TWI735116B - A low-vibration cooling circulator - Google Patents

Abstract

When the cooling liquid is driven by a pump-like source in a normal cooling circulator, the pumping pulsation is transmitted from flows to the connected optical components, which produces undesired vibrations in the cooling cycles. Therefore, we proposed a circulating system with a pressurized air supply. The compressed air, driving force of the water flow, can make a stable flow and avoid the pumping pulsation and therefore, the mirror to be cooled becomes more stable. According to the experimental results, the vibrations of the cooled mirror measured by the autocollimator can be decreased by 40-70% when the flow rate is eight liter per minute.

Description

Low vibration ice machine system

The invention relates to a cooling system, in particular to a low-vibration cooling liquid circulation system.

The waste heat generated by the operation of various mechanical or electronic devices is a thermodynamically inevitable phenomenon. However, the large amount of heat generated by high-power components will not only cause performance degradation, but may even damage their own components. To ensure that the components can work at a suitable temperature, appropriate Means of cooling.

The circulating cooling water system is a kind of cooling method, which has the advantages of low noise and good cooling efficiency. However, the commercial ice liquid machine mostly uses the pump to transport the cooling liquid to the part to be cooled, and the vibration generated when the pump pushes the liquid It will be transmitted through the liquid and pipelines, and to the parts to be cooled connected to the liquid path, which is not conducive to the operation of some precision machines.

Therefore, the present invention provides a low-vibration ice-liquid machine system, which uses gas pressure to replace the pump to push the cooling liquid so that it can flow stably, avoiding the impact caused by the pump pushing and reducing the vibration of the part 50 to be cooled. It includes a pressure tank 10, a pressurized gas supply 20, a main water supply pump 30 and a cooling and temperature control tank 40; wherein the pressure tank 10 has a first liquid inlet 13, a liquid outlet 15 and an inlet Air 11 and an air outlet 12; wherein the cooling temperature control tank 40 contains a coolant and is connected to the main water supply pump 30, the main water supply pump 30 and the pressure tank 10 pass through the first liquid inlet 13 Connected, so that the cooling liquid in the cooling temperature control tank 40 is injected into the pressure barrel 10; wherein the pressurized gas supplier 20 is connected to the pressure barrel 10 through the air inlet 11 to provide a stable high-pressure gas to push the pressure barrel 10 The cooling liquid flows out from a liquid outlet 15 and is connected to a component to be cooled 50, and the high-pressure gas is discharged from the pressure barrel 10 through the gas outlet 12.

In some embodiments of the present invention, in the low-vibration ice machine system, the cooling liquid is connected to the cooling temperature control groove 40 after passing through the part 50 to be cooled, so that the cooling liquid passes through the part 50 to be cooled Then return to the cooling temperature control tank 40.

In some embodiments of the present invention, in the low-vibration ice-liquid machine system, the pressure tank 10 is provided with a buffer shield 16 above the liquid level of the cooling liquid to eliminate the disturbance generated when the cooling liquid is injected The buffer mask 16 has a plurality of holes for gas and liquid to pass through.

In some embodiments of the present invention, in the low-vibration ice machine system, the buffer shield 16 floats on the liquid level of the cooling liquid, and can be parallel to the pressure tank 10 along with the liquid level. Sliding in the direction of the wall.

In some embodiments of the present invention, the low-vibration ice-liquid machine system further includes a flow control valve 31 so that the coolant injected by the main water supply pump 30 passes through the liquid inlet at a set stable flow rate Pour the pressure tank 10 into it.

In some embodiments of the present invention, the low-vibration ice-liquid machine system further includes a replenishing pump 60; wherein the pressure tank 10 also includes a second liquid inlet 14 and a float level gauge 17; Wherein the cooling temperature control tank 40 is connected with the auxiliary water supply pump 60, the auxiliary water supply pump 60 and the pressure tank 10 are connected through the second liquid inlet 14, when the float level gauge 17 indicates the pressure When the height of the liquid level in the barrel 10 is lower than a lower limit, the auxiliary water replenishing pump 60 is controlled to inject the cooling liquid in the cooling temperature control tank 40 into the pressure barrel 10.

In some embodiments of the present invention, in the low-vibration ice-liquid machine system, the pressure bucket 10 further includes a drain valve 70, and the pressure bucket 10 and the cooling temperature control tank 40 pass through the drain valve 70 When connected, when the float level gauge indicates that the liquid level in the pressure tank is higher than a high limit, the drain valve 70 is opened to allow the cooling liquid to be injected into the cooling temperature control tank.

In some embodiments of the present invention, the low-vibration ice machine system further includes a pressure stabilization controller 21, which allows the pressurized gas injected by the pressurized gas supply 20 to pass through the set stable gas pressure The air inlet 11 is injected into the pressure barrel 10.

In some embodiments of the present invention, in the low-vibration ice machine system, the cooling liquid is water.

In some embodiments of the present invention, in the low-vibration ice machine system, the pressurized gas supply 20 is a gas cylinder.

In some embodiments of the present invention, in the low-vibration ice machine system, the pressurized gas is air.

Referring to FIG. 1, the low-vibration ice machine system of the present invention includes a pressure bucket 10, a pressurized gas supply 20, a main water supply pump 30, and a cooling temperature control tank 40. Using air pressure instead of the pump to push the cooling water to the part to be cooled 50 can avoid the impact caused by the pump.

The pressurized gas supply 20 can be a gas cylinder or a gas pressurizing device.

After the cooling liquid absorbs the heat energy of the part 50 to be cooled, it can return to the cooling temperature control tank 40 via the pipeline to form a closed loop.

A flow meter 18 and a thermometer 19 can be installed at the liquid outlet 15 to set the required flow rate and temperature of the coolant, and feedback to control the pressure required by the pressurized gas supply 20 to adjust the required air pressure, and feedback to control the cooling and temperature control tank 40 to adjust The required temperature.

In order to ensure that the pressurized gas injected into the pressure tank 10 is at a stable air pressure, in some embodiments, a pressure stabilization controller 21 can be added to achieve this purpose.

In order to ensure that the main water supply pump 30 injects the coolant into the pressure tank 10 at a set flow rate, in some embodiments, a flow control valve 31 can be added to achieve this purpose.

If there is an error in the injection volume and the discharge volume of the coolant in the pressure tank 10, after a period of operation, the liquid level in the tank may be too high or too low to work normally. In some embodiments, a float level gauge 17 may be installed in the pressure tank 10, and the auxiliary water replenishment pump 60 may be feedback controlled to inject the cooling liquid or the drain valve 70 may be controlled to open so that the cooling liquid is discharged to the cooling temperature control tank to maintain The liquid level of the coolant in the barrel is within a working range.

In some embodiments, a buffer shield 16 may be provided above the liquid level of the cooling liquid, so as to avoid the disturbance caused by directly hitting the cooling liquid in the barrel when the cooling liquid is injected. The buffer shield 16 has holes for gas and liquid to pass through, and can be erected at a fixed height or floated in a barrel with cooling liquid, and moves in a direction parallel to the barrel wall as the liquid level rises and falls.

In order to compare the difference between the low-vibration ice machine of the present invention and the commercial ice water machine (Polyscience), the comparison sampling time is 30 seconds at 0 (background value), 3.5 and 8.0 liters/min per minute, and repeated 5 times. The data obtained is as follows:

For the currently measured TPS 45A HFM, the commercially available ice water machine can only reach a flow rate of 3.5L/min. At this flow rate, the low-vibration ice-liquid machine of the present invention can reduce the roll direction angle vibration by 70%, and Although the surrounding water in the synchrotron radiation center can reach a higher flow rate (8L/min), it will also cause greater vibration. If you switch to a low-vibration chiller, about 80% of the roll direction angle vibration can be reduced.

The low-vibration ice-liquid machine of the present invention can greatly reduce the vibration caused by the pump of the traditional ice-water machine, while maintaining the ability of temperature control and long-term operation. Compared with commercially available ice water machines, the current pressure bucket technology can provide a higher coolant flow rate, and at the same time, the vibration of the cooling element can be reduced to 30%-80% of the original (depending on the measurement direction).

For a 350-watt heat source, the low-vibration ice machine system of the present invention takes about 1.5 hours to reach the set temperature of 20°C, and the temperature after stabilization is 20.29 ±0.01°C, as shown in Figure 2.

The long-term operation test shows that the low-vibration ice machine system of the present invention can output a stable water flow and temperature within 120 hours of the test period, as shown in Figure 3.

10　Pressure barrel 11　 air intake 12　Exhaust point 13　The first inlet 14　 second inlet 15　 fluid outlet 16　buffer mask 17　 float level gauge 18　Flowmeter 19　 Thermometer 20　pressurized gas supply 21　Pressure Stability Controller 22　Barometer 30　Main water supply pump 31　Flow control valve 40　Cooling temperature control tank 50 　 pieces to be cooled 60　 deputy water supply pump 70 　 drain valve

Figure 1 is a system setup diagram of the low-vibration ice liquid machine of the present invention.

Figure 2 shows the cooling effect of the low-vibration ice machine system of the present invention.

Figure 3 shows the test results of continuous 120 hours of long-term operation.

none

10: Pressure tank

11: Inlet

12: Out of breath

13: The first liquid inlet

14: The second inlet

15: Outlet

16: buffer mask

17: Float level gauge

18: Flowmeter

19: Thermometer

20: Pressurized gas supply

21: Pressure stability controller

22: Barometer

30: Main water supply pump

31: Flow control valve

40: Cooling temperature control tank

50: Parts to be cooled

60: Deputy Water Pump

70: Drain valve

Claims (10)

A low-vibration ice-liquid machine system, comprising: a pressure bucket, a pressurized gas supply, a main water supply pump and a cooling temperature control tank; wherein the pressure bucket has a first liquid inlet, a liquid outlet and An air inlet and an air outlet; wherein a cooling liquid is stored in the cooling temperature control tank and connected to the main water supply pump, and the main water supply pump is connected with the pressure barrel through the first liquid inlet to make the cooling The cooling liquid in the temperature control tank is injected into the pressure barrel; wherein the pressurized gas supplier is connected to the pressure barrel through the air inlet to provide a stable high-pressure gas to push the cooling liquid in the pressure barrel from the liquid outlet to the outlet A part to be cooled, the high-pressure gas is discharged from the pressure barrel from the outlet; a buffer shield is arranged in the pressure barrel above the liquid level of the coolant to eliminate the disturbance generated when the coolant is injected, the buffer shield The cover has a plurality of holes for gas and liquid to pass through. According to the low-vibration ice machine system described in claim 1, the cooling liquid is also connected to the cooling temperature control tank after passing through the part to be cooled, so that the cooling liquid returns to the cooling temperature control tank after passing through the part to be cooled. According to the low-vibration ice machine system of claim 2, the buffer shield floats above the liquid level of the cooling liquid, and can slide along the direction parallel to the wall of the pressure bucket as the liquid level rises and falls. The low-vibration ice machine system according to claim 1, further comprising a flow control valve, so that the coolant injected by the main water supply pump is injected into the pressure bucket through the liquid inlet at a set stable flow rate. The low-vibration ice machine system according to claim 1, further comprising a set of water supply pumps; wherein the pressure tank also includes a second liquid inlet and a float level gauge; wherein the cooling temperature control tank is connected with The auxiliary water supply pump is connected, and the auxiliary water supply pump is connected with the pressure tank through the second liquid inlet. When the float level gauge indicates that the liquid level in the pressure tank is lower than a lower limit, the control auxiliary The water supply pump makes the cooling liquid in the cooling and temperature control tank inject into the pressure barrel. The low-vibration ice machine system according to claim 5, wherein the pressure bucket further includes a drain valve, and the pressure bucket and the cooling temperature control tank are connected through the drain valve, and when the float level gauge indicates the When the liquid level in the pressure tank is higher than a high limit, the drain valve is opened so that the cooling liquid is injected into the cooling temperature control tank. The low-vibration ice machine system according to claim 1, further comprising a pressure stabilization controller, which allows the high-pressure gas injected by the pressurized gas supplier to be injected into the pressure bucket through the inlet at a set stable gas pressure. The low-vibration ice machine system according to claim 1, wherein the cooling liquid is water. The low-vibration ice machine system according to claim 1, wherein the pressurized gas supply is a gas cylinder. The low-vibration ice machine system according to claim 1, wherein the high-pressure gas is air.

Images