TWI749287B - Composition of acidic hydrogen peroxide aqueous solution - Google Patents

Abstract

A composition of acidic hydrogen peroxide aqueous solution includes hydrogen peroxide, an acid-base regulator and an amino acid. The acid-base regulator includes an acid and an organic base. The amino acid has a structure represented by Formula (I). A pH value of the composition of acidic hydrogen peroxide aqueous solution is greater than or equal to 3.5 and is less than or equal to 4.6. Based on 100 parts by weight of the composition of acidic hydrogen peroxide aqueous solution, a content of the acid-base regulator is 10 parts by weight to 35 parts by weight, and a content of the amino acid is 0.08 parts by weight to its solubility. As such, it is favorable for enhancing the stability of the hydrogen peroxide. Also, it is favorable for removing metal ions with extraction method so as to conduct the liquid waste treatment or to reuse.

Description

Acidic hydrogen peroxide aqueous solution composition

The present invention relates to an aqueous hydrogen peroxide solution composition, and particularly relates to an acidic hydrogen peroxide aqueous solution composition.

Hydrogen peroxide has strong metal oxidizing properties. It is often used as a metal surface treatment agent or an oxidizing agent in etching solutions. However, due to its easy decomposition characteristics, hydrogen peroxide is easy to accelerate when exposed to heat, alkalis or mixed with metal ions The rate of decomposition of hydrogen peroxide, which in turn causes a large amount of gas to be produced and an explosion hazard.

When the etching solution is used for etching, the metal in the etching object will enter the etching solution in an ionic form (that is, forming metal ions) after dissolving, and accelerate the decomposition of hydrogen peroxide, resulting in the etching rate and quality of the etching solution. The increase in the concentration of metal ions cannot be controlled, and in severe cases, it may even cause an explosion. As a result, the user needs to replace the etching solution when it reaches the tolerable metal ion concentration to ensure the etching quality and safety, which is not conducive to reducing production costs and will generate a large amount of waste liquid.

In order to prolong the life of the etching solution, stabilizers such as inorganic phosphate, organic phosphoric acid or polyfunctional carboxylic acid can be added to the etching solution to improve the stability of hydrogen peroxide. Most of the aforementioned stabilizers are used The stabilizer chelates with metal ions to slow down the decomposition rate of hydrogen peroxide.

However, when the stabilizer has a good chelating ability to metal ions, although the stability of hydrogen peroxide can be improved, when the etching solution reaches a tolerable metal ion concentration and needs to be replaced, the etching solution cannot directly remove the metal by the extraction method. The ions are effectively and quickly removed before waste liquid treatment or reuse. Only after dilution, coagulant can be added for chemical coagulation treatment, which leads to a large increase in the amount of waste liquid produced, which is not friendly to the environment.

One object of the present invention is to provide an acidic hydrogen peroxide aqueous solution composition, which is beneficial to improve the stability of hydrogen peroxide, and facilitates the use of extraction methods to remove metal ions for waste liquid treatment or reuse.

According to one embodiment of the present invention, there is provided an acidic hydrogen peroxide aqueous solution composition comprising hydrogen peroxide, an acid-base regulator, and an amino acid. The acid-base regulator includes acids and organic bases. The amino acid has a structure as shown in formula (I): CH ₃ (CH ₂ ) _m S(CH ₂ ) _n -CH(NH ₂ )-COOH (I), where m is an integer from 0 to 1, n is an integer from 1 to 3, the acid-base value of the acidic hydrogen peroxide aqueous solution composition is greater than or equal to 3.5 and less than or equal to 4.6, based on 100% by weight of the acidic hydrogen peroxide aqueous solution composition, and the content of the acid-base regulator is 10 The weight percentage to 35 weight percentage, the content of the amino acid is 0.08 weight percentage to the solubility of the amino acid.

In order to make the above and other objects, features, advantages and embodiments of the present invention more comprehensible, the description of the accompanying drawings is as follows: Figure 1 shows the attenuation rate and pH value of Examples 2 to 4 and Comparative Example 11. The relationship diagram; the second diagram is the relationship diagram between the attenuation rate of Examples 5 to 8 and the content of methionine; and the third diagram is the judgement of the attenuation rate of hydrogen peroxide when different addition amounts of methionine are combined with different pH values result.

In the present invention, a skeleton formula is sometimes used to express the structure of a compound, and such a notation may omit carbon atoms, hydrogen atoms, and carbon-hydrogen bonds. If functional groups are clearly drawn in the structural formula, the drawn ones shall prevail.

In the present invention, the range represented by "a value to another value" is a summary expression method that avoids enumerating all the values in the range one by one in the specification. Therefore, the record of a specific numerical range covers any numerical value in the numerical range and the smaller numerical range defined by any numerical value in the numerical range, as if the arbitrary numerical value and the smaller numerical value are clearly written in the specification The scope is the same. For example, the range of "0.1wt%~1wt%", regardless of whether other values are listed in the specification, all cover the range of "0.5wt%~0.8wt%".

<Acid hydrogen peroxide aqueous solution composition>

An acidic hydrogen peroxide aqueous solution composition comprising hydrogen peroxide, acid-base regulator and amino acid. The acid-base regulator includes acids and organic bases. The amino acid has a structure as shown in formula (I): CH ₃ (CH ₂ ) _m S(CH ₂ ) _n -CH(NH ₂ )-COOH (I), where m is an integer from 0 to 1, n is an integer from 1 to 3, the acid-base value of the acidic hydrogen peroxide aqueous solution composition is greater than or equal to 3.5 and less than or equal to 4.6, based on 100% by weight of the acidic hydrogen peroxide aqueous solution composition, and the content of the acid-base regulator is 10 The weight percentage to 35 weight percentage, the content of the amino acid is 0.08 weight percentage to the solubility of the amino acid.

The composition of the above-mentioned acidic hydrogen peroxide aqueous solution is beneficial to improve the stability of hydrogen peroxide, and is beneficial to the use of extraction methods to remove metal ions for waste liquid treatment or reuse.

The aforementioned "acid-base regulator includes acid and organic base" means that the acid and organic base can be mixed in any ratio under the condition that the acid-base value of the acidic hydrogen peroxide aqueous solution composition is greater than or equal to 3.5 and less than or equal to 4.6.

The aforementioned "solubility" refers to the amount of solute contained in a unit of saturated solution at a specified temperature and pressure. It is also the maximum amount of solute that can be dissolved at a specific temperature and pressure. Therefore, the "solubility of amino acid" refers to the amino group The maximum amount of acid dissolved in an acidic hydrogen peroxide aqueous solution composition at a specific temperature and pressure. For example, if the acidic hydrogen peroxide aqueous solution composition is placed in an environment of 1 atm and 25°C, the "solubility of amino acid" refers to The maximum amount of amino acid dissolved in an acidic hydrogen peroxide aqueous solution composition at 1 atm and 25°C. In other words, the upper limit of the content of the amino acid in the acidic hydrogen peroxide aqueous solution composition varies with pressure and temperature.

The aforementioned "extraction method" can be, but is not limited to, the use of an extractant or the use of ion exchange resins to remove metal ions.

According to the aforementioned acidic hydrogen peroxide aqueous solution composition, m can be equal to 0, and n can be equal to 2. In other words, the amino acid has a structure as shown in formula (I-1): CH ₃ S(CH ₂ ) ₂ -CH(NH ₂ )-COOH (I-1), the amino group of formula (I-1) The name of the acid is Methionine.

According to the aforementioned composition of the acidic hydrogen peroxide aqueous solution, the acid may include an organic acid. For example, the organic acid may include lactic acid, malic acid, succinic acid, citric acid, malonic acid, benzenesulfonic acid, and benzenesulfonic acid. At least one selected from the group consisting of things. That is, the organic acid may be one of lactic acid, malic acid, succinic acid, citric acid, malonic acid, benzenesulfonic acid, and benzenesulfonic acid derivatives, or a mixture of at least two or more in any ratio. The aforementioned "benzenesulfonic acid derivative" means that at least one of the hydrogens on the benzene ring of benzenesulfonic acid is replaced by a monovalent organic group, and the monovalent organic group can be, but is not limited to, a hydroxyl group, a carboxyl group or an aldehyde group. Specifically, the benzenesulfonic acid derivative may be 4-hydroxybenzenesulfonic acid. In addition, the acid may include an inorganic acid. Specifically, for example, the inorganic acid may include at least one selected from the group consisting of sulfuric acid, nitric acid, phosphoric acid, and hydrochloric acid. That is, the inorganic acid may be one of sulfuric acid, nitric acid, phosphoric acid, and hydrochloric acid, or a mixture of at least two or more in any ratio.

According to the composition of the aforementioned acidic hydrogen peroxide aqueous solution, the organic base may include 3-diethylaminopropylamine, 2-amino-2-methyl-1-propanol, 1-amino-2-propanol, dimethyl At least one selected from the group consisting of ethanolamine. That is, the organic base can be 3-diethylaminopropylamine, 2-amino-2-methyl-1-propanol, One of 1-amino-2-propanol and dimethylethanolamine, or a mixture of at least two of them in any ratio.

According to the aforementioned acidic hydrogen peroxide aqueous solution composition, based on 100 weight percent of the acidic hydrogen peroxide aqueous solution composition, the total content of acid and organic base can be 10 weight percent to 35 weight percent.

According to the aforementioned acidic hydrogen peroxide aqueous solution composition, based on 100 weight percent of the acidic hydrogen peroxide aqueous solution composition, the content of hydrogen peroxide may be 1 weight percent to 25 weight percent. Alternatively, the content of hydrogen peroxide may be 2 wt% to 15 wt%. Alternatively, the content of hydrogen peroxide may be 5 weight percent to 9 weight percent.

According to the aforementioned acidic hydrogen peroxide aqueous solution composition, based on 100 weight percent of the acidic hydrogen peroxide aqueous solution composition, the content of the acid-base regulator can be 12 to 30 weight percent. Alternatively, the content of the acid-base regulator may be 14% to 28% by weight. For example, when the acid-base modifier only contains organic acids, the content of the organic acid may be 12% to 30% by weight, or the content of the organic acid may be 14% to 28% by weight. For another example, when the acid-base regulator only contains organic acids and organic bases, the total content of organic acids and organic bases can be 12% to 30% by weight, or the total content of organic acids and organic bases can be 14 Weight percent to 28 weight percent. For another example, when the acid-base regulator includes organic acids, organic bases, and inorganic acids, the total content of organic acids, organic bases, and inorganic acids can be 12% to 30% by weight, or organic acids, organic bases, and The total content of inorganic acids can be 14% to 28% by weight, and so on.

According to the aforementioned acidic hydrogen peroxide aqueous solution composition, it may optionally contain at least one additive, such as hydrogen peroxide stabilizer or alcohol, to improve its etching performance. The additive system is conventional and will not be repeated here.

According to the aforementioned acidic hydrogen peroxide aqueous solution composition, it may further contain water. Specifically, the composition of the acidic hydrogen peroxide aqueous solution uses water as a solvent, and the aforementioned water may be, but is not limited to, distilled water, deionized water, and preferably deionized water.

According to the aforementioned acidic hydrogen peroxide aqueous solution composition, it can be used to etch copper-containing metal layers, specifically, it can be used to etch copper-containing single-layer metals, copper/titanium, copper/nickel, copper/molybdenum, and copper/molybdenum nitride. , Molybdenum/copper/molybdenum nitride, molybdenum nitride/copper/molybdenum nitride and molybdenum nitride/copper/molybdenum and other multilayer metal layers.

<Experimental materials>

In the following experiments 1 to 5, the functions, abbreviations, Chinese names, English names and structural formulas of the components in the mother liquor before copper dissolution are listed in Table 1A.

In the following experiment 4, the abbreviations and structural formulas of the stabilizers in Comparative Examples 12-19 are listed in Table 1B.

The extractant used in Experiment 5 is a substance with the trade name Acorga M5640, which contains one of the structures shown in formula (II):

<Experiment 1. Hydrogen peroxide stability of different amino acids>

First, the acidic hydrogen peroxide aqueous solution compositions of Example 1 and Comparative Examples 1-10 were prepared. The preparation method of the acidic hydrogen peroxide aqueous solution composition of Example 1 is as follows: (1) Add 2.78 grams of amino acid to formula 1. The amino acid used in Example 1 is methionine, and then make up to 100 G to form a mother liquor, in which the acid-base regulators are organic acids and organic bases; (2) take 21.6 g of mother liquor, add 0.2 g of copper foil (Cu) to dissolve it, and use 69wt% nitric acid aqueous solution (HNO _{3(aq. )} ) Adjust the pH to 4.0, and add 31wt% aqueous hydrogen peroxide solution (H ₂ O _2(aq.) ) to make the concentration of hydrogen peroxide 8.0wt% to form the acid peroxide after dissolving copper in Example 1. A hydrogen aqueous solution composition, wherein the acid-base regulator is an organic acid, an organic base, and an inorganic acid. For the composition of the mother liquor, see Table 2A, and for the composition of the acidic hydrogen peroxide aqueous solution, see Table 2B. The preparation method of the acidic hydrogen peroxide aqueous solution composition of Comparative Examples 1-10 is as follows: The amino acid type in Example 1 is replaced, as shown in Table 2C, and the rest of the steps are the same to form Comparative Examples 1-10 The composition of the acidic hydrogen peroxide aqueous solution.

Hydrogen peroxide stability measurement method: Measure the hydrogen peroxide concentration [H ₂ O ₂ ]T _{0 of the} freshly prepared acidic hydrogen peroxide aqueous solution composition, and place the acidic hydrogen peroxide aqueous solution composition in an environment of 35°C After placed in the middle for 20 hours, measure the hydrogen peroxide concentration [H ₂ O ₂ ]T ₁ , and then calculate the hydrogen peroxide decay rate, Decay rate(wt%/hr)=([H ₂ O ₂ ]T ₀ -[ H ₂ O ₂ ]T ₁ )/20, the measurement results of hydrogen peroxide stability of Example 1 and Comparative Examples 1-10 are shown in Table 2C.

It can be seen from Table 2C that the hydrogen peroxide stability of Example 1 is better than that of Comparative Example 1 to Comparative Example 10.

<Experiment 2. The stability of hydrogen peroxide at different pH values>

The acidic hydrogen peroxide aqueous solution compositions of Examples 2 to 4 and Comparative Example 11 were prepared. The preparation method was as follows: (1) Add 0.09 g of methionine to formula 1, and then make up to 100 g of water to form a mother liquor. Acid-base regulators are organic acids and organic bases; (2) Take 21.6 g of mother liquor, add 0.2 g of copper foil (Cu) to dissolve, and adjust the pH to 3.5, 3.7, 4.4, 4.6 with 69wt% nitric acid aqueous solution, And add 31wt% hydrogen peroxide aqueous solution to make the concentration of hydrogen peroxide 8.0wt% to form the acidic hydrogen peroxide aqueous solution composition of Examples 2 to 4 and Comparative Example 11, wherein the acid-base regulator is an organic acid, an organic base And mineral acids. For the composition of the mother liquor, see Table 3A, and for the composition of the acidic hydrogen peroxide aqueous solution, see Table 3B.

The hydrogen peroxide stability was measured in Examples 2 to 4 and Comparative Example 11. The measurement method is the same as Experiment 1, and the description is not repeated here. The measurement results of hydrogen peroxide stability of Examples 2 to 4 and Comparative Example 11 are shown in Table 3C.

With reference to Figure 1, it is a graph of the relationship between the attenuation rate and the pH value of Examples 2 to 4 and Comparative Example 11. The unit of the attenuation rate is wt%/hr. It can be seen from Table 3C and Figure 1 that when the content of methionine is about 0.08wt%~0.09wt%, the pH value falls in the range of 3.5~4.6, which is beneficial to improve the stability of hydrogen peroxide.

<Experiment 3-1, the stability of hydrogen peroxide with different amino acid content at pH 3.7>

In Experiment 3-1, the acidic hydrogen peroxide aqueous solution compositions of Examples 5 to 8 were prepared. The preparation method is as follows: (1) Add 0.09 g, 1.39 g, 2.78 g, and 4.44 g of methionine to formula 1, respectively, Then add water to 100 grams to form the mother liquor of Examples 5-8, in which the acid-base regulators are organic acids and organic bases; (2) Take 21.6 grams of mother liquor, add 0.2 g of copper foil (Cu) to dissolve it, and then dissolve it with The pH value of 69wt% nitric acid aqueous solution was adjusted to 3.7, and 31wt% hydrogen peroxide aqueous solution was added to make the concentration of hydrogen peroxide 8.0wt% to form the acidic hydrogen peroxide aqueous solution composition of Examples 5 to 8, wherein the acid-base regulator For organic acids, organic bases and inorganic acids. For the composition of the mother liquor, see Table 4A, and for the composition of the acidic hydrogen peroxide aqueous solution, see Table 4B.

The hydrogen peroxide stability measurement was carried out in Examples 5-8, and the measurement method was the same as Experiment 1, and the description is not repeated here. The measurement results of the hydrogen peroxide stability of Examples 5 to 8 are shown in Table 4C.

With reference to Figure 2, it is a graph of the relationship between the attenuation rate and the content of methionine in Examples 5 to 8, the unit of the attenuation rate is wt%/hr, and the unit of the content of methionine is wt%. It can be seen from Table 4C and Figure 2 that when the pH is 3.7, the content of methionine is 0.08wt%~3.89wt%, which is beneficial to improve the stability of hydrogen peroxide. In addition, it can be inferred from Figure 2 that when the content of methionine is gradually increased from 0.08wt%, it is beneficial to reduce the attenuation rate, and when the content of methionine increases to about 2.43wt%, the attenuation rate tends to change Therefore, it can be reasonably inferred that when the content of methionine is less than 0.08wt%, the effect of stabilizing hydrogen peroxide is poor, and when the content of methionine is increased to its solubility, there is still excellent stable peroxide The effect of hydrogen.

<Experiment 3-2, the stability of hydrogen peroxide with different amino acid content at pH 4.6>

In addition, experiment 3-2 was performed to observe the stability of hydrogen peroxide when the pH of the acidic hydrogen peroxide aqueous solution composition was 4.6 and the amount of methionine added was different. The experimental methods and experiments of experiment 3-2 3-1 is similar, the difference is that when the pH value is adjusted with 69wt% nitric acid aqueous solution, the pH value is adjusted to 4.6. For the composition of the mother liquor solution, see Table 5A, and for the composition of the acidic hydrogen peroxide aqueous solution, see Table 5B.

Refer to Figure 3, which is the evaluation result of hydrogen peroxide decay rate when methionine is added with different pH values. The circle with a diagonal line indicates that the decay rate is judged as ◎, and the circle with × indicates the decay rate. The judgment is △ or ×. More specifically, Figure 3 shows the measurement results of Experiment 2, Experiment 3-1, and Experiment 3-2. It can be seen from Figure 3 that when the content of methionine is 0.08wt%, the pH is 4.6 The effect of stabilizing hydrogen peroxide is not good, and the attenuation rate is judged to be △ or ×. When the content of methionine (for example, 3.89wt%) is increased, the acidic hydrogen peroxide aqueous solution composition can be made to have a pH of 4.6. The attenuation rate is judged to be ◎, which can still provide an excellent effect of stabilizing hydrogen peroxide.

<Experiment 4. Extractability experiment>

First, the test solutions of Example 9, Reference Examples 1 to 2, and Comparative Examples 12 to 19 were prepared. The preparation method of the test solution of Example 9 is as follows: (1) Prepare the first solution with formula 2, and add 2.52 g of anhydrous copper sulfate (CuSO ₄ ) to the first solution to form a copper-containing solution. Regarding the composition of formula 2 Please refer to Table 6A; (2) A stabilizer was added to the copper-containing solution. The stabilizer in Example 9 was methionine, ^{and the molar ratio of copper ion [Cu 2+} ] to methionine was 1: 1.2 to form the test solution of Example 9. The preparation methods of the test solutions of Reference Examples 1 to 2 and Comparative Examples 12 to 19 are as follows: The methionine in Example 9 is replaced with other stabilizers, as shown in Table 6B, and the rest of the steps are the same to form a reference For the test solutions of Examples 1 to 2 and Comparative Examples 12 to 19, if the molar number of other stabilizers cannot reach 1.2 times that of the copper ion when the solubility of other stabilizers is added, the added amount shall be based on the solubility.

Extractability measurement method: The tests of Example 9, Reference Examples 1 to 2 and Comparative Examples 12 to 19 were extracted with an extractant for 2 minutes, and the water phase was taken with a spectrophotometer or inductively coupled plasma mass spectrometry (Inductively Coupled Plasma Mass Spectrometry). Plasma Mass Spectrometry (ICP-MS) confirms the copper ion concentration in the water phase. Please refer to the following for details. The extractability measurement results of Example 9, Reference Examples 1 to 2 and Comparative Examples 12 to 19 are shown in Table 6B.

It can be seen from Table 6B that the addition of methionine can provide excellent extractability. Although Reference Example 1 and Reference Example 2 have excellent extractability, they are not conducive to improving the stability of hydrogen peroxide (refer to Table 2C). ).

The above method for confirming the copper ion concentration in the water phase with a spectrophotometer (Model PhotoFlex Turb) is as follows: (1) Prepare the sample to be tested, first prepare the indicator, and the indicator contains water (87.07wt%) and ethylenediamine Disodium tetraacetate (2.38wt%), sodium acetate (1.50%), acetic acid (9.05wt%), the water phases of Example 9, Reference Examples 1~2 and Comparative Examples 12~19 were diluted 10 times with indicator respectively , To form the sample to be tested. (2) Prepare the calibration line solution, firstly dilute the copper standard 10000ppm to form 50ppm, 100ppm, 500ppm, 1000ppm, 5000ppm, 7500ppm, 10000ppm solutions, and dilute the above solution 10 times with the indicator. (3) Detect with a spectrophotometer, the analysis wavelength is 690nm, after the calibration line is established with the calibration line solution, Then measure the sample to be tested to obtain the absorption value, and bring the measured absorption value back to the calibration curve formula to calculate the copper ion concentration of the sample to be tested.

The above method for confirming the copper ion concentration in the water phase by ICP-MS (machine model is Perkin Elmer’s Elan DRC II) is as follows: (1) Prepare the sample to be tested, and compare Example 9, Reference Examples 1 to 2 and Comparative Example 12 to The water phase of 19 was diluted 100 times with water to form the sample to be tested. (2) Use external standard method to measure.

<Experiment 5, the stability of hydrogen peroxide with different contents of acid-base regulator>

First, the acidic hydrogen peroxide aqueous solution compositions of Examples 10-11 and Comparative Example 20 were prepared. The preparation method of the acidic hydrogen peroxide aqueous solution composition of Example 10 is as follows: (1) First prepare the mother liquor, the composition of the mother liquor is shown in Table 7A, wherein the acid-base regulators are organic acids and organic bases; (2) take 21.6 Gram of mother liquor, add 0.2 grams of copper foil to dissolve, adjust the pH to 3.9 with 69wt% aqueous nitric acid solution, and add 31wt% aqueous hydrogen peroxide solution to make the concentration of hydrogen peroxide 5wt% to form the acidic peroxide of Example 10. The hydrogen oxide aqueous solution composition, wherein the acid-base regulators are organic acids, organic bases, and inorganic acids, and the addition amount of 69wt% nitric acid aqueous solution and 31wt% hydrogen peroxide aqueous solution will vary depending on the amino acid. The preparation method of the acidic hydrogen peroxide aqueous solution composition of Example 11 and Comparative Example 20 is as follows: The addition amount of each component in the mother liquor in Example 10 is replaced as shown in Table 7A, and 31wt% hydrogen peroxide aqueous solution is added to make The concentration of hydrogen peroxide is 8wt%, and the rest of the steps are the same to form the acidic hydrogen peroxide aqueous solution composition of Example 11 and Comparative Example 20. For the composition of the mother liquor solution, see Table 7A, and for the composition of the acidic hydrogen peroxide aqueous solution, see Table 7B.

The hydrogen peroxide stability was measured in Examples 10-11 and Comparative Example 20, and the measurement method was the same as Experiment 1, and the description is not repeated here. The measurement results of hydrogen peroxide stability of Examples 10-11 and Comparative Example 20 are shown in Table 7C.

It can be seen from Table 7C that when the content of the acid-base regulator is less than 10wt%, it is difficult to reduce the attenuation rate, which is not conducive to improving the stability of hydrogen peroxide.

In summary, the acidic hydrogen peroxide aqueous solution composition according to the present invention is beneficial to improve the stability of hydrogen peroxide, and is beneficial to the use of extraction methods to remove metal ions for waste liquid treatment or reuse.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone familiar with the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope shall be subject to those defined in the attached patent scope.

Claims (11)

An acidic hydrogen peroxide aqueous solution composition, comprising: hydrogen peroxide; acid-base regulator, comprising acid and organic base; and amino acid, having a structure as shown in formula (I): CH ₃ (CH ₂ ) _m S(CH ₂ ) _n -CH(NH ₂ )-COOH (I), where m is an integer from 0 to 1, and n is an integer from 1 to 3, and the acid-base value of the acidic hydrogen peroxide aqueous solution composition is greater than or Equal to 3.5 and less than or equal to 4.6, based on 100% by weight of the acidic hydrogen peroxide aqueous solution composition, the content of the acid-base regulator is 10% to 35% by weight, and the content of the amino acid is 0.08% by weight to the The solubility of amino acids. The acidic hydrogen peroxide aqueous solution composition as described in item 1 of the scope of patent application, wherein m is equal to 0 and n is equal to 2. The acidic hydrogen peroxide aqueous solution composition described in item 1 of the scope of patent application, wherein the acid comprises an organic acid. The acidic hydrogen peroxide aqueous solution composition as described in item 3 of the scope of patent application, wherein the organic acid comprises lactic acid, malic acid, amber At least one selected from the group consisting of acid, citric acid, malonic acid, benzenesulfonic acid, and benzenesulfonic acid derivatives. The acidic hydrogen peroxide aqueous solution composition described in item 1 of the scope of patent application, wherein the organic base comprises 3-diethylaminopropylamine, 2-amino-2-methyl-1-propanol, 1-amino- At least one selected from the group consisting of 2-propanol and dimethylethanolamine. The acidic hydrogen peroxide aqueous solution composition described in item 1 of the scope of the patent application, wherein the acid comprises an inorganic acid. The acidic hydrogen peroxide aqueous solution composition described in item 6 of the scope of patent application, wherein the inorganic acid comprises at least one selected from the group consisting of sulfuric acid, nitric acid, phosphoric acid, and hydrochloric acid. The acidic hydrogen peroxide aqueous solution composition described in item 1 of the scope of patent application, wherein based on the acidic hydrogen peroxide aqueous solution composition is 100 weight percent, the content of the hydrogen peroxide is 1 weight percent to 25 weight percent. The acidic hydrogen peroxide aqueous solution composition as described in item 1 of the scope of patent application, wherein the acidic hydrogen peroxide aqueous solution composition is based on 100% by weight, the content of the hydrogen peroxide is 2% to 15% by weight. The acidic hydrogen peroxide aqueous solution composition described in item 1 of the scope of patent application, wherein based on the acidic hydrogen peroxide aqueous solution composition is 100 weight percent, the content of the acid-base regulator is 12 weight percent to 30 weight percent. The acidic hydrogen peroxide aqueous solution composition as described in item 1 of the scope of patent application, wherein based on the acidic hydrogen peroxide aqueous solution composition is 100% by weight, the content of the acid-base regulator is 14% by weight to 28% by weight.

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