TWI744958B - Probe with improved grasping structure - Google Patents

Abstract

The invention discloses a probe with an improved grasping structure. The disclosed probe includes: needle The main body is located on one side and includes a plurality of holes; a first extension is formed from the outer side of the needle main body to extend upward; a second extension is formed from the other side end of the first extension to the other The lateral direction is formed and separated by a longer length than the needle body; and the tip portion, which is formed integrally with the second extension portion from the outer upper end of the second extension portion to the upper direction, is formed integrally with the second extension portion. The tip is sharply formed, and the second extension portion has a plurality of elasticity providing holes, which are parallel to the outer peripheral surface of the second extension portion and have different shapes from each other, so that the needle portion of the tip portion has Flowable elasticity.

Description

Probe with improved grasping structure

The invention relates to a probe with an improved grasping structure.

More specifically, it relates to a probe with an improved gripping structure to enable mass production and maintain accuracy.

In the electrical characteristics test (EDS: Electrical Die Sorting) that detects the electrical characteristics of various test objects including semiconductors, the probe card is a tester that reads the generation and result of the test signal and the tester. The interface part of the body connection.

The probes of the probe card are in direct contact with the pads (for example, external signal connection terminals) of the test object, such as a semiconductor, to transmit the signal sent by the detector and receive the corresponding signal. As the integration state of semiconductors increases, the number of pads to be inspected increases, and the gaps between the pads are also formed very tightly, so the probes can also be formed very thin and tightly. The probes developed so far include the needle type (Needle Type) made of tungsten or rhenium-tungsten wire materials, the blade type (Blade Type) made of nickel or beryllium and other materials. ) Is placed on a copper plate or other conductors and etched to make the film type (Film Type), using semiconductor process technology to inject a conductive medium into the hybrid type (Hybrid Type), will use the spring tension of the pogo pin (Pogo Pin) is a pogo type made of material, a MEMS type using semiconductor MEMS process technology, etc.

For ordinary probes, since the elastic part connecting the tip and the base consists of a knot Therefore, there is a problem that when the test body is in contact with the tip, elastic force cannot be uniformly generated, and the test body is damaged by the tip.

The length of the existing probe can be designed according to the Y size of the chip of the wafer. However, with the recent development of technology and the integration of semiconductors, the Y size of the chip of the wafer has been reduced from 6mm to 5mm, and it is necessary to cope with the reduction of technology nodes below 3.5mm.

However, in order to cope with the Y size of the chip of a wafer of 3.5mm or less, the length of the probe is limited to 1.5mm or less, and in consideration of this restriction, the length of the jig can be reduced to 200μm, but the length is shortened At this time, the jig will become very small, so the durability will be shortened.

Since the current optimal length of the probe as a clamp can be held, the length needs to be 300 μm or more. Therefore, while keeping the length of the clamp part at 300 μm or more, the length of the probe can be limited to 1.5 mm or less.

The present invention is an invention for solving the technical problems existing in the prior art as described above. The object of the present invention is to provide a probe formed such that the first to second extensions of the probe are located at the gripping portion of the probe Between the probe body and the needle body of the probe, and the grasping part is arranged on the upper part of the bonding base, so as to prevent the position of the probe from being scattered during the process of installing the probe on the substrate.

In addition, another object of the present invention is to provide an improved probe, which is formed to be able to grasp the probe even under the Y size of a chip of a wafer of 3.5 mm or less, so as to achieve mass production and maintain precision in bonding.

In order to achieve the above-mentioned object, a characteristic probe of the present invention includes: a needle body located on one side and including a plurality of holes; a first extension part extending from the outer side of the needle body to the upper side; Two extension parts extending from the other side end of the first extension part to the other side by a length longer than the needle body and spaced apart; and a tip part, from the outside of the second extension part The upper end is formed integrally with the second extension part in the upward direction, wherein the tip end of the tip part is formed to protrude sharply, and the second extension part has a plurality of elasticity providing holes, which are connected to the second extension part. The outer peripheral surfaces of the tip portion are parallel and have different shapes from each other, so that the needle portion of the tip portion has a flowable elastic force.

The first elasticity providing hole has a long and thin shape, and the second elasticity providing hole has a thicker shape than the first elasticity providing hole, and is formed on the upper portion of the first elasticity providing hole. The protruding part formed in the front of the first extension part is opened.

It may further include a grabbing part formed on the upper part of the first extension part so as to be able to be grabbed by the clamp.

The grabbing portion is formed on the upper part of the first extension portion to enable the gripping of the clamp to be performed inside the needle body to be bonded, and the second extension portion may be formed on the upper portion of the grabbing portion. Lower part.

The needle main body may protrude toward the second extension portion side to maintain rigidity.

Through the above technical solution, the probe with an improved grasping structure according to an embodiment of the present invention has the following effects.

The second extension portion is formed at a lower position than the grasping portion, and one end of the second extension portion formed on the lower side of the elasticity providing hole in the second extension portion is formed to be connected to the upper portion of the needle body, thereby It can maintain higher rigidity than existing probes.

In addition, the gripping part formed on the upper part of the first extension part enables the gripping of the jig to be carried out inside the needle body to be bonded. Therefore, it is possible to prevent the tip part from being lifted up when the needle body is the center of the needle body during bonding. Phenomenon, which can achieve key combination to maintain accuracy.

The additional advantages of the present invention can be clearly understood by referring to the drawings in which the same or similar reference numerals denote the same components and through the following description.

20: substrate

21: Electrode

300: Probe

310: Needle body

312: hole

314: Bottom

330: first extension

332: protruding part

340: second extension

342: First elasticity providing hole

344: second elasticity providing hole

350: Tip

352: Needle

354: Alignment Department

360: grasping department

400: Fixture

L: Laser

FIG. 1 is a schematic diagram showing a probe with an improved grasping structure according to an embodiment of the present invention.

2a to 2c are operation sequence diagrams showing the welding process of the probe shown in FIG. 1.

Hereinafter, the structure and function of the embodiment of the present invention will be described in detail with reference to the drawings. The following description is one of several aspects of the present invention that can be claimed, and the following description may constitute a part of the detailed description of the present invention.

However, in order to clearly describe the present invention, detailed descriptions of well-known structures or functions may be omitted.

The present invention can be modified in various ways and can include various embodiments. Specific embodiments are shown in the drawings and described in the detailed description. However, this is not only limited to the specific embodiments of the present invention, but should be understood to include all changes, equivalents, and alternatives included in the idea and technical scope of the present invention.

Although terms including ordinal numbers (such as first, second, etc.) can be used to describe various components, But these components should not be limited by these terms. These terms are only used to distinguish one component from another.

The terms used in the present invention are only used to describe specific embodiments, but not only to limit the present invention. Unless the context clearly indicates otherwise, the singular expression may include the plural expression.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.

Fig. 1 shows a probe with an improved grasping structure according to an embodiment of the present invention, and Figs. 2a to 2c show the welding process of the probe of Fig. 1.

1, the probe 300 of a preferred embodiment of the present invention includes: a needle body 310 located on one side and including a plurality of holes 312; a first extension 330 extending from the outer side of the needle body 310 to the upper side Formed; a second extension portion 340 extending from the other side end of the first extension portion 330 to the other side direction with a longer length than the needle body 310 formed and spaced apart; and the tip portion 350 from the The outer upper end of the second extension part 340 is formed integrally with the second extension part 340 in an upward direction, wherein the tip end of the tip part 350 is formed to protrude sharply.

The needle body 310 includes a plurality of holes 312, so that when the respective probes 300 are directly bonded to each other to a main board (not shown), since the bonding agent passes through the respective holes 312 and is located on both sides of the needle body 310, bonding properties can be improved.

In addition, the lower end of the needle body 310, that is, the lower end 314 joined to the main board, may be formed in a zigzag shape, so that when the probes 300 are directly joined to the main board, the joining area of the zigzag shape is increased compared to the linear shape. Therefore, the bondability can be improved.

The tip portion 350 may include: a needle 352 formed in a tapered shape so as to be sharply formed so as to be in contact with the wire of the panel when the panel is detected; and an align portion 354, and The needles 352 are spaced apart and extended. Wherein, the needle 352 protrudes more from the second extension part 340 than the alignment part 354. In addition, the alignment portion 354 is used to determine the Whether the wires are aligned when they are in contact with the needles 352.

The second extension portion 340 includes a plurality of elasticity providing holes 342 and 344 formed in a rod shape at the central portion. The two elasticity providing holes 342, 344 shown in the drawings are formed to have a shape elongated and extended along the length direction of the second extension 340, and are parallel to the outer peripheral surface of the second extension 340, and may have More than one may have other shapes.

The first elasticity providing hole 342 has a long and thin shape, but the second elasticity providing hole 344 has a thicker shape than the first elasticity providing hole 342, and is formed on the upper portion of the first elasticity providing hole 342, and the second elasticity providing hole 342 The hole 344 may be divided by the protrusion 332 formed in the front of the first extension 330 to provide various elasticity. According to an embodiment, although not specifically shown, the protrusion 332 may be formed to provide various elasticities through a plurality of protrusions separated into several or various shapes. Not only that, in order to solve the heat generated by the application of current, a structure (such as a protrusion) that can increase the surface area of the needle can be provided to promote heat dissipation.

As described above, the probe 300 of the embodiment of the present invention includes elasticity providing holes 342 and 344 with the above-mentioned structure, and the needle 352 part includes elasticity providing holes 342 and 344 at the upper and lower sides, so that the needle 352 part has elastic force capable of flowing up and down.

In addition, the second extension part 340 may be formed at a lower position than the grasping part 360 described later, and is formed in the second extension part 340 on one side of the second extension part 340 below the elasticity providing holes 342, 344 The end may be formed to be connected with the upper end of the needle body 310. As a result, it is possible to maintain higher rigidity than existing probes.

In addition, the probe 300 of the embodiment of the present invention may further include a grasping part 360 formed at the upper portion of the first extension part 330 so as to be able to be grasped by the clamp 400.

The grasping part 360 may be formed in an inner region that does not deviate from one end of the first extension part 330 (the right end in FIG. 1 ).

Preferably, it is formed such that one end of the first extension 330 and one end of the needle main body 310 The ends are consistent, and preferably one end of the first extension part 330 is consistent with one end of the grasping part 360.

In addition, the width of the gripping part 360 in the longitudinal direction may be formed not to be greater than the width of the jig 400 in the longitudinal direction. Preferably, it may be formed such that the lengthwise width of the gripping part 360 is the same as the lengthwise width of the clamp 400.

As described above, one end of the needle body 310, one end of the first extension part 330, and one end of the gripping part 360 are formed to be consistent, and the lengthwise width of the gripping part 360 is the same as the lengthwise width of the jig 400 Formed to be the same, when the clamp 400 grips the gripping portion 360 and contacts the substrate 20 for bonding, the direction of the load transferred from the clamp 400 coincides with the vertical direction. This prevents the other end portion of the needle main body 310 (the left end of the needle main body 310 in FIG. 1) from being lifted during the bonding process, and finally prevents the tip portion 350 from being lifted.

On the other hand, the needle body 310 is formed to protrude further toward the tip portion 350 than the first extension portion 330 and the grasping portion 360, so that the other end portion of the needle body 310 can be further prevented from being lifted during the bonding process. rise.

The probe 300 of the present invention configured as described above can be bonded by the operation of the bonding device. The bonding method using the operation of the bonding device will be described below.

First, in a state where a plurality of probes 300 are installed in a cassette, the cassette is moved in a prescribed direction to bring the probes close to the jig 400, and then the probe 300 is mapped through a vision system (not shown). After grasping the correct position at the position of the position, the clamp 400 grips the gripping part 360 and sequentially transfers it.

In order to bond the transferred probe 300 to the substrate 20 for electrical connection, a soldering process is required, and soldering may require necessary substances such as lead. Wherein, for lead, after the clamp 400 grips the gripping part 360 of the probe 300, the needle body 310 is immersed in the lead bath to apply the lead on the surface of the needle body 310, and then as shown in FIGS. 2a to 2c, the The probe is transferred to the substrate 20, it is also possible to use the probe 300 pre-plated with lead on the needle body 310, and then, as shown in FIGS. 2a to 2c, the jig 400 is used to transfer the probe To substrate 20.

In this state, use the vision system to align the platform (not shown) in the X, Y, and Z directions, or rotate, to confirm the needle body 310 and the substrate 20 of the probe 300 of the embodiment of the present invention. Then, the lower part of the needle body 310 of the probe 300 or the substrate 20 is irradiated with the laser L to weld the lower part of the needle body 310 to the electrode 21 of the substrate 20. Of course, the aforementioned welding process is monitored by a monitoring device (not shown).

According to the probe 300 of the present invention as described above, the second extension part 340 is formed at a lower side position than the grasping part 360, and the second extension part 340 is formed in the second extension part below the elasticity providing holes 342, 344 One end of the portion 340 is formed to be connected to the upper portion of the needle main body 310, thereby being able to maintain higher rigidity than the conventional probe.

In addition, the gripping portion 360 formed on the upper portion of the first extension portion 330 enables the gripping of the clamp 400 on the inner side of the needle main body 310 to be bonded. Therefore, it is possible to prevent the needle main body 310 from being centered at the time of bonding. 350 is lifted up, so as to achieve key combination and maintain accuracy.

Industrial applicability

Without departing from the scope of the present invention, various modifications can be realized by the configurations and methods described and exemplified in this specification. Therefore, all the contents included in the above detailed description or shown in the drawings are All are exemplary, and not only to limit the present invention. Therefore, the scope of the present invention is not limited to the above-mentioned exemplary embodiments, but should be limited only according to the scope of patent applications and their equivalents.

20: substrate

300: Probe

310: Needle body

312: hole

314: Bottom

330: first extension

332: protruding part

340: second extension

342: First elasticity providing hole

344: second elasticity providing hole

350: Tip

352: Needle

354: Alignment Department

360: grasping department

400: Fixture

Claims (3)

A probe is characterized in that it comprises: a needle body located on one side and comprising a plurality of holes; a first extension part extending from the outer side of the needle body to the upper side; a second extension part extending from the first The other side end of an extension part extends to the other side by a longer length than the needle body and is spaced apart; The second extension is formed as one body, wherein the tip of the tip is formed to protrude sharply; the second extension has a first elasticity providing hole and a second elasticity providing hole, the first elasticity providing hole and the The second elasticity providing hole is parallel to the outer peripheral surface of the second extension portion and has different shapes from each other so that the needle portion of the tip portion has a flowable elastic force; the first elasticity providing hole has another A long and thin shape, the second elasticity providing hole has a thicker shape than the first elasticity providing hole, and is formed on the upper portion of the first elasticity providing hole, and is formed on the first extension portion The front protruding part is opened, the first elasticity providing hole and the second elasticity providing hole are approximately the same length in the second extension part, and the first elasticity providing hole and the second elasticity providing hole are separated by a spacer. The first elasticity providing hole is wavy corresponding to the shape of the spacer; the tip portion further includes an alignment portion, which is spaced apart from and extended from the needle, and the needle is larger than the alignment portion. More protruding from the second extension; a grabbing portion, which is formed on the upper part of the first extension to be grabbed by a clamp, one end of the needle body, the first extension One end and one end of the grasping portion are formed to be consistent, and the longitudinal width of the grasping portion is formed to be the same as the longitudinal width of the clamp, and the needle body is formed to be larger than the first An extension part and the gripping part are further towards the tip protrude. The probe according to claim 1, wherein the grasping portion is formed on the upper portion of the first extension portion to implement grasping of the clamp on the inner side of the needle body to be bonded, and the second extension portion It is formed at the lower part of the grasping part. In the probe according to claim 1, the needle body protrudes toward the second extension portion to maintain rigidity.

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