TWI682334B - Process recipe monitoring method and system thereof - Google Patents

Process recipe monitoring method and system thereof Download PDF

Info

Publication number
TWI682334B
TWI682334B TW107104473A TW107104473A TWI682334B TW I682334 B TWI682334 B TW I682334B TW 107104473 A TW107104473 A TW 107104473A TW 107104473 A TW107104473 A TW 107104473A TW I682334 B TWI682334 B TW I682334B
Authority
TW
Taiwan
Prior art keywords
recipe
file
processing unit
data processing
item
Prior art date
Application number
TW107104473A
Other languages
Chinese (zh)
Other versions
TW201935337A (en
Inventor
蕭郁倫
Original Assignee
亞智科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 亞智科技股份有限公司 filed Critical 亞智科技股份有限公司
Priority to TW107104473A priority Critical patent/TWI682334B/en
Priority to CN201810756412.6A priority patent/CN110135791A/en
Publication of TW201935337A publication Critical patent/TW201935337A/en
Application granted granted Critical
Publication of TWI682334B publication Critical patent/TWI682334B/en

Links

Images

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00Administration; Management
    • G06Q10/10Office automation; Time management
    • G06Q10/103Workflow collaboration or project management
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00Systems or methods specially adapted for specific business sectors, e.g. utilities or tourism
    • G06Q50/04Manufacturing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/30Computing systems specially adapted for manufacturing

Landscapes

  • Business, Economics & Management (AREA)
  • Engineering & Computer Science (AREA)
  • Human Resources & Organizations (AREA)
  • Strategic Management (AREA)
  • General Business, Economics & Management (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Theoretical Computer Science (AREA)
  • Economics (AREA)
  • Marketing (AREA)
  • General Physics & Mathematics (AREA)
  • Tourism & Hospitality (AREA)
  • Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Health & Medical Sciences (AREA)
  • Data Mining & Analysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Operations Research (AREA)
  • Quality & Reliability (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Data Exchanges In Wide-Area Networks (AREA)

Abstract

A process recipe monitoring method is provided. The process recipe monitoring method includes the following steps. First, receiving a request from a user equipment. Then, a recover command is received and includes the following steps. Determining whether the user equipment could perform a recover mode. Entering a locked state to restrict only the user equipment control a database and a recipe description database. Recovering a plurality of sub-recipe items and the corresponding sub-recipe values of a current recipe file according to a plurality of target sub-recipe items and the corresponding target sub-recipe values of target main version data. A main version data and a plurality of sub-version data of the current recipe file after recovering are recorded. Storing the current recipe file into the database after recovering. In addition, a process recipe monitoring system is also provided.

Description

製程配方監控方法及製程配方監控系統Process recipe monitoring method and process recipe monitoring system

本發明是有關於一種製程配方監控方法與製程配方監控系統,且特別是有關於一種可彈性調整配方項目之監控方法與監控系統。The present invention relates to a process recipe monitoring method and process recipe monitoring system, and in particular to a method and system for flexible adjustment of recipe items.

隨著製程技術的進步,製程產品之品質不僅取決於製程程式,機台狀況的好壞與否也是其中關鍵的一環。機台能以特定的管控條件(control rule)設定達成特定機台生產特定產品的目的,於基板處理裝置中,通常係以配方檔來設定機台之製造流程與製造條件。然而,習用PLC控制的機台(使用者設備)之配方檔係設定固定的管控條件給予單一產品生產使用,故缺乏彈性,無法針對製程產品特性加入或修改新的控制規則及參數調整。此外,機台配方的控管通常在人機介面(使用者設備)所提供的功能限制下,管制範圍並不彈性,一旦輸入錯誤的製程控制條件,並無回復機制讓機台復原到先前某一個特定版本之配方檔。再者,每個版本之配方檔內包含複數個配方項目及其相應之配方數值,於目前的機制之下,並無回復機制讓配方檔在某一個版本中,針對某一個特定配方項目及其相對應之配方數值單獨進行復原,更甚者,若於不同版本之配方檔的配方項目若有增減而有不一致的狀況,也無法較為彈性地供操作者回復所需求之配方檔。With the advancement of process technology, the quality of process products not only depends on the process program, but the quality of the machine is also a key part of it. The machine can be set with specific control rules to achieve the purpose of producing a specific product by a specific machine. In a substrate processing apparatus, a recipe file is usually used to set the manufacturing process and manufacturing conditions of the machine. However, the recipe file of the conventional PLC-controlled machine (user equipment) sets fixed control conditions for the production of a single product, so it lacks flexibility and cannot add or modify new control rules and parameter adjustments based on the characteristics of the process product. In addition, the control of the machine recipe is usually limited by the functions provided by the human-machine interface (user equipment). The control range is not flexible. Once the wrong process control conditions are entered, there is no recovery mechanism to restore the machine to a previous one. A specific version of the recipe file. In addition, each version of the recipe file contains multiple recipe items and their corresponding recipe values. Under the current mechanism, there is no reply mechanism to let the recipe file be in a certain version for a specific recipe item and its Corresponding formula values can be restored separately. Moreover, if there are inconsistencies in the formula items in the formula files of different versions, the operator cannot respond more flexibly to the required formula file.

因此,如何改良並能提供一種『製程配方監控方法及製程配方監控系統』來避免上述所遭遇到的問題,係業界所亟待解決之課題。Therefore, how to improve and provide a "process recipe monitoring method and process recipe monitoring system" to avoid the above-mentioned problems is an urgent problem to be solved in the industry.

本發明的一目的在於,可供使用者回溯至所需求之特定配方檔,提升製程配方使用上的彈性。An object of the present invention is to allow the user to go back to the specific formula file required to improve the flexibility in the use of process recipes.

本發明的一實施例提出一種製程配方能被執行監控方法,包括以下步驟:接收一使用者設備的連線請求;以及接收使用者設備之一回溯命令,包括以下步驟:判斷是否能執行一回溯模式;進入一鎖定狀態,以限制僅供使用者設備控制一資料庫與一配方描述資料庫,其中資料庫中一目前配方檔包含一主版本版次資料與複數個次配方資料,各次配方資料包含一次配方項目、一次配方版本資料與一次配方數值,配方描述資料庫包含一配方規則描述檔,依據配方規則描述檔執行目前配方檔;依據一目標主版本資料之複數個目標次配方項目與複數個目標次配方數值,復原目前配方檔中相對應之次配方項目與次配方數值;記錄經回溯後之目前配方檔中主版本版次資料與各次配方版本資料;及存取經回溯後之目前配方檔至資料庫。An embodiment of the present invention provides a method for monitoring process recipes that can be executed, including the following steps: receiving a connection request from a user device; and receiving a traceback command from a user device, including the following steps: determining whether a traceback can be performed Mode; enter a locked state to limit the control of only one database and one recipe description database for user equipment, where a current recipe file in the database contains a major version version data and a plurality of secondary recipe data, each recipe The data includes a recipe item, a recipe version data, and a recipe value. The recipe description database contains a recipe rule description file. The current recipe file is executed according to the recipe rule description file; a plurality of target secondary recipe items and a target master version data Multiple target sub-recipe values to restore the corresponding sub-recipe items and sub-recipe values in the current recipe file; record the main version version data and each sub-recipe version data in the current recipe file after backtracking; and access after backtracking The current recipe file to the database.

本發明之一實施例提出一種製程配方監控系統,製程配方監控系統包括一資料處理單元以及一配方資料單元。資料處理單元係接收一使用者設備的連線請求。配方資料單元連接於資料處理單元,配方資料單元包含一資料庫、一配方描述資料庫與一回溯模組,資料庫包含一目前配方檔,目前配方檔包含一主版本版次資料與複數個次配方資料,各次配方資料包含一次配方項目、一次配方版本資料與一次配方數值,配方描述資料庫包含一配方規則描述檔,依據配方規則描述檔執行目前配方檔。資料處理單元接收一回溯命令時,資料處理單元判斷是否能執行一回溯模式,若是,資料處理單元對配方資料單元進入一鎖定狀態,以限制使用者設備控制資料庫與配方描述資料庫。依據一目標主版本資料之複數個目標次配方項目與複數個目標次配方數值,回溯模組復原目前配方檔中相對應之次配方項目與次配方數值,且資料處理單元記錄經回溯後之目前配方檔中主版本版次資料與各次配方版本資料,並存取經回溯後之目前配方檔至資料庫。An embodiment of the present invention provides a process recipe monitoring system. The process recipe monitoring system includes a data processing unit and a recipe data unit. The data processing unit receives a connection request of a user equipment. The recipe data unit is connected to the data processing unit. The recipe data unit includes a database, a recipe description database, and a traceback module. The database includes a current recipe file, and the current recipe file includes a major version and multiple data. For recipe data, each recipe data contains one recipe item, one recipe version data and one recipe value. The recipe description database contains a recipe rule description file, and the current recipe file is executed according to the recipe rule description file. When the data processing unit receives a backtracking command, the data processing unit determines whether a backtracking mode can be executed. If so, the data processing unit enters a locked state for the recipe data unit to restrict the user equipment control database and the recipe description database. Based on the multiple target sub-recipe items and the multiple target sub-recipe values of a target major version data, the traceback module restores the corresponding sub-recipe items and sub-recipe values in the current recipe file, and the data processing unit records the current status after the traceback The main version version data and each formula version data in the recipe file, and access the current recipe file after the traceback to the database.

基於上述,在本發明的製程配方監控方法與製程配方監控系統中,可將目前配方檔回溯到先前某一個特定版本之配方檔,以復原目前配方檔中特定或全部之次配方項目與相對應之次配方數值,藉此提升製程配方使用上的彈性。Based on the above, in the process recipe monitoring method and process recipe monitoring system of the present invention, the current recipe file can be traced back to a previous specific version of the recipe file to restore the specific or all of the secondary recipe items in the current recipe file and corresponding The value of the next formula, thereby improving the flexibility of the process recipe.

再者,由於可針對特定或全部之次配方項目與相對應之次配方數值進行復原,故本發明可針對主版本模式或特定次配方模式進行回溯,換言之,本發明不僅可針對先前特定某一版本之主版本版次資料進行復原以外,更可針對某一個特定次配方項目及其相對應之次次配方數值進行復原,藉此可供使用者回溯至所需求之目前配方檔。Furthermore, since it can be restored for specific or all sub-recipe items and corresponding sub-recipe values, the present invention can be traced back to the main version mode or specific sub-recipe mode. In other words, the present invention can not only target a specific In addition to the restoration of the main version and version data of the version, it can also be restored for a specific sub-recipe item and its corresponding sub-recipe value, so that the user can trace back to the current recipe file required.

另外,針對上述經回溯後或經編輯後的目標配方檔,本發明會記錄新的主版本版次資料與各次配方版本資料,而非將主版本版次資料與各次配方版本資料全數復原至先前某一個特定版本之配方檔。In addition, for the above-mentioned target recipe file after being backtracked or edited, the present invention will record the new major version version data and each recipe version data, instead of recovering all the major version version data and each recipe version data To a specific version of the previous recipe file.

為讓本發明能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the present invention more comprehensible, the embodiments are specifically described below and described in detail in conjunction with the accompanying drawings.

以下結合附圖和實施例,對本發明的具體實施方式作進一步描述。以下實施例僅用於更加清楚地說明本發明的技術方案,而不能以此限制本發明的保護範圍。The specific implementation of the present invention will be further described below in conjunction with the drawings and embodiments. The following embodiments are only used to more clearly illustrate the technical solutions of the present invention, but cannot limit the protection scope of the present invention.

圖1為本發明之製程配方監控系統的示意圖。圖2A為本發明之目前配方檔的示意圖。圖2B為本發明之配方規則描述檔的示意圖。圖2C為本發明之目標配方檔的示意圖。圖2D為本發明之經回溯後之目前配方檔一實施例的示意圖。請先參閱圖1。在本實施例中,製程配方監控系統10包括一資料處理單元11、一配方資料單元12以及一製程單元13。FIG. 1 is a schematic diagram of a process recipe monitoring system of the present invention. 2A is a schematic diagram of the current recipe file of the present invention. FIG. 2B is a schematic diagram of a description file of a recipe rule of the present invention. 2C is a schematic diagram of the target recipe file of the present invention. FIG. 2D is a schematic diagram of an embodiment of the current recipe file after backtracking in the present invention. Please refer to Figure 1 first. In this embodiment, the process recipe monitoring system 10 includes a data processing unit 11, a recipe data unit 12 and a process unit 13.

資料處理單元11係可透過硬體(例如積體電路)、軟體(例如處理器執行之程式指令)或其組合來實現通訊連線與邏輯判斷之功能,例如電腦或其他計算機裝置。在本實施例中,資料處理單元11係能與使用者設備30彼此傳輸一命令C,資料處理單元11係接收使用者設備30之連線請求並等待接收使用者設備30之命令C,資料處理單元11係判斷使用者設備30是否具備權限能執行命令,並傳輸命令C通知使用者設備30。為了便於說明,圖1僅繪示命令C,命令C之名稱可依據資料處理單元11與使用者設備30(或另一使用者設備40)之不同需求而定,舉例而言,使用者設備30係供使用者輸入如回溯命令C1或編輯命令C2至資料處理單元11,而資料處理單元11能依據不同情況係傳輸如拒絕命令C3、鎖定命令C41、解除鎖定命令C42、拒絕回溯命令C5、拒絕編輯命令C6、更新命令C7以及通知命令C8等命令C至使用者設備30。在另一實施例中,資料處理單元11係能同時或不同時間接收使用者設備30及另一使用者設備40之連線請求或命令C,故資料處理單元11亦係能與另一使用者設備40彼此傳輸命令C。本實施例之使用者設備30與另一使用者設備40例如為人機介面(Human Machine Interface,HMI)、製造執行系統(Manufacturing Execution System,MES)、網路圖形用戶界面(Web Graphical User Interface,Web GUI)或其他通訊界面。The data processing unit 11 can realize the functions of communication connection and logic judgment through hardware (such as an integrated circuit), software (such as program instructions executed by a processor), or a combination thereof, such as a computer or other computer devices. In this embodiment, the data processing unit 11 and the user equipment 30 can transmit a command C to each other. The data processing unit 11 receives the connection request of the user equipment 30 and waits to receive the command C of the user equipment 30, data processing The unit 11 determines whether the user equipment 30 has the authority to execute the command, and transmits the command C to notify the user equipment 30. For ease of explanation, FIG. 1 only shows the command C. The name of the command C may be determined according to different needs of the data processing unit 11 and the user equipment 30 (or another user equipment 40). For example, the user equipment 30 It is for the user to input the backtracking command C1 or the editing command C2 to the data processing unit 11, and the data processing unit 11 can transmit such as rejecting the command C3, locking command C41, unlocking command C42, rejecting the backtracking command C5, rejecting according to different situations The command C such as the edit command C6, the update command C7, and the notification command C8 is sent to the user device 30. In another embodiment, the data processing unit 11 can receive the connection request or command C of the user equipment 30 and another user equipment 40 simultaneously or at different times, so the data processing unit 11 can also communicate with another user The devices 40 transmit command C to each other. The user equipment 30 and the other user equipment 40 in this embodiment are, for example, Human Machine Interface (HMI), Manufacturing Execution System (MES), Web Graphical User Interface, Web GUI) or other communication interface.

配方資料單元12連接於資料處理單元11。配方資料單元12包含一資料庫121、一配方描述資料庫123、一歷史資料庫125以及一回溯模組127,各資料庫係因應使用者需求設計,可以混合/組合或以單一資料記憶單元呈現。資料庫121存儲包含一目前配方(Recipe)檔RF(見圖2A),目前配方檔RF包含一主版本版次(Version)資料VM與複數個次配方(Sub-Recipe)資料SR,各次配方資料SR包含一次配方項目(Sub-Recipe Item)SRI、一次配方版本(Sub-Recipe Version)資料SRV與一次配方數值SRN,每個次配方項目SRI係對應有次配方版本SRV與次配方數值SRN,次配方項目SRI例如為藥液、壓力、製程溫度、製程時間、升溫時間、降溫時間或基板厚度等,可端視實際機台與製程所需來調整次配方項目,次配方數值SRN係依據前述次配方項目SRI來設定數值,而每一次修改次配方數值SRN會變動次配方版本SRV之版本資訊。The recipe data unit 12 is connected to the data processing unit 11. The recipe data unit 12 includes a database 121, a recipe description database 123, a historical database 125, and a traceback module 127. Each database is designed according to user needs and can be mixed/combined or presented as a single data memory unit . The database 121 stores a current recipe (Recipe) file RF (see FIG. 2A). The current recipe file RF includes a major version version data (Version) VM and a plurality of sub-recipe data SR, each recipe The data SR includes a sub-recipe item SRI, a sub-recipe version data SRV and a primary recipe value SRN, each sub-recipe item SRI corresponds to a sub-recipe version SRV and a sub-recipe value SRN, The sub-recipe items SRI are, for example, chemical liquid, pressure, process temperature, process time, heating time, cooling time or substrate thickness, etc. The sub-recipe items can be adjusted according to the actual machine and process requirements. The sub-recipe value SRN is based on the foregoing The sub-recipe item SRI is used to set the value, and each time the sub-recipe value is modified SRN changes the version information of the sub-recipe version SRV.

配方描述資料庫123存儲包含一配方規則描述檔RRDF(見圖2B),配方規則描述檔RRDF係為一可擴展標記語言(Extensible markup language,XML)之設定檔,依據配方規則描述檔RRDF執行目前配方檔RF。在本實施例中,配方規則描述檔RRDF係設定目前配方檔RF中各次配方項目SRI相對應次配方數值SRN之上限值、下限值與預設值,此外,配方規則描述檔RRDF還能設定目前配方檔RF中各次配方項目SRI之編輯(Edit)權限條件、控制條件、通訊條件與複合條件,其中編輯權限條件係指使用者可否針對次配方項目SRI進行讀取(Read)、寫入(Write)、僅可讀取(Read Only)或是否可見(Visible or Invisible)之修改權限;控制條件例如係製程配方監控系統10運作時可允許編輯;通訊條件係允許特定條件而可連線;複合條件係針對多個次配方項目SRI之間的限制條件,舉例而言,某一個次配方項目SRI為製程溫度,另一個次配方項目SRI為降溫時間,所述複合條件係設定製程溫度大於120度時,同時降溫時間需設定大於30秒。The recipe description database 123 stores a recipe rule description file RRDF (see FIG. 2B). The recipe rule description file RRDF is an Extensible Markup Language (XML) configuration file, which is executed according to the recipe rule description file RRDF. Recipe file RF. In this embodiment, the recipe rule description file RRDF sets the upper limit value, the lower limit value, and the preset value corresponding to the secondary recipe value SRN of each recipe item SRI in the current recipe file RF. In addition, the recipe rule description file RRDF also It can set the edit permission conditions, control conditions, communication conditions and compound conditions of each SRI in the current recipe file RF. The edit permission conditions refer to whether the user can read (Read), Write (Read Only) or Read Only (Visible or Invisible) modification authority; control conditions such as process recipe monitoring system 10 can be edited during operation; communication conditions allow specific conditions to be connected Line; Compound conditions are the limiting conditions for multiple sub-recipe items SRI, for example, a certain sub-recipe item SRI is the process temperature, another sub-recipe item SRI is the cooling time, the compound condition is to set the process temperature When it is greater than 120 degrees, the cooling time must be set to greater than 30 seconds.

歷史資料庫125係供存取歷史資料,其包含變動前之目前配方檔RF以及如圖2C所示之目標配方檔TRF,其中目標配方檔TRF包含目標主版本資料TVM與複數個目標次配方資料TSR,各目標次配方資料TSR包含一目標次配方項目TSRI、一目標次配方版本資料TSRV與一目標次配方數值TSRN,目標次配方項目TSRI例如為藥液、壓力、製程溫度、製程時間、升溫時間、降溫時間或基板厚度等,可端視實際機台與製程所需來調整目標次配方項目,目標次配方數值TSRN係依據前述目標次配方項目TSRI來設定數值,而目標次配方版本SRV係為修改次配方數值SRN之變動版本資訊。回溯模組127連接資料庫121、配方描述資料庫123與歷史資料庫125,回溯模組127係依據回溯命令C1對目前配方檔RF進行回溯,於回溯之前,資料處理單元11係存取回溯前之目前配方檔RF至歷史資料庫125,接著,依據目標配方檔TRF中的複數個目標次配方項目TSRI與複數個目標次配方數值TSRV,回溯模組127復原目前配方檔RF中特定幾個或全部之次配方項目SRI與相對應之次配方數值SRN,舉例而言,圖2C中的目標次配方項目TSRI對應至圖2A中的次配方項目SRI,並將圖2A中相對應次配方項目SRI之次配方數值SRN復原至圖2C中的目標次配方數值TSRN,即圖2D圖之經回溯後之目前配方檔RFB。此外,資料處理單元11記錄經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,並存取經回溯後之目前配方檔RFB(如圖2D所示)至資料庫121。需說明的是,在此資料處理單元11處理經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,並非是將經回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB記錄為目標配方檔TRF中的目標主版本資料TVM與各目標次配方資料TSR,而是更新回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB,舉例而言,圖2A所示之回溯前之目前配方檔RF中的主版本版次資料VM為10,次配方版本資料SRV為6,圖2D所示之回溯後之目前配方檔RFB的主版本版次資料VMB為11,次配方版本資料SRVB為7,在此紀錄版本係以遞增為例,在另一實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。The historical database 125 is for accessing historical data, which includes the current recipe file RF before the change and the target recipe file TRF as shown in FIG. 2C, where the target recipe file TRF contains the target master version data TVM and a plurality of target secondary recipe data TSR, each target sub-recipe data TSR includes a target sub-recipe item TSRI, a target sub-recipe version data TSRV and a target sub-recipe value TSRN. The target sub-recipe items TSRI are, for example, drug solution, pressure, process temperature, process time, temperature rise Time, cooling time or substrate thickness, etc., can adjust the target sub-recipe items according to the actual machine and process requirements. The target sub-recipe value TSRN is set according to the aforementioned target sub-recipe item TSRI, and the target sub-recipe version SRV is In order to modify the change version information of the secondary recipe value SRN. The traceback module 127 connects the database 121, the recipe description database 123 and the historical database 125. The traceback module 127 traces the current recipe file RF according to the traceback command C1. Before the traceback, the data processing unit 11 accesses the traceback The current recipe file RF to the historical database 125, and then, according to the plurality of target sub-recipe items TSRI and the plurality of target sub-recipe values TSRV in the target recipe file TRF, the traceback module 127 restores a specific number of the current recipe file RF or All sub-recipe items SRI and corresponding sub-recipe values SRN, for example, the target sub-recipe item TSRI in FIG. 2C corresponds to the sub-recipe item SRI in FIG. 2A, and the corresponding sub-recipe item SRI in FIG. 2A The secondary recipe value SRN is restored to the target secondary recipe value TSRN in FIG. 2C, which is the current recipe file RFB after the backtracking in FIG. 2D. In addition, the data processing unit 11 records the major version version data VMB and each minor recipe version data SRVB in the current recipe file RFB after the traceback, and accesses the traceback current recipe file RFB (as shown in FIG. 2D) to the database 121 . It should be noted that the data processing unit 11 processes the major version version data VMB and each minor recipe version data SRVB in the current recipe file RFB after the traceback, not the major version in the current recipe file RFB after the traceback The version data VMB and each recipe version data SRVB are recorded as the target master version data TVM and each target sub recipe data TSR in the target recipe file TRF, but the main version version data VMB in the current recipe file RFB after the update is updated For each recipe version data SRVB, for example, the major version VM in the current recipe file RF before the traceback shown in FIG. 2A is 10, the minor recipe version data SRV is 6, after the traceback shown in FIG. 2D The current version file RFB's main version version data VMB is 11 and the sub-recipe version data SRVB is 7. In this record version, the incremental version is used as an example. In another embodiment, the record version can be encoded in other ways or according to requirements. Set it.

製程單元13連接資料處理單元11,資料處理單元11接收配方資料單元12傳輸之目前配方檔RF與配方規則描述檔RRDF,且資料處理單元11傳輸目前配方檔RF與配方規則描述檔RRDF至製程單元13,製程單元13依據目前配方檔RF與配方規則描述檔RRDF對基板進行製程,而目前配方檔RF係依據配方規則描述檔RRDF之規定執行。The processing unit 13 is connected to the data processing unit 11, the data processing unit 11 receives the current recipe file RF and the recipe rule description file RRDF transmitted by the recipe data unit 12, and the data processing unit 11 transmits the current recipe file RF and the recipe rule description file RRDF to the processing unit 13. The process unit 13 processes the substrate according to the current recipe file RF and the recipe rule description file RRDF, and the current recipe file RF is executed according to the provisions of the recipe rule description file RRDF.

圖3為本發明的製程配方監控方法的流程圖。圖4為圖3中接收使用者設備的連線請求的流程圖。圖5為圖4中啟動資料處理單元的流程圖。圖6為圖3中接收使用者設備之回溯命令的流程圖。圖7為圖6中判斷使用者設備是否能執行回溯模式的流程圖。圖8為圖7中判斷使用者設備是否具有權限的流程圖。圖9為圖8中檢視配方規則描述檔是否能被執行的流程圖。圖10為圖3中接收使用者設備之編輯命令的流程圖。圖11為圖10中判斷使用者設備是否能執行編輯模式的流程圖。圖12為圖11中檢視配方規則描述檔是否能被執行的流程圖。圖13為圖10中提供目前配方檔以供使用者設備編輯的流程圖。FIG. 3 is a flow chart of the process recipe monitoring method of the present invention. FIG. 4 is a flowchart of receiving a connection request of a user device in FIG. 3. FIG. 5 is a flowchart of starting the data processing unit in FIG. 4. FIG. 6 is a flowchart of receiving the traceback command of the user equipment in FIG. 3. FIG. 7 is a flowchart of FIG. 6 to determine whether the user equipment can execute the backtracking mode. FIG. 8 is a flowchart of determining whether the user equipment has authority in FIG. 7. FIG. 9 is a flowchart of FIG. 8 to check whether the recipe rule description file can be executed. FIG. 10 is a flowchart of receiving the edit command of the user device in FIG. 3. FIG. 11 is a flowchart of FIG. 10 to determine whether the user equipment can execute the edit mode. FIG. 12 is a flowchart of FIG. 11 to check whether the recipe rule description file can be executed. FIG. 13 is a flowchart of providing the current recipe file in FIG. 10 for editing by the user device.

請先參閱圖3,本實施例的製程配方監控方法S10係可用於如圖1所示製程配方監控系統10。製程配方監控方法S10包括以下步驟S11~S13。進行步驟S11,接收一使用者設備30的連線請求,以圖1為例,資料處理單元11係接收使用者設備30之連線請求並等待接收使用者設備30之命令C,步驟S11可包括以下步驟S112至步驟S116,請參閱圖4,進行步驟S112,啟動一資料處理單元11,使得資料處理單元11能執行通訊連線與邏輯判斷之功能。於步驟S112之後,進行步驟S114,藉由資料處理單元11以取得資料庫121中目前配方檔RF與配方描述資料庫123中配方規則描述檔RRDF。接著,進行步驟S116,使用者設備30係連線至資料處理單元11。詳細而言,步驟S112可包括以下步驟S22至步驟S26,請參閱圖5,進行步驟S22,讀取一原始描述檔,原始描述檔係為一可擴展標記語言(Extensible markup language,XML)之設定檔。以圖1為例,資料處理單元11讀取製程單元13之原始描述檔,以解析製程單元13配方之結構。接著,進行步驟S24,依據原始描述檔,比對配方描述資料庫123中配方規則描述檔RRDF是否匹配。以圖1為例,資料處理單元11係先檢視原始描述檔之描述格式與設定條件(如上限值、下限值、預設值、編輯權限條件、控制條件、通訊條件與複合條件)是否正確與是否能被執行,若否,資料處理單元11傳輸一通知命令C8至使用者設備30顯示異常;反之,若原始描述檔之描述格式與設定條件是正確與能被執行,資料處理單元11連接至配方描述資料庫123並提取配方規則描述檔RRDF,資料處理單元11係比對原始描述檔與配方規則描述檔RRDF是否可以匹配,所述判斷是否可以匹配,係依據配方規則描述檔RRDF中針對目前配方檔RF中各次配方項目SRI相對應次配方數值SRN之上限值、下限值與預設值以及各次配方項目SRI之編輯(Edit)權限條件、控制條件、通訊條件與複合條件來判斷與原始描述檔相對應之資料是否存在且一致。在一實施例中,若資料處理單元11判斷原始描述檔與配方規則描述檔RRDF可以匹配,資料處理單元11傳輸通知命令C8至使用者設備30顯示正常而可繼續執行。在另一實施例中,若資料處理單元11判斷原始描述檔與配方規則描述檔RRDF不可以匹配,進行步驟S26,若未匹配,更新配方規則描述檔RRDF至配方描述資料庫123,以圖1為例,資料處理單元11係鎖定配方描述資料庫123,以禁止另一使用者設備40(包含其他使用者設備)讀取與寫入配方描述資料庫123,接著,資料處理單元11係依據原始描述檔來更新配方規則描述檔RRDF至配方描述資料庫123,於更新後,資料處理單元11解除對配方描述資料庫123之鎖定狀態,並通知使用者設備30可繼續執行,此舉來確保原始描述檔係符合配方資料單元12中的配方規則描述檔RRDF。需說明的是,上述圖5依據原始描述檔來比對配方規則描述檔RRDF之動作,除了可啟動製程配方監控系統10以外,於使用者設備30需要編輯或回溯時,亦可依據上述圖5之流程來判斷配方規則描述檔RRDF是否匹配製程單元13的原始描述檔。Please refer to FIG. 3 first. The process recipe monitoring method S10 of this embodiment can be used in the process recipe monitoring system 10 shown in FIG. 1. The process recipe monitoring method S10 includes the following steps S11 to S13. Go to step S11 to receive a connection request from the user equipment 30. Taking FIG. 1 as an example, the data processing unit 11 receives the connection request from the user equipment 30 and waits to receive the command C from the user equipment 30. Step S11 may include The following steps S112 to S116, please refer to FIG. 4, and proceed to step S112 to activate a data processing unit 11 so that the data processing unit 11 can perform the functions of communication connection and logic judgment. After step S112, step S114 is performed, and the data processing unit 11 is used to obtain the current recipe file RF in the database 121 and the recipe rule description file RRDF in the recipe description database 123. Next, in step S116, the user equipment 30 is connected to the data processing unit 11. In detail, step S112 may include the following steps S22 to S26, please refer to FIG. 5, proceed to step S22, read an original description file, the original description file is an Extensible Markup Language (XML) setting files. Taking FIG. 1 as an example, the data processing unit 11 reads the original description file of the process unit 13 to analyze the structure of the recipe of the process unit 13. Next, proceed to step S24, according to the original description file, compare whether the RRDF of the recipe rule description file in the recipe description database 123 matches. Taking FIG. 1 as an example, the data processing unit 11 first checks whether the description format and setting conditions (such as upper limit value, lower limit value, preset value, editing authority condition, control condition, communication condition and compound condition) of the original description file are correct Whether it can be executed, if not, the data processing unit 11 transmits a notification command C8 to the user equipment 30 to display an abnormality; otherwise, if the description format and setting conditions of the original description file are correct and can be executed, the data processing unit 11 is connected Go to the recipe description database 123 and extract the recipe rule description file RRDF. The data processing unit 11 compares whether the original description file and the recipe rule description file RRDF can match. Whether the judgment can be matched is based on the recipe rule description file RRDF. In the current recipe file RF, each recipe item SRI corresponds to the upper limit value, the lower limit value, and the preset value of the secondary recipe value SRN, and the edit permission conditions, control conditions, communication conditions, and composite conditions of each recipe item SRI To determine whether the data corresponding to the original description file exists and is consistent. In an embodiment, if the data processing unit 11 determines that the original description file and the recipe rule description file RRDF can match, the data processing unit 11 transmits a notification command C8 to the user device 30 to display normal and can continue execution. In another embodiment, if the data processing unit 11 determines that the original description file and the recipe rule description file RRDF cannot match, proceed to step S26. If there is no match, the recipe rule description file RRDF is updated to the recipe description database 123, as shown in FIG. 1 For example, the data processing unit 11 locks the recipe description database 123 to prohibit another user device 40 (including other user devices) from reading and writing the recipe description database 123. Then, the data processing unit 11 is based on the original Use the description file to update the recipe rule description file RRDF to the recipe description database 123. After the update, the data processing unit 11 unlocks the recipe description database 123 and notifies the user that the device 30 can continue to execute. This action ensures the original The description file conforms to the recipe rule description file RRDF in the recipe data unit 12. It should be noted that the above FIG. 5 compares the actions of the recipe rule description file RRDF according to the original description file. In addition to starting the process recipe monitoring system 10, when the user device 30 needs to be edited or traced back, it can also be based on the above FIG. 5 To determine whether the recipe rule description file RRDF matches the original description file of the process unit 13.

請復參閱圖3,於步驟S11之後,使用者設備30連線至資料處理單元11,接著,使用者設備30依據使用者需求而傳輸命令C至資料處理單元11,所述命令C例如為一回溯命令C1或一編輯命令C2。在本實施例中,使用者設備30係傳輸回溯命令C1至資料處理單元11,資料處理單元11接收使用者設備30之回溯命令C1(步驟S12),步驟S12可包括以下步驟S121至步驟S129B,請參閱圖6,進行步驟S121,資料處理單元11判斷是否能執行一回溯模式,即資料處理單元11接收使用者設備30之回溯命令C1後,判斷使用者設備30是否能執行回溯模式,若否,進行步驟S129,拒絕使用者設備30並通知使用者設備30。詳細而言,步驟S121可包括以下步驟S32至步驟S36,請參閱圖7,進行步驟S32,資料處理單元11判斷資料庫121與配方描述資料庫123是否為鎖定狀態,亦即資料處理單元11檢查資料庫121是否被另一使用者設備40(包含其他使用者設備)鎖定或指定編輯之目前配方檔RF被另一使用者設備40(包含其他使用者設備)使用中,以及配方描述資料庫123是否被另一使用者設備40(包含其他使用者設備)鎖定或配方規則描述檔RRDF是否正在被另一使用者設備40(包含其他使用者設備)編輯,若是,則資料庫121與配方描述資料庫123被鎖定,資料處理單元11判斷使用者設備30不能執行回溯模式,故進行步驟S36,拒絕使用者設備30,並通知使用者設備30。因此,資料處理單元11傳輸一拒絕回溯命令C5至使用者設備30並通知使用者設備30拒絕執行回溯命令C1。反之,若資料處理單元11判斷資料庫121與配方描述資料庫123並未被另一使用者設備40(包含其他使用者設備)控制中,進行步驟S34,判斷是否具有權限,資料處理單元11若判斷使用者設備30不具有權限進行回溯,進行步驟S36,拒絕使用者設備30,並通知使用者設備30,因此,資料處理單元11傳輸一拒絕命令C3至使用者設備30並通知使用者設備30。詳細而言,資料處理單元11判斷是否具有權限之步驟S34可包括步驟S341至步驟S345,請參閱圖8,進行步驟S341,判斷是否能登入,以圖1為例,資料處理單元11係載入關於使用者設備30之使用者的帳號密碼,並檢查使用者的帳號密碼是否正確,接著資料處理單元11檢查是否該使用者的帳號密碼是否有重複登入,亦即同一使用者的帳號密碼由使用者設備30登入以外,檢查是否有其他使用者設備以同一使用者的帳號密碼登入。若檢查後使用者的帳號密碼不正確,或者使用者的帳號密碼有重複登入,則資料處理單元11判斷使用者設備30不能登入,進行步驟S345,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30以通知使用者設備30。若步驟S341判斷為是,使用者設備30能登入,進行步驟S342,判斷配方描述資料庫123中配方規則描述檔RRDF是否被鎖定,以圖1為例,資料處理單元11判斷配方描述資料庫123中配方規則描述檔RRDF是否被鎖定,所述鎖定係指配方描述資料庫123中配方規則描述檔RRDF是否被另一使用者設備40(包含其他使用者設備)控制使用,若是,進行步驟S345,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30。在一實施例中,資料處理單元11進一步判斷另一使用者設備40鎖定配方規則描述檔RRDF是否逾時,若否,資料處理單元11持續供另一使用者設備40鎖定配方規則描述檔RRDF以進行編輯;反之,若另一使用者設備40鎖定配方規則描述檔RRDF已逾時而超過一特定時間,資料處理單元11傳輸拒絕命令C3並通知使用者設備30與另一使用者設備40已逾時。於步驟S342中,若資料處理單元11判斷配方描述資料庫123中配方規則描述檔RRDF並未被鎖定,接著進行步驟S343,資料處理單元11取得自配方描述資料庫123中的配方規則描述檔RRDF。接著,進行步驟S344,檢視配方規則描述檔RRDF是否能被執行,若否,進行步驟S345,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30。詳細而言,步驟S344可包括步驟S42至步驟S46,請參閱圖9,進行步驟S42,判斷使用者設備30是否有權限能編輯配方規則描述檔RRDF。以圖1為例,資料處理單元11依據編輯權限條件來判斷使用者設備30是否有權限能編輯配方規則描述檔RRDF,若判斷為否,進行步驟S46,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30不能編輯配方規則描述檔RRDF;反之,若判斷為是,使用者設備30有權限能編輯配方規則描述檔RRDF,並進行步驟S44,檢視是否能供使用者設備30編輯配方規則描述檔RRDF。以圖1為例,資料處理單元11依據控制條件與通訊條件來判斷是否能供使用者設備30編輯配方規則描述檔RRDF,若判斷為否,進行步驟S46,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30不可編輯配方規則描述檔RRDF;反之,若判斷為是,目前可供使用者設備30編輯配方規則描述檔RRDF。Please refer to FIG. 3 again. After step S11, the user equipment 30 is connected to the data processing unit 11, and then, the user equipment 30 transmits a command C to the data processing unit 11 according to user requirements. The command C is, for example, a Backtrack command C1 or an edit command C2. In this embodiment, the user equipment 30 transmits the traceback command C1 to the data processing unit 11, and the data processing unit 11 receives the traceback command C1 of the user equipment 30 (step S12). Step S12 may include the following steps S121 to S129B, Referring to FIG. 6, in step S121, the data processing unit 11 determines whether a traceback mode can be executed, that is, after receiving the traceback command C1 of the user equipment 30, the data processing unit 11 determines whether the user equipment 30 can execute the traceback mode, if not At step S129, the user equipment 30 is rejected and the user equipment 30 is notified. In detail, step S121 may include the following steps S32 to S36. Please refer to FIG. 7 to proceed to step S32. The data processing unit 11 determines whether the database 121 and the recipe description database 123 are locked, that is, the data processing unit 11 checks Whether the database 121 is locked by another user equipment 40 (including other user equipment) or designated to edit the current recipe file RF is in use by another user equipment 40 (including other user equipment), and the recipe description database 123 Whether it is locked by another user equipment 40 (including other user equipment) or the recipe rule description file RRDF is being edited by another user equipment 40 (including other user equipment), and if so, the database 121 and the recipe description data The library 123 is locked, and the data processing unit 11 determines that the user equipment 30 cannot execute the backtracking mode, so proceeds to step S36, rejects the user equipment 30, and notifies the user equipment 30. Therefore, the data processing unit 11 transmits a rejection traceback command C5 to the user equipment 30 and notifies the user equipment 30 to refuse to execute the traceback command C1. On the contrary, if the data processing unit 11 determines that the database 121 and the recipe description database 123 are not being controlled by another user equipment 40 (including other user equipment), step S34 is performed to determine whether it has authority, and if the data processing unit 11 It is determined that the user equipment 30 does not have the authority to perform backtracking, and step S36 is performed to reject the user equipment 30 and notify the user equipment 30. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 and informs the user equipment 30 . In detail, the step S34 for the data processing unit 11 to determine whether it has authority may include steps S341 to S345. Please refer to FIG. 8 to proceed to step S341 to determine whether it is possible to log in. Taking FIG. 1 as an example, the data processing unit 11 is loaded Regarding the user account password of the user device 30, and check whether the user account password is correct, then the data processing unit 11 checks whether the user account password of the user has repeated login, that is, the account password of the same user is used by In addition to the login of the user device 30, it is checked whether other user devices log in with the same user account password. If the user's account password is incorrect after the check, or the user's account password is repeatedly logged in, the data processing unit 11 determines that the user device 30 cannot log in, proceeds to step S345, rejects the user device 30's login, and notifies the user device 30. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 to notify the user equipment 30. If it is determined in step S341 that the user device 30 can log in, proceed to step S342 to determine whether the recipe rule description file RRDF in the recipe description database 123 is locked. Taking FIG. 1 as an example, the data processing unit 11 determines the recipe description database 123 Whether the RRDF in the recipe rule description file is locked, the locking refers to whether the RRDF in the recipe description database 123 is controlled and used by another user device 40 (including other user devices), and if so, proceed to step S345, The user equipment 30 is refused to log in, and the user equipment 30 is notified. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 and notifies the user equipment 30. In an embodiment, the data processing unit 11 further determines whether another user equipment 40 locks the recipe rule description file RRDF overtime. If not, the data processing unit 11 continues to provide another user equipment 40 to lock the recipe rule description file RRDF to Edit; conversely, if another user equipment 40 locks the recipe rule description file RRDF has expired for more than a specific time, the data processing unit 11 transmits a rejection command C3 and informs the user equipment 30 and another user equipment 40 that the time has expired Time. In step S342, if the data processing unit 11 determines that the recipe rule description file RRDF in the recipe description database 123 is not locked, and then proceeds to step S343, the data processing unit 11 obtains the recipe rule description file RRDF from the recipe description database 123 . Next, proceed to step S344 to check whether the recipe rule description file RRDF can be executed. If not, proceed to step S345 to refuse the user device 30 to log in and notify the user device 30. Therefore, the data processing unit 11 transmits a rejection command C3 to use The user device 30 and notify the user device 30. In detail, step S344 may include steps S42 to S46. Please refer to FIG. 9 to proceed to step S42 to determine whether the user device 30 has permission to edit the recipe rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 determines whether the user device 30 has permission to edit the recipe rule description file RRDF according to the editing permission condition. If the determination is negative, step S46 is performed, the user device 30 is denied login, and the user is notified of the use Device 30, therefore, the data processing unit 11 transmits a rejection command C3 to the user device 30 and informs the user device 30 that the recipe rule description file RRDF cannot be edited; otherwise, if it is judged as yes, the user device 30 has the authority to edit the recipe rule Describe the RRDF file and proceed to step S44 to check whether the user equipment 30 can edit the recipe rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 judges whether the user equipment 30 can edit the recipe rule description file RRDF according to the control conditions and the communication conditions. If the judgment is no, proceed to step S46, reject the user equipment 30 from logging in, and notify The user equipment 30, therefore, the data processing unit 11 transmits a refusal command C3 to the user equipment 30 and informs the user equipment 30 that the recipe rule description file RRDF cannot be edited; otherwise, if the judgment is yes, the user equipment 30 is currently available for editing recipes Rule description file RRDF.

請復參閱圖6,於步驟S121判斷使用者設備30能執行回溯模式之後,進行步驟S122,進入一鎖定狀態,以限制僅供使用者設備30控制一資料庫121與一配方描述資料庫123,其中資料庫121中一目前配方檔RF包含一主版本版次資料VM與複數個次配方資料SR,各次配方資料SR包含次配方項目SRI、次配方版本資料SRV與次配方數值SRN,配方描述資料庫123包含一配方規則描述檔RRDF,依據配方規則描述檔RRDF執行目前配方檔RF。以圖1為例,資料處理單元11傳輸鎖定命令C41至使用者設備30,因此,此時另一使用者設備40或其他使用者設備即便連線至資料處理單元11,由於資料庫121與配方描述資料庫123已被使用者設備30控制而進入鎖定狀態,此時資料處理單元11傳輸拒絕命令C3並通知另一使用者設備40或其他使用者設備已有使用者設備30鎖定資料庫121與配方描述資料庫123,使得另一使用者設備40仍無法控制資料庫121與配方描述資料庫123。接著,進行步驟S123,存取回溯前之目前配方檔RF至一歷史資料庫125,因此,資料處理單元11係將回溯前之目前配方檔RF存取至歷史資料庫125。接著,進行步驟S124,依據一目標主版本資料TVM之複數個目標次配方項目TSRI與複數個目標次配方數值TSRN,復原目前配方檔RF中相對應之次配方項目SRI與次配方數值SRN。舉例而言,圖2A中的次配方項目SRI對應至圖2C中的目標次配方項目TSRI,故將圖2A中相對應次配方項目SRI之次配方數值SRN復原至圖2C中的目標次配方數值TSRN,即圖2D圖之經回溯後之目前配方檔RFB。此外,由於此時目前配方檔RF需被回溯,資料處理單元11係可依據如圖5所示,判斷製程單元13中的原始描述檔與配方描述資料庫123中配方規則描述檔RRDF是否匹配,判斷為匹配,接著,資料處理單元11判斷目前配方檔RF中的每一個次配方資料SR的編輯資料是否符合格式及配方規則描述檔RRDF。Please refer to FIG. 6 again, after determining in step S121 that the user equipment 30 can perform the backtracking mode, proceed to step S122 to enter a locked state to restrict the user equipment 30 to control only one database 121 and one recipe description database 123, Among them, a current recipe file RF in the database 121 includes a major version and minor data VM and a plurality of minor recipe data SR, each minor recipe data SR includes minor recipe items SRI, minor recipe version data SRV and minor recipe values SRN, recipe description The database 123 includes a recipe rule description file RRDF, and the current recipe file RF is executed according to the recipe rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 transmits the lock command C41 to the user equipment 30. Therefore, at this time, even if another user equipment 40 or other user equipment is connected to the data processing unit 11, the database 121 and the recipe The description database 123 has been controlled by the user equipment 30 to enter the locked state. At this time, the data processing unit 11 transmits a rejection command C3 and notifies another user equipment 40 or other user equipment that the user equipment 30 has locked the database 121 and The recipe description database 123 makes it impossible for another user equipment 40 to control the database 121 and the recipe description database 123. Next, step S123 is performed to access the current recipe file RF before backtracking to a historical database 125. Therefore, the data processing unit 11 accesses the current recipe file RF before backtracking to the historical database 125. Next, step S124 is performed, based on the plurality of target sub-recipe items TSRI and the plurality of target sub-recipe values TSRN of a target master version data TVM, to restore the corresponding sub-recipe items SRI and sub-recipe values SRN in the current recipe file RF. For example, the sub-recipe item SRI in FIG. 2A corresponds to the target sub-recipe item TSRI in FIG. 2C, so the sub-recipe value SRN of the corresponding sub-recipe item SRI in FIG. 2A is restored to the target sub-recipe value in FIG. 2C TSRN, that is, the current recipe file RFB after the traceback in Figure 2D. In addition, since the current recipe file RF needs to be traced back at this time, the data processing unit 11 can determine whether the original description file in the process unit 13 matches the recipe rule description file RRDF in the recipe description database 123 according to FIG. 5, It is judged as a match, and then, the data processing unit 11 judges whether the editing data of each secondary recipe data SR in the current recipe file RF conforms to the format and the recipe rule description file RRDF.

進行上述步驟S124之後,接著進行步驟S125,記錄經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB。接著,而後進行步驟S126,存取經回溯後之目前配方檔RFB至資料庫121。以圖1為例,資料處理單元11係依據使用者設備30傳輸之回溯命令C1,進一步判斷回溯模式,回溯模式可為一回復主版本模式或者一回復特定次配方模式。After the above step S124 is performed, step S125 is next performed to record the major version version data VMB and each minor recipe version data SRVB in the current recipe file RFB after the traceback. Next, step S126 is performed to access the current recipe file RFB after traceback to the database 121. Taking FIG. 1 as an example, the data processing unit 11 further determines the backtracking mode according to the backtracking command C1 transmitted by the user equipment 30. The backtracking mode may be a reply to the main version mode or a reply to the specific minor recipe mode.

在一實施例中,回溯模式為回復主版本模式,所述主版本模式係指將目前配方檔RF復原至一特定版本之配方檔,特定版本之配方檔例如為目標配方檔TRF,依據目標配方檔TRF中複數個目標次配方項目TSRI與複數個目標次配方數值TSRV,回溯模組127復原目前配方檔RF中全部之次配方項目SRI與相對應之次配方數值SRN。舉例而言,回溯前之目前配方檔RF中的主版本版次資料VM為10,某一次配方版本資料SRV為6,另一次配方版本資料SRV為7,欲將目前配方檔RF回復至主版本版次為8的狀況,若目標配方檔TRF之目標主版本資料TVM為8,故回溯模組127依據目標配方檔TRF中複數個目標次配方項目TSRI與複數個目標次配方數值TSRV,對應回復目前配方檔RF中全部之次配方項目SRI與相對應之次配方數值SRN,接著,資料處理單元11存取經回溯後之目前配方檔RFB至資料庫121。在一實施例中,圖2C中每一個目標次配方項目TSRI對應至圖2A中次配方項目SRI,並將圖2A中相對應次配方項目SRI之次配方數值SRN復原至圖2C中的目標次配方數值TSRN,即圖2D圖之經回溯後之目前配方檔RFB。此外,資料處理單元11記錄經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,接著,資料處理單元11存取經回溯後之目前配方檔RFB(如圖2D所示)至資料庫121。需說明的是,在此資料處理單元11處理經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,並非是將經回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB記錄為目標配方檔TRF中的目標主版本資料TVM與各目標次配方資料TSR,而是更新回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB,因此,圖2A所示之回溯前之目前配方檔RF中的主版本版次資料VM為10,某一次配方版本資料SRV為6,另一次配方版本資料SRV為7,圖2D所示之回溯後之目前配方檔RFB的主版本版次資料VMB為11,某一次配方版本資料SRV為7,另一次配方版本資料SRV為8,在此紀錄版本係以遞增為例,在其他實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。另需說明的是,由於回溯前之目前配方檔RF中次配方版本資料SRV的數量可能會與所欲回復之目標配方檔TRF中的目標次配方項目TSRI之數量不同,故資料處理單元11依據目前配方檔RF,比對歷史資料庫125中的目標配方檔TRF是否匹配,判斷每個次配方項目SRI是否能對應到相應之目標次配方項目TSRI,若有無法匹配對應之次配方項目SRI,在回溯步驟中保留目前配方檔RF中次配方項目SRI與對應之配方數值SRN,若有能匹配對應之次配方項目SRI,在回溯步驟中將能匹配對應之次配方項目SRI對應並取代為目標次配方項目TSRI,與此同時,亦將次配方項目SRI相對應之次配方數值SRV取代復原至目標次配方數值TSRV。In one embodiment, the backtracking mode is a master version recovery mode. The master version mode refers to restoring the current recipe file RF to a specific version of the recipe file. The specific version of the recipe file is, for example, the target recipe file TRF, based on the target recipe In the file TRF, a plurality of target sub-recipe items TSRI and a plurality of target sub-recipe values TSRV, the traceback module 127 restores all the sub-recipe items SRI and the corresponding sub-recipe values SRN in the current recipe file RF. For example, the main version version data VM in the current recipe file RF before the traceback is 10, a certain recipe version data SRV is 6, another recipe version data SRV is 7, and you want to restore the current recipe file RF to the main version If the version number is 8, if the target master version data TVM of the target recipe file TRF is 8, the traceback module 127 responds correspondingly to the multiple target sub-recipe items TSRI and the multiple target sub-recipe values TSRV in the target recipe file TRF All the sub-recipe items SRI in the current recipe file RF and the corresponding sub-recipe values SRN, and then, the data processing unit 11 accesses the current recipe file RFB after traceback to the database 121. In one embodiment, each target sub-recipe item TSRI in FIG. 2C corresponds to the sub-recipe item SRI in FIG. 2A, and the sub-recipe value SRN of the corresponding sub-recipe item SRI in FIG. 2A is restored to the target time in FIG. 2C The recipe value TSRN is the current recipe file RFB after the backtracking in Figure 2D. In addition, the data processing unit 11 records the major version version data VMB and each minor recipe version data SRVB in the current recipe file RFB after the traceback, and then, the data processing unit 11 accesses the traceback current recipe file RFB (as shown in FIG. 2D (Shown) to the database 121. It should be noted that the data processing unit 11 processes the major version version data VMB and each minor recipe version data SRVB in the current recipe file RFB after the traceback, not the major version in the current recipe file RFB after the traceback The version data VMB and each recipe version data SRVB are recorded as the target master version data TVM and each target sub recipe data TSR in the target recipe file TRF, but the main version version data VMB in the current recipe file RFB after the update is updated And the recipe data SRVB of each time, therefore, the main version data VM in the current recipe file RF before the traceback shown in FIG. 2A is 10, one recipe data SRV is 6, and another recipe data SRV is 7. , The main version version data VMB of the current recipe file RFB after traceback shown in FIG. 2D is 11, a certain recipe version data SRV is 7, and another recipe version data SRV is 8. In this record version, increment is taken as an example In other embodiments, the record version can be set by other encoding methods or according to requirements. It should also be noted that since the number of secondary recipe version data SRV in the current recipe file RF before the traceback may be different from the number of target secondary recipe items TSRI in the target recipe file TRF to be restored, the data processing unit 11 is based on The current recipe file RF is compared with the target recipe file TRF in the historical database 125 to determine whether each sub-recipe item SRI can correspond to the corresponding target sub-recipe item TSRI. If there is no match for the corresponding sub-recipe item SRI, In the backtracking step, the current secondary recipe item SRI and the corresponding recipe value SRN in the current recipe file RF are retained. If there is a match for the corresponding secondary recipe item SRI, in the backtracking step, the corresponding secondary recipe item SRI can be matched and replaced as the target At the same time, the sub-recipe item TSRI also replaces the sub-recipe value SRV corresponding to the sub-recipe item SRI to the target sub-recipe value TSRV.

在另一實施例中,回溯模式為回復特定次配方模式,所述特定次配方模式係指將目前配方檔RF中某一特定或某幾個次配方項目SRI復原至目標配方檔TRF中相對應之目標次配方項目TSRI。舉例而言,回溯前之目前配方檔RF中的主版本版次資料VM為10,某一特定次配方版本資料SRV為6,另一個次配方版本資料SRV為7,若將目前配方檔RF中某一特定之次配方項目SRI與相對應之次配方數值SRN復原至某一個次配方版本中相對應次配方項目與次配方數值,某一個次配方版本例如為目標主版本資料TVM,若目標配方檔TRF之目標主版本資料TVM為8,目標次配方版本資料TSRV為5,故回溯模組127依據目標主版本資料TVM,將目標次配方項目TSRI與目標次配方數值TSRV,對應復原目前配方檔RF中的次配方項目SRI與相對應之次配方數值SRN。此外,資料處理單元11記錄經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,接著,資料處理單元11存取經回溯後之目前配方檔RFB(如圖2D所示)至資料庫121。需說明的是,在此資料處理單元11處理經回溯後之目前配方檔RFB中主版本版次資料VMB與各次配方版本資料SRVB,並非是將經回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB記錄為目標配方檔TRF中的目標主版本資料TVM與各目標次配方資料TSR,而是更新回溯後之目前配方檔RFB中的主版本版次資料VMB與各次配方版本資料SRVB,並保留未經回溯之次配方版本資料SRVB,因此,在一實施例中,圖2A所示之回溯前之目前配方檔RF中的主版本版次資料VM為10,某一特定次配方項目SRI對應至某一特定次配方版本資料SRV為6,另一個特定次配方項目SRI對應至另一個次配方版本資料SRV為7,進行特定次配方模式,將目前配方檔RF中某一特定次配方項目SRI復原至目標配方檔TRF中相對應之目標次配方項目TSRI,而不需回溯另一個特定次配方項目SRI,圖2D所示之回溯後之目前配方檔RFB的主版本版次資料VMB為11,回溯後之某一特定次配方項目SRI對應至某一特定次配方版本資料SRVB為7,即遞增經回溯後之各次配方版本資料,另一個特定次配方項目SRI由於未經回溯故另一個次配方版本資料SRV仍然維持為7,在此紀錄版本係以遞增為例,在其他實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。另需說明的是,由於回溯前之目前配方檔RF中次配方版本資料SRV的數量可能會與所欲回復之目標配方檔TRF中的目標次配方項目TSRI之數量不同,故資料處理單元11依據目前配方檔RF,比對歷史資料庫125中的目標配方檔TRF是否匹配,判斷每個次配方項目SRI是否能對應到相應之目標次配方項目TSRI,若有無法匹配對應之次配方項目SRI,在回溯步驟中保留目前配方檔RF中次配方項目SRI與對應之配方數值SRN,若有能匹配對應之次配方項目SRI,在回溯步驟中將能匹配對應之次配方項目SRI對應並取代為目標次配方項目TSRI,與此同時,亦將次配方項目SRI相對應之次配方數值SRV取代復原至目標次配方數值TSRV。In another embodiment, the backtracking mode is to restore a specific sub-recipe mode. The specific sub-recipe mode refers to restoring a specific or several sub-recipe items SRI in the current recipe file RF to the target recipe file TRF. The target sub-recipe project TSRI. For example, the major version version data VM in the current recipe file RF before the traceback is 10, the SRV of a specific minor recipe version data is 6, and the other minor recipe version data SRV is 7. If the current recipe file RF is A specific sub-recipe item SRI and corresponding sub-recipe value SRN are restored to a corresponding sub-recipe item and sub-recipe value in a sub-recipe version. A sub-recipe version is, for example, the target master version data TVM, if the target formula The target major version data TVM of the file TRF is 8, and the target minor recipe version data TSRV is 5. Therefore, the traceback module 127 restores the current recipe file by matching the target minor recipe item TSRI and the target minor recipe value TSRV according to the target major version data TVM The secondary recipe item SRI in RF corresponds to the corresponding secondary recipe value SRN. In addition, the data processing unit 11 records the major version version data VMB and each minor recipe version data SRVB in the current recipe file RFB after the traceback, and then, the data processing unit 11 accesses the traceback current recipe file RFB (as shown in FIG. 2D (Shown) to the database 121. It should be noted that the data processing unit 11 processes the major version version data VMB and each minor recipe version data SRVB in the current recipe file RFB after the traceback, not the major version in the current recipe file RFB after the traceback The version data VMB and each recipe version data SRVB are recorded as the target master version data TVM and each target sub recipe data TSR in the target recipe file TRF, but the main version version data VMB in the current recipe file RFB after the update is updated SRVB with each recipe version data, and retain the SRVB of the sub-recipe version data without backtracking. Therefore, in one embodiment, the main version version data VM in the current recipe file RF before backtracking shown in FIG. 2A is 10 , A specific sub-recipe item SRI corresponds to a specific sub-recipe version data SRV of 6, another specific sub-recipe item SRI corresponds to another sub-recipe version data SRV of 7, to perform a specific sub-recipe mode, copy the current recipe file A specific sub-recipe item SRI in RF is restored to the corresponding target sub-recipe item TSRI in the target recipe file TRF without backtracking another specific sub-recipe item SRI. The current formula file RFB after the traceback shown in FIG. 2D The main version version data VMB is 11, and a specific secondary recipe item SRI corresponding to a specific sub-recipe version data SRVB is 7, that is, incrementing each retrospective recipe version data after retrospective, another specific sub-recipe item Since the SRI has not been backtracked, the SRV of another sub-recipe version is still maintained at 7. In this record version, the incremental version is taken as an example. In other embodiments, the record version can be set by other encoding methods or according to requirements. It should also be noted that since the number of secondary recipe version data SRV in the current recipe file RF before the traceback may be different from the number of target secondary recipe items TSRI in the target recipe file TRF to be restored, the data processing unit 11 is based on The current recipe file RF is compared with the target recipe file TRF in the historical database 125 to determine whether each sub-recipe item SRI can correspond to the corresponding target sub-recipe item TSRI. If there is no match for the corresponding sub-recipe item SRI, In the backtracking step, the current secondary recipe item SRI and the corresponding recipe value SRN in the current recipe file RF are retained. If there is a match for the corresponding secondary recipe item SRI, in the backtracking step, the corresponding secondary recipe item SRI can be matched and replaced as the target At the same time, the sub-recipe item TSRI also replaces the sub-recipe value SRV corresponding to the sub-recipe item SRI to the target sub-recipe value TSRV.

請繼續參閱圖6,於步驟S126存取經回溯後之目前配方檔RFB至資料庫121之後,進行步驟S127,判斷是否有另一使用者設備40之連線請求,以圖1為例,資料處理單元11判斷是否有另一使用者設備40(或其他使用者設備)之連線請求,若否,進行步驟S129B,解除鎖定狀態,因此,資料處理單元11傳輸解除鎖定命令C42至使用者設備30,換言之,解除資料庫121與配方描述資料庫123之鎖定狀態,使得資料庫121與配方描述資料庫123可受另一使用者設備40或其他使用者設備控制;反之,若資料處理單元11判斷有另一使用者設備40(或其他使用者設備)之連線請求,進行步驟S128,通知另一使用者設備40,並更新經回溯後之目前配方檔RFB,因此,資料處理單元11傳輸一更新命令C7至另一使用者設備40,以更新經回溯後之目前配方檔RFB可供另一使用者設備40使用。Please continue to refer to FIG. 6, after accessing the backtracked current recipe file RFB to the database 121 in step S126, proceed to step S127 to determine whether there is another user device 40 connection request. Taking FIG. 1 as an example, the data The processing unit 11 judges whether there is a connection request of another user equipment 40 (or other user equipment). If not, proceed to step S129B to unlock the state. Therefore, the data processing unit 11 transmits an unlock command C42 to the user equipment 30. In other words, unlock the database 121 and the recipe description database 123 so that the database 121 and the recipe description database 123 can be controlled by another user equipment 40 or other user equipment; otherwise, if the data processing unit 11 It is judged that there is a connection request of another user equipment 40 (or other user equipment), step S128 is performed, the other user equipment 40 is notified, and the current recipe file RFB after the traceback is updated, so the data processing unit 11 transmits An update command C7 is sent to another user equipment 40 to update the current recipe file RFB after traceback for use by another user equipment 40.

請復參閱圖3,於步驟S11之後,使用者設備30連線至資料處理單元11,接著,使用者設備30依據使用者需求而傳輸命令C至資料處理單元11。在本實施例中,使用者設備30係傳輸編輯命令C2至資料處理單元11,資料處理單元11接收使用者設備之編輯命令C2(步驟S13),步驟S13可包括以下步驟S131至步驟S139,請參閱圖10,進行步驟S131,判斷是否能執行一編輯模式,即資料處理單元11接收使用者設備30之編輯命令C2後,判斷使用者設備30是否能執行編輯模式,若否,進行步驟S138,拒絕使用者設備30並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30以通知使用者設備30。Please refer to FIG. 3 again. After step S11, the user equipment 30 is connected to the data processing unit 11, and then, the user equipment 30 transmits a command C to the data processing unit 11 according to user requirements. In this embodiment, the user equipment 30 transmits the editing command C2 to the data processing unit 11, and the data processing unit 11 receives the editing command C2 of the user equipment (step S13). Step S13 may include the following steps S131 to S139, please Referring to FIG. 10, step S131 is performed to determine whether an editing mode can be performed. That is, after the data processing unit 11 receives the editing command C2 of the user equipment 30, it is determined whether the user equipment 30 can perform the editing mode. If not, proceed to step S138, The user equipment 30 is rejected and the user equipment 30 is notified. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 to notify the user equipment 30.

詳細而言,步驟S131可包括以下步驟S51~步驟S55,請參閱圖11,進行步驟S51,判斷是否能登入。以圖1為例,資料處理單元11係載入關於使用者設備30之使用者的帳號密碼,並檢查使用者的帳號密碼是否正確,接著資料處理單元11檢查是否該使用者的帳號密碼是否有重複登入,亦即同一使用者的帳號密碼由使用者設備30登入以外,檢查是否有其他使用者設備以同一使用者的帳號密碼登入。若檢查後使用者的帳號密碼不正確,或者使用者的帳號密碼有重複登入,則資料處理單元11判斷使用者設備30不能登入,進行步驟S55,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30以通知使用者設備30。In detail, step S131 may include the following steps S51 to S55. Please refer to FIG. 11 to perform step S51 to determine whether login is possible. Taking FIG. 1 as an example, the data processing unit 11 loads the account password of the user about the user device 30, and checks whether the user's account password is correct, and then the data processing unit 11 checks whether the user's account password is present Repeated login, that is, except that the account password of the same user is logged in by the user device 30, check whether any other user device logs in with the account password of the same user. If the user's account password is incorrect after the check, or the user's account password is repeatedly logged in, the data processing unit 11 determines that the user device 30 cannot log in, proceeds to step S55, rejects the user device 30's login, and notifies the user device 30. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 to notify the user equipment 30.

若步驟S51判斷為是,使用者設備30能登入,進行步驟S52,判斷配方描述資料庫123中配方規則描述檔RRDF是否被鎖定。以圖1為例,資料處理單元11判斷配方描述資料庫123中配方規則描述檔RRDF是否被鎖定,所述鎖定係指配方描述資料庫123中配方規則描述檔RRDF是否被另一使用者設備40(包含其他使用者設備)控制使用,若是,進行步驟S55,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30。在一實施例中,資料處理單元11進一步判斷另一使用者設備40鎖定配方規則描述檔RRDF是否逾時,若否,資料處理單元11持續供另一使用者設備40鎖定配方規則描述檔RRDF以進行編輯;反之,若另一使用者設備40鎖定配方規則描述檔RRDF已逾時而超過一特定時間,資料處理單元11傳輸拒絕命令C3並通知使用者設備30與另一使用者設備40已逾時。If the determination in step S51 is yes, the user equipment 30 can log in, and proceed to step S52 to determine whether the recipe rule description file RRDF in the recipe description database 123 is locked. Taking FIG. 1 as an example, the data processing unit 11 determines whether the recipe rule description file RRDF in the recipe description database 123 is locked. The lock refers to whether the recipe rule description file RRDF in the recipe description database 123 is locked by another user device 40 (Including other user equipment) Control the use, if so, proceed to step S55, reject the user equipment 30 login, and notify the user equipment 30, therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 and notify the user equipment 30. In an embodiment, the data processing unit 11 further determines whether another user equipment 40 locks the recipe rule description file RRDF overtime. If not, the data processing unit 11 continues to provide another user equipment 40 to lock the recipe rule description file RRDF to Edit; conversely, if another user equipment 40 locks the recipe rule description file RRDF has expired for more than a specific time, the data processing unit 11 transmits a rejection command C3 and informs the user equipment 30 and another user equipment 40 that the time has expired Time.

於步驟S52中,若資料處理單元11判斷配方描述資料庫123中配方規則描述檔RRDF並未被鎖定,接著進行步驟S53,資料處理單元11自配方描述資料庫123中取得配方規則描述檔RRDF。接著,進行步驟S54,檢視配方規則描述檔RRDF是否能被執行,若否,進行步驟S55,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30。In step S52, if the data processing unit 11 determines that the recipe rule description file RRDF in the recipe description database 123 is not locked, and then proceeds to step S53, the data processing unit 11 obtains the recipe rule description file RRDF from the recipe description database 123. Next, proceed to step S54 to check whether the recipe rule description file RRDF can be executed. If not, proceed to step S55 to refuse the user device 30 to log in and notify the user device 30. Therefore, the data processing unit 11 transmits a rejection command C3 to use The user device 30 and notify the user device 30.

詳細而言,步驟S54可包括步驟S542至步驟S546,請參閱圖12,進行步驟S542,判斷使用者設備30是否有權限能編輯配方規則描述檔RRDF。以圖1為例,資料處理單元11依據編輯權限條件來判斷使用者設備30是否有權限能編輯配方規則描述檔RRDF,其中編輯權限條件係指使用者設備30可否針對次配方項目SRI進行讀取(Read)、寫入(Write)、僅可讀取(Read Only)或是否可見(Visible or Invisible)之修改權限,若判斷為否,進行步驟S546,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30不能編輯配方規則描述檔RRDF;反之,若判斷為是,使用者設備30有權限能編輯配方規則描述檔RRDF,並進行步驟S544,檢視是否能供使用者設備30編輯配方規則描述檔RRDF。以圖1為例,資料處理單元11依據控制條件與通訊條件來判斷是否能供使用者設備30編輯配方規則描述檔RRDF,其中控制條件例如係製程配方監控系統10運作時可允許編輯;通訊條件係允許特定條件而可連線,若判斷為否,進行步驟S546,拒絕使用者設備30登入,並通知使用者設備30,因此,資料處理單元11傳輸拒絕命令C3至使用者設備30並通知使用者設備30不可編輯配方規則描述檔RRDF;反之,若判斷為是,目前可供使用者設備30編輯配方規則描述檔RRDF。In detail, step S54 may include steps S542 to S546. Please refer to FIG. 12 to perform step S542 to determine whether the user device 30 has the authority to edit the recipe rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 determines whether the user equipment 30 has the authority to edit the recipe rule description file RRDF according to the editing authority condition, where the editing authority condition refers to whether the user equipment 30 can read the secondary recipe item SRI (Read), write (Write), read only (Read Only) or visible (Visible or Invisible) modification authority, if the judgment is no, proceed to step S546, reject the user device 30 login, and notify the user The device 30, therefore, the data processing unit 11 transmits a rejection command C3 to the user device 30 and informs the user device 30 that the recipe rule description file RRDF cannot be edited; otherwise, if the judgment is yes, the user device 30 has the authority to edit the recipe rule description File RRDF, and proceed to step S544 to check whether the user equipment 30 can edit the recipe rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 determines whether the user equipment 30 can edit the recipe rule description file RRDF according to the control conditions and communication conditions, where the control conditions such as the process recipe monitoring system 10 are allowed to be edited during operation; the communication conditions It is allowed to connect under certain conditions. If the judgment is no, go to step S546, refuse to log in the user equipment 30, and notify the user equipment 30. Therefore, the data processing unit 11 transmits a rejection command C3 to the user equipment 30 and notify the use The user device 30 cannot edit the recipe rule description file RRDF; on the contrary, if the judgment is yes, the user device 30 is currently available for editing the recipe rule description file RRDF.

請復參閱圖10,於步驟S131判斷使用者設備30能執行編輯模式之後,進行步驟S132,判斷是否能供使用者設備30控制資料庫121與配方描述資料庫123。以圖1為例,資料處理單元11判斷資料庫121與配方描述資料庫123是否被另一使用者設備40控制中,亦即資料處理單元11檢查資料庫121是否被鎖定或指定編輯之目前配方檔RF被使用中,或者,資料處理單元11檢查配方描述資料庫123是否被鎖定或配方規則描述檔RRDF是否正在編輯,若判斷能供使用者設備30控制資料庫121與配方描述資料庫123,資料處理單元11對配方資料單元12進入鎖定狀態,資料庫121與配方描述資料庫123被鎖定,以限制僅供使用者設備30控制資料庫121與配方描述資料庫123;反之,若資料處理單元11判斷使用者設備30不能供使用者設備30控制資料庫121與配方描述資料庫123,進行步驟S139,通知使用者設備30,以及復原編輯前之目前配方檔RF至使用者設備30。因此,資料處理單元11傳輸一拒絕編輯命令C6至使用者設備30並通知使用者設備30拒絕執行編輯命令C2,且使用者設備30若在編輯目前配方檔RF之狀況下,資料處理單元11復原編輯前之目前配方檔RF至使用者設備30。Please refer to FIG. 10 again, after determining in step S131 that the user equipment 30 can execute the editing mode, proceed to step S132 to determine whether the user equipment 30 can be used to control the database 121 and the recipe description database 123. Taking FIG. 1 as an example, the data processing unit 11 determines whether the database 121 and the recipe description database 123 are being controlled by another user device 40, that is, the data processing unit 11 checks whether the database 121 is locked or specifies the current recipe for editing The file RF is in use, or the data processing unit 11 checks whether the recipe description database 123 is locked or whether the recipe rule description file RRDF is being edited, if it is determined that the user equipment 30 can control the database 121 and the recipe description database 123, The data processing unit 11 locks the recipe data unit 12 and the database 121 and the recipe description database 123 are locked to limit only the user device 30 to control the database 121 and the recipe description database 123; otherwise, if the data processing unit 11 It is judged that the user equipment 30 cannot be used by the user equipment 30 to control the database 121 and the recipe description database 123, and step S139 is performed to notify the user equipment 30 and restore the current recipe file RF before editing to the user equipment 30. Therefore, the data processing unit 11 transmits a refusal edit command C6 to the user equipment 30 and informs the user equipment 30 to refuse to execute the edit command C2, and if the user equipment 30 is editing the current recipe file RF, the data processing unit 11 recovers The current recipe file RF before editing is sent to the user equipment 30.

若資料處理單元11判斷資料庫121與配方描述資料庫123並未被另一使用者設備40(包含其他使用者設備)控制中,進行步驟S133,進入鎖定狀態,以限制僅供使用者設備30控制資料庫121與配方描述資料庫123。以圖1為例,資料處理單元11傳輸鎖定命令C41至使用者設備30,因此,此時另一使用者設備40或其他使用者設備即便連線至資料處理單元11,由於資料庫121與配方描述資料庫123已被使用者設備30控制而進入鎖定狀態,此時資料處理單元11傳輸拒絕命令C3並通知另一使用者設備40或其他使用者設備已有使用者設備30鎖定資料庫121與配方描述資料庫123,使得另一使用者設備40仍無法控制資料庫121與配方描述資料庫123。接著,進行步驟S134,提供目前配方檔RF以供使用者設備30編輯,編輯目前配方檔RF後進行步驟S135,存取經編輯後之目前配方檔RF至資料庫121。If the data processing unit 11 determines that the database 121 and the recipe description database 123 are not under the control of another user equipment 40 (including other user equipment), proceed to step S133 to enter the locked state to restrict access to only the user equipment 30 Control database 121 and recipe description database 123. Taking FIG. 1 as an example, the data processing unit 11 transmits the lock command C41 to the user equipment 30. Therefore, at this time, even if another user equipment 40 or other user equipment is connected to the data processing unit 11, the database 121 and the recipe The description database 123 has been controlled by the user equipment 30 to enter the locked state. At this time, the data processing unit 11 transmits a rejection command C3 and notifies another user equipment 40 or other user equipment that the user equipment 30 has locked the database 121 and The recipe description database 123 makes it impossible for another user equipment 40 to control the database 121 and the recipe description database 123. Next, proceed to step S134 to provide the current recipe file RF for editing by the user device 30. After editing the current recipe file RF, proceed to step S135 to access the edited current recipe file RF to the database 121.

詳細而言,步驟S134至步驟S135之間可包括步驟S61至步驟S68,請參閱圖13,進行步驟S61,寫入一編輯資料,編輯資料係可為一可擴展標記語言(Extensible markup language,XML)之設定檔。以圖1為例,使用者設備30寫入編輯資料並傳輸至資料處理單元11,資料處理單元11讀取使用者設備30寫入之編輯資料。在一實施例中,資料處理單元11進一步判斷使用者設備30鎖定資料庫121與配方描述資料庫123是否逾時,若否,資料處理單元11持續供使用者設備30鎖定資料庫121與配方描述資料庫123以進行編輯;反之,若使用者設備30鎖定資料庫121與配方描述資料庫123已逾時而超過一特定時間,資料處理單元11傳輸拒絕命令C3並通知使用者設備30與另一使用者設備40已逾時,並且解除鎖定狀態,因此,資料處理單元11傳輸解除鎖定命令C42至使用者設備30,換言之,解除資料庫121與配方描述資料庫123之鎖定狀態,使得資料庫121與配方描述資料庫123可受另一使用者設備40或其他使用者設備控制。In detail, step S134 to step S135 may include step S61 to step S68, please refer to FIG. 13, proceed to step S61, write an edited data, the edited data may be an Extensible Markup Language (XML ) Setting file. Taking FIG. 1 as an example, the user device 30 writes edit data and transmits it to the data processing unit 11, and the data processing unit 11 reads the edit data written by the user device 30. In an embodiment, the data processing unit 11 further determines whether the user equipment 30 locks the database 121 and the recipe description database 123 overtime. If not, the data processing unit 11 continues to provide the user equipment 30 to lock the database 121 and the recipe description Database 123 for editing; on the contrary, if the user equipment 30 locks the database 121 and the recipe description database 123 has expired for more than a specific time, the data processing unit 11 transmits a rejection command C3 and informs the user equipment 30 and another The user equipment 40 has timed out and is unlocked. Therefore, the data processing unit 11 transmits an unlock command C42 to the user equipment 30. In other words, the database 121 and the recipe description database 123 are unlocked, so that the database 121 The recipe description database 123 may be controlled by another user equipment 40 or other user equipment.

於步驟S61寫入編輯資料之後,接著,進行步驟S62,判斷編輯資料是否符合配方規則描述檔RRDF。以圖1為例,資料處理單元11係先判斷編輯資料之描述格式與設定條件(如上限值、下限值、預設值、編輯權限條件、控制條件、通訊條件與複合條件)是否正確與是否能被執行,若否,進行步驟S67,拒絕使用者設備30,並通知使用者設備30,因此,資料處理單元11傳輸一通知命令C8至使用者設備30顯示異常;反之,若編輯資料之描述格式與設定條件是正確與能被執行,進行步驟S63,比對編輯資料與目前配方檔RF是否一致。若資料處理單元11判斷編輯資料與目前配方檔RF是一致,進行步驟S68,資料處理單元11記錄目前配方檔RF中主版本版次資料VM與各次配方版本資料SRV至資料庫121,換言之,雖然該使用者設備30的編輯資料係與目前配方檔RF一致,但經由使用者設備30編輯,資料處理單元11仍會更新編輯後之目前配方檔RF中主版本版次資料VM與各次配方版本資料SRV。舉例而言,編輯前之目前配方檔RF中的主版本版次資料VM為10,次配方資料SR中的次配方版本資料SRV為6,編輯後之目前配方檔RF的主版本版次資料VM為11,次配方版本資料SRVB為7,在此紀錄版本係以遞增為例,在另一實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。After writing the editing data in step S61, next, proceed to step S62 to determine whether the editing data conforms to the recipe rule description file RRDF. Taking FIG. 1 as an example, the data processing unit 11 first determines whether the description format and setting conditions (such as upper limit value, lower limit value, preset value, editing authority condition, control condition, communication condition, and compound condition) of the edited data are correct. Whether it can be executed, if not, proceed to step S67, reject the user equipment 30, and notify the user equipment 30. Therefore, the data processing unit 11 transmits a notification command C8 to the user equipment 30 to display an abnormality; otherwise, if the data is edited The description format and setting conditions are correct and can be executed. Step S63 is performed to compare whether the edited data is consistent with the current recipe file RF. If the data processing unit 11 judges that the edited data is consistent with the current recipe file RF, step S68 is performed, and the data processing unit 11 records the major version version data VM and the respective recipe version data SRV in the current recipe file RF to the database 121, in other words, Although the editing data of the user equipment 30 is consistent with the current recipe file RF, the data processing unit 11 will still update the edited current recipe file RF after editing the user equipment 30, the main version version data VM and each recipe Version information SRV. For example, the major version version data VM in the current recipe file RF before editing is 10, the minor formula version data SRV in the minor recipe data SR is 6, and the major version version data VM in the current recipe file RF after editing It is 11, and the sub-recipe version data SRVB is 7. In this record version, the increment is taken as an example. In another embodiment, the record version can be set by other encoding methods or according to requirements.

若步驟S63中,資料處理單元11判斷編輯資料與目前配方檔RF是不一致,進行步驟S64,存取編輯前之目前配方檔RF至歷史資料庫125。因此,若編輯前之目前配方檔RF中的主版本版次資料VMB為10,次配方資料SR中的次配方版本資料SRV為7,資料處理單元11係將上述編輯前之目前配方檔RF存取至配方資料單元12之歷史資料庫125。If in step S63, the data processing unit 11 determines that the edited data is inconsistent with the current recipe file RF, proceeds to step S64 to access the current recipe file RF before editing to the historical database 125. Therefore, if the main version version data VMB in the current recipe file RF before editing is 10, and the sub-recipe version data SRV in the sub-recipe data SR is 7, the data processing unit 11 saves the above-mentioned current formula file RF before editing Get to the historical database 125 of the recipe data unit 12.

接著,進行步驟S65,更新有不一致之目前配方檔RF中各次配方項目SRI。以圖1為例,資料處理單元11係將比對後有不一致之各次配方項目SRI對應更新至資料庫121。接著,進行步驟S66,記錄經編輯後之主版本版次資料VM與各次配方項目SRI相對應之各次配方版本資料SRV,因此,資料處理單元11存取經編輯後之目前配方檔RF至資料庫121,並記錄主版本版次資料VM與各次配方項目SRI相對應之各次配方版本資料SRV。舉例而言,編輯前之目前配方檔RF中的主版本版次資料VM為10,各次配方項目SRI相對應之各次配方版本資料SRV為6,編輯後之目前配方檔RF的主版本版次資料VM為11,次配方版本資料SRVB為7,在此紀錄版本係以遞增為例,在另一實施例中,紀錄版本係可以其他編碼方式或依據需求設定為之。Next, proceed to step S65 to update each recipe item SRI in the current recipe file RF with inconsistencies. Taking FIG. 1 as an example, the data processing unit 11 correspondingly updates each recipe item SRI that has inconsistencies after the comparison to the database 121. Next, proceed to step S66, record the edited major version version data VM corresponding to each recipe item SRI corresponding to each recipe item SRI, therefore, the data processing unit 11 accesses the edited current recipe file RF to Data base 121, and record the major version version data VM and each minor recipe version data SRV corresponding to each minor recipe item SRI. For example, the main version version data VM in the current recipe file RF before editing is 10, the respective formula version data SRV corresponding to each recipe item SRI is 6, and the main version version of the current recipe file RF after editing The secondary data VM is 11, and the sub-recipe version data SRVB is 7. Here, the record version is an increment. For example, in another embodiment, the record version may be set by other encoding methods or according to requirements.

接著,請復參閱圖10,進行步驟S136,解除鎖定狀態。因此,資料處理單元11傳輸解除鎖定命令C42至使用者設備30,換言之,資料處理單元11解除對配方資料單元12之鎖定狀態,來解除限制僅供使用者設備30控制資料庫121與配方描述資料庫123,使得資料庫121與配方描述資料庫123可受另一使用者設備40或其他使用者設備控制。接著,進行步驟S137,通知並更新經編輯後之目前配方檔RF。因此,資料處理單元11傳出通知命令C8至使用者設備30與另一使用者設備40,且資料處理單元11傳輸一更新命令C7至使用者設備30與另一使用者設備40,以更新經編輯後之目前配方檔RF可供另一使用者設備40使用。Next, please refer to FIG. 10 again, and proceed to step S136 to release the locked state. Therefore, the data processing unit 11 transmits the unlock command C42 to the user equipment 30. In other words, the data processing unit 11 unlocks the recipe data unit 12 to release the restriction. Only the user equipment 30 controls the database 121 and the recipe description data. The library 123 enables the database 121 and the recipe description database 123 to be controlled by another user equipment 40 or other user equipment. Next, proceed to step S137 to notify and update the edited current recipe file RF. Therefore, the data processing unit 11 sends out a notification command C8 to the user equipment 30 and another user equipment 40, and the data processing unit 11 transmits an update command C7 to the user equipment 30 and another user equipment 40 to update the The edited current recipe file RF can be used by another user device 40.

綜上所述,在本發明的製程配方監控方法與製程配方監控系統中,可將目前配方檔回溯到先前某一個特定版本之配方檔,以復原目前配方檔中特定或全部之次配方項目與相對應之次配方數值,藉此提升製程配方使用上的彈性。In summary, in the process recipe monitoring method and process recipe monitoring system of the present invention, the current recipe file can be traced back to a previous specific version of the recipe file to restore the specific or all sub-recipe items and Corresponding to the value of the secondary formula, thereby improving the flexibility of the process recipe.

再者,由於可針對特定或全部之次配方項目與相對應之次配方數值進行復原,故本發明可針對主版本模式或特定次配方模式進行回溯,換言之,本發明不僅可針對先前特定某一版本之主版本版次資料進行復原以外,更可針對某一個特定次配方項目及其相對應之次次配方數值進行復原,藉此可供使用者回溯至所需求之目前配方檔。Furthermore, since it can be restored for specific or all sub-recipe items and corresponding sub-recipe values, the present invention can be traced back to the main version mode or specific sub-recipe mode. In other words, the present invention can not only target a specific In addition to the restoration of the main version and version data of the version, it can also be restored for a specific sub-recipe item and its corresponding sub-recipe value, so that the user can trace back to the current recipe file required.

另外,針對上述經回溯後或經編輯後的目標配方檔,本發明會記錄新的主版本版次資料與各次配方版本資料,而非將主版本版次資料與各次配方版本資料全數復原至先前某一個特定版本之配方檔。In addition, for the above-mentioned target recipe file after being backtracked or edited, the present invention will record the new major version version data and each recipe version data, instead of recovering all the major version version data and each recipe version data To a specific version of the previous recipe file.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed as above by the embodiments, it is not intended to limit the present invention. Anyone who has ordinary knowledge in the technical field can make some changes and modifications without departing from the spirit and scope of the present invention. The scope of protection of the present invention shall be subject to the scope defined in the attached patent application.

10‧‧‧製程配方監控系統11‧‧‧資料處理單元12‧‧‧配方資料單元121‧‧‧資料庫123‧‧‧配方描述資料庫125‧‧‧歷史資料庫127‧‧‧回溯模組13‧‧‧製程單元30‧‧‧使用者設備40‧‧‧另一使用者設備C‧‧‧命令RF、RFB‧‧‧目前配方檔RRDF‧‧‧配方規則描述檔S10‧‧‧製程配方監控方法S11~S12‧‧‧步驟S112~S116‧‧‧步驟S121~S129B‧‧‧步驟S131~S139‧‧‧步驟S22~S26‧‧‧步驟S32~S36‧‧‧步驟S341~S345‧‧‧步驟S42~S46‧‧‧步驟S51~S55‧‧‧步驟S542~S546‧‧‧步驟S61~S68‧‧‧步驟SR‧‧‧次配方資料SRI‧‧‧次配方項目SRN‧‧‧次配方數值SRV‧‧‧次配方版本資料TRF‧‧‧目標配方檔TSR‧‧‧目標次配方資料TSRI‧‧‧目標次配方項目TSRN‧‧‧目標次配方數值TSRV‧‧‧目標次配方版本資料TVM‧‧‧目標主版本資料VM、VMB‧‧‧主版本版次資料 10‧‧‧ process recipe monitoring system 11‧‧‧ data processing unit 12‧‧‧ recipe data unit 121‧‧‧ database 123‧‧‧ recipe description database 125‧‧‧ historical database 127‧‧‧ traceback module 13‧‧‧ Process unit 30‧‧‧ User equipment 40‧‧‧ Another user equipment C‧‧‧ Command RF, RFB‧‧‧ Current recipe file RRDF‧‧‧ Recipe rule description file S10‧‧‧ Process recipe Monitoring methods S11~S12‧‧‧Step S112~S116‧‧‧Step S121~S129B‧‧‧Step S131~S139‧‧‧Step S22~S26‧‧‧Step S32~S36‧‧‧Step S341~S345‧‧‧ Step S42~S46‧‧‧Step S51~S55‧‧‧Step S542~S546‧‧‧Step S61~S68‧‧‧Step SR‧‧‧Formulation data SRI‧‧‧Formulation item SRN‧‧‧Formulation value SRV‧‧‧recipe recipe version data TRF‧‧‧target recipe file TSR‧‧‧target recipe information TSRI‧‧‧target recipe formula item TSRN‧‧‧target recipe value TSRV‧‧‧target recipe formula data TVM‧ ‧‧Target main version data VM, VMB‧‧‧ Main version version data

圖1為本發明之製程配方監控系統的示意圖。 圖2A為本發明之目前配方檔的示意圖。 圖2B為本發明之配方規則描述檔的示意圖。 圖2C為本發明之目標配方檔的示意圖。 圖2D為本發明之經回溯後之目前配方檔一實施例的示意圖。 圖3為本發明的製程配方監控方法的流程圖。 圖4為圖3中接收使用者設備的連線請求的流程圖。 圖5為圖4中啟動資料處理單元的流程圖。 圖6為圖3中接收使用者設備之回溯命令的流程圖。 圖7為圖6中判斷使用者設備是否能執行回溯模式的流程圖。 圖8為圖7中判斷使用者設備是否具有權限的流程圖。 圖9為圖8中檢視配方規則描述檔是否能被執行的流程圖。 圖10為圖3中接收使用者設備之編輯命令的流程圖。 圖11為圖10中判斷使用者設備是否能執行編輯模式的流程圖。 圖12為圖11中檢視配方規則描述檔是否能被執行的流程圖。 圖13為圖10中提供目前配方檔以供使用者設備編輯的流程圖。FIG. 1 is a schematic diagram of a process recipe monitoring system of the present invention. 2A is a schematic diagram of the current recipe file of the present invention. FIG. 2B is a schematic diagram of a description file of a recipe rule of the present invention. 2C is a schematic diagram of the target recipe file of the present invention. FIG. 2D is a schematic diagram of an embodiment of the current recipe file after backtracking in the present invention. FIG. 3 is a flow chart of the process recipe monitoring method of the present invention. FIG. 4 is a flowchart of receiving a connection request of a user device in FIG. 3. FIG. 5 is a flowchart of starting the data processing unit in FIG. 4. FIG. 6 is a flowchart of receiving the traceback command of the user equipment in FIG. 3. FIG. 7 is a flowchart of FIG. 6 to determine whether the user equipment can execute the backtracking mode. FIG. 8 is a flowchart of determining whether the user equipment has authority in FIG. 7. FIG. 9 is a flowchart of FIG. 8 to check whether the recipe rule description file can be executed. FIG. 10 is a flowchart of receiving the edit command of the user device in FIG. 3. FIG. 11 is a flowchart of FIG. 10 to determine whether the user equipment can execute the edit mode. FIG. 12 is a flowchart of FIG. 11 to check whether the recipe rule description file can be executed. FIG. 13 is a flowchart of providing the current recipe file in FIG. 10 for editing by the user device.

S12‧‧‧接收使用者設備之回溯命令 S12‧‧‧ Receive backtracking command from user equipment

S121~S129B‧‧‧步驟 S121~S129B‧‧‧Step

Claims (32)

一種製程配方監控方法,包括以下步驟:接收一使用者設備的連線請求;以及接收該使用者設備之一回溯命令,包括以下步驟:判斷是否能執行一回溯模式;進入一鎖定狀態,以限制僅供該使用者設備控制一資料庫與一配方描述資料庫,其中該資料庫中之一目前配方檔包含一主版本版次資料與複數個次配方資料,各該次配方資料包含一次配方項目、一次配方版本資料與一次配方數值,該配方描述資料庫包含一配方規則描述檔,依據該配方規則描述檔執行該目前配方檔;依據一目標主版本資料之複數個目標次配方項目與複數個目標次配方數值,復原該目前配方檔中相對應之該次配方項目與該次配方數值;其中復原該目前配方檔中相對應之該次配方項目與該次配方數值的步驟,包括以下步驟:判斷各該次配方項目是否能對應至目標主版本資料中相應之各該目標次配方項目;若有無法對應之該次配方項目,保留該目前配方檔中之無法對應之該次配方項目與對應之該配方數值;以及若有能對應之該次配方項目,將能對應之該次配方項目之該配方數值取代為對應之該目標次配方項目之該目標次配方數值;記錄經回溯後之該目前配方檔中該主版本版次資料與各該次配方版本資料;及存取經回溯後之該目前配方檔。 A process recipe monitoring method includes the following steps: receiving a connection request of a user equipment; and receiving a traceback command of the user equipment, including the following steps: determining whether a traceback mode can be executed; entering a locked state to limit Only a database and a recipe description database are controlled by the user equipment, where one of the current recipe files in the database contains a major version version data and a plurality of secondary recipe data, each of which contains a recipe item 1. One-time recipe version data and one-time recipe value, the recipe description database contains a recipe rule description file, and the current recipe file is executed according to the recipe rule description file; the plurality of target sub-recipe items and the plurality of target recipe data Target sub-recipe value, restore the corresponding sub-recipe item and the sub-recipe value in the current recipe file; the steps to restore the corresponding sub-recipe item and the sub-recipe value in the current recipe file include the following steps: Determine whether each sub-recipe item can correspond to the corresponding target sub-recipe item in the target master version data; if there is no corresponding sub-recipe item, keep the un-corresponding sub-recipe item in the current recipe file and the corresponding The formula value of the formula; and if there is a corresponding sub-formulation item, replace the formula value of the corresponding sub-formulation item with the target sub-formulation value of the corresponding target sub-formulation item; record the The current version data of the major version and each version of the current recipe file in the current recipe file; and access to the current recipe file after traceback. 如申請專利範圍第1項所述之製程配方監控方法,其中復原該目前配方檔中相對應之該次配方項目與該次配方數值的步驟,包括以下步驟: 將各該次配方項目與相對應之該次配方數值復原至該目標主版本資料中相對應之該目標次配方項目與該目標次配方數值。 The process recipe monitoring method as described in item 1 of the patent application scope, wherein the steps of restoring the corresponding sub-recipe items and the sub-recipe values in the current recipe file include the following steps: Restore each sub-recipe item and the corresponding sub-recipe value to the target sub-recipe item and the target sub-recipe value corresponding to the target master version data. 如申請專利範圍第1項所述之製程配方監控方法,其中當該回溯模式為一回復特定次配方模式,記錄經回溯後之該目前配方檔中該主版本版次資料與各該次配方版本資料的步驟,包括以下步驟:遞增各該次配方版本資料;以及保留未經回溯之各該次配方版本資料。 The process recipe monitoring method as described in item 1 of the patent application scope, wherein when the backtracking mode is a reply-to-subordinate recipe mode, the main version version data and each sub-formula version in the current formula file after backtracking are recorded The steps of data include the following steps: incrementing the data of each recipe version; and retaining the data of each recipe version without backtracking. 如申請專利範圍第1項所述之製程配方監控方法,其中判斷是否能執行該回溯模式的步驟,包括以下步驟:判斷該資料庫與該配方描述資料庫是否為該鎖定狀態;以及判斷是否具有權限。 The process recipe monitoring method as described in item 1 of the patent application scope, wherein the step of judging whether the traceback mode can be executed includes the following steps: judging whether the database and the recipe description database are in the locked state; and judging whether there is Permissions. 如申請專利範圍第4項所述之製程配方監控方法,其中判斷是否具有權限的步驟,若否,包括以下步驟:拒絕該使用者設備登入,並通知該使用者設備。 The process recipe monitoring method as described in item 4 of the patent application scope, wherein the step of judging whether it has authority, if not, includes the following steps: denying the user equipment to log in, and notifying the user equipment. 如申請專利範圍第4項所述之製程配方監控方法,其中判斷是否具有權限的步驟,包括以下步驟:判斷是否能登入;取得該配方規則描述檔;以及檢視該配方規則描述檔是否能被執行。 The process recipe monitoring method as described in item 4 of the patent application scope, wherein the step of judging whether it has authority includes the following steps: judging whether it is possible to log in; obtaining the recipe rule description file; and checking whether the recipe rule description file can be executed . 如申請專利範圍第6項所述之製程配方監控方法,其中檢視該配方規則描述檔是否能被執行的步驟,包括以下步驟:判斷該使用者設備是否有權限能編輯該配方規則描述檔;以及檢視是否能供該使用者設備編輯該配方規則描述檔。 The process recipe monitoring method as described in item 6 of the patent application scope, wherein the step of checking whether the recipe rule description file can be executed includes the following steps: judging whether the user equipment has the authority to edit the recipe rule description file; and Check whether the user equipment can edit the recipe rule description file. 如申請專利範圍第1項所述之製程配方監控方法,其中判斷是否能執行該回溯模式的步驟,若否,包括以下步驟:拒絕該使用者設備,並通知該使用者設備。 The process recipe monitoring method as described in item 1 of the patent application scope, wherein the step of judging whether the traceback mode can be executed, if not, includes the following steps: reject the user equipment, and notify the user equipment. 如申請專利範圍第1項所述之製程配方監控方法,其中存取經回溯後之該目前配方檔至該資料庫的步驟之後,包括以下步驟:判斷是否有一另一使用者設備之連線請求;若否,解除該鎖定狀態;以及若有,通知該另一使用者設備,並更新經回溯後之該目前配方檔。 The process recipe monitoring method as described in item 1 of the patent application scope, in which the step of accessing the current recipe file after traceback to the database includes the following steps: determining whether there is a connection request from another user device ; If not, release the locked state; and if so, notify the other user equipment and update the current recipe file after the traceback. 如申請專利範圍第1項所述之製程配方監控方法,其中存取經回溯後之該目前配方檔至該資料庫的步驟之前,包括以下步驟:存取回溯前之該目前配方檔。 The process recipe monitoring method as described in item 1 of the patent application scope, wherein the step of accessing the current recipe file after the backtracking to the database includes the following steps: accessing the current recipe file before the backtracking. 如申請專利範圍第1項所述之製程配方監控方法,其中接收該使用者設備的該連線請求的步驟,包括以下步驟:啟動一資料處理單元;藉由該資料處理單元以取得該資料庫中該目前配方檔與該配方描述資料庫中該配方規則描述檔;以及該使用者設備係連線至該資料處理單元。 The process recipe monitoring method as described in item 1 of the patent application scope, wherein the step of receiving the connection request of the user equipment includes the following steps: starting a data processing unit; obtaining the database by the data processing unit In the current recipe file and the recipe rule description file in the recipe description database; and the user equipment is connected to the data processing unit. 如申請專利範圍第11項所述之製程配方監控方法,其中啟動該資料處理單元的步驟,包括以下步驟:讀取一原始描述檔;依據該原始描述檔,比對該配方描述資料庫中該配方規則描述檔是否匹配;以及若未匹配,更新該配方規則描述檔至該配方描述資料庫。 The process recipe monitoring method as described in item 11 of the patent application scope, wherein the step of starting the data processing unit includes the following steps: reading an original description file; based on the original description file, comparing the recipe description database with the Whether the recipe rule description file matches; and if it does not match, update the recipe rule description file to the recipe description database. 如申請專利範圍第1項所述之製程配方監控方法,更包括: 接收該使用者設備之一編輯命令時,包括以下步驟:判斷是否能執行一編輯模式;判斷是否能供該使用者設備控制該資料庫與該配方描述資料庫;進入該鎖定狀態,以限制僅供該使用者設備控制該資料庫與該配方描述資料庫;提供該目前配方檔以供該使用者設備編輯;存取經編輯後之該目前配方檔;解除該鎖定狀態;以及通知並更新經編輯後之該目前配方檔。 The process recipe monitoring method as described in item 1 of the patent application scope further includes: When receiving one of the editing commands of the user equipment, it includes the following steps: judging whether an editing mode can be executed; judging whether the user equipment can control the database and the recipe description database; entering the locked state to limit only For the user equipment to control the database and the recipe description database; provide the current recipe file for editing by the user equipment; access the edited current recipe file; release the locked state; and notify and update the The current recipe file after editing. 如申請專利範圍第13項所述之製程配方監控方法,其中提供該目前配方檔以供該使用者設備編輯的步驟,包括以下步驟:寫入一編輯資料;判斷該編輯資料是否符合該配方規則描述檔;比對該編輯資料與該目前配方檔是否一致;若不一致,存取編輯前之該目前配方檔;更新有不一致之該目前配方檔中各該次配方項目;以及記錄經編輯後之該主版本版次資料與各該次配方項目相對應之各該次配方版本資料。 The process recipe monitoring method as described in item 13 of the patent application scope, wherein the step of providing the current recipe file for editing by the user equipment includes the following steps: writing an editing data; judging whether the editing data conforms to the recipe rules Description file; compare whether the edited data is consistent with the current recipe file; if inconsistent, access the current recipe file before editing; update each recipe item in the current recipe file with inconsistencies; and record after editing The major version version data corresponds to each minor formula version data corresponding to each minor formula item. 如申請專利範圍第14項所述之製程配方監控方法,其中比對該編輯資料與該目前配方檔是否一致的步驟,若一致,包括以下步驟:記錄該目前配方檔中該主版本版次資料與各該次配方版本資料。 The process recipe monitoring method as described in item 14 of the patent application scope, where the step of comparing whether the edited data is consistent with the current recipe file, if it is consistent, includes the following steps: recording the major version version data in the current recipe file And the version information of each recipe. 一種製程配方監控系統,包括:一資料處理單元,係接收一使用者設備的連線請求;以及 一配方資料單元,連接於該資料處理單元,該配方資料單元包含一資料庫、一配方描述資料庫與一回溯模組,該資料庫存儲包含一目前配方檔,該目前配方檔包含一主版本版次資料與複數個次配方資料,各該次配方資料包含一次配方項目、一次配方版本資料與一次配方數值,該配方描述資料庫存儲包含一配方規則描述檔,依據該配方規則描述檔執行該目前配方檔;其中該回溯模組判斷各該次配方項目是否能對應至目標主版本資料中相應之各該目標次配方項目,若有無法對應之該次配方項目,該回溯模組保留該目前配方檔中之無法對應之該次配方項目與對應之該配方數值,若有能對應之該次配方項目,該回溯模組將能對應之該次配方項目之該配方數值取代為對應之該目標次配方項目之該目標次配方數值,其中:該資料處理單元接收一回溯命令時,該資料處理單元判斷是否能執行一回溯模式,若是,該資料處理單元對該配方資料單元進入一鎖定狀態,以限制該使用者設備控制該資料庫與該配方描述資料庫;依據一目標主版本資料之複數個目標次配方項目與複數個目標次配方數值,該回溯模組復原該目前配方檔中相對應之該次配方項目與該次配方數值,且該資料處理單元記錄經回溯後之該目前配方檔中該主版本版次資料與各該次配方版本資料,並存取經回溯後之該目前配方檔至該資料庫。 A process recipe monitoring system includes: a data processing unit that receives a connection request from a user device; and A recipe data unit, connected to the data processing unit, the recipe data unit includes a database, a recipe description database and a traceback module, the database storage contains a current recipe file, and the current recipe file contains a major version Version data and plural sub-recipe data, each of which contains a recipe item, a recipe version data and a recipe value, the recipe description database stores a recipe rule description file, which is executed according to the recipe rule description file The current recipe file; where the traceback module determines whether each of the sub-recipe items can correspond to the corresponding target sub-recipe items in the target master version data, if there is no corresponding sub-recipe item, the trace-back module retains the current The sub-recipe item and the corresponding recipe value in the recipe file that cannot be matched, if there is a corresponding sub-recipe item, the traceback module replaces the recipe value of the corresponding sub-recipe item with the corresponding target The target sub-recipe value of the sub-recipe item, where: when the data processing unit receives a backtracking command, the data processing unit judges whether a backtracking mode can be executed, and if so, the data processing unit enters a locked state for the recipe data unit, In order to restrict the user equipment to control the database and the recipe description database; according to a plurality of target minor recipe items and a plurality of target minor recipe values of a target major version data, the traceback module restores the corresponding in the current recipe file The sub-recipe item and the sub-recipe value, and the data processing unit records the major version version data and each sub-recipe version data in the current recipe file after the backtracking, and accesses the backtracked current recipe file to The database. 如申請專利範圍第16項所述之製程配方監控系統,其中該回溯模組將各該次配方項目與相對應之該次配方數值復原至該目標主版本資料中相對應之該目標次配方項目與該目標次配方數值。 The process recipe monitoring system as described in item 16 of the patent application scope, wherein the traceback module restores each sub-recipe item and the corresponding sub-recipe value to the target sub-recipe item corresponding to the target master version data The recipe value with the target time. 如申請專利範圍第16項所述之製程配方監控系統,其中當該回溯模式為一回復特定次配方模式,該資料處理單元保留未經回溯之各該次配方版本資料。 The process recipe monitoring system as described in item 16 of the patent application scope, wherein when the backtracking mode is a mode for retrieving specific sub-recipes, the data processing unit retains the data of each sub-recipe version without backtracking. 如申請專利範圍第16項所述之製程配方監控系統,其中該資料處理單元判斷是否能執行該回溯模式,包括:該資料處理單元判斷該資料庫與該配方描述資料庫是否為該鎖定狀態;以及該資料處理單元判斷是否具有權限。 The process recipe monitoring system as described in item 16 of the patent application scope, wherein the data processing unit determines whether the traceback mode can be executed, including: the data processing unit determines whether the database and the recipe description database are in the locked state; And the data processing unit determines whether it has authority. 如申請專利範圍第19項所述之製程配方監控系統,其中該資料處理單元判斷是否具有權限,包括:該資料處理單元判斷該使用者設備是否能登入,若是,該資料處理單元判斷該配方描述資料庫中該配方規則描述檔是否被鎖定,若否,該資料處理單元由該配方描述資料庫取得該配方規則描述檔,且該資料處理單元檢視該配方規則描述檔是否能被執行。 The process recipe monitoring system as described in item 19 of the patent application scope, wherein the data processing unit judges whether it has authority, including: the data processing unit judges whether the user equipment can log in, and if so, the data processing unit judges the recipe description Whether the recipe rule description file in the database is locked, if not, the data processing unit obtains the recipe rule description file from the recipe description database, and the data processing unit checks whether the recipe rule description file can be executed. 如申請專利範圍第20項所述之製程配方監控系統,其中該資料處理單元檢視該配方規則描述檔是否能被執行,包括:該資料處理單元判斷該使用者設備是否有權限能編輯該配方規則描述檔,且該資料處理單元檢視是否能供該使用者設備編輯該配方規則描述檔。 The process recipe monitoring system as described in item 20 of the patent application scope, wherein the data processing unit checks whether the recipe rule description file can be executed, including: the data processing unit determines whether the user equipment has permission to edit the recipe rule Description file, and the data processing unit checks whether the user equipment can edit the recipe rule description file. 如申請專利範圍第20項所述之製程配方監控系統,其中該資料處理單元判斷該使用者設備不具有權限,該資料處理單元傳輸一拒絕命令至該使用者設備。 The process recipe monitoring system as described in item 20 of the patent application scope, wherein the data processing unit determines that the user equipment does not have authority, and the data processing unit transmits a rejection command to the user equipment. 如申請專利範圍第16項所述之製程配方監控系統,其中該資料處理單元判斷該使用者設備不能執行該回溯模式,該資料處理單元傳輸一拒絕回溯命令至該使用者設備。 The process recipe monitoring system as described in Item 16 of the patent application scope, wherein the data processing unit determines that the user equipment cannot execute the traceback mode, and the data processing unit transmits a reject traceback command to the user equipment. 如申請專利範圍第16項所述之製程配方監控系統,其中該資料處理單元存取經回溯後之該目前配方檔至該資料庫之後,該資料處理單元判斷是否有另一使用者設備之連線請求,若否,該資料處理單元解除對該 配方資料單元之該鎖定狀態;若是,該資料處理單元傳輸一更新命令至該另一使用者設備,並更新經回溯後之該目前配方檔。 The process recipe monitoring system as described in item 16 of the patent application scope, wherein after the data processing unit accesses the traced back current recipe file to the database, the data processing unit determines whether there is another user device connected Online request, if not, the data processing unit The locked state of the recipe data unit; if it is, the data processing unit transmits an update command to the other user equipment and updates the current recipe file after the traceback. 如申請專利範圍第16項所述之製程配方監控系統,其中該配方資料單元包含一歷史資料庫,該資料處理單元存取回溯前之該目前配方檔至該歷史資料庫。 The process recipe monitoring system as described in item 16 of the patent application scope, wherein the recipe data unit includes a historical database, and the data processing unit accesses the current recipe file before the traceback to the historical database. 如申請專利範圍第16項所述之製程配方監控系統,其中該資料處理單元接收該使用者設備的該連線請求,包括:該資料處理單元取得該資料庫中該目前配方檔與該配方描述資料庫中該配方規則描述檔,該使用者設備係連線至該資料處理單元。 The process recipe monitoring system as described in item 16 of the patent application scope, wherein the data processing unit receives the connection request of the user equipment, including: the data processing unit obtains the current recipe file and the recipe description in the database The recipe rule description file in the database, the user equipment is connected to the data processing unit. 如申請專利範圍第16項所述之製程配方監控系統,其中該資料處理單元讀取一原始描述檔,依據該原始描述檔,該資料處理單元比對該配方描述資料庫中該配方規則描述檔是否匹配,若未匹配,該資料處理單元更新該配方規則描述檔至該配方描述資料庫。 The process recipe monitoring system as described in item 16 of the patent application scope, wherein the data processing unit reads an original description file, and according to the original description file, the data processing unit compares the recipe rule description file in the recipe description database Whether it matches, if not, the data processing unit updates the recipe rule description file to the recipe description database. 如申請專利範圍第16項所述之製程配方監控系統,其中該資料處理單元接收一編輯命令時,包括:該資料處理單元判斷判斷該使用者設備是否能執行一編輯模式,若是,該資料處理單元判斷是否能供該使用者設備控制該資料庫與該配方描述資料庫,若是,該資料處理單元對該配方資料單元進入該鎖定狀態,以限制該使用者設備控制該資料庫與該配方描述資料庫;該資料處理單元提供該目前配方檔以供該使用者設備編輯,且該資料處理單元存取經編輯後之該目前配方檔至該資料庫;該資料處理單元解除對該配方資料單元之該鎖定狀態,且該資料處理單元通知並更新經編輯後之該目前配方檔至另一使用者設備。 The process recipe monitoring system as described in item 16 of the patent application scope, in which the data processing unit receives an edit command, including: the data processing unit judges whether the user equipment can perform an edit mode, and if so, the data processing The unit determines whether the user equipment can control the database and the recipe description database. If so, the data processing unit enters the locked state for the recipe data unit to restrict the user equipment from controlling the database and the recipe description Database; the data processing unit provides the current recipe file for editing by the user equipment, and the data processing unit accesses the edited current recipe file to the database; the data processing unit releases the recipe data unit The locked state, and the data processing unit notifies and updates the edited current recipe file to another user device. 如申請專利範圍第28項所述之製程配方監控系統,其中該資料處理單元判斷不能供該使用者設備控制該資料庫與該配方描述資料庫,包括:該資料處理單元傳輸一拒絕編輯命令至該使用者設備,且該資料處理單元復原編輯前之該目前配方檔至該使用者設備。 The process recipe monitoring system as described in item 28 of the patent application scope, wherein the data processing unit determines that the user equipment cannot control the database and the recipe description database, including: the data processing unit transmits a refusal edit command to The user equipment, and the data processing unit restores the current recipe file before editing to the user equipment. 如申請專利範圍第28項所述之製程配方監控系統,其中該資料處理單元提供該目前配方檔以供該使用者設備編輯,包括:該使用者設備寫入一編輯資料並傳輸至該資料處理單元,該資料處理單元判斷該編輯資料是否符合該配方規則描述檔,若符合,該資料處理單元比對該編輯資料與該目前配方檔是否一致,若不一致,該資料處理單元存取編輯前之該目前配方檔至該配方資料單元之一歷史資料庫。 The process recipe monitoring system as described in item 28 of the patent application scope, wherein the data processing unit provides the current recipe file for editing by the user equipment, including: the user equipment writes an editing data and transmits it to the data processing Unit, the data processing unit judges whether the edited data conforms to the recipe rule description file. If it matches, the data processing unit compares whether the edited data is consistent with the current recipe file. If not, the data processing unit accesses the pre-edit The current recipe file is to a historical database of the recipe data unit. 如申請專利範圍第30項所述之製程配方監控系統,其中該資料處理單元比對該編輯資料與該目前配方檔係為一致,該資料處理單元記錄該目前配方檔中該主版本版次資料與各該次配方版本資料至該資料庫。 The process recipe monitoring system as described in item 30 of the patent application scope, in which the data processing unit is consistent with the edited data and the current recipe file, and the data processing unit records the major version version data in the current recipe file Send the recipe version data to the database. 如申請專利範圍第16項所述之製程配方監控系統,更包括:一製程單元,連接於該資料處理單元,該資料處理單元傳輸該目前配方檔與該配方規則描述檔至該製程單元。 The process recipe monitoring system as described in item 16 of the patent application scope further includes: a process unit connected to the data processing unit, and the data processing unit transmits the current recipe file and the recipe rule description file to the process unit.
TW107104473A 2018-02-08 2018-02-08 Process recipe monitoring method and system thereof TWI682334B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW107104473A TWI682334B (en) 2018-02-08 2018-02-08 Process recipe monitoring method and system thereof
CN201810756412.6A CN110135791A (en) 2018-02-08 2018-07-11 Process recipe monitoring method and process recipe monitoring system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW107104473A TWI682334B (en) 2018-02-08 2018-02-08 Process recipe monitoring method and system thereof

Publications (2)

Publication Number Publication Date
TW201935337A TW201935337A (en) 2019-09-01
TWI682334B true TWI682334B (en) 2020-01-11

Family

ID=67568205

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107104473A TWI682334B (en) 2018-02-08 2018-02-08 Process recipe monitoring method and system thereof

Country Status (2)

Country Link
CN (1) CN110135791A (en)
TW (1) TWI682334B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114068347A (en) * 2020-08-06 2022-02-18 长鑫存储技术有限公司 Semiconductor process detection system and semiconductor process detection method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200702963A (en) * 2005-07-07 2007-01-16 Taiwan Semiconductor Mfg Co Ltd Systems and methods for monitoring processing tool
CN104134109A (en) * 2014-06-24 2014-11-05 青岛海信网络科技股份有限公司 Engineering configuration method and engineering configuration system integrating version management
US20160232344A1 (en) * 2015-02-11 2016-08-11 Electronics And Telecommunications Research Institute Method for re-adjusting application permission and user terminal for performing the same method
TWM540315U (en) * 2016-12-23 2017-04-21 Synpower Co Ltd Process parameter monitoring system

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI224264B (en) * 2001-05-31 2004-11-21 Systex Corp Program version control management system and its method
CN100593213C (en) * 2006-06-20 2010-03-03 亮发科技股份有限公司 Memory device with multiple partitions
US8369975B2 (en) * 2007-09-21 2013-02-05 Fisher-Rosemount Systems, Inc. Online recipe synchronization in a real-time batch executive environment
TW201207731A (en) * 2010-08-06 2012-02-16 Universal Scient Ind Shanghai Embedded system with plural firmware and firmware updating method thereof
CN103593730B (en) * 2013-10-30 2016-08-17 中国运载火箭技术研究院 A kind of design parameter management system recalled
CN103778208A (en) * 2014-01-15 2014-05-07 广州普邦园林股份有限公司 Method for cooperating working directory or document access and system thereof
CN106897348B (en) * 2016-08-19 2020-10-27 创新先进技术有限公司 Data storage method, data verification method, data source tracing method and equipment
CN106843893A (en) * 2017-02-07 2017-06-13 济南浪潮高新科技投资发展有限公司 A kind of documentation release management system based on OpenXML standards
CN107656734A (en) * 2017-08-21 2018-02-02 北京北信源软件股份有限公司 Update method, system, computer-readable recording medium and the storage control of code release information

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200702963A (en) * 2005-07-07 2007-01-16 Taiwan Semiconductor Mfg Co Ltd Systems and methods for monitoring processing tool
CN104134109A (en) * 2014-06-24 2014-11-05 青岛海信网络科技股份有限公司 Engineering configuration method and engineering configuration system integrating version management
US20160232344A1 (en) * 2015-02-11 2016-08-11 Electronics And Telecommunications Research Institute Method for re-adjusting application permission and user terminal for performing the same method
TWM540315U (en) * 2016-12-23 2017-04-21 Synpower Co Ltd Process parameter monitoring system

Also Published As

Publication number Publication date
TW201935337A (en) 2019-09-01
CN110135791A (en) 2019-08-16

Similar Documents

Publication Publication Date Title
EP1621944B1 (en) Security system and method for an industrial automation system
US8701182B2 (en) Method and apparatus for process enforced configuration management
JP4953609B2 (en) Scalable and flexible information security for industrial automation
EP1422585B1 (en) System for auditing of accesses to an industrial control system
US7526794B2 (en) Data perspectives in controller system and production management systems
TWI608344B (en) Robust hardware fault management system, method and framework for enterprise devices
JP2006099777A (en) Centrally managed proxy-based security for legacy automation systems
US11658966B2 (en) Personnel profiles and fingerprint authentication for configuration engineering and runtime applications
US9355278B2 (en) Server chassis physical security enforcement
US8489535B2 (en) Library synchronization between definitions and instances
JP2002099512A (en) Process control system, its security system and method, and its software system
US20200387821A1 (en) Authentication based on a change in a state of a qubit
TWI682334B (en) Process recipe monitoring method and system thereof
US11374760B2 (en) Cyber physical key
CN109858223A (en) Electromechanical equipment authorization method, control device and storage medium based on identification technology
TWI726512B (en) Process recipe monitoring method and system thereof
DE102017118223A1 (en) DEVICES, SYSTEMS AND METHOD FOR PROVIDING ACCESS SECURITY IN A PROCESS CONTROL SYSTEM
EP3312692A1 (en) Operating device for a measuring device
US20030065795A1 (en) Computer system and method for managing remote access of user resources
US20240086083A1 (en) Secure one-time programming undo system
WO2019169103A1 (en) Two-step hardware authentication
CN114116042B (en) Command processing method and system for Linux service system
CN115391812A (en) Data locking control method, electronic equipment and readable storage medium
JP2007310560A (en) Information management device, information management method and information management program
JP3064619B2 (en) Production management database management device