所述驅動機構216包含固定於所述承載面的底座(圖未示出)、自所述底座116a朝所述定向結構211c延伸的導引桿(圖未示出)、安裝於所述底座上的氣壓缸216c、及連接在所述探針座214及氣壓缸216c之間的連接件216d。當所述連接件216d受所述氣壓缸216c驅動,則帶動所述探針座214在其行進方向(例如圖示的x方向)上往復移動。
Each of the electrode modules (eg, the
在一些實施例中,所述探針座214受驅動機構216驅使而在一插入位置及一遠離位置(例如圖1所示的當前位置)之間移動。當探針座214處於插入位置時,所述電極探針215伸入工件w的橫向溝槽(例如圖示的沿x方向延伸的虛線所示)。
In some embodiments, the
所述多個電極模組213a、213b、213c、213d中相臨兩個(例如電極模組213a、213b)的探針座214的行進方向在俯視圖中大致呈正交。如此一來,可以在將工件w固定後使所述探針的端部分別朝向工件w的兩個大致呈正交的側面移動。在一些情況中,工件w具有大致呈正交的多個橫向流道(如圖中的沿x、y方向延伸的虛線所示),且部分呈正交的橫向流道相互流體連通。在一些實施例中,工件w的多個橫向流道與縱向流道流體連通。在圖示的實施例中,電極模組213a(213b)的探針座214受驅動機構216的驅動在x方向(y方向)上移動,且x方向及y方向之間的夾角為90度,而能使探針215伸入到工件w的大致呈正交的多個橫向流道。
The traveling directions of the probe bases 214 of two
在圖示的實施例中,每一電極模組213具有不同數量的電極探針215,每一電極探針215的直徑及長度可以不同。當探針座214處於插入位置時,所述電極探針215的端部伸入工件w的橫向溝槽,但不與所述工件w接觸。圖
示的實施例中,電極探針215的外露於探針座214的區段整體具有與端部215a大致相同的直徑。在其他的實施例中,端部(電極探針的組配來伸入所述工件w的橫向溝槽的部分)可以被設計為相對窄於(或相對寬於)電極探針的其他區段。在一些實施態樣中,所述電極探針213的端部的直徑不大於5mm,例如5mm或2.3mm。
In the illustrated embodiment, each electrode module 213 has a different number of electrode probes 215, and the diameter and length of each
在一些實施例中,所述第一電極單元212被設置為其所包含的四個電極模組213a、213b、213c、213d中相臨兩個(例如電極模組213a、213b)的探針座214不會被同時驅動至插入位置,從而避免電極探針215相互碰觸而損毀。例如,前述控制系統可以進一步組配來控制使彼此相對的兩個電極模組(例如213a、213c)的探針座214同步移動至插入位置,並在使該兩電極模組(例如213a、213c)移回至遠離位置後,再使另一對電極模組(例如213b、213d)的探針座214同步移動至插入位置。
In some embodiments, the
第3圖示出了根據本公開的一些例示性電化學系統的加工方法的流程圖。該電化學系統的加工方法的實施例包含程序S301至S312,具體說明如下。 Figure 3 shows a flowchart of a method of processing some exemplary electrochemical systems in accordance with the present disclosure. The embodiment of the processing method of the electrochemical system includes the procedures S301 to S312, which are specifically described as follows.
程序S301:接收工件於承載座的承載面上,所述工件具有溝槽(例如縱向、橫向溝槽w10、w20)。例如,在圖1所示的實施例中,工件w被擺設於定向結構111c而位於承載座111的承載面111a上方。在其他的實施態樣中,承載座可以被設計為由其承載面接觸地接收工件。
Procedure S301: Receive a workpiece on the bearing surface of the bearing seat, the workpiece having grooves (eg, longitudinal and transverse grooves w10, w20). For example, in the embodiment shown in FIG. 1 , the workpiece w is placed on the
程序S302:操作設置在前述承載座上方的陽電極單元(例如第二電極單元122),驅使所述陽電極單元與所述承載座相對移動而接觸所述工件。所述陽電極單元包含導電件(例如導電件123)及設置為與所述導電件同時移動的墊塊(例如墊塊124),所述墊塊其內形成有流道結構(例如流道結構124a),所述流道結構具有朝向所述承載面的出液口(例如出液口124b)。在一些操作
情境中,使用者可以操作控制面板,使升降系統(例如升降系統150)讓治具上模(例如治具上模120)向下移動而使氣體供應系統(圖未示出)提供一定氣壓的氣體給陰電極模組的氣壓缸(例如氣壓缸116c),從而使陽電極單元(例如第二電極單元122)的導電件(例如導電件123)與所述工件接觸。
Procedure S302 : Operate the anode electrode unit (eg, the second electrode unit 122 ) disposed above the bearing seat, and drive the anode electrode unit and the bearing seat to move relatively to contact the workpiece. The anode electrode unit includes a conductive member (eg, the conductive member 123 ) and a pad (eg, the pad 124 ) arranged to move simultaneously with the conductive member, and the pad is formed with a flow channel structure (eg, a flow channel structure) 124a), the flow channel structure has a liquid outlet (eg, a
程序S303:操作設於所述承載面上的多個陰電極模組(例如電極模組113),所述陰電極模組具有設在探針座(例如探針座114)的電極探針(例如電極探針115),驅使所述多個陰電極模組中相臨兩個(例如電極模組213a、213b)的探針座(例如探針座214)在大致呈正交的行進方向(例如圖2所示的x方向及y方向)上靠近所述工件,使得所述電極探針(例如電極探針215)伸入所述工件的溝槽。在一些操作情境中,使用者可以操作控制面板,使氣體供應系統提供一定氣壓的氣體給陰電極模組的氣壓缸(例如氣壓缸116c),從而使氣壓缸推動探針座(例如探針座114)移動到插入位置而使電極探針(例如電極探針115)伸入所述工件的溝槽。
Procedure S303: Operate a plurality of cathode electrode modules (eg, the electrode modules 113 ) disposed on the carrying surface, the cathode electrode modules having electrode probes (eg, the probe base 114 ) disposed on the probe base For example, the electrode probe 115), the probe bases (such as the probe base 214) of the adjacent two (such as the
在一些操作情況中,四個電極模組(例如電極模組213a、213b、213c、213d)中相臨兩個(例如電極模組213a、213b)的探針座214不會同時被驅動至插入位置,從而避免電極探針215相互碰觸而損毀。例如,使用者可以操作控制面板,使彼此相對的兩個電極模組(例如213a、213c)的探針座(例如探針座214)同步移動至插入位置,並在使該兩電極模組(例如213a、213c)移回至遠離位置後,再使另一對電極模組(例如213b、213d)的探針座同步移動至插入位置。
In some operating conditions, the
程序S304:在所述陰電極模組(例如電極模組113)及所述陽電極單元(例如第二電極單元122)之間施加第一電壓。在一些操作情境中,使用者可以操作控制面板,使電流供應系統(例如電流供應系統140)提供直流電給述陰電極模組及所述陽電極單元。 Procedure S304: Apply a first voltage between the cathode electrode module (eg, the electrode module 113 ) and the anode electrode unit (eg, the second electrode unit 122 ). In some operating scenarios, a user may operate a control panel to cause a current supply system (eg, current supply system 140 ) to provide DC power to the cathode electrode module and the anode electrode unit.
在一些實施例中,程序S302、程序S303及程序S304的順序可以互換。 In some embodiments, the sequence of procedure S302, procedure S303, and procedure S304 may be interchanged.
程序S305:藉由與所述陰電極探針(例如電極探針115)信號相連的探針接觸感測器(例如探針接觸感測器160),偵測所述電極探針與工件接觸與否,並產生對應的感測信號。在一些實施例中,所述控制系統根據所述感測信號使所述控制面板產生一個指示出工件與陰電極探針(例如電極探針115)是否接觸的輸出;所述輸出可以是視覺或聽覺上的輸出,且可供使用者辨識。 Procedure S305: Detect the contact between the electrode probe and the workpiece by the probe contact sensor (eg, the probe contact sensor 160) signally connected to the cathode electrode probe (eg, the electrode probe 115). No, and generate the corresponding sensing signal. In some embodiments, the control system causes the control panel to generate an output indicating whether the workpiece is in contact with a cathode electrode probe (eg, electrode probe 115 ) based on the sensed signal; the output may be a visual or Audible output that can be identified by the user.
當所述感測信號指示所述陰電極探針未與工件接觸時,流程進入程序S306:操作流體供給裝置(例如流體供給裝置130),提供電化學液(例如硝酸鈉)至所述工件的溝槽,使得電解液不僅接觸工件,還通過工件的橫向溝槽與電極探針的端部接觸。 When the sensing signal indicates that the cathode electrode probe is not in contact with the workpiece, the process proceeds to step S306 : operate a fluid supply device (eg, the fluid supply device 130 ) to provide an electrochemical fluid (eg, sodium nitrate) to the workpiece. grooves, so that the electrolyte not only contacts the workpiece, but also contacts the end of the electrode probe through the lateral grooves of the workpiece.
程序S307:在所述陰電極模組、電解液、及所述陽電極單元之間施加第二電壓,以對工件進行去毛邊的加工。 Procedure S307: Apply a second voltage between the cathode electrode module, the electrolyte, and the anode electrode unit to perform deburring processing on the workpiece.
程序S308:操作所述多個陰電極模組,使其探針座移動至遠離位置。在一些操作情境中,使用者可以操作控制面板,使氣體供應系統提供一定氣壓的氣體給陰電極模組的氣壓缸(例如氣壓缸116c),從而使氣壓缸推動探針座(例如探針座114)移動到遠離位置而使電極探針(例如電極探針115)移離所述工件的溝槽。
Procedure S308: Operate the plurality of cathode electrode modules to move their probe bases to a distant position. In some operating situations, the user can operate the control panel to make the gas supply system provide gas with a certain pressure to the pneumatic cylinder (eg, the
程序S309:操作前述陽電極單元,使其遠離所述工件。如此,能允許工件通過手動或自動(例如機械手臂)的方式被移離承載座,以便將另一個待加工的工件擺放於承載座。在一些實施例中,程序S308及程序S309的順序可以互換。 Procedure S309: Operate the aforementioned anode electrode unit to keep it away from the workpiece. In this way, the workpiece can be allowed to be moved away from the carrier by manual or automatic (eg robotic arms), so that another workpiece to be processed can be placed on the carrier. In some embodiments, the order of procedure S308 and procedure S309 may be interchanged.
在一些操作情境中,使用者在根據所述輸出辨識出所述陰電極探針未與工件接觸時,可以操作控制面板來執行程序S306~S309。在一些實施例 中,控制系統可以被設計為在探針接觸感測器判定出陰電極探針未與工件接觸時,自動執行S306~S309其中至少一者。 In some operating situations, when the user recognizes that the cathode electrode probe is not in contact with the workpiece according to the output, the user can operate the control panel to execute the procedures S306 - S309 . In some embodiments Among them, the control system may be designed to automatically execute at least one of S306 to S309 when the probe contact sensor determines that the cathode electrode probe is not in contact with the workpiece.
當所述感測信號指示所述陰電極探針與工件接觸時,流程進入程序S310:驅使所述陰電極探針移出所述工件的溝槽。在一些情況中,陰電極探針與工件接觸代表工件的結構不符規格,而沒有對其進行加工的必要。因此,藉由執行程序S305,且在陰電極探針與工件接觸時停止對其加工,可以另外獲得對篩選出符合規格的工件的效果,且節約加工成本。 When the sensing signal indicates that the cathode electrode probe is in contact with the workpiece, the process proceeds to a procedure S310: the cathode electrode probe is driven to move out of the groove of the workpiece. In some cases, the contact of the cathode electrode probe with the workpiece indicates that the structure of the workpiece is out of specification, and machining of it is not necessary. Therefore, by executing the program S305 and stopping the machining of the cathode electrode probe when it is in contact with the workpiece, the effect of screening out the workpiece that meets the specification can be additionally obtained, and the machining cost can be saved.
程序S311:操作所述陽電極單元,使其遠離工件。 Procedure S311: Operate the anode electrode unit to keep it away from the workpiece.
在一些操作情境中,使用者可以藉由操作控制系統來執行程序S310~S311。在一些實施例中,控制系統可以被設計為在探針接觸感測器判定出在陰電極探針與工件接觸時,自動執行程序S310~S311其中至少一者。 In some operating situations, the user may execute the procedures S310 - S311 by operating the control system. In some embodiments, the control system may be designed to automatically execute at least one of the procedures S310 to S311 when the probe contact sensor determines that the cathode electrode probe is in contact with the workpiece.
第4圖示出了根據本公開的一些例示性探針座的探針分佈圖案的示意圖。在圖示的實施例中,探針座414具有一個安裝面414a,安裝有六個彼此相間隔的探針415a~f。在一些實施例中,安裝面414a呈大致正交於探針座414的行進方向。在一些實施例中,各該探針415a~f可以被配置為在高度方向(z方向)及\或寬度方向(y方向)上呈非等距分佈。例如,在該等探針415a~f其中的三個位於不同高度(相對於探針座414的底側414b)的探針(例如探針415d、415e及415f)之間,所存在的三個高度差值(例如H41、H42、H43)的比例關係呈非整數。在一些實施例中,高度差值H41大約為4mm;高度差值H42大約為11mm;高度差值H43大約為15mm。在本實施例中,各該探針415a~f在寬度方向(y方向)也不是呈等距分佈。
Figure 4 shows a schematic diagram of probe distribution patterns of some exemplary probe blocks according to the present disclosure. In the illustrated embodiment, the
在圖示的實施例中,安裝面414a的輪廓呈矩型,探針415a~f在探針座414上的所構成的圖案可以被設計為與底側414b(安裝面414a的長邊)的垂直平分線L呈軸對稱,而且不軸對稱於短邊的垂直平分線。在其他的實施
態樣中,安裝面414a的輪廓可以被實施為其他形狀例如橢圓形或具有圓角的矩型。
In the illustrated embodiment, the outline of the mounting
第5圖示出了根據本公開的一些例示性探針座的探針分佈圖案的示意圖。在圖示的實施例中,探針座514具有一個安裝面514a,安裝有四個彼此相間隔的探針515a~d。在圖示的實施例中,各該探針515a~d被配置為在寬度方向(y方向)上呈非等距分佈。例如,在該等探針515a~d其中的三個在寬度方向上位於不同位置的探針(例如探針515a、515b及515c)之間,彼此間在寬度方向上的三個間距(例如W51、W52、W53)的比例關係呈非整數。在一些實施例中,間距W51大約為4.2mm;間距W52大約為29.8mm;間距W53大約為34mm。
Figure 5 shows a schematic diagram of probe distribution patterns of some exemplary probe blocks according to the present disclosure. In the illustrated embodiment, the
第6圖示出了根據本公開的一些例示性探針座的探針分佈圖案的示意圖。在圖示的實施例中,安裝於探針座614的各該探針615被配置為在寬度方向(y方向)及高度方向(z方向)上呈非等距分佈。
Figure 6 shows a schematic diagram of probe distribution patterns of some exemplary probe blocks according to the present disclosure. In the illustrated embodiment, the
第7圖示出了根據本公開的一些例示性探針座的探針分佈圖案的示意圖。在圖示的實施例中,安裝於探針座714的各該探針715被配置為在寬度方向(y方向)及高度方向(z方向)上呈非等距分佈。
FIG. 7 shows a schematic diagram of probe distribution patterns of some exemplary probe blocks according to the present disclosure. In the illustrated embodiment, the
於是,本公開提供一種電化學系統,其包含具有承載面的承載座及第一電極單元。所述第一電極單元包含多個電極模組,各所述電極模組包含探針座、電極探針、及驅動機構。所述電極探針設於所述探針座,包含至少一個端部。所述驅動機構設於所述承載座的承載面,組配來驅動所述探針座在一行進方向上往復移動。其中,所述多個電極模組中相臨兩個的行進方向大致呈正交。 Therefore, the present disclosure provides an electrochemical system, which includes a bearing base having a bearing surface and a first electrode unit. The first electrode unit includes a plurality of electrode modules, and each of the electrode modules includes a probe seat, an electrode probe, and a driving mechanism. The electrode probe is arranged on the probe base and includes at least one end. The driving mechanism is arranged on the bearing surface of the bearing seat, and is assembled to drive the probe seat to reciprocate in a traveling direction. Wherein, the traveling directions of two adjacent ones of the plurality of electrode modules are substantially orthogonal.
在一些實施態樣中,所述電極探針的端部的直徑不大於5mm。 In some embodiments, the diameter of the end of the electrode probe is not greater than 5 mm.
在一些實施態樣中,所述電化學系統還包含第二電極單元。所述 第二電極單元包含導電件及墊塊。所述導電件設置為可與承載座在垂直方向上相對移動以接觸工件。所述墊塊設置為與所述導電件同時移動,其內形成有流道結構,所述流道結構具有朝向所述承載面的出液口。 In some embodiments, the electrochemical system further includes a second electrode unit. said The second electrode unit includes a conductive member and a spacer. The conductive member is arranged to be movable relative to the carrier in a vertical direction to contact the workpiece. The spacer block is configured to move simultaneously with the conductive member, and a flow channel structure is formed therein, and the flow channel structure has a liquid outlet facing the bearing surface.
在一些實施態樣中,所述第二電極單元的墊塊與所述第一電極單元的所述探針座在投影方向上呈錯位設置。 In some implementations, the spacer of the second electrode unit and the probe seat of the first electrode unit are arranged in a staggered position in the projection direction.
在一些實施態樣中,所述電化學系統還包含探針接觸感測器,其與所述第一電極單元的所述電極探針信號相連,配置來偵測所述電極探針與工件接觸與否。 In some implementation aspects, the electrochemical system further includes a probe contact sensor, signally coupled to the electrode probe of the first electrode unit, configured to detect contact of the electrode probe with a workpiece or not.
在一些實施態樣中,所述探針接觸感測器包含短路偵測電路,其信號連接於所述第一電極單元的所述電極探針及所述第二電極單元的所述導電件。 In some implementations, the probe contact sensor includes a short circuit detection circuit, the signal of which is connected to the electrode probe of the first electrode unit and the conductive member of the second electrode unit.
在一些實施態樣中,所述墊塊的硬度相對小於所述導電件,且墊塊的底面相對低於所述導電件的底面。 In some embodiments, the hardness of the spacer is relatively smaller than that of the conductive member, and the bottom surface of the spacer is relatively lower than the bottom surface of the conductive member.
在一些實施態樣中,所述第二電極單元包含兩所述導電件,且所述墊塊接觸地夾設在所述兩導電件之間。 In some embodiments, the second electrode unit includes two conductive members, and the pad is sandwiched between the two conductive members in contact.
在一些實施態樣中,所述墊塊底面的側向(例如x方向)寬度不大於工件頂面的側向寬度。 In some embodiments, the lateral (eg, x-direction) width of the bottom surface of the spacer is not greater than the lateral width of the top surface of the workpiece.
於是,本公開提供一種電化學系統的加工方法,包含:接收工件於承載座的承載面上,所述工件具有溝槽;及操作設於所述承載面上的多個陰電極模組,所述陰電極模組具有設在探針座的電極探針,驅使所述多個陰電極模組中相臨兩個的探針座在大致呈正交的行進方向上靠近所述工件,使得所述電極探針伸入所述工件的溝槽。 Therefore, the present disclosure provides a processing method of an electrochemical system, comprising: receiving a workpiece on a bearing surface of a bearing seat, the workpiece having grooves; and operating a plurality of cathode electrode modules disposed on the bearing surface, so that the The cathode electrode module has electrode probes arranged on the probe seat, and the two adjacent probe seats in the plurality of cathode electrode modules are driven to approach the workpiece in a substantially orthogonal travel direction, so that all the The electrode probe extends into the groove of the workpiece.
在一些實施態樣中,所述電化學系統的加工方法還包含:操作設置在前述承載座上方的陽電極單元,驅使所述陽電極單元與所述承載座相對移 動而接觸所述工件;其中,所述陽電極單元包含導電件及設置為與所述導電件同時移動的墊塊,所述墊塊其內形成有流道結構,所述流道結構具有朝向所述承載面的出液口。 In some embodiments, the processing method of the electrochemical system further comprises: operating the anode electrode unit disposed above the bearing seat to drive the anode electrode unit to move relative to the bearing seat contact the workpiece; wherein, the anode electrode unit includes a conductive member and a pad set to move at the same time with the conductive member, and a flow channel structure is formed in the pad block, and the flow channel structure has a direction toward the The liquid outlet of the bearing surface.
在一些實施態樣中,所述電化學系統的加工方法還包含:藉由與所述陰電極探針信號相連的探針接觸感測器,偵測所述電極探針與工件接觸與否,並產生對應的感測信號。 In some implementation aspects, the processing method of the electrochemical system further comprises: detecting whether the electrode probe is in contact with the workpiece through a probe contact sensor signally connected to the cathode electrode probe, and generate corresponding sensing signals.
在一些實施態樣中,所述電化學系統的加工方法還包含:當所述感測信號指示所述陰電極探針未與工件接觸時,操作流體供給裝置,提供電化學液至所述工件的溝槽;及當所述感測信號指示所述陰電極探針與工件接觸時,驅使所述陰電極探針移出所述工件的溝槽。 In some implementation aspects, the method for machining the electrochemical system further comprises: when the sensing signal indicates that the cathode electrode probe is not in contact with the workpiece, operating a fluid supply device to provide an electrochemical fluid to the workpiece and when the sensing signal indicates that the cathode electrode probe is in contact with the workpiece, the cathode electrode probe is driven to move out of the groove of the workpiece.
惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the above are only examples of the present invention, and should not limit the scope of the present invention. All simple equivalent changes and modifications made according to the scope of the application for patent of the present invention and the contents of the patent specification are still within the scope of the present invention. within the scope of the invention patent.
100:電化學系統 100: Electrochemical Systems
110:治具下模 110: Fixture lower die
120:治具上模 120: Fixture upper die
130:流體供應系統 130: Fluid Supply System
140:電源供應系統 140: Power Supply System
150:升降系統 150: Lifting system
160:探針接觸感測器 160: Probe touch sensor
112:第一電極單元 112: The first electrode unit
w:工件 w: workpiece
111:承載座 111: Bearing seat
111b:下安裝板件 111b: Lower mounting plate
111c:定向結構 111c: Orientation Structures
111d:防呆柱 111d: foolproof column
w10:橫向溝槽 w10: Lateral groove
w20:縱向溝槽 w20: longitudinal groove
111e:流道結構 111e: Runner structure
113:電極模組 113: Electrode module
116:驅動機構 116: Drive mechanism
114:探針座 114: Probe holder
115:電極探針 115: Electrode probe
116a:底座 116a: Base
116b:導引桿 116b: Guide rod
116c:氣壓缸 116c: Pneumatic cylinder
116d:驅動件 116d: Driver
116e:連接件 116e: Connector
121:上安裝板件 121: Upper mounting plate
122:第二電極單元 122: The second electrode unit
123:導電件 123: Conductive parts
124:墊塊 124: Spacer
124a:流道結構 124a: runner structure
151:機台下板 151: Machine lower board
152:機台上板 152: Machine board
153:升降軸 153: Lifting shaft
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TW202012082A (en) * | 2018-09-29 | 2020-04-01 | 大陸商山東豪邁機械科技股份有限公司 | Electric machining machine tool, electrode assembly in electric machining machine tool and machining method |
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TW202012082A (en) * | 2018-09-29 | 2020-04-01 | 大陸商山東豪邁機械科技股份有限公司 | Electric machining machine tool, electrode assembly in electric machining machine tool and machining method |
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