TWI749432B - Transmission rate adjusting device - Google Patents

Abstract

The present invention discloses a transmittance adjustment device, comprising: a rotation center area and a ring structure arranged around the rotation center area; the ring structure includes a transmittance adjustment area and a complete light transmission area; the transmittance adjustment area is perpendicular to the axis of the rotation center area The first side is connected to the third side of the fully transparent area perpendicular to the axis of the center of rotation; the second side of the transmittance adjustment area is perpendicular to the axis of the center of rotation and the fully transparent area is perpendicular to the axis of the center of rotation The transmittance adjustment area is provided with an array of light-transmitting holes, and the transmittance area of the transmittance adjustment area gradually increases in a clockwise or counterclockwise direction around the rotation center area. The embodiment of the present invention provides a transmittance adjustment device to solve the problem that the upper limit of the transmittance adjustment of the previous mechanical transmittance adjustment device is limited, and continuous adjustment of the transmittance cannot be achieved.

Description

Transmission rate adjusting device

The present invention relates to the field of illumination technology, in particular to a transmittance adjustment device.

For lighting systems in the form of dual light sources or multiple light sources, the optical power of different light sources under the same power has certain differences. For example, if the light source is a mercury lamp, for a lighting system of multiple mercury lamps, the optical power of different mercury lamps at the same power has a difference of about 2%. When there is a deviation in the optical power, it is necessary to adjust the power of the light source to make the optical power of each light source consistent. However, this method is expensive, complicated to operate, and takes a long time. Therefore, a transmittance adjustment device is often added to the lighting system to adjust the light emitted by the lighting system to obtain more uniform lighting conditions.

The transmittance adjustment device can adopt an optical compensator or a mechanical blade. The optical compensator occupies a large space in the direction of the optical axis, has a complicated structure, and has a high cost; the mechanical blade rotates to shield and adjust the lighting area to realize the uniform light adjustment of the lighting system. It is generally used now The mechanical blade forms a transmittance adjustment device, which is called a mechanical transmittance adjustment device.

However, the upper limit of the transmittance adjustment of the previous mechanical transmittance adjustment device is subject to To the limit, and the continuous adjustment of the transmittance cannot be realized, and the problem of the optical power deviation of the light sources in the lighting system cannot be effectively solved.

The embodiment of the present invention provides a transmittance adjustment device to solve the problem that the upper limit of the transmittance adjustment of the previous mechanical transmittance adjustment device is limited, and continuous adjustment of the transmittance cannot be achieved.

An embodiment of the present invention provides an organic light emitting display panel, including:

The rotation center area, and an annular structure arranged around the aforementioned rotation center area; the aforementioned ring structure includes a transmittance adjustment area and a complete light transmission area; The light zone is connected to the third side perpendicular to the axis of the center of rotation; the second side of the transmittance adjustment zone is perpendicular to the axis of the center of rotation and the fourth side of the aforementioned fully transparent zone is perpendicular to the axis of the center of rotation Edge connection

The transmittance adjustment area is provided with light transmission holes arranged in an array, and the transmittance area of the transmittance adjustment area gradually increases in a clockwise or counterclockwise direction around the rotation center area.

In an embodiment, in a clockwise or counterclockwise direction around the rotation center area, the hole density of the light-transmitting holes in the transmittance adjustment area is the same, and the size of the light-transmitting holes gradually increases.

In one embodiment, in the clockwise or counterclockwise direction around the aforementioned rotation center area In the clockwise direction, the size of the light-transmitting holes in the transmittance adjustment area is the same, and the hole density of the light-transmitting holes gradually increases.

In one embodiment, the transmittance adjustment zone includes a plurality of sub-adjustment zones sequentially arranged in a clockwise or counterclockwise direction around the rotation center area; the hole density of the light-transmitting holes of the plurality of sub-adjustment zones is the same; Along the clockwise or counterclockwise directions around the center of rotation, the sizes of the light-transmitting holes in the different sub-adjustment regions gradually increase.

In an embodiment, the aforementioned transmittance adjustment zone includes a plurality of sub-adjustment zones sequentially arranged in a clockwise or counterclockwise direction around the aforementioned rotation center area; the sizes of the light-transmitting holes provided in the aforementioned multiple sub-adjustment zones are the same; Along the clockwise or counterclockwise direction around the aforementioned rotation center area, the hole density of the aforementioned light-transmitting holes in different aforementioned sub-adjustment regions gradually increases.

In an embodiment, the sizes of the aforementioned multiple sub-adjustment areas are the same.

In one embodiment, the area of the aforementioned completely transparent region is k times of the aforementioned sub-adjustment region; wherein, k is a positive integer.

In one embodiment, the aforementioned transmittance adjustment zone and the fully transparent zone are both fan-shaped.

In one embodiment, the transmittance adjustment zone includes a plurality of sub-adjustment zones sequentially arranged in a clockwise or counterclockwise direction around the rotation center area; It increases exponentially in a clockwise or counterclockwise direction; wherein, the transmittance of each sub-adjustment area is the ratio of the light-transmitting area of the sub-adjustment area to the area of the sub-adjustment area.

In one embodiment, the transmittance adjustment zone includes N sub-adjustment zones sequentially arranged in a clockwise or counterclockwise direction around the rotation center zone; wherein, the transmittance of the X-th sub-adjustment zone is A%×(100 /A) ^[(X-1)/X] ; A% is the transmittance of the first sub-adjustment zone; N is a positive integer; X is a positive integer greater than or equal to 1 and less than or equal to N.

In one embodiment, the aforementioned transmittance adjustment zone includes M sub-adjustment zones sequentially arranged in a clockwise or counterclockwise direction around the aforementioned rotation center zone; the first sub-adjustment zone does not have the aforementioned light-transmitting hole; wherein, the Y-th sub-adjustment zone The transmittance of each sub-adjustment area is B%×(100/A) ^[(Y-2)/Y-1] ; B% is the transmittance of the second sub-adjustment area; M is a positive integer, and Y is greater than or equal to 2, And a positive integer less than or equal to M.

In one embodiment, the shape of the aforementioned light-transmitting hole is polygonal.

In one embodiment, the aforementioned polygon is a regular polygon.

In one embodiment, the aforementioned transmittance adjusting device is made of stainless steel or aluminum.

In one embodiment, the aforementioned transmittance adjusting device is manufactured by a 3D printing process.

In an embodiment, the aforementioned rotation center area is provided with at least one rotation axis interface, which is configured to be connected and installed with an external rotation device.

In the embodiment of the present invention, the transmittance adjustment device includes a rotation center area and a ring structure arranged around the rotation center area. The ring structure includes a transmittance adjustment area and a complete light transmission area, and the transmittance adjustment area is perpendicular to the axis of the rotation center area. The first side and the third side of the fully transparent area perpendicular to the axis of the center of rotation are spliced together, and the second side of the transmittance adjustment area perpendicular to the axis of the center of rotation and the fully transparent area are perpendicular to the center of rotation 4th on the regional axis When the side edges are spliced, the transmittance adjustment area and the completely transparent area are spliced with each other to form the entire ring structure. The transmittance adjustment area is provided with light transmission holes arranged in an array, so that the transmittance area of the transmittance adjustment area gradually increases in the clockwise or counterclockwise direction around the aforementioned rotation center area, and when the rotation center area is the center of rotation When the transmittance adjustment device is used, the light transmission hole in the transmittance adjustment area can be used to continuously adjust the transmittance of the light emitted by the light source, and because of the complete transmittance area, 100% transmittance of the light source can be achieved. Increase the transmittance upper limit of the existing transmittance adjustment device. In addition, by setting the light transmission area on the transmittance adjustment zone, a smooth transition between the light source's complete light transmission and the incomplete light transmission can be realized, which is beneficial to maintaining the uniformity of the transmitted light.

11‧‧‧Center of rotation area

12‧‧‧Ring structure

13‧‧‧Light hole

14‧‧‧Sub-adjustment area

15‧‧‧Spot

111‧‧‧Rotating axis interface

121‧‧‧Transmittance adjustment area

122‧‧‧Fully transparent area

141‧‧‧Sub-adjustment area

L1‧‧‧First side

L2‧‧‧Second side

L3‧‧‧third side

L4‧‧‧Fourth side

r1‧‧‧clockwise

△R‧‧‧The difference between the large radius and the small radius of the ring structure 12

[Figure 1] is a schematic diagram of the structure of a transmittance adjustment device in the related art.

[Figure 2] is a schematic diagram of another transmittance adjustment device in the related art.

[Fig. 3] is a schematic diagram of the structure of another transmittance adjusting device in the related art.

[Figure 4] is a schematic diagram of another transmittance adjustment device in the related art.

[Fig. 5] is a schematic structural diagram of a transmittance adjusting device provided by an embodiment of the present invention.

[Fig. 6] is a schematic structural diagram of another transmittance adjusting device provided by an embodiment of the present invention.

[Figure 7] is a pupil topography provided by an embodiment of the present invention.

[Fig. 8] is a schematic structural diagram of yet another transmittance adjusting device provided by an embodiment of the present invention.

The present invention will be further described in detail below in conjunction with the drawings and embodiments. It can be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be further noted that, for ease of description, only a part of the structure related to the present invention is shown in the drawings, but not all of the structure.

As a part of the optical system, the transmittance adjustment device further needs to maintain the static uniformity, integral uniformity, and pupil uniformity of the optical system while achieving transmittance adjustment. Static uniformity means that the transmittance adjustment device can achieve a uniform change in the transmittance of the light source after rotating a certain angle. Integral uniformity means that the transmittance adjustment device can achieve a uniform change in the multiple rate of increase or decrease in the transmittance after a certain angle, and the pupil is uniform Performance refers to the symmetrical distribution of the irradiated area of the light source through the transmittance adjusting device. Exemplarily, for an illumination system using a mercury lamp as a light source, before the uniform light adjustment, its energy is Gaussian and has good pupil uniformity.

There are a variety of mechanical transmittance adjustment devices in the prior art. For example, refer to FIG. 1. FIG. 1 is a schematic structural diagram of a transmittance adjustment device in the prior art. C2 and C3, each gear unit area realizes light transmission through circular holes, and the area between adjacent circular holes is the light blocking area. Placing the light source in the gear unit areas C1, C2 and C3 can realize the light source respectively. For the transmittance of 25%, 50% and 75%, the upper limit of the transmittance is 75%, and the transmittance adjustment device needs to rotate a range for each transmittance adjustment, which cannot achieve continuous adjustment of the transmittance.

Referring to FIG. 2, FIG. 2 is a schematic structural diagram of another transmittance adjusting device in the prior art. The transmittance adjusting device is based on the structure shown in FIG. To change the transmittance of the light source, the gear unit area C1 is realized The transmittance range of the light source is adjusted from 20% to 30%, the gear cell area C2 realizes the light source transmittance range adjustment of 45% to 55%, and the gear cell area C3 realizes the light source transmittance range adjustment of 70% to 80%. , But the light-blocking area set at the edge of the shift element area affects the symmetry of the light spot that passes through the light, that is, the above-mentioned pupil uniformity, and the range of continuous adjustment of the transmittance is still small. The optical simulation results of the transmittance adjusting device shown in FIG. 2 are shown in Table 1. In the gear cell area C1, when the transmittance of the light source is 20%, the uniformity of the pupil at the center position of the light spot of the transmittance adjustment device is 6.57%, which is much higher than the center position light when the light source transmittance is 25% Pupil uniformity is 1.60%. Similarly, in the gear cell area C2, when the transmittance of the light source is 45%, the uniformity of the pupil at the center position is 4.63%, which is much higher than the uniformity of the pupil at the center position of 1.45% when the transmittance of the light source is 50% .

Table 1: Optical simulation table of the transmittance adjusting device shown in Figure 2

Fig. 3 is a schematic structural diagram of another transmittance adjustment device in the prior art. The transmittance adjustment device shown in Fig. 3 uses needle-shaped holes to achieve light transmission. However, due to material strength and processing technology limitations, the gap between these needle-shaped holes The thickness of the light-blocking area is limited. At low transmittance, for example, When the transmittance is less than 50%, the uniformity of the pupil of the light spot will be seriously deteriorated due to the relatively thick light-blocking area between the pinholes. Refer to Table 2. Table 2 is the optical simulation of the transmittance adjusting device shown in Figure 3. surface. From Table 2, when the transmittance of the light source is 20%, the uniformity of the pupil at the center of the light spot of the transmittance adjustment device is 6.8%, and when the transmittance of the light source is 25%, the transmittance adjustment device's The uniformity of the pupil at the center of the light spot is 5.95%, and the uniformity of the pupil at the center of the light spot is poor, which results in poor light uniformity effect of the light source and poor illumination effect.

Table 2: Optical simulation table of the transmittance adjusting device shown in Figure 3

4, FIG. 4 is a structural diagram of another transmittance adjustment device in the prior art. The light transmission hole of the transmittance adjustment device is in the shape of a circular needle, and the transmittance is achieved by changing the width of the circular needle-shaped light transmission hole The light source transmittance range of this transmittance adjusting device is 23%~33%, 46%~60% and 64.5%~75%. Refer to Table 3. Table 3 is an optical simulation table of the transmittance adjusting device shown in FIG. 4. Compared with the transmittance adjusting device shown in FIG. 2, the pupil uniformity of the transmittance adjusting device shown in FIG. 4 does not exceed acceptable Scope. However, the static uniformity reaches 1.04%, which is 0.22% worse than the original static uniformity of 0.83%; the integral uniformity reaches 0.71%, which is 0.25% worse than the original integral uniformity of 0.46%.

Table 3: Optical simulation table of the transmittance adjusting device shown in Figure 4

In summary, in the transmittance adjustment device provided by the prior art, there is no requirement that the static uniformity is within 2%, the integral uniformity is within 1.5%, and the pupil uniformity is within 5% at the same time, and the full transmittance level is truly achieved. A device for continuous bit adjustment. In addition, the transmittance adjustment upper limit of the above-mentioned transmittance adjustment device is mostly 75%. For light sources with severe light decay, the lower transmittance adjustment upper limit limits its use efficiency and service life.

An embodiment of the present invention provides a transmittance adjusting device. Referring to FIG. 5, FIG. 5 is a schematic structural diagram of a transmittance adjusting device provided by an embodiment of the present invention, including:

The rotation center area 11, and a ring structure 12 arranged around the rotation center area 11; the ring structure 12 includes a transmittance adjustment area 121 and a completely transparent area 122; the transmittance adjustment area 121 is perpendicular to the first side of the rotation center area 11 in the axial direction The side L1 is connected to the third side L3 of the fully transparent region 122 perpendicular to the axis of the rotation center region 11; the transmittance adjustment region 121 is perpendicular to the second side L2 of the axis of the rotation center region 11 perpendicular to the fully transparent region 122 Connected to the fourth side L4 in the axial direction of the rotation center region 11;

The transmittance adjustment area 121 is provided with light transmission holes 13 arranged in an array, and the light transmission area of the transmittance adjustment area 121 gradually increases in a clockwise or counterclockwise direction around the rotation center area 11.

The rotation center area 11 serves as the rotation center of the transmittance adjusting device, and the entire transmittance adjusting device can rotate clockwise or counterclockwise with the rotation center area 11 as the center. Optionally, the rotation center area 11 is provided with at least one rotation axis interface 111 for connection and installation with an external rotation device. The rotation axis of the external rotating device passes through the rotation axis interface 111, and the rotation axis is perpendicular to the plane where the transmittance adjusting device is located, driving the transmittance adjusting device to rotate.

The ring structure 12 can rotate around the center of rotation 11. The ring structure 12 includes a transmittance adjustment area 121 and a completely transparent area 122. The transmittance adjustment area 121 is perpendicular to the axis of the rotation center area 11, that is, perpendicular to the first side of the rotation axis. The side L1 is connected to the third side L3 that is perpendicular to the axis of the rotation center region 11 in the same way as the fully transparent region 122, that is, the first side L1 and the third side L3 overlap with each other. Similarly, the second side L2 of the transmittance adjustment zone 121 perpendicular to the axis of the rotation center region 11 is connected to the fourth side L4 of the fully transparent region 122 that is also perpendicular to the axis of the rotation center region 11, that is, the second side. L2 and the fourth side L4 overlap with each other, and the transmittance adjustment area 121 and the completely transparent area 122 are spliced together to form the ring structure 12.

During the rotation of the ring structure 12 around the center of rotation 11, the light source that needs to be uniform can emit light through the ring structure 12. The transmittance adjustment area 121 is provided with arrays of light-transmitting holes 13 and the array of light-transmitting The light transmission area of the hole 13 gradually increases in a clockwise or counterclockwise direction around the rotation center region 11, so that the transmittance of the light source requiring uniform light gradually increases or decreases during the rotation of the ring structure 12. In one embodiment, refer to 5, when the ring structure 12 rotates clockwise r1 around the rotation center area 11, the transmittance area of the transmittance adjustment area 121 facing the light source gradually decreases, and the transmittance of the light source gradually decreases until the light is completely transmitted The area 122 passes to the light source, so that the transmittance of the light source is 100%. If the ring structure 12 is continuously rotated in the clockwise direction r1, the transmittance of the light source gradually decreases again.

If the transmittance adjustment zone 121 is set to have a larger upper limit and lower limit of the transmittance area along the direction around the rotation center area 11, the transmittance of the light source has a larger adjustment range, for example, the transmittance adjustment range can be adjusted Set it at 20%~100%, and even set the adjustment range of transmittance at 0~100%, to realize the continuous adjustment of transmittance in all gears, and reduce the requirements on the light source. For example, when the light source is a mercury lamp, the above transmittance is The adjustment device can solve the situation that the light emitted by multiple mercury lamps due to the difference in luminous power is not uniform. And for light sources with severe light decay, a higher upper limit transmittance adjustment can be achieved, and a higher brightness lighting effect can be obtained to meet the lighting needs of users. In addition, the above-mentioned transmittance adjusting device has a simple structure, convenient transmittance adjustment, and low cost.

In one embodiment, referring to FIG. 5 continuously, the difference ΔR between the large radius and the small radius of the ring structure 12 is greater than the diameter of the light spot 15 irradiated by the light source, so that the light emitted by the light source can be irradiated to the transmittance adjustment area 121 and completely The light-transmitting area 122 is thus homogenized.

The transmittance adjustment device provided by this embodiment includes a rotation center area and a ring structure arranged around the rotation center area. The ring structure includes a transmittance adjustment area and a complete light transmission area, and the transmittance adjustment area is perpendicular to the axis of the rotation center area. The first side and the third side of the fully transparent area perpendicular to the axis of the center of rotation are spliced together, and the second side of the transmittance adjustment area perpendicular to the axis of the center of rotation and the fully transparent area are perpendicular to the center of rotation The fourth side of the axial direction of the area is spliced, and the transmittance adjustment zone and the completely transparent zone are spliced with each other to form the entire ring structure. through The over-rate adjustment area is provided with light-transmitting holes arranged in an array, so that the light-transmitting area of the transmittance adjustment area gradually increases in the clockwise or counter-clockwise direction around the aforementioned rotation center area. When the rotation center area is the center of rotation When the transmittance adjustment device is used, the light transmission hole in the transmittance adjustment area can be used to continuously adjust the transmittance of the light emitted by the light source, and because of the complete transmittance area, 100% transmittance of the light source can be achieved. Increase the transmittance upper limit of the existing transmittance adjustment device. In addition, by setting the light transmission area on the transmittance adjustment zone, a smooth transition between the light source's complete light transmission and the incomplete light transmission can be realized, which is beneficial to maintaining the uniformity of the transmitted light.

In order to make the light transmission area of the transmittance adjustment zone 121 gradually increase in the clockwise or counterclockwise direction around the rotation center area 11, the hole density of the light transmission hole 13 may be adjusted, or the size of the light transmission hole 13 may be adjusted. For adjustment, in one embodiment, in the clockwise or counterclockwise direction around the rotation center area 11, the light-transmitting holes 13 of the transmittance adjustment area 121 have the same hole density, and the size of the light-transmitting holes 13 gradually increases, such as As shown in Figure 5. Alternatively, in the clockwise or counterclockwise direction around the rotation center region 11, the light-transmitting holes 13 of the transmittance adjustment area 121 have the same size, and the hole density of the light-transmitting holes 13 gradually increases.

In one embodiment, referring to FIG. 6, FIG. 6 is a schematic structural diagram of another transmittance adjustment device provided by an embodiment of the present invention. The transmittance adjustment area 121 includes a clockwise or counterclockwise direction around the rotation center area 11 in sequence. A plurality of sub-adjustment areas 14 are set; the hole density of the light-transmitting holes 13 of each sub-adjustment area 14 is the same; in the clockwise or counterclockwise direction around the rotation center area 11, the light-transmitting holes 13 of the different sub-adjusting areas 14 The size gradually increases.

The transmittance adjustment device shown in FIG. 6 adjusts the light transmission area of each sub-adjustment area 14 by adjusting the size of the light-transmitting hole 13. Although the hole density of the light-transmitting holes 13 of each sub-adjustment area 14 is the same, it is Clockwise or counterclockwise around the center of rotation 11 Above, the size of the light-transmitting hole 13 of each sub-adjustment area 14 is gradually increased, so that the light-transmitting area of each sub-adjustment area 14 is gradually increased.

In one embodiment, when the transmittance adjustment area 121 includes a plurality of sub adjustment areas 14 arranged in a clockwise or counterclockwise direction around the rotation center area 11, the light transmission holes 13 of the plurality of sub adjustment areas 14 The size may be the same; in the clockwise or counterclockwise direction around the rotation center region 11, the hole density of the light-transmitting holes 13 of the different sub-adjustment regions 14 gradually increases. By gradually increasing the hole density of the light-transmitting holes 13 of the sub-adjustment areas 14 arranged in sequence, it is also possible to realize the light-transmitting of the sub-adjusting areas 14 arranged in a clockwise or counterclockwise direction around the rotation center area 11. Gradually increase in area.

In one embodiment, referring to FIG. 6 continuously, the size of the multiple sub-adjustment areas 14 may be the same, which is convenient for quickly positioning the transmittance gear to be set according to the transmittance of each sub-adjustment area 14. In one embodiment, if the light source transmittances corresponding to two adjacent sub-adjustment areas 14 are 20% and 25%, respectively, when the light source transmittance is set to 23% according to user needs, the above-mentioned Rotate two adjacent sub-adjustment areas 14 to the light spot of the light source, and fine-tune the position between the two adjacent sub-adjustment areas 14 to find the position when the transmittance of the light source is 23%, thereby simplifying the transmittance Adjustment process.

In an embodiment, the area of the completely transparent region 122 may be k times that of the sub-adjustment region 14; wherein, k is a positive integer. The completely transparent area 122 needs to be able to accommodate the spot area of the light source to be uniformed. The completely transparent area 122 may be the same area as the sub-adjustment area 14, or may be a positive integer multiple of the sub-adjustment area 14. In one embodiment, refer to In FIG. 6, the area of the completely transparent region 122 may be 3 times that of the sub-adjustment region 14.

In one embodiment, referring to FIGS. 5 and 6, the transmittance adjustment area 121 and the end The fully transparent regions 122 may all be fan-shaped, and on this basis, the plurality of sub-adjustment regions 14 included in the transmittance adjustment region 121 may also be fan-shaped. In addition, the transmittance adjustment area 121, the complete light transmission area 122, and the sub-adjustment area 14 may further have other regular or irregular shapes. For example, the transmittance adjustment area 121, the complete light transmission area 122, and the sub-adjustment area 14 are all isosceles. Trapezoid and so on.

It can be seen from the above that the transmittance adjustment zone 121 includes a plurality of sub-adjustment zones 14 arranged in a clockwise or counterclockwise direction around the rotation center area 11. The central area 11 increases exponentially in the clockwise or counterclockwise direction; wherein the transmittance of each sub-adjustment area 14 is the ratio of the light-transmitting area of the sub-adjustment area 14 to the area of the sub-adjustment area 14.

When the transmittance of the adjacent sub-adjustment areas 14 increases exponentially, when the light source that needs to be uniform passes through the adjacent sub-adjustment areas 14, the light emitted from the transmittance adjustment device has higher uniformity, that is, it has better uniformity. Static uniformity, integral uniformity, and pupil uniformity.

In one embodiment, the transmittance adjustment area 121 includes N sub-adjustment areas sequentially arranged in a clockwise or counterclockwise direction around the rotation center area 11; wherein the transmittance of the X-th sub-adjustment area is A%×(100 /A) ^[(X-1)/X] ; A% is the transmittance of the first sub-adjustment zone; N is a positive integer; X is a positive integer greater than or equal to 1 and less than or equal to N.

With continued reference to FIG. 6, in one embodiment, A% may be set to a value of 20%, and the first sub-adjustment area 14 of the N sub-adjustment areas 14 sequentially arranged in a clockwise or counterclockwise direction around the rotation center area 11 If the transmittance of the X-th sub-adjustment area 14 is 20%×5 ^[(X-1)/X] , the transmittance of the second sub-adjustment area 14 is 20%×5 ^1/2 , The transmittance of the third sub-adjustment area 14 is 20%×5 ^2/3 , and so on, the transmittance of the N-th sub-adjustment area 14 is 20%×5 ^[(N-1)/N] .

When the value of N is larger, the gear adjustment of the transmittance adjustment area 121 is finer, and it is easier to quickly set the specific transmittance of the light source. When the transmittance adjustment zone 121 rotates clockwise or counterclockwise, because the value of N is large, it is ensured that the pupil transmittance is at two equidistant points, the relative deviation is the same, and the maximum deviation is the smallest, as shown in Figure 7. 7 is a pupil topography provided by an embodiment of the present invention. In one embodiment, relative to the pupil center (0, 0), the brightness deviation of the position point (-0.5, 0) and the position point (0.5, 0) are the same. And for the pupil edge (-2.5, 0) and the pupil edge (2.5, 0), the brightness deviation relative to the two pupil edges is small to ensure the uniformity of the pupil.

In this embodiment, the transmittance adjustment gears corresponding to each sub-adjustment zone 14 all meet the three technical indicators of static uniformity within 2%, integral uniformity within 1.5%, and pupil uniformity within 5%. Refer to Table 4. Table 4 is a simulation table of the optical performance of the transmittance adjustment device shown in Figure 6. In Table 4, simulation tests are performed randomly from different transmittance gears, for example, 100% transmittance gears and 46% transmittance gears are selected. The uniformity test is performed on the gear position and the 20% transmittance gear position, and it can be measured that the transmittance adjustment device provided in this embodiment can achieve the transmittance of the light source in the range of 20% to 100% under the premise of meeting the above three technical indicators. Continuously adjustable.

Table 4: Optical performance simulation table of the transmittance adjusting device shown in Figure 6

If a certain sacrifice is made to the light uniformity of the light source transmittance adjustment device, the transmittance can be adjusted in the range of 0-100%. In one embodiment, refer to FIG. 8, which is an embodiment of the present invention. A schematic structural diagram of another transmittance adjustment device in, the transmittance adjustment area 121 includes M sub adjustment areas 14 arranged in a clockwise or counterclockwise direction around the rotation center area 11; the first sub adjustment area 141 is not provided with light transmission Hole 13; among them, the transmittance of the Y-th sub-adjustment area 14 is B%×(100/A) ^[(Y-2)/Y-1] ; B% is the transmittance of the second sub-adjustment area 14; M is A positive integer, Y is a positive integer greater than or equal to 2 and less than or equal to M.

Because the sub-adjustment area 141 is not provided with the light-transmitting hole 13, its transmittance is 0. If the B% value is 10%, the second sub-adjustment area 14 has a transmittance of 10%. By adjusting the first sub-adjustment area 14 The area 141 and the second sub-adjustment area 14 are rotated and adjusted at the light source to obtain the gear adjustment of the transmittance of the light source from 0 to 10%. The transmittance of the Y-th sub-adjustment area 14 is 10%×10 ^[(Y2)/(Y-1)] , the transmittance of the third sub-adjustment area 14 is 10%×10 ^1/2 , and the fourth sub-adjustment area 14 The transmittance of is 10%×10 ^2/3 , and so on, the transmittance of the M-th sub-adjustment area 14 is 10%×10 ^[(M-1)/M] . Similarly, when the value of M is larger, the gear adjustment of the transmittance adjustment area 121 is finer, and it is easier to quickly set the specific transmittance of the light source.

In one embodiment, referring to FIG. 5, FIG. 6 and FIG. 8, the shape of the light-transmitting hole 13 is a polygon. Compared with the circular hole, the polygonal shape can effectively reduce the area of the light-shielding area between the light-transmitting holes 13 so as to achieve a higher transmittance adjustment upper limit. In one embodiment, in order to maintain a better pupil uniformity index in the process of gradual transmittance, the above-mentioned polygon may be a positive number Edge shape. In an embodiment, the above-mentioned regular polygon may be a regular triangle, a regular quadrilateral, a regular hexagon, or the like.

The transmittance adjustment device provided in this embodiment can effectively obtain uniform light conditions. Uniform illumination can be used in lithography, exposure and other processes. The existence of the transmittance adjustment device can reduce the requirements for the exposure light source, and the exposure light source The light emitted by the transmittance adjusting device can maintain better static uniformity, integral uniformity and pupil uniformity.

On the basis of the foregoing embodiment, the transmittance adjusting device may be made of stainless steel or aluminum. Optionally, the transmittance adjustment device is made by a 3D printing process. The previous mechanical transmittance adjustment device is generally obtained by machining. The transmittance adjustment device is formed by a 3D printing process, which can greatly reduce the machining transparency. The cost and time of the light hole. Optionally, the thickness of the transmittance adjusting device in this embodiment may be about 1 mm, which occupies a small space and is convenient for integration with the light source to be homogenized into the lighting equipment or exposure equipment.

Note that the above are only the preferred embodiments of the present invention and the applied technical principles. Those with ordinary knowledge in the technical field will understand that the present invention is not limited to the specific embodiments described herein. For those with ordinary knowledge in the technical field, various obvious changes, readjustments and substitutions can be made without departing from the present invention. The scope of protection. Therefore, although the present invention is described in more detail through the above-mentioned embodiments, the present invention is not limited to the above-mentioned embodiments. Without departing from the concept of the present invention, it may further include more other equivalent embodiments. The scope is determined by the scope of the attached patent application.

11‧‧‧Center of rotation area

12‧‧‧Ring structure

13‧‧‧Light hole

15‧‧‧Spot

111‧‧‧Rotating axis interface

121‧‧‧Transmittance adjustment area

122‧‧‧Fully transparent area

L1‧‧‧First side

L2‧‧‧Second side

L3‧‧‧third side

L4‧‧‧Fourth side

r1‧‧‧clockwise

△R‧‧‧The difference between the large radius and the small radius of the ring structure 12

Claims (13)

A transmittance adjustment device, characterized by comprising: a rotation center area, and a ring structure arranged around the rotation center area; the ring structure includes a transmittance adjustment area and a complete light transmission area; the transmittance adjustment area is perpendicular to the rotation The first side in the axial direction of the central area is connected to the third side in the aforementioned fully transparent area perpendicular to the axis of the central axis of rotation; the second side in the aforementioned transmittance adjustment area perpendicular to the axis of the central axis of rotation is connected The light area is connected to the fourth side perpendicular to the axis of the rotation center area; the transmittance adjustment area is provided with light transmission holes arranged in an array, and the transmittance area of the transmittance adjustment area is clockwise around the rotation center area. Or gradually increase in a counterclockwise direction; wherein the shape of the light-transmitting hole is a polygon; the transmittance adjustment zone includes a plurality of sub-adjustment zones sequentially arranged in a clockwise or counterclockwise direction around the rotation center area; The hole density of the light-transmitting holes in each sub-adjustment area is the same; in the clockwise or counterclockwise direction around the center of rotation, the sizes of the light-transmitting holes in the different sub-adjustment areas gradually increase; or, the plurality of sub-adjustment areas are gradually increased in size; The size of the light-transmitting holes provided in the adjustment area is the same; in the clockwise or counterclockwise direction around the rotation center area, the hole density of the light-transmitting holes in the different sub-adjustment areas gradually increases. As described in the first item of the scope of patent application, the transmittance adjustment device, wherein in the clockwise or counterclockwise direction around the rotation center area, the hole density of the light-transmitting holes in the transmittance adjustment area is the same, and the transmittance The size of the light hole gradually increases. As described in the first item of the scope of patent application, the transmittance adjusting device, wherein, in the clockwise or counterclockwise direction around the rotation center area, the size of the light-transmitting hole of the transmittance adjusting area is the same, and the light-transmitting The hole density of the holes gradually increases. Such as the transmittance adjustment device described in item 1 of the scope of patent application, wherein the multiple sub-adjustment regions have the same size. As for the transmittance adjustment device described in item 4 of the scope of patent application, the area of the aforementioned fully transparent region is k times of the aforementioned sub-adjustment region; wherein, k is a positive integer. For example, in the transmittance adjusting device described in item 1 of the scope of patent application, the transmittance adjusting area and the completely transparent area are both fan-shaped. The transmittance adjustment device described in item 6 of the scope of patent application, wherein the transmittance adjustment area includes a plurality of sub adjustment areas sequentially arranged in a clockwise or counterclockwise direction around the rotation center area; the foregoing multiple sub adjustment areas The transmittance increases exponentially in a clockwise or counterclockwise direction around the aforementioned rotation center area; wherein the transmittance of each sub-adjustment zone is the ratio of the light-transmitting area of the sub-adjustment zone to the area of the sub-adjustment zone. For example, the transmittance adjustment device described in item 7 of the scope of patent application, wherein the transmittance adjustment area includes N sub adjustment areas sequentially arranged in a clockwise or counterclockwise direction around the rotation center area; among them, the X-th sub-adjustment area The transmittance of the adjustment area is A%×(100/A) ^[(X-1)/X] ; A% is the transmittance of the first sub-adjustment area; N is a positive integer; X is greater than or equal to 1 and less than or equal to N Positive integer. For example, the transmittance adjustment device described in item 7 of the scope of patent application, wherein the transmittance adjustment area includes M sub adjustment areas sequentially arranged in a clockwise or counterclockwise direction around the rotation center area; the first sub adjustment area The aforementioned light-transmitting hole is not provided; wherein, the transmittance of the Y-th sub-adjustment area is B%×(100/A) ^[(Y-2)/Y-1] ; B% is the transmittance of the second sub-adjustment area; M is a positive integer, and Y is a positive integer greater than or equal to 2 and less than or equal to M. For the transmittance adjustment device described in item 9 of the scope of patent application, the aforementioned polygon is a regular polygon. The transmittance adjustment device described in the first item of the scope of patent application, wherein the transmittance adjustment device is made of stainless steel or aluminum. Such as the transmittance adjusting device described in item 1 of the scope of the patent application, wherein the transmittance adjusting device is manufactured by a 3D printing process. For the transmittance adjustment device described in item 1 of the scope of the patent application, at least one rotation axis interface is provided in the aforementioned rotation center area, which is configured to be connected and installed with an external rotation device.

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