TWI726512B - Process recipe monitoring method and system thereof - Google Patents

Process recipe monitoring method and system thereof Download PDF

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TWI726512B
TWI726512B TW108143820A TW108143820A TWI726512B TW I726512 B TWI726512 B TW I726512B TW 108143820 A TW108143820 A TW 108143820A TW 108143820 A TW108143820 A TW 108143820A TW I726512 B TWI726512 B TW I726512B
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recipe
file
processing unit
data processing
user equipment
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TW202011296A (en
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蕭郁倫
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亞智科技股份有限公司
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Abstract

A process recipe monitoring method is provided. The process recipe monitoring method includes the following steps. First, receiving a request from a user equipment. Then, a recover command is received and includes the following steps. Determining whether the user equipment could perform a recover mode. Entering a locked state to restrict only the user equipment control a database and a recipe description database. Recovering a plurality of sub-recipe items and the corresponding sub-recipe values of a current recipe file according to a plurality of target sub-recipe items and the corresponding target sub-recipe values of target main version data. A main version data and a plurality of sub-version data of the current recipe file after recovering are recorded. Storing the current recipe file into the database after recovering. In addition, a process recipe monitoring system is also provided.

Description

製程配方監控方法及製程配方監控系統Process recipe monitoring method and process recipe monitoring system

本發明是有關於一種製程配方監控方法與製程配方監控系統,且特別是有關於一種可彈性調整配方項目之監控方法與監控系統。The present invention relates to a method and a system for monitoring a process recipe, and more particularly to a method and a monitoring system that can adjust recipe items flexibly.

隨著製程技術的進步,製程產品之品質不僅取決於製程程式,機台狀況的好壞與否也是其中關鍵的一環。機台能以特定的管控條件(control rule)設定達成特定機台生產特定產品的目的,於基板處理裝置中,通常係以配方檔來設定機台之製造流程與製造條件。然而,習用PLC控制的機台(使用者設備)之配方檔係設定固定的管控條件給予單一產品生產使用,故缺乏彈性,無法針對製程產品特性加入或修改新的控制規則及參數調整。此外,機台配方的控管通常在人機介面(使用者設備)所提供的功能限制下,管制範圍並不彈性,一旦輸入錯誤的製程控制條件,並無回復機制讓機台復原到先前某一個特定版本之配方檔。再者,每個版本之配方檔內包含複數個配方項目及其相應之配方數值,於目前的機制之下,並無回復機制讓配方檔在某一個版本中,針對某一個特定配方項目及其相對應之配方數值單獨進行復原,更甚者,若於不同版本之配方檔的配方項目若有增減而有不一致的狀況,也無法較為彈性地供操作者回復所需求之配方檔。With the advancement of process technology, the quality of process products not only depends on the process program, but the condition of the machine is also a key part of it. The machine can be set with a specific control rule to achieve the purpose of producing a specific product by a specific machine. In a substrate processing apparatus, a recipe file is usually used to set the machine's manufacturing process and manufacturing conditions. However, the recipe files of conventional PLC-controlled machines (user equipment) set fixed control conditions for single product production and use, so they lack flexibility and cannot add or modify new control rules and parameter adjustments for process product characteristics. In addition, the control of machine recipes is usually limited by the functions provided by the human-machine interface (user equipment), and the scope of control is not flexible. Once the wrong process control conditions are entered, there is no recovery mechanism to restore the machine to a previous one. A formula file of a specific version. Furthermore, the formula file of each version contains multiple formula items and their corresponding formula values. Under the current mechanism, there is no recovery mechanism to allow the formula file to be in a certain version for a specific formula item and its corresponding formula value. The corresponding formula values are restored individually. What's more, if the formula items in different versions of the formula files are increased or decreased and there are inconsistencies, it is not possible for the operator to restore the required formula files more flexibly.

因此,如何改良並能提供一種『製程配方監控方法及製程配方監控系統』來避免上述所遭遇到的問題,係業界所亟待解決之課題。Therefore, how to improve and provide a "process recipe monitoring method and process recipe monitoring system" to avoid the problems encountered above is a problem that the industry needs to solve urgently.

本發明的一目的在於,可供使用者回溯至所需求之特定配方檔,提升製程配方使用上的彈性。An object of the present invention is to allow users to go back to the required specific formula file, and to improve the flexibility in the use of process formulas.

本發明的一實施例提出一種製程配方能被執行監控方法,包括以下步驟:接收一使用者設備的連線請求;以及接收使用者設備之一回溯命令,包括以下步驟:判斷是否能執行一回溯模式;進入一鎖定狀態,以限制僅供使用者設備控制一資料庫與一配方描述資料庫,其中資料庫中一目前配方檔包含一主版本版次資料與複數個次配方資料,各次配方資料包含一次配方項目、一次配方版本資料與一次配方數值,配方描述資料庫包含一配方規則描述檔,依據配方規則描述檔執行目前配方檔;依據一目標主版本資料之複數個目標次配方項目與複數個目標次配方數值,復原目前配方檔中相對應之次配方項目與次配方數值;記錄經回溯後之目前配方檔中主版本版次資料與各次配方版本資料;及存取經回溯後之目前配方檔至資料庫。An embodiment of the present invention provides a method for monitoring that a process recipe can be executed, which includes the following steps: receiving a connection request from a user equipment; and receiving a traceback command from the user equipment, including the following steps: judging whether a traceback can be executed Mode; enter a locked state to restrict only the user equipment to control a database and a recipe description database, where a current recipe file in the database contains a major version version data and multiple sub-recipe data, each recipe The data includes one-time formula items, one-time formula version data, and one-time formula values. The formula description database contains a formula rule description file. The current formula file is executed according to the formula rule description file; the multiple target sub-recipe items and multiple target sub-recipe items according to a target major version data Multiple target sub-recipe values, restore the corresponding sub-recipe items and sub-recipe values in the current recipe file; record the major version version data and the data of each sub-recipe version in the current recipe file after backtracking; and access after backtracking File the current formula to the database.

本發明之一實施例提出一種製程配方監控系統,製程配方監控系統包括一資料處理單元以及一配方資料單元。資料處理單元係接收一使用者設備的連線請求。配方資料單元連接於資料處理單元,配方資料單元包含一資料庫、一配方描述資料庫與一回溯模組,資料庫包含一目前配方檔,目前配方檔包含一主版本版次資料與複數個次配方資料,各次配方資料包含一次配方項目、一次配方版本資料與一次配方數值,配方描述資料庫包含一配方規則描述檔,依據配方規則描述檔執行目前配方檔。資料處理單元接收一回溯命令時,資料處理單元判斷是否能執行一回溯模式,若是,資料處理單元對配方資料單元進入一鎖定狀態,以限制使用者設備控制資料庫與配方描述資料庫。依據一目標主版本資料之複數個目標次配方項目與複數個目標次配方數值,回溯模組復原目前配方檔中相對應之次配方項目與次配方數值,且資料處理單元記錄經回溯後之目前配方檔中主版本版次資料與各次配方版本資料,並存取經回溯後之目前配方檔至資料庫。An embodiment of the present invention provides a process recipe monitoring system. The process recipe monitoring system includes a data processing unit and a recipe data unit. The data processing unit receives a connection request from the user equipment. The recipe data unit is connected to the data processing unit. The recipe data unit includes a database, a recipe description database, and a backtracking module. The database includes a current recipe file. The current recipe file includes a major version data and multiple times. Recipe data. Each recipe data includes a recipe item, a recipe version data, and a recipe value. The recipe description database contains a recipe rule description file, and the current recipe file is executed according to the formula rule description file. When the data processing unit receives a traceback command, the data processing unit determines whether a traceback mode can be executed. If so, the data processing unit enters a locked state on the recipe data unit to restrict the user equipment control database and the recipe description database. Based on a plurality of target sub-recipe items and a plurality of target sub-recipe values of a target major version data, the retrospective module restores the corresponding sub-recipe items and sub-recipe values in the current recipe file, and the data processing unit records the current after the retrospect The version data of the major version and the version data of each sub-recipe in the recipe file, and access the current recipe file after backtracking to the database.

基於上述,在本發明的製程配方監控方法與製程配方監控系統中,可將目前配方檔回溯到先前某一個特定版本之配方檔,以復原目前配方檔中特定或全部之次配方項目與相對應之次配方數值,藉此提升製程配方使用上的彈性。Based on the above, in the process recipe monitoring method and process recipe monitoring system of the present invention, the current recipe file can be traced back to a specific version of the previous recipe file to restore specific or all sub-recipe items in the current recipe file. Secondly, the formula value is used to improve the flexibility of the process formula.

再者,由於可針對特定或全部之次配方項目與相對應之次配方數值進行復原,故本發明可針對主版本模式或特定次配方模式進行回溯,換言之,本發明不僅可針對先前特定某一版本之主版本版次資料進行復原以外,更可針對某一個特定次配方項目及其相對應之次次配方數值進行復原,藉此可供使用者回溯至所需求之目前配方檔。Furthermore, since it is possible to restore specific or all sub-recipe items and corresponding sub-recipe values, the present invention can be traced back to the major version mode or the specific sub-recipe mode. In other words, the present invention can not only target a specific previous In addition to recovering the version data of the major version of the version, it can also recover a specific sub-recipe item and its corresponding sub-recipe value, so that users can go back to the current recipe file they need.

另外,針對上述經回溯後或經編輯後的目標配方檔,本發明會記錄新的主版本版次資料與各次配方版本資料,而非將主版本版次資料與各次配方版本資料全數復原至先前某一個特定版本之配方檔。In addition, for the above-mentioned target formula file that has been backtracked or edited, the present invention records the new major version version data and each sub-recipe version data, instead of restoring the major version version data and each sub-recipe version data. To the previous formula file of a specific version.

為讓本發明能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the present invention more comprehensible, the following embodiments are specially cited and are described in detail below in conjunction with the accompanying drawings.

以下結合附圖和實施例,對本發明的具體實施方式作進一步描述。以下實施例僅用於更加清楚地說明本發明的技術方案,而不能以此限制本發明的保護範圍。The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings and embodiments. The following embodiments are only used to illustrate the technical solutions of the present invention more clearly, and cannot be used to limit the protection scope of the present invention.

圖1為本發明之製程配方監控系統的示意圖。圖2A為本發明之目前配方檔的示意圖。圖2B為本發明之配方規則描述檔的示意圖。圖2C為本發明之目標配方檔的示意圖。圖2D為本發明之經回溯後之目前配方檔一實施例的示意圖。請先參閱圖1。在本實施例中,製程配方監控系統10包括一資料處理單元11、一配方資料單元12以及一製程單元13。Figure 1 is a schematic diagram of the process recipe monitoring system of the present invention. Figure 2A is a schematic diagram of the current recipe file of the present invention. Figure 2B is a schematic diagram of the formula rule description file of the present invention. Figure 2C is a schematic diagram of the target recipe file of the present invention. 2D is a schematic diagram of an embodiment of the current recipe file after retrospective of the present invention. Please refer to Figure 1 first. In this embodiment, the process recipe monitoring system 10 includes a data processing unit 11, a recipe data unit 12 and a process unit 13.

資料處理單元11係可透過硬體(例如積體電路)、軟體(例如處理器執行之程式指令)或其組合來實現通訊連線與邏輯判斷之功能,例如電腦或其他計算機裝置。在本實施例中,資料處理單元11係能與使用者設備30彼此傳輸一命令C,資料處理單元11係接收使用者設備30之連線請求並等待接收使用者設備30之命令C,資料處理單元11係判斷使用者設備30是否具備權限能執行命令,並傳輸命令C通知使用者設備30。為了便於說明,圖1僅繪示命令C,命令C之名稱可依據資料處理單元11與使用者設備30(或另一使用者設備40)之不同需求而定,舉例而言,使用者設備30係供使用者輸入如回溯命令C1或編輯命令C2至資料處理單元11,而資料處理單元11能依據不同情況係傳輸如拒絕命令C3、鎖定命令C41、解除鎖定命令C42、拒絕回溯命令C5、拒絕編輯命令C6、更新命令C7以及通知命令C8等命令C至使用者設備30。在另一實施例中,資料處理單元11係能同時或不同時間接收使用者設備30及另一使用者設備40之連線請求或命令C,故資料處理單元11亦係能與另一使用者設備40彼此傳輸命令C。本實施例之使用者設備30與另一使用者設備40例如為人機介面(Human Machine Interface,HMI)、製造執行系統(Manufacturing Execution System,MES)、網路圖形用戶界面(Web Graphical User Interface,Web GUI)或其他通訊界面。The data processing unit 11 can realize the functions of communication connection and logical judgment through hardware (such as integrated circuits), software (such as program instructions executed by a processor), or a combination thereof, such as a computer or other computer devices. In this embodiment, the data processing unit 11 and the user equipment 30 can transmit a command C to each other. The data processing unit 11 receives the connection request from the user equipment 30 and waits to receive the command C from the user equipment 30. Data processing The unit 11 determines whether the user equipment 30 has the authority to execute the command, and transmits the command C to notify the user equipment 30. For the convenience of description, FIG. 1 only shows the command C. The name of the command C can be determined according to the different requirements of the data processing unit 11 and the user equipment 30 (or another user equipment 40). For example, the user equipment 30 It is for the user to input the traceback command C1 or the edit command C2 to the data processing unit 11, and the data processing unit 11 can transmit the reject command C3, lock command C41, unlock command C42, reject traceback command C5, reject according to different situations The commands C such as the edit command C6, the update command C7, and the notification command C8 are sent to the user equipment 30. In another embodiment, the data processing unit 11 can receive connection requests or commands C from the user equipment 30 and another user equipment 40 at the same time or at different times, so the data processing unit 11 can also communicate with another user. The devices 40 transmit commands C to each other. The user equipment 30 and another user equipment 40 in this embodiment are, for example, a human machine interface (HMI), a manufacturing execution system (MES), and a web graphic user interface (Web Graphical User Interface, Web GUI) or other communication interface.

配方資料單元12連接於資料處理單元11。配方資料單元12包含一資料庫121、一配方描述資料庫123、一歷史資料庫125以及一回溯模組127,各資料庫係因應使用者需求設計,可以混合/組合或以單一資料記憶單元呈現。資料庫121存儲包含一目前配方(Recipe)檔RF(見圖2A),目前配方檔RF包含一主版本版次(Version)資料VM與複數個次配方(Sub-Recipe)資料SR,各次配方資料SR包含一次配方項目(Sub-Recipe Item)SRI、一次配方版本(Sub-Recipe Version)資料SRV與一次配方數值SRN,每個次配方項目SRI係對應有次配方版本SRV與次配方數值SRN,次配方項目SRI例如為藥液、壓力、製程溫度、製程時間、升溫時間、降溫時間或基板厚度等,可端視實際機台與製程所需來調整次配方項目,次配方數值SRN係依據前述次配方項目SRI來設定數值,而每一次修改次配方數值SRN會變動次配方版本SRV之版本資訊。The recipe data unit 12 is connected to the data processing unit 11. The recipe data unit 12 includes a database 121, a recipe description database 123, a historical database 125, and a retrospective module 127. Each database is designed according to user needs and can be mixed/combined or presented as a single data memory unit . The database 121 stores and contains a current recipe (Recipe) file RF (see Figure 2A). The current recipe file RF contains a major version (Version) data VM and a plurality of sub-recipe (Sub-Recipe) data SR, each recipe Data SR includes Sub-Recipe Item SRI, Sub-Recipe Version Data SRV and Primary Recipe Value SRN. Each Sub-Recipe Item SRI corresponds to the Sub-Recipe Item SRV and Sub-Recipe Value SRN. Sub-recipe items SRI, such as chemical liquid, pressure, process temperature, process time, heating time, cooling time or substrate thickness, etc., can be adjusted according to the actual machine and process requirements. The sub-recipe value SRN is based on the aforementioned The secondary recipe item SRI is used to set the value, and each time the secondary recipe value SRN is modified, the version information of the secondary recipe version SRV will be changed.

配方描述資料庫123存儲包含一配方規則描述檔RRDF(見圖2B),配方規則描述檔RRDF係為一可擴展標記語言(Extensible markup language,XML)之設定檔,依據配方規則描述檔RRDF執行目前配方檔RF。在本實施例中,配方規則描述檔RRDF係設定目前配方檔RF中各次配方項目SRI相對應次配方數值SRN之上限值、下限值與預設值,此外,配方規則描述檔RRDF還能設定目前配方檔RF中各次配方項目SRI之編輯(Edit)權限條件、控制條件、通訊條件與複合條件,其中編輯權限條件係指使用者可否針對次配方項目SRI進行讀取(Read)、寫入(Write)、僅可讀取(Read Only)或是否可見(Visible or Invisible)之修改權限;控制條件例如係製程配方監控系統10運作時可允許編輯;通訊條件係允許特定條件而可連線;複合條件係針對多個次配方項目SRI之間的限制條件,舉例而言,某一個次配方項目SRI為製程溫度,另一個次配方項目SRI為降溫時間,所述複合條件係設定製程溫度大於120度時,同時降溫時間需設定大於30秒。The recipe description database 123 stores and contains a recipe rule description file RRDF (see Figure 2B). The recipe rule description file RRDF is an Extensible Markup Language (XML) configuration file. Formula file RF. In this embodiment, the formula rule description file RRDF sets the upper limit, lower limit and preset value of the SRN corresponding to each sub-recipe item SRI in the current formula file RF. In addition, the formula rule description file RRDF also It can set the editing (Edit) permission conditions, control conditions, communication conditions and compound conditions of each sub-recipe item SRI in the current recipe file RF. The editing permission conditions refer to whether the user can read (Read), or not for the sub-recipe item SRI. Write, read only, or visible (Visible or Invisible) modification permissions; for example, the control condition is that editing is allowed when the process recipe monitoring system 10 is operating; the communication condition allows specific conditions and can be connected Line; compound conditions are for the restriction conditions between multiple sub-recipe items SRI, for example, a certain sub-recipe item SRI is the process temperature, another sub-recipe item SRI is the cooling time, and the compound condition is the set process temperature When the temperature is greater than 120 degrees, the cooling time must be set to be greater than 30 seconds at the same time.

歷史資料庫125係供存取歷史資料,其包含變動前之目前配方檔RF以及如圖2C所示之目標配方檔TRF,其中目標配方檔TRF包含目標主版本資料TVM與複數個目標次配方資料TSR,各目標次配方資料TSR包含一目標次配方項目TSRI、一目標次配方版本資料TSRV與一目標次配方數值TSRN,目標次配方項目TSRI例如為藥液、壓力、製程溫度、製程時間、升溫時間、降溫時間或基板厚度等,可端視實際機台與製程所需來調整目標次配方項目,目標次配方數值TSRN係依據前述目標次配方項目TSRI來設定數值,而目標次配方版本SRV係為修改次配方數值SRN之變動版本資訊。回溯模組127連接資料庫121、配方描述資料庫123與歷史資料庫125,回溯模組127係依據回溯命令C1對目前配方檔RF進行回溯,於回溯之前,資料處理單元11係存取回溯前之目前配方檔RF至歷史資料庫125,接著,依據目標配方檔TRF中的複數個目標次配方項目TSRI與複數個目標次配方數值TSRV,回溯模組127復原目前配方檔RF中特定幾個或全部之次配方項目SRI與相對應之次配方數值SRN,舉例而言,圖2C中的目標次配方項目TSRI對應至圖2A中的次配方項目SRI,並將圖2A中相對應次配方項目SRI之次配方數值SRN復原至圖2C中的目標次配方數值TSRN,即圖2D圖之經回溯後之目前配方檔RFB。此外,資料處理單元11記錄經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,並存取經回溯後之目前配方檔RFB(如圖2D所示)至資料庫121。需說明的是,在此資料處理單元11處理經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,並非是將經回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB記錄為目標配方檔TRF中的目標主版本資料TVM與各目標次配方資料TSR,而是更新回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB,舉例而言,圖2A所示之回溯前之目前配方檔RF中的主版本版次資料VM為10,次配方版本資料SRV為6,圖2D所示之回溯後之目前配方檔RFB的主版本版次資料VMB為11,次配方版本資料SRVB為7,在此紀錄版本係以遞增為例,在另一實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。The historical database 125 is for accessing historical data, which includes the current formula file RF before the change and the target formula file TRF as shown in Figure 2C. The target formula file TRF includes the target main version data TVM and multiple target sub-recipe data. TSR, each target sub-recipe data TSR includes a target sub-recipe item TSRI, a target sub-recipe version data TSRV, and a target sub-recipe value TSRN. The target sub-recipe items TSRI are, for example, chemical solution, pressure, process temperature, process time, and temperature rise. Time, cooling time or substrate thickness, etc., can be adjusted according to the actual machine and process requirements to adjust the target sub-recipe items. The target sub-recipe value TSRN is based on the aforementioned target sub-recipe item TSRI to set the value, and the target sub-recipe version SRV is To modify the version information of the SRN of the secondary recipe value. The traceback module 127 connects the database 121, the recipe description database 123 and the historical database 125. The traceback module 127 traces the current recipe file RF according to the traceback command C1. Before the traceback, the data processing unit 11 accesses the traceback. The current formula file RF is sent to the historical database 125. Then, based on the multiple target sub-recipe items TSRI and the multiple target sub-recipe values TSRV in the target recipe file TRF, the retrospective module 127 restores the specific number or values in the current recipe file RF. All secondary recipe items SRI and the corresponding secondary recipe values SRN, for example, the target secondary recipe item TSRI in Figure 2C corresponds to the secondary recipe item SRI in Figure 2A, and the corresponding secondary recipe item SRI in Figure 2A The secondary formula value SRN is restored to the target secondary formula value TSRN in Fig. 2C, which is the current formula file RFB after retrospective in Fig. 2D. In addition, the data processing unit 11 records the major version version data VMB and the sub-recipe version data SRVB in the current recipe file RFB after the traceback, and accesses the current recipe file RFB (as shown in Figure 2D) after the traceback to the database 121 . It should be noted that the data processing unit 11 processes the main version version data VMB and the sub-recipe version data SRVB in the current formula file RFB after the retrospect, not the main version in the current formula file RFB after the retrospect. The version data VMB and each sub-recipe version data SRVB are recorded as the target major version data TVM and each target sub-recipe data TSR in the target recipe file TRF, but the major version version data VMB in the current recipe file RFB after the update backtracking. With each recipe version data SRVB, for example, the major version version data VM in the current recipe file RF before the backtracking shown in Figure 2A is 10, the minor recipe version data SRV is 6, and the backtracking shown in Figure 2D The current recipe file RFB has a major version version data VMB of 11, and a minor recipe version data SRVB of 7. In this example, the record version is incremental. In another embodiment, the record version can be encoded in other ways or according to requirements. Set to it.

製程單元13連接資料處理單元11,資料處理單元11接收配方資料單元12傳輸之目前配方檔RF與配方規則描述檔RRDF,且資料處理單元11傳輸目前配方檔RF與配方規則描述檔RRDF至製程單元13,製程單元13依據目前配方檔RF與配方規則描述檔RRDF對基板進行製程,而目前配方檔RF係依據配方規則描述檔RRDF之規定執行。The processing unit 13 is connected to the data processing unit 11. The data processing unit 11 receives the current recipe file RF and the recipe rule description file RRDF transmitted by the recipe data unit 12, and the data processing unit 11 transmits the current recipe file RF and the recipe rule description file RRDF to the processing unit 13. The process unit 13 processes the substrate according to the current formula file RF and the formula rule description file RRDF, and the current formula file RF is executed according to the provisions of the formula rule description file RRDF.

圖3為本發明的製程配方監控方法的流程圖。圖4為圖3中接收使用者設備的連線請求的流程圖。圖5為圖4中啟動資料處理單元的流程圖。圖6為圖3中接收使用者設備之回溯命令的流程圖。圖7為圖6中判斷使用者設備是否能執行回溯模式的流程圖。圖8為圖7中判斷使用者設備是否具有權限的流程圖。圖9為圖8中檢視配方規則描述檔是否能被執行的流程圖。圖10為圖3中接收使用者設備之編輯命令的流程圖。圖11為圖10中判斷使用者設備是否能執行編輯模式的流程圖。圖12為圖11中檢視配方規則描述檔是否能被執行的流程圖。圖13為圖10中提供目前配方檔以供使用者設備編輯的流程圖。Figure 3 is a flow chart of the process recipe monitoring method of the present invention. FIG. 4 is a flowchart of receiving a connection request from the user equipment in FIG. 3. Fig. 5 is a flowchart of starting the data processing unit in Fig. 4; FIG. 6 is a flowchart of receiving a traceback command from the user equipment in FIG. 3. FIG. FIG. 7 is a flowchart of judging whether the user equipment can execute the backtracking mode in FIG. 6. FIG. 8 is a flowchart of judging whether the user equipment has authority in FIG. 7. Fig. 9 is a flowchart of checking whether the recipe rule description file can be executed in Fig. 8. FIG. 10 is a flowchart of receiving an edit command from the user equipment in FIG. 3. FIG. FIG. 11 is a flowchart of judging whether the user equipment can execute the edit mode in FIG. 10. Fig. 12 is a flowchart of checking whether the recipe rule description file can be executed in Fig. 11. FIG. 13 is a flowchart of the current recipe file provided in FIG. 10 for editing by the user equipment.

請先參閱圖3,本實施例的製程配方監控方法S10係可用於如圖1所示製程配方監控系統10。製程配方監控方法S10包括以下步驟S11~S13。進行步驟S11,接收一使用者設備30的連線請求,以圖1為例,資料處理單元11係接收使用者設備30之連線請求並等待接收使用者設備30之命令C,步驟S11可包括以下步驟S112至步驟S116,請參閱圖4,進行步驟S112,啟動一資料處理單元11,使得資料處理單元11能執行通訊連線與邏輯判斷之功能。於步驟S112之後,進行步驟S114,藉由資料處理單元11以取得資料庫121中目前配方檔RF與配方描述資料庫123中配方規則描述檔RRDF。接著,進行步驟S116,使用者設備30係連線至資料處理單元11。詳細而言,步驟S112可包括以下步驟S22至步驟S26,請參閱圖5,進行步驟S22,讀取一原始描述檔,原始描述檔係為一可擴展標記語言(Extensible markup language,XML)之設定檔。以圖1為例,資料處理單元11讀取製程單元13之原始描述檔,以解析製程單元13配方之結構。接著,進行步驟S24,依據原始描述檔,比對配方描述資料庫123中配方規則描述檔RRDF是否匹配。以圖1為例,資料處理單元11係先檢視原始描述檔之描述格式與設定條件(如上限值、下限值、預設值、編輯權限條件、控制條件、通訊條件與複合條件)是否正確與是否能被執行,若否,資料處理單元11傳輸一通知命令C8至使用者設備30顯示異常;反之,若原始描述檔之描述格式與設定條件是正確與能被執行,資料處理單元11連接至配方描述資料庫123並提取配方規則描述檔RRDF,資料處理單元11係比對原始描述檔與配方規則描述檔RRDF是否可以匹配,所述判斷是否可以匹配,係依據配方規則描述檔RRDF中針對目前配方檔RF中各次配方項目SRI相對應次配方數值SRN之上限值、下限值與預設值以及各次配方項目SRI之編輯(Edit)權限條件、控制條件、通訊條件與複合條件來判斷與原始描述檔相對應之資料是否存在且一致。在一實施例中,若資料處理單元11判斷原始描述檔與配方規則描述檔RRDF可以匹配,資料處理單元11傳輸通知命令C8至使用者設備30顯示正常而可繼續執行。在另一實施例中,若資料處理單元11判斷原始描述檔與配方規則描述檔RRDF不可以匹配,進行步驟S26,若未匹配,更新配方規則描述檔RRDF至配方描述資料庫123,以圖1為例,資料處理單元11係鎖定配方描述資料庫123,以禁止另一使用者設備40(包含其他使用者設備)讀取與寫入配方描述資料庫123,接著,資料處理單元11係依據原始描述檔來更新配方規則描述檔RRDF至配方描述資料庫123,於更新後,資料處理單元11解除對配方描述資料庫123之鎖定狀態,並通知使用者設備30可繼續執行,此舉來確保原始描述檔係符合配方資料單元12中的配方規則描述檔RRDF。需說明的是,上述圖5依據原始描述檔來比對配方規則描述檔RRDF之動作,除了可啟動製程配方監控系統10以外,於使用者設備30需要編輯或回溯時,亦可依據上述圖5之流程來判斷配方規則描述檔RRDF是否匹配製程單元13的原始描述檔。Please refer to FIG. 3 first. The process recipe monitoring method S10 of this embodiment can be used in the process recipe monitoring system 10 shown in FIG. 1. The process recipe monitoring method S10 includes the following steps S11 to S13. Step S11 is performed to receive a connection request from the user equipment 30. Taking FIG. 1 as an example, the data processing unit 11 receives the connection request from the user equipment 30 and waits to receive the command C from the user equipment 30. Step S11 may include For the following steps S112 to S116, please refer to FIG. 4, and proceed to step S112 to activate a data processing unit 11 so that the data processing unit 11 can perform the functions of communication connection and logic judgment. After step S112, step S114 is performed to obtain the current recipe file RF in the database 121 and the recipe rule description file RRDF in the recipe description database 123 through the data processing unit 11. Then, in step S116, the user equipment 30 is connected to the data processing unit 11. In detail, step S112 may include the following steps S22 to S26. Please refer to FIG. 5, and proceed to step S22 to read an original description file. The original description file system is an Extensible Markup Language (XML) setting files. Taking FIG. 1 as an example, the data processing unit 11 reads the original description file of the process unit 13 to analyze the structure of the recipe of the process unit 13. Next, proceed to step S24 to compare whether the formula rule description file RRDF in the formula description database 123 matches according to the original description file. Taking Figure 1 as an example, the data processing unit 11 first checks whether the description format and setting conditions of the original description file (such as upper limit value, lower limit value, default value, editing authority condition, control condition, communication condition and compound condition) are correct And whether it can be executed, if not, the data processing unit 11 transmits a notification command C8 to the user equipment 30 to display abnormality; on the contrary, if the description format and setting conditions of the original description file are correct and can be executed, the data processing unit 11 is connected Go to the formula description database 123 and extract the formula rule description file RRDF. The data processing unit 11 compares whether the original description file and the formula rule description file RRDF can be matched. The upper limit, lower limit and default value of SRN corresponding to each recipe item SRI in the current recipe file RF, as well as the edit authority conditions, control conditions, communication conditions and compound conditions of each recipe item SRI To determine whether the data corresponding to the original description file exists and is consistent. In one embodiment, if the data processing unit 11 determines that the original description file and the recipe rule description file RRDF can match, the data processing unit 11 transmits a notification command C8 to the user equipment 30 to display normal and can continue to execute. In another embodiment, if the data processing unit 11 determines that the original description file and the recipe rule description file RRDF cannot match, step S26 is performed. If there is no match, the recipe rule description file RRDF is updated to the recipe description database 123, as shown in FIG. 1 For example, the data processing unit 11 locks the recipe description database 123 to prohibit another user device 40 (including other user devices) from reading and writing the recipe description database 123. Then, the data processing unit 11 is based on the original The description file is used to update the recipe rule description file RRDF to the recipe description database 123. After the update, the data processing unit 11 unlocks the recipe description database 123 and informs the user that the device 30 can continue execution. This ensures the original The description file system complies with the recipe rule description file RRDF in the recipe data unit 12. It should be noted that the action of comparing the formula rule description file RRDF according to the original description file in the above figure 5, in addition to starting the process recipe monitoring system 10, when the user equipment 30 needs to edit or backtrack, it can also be based on the above figure 5 The process of determining whether the formula rule description file RRDF matches the original description file of the process unit 13.

請復參閱圖3,於步驟S11之後,使用者設備30連線至資料處理單元11,接著,使用者設備30依據使用者需求而傳輸命令C至資料處理單元11,所述命令C例如為一回溯命令C1或一編輯命令C2。在本實施例中,使用者設備30係傳輸回溯命令C1至資料處理單元11,資料處理單元11接收使用者設備30之回溯命令C1(步驟S12),步驟S12可包括以下步驟S121至步驟S129B,請參閱圖6,進行步驟S121,資料處理單元11判斷是否能執行一回溯模式,即資料處理單元11接收使用者設備30之回溯命令C1後,判斷使用者設備30是否能執行回溯模式,若否,進行步驟S129,拒絕使用者設備30並通知使用者設備30。詳細而言,步驟S121可包括以下步驟S32至步驟S36,請參閱圖7,進行步驟S32,資料處理單元11判斷資料庫121與配方描述資料庫123是否為鎖定狀態,亦即資料處理單元11檢查資料庫121是否被另一使用者設備40(包含其他使用者設備)鎖定或指定編輯之目前配方檔RF被另一使用者設備40(包含其他使用者設備)使用中,以及配方描述資料庫123是否被另一使用者設備40(包含其他使用者設備)鎖定或配方規則描述檔RRDF是否正在被另一使用者設備40(包含其他使用者設備)編輯,若是,則資料庫121與配方描述資料庫123被鎖定,資料處理單元11判斷使用者設備30不能執行回溯模式,故進行步驟S36,拒絕使用者設備30,並通知使用者設備30。因此,資料處理單元11傳輸一拒絕回溯命令C5至使用者設備30並通知使用者設備30拒絕執行回溯命令C1。反之,若資料處理單元11判斷資料庫121與配方描述資料庫123並未被另一使用者設備40(包含其他使用者設備)控制中,進行步驟S34,判斷是否具有權限,資料處理單元11若判斷使用者設備30不具有權限進行回溯,進行步驟S36,拒絕使用者設備30,並通知使用者設備30,因此,資料處理單元11傳輸一拒絕命令C3至使用者設備30並通知使用者設備30。詳細而言,資料處理單元11判斷是否具有權限之步驟S34可包括步驟S341至步驟S345,請參閱圖8,進行步驟S341,判斷是否能登入,以圖1為例,資料處理單元11係載入關於使用者設備30之使用者的帳號密碼,並檢查使用者的帳號密碼是否正確,接著資料處理單元11檢查是否該使用者的帳號密碼是否有重複登入,亦即同一使用者的帳號密碼由使用者設備30登入以外,檢查是否有其他使用者設備以同一使用者的帳號密碼登入。若檢查後使用者的帳號密碼不正確,或者使用者的帳號密碼有重複登入,則資料處理單元11判斷使用者設備30不能登入,進行步驟S345,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30以通知使用者設備30。若步驟S341判斷為是,使用者設備30能登入,進行步驟S342,判斷配方描述資料庫123中配方規則描述檔RRDF是否被鎖定,以圖1為例,資料處理單元11判斷配方描述資料庫123中配方規則描述檔RRDF是否被鎖定,所述鎖定係指配方描述資料庫123中配方規則描述檔RRDF是否被另一使用者設備40(包含其他使用者設備)控制使用,若是,進行步驟S345,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30。在一實施例中,資料處理單元11進一步判斷另一使用者設備40鎖定配方規則描述檔RRDF是否逾時,若否,資料處理單元11持續供另一使用者設備40鎖定配方規則描述檔RRDF以進行編輯;反之,若另一使用者設備40鎖定配方規則描述檔RRDF已逾時而超過一特定時間,資料處理單元11傳輸拒絕命令C3並通知使用者設備30與另一使用者設備40已逾時。於步驟S342中,若資料處理單元11判斷配方描述資料庫123中配方規則描述檔RRDF並未被鎖定,接著進行步驟S343,資料處理單元11取得自配方描述資料庫123中的配方規則描述檔RRDF。接著,進行步驟S344,檢視配方規則描述檔RRDF是否能被執行,若否,進行步驟S345,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30。詳細而言,步驟S344可包括步驟S42至步驟S46,請參閱圖9,進行步驟S42,判斷使用者設備30是否有權限能編輯配方規則描述檔RRDF。以圖1為例,資料處理單元11依據編輯權限條件來判斷使用者設備30是否有權限能編輯配方規則描述檔RRDF,若判斷為否,進行步驟S46,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30不能編輯配方規則描述檔RRDF;反之,若判斷為是,使用者設備30有權限能編輯配方規則描述檔RRDF,並進行步驟S44,檢視是否能供使用者設備30編輯配方規則描述檔RRDF。以圖1為例,資料處理單元11依據控制條件與通訊條件來判斷是否能供使用者設備30編輯配方規則描述檔RRDF,若判斷為否,進行步驟S46,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30不可編輯配方規則描述檔RRDF;反之,若判斷為是,目前可供使用者設備30編輯配方規則描述檔RRDF。Please refer to FIG. 3 again. After step S11, the user equipment 30 is connected to the data processing unit 11. Then, the user equipment 30 transmits a command C to the data processing unit 11 according to the user's requirement. The command C is, for example, a Backtracking command C1 or an editing command C2. In this embodiment, the user equipment 30 transmits the traceback command C1 to the data processing unit 11, and the data processing unit 11 receives the traceback command C1 from the user equipment 30 (step S12). Step S12 may include the following steps S121 to S129B, Referring to FIG. 6, proceed to step S121. The data processing unit 11 determines whether a traceback mode can be executed, that is, after receiving the traceback command C1 of the user equipment 30, the data processing unit 11 determines whether the user equipment 30 can execute the traceback mode, if not , Proceed to step S129, reject the user equipment 30 and notify the user equipment 30. In detail, step S121 may include the following steps S32 to S36. Please refer to FIG. 7 and proceed to step S32. The data processing unit 11 determines whether the database 121 and the recipe description database 123 are locked, that is, the data processing unit 11 checks Whether the database 121 is locked by another user equipment 40 (including other user equipment) or the current recipe file RF designated for editing is being used by another user equipment 40 (including other user equipment), and the recipe description database 123 Whether it is locked by another user equipment 40 (including other user equipment) or whether the recipe rule description file RRDF is being edited by another user equipment 40 (including other user equipment), if so, the database 121 and the recipe description data The library 123 is locked, and the data processing unit 11 determines that the user equipment 30 cannot execute the retrospective mode, so it proceeds to step S36, rejects the user equipment 30, and informs the user equipment 30. Therefore, the data processing unit 11 transmits a backtracking rejection command C5 to the user equipment 30 and notifies the user equipment 30 to refuse to execute the backtracking command C1. Conversely, if the data processing unit 11 determines that the database 121 and the recipe description database 123 are not controlled by another user equipment 40 (including other user equipment), step S34 is performed to determine whether the data processing unit 11 is authorized. It is determined that the user equipment 30 does not have the authority to trace back, and step S36 is performed to reject the user equipment 30 and notify the user equipment 30. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 and informs the user equipment 30 . In detail, the step S34 for the data processing unit 11 to determine whether it has the authority can include steps S341 to S345. Please refer to FIG. 8 and proceed to step S341 to determine whether it is possible to log in. Taking FIG. 1 as an example, the data processing unit 11 loads Regarding the user’s account password of the user device 30, and check whether the user’s account password is correct, then the data processing unit 11 checks whether the user’s account password has been logged in repeatedly, that is, the account password of the same user is used In addition to the user device 30 logging in, check whether there is another user device logging in with the account password of the same user. If the user’s account and password are incorrect after the check, or the user’s account and password has been repeatedly logged in, the data processing unit 11 determines that the user equipment 30 cannot log in, and proceeds to step S345, rejects the user equipment 30 to log in, and informs the user equipment 30. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 to notify the user equipment 30. If the determination in step S341 is yes, the user equipment 30 can log in, and proceed to step S342 to determine whether the formula rule description file RRDF in the formula description database 123 is locked. Taking FIG. 1 as an example, the data processing unit 11 determines the formula description database 123 Whether the formula rule description file RRDF is locked in the middle, the lock refers to whether the formula rule description file RRDF in the formula description database 123 is controlled and used by another user equipment 40 (including other user equipment). If so, proceed to step S345, The user equipment 30 is refused to log in and the user equipment 30 is notified. Therefore, the data processing unit 11 transmits the refusal command C3 to the user equipment 30 and notifies the user equipment 30. In one embodiment, the data processing unit 11 further determines whether another user equipment 40 locks the recipe rule description file RRDF timeout. If not, the data processing unit 11 continues to allow another user equipment 40 to lock the recipe rule description file RRDF for Edit; On the contrary, if another user equipment 40 locks the recipe rule description file RRDF has expired and exceeded a specific time, the data processing unit 11 transmits the rejection command C3 and informs the user equipment 30 and the other user equipment 40 that the time has expired Time. In step S342, if the data processing unit 11 determines that the recipe rule description file RRDF in the recipe description database 123 is not locked, then step S343 is performed. The data processing unit 11 obtains the recipe rule description file RRDF in the recipe description database 123 . Next, proceed to step S344 to check whether the recipe rule description file RRDF can be executed. If not, proceed to step S345 to deny the user equipment 30 to log in, and notify the user equipment 30. Therefore, the data processing unit 11 transmits the refusal command C3 to the use The user device 30 and the user device 30 are notified. In detail, step S344 may include step S42 to step S46. Please refer to FIG. 9 and proceed to step S42 to determine whether the user equipment 30 has the authority to edit the recipe rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 determines whether the user equipment 30 has the authority to edit the recipe rule description file RRDF according to the editing authority conditions. If the determination is no, proceed to step S46, deny the user equipment 30 to log in, and notify the user Therefore, the data processing unit 11 transmits the rejection command C3 to the user device 30 and informs the user device 30 that it cannot edit the formula rule description file RRDF; otherwise, if the judgment is yes, the user device 30 has the authority to edit the formula rule Description file RRDF, and proceed to step S44 to check whether the user equipment 30 can edit the formula rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 determines whether the user equipment 30 can edit the formula rule description file RRDF according to the control conditions and communication conditions. If the determination is no, proceed to step S46, deny the user equipment 30 to log in, and notify The user equipment 30, therefore, the data processing unit 11 transmits the rejection command C3 to the user equipment 30 and informs the user equipment 30 that the recipe rule description file RRDF cannot be edited; on the contrary, if the judgment is yes, the user equipment 30 is currently available for editing the recipe Rule description file RRDF.

請復參閱圖6,於步驟S121判斷使用者設備30能執行回溯模式之後,進行步驟S122,進入一鎖定狀態,以限制僅供使用者設備30控制一資料庫121與一配方描述資料庫123,其中資料庫121中一目前配方檔RF包含一主版本版次資料VM與複數個次配方資料SR,各次配方資料SR包含次配方項目SRI、次配方版本資料SRV與次配方數值SRN,配方描述資料庫123包含一配方規則描述檔RRDF,依據配方規則描述檔RRDF執行目前配方檔RF。以圖1為例,資料處理單元11傳輸鎖定命令C41至使用者設備30,因此,此時另一使用者設備40或其他使用者設備即便連線至資料處理單元11,由於資料庫121與配方描述資料庫123已被使用者設備30控制而進入鎖定狀態,此時資料處理單元11傳輸拒絕命令C3並通知另一使用者設備40或其他使用者設備已有使用者設備30鎖定資料庫121與配方描述資料庫123,使得另一使用者設備40仍無法控制資料庫121與配方描述資料庫123。接著,進行步驟S123,存取回溯前之目前配方檔RF至一歷史資料庫125,因此,資料處理單元11係將回溯前之目前配方檔RF存取至歷史資料庫125。接著,進行步驟S124,依據一目標主版本資料TVM之複數個目標次配方項目TSRI與複數個目標次配方數值TSRN,復原目前配方檔RF中相對應之次配方項目SRI與次配方數值SRN。舉例而言,圖2A中的次配方項目SRI對應至圖2C中的目標次配方項目TSRI,故將圖2A中相對應次配方項目SRI之次配方數值SRN復原至圖2C中的目標次配方數值TSRN,即圖2D圖之經回溯後之目前配方檔RFB。此外,由於此時目前配方檔RF需被回溯,資料處理單元11係可依據如圖5所示,判斷製程單元13中的原始描述檔與配方描述資料庫123中配方規則描述檔RRDF是否匹配,判斷為匹配,接著,資料處理單元11判斷目前配方檔RF中的每一個次配方資料SR的編輯資料是否符合格式及配方規則描述檔RRDF。Please refer to FIG. 6 again. After it is determined in step S121 that the user equipment 30 can execute the retrospective mode, step S122 is performed to enter a locked state to restrict only the user equipment 30 to control a database 121 and a recipe description database 123. Among them, a current recipe file RF in the database 121 contains a major version version data VM and a plurality of sub-recipe data SR. Each sub-recipe data SR includes the sub-recipe item SRI, the sub-recipe version data SRV and the sub-recipe value SRN, formula description The database 123 includes a recipe rule description file RRDF, and executes the current recipe file RF according to the recipe rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 transmits the lock command C41 to the user equipment 30. Therefore, even if another user equipment 40 or other user equipment is connected to the data processing unit 11 at this time, because the database 121 and the recipe Describe that the database 123 has been controlled by the user equipment 30 and enters the locked state. At this time, the data processing unit 11 transmits a rejection command C3 and informs another user equipment 40 or other user equipment that the user equipment 30 has locked the database 121 and The recipe description database 123 makes it impossible for another user device 40 to control the database 121 and the recipe description database 123. Then, step S123 is performed to access the current recipe file RF before the backtracking to a historical database 125. Therefore, the data processing unit 11 accesses the current recipe file RF before the backtracking to the historical database 125. Next, proceed to step S124 to restore the corresponding sub-recipe item SRI and sub-recipe value SRN in the current recipe file RF according to the plurality of target sub-recipe items TSRI and the plurality of target sub-recipe values TSRN of a target major version data TVM. For example, the secondary recipe item SRI in Figure 2A corresponds to the target secondary recipe item TSRI in Figure 2C, so the secondary recipe value SRN of the corresponding secondary recipe item SRI in Figure 2A is restored to the target secondary recipe value in Figure 2C TSRN, which is the current formula file RFB after retrospective in Figure 2D. In addition, since the current recipe file RF needs to be backtracked at this time, the data processing unit 11 can determine whether the original description file in the process unit 13 matches the recipe rule description file RRDF in the recipe description database 123 according to FIG. 5, It is judged as a match, and then, the data processing unit 11 judges whether the edited data of each sub-recipe data SR in the current recipe file RF conforms to the format and the recipe rule description file RRDF.

進行上述步驟S124之後,接著進行步驟S125,記錄經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB。接著,而後進行步驟S126,存取經回溯後之目前配方檔RFB至資料庫121。以圖1為例,資料處理單元11係依據使用者設備30傳輸之回溯命令C1,進一步判斷回溯模式,回溯模式可為一回復主版本模式或者一回復特定次配方模式。After the above step S124 is performed, step S125 is then performed to record the major version version data VMB and the sub-recipe version data SRVB in the current recipe file RFB after being traced back. Then, step S126 is performed to access the current recipe file RFB after the traceback to the database 121. Taking FIG. 1 as an example, the data processing unit 11 further determines the backtracking mode according to the backtracking command C1 transmitted by the user equipment 30. The backtracking mode can be a mode of returning to a major version or a mode of returning to a specific secondary recipe.

在一實施例中,回溯模式為回復主版本模式,所述主版本模式係指將目前配方檔RF復原至一特定版本之配方檔,特定版本之配方檔例如為目標配方檔TRF,依據目標配方檔TRF中複數個目標次配方項目TSRI與複數個目標次配方數值TSRV,回溯模組127復原目前配方檔RF中全部之次配方項目SRI與相對應之次配方數值SRN。舉例而言,回溯前之目前配方檔RF中的主版本版次資料VM為10,某一次配方版本資料SRV為6,另一次配方版本資料SRV為7,欲將目前配方檔RF回復至主版本版次為8的狀況,若目標配方檔TRF之目標主版本資料TVM為8,故回溯模組127依據目標配方檔TRF中複數個目標次配方項目TSRI與複數個目標次配方數值TSRV,對應回復目前配方檔RF中全部之次配方項目SRI與相對應之次配方數值SRN,接著,資料處理單元11存取經回溯後之目前配方檔RFB至資料庫121。在一實施例中,圖2C中每一個目標次配方項目TSRI對應至圖2A中次配方項目SRI,並將圖2A中相對應次配方項目SRI之次配方數值SRN復原至圖2C中的目標次配方數值TSRN,即圖2D圖之經回溯後之目前配方檔RFB。此外,資料處理單元11記錄經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,接著,資料處理單元11存取經回溯後之目前配方檔RFB(如圖2D所示)至資料庫121。需說明的是,在此資料處理單元11處理經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,並非是將經回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB記錄為目標配方檔TRF中的目標主版本資料TVM與各目標次配方資料TSR,而是更新回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB,因此,圖2A所示之回溯前之目前配方檔RF中的主版本版次資料VM為10,某一次配方版本資料SRV為6,另一次配方版本資料SRV為7,圖2D所示之回溯後之目前配方檔RFB的主版本版次資料VMB為11,某一次配方版本資料SRV為7,另一次配方版本資料SRV為8,在此紀錄版本係以遞增為例,在其他實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。另需說明的是,由於回溯前之目前配方檔RF中次配方版本資料SRV的數量可能會與所欲回復之目標配方檔TRF中的目標次配方項目TSRI之數量不同,故資料處理單元11依據目前配方檔RF,比對歷史資料庫125中的目標配方檔TRF是否匹配,判斷每個次配方項目SRI是否能對應到相應之目標次配方項目TSRI,若有無法匹配對應之次配方項目SRI,在回溯步驟中保留目前配方檔RF中次配方項目SRI與對應之配方數值SRN,若有能匹配對應之次配方項目SRI,在回溯步驟中將能匹配對應之次配方項目SRI對應並取代為目標次配方項目TSRI,與此同時,亦將次配方項目SRI相對應之次配方數值SRV取代復原至目標次配方數值TSRV。In one embodiment, the retrospective mode is the recovery master version mode. The master version mode refers to restoring the current formula file RF to a formula file of a specific version. The formula file of the specific version is, for example, the target formula file TRF, based on the target formula A plurality of target sub-recipe items TSRI and a plurality of target sub-recipe values TSRV in the file TRF, the retrospective module 127 restores all the sub-recipe items SRI and the corresponding sub-recipe values SRN in the current recipe file RF. For example, the main version version data VM in the current recipe file RF before the retrospective is 10, one recipe version data SRV is 6, and the other recipe version data SRV is 7. I want to restore the current recipe file RF to the main version If the version number is 8, if the target major version data TVM of the target recipe file TRF is 8, the backtracking module 127 responds according to the multiple target sub-recipe items TSRI and the multiple target sub-recipe values TSRV in the target recipe file TRF. All the sub-recipe items SRI and the corresponding sub-recipe value SRN in the current recipe file RF, and then, the data processing unit 11 accesses the current recipe file RFB that has been traced back to the database 121. In one embodiment, each target sub-recipe item TSRI in FIG. 2C corresponds to the sub-recipe item SRI in FIG. 2A, and the sub-recipe value SRN of the corresponding sub-recipe item SRI in FIG. 2A is restored to the target sub-recipe item in FIG. 2C The formula value TSRN is the current formula file RFB after retrospective in Figure 2D. In addition, the data processing unit 11 records the major version version data VMB and each sub-recipe version data SRVB in the current recipe file RFB after the traceback, and then the data processing unit 11 accesses the current recipe file RFB after the traceback (Figure 2D). Shown) to database 121. It should be noted that the data processing unit 11 processes the main version version data VMB and the sub-recipe version data SRVB in the current formula file RFB after the retrospect, not the main version in the current formula file RFB after the retrospect. The version data VMB and each sub-recipe version data SRVB are recorded as the target major version data TVM and each target sub-recipe data TSR in the target recipe file TRF, but the major version version data VMB in the current recipe file RFB after the update backtracking. With each recipe version data SRVB, therefore, the major version version data VM in the current recipe file RF before the traceback shown in Figure 2A is 10, one recipe version data SRV is 6, and the other recipe version data SRV is 7. , The main version data VMB of the current recipe file RFB after the retrospective shown in Figure 2D is 11, one recipe version data SRV is 7, and the other recipe version data SRV is 8. The record version is incremented as an example. In other embodiments, the record version can be set in other encoding methods or according to requirements. In addition, it should be noted that since the quantity of secondary formula version data SRV in the current formula file RF before the retrospect may be different from the quantity of the target secondary formula item TSRI in the target formula file TRF to be restored, the data processing unit 11 is based on The current formula file RF is compared with the target formula file TRF in the historical database 125 to determine whether each sub-recipe item SRI can correspond to the corresponding target sub-recipe item TSRI. If there is no match to the corresponding sub-recipe item SRI, In the traceback step, keep the secondary formula item SRI in the current formula file RF and the corresponding formula value SRN. If there is a matching secondary formula item SRI, in the traceback step, the corresponding secondary formula item SRI will be matched and replaced with the target The secondary recipe item TSRI, at the same time, also replaces and restores the secondary recipe value SRV corresponding to the secondary recipe item SRI to the target secondary recipe value TSRV.

在另一實施例中,回溯模式為回復特定次配方模式,所述特定次配方模式係指將目前配方檔RF中某一特定或某幾個次配方項目SRI復原至目標配方檔TRF中相對應之目標次配方項目TSRI。舉例而言,回溯前之目前配方檔RF中的主版本版次資料VM為10,某一特定次配方版本資料SRV為6,另一個次配方版本資料SRV為7,若將目前配方檔RF中某一特定之次配方項目SRI與相對應之次配方數值SRN復原至某一個次配方版本中相對應次配方項目與次配方數值,某一個次配方版本例如為目標主版本資料TVM,若目標配方檔TRF之目標主版本資料TVM為8,目標次配方版本資料TSRV為5,故回溯模組127依據目標主版本資料TVM,將目標次配方項目TSRI與目標次配方數值TSRV,對應復原目前配方檔RF中的次配方項目SRI與相對應之次配方數值SRN。此外,資料處理單元11記錄經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,接著,資料處理單元11存取經回溯後之目前配方檔RFB(如圖2D所示)至資料庫121。需說明的是,在此資料處理單元11處理經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,並非是將經回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB記錄為目標配方檔TRF中的目標主版本資料TVM與各目標次配方資料TSR,而是更新回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB,並保留未經回溯之次配方版本資料SRVB,因此,在一實施例中,圖2A所示之回溯前之目前配方檔RF中的主版本版次資料VM為10,某一特定次配方項目SRI對應至某一特定次配方版本資料SRV為6,另一個特定次配方項目SRI對應至另一個次配方版本資料SRV為7,進行特定次配方模式,將目前配方檔RF中某一特定次配方項目SRI復原至目標配方檔TRF中相對應之目標次配方項目TSRI,而不需回溯另一個特定次配方項目SRI,圖2D所示之回溯後之目前配方檔RFB的主版本版次資料VMB為11,回溯後之某一特定次配方項目SRI對應至某一特定次配方版本資料SRVB為7,即遞增經回溯後之各次配方版本資料,另一個特定次配方項目SRI由於未經回溯故另一個次配方版本資料SRV仍然維持為7,在此紀錄版本係以遞增為例,在其他實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。另需說明的是,由於回溯前之目前配方檔RF中次配方版本資料SRV的數量可能會與所欲回復之目標配方檔TRF中的目標次配方項目TSRI之數量不同,故資料處理單元11依據目前配方檔RF,比對歷史資料庫125中的目標配方檔TRF是否匹配,判斷每個次配方項目SRI是否能對應到相應之目標次配方項目TSRI,若有無法匹配對應之次配方項目SRI,在回溯步驟中保留目前配方檔RF中次配方項目SRI與對應之配方數值SRN,若有能匹配對應之次配方項目SRI,在回溯步驟中將能匹配對應之次配方項目SRI對應並取代為目標次配方項目TSRI,與此同時,亦將次配方項目SRI相對應之次配方數值SRV取代復原至目標次配方數值TSRV。In another embodiment, the retrospective mode is to restore a specific sub-recipe mode, and the specific sub-recipe mode refers to restoring a specific or a few sub-recipe items SRI in the current recipe file RF to the corresponding target recipe file TRF The target secondary formula project TSRI. For example, the major version version data VM in the current recipe file RF before the retrospective is 10, the version data SRV of a specific minor recipe is 6, and the other minor recipe version data SRV is 7. If you put the current recipe file RF in A specific secondary formula item SRI and the corresponding secondary formula value SRN are restored to the corresponding secondary formula item and secondary formula value in a certain secondary formula version. A certain secondary formula version is the target major version data TVM, for example, if the target formula The target major version data TVM of the TRF file is 8 and the target minor formula version data TSRV is 5. Therefore, the traceback module 127 uses the target major version data TVM to restore the target minor formula item TSRI and the target minor formula value TSRV to restore the current formula file. The sub-recipe item SRI in the RF and the corresponding sub-recipe value SRN. In addition, the data processing unit 11 records the major version version data VMB and each sub-recipe version data SRVB in the current recipe file RFB after the traceback, and then the data processing unit 11 accesses the current recipe file RFB after the traceback (Figure 2D). Shown) to database 121. It should be noted that the data processing unit 11 processes the main version version data VMB and the sub-recipe version data SRVB in the current formula file RFB after the retrospect, not the main version in the current formula file RFB after the retrospect. The version data VMB and each sub-recipe version data SRVB are recorded as the target major version data TVM and each target sub-recipe data TSR in the target recipe file TRF, but the major version version data VMB in the current recipe file RFB after the update backtracking. And each sub-recipe version data SRVB, and retain the non-retrospected sub-recipe version data SRVB. Therefore, in one embodiment, the main version version data VM in the current recipe file RF before the retracing shown in FIG. 2A is 10. , A specific sub-recipe item SRI corresponds to a specific sub-recipe version data SRV of 6, and another specific sub-recipe item SRI corresponds to another sub-recipe version data SRV of 7. Perform the specific sub-recipe mode and save the current recipe file A specific sub-recipe item SRI in the RF is restored to the corresponding target sub-recipe item TSRI in the target recipe file TRF without going back to another specific sub-recipe item SRI. Figure 2D shows the current recipe file RFB after the backtracking. The major version version data VMB is 11, the SRI of a specific sub-recipe item after the retrospect corresponds to a specific sub-recipe version data SRVB is 7, that is, the version data of each sub-recipe after the retrospect is incremented, and another specific sub-recipe item Since the SRI has not been backtracked, the data SRV of the other sub-recipe version is still maintained at 7. Here, the record version is incremented as an example. In other embodiments, the record version can be set in other encoding methods or according to requirements. In addition, it should be noted that since the quantity of secondary formula version data SRV in the current formula file RF before the retrospect may be different from the quantity of the target secondary formula item TSRI in the target formula file TRF to be restored, the data processing unit 11 is based on The current formula file RF is compared with the target formula file TRF in the historical database 125 to determine whether each sub-recipe item SRI can correspond to the corresponding target sub-recipe item TSRI. If there is no match to the corresponding sub-recipe item SRI, In the traceback step, keep the secondary formula item SRI in the current formula file RF and the corresponding formula value SRN. If there is a matching secondary formula item SRI, in the traceback step, the corresponding secondary formula item SRI will be matched and replaced with the target The secondary recipe item TSRI, at the same time, also replaces and restores the secondary recipe value SRV corresponding to the secondary recipe item SRI to the target secondary recipe value TSRV.

請繼續參閱圖6,於步驟S126存取經回溯後之目前配方檔RFB至資料庫121之後,進行步驟S127,判斷是否有另一使用者設備40之連線請求,以圖1為例,資料處理單元11判斷是否有另一使用者設備40(或其他使用者設備)之連線請求,若否,進行步驟S129B,解除鎖定狀態,因此,資料處理單元11傳輸解除鎖定命令C42至使用者設備30,換言之,解除資料庫121與配方描述資料庫123之鎖定狀態,使得資料庫121與配方描述資料庫123可受另一使用者設備40或其他使用者設備控制;反之,若資料處理單元11判斷有另一使用者設備40(或其他使用者設備)之連線請求,進行步驟S128,通知另一使用者設備40,並更新經回溯後之目前配方檔RFB,因此,資料處理單元11傳輸一更新命令C7至另一使用者設備40,以更新經回溯後之目前配方檔RFB可供另一使用者設備40使用。Please continue to refer to FIG. 6, after accessing the current recipe file RFB after the traceback in step S126 to the database 121, proceed to step S127 to determine whether there is another connection request from the user equipment 40. Taking FIG. 1 as an example, the data The processing unit 11 determines whether there is a connection request from another user equipment 40 (or other user equipment), and if not, proceeds to step S129B to release the locked state. Therefore, the data processing unit 11 transmits an unlock command C42 to the user equipment 30. In other words, unlock the database 121 and the recipe description database 123 so that the database 121 and the recipe description database 123 can be controlled by another user equipment 40 or other user equipment; on the contrary, if the data processing unit 11 It is determined that there is a connection request from another user equipment 40 (or other user equipment), and step S128 is performed to notify the other user equipment 40, and update the current recipe file RFB after the traceback. Therefore, the data processing unit 11 transmits An update command C7 is sent to another user equipment 40 to update the current recipe file RFB after being backtracked for use by another user equipment 40.

請復參閱圖3,於步驟S11之後,使用者設備30連線至資料處理單元11,接著,使用者設備30依據使用者需求而傳輸命令C至資料處理單元11。在本實施例中,使用者設備30係傳輸編輯命令C2至資料處理單元11,資料處理單元11接收使用者設備之編輯命令C2(步驟S13),步驟S13可包括以下步驟S131至步驟S139,請參閱圖10,進行步驟S131,判斷是否能執行一編輯模式,即資料處理單元11接收使用者設備30之編輯命令C2後,判斷使用者設備30是否能執行編輯模式,若否,進行步驟S138,拒絕使用者設備30並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30以通知使用者設備30。Please refer to FIG. 3 again. After step S11, the user equipment 30 is connected to the data processing unit 11, and then the user equipment 30 transmits the command C to the data processing unit 11 according to the user's needs. In this embodiment, the user equipment 30 transmits the editing command C2 to the data processing unit 11, and the data processing unit 11 receives the editing command C2 from the user equipment (step S13). Step S13 may include the following steps S131 to S139. Referring to FIG. 10, proceed to step S131 to determine whether an editing mode can be executed, that is, after receiving the editing command C2 of the user equipment 30, the data processing unit 11 determines whether the user equipment 30 can execute the editing mode, if not, proceed to step S138, The user equipment 30 is rejected and the user equipment 30 is notified. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 to notify the user equipment 30.

詳細而言,步驟S131可包括以下步驟S51~步驟S55,請參閱圖11,進行步驟S51,判斷是否能登入。以圖1為例,資料處理單元11係載入關於使用者設備30之使用者的帳號密碼,並檢查使用者的帳號密碼是否正確,接著資料處理單元11檢查是否該使用者的帳號密碼是否有重複登入,亦即同一使用者的帳號密碼由使用者設備30登入以外,檢查是否有其他使用者設備以同一使用者的帳號密碼登入。若檢查後使用者的帳號密碼不正確,或者使用者的帳號密碼有重複登入,則資料處理單元11判斷使用者設備30不能登入,進行步驟S55,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30以通知使用者設備30。In detail, step S131 may include the following steps S51 to S55. Please refer to FIG. 11 and proceed to step S51 to determine whether it is possible to log in. Taking Fig. 1 as an example, the data processing unit 11 loads the user account and password of the user device 30, and checks whether the user’s account password is correct, and then the data processing unit 11 checks whether the user’s account password is correct. Repeat login, that is, in addition to the user device 30 logging in with the account password of the same user, check whether there is another user device logging in with the account password of the same user. If the user’s account password is incorrect after the check, or the user’s account password has repeated logins, the data processing unit 11 determines that the user equipment 30 cannot log in, and proceeds to step S55, rejects the user equipment 30 to log in, and informs the user equipment 30. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 to notify the user equipment 30.

若步驟S51判斷為是,使用者設備30能登入,進行步驟S52,判斷配方描述資料庫123中配方規則描述檔RRDF是否被鎖定。以圖1為例,資料處理單元11判斷配方描述資料庫123中配方規則描述檔RRDF是否被鎖定,所述鎖定係指配方描述資料庫123中配方規則描述檔RRDF是否被另一使用者設備40(包含其他使用者設備)控制使用,若是,進行步驟S55,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30。在一實施例中,資料處理單元11進一步判斷另一使用者設備40鎖定配方規則描述檔RRDF是否逾時,若否,資料處理單元11持續供另一使用者設備40鎖定配方規則描述檔RRDF以進行編輯;反之,若另一使用者設備40鎖定配方規則描述檔RRDF已逾時而超過一特定時間,資料處理單元11傳輸拒絕命令C3並通知使用者設備30與另一使用者設備40已逾時。If the determination in step S51 is yes, the user equipment 30 can log in, and proceed to step S52 to determine whether the formula rule description file RRDF in the formula description database 123 is locked. Taking FIG. 1 as an example, the data processing unit 11 determines whether the recipe rule description file RRDF in the recipe description database 123 is locked. The lock refers to whether the recipe rule description file RRDF in the recipe description database 123 is locked by another user device 40. (Including other user equipment) control the use. If yes, proceed to step S55, deny the user equipment 30 to log in, and notify the user equipment 30. Therefore, the data processing unit 11 transmits the refusal command C3 to the user equipment 30 and notifies the user equipment 30. In one embodiment, the data processing unit 11 further determines whether another user equipment 40 locks the recipe rule description file RRDF timeout. If not, the data processing unit 11 continues to allow another user equipment 40 to lock the recipe rule description file RRDF for Edit; On the contrary, if another user equipment 40 locks the recipe rule description file RRDF has expired and exceeded a specific time, the data processing unit 11 transmits the rejection command C3 and informs the user equipment 30 and the other user equipment 40 that the time has expired Time.

於步驟S52中,若資料處理單元11判斷配方描述資料庫123中配方規則描述檔RRDF並未被鎖定,接著進行步驟S53,資料處理單元11自配方描述資料庫123中取得配方規則描述檔RRDF。接著,進行步驟S54,檢視配方規則描述檔RRDF是否能被執行,若否,進行步驟S55,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30。In step S52, if the data processing unit 11 determines that the recipe rule description file RRDF in the recipe description database 123 is not locked, then it proceeds to step S53, the data processing unit 11 obtains the recipe rule description file RRDF from the recipe description database 123. Next, proceed to step S54 to check whether the recipe rule description file RRDF can be executed. If not, proceed to step S55 to deny the user equipment 30 to log in, and notify the user equipment 30. Therefore, the data processing unit 11 transmits the refusal command C3 to the use The user device 30 and the user device 30 are notified.

詳細而言,步驟S54可包括步驟S542至步驟S546,請參閱圖12,進行步驟S542,判斷使用者設備30是否有權限能編輯配方規則描述檔RRDF。以圖1為例,資料處理單元11依據編輯權限條件來判斷使用者設備30是否有權限能編輯配方規則描述檔RRDF,其中編輯權限條件係指使用者設備30可否針對次配方項目SRI進行讀取(Read)、寫入(Write)、僅可讀取(Read Only)或是否可見(Visible or Invisible)之修改權限,若判斷為否,進行步驟S546,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30不能編輯配方規則描述檔RRDF;反之,若判斷為是,使用者設備30有權限能編輯配方規則描述檔RRDF,並進行步驟S544,檢視是否能供使用者設備30編輯配方規則描述檔RRDF。以圖1為例,資料處理單元11依據控制條件與通訊條件來判斷是否能供使用者設備30編輯配方規則描述檔RRDF,其中控制條件例如係製程配方監控系統10運作時可允許編輯;通訊條件係允許特定條件而可連線,若判斷為否,進行步驟S546,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30不可編輯配方規則描述檔RRDF;反之,若判斷為是,目前可供使用者設備30編輯配方規則描述檔RRDF。In detail, step S54 may include step S542 to step S546. Please refer to FIG. 12 and proceed to step S542 to determine whether the user equipment 30 has the authority to edit the recipe rule description file RRDF. Taking Fig. 1 as an example, the data processing unit 11 judges whether the user equipment 30 has the authority to edit the formula rule description file RRDF according to the editing authority conditions, where the editing authority condition refers to whether the user equipment 30 can read the sub-recipe item SRI (Read), write (Write), read only (Read Only) or visible (Visible or Invisible) modification permission, if judged as no, proceed to step S546, deny the user device 30 to log in, and notify the user Device 30, therefore, the data processing unit 11 transmits the rejection command C3 to the user device 30 and informs the user device 30 that the device 30 cannot edit the formula rule description file RRDF; on the contrary, if the judgment is yes, the user device 30 has the authority to edit the formula rule description File RRDF, and proceed to step S544 to check whether the user equipment 30 can edit the formula rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 determines whether the user equipment 30 can edit the formula rule description file RRDF according to the control conditions and communication conditions. The control conditions are, for example, that editing is allowed when the process recipe monitoring system 10 is operating; communication conditions The connection is allowed under certain conditions. If the judgment is no, proceed to step S546, deny the user equipment 30 to log in, and notify the user equipment 30. Therefore, the data processing unit 11 transmits the refusal command C3 to the user equipment 30 and informs the user equipment 30. The user device 30 cannot edit the recipe rule description file RRDF; on the contrary, if the judgment is yes, the user device 30 is currently available for editing the recipe rule description file RRDF.

請復參閱圖10,於步驟S131判斷使用者設備30能執行編輯模式之後,進行步驟S132,判斷是否能供使用者設備30控制資料庫121與配方描述資料庫123。以圖1為例,資料處理單元11判斷資料庫121與配方描述資料庫123是否被另一使用者設備40控制中,亦即資料處理單元11檢查資料庫121是否被鎖定或指定編輯之目前配方檔RF被使用中,或者,資料處理單元11檢查配方描述資料庫123是否被鎖定或配方規則描述檔RRDF是否正在編輯,若判斷能供使用者設備30控制資料庫121與配方描述資料庫123,資料處理單元11對配方資料單元12進入鎖定狀態,資料庫121與配方描述資料庫123被鎖定,以限制僅供使用者設備30控制資料庫121與配方描述資料庫123;反之,若資料處理單元11判斷使用者設備30不能供使用者設備30控制資料庫121與配方描述資料庫123,進行步驟S139,通知使用者設備30,以及復原編輯前之目前配方檔RF至使用者設備30。因此,資料處理單元11傳輸一拒絕編輯命令C6至使用者設備30並通知使用者設備30拒絕執行編輯命令C2,且使用者設備30若在編輯目前配方檔RF之狀況下,資料處理單元11復原編輯前之目前配方檔RF至使用者設備30。Please refer to FIG. 10 again. After it is determined in step S131 that the user equipment 30 can execute the editing mode, step S132 is performed to determine whether the user equipment 30 can control the database 121 and the recipe description database 123. Taking FIG. 1 as an example, the data processing unit 11 determines whether the database 121 and the recipe description database 123 are controlled by another user equipment 40, that is, the data processing unit 11 checks whether the database 121 is locked or the current recipe designated for editing The file RF is being used, or the data processing unit 11 checks whether the recipe description database 123 is locked or the recipe rule description file RRDF is being edited. If it is determined that the user equipment 30 can control the database 121 and the recipe description database 123, The data processing unit 11 enters the locked state on the recipe data unit 12, and the database 121 and the recipe description database 123 are locked to restrict the user equipment 30 to control the database 121 and the recipe description database 123; on the contrary, if the data processing unit 11 It is determined that the user equipment 30 cannot provide the user equipment 30 to control the database 121 and the recipe description database 123, and proceed to step S139 to notify the user equipment 30, and restore the current recipe file RF before editing to the user equipment 30. Therefore, the data processing unit 11 transmits an editing rejection command C6 to the user equipment 30 and notifies the user equipment 30 to refuse to execute the editing command C2, and if the user equipment 30 is editing the current recipe file RF, the data processing unit 11 recovers The current formula file RF before editing is sent to the user device 30.

若資料處理單元11判斷資料庫121與配方描述資料庫123並未被另一使用者設備40(包含其他使用者設備)控制中,進行步驟S133,進入鎖定狀態,以限制僅供使用者設備30控制資料庫121與配方描述資料庫123。以圖1為例,資料處理單元11傳輸鎖定命令C41至使用者設備30,因此,此時另一使用者設備40或其他使用者設備即便連線至資料處理單元11,由於資料庫121與配方描述資料庫123已被使用者設備30控制而進入鎖定狀態,此時資料處理單元11傳輸拒絕命令C3並通知另一使用者設備40或其他使用者設備已有使用者設備30鎖定資料庫121與配方描述資料庫123,使得另一使用者設備40仍無法控制資料庫121與配方描述資料庫123。接著,進行步驟S134,提供目前配方檔RF以供使用者設備30編輯,編輯目前配方檔RF後進行步驟S135,存取經編輯後之目前配方檔RF至資料庫121。If the data processing unit 11 determines that the database 121 and the recipe description database 123 are not controlled by another user equipment 40 (including other user equipment), step S133 is performed to enter the locked state to restrict only the user equipment 30 Control database 121 and recipe description database 123. Taking FIG. 1 as an example, the data processing unit 11 transmits the lock command C41 to the user equipment 30. Therefore, even if another user equipment 40 or other user equipment is connected to the data processing unit 11 at this time, because the database 121 and the recipe Describe that the database 123 has been controlled by the user equipment 30 and enters the locked state. At this time, the data processing unit 11 transmits a rejection command C3 and informs another user equipment 40 or other user equipment that the user equipment 30 has locked the database 121 and The recipe description database 123 makes it impossible for another user device 40 to control the database 121 and the recipe description database 123. Then, step S134 is performed to provide the current formula file RF for editing by the user equipment 30, and after editing the current formula file RF, proceed to step S135 to access the edited current formula file RF to the database 121.

詳細而言,步驟S134至步驟S135之間可包括步驟S61至步驟S68,請參閱圖13,進行步驟S61,寫入一編輯資料,編輯資料係可為一可擴展標記語言(Extensible markup language,XML)之設定檔。以圖1為例,使用者設備30寫入編輯資料並傳輸至資料處理單元11,資料處理單元11讀取使用者設備30寫入之編輯資料。在一實施例中,資料處理單元11進一步判斷使用者設備30鎖定資料庫121與配方描述資料庫123是否逾時,若否,資料處理單元11持續供使用者設備30鎖定資料庫121與配方描述資料庫123以進行編輯;反之,若使用者設備30鎖定資料庫121與配方描述資料庫123已逾時而超過一特定時間,資料處理單元11傳輸拒絕命令C3並通知使用者設備30與另一使用者設備40已逾時,並且解除鎖定狀態,因此,資料處理單元11傳輸解除鎖定命令C42至使用者設備30,換言之,解除資料庫121與配方描述資料庫123之鎖定狀態,使得資料庫121與配方描述資料庫123可受另一使用者設備40或其他使用者設備控制。In detail, between step S134 to step S135 can include step S61 to step S68, please refer to FIG. 13, go to step S61, write an editing data, the editing data can be an Extensible Markup Language (XML) ) Configuration file. Taking FIG. 1 as an example, the user equipment 30 writes editing data and transmits it to the data processing unit 11, and the data processing unit 11 reads the editing data written by the user equipment 30. In one embodiment, the data processing unit 11 further determines whether the lock database 121 and the recipe description database 123 of the user equipment 30 are timed out. If not, the data processing unit 11 continues to allow the user equipment 30 to lock the database 121 and the recipe description. Database 123 for editing; on the other hand, if the user equipment 30 locks the database 121 and the recipe description database 123 and has timed out for a specific time, the data processing unit 11 transmits a rejection command C3 and informs the user equipment 30 and another The user equipment 40 has timed out and the locked state is unlocked. Therefore, the data processing unit 11 transmits the unlock command C42 to the user device 30. In other words, the locked state of the database 121 and the recipe description database 123 is unlocked, so that the database 121 The recipe description database 123 can be controlled by another user equipment 40 or other user equipment.

於步驟S61寫入編輯資料之後,接著,進行步驟S62,判斷編輯資料是否符合配方規則描述檔RRDF。以圖1為例,資料處理單元11係先判斷編輯資料之描述格式與設定條件(如上限值、下限值、預設值、編輯權限條件、控制條件、通訊條件與複合條件)是否正確與是否能被執行,若否,進行步驟S67,拒絕使用者設備30,並通知使用者設備30,因此,資料處理單元11傳輸一通知命令C8至使用者設備30顯示異常;反之,若編輯資料之描述格式與設定條件是正確與能被執行,進行步驟S63,比對編輯資料與目前配方檔RF是否一致。若資料處理單元11判斷編輯資料與目前配方檔RF是一致,進行步驟S68,資料處理單元11記錄目前配方檔RF中主版本版次資料VM與各次配方版本資料SRV至資料庫121,換言之,雖然該使用者設備30的編輯資料係與目前配方檔RF一致,但經由使用者設備30編輯,資料處理單元11仍會更新編輯後之目前配方檔RF中主版本版次資料VM與各次配方版本資料SRV。舉例而言,編輯前之目前配方檔RF中的主版本版次資料VM為10,次配方資料SR中的次配方版本資料SRV為6,編輯後之目前配方檔RF的主版本版次資料VM為11,次配方版本資料SRVB為7,在此紀錄版本係以遞增為例,在另一實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。After the editing data is written in step S61, then step S62 is performed to determine whether the editing data conforms to the formula rule description file RRDF. Taking Figure 1 as an example, the data processing unit 11 first determines whether the description format and setting conditions (such as upper limit value, lower limit value, preset value, editing authority condition, control condition, communication condition and compound condition) of the edited data are correct and correct. Whether it can be executed, if not, proceed to step S67, reject the user equipment 30, and notify the user equipment 30. Therefore, the data processing unit 11 transmits a notification command C8 to the user equipment 30 that the display is abnormal; otherwise, if the data is edited If the description format and the setting conditions are correct and can be executed, step S63 is performed to check whether the edited data is consistent with the current recipe file RF. If the data processing unit 11 determines that the edited data is consistent with the current recipe file RF, step S68 is performed, and the data processing unit 11 records the major version version data VM and each sub-recipe version data SRV in the current recipe file RF to the database 121. In other words, Although the edited data of the user equipment 30 is consistent with the current formula file RF, the data processing unit 11 will still update the edited current formula file RF after editing the main version data VM and each recipe file. Version information SRV. For example, the major version version data VM in the current recipe file RF before editing is 10, the minor recipe version data SRV in the minor recipe data SR is 6, and the major version version data VM in the current recipe file RF after editing It is 11, and the secondary recipe version data SRVB is 7. In this example, the record version is incremented. In another embodiment, the record version can be set in other encoding methods or according to requirements.

若步驟S63中,資料處理單元11判斷編輯資料與目前配方檔RF是不一致,進行步驟S64,存取編輯前之目前配方檔RF至歷史資料庫125。因此,若編輯前之目前配方檔RF中的主版本版次資料VMB為10,次配方資料SR中的次配方版本資料SRV為7,資料處理單元11係將上述編輯前之目前配方檔RF存取至配方資料單元12之歷史資料庫125。If in step S63, the data processing unit 11 determines that the edited data is inconsistent with the current recipe file RF, step S64 is performed to access the current recipe file RF before editing to the historical database 125. Therefore, if the major version version data VMB in the current recipe file RF before editing is 10, and the minor recipe version data SRV in the secondary recipe data SR is 7, the data processing unit 11 stores the current recipe file RF before editing. Get to the historical database 125 of the recipe data unit 12.

接著,進行步驟S65,更新有不一致之目前配方檔RF中各次配方項目SRI。以圖1為例,資料處理單元11係將比對後有不一致之各次配方項目SRI對應更新至資料庫121。接著,進行步驟S66,記錄經編輯後之主版本版次資料VM與各次配方項目SRI相對應之各次配方版本資料SRV,因此,資料處理單元11存取經編輯後之目前配方檔RF至資料庫121,並記錄主版本版次資料VM與各次配方項目SRI相對應之各次配方版本資料SRV。舉例而言,編輯前之目前配方檔RF中的主版本版次資料VM為10,各次配方項目SRI相對應之各次配方版本資料SRV為6,編輯後之目前配方檔RF的主版本版次資料VM為11,次配方版本資料SRVB為7,在此紀錄版本係以遞增為例,在另一實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。Then, step S65 is performed to update the SRI of each recipe item in the current recipe file RF that is inconsistent. Taking FIG. 1 as an example, the data processing unit 11 correspondingly updates the SRI of each recipe item that is inconsistent after the comparison to the database 121. Then, proceed to step S66 to record the edited main version version data VM and each sub-recipe version data SRV corresponding to each sub-recipe item SRI. Therefore, the data processing unit 11 accesses the edited current recipe file RF to The database 121 records the major version version data VM and each sub-recipe version data SRV corresponding to each sub-recipe item SRI. For example, the main version version data VM in the current formula file RF before editing is 10, the sub-recipe version data SRV corresponding to each sub-recipe item SRI is 6, and the main version version of the current formula file RF after editing The secondary data VM is 11, and the secondary recipe version data SRVB is 7. Here, the record version is incremented as an example. In another embodiment, the record version can be set in other encoding methods or according to requirements.

接著,請復參閱圖10,進行步驟S136,解除鎖定狀態。因此,資料處理單元11傳輸解除鎖定命令C42至使用者設備30,換言之,資料處理單元11解除對配方資料單元12之鎖定狀態,來解除限制僅供使用者設備30控制資料庫121與配方描述資料庫123,使得資料庫121與配方描述資料庫123可受另一使用者設備40或其他使用者設備控制。接著,進行步驟S137,通知並更新經編輯後之目前配方檔RF。因此,資料處理單元11傳出通知命令C8至使用者設備30與另一使用者設備40,且資料處理單元11傳輸一更新命令C7至使用者設備30與另一使用者設備40,以更新經編輯後之目前配方檔RF可供另一使用者設備40使用。Next, referring to FIG. 10 again, proceed to step S136 to release the locked state. Therefore, the data processing unit 11 transmits the unlock command C42 to the user device 30. In other words, the data processing unit 11 unlocks the recipe data unit 12 to release the restriction. Only the user device 30 can control the database 121 and the recipe description data. The database 123 allows the database 121 and the recipe description database 123 to be controlled by another user device 40 or other user devices. Next, proceed to step S137 to notify and update the edited current recipe file RF. Therefore, the data processing unit 11 transmits a notification command C8 to the user equipment 30 and the other user equipment 40, and the data processing unit 11 transmits an update command C7 to the user equipment 30 and the other user equipment 40 to update the user equipment 30 and the other user equipment 40. The edited current recipe file RF can be used by another user equipment 40.

綜上所述,在本發明的製程配方監控方法與製程配方監控系統中,可將目前配方檔回溯到先前某一個特定版本之配方檔,以復原目前配方檔中特定或全部之次配方項目與相對應之次配方數值,藉此提升製程配方使用上的彈性。In summary, in the process recipe monitoring method and process recipe monitoring system of the present invention, the current recipe file can be traced back to the previous recipe file of a specific version to restore specific or all sub-recipe items in the current recipe file. Corresponding to the secondary formula value, thereby enhancing the flexibility of the process formula.

再者,由於可針對特定或全部之次配方項目與相對應之次配方數值進行復原,故本發明可針對主版本模式或特定次配方模式進行回溯,換言之,本發明不僅可針對先前特定某一版本之主版本版次資料進行復原以外,更可針對某一個特定次配方項目及其相對應之次次配方數值進行復原,藉此可供使用者回溯至所需求之目前配方檔。Furthermore, since it is possible to restore specific or all sub-recipe items and corresponding sub-recipe values, the present invention can be traced back to the major version mode or the specific sub-recipe mode. In other words, the present invention can not only target a specific previous In addition to recovering the version data of the major version of the version, it can also recover a specific sub-recipe item and its corresponding sub-recipe value, so that users can go back to the current recipe file they need.

另外,針對上述經回溯後或經編輯後的目標配方檔,本發明會記錄新的主版本版次資料與各次配方版本資料,而非將主版本版次資料與各次配方版本資料全數復原至先前某一個特定版本之配方檔。In addition, for the above-mentioned target formula file that has been backtracked or edited, the present invention records the new major version version data and each sub-recipe version data, instead of restoring the major version version data and each sub-recipe version data. To the previous formula file of a specific version.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be subject to those defined by the attached patent scope.

10:製程配方監控系統 11:資料處理單元 12:配方資料單元 121:資料庫 123:配方描述資料庫 125:歷史資料庫 127:回溯模組 13:製程單元 30:使用者設備 40:另一使用者設備 C:命令 RF、RFB:目前配方檔 RRDF:配方規則描述檔 S10:製程配方監控方法 S11~S12:步驟 S112~S116:步驟 S121~S129B:步驟 S131~S139:步驟 S22~S26:步驟 S32~S36:步驟 S341~S345:步驟 S42~S46:步驟 S51~S55:步驟 S542~S546:步驟 S61~S68:步驟 SR:次配方資料 SRI:次配方項目 SRN:次配方數值 SRV:次配方版本資料 TRF:目標配方檔 TSR:目標次配方資料 TSRI:目標次配方項目 TSRN:目標次配方數值 TSRV:目標次配方版本資料 TVM:目標主版本資料 VM、VMB:主版本版次資料 10: Process recipe monitoring system 11: Data processing unit 12: Recipe data unit 121: database 123: Recipe description database 125: Historical Database 127: Retrospective Module 13: Process unit 30: user equipment 40: Another user's device C: Command RF, RFB: current formula file RRDF: formula rule description file S10: Process recipe monitoring method S11~S12: steps S112~S116: steps S121~S129B: steps S131~S139: steps S22~S26: steps S32~S36: steps S341~S345: steps S42~S46: steps S51~S55: steps S542~S546: steps S61~S68: steps SR: Sub-formulation data SRI: Sub-formulation project SRN: Secondary formula value SRV: Sub-formulation version data TRF: target formula file TSR: target sub-formulation data TSRI: Target Sub-Formulation Project TSRN: Target secondary formula value TSRV: target sub-formulation version data TVM: target major version data VM, VMB: Major version version data

圖1為本發明之製程配方監控系統的示意圖。 圖2A為本發明之目前配方檔的示意圖。 圖2B為本發明之配方規則描述檔的示意圖。 圖2C為本發明之目標配方檔的示意圖。 圖2D為本發明之經回溯後之目前配方檔一實施例的示意圖。 圖3為本發明的製程配方監控方法的流程圖。 圖4為圖3中接收使用者設備的連線請求的流程圖。 圖5為圖4中啟動資料處理單元的流程圖。 圖6為圖3中接收使用者設備之回溯命令的流程圖。 圖7為圖6中判斷使用者設備是否能執行回溯模式的流程圖。 圖8為圖7中判斷使用者設備是否具有權限的流程圖。 圖9為圖8中檢視配方規則描述檔是否能被執行的流程圖。 圖10為圖3中接收使用者設備之編輯命令的流程圖。 圖11為圖10中判斷使用者設備是否能執行編輯模式的流程圖。 圖12為圖11中檢視配方規則描述檔是否能被執行的流程圖。 圖13為圖10中提供目前配方檔以供使用者設備編輯的流程圖。Figure 1 is a schematic diagram of the process recipe monitoring system of the present invention. Figure 2A is a schematic diagram of the current recipe file of the present invention. Figure 2B is a schematic diagram of the formula rule description file of the present invention. Figure 2C is a schematic diagram of the target recipe file of the present invention. 2D is a schematic diagram of an embodiment of the current recipe file after retrospective of the present invention. Figure 3 is a flow chart of the process recipe monitoring method of the present invention. FIG. 4 is a flowchart of receiving a connection request from the user equipment in FIG. 3. Fig. 5 is a flowchart of starting the data processing unit in Fig. 4; FIG. 6 is a flowchart of receiving a traceback command from the user equipment in FIG. 3. FIG. FIG. 7 is a flowchart of judging whether the user equipment can execute the backtracking mode in FIG. 6. FIG. 8 is a flowchart of judging whether the user equipment has authority in FIG. 7. Fig. 9 is a flowchart of checking whether the recipe rule description file can be executed in Fig. 8. FIG. 10 is a flowchart of receiving an edit command from the user equipment in FIG. 3. FIG. FIG. 11 is a flowchart of judging whether the user equipment can execute the edit mode in FIG. 10. Fig. 12 is a flowchart of checking whether the recipe rule description file can be executed in Fig. 11. FIG. 13 is a flowchart of the current recipe file provided in FIG. 10 for editing by the user equipment.

S12:接收使用者設備之回溯命令 S12: Receive the traceback command from the user equipment

S121~S129B:步驟 S121~S129B: steps

Claims (30)

一種製程配方監控方法,包括以下步驟:接收一使用者設備的連線請求;以及接收該使用者設備之一回溯命令,包括以下步驟:判斷是否能執行一回溯模式;進入一鎖定狀態,以限制僅供該使用者設備控制一資料庫與一配方描述資料庫,其中該資料庫中之一目前配方檔包含一主版本版次資料與複數個次配方資料,各該次配方資料包含一次配方項目、一次配方版本資料與一次配方數值,該配方描述資料庫包含一配方規則描述檔,依據該配方規則描述檔執行該目前配方檔;依據一目標主版本資料之複數個目標次配方項目與複數個目標次配方數值,復原該目前配方檔中相對應之該次配方項目與該次配方數值;記錄經回溯後之該目前配方檔中該主版本版次資料與各該次配方版本資料;及存取經回溯後之該目前配方檔;其中接收該使用者設備的該連線請求的步驟,包括以下步驟:啟動一資料處理單元;藉由該資料處理單元以取得該資料庫中該目前配方檔與該配方描述資料庫中該配方規則描述檔;以及該使用者設備係連線至該資料處理單元。 A method for monitoring process recipes includes the following steps: receiving a connection request from a user equipment; and receiving a traceback command of the user equipment, including the following steps: judging whether a traceback mode can be executed; entering a locked state to restrict Only the user equipment controls a database and a recipe description database. One of the current recipe files in the database contains a major version version data and a plurality of sub-recipe data, each of the sub-recipe data includes a recipe item , One-time formula version data and one-time formula values. The formula description database contains a formula rule description file. The current formula file is executed according to the formula rule description file; a plurality of target sub-recipe items and a plurality of target sub-recipe items in a target major version data are executed according to the formula rule description file The target sub-recipe value, restore the corresponding sub-recipe item and the sub-recipe value in the current recipe file; record the major version version data and each sub-recipe version data in the current recipe file after backtracking; and save Get the current recipe file after the backtracking; wherein the step of receiving the connection request from the user equipment includes the following steps: activating a data processing unit; obtaining the current recipe file in the database by the data processing unit And the formula rule description file in the formula description database; and the user equipment is connected to the data processing unit. 如申請專利範圍第1項所述之製程配方監控方法,其中復原該目前配方檔中相對應之該次配方項目與該次配方數值的步驟,包括以下步驟: 將各該次配方項目與相對應之該次配方數值復原至該目標主版本資料中相對應之該目標次配方項目與該目標次配方數值。 For example, in the process recipe monitoring method described in item 1 of the scope of patent application, the step of restoring the corresponding sub-recipe item and the value of the sub-recipe in the current recipe file includes the following steps: Restore each of the secondary formula items and the corresponding secondary formula values to the corresponding target secondary formula items and the target secondary formula values in the target major version data. 如申請專利範圍第1項所述之製程配方監控方法,其中當該回溯模式為一回復特定次配方模式,記錄經回溯後之該目前配方檔中該主版本版次資料與各該次配方版本資料的步驟,包括以下步驟:遞增各該次配方版本資料;以及保留未經回溯之各該次配方版本資料。 For example, the process recipe monitoring method described in item 1 of the scope of patent application, wherein when the retrospective mode is a specific sub-recipe mode, the data of the major version and each sub-recipe version in the current recipe file after the retrospective are recorded The data steps include the following steps: increment the version data of each recipe; and retain the version data of each recipe that has not been backtracked. 如申請專利範圍第1項所述之製程配方監控方法,其中判斷是否能執行該回溯模式的步驟,包括以下步驟:判斷該資料庫與該配方描述資料庫是否為該鎖定狀態;以及判斷是否具有權限。 For example, in the process recipe monitoring method described in item 1 of the scope of patent application, the step of determining whether the retrospective mode can be executed includes the following steps: determining whether the database and the recipe description database are in the locked state; and determining whether they have Permissions. 如申請專利範圍第4項所述之製程配方監控方法,其中判斷是否具有權限的步驟,若否,包括以下步驟:拒絕該使用者設備登入,並通知該使用者設備。 For example, in the process recipe monitoring method described in item 4 of the scope of patent application, the step of judging whether it is authorized, if not, includes the following steps: denying the user equipment to log in and notifying the user equipment. 如申請專利範圍第4項所述之製程配方監控方法,其中判斷是否具有權限的步驟,包括以下步驟:判斷是否能登入;取得該配方規則描述檔;以及檢視該配方規則描述檔是否能被執行。 For example, the process recipe monitoring method described in item 4 of the scope of patent application, wherein the step of judging whether it has authority includes the following steps: judging whether it is possible to log in; obtaining the formula rule description file; and checking whether the formula rule description file can be executed . 如申請專利範圍第6項所述之製程配方監控方法,其中檢視該配方規則描述檔是否能被執行的步驟,包括以下步驟:判斷該使用者設備是否有權限能編輯該配方規則描述檔;以及檢視是否能供該使用者設備編輯該配方規則描述檔。 For example, the process recipe monitoring method described in item 6 of the scope of patent application, wherein the step of checking whether the recipe rule description file can be executed includes the following steps: judging whether the user device has the authority to edit the recipe rule description file; and Check whether the user device can edit the formula rule description file. 如申請專利範圍第1項所述之製程配方監控方法,其中判斷是否能執行該回溯模式的步驟,若否,包括以下步驟:拒絕該使用者設備,並通知該使用者設備。 For example, in the process recipe monitoring method described in the first item of the patent application, the step of judging whether the retrospective mode can be executed, if not, includes the following steps: rejecting the user equipment and notifying the user equipment. 如申請專利範圍第1項所述之製程配方監控方法,其中存取經回溯後之該目前配方檔至該資料庫的步驟之後,包括以下步驟:判斷是否有一另一使用者設備之連線請求;若否,解除該鎖定狀態;以及若有,通知該另一使用者設備,並更新經回溯後之該目前配方檔。 For example, the process recipe monitoring method described in item 1 of the scope of patent application, after the step of accessing the current recipe file after the retrospective to the database, includes the following steps: determining whether there is a connection request from another user device ; If not, release the locked state; and if yes, notify the other user device, and update the current recipe file after retrospective. 如申請專利範圍第1項所述之製程配方監控方法,其中存取經回溯後之該目前配方檔至該資料庫的步驟之前,包括以下步驟:存取回溯前之該目前配方檔。 In the process recipe monitoring method described in the first item of the scope of patent application, before the step of accessing the current recipe file after the backtracking to the database, it includes the following steps: accessing the current recipe file before the backtracking. 如申請專利範圍第1項所述之製程配方監控方法,其中啟動該資料處理單元的步驟,包括以下步驟:讀取一原始描述檔;依據該原始描述檔,比對該配方描述資料庫中該配方規則描述檔是否匹配;以及若未匹配,更新該配方規則描述檔至該配方描述資料庫。 For the process recipe monitoring method described in item 1 of the scope of patent application, the step of activating the data processing unit includes the following steps: reading an original description file; comparing the recipe description database with the original description file according to the original description file Whether the formula rule description file matches; and if it does not match, update the formula rule description file to the formula description database. 如申請專利範圍第1項所述之製程配方監控方法,更包括:接收該使用者設備之一編輯命令時,包括以下步驟:判斷是否能執行一編輯模式;判斷是否能供該使用者設備控制該資料庫與該配方描述資料庫;進入該鎖定狀態,以限制僅供該使用者設備控制該資料庫與該配方描述資料庫; 提供該目前配方檔以供該使用者設備編輯;存取經編輯後之該目前配方檔;解除該鎖定狀態;以及通知並更新經編輯後之該目前配方檔。 For example, the process recipe monitoring method described in item 1 of the scope of patent application further includes: when receiving an editing command from one of the user equipment, it includes the following steps: judging whether an editing mode can be executed; judging whether it can be controlled by the user equipment The database and the recipe description database; enter the locked state to restrict only the user equipment to control the database and the recipe description database; Provide the current formula file for editing by the user equipment; access the edited current formula file; release the locked state; and notify and update the edited current formula file. 如申請專利範圍第12項所述之製程配方監控方法,其中提供該目前配方檔以供該使用者設備編輯的步驟,包括以下步驟:寫入一編輯資料;判斷該編輯資料是否符合該配方規則描述檔;比對該編輯資料與該目前配方檔是否一致;若不一致,存取編輯前之該目前配方檔;更新有不一致之該目前配方檔中各該次配方項目;以及記錄經編輯後之該主版本版次資料與各該次配方項目相對應之各該次配方版本資料。 For example, the process recipe monitoring method described in item 12 of the scope of patent application, wherein the step of providing the current recipe file for editing by the user equipment includes the following steps: writing an editing data; judging whether the editing data conforms to the recipe rule Description file; compare whether the edited data is consistent with the current formula file; if inconsistent, access the current formula file before editing; update each of the formula items in the current formula file that are inconsistent; and the record after editing The version data of the major version and the version data of the minor formula corresponding to each of the minor formula items. 如申請專利範圍第13項所述之製程配方監控方法,其中比對該編輯資料與該目前配方檔是否一致的步驟,若一致,包括以下步驟:記錄該目前配方檔中該主版本版次資料與各該次配方版本資料。 For example, the process recipe monitoring method described in item 13 of the scope of patent application, wherein the step of comparing whether the edited data is consistent with the current recipe file, if they are consistent, includes the following steps: recording the master version version data in the current recipe file And the version information of each recipe. 一種製程配方監控系統,包括:一資料處理單元,係接收一使用者設備的連線請求,其中該資料處理單元接收該使用者設備的該連線請求,包括:該資料處理單元取得該資料庫中該目前配方檔與該配方描述資料庫中該配方規則描述檔,該使用者設備係連線至該資料處理單元;以及一配方資料單元,連接於該資料處理單元,該配方資料單元包含一資料庫、一配方描述資料庫與一回溯模組,該資料庫存儲包含一目前配方檔,該目前配方檔包含一主版本版次資料與複數個次配方資料,各該次配 方資料包含一次配方項目、一次配方版本資料與一次配方數值,該配方描述資料庫存儲包含一配方規則描述檔,依據該配方規則描述檔執行該目前配方檔,其中:該資料處理單元接收一回溯命令時,該資料處理單元判斷是否能執行一回溯模式,若是,該資料處理單元對該配方資料單元進入一鎖定狀態,以限制該使用者設備控制該資料庫與該配方描述資料庫;依據一目標主版本資料之複數個目標次配方項目與複數個目標次配方數值,該回溯模組復原該目前配方檔中相對應之該次配方項目與該次配方數值,且該資料處理單元記錄經回溯後之該目前配方檔中該主版本版次資料與各該次配方版本資料,並存取經回溯後之該目前配方檔至該資料庫。 A process recipe monitoring system includes: a data processing unit that receives a connection request from a user equipment, wherein the data processing unit receiving the connection request from the user equipment includes: the data processing unit obtains the database In the current recipe file and the recipe rule description file in the recipe description database, the user equipment is connected to the data processing unit; and a recipe data unit is connected to the data processing unit, and the recipe data unit includes a Database, a recipe description database and a retrospective module. The database storage contains a current recipe file. The current recipe file contains a major version version data and a plurality of sub-recipe data. The recipe data includes a recipe item, a recipe version data, and a recipe value. The recipe description database stores a recipe rule description file, and executes the current recipe file according to the formula rule description file, where: the data processing unit receives a traceback When ordering, the data processing unit determines whether a retrospective mode can be executed, and if so, the data processing unit enters a locked state for the recipe data unit to restrict the user equipment from controlling the database and the recipe description database; according to one Multiple target sub-recipe items and multiple target sub-recipe values of the target major version data, the retrospective module restores the corresponding sub-recipe item and the sub-recipe value in the current recipe file, and the data processing unit record is backtracked The version data of the major version and the version data of each of the sub-recipes in the current formula file are then accessed, and the current formula file after being backtracked is accessed to the database. 如申請專利範圍第15項所述之製程配方監控系統,其中該回溯模組將各該次配方項目與相對應之該次配方數值復原至該目標主版本資料中相對應之該目標次配方項目與該目標次配方數值。 For example, the process recipe monitoring system described in item 15 of the scope of patent application, wherein the retrospective module restores each sub-recipe item and the corresponding value of the sub-recipe to the corresponding target sub-recipe item in the target main version data And the target formula value. 如申請專利範圍第15項所述之製程配方監控系統,其中當該回溯模式為一回復特定次配方模式,該資料處理單元保留未經回溯之各該次配方版本資料。 For example, in the process recipe monitoring system described in item 15 of the scope of patent application, when the retrospective mode is a mode for reverting to a specific sub-recipe, the data processing unit retains the version data of each sub-recipe that has not been retrospected. 如申請專利範圍第15項所述之製程配方監控系統,其中該資料處理單元判斷是否能執行該回溯模式,包括:該資料處理單元判斷該資料庫與該配方描述資料庫是否為該鎖定狀態;以及該資料處理單元判斷是否具有權限。 For example, the process recipe monitoring system described in item 15 of the scope of patent application, wherein the data processing unit determines whether the retrospective mode can be executed, including: the data processing unit determines whether the database and the recipe description database are in the locked state; And the data processing unit judges whether it has authority. 如申請專利範圍第18項所述之製程配方監控系統,其中該資料處理單元判斷是否具有權限,包括: 該資料處理單元判斷該使用者設備是否能登入,若是,該資料處理單元判斷該配方描述資料庫中該配方規則描述檔是否被鎖定,若否,該資料處理單元由該配方描述資料庫取得該配方規則描述檔,且該資料處理單元檢視該配方規則描述檔是否能被執行。 For example, the process recipe monitoring system described in item 18 of the scope of patent application, wherein the data processing unit determines whether it has authority, including: The data processing unit determines whether the user equipment can log in. If so, the data processing unit determines whether the formula rule description file in the formula description database is locked; if not, the data processing unit obtains the formula from the formula description database. Formula rule description file, and the data processing unit checks whether the formula rule description file can be executed. 如申請專利範圍第19項所述之製程配方監控系統,其中該資料處理單元檢視該配方規則描述檔是否能被執行,包括:該資料處理單元判斷該使用者設備是否有權限能編輯該配方規則描述檔,且該資料處理單元檢視是否能供該使用者設備編輯該配方規則描述檔。 For example, the process recipe monitoring system described in item 19 of the scope of patent application, wherein the data processing unit checks whether the recipe rule description file can be executed, including: the data processing unit determines whether the user equipment has the authority to edit the recipe rule Description file, and the data processing unit checks whether the user equipment can edit the formula rule description file. 如申請專利範圍第19項所述之製程配方監控系統,其中該資料處理單元判斷該使用者設備不具有權限,該資料處理單元傳輸一拒絕命令至該使用者設備。 For example, in the process recipe monitoring system described in item 19 of the scope of patent application, the data processing unit determines that the user equipment does not have authority, and the data processing unit transmits a rejection command to the user equipment. 如申請專利範圍第15項所述之製程配方監控系統,其中該資料處理單元判斷該使用者設備不能執行該回溯模式,該資料處理單元傳輸一拒絕回溯命令至該使用者設備。 For example, in the process recipe monitoring system described in item 15 of the patent application, the data processing unit determines that the user equipment cannot execute the traceback mode, and the data processing unit transmits a traceback rejection command to the user equipment. 如申請專利範圍第15項所述之製程配方監控系統,其中該資料處理單元存取經回溯後之該目前配方檔至該資料庫之後,該資料處理單元判斷是否有另一使用者設備之連線請求,若否,該資料處理單元解除對該配方資料單元之該鎖定狀態;若是,該資料處理單元傳輸一更新命令至該另一使用者設備,並更新經回溯後之該目前配方檔。 For example, the process recipe monitoring system described in item 15 of the scope of patent application, wherein after the data processing unit accesses the current recipe file after being backtracked to the database, the data processing unit determines whether there is another user device connected Online request, if not, the data processing unit releases the locked state of the recipe data unit; if yes, the data processing unit transmits an update command to the other user equipment and updates the current recipe file after the traceback. 如申請專利範圍第15項所述之製程配方監控系統,其中該配方資料單元包含一歷史資料庫,該資料處理單元存取回溯前之該目前配方檔至該歷史資料庫。 For example, in the process recipe monitoring system described in item 15 of the scope of patent application, the recipe data unit includes a historical database, and the data processing unit accesses the current recipe file before retrospective to the historical database. 如申請專利範圍第15項所述之製程配方監控系統,其中該資料處理單元讀取一原始描述檔,依據該原始描述檔,該資料處理單元比對該配方描述資料庫中該配方規則描述檔是否匹配,若未匹配,該資料處理單元更新該配方規則描述檔至該配方描述資料庫。 For example, the process recipe monitoring system described in item 15 of the scope of patent application, wherein the data processing unit reads an original description file, and according to the original description file, the data processing unit compares the recipe rule description file in the recipe description database Whether it matches, if not, the data processing unit updates the formula rule description file to the formula description database. 如申請專利範圍第15項所述之製程配方監控系統,其中該資料處理單元接收一編輯命令時,包括:該資料處理單元判斷判斷該使用者設備是否能執行一編輯模式,若是,該資料處理單元判斷是否能供該使用者設備控制該資料庫與該配方描述資料庫,若是,該資料處理單元對該配方資料單元進入該鎖定狀態,以限制該使用者設備控制該資料庫與該配方描述資料庫;該資料處理單元提供該目前配方檔以供該使用者設備編輯,且該資料處理單元存取經編輯後之該目前配方檔至該資料庫;該資料處理單元解除對該配方資料單元之該鎖定狀態,且該資料處理單元通知並更新經編輯後之該目前配方檔至另一使用者設備。 For example, in the process recipe monitoring system described in item 15 of the scope of patent application, when the data processing unit receives an editing command, it includes: the data processing unit judges whether the user equipment can execute an editing mode, and if so, the data processing The unit determines whether the user equipment can control the database and the recipe description database. If so, the data processing unit enters the locked state for the recipe data unit to restrict the user equipment from controlling the database and the recipe description Database; the data processing unit provides the current recipe file for editing by the user equipment, and the data processing unit accesses the edited current recipe file to the database; the data processing unit releases the recipe data unit In the locked state, the data processing unit notifies and updates the edited current recipe file to another user device. 如申請專利範圍第26項所述之製程配方監控系統,其中該資料處理單元判斷不能供該使用者設備控制該資料庫與該配方描述資料庫,包括:該資料處理單元傳輸一拒絕編輯命令至該使用者設備,且該資料處理單元復原編輯前之該目前配方檔至該使用者設備。 For example, the process recipe monitoring system described in item 26 of the scope of patent application, wherein the data processing unit determines that the user equipment cannot control the database and the recipe description database, including: the data processing unit transmits an edit rejection command to The user equipment and the data processing unit restore the current recipe file before editing to the user equipment. 如申請專利範圍第26項所述之製程配方監控系統,其中該資料處理單元提供該目前配方檔以供該使用者設備編輯,包括:該使用者設備寫入一編輯資料並傳輸至該資料處理單元,該資料處理單元判斷該編輯資料是否符合該配方規則描述檔,若符合,該資料處理單元比對該編輯資料與該目前配方檔是否一致,若不一致,該資料處理單元存取編輯前之該目前配方檔至該配方資料單元之一歷史資料庫。 For example, the process recipe monitoring system described in item 26 of the scope of patent application, wherein the data processing unit provides the current recipe file for editing by the user equipment, including: the user equipment writes an editing data and transmits it to the data processing Unit, the data processing unit judges whether the edited data conforms to the formula rule description file, if so, the data processing unit compares the edited data with the current formula file, and if it is inconsistent, the data processing unit accesses the data before editing The current recipe file is stored in a historical database of the recipe data unit. 如申請專利範圍第28項所述之製程配方監控系統,其中該資料處理單元比對該編輯資料與該目前配方檔係為一致,該資料處理單元記錄該目前配方檔中該主版本版次資料與各該次配方版本資料至該資料庫。 For example, the process recipe monitoring system described in item 28 of the scope of patent application, wherein the data processing unit compares the edited data with the current recipe file system to be consistent, and the data processing unit records the master version version data in the current recipe file And each of the recipe version data to the database. 如申請專利範圍第15項所述之製程配方監控系統,更包括:一製程單元,連接於該資料處理單元,該資料處理單元傳輸該目前配方檔與該配方規則描述檔至該製程單元。 For example, the process recipe monitoring system described in claim 15 further includes: a process unit connected to the data processing unit, and the data processing unit transmits the current recipe file and the recipe rule description file to the process unit.
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Citations (2)

* Cited by examiner, † Cited by third party
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CN104134109A (en) * 2014-06-24 2014-11-05 青岛海信网络科技股份有限公司 Engineering configuration method and engineering configuration system integrating version management
TWM540315U (en) * 2016-12-23 2017-04-21 Synpower Co Ltd Process parameter monitoring system

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104134109A (en) * 2014-06-24 2014-11-05 青岛海信网络科技股份有限公司 Engineering configuration method and engineering configuration system integrating version management
TWM540315U (en) * 2016-12-23 2017-04-21 Synpower Co Ltd Process parameter monitoring system

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