TWI724721B - Electronic component testing device and probe - Google Patents

Electronic component testing device and probe Download PDF

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TWI724721B
TWI724721B TW108148478A TW108148478A TWI724721B TW I724721 B TWI724721 B TW I724721B TW 108148478 A TW108148478 A TW 108148478A TW 108148478 A TW108148478 A TW 108148478A TW I724721 B TWI724721 B TW I724721B
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electronic component
current path
normally closed
closed switch
testing device
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TW108148478A
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TW202127049A (en
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楊文明
林明傑
許智淵
蔡伸浩
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致茂電子股份有限公司
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Abstract

The invention discloses an electronic component testing device and a probe. The electronic component testing device comprises a carrier substrate and a probe. The carrier substrate carries an electronic component. The probe comprises a contact portion and a normally closed switch. The contact portion, electrically connected with a measurement circuit, is configured to contact the electronic component. The normally closed switch, electrically connected with the measurement circuit, is controlled by a control signal. The normally closed switch provides a bypass current path to conduct the measurement circuit and a bypass end while not receiving the control signal. The normally closed switch does not provide the bypass current path while receiving the control signal.

Description

電子元件測試裝置與探針 Electronic component testing device and probe

本發明係關於一種測試裝置與探針,特別是關於一種具靜電放電保護功能的測試裝置與探針。The present invention relates to a testing device and probe, in particular to a testing device and probe with electrostatic discharge protection function.

一般來說,由於產品對於靜電放電的保護機制較為完善,使得電子元件在產品之中較不容易受到靜電放電的破壞。然而,電子元件在安裝到產品之前,往往無法抵抗靜電放電的攻擊。舉例來說,電子元件出廠前會進行一連串的測試,以確保電子元件的品質。但是,測試的過程中遇到靜電放電,例如在安裝電子元件或用探針接觸電子元件時,則很有可能因為此時缺少保護機制而導致電子元件的損壞。Generally speaking, because the product has a relatively complete protection mechanism for electrostatic discharge, the electronic components in the product are less susceptible to damage by electrostatic discharge. However, electronic components are often unable to withstand the attack of electrostatic discharge before they are installed in the product. For example, electronic components undergo a series of tests before they leave the factory to ensure the quality of the electronic components. However, electrostatic discharge encountered during the test, such as when installing electronic components or contacting electronic components with probes, is likely to cause damage to the electronic components due to the lack of protection mechanisms at this time.

此外,由於靜電放電的攻擊位置難以預測,如果靜電放電的攻擊位置很靠近電子元件,縱使測試電子元件的機台本身具有靜電放電防護的功能,很可能也無法確實保護到電子元件。據此,業界需要一種新的靜電放電保護的對策,以減少電子元件於測試時被靜電放電破壞的可能性。In addition, since the attack position of electrostatic discharge is difficult to predict, if the attack position of electrostatic discharge is very close to the electronic component, even if the machine for testing the electronic component has the function of electrostatic discharge protection, it may not be able to reliably protect the electronic component. Accordingly, the industry needs a new electrostatic discharge protection countermeasure to reduce the possibility of electronic components being damaged by electrostatic discharge during testing.

本發明提供一種電子元件測試裝置,所述電子元件測試裝置中的探針接觸到電子元件時,探針會先提供阻抗較低的旁路電流路徑,以減少電子元件於測試時被靜電放電破壞的可能性。The present invention provides an electronic component testing device. When a probe in the electronic component testing device contacts an electronic component, the probe first provides a bypass current path with lower impedance to reduce the damage of the electronic component by electrostatic discharge during testing. The possibility.

本發明提出一種電子元件測試裝置,所述電子元件測試裝置包含載板以及探針。所述載板用以承載電子元件。所述探針包含接觸部以及常閉型開關。接觸部電性連接量測模組,並用以接觸電子元件。常閉型開關電性連接量測模組,並受控於控制信號。當常閉型開關未收到控制信號時,常閉型開關提供旁路電流路徑,旁路電流路徑用以將量測模組導通至旁路端。當常閉型開關收到控制信號時,常閉型開關不提供該旁路電流路徑。The present invention provides an electronic component testing device. The electronic component testing device includes a carrier board and a probe. The carrier board is used to carry electronic components. The probe includes a contact portion and a normally closed switch. The contact part is electrically connected to the measurement module and used for contacting electronic components. The normally closed switch is electrically connected to the measurement module and controlled by a control signal. When the normally closed switch does not receive the control signal, the normally closed switch provides a bypass current path, and the bypass current path is used to conduct the measurement module to the bypass terminal. When the normally closed switch receives the control signal, the normally closed switch does not provide the bypass current path.

於一些實施例中,於旁路端電性連接接地端後,接觸部可以接觸電子元件,且載板也可以電性連接接地端。在此,常閉型開關可以為空乏型場效電晶體或常閉型繼電器。此外,電子元件測試裝置可以更包含盒體與偵測器,載板可拆卸地設置於盒體中,偵測器用以偵測盒體的使用狀態,據以產生盒體狀態信號。另外,電子元件測試裝置也可以包含處理單元,處理單元判斷盒體狀態信號是否正常,當盒體狀態信號正常,則處理單元提供控制信號。所述盒體可以由金屬製成,用以提供靜電屏蔽或磁場屏蔽的功能。In some embodiments, after the bypass terminal is electrically connected to the ground terminal, the contact portion can contact the electronic component, and the carrier board can also be electrically connected to the ground terminal. Here, the normally closed switch can be a depleted field effect transistor or a normally closed relay. In addition, the electronic component testing device may further include a box body and a detector. The carrier board is detachably arranged in the box body. The detector is used to detect the use state of the box body and generate a box state signal accordingly. In addition, the electronic component testing device may also include a processing unit. The processing unit determines whether the box state signal is normal. When the box state signal is normal, the processing unit provides a control signal. The box body can be made of metal to provide the function of electrostatic shielding or magnetic field shielding.

本發明提供一種探針,在接觸到電子元件時,探針會先提供阻抗較低的旁路電流路徑,以減少電子元件於測試時被靜電放電破壞的可能性。The present invention provides a probe. When the probe contacts an electronic component, the probe first provides a bypass current path with lower impedance to reduce the possibility of the electronic component being damaged by electrostatic discharge during testing.

本發明提出一種探針,包含第一電流路徑、第二電流路徑以及常閉型開關。第一電流路徑電性連接於信號端和接觸部之間,接觸部用以電性連接電子元件。第二電流路徑電性連接於信號端和旁路端之間,第二電流路徑中的阻抗小於第一電流路徑中的阻抗。常閉型開關設置於第二電流路徑中,並受控於控制信號。當常閉型開關未收到控制信號時,第一電流路徑與第二電流路徑同時導通。當常閉型開關收到控制信號時,僅第一電流路徑導通。The present invention provides a probe including a first current path, a second current path, and a normally closed switch. The first current path is electrically connected between the signal terminal and the contact part, and the contact part is used to electrically connect the electronic element. The second current path is electrically connected between the signal terminal and the bypass terminal, and the impedance in the second current path is smaller than the impedance in the first current path. The normally closed switch is arranged in the second current path and controlled by the control signal. When the normally closed switch does not receive the control signal, the first current path and the second current path are simultaneously conducted. When the normally closed switch receives the control signal, only the first current path is turned on.

於一些實施例中,常閉型開關可以為空乏型場效電晶體或常閉型繼電器。此外,旁路端可以相鄰接觸部,且旁路端可以用來電性連接接地端。In some embodiments, the normally closed switch may be a depleted field effect transistor or a normally closed relay. In addition, the bypass end can be adjacent to the contact portion, and the bypass end can be used to electrically connect to the ground end.

綜上所述,本發明提供的電子元件測試裝置以及探針,可以避免探針接觸到電子元件的瞬間產生靜電電流。此外,由於探針被預設提供阻抗較低的旁路電流路徑,縱使產生靜電電流也可以經由旁路電流路徑導引掉,以減少電子元件於測試時被靜電放電破壞的可能性。In summary, the electronic component testing device and probe provided by the present invention can prevent electrostatic current from being generated at the moment when the probe contacts the electronic component. In addition, since the probe is preset to provide a bypass current path with a lower impedance, even if electrostatic current is generated, it can be guided away via the bypass current path, so as to reduce the possibility of electronic components being damaged by electrostatic discharge during testing.

下文將進一步揭露本發明之特徵、目的及功能。然而,以下所述者,僅為本發明之實施例,當不能以之限制本發明之範圍,即但凡依本發明申請專利範圍所作之均等變化及修飾,仍將不失為本發明之要意所在,亦不脫離本發明之精神和範圍,故應將視為本發明的進一步實施態樣。The features, objectives and functions of the present invention will be further disclosed below. However, the following are only examples of the present invention, and should not be used to limit the scope of the present invention, that is, all equivalent changes and modifications made in accordance with the scope of the patent application of the present invention will still be the essence of the present invention. Without departing from the spirit and scope of the present invention, it should be regarded as a further implementation aspect of the present invention.

請一併參閱圖1與圖2,圖1係繪示依據本發明一實施例之電子元件測試裝置的結構示意圖,圖2係繪示依據本發明一實施例之電子元件測試裝置的電路示意圖。如圖所示,電子元件測試裝置1包含了載板10、探針12、量測模組14以及處理單元16,載板10可以用來承載電子元件DUT,探針12可以用來接觸電子元件DUT並將電子元件DUT的信號傳輸給量測模組14,使得量測模組14可以量測電子元件DUT內部的電壓、電流或者阻抗等各種電性參數。於一個例子中,電子元件DUT可以是一種雷射二極體,當然本實施例不加以限制,電子元件DUT也有可能是具其他功能的晶片或者是光電元件。以下分別說明電子元件測試裝置1的各部元件。Please refer to FIGS. 1 and 2 together. FIG. 1 is a schematic structural diagram of an electronic component testing device according to an embodiment of the present invention, and FIG. 2 is a schematic circuit diagram of an electronic component testing device according to an embodiment of the present invention. As shown in the figure, the electronic component testing device 1 includes a carrier board 10, a probe 12, a measurement module 14 and a processing unit 16. The carrier board 10 can be used to carry electronic components DUT, and the probe 12 can be used to contact electronic components. The DUT transmits the signal of the electronic component DUT to the measurement module 14 so that the measurement module 14 can measure various electrical parameters such as voltage, current, or impedance inside the electronic component DUT. In an example, the electronic component DUT may be a laser diode, of course, this embodiment is not limited, the electronic component DUT may also be a chip with other functions or an optoelectronic component. The components of the electronic component testing device 1 will be described below.

載板10上可以有對應電子元件DUT的槽位,用以容置一個或多個電子元件DUT,在此圖1係以載板10設置一個電子元件DUT為例子。此外,載板10可以有接地端100,所述接地端100可以電性連接到一片金屬板體。於所屬技術領域具有通常知識者應可以明白,金屬板體可以被視為接地電位。也就是說,載板10設置有電子元件DUT時,載板10和電子元件DUT之間可以是沒有電位差的,且載板10和電子元件DUT可以都是接地電位。另外,電子元件測試裝置1還可以有一個盒體(圖未示),而載板10可拆卸地設置於所述盒體中,所述盒體可以係由金屬製成,用以屏蔽靜電或磁場。前述接地端100電性連接到的金屬板體可以是所述盒體的一部份或電性連接到盒體,本實施例不加以限制。The carrier board 10 may have slots corresponding to the electronic component DUT for accommodating one or more electronic component DUTs. Here, FIG. 1 takes the carrier board 10 provided with an electronic component DUT as an example. In addition, the carrier board 10 may have a ground terminal 100, and the ground terminal 100 may be electrically connected to a piece of metal plate body. Those with ordinary knowledge in the relevant technical field should understand that the metal plate body can be regarded as a ground potential. In other words, when the carrier board 10 is provided with the electronic component DUT, there may be no potential difference between the carrier board 10 and the electronic component DUT, and the carrier board 10 and the electronic component DUT may both have a ground potential. In addition, the electronic component testing device 1 may also have a box body (not shown), and the carrier board 10 is detachably arranged in the box body. The box body may be made of metal to shield static electricity or magnetic field. The metal plate body to which the aforementioned ground terminal 100 is electrically connected may be a part of the box body or electrically connected to the box body, which is not limited in this embodiment.

於一個例子中,電子元件測試裝置1也可以包含多個盒體,而每個盒體可以像抽屜一般,可插拔地組合於電子元件測試裝置1中。在此,除了電子元件測試裝置1的載板10可以設置在盒體中,探針12也可以設置於盒體中,或者一部分的探針12延伸進盒體中,本實施例不加以限制。由於盒體能夠儘可能地阻斷外界的干擾,探針12在盒體內量測電子元件DUT的電性參數時,能夠有較高的準確度。此外,圖1還繪示了量測模組14,量測模組14可以設置於盒體中或者盒體外,本實施例不加以限制。實務上,量測模組14是用來接收並讀出探針12量測到的結果,本實施例也不限制量測模組14的種類,例如量測模組14可以是由一些用於信號處理的電路組合而成。In an example, the electronic component testing device 1 may also include a plurality of boxes, and each box may be like a drawer, and can be plugged into the electronic component testing device 1. Here, in addition to the carrier board 10 of the electronic component testing device 1 can be set in the box, the probe 12 can also be set in the box, or a part of the probe 12 extends into the box, which is not limited in this embodiment. Since the box body can block external interference as much as possible, the probe 12 can have a higher accuracy when measuring the electrical parameters of the electronic component DUT in the box body. In addition, FIG. 1 also shows the measurement module 14. The measurement module 14 can be installed in the box or outside the box, and this embodiment is not limited. In practice, the measurement module 14 is used to receive and read the results measured by the probe 12. This embodiment does not limit the type of the measurement module 14. For example, the measurement module 14 may be composed of some The signal processing circuit is combined.

以圖1的例子來說,探針12在結構上可以有接觸部120、信號端122和旁路端124。接觸部120用來接觸電子元件DUT,並從電子元件DUT上的接墊(pad)讀出信號。此外,信號端122用來電性連接量測模組14,而旁路端124用來電性連接接地端100。信號端122和接觸部120之間可以電性連接在一起,且信號端122和旁路端124之間可以電性連接在一起,而電子元件測試裝置1中可以定義有第一電流路徑C1和旁路電流路徑(第二電流路徑C2)。第一電流路徑C1可以是從量測模組14、探針12的信號端122、探針12的接觸部120、電子元件DUT到接地電位的電流路徑。此外,第二電流路徑C2可以是從量測模組14、探針12的信號端122、探針12的旁路端124到接地電位的電流路徑。雖然圖1繪示了探針12的旁路端124會經過接地端100電性連接到接地電位,但探針12也有可能透過其他方式電性連接到接地電位,本實施例不加以限制。實務上,第二電流路徑C2中還包含了常閉型開關126,常閉型開關126可以受控於處理單元16產生的控制信號,用來決定第二電流路徑C2是否導通。Taking the example of FIG. 1 as an example, the probe 12 may have a contact portion 120, a signal terminal 122 and a bypass terminal 124 in structure. The contact portion 120 is used to contact the electronic component DUT and read out signals from the pads on the electronic component DUT. In addition, the signal terminal 122 is used to electrically connect to the measurement module 14, and the bypass terminal 124 is used to electrically connect to the ground terminal 100. The signal terminal 122 and the contact portion 120 may be electrically connected together, and the signal terminal 122 and the bypass terminal 124 may be electrically connected together, and the electronic component testing device 1 may define a first current path C1 and Bypass the current path (second current path C2). The first current path C1 may be a current path from the measurement module 14, the signal terminal 122 of the probe 12, the contact portion 120 of the probe 12, and the electronic component DUT to the ground potential. In addition, the second current path C2 may be a current path from the measurement module 14, the signal terminal 122 of the probe 12, and the bypass terminal 124 of the probe 12 to the ground potential. Although FIG. 1 illustrates that the bypass terminal 124 of the probe 12 is electrically connected to the ground potential through the ground terminal 100, the probe 12 may also be electrically connected to the ground potential through other methods, which is not limited in this embodiment. In practice, the second current path C2 also includes a normally closed switch 126. The normally closed switch 126 can be controlled by a control signal generated by the processing unit 16 to determine whether the second current path C2 is turned on.

於一個例子中,常閉型開關126與一般的開關不同的是,常閉型開關126僅穩定於閉合狀態而不會穩定於開路狀態,例如常閉型開關126可以是一種空乏型(depletion type)的場效電晶體或一種常閉型繼電器。也就是說,常閉型開關126在沒有受到控制信號的觸發時,常閉型開關126會保持在閉合狀態並保持第二電流路徑C2導通。當常閉型開關126受到控制信號的觸發時,常閉型開關126才會切換到開路狀態並截止第二電流路徑C2。當控制信號結束,常閉型開關126又會切換回閉合狀態並導通第二電流路徑C2。值得一提的是,因為本實施例選用了常閉型開關126,不需要給常閉型開關126通電也讓第二電流路徑C2保持導通,因此本實施例的電子元件測試裝置1不論是否有上電都能夠保護電子元件DUT。In one example, the normally closed switch 126 is different from the general switch in that the normally closed switch 126 is only stable in the closed state but not in the open state. For example, the normally closed switch 126 may be a depletion type (depletion type). ) Field effect transistor or a normally closed relay. In other words, when the normally closed switch 126 is not triggered by the control signal, the normally closed switch 126 will remain in the closed state and keep the second current path C2 conducting. When the normally closed switch 126 is triggered by the control signal, the normally closed switch 126 will switch to the open state and cut off the second current path C2. When the control signal ends, the normally closed switch 126 will switch back to the closed state and conduct the second current path C2. It is worth mentioning that, because the normally closed switch 126 is selected in this embodiment, it is not necessary to energize the normally closed switch 126 and also keep the second current path C2 conducting. Therefore, the electronic component testing device 1 of this embodiment does not matter whether there is The electronic component DUT can be protected even when the power is turned on.

由於常閉型開關126的阻抗極小,當常閉型開關126在閉合狀態而第二電流路徑C2導通時,可以看成探針12會經由第二電流路徑C2短路到接地。此外,因第一電流路徑C1中會經過阻抗較大的電子元件DUT,使得第二電流路徑C2中的阻抗會遠小於第一電流路徑C1中的阻抗。於所屬技術領域具有通常知識者應可以明白,只要第二電流路徑C2是導通的,不論第一電流路徑C1是否導通,所有的電流或信號都會走第二電流路徑C2,而不走電子元件DUT所在的第一電流路徑C1。換句話說,當常閉型開關126在閉合狀態而第二電流路徑C2導通時,所有的電流(含靜電電流)或信號會旁路(bypass)電子元件DUT。當常閉型開關126在開路狀態而截止第二電流路徑C2時,由於僅剩下第一電流路徑C1,此時所有的電流或信號才會經過電子元件DUT。Since the impedance of the normally closed switch 126 is extremely small, when the normally closed switch 126 is in the closed state and the second current path C2 is turned on, it can be seen that the probe 12 is short-circuited to the ground via the second current path C2. In addition, since the first current path C1 passes through the electronic component DUT with a relatively large impedance, the impedance in the second current path C2 is much smaller than the impedance in the first current path C1. Those with ordinary knowledge in the technical field should understand that as long as the second current path C2 is conductive, no matter whether the first current path C1 is conductive or not, all currents or signals will go through the second current path C2 instead of the electronic component DUT. Where is the first current path C1. In other words, when the normally closed switch 126 is in the closed state and the second current path C2 is turned on, all currents (including electrostatic currents) or signals will bypass the electronic component DUT. When the normally closed switch 126 is in the open state and cuts off the second current path C2, since only the first current path C1 is left, all currents or signals will pass through the electronic component DUT at this time.

以實際的例子來說,在盒體尚未安置於電子元件測試裝置1內的適當位置時,有可能在搬運或者器械間的接觸時產生靜電電流,或者探針12剛剛接觸到電子元件DUT的瞬間,也有可能產生靜電電流。由圖2可知,本實施例在預設狀態下,第一電流路徑C1和第二電流路徑C2都是導通的。實務上,在探針12與電子元件DUT接觸之前,於第二電流路徑C2中的旁路端124會先電性連接到接地端100,並經過接地端100電性連接到接地電位。也就是說,如果探針12與電子元件DUT接觸時產生了靜電電流,因為第二電流路徑C2是短路到接地電位,所以靜電電流會由第二電流路徑C2導引接地,而可以避免靜電電流流經電子元件DUT。然而,由於很難確定靜電電流於何時或何處產生,因此電子元件測試裝置1可以做一些檢查與判斷,例如在盒體已經確實裝好且判斷電子元件DUT可以準備量測時,才會截止第二電流路徑C2。也就是說,在處理單元16產生所述控制信號之前,所有的電流或信號會由第二電流路徑C2旁路電子元件DUT。實務上,電子元件測試裝置1可以利用一個或多個偵測器(圖未示)來偵測盒體的使用狀態,使得處理單元16能夠基於盒體的使用狀態來判斷是否產生所述控制信號。Taking a practical example, when the box body has not been placed in the appropriate position in the electronic component testing device 1, it is possible that static current may be generated during handling or contact between equipment, or the moment the probe 12 just touches the electronic component DUT , There may also be electrostatic currents. It can be seen from FIG. 2 that in this embodiment, in the preset state, both the first current path C1 and the second current path C2 are conductive. In practice, before the probe 12 contacts the electronic component DUT, the bypass terminal 124 in the second current path C2 is electrically connected to the ground terminal 100 first, and is electrically connected to the ground potential through the ground terminal 100. In other words, if an electrostatic current is generated when the probe 12 is in contact with the electronic component DUT, because the second current path C2 is short-circuited to the ground potential, the electrostatic current will be guided to the ground by the second current path C2, and the electrostatic current can be avoided Flow through the electronic component DUT. However, since it is difficult to determine when or where the electrostatic current is generated, the electronic component testing device 1 can do some inspections and judgments, for example, it will cut off only when the box is actually installed and the electronic component DUT is judged to be ready for measurement. The second current path C2. That is, before the processing unit 16 generates the control signal, all currents or signals will bypass the electronic component DUT by the second current path C2. In practice, the electronic component testing device 1 can use one or more detectors (not shown) to detect the use state of the box, so that the processing unit 16 can determine whether to generate the control signal based on the use state of the box. .

於一個例子中,盒體可以具有滑軌,且電子元件測試裝置1可以設置有偵測器,來偵測盒體是否已經由滑軌推入到正確位置。例如,當盒體組裝於滑軌並推入電子元件測試裝置1後,偵測器可以產生對應的盒體狀態信號並指示盒體已經推到底。或者,電子元件測試裝置1可以設置有盒體的門檔,當盒體已經由滑軌推入到正確位置後,門檔可以固定盒體。當然,門檔有對應的偵測器,偵測器可以產生對應的盒體狀態信號並指示盒體已經推到底。在此,本實施例不限制上述兩種偵測器的數量,也不限制是否設置兩種偵測器或是擇一設置,於所屬技術領域可以自由設計。此外,當盒體被放置到正確位置後,電子元件測試裝置1可以鎖定盒體的位置,使盒體在完成量測之前不能再被抽出。於一個例子中,電子元件測試裝置1鎖定盒體位置的指令、電子元件測試裝置1等待一段預設時間或者電子元件測試裝置1達到預設溫度等,也都有可能被視為一種盒體狀態信號,本實施例不加以限制。In one example, the box body may have a slide rail, and the electronic component testing device 1 may be provided with a detector to detect whether the box body has been pushed into the correct position by the slide rail. For example, when the box body is assembled on the slide rail and pushed into the electronic component testing device 1, the detector can generate a corresponding box body state signal and indicate that the box body has been pushed to the bottom. Alternatively, the electronic component testing device 1 may be provided with a door stop of the box body. After the box body has been pushed into the correct position by the sliding rail, the door stop can fix the box body. Of course, the door stop has a corresponding detector, which can generate a corresponding box state signal and indicate that the box has been pushed to the bottom. Here, the present embodiment does not limit the number of the above-mentioned two types of detectors, nor does it limit whether to provide two types of detectors or choose one of them. It can be designed freely in the technical field. In addition, when the box body is placed in the correct position, the electronic component testing device 1 can lock the position of the box body so that the box body cannot be drawn out before the measurement is completed. In one example, the instruction of the electronic component testing device 1 to lock the position of the box body, the electronic component testing device 1 waiting for a preset period of time, or the electronic component testing device 1 reaching the preset temperature, etc., may also be regarded as a box state. The signal is not limited in this embodiment.

承接上述,處理單元16可以接收偵測器產生的盒體狀態信號,並判斷上述一個或多個的盒體狀態信號是否正常。當處理單元16判斷所述一個或多個的盒體狀態信號是正常的,則可以推論盒體已經確實裝好並且系統處於相對穩定的狀態。因為盒體本身具有屏蔽靜電或磁場的功能,電子元件DUT在盒體中且盒體裝設好之後,意味著電子元件DUT突然被靜電電流攻擊的機率很低。此時,處理單元16可以接著把常閉型開關126設定為開路狀態,再開始進行電子元件DUT的量測。如此一來,電子元件測試裝置1便可以提供電子元件DUT完整的防護靜電放電或突波的機制。Continuing the above, the processing unit 16 can receive the box state signal generated by the detector, and determine whether one or more of the above-mentioned box state signals are normal. When the processing unit 16 determines that the one or more box state signals are normal, it can be inferred that the box is indeed installed and the system is in a relatively stable state. Because the box itself has the function of shielding static electricity or magnetic fields, after the electronic component DUT is in the box and the box is installed, it means that the probability of the electronic component DUT suddenly being attacked by electrostatic current is very low. At this time, the processing unit 16 can then set the normally closed switch 126 to the open state, and then start the measurement of the electronic component DUT. In this way, the electronic component testing device 1 can provide a complete protection against electrostatic discharge or surge in the electronic component DUT.

綜上所述,本發明提供的電子元件測試裝置以及探針於量測電子元件時,可以預設提供阻抗較低的旁路電流路徑,讓靜電電流經由旁路電流路徑導引掉,而不會讓靜電電流攻擊電子元件。並且,本發明提供的電子元件測試裝置可以檢查系統是否在一個穩定的狀態,只有在系統穩定時才會切開旁路電流路徑,以減少電子元件於測試時被靜電放電破壞的可能性。In summary, the electronic component testing device and probe provided by the present invention can provide a bypass current path with a lower impedance in advance when measuring electronic components, so that the electrostatic current can be guided away through the bypass current path instead of Electrostatic current can attack electronic components. Moreover, the electronic component testing device provided by the present invention can check whether the system is in a stable state, and the bypass current path is cut only when the system is stable, so as to reduce the possibility of electronic components being damaged by electrostatic discharge during testing.

1:電子元件測試裝置 10:載板 100:接地端 12:探針 120:接觸部 122:信號端 124:旁路端 126:常閉型開關 14:量測模組 16:處理單元 C1、C2:電流路徑 DUT:電子元件 1: Electronic component testing device 10: Carrier board 100: Ground terminal 12: Probe 120: contact part 122: signal end 124: Bypass end 126: Normally closed switch 14: Measurement module 16: processing unit C1, C2: current path DUT: electronic components

圖1係繪示依據本發明一實施例之電子元件測試裝置的結構示意圖。FIG. 1 is a schematic diagram showing the structure of an electronic component testing device according to an embodiment of the present invention.

圖2係繪示依據本發明一實施例之電子元件測試裝置的電路示意圖。FIG. 2 is a schematic circuit diagram of an electronic component testing device according to an embodiment of the present invention.

no

1:電子元件測試裝置 1: Electronic component testing device

10:載板 10: Carrier board

100:接地端 100: Ground terminal

12:探針 12: Probe

120:接觸部 120: contact part

122:信號端 122: signal end

124:旁路端 124: Bypass end

14:量測模組 14: Measurement module

16:處理單元 16: processing unit

DUT:電子元件 DUT: electronic components

Claims (8)

一種電子元件測試裝置,包含:一盒體;一偵測器,用以偵測該盒體的使用狀態,據以產生一盒體狀態信號;一載板,可拆卸地設置於該盒體中,用以承載一電子元件;一探針,包含:一接觸部,電性連接一量測模組,並用以接觸該電子元件;以及一常閉型開關,電性連接該量測模組,並受控於一控制信號;以及一處理單元,判斷該盒體狀態信號是否正常,當該盒體狀態信號正常,則該處理單元提供該控制信號;其中當該常閉型開關未收到該控制信號時,該常閉型開關提供一旁路電流路徑,該旁路電流路徑用以將該量測模組導通至一旁路端;其中當該常閉型開關收到該控制信號時,該常閉型開關不提供該旁路電流路徑。 An electronic component testing device, comprising: a box body; a detector for detecting the use state of the box body to generate a box body state signal accordingly; a carrier board detachably arranged in the box body , Used to carry an electronic component; a probe, including: a contact part, electrically connected to a measurement module, and used to contact the electronic component; and a normally closed switch, electrically connected to the measurement module, And controlled by a control signal; and a processing unit, which determines whether the box state signal is normal, and when the box state signal is normal, the processing unit provides the control signal; wherein when the normally closed switch does not receive the When the control signal, the normally closed switch provides a bypass current path, the bypass current path is used to conduct the measurement module to a bypass terminal; wherein when the normally closed switch receives the control signal, the normally closed switch Closed switches do not provide this bypass current path. 如請求項1所述之電子元件測試裝置,其中於該旁路端電性連接一接地端後,該接觸部接觸該電子元件。 The electronic component testing device according to claim 1, wherein after the bypass terminal is electrically connected to a ground terminal, the contact portion contacts the electronic component. 如請求項2所述之電子元件測試裝置,其中該載板電性連接該接地端。 The electronic component testing device according to claim 2, wherein the carrier board is electrically connected to the ground terminal. 如請求項1所述之電子元件測試裝置,其中該常閉型開關為一空乏型場效電晶體或一常閉型繼電器。 The electronic component testing device according to claim 1, wherein the normally closed switch is a depleted field effect transistor or a normally closed relay. 如請求項1所述之電子元件測試裝置,其中該盒體係由金屬製成,用以屏蔽靜電或磁場。 The electronic component testing device according to claim 1, wherein the box system is made of metal to shield static electricity or magnetic fields. 一種探針,用於量測一電子元件,該電子元件承載於一載板,該載板可拆卸地設置於一盒體中,一偵測器偵測該盒體的使用狀態,據以產生一盒體狀態信號,一處理單元判斷該盒體狀態信號是否正常,當該盒體狀態信號正常,則該處理單元提供一控制信號,所述探針包含:一第一電流路徑,電性連接於一信號端和一接觸部之間,該接觸部用以電性連接一電子元件;一第二電流路徑,電性連接於該信號端和一旁路端之間,該第二電流路徑中的阻抗小於該第一電流路徑中的阻抗;以及一常閉型開關,設置於該第二電流路徑中,並受控於該控制信號;其中當該常閉型開關未收到該控制信號時,該第一電流路徑與該第二電流路徑同時導通;其中當該常閉型開關收到該控制信號時,僅該第一電流路徑導通。 A probe for measuring an electronic component, the electronic component is carried on a carrier board, the carrier board is detachably arranged in a box body, a detector detects the use state of the box body, and generates A box state signal. A processing unit determines whether the box state signal is normal. When the box state signal is normal, the processing unit provides a control signal. The probe includes: a first current path, which is electrically connected Between a signal terminal and a contact part, the contact part is used to electrically connect an electronic component; a second current path is electrically connected between the signal terminal and a bypass terminal, and the second current path is The impedance is smaller than the impedance in the first current path; and a normally closed switch is arranged in the second current path and controlled by the control signal; wherein when the normally closed switch does not receive the control signal, The first current path and the second current path are conducted simultaneously; wherein when the normally closed switch receives the control signal, only the first current path is conducted. 如請求項6所述之探針,其中該常閉型開關為一空乏型場效電晶體或一常閉型繼電器。 The probe according to claim 6, wherein the normally closed switch is a depleted field effect transistor or a normally closed relay. 如請求項6所述之探針,其中該旁路端相鄰該接觸部,且該旁路端用以電性連接一接地端。 The probe according to claim 6, wherein the bypass end is adjacent to the contact portion, and the bypass end is used to electrically connect to a ground end.
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WO2016180771A1 (en) * 2015-05-11 2016-11-17 Robert Bosch Gmbh Device and method for detecting a number of electrostatic discharges

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
US5523699A (en) * 1992-06-03 1996-06-04 Seiko Epson Corporation Method and apparatus for testing semiconductor device
US20060114010A1 (en) * 2001-06-25 2006-06-01 Byrd Phillip E Method to prevent damage to probe card
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WO2016180771A1 (en) * 2015-05-11 2016-11-17 Robert Bosch Gmbh Device and method for detecting a number of electrostatic discharges
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