TWI759833B - Burn-in apparatus with functional testing for processor - Google Patents
Burn-in apparatus with functional testing for processor Download PDFInfo
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Abstract
本發明提供一種具有功能測試之處理器燒機裝置,包含:一燒機載板,具有複數個測試插槽及一子系統模組,該子系統模組用以接收一訊號,該訊號關聯於一測試參數設定;以及一訊號測試板,耦接至該燒機載板上,與該等複數個測試插槽的一部份燒機載板及該子系統模組形成訊號連接;其中該訊號測試板根據該訊號,控制與該訊號測試板通訊連接的該等複數個測試插槽的該部份燒機載板進行一測試程序。The present invention provides a processor burn-in device with functional testing, comprising: a burn-in carrier board with a plurality of test slots and a sub-system module, the sub-system module is used for receiving a signal, and the signal is associated with a test parameter setting; and a signal test board coupled to the burn-in carrier board to form a signal connection with a part of the burn-in carrier board of the plurality of test slots and the subsystem module; wherein the signal According to the signal, the test board controls the part of the burn-in carrier board of the plurality of test slots that are communicatively connected with the signal test board to perform a test procedure.
Description
本發明關於一種用於燒機載板上的裝置,尤其是指可加裝在燒機載板上並能控制燒機載板之輸入高頻訊號的一種燒機裝置。The present invention relates to a device for burn-in carrier board, in particular to a burn-in device that can be installed on the burn-in carrier board and can control the input high-frequency signal of the burn-in carrier board.
在半導體或者PCB的產業中,燒機(Burn-In)是測試晶圓或晶片的一種過程,複數個晶圓或晶片會對應地安裝在燒機板上的測試座上進行各種參數的測試,如溫度、應力、頻率等,檢測出任何在後續製程中,因設計,材料,製程或製造的缺陷所發生的故障。In the semiconductor or PCB industry, burn-in is a process of testing wafers or chips. Multiple wafers or chips will be correspondingly installed on the test seat on the burn-in board to test various parameters. Such as temperature, stress, frequency, etc., to detect any failures in subsequent processes due to design, material, process or manufacturing defects.
現今各廠商所使用的燒機板,都是根據客戶的產品的需求來客製化燒機板,因此每次有不同的產品的燒機測試需求,都需要重新製造不同測試條件的燒機板。況且,根據不同的測試項目或參數,晶圓或晶片也必需分開配置於所對應的燒機板進行測試,故總體的測試流程較耗時。試問,當客戶在一定時間內,需要測試產品大範圍頻率的要求時,如何能夠有效率解決上述之問題且降低燒機板的製造成本為本發明所要解決的課題。The burn-in boards used by various manufacturers today are customized according to the needs of customers' products. Therefore, each time there are different product burn-in test requirements, it is necessary to re-manufacture the burn-in boards with different test conditions. Moreover, according to different test items or parameters, the wafers or chips must be separately configured on the corresponding burn-in boards for testing, so the overall testing process is time-consuming. How to effectively solve the above problems and reduce the manufacturing cost of the burn-in board is the subject to be solved by the present invention when a customer needs to test a wide range of frequencies for a product within a certain period of time.
圖7示意了習知的燒機載板710,其具有信號介面140和電源介面150,分別接收用於燒機測試的測試訊號(如10MHz訊號)及用於整個燒機載板運作的電源訊號。燒機載板710主要還提供有陣列的複數個測試插槽120,各插槽120用於容置一待測裝置(DUT),如一晶片。信號介面140和電源介面150是各種連接器及電子元件的組合,並配置成經由特定導電路徑將訊號傳送至各測試插槽120。然而,這種配置存在某些影響測試一致性的缺失。燒機載板710通常具有相當的面積,而信號介面140和電源介面150通常配置在燒機載板710的側邊,測試插槽120與介面140和150之間的導通路徑長度會因測試插槽120相對於燒機載板710的位置而決定。因此,相同訊號抵達不同測試插槽120的時間上可能會不一致,且越長的導通路徑可能使訊號產生損耗,進而影響測試品質。再者,這種配置下的單一燒機載板僅能同時對所有待測裝置提供單一種測試,使得可增進測試效率的其他測試排程被限制而無法應用。FIG. 7 illustrates a conventional burn-in
因此,有必要發展一種改良的燒機載板配置,以降低訊號損失和克服測試排程限制為目標。Therefore, it is necessary to develop an improved burn-in carrier configuration with the goal of reducing signal loss and overcoming test scheduling limitations.
為解決上述之課題,本發明利用在燒機載板上配置一子系統模組並設置一種能夠裝置於燒機載板上的一訊號測試板,使該訊號測試板能藉由該子系統模組來控制燒機載板不同的參數,使待測物能夠進行大量且不同的參數進行測試。In order to solve the above problem, the present invention utilizes a subsystem module configured on the burn-in carrier board and a signal test board that can be installed on the burn-in carrier board, so that the signal test board can use the subsystem module. Groups are used to control different parameters of the burn-in carrier board, so that the DUT can be tested with a large number of different parameters.
為達到上述之目的,本發明提供了一種具有功能測試之處理器燒機裝置,包含:一燒機載板,具有複數個測試插槽及一子系統模組,該子系統模組用以接收一訊號,該訊號關聯於一測試參數設定;以及一訊號測試板,耦接至該燒機載板上,與該等複數個測試插槽的一部份及該子系統模組形成訊號連接;其中該訊號測試板根據該訊號,控制與該訊號測試板通訊連接的該等複數個測試插槽的該部份進行一測試程序。In order to achieve the above object, the present invention provides a processor burn-in device with functional testing, comprising: a burn-in carrier board with a plurality of test slots and a sub-system module, the sub-system module is used for receiving a signal, the signal is associated with a test parameter setting; and a signal test board coupled to the burn-in carrier board to form a signal connection with a part of the plurality of test slots and the subsystem module; Wherein the signal test board controls the part of the plurality of test sockets which are in communication with the signal test board to perform a test procedure according to the signal.
為達到上述之目的,本發明另提供了一種安裝於一燒機載板上之具有功能測試之訊號測試板,包含:一訊號測試板,耦接至該燒機載板上,使訊號連接於該燒機載板;其中該訊號測試板具有一子系統模組,用以接收一訊號,該訊號關聯於一測試參數設定,該訊號測試板根據該訊號控制該燒機載板進行測試程序。In order to achieve the above-mentioned purpose, the present invention further provides a signal test board with function test installed on a burn-in carrier board, comprising: a signal test board, coupled to the burn-in carrier board, so that the signal is connected to the The burn-in carrier board; wherein the signal test board has a subsystem module for receiving a signal, the signal is associated with a test parameter setting, and the signal test board controls the burn-in carrier board to perform a test procedure according to the signal.
如上所述之具有功能測試之處理器燒機裝置,更電連接一測試設備,該測試設備提供一控制訊號於該訊號測試板,該控制訊號用於觸發該訊號測試板執行對該等複數個測試插槽的該部分進行一測試程序。The above-mentioned processor burn-in device with function test is further electrically connected to a test device, the test device provides a control signal to the signal test board, and the control signal is used to trigger the signal test board to execute the plurality of The portion of the test socket is subjected to a test procedure.
如上所述之具有功能測試之處理器燒機裝置與訊號測試板,其中該子系統模組與訊號測試板各包含有一現場可程式化邏輯閘陣列,其中該現場可程式化邏輯閘陣列設置有一燒機程式。The above-mentioned processor burn-in device with function test and signal test board, wherein each of the subsystem module and the signal test board includes a field programmable logic gate array, wherein the field programmable logic gate array is provided with a Burn program.
如上所述之具有功能測試之處理器燒機裝置與訊號測試板,其中,該訊號測試板根據該子系統模組之該訊號來更新該現場可程式化邏輯閘陣列之燒機程式。The above-mentioned processor burn-in device and signal test board with function test, wherein the signal test board updates the burn-in program of the field programmable logic gate array according to the signal of the subsystem module.
如上所述之具有功能測試之處理器燒機裝置與訊號測試板,其中該訊號測試板更包含至少一連接器,該至少一連接器配置成通訊耦接於該燒機載板。The above-mentioned processor burn-in device with function test and signal test board, wherein the signal test board further includes at least one connector, and the at least one connector is configured to be communicatively coupled to the burn-in carrier board.
如上所述之具有功能測試之處理器訊號測試板,其中該訊號測試板更設置有複數個待測物,該訊號測試板能對該複數個待測物進行測試。In the above processor signal test board with function test, the signal test board is further provided with a plurality of objects to be tested, and the signal test board can test the plurality of objects to be tested.
本發明之各種實施例將於下文中參照本發明理想的實施例的示意圖來進行描述。該等圖示中的形狀、設置方式會因製造技術、設計及/或公差而有所不同。因此,本發明文中所說明的實施例不應被視為是用來將本發明結構侷限在特定的元件或形狀,其應包含任何因製作所造成在形狀方面的差異。Various embodiments of the invention are described hereinafter with reference to schematic illustrations of idealized embodiments of the invention. The shapes and arrangements in these illustrations may vary due to manufacturing techniques, designs and/or tolerances. Therefore, the embodiments described herein should not be construed as limiting the invention to any particular element or shape, which is to include any variation in shape caused by manufacture.
為方便理解本發明,首先簡要說明本發明之具有功能測試之處理器燒機裝置之配置方式,如圖1所示,該具有功能測試之處理器燒機裝置100主要有一燒機載板110,該燒機載板110配置有複數個測試插槽120(Socket),每一個測試插槽120都分別容置一個待測物進行測試。該燒機載板110也配置有一訊號介面140以及一電源介面150,分別接收用於燒機測試的測試訊號及供應燒機載板110運作的電源訊號。說明至此的燒機測試板配置為熟知此技術領域的人常用配置手段,而本發明相較上述之燒機測試板為利用一訊號測試板200,能拆卸地配置於該燒機載板110上,且連接於一外部的訊號控制系統300,使該燒機載板110藉由該訊號控制系統300輸入設定來控制該訊號測試板200的不同的參數進行燒機測試。在一例子中,所述訊號測試板200是用於提供高頻測試訊號的一種電路配置。本發明訊號測試板200的具體連接方式將於後續說明。另外,為方便理解,本文只使用頻率參數進行說明,故訊號測試板200不限定只控制頻率,亦可指溫度、應力等其他所需測試的參數,更包含可控制複數個需測試的參數。In order to facilitate the understanding of the present invention, the configuration of the processor burn-in device with function test of the present invention is briefly described first. As shown in FIG. 1 , the processor burn-in device with
以下對於該訊號測試板200配置於該燒機載板110的方式進行說明。參閱圖2a與圖2b之具有功能測試之處理器燒機裝置之連接器之仰視圖與側視圖,訊號測試板200具有與控制系統300通訊連接的通訊介面以及用於輸出測試訊號的電路總成,其可分布於訊號測試板200的頂面。該訊號測試板200的底面(即面向燒機載板110的一面)固設有至少一個以上的連接器210,與該連接器210對應的連接器或插座(圖中未顯示)設置於圖1該燒機載板110的一頂面(即與測試插槽120共用的一面),例如使用板對板連接器(board to board connector)的手段。該設置方式的選擇是決定於該燒機載板110的線路配置有關。該連接器210的配置使訊號測試板200以夾層板(Mezzanine Board)的方式設置於該燒機載板110上,並形成電連接與訊號連接。藉由所述夾層板的安排,測試插槽120可藉於燒機載板110和訊號測試板200之間。儘管圖中僅例示一個訊號測試板200,但更多數量的訊號測試板200也是可行的。各訊號測試板200連接至特定的測試插槽120以負責部分待測裝置的測試。該連接器210的設置方式可取決於如何能與該燒機載板110形成電連接與訊號連接,因此不限定如圖2a、圖2b之配置方式,而可採用單個配置於中間的連接器210,也不限定連接器210之配置方向。The following describes the manner in which the
以下對於本發明之該具有功能測試之處理器燒機裝置100進行詳細說明,請同時參閱圖3與圖4所示,圖3為本發明之具有功能測試之處理器燒機裝置100之配置示意圖,以及圖4為本發明之具有功能測試之處理器燒機裝置配置於燒機測試機台之示意圖。其中該燒機載板110更設置有一子系統模組130,訊號連接於該訊號測試板200與該訊號控制系統300之間,訊號測試板200用於整合該燒機載板110內所使用到的該訊號測試板200的資料,並回傳至該訊號控制系統300,其中該訊號測試板200內含現場可程式化邏輯閘陣列(Field Programmable Gate Array,FPGA),主要為產生測試所需高頻程式。該訊號控制系統300為一外部電腦設備,與子系統模組130透過通用介面傳輸訊號,如使用乙太網路(Ethernet)。另外,該具有功能測試之處理器燒機裝置100連接於圖4之測試腔室外部500之測試機台400。請參閱圖3,該測試機台400會經由該燒機載板110之訊號介面140,提供一訊號,且該訊號傳輸於該訊號測試板200。更詳細而言,圖3之較細的控制訊號路徑P1為測試設備400對每一個訊號測試板200中的FPGA送出/接收控制訊號。該測試機台400傳輸一10MHz訊號用以觸發該訊號測試板200對各燒機模組)進行燒機程序,該燒機程序可以根據不同測試需求的燒機載板、或者為了測試不同參數而另外加裝在燒機載板110的各種燒機模組(如高溫模組、高壓模組)進行變更,而該燒機程序為透過10MHz信號控制各燒機模組,或內建於該訊號測試板200,由該訊號測試板200控制各燒機模組,對於測試參數設定訊號(圖3較粗的測試參數設定訊號路徑P2)為透過訊號控制系統300上的圖像使用者介面(GUI)進行對子系統模組130做設定,子系統模組130可以在每個訊號測試板200做以下功能設定,(一)更新訊號測試板200測試高頻程式設定,(二)更新訊號測試板200中FPGA的韌體。該測試機台400具有一電源410,經由該燒機載板110之電源介面150提供所需的電源至該燒機載板110。The following is a detailed description of the processor burn-in
以下對於訊號測試板200與待測物D之間的配置進行說明,請參考圖5之本發明之具有功能測試之處理器燒機裝置之燒機載板與待測物之配置示意圖,其中M1至M3為訊號測試板200與插槽中待測物D之間彼此關係的不同示意。M1實施例如先前圖2a和2b所述之配置,利用一訊號測試板200固定在燒機載板110上並訊號連接多個待測物D,使一訊號測試板200能對多個待測物D進行燒機測試。M2實施例為待測物D與訊號測試板200設置於同一載板上,然後一起安裝至燒機載板110進行燒機測試。M3實施例為一訊號測試板200以夾板的方式對一待測物D(待測物D設置於測試插槽120,並位於訊號測試板200與燒機載板110之間,故M3實施例未顯示待測物D)進行燒機測試,因此可得知M3為對每一個待測物D能客製化地連接一訊號測試板200。據上所述,該訊號測試板200能根據客戶的需求以不同的大小、方式客製化地設置於燒機載板110上,而不用再重新設計燒機載板110,以減少製造成本以及佈線複雜化。The configuration between the
接著,請參閱圖6之本發明之具有功能測試之處理器燒機裝置之燒機載板之配置圖。以下詳細說明該訊號測試板200的連接器210設置於該燒機載板110時的運作方式。本實施例是根據上述M1之方式配置,該圖中顯示DUT的區域為待測物設置於測試插槽120中(以下簡稱為待測物DUT),及顯示該訊號測試板200的區域為該訊號測試板200已安置於測試插槽120上,因此圖6中每一個訊號測試板200會同時對兩個待測物DUT進行頻率控制,例如圖6所示之GROUP#0的該訊號測試板200同時對DUT#0、DUT#8進行調整頻率來測試。使用者藉由操作該訊號控制系統300對該子系統模組130傳輸參數設定的訊號,該子系統模組130會根據該訊號傳輸一設定參數訊號到個別的該訊號測試板200,各訊號測試板200之FPGA會根據該設定參數更新燒機程序,使每個訊號測試板200能控制其所對應的待測物DUT進行燒機測試。當燒機測試進行中,個別的該訊號測試板200會回傳當下的測試訊息於該子系統模組130,由該子系統模組130統一地收集該回傳的測試訊號,並傳輸於該訊號控制系統300,由該訊號控制系統300提供使用者個別待測物DUT即時的測試情況,讓使用者能根據該測試情況及時的調整個別的測試參數。Next, please refer to the configuration diagram of the burn-in carrier board of the processor burn-in device with functional test of the present invention in FIG. 6 . The following describes in detail how the
據上所述,所屬技術領域中具有通常知識者可根據本發明之教示應用於各種燒機測試項目,以下對於本發明適用之各種燒機測試項目 進行詳細說明:(一)斷短路測試(Open/Short TEST),用於核對測試用的信號針腳是否有接觸於晶圓或晶片,以及檢測信號針腳是否相對於正常信號針腳的有短路的狀況發生。(二)直流參數測試(DC Parametric Test),測試晶圓或晶片的直流參數是否符合所設計之規範中,其參數可如:輸出驅動電流(Output Drive Current)、漏電(Current Leakage)、功率(Power Current)、臨限值(Threshold Level)等。(三)功能測試(Functional Test),用於核對晶圓或晶片是否能正確地運行其預期的邏輯函數、以及能創建測試向量或真值表,來檢測晶圓或晶片中的故障。(四)交流參數測試(AC Parametric Test),用以確保晶圓或晶片是否能吻合其時序規範,其參數可如:傳播延遲(Propagation delay)、建立時間和保持時間(setup time and hold time)、存取時間(Access time)、更新時間(Refresh time)、上升/下降時間(Raise/Fall times)等。(五)數據分箱(Binning),晶圓或晶片根據上述測試結果進行分類。(六)模式編程(Pattern programming),編輯邏輯演算測試向量產生器(ALPG)之微代碼以處理測試模式。(七)插座編程(Socket programming),編輯並行測試設置。以上之說明順序及測試內容不限定實際的各種燒機測試,故本發明之配置可應用在其他未揭露之燒機測試項目中。According to the above, those with ordinary knowledge in the technical field can apply the teachings of the present invention to various burn-in test items. The following is a detailed description of the various burn-in test items applicable to the present invention: /Short TEST) is used to check whether the signal pins used for testing are in contact with the wafer or chip, and to detect whether the signal pins are short-circuited relative to the normal signal pins. (2) DC Parametric Test, to test whether the DC parameters of the wafer or chip meet the designed specifications, and its parameters can be such as: Output Drive Current, Current Leakage, Power ( Power Current), Threshold Level, etc. (3) Functional Test, which is used to check whether the wafer or chip can correctly operate its expected logic function, and can create a test vector or truth table to detect faults in the wafer or chip. (4) AC Parametric Test, to ensure whether the wafer or chip can meet its timing specification, its parameters can be such as: propagation delay (Propagation delay), setup time and hold time (setup time and hold time) , Access time, Refresh time, Raise/Fall times, etc. (5) Data binning, wafers or wafers are classified according to the above test results. (6) Pattern programming, editing the microcode of the Logic Algorithm Test Vector Generator (ALPG) to handle the test pattern. (7) Socket programming, edit parallel test settings. The above description sequence and test content are not limited to actual various burn-in tests, so the configuration of the present invention can be applied to other undisclosed burn-in test items.
總結來說,相比於先前之技術,本發明之具有功能測試之處理器燒機裝置最主要的優勢為:(一)使客戶於現今下可不需購置新的高頻或具有更多燒機測試項目功能的測試設備下,能持續使用於原先燒機裝置並同時滿足未來半導體日新月異的測試技術,達到延長燒機裝置的使用壽命。另外,對於待測物高頻測試需求及測試項目增加也均能予以滿足,例如:訊號測試板提供了更高頻率測試訊號對待測物進行測試,取代了原先測試設備所能提供的10MHz訊號。(二)在韌體上,可將傳統的燒機流程的步驟順序(例如:步驟一為高溫測試,步驟二為低溫測試,步驟三為全速測試之順序),利用如FPGA等方式,將燒機流程修改並整合為同步進行上述之三個步驟或者其他的步驟等,更可整合如段落[0028]之各種燒機測試項目,以縮短測試時間。據上所述,本發明之燒機裝置可提升測試效率、提供更高測試訊號數量/密度、優化PCB佈線、靈活調整設置方式、靈活控制設定參數以及能夠適應新穎或的測試技術,而最終能達成待測物的測試成本降低。To sum up, compared with the prior art, the main advantages of the processor burn-in device with functional test of the present invention are: (1) Customers do not need to purchase a new high frequency or have more burn-in devices at present. Under the test equipment that tests the function of the project, it can continue to be used in the original burn-in device and at the same time meet the ever-changing test technology of future semiconductors, so as to prolong the service life of the burn-in device. In addition, it can also meet the high-frequency test requirements of the DUT and the increase of test items. For example, the signal test board provides a higher frequency test signal to test the DUT, replacing the 10MHz signal provided by the original test equipment. (2) On the firmware, the sequence of steps in the traditional burn-in process (for example,
100 具有功能測試之
處理器燒機裝置
110 燒機載板
120 測試插槽
130 子系統模組
140 訊號介面
150 電源介面
200 訊號測試板
210 連接器
300 訊號控制系統
400 測試設備
410 電源
500 腔室
710 燒機載板
DUT/D 待測物
M1~M3 配置模式
P1 控制訊號路徑
P2 測試參數設定訊號
100 with functional test
Processor burn-in
圖1顯示為本發明之器燒機裝置之示意圖。FIG. 1 is a schematic diagram of the burn-in device of the present invention.
圖2a顯示為本發明之燒機裝置與連接器之俯視圖。FIG. 2a shows a top view of the burn-in device and the connector of the present invention.
圖2b顯示為本發明之燒機裝置與連接器之側視圖。Figure 2b shows a side view of the burn-in device and connector of the present invention.
圖3顯示為本發明之訊號路徑示意圖。FIG. 3 shows a schematic diagram of the signal path of the present invention.
圖4顯示為本發明之燒機裝置配置於燒機測試機台之示意圖。FIG. 4 is a schematic diagram showing the configuration of the burn-in device of the present invention on a burn-in test machine.
圖5顯示為本發明之訊號測試板與待測物之配置示意圖。FIG. 5 is a schematic diagram showing the configuration of the signal test board and the DUT of the present invention.
圖6顯示為本發明之燒機載板之配置圖。FIG. 6 shows the configuration diagram of the burn-in carrier board of the present invention.
圖7顯示一種習知燒機裝置的方塊示意圖。FIG. 7 shows a block diagram of a conventional burn-in device.
100 具有功能測試之處理器燒機裝置
110 燒機載板
120 測試插槽
140 訊號介面
150 電源介面
200 訊號測試板
300 訊號控制系統
100 Processor burn-in device with
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