TWI737802B - Method for roughening metal forming body - Google Patents

Method for roughening metal forming body Download PDF

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TWI737802B
TWI737802B TW106129896A TW106129896A TWI737802B TW I737802 B TWI737802 B TW I737802B TW 106129896 A TW106129896 A TW 106129896A TW 106129896 A TW106129896 A TW 106129896A TW I737802 B TWI737802 B TW I737802B
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Taiwan
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laser light
roughening
molded body
time
metal
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TW106129896A
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Chinese (zh)
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TW201815501A (en
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板倉雅彥
片山昌廣
宇野孝之
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日商大賽璐塑膠股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/354Working by laser beam, e.g. welding, cutting or boring for surface treatment by melting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/355Texturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/3568Modifying rugosity
    • B23K26/3584Increasing rugosity, e.g. roughening
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/34Coated articles, e.g. plated or painted; Surface treated articles

Abstract

本發明提供一種能夠作為金屬成形體與樹脂、橡膠、金屬等之複合成形體的製造中間體使用的金屬成形體的表面的粗面化方法。 The present invention provides a method for roughening the surface of a metal molded body that can be used as an intermediate for the production of a composite molded body of a metal molded body, resin, rubber, metal, and the like.

金屬成形體的粗面化方法係含有使用雷射裝置以1MW/cm2以上的能量密度、2000mm/sec以上的照射速度對前述金屬成形體的表面照射雷射光之步驟;前述雷射光的照射步驟乃係在對作為粗面化對象的金屬成形體的表面以形成直線、曲線或直線與曲線之組合的方式照射雷射光時,以交替產生雷射光的照射部分與非照射部分的方式進行照射之步驟。 The roughening method of the metal formed body includes the step of using a laser device to irradiate the surface of the metal formed body with laser light at an energy density of 1 MW/cm 2 or more and an irradiation speed of 2000 mm/sec or more; the aforementioned laser light irradiation step When irradiating the surface of the metal molded body that is the object of roughening to form a straight line, a curve, or a combination of a straight line and a curve, the irradiated part and the non-irradiated part of the laser light are irradiated alternately. step.

Description

金屬成形體的粗面化方法 Method for roughening metal forming body

本發明係有關能夠作為金屬成形體與樹脂、橡膠、或金屬等之複合成形體的製造中間體使用的金屬成形體的粗面化方法。 The present invention relates to a method for roughening a metal molded body that can be used as an intermediate for the production of a composite molded body of a metal molded body and a resin, rubber, metal, or the like.

已知有在製造由金屬成形體與樹脂成形體構成的複合成形體時,將金屬成形體的表面粗面化後使之一體化的技術。日本國特許第5774246號公報中係記載一種金屬成形體的粗面化方法(請求項1),係使用連續波雷射(laser)以2000mm/sec以上的照射速度對金屬成形體的表面連續照射雷射光,藉此將前述金屬成形體的表面粗面化。關於在實施日本國特許第5774246號公報之發明的粗面化方法後,與樹脂成形體接合而得的複合成形體係金屬成形體與樹脂成形體以高接合強度接合(日本國特許第5701414號公報)。 It is known that when a composite molded body composed of a metal molded body and a resin molded body is manufactured, the surface of the metal molded body is roughened and then integrated. Japanese Patent No. 5774246 describes a method for roughening a metal formed body (claim 1), which uses a continuous wave laser to continuously irradiate the surface of the metal formed body at an irradiation speed of 2000mm/sec or more. The laser light thereby roughens the surface of the aforementioned metal molded body. With regard to the composite molding system, the metal molded body and the resin molded body joined to the resin molded body after the roughening method of the invention in Japanese Patent No. 5774246 is joined with high bonding strength (Japanese Patent No. 5701414 ).

本發明的課題為提供一種用以將能夠作為金屬成形體與樹脂、橡膠、或金屬等之複合成形體的製造中間體使用的金屬成形體的表面粗面化之金屬成形體的粗面化方法。 The subject of the present invention is to provide a method for roughening the surface of a metal molded body that can be used as an intermediate for the production of a composite molded body of a metal molded body and a resin, rubber, or metal. .

本發明係提供金屬成形體的粗面化方法,該金屬成形體的粗面化方法係含有使用雷射裝置以1MW/cm2以上的能量(energy)密度、2000mm/sec以上的照射速度對前述金屬成形體的表面照射雷射光之步驟;前述雷射光的照射步驟乃係在對作為粗面化對象的金屬成形體的表面以形成直線、曲線或直線與曲線之組合的方式照射雷射光時,以交替產生雷射光的照射部分與非照射部分的方式進行照射之步驟。 The present invention provides a method for roughening a metal formed body. The method for roughening a metal formed body involves using a laser device to apply an energy density of 1 MW/cm 2 or more and an irradiation speed of 2000 mm/sec or more to the aforementioned The step of irradiating the surface of the metal molding with laser light; the aforementioned laser light irradiation step is when the surface of the metal molding as the object of roughening is irradiated with the laser light in a manner of forming a straight line, a curve, or a combination of a straight line and a curve, The step of irradiating is performed by alternately generating the irradiated part and the non-irradiated part of the laser light.

依據本發明的金屬成形體的粗面化方法,能夠將金屬成形體的表面形成為複雜的多孔結構。因此,經粗面化的金屬成形體係能夠作為與由樹脂、橡膠、或金屬等構成的成形體之複合成形體的製造來使用。 According to the roughening method of the metal formed body of the present invention, the surface of the metal formed body can be formed into a complicated porous structure. Therefore, the roughened metal molding system can be used as a composite molded body with a molded body made of resin, rubber, metal, or the like.

1‧‧‧雷射光的照射部分 1‧‧‧The irradiation part of the laser light

2‧‧‧雷射光的非照射部分 2‧‧‧The non-irradiated part of the laser light

10、50‧‧‧金屬成形體 10、50‧‧‧Metal forming body

11‧‧‧遮罩材 11‧‧‧Mask material

51‧‧‧面 51‧‧‧Noodles

55‧‧‧金屬板 55‧‧‧Metal plate

56‧‧‧區域 56‧‧‧area

60‧‧‧量測台 60‧‧‧Measuring platform

61‧‧‧平面 61‧‧‧Plane

b1‧‧‧各虛線的間隔 b1‧‧‧The interval of each dotted line

d1、d2‧‧‧金屬板相對向兩邊側的面與量測台的平面之間的間隔 d1, d2‧‧‧The distance between the opposite sides of the metal plate and the plane of the measuring table

L1、L2‧‧‧長度 L1, L2‧‧‧Length

圖1係顯示實施本發明的金屬成形體的粗面化方法時的一實施形態的雷射光的照射狀態之圖。 FIG. 1 is a diagram showing the state of laser light irradiation in one embodiment when the method for roughening a metal molded body of the present invention is implemented.

圖2(a)及(b)係顯示實施本發明的金屬成形體的粗面化方法時的雷射光的照射模式(pattern)之圖,圖2(a)為同一方向的照射模式,圖2(b)為雙方向的照射模式。 Figures 2(a) and (b) are diagrams showing the irradiation pattern of laser light when the method for roughening a metal formed body of the present invention is implemented. Fig. 2(a) is the irradiation pattern in the same direction, and Fig. 2 (b) is a bidirectional irradiation mode.

圖3(a)及(b)係用以說明本發明其他實施形態的雷射光的照射步驟之圖。 3(a) and (b) are diagrams for explaining the laser light irradiation steps of other embodiments of the present invention.

圖4係實施例所使用的金屬成形體的立體圖。 Fig. 4 is a perspective view of a metal molded body used in an embodiment.

圖5係在實施例1將鋁(aluminum)成形體粗面化時的表面的SEM影像。 FIG. 5 is an SEM image of the surface when an aluminum (aluminum) molded body is roughened in Example 1. FIG.

圖6(a)係在實施例4將鋁成形體粗面化時的表面的SEM影像,圖6(b)係剖面的SEM影像。 Fig. 6(a) is an SEM image of the surface when the aluminum molded body is roughened in Example 4, and Fig. 6(b) is an SEM image of a cross section.

圖7係在實施例5將鋁成形體粗面化時的表面的SEM影像。 FIG. 7 is an SEM image of the surface when the aluminum molded body was roughened in Example 5. FIG.

圖8(a)係在實施例8將鋁成形體粗面化時的表面的SEM影像,圖8(b)係剖面的SEM影像。 Fig. 8(a) is an SEM image of the surface when the aluminum molded body is roughened in Example 8, and Fig. 8(b) is an SEM image of a cross section.

圖9係在實施例13將鋁成形體粗面化時的表面的SEM影像。 FIG. 9 is an SEM image of the surface when the aluminum molded body was roughened in Example 13. FIG.

圖10(a)係在實施例16將鋁成形體粗面化時的表面的SEM影像,圖10(b)係剖面的SEM影像。 Fig. 10(a) is an SEM image of the surface when the aluminum molded body is roughened in Example 16, and Fig. 10(b) is an SEM image of a cross section.

圖11係在實施例18將不鏽鋼(stainless)成形體粗面化時的表面的SEM影像。 FIG. 11 is an SEM image of the surface of a stainless steel molded body when the stainless steel molded body was roughened in Example 18. FIG.

圖12(a)係在實施例20將不鏽鋼成形體粗面化時的表面的SEM影像,圖12(b)係剖面的SEM影像。 Fig. 12(a) is an SEM image of the surface when the stainless steel molded body is roughened in Example 20, and Fig. 12(b) is an SEM image of a cross section.

圖13係用以說明實施例23至25及比較例1至3的雷射照射方法之圖。 FIG. 13 is a diagram for explaining the laser irradiation methods of Examples 23 to 25 and Comparative Examples 1 to 3.

圖14(a)至(c)係用以說明實施例23至25及比較例1至3的變形量的量測方法之圖。 14(a) to (c) are diagrams for explaining the measurement methods of the amount of deformation of Examples 23 to 25 and Comparative Examples 1 to 3.

圖15係在實施例30將鋁成形體粗面化時的表面的SEM影像。 FIG. 15 is an SEM image of the surface of the aluminum molded body when the aluminum molded body was roughened in Example 30. FIG.

圖16係在實施例31將鋁成形體粗面化時的表面的SEM影像。 FIG. 16 is an SEM image of the surface when the aluminum molded body was roughened in Example 31. FIG.

圖17係在實施例32將鋁成形體粗面化時的表面的SEM影像。 FIG. 17 is an SEM image of the surface when the aluminum molded body was roughened in Example 32. FIG.

圖18係在實施例33將鋁成形體粗面化時的表面的SEM影像。 FIG. 18 is an SEM image of the surface when the aluminum molded body was roughened in Example 33. FIG.

本發明的金屬成形體的粗面化方法乃係以與日本國特許第5774246號公報及日本國特許第5701414號公報之發明所記載的雷射光照射條件不同的雷射光照射條件照射雷射光,藉此與日本國特許第5774246號公報及日本國特許第5701414號公報之發明同樣地將金屬成形體的表面粗面化。 The roughening method of the metal molded body of the present invention is to irradiate laser light under different laser light irradiation conditions from the inventions in Japanese Patent No. 5774246 and Japanese Patent No. 5701414. This roughens the surface of the metal molded body in the same way as the inventions in Japanese Patent No. 5774246 and Japanese Patent No. 5701414.

本發明的金屬成形體的粗面化方法係含有使用雷射裝置以1MW/cm2以上的能量密度、2000mm/sec以上的照射速度對金屬成形體的表面照射雷射光之步驟。 The roughening method of the metal formed body of the present invention includes the step of using a laser device to irradiate the surface of the metal formed body with laser light at an energy density of 1 MW/cm 2 or more and an irradiation speed of 2000 mm/sec or more.

本發明中使用的金屬成形體的金屬並未特別限制,能夠因應用途而從公知的金屬中適當地選擇。例如,能夠舉出從鐵、各種不鏽鋼、鋁、鋅、鈦、銅、黃銅、鍍鉻鋼、鎂及含有上述金屬的合金、碳化鎢(tungsten carbide)、碳化鉻(chromium carbide)等金屬陶瓷(cermet)中選出的金屬,亦能夠使用在對上述金屬施行陽極氧化(alumite)處理、鍍覆處理等表面處理過後的金屬。 The metal of the metal molded body used in the present invention is not particularly limited, and it can be appropriately selected from known metals depending on the application. For example, cermets such as iron, various stainless steels, aluminum, zinc, titanium, copper, brass, chrome-plated steel, magnesium and alloys containing the above metals, tungsten carbide, chromium carbide, etc. The metal selected from cermet) can also be used after surface treatment such as alumite treatment and plating treatment on the above-mentioned metal.

本發明中使用的金屬成形體的形狀並未特別限制,能夠使用具有與用途相應之形狀的金屬成形體。金屬成形體的厚度亦未特別限制,但本發明的金屬成形體的粗面化方法係在即使是將厚度小的成形體粗面 化時亦不易發生翹曲等變形這點上表現優異。因此,適合於照射雷射光的部分的厚度為10mm以下的薄金屬成形體,較佳為適合於厚度為5mm以下的金屬成形體,更佳為適合於2mm以下的金屬成形體,再較佳為適合於1mm以下的金屬成形體。 The shape of the metal molded body used in the present invention is not particularly limited, and a metal molded body having a shape corresponding to the application can be used. The thickness of the metal molded body is also not particularly limited, but the roughening method of the metal molded body of the present invention is excellent in that deformation such as warping is less likely to occur even when a molded body with a small thickness is roughened. Therefore, a thin metal molded body with a thickness of 10 mm or less suitable for irradiating laser light is preferably suitable for a metal molded body with a thickness of 5 mm or less, more preferably suitable for a metal molded body with a thickness of 2 mm or less, and still more preferably It is suitable for metal forming bodies below 1mm.

本發明中使用的雷射裝置,係只要為能以1MW/cm2以上的能量密度、2000mm/sec以上的照射速度照射雷射的雷射裝置即可。 The laser device used in the present invention may be any laser device capable of irradiating the laser with an energy density of 1 MW/cm 2 or more and an irradiation speed of 2000 mm/sec or more.

雷射光照射時的能量密度係從雷射光的輸出(W)與雷射光(光點(spot)面積(cm2):(π.[光點直徑/2]2)求取。雷射光照射時的能量密度係較佳為2MW/cm2至1000MW/cm2,更佳為10MW/cm2至800MW/cm2,再較佳為10MW/cm2至700MW/cm2。當能量密度過高,金屬便在沒有發生熔融下直接昇華,故而沒有形成複雜結構的孔。 The energy density during laser light irradiation is calculated from the output of laser light (W) and laser light (spot area (cm 2 ): (π.[spot diameter/2] 2 ). When laser light is irradiated The energy density is preferably 2MW/cm 2 to 1000MW/cm 2 , more preferably 10MW/cm 2 to 800MW/cm 2 , still more preferably 10MW/cm 2 to 700MW/cm 2. When the energy density is too high, The metal is directly sublimated without melting, so no pores with complex structures are formed.

雷射光的照射速度係較佳為2,000mm/sec至20,000mm/sec,更佳為2,000mm/sec至18,000mm/sec,再較佳為3,000mm/sec至15,000mm/sec。 The irradiation speed of the laser light is preferably 2,000 mm/sec to 20,000 mm/sec, more preferably 2,000 mm/sec to 18,000 mm/sec, and still more preferably 3,000 mm/sec to 15,000 mm/sec.

雷射光的輸出係較佳為4W至4000W,更佳為50W至2500W,再較佳為150W至2000W,再更佳為150W至1500W。波長係較佳為500nm至11,000nm。光束(beam)直徑(光點直徑)係較佳為5μm至80μm,更佳為5μm至40μm。 The output of the laser light is preferably 4W to 4000W, more preferably 50W to 2500W, still more preferably 150W to 2000W, and still more preferably 150W to 1500W. The wavelength is preferably 500 nm to 11,000 nm. The beam diameter (spot diameter) is preferably 5 μm to 80 μm, more preferably 5 μm to 40 μm.

離焦距離係較佳為-5mm至+5mm,更佳為-1mm至+1mm,再較佳為-0.5mm至+0.1mm。離焦距離係 可固定設定值來進行雷射照射,亦可一邊令離焦距離變化一邊進行雷射照射。例如,在進行雷射照射時,可將離焦距離不斷縮小或週期性地放大縮小等。 The defocus distance is preferably -5mm to +5mm, more preferably -1mm to +1mm, and still more preferably -0.5mm to +0.1mm. Defocus distance system The laser irradiation can be performed with a fixed set value, or laser irradiation can be performed while changing the defocus distance. For example, when performing laser irradiation, the defocus distance can be continuously reduced or periodically enlarged and reduced.

在本發明中,當以滿足前述能量密度與照射速度之方式對金屬成形體照射雷射光時,金屬成形體的表面便一邊熔融一邊部分蒸發,因而形成複雜結構的孔。另一方面,當沒有滿足前述能量密度與照射速度時,金屬成形體的表面係直接昇華形成孔(藉由通常的脈衝(pulse)雷射照射而形成的孔)或熔融(雷射熔接),並不會形成複雜結構的孔。 In the present invention, when laser light is irradiated to the metal molded body in a manner that satisfies the aforementioned energy density and irradiation speed, the surface of the metal molded body is partially evaporated while melting, thereby forming holes with a complicated structure. On the other hand, when the aforementioned energy density and irradiation speed are not satisfied, the surface of the metal molded body is directly sublimated to form holes (holes formed by ordinary pulse laser irradiation) or melting (laser welding). It does not form holes with complex structures.

在本發明的金屬成形體的粗面化方法中,係在滿足上述能量密度與照射速度的前提下對作為粗面化對象的金屬成形體的表面以形成直線、曲線或直線與曲線之組合的方式照射雷射光時,以交替產生雷射光的照射部分與非照射部分的方式進行照射。雷射光係以在金屬成形體的表面畫出直線、曲線或直線與曲線之組合的方式照射,此時,直線和曲線各者係由雷射光的交替連續的照射部分與非照射部分構成。 In the method for roughening a metal formed body of the present invention, a straight line, a curve, or a combination of a straight line and a curve is formed on the surface of the metal formed body as the object of the roughening under the premise of satisfying the above-mentioned energy density and irradiation speed. When the laser light is irradiated by the method, the irradiated part and the non-irradiated part of the laser light are irradiated alternately. The laser light is irradiated by drawing a straight line, a curve, or a combination of a straight line and a curve on the surface of the metal molded body. At this time, each of the straight line and the curve is composed of the irradiated part and the non-irradiated part of the laser light alternately and continuously.

所謂的「以交替產生雷射光的照射部分與非照射部分的方式進行照射」,係包含以圖1所示方式進行照射的實施形態。圖1係顯示以長度L1的雷射光的照射部分1與相鄰之位在長度L1的雷射光的照射部分1之間的長度L2的雷射光的非照射部分2交替產生而全體形成為虛線狀的方式進行照射的狀態。前述虛線亦包括鏈線、二點鏈線等鏈線。 The so-called "irradiation in a manner of alternately generating an irradiated portion and a non-irradiated portion of the laser light" includes an embodiment in which the irradiation is performed in the manner shown in FIG. 1. Figure 1 shows that the non-irradiated part 2 of the laser light of the length L2 is alternately generated between the irradiation part 1 of the laser light of the length L1 and the adjacent laser light irradiation part 1 of the length L1, and the whole is formed in a dotted line. The way to carry out the state of irradiation. The aforementioned dashed line also includes chain lines such as chain lines and two-point chain lines.

此時,亦能夠反覆照射雷射光來形成為如圖1所示,外觀上為在一條直線上延伸的虛線狀。反覆次數(照射次數)係例如能夠採用1次至20次。此外,在進行複數次照射時,係可令雷射光的照射部分維持不變,亦可藉由令雷射光的照射部分改變(挪移雷射光的照射部分)而使以直線狀照射的全體皆粗面化。 At this time, it is also possible to irradiate the laser light repeatedly to form a dotted line extending in a straight line as shown in FIG. 1 in appearance. The number of repetitions (the number of irradiations) is, for example, 1 to 20 times. In addition, when performing multiple irradiations, the irradiated part of the laser light can be kept unchanged, and the irradiated part of the laser light can be changed (shifting the irradiated part of the laser light) to make the whole irradiated linearly thick. Faceted.

在令雷射光的照射部分維持不變下進行複數次照射時係照射成虛線狀,而當反覆以挪移雷射光的照射部分的方式進行照射,亦即當反覆以使雷射光的照射部分挪移重疊於最初屬於雷射光的非照射部分之部分的方式進行照射,則就算原本是照射成虛線狀,最終將會照射成實線狀態,因而為較佳的實施態樣。另外,以下,有時會將該些虛線狀的照射部分/非照射部分及實線狀的照射部分稱為「線(line)」。 When the irradiation part of the laser light is kept unchanged, the irradiation is performed in a dotted line shape, and when the irradiation part of the laser light is shifted repeatedly, that is, when the irradiation part of the laser light is shifted and overlapped If the laser light is initially irradiated in the non-irradiated part, even if it is originally irradiated in a dotted line, it will eventually be irradiated in a solid line state, which is a preferred implementation mode. In addition, in the following, the irradiated part/non-irradiated part in a broken line shape and the irradiated part in a solid line shape may be referred to as a "line".

當對金屬成形體連續照射雷射光時,照射面的溫度便上升,因此在厚度小的成形體係有發生翹曲等變形之虞,故有時需要冷卻等措施。但當如圖1所示以虛線狀進行雷射照射,雷射光的照射部分1與雷射光的非照射部分2便交替產生,在雷射光的非照射部分2係獲得冷卻,故當持續地進行雷射光的照射時,即使為厚度小的成形體也不易發生翹曲等變形,因而為較佳的實施態樣。此時,即使為如前述令雷射光的照射部分改變(令雷射光的照射部分挪移)的方式亦能夠獲得相同的效果。 When the laser light is continuously irradiated to the metal molded body, the temperature of the irradiated surface rises. Therefore, deformation such as warpage may occur in a molding system with a small thickness. Therefore, measures such as cooling may be necessary. However, when the laser is irradiated in a dotted shape as shown in Figure 1, the irradiated part 1 of the laser light and the non-irradiated part 2 of the laser light are alternately generated, and the non-irradiated part 2 of the laser light is cooled, so it should be continued. When the laser light is irradiated, even a molded body with a small thickness is unlikely to be deformed such as warping, so it is a preferred embodiment. At this time, the same effect can be obtained even if the irradiation part of the laser light is changed (the irradiation part of the laser light is shifted) as described above.

此外,當對金屬成形體連續照射雷射光時,照射面的溫度便上升,熔融狀態的細微金屬粒飛濺附著在金屬成形體及其周圍構件以濺射物(spatter)的形態殘留,而當如圖1所示以虛線狀進行雷射照射時,便能夠使前述濺射物量相較於連續照射雷射光時減少,因而為較佳的實施態樣。 In addition, when the laser light is continuously irradiated to the metal molded body, the temperature of the irradiated surface rises, and the fine metal particles in the molten state are splashed and adhered to the metal molded body and its surrounding components in the form of spatter. When laser irradiation is performed in a dotted shape as shown in FIG. 1, the amount of sputtering material can be reduced compared to when laser light is continuously irradiated, which is a preferred embodiment.

關於雷射光的照射方法,係能夠使用對金屬成形體10的表面如圖2(a)所示沿一方向照射來形成複數條線的方法、或如圖2(b)所示的虛線從雙方向照射來形成複數條線的方法。藉此,能夠將金屬成形體10的表面的所期望的區域粗面化。除此之外,亦可為以使雷射光的虛線照射部分交叉的方式進行照射的方法。 Regarding the laser light irradiation method, a method of irradiating the surface of the metal molded body 10 in one direction as shown in FIG. 2(a) to form a plurality of lines, or a dotted line as shown in FIG. A method of directional irradiation to form multiple lines. Thereby, the desired area of the surface of the metal molded body 10 can be roughened. In addition, there may be a method of irradiating the laser light so that the dotted line irradiated part intersects.

照射後的各虛線的間隔b1乃係能夠因應金屬成形體的照射對象面積等做調整的間隔,例如能夠採用0.01mm至5mm的範圍,較佳為採用0.02mm至3mm的範圍,更佳為採用0.03mm至1mm的範圍。亦即,關於照射,係能夠因應要粗面化的區域之面積以形成所需數量的線的方式進行。線係能夠依序相鄰形成,亦能夠以任意順序形成,例如為在雷射光的第一遍掃描跳一條形成(例如所要形成的線當中的奇數序的線),在第二遍掃描形成剩下的線(偶數序的線)等方式。 The interval b1 of each dotted line after irradiation is an interval that can be adjusted according to the area of the irradiated object of the metal molding, for example, it can be in the range of 0.01mm to 5mm, preferably in the range of 0.02mm to 3mm, more preferably The range of 0.03mm to 1mm. That is, with regard to the irradiation, it can be performed in such a way that the required number of lines can be formed in accordance with the area of the region to be roughened. The lines can be formed sequentially adjacent to each other, or in any order, for example, in the first scan of the laser light, one jump is formed (for example, the odd-numbered lines among the lines to be formed), and the remaining lines are formed in the second scan. Under the line (even-numbered line) and other methods.

圖1所示雷射光的照射部分1的長度(L1)與雷射光的非照射部分2的長度(L2)係能夠以落在L1/L2=1/9至9/1的範圍的方式調整,較佳為以落在L1/L2=2/8至8/2的範圍的方式調整。當該比率大時,粗 面化步驟的效率便提升,但冷卻效果便變差;當該比率小時,冷卻效果便提升,但粗面化效率便降低。能夠因應所使用的材料和所期望的粗面化的程度,考量冷卻與粗面化的平衡(balance)來決定該比率。為了粗面化成複雜的多孔結構,雷射光的照射部分1的長度(L1)係較佳為0.05mm以上,更佳為0.1mm至10mm,再較佳為0.3mm至7mm。 The length (L1) of the irradiated part 1 of the laser light and the length (L2) of the non-irradiated part 2 of the laser light shown in FIG. It is preferable to adjust in a manner that falls within the range of L1/L2=2/8 to 8/2. When the ratio is large, the efficiency of the roughening step increases, but the cooling effect becomes worse; when the ratio is small, the cooling effect increases, but the efficiency of roughening decreases. The ratio can be determined by considering the balance between cooling and roughening according to the material used and the desired degree of roughening. In order to roughen the surface into a complex porous structure, the length (L1) of the irradiated portion 1 of the laser light is preferably 0.05 mm or more, more preferably 0.1 mm to 10 mm, and still more preferably 0.3 mm to 7 mm.

在本發明的金屬成形體的粗面化方法的較佳實施形態中,前述雷射光的照射步驟係使用將對雷射的驅動電流進行直接轉換的直接調變方式的調變裝置連接至雷射電源之光纖雷射(fiber laser)裝置等,調整工作比(duty ratio)進行雷射照射。 In a preferred embodiment of the method for roughening a metal molded body of the present invention, the step of irradiating the laser light is to use a direct modulation method that directly converts the driving current of the laser to the laser. The fiber laser device of the power supply, etc., adjust the duty ratio for laser irradiation.

關於雷射的激發,有脈衝激發與連續激發兩種,以脈衝激發方式產生的脈波雷射一般稱為正常脈衝(normal pulse)。 Regarding laser excitation, there are two types: pulse excitation and continuous excitation. Pulse wave lasers generated by pulse excitation are generally called normal pulses.

即使為連續激發仍能夠生成脈波雷射,能夠以下述等方法產生脈波雷射:令將脈衝寬度(脈衝ON時間)設為比正常脈衝短但相應地具有高峰值功率(peak power)的雷射振盪的Q開關(Q switch)脈波振盪方法、以AOM和LN光強度調變器對光進行時間性的切取,藉此使脈波雷射生成的外部調變方式、以機械方式截斷(chopping)予以脈衝化的方法、操作電鏡(galvano mirror)予以脈衝化的方法、及將雷射的驅動電流直接調變產生脈波雷射的直接調變方式等。 Even if it is continuous excitation, pulse wave lasers can be generated. Pulse wave lasers can be generated by the following methods: set the pulse width (pulse ON time) to be shorter than the normal pulse but correspondingly have high peak power The Q switch pulse wave oscillation method of laser oscillation uses AOM and LN light intensity modulators to time-cut the light, so that the external modulation method generated by the pulse wave laser is mechanically cut off (chopping) the method of pulsing, the method of operating a galvano mirror to pulse, and the direct modulation method of directly modulating the driving current of the laser to generate a pulse wave laser, etc.

操作電鏡予以脈衝化的方法乃係藉由電鏡與電鏡控制器(galvano controller)之組合,經介電鏡來照射從雷射振盪器振盪出的雷射光之方法。此時,雷射光的照射步驟乃係使用電鏡與電鏡控制器之組合,藉由電鏡控制器將從雷射振盪器連續性地振盪出的雷射光予以脈衝化,藉此調整根據雷射光的輸出的ON時間與OFF時間以下式求得的工作比,而經介電鏡以交替產生雷射光的照射部分與非照射部分的方式進行照射之步驟。具體而言,能夠實施如下。 The method of operating the electron microscope to pulse is a method of irradiating the laser light oscillated from the laser oscillator through the dielectric mirror through the combination of the electron microscope and the galvano controller. At this time, the laser light irradiation step uses a combination of electron microscope and electron microscope controller. The electron microscope controller pulses the laser light continuously oscillated from the laser oscillator, thereby adjusting the output according to the laser light. The ratio of ON time to OFF time is calculated by the following formula, and the step of irradiating is performed through the dielectric mirror to alternately generate the irradiated part and the non-irradiated part of the laser light. Specifically, it can be implemented as follows.

從電鏡控制器週期性地將Gate信號進行ON/OFF輸出,以該ON/OFF信號來ON/OFF藉由雷射振盪器振盪出的雷射光,藉此,能夠在不使雷射光的能量密度變化下予以脈衝化。藉此,能夠如圖1所示以雷射光的照射部分1與相鄰之位在雷射光的照射部分1之間的雷射光的非照射部分交替產生而全體形成為虛線狀的方式照射雷射光。操作電鏡予以脈衝化的方法係能夠在不改變雷射光的振盪狀態本身之情況下調整工作比,故操作簡單。 The gate signal is periodically ON/OFF output from the electron microscope controller, and the laser light oscillated by the laser oscillator is turned on/off with the ON/OFF signal. This can reduce the energy density of the laser light Pulsed under changes. As a result, as shown in FIG. 1, the laser light irradiated part 1 and the adjacent non-irradiated part of the laser light between the laser light irradiated part 1 are alternately generated, and the whole is formed into a dotted line to irradiate the laser light. . The method of operating the electron microscope to pulse it can adjust the working ratio without changing the oscillation state of the laser light itself, so the operation is simple.

在上述各方法中,較佳為以機械方式截斷予以脈衝化的方法、操作電鏡予以脈衝化的方法、或將雷射的驅動電流直接調變產生脈波雷射的直接調變方式,因為這些方法乃係能夠容易做到在不改變連續波雷射的能量密度下予以脈衝化(以交替產生照射部分與非照射部分的方式進行照射)的方法。另外,該直接調變方式乃係藉由使用將對雷射的驅動電流進行直接轉換的直 接調變方式的調變裝置連接至雷射電源之光纖雷射裝置來使雷射連續激發而生成脈波雷射之方式,係與日本國特許第5774246號公報及日本國特許第5701414號公報中為了將金屬成形體粗面化而使用的連續波雷射不同。 Among the above methods, it is preferable to use a method of mechanically cutting off and pulse, a method of operating an electron microscope to pulse, or a direct modulation method of directly modulating the driving current of the laser to generate a pulse wave laser, because these The method is a method that can easily pulse (irradiate in a way that alternately produces irradiated parts and non-irradiated parts) without changing the energy density of the continuous wave laser. In addition, the direct modulation method uses a direct modulation method that directly converts the driving current of the laser and connects the optical fiber laser device of the laser power supply to continuously excite the laser to generate pulses. The method of wave laser is different from the continuous wave laser used in Japanese Patent No. 5774246 and Japanese Patent No. 5701414 to roughen the surface of the metal formed body.

工作比乃係根據雷射光的輸出的ON時間與OFF時間以下式求得的比。 The working ratio is the ratio calculated from the ON time and OFF time of the laser light output by the following formula.

工作比(%)=ON時間/(ON時間+OFF時間)×100 Working ratio (%) = ON time / (ON time + OFF time) × 100

工作比乃係與圖1中所示的L1與L2(亦即,L1/[L1+L2])對應,能夠從10%至90%的範圍中選擇,較佳為從20%至80%的範圍中選擇。藉此,能夠以交替產生雷射光的照射部分與非照射部分的方式進行照射。 The working ratio corresponds to L1 and L2 (that is, L1/[L1+L2]) shown in Figure 1, and can be selected from the range of 10% to 90%, preferably from 20% to 80% Select from the range. Thereby, it is possible to irradiate the irradiation part and the non-irradiation part of the laser light alternately.

藉由調整工作比照射雷射光,能夠照射成如圖1所示的虛線狀。當工作比大時,粗面化步驟的效率便提升,但冷卻效果便變差;當工作比小時,冷卻效果便提升,但粗面化效率便降低。較佳為因應目的調整工作比。 By adjusting the working ratio to irradiate the laser light, it can be irradiated into a dotted line as shown in Figure 1. When the working ratio is large, the efficiency of the roughening step increases, but the cooling effect becomes worse; when the working ratio is small, the cooling effect increases, but the roughening efficiency decreases. It is better to adjust the work ratio according to the purpose.

在本發明的金屬成形體的粗面化方法的其他較佳實施形態中,前述的雷射光的照射步驟係於在作為粗面化對象的金屬成形體的表面上隔有間隔地配置不讓雷射光通過的遮罩(masking)材之狀態下連續照射雷射。遮罩材可以是直接接觸金屬成形體或是不接觸金屬成形體。在針對各線進行複數次照射時,係能夠藉由令遮罩材的位置變化來使金屬成形體全體粗面化。 In another preferred embodiment of the method for roughening a metal molded body of the present invention, the step of irradiating the aforementioned laser light is to arrange the surface of the metal molded body as the object of the roughening at intervals so as not to allow lightning. The laser is continuously irradiated while the light passes through the masking material. The mask material may be in direct contact with the formed metal body or not in contact with the formed metal body. When irradiating each line multiple times, the entire metal molded body can be roughened by changing the position of the masking material.

本實施形態係如圖3(a)所示,於在金屬成形體10上彼此隔有間隔地配置複數片遮罩材11之狀態 下連續照射雷射。就遮罩材而言,係能夠使用導熱係數小的金屬等。然後,當將遮罩材11取下,便同圖1形成有由雷射光的照射部分與非照射部分交替產生而成的虛線。 In this embodiment, as shown in FIG. 3(a), the laser is continuously irradiated in a state where a plurality of mask materials 11 are arranged on a metal molded body 10 at intervals. As for the mask material, a metal with a low thermal conductivity can be used. Then, when the mask material 11 is removed, a dotted line formed by alternately generating the irradiated part and the non-irradiated part of the laser light is formed as in FIG. 1.

在圖3所示的實施形態的情形中,同樣地,在遮罩材11的部分係獲得冷卻,故當持續地進行雷射光的照射時,即使為厚度小的成形體也不易發生翹曲等變形,因而為較佳的實施態樣。 In the case of the embodiment shown in FIG. 3, similarly, the part of the mask material 11 is cooled. Therefore, when the laser light is continuously irradiated, the molded body with a small thickness is less likely to be warped or the like. Deformation, so it is a preferred implementation mode.

雷射光的照射部分1的長度(L1)與雷射光的非照射部分2的長度(L2)係能夠以落在L1/L2=1/9至9/1的範圍(亦即,L1/[L1+L2]為10%至90%的範圍)的方式調整。為了粗面化成複雜的多孔結構,雷射光的照射部分1的長度(L1)係較佳為0.05mm以上,較佳為0.1mm至10mm,更佳為0.3mm至7mm。 The length (L1) of the irradiated part 1 of the laser light (L1) and the length (L2) of the non-irradiated part 2 of the laser light can fall within the range of L1/L2=1/9 to 9/1 (that is, L1/[L1 +L2] is the range of 10% to 90%). In order to roughen the surface into a complex porous structure, the length (L1) of the irradiated portion 1 of the laser light is preferably 0.05 mm or more, preferably 0.1 mm to 10 mm, and more preferably 0.3 mm to 7 mm.

連續波雷射係能夠使用公知技術,例如能夠使用YVO4雷射、光纖雷射(單模(single-mode)光纖雷射、多模(multi-mode)光纖雷射)、準分子(excimer)雷射、二氧化碳雷射、紫外線雷射、YAG雷射、半導體雷射、玻璃(glass)雷射、紅寶石(ruby)雷射、He-Ne雷射、氮氣雷射、螯合物(chelate)雷射、或染料雷射。 The continuous wave laser system can use well-known technology, such as YVO4 laser, fiber laser (single-mode fiber laser, multi-mode fiber laser), excimer laser Laser, carbon dioxide laser, ultraviolet laser, YAG laser, semiconductor laser, glass laser, ruby laser, He-Ne laser, nitrogen laser, chelate laser , Or dye laser.

藉由實施本發明的金屬成形體的粗面化方法,能夠在金屬成形體的表面(含從表面到深500μm程度之深度為止的範圍)形成多孔結構,具體而言,係能夠形成為與日本國特許第5774246號公報的圖7、圖8、圖24至圖26及圖29、以及日本國特許第5701414號公報 的圖7、圖8、圖24至圖26及圖29中所示相同複雜的多孔結構。 By implementing the roughening method of the metal molded body of the present invention, a porous structure can be formed on the surface of the metal molded body (including the range from the surface to a depth of about 500 μm). As shown in Figure 7, Figure 8, Figure 24 to Figure 26 and Figure 29 of the National Patent No. 5774246, and Figure 7, Figure 8, Figure 24 to Figure 26, and Figure 29 of the Japanese Patent No. 5701414, the same complex Porous structure.

實施例Example 實施例1至16 Examples 1 to 16

對圖4所示形狀及尺寸的金屬成形體50(鋁A5052)的面51的整面(20mm2的面積範圍),以表1所示條件照射雷射光,將面51的雷射光照射面粗面化。 The entire surface (20 mm 2 area) of the surface 51 of the metal molded body 50 (aluminum A5052) of the shape and size shown in FIG. 4 was irradiated with laser light under the conditions shown in Table 1, and the laser light irradiation surface of the surface 51 was coarse Faceted.

雷射裝置係使用如下規格的裝置。 The laser device uses the following specifications.

振盪器:IPG-Yb光纖;YLR-300-SM Oscillator: IPG-Yb fiber; YLR-300-SM

聚光系統:fc=80mm/fθ=100mm Condenser system: fc=80mm/fθ=100mm

離焦距離:±0mm(固定) Defocus distance: ±0mm (fixed)

脈波轉換裝置:脈衝產生器(pulse generator)FG110(合成函數波產生器(synthesized function generator)),橫河電機(股)製 Pulse wave conversion device: pulse generator FG110 (synthesized function generator), manufactured by Yokogawa Electric Corporation

關於溝深度,係以數位顯微鏡(digital microscope)VHX-900(KEYENCE(股)製)量測雷射光照射後的面51。平均溝深度係量測十處後作成平均值。最大溝深度係所量測的十處中最深之部分的值。 Regarding the groove depth, a digital microscope VHX-900 (manufactured by KEYENCE) was used to measure the surface 51 irradiated with laser light. The average groove depth is measured at ten locations and then the average value is made. The maximum groove depth is the value of the deepest part of the ten measured points.

關於拉伸強度,係藉由遵循ISO19095的對接試驗樣片的拉伸試驗(拉伸速度10mm/min,夾具(chuck)間距離50mm)求得。關於對接試驗樣片,樹脂係使用GF30%強化PA6樹脂(PLASTRON PA6-GF30-01(L9):Daicel Polymer(股)製),射出成形機係使用FANUC製ROBOSHOT S2000i100B),以樹脂溫度280℃、模具溫度100℃射出成形而得。 Regarding the tensile strength, it was obtained by the tensile test of the butt joint test specimen conforming to ISO19095 (tensile speed 10mm/min, distance between chuck 50mm). Regarding the butt test specimens, the resin system uses GF30% reinforced PA6 resin (PLASTRON PA6-GF30-01 (L9): Daicel Polymer Co., Ltd.), and the injection molding machine uses FANUC ROBOSHOT S2000i100B). The resin temperature is 280°C, and the mold It is produced by injection molding at a temperature of 100°C.

在反覆次數為複數次(5次以上)的實施例中,係挪移雷射光的照射部分,以使各照射線成為實線的方式(以沒有非照射部分的方式)進行照射。在以下的實施例中亦同。 In an embodiment where the number of repetitions is plural times (5 times or more), the irradiation part of the laser light is shifted so that each irradiation line becomes a solid line (in a way that there is no non-irradiation part). The same is true in the following embodiments.

如從圖5至圖10所示的顯示實施例1、4、5、8、13及16的金屬成形體的表面之SEM影像、以及實施例4(圖6)、實施例8(圖8)及實施例16(圖10)的金 屬成形體的剖面影像所能夠確認,係皆粗面化成與日本國特許第5774246號公報的圖7、圖8、圖24至圖26及圖29、以及日本國特許第5701414號公報的圖7、圖8、圖24至圖26及圖29相同複雜的多孔結構。亦如從拉伸強度的數值所能夠確認,可知實施例1、4、5、8、13及16、以及無SEM影像的其他實施例亦同樣粗面化。 As shown in FIGS. 5 to 10, SEM images of the surface of the metal formed bodies of Examples 1, 4, 5, 8, 13, and 16, as well as Example 4 (FIG. 6), Example 8 (FIG. 8) And the cross-sectional image of the metal forming body of Example 16 (FIG. 10) can be confirmed that it is roughed and formed in accordance with FIGS. 7, 8, and 24 to 26 and 29 of Japanese Patent No. 5774246, and Japan Figure 7, Figure 8, Figure 24 to Figure 26 and Figure 29 of the National Patent No. 5701414 have the same complex porous structure. As can be confirmed from the numerical value of tensile strength, it can be seen that Examples 1, 4, 5, 8, 13, and 16, and other examples without SEM images are similarly roughened.

另外,在使用通常的脈波雷射時,以與日本國特許第5774246號公報的比較例1、4及7、以及日本國特許第5701414號公報的比較例1、4及7同樣的方式照射脈波雷射光時,當考量光點直徑、脈衝寬度、雷射光照射速度,相鄰的光點全部彼此重疊,故不會有雷射光的照射部分與非照射部分交替產生。 In addition, when a normal pulse wave laser is used, it is irradiated in the same manner as Comparative Examples 1, 4, and 7 of Japanese Patent No. 5774246 and Comparative Examples 1, 4, and 7 of Japanese Patent No. 5701414 In the case of pulse wave laser light, when the spot diameter, pulse width, and laser light irradiation speed are considered, the adjacent light spots all overlap each other, so there will be no irradiated part and non-irradiated part of the laser light alternately generated.

實施例17至22 Examples 17 to 22

同實施例1至16,對圖4所示形狀及尺寸的金屬成形體50(不鏽鋼SUS304)的面51的整面(20mm2的面積範圍),以表2所示條件照射雷射光,將面51的雷射光照射面粗面化。此外,同實施例1至16地量測最大溝深度及拉伸強度。 As in Examples 1 to 16, the entire surface (20 mm 2 area) of the surface 51 of the metal molded body 50 (stainless steel SUS304) of the shape and size shown in FIG. 4 was irradiated with laser light under the conditions shown in Table 2, and the surface The laser light irradiation surface of 51 is roughened. In addition, the maximum groove depth and tensile strength were measured in the same manner as in Examples 1 to 16.

如從圖11所示的顯示實施例18的金屬成形體的表面之SEM影像、及圖12所示的顯示實施例20的金屬成形體的表面及剖面之SEM影像所能夠確認,係皆粗面化成與日本國特許第5774246號公報的圖7、圖8、圖24至圖26及圖29、以及日本國特許第5701414號公報的圖7、圖8、圖24至圖26及圖29相同複雜的多孔結構。亦如從拉伸強度的數值所能夠確認,可知實施例18、20及無SEM影像的其他實施例亦同樣粗面化。 As can be confirmed from the SEM image showing the surface of the metal forming body of Example 18 shown in FIG. 11 and the SEM image showing the surface and cross section of the metal forming body of Example 20 shown in FIG. 12, they are all rough surfaces. Chemicals is the same as Figure 7, Figure 8, Figure 24 to Figure 26, and Figure 29 of Japanese Patent No. 5774246, and Figure 7, Figure 8, Figure 24 to Figure 26, and Figure 29 of Japanese Patent No. 5701414 Porous structure. As can be confirmed from the numerical value of the tensile strength, it can be seen that Examples 18 and 20 and other examples without SEM images are similarly roughened.

另外,在使用通常的脈波雷射時,結果係與日本國特許第5774246號公報的比較例1、4及7、以及日本國特許第5701414號公報的比較例1、4及7相同,因此不會與上述實施例相同。 In addition, when a normal pulse wave laser is used, the results are the same as Comparative Examples 1, 4, and 7 of Japanese Patent No. 5774246, and Comparative Examples 1, 4, and 7 of Japanese Patent No. 5701414. Therefore, It will not be the same as the above-mentioned embodiment.

實施例23、24、比較例1、2 Examples 23, 24, Comparative Examples 1, 2

使用為圖13所示形狀的金屬板55(30mm×30mm)且令厚度(表3)變化的金屬板,對20mm×6mm的區域56,以表3所示的條件,以圖2(b)所示的照射模式,同實施例1至16地照射雷射光。 The metal plate 55 (30mm×30mm) of the shape shown in Fig. 13 was used and the thickness (Table 3) was changed. For the area 56 of 20mm×6mm, the conditions shown in Table 3 were used in Fig. 2(b) The irradiation mode shown is the same as that of Examples 1-16 to irradiate laser light.

量測雷射光照射後的金屬板55的變形量。以圖14(a)至(c)說明量測方法。圖14(a)及(b)係顯示雷射光照射前後的狀態之圖,圖14(b)係將變形誇張化地呈現俾易於理解。 The deformation amount of the metal plate 55 after being irradiated by the laser light is measured. Figure 14 (a) to (c) illustrate the measurement method. Fig. 14(a) and (b) are diagrams showing the state before and after the laser light is irradiated, and Fig. 14(b) is an exaggerated representation of the deformation to make it easier to understand.

關於變形量的求得,係將雷射光照射後的金屬板55載置於具有平面61的量測台60上,以刻度尺放大鏡(scale loupe)(3010S:池田鏡片工業(股)製)量測相對向兩邊側的面與量測台60的平面61之間的間隔d1及d2而求得。表3顯示量測次數為5,從(5×d1+5×d2)/10求得的平均值。 The amount of deformation is obtained by placing the metal plate 55 irradiated with laser light on a measuring table 60 with a flat surface 61, and measuring it with a scale loupe (3010S: manufactured by Ikeda Lens Industry Co., Ltd.) It is obtained by measuring the distances d1 and d2 between the surfaces facing both sides and the flat surface 61 of the measuring table 60. Table 3 shows that the number of measurements is 5, and the average value obtained from (5×d1+5×d2)/10.

如從表3可知,連續照射雷射光的比較例1及2雖僅稍微變形,但實施例23及24則沒有變形(翹曲)。從該結果確認了本發明的粗面化方法係對厚度小的金屬成形體具有效果。此外,目視確認的結果,相較於比較例1及2,實施例23及24的濺射物量較少。 As can be seen from Table 3, although Comparative Examples 1 and 2 in which laser light was continuously irradiated were only slightly deformed, Examples 23 and 24 showed no deformation (warping). From this result, it was confirmed that the roughening method of the present invention has an effect on a metal molded body with a small thickness. In addition, as a result of visual confirmation, compared with Comparative Examples 1 and 2, the amount of sputtering in Examples 23 and 24 was smaller.

實施例25、比較例3 Example 25, Comparative Example 3

實施例25係以表4所示條件,同實施例23及24地照射雷射光;比較例3係以表4所示條件,同比較例1及2地照射雷射光。同實施例23及24地量測變形量。 Example 25 was irradiated with laser light under the conditions shown in Table 4 as in Examples 23 and 24; Comparative Example 3 was irradiated with laser light under the conditions shown in Table 4 as in Comparative Examples 1 and 2. The deformation was measured in the same manner as in Examples 23 and 24.

如從表4可知,連續照射雷射光的比較例3雖僅稍微變形,但實施例25則沒有變形(翹曲)。從該結果確認了本發明的粗面化方法係對厚度小的金屬成形體具有效果。此外,目視確認的結果,相較於比較例3,實施例25的濺射物量較少。 As can be seen from Table 4, although Comparative Example 3 in which the laser light is continuously irradiated is only slightly deformed, Example 25 is not deformed (warped). From this result, it was confirmed that the roughening method of the present invention has an effect on a metal molded body with a small thickness. In addition, as a result of visual confirmation, the amount of sputtering material in Example 25 was smaller than that in Comparative Example 3.

實施例26至33 Examples 26 to 33

對圖4所示形狀及尺寸的金屬成形體50(鋁A5052)的面51的整面(20mm2的面積範圍),以表5所示條件照射雷射光,將面51的雷射光照射面粗面化。其中,雷射光係一邊連續性地照射,一邊以操作電鏡予 以脈衝化的方法調整工作比。圖15至圖18顯示實施例30至33的雷射光照射後的鋁成形體表面的SEM影像。同實施例1至16地實施各量測。 The entire surface (20 mm 2 area) of the surface 51 of the metal molded body 50 (aluminum A5052) of the shape and size shown in FIG. 4 was irradiated with laser light under the conditions shown in Table 5, and the laser light irradiation surface of the surface 51 was coarse Faceted. Among them, the laser light system irradiates continuously while adjusting the duty ratio by operating the electron microscope to pulse. 15 to 18 show SEM images of the surface of the aluminum formed body after the laser light of Examples 30 to 33 are irradiated. The measurements were carried out in the same way as in Examples 1-16.

雷射裝置係使用如下規格的裝置。 The laser device uses the following specifications.

振盪器:IPG-Yb光纖;YLR-300-SM(IPG公司製) Oscillator: IPG-Yb fiber; YLR-300-SM (manufactured by IPG)

聚光系統:fc=80mm/fθ=100mm Condenser system: fc=80mm/fθ=100mm

離焦距離:±0mm(固定) Defocus distance: ±0mm (fixed)

電鏡掃描頭(galvano scan head):Squirrel 16(ARGES公司製) Galvano scan head: Squirrel 16 (manufactured by ARGES)

電鏡控制器:ASC-1 Electron microscope controller: ASC-1

Squirrel 16用準直器(collimator)(f80mm):OPTICEL D30L-CL Collimator for Squirrel 16 (f80mm): OPTICEL D30L-CL

如從表5與圖15至圖18所能夠確認,使用操作電鏡予以脈衝化的方法亦同其他實施例地做到調整工作比進行粗面化。 As can be confirmed from Table 5 and Figs. 15 to 18, the method of pulsed using an operating electron microscope is also the same as in other embodiments to adjust the work ratio and roughen the surface.

另外,例如實施例26的「ON時間」為「100μsec」係指,在頻率5000Hz(1秒振動5000次,故1次振動(例如,一峰值與相鄰峰值的間隔)為200μsec)時,100μsec照射雷射光,剩下的100μsec不照射雷射光。此時,工作比係成為100/200=50。 In addition, for example, the "ON time" of Example 26 is "100μsec", which means that at a frequency of 5000 Hz (5,000 vibrations per second, one vibration (for example, the interval between a peak and adjacent peaks) is 200μsec), 100μsec The laser light is irradiated, and the laser light is not irradiated for the remaining 100μsec. At this time, the working ratio is 100/200=50.

產業上可利用性Industrial availability

以本發明的金屬成形體的粗面化方法獲得的粗面化的金屬成形體係除了能夠作為日本國特許第5701414號公報之發明所記載的複合成形體的製造中間體之外,亦能夠使用於日本國特開2016-36884號公報記載的研磨材、日本國特開2016-7589號公報記載的微粒子的載體、及日本國特開2016-43413號公報的段落編號[0037]記載的用途。 The roughened metal forming system obtained by the roughening method of the metal forming body of the present invention can be used in addition to the production intermediate of the composite forming body described in the invention of Japanese Patent No. 5701414 The abrasive material described in JP 2016-36884 A, the fine particle carrier described in JP 2016-7589, and the use described in paragraph number [0037] of JP 2016-43413.

Claims (8)

一種金屬成形體的粗面化方法,係具有使用雷射裝置以10~1000MW/cm2的能量密度、2000mm/sec以上的照射速度對前述金屬成形體的表面照射連續激發的雷射光之步驟;前述雷射光的照射步驟乃係,在對作為粗面化對象的金屬成形體的表面以形成直線、曲線或直線與曲線之組合的方式照射連續激發的雷射光時,使用將對雷射的驅動電流進行直接轉換的直接調變方式的調變裝置連接至雷射電源而成之光纖雷射裝置,調整根據雷射光的輸出的ON時間與OFF時間以下式求得的工作比,以交替產生雷射光的照射部分與非照射部分的方式進行照射之步驟,工作比(%)=ON時間/(ON時間+OFF時間)×100。 A method for roughening a metal formed body, which has the step of using a laser device to irradiate the surface of the aforementioned metal formed body with continuously excited laser light at an energy density of 10 to 1000 MW/cm 2 and an irradiation speed of 2000 mm/sec or more; The aforementioned laser light irradiation step is to irradiate the continuously excited laser light in the form of a straight line, a curve, or a combination of a straight line and a curve on the surface of the metal molded body that is the object of roughening. An optical fiber laser device formed by a direct-modulation modulating device that directly converts the current is connected to a laser power source. It adjusts the working ratio obtained by the following formula based on the ON time and OFF time of the laser light output to alternately generate lightning The step of irradiating the irradiated part and the non-irradiated part of the light, the working ratio (%)=ON time/(ON time+OFF time)×100. 一種金屬成形體的粗面化方法,係具有使用雷射裝置以10~1000MW/cm2的能量密度、2000mm/sec以上的照射速度對前述金屬成形體的表面照射連續激發的雷射光之步驟;前述雷射光的照射步驟乃係,在對作為粗面化對象的金屬成形體的表面以形成直線、曲線或直線與曲線之組合的方式照射連續激發的雷射光時,使用電鏡與電鏡控制器之組合,藉由電鏡控制器將從雷射振盪器連續性地振盪出的雷射光予以脈衝化,藉此調整根據雷射光的輸出的ON時間與OFF時間以下式求得的工作比,而經介電鏡以交替產生雷射 光的照射部分與非照射部分的方式進行照射之步驟,工作比(%)=ON時間/(ON時間+OFF時間)×100。 A method for roughening a metal formed body, which has the step of using a laser device to irradiate the surface of the aforementioned metal formed body with continuously excited laser light at an energy density of 10 to 1000 MW/cm 2 and an irradiation speed of 2000 mm/sec or more; The aforementioned laser light irradiation step is to use the electron microscope and the electron microscope controller to irradiate the continuously excited laser light in a manner of forming a straight line, a curve, or a combination of a straight line and a curve on the surface of the metal molded body that is the object of roughening. In combination, the electron microscope controller pulses the laser light continuously oscillated from the laser oscillator, thereby adjusting the duty ratio obtained by the following formula based on the ON time and OFF time of the laser light output. The electron microscope performs the irradiation step by alternately generating the irradiated part and the non-irradiated part of the laser light, and the working ratio (%)=ON time/(ON time+OFF time)×100. 一種金屬成形體的粗面化方法,係具有使用雷射裝置以10~1000MW/cm2的能量密度、2000mm/sec以上的照射速度對前述金屬成形體的表面照射連續激發的雷射光之步驟;前述雷射光的照射步驟乃係,在對作為粗面化對象的金屬成形體的表面以形成直線、曲線或直線與曲線之組合的方式照射連續激發的雷射光時,調整藉由機械地截斷(chopping)予以脈衝化的方法以下式求得的工作比,以交替產生雷射光的照射部分與非照射部分的方式進行照射之步驟,工作比(%)=ON時間/(ON時間+OFF時間)×100。 A method for roughening a metal formed body, which has a step of using a laser device to irradiate the surface of the aforementioned metal formed body with continuously excited laser light at an energy density of 10 to 1000 MW/cm 2 and an irradiation speed of 2000 mm/sec or more; The aforementioned laser light irradiation step is to irradiate the continuously excited laser light in the form of a straight line, a curve, or a combination of a straight line and a curve on the surface of the metal molded body that is the object of roughening, and the adjustment is performed by mechanically cutting off ( chopping) The method of pulsing The working ratio obtained by the following formula, the step of irradiating the irradiated part and the non-irradiated part alternately to generate the laser light, the working ratio (%)=ON time/(ON time+OFF time) ×100. 一種金屬成形體的粗面化方法,係具有使用雷射裝置以10~1000MW/cm2的能量密度、2000mm/sec以上的照射速度對前述金屬成形體的表面照射連續激發的雷射光之步驟;前述雷射光的照射步驟乃係,在對作為粗面化對象的金屬成形體的表面以形成直線、曲線或直線與曲線之組合的方式照射連續激發的雷射光時,在作為粗面化對象的金屬成形體的表面上隔有間隔地配置有不讓雷射光通過的遮罩材之狀態下連續照射連續激發的雷射光後,取下前述遮罩材之步驟。 A method for roughening a metal formed body, which has a step of using a laser device to irradiate the surface of the aforementioned metal formed body with continuously excited laser light at an energy density of 10 to 1000 MW/cm 2 and an irradiation speed of 2000 mm/sec or more; The aforementioned laser light irradiation step is to irradiate the surface of the metal molded body that is the object of roughening with continuously excited laser light in a manner that forms a straight line, a curve, or a combination of a straight line and a curve. A step of continuously irradiating the continuously excited laser light in a state where a mask material that does not allow the laser light to pass through is arranged on the surface of the metal molded body at intervals, and then removing the mask material. 一種金屬成形體的粗面化方法,係具有使用雷射裝置以10~1000MW/cm2的能量密度、2000mm/sec以上的照 射速度對前述金屬成形體的表面照射連續激發的雷射光之步驟;前述雷射光的照射步驟乃係,在對作為粗面化對象的金屬成形體的表面以形成直線、曲線或直線與曲線之組合的方式照射雷射光時,使用Q開關脈波振盪方法,調整根據雷射光的輸出的ON時間與OFF時間以下式求得的工作比,以交替產生雷射光的照射部分與非照射部分的方式進行照射之步驟,工作比(%)=ON時間/(ON時間+OFF時間)×100。 A method for roughening a metal formed body, which has the step of using a laser device to irradiate the surface of the aforementioned metal formed body with continuously excited laser light at an energy density of 10 to 1000 MW/cm 2 and an irradiation speed of 2000 mm/sec or more; The aforementioned laser light irradiation step is to use the Q-switch pulse wave oscillation method when the laser light is irradiated to the surface of the metal molded body to be roughened to form a straight line, a curve, or a combination of a straight line and a curve, and adjust the basis The working ratio of the ON time and OFF time of the laser light output is calculated by the following formula, the step of irradiating the irradiated part and the non-irradiated part of the laser light alternately, the working ratio (%)=ON time/(ON time+ OFF time)×100. 如請求項5之金屬成形體的粗面化方法,其中前述能量密度為10~700MW/cm2,前述照射速度為2000~15000mm/sec。 Such as the roughening method of the metal formed body of claim 5, wherein the aforementioned energy density is 10~700MW/cm 2 , and the aforementioned irradiation speed is 2000~15000mm/sec. 如請求項5之金屬成形體的粗面化方法,其中前述雷射光的照射部分的長度(L1)與非照射部分的長度(L2)為L1/(L1+L2)=0.1~0.9,L1的長度為0.1~10mm。 Such as the roughening method of the metal formed body of claim 5, wherein the length of the irradiated part (L1) and the length of the non-irradiated part (L2) of the aforementioned laser light are L1/(L1+L2)=0.1~0.9, L1 The length is 0.1~10mm. 如請求項1至7中任一項之金屬成形體的粗面化方法,其中前述金屬成形體為照射雷射光的部分的厚度為5mm以下的成形體。 The method for roughening a metal molded body according to any one of claims 1 to 7, wherein the metal molded body is a molded body whose thickness of a portion irradiated with laser light is 5 mm or less.
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