TWI736222B - Measuring method of light transmittance - Google Patents
Measuring method of light transmittance Download PDFInfo
- Publication number
- TWI736222B TWI736222B TW109112649A TW109112649A TWI736222B TW I736222 B TWI736222 B TW I736222B TW 109112649 A TW109112649 A TW 109112649A TW 109112649 A TW109112649 A TW 109112649A TW I736222 B TWI736222 B TW I736222B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- luminous flux
- incident
- flux
- light source
- Prior art date
Links
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
一種光穿透率的測量方法,包含下列步驟:主光源的光線自積分球的第一入光口入射,測量通過積分球的出光口的第一入射光通量;校正光源的光線自積分球的第二入光口入射,測量通過出光口的第一校正光通量;將待測樣品置於第一入光口的外側,測量通過出光口的第二校正光通量;主光源的光線通過待測樣品自第一入光口入射,測量通過出光口的第二入射光通量;依第一校正光通量與第二校正光通量取得校正係數,並將第二入射光通量與第一入射光通量的比值乘上校正係數,得到一光穿透率。藉此,可得到準確的光穿透率。A method for measuring light transmittance, comprising the following steps: the light of the main light source is incident from the first light entrance of the integrating sphere, and the first incident luminous flux passing through the light exit of the integrating sphere is measured; The second light entrance is incident, and the first calibration luminous flux passing through the light exit is measured; the sample to be tested is placed outside the first light entrance, and the second calibrated luminous flux passing through the light exit is measured; the light from the main light source passes through the sample to be tested from the first A light entrance is incident, and the second incident luminous flux passing through the light exit is measured; a correction coefficient is obtained according to the first corrected luminous flux and the second corrected luminous flux, and the ratio of the second incident luminous flux to the first incident luminous flux is multiplied by the correction coefficient to obtain a Light transmittance. In this way, accurate light transmittance can be obtained.
Description
本發明係與光穿透率測量有關;特別是指一種使用積分球的光穿透率的測量方法。 The present invention is related to the measurement of light transmittance; in particular, it refers to a method for measuring light transmittance using an integrating sphere.
圖1所示為習用的光穿透率測量系統100,包含一積分球101、一光源102與一光測量裝置103,該積分球101具有一入光口101a與一出光口101b,該光源102的光線自該入光口101a入射至該積分球101內部,該光測量裝置103連接於該出光口101b,以測量通過該出光口101b的光通量。待測樣品104置於該入光口101a的外側。習用的光穿透率τ的計算式如下:τ=(Φs/Φi),其中,Φs為放置待測樣品104時的光通量,Φi為未放置待測樣品104時的光通量。
Figure 1 shows a conventional light
習用的光穿透率測量系統100所測得的光穿透率並不準確,究其原因在於,當有放置待測樣品104時,積分球101內部被反射至該入光口的光線有一部分會被待測樣品104反射回積分球101內部(如圖1中虛線所示),如此將會造成光通量Φs增加,因此,經由上述計算式計算後,光穿透率τ將會增大,造成光穿透率不準確的情形。
The light transmittance measured by the conventional light
有鑑於此,本發明之目的在於提供一種光穿透率的測量方法,可讓光穿透率的測量更為準確。 In view of this, the purpose of the present invention is to provide a method for measuring light transmittance, which can make the measurement of light transmittance more accurate.
緣以達成上述目的,本發明提供的一種光穿透率的測量方法,係應用於一測量系統,該測量系統包括一積分球、一主光源、一校正光源、與一光測量裝置,該積分球具有一第一入光口、一第二入光口及一出光口;該測量方法包含下列步驟:A、在未放置待測樣品的條件下,進行一第一入射光通量取得步驟及一第一校正光通量取得步驟,其中:該第一入射光通量取得步驟包括:控制該校正光源的光線停止入射該第二入光口,及控制該主光源的光線自該第一入光口入射至該積分球中,以該光測量裝置測量通過該出光口的至少一第一入射光通量;該第一校正光通量取得步驟包括:控制該主光源的光線停止入射該第一入光口,及控制該校正光源的光線自該第二入光口入射至該積分球中,以該光測量裝置測量通過該出光口的至少一第一校正光通量;B、將一待測樣品置於該第一入光口的外側,以該光測量裝置測量通過該出光口的至少一第二校正光通量;C、控制該校正光源的光線停止入射該第二入光口,及控制該主光源的光線通過該待測樣品自該第一入光口入射至該積分球中,以該光測量裝置測量通過該出光口的至少一第二入射光通量;D、依據該至少一第一校正光通量與該至少一第二校正光通量取得至少一校正係數,並將該至少一第二入射光通量與該至少一第 一入射光通量的比值乘上該至少一校正係數,以得到該待測樣品的至少一光穿透率。 In order to achieve the above-mentioned objective, the present invention provides a method for measuring light transmittance, which is applied to a measuring system. The measuring system includes an integrating sphere, a main light source, a calibration light source, and a light measuring device. The ball has a first light entrance, a second light entrance, and a light exit; the measurement method includes the following steps: A. Under the condition that the sample to be tested is not placed, perform a first incident light flux acquisition step and a second A calibration luminous flux obtaining step, wherein: the first incident luminous flux obtaining step includes: controlling the light of the calibration light source to stop entering the second light entrance, and controlling the light of the main light source to enter the integral from the first light entrance In the ball, the light measuring device is used to measure at least one first incident light flux passing through the light exit; the step of obtaining the first corrected light flux includes: controlling the light from the main light source to stop entering the first light entrance, and controlling the correction light source The light from the second light entrance is incident into the integrating sphere, and at least one first corrected luminous flux passing through the light exit is measured by the light measuring device; B. A sample to be tested is placed in the first light entrance On the outside, the light measuring device is used to measure at least one second calibration luminous flux passing through the light exit; C. Control the light of the calibration light source to stop entering the second light entrance, and control the light of the main light source to pass through the sample to be tested. The first light entrance is incident into the integrating sphere, and at least one second incident light flux passing through the light exit is measured by the light measuring device; D. Obtained according to the at least one first corrected light flux and the at least one second corrected light flux At least one correction coefficient, and combine the at least one second incident luminous flux with the at least one first The ratio of an incident luminous flux is multiplied by the at least one correction coefficient to obtain at least one light transmittance of the sample to be tested.
本發明之效果在於,可藉由第一校正光通量與該第二校正光通量產生校正係數,以校正第二入射光通量與第一入射光通量的比值,而得到準確的光穿透率,有效消除因積分球內部的光線被待測樣品反射回積分球內,造成的測量誤差。 The effect of the present invention is that the ratio of the second incident luminous flux to the first incident luminous flux can be corrected by generating a correction coefficient by the first calibrated luminous flux and the second calibrated luminous flux, so as to obtain accurate light transmittance and effectively eliminate the integral The light inside the sphere is reflected back into the integrating sphere by the sample to be tested, causing measurement errors.
〔習用〕 [Traditional]
100:光穿透率測量系統 100: Light transmittance measurement system
101:積分球 101: Integrating Sphere
101a:入光口 101a: Light entrance
101b:出光口 101b: light outlet
102:光源 102: light source
103:光測量裝置 103: Light measuring device
104:待測樣品 104: sample to be tested
〔本發明〕 〔this invention〕
1,2:測量系統 1,2: Measuring system
10:積分球 10: Integrating sphere
12:第一入光口 12: The first light entrance
14:第二入光口 14: The second light entrance
16:出光口 16: light outlet
20:主光源 20: Main light source
22:第一光產生機 22: The first light generator
24:第一準直鏡 24: The first collimator lens
26:第一擋板 26: first baffle
30:校正光源 30: Calibrate the light source
32:第二光產生機 32: The second light generator
34:第二準直鏡 34: The second collimator lens
36:第二擋板 36: second baffle
40:光測量裝置 40: Optical measuring device
42:光譜儀 42: Spectrometer
44:光纖 44: Fiber
50:處理裝置 50: processing device
60:待測樣品 60: sample to be tested
70:轉動導引件 70: Rotation guide
80:儲存裝置 80: storage device
S01~S04:步驟 S01~S04: steps
圖1為習用的光穿透率測量系統之示意圖。 Figure 1 is a schematic diagram of a conventional optical transmittance measurement system.
圖2為本發明第一較佳實施例之測量系統的示意圖。 Fig. 2 is a schematic diagram of the measurement system of the first preferred embodiment of the present invention.
圖3為上述較佳實施例之光穿透率的測量方法的流程圖。 Fig. 3 is a flow chart of the light transmittance measurement method of the above preferred embodiment.
圖4為上述較佳實施例之光穿透率的測量方法與習用的測量方法之在不同波長之光穿透率曲線圖。 4 is a graph showing the light transmittance curves of the light transmittance measurement method of the above preferred embodiment and the conventional measurement method at different wavelengths.
圖5為本發明第二較佳實施例之測量系統的示意圖。 Fig. 5 is a schematic diagram of a measurement system according to a second preferred embodiment of the present invention.
為能更清楚地說明本發明,茲舉較佳實施例並配合圖式詳細說明如後。請參圖2所示,為本發明第一較佳實施例之光穿透率的測量方法所應用的測量系統1,該測量系統1包括一積分球10、一主光源20、一校正光源30、一光測量裝置40與一處理裝置50。
In order to explain the present invention more clearly, the preferred embodiments are described in detail in conjunction with the drawings as follows. Please refer to FIG. 2, which is a
該積分球10具有一第一入光口12、一第二入光口14及一出光口16,其中,該主光源20朝向該第一入光口12,且該第一入光口12的外側供放置待測樣品60,該校正光源30朝向該第二入光口14。該主光
源20包括一第一光產生機22、一第一準直鏡24與一第一擋板26,該第一光產生機22用以產生一預定波長範圍的光線,例如200~1700nm波長範圍的光線,光線經由該第一準直鏡24射出,而該第一擋板26可受控制而遮擋光線或移開光路讓光線通過。該校正光源30包括一第二光產生機32、一第二準直鏡34與一第二擋板36,前述構件與該主光源20相同,容不贅述。該校正光源30可固設於該積分球10上。該光測量裝置40包括一光譜儀(spectroradiometer)42,該光譜儀42透過一光纖44連接至該出光口16,但不以此為限,亦可該光譜儀42直接連接至該出光口16。該光譜儀42用以測量通過該出光口16的光通量,且可分析對應200~1700nm波長範圍中的不同波長之光線的光通量。該處理裝置50電性連接該主光源20、該校正光源30、及該光譜儀42,用以控制該主光源20與該校正光源30的出光與否,例如可控制第一擋板26第二擋板36是否遮擋光線,以及接收該光譜儀42所測得的光通量之資料進行處理。
The
藉由上述架構即可進行本實施例的光穿透率的測量方法,該方法包含圖3所示之下列步驟,其中: The light transmittance measurement method of this embodiment can be performed by the above-mentioned structure, and the method includes the following steps shown in FIG. 3, wherein:
步驟S01:在未放置待測樣品60的條件下,進行一第一入射光通量取得步驟及一第一校正光通量取得步驟,其中:該第一入射光通量取得步驟包括:控制該校正光源30的光線停止入射該第二入光口14,及控制該主光源20的光線自該第一入光口12入射至該積分球10中,以該光測量裝置40測量通過該出光口16的一第一入射光通量。處理裝置50取得該第一入射光通量。本實施例中,該主光源20的光線入射至該第一入光口12的入射角以0度為例,亦可依需求選定入射角,前述之入射角之定義是指入射之光線與第一入光口12之法線的夾角。
Step S01: Under the condition that the
該第一校正光通量取得步驟包括:控制該主光源20的光線停止入射該第一入光口12,及控制該校正光源30的光線自該第二入光口14入射至該積分球10中,以該光測量裝置40測量通過該出光口16的一第一校正光通量。處理裝置50取得第一校正光通量。本實施例中,在該積分球10內部的反射的光線有部分會由該第一入光口12透出至該積分球10外部。
The step of obtaining the first corrected luminous flux includes: controlling the light of the main
前述該第一入射光通量取得步驟及該第一校正光通量取得步驟的先後順序可相互交換,不以上述所列之順序為限。 The order of the first incident light flux obtaining step and the first corrected light flux obtaining step can be interchanged, and the order listed above is not limited.
步驟S02:將待測樣品60置於該第一入光口12的外側,以該光測量裝置40測量通過該出光口16的一第二校正光通量。處理裝置50取得第二校正光通量。本實施例中,在該積分球10內部的反射的光線有部分會由該第一入光口12透出至該積分球外部,且透出的光線部分又被待測樣品60反射回積分球內部,因此,所測得的該第二校正光通量大於該第一校正光通量。
Step S02: Place the
步驟S03:控制該校正光源30的光線停止入射該第二入光口14,及控制該主光源20的光線通過該待測樣品60自該第一入光口12入射至該積分球10中,以該光測量裝置40測量通過該出光口16的一第二入射光通量。處理裝置50取得第二入射光通量。本實施例中,該主光源20的光線入射至該第一入光口12的入射角與該步驟S01之該第一入射光通量取得步驟中的入射角相同。在該積分球10內部的反射的光線有部分會由該第一入光口12透出至該積分球外部,且透出的光線部分又被待測樣品60反射回積分球內部。
Step S03: Control the light of the
由於本實施例中該主光源20與該校正光源30的光線涵蓋了該預定波長範圍(200~1700nm),且由於是採用光譜儀42測量光通
量,因此,該處理裝置50可由該光譜儀42的測量結果取得對應複數個不同波長的第一校正光通量、第二校正光通量、第一入射光通量及第二入射光通量,定義各波長下的第一校正光通量為Φcs(λ)、第二校正光通量為Φcal(λ)、第一入射光通量為Φi(λ)及第二入射光通量為Φs(λ),其中λ為特定的一個波長。
Because the light of the main
步驟S04:處理裝置50依據該第一校正光通量與該第二校正光通量取得一校正係數,校正係數以k表示,並將該第二入射光通量與該第一入射光通量的比值乘上該校正係數,以得到該待測樣品60的一光穿透率。該校正係數為該第一校正光通量與該第二校正光通量的比值。
Step S04: The processing
本實施例中,處理裝置50係依據對應各該波長的第一校正光通量Φcs(λ)與第二校正光通量Φcal(λ)產生對應各該波長的校正係數k(λ),將對應各該波長的第二入射光通量Φs(λ)與第一入射光通量Φi(λ)的比值乘上對應各該波長的校正係數k(λ),以得到對應各該波長的光穿透率τ(λ)。計算式如下τ(λ)=[Φs(λ)/Φi(λ)]×k(λ),其中k(λ)=Φcs(λ)/Φcal(λ)。
In this embodiment, the
每個波長的計算式相同,因此,處理裝置50使用光譜儀42的測量結果可得到複數個波長的光穿透率τ(λ)。
The calculation formula for each wavelength is the same. Therefore, the
若欲再測量其它待測樣品60在同樣入射角的光穿透率,則再次執行執行步驟S02至步驟S04,並且將原來的待測樣品60再更換為另一個待測樣品,如此即可取得另一個待測樣品的光穿透率。
If you want to measure the light transmittance of another
圖4為本發明的測量方法與習用的測量方法在不同波長之光穿透率曲線圖,其中係分別對待測樣品一與待測樣品二測量光穿透率,由於本發明的測量方法使用校正光源30並取得校正係數,因此,有
效地校正了被待測樣品反射回積分球之光線之誤差,而可準確得到光穿透率。
Figure 4 is a graph showing the light transmittance curves of the measuring method of the present invention and the conventional measuring method at different wavelengths, in which the light transmittance of the first sample and the second sample to be tested are measured respectively, because the measurement method of the present invention uses calibration The
圖5為本發明第二較佳實施例之光穿透率的測量方法所應用的測量系統2,該測量系統2係以第一實施例為基礎,更包含一轉動導引件70,該主光源20係設置在該轉動導引件70上,並且該主光源20係可受控制而沿該轉動導引件70移動,藉以改變主光源20的光線以不同的入射角入射至該第一入光口12。主光源20的移動方式可為手動控制移動,或是透過馬達等驅動件控制移動。
5 is a
本實施例的測量方法具有大致相同於第一實施例之步驟,不同的是: The measurement method of this embodiment has roughly the same steps as those of the first embodiment, but the difference is:
在步驟S01中,係執行複數次該第一入射光通量取得步驟,並且控制該主光源20的光線在每次第一入射光通量取得步驟以不同的一入射角自該第一入光口12入射至該積分球10中,以取得複數個對應不同入射角的第一入射光通量。處理裝置50將該些入射角之角度及對應的該些第一入射光通量儲存於一儲存裝置80。
In step S01, the first incident luminous flux obtaining step is executed a plurality of times, and the light of the main
在步驟S03中,係控制該主光源20的光線以一預定入射角通過該待測樣品自該第一入光口12入射至該積分球10中,以測得對應該預定入射角的第二入射光通量。本實施例中,係控制該主光源20沿該轉動導引件70轉動角度,以達到該預定入射角。
In step S03, the light from the main
在步驟S04中,處理裝置50依據對應該預定入射角的第一校正光通量與第二校正光通量產生對應該預定入射角的校正係數,並將對應該預定入射角的第二入射光通量與第一入射光通量的比值乘上對應該預定入射角的校正係數,以得到對應該預定入射角的光穿透率。本
實施例中,由於該預定入射角為已知,因此,該處理裝置50可自該儲存裝置取得對應該預定入射角的第一入射光通量,以供計算校正係數。
In step S04, the
由於使用的是光譜儀,因此,步驟S01的第一入射光通量取得步驟中,在每個入射角的第一入射光通量皆可包括了多個波長的第一入射光通量。在步驟S04所得到的預定入射角的光穿透率則包括了多個波長的光穿透率。 Since a spectrometer is used, in the first incident luminous flux obtaining step of step S01, the first incident luminous flux at each incident angle may include the first incident luminous flux of multiple wavelengths. The light transmittance of the predetermined incident angle obtained in step S04 includes the light transmittance of multiple wavelengths.
前述的各測量系統的光測量裝置40是以使用光譜儀42為例,在其它實施例中,該光測量裝置40亦可採用一光度計(photometer),該光度計係測量對應的光通量的光強度,亦即在步驟S01~S03中係分別以該光度計測量該第一校正光通量、該第二校正光通量、該第一入射光通量及該第二入射光通量。該主光源20的光線與該校正光源30的光線則是具有相同的波長。藉此,同樣可以測量待測樣品在特定波長之光線的一個光穿透率。
The
據上所述,透過本發明之光穿透率的測量方法,可藉由第一校正光通量與該第二校正光通量產生校正係數,以校正第二入射光通量與第一入射光通量的比值,而得到準確的光穿透率,有效消除因積分球內部的光線被待測樣品反射回積分球內,造成的測量誤差。 According to the above, the light transmittance measurement method of the present invention can be obtained by calibrating the ratio of the second incident luminous flux to the first incident luminous flux by generating a correction coefficient from the first calibrated luminous flux and the second calibrated luminous flux The accurate light transmittance effectively eliminates the measurement error caused by the light inside the integrating sphere being reflected back into the integrating sphere by the sample to be tested.
以上所述僅為本發明較佳可行實施例而已,舉凡應用本發明說明書及申請專利範圍所為之等效變化,理應包含在本發明之專利範圍內。 The above are only the preferred and feasible embodiments of the present invention. Any equivalent changes made by applying the specification of the present invention and the scope of the patent application should be included in the patent scope of the present invention.
S01~S04:步驟 S01~S04: steps
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW109112649A TWI736222B (en) | 2020-04-15 | 2020-04-15 | Measuring method of light transmittance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW109112649A TWI736222B (en) | 2020-04-15 | 2020-04-15 | Measuring method of light transmittance |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI736222B true TWI736222B (en) | 2021-08-11 |
TW202141030A TW202141030A (en) | 2021-11-01 |
Family
ID=78283166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW109112649A TWI736222B (en) | 2020-04-15 | 2020-04-15 | Measuring method of light transmittance |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI736222B (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101852648A (en) * | 2010-06-22 | 2010-10-06 | 海洋王照明科技股份有限公司 | Instrument and method for measuring luminous flux of light source |
CN102253011A (en) * | 2011-06-24 | 2011-11-23 | 杭州伏达光电技术有限公司 | Method for calculating relative equivalent transmittance of integrating sphere and uses thereof |
US20150260648A1 (en) * | 2014-03-14 | 2015-09-17 | Datacolor Holding Ag | System and method for haze measurement |
-
2020
- 2020-04-15 TW TW109112649A patent/TWI736222B/en active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101852648A (en) * | 2010-06-22 | 2010-10-06 | 海洋王照明科技股份有限公司 | Instrument and method for measuring luminous flux of light source |
CN102253011A (en) * | 2011-06-24 | 2011-11-23 | 杭州伏达光电技术有限公司 | Method for calculating relative equivalent transmittance of integrating sphere and uses thereof |
US20150260648A1 (en) * | 2014-03-14 | 2015-09-17 | Datacolor Holding Ag | System and method for haze measurement |
Also Published As
Publication number | Publication date |
---|---|
TW202141030A (en) | 2021-11-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3995579B2 (en) | Film thickness measuring device and reflectance measuring device | |
US7262854B2 (en) | Multi-angle colorimeter | |
US9170156B2 (en) | Normal-incidence broadband spectroscopic polarimeter containing reference beam and optical measurement system | |
US5581350A (en) | Method and system for calibrating an ellipsometer | |
US5771094A (en) | Film measurement system with improved calibration | |
US8830473B2 (en) | Device for referenced measurements of reflected light and a method for calibrating such a device | |
JP2002098591A (en) | Spectral oval polarimeter provided with refractive lighting optical system | |
US20230194667A1 (en) | Distance Measuring Apparatus, Distance Measuring Method, Camera and Electronic Device | |
JPH07509315A (en) | Spectrometer for Renzometer | |
JP2007139632A (en) | Reflectivity measuring instrument and reflectivity measuring method | |
JP2010048640A (en) | Absolute spectroradiometer | |
TWI736222B (en) | Measuring method of light transmittance | |
WO2022055642A1 (en) | Calibration of azimuth angle for optical metrology stage using grating-coupled surface plasmon resonance | |
CN111998782A (en) | Optical measuring device and method | |
JP5548989B2 (en) | Fourier coefficient measurement using an integrating photodetector | |
US9347823B2 (en) | Absolute measurement method and apparatus thereof for non-linear error | |
US6856395B2 (en) | Reflectometer arrangement and method for determining the reflectance of selected measurement locations of measurement objects reflecting in a spectrally dependent manner | |
KR102022836B1 (en) | Apparatus for measuring light, system and method thereof | |
JP2006201162A (en) | Method for calibrating wavelength of optical measuring system | |
CN111504461A (en) | Double-beam photometric device for optimizing repeatability and optimization method | |
US20050128478A1 (en) | Optical unit and measuring apparatus having the same | |
CN211905063U (en) | Spectrum transmittance measuring device | |
JP4260683B2 (en) | Ellipsometer, polarization state acquisition method and light intensity acquisition method | |
JP2005274143A (en) | Method for analyzing multicomponent aqueous solution | |
Ershov et al. | Setup for measuring the threshold energy of infrared radiation |