TWI759444B - Gate valve device - Google Patents

Abstract

The present invention is a device for reducing dust generated on the gate valve device and ensuring the blockage of the opening of the vacuum container, which includes: a valve body 2 for opening and closing the opening 11H of the vacuum container 11; a support shaft 3 provided on the valve body 2 Both ends are used to rotate the valve body 2; and a forward and backward moving mechanism 4 is provided between the valve body 2 and the support shaft 3, so that the valve body 2 moves forward and backward in a direction orthogonal to the support shaft 3; and The forward and backward moving mechanism 4 includes: a guide part 41, which is arranged on the side of the support shaft 3; a sliding part 42, which is arranged on the side of the valve body 2, and slides on the guide part 41; And the driving part 44 is connected to the other end of the link mechanism 43 and drives the link mechanism 43 .

Description

Gate valve device

The present invention relates to a gate valve device for opening and closing an opening of a vacuum container.

As such a gate valve device, as shown in Patent Document 1, a device using a cam mechanism as a mechanism for advancing and retreating a valve body with respect to an opening is conceivable.

Specifically, the cam mechanism is a mechanism for advancing and retreating a valve body support rod that supports the valve body, and includes a cam pin provided on the valve body support rod, and a cam to which the cam pin is fitted. The cam portion of the hole. Furthermore, when the cam portion moves, the cam pin of the valve body support rod slides in the cam hole of the cam portion, so that the valve body moves forward and backward with respect to the opening.

However, in a device using a cam mechanism, it is the cam pin and the cam hole that slide, so these members are worn by sliding friction, and dust is generated. The substrate passing through the gate valve may be contaminated with the dust. In addition, when the cam pin or the cam hole is worn by sliding friction, the blocking property of the gate valve device to the opening may also be deteriorated.

[Prior Art Literature]

[Patent Literature]

Patent Document 1: Japanese Patent No. 4079157

Therefore, this invention was developed in order to solve the said problem, and the main subject is to reduce the dust which generate|occur|produced in a gate valve apparatus, and to ensure the blockability of the opening of a vacuum container.

That is, the gate valve device of the present invention is characterized by comprising: a valve body for opening and closing the opening of the vacuum container; support shafts provided at both ends of the valve body for rotating the valve body; and a forward and backward movement mechanism, It is arranged between the valve body and the support shaft, so that the valve body moves forward and backward in a direction orthogonal to the support shaft; and the forward and backward movement mechanism includes: a guide part, which is arranged at the the support shaft side; a sliding part provided on the valve body side, sliding on the guide part; a link mechanism, one end of which is connected with the sliding part; and a driving part, connected with the link The other end of the lever mechanism drives the linkage mechanism.

In the gate valve device as described above, since the valve body is moved forward and backward with respect to the opening by the link mechanism, dust generated by sliding can be reduced compared with the case of using the cam mechanism. As a result, contamination of the substrate by the gate valve device can be prevented.

In addition, since the gate valve device uses a link mechanism, it is possible to prevent wear caused by sliding friction, thereby preventing the gate valve device from deteriorating the blocking property of the opening of the vacuum container.

In addition, since the sliding portion is moved forward and backward by the link mechanism, a speed change occurs in the sliding portion during the forward and backward movement. Therefore, the valve body can be moved while using the speed change to reduce the moving speed of the valve body. block. Therefore, the impact applied to the valve body or the sealing member or the like provided on the valve body can be reduced. as a result In order to prevent breakage of the valve body, the sealing member, and the like.

As a specific embodiment of the forward and backward moving mechanism, it is desirable that the guide portion has a pair of side walls facing each other, the sliding portion slides and moves on the inner surfaces of the pair of side walls, and the link mechanism is provided between the pair of side walls.

With the above-described configuration, the link mechanism is located inside the guide portion, so that the gate valve device can be reduced in size.

In order to eliminate the sliding friction between the sliding portion and the guide portion and prevent the generation of dust caused by the sliding friction of these members, it is desirable that the sliding portion slides relative to the guide portion via a rotating body. With the above-described configuration, rolling friction between the rotor and the guide portion is generated by sliding movement, and since the frictional force is smaller than the sliding friction, dust can be reduced.

However, when the sliding portion is in contact with the respective inner surfaces of the pair of side walls at only one point, when the sliding portion is slidably moved, the sliding portion rotates around the connection portion with the link mechanism as the center of rotation, so that the valve body is opposite to the The clogging of the opening of the vacuum container may decrease.

In order to prevent the rotation of the sliding portion and block the opening more stably with the valve body, it is preferable that a plurality of the rotating bodies are provided along the sliding movement direction of the sliding portion.

With such a configuration, the sliding portion and the respective inner surfaces of the pair of side walls are in contact with each other at a plurality of points in the sliding movement direction, so that during the sliding movement, it is possible to prevent the connection portion with the link mechanism as the center of rotation during the sliding movement. rotate.

Preferably: the rotating body is arranged in the sliding part or the guiding part In one aspect, the forward-backward movement mechanism has a pressing body that makes the rotating body press the sliding portion or the guide portion.

With such a configuration, the rolling body is pressed against the sliding part or the guide part by the pressing body, so that the rattling between the rotating body and the guide part or the sliding part can be eliminated, and the sliding part can be made relative to the guide part. more stable sliding movement.

It is desirable that the drive part is connected to the other end of the link mechanism through the inside of the support shaft.

With this configuration, the configuration around the support shaft can be simplified, and the gate valve device can be reduced in size.

It is desirable that the valve body, the forward-backward movement mechanism and the support shaft mechanism are configured to be separable.

With this configuration, when replacing the valve body, it is not necessary to disassemble the forward/backward moving mechanism and the support shaft from the vacuum container together with the valve body, so that maintenance of the valve body can be facilitated. In addition, only the forward and backward movement mechanism and the support shaft provided on one end of the valve body can be disassembled, so that the maintenance of these components can also be facilitated.

According to the present invention constructed as described above, since the valve body is moved forward and backward with respect to the opening by the link mechanism, dust generated on the gate valve device can be reduced, and the blockability of the opening of the vacuum container can be ensured.

2: valve body

2a: Seating surface

3: Support shaft

4: Advance and retreat moving mechanism

5: Rotary drive part

6: Frame

6a, 6b, 41b, 41c, 101, 111: side walls

6c: upper wall

6d: lower wall

6H1, 6H2, 6H3: Opening

7: Screws

8, 12, 13, 14, 21: sealing member

10, 11: Vacuum container

10H, 11H: Opening

41: Guidance Department

41a: base end

42: Sliding Department

43: Linkage mechanism

43a: Drive link

43b: driven link

43c: 1st shaft member

43d: 2nd axis member

44: Drive Department

45: Rotor (roller)

46: Pressure body

61: Frame body

62: Cover member

63: Partition

100: Gate valve device

611, 612: side wall

A-A, B-B: hatching

L: center line

P: Opposite position

Q: Retreat position

R: blocking position

FIG. 1 schematically shows the configuration of the gate valve device according to the present embodiment (blocking position sectional view of the setting).

2 is a cross-sectional view schematically showing the configuration (opposing position) of the gate valve device of the embodiment.

3 is a cross-sectional view schematically showing the configuration (retracted position) of the gate valve device of the embodiment.

4 is a perspective view schematically showing the configuration of the gate valve device according to the embodiment (except for the frame body) as viewed from the front of the valve body.

FIG. 5 is a diagram schematically showing the configuration of the forward and backward movement mechanism of the embodiment.

6 is a perspective view showing a state in which the valve body and members other than the valve body are separated from each other in the embodiment.

FIG. 7 is a schematic view showing a state in which the valve body has been taken out of the opening for self-maintenance in the embodiment.

FIG. 8 is a schematic view showing a state in which the forward and backward movement mechanism and the support shaft of the embodiment have been taken out.

FIG. 9 is a cross-sectional view schematically showing an example in which a two-stage gate valve device is arranged.

10 is a cross-sectional view schematically showing an example in which a three-layer gate valve device is arranged.

FIG. 11 is a diagram schematically showing the configuration of a forward-backward movement mechanism according to another embodiment.

Hereinafter, an embodiment of the gate valve device of the present invention will be described with reference to the drawings.

<Device configuration>

The gate valve apparatus 100 of the present embodiment is a vacuum processing apparatus that uses plasma, such as sputtering or chemical vapor deposition (CVD). As shown in FIGS. 1 to 3 , the gate valve device 100 is arranged between two vacuum containers 10 and 11 , so that the two vacuum containers 10 and the openings 10H and 11H of the vacuum container 11 are connected or isolated. The two vacuum vessels 10 and 11 are any two of a vacuum vessel forming a load lock chamber, a vacuum vessel forming a preliminary heating chamber, or a vacuum vessel forming a substrate processing chamber.

Specifically, the gate valve device 100 is a device that connects the opening 10H formed on the side wall 101 of one vacuum vessel 10 and the opening 11H formed on the side wall 111 of the other vacuum vessel 11 , and has an opening 6H1 , an opening 11H In the frame body 6 of 6H2, the openings 6H1 and 6H2 communicate with the openings 10H and 11H, respectively.

The frame body 6 is in the shape of a rectangular parallelepiped, and two openings 6H1 and 6H2 are formed on a pair of opposite side walls 6a and 6b. The side walls 6a and 6b of the housing 6 are airtightly connected to the vacuum vessel 10 and the side walls 101 and 111 of the vacuum vessel 11 via sealing members 12 and 13 such as O-rings. The vacuum container 10 , the opening 10H and the opening 11H of the vacuum container 11 , and the openings 6H1 and 6H2 of the frame body 6 have a rectangular shape having short sides and long sides so that the substrate can be loaded and unloaded.

Furthermore, as shown in FIGS. 1 to 4 , the gate valve device 100 includes: a valve body 2 for blocking an opening 6H2 formed on the side wall 6b of the frame body 6 ; a support shaft 3 for The valve body 2 is placed at both ends of the valve body 2 to rotatably support the valve body 2 relative to the frame body 6; It moves forward and backward in the direction orthogonal to the support shaft 3 . In this embodiment, the opening 6H2 of the frame body 6 is opened and closed by the valve body 2, and the opening 11H of the vacuum container 11 is opened and closed.

The valve body 2 has a shape that can cover the opening 6H2, and specifically has a rectangular shape having short sides and long sides (see FIG. 4). The valve body 2 is provided along the longitudinal direction of the frame body 6 . The seating surface 2a of the valve body 2 is provided with a sealing member 21 such as an O-ring for airtight contact with the inner surface of the side wall 6b, which is the peripheral portion of the opening 6H2.

The support shafts 3 are provided at both ends of the valve body 2 in the longitudinal direction, respectively, and are rotationally driven by a rotational drive unit 5 provided outside the frame body 6 . In the present embodiment, the two support shafts 3 are respectively provided with the rotation drive units 5 . By the rotation driving part 5, the support shaft 3 is at the opposing position P (refer to FIG. 1 ) where the valve body 2 and the opening 6H2 of the frame body 6 face each other and the retracted position Q (refer to the drawing) where the valve body 2 is retracted from the opening 6H2. 2) rotate between. The rotary drive unit 5 is a rotary actuator that rotates the support shaft 3 , and for example, a rotary actuator using compressed air, a motor capable of forward and reverse rotation, or the like can be used.

The forward-backward movement mechanism 4 moves the valve body 2 at the opposing position P linearly with respect to the support shaft 3 between the opposing position P (see FIG. 1 ) and the blocking position R (see FIG. 3 ) that blocks the opening 6H2 .

Specifically, as shown in FIG. 5 , the forward and backward movement mechanism 4 includes: a guide portion 41 , which is arranged on the side of the support shaft 3 ; a sliding portion 42 , which is arranged on the side of the valve body 2 and slides on the guide portion 41 ; One end of the link mechanism 43 is connected with the sliding part 42; The other end of the link mechanism 43 is connected to the driving portion 44 to drive the link mechanism 43 .

The guide portion 41 is connected to the support shaft 3 to rotate together with the support shaft 3 . The guide portion 41 includes a base end portion 41a connected to the support shaft 3, and a pair of opposing side walls 41b and side walls 41c extending from the base end portion 41a. The pair of side walls 41b and the side walls 41c are formed parallel to each other, and extend from the base end portion 41a toward the valve body 2 side in the axial direction.

The sliding portion 42 is connected to both ends of the valve body 2 in the longitudinal direction, respectively, and moves forward and backward together with the valve body 2 . The sliding portion 42 slides on the inner surfaces of the pair of side walls 41b and the side walls 41c of the guide portion 41, and is rotatably provided as a rotating body so as to contact the inner surfaces of the pair of side walls 41b and the side walls 41c. roller 45. In the present embodiment, one roller 45 is provided in contact with each other on the inner surfaces of the side wall 41b and the side wall 41c. In addition, the roller 45 may be rotatably provided on the pair of side walls 41 b and 41 c of the guide portion 41 , and the sliding portion 42 may be configured to roll on the roller 45 .

The link mechanism 43 includes a drive link 43a and a driven link 43b, and one end portion of the driven link 43b is rotatably connected to the sliding portion 42 via a first shaft member 43c. Moreover, the drive link 43a and the driven link 43b are rotatably connected by the second shaft member 43d. The link mechanism 43 is provided between the pair of side walls 41 b and the side walls 41 c of the guide portion 41 .

Here, in the sliding portion 42, the position where one end of the driven link 43b is connected (the position of the first shaft member 43c) is provided at a position different from the position on the center line L which is to be provided on the The upper and lower two rollers 45 on the sliding part 42 are connected. By connecting as described above, even if the two rollers 45 slide and move, the slide portion can be stabilized without rotating around the first shaft member 43c with respect to the guide portion 41 .

The driving part 44 is connected to the other end of the driving link 43 a of the link mechanism 43 , and by driving the link mechanism 43 , the sliding part 42 and the valve body 2 are moved forward and backward. The drive portion 44 is connected to the other end portion of the drive link 43 a of the link mechanism 43 through the inside of the support shaft 3 . The drive unit 44 is a rotary actuator that rotates the drive link 43a, and, for example, a swing-type actuator using compressed air, a forward-reversely rotatable motor, or the like can be used.

The operation of the gate valve device 100 configured as described above will be briefly described.

When the two vacuum vessels 10 and 11 are communicated, the rotation drive unit 5 rotates the support shaft 3 to move the valve body 2 to the retracted position Q (see FIG. 2 ). At this time, the valve body 2 is retracted beyond the region through which the substrate passes, and in the present embodiment, is retracted to the upper portion of the region through which the substrate passes.

After the conveyance of the substrate from the vacuum vessel 10 to the vacuum vessel 11 is completed, the rotation drive unit 5 rotates the support shaft 3 by 90 degrees from the retracted position Q to move the valve body 2 to the opposing position P (see FIG. 1 ). Next, the drive part 44 of the forward-backward movement mechanism 4 drives the link mechanism 43, and moves the slide part 42 toward the opening 6H2. Thereby, the valve body 2 moves to the blocking position R (see FIG. 3 ), and blocks the opening 11H of the vacuum container 11 . In addition, it is also possible to configure the rotation drive unit 5 and the drive unit 44 of the advancing and retreating movement mechanism 4 to drive at the same time, and to move from the retracted position Q to the opposing position P at the same time. and the movement from the opposing position P to the blocking position R.

Then, when the opening 11H of the vacuum container 11 is opened, the drive part 44 of the forward-backward movement mechanism 4 drives the link mechanism 43 to move the sliding part 42 away from the opening 6H2. Thereby, the valve body 2 moves to the opposing position P (refer FIG. 1). Next, the rotation drive part 5 rotates the support shaft 3 by 90 degrees from the opposing position P, and moves the valve body 2 to the retracted position Q (refer FIG. 2). In this state, the substrate is transported from the vacuum container 11 to the vacuum container 10 . In addition, it is also possible to make the rotation driving part 5 and the driving part 44 of the advancing and retreating movement mechanism 4 driven at the same time, and the movement from the blocking position R to the opposing position P and the movement from the opposing position P to the retreat position Q can be performed simultaneously. .

Furthermore, in the gate valve device 100 of the present embodiment, as shown in FIG. 6 , the valve body 2 , the advancing and retreating movement mechanism 4 and the support shaft 3 are configured to be separable. Specifically, the valve body 2 and the sliding portion 42 of the advancing/retreating movement mechanism 4 are detachably configured by being connected by a fastening structure (see FIG. 4 ) using the screws 7 .

Here, the casing 6 includes, as shown in FIG. 1 and the like, a casing main body 61 having an opening 6H3 for maintaining the valve body 2 , and a cover member 62 that can open and close the opening 6H3 . In the casing main body 61, the opening 6H3 for maintenance is formed in the upper wall part 6c, for example, has a rectangular shape having a short side and a long side so that the valve body 2 can be removed. The cover member 62 is screwed to the periphery of the opening 6H3 for maintenance of the casing body 61 , and the casing body 61 and the cover member 62 are hermetically closed by the sealing member 8 such as an O-ring, for example. Furthermore, by separating the valve body 2 at the retracted position Q from the sliding portion 42 in the state where the cover member 62 has been removed, only the valve body 2 can be removed from the opening 6H3 for maintenance (refer to According to Figure 7). Furthermore, in order to facilitate the operation of removing the valve body 2 from the opening 6H3 , the screws 7 that fasten the valve body 2 and the sliding portion 42 are fastened from the front portion of the valve body 2 , that is, the seating surface.

Further, as shown in FIGS. 6 and 8 , the forward and backward movement mechanism 4 and the support shaft 3 are integrally attached to the side wall portions 611 and 612 at both ends in the longitudinal direction of the frame body 61 . Furthermore, the side wall portion 611 and the side wall portion 612 are configured to be separable from other side wall portions of the frame body main body 61 . The side wall portion 611 and the side wall portion 612 are screwed on other side wall portions of the frame body 61 , and the other side wall portions of the frame body 61 and the side wall portions 611 and 612 are airtight by sealing members 14 such as O-rings. ground is blocked. Moreover, by separating the side wall portion 611 and the side wall portion 612 from the frame body main body 61 in the state where the valve body 2 is disassembled, the forward and backward movement mechanism 4 and the support shaft 3 can be removed from the frame body main body 61 at one stroke.

<Effects of the present embodiment>

According to the gate valve device 100 of the present embodiment configured as described above, the valve body 2 is moved forward and backward with respect to the opening 11H of the vacuum container 11, that is, with respect to the opening 6H2 of the frame body 6 by the link mechanism 43, so it is different from the use of the cam Compared with the case of the mechanism, the dust generated by the sliding can be reduced. As a result, contamination of the substrate caused by the operation of the gate valve device 100 can be prevented.

In addition, since the gate valve device 100 uses the link mechanism 43, the wear caused by sliding friction can be prevented, and the blocking property of the gate valve device 100 to the opening 11H of the vacuum container 11, that is, to the opening 6H2 of the frame body 6, can be prevented from changing. Difference.

In addition, since the sliding portion 42 is moved forward and backward by the link mechanism 43, the Since a speed change occurs in the sliding portion 42 during the forward and backward movement, the blocking position R can be formed while the moving speed of the valve body 2 is reduced by the speed change. Therefore, the impact applied to the valve body 2 or the sealing member 21 or the like provided on the valve body 2 can be reduced. As a result, breakage of the valve body 2, the sealing member 21, and the like can be prevented.

<Other variant embodiments>

In addition, this invention is not limited to the said embodiment.

For example, the gate valve device 100 of the above-described embodiment may be arranged in multiple layers. Specifically, as shown in FIGS. 9 and 10 , when the two vacuum vessels 10 and 11 of the above-described embodiment are arranged in multiple layers up and down, the gate valve device 100 is provided on each layer.

In the case of FIG. 9 , the housings 6 of the two gate valve devices 100 are shared, and the operations of the two gate valve devices 100 are configured to be vertically symmetrical. Moreover, the upper wall part 6c and the lower wall part 6d of the housing|casing 6 are provided with the opening 6H3 for maintenance, and the cover member 62.

In the case of FIG. 10 , the housings 6 of the three gate valve apparatuses 100 are common, and the operation of the two gate valve apparatuses 100 on the upper side and the operation of the gate valve apparatus 100 on the lower side are configured to be vertically symmetrical. The upper wall part 6c and the lower wall part 6d of the housing|casing 6 are provided with the opening 6H3 for maintenance, and the cover member 62, and the partition wall 63 which isolate|separates the two gate valve apparatuses 100 is detachable. The partition wall 63 is detachable from the opening 6H3 for maintenance of the upper wall part 6c of the housing|casing 6. As shown in FIG. Thereby, the valve body 2 of the gate valve device 100 in the center can also be maintained.

Furthermore, in the gate valve device 100 of the above-described embodiment, one roller 45 is provided so as to be in contact with the pair of side walls 41b and the inner surfaces of the side walls 41c, respectively. It is not limited to this. In another embodiment, as shown in FIG. 11 , a plurality of (for example, two) rollers 45 may be provided in contact with each other in the sliding direction on the respective inner surfaces of the pair of side walls 41b and the side walls 41c. At this time, the number of the rollers 45 in contact with one of the side walls 41b and the number of the rollers 45 in contact with the other side wall 41b may be the same or different. In addition, the number of the rollers 45 which contact each inner surface of a pair of side wall 41b and side wall 41c may be three or more.

In such a device, a plurality of (for example, two) rollers 45 are provided in contact with each other along the sliding direction on the respective inner surfaces of the pair of side walls 41b and 41c, so that the sliding portion 42 itself can be prevented from being damaged. The shaft member 43c rotates as a center of rotation. Thereby, the valve body 2 can block the opening 6H2 at the blocking position R more stably.

Furthermore, even if a plurality of rollers 45 are in contact with the inner surface of the side wall 41b (or the side wall 41c) in the sliding direction, and one roller 45 is in contact with the inner surface of the side wall 41c (or the side wall 41b), the same effect can be obtained. .

In addition, the forward-backward movement mechanism 4 may have the pressing body 46 which is an elastic body which presses the roller 45 to each inner surface of a pair of side wall 41b and side wall 41c. The pressing body 46 is a compression coil spring (pressing spring) that generates a restoring force by receiving a load in the compression direction.

As shown in FIG. 11 , one end of the pressing body 46 is attached to the sliding portion 42 so as to expand and contract in a direction perpendicular to the sliding direction of the sliding portion 42 . The roller 45 on the side of the side wall 41 c is connected to the other end of the pressing body 46 and is configured to be displaceable in the vertical direction with respect to the sliding portion 42 . Further, the pressing body 46 is configured so that the valve body 2 is located at the opposing position P, the retracted position Q, the blocking position R, and these positions. In any of the positions in between, it is always compressed between the roller 45 and the sliding portion 42, and the restoring force acts.

In the case of the above-described device, the roller 45 on the side wall 41c is pressed against the side wall 41c by the restoring force of the pressing body 46 . Moreover, the sliding part 42 is pushed up to the side wall 41b side by the restoring force of the pressing body 46, and the roller 45 provided in the side wall 41b side of the sliding part 42 is pressed to the side wall 41b. Thereby, the backlash between the guide portion 41 and the sliding portion 42 can be eliminated, and the sliding portion 42 can be slidably moved more stably.

In addition, in the said embodiment, although the pressing body 46 is a compression coil spring, it is not limited to this. The pressing body 46 may be a member that generates a rebound force (returning force) by receiving a load in the compression direction, and may be, for example, an elastic member such as rubber.

In addition, the pressing body 46 may be connected to the roller 45 on the side of the side wall 41b, or may be connected to the roller 45 on either side of the pair of side walls 41b and the side wall 41c.

In addition, it goes without saying that this invention is not limited to the said embodiment, Various deformation|transformation is possible in the range which does not deviate from the summary.

[Industrial Availability]

According to the present invention, it is possible to reduce the dust generated on the gate valve device, and to ensure the blockage of the opening of the vacuum container.

2‧‧‧Valve body

4‧‧‧Advance and retreat movement mechanism

6‧‧‧Frame

6a, 6b, 101, 111‧‧‧Sidewall

6c‧‧‧Upper wall

6H1, 6H2, 6H3‧‧‧Opening

8, 12, 13, 21‧‧‧Sealing member

10, 11‧‧‧Vacuum container

10H, 11H‧‧‧opening

41‧‧‧Guide

42‧‧‧Sliding Section

43‧‧‧Link mechanism

44‧‧‧Drive

61‧‧‧Main body

62‧‧‧Lid member

100‧‧‧Gate valve device

P‧‧‧ opposite position

Claims (9)

A gate valve device, comprising: a valve body for opening and closing an opening of a vacuum container; a support shaft arranged at both ends of the valve body to rotate the valve body; and a forward and backward moving mechanism interposed between the valve body It is arranged between the support shaft, so that the valve body moves forward and backward in a direction orthogonal to the support shaft; and the forward and backward movement mechanism includes: a guide part, which is arranged on the side of the support shaft; slides a link mechanism, one end of which is connected to the sliding part; and a driving part, which is connected to the other end of the link mechanism to make the Linkage drive. The gate valve device of claim 1, wherein the guide portion has a pair of opposite side walls, the sliding portion slides and moves on the inner surfaces of the pair of side walls, and the link mechanism is provided between the pair of side walls. The gate valve device according to claim 1, wherein the sliding portion slidably moves relative to the guide portion via a rotating body. The gate valve device according to claim 2, wherein the sliding portion is slidably moved relative to the guide portion via a rotating body. The gate valve device of claim 4, wherein the rotating A plurality of bodies are provided along the sliding movement direction of the sliding portion. The gate valve device according to claim 3, wherein the rotating body is provided on one of the sliding portion or the guide portion, and the advancing and retreating movement mechanism has the function of causing the rotating body to oppose the A pressing body pressed by the other of the sliding part or the guide part. The gate valve device according to claim 4, wherein the rotating body is provided on one of the sliding portion or the guide portion, and the forward and backward moving mechanism has the function of causing the rotating body to oppose the A pressing body pressed by the other of the sliding part or the guide part. The gate valve device according to claim 5, wherein the rotating body is provided on one of the sliding portion or the guide portion, and the advancing and retreating movement mechanism has the function of causing the rotating body to oppose the A pressing body pressed by the other of the sliding part or the guide part. The gate valve device according to any one of claims 1 to 8, wherein the driving portion is connected to the other end of the link mechanism through the inside of the support shaft.

Images